CN101436562B

CN101436562B - Double-arm wafer transmission manipulator

Info

Publication number: CN101436562B
Application number: CN2008102096906A
Authority: CN
Inventors: 刘延杰; 吴明月; 荣伟彬; 孙立宁
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2008-12-12
Filing date: 2008-12-12
Publication date: 2010-06-02
Anticipated expiration: 2028-12-12
Also published as: CN101436562A

Abstract

The invention relates to a double-arm wafer transmission mechanical hand with large lifting expansion ratio, which relates to a wafer transmission mechanical hand, and solves the problems that the prior wafer transmission mechanical hand has low reliability of connection of lines and air pipes, short service life, and limit of stroke in the vertical direction, can not meet the requirement of motion of large expansion ratio in the vertical direction, and is not convenient to detach and maintain. The upper end of an assistant screw rod shaft of an assistant screw rod driving assembly passes through a middle flange and maintains a suspended state, and the upper end of a main screw rod shaft of a main screw rod driving assembly passes through the middle flange, a Z-axis sliding support, a T-axis lower flange, a T-axis upper flange and an R-axis lower flange and maintains a suspended state; the lower end of a spline shaft of a main spline guide rail assembly is fixedly connected with the middle flange; and a linear module assembly is arranged between the T-axis upper flange and the R-axis lower flange. The double-arm wafer transmission mechanical hand has the advantages of high reliability of connection of the lines and the air pipes and long service life, and achieves larger stroke in the vertical direction and extremely convenient as well as maintenance.

Description

Both arms wafer transfer manipulator

Technical field

The present invention relates to a kind of wafer transfer manipulator.

Background technology

At present, there is following problem in widely used wafer transfer manipulator (referring to Fig. 7 and Fig. 8) in integrated circuit (IC) manufacturing equipment field: one, traditional single armed wafer transfer manipulator can only improve its movement velocity in order to improve operating efficiency, but has reduced the reliability and the useful life of manipulator; Two, for satisfying the job requirement of wafer transfer system, the falling head of manipulator body must be lower than the minimum working point of wafer transfer, when minimum working point is low, the range ability of tradition wafer transfer manipulator on Z-direction is restricted, and can not satisfy the demand of the big magnification motion of vertical direction; Three, traditional wafer transfer manipulator R axis road and tracheae pass in the T beam barrel, when the T axle rotates, thereby the stretching action power that can be subjected to circuit and tracheae has reduced the reliability of circuit and tracheae connection, and this cabling mode makes the very inconvenience of dismounting maintenance of manipulator.

Summary of the invention

The objective of the invention is that the reliability that circuit that existing wafer transfer manipulator exists and tracheae connect is low, useful life short in order to solve, vertical direction stroke limiting system and can not satisfy the very problem of inconvenience of the demand of the big magnification motion of vertical direction and dismounting maintenance, and then provide a kind of large elevating magnification ratio double-arm crystal transmission manipulator.

