CN102623375A - A Z-axis lifting mechanism capable of balancing the stressed state - Google Patents

Abstract

A Z-axis lifting mechanism with a stress state balancing function relates to the manufacturing field of semiconductor silicon wafer transmission robots, and solves the problems of a conventional Z-axis transmission lifting mechanism, such as poor structural stress state and larger micro-deformation of ball guide rails. The Z-axis lifting mechanism with the stress state balancing function adopts the structure that an upper mounting cover and a lower mounting cover are oppositely arranged up and down, a Z-axis driving device component is connected with a lower mounting seat, a pre-tightening wheel support frame is sleeved on the Z-axis driving device component and connected with the lower mounting seat, three lead screw transmission mechanisms are uniformly distributed between the upper mounting cover and the lower mounting cover along the same circumference, the center end of a synchronous gear transmission belt is sleeved on a synchronous transmission driving gear, three outer side ends of the synchronous gear transmission belt are respectively sleeved on three synchronous transmission driven gears, three ball screws are respectively in threaded connected with three turn-screws; a lower deep-groove ball bearing is mounted in a lower bearing mounting hole of the lower mounting seat, and an upper deep-groove ball bearing is mounted in an upper bearing mounting hole. The Z-axis lifting mechanism provided by the invention is used on a silicon chip transmission robot.

Description

A Z-axis lifting mechanism capable of balancing the stressed state

technical field

The invention relates to the manufacturing field of a semiconductor silicon wafer transmission robot, in particular to a Z-axis transmission lifting mechanism on a silicon wafer transmission robot.

Background technique

In the Z-axis transmission lifting mechanism of the silicon wafer transfer robot, the column type Z-axis transmission lifting mechanism is mostly used, that is, the ball guide rail is used as the movement reference of the Z-axis lifting, and the ball guide rail is installed on the reference surface of the column. But there is following shortcoming in this transmission mechanism: the one, the stressed state of structure is bad. The force direction of the column-type Z-axis transmission lifting mechanism is along the motion axis of the ball guide rail, and the best force direction of the guide rail is in the vertical direction to the plane of the ball guide rail; The block is transmitted to the ball guide rail in the form of a cantilever beam. In addition to the normal gravity, the ball guide rail also bears a large overturning moment, which causes a large microscopic deformation of the ball guide rail, which affects the flexibility of movement in the slightest and shortens in severe cases. The service life of the ball guide rail; the third is that there are complex shapes between the installation surface of the ball guide rail and the lateral positioning surface, between the upper and lower installation positioning surfaces of the column, and between the installation surface of the ball guide rail and the installation datum of the ball screw. Due to the positional tolerance relationship, the processing technology of the column is complicated, the yield rate is low, and the processing cost is high; Fourth, because the weight of the column is generally more than ten kilograms, it is installed on one side of the chassis, which inevitably causes the center of gravity to be unstable. The main frame is overturned; the fifth is because the contact area between the upper and lower mounting surfaces of the column and the upper and lower mounting plates of the main frame is very large, making it difficult to adjust during assembly, which takes time and effort.

Contents of the invention

The purpose of the present invention is to solve the problem that the Z-axis drive lifting mechanism of the existing silicon wafer transfer robot has poor structural stress state, large microscopic deformation of the ball guide rail, short service life of the ball guide rail, complicated column processing technology, and low yield. Low, unstable center of gravity, prone to overturning of the main machine, difficult to adjust during assembly, provide a Z-axis lifting mechanism that can balance the force state.

