CN206450964U - A kind of vertical adjustment locking device - Google Patents
A kind of vertical adjustment locking device Download PDFInfo
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- CN206450964U CN206450964U CN201621157868.3U CN201621157868U CN206450964U CN 206450964 U CN206450964 U CN 206450964U CN 201621157868 U CN201621157868 U CN 201621157868U CN 206450964 U CN206450964 U CN 206450964U
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- main substrate
- adjustment
- locking device
- locking
- connector
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Abstract
The utility model provides a kind of vertical adjustment locking device, including frame plate connector, mobile jib, adjustment element, main substrate connector and locking element：The frame plate connector connects a frame plate and the mobile jib；The adjustment element is connected with the mobile jib；The main substrate connector is fixed on a main substrate；The locking element is connected with the main substrate connector, and adjustment element and main substrate connector are locked.The utility model can eliminate the residual stress of main substrate in locking, lift the stability of focusing and leveling, improve operating efficiency.
Description
Technical field
The utility model is related to technical field of manufacturing semiconductors, more particularly to a kind of to be used to install fixed focusing and leveling sensing
The vertical adjustment locking device of device.
Background technology
In the projection lithography technology of super large IC manufacturing, silicon chip surface is reduced usually using focusing and leveling sensor
Influence of the pattern to projection objective focal plane, it is ensured that lithographic results.In the prior art, focusing and leveling sensor, which is typically mounted on, holds
Below the main substrate for carrying projection objective, it is fixed together, is made in most products with main substrate using 3 points or four point attachment method
Focal plane and projection objective focal plane are adjusted with screw thread pair adjustment mechanism, it is ensured that the adjustment focal plane and projection thing of focusing and leveling sensor
The registration of mirror focal plane.
Existing screw thread pair adjustment mechanism mainly has single thread adjustment mechanism and difference adjustment mechanism, in actual use, this
There are some problems in two kinds of adjustment mechanisms, specific as follows in focusing and leveling：
1st, vertical after adjusting to lock, Fig. 1 is a difference adjusting device schematic diagram, can only be adjusted after the completion of adjustment by focusing
Flat main substrate self gravitation and auxiliary bindiny mechanism auxiliary locking, can cause it is vertical can not lock, this kind of scheme is in focusing and leveling
The not high fashion of stability requirement can be used, it is impossible to which meeting will to the higher and higher adjustment technology of focusing and leveling in integrated circuit technology
Ask；
2nd, there is certain angle due to being adjusted structure and adjustment mechanism after adjusting, cause to deposit in the adjusting apparatus after locking
In stress.Fig. 2 is the secondary adjusting apparatus schematic diagram of a single thread, and adjustment completes rear thread and is pressed on focusing and leveling main substrate, and
In use, it is parallel between focusing and leveling main substrate face and complete machine frame surface to be done well, should when using screw-threaded coupling
There is residual stress in adjustment mechanism, focal plane drift phenomenon occurs when using with focusing and leveling main substrate junction.Simultaneously when folder
When angle is sufficiently large, focal plane change during locking is caused to cause focal plane adjustment work repeatedly, and if the main base of focusing and leveling in use
When plate face and the poor complete machine framework mounting surface depth of parallelism, during adjustment structure locking focusing and leveling focal plane can be caused to change, meeting
So that adjustment work is repeatedly, operating efficiency is influenceed.
Therefore, a kind of vertical adjustment locking device of focusing and leveling is needed badly to solve the above problems.
Utility model content
The purpose of this utility model is to provide a kind of vertical adjustment locking device to improve the stability and efficiency of adjustment.
A kind of vertical adjustment locking device provided in the utility model, including frame plate connector, mobile jib, adjustment member
Part, main substrate connector and the first locking element：
The frame plate connector connects a frame plate and the mobile jib；
The adjustment element is connected with the mobile jib；
The main substrate connector is fixed on a main substrate；
First locking element is connected with the main substrate connector, and adjustment element and main substrate connector are locked
Tightly.
Optionally, the mobile jib is driving screw, and the adjustment element is ball nut, and first locking element is first
Locking nut, the ball nut is threadedly coupled with the driving screw, and the main substrate connector is set in the ball nut
On, the ball nut is connected by first locking nut and main substrate connector threaded connection with the main substrate
Part is locked.
Optionally, the frame plate connector is provided with the first internal thread, and the driving screw is provided with the first external screw thread, wherein institute
The first external screw thread is stated to match with the first internal thread of frame plate connector.
Optionally, the ball nut is provided with the second internal thread, and the driving screw is provided with second described in the second external screw thread
Screw thread is matched with the second external screw thread of the driving screw.
Optionally, first locking nut is provided with the 3rd internal thread, and the main substrate connector is provided with the 3rd external screw thread,
3rd internal thread is matched with the 3rd external screw thread.