Technical scheme of the present invention is: both arms wafer transfer manipulator comprises base, main leading screw drives assembly, auxiliary leading screw drives assembly, three auxiliary spline rail assemblies, middle ring flange, three main spline rail assemblies, Z axle sliding support, the Z axis drive motor, the stop sleeve assembly, T axle lower flange, the T axle drive assy, the T axis drive motor, T axle upper flange plate, R axle lower flange, R axle right arm drive assembly, R axle right arm drive motors, R axle left arm drive assembly, R axle left arm drive motors, R axle upper flange plate, R axle left arm assembly, R axle right arm assembly, the cabling module assembly, Z axle driving pulley, Z axle principal and subordinate moves drive pulley, the Z axle is assisted driven drive pulley, Z axle synchronous belt and Z axis drive motor, described cabling module assembly is made up of circuit assembly and clockwork spring, described R axle left arm assembly is by the big arm in a left side, left side forearm and left-end point hand fixed mount are formed, described R axle right arm assembly is by the big arm in the right side, right forearm, right terminal subordinate support, right terminal hand staking and right end support are on hand formed, described main leading screw drives assembly, the Z axis drive motor, auxiliary leading screw drives assembly and three auxiliary spline rail assemblies are installed on the base, the upper end that auxiliary leading screw drives the auxiliary lead screw shaft of assembly is passed middle ring flange and is kept suspended state, the intersection of described auxiliary lead screw shaft and middle ring flange is affixed by the auxiliary feed screw nut that auxiliary leading screw drives assembly, the lower end that auxiliary leading screw drives the auxiliary lead screw shaft of assembly passes base and the auxilliary driven drive pulley of corresponding Z axle is affixed, the spline of auxiliary spline rail assembly is packed in the installing hole of middle ring flange, described spline slides on guide rail, the upper end that described main leading screw drives the main lead screw shaft of assembly is passed middle ring flange from down to up successively, Z axle sliding support, T axle lower flange, T axle upper flange plate and R axle lower flange also keep suspended state, the main lead screw shaft of described main leading screw driving assembly and the intersection of Z axle sliding support are affixed by the main feed screw nut that main leading screw drives assembly, the lower end that described main leading screw drives the main lead screw shaft of assembly passes base and the moving drive pulley of Z axle principal and subordinate is affixed, described stop sleeve assembly is sleeved on the main lead screw shaft, and the top and bottom of stop sleeve assembly are affixed with T axle lower flange and middle ring flange respectively, the lower end and the middle ring flange of the main spline guide rail splined shaft of main spline rail assembly are affixed, the upper end of the main spline guide rail splined shaft of described main spline rail assembly is passed Z axle sliding support and T axle lower flange from the bottom to top successively, the main spline guide rail spline of main spline rail assembly all is packed in the installing hole of Z axle sliding support, described main spline guide rail spline slides on main spline guide rail splined shaft, described T axis drive motor is installed on the upper surface of T axle lower flange, the lower end of described T axle drive assy is connected with T axle lower flange, described T axis drive motor is connected with the T axle drive assy by three grades of synchronous belts of T axle, the upper end of described T axle drive assy is passed T axle upper flange plate and is connected with R axle lower flange, described R axle right arm drive assembly, R axle left arm drive assembly, R axle right arm drive motors and R axle left arm drive motors are installed on the upper surface of R axle lower flange, described R axle left arm drive assembly is connected by three grades of synchronous belts of left arm with R axle left arm drive motors, described R axle right arm drive assembly is connected by three grades of synchronous belts of right arm with R axle right arm drive motors, described R axle upper flange plate is installed on the upper surface of R axle right arm drive assembly and R axle left arm drive assembly, the end that described R axle left arm drive assembly axle passes the big arm in a left side of R axle upper flange plate and R axle left arm assembly is hinged, one end of the other end of the big arm in a left side of described R axle left arm assembly and the left forearm of R axle left arm assembly is hinged, the other end of the left forearm of described R axle left arm assembly and an end of left-end point hand fixed mount are hinged, the end that the axle of described R axle right arm drive assembly passes the right big arm of R axle upper flange plate and R axle right arm assembly is hinged, one end of the other end of the right big arm of described R axle right arm assembly and the right forearm of R axle right arm assembly is hinged, the other end of the right forearm of described R axle right arm assembly is hinged with an end of right terminal subordinate support, the other end of the terminal subordinate support in the described right side and an end of right terminal hand staking are hinged, the other end of the terminal hand staking in the described right side is hinged with a right terminal end of support on hand, the output shaft of described Z axis drive motor passes base and Z axle driving pulley is affixed, described Z axle principal and subordinate moves drive pulley, the auxilliary driven drive pulley of Z axle is connected by Z axle synchronous belt with Z axle driving pulley, described cabling module assembly is arranged between T axle upper flange plate and the R axle lower flange, described circuit assembly overlays on the outer surface of clockwork spring, the external end head of described clockwork spring and T axle upper flange plate are affixed, and the inner termination of described clockwork spring and R axle lower flange are affixed.

The present invention compared with prior art has following beneficial effect: one, the present invention adopts the R axle construction of both arms, has improved the wafer transfer operating efficiency of manipulator effectively under same speed of service condition, and has improved useful life; Two, the present invention adopts stacked Z through-drive mode, vertically and in the radial dimension space has realized bigger vertical direction stroke at limited; Three, the stacked transmission mechanism of Z axle of the present invention adopts the one pole type of drive, promptly drives each layer mechanism by a motor by fixed proportion and realizes synchronously vertically stretching motion, make Z axle construction compactness, control is easy, dismounting is easy to maintenance; Four, the present invention has adopted the Mainspring type cabling mode, all circuits active force that do not stretched in the robot movement process, thus improved the reliability that circuit and tracheae connect; Five, the present invention also has stable advantage.