The present invention includes a lower mounting base, a Z-axis driving device assembly, a pre-tensioner support mechanism, a synchronous gear transmission belt, a screw nut transmission mechanism, an upper mounting cover, two connecting plates, and three screw transmission mechanisms. The Z-axis driving device assembly includes Z-axis motor base, encoder positioning tube, encoder, Z-axis servo motor, friction brake, synchronous transmission driving gear and connecting plate, the upper end of the Z-axis servo motor shaft is the output shaft, and the lower end is the motor shaft. The Z-axis servo motor is installed in the Z-axis motor base, and the output shaft of the Z-axis servo motor is located outside the Z-axis motor base. The upper end of the output shaft is provided with transmission external teeth. The top is installed on the output shaft of the Z-axis servo motor in turn, and the central inner gear of the synchronous transmission driving gear meshes with the transmission external gear, the connecting plate is installed on the end face of the synchronous transmission driving gear, and the encoder is arranged on the Z-axis motor seat Inside, and the encoder is installed on the motor shaft of the Z-axis servo motor, the encoder positioning tube is set outside the Z-axis motor base, and the encoder positioning tube is set on the elastic positioning piece on the encoder and the lower end of the Z-axis motor base. Between the flanges, the pretension wheel support mechanism includes a pretension wheel support frame, a pretension wheel support frame upper cover, and three pretension wheel sliding frame mechanisms, and the pretension wheel support frame upper cover is installed on the pretension wheel support frame On the end face, three pretension wheel sliding frame mechanisms are evenly arranged on the upper end surface of the pretension wheel support frame upper cover, and each pretension wheel sliding frame mechanism is installed on the pretension wheel support frame upper cover, each pretension wheel The tensioner sliding frame mechanism includes the outer plate of the pretensioner positioning block, the pretensioning wheel positioning block, the pretensioning wheel positioning slider, the pretensioning wheel turret support shaft, the pretensioning wheel turret, two thrust jacking screws, two locks Tighten the nut and two pre-tightening wheel mechanisms, the upper end surface of the pre-tightening wheel positioning block is provided with a T-shaped slot, and the lower end of the pre-tightening wheel positioning slider is provided with a T-shaped head that matches the T-shaped slot. The T-shaped slot is matched with the installation, and the outer plate of the pre-tensioner positioning block is installed on the outer end surface of the pre-tensioning wheel positioning block. The hole is facing the end face of the T-shaped head, and the side of the pretensioner positioning slider facing the center of the Z axis is provided with a turret mounting groove, and the pretensioning wheel positioning slider on the upper side of the turret mounting groove is provided with a rotation axis light. The pretension wheel positioning slider on the lower side of the turret installation groove is provided with a threaded hole for the rotation shaft, the pretension wheel turret is set in the turret installation groove, and the pretension wheel turret support shaft passes through the light hole of the rotation axis and The pretension wheel turret is threadedly connected with the threaded hole of the rotating shaft, and the two symmetrical convex circles on the pretension wheel turret are respectively equipped with a pretension wheel mechanism, and the pretension wheel shaft on the pretension wheel mechanism is installed on the corresponding In the concave hole on the pretensioner turret, each screw transmission mechanism includes a lower bearing retaining ring, a lower shaft elastic retaining ring, a lower deep groove ball bearing, a thrust bearing seat, a thrust bearing, and a thrust bearing seat Cover, synchronous transmission passive gear, transmission screw shaft, upper bearing retaining ring, upper deep groove ball bearing, upper shaft circlip, the upper part of the transmission screw shaft is a transmission screw, and the upper part of the transmission screw shaft The lower part is the optical shaft, on which the synchronous transmission passive gear is installed, and the upper bearing retaining ring, the upper deep groove ball bearing and the upper shaft are equipped with springs. The circlip is installed on the upper end of the transmission screw shaft from bottom to top in sequence, and the thrust bearing housing cover, thrust bearing, thrust bearing seat, lower deep groove ball bearing, elastic circlip for the lower shaft and lower bearing retaining ring are installed from the top It is installed at the lower end of the transmission screw shaft in turn. The nut transmission mechanism includes a Z-axis movable bracket and three ball nuts. The Z-axis movable bracket consists of a center plate and three nut brackets. The female brackets are evenly distributed along the outer surface of the center plate, and each nut bracket has a nut mounting hole on the outer end surface, and each nut mounting hole is equipped with a ball nut. The shaft center is equipped with a threaded buckle that matches the drive screw, and the upper mounting cover and the lower mounting base are set up and down. Three upper bearing installation holes are evenly distributed along the same circumference on the end face of the upper bearing, and the three upper bearing installation holes are directly opposite to the three lower bearing installation holes. The screw nut transmission mechanism, two connecting plates and three screw transmission mechanisms are all arranged between the upper mounting cover and the lower mounting base, the Z-axis motor base is connected with the lower mounting base, and the pretensioner support frame is set on the Z-axis driving device On the assembly, and the pretensioner support frame is connected with the lower mounting seat, and the three screw transmission mechanisms are evenly arranged between the upper mounting cover and the lower mounting seat along the same circumference, and the central end of the synchronous tooth transmission belt is set on the synchronous drive driving gear On the top, the three outer ends of the synchronous transmission belt are respectively set on the three synchronous transmission driven gears, the six pre-tensioner mechanisms on the pre-tensioner support mechanism are attached to the tooth surface of the synchronous transmission driving gear, and the Z-axis movable support The frame is set above the pre-tension wheel support mechanism, and the three ball nuts on the pre-tension wheel support mechanism are respectively threaded with the three transmission screws, and the lower deep groove ball bearings on each screw transmission mechanism are installed on the bottom. In the corresponding lower bearing mounting holes of the seat, the upper deep groove ball bearings on each screw transmission mechanism are installed in the corresponding upper bearing mounting holes, and the two connecting plates are arranged symmetrically with the axis of the Z-axis servo motor.

Compared with the prior art, the present invention has the following beneficial effects: 1. Compared with the column-type Z-axis transmission mechanism, the present invention passes the rotary motion output by the Z-axis servo motor 15 through three lead screw transmission mechanisms 4 arranged at 120° Driven with the ball screw nut 61, the rotary motion output by the Z-axis servo motor 15 is converted into the linear motion of the ball screw nut 61, so as to realize the upward or downward linear motion of the Z-axis movable bracket 59 along the Z-axis direction. The transmission of the present invention The principle has very high transmission precision, and the invention only bears the weight of the upper mechanism evenly, without generating extra turning moment due to uneven force, which greatly improves the force state and makes the Z-axis transmission mechanism more reasonable . 2. Since the Z-axis driving device assembly 2 of the present invention is designed in the center, three lead screw transmission mechanisms 4 that are evenly distributed at 120° make the load capacity of the entire system greatly improved, so the Z-axis lifting mechanism of the present invention is loaded Strong capacity, suitable for transporting heavy and bulky items. 3. Since the heavy column is eliminated in the present invention, and the load is evenly distributed along the circumference, the unstable problem of the center of gravity easily produced by the column is corrected, and the center of gravity of the main engine is stabilized. 4. Since the key mounting holes of the Z-axis lifting mechanism of the present invention all stipulate corresponding processing requirements at the same station, the adjustment process is relatively simple during assembly.

Description of drawings

1 is a perspective view of the overall structure of the Z-axis lifting mechanism of the present invention; FIG. 2 is an exploded perspective view of the Z-axis lifting mechanism of the present invention; FIG. 3 is a structural perspective view of the Z-axis drive assembly 2; FIG. 4 is a Z-axis drive assembly 2 Figure 5 is a three-dimensional exploded view of the pre-tensioner support mechanism 3; Figure 6 is an exploded three-dimensional view of the No. 27 part of the pre-tensioner carriage mechanism; Figure 7 is an exploded three-dimensional view of the lead screw transmission mechanism 4; Figure 8 It is a three-dimensional exploded view of the nut drive mechanism 8.