Optionally, the vertical adjustment locking device also includes ball cup and the second locking element, the second locking member
Part locks the driving screw and the frame plate connector, and the ball cup is enclosed on the driving screw, the ball cup with
Curved face contact between the driving screw, the driving screw is rotated freely in the ball cup.
Optionally, first locking nut includes the first adjustment portion, the second adjustment portion and depressed part, first adjustment
Portion and the second adjustment portion are located at the depressed part both sides.
Optionally, first adjustment portion contains a curved surface, and the ball nut contains a sphere, the sphere
Linear contact lay is constituted with the curved surface.
Optionally, it is characterised in that the thickness of second adjustment portion is less than first adjustment portion.
Optionally, the main substrate connector contains a lug boss, and the 3rd external screw thread is located on the lug boss, institute
State the 3rd internal thread to be located in second adjustment portion, the second adjustment portion screw thread of the lug boss and first locking nut
Connection.
Optionally, multiple devices connect same frame plate and same main substrate.
Vertical adjustment locking device of the present utility model, by locking element by adjustment element and main substrate connector pressure
Tightly, so as to realize the locking of main substrate connector and main substrate.3 groups can be made in the vertical adjustment locking device combination simultaneously
With the same main substrate of connection and same frame plate, 3 groups of devices respectively lock the free degree in tri- directions of X, Y, Z, disappear
Except the deviation of actual focusing and leveling focal plane and theoretical focal plane, so as to be not in residual stress on main substrate, focusing is improved
The stability of leveling, improves operating efficiency.
Brief description of the drawings
Fig. 1 is existing difference adjusting device schematic diagram；
Fig. 2 is the secondary adjusting apparatus schematic diagram of an existing single thread；
Fig. 3 is the plane structure chart of the vertical adjustment locking device of the utility model embodiment one；
Fig. 4 is the partial enlarged drawing at dotted line frame in Fig. 3；
Fig. 5 is the tomograph of the vertical adjustment locking device of the utility model embodiment one；
Fig. 6 is schematic diagram when vertical adjustment locking device is applied in combination described in three groups.
Label in figure：1- main substrates；2- frame plates；3- frame plate connectors；4- mobile jibs；5- ball cups；6- second is locked
Element；7- ball nuts；8- main substrate connectors；The locking nuts of 9- first；81- lug bosses；The adjustment portions of 91- first；92- is recessed
Portion；The adjustment portions of 93- second.
Embodiment
Below in conjunction with the drawings and specific embodiments to the utility model proposes vertical adjustment locking device make further it is detailed
Describe in detail bright.According to following explanation and claims, advantages and features of the present utility model will become apparent from.It should be noted that, it is attached
Figure is using very simplified form and uses non-accurately ratio, only new conveniently, lucidly to aid in illustrating this practicality
The purpose of type embodiment.
Vertical adjustment locking device of the present utility model, including frame plate connector, mobile jib, adjustment element, main substrate connect
Fitting and the first locking element：
The frame plate connector connects a frame plate and the mobile jib；
The adjustment element is connected with the mobile jib；
The main substrate connector is fixed on a main substrate；
First locking element is connected with the main substrate connector, and adjustment element and main substrate connector are locked
Tightly.
Vertical adjustment locking device of the present utility model, can be residual on elimination of level direction while vertical locking is realized
Remaining stress, lifts the stability of focusing and leveling, improves operating efficiency.
Difference adjusting device of the present utility model is now illustrated with a specific embodiment:
Vertical adjustment locking device of the present utility model, including frame plate connector, mobile jib, adjustment element, main substrate connect
Fitting and locking element：
The frame plate connector connects a frame plate and the mobile jib；
The adjustment element is connected with the mobile jib；
The main substrate connector is fixed on a main substrate；
First locking element is connected with the main substrate connector, and adjustment element and main substrate connector are locked
Tightly.
It is preferred that, the mobile jib is driving screw, and the adjustment element is ball nut, and the locking element is the first locking
Nut, the ball nut is threadedly coupled with the driving screw, first locking nut and the main substrate connector screw thread
Connection.
Fig. 3 is referred to, the vertical adjustment locking device of the present embodiment is used to connect frame plate 2 and main substrate 1, described to hang down
Include frame plate connector 3, driving screw 4, the locking element 6 of ball cup 5 and second, in addition to bulb spiral shell to adjustment locking device
Mother 7, the locking nut 9 of main substrate connector 8 and first；
The connection framework plate 2 of frame plate connector 3 and driving screw 4；
The ball nut 7 is threadedly coupled with the driving screw 4；
The main substrate connector fixes 8 in the main substrate 1；
First locking nut 9 is threadedly coupled with main substrate connector 8.