Description of drawings

Fig. 1 is an overall structure schematic perspective view of the present invention, Fig. 2 is a longitudinal sectional view of the present invention, Fig. 3 is a monnolithic case schematic diagram of the present invention, Fig. 4 is the upward view of Fig. 2, Fig. 5 is a Mainspring type cabling mode schematic diagram, Fig. 6 is the scheme of installation of Z axis drive motor, and Fig. 7 is the front view schematic diagram of conventional robot, and Fig. 8 is the vertical view of Fig. 7.

Embodiment

Embodiment one: in conjunction with Fig. 1, Fig. 2, Fig. 4～Fig. 8 illustrates present embodiment, present embodiment comprises base 1, main leading screw drives assembly 2, auxiliary leading screw drives assembly 3, three auxiliary spline rail assemblies 4, middle ring flange 5, three main spline rail assemblies 6, Z axle sliding support 7, Z axis drive motor 35, stop sleeve assembly 8, T axle lower flange 9, T axle drive assy 10, T axis drive motor 11, T axle upper flange plate 12, R axle lower flange 13, R axle right arm drive assembly 14, R axle right arm drive motors 15, R axle left arm drive assembly 16, R axle left arm drive motors 17, R axle upper flange plate 18, R axle left arm assembly 19, R axle right arm assembly 20, cabling module assembly 21, Z axle driving pulley 23, Z axle principal and subordinate moves drive pulley 25, the Z axle is assisted driven drive pulley 27, Z axle synchronous belt 28 and Z axis drive motor 35, described cabling module assembly 21 is made up of circuit assembly 29 and clockwork spring 30, described R axle left arm assembly 19 is by the big arm 19-1 in a left side, left side forearm 19-2 and left-end point hand fixed mount 19-3 form, described R axle right arm assembly 20 is by the big arm 20-1 in the right side, right forearm 20-2, right terminal subordinate support 20-3, right terminal hand staking 20-4 and right end support 20-5 are on hand formed, described main leading screw drives assembly 2, Z axis drive motor 35, auxiliary leading screw drives assembly 3 and three auxiliary spline rail assemblies 4 are installed on the base 1, the upper end that auxiliary leading screw drives the auxiliary lead screw shaft 3-3 of assembly 3 is passed middle ring flange 5 and is kept suspended state, the intersection of described auxiliary lead screw shaft 3-3 and middle ring flange 5 is affixed by the auxiliary feed screw nut 3-2 that auxiliary leading screw drives assembly 3, it is affixed that the auxilliary driven drive pulley of base 1 and corresponding Z axle 27 is passed in the lower end that auxiliary leading screw drives the auxiliary lead screw shaft 3-3 of assembly 3, the spline 4-4 of auxiliary spline rail assembly 4 is packed in the installing hole of middle ring flange 5, described spline 4-4 slides on guide rail 4-3, ring flange 5 during the upper end that described main leading screw drives the main lead screw shaft 2-3 of assembly 2 is passed from down to up successively, Z axle sliding support 7, T axle lower flange 9, T axle upper flange plate 12 and R axle lower flange 13 also keep suspended state, the main lead screw shaft 2-3 of described main leading screw driving assembly 2 and the intersection of Z axle sliding support 7 are affixed by the main feed screw nut 2-2 that main leading screw drives assembly 2, it is affixed with the moving drive pulley 25 of Z axle principal and subordinate that base 1 is passed in the lower end that described main leading screw drives the main lead screw shaft 2-3 of assembly 2, described stop sleeve assembly 8 is sleeved on the main lead screw shaft 2-3, and the top and bottom of stop sleeve assembly 8 are affixed with T axle lower flange 9 and middle ring flange 5 respectively, lower end and the middle ring flange 5 of the main spline guide rail splined shaft 6-3 of main spline rail assembly 6 are affixed, the upper end of the main spline guide