Detailed ways

Specific Embodiment 1: This embodiment will be described with reference to Figures 1 to 8. This embodiment includes a lower mounting base 1, a Z-axis drive assembly 2, a pretensioner support mechanism 3, a synchronous tooth transmission belt 7, a nut transmission mechanism 8, Upper mounting cover 9, two connecting plates 6 and three screw transmission mechanisms 4, see Fig. 3 and Fig. 4: Z-axis driving device assembly 2 includes Z-axis motor base 10, encoder positioning tube 12, encoder 14, Z Shaft servo motor 15, friction brake 17, synchronous transmission drive gear 19 and connecting plate 20, the upper end of the Z-axis servo motor 15 is the output shaft 15-1, the lower end is the motor shaft 15-2, the Z-axis servo Motor 15 is installed in Z-axis motor seat 10 by screw 16, and the output shaft 15-1 of Z-axis servo motor 15 is positioned at the outside of Z-axis motor seat 10, and the upper end of output shaft 15-1 is provided with transmission external gear 15-1 -1, the friction brake 17 and the synchronous transmission driving gear 19 are sequentially installed on the output shaft 15-1 of the Z-axis servo motor 15 from bottom to top, and the central internal gear of the synchronous transmission driving gear 19 and the transmission external gear 15- 1-1 meshing, the friction brake 17 is fixedly connected to the plane of the upper end of the Z-axis servo motor 15 through the screw 18, the connecting plate 20 is installed on the end face of the synchronous transmission driving gear 19 through the mounting screw 21, and the mounting screw 22 passes through the connection The central hole of the plate 20 is threadedly connected with the central screw hole of the output shaft 15-1 end face, and the effect of the connecting plate 20 is to fix the synchronous drive driving gear 19 and the Z-axis servo motor 15 in the direction of the motor axis; the encoder 14 Set in the Z-axis motor base 10, and the encoder 14 is installed on the motor shaft 15-2 on the Z-axis servo motor 15, the encoder 14 is clamped with its own top wire, and the encoder positioning tube 12 is arranged on the Z-axis motor outside the seat 10, and the encoder positioning tube 12 is set between the elastic positioning piece 14-1 on the encoder 14 and the flange at the lower end of the Z-axis motor seat 10, and the radial positioning of the encoder 14 is passed through by the mounting screws 13 in turn The positioning hole on the elastic positioning piece 14-1, the central hole of the encoder positioning tube 12, and the mounting hole of the Z-axis motor seat 10 are fastened to the mounting seat 1; , can respond quickly, and brake the Z-axis servo motor 15 that continues to rotate due to inertia, preventing the upper mechanism from falling automatically due to the gravity of the system, causing equipment accidents; see Figure 5: the pretension wheel support mechanism 3 includes pretension Wheel support frame 24, pretension wheel support frame loam cake 25, three pretension wheel sliding frame mechanisms 27, pretension wheel support frame loam cake 25 is installed on the upper end face of pretension wheel support frame 24 by mounting screw 26, three A pretension wheel sliding frame mechanism 27 is evenly arranged on the upper end surface of the pretension wheel support frame loam cake 25, and each pretension wheel carriage mechanism 27 is installed on the pretension wheel support frame loam cake 25 by mounting screws 32 See Fig. 6: each pretension wheel sliding frame mechanism 27 comprises pretension wheel positioning block outer plate 31, pretension wheel positioning block 33, pretension wheel positioning slide block 34, pretension wheel turret support shaft 35, pretension wheel wheel turret 3 7. Two thrust jackscrews 28, two lock nuts 29 and two pretension wheel mechanisms 38, the upper end surface of the pretension wheel positioning block 33 is provided with a T-shaped groove 33-1, and the pretension wheel positioning slider 34 The lower end is provided with a T-shaped head 34-1 matching with the T-shaped groove 33-1, and the T-shaped head 34-1 is installed in cooperation with the T-shaped groove 33-1, and the preload wheel positioning slider 34 can be positioned along the T-shaped groove 33-1 sliding, the outer plate 31 of the pre-tensioner positioning block is installed on the outer end surface of the pre-tensioning wheel positioning block 33 through the mounting screw 30, and the two thrust jackscrews 28 are connected to the outer plate 31 of the pre-tensioning wheel positioning block through the lock nut 29 The screw hole 3-1 on the top is threaded, the screw hole 3-1 is facing the end face of the T-shaped head 34-1, when the thrust jacking screw 28 is rotated clockwise, the thrust jacking screw 28 is screwed into the pretensioner positioning block The outer plate 31 can push out the pretension wheel positioning slider 34 along the radial direction of the pretension wheel support frame 24; the function of the lock nut 29 is to lock the screw-in position of the thrust jacking screw 28; A turret mounting groove 34-2 is provided on the side facing the center of the Z axis on the wheel positioning slide block 34, and a rotating shaft light hole 34-3 is provided on the pretensioning wheel positioning slide block 34 on the upper side of the turret mounting groove 34-2. , the pretension wheel positioning slider 34 on the lower side of the turret mounting groove 34-2 is provided with a rotating shaft threaded hole 34-4, and the pretension wheel turret 37 is arranged in the turret mounting groove 34-2, and the pretension wheel rotates Frame support shaft 35 passes through the light hole 34-3 of the rotating shaft and the pretensioning wheel turret 37 is threadedly connected with the threaded hole 34-4 of the rotating shaft. , and the pretension wheel turret support shaft 35 is locked in the vertical direction with the pretension wheel turret support shaft 35, and the effect of fastening the jackscrew 36 is to prevent the pretension wheel turret support shaft 35 from contacting the pretension wheel positioning slider 34 The screw thread is loose, and the pretension wheel turret 37 can rotate freely on the pretension wheel turret support shaft 35. On the two symmetrical convex circles on the pretension wheel turret 37, a pretension wheel mechanism 38 is respectively installed, and the pretension wheel The pretension wheel shaft 39 on the tension wheel mechanism 38 is installed in the concave hole 37-1 on the corresponding pretension wheel turret 37; The second is to provide adjustment in the radial direction for the pretensioner mechanism 38 to ensure that the tooth surface of the synchronous gear belt 7 is tightly attached to the tooth surface of the synchronous transmission driving gear 19 through the pretensioner mechanism 38; See Fig. 7: each screw transmission mechanism 4 includes a lower bearing retaining ring 44, a lower shaft circlip 45, a lower deep groove ball bearing 46, a thrust bearing seat 47, a thrust bearing 49, and a thrust bearing seat cover 50 , synchronous transmission driven gear 53, transmission screw shaft 54, upper bearing stop ring 56, upper deep groove ball bearing 57, upper shaft circlip 58, the top of the transmission screw shaft 54 is the transmission screw 54-1 , the lower part of the transmission screw shaft 54 is the optical axis 54-2, the synchronous transmission passive gear 53 is installed on the optical axis 54-2, and the synchronous transmission passive gear 53 is connected with the convex on the transmission screw shaft 54 through the mounting screw 52 flange fixed connection, upper bearing stop ring 56. The upper deep groove ball bearing 57 and the circlip 58 for the upper shaft are successively installed on the upper end of the transmission screw shaft 54 from bottom to top, the thrust bearing seat cover 50, the thrust bearing 49, the thrust bearing seat 47, the lower deep The groove ball bearing 46, the elastic retaining ring 45 for the lower shaft and the lower bearing retaining ring 44 are successively installed on the lower end of the transmission screw shaft 54 from top to bottom, and the thrust bearing seat cover 50 is fixed with the thrust bearing seat 47 by the mounting screw 51 connection; the function of the lower deep groove ball bearing 46 and the upper deep groove ball bearing 57 is to provide accurate positioning for the rotation of the transmission screw shaft 54; Weight, to prevent the damage of the lower deep groove ball bearing 46 due to weight; see Figure 8: the nut transmission mechanism 8 includes a Z-axis movable bracket 59 and three ball nuts 61, and the Z-axis movable bracket 59 is formed by a central disk 59-1 and three nut brackets 59-2, the three nut brackets 59-2 are evenly distributed along the outer surface of the central disk 59-1, and the outer end surface of each nut bracket 59-2 is set There are screw nut mounting holes 59-2-1, and a ball screw nut 61 is housed in each screw nut mounting hole 59-2-1, and the axis of each ball screw nut 61 is provided with a drive screw 54-1 The matching screw 61-1, the ball screw nut 61 is fixedly connected with the nut bracket 59-2 through the mounting screw 60; see Figure 1 and Figure 2: the upper mounting cover 9 and the lower mounting seat 1 are set up and down, and the lower mounting The end surface of the seat 1 near the edge is provided with three lower bearing installation holes 1-1 along the same circumference, and the end surface of the upper mounting cover 9 is equipped with three upper bearing installation holes 9-1 along the same circumference, and the three upper bearings The installation hole 9-1 is directly opposite to the three lower bearing installation holes 1-1, the Z-axis driving device assembly 2, the pretensioner support mechanism 3, the synchronous tooth transmission belt 7, the nut transmission mechanism 8, and the two connecting plates 6 and three lead screw transmission mechanisms 4 are arranged between the upper mounting cover 9 and the lower mounting base 1, the Z-axis motor base 10 on the Z-axis driving device assembly 2 is connected with the lower mounting base 1 through mounting screws 11, and the pre-tensioner The pretensioner support frame 24 on the support mechanism 3 is set on the Z-axis driving device assembly 2, and the pretensioner support frame 24 is connected with the lower mounting seat 1 through the mounting screws 23, and the three screw transmission mechanisms 4 are arranged on the same circumference. The cloth is arranged between the upper mounting cover 9 and the lower mounting seat 1, the central end 7-1 of the synchronous tooth transmission belt 7 is set on the synchronous transmission driving gear 19, and the three outer ends 7-2 of the synchronous tooth transmission belt 7 are respectively set on three On the first synchronous transmission driven gear 53, under the effect of the preload of the pretensioner support mechanism 3, the six pretensioner mechanisms 38 on the pretensioner support mechanism 3 are tightly attached to the synchronous transmission driving gear 19. tooth surface, to realize the synchronous transmission of the synchronous gear belt 7 and the synchronous transmission driving gear 19; the Z-axis movable bracket 59 is arranged above the pretensioner support mechanism 3, and the three ball wires The female 61 is threadedly connected with three transmission lead screws 54-1 respectively, and the lower deep groove ball bearing 46 on each lead screw transmission mechanism 4 is installed in the corresponding lower bearing installation hole 1-1 of the lower mount 1, and the lower shaft The retaining ring 44 is fixedly connected with the lower mounting seat 1 through the mounting screw 43, and the upper deep groove ball bearing 57 on each screw transmission mechanism 4 is installed in the corresponding upper bearing mounting hole 9-1, and the upper bearing retaining ring 56 passes through The mounting screw 55 is fixedly connected with the upper mounting cover 9, the thrust bearing seat 47 is fixedly connected with the lower mounting seat 1 through the mounting screw 48, and the two connecting plates 6 are arranged symmetrically with the axis line of the Z-axis servo motor 15, and each connection The two ends of the board 6 are fixedly connected with the corresponding lower mounting base 1 and upper mounting cover 9 by mounting screws 5 .

Specific Embodiment 2: This embodiment is described in conjunction with FIG. 6 . Each pretension wheel mechanism 38 in this embodiment includes a pretension wheel shaft 39 , a pretension wheel 41 , a shaft circlip 42 and two pretension wheel bearings 40 , A pretension wheel bearing 40 is respectively installed at the upper and lower recesses of the inner chamber of the pretension wheel 41, the pretension wheel 41 is installed on the pretension wheel shaft 39, and the shaft circlip 42 is installed on the exposed pretension wheel 41. In the groove at the upper end of the pre-tension wheel shaft 39 on the end face, the circlip 42 for the shaft is used to fix the relative position of the pre-tension wheel bearing 40 . Other components and connections are the same as those in the first embodiment.

The working principle of the present invention is: when the Z-axis servo motor 15 is running, the encoder 14 installed on the motor shaft 15-2 at the lower end of the Z-axis servo motor 15 starts to work, and feeds back data to the upper computer to control the work of the Z-axis servo motor 15 State; because the internal teeth of the synchronous transmission driving gear 19 mesh with the transmission external teeth 15-1-1 on the Z-axis servo motor 15, the synchronous transmission driving gear 19 and the output shaft 15-1 of the Z-axis servo motor 15 run synchronously , and drive the synchronous gear transmission belt 7, the synchronous transmission passive gear 53, and three transmission screw shafts 54 to carry out synchronous operation, because the transmission screw 54-1 on the transmission screw shaft 54 and the screw buckle 61- on the ball screw nut 61 1 cooperation, therefore, the Z-axis movable bracket 59 moves up and down along the transmission screw shaft 54, that is, the rotational motion output by the Z-axis servo motor 15 is converted into the linear motion of the ball screw nut 61, and the Z-axis movable bracket 59 moves along the Z-axis. Linear motion in an upward or downward direction.