The frame plate connector 3 is connected with frame plate 2, while the inner surface of frame plate connector 3 is provided with spiral shell in first
Line (is not indicated) in figure, and the end of driving screw 4 is provided with outside the first external screw thread (not indicated in figure), first internal thread and first
Screw thread matches, i.e., the pitch of described first internal thread is equal to the described first externally threaded pitch, so the frame plate is connected
Part 3 and driving screw 4 are threadedly coupled；Second locking element 6 locks driving screw 4 with frame plate connector 3, it is preferred that institute
The second locking element is stated for the second locking nut.
The inner surface of ball nut 7 is provided with the second internal thread (not indicated in figure), and the middle part of driving screw 4 is provided with second
External screw thread (is not indicated) in figure, and second internal thread and the second external screw thread match, i.e., pitch of described second internal thread etc.
In the described second externally threaded pitch, so the ball nut 7 is threadedly coupled with the driving screw 4, the main substrate connection
Part is set on the ball nut.
The inner surface of first locking nut 9 is provided with the 3rd internal thread, and the main substrate connector 8 is provided with the 3rd outer spiral shell
Line, the 3rd internal thread and the 3rd external screw thread match, i.e., the pitch of described 3rd internal thread is equal to the 3rd external screw thread
Pitch, so first locking nut 9 is threadedly coupled with main substrate connector 8, the ball nut and main substrate are connected
Fitting is locked.
The ball cup 5 is enclosed on the driving screw 4, and curved face contact between the ball cup and the driving screw is described
The bulb part of driving screw 4 can be rotated freely in ball cup 5.
The frame plate connector 3 contains screw, is connected using screw with frame plate, and the frame plate connector can also
Using neck, riveting etc. is connected with frame plate.
The main substrate connector 8 contains screw, is connected using screw with main substrate, and the main substrate connector can also
Using neck, riveting etc. is connected with main substrate.
Fig. 4 is refer to, Fig. 4 is the partial enlarged drawing of vertical adjustment locking device, and first locking nut 9 is provided with first
Adjustment portion 91, the adjustment portion 93 of depressed part 92 and second, the depressed part 92 connect the adjustment portion of the first adjustment portion 91 and second
93, the thickness of first adjustment portion 91 is more than the thickness of second adjustment portion 93, is easy to adjust the pine of the first locking nut
Tightness；First adjustment portion 91 is contacted with ball nut 7, and ball nut 7 contains a sphere, and the first adjustment portion 91 is bent containing one
Face, constitutes linear contact lay between the two；The inner surface of second adjustment portion 93 have described in three internal threads (do not marked in figure
Show)；The main substrate connector contains a lug boss 81, and the upper outer surface of lug boss 81 is provided with the 3rd external screw thread (figure
In do not indicate), the second adjustment portion 93 of the lug boss 81 and first locking nut 9 is connected through a screw thread.
First locking nut 9 is contacted by the first adjustment portion 91 with ball nut 7, passes through the second adjustment portion 93 and master
Substrate connection part 8 is connected, and is compressed first locking nut 9, the main substrate connector 8 is connect with the ball nut 7
Touch, ball nut 7 is locked with main substrate connector 8, so that main substrate connector 8 is also locked with main substrate 1, realized vertical
Locked to the connection of adjustment locking device and main substrate, so as to improve the stability of focusing and leveling.
Preferably, first locking nut 9 is approximately a hollow circular cylinder, the second adjustment portion of the hollow circular cylinder
93 inner surface is provided with the 3rd internal thread, is matched with the 3rd external screw thread of the main substrate connector 8；The hollow circuit cylinder
The first adjustment portion 91 and the ball nut 7 of body constitute linear contact lay.
Please continue to refer to Fig. 3, because the second locking nut 6 can adjust the elastic of driving screw 4 and frame plate connector 3
Degree, the elasticity that the first locking nut 9 can be connected with adjusting ball head nut 7 with main substrate connector 8, while ball nut 7 and
Driving screw 4 is threadedly coupled, so when focusing and leveling focal plane and theoretical focal plane have deviation, first unclamping the He of the second locking nut 6
First locking nut 9, rotates driving screw 4, again locks the second locking nut 6 and the first locking nut 9 after completing adjustment, so that
Realize vertical adjustment and locking.
Fig. 5 is the tomograph of vertical adjustment locking device, by Fig. 5, can become apparent from getting information about this reality
With the vertical adjustment locking device of new offer, due to the planar junction of structure member and Fig. 3 vertical adjustment locking device provided
Composition is the same, is no longer illustrated here.