rail splined shaft 6-3 of described main spline rail assembly 6 is passed Z axle sliding support 7 and T axle lower flange 9 from the bottom to top successively, the main spline guide rail spline 6-4 of main spline rail assembly 6 all is packed in the installing hole of Z axle sliding support 7, described main spline guide rail spline 6-4 slides on main spline guide rail splined shaft 6-3, described T axis drive motor 11 is installed on the upper surface of T axle lower flange 9, the lower end of described T axle drive assy 10 is connected with T axle lower flange 9, described T axis drive motor 11 is connected with T axle drive assy 10 by three grades of synchronous belt 10-1 of T axle, the upper end of described T axle drive assy 10 is passed T axle upper flange plate 12 and is connected with R axle lower flange 13, described R axle right arm drive assembly 14, R axle left arm drive assembly 16, R axle right arm drive motors 15 and R axle left arm drive motors 17 are installed on the upper surface of R axle lower flange 13, described R axle left arm drive assembly 16 is connected by three grades of synchronous belt 16-1 of left arm with R axle left arm drive motors 17, described R axle right arm drive assembly 14 is connected by three grades of synchronous belt 14-1 of right arm with R axle right arm drive motors 15, described R axle upper flange plate 18 is installed on the upper surface of R axle right arm drive assembly 14 and R axle left arm drive assembly 16, the end that 16 of described R axle left arm drive assemblies pass the big arm 19-1 in a left side of R axle upper flange plate 18 and R axle left arm assembly 19 is hinged, the end of the other end of the big arm 19-1 in a left side of described R axle left arm assembly 19 and the left forearm 19-2 of R axle left arm assembly 19 is hinged, the end of the other end of the left forearm 19-2 of described R axle left arm assembly 19 and left-end point hand fixed mount 19-3 is hinged, the end that the axle of described R axle right arm drive assembly 14 passes the right big arm 20-1 of R axle upper flange plate 18 and R axle right arm assembly 20 is hinged, the end of the other end of the right big arm 20-1 of described R axle right arm assembly 20 and the right forearm 20-2 of R axle right arm assembly 20 is hinged, the other end of the right forearm 20-2 of described R axle right arm assembly 20 is hinged with the end of right terminal subordinate support 20-3, the end of the other end of the terminal subordinate support 20-3 in the described right side and right terminal hand staking 20-4 is hinged, the other end of the described right side terminal hand staking 20-4 is hinged with the right terminal end of support 20-5 on hand, it is affixed with Z axle driving pulley 23 that the output shaft 22 of described Z axis drive motor 35 passes base 1, described Z axle principal and subordinate moves drive pulley 25, the auxilliary driven drive pulley 27 of Z axle is connected by Z axle synchronous belt 28 with Z axle driving pulley 23, described cabling module assembly 21 is arranged between T axle upper flange plate 12 and the R axle lower flange 13, described circuit assembly 29 overlays on the outer surface of clockwork spring 30, the external end head 30-1 and the T axle upper flange plate 12 of described clockwork spring 30 are affixed, and the inner termination 30-2 of described clockwork spring 30 and R axle lower flange 13 are affixed.Described main leading screw drives assembly 2 and is produced by Japanese NSK company, and its model is PSS1020N1D0608; Described auxiliary leading screw drives assembly 3 and is produced by Japanese NSK company, and its model is PSS1010N1D0307; Described auxiliary spline rail assembly 4 is produced by Japanese THK company, and its model is LF20UU+L360; Described main spline rail assembly 6 is produced by Japanese THK company, and its model is LF20UU+L360.

Embodiment two: present embodiment is described in conjunction with Fig. 3, the manipulator of present embodiment also increases one-level cover 31, secondary cover 32 and three grades of covers 33, the outside of ring flange 5 during described one-level cover 31 is arranged on, the lower end of one-level cover 31 is packed on the base 1, the outside of ring flange 5 and T axle upper flange plate 12 during described secondary cover 32 is arranged on, the upper end of secondary cover 32 is packed on the T axle upper flange plate 12, described three grades of covers 33 are arranged on the outside of R axle upper flange plate 18 and T axle upper flange plate 12, the upper end of three grades of covers 33 is packed on the R axle upper flange plate 18, and described secondary cover 32 is sleeved on the outside of one-level cover 31, and three grades of covers 33 are sleeved on the outside of secondary cover 32.Supplementary result so is set.Other composition is identical with embodiment one with annexation.

In conjunction with Fig. 1, Fig. 2, Fig. 4 and Fig. 5 operation principle of the present invention is described: manipulator of the present invention has four degrees of freedom: i.e. the stretching motion of two R directions, the gyration of T direction and moving both vertically of Z direction.

First R shaft extension principle that contracts: promote big arm 19-1 in a left side and left forearm 19-2 by R axle left arm drive motors 17 through three grades of synchronous belt 16-1 of left arms, finally realize the motion of left-end point hand fixed mount 19-3;

Second R shaft extension principle that contracts: promote right big arm 20-1, right forearm 20-2, right terminal subordinate support 20-3 and right terminal hand staking 20-4 by R axle right arm drive motors 15 through three grades of synchronous belt 14-1 of right arms, finally realize the right terminal motion of support 20-5 on hand;

T axle gyration principle: drive 12 rotations of R axle lower flange thereby drive T axle drive assy 10 by three grades of synchronous belt 10-1 of T axle, the gyration of all elements and R axle lower flange 12 common rotations formation T axle above the R axle lower flange 12 by T axis drive motor 11;

The stacked elevating movement principle of Z axle: output shaft 22 rotations of described Z axis drive motor 35 drive 23 rotations of Z axle driving pulley, thereby drive main leading screw simultaneously by Z axle synchronous belt 28 and drive the main lead screw shaft 2-3 of assembly 2 and the auxiliary lead screw shaft 3-3 rotation that auxiliary leading screw drives assembly 3, the main lead screw shaft 2-3 rotation that drives main leading screw driving assembly 2 drives the main feed screw nut 2-2 that drives main leading screw driving assembly 2 and moves upward, thereby promoting Z axle sliding support 7 moves upward along main spline rail assembly 6, ring flange 5 moved upward during thereby the auxiliary feed screw nut 3-2 that the auxiliary lead screw shaft 3-3 rotation drive auxiliary wire thick stick of auxiliary leading screw driving assembly 3 drives assembly 3 moved upward and promotes, thereby main spline rail assembly 6 is moved upward, realize the prolongation of main spline rail assembly 6, realize stacked lifting.

Mainspring type cabling principle: when 13 revolutions of R axle lower flange, T axle upper flange 12 maintains static, then all circuits of R axle have relative extensional motion with respect to T axle upper flange plate 12, after adopting the Mainspring type cabling mode, the clockwork spring joint of cabling module assembly 21 inboards is connected with R axle lower flange 13, lateral joint is connected with T axle upper flange plate 12, thereby has only clockwork spring stressed and circuit does not stress when doing the gyration of T axle, and can realize the flexible of circuit.

Claims

1. both arms wafer transfer manipulator, it comprises base (1), main leading screw drives assembly (2), auxiliary leading screw drives assembly (3), three auxiliary spline rail assemblies (4), middle ring flange (5), three main spline rail assemblies (6), Z axle sliding support (7), Z axis drive motor (35), stop sleeve assembly (8), T axle lower flange (9), T axle drive assy (10), T axis drive motor (11), T axle upper flange plate (12), R axle lower flange (13), R axle right arm drive assembly (14), R axle right arm drive motors (15), R axle left arm drive assembly (16), R axle left arm drive motors (17), R axle upper flange plate (18), R axle left arm assembly (19), R axle right arm assembly (20), cabling module assembly (21), Z axle driving pulley (23), Z axle principal and subordinate moves drive pulley (25), the Z axle is assisted driven drive pulley (27), Z axle synchronous belt (28) and Z axis drive motor (35), it is characterized in that: described cabling module assembly (21) is made up of circuit assembly (29) and clockwork spring (30), described R axle left arm assembly (19) is by the big arm in a left side (19-1), left side forearm (19-2) and left-end point hand fixed mount (19-3) are formed, described R axle right arm assembly (20) is by the big arm in the right side (20-1), right forearm (20-2), right terminal subordinate support (20-3), right terminal hand staking (20-4) and right end support (20-5) are on hand formed, described main leading screw drives assembly (2), Z axis drive motor (35), auxiliary leading screw drives assembly (3) and three auxiliary spline rail assemblies (4) are installed on the base (1), the upper end that auxiliary leading screw drives the auxiliary lead screw shaft (3-3) of assembly (3) is passed middle ring flange (5) and is kept suspended state, described auxiliary lead screw shaft (3-3) is affixed by the auxiliary feed screw nut (3-2) that auxiliary leading screw drives assembly (3) with the intersection of middle ring flange (5), it is affixed with the auxilliary driven drive pulley (27) of corresponding Z axle that base (1) is passed in the lower end that auxiliary leading screw drives the auxiliary lead screw shaft (3-3) of assembly (3), the spline (4-4) of auxiliary spline rail assembly (4) is packed in the installing hole of middle ring flange (5), described spline (4-4) is gone up at guide rail (4-3) and is slided, the upper end that described main leading screw drives the main lead screw shaft (2-3) of assembly (2) is passed middle ring flange (5) from down to up successively, Z axle sliding support (7), T axle lower flange (9), T axle upper flange plate (12) and R axle lower flange (13) also keep suspended state, the main lead screw shaft (2-3) of described main leading screw driving assembly (2) is affixed by the main feed screw nut (2-2) that main leading screw drives assembly (2) with the intersection of Z axle sliding support (7), it is affixed with the moving drive pulley (25) of Z axle principal and subordinate that base (1) is passed in the lower end that described main leading screw drives the main lead screw shaft (2-3) of assembly (2), described stop sleeve assembly (8) is sleeved on the main lead screw shaft (2-3), and the top and bottom of stop sleeve assembly (8) are affixed with T axle lower flange (9) and middle ring flange (5) respectively, the lower end and the middle ring flange (5) of the main spline guide rail splined shaft (6-3) of main spline rail assembly (6) are affixed, the upper end of the main spline guide rail splined shaft (6-3) of described main spline rail assembly (6) is passed Z axle sliding support (7) and T axle lower flange (9) from the bottom to top successively, the main spline guide rail spline (6-4) of main spline rail assembly (6) all is packed in the installing hole of Z axle sliding support (7), described main spline guide rail spline (6-4) is gone up at main spline guide rail splined shaft (6-3) and is slided, described T axis drive motor (11) is installed on the upper surface of T axle lower flange (9), the lower end of described T axle drive assy (10) is connected with T axle lower flange (9), described T axis drive motor (11) is connected with T axle drive assy (10) by three grades of synchronous belts of T axle (10-1), the upper end of described T axle drive assy (10) is passed T axle upper flange plate (12) and is connected with R axle lower flange (13), described R axle right arm drive assembly (14), R axle left arm drive assembly (16), R axle right arm drive motors (15) and R axle left arm drive motors (17) are installed on the upper surface of R axle lower flange (13), described R axle left arm drive assembly (16) is connected by three grades of synchronous belts of left arm (16-1) with R axle left arm drive motors (17), described R axle right arm drive assembly (14) is connected by three grades of synchronous belts of right arm (14-1) with R axle right arm drive motors (15), described R axle upper flange plate (18) is installed on the upper surface of R axle right arm drive assembly (14) and R axle left arm drive assembly (16), the end that described R axle left arm drive assembly (16) axle passes the big arm (19-1) in a left side of R axle upper flange plate (18) and R axle left arm assembly (19) is hinged, one end of the other end of the big arm (19-1) in a left side of described R axle left arm assembly (19) and the left forearm (19-2) of R axle left arm assembly (19) is hinged, the other end of the left forearm (19-2) of described R axle left arm assembly (19) and an end of left-end point hand fixed mount (19-3) are hinged, the end that the axle of described R axle right arm drive assembly (14) passes the right big arm (20-1) of R axle upper flange plate (18) and R axle right arm assembly (20) is hinged, one end of the other end of the right big arm (20-1) of described R axle right arm assembly (20) and the right forearm (20-2) of R axle right arm assembly (20) is hinged, the other end of the right forearm (20-2) of described R axle right arm assembly (20) is hinged with an end of right terminal subordinate support (20-3), one end of the other end of the terminal subordinate support in the described right side (20-3) and right terminal hand staking (20-4) is hinged, the other end of the terminal hand staking in the described right side (20-4) and right end an end of support (20-5) on hand are hinged, it is affixed with Z axle driving pulley (23) that the output shaft (22) of described Z axis drive motor (35) passes base (1), described Z axle principal and subordinate moves drive pulley (25), the auxilliary driven drive pulley (27) of Z axle is connected by Z axle synchronous belt (28) with Z axle driving pulley (23), described cabling module assembly (21) is arranged between T axle upper flange plate (12) and the R axle lower flange (13), described circuit assembly (29) overlays on the outer surface of clockwork spring (30), the external end head (30-1) of described clockwork spring (30) is affixed with T axle upper flange plate (12), and the inner termination (30-2) of described clockwork spring (30) is affixed with R axle lower flange (13).

2. according to the described both arms wafer transfer of claim 1 manipulator, it is characterized in that: described manipulator also comprises one-level cover (31), secondary cover (32) and three grades of covers (33), described one-level cover (31) is arranged on the outside of middle ring flange (5), the lower end of one-level cover (31) is packed on the base (1), described secondary cover (32) is arranged on the outside of middle ring flange (5) and T axle upper flange plate (12), the upper end of secondary cover (32) is packed on the T axle upper flange plate (12), described three grades of covers (33) are arranged on the outside of R axle upper flange plate (18) and T axle upper flange plate (12), the upper end of three grades of covers (33) is packed on the R axle upper flange plate (18), and described secondary cover (32) is sleeved on the outside of one-level cover (31), and three grades of covers (33) are sleeved on the outside of secondary cover (32).