Claims (2)

1. A method to balance the stress state of the Z axis, characterized in that: the Z-axis lift mechanism includes a lower mount (1), Z-axis drive unit assembly (2), tightening wheel support mechanism (3) , synchronous toothed belt (7) and nut drive mechanism (8), on the cover plate (9), two plates (6), three screw drive mechanism (4), Z-axis drive unit assembly (2) including Z-axis motor base (10), the encoder positioning tube (12), the encoder (14), Z-axis servo motor (15), the friction brake (17), synchronous drive pinion gear (19) and the plate (20) , the Z-axis servo motor (15) the upper end of the output shaft axis (15-1), the bottom of the motor shaft (15-2), the Z-axis servo motor (15) mounted on the Z-axis motor base (10) inside, and Z axis servo motor (15) of the output shaft (15-1) in the Z-axis motor base (10) outside of an output shaft (15-1) of the upper end of the outer gear teeth (15-1-1) said friction brake (17) and synchronous drive pinion gear (19) which are in turn mounted on the Z-axis servo motor (15) of the output shaft (15-1), the driving gear and the synchronous drive (19) to the center of internal teeth and external gear drive (15-1-1) engaging plate (20) is mounted on synchronous drive pinion (19) of the end face, said encoder (14) disposed on the Z-axis motor base (10) and the encoder (14) mounted on the Z-axis servo motor (15) on the motor shaft (15-2), the encoder positioning tube (12) is set in the Z-axis motor base (10) out of the encoder positioning tube ( 12) is set in the encoder (14) of the elastic positioning piece (14-1) and the Z-axis motor base (10) between the lower end of the flange; tightening wheel supporting means (3) comprises tightening wheel support frame (24 ), preload wheel supporting frame cover (25), three roller movable shelf preload mechanism (27), tightening wheel supporting frame cover (25) mounted on the pretension wheel support bracket (24) of the upper end face, three tightening roller movable shelf mechanism (27) disposed in uniform tightening wheel supporting frame cover (25) of the upper end face, and each movable shelf tightening roller mechanism (27) mounted on the wheel support frame pretension cover (25), each moving frame bodies pretension Skating (27) including preload wheel positioning block outer plate (31), preload wheel positioning block (33), preload wheel positioning the slider (34), preload round turret support shaft (35), preload round turret (37), two thrust the top wire (28), two lock nuts (29) and two preload wheel mechanism (38), preload wheel positioning block (33) of the upper end face of a T-slot (33-1), preload wheel-slide (34) is provided with a T-shaped lower end of the slot (33-1) mating T-shaped head (34 - 1), T-shaped head (34-1) with the T-shaped groove (33-1) with the installation, preload wheel positioning block outer plate (31) mounted on the tightening wheel positioning block (33) of the outer end surface, two Thrust top wire (28) through the lock nut (29) with pretensioners wheel positioning block outer plate (31) on the screw (3-1) threaded connections, screw (3-1) with the T-shaped head (34 - 1) is on the end face, preload wheel-slide (34) on the side toward the center of the Z-axis is provided with a turret mounting groove (34-2), the turret mounting groove (34-2) side preload wheel positioning the slider (34) is provided with a rotation shaft aperture (34-3), the turret mounting groove (34-2) preload the lower wheel-slide (34) is provided with a rotation shaft threaded hole (34 - 4), tightening wheel rotation frame (37) provided in the turret mounting groove (34-2), the preload turret wheel support shaft (35) through the rotating shaft aperture (34-3) and preload wheel rotation frame (37) and the rotary shaft threaded holes (34-4) threaded connection, tightening wheel turret (37) on two symmetrically mounted on each convex portion has pretension wheel mechanism (38), and the tightening wheel means (38) on the axle preload (39) mounted on its corresponding preload wheel turret (37) on the concave hole (37-1) and; each of the screw drive mechanism (4) includes a lower bearing retaining ring (44), the lower shaft circlip (45), under the deep groove ball bearings (46), thrust bearing (47), thrust bearing (49), thrust bearing cap (50), synchronous transmission passive Gear (53), the drive screw shaft (54), the upper bearing retaining ring (56), the deep groove ball bearings (57) on the shaft with an elastic ring (58), said drive screw shaft (54) upper part of the drive screw (54-1), said drive screw shaft (54) of the lower part of the optical axis (54-2), synchronous transmission driven gear (53) mounted on the optical axis (54-2), the upper bearing retaining ring (56), the deep groove ball bearings (57) and the upper shaft circlip (58) from the bottom in turn mounted on the drive screw shaft (54) of the upper end of the thrust bearing cap (50), only thrust bearing (49), thrust bearing (47), under the deep groove ball bearings (46), the lower shaft circlip (45) and the lower bearing retaining ring (44) mounted on the drive screw sequentially from top to bottom axis (54) of the lower end; said nut drive mechanism (8) including the Z-axis movable carriage (59) and three ball screw nut (61), Z-axis movable carriage (59) by a central plate (59-1 ) and three nut bracket (59-2), three nut bracket (59-2) along the central plate (59-1) set uniform outer surface of each nut bracket (59-2 ) of the outer end surface of nut mounting holes (59-2-1), each nut mounting hole (59-2-1) is provided with a ball screw nut (61), each ball nut (61 ) of the center of the shaft is provided with a drive screw (54-1) with a screw clip (61-1), on the cover plate (9) with the lower mount (1) is on the set top and bottom, the lower mount (1) the end face near the edge are laid along the same circumference of the lower bearing has three mounting holes (1-1), on the cover plate (9) along the same circumference of the end face are laid on the bearing has three mounting holes (9-1), and three on the bearing mounting hole (9-1) and three lower bearing mounting holes (1-1) A One is on, Z-axis drive unit assembly (2), tightening wheel support mechanism (3), synchronous toothed belt ( 7), the drive nut mechanism (8), two plates (6) and three screw drive mechanism (4) are provided in the upper cover plate (9) with the lower mount (1) between, Z axis motor seat (10) with the lower mount (1) connection, pretension wheel support frame (24) Set in the Z-axis drive assembly (2) on the wheel and the preload bracket (24) with the lower mount (1) connection , three screw drive mechanism (4) along the same circumference are provided in the upper cover plate cloth (9) with the lower mount (1), between synchronous toothed belt (7) of the central terminal (7-1) set in the synchronization transmission driving gear (19), the synchronous toothed belt (7) of the three outer end (7-2) were set in three synchronous transmission driven gear (53), the tightening wheel support mechanism (3) of the six preload wheel mechanism (38) affixed to the synchronous drive pinion cover (19) of the tooth surface, Z axis movable carriage (59) provided in the tightening wheel support mechanism (3) above, and the tightening wheel support mechanism ( 3) the three ball nut (61) respectively, and three drive screw (54-1) threaded connection, each of the screw gear mechanism (4) on the lower deep groove ball bearings (46) attached to the lower mount (1) corresponding to the bearing mounting hole (1-1), each screw drive mechanism (4) on the deep groove ball bearing (57) mounted on the respective bearing mounting hole (9-1), the two plates (6) in the Z-axis servo motor (15) to set the axis of symmetry.
2. 2. according to the said a kind of Z axle elevating mechanism that can the force balance state of claim 1; It is characterized in that: each pretension wheel mechanism (38) comprises pretension wheel shaft (39), pretension wheel (41), circlip for shaft (42) and two pretension wheel bearings (40); Said on the inner chamber of pretension wheel (41) recessed edge place a pretension wheel bearing (40) respectively is installed; Pretension wheel (41) is installed on the pretension wheel shaft (39), and circlip for shaft (42) is installed in the groove of pretension wheel shaft (39) upper end that is exposed at pretension wheel (41) upper surface outward.

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