In actual use, 3 groups the vertical adjustment locking device can be applied in combination, as shown in fig. 6,3 groups of devices
Combine, connection same main substrate 1 and same frame plate 2,3 groups of devices respectively by tri- directions of X, Y, Z from
By degree locking, the deviation of actual focal plane and theoretical focal plane is eliminated, so as to be not in residual stress on main substrate, adjusts focusing
It is flat to obtain more preferable effect.
The utility model is so that 3 groups of vertical adjustment locking devices are used in combination as an example, likewise, being somebody's turn to do comprising multiple
Vertical adjustment locking device combination, which is used together, falls within protection domain of the present utility model.
Foregoing description is only the description to the utility model preferred embodiment, not to any limit of the utility model scope
Fixed, those skilled in the art are it is contemplated that can also be with modes such as clamping, pin, chains come instead of above-mentioned threaded connection, mobile jib
Can also can simultaneously have screw thread and groove, adjustment element can also be the elements such as gear, and locking element also may be used with fluted
Also be neck, by elements such as pin, chains, above change belongs to protection domain of the present utility model.
Claims (11)
1. a kind of vertical adjustment locking device, it is characterised in that connect including frame plate connector, mobile jib, adjustment element, main substrate
Fitting and the first locking element：
The frame plate connector connects a frame plate and the mobile jib；
The adjustment element is connected with the mobile jib；
The main substrate connector is fixed on a main substrate；
First locking element is connected with the main substrate connector, and adjustment element and main substrate connector are locked.
2. vertical adjustment locking device as claimed in claim 1, it is characterised in that the mobile jib is driving screw, the adjustment
Element is ball nut, and first locking element is the first locking nut, and the ball nut connects with the driving screw screw thread
Connect, the main substrate connector is set on the ball nut, first locking nut and the main substrate connector spiral shell
Line is connected, and the ball nut and the main substrate connector are locked.
3. vertical adjustment locking device as claimed in claim 2, it is characterised in that the frame plate connector is provided with first
Screw thread, the driving screw is provided with the first external screw thread, wherein the first internal thread of first external screw thread and frame plate connector
Match somebody with somebody.
4. vertical adjustment locking device as claimed in claim 2, it is characterised in that the ball nut is provided with spiral shell in second
Line, the driving screw is provided with the second external screw thread, and second internal thread is matched with the second external screw thread of the driving screw.
5. vertical adjustment locking device as claimed in claim 2, it is characterised in that first locking nut is provided with the 3rd
Screw thread, the main substrate connector is provided with the 3rd external screw thread, and the 3rd internal thread is matched with the 3rd external screw thread.
6. vertical adjustment locking device as claimed in claim 2, it is characterised in that the vertical adjustment locking device also includes
Ball cup and the second locking element, second locking element lock the driving screw and the frame plate connector, described
Ball cup is enclosed on the driving screw, curved face contact between the ball cup and the driving screw, and the driving screw is in the ball
Rotated freely in headstock.
7. vertical adjustment locking device as claimed in claim 5, it is characterised in that first locking nut includes first and adjusted
Whole, the second adjustment portion and depressed part, first adjustment portion and the second adjustment portion are located at the depressed part both sides.
8. vertical adjustment locking device as claimed in claim 7, it is characterised in that first adjustment portion contains a curved surface,
The ball nut contains a sphere, and the sphere and the curved surface constitute linear contact lay.
9. vertical adjustment locking device as claimed in claim 7, it is characterised in that the thickness of second adjustment portion is less than institute
State the first adjustment portion.
10. vertical adjustment locking device as claimed in claim 7, it is characterised in that it is convex that the main substrate connector contains one
The portion of rising, the 3rd external screw thread is located on the lug boss, and the 3rd internal thread is located in second adjustment portion, described convex
The portion of rising is threadedly coupled with the second adjustment portion of first locking nut.
11. vertical adjustment locking device as claimed in claim 1, it is characterised in that multiple devices connect same frame plate
With same main substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621157868.3U CN206450964U (en) | 2016-10-31 | 2016-10-31 | A kind of vertical adjustment locking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621157868.3U CN206450964U (en) | 2016-10-31 | 2016-10-31 | A kind of vertical adjustment locking device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206450964U true CN206450964U (en) | 2017-08-29 |
Family
ID=59661217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621157868.3U Active CN206450964U (en) | 2016-10-31 | 2016-10-31 | A kind of vertical adjustment locking device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206450964U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111842884A (en) * | 2019-04-25 | 2020-10-30 | 武汉光谷航天三江激光产业技术研究院有限公司 | Adjusting device and laser printing equipment |
-
2016
- 2016-10-31 CN CN201621157868.3U patent/CN206450964U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111842884A (en) * | 2019-04-25 | 2020-10-30 | 武汉光谷航天三江激光产业技术研究院有限公司 | Adjusting device and laser printing equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder |