CN102157417B - Silicon slice transmission robot - Google Patents

Silicon slice transmission robot Download PDF

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Publication number
CN102157417B
CN102157417B CN 201110062743 CN201110062743A CN102157417B CN 102157417 B CN102157417 B CN 102157417B CN 201110062743 CN201110062743 CN 201110062743 CN 201110062743 A CN201110062743 A CN 201110062743A CN 102157417 B CN102157417 B CN 102157417B
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axis
arm
right
left
shaft
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CN 201110062743
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Chinese (zh)
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CN102157417A (en )
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刘延杰
吴明月
荣伟彬
孙立宁
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哈尔滨工业大学
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Abstract

一种硅片传输机器人,用于完成较大传输空间的取放硅片工作流程。 Transfer robot silicon wafers, used for transmission of a larger space to complete transfer the wafers workflow. 当取放硅片的位置相对于R轴回转半径过大而不能及、且行走轨迹较为复杂时,采用本发明的特殊结构的硅片传输机器人,能够简化R轴的工作路径和行走轨迹,化简程序编制的难度及工作量,并能有效的提高工作效率。 When the pick and place position of the wafer with respect to the axis of the radius of gyration R can not be too large and, when the traveling trace and more complex, the wafer transfer robot using the special structure of the invention, it is possible to simplify the working path and the R-axis moving trajectory, of Jane programming difficulty and workload, and can effectively improve work efficiency. 特殊结构的硅片传输机器人之所以特殊,在于这种结构并没有传统意义上的R轴,而是在随T轴旋转的机箱盖上,通过铺设导轨滑块机构定位,以伺服电机带动丝杠丝母机构作为驱动,驱动左右活动臂前后平移;而左右活动臂上也铺设导轨滑块机构定位,以伺服电机带动丝杠丝母机构作为驱动,驱动左右取片臂前后平移,以完成特殊位置的取放硅片工作流程。 Wafer transfer robot is special special structure, wherein the structure R-axis is not in the traditional sense, but rather with the cover of the chassis axis T, the slide mechanism is positioned by the laying of the rail, driving the servo motor to the screw a drive nut mechanism, the right and left front movable arm translation; left and right slide rails laid on the mobile arm also means positioned to drive the servo motor as a drive screw nut mechanism, the right and left front and rear translation-piece arm, in order to complete a particular location pick and place wafers workflow.

Description

一种娃片传输机器人 One kind of sheet transport robot doll

技术领域 FIELD

[0001] 本发明涉及在半导体集成电路生产线设备制造领域内,一种特殊结构的硅片传输机器人,用于完成特殊位置的取放硅片工作流程。 [0001] The present invention relates to the field of manufacturing integrated circuits in a semiconductor production line equipment, wafer transfer robot a special structure for accomplishing a particular location and transfer the wafers workflow. 当取放硅片的位置相对于R轴回转半径过大而不能及、且行走轨迹较为复杂时,采用本发明的特殊结构的硅片传输机器人,能够简化R轴的工作路径和行走轨迹,化简程序编制的难度及工作量,并能有效的提高工作效率。 When the pick and place position of the wafer with respect to the axis of the radius of gyration R can not be too large and, when the traveling trace and more complex, the wafer transfer robot using the special structure of the invention, it is possible to simplify the working path and the R-axis moving trajectory, of Jane programming difficulty and workload, and can effectively improve work efficiency.

背景技术 Background technique

[0002] 对于硅片传输机器人来说,有时取放硅片的位置比较特别。 [0002] For the wafer transfer robot, the wafer position may take place quite special. 尤其是工艺性能比较先进的集成电路生产线,在每一工位位置中完成的工步数量越来越多,这就意味着在每一个工位上,硅片传输机器人取放硅片的位置越来越多,取放硅片的空间越来越大,FORK组合的工作轨迹越来越复杂。 Especially the more advanced process performance integrated circuit production line, the number of steps performed at each work station position more, which means that at each station, the position of the wafer transfer robot pick and place wafers more for more, pick and place wafers space is growing, FORK combination of track work more and more complex. 在这种工作环境下,仅利用传统的R轴来完成工作流程将非常困难甚至是不可能的。 In this operating environment, the workflow will be very difficult or even impossible using only conventional R-axis to complete. 此时采用本发明的特殊结构的硅片传输机器人,能够增加R轴的输送半径,简化R轴的工作路径和行走轨迹,化简程序编制的难度及工作量,并能有效的提高工作效率。 At this time, the wafer transfer robot according to the present invention, a specific structure, it is possible to increase the radius R of the conveying shaft, to simplify the working path and the R-axis moving trajectory, the difficulty of programming and simple work, and can effectively improve the work efficiency. 特殊结构的硅片传输机器人的特殊之处,在于其R轴与传统意义上的R轴有本质上的不同。 Special about the wafer transfer robot special structure, R R axis in its traditional sense of the shaft has essentially different. 本发明中的R轴由左右固定臂和活动臂及取片臂组成,各个臂之间没有复杂的传动关系,而是由各自的伺服电机、传动丝杠与传动丝母独立组成,由计算机独立控制其工作状态;整个R轴系统安装在上盖板的上端面。 The present invention is in the R axis by the right and left fixed and moveable arms and arm-piece, with no complicated drive relationship between the respective arms, but by a respective servo motor, the drive screw and drive nut separate component, independent of the computer control its operation state; R entire system is mounted on the shaft end face on the cover. 上盖板随T轴旋转,通过铺设在上盖板上表面的导轨滑块机构定位,以伺服电机带动丝杠丝母机构作为驱动装置,驱动左右活动臂分别前后平移;而左右活动臂上也铺设导轨滑块机构定位,以伺服电机带动丝杠丝母机构作为驱动,驱动左右取片臂分别前后平移,带动左右FORK组合分别进行前后平移;以上Z轴的升降、T轴的旋转、R轴固定臂、活动臂的平移,叠加成FORK组合的工作轨迹,以完成大直径空间的多工步取放硅片工作流程。 T with the cover shaft, the positioning mechanism slide rails laid on the surface of the upper cover plate to the screw nut driving the servo motor as a drive mechanism, the right and left move forward and backward the movable arm respectively; and also about the mobile arm laying rail slider mechanism for positioning, servo motor drives the spindle nut as a drive mechanism, the right and left arm pieces were taken before and after translation, respectively, driven by a combination of left and right FORK forth translation; lifting, rotating the T axis, R-axis than the Z-axis translating fixed arm, the movable arm FORK superimposed into a combined work trajectory space to accomplish a large-diameter multi-step vacuum chuck workflow.

发明内容 SUMMARY

[0003] 本发明的目的在于提供一种娃片传输机器人,用于完成大直径空间、多工步的取放硅片工作流程。 [0003] The object of the present invention is to provide a baby sheet transfer robot for performing a large diameter space, multi-step transfer the wafers workflow. 特殊结构的硅片传输机器入的R轴由左右固定臂和活动臂及取片臂组成,各个臂之间没有复杂的传动关系,而是由各自的伺服电机、传动丝杠与传动丝母独立组成,由计算机独立控制其工作状态。 R wafer transfer machine into the shaft by a special structure around the fixed and moveable arms and arm-piece, with no complicated drive relationship between the respective arms, but by a respective servo motor, the drive screw and drive nut independently composition, which is independently controlled by a computer operating state. 通过Z轴的升降、T轴的旋转、R轴固定臂、活动臂的平移,叠加成FORK组合的工作轨迹,以完成大直径空间的多工步取放硅片工作流程。 By elevating the Z-axis, the axis of rotation T, R shaft fixed arm, the movable arm translation, superimposed into the work path FORK combined to complete the large diameter of the space multi-step vacuum chuck workflow.

[0004] 本发明的发明目的实现过程为:一种特殊结构的硅片传输机器人包括机箱组合、Z轴传动支撑机构、T轴机构、R轴左右固定臂机构、R轴左右活动臂机构、R轴左右取片臂及FORK组合机构,其中: [0004] The object of the invention is the implementation process of the present invention: the wafer transfer robot comprises a special structure around the chassis combination, Z-axis drive mechanism is supported, T-axis mechanism, the left and right arm mechanism R-axis is fixed, the movable arm mechanism R-axis, R and right and left arm-piece shaft FORK combination mechanism, wherein:

[0005] 机箱组合包括:机箱内衬套组合76、机箱内衬套门组合77 ; [0005] Chassis composition comprising: a liner assembly 76 in the chassis, the chassis bush door assembly 77;

[0006] Z轴传动支撑机构包括:Z轴上电子限位挡片38、三角支撑滑块42、Z轴丝杠轴承44、Z轴传动丝杠45、Z轴传动丝母46、上定位座48、Z轴电机联轴器50、Z轴电机驱动模块组合51、支撑花键轴52、Z轴下电子限位挡片组合53、Z轴下电子限位光电传感器54、Z轴上电子限位传感器55、下安装座67 ; [0006] Z-axis drive mechanism comprising a support: Z-axis electronic limit stop piece 38, supports the slider cam 42, Z-axis lead screw bearing 44, Z-axis drive screw 45, Z-axis drive nut 46, the spud 48, the Z-axis motor coupling 50, the Z-axis motor drive module 51 in combination, support the spline shaft 52, electronic limit stop piece 53 at the Z-axis in combination, electronic limit the photosensor 54 is the Z-axis, Z-axis electronic limited position sensor 55, the mount 67;

[0007] T轴机构包括:T轴大臂轴39、T轴谐波减速器40、T轴电机组合41、T轴编码器43、T轴联接盘47 ; [0007] T-axis mechanism comprising: T axis arm shaft 39, shaft harmonic reducer T 40, T 41 is a combination of the motor shaft, the shaft encoder 43 is T, the T-axis coupling disk 47;

[0008] R轴左右固定臂机构包括:R轴右固定臂丝杠轴承25、R轴右固定臂前端限位光电传感器26、R轴右固定臂前端支撑27、R轴右固定臂滑座28、R轴右固定臂前端电子限位挡片29、R轴右固定臂后端电子限位挡片30、R轴右固定臂传动丝母31、R轴右固定臂导轨滑块32、R轴右固定臂定位导轨33、R轴右固定臂传动丝杠34、R轴右固定臂后端电子限位光电传感器35、R轴右固定臂电机安装板36、R轴右固定臂伺服电机37、R轴随动机箱49、R轴右固定臂导轨定位钢棒56、机顶定位盖板组合57、R轴左固定臂导轨定位钢棒58、R轴左固定臂传动丝杠59、R轴左固定臂伺服电机60、R轴左固定臂电机安装板61、R轴左固定臂定位导轨62、R轴左固定臂导轨滑块63、R轴左固定臂后端电子限位光电传感器64、R轴左固定臂传动丝母65、R轴左固定臂滑座66、R轴左固定臂后端电子限位挡片68、R轴左固定臂前 [0008] R axis about the fixed arm mechanism comprising: a right R-axis arm fixing screw bearing 25, R right axis fixed arm distal limit photosensor 26, R right axis fixed arm tip support 27, R right axis 28 fixed to the carriage arm , R right axis arm distal end is fixed an electronic limit stop piece 29, R electronic rear arm right axis fixed limit stop piece 30, R drive shaft arm and right stationary nut 31, R right axis rail slider fixing arm 32, R shaft fixing the right positioning guide arm 33, R drive arm shaft right fixing screw 34, R electronic rear arm right axis fixed limit photosensor 35, R right axis motor mounting plate fixed to the arm 36, R-axis servomotor and right fixing arms 37, R chassis follower shaft 49, 57, R left axis positioning guide arm fixed to the bar 58, R drive shaft left arm fixing screw 59, the R-axis left and right R-axis positioning guide arm fixed to the bar 56, the top cover positioned composition servomotor fixed arm 60, R left axis motor mounting plate fixed to the arm 61, R left axis positioning guide fixed arm 62, R fixing arm shaft left slide rails 63, R fixing shaft left rear arm electronic limit photosensor 64, R left arm drive shaft fixing nut 65, front 66, left axis R electronic limit stop fixed to the rear end arm pieces 68, left axis R R fixing arm fixing shaft left arm carriage 电子限位挡片69、R轴左固定臂丝杠轴承70、R轴左固定臂前端支撑71、R轴左固定臂前端电子限位光电传感器72 ; Electronic limit stop piece 69, R screw fixing arm shaft left bearing 70, R left fixing arm tip support shaft 71, R fixing shaft left arm tip electronic limit photosensor 72;

[0009] R轴左右活动臂包括:R轴左活动臂前端支撑4、R轴左活动臂前端电子限位光电传感器5、R轴左活动臂前端电子限位挡片6、R轴左活动臂丝杠轴承7、R轴左活动臂传动丝母8、R轴右活动臂前端支撑9、R轴右活动臂丝杠轴承10、R轴右活动臂前端电子限位挡片12、R轴右活动臂前端电子限位光电传感器13、R轴右活动臂传动丝母14、R轴右活动臂导轨滑块16、R轴右活动臂传动丝杠17、R轴右活动臂定位导轨18、R轴右活动臂滑座19、R轴右活动臂后端电子限位挡片20、R轴右活动臂电机安装板21、R轴右活动臂后端电子限位光电传感器22、R轴右活动臂伺服电机23、R轴右活动臂臂体24、R轴左活动臂伺服电机73、R轴左活动臂电机安装板74、R轴左活动臂后端电子限位光电传感器75、R轴左活动臂传动丝杠78、R轴左活动臂导轨滑块79、R轴左活动臂臂体80、R轴左活动臂定位导轨81、R轴左 [0009] R axis about the movable arm comprising: a left front end of the movable arm shaft supporting R 4, R moveable arm shaft left front end electronics limit the photosensor 5, R-axis arm is a left front end electronics limit the flap 6, R left axis movable arm screw bearings 7, R activity left arm drive shaft nut 8, R activity and right arm tip support shaft 9, R screw bearings right axis movable arm 10, R-axis and right front-end electronics limit the movable arm flaps 12, R right axis activity arm tip electronic limit photosensor 13, R movable arm and right drive shaft nut 14, the movable arm and right slider guide shaft R 16, R drive the movable arm and right screw shafts 17, R right axis positioning guide the movable arm 18, R Right axis carriage movable arm 19, the rear end of the movable arm and right R-axis electronic limit stop piece 20, R right axis movable arm motor mounting plate 21, R movable arm and right rear axle electronic limit photosensor 22, R right axis activities servo motor arm 23, R-axis movable arm and right arm body 24, R-axis servomotor left movable arm 73, R-axis motor mounting plate left movable arm 74, R moveable arm shaft left rear electronic limit photosensor 75, R left axis movable arm drive screw 78, R moveable arm shaft left slide rails 79, R movable arm shaft left arm body 80, R left axis positioning guide the movable arm 81, R left axis 活动臂后端电子限位挡片82、R轴左活动臂滑座83、R轴左活动臂定位导轨定位钢棒84、R轴右活动臂导轨定位钢棒85 ; The rear end of the movable arm electronic limit stop piece 82, R left axis carriage movable arm 83, R left axis positioning guide arm is positioned the bar 84, R right axis movable arm rail steel bar 85 is positioned;

[0010] R轴左右取片臂包括:F0RK组合1、R轴左取片臂气路管接头2、R轴左取片臂臂体 [0010] about the R-axis arm-piece comprising: F0RK composition 1, R-pieces left arm shaft gas passage pipe joint 2, R-pieces left arm shaft arm

3、R轴右取片臂气路管接头U、R轴右取片臂臂体15。 3, R right axis arm-piece manifold fittings U, R-axis arm and right arm-piece 15.

[0011] 特殊结构的硅片传输机器人整体结构为:以Z轴传动支撑机构为机体的主支撑,支撑整机重量及R轴悬臂的力矩,并为T轴机构与R轴机构提供沿Z轴上下移动的驱动与定位。 Wafer Transmission [0011] The special structure of the overall configuration of the robot is: the Z-axis drive mechanism to support the main support body, and supports the whole weight of R torque shaft of the arm, and provided along the Z-axis and T-axis mechanism R-axis mechanism vertically moving and positioning drive. T轴机构安装于Z轴传动支撑机构之上,为R轴提供沿T轴中心旋转的驱动与定位。 T-axis mechanism is mounted on top of the Z-axis drive mechanism is supported, there is provided along the center axis T rotates with the drive shaft positioned R. R轴机构整体安装在机顶定位盖板组合57上,通过定位与驱动装置,使活动左右臂前后平移运动;而活动左右臂又通过安装的定位与驱动装置,使左右取片臂带动FORK组合作前后移动,最终完成规定的工作轨迹。 R-axis mechanism integrally mounted on the top cover plate combination 57 is positioned by positioning the drive means, the movable arm around, translational movement; turn left and right arm is positioned by means of the drive installed, the left and right arm-piece group led FORK cooperation move back and forth, and finally complete the required work trajectory.

[0012] 机箱组合由机箱内衬套组合76、机箱内衬套门组合77构成,安装于Z轴传动支撑机构的下安装座67上,只在机构中起隔绝作用。 [0012] The chassis constituting the liner assembly 76 in combination, the chassis door liner compositions of the chassis 77, mounted on the Z-axis drive mechanism supported on the mount 67, only play a role in the isolation mechanism.

[0013] 在Z轴传动支撑机构中,三根支撑花键轴52下端安装于下安装座67上,上端安装在上定位座48上,构成整机的支撑。 [0013] Z-axis drive mechanism is supported, three supporting the lower end of a spline shaft 52 mounted on the lower mounting base 67, mounted on the upper end of the positioning seat 48, constituting the support of the machine. 三角支撑滑块42安装在三根支撑花键轴52上,并由三根支撑花键轴52提供沿Z轴上下移动的定位;三角支撑滑块42的中心孔内,用于安装T轴机构的部件;Z轴电机驱动模块组合51安装在下安装座67上,通过Z轴电机联轴器50、Z轴传动丝杠45、Z轴传动丝母46、Z轴丝杠轴承44与上定位座48相连接,构成Z轴驱动装置驱动路径的定位;Z轴传动丝母46通过螺栓紧固于三角支撑滑块42的安装孔内,使Z轴驱动装置通过三角支撑滑块42,完成对T轴机构与R轴机构的驱动。 Triangular support slider 42 is mounted on a three spline shaft 52 is supported by three supporting the spline shaft 52 to provide movement along the Z-axis is positioned lower; triangular supports the slider 42 of the central bore, means for mounting the T-axis mechanism ; Z-axis motor drive module assembly 51 is mounted on the lower mounting base 67, by coupling Z-axis motor 50, the Z-axis drive screw 45, the drive nut 46 is the Z-axis, the Z-axis on the positioning screw 44 and the bearing holder 48 with connector, constituting the positioning means of the Z-axis drive drive path; Z-axis drive nut 46 is bolted to the triangular support hole 42 of the slider mounting, the Z-axis driving device by a triangular support slider 42, to complete the T-axis mechanism and the R-axis drive mechanism.

[0014] 在T轴机构中,T轴电机组合41、T轴谐波减速器40通过螺栓紧固在Z轴传动支撑机构的三角支撑滑块42的中心孔内,T轴大臂轴39的下端通过定位止口,安装在T轴谐波减速器40的输出端;T轴大臂轴39的上端,通过定位止口与T轴联接盘47相联接;当T轴电机组合41通电运行时,T轴联接盘47可得到经过一定的传动比减速后的转速传给R轴机构;Τ轴编码器43安装于T轴电机组合41的后轴端,当T轴电机组合41通电运行时,T轴编码器43开始向控制计算机反馈T轴电机组合41的运行参数,以完成控制计算机对T轴电机组合41的控制。 [0014] In the T-axis mechanism, T 41 is a combination of the motor shaft, T-axis harmonic speed reducer 40 is fastened by a bolt in the Z-axis drive cam support mechanism supports the slider of the central bore 42, T-axis of the arm shaft 39 by positioning the lower end spigot mounted at the output shaft 40 of the harmonic reducer T; T-axis upper arm shaft 39 by positioning the T-spigot coupling disk 47 coupled to the shaft; axis T when the motor 41 is energized in combination runtime , T-axis plate 47 is coupled through a certain transmission ratio is obtained after the rotation speed reduction mechanism R-axis pass; Τ shaft encoder 43 mounted on the T-axis shaft 41 after the motor assembly, the motor assembly 41 when energized T-axis running, the T-axis encoder 43 starts feedback T-axis motor 41 to a combination of operating parameters of a control computer, control the computer to perform a combination of the T-axis motor 41 is controlled.

[0015] 在R轴左右固定臂机构中,机顶定位盖板组合57通过定位止口与T轴机构中的T轴联接盘47联接,并以螺栓紧固;R轴随动机箱49也以螺栓紧固在机顶定位盖板组合57上;因此,机顶定位盖板组合57与R轴随动机箱49同时随T轴进行旋转,并带动R轴机构同时旋转;机顶定位盖板组合57上表面的凹槽内,安装有R轴右固定臂定位导轨33、R轴左固定臂定位导轨62、并以R轴右固定臂导轨定位钢棒56、R轴左固定臂导轨定位钢棒58、进行侧向靠紧定位;在R轴右固定臂定位导轨33上,安装有四个R轴右固定臂导轨滑块32,滑块上安装有R轴右固定臂滑座28 ;在R轴左固定臂定位导轨62上,安装有四个R轴左固定臂导轨滑块63,滑块上安装有R轴左固定臂滑座66 ;在机顶定位盖板组合57的后端定位槽内,安装有R轴右固定臂电机安装板36、R轴左固定臂电机安装板61 ;R轴右固定臂伺服电机37 [0015] R in the left and right arms fixed to the shaft means, the top cover is positioned by the positioning stopper 57 in combination with port T in the T-disc shaft coupling mechanism 47 coupled to the shaft, and bolted; R chassis follower shaft 49 also bolts positioned on the top cover 57 combination; Thus, top cover plate is positioned 57 in combination with R chassis 49 while the follower axis with the axis of rotation T, and R-axis drive mechanism while being rotated; top plate positioned composition the upper surface of the groove 57, is attached to the right R-axis positioning guide fixed arm 33, R-axis positioning guide arm 62 fixed to the left and to the right R-axis positioning guide arm fixed to the bar 56, R left axis positioning guide arm fixed to the bar 58, positioned laterally abut; R on the right axis positioning guide arm 33 is fixed, is attached to four R a right shaft guide arm fixed to the slider 32, R attached to the carriage arm shaft 28 fixed to the right on the slide; the R the left axis positioning guide fixed arm 62, attached to four R fixing arm shaft left slide rails 63, R attached to the carriage arm shaft 66 fixed to a left slider; positioning the cover plate on the top rear end of the positioning groove 57 of the composition the attached arm fixed to the right R-axis motor mounting plate 36, R left axis motor mounting plate 61 is fixed to the arm; R axis servomotor 37 and right fixing arms 过定位凸缘,以螺钉安装在R轴右固定臂电机安装板36上;R轴左固定臂伺服电机60通过定位凸缘,以螺钉安装在R轴左固定臂电机安装板61上;将R轴右固定臂传动丝母31的螺纹旋入R轴右固定臂传动丝杠34的螺纹,使R轴右固定臂传动丝杠34 —端的凹孔套入R轴右固定臂伺服电机37的电机轴,以紧定螺钉固定;将R轴右固定臂传动丝杠34的另一端安装R轴右固定臂丝杠轴承25,并以R轴右固定臂前端支撑27装入轴承外环,然后将R轴右固定臂前端支撑27以螺栓安装在机顶定位盖板组合57的前端面上;将R轴左固定臂传动丝母65的螺纹旋入R轴左固定臂传动丝杠59的螺纹,使R轴左固定臂传动丝杠59的一端的凹孔套入R轴左固定臂伺服电机60的电机轴,以紧定螺钉固定;将R轴左固定臂传动丝杠59的另一端安装R轴左固定臂丝杠轴承70,并以R轴左固定臂前端支撑71装入轴承外环, Positioned over the flange, a screw mounted on the stationary arm and right R-axis motor mounting plate 36; the R-axis servomotor left arm is fixed by the positioning flange 60, a screw shaft mounted on the left R motor mounting plate 61 fixed to the arm; and R Right arm drive shaft fixing nut thread 31 is screwed into a right R-axis drive screw threaded fixing arm 34, the arm fixed to the right R-axis drive screw 34 - sleeve end into recesses and right R-axis motor 37 fixed to the arm of the servomotor axis, a tight set screw fixed; the other end of the fixed arm and right R-axis drive screw 34 is fixed to the right arm mounting axis R screw bearing 25, and is fixed to the right R-axis tip support arm 27 into the bearing outer ring, and then R right securing arm tip support shaft 27 is mounted to the front end face of the bolt is positioned in the top cover plate 57 of the composition; the screw shaft left fixing arm R drive nut 65 screwed into the threaded shaft R left arm drive screw 59 is fixed, recesses one end to be fixed to the left arm drive shaft R screw shaft 59 is set into the R-axis motor fixed to the left arm of the servo motor 60, a tight set screw fixed; the other end fixed to the left arm R drive screw shaft 59 is R left arm shaft fixing screw bearing 70, the front end of the fixed arm and the left shaft support 71 R into the bearing outer race, 后将R轴左固定臂前端支撑71以螺栓安装在机顶定位盖板组合57的前端面上;将R轴右固定臂传动丝母31通过螺钉与R轴右固定臂滑座28联接,使其可沿R轴右固定臂定位导轨33前后平移;将R轴左固定臂传动丝母65通过螺钉与R轴左固定臂滑座66联接,使其可沿R轴左固定臂定位导轨62前后平移;将R轴右固定臂前端限位光电传感器26、R轴左固定臂前端电子限位光电传感器72分别安装在R轴右固定臂前端支撑27、R轴左固定臂前端支撑71的外侧面,将R轴右固定臂前端电子限位挡片29、R轴左固定臂前端电子限位挡片69分别安装在R轴右固定臂滑座28、R轴左固定臂滑座66的外侧面,调整至硬限位面大约5_距离时,光电传感器反馈信号,伺服电机停止运转;将R轴右固定臂后端电子限位光电传感器35、R轴左固定臂后端电子限位光电传感器64分别安装在R轴右固定臂电机安装板36、R Left axis R after fixing arm 71 to the front end of the support bolt positioned on the front face top cover 57 combination; and R the right axis drive nut 31 is fixed by screws to the arm axis R the right securing arm coupled to the carriage 28, so that R which may be positioned along the longitudinal axis of the rail arm 33 fixed to the right translation; the R-axis left arm drive nut 65 is fixed by screws to the R-axis slide arm 66 fixed to the left coupling, so as to be fixed to the front and rear left arm along the R axis positioning guide 62 translation; the front end of the fixed arm and right R-axis limit photosensor 26, R fixing shaft left arm tip electronic limit photosensor 72 are mounted to the right R-axis support fixed to the front end of the arm 27, R fixing shaft left support arm distal end of the outer side surface 71 the front end of the fixed arm right axis R electronic limit stop piece 29, R fixing shaft left arm tip electronic limit stops 69 are mounted on plate 28, a right outer side surface of the fixed arm axis R R-axis carriage left arm carriage 66 is fixed when a hard limit is adjusted to about 5_ surface distance, the photosensor feedback signal, the servo motor stops; the rear end of the fixed arm right axis R electronic limit photosensor 35, R fixing shaft left rear arm photosensor electronic limit R 64 respectively mounted on the right shaft motor mounting plate fixed to the arm 36, R 左固定臂电机安装板61的外侧面,将R轴右固定臂后端电子限位挡片30、R轴左固定臂后端电子限位挡片68分别安装在R轴右固定臂滑座28、R轴左固定臂滑座66的外侧面,调整至硬限位面大约5mm距离时,光电传感器反馈信号,伺服电机停止运转。 An outer side surface of the left arm motor mounting plate 61 is fixed to the rear end of the fixed arm right axis R electronic limit flaps 30, R fixing shaft left rear arm 68 an electronic limit stop piece are mounted on the R-axis slide arm 28 fixed to the right when the outer arm fixed to the left side surface of the R-axis of the carriage 66, is adjusted to about 5mm from the surface hard limit, the photosensor feedback signal, the servo motor stops.

[0016] 在R轴左右活动臂结构中,R轴右活动臂臂体24、R轴左活动臂臂体80分别安装在R轴左右固定臂机构中的R轴右固定臂滑座28、R轴左固定臂滑座66的上端面上,并可随R轴右固定臂滑座28、R轴左固定臂滑座66沿导轨作前后平移运动;在R轴右活动臂臂体24上表面的槽内,安装有R轴右活动臂定位导轨18,并以R轴右活动臂导轨定位钢棒85进行侧向靠紧定位;在R轴左活动臂臂体80上表面的槽内,安装有R轴左活动臂定位导轨81,并以R轴左活动臂定位导轨定位钢棒84进行侧向靠紧定位;在R轴右活动臂定位导轨18上,安装有四个R轴右活动臂导轨滑块16,滑块上安装有R轴右活动臂滑座19 ;在R轴左活动臂定位导轨81上,安装有四个R轴左活动臂导轨滑块79,滑块上安装有R轴左活动臂滑座83 ;在R轴右活动臂臂体24后端的定位槽内,安装有R轴右活动臂电机安装板21,R轴右活动臂 [0016] about the R-axis movable arm structures, R right axis movable arm of the arm body 24, R left axis movable arm arm 80 are mounted around the R-axis is fixed the arm mechanism R-axis and right fixing arms of the carriage 28, R left axis fixed arm upper end face of the carriage 66, and is fixed with the right R-axis carriage arm 28, R fixing shaft left arm carriage 66 back and forth translational movement along the rail; the R axis on the right surface of the movable arm 24 arm the tank is mounted movable arm and right R-axis positioning guide 18, and the movable arm to the right R-axis guide rails 85 for lateral positioning against the steel rod is positioned; the movable arm 80 in the left arm of the groove surface of the R-axis, the installation R-axis movable arm has a left positioning guide 81, the movable arm and the left positioning guide positioning the bar 84 positioned against the lateral axis R; R on the right axis positioning guide the movable arm 18 is attached to the movable arm and right shaft four R rail slider 16, the slider is mounted with a movable arm and right R-axis slide 19; movable arm on the left positioning guide shaft R 81, R attached to four active arm shaft left slide rails 79 mounted on the slider R left axis carriage movable arm 83; positioning groove 24 at the rear end of the movable arm and right R-axis arm, attached to the movable arm and right R-axis motor mounting plate 21, R right axis movable arm 服电机23通过定位凸缘,以螺钉安装在R轴右活动臂电机安装板21上;在R轴左活动臂臂体80后端的定位槽内,安装有R轴左活动臂电机安装板74,R轴左活动臂伺服电机73通过定位凸缘,以螺钉安装在R轴左活动臂电机安装板74上;将R轴右活动臂传动丝母14的螺纹旋入R轴右活动臂传动丝杠17的螺纹,使R轴右活动臂传动丝杠17 —端的凹孔套入R轴右活动臂伺服电机23的电机轴,以紧定螺钉固定;将R轴左活动臂传动丝母8的螺纹旋入R轴左活动臂传动丝杠78的螺纹,使R轴左活动臂传动丝杠78 —端的凹孔套入R轴左活动臂伺服电机73的电机轴,以紧定螺钉固定;将R轴右活动臂传动丝杠 Servo motor 23 by positioning the flange, a screw is mounted on a movable arm and right R-axis motor mounting plate 21; R left arm movable arm shaft positioning groove 80 of the rear end of the body, is attached to the R-axis arm is a left motor mounting plate 74, R-axis servomotor left arm is positioned by a flange 73, a screw mounted on the left arm motor mounting plate 74 active R-axis; the right arm is the threaded drive nut 14 is screwed into the R-axis and right R-axis drive screw movable arm threads 17 of the right movable arm drive the R-axis spindle 17-- recesses end sleeve onto the motor shaft R shaft and right arm is servomotor 23 to tight fixing screw; the threaded R left axis movable arm drive nut 8 R shaft screwed into a left threaded screw 78 drives the movable arm so that the left arm is R-axis drive screw 78 - terminal R of the set into the recesses left arm is servomotor shaft motor shaft 73, a tight set screw fixing; and R Right axis movable arm drive screw

17的另一端安装R轴右活动臂丝杠轴承10,并以R轴右活动臂前端支撑9装入轴承外环,然后将R轴右活动臂前端支撑9以螺栓安装在R轴右活动臂臂体24的前端面上;将R轴左活动臂传动丝杠78的另一端安装R轴左活动臂丝杠轴承7,并以R轴左活动臂前端支撑4装入轴承外环,然后将R轴左活动臂前端支撑4以螺栓安装在R轴左活动臂臂体80的前端面上;将R轴右活动臂传动丝母14通过螺钉与R轴右活动臂滑座19联接,使其可沿R轴右活动臂定位导轨18前后平移;将R轴左活动臂传动丝母8通过螺钉与R轴左活动臂滑座83联接,使其可沿R轴左活动臂定位导轨81前后平移;将R轴右活动臂前端电子限位光电传感器13、R轴左活动臂前端电子限位光电传感器5分别安装在R轴右活动臂前端支撑9、R轴左活动臂前端支撑4的外侧面,将R轴右活动臂前端电子限位挡片12、R轴左活动臂前端电子限位 The other end 17 of the movable arm and right R-axis mounting screw bearing 10, the right and to the R-axis moving arm 9 into the bearing supporting the front end of the outer ring, and the right axis R tip support arm is mounted on the bolt 9 to the right R-axis movable arm the front end surface of the arm 24; the other end of the left arm is R-axis drive screw 78 is mounted movable arm R screw shaft left bearing 7, the front end of the moveable arm and the left support shaft R 4 into the bearing outer ring, and then R left distal shaft supporting the movable arm 4 are mounted on the front end face of the bolt shaft R left arm body 80 of the movable arm; activities of the right arm drive nut 14 by a screw shaft R and R right axis movable arm coupled to the carriage 19, so that the right moveable arm may be positioned along the longitudinal axis guide rails 18 R pan; the R event left arm drive shaft 8 by a screw nut shaft R and the left arm is coupled to the carriage 83, so that it can translate along the longitudinal axis R activity left positioning guide arm 81 ; the front end of the movable arm and right R-axis electronic limit photosensor 13, R moveable arm shaft left front end electronics limit the photosensor 5 are respectively mounted on the front end of the right arm is a support shaft 9 R, R left movable arm distal end of the shaft supporting the outer surface 4 the front end of the movable arm and right R-axis electronic limit flaps 12, R moveable arm shaft left front end electronics limit 片6分别安装在R轴右活动臂滑座19、R轴左活动臂滑座83的外侧面,调整至硬限位面大约5_距离时,光电传感器反馈信号,伺服电机停止运转;将R轴右活动臂后端电子限位光电传感器22、R轴左活动臂后端电子限位光电传感器75分别安装在R轴右活动臂电机安装板21、R轴左活动臂电机安装板74的外侧面,将R轴右活动臂后端电子限位挡片20、R轴左活动臂后端电子限位挡片82分别安装在R轴右活动臂滑座19、R轴左活动臂滑座83的外侧面,调整至硬限位面大约5mm距离时,光电传感器反馈信号,伺服电机停止运转。 When the sheet 6 are mounted, a left outer side R-axis slide 83 is movable arm and right R-axis carriage movable arm 19, to adjust the surface of the hard limit 5_ about distance, the photosensor feedback signal, the servo motor stops; and R Right axis movable arm rear electronic limit photosensor 22, R moveable arm shaft left rear electronic limit photoelectric sensor 75 are mounted on the movable arm and right R-axis motor mounting plate 21, R-axis motor left arm is mounted in the outer panel 74 side, and the right rear end of the movable arm shaft electronic limit stop sheet R 20, R moveable arm shaft left rear chip electronic limit stop 82 are mounted movable arm and right R-axis carriage 19, R left axis carriage 83 movable arm when the outer side surface of the hard limit is adjusted to about 5mm from the photosensor feedback signal, the servo motor stops.

[0017] 在R轴左右取片臂及FORK组合机构中,R轴右取片臂臂体15、R轴左取片臂臂体3分别安装在R轴左右活动臂机构中的R轴右活动臂滑座19、R轴左活动臂滑座83的上端面上,并可随R轴右活动臂滑座19、R轴左活动臂滑座83沿导轨作前后平移运动;F0RK组合I总共有两个,分别安装在R轴右取片臂臂体15、R轴左取片臂臂体3的前端定位槽内,FORK组合I的进气口部位安装有密封垫圈洱轴右取片臂气路管接头11、R轴左取片臂气路管接头2分别安装在R轴右取片臂臂体15、R轴左取片臂臂体3的外侧面;当设备工作时,在控-Z轴下电子限位光电传感器、55-Z轴上电子限位传感器、56-R轴右固定臂导轨定位钢棒、57-机顶定位盖板组合、58-R轴左固定臂导轨定位钢棒、59-R轴左固定臂传动丝杠、60-R轴左固定臂伺服电机、61-R轴左固定臂电机安装板、62-R轴左固定臂定位导轨、63-R轴左固定臂导 R Right axis event [0017] about the R-axis-piece arm and FORK combination mechanism, R right axis-piece boom arm 15, R-axis left-piece boom arm 3 are mounted around the R-axis moveable arm mechanism is the carriage arm 19, the upper end of the movable arm R-axis carriage 83 left surface, right axis R and the movable arm with the carriage 19, left axis R moveable arm carriage 83 back and forth translational movement along the rail; F0RK total composition I two, are attached to an arm-piece of the arm body 15 at a right R-axis, the R axis a left distal end-piece boom arm positioning groove of the body 3, the air intake portion FORK composition I er sealing gasket is mounted right axis arm-piece gas passage pipe joint 11, R-axis left-piece arm manifold fittings 2 are attached to the unload arm of the arm body 15 in the R right axis, R-axis left-piece boom arm outer side surface 3 of the body; when the device is working, the control - electronic limit the Z-axis photoelectric sensor, 55-Z-axis limit sensor electronics, 56-R fixed to the right arm axis positioning guide bars, 57- top plate positioned composition, 58-R fixed to the left arm axis positioning rail steel bar, 59-R fixed to the left arm drive screw shaft, 60-R-axis servomotor left stationary arm, 61-R axis motor mounting plate left arm is fixed, 62-R-axis positioning guide arm fixed to the left, 63-R fixed shaft left guide arm 轨滑块、64-R轴左固定臂后端电子限位光电传感器、65-R轴左固定臂传动丝母、66-R轴左固定臂滑座、67-下安装座、68-R轴左固定臂后端电子限位挡片、69-R轴左固定臂前端电子限位挡片、70-R轴左固定臂丝杠轴承、71-R轴左固定臂前端支撑、72-R轴左固定臂前端电子限位光电传感器、73-R轴左活动臂伺服电机、74-R轴左活动臂电机安装板、75-R轴左活动臂后端电子限位光电传感器、76-机箱内衬套组合、77-机箱内衬套门组合、78-R轴左活动臂传动丝杠、79-R轴左活动臂导轨滑块、80-R轴左活动臂臂体、81-R轴左活动臂定位导轨、82-R轴左活动臂后端电子限位挡片、83-R轴左活动臂滑座、84-R轴左活动臂定位导轨定位钢棒、85-R轴右活动臂导轨定位钢棒。 Slide track, 64-R axis of the rear end of the left arm fixed electronic limit photoelectric sensor, 65-R fixed to the left arm drive shaft nut, 66-R fixed shaft left arm slide, mount the 67-, 68-R axis the left rear end of the fixed arm electronic limit stop piece, 69-R fixed to the left arm shaft front end electronics limit stop piece, 70-R fixed to the left arm screw shaft bearings, 71-R fixed to the left arm tip support shaft, 72-R axis electronic limit fixed arm distal left photosensor, 73-R activity left arm axis servomotor, 74-R activity left arm axis motor mounting plate, 75-R axis of the rear end of the left arm is electronic limit photoelectric sensor, a chassis 76- liner combination, the liner within the door assembly chassis 77-, 78-R activity left arm drive screw shaft, 79-R activity left arm axis rail slider, 80-R-axis movable arm left arm, 81-R left axis positioning guide the movable arm, the movable arm left rear axle 82-R electronic limit stop piece, 83-R activity left arm axis carriage, 84-R activity left arm axis positioning guide positioning steel bar, 85-R right axis movable arm Lock Lock steel bars.

具体实施方式 detailed description

[0018] 结合附图对本发明作进一步说明: [0018] DRAWINGS The present invention is further described:

[0019] 参照附图所示,一种特殊结构的硅片传输机器人包括:F0RK组合1、R轴左取片臂气路管接头2、R轴左取片臂臂体3、R轴左活动臂前端支撑4、R轴左活动臂前端电子限位光电传感器5、R轴左活动臂前端电子限位挡片6、R轴左活动臂丝杠轴承7、R轴左活动臂传动丝母8、R轴右活动臂前端支撑9、R轴右活动臂丝杠轴承10、R轴右取片臂气路管接头11、R轴右活动臂前端电子限位挡片12、R轴右活动臂前端电子限位光电传感器13、R轴右活动臂传动丝母14、R轴右取片臂臂体15、R轴右活动臂导轨滑块16、R轴右活动臂传动丝杠17、R轴右活动臂定位导轨18、R轴右活动臂滑座19、R轴右活动臂后端电子限位挡片20、R轴右活动臂电机安装板21、R轴右活动臂后端电子限位光电传感器22、R轴右活动臂伺服电机23、R轴右活动臂臂体24、R轴右固定臂丝杠轴承25、R轴右固定臂前端限位光电传感 [0019] Referring to the drawings shown, the wafer transfer robot comprises a special structure: F0RK composition 1, R-pieces left arm shaft gas passage pipe joint 2, R-pieces left arm shaft arm 3, R left axis activities the front end of the arm support 4, R moveable arm shaft left front end electronics limit the photosensor 5, R-axis arm is a left front end electronics limit the flap 6, R bearing screw shaft left movable arm 7, R activity left arm drive shaft nut 8 , a right front end of the movable arm shaft supporting R 9, R screw bearings right axis movable arm 10, R right axis arm-piece manifold fittings 11, R-axis and right front-end electronics limit the movable arm flaps 12, R right axis movable arm front end electronics limit the photosensor 13, R right axis movable arm drive nut 14, R-axis arm and right arm-piece 15, the movable arm and right slider guide shaft R 16, R drive the movable arm and right screw shafts 17, R shaft the right positioning guide the movable arm 18, R right axis carriage movable arm 19, the rear end of the movable arm and right R-axis electronic limit stop piece 20, R right axis movable arm motor mounting plate 21, R movable arm and right rear axle electronic limit photosensor 22, R-axis servomotor and right movable arm 23, R-axis movable arm and right arm body 24, R bearing screw shaft right fixing arms 25, R right axis photoelectric sensor fixed to the arm distal end stopper 26、R轴右固定臂前端支撑27、R轴右固定臂滑座28、R轴右固定臂前端电子限位挡片29、R轴右固定臂后端电子限位挡片30、R轴右固定臂传动丝母31、R轴右固定臂导轨滑块32、R轴右固定臂定位导轨33、R轴右固定臂传动丝杠34、R轴右固定臂后端电子限位光电传感器35、R轴右固定臂电机安装板36、R轴右固定臂伺服电机37、Z轴上电子限位挡片38、T轴大臂轴39、T轴谐波减速器40、T轴电机组合41、三角支撑滑块42、T轴编码器43、Z轴丝杠轴承44、Z轴传动丝杠45、Z轴传动丝母46、T轴联接盘47、上定位座48、R轴随动机箱49、Z轴电机联轴器50、Z轴电机驱动模块组合51、支撑花键轴52、Z轴下电子限位挡片组合53、Z轴下电子限位光电传感器54、Z轴上电子限位传感器55、R轴右固定臂制计算机指令的控制下,气路沿R轴右取片臂气路管接头11、R轴左取片臂气路管接头2,通过R轴右取片 26, R and right fixing arm tip support shaft 27, 28, R-axis and right front-end electronics arm fixed limit stop piece 29, R electronic rear arm right axis fixed limit stop piece 30, R-axis is fixed a right arm and right R-axis carriage fixing arm drive nut 31, R right axis rail slider fixing arm 32, R fixing arm right axis positioning guide 33, R drive arm shaft right fixing screw 34, R electronic rear arm right axis fixed limit photoelectric sensor 35, a right R-axis motor mounting plate fixed to the arm 36, R-axis servomotor and right fixing arms 37, Z-axis 38 is an electronic limit stop sheet, the T-axis arm shaft 39, the T-axis harmonic speed reducer 40, a combination of T-axis motor 41, triangular support slider 42, T-axis encoder 43, Z-axis lead screw bearing 44, Z-axis drive screw 45, Z-axis drive nut 46, T shaft coupling plate 47, the positioning seat 48, R 49 chassis shaft follower , Z-axis motor coupling 50, the Z-axis motor drive module 51 in combination, support the spline shaft 52, a combination of electronic limit stop piece 53 at the Z-axis, electronic limit the photosensor 54 is the Z-axis, Z-axis electronic limit sensor 55, under control of the R axis a right fixing arms made of computer instructions, the air passage along the R axis a right arm-piece manifold fittings 11, R-pieces left arm shaft gas passage pipe joint 2, the R-axis by the right-pieces 臂体15、R轴左取片臂臂体3内部气路,到达FORK组合I的吸附口,以完成吸片与放片的动作。 Arm 15, R-pieces left axis 3 arm inside the arm body air passage, reaches the adsorption port FORK I in combination, to complete the discharge operation of the suction disc sheet.

[0020] 本发明一种特殊结构的娃片传输机器人,具有如下优点: [0020] wa substrate transfer robot according to the present invention is a special structure, has the following advantages:

[0021] 1、由于特殊结构的娃片传输机器人的应用,有效的扩展了娃片传输机器人的使用空间,进一步加大了硅片传输机器人适应复杂工作路径的能力。 [0021] 1, sheet transfer robot baby due to the application of a special structure, the effective use of space extended sheet transfer robot baby, and further increase the ability to adapt to the complex wafer transfer robot working path.

[0022] 2、由于R轴机构采用了四个伺服电机独立控制,没有同步带传动机构,相对来说控制精度较高。 [0022] 2, due to the R-axis servomotor mechanism uses four independently controlled, there is no belt transmission mechanism is relatively high precision in control.

[0023] 3、由于机箱由内衬机箱和R轴随动机箱两层结构组成,因此密封性较好。 [0023] 3, since the chassis by the chassis and the liner R follower shaft two-layer structure consisting of the chassis, and therefore better sealing.

附图说明 BRIEF DESCRIPTION

[0024] 图1为本发明一种特殊结构的硅片传输机器人(R轴伸出)的三维立体图。 Three-dimensional map of the present invention, the wafer transfer robot of a special structure (R extending axis) of [0024] FIG.

[0025] 图2为本发明一种特殊结构的硅片传输机器人(R轴回缩)的三维分解图。 [0025] FIG wafer transfer robot 2 a special structure (R retraction axis) of a three-dimensional exploded view of the present disclosure.

[0026] 图3为本发明一种特殊结构的硅片传输机器人的零部件分解图。 Parts [0026] FIG. 3 of the present invention a special structure wafer transfer robot exploded FIG.

[0027] 在附图中,具体数字表示=1-FORK组合、2-R轴左取片臂气路管接头、3-R轴左取片臂臂体、4-R轴左活动臂前端支撑、5-R轴左活动臂前端电子限位光电传感器、6-R轴左活动臂前端电子限位挡片、7-R轴左活动臂丝杠轴承、8-R轴左活动臂传动丝母、9-R轴右活动臂前端支撑、IO-R轴右活动臂丝杠轴承、I1-R轴右取片臂气路管接头、12-R轴右活动臂前端电子限位挡片、13-R轴右活动臂前端电子限位光电传感器、14-R轴右活动臂传动丝母、15-R轴右取片臂臂体、16-R轴右活动臂导轨滑块、17-R轴右活动臂传动丝杠、18-R轴右活动臂定位导轨、19-R轴右活动臂滑座、20-R轴右活动臂后端电子限位挡片、21-R轴右活动臂电机安装板、22-R轴右活动臂后端电子限位光电传感器、23-R轴右活动臂伺服电机、24-R轴右活动臂臂体、25-R轴右固定臂丝杠轴承、26-R轴右固定臂前端限位光电传感器、27- [0027] In the drawings, the specific numerical composition = 1-FORK, 2-R axis of the left arm-piece manifold fittings, 3-R-axis arm-pieces left arm, 4-R activity left arm tip support shaft , 5-R-axis movable arm distal left photosensor electronic limit, 6-R-axis movable arm distal left blank electronic limit, 7-R activity left arm screw shaft bearings, 8-R activity left arm drive shaft nut , 9-R supporting the front end of the movable arm and right axis, IO-R axis of the movable arm and right screw bearings, I1-R axis of the right arm-piece manifold fittings, 12-R axis of the right front-end electronics limit the movable arm bracket, 13 Right axis movable arm distal -R electronic limit photoelectric sensor, a movable arm and right drive shaft nut 14-R, 15-R-axis arm and right arm-piece, the movable arm and right slider guide shaft 16-R, 17-R axis the right moveable arm drive screw, 18-R activity right axis positioning guide arm, 19-R activity arm right axis carriage, 20-R axis of the right rear end of the movable arm electronic limit stop piece, 21-R axis of the right arm motor activity mounting plates, 22-R axis of the right rear end of the movable arm electronic limit photoelectric sensor, 23-R-axis servomotor movable arm and right, 24-R-axis movable arm and right arm, 25-R fixed to the right arm lead screw shaft bearing, 26 -R right securing arm shaft distal limit photoelectric sensor, 27- R轴右固定臂前端支撑、28-R轴右固定臂滑座、29-R轴右固定臂前端电子限位挡片、30-R轴右固定臂后端电子限位挡片、31-R轴右固定臂传动丝母、32-R轴右固定臂导轨滑块、33-R轴右固定臂定位导轨、34-R轴右固定臂传动丝杠、35-R轴右固定臂后端电子限位光电传感器、36-R轴右固定臂电机安装板、37-R轴右固定臂伺服电机、38-Z轴上电子限位挡片、39-T轴大臂轴、40-T轴谐波减速器、41-T轴电机组合、42-三角支撑滑块、43-T轴编码器、44-Z轴丝杠轴承、45-Z轴传动丝杠、46-Z轴传动丝母、47-T轴联接盘、48-上定位座、49-R轴随动机箱、50-Z轴电机联轴器、51-Z轴电机驱动模块组合、52-支撑花键轴、53-Z轴下电子限位挡片组合、54导轨定位钢棒56、机顶定位盖板组合57、R轴左固定臂导轨定位钢棒58、R轴左固定臂传动丝杠59、R轴左固定臂伺服电机60、R轴左固定臂电机安装板61、R轴左固 A right front end of the support shaft fixing arm R, 28-R fixed to the right arm axis carriage, 29-R axis of the right arm distal end is fixed an electronic limit stop piece, 30-R axis of the rear end of the right arm fixed electronic limit stop piece, 31-R Right axis drive nut fixed arm, 32-R fixed to the right arm axis rail slider, 33-R-axis positioning guide arm fixed to the right, 34-R fixed to the right arm drive screw shaft, 35-R axis of the right rear end of the fixed arm electronics limit photoelectric sensor, 36-R fixed to the right arm axis motor mounting plate, 37-R fixed to the right arm axis servomotor, 38-Z-axis electronic limit stop piece, 39-T-axis arm shaft, 40-T-axis harmonic wave retarder, 41-T-axis motor combination, triangular support slider 42-, 43-T-axis encoder, 44-Z axis spindle bearings, 45-Z-axis drive screw, 46-Z shaft drive nut, 47 -T disc shaft coupling, the spud 48-, 49-R chassis follower shaft, the motor coupling 50-Z axis, 51-Z-axis motor driving module assembly, spline shaft support 52-, 53-Z axis electronic limit stop sheet composition, the bar 56 is positioned rails 54, top plate positioned composition 57, R left axis positioning guide arm fixed to the bar 58, R drive shaft left arm fixing screw 59, R-axis servomotor left fixing arm 60, R-axis motor mounting plate left stationary arm 61, R left solid shaft 定臂定位导轨62、R轴左固定臂导轨滑块63、R轴左固定臂后端电子限位光电传感器64、R轴左固定臂传动丝母65、R轴左固定臂滑座66、下安装座67、R轴左固定臂后端电子限位挡片68、R轴左固定臂前端电子限位挡片69、R轴左固定臂丝杠轴承70、R轴左固定臂前端支撑71、R轴左固定臂前端电子限位光电传感器72、R轴左活动臂伺服电机73、R轴左活动臂电机安装板74、R轴左活动臂后端电子限位光电传感器75、机箱内衬套组合76、机箱内衬套门组合77、R轴左活动臂传动丝杠78、R轴左活动臂导轨滑块79、R轴左活动臂臂体80、R轴左活动臂定位导轨81、R轴左活动臂后端电子限位挡片82、R轴左活动臂滑座83、R轴左活动臂定位导轨定位钢棒84、R轴右活动臂导轨定位钢棒85。 Positioning guide locking arm 62, R fixing arm shaft left slide rails 63, R fixing shaft left rear arm electronic limit photosensor 64, R drive shaft left arm fixing nut 65, R-axis slide arm 66 fixed to the left, the mounting seat 67, R fixing shaft left rear arm electronic limit stop piece 68, R fixing shaft left arm tip electronic limit stop piece 69, R screw fixing arm shaft left bearing 70, R distal arm support shaft 71 fixed to the left, R fixing shaft left arm tip electronic limit photosensor 72, R-axis servomotor 73 is left moveable arm, left arm is R-axis motor mounting plate 74, R moveable arm shaft left rear electronic limit photoelectric sensor 75, the chassis bush 76 in combination, the chassis combination door liner 77, R activity left arm drive screw shaft 78, R moveable arm shaft left slide rails 79, R movable arm shaft left arm body 80, R left axis positioning guide the movable arm 81, R left rear movable arm shaft electronic limit stop piece 82, R left axis carriage movable arm 83, R left axis positioning guide arm is positioned the bar 84, R right axis movable arm positioning the bar rail 85.

[0028] 特殊结构的硅片传输机器人整体结构为:以Z轴传动支撑机构为机体的主支撑,支撑整机重量及R轴悬臂的力矩,并为T轴机构与R轴机构提供沿Z轴上下移动的驱动与定位。 Wafer Transmission [0028] The special structure of the overall configuration of the robot is: the Z-axis drive mechanism to support the main support body, and supports the whole weight of R torque shaft of the arm, and provided along the Z-axis and T-axis mechanism R-axis mechanism vertically moving and positioning drive. T轴机构安装于Z轴传动支撑机构之上,为R轴提供沿T轴中心旋转的驱动与定位。 T-axis mechanism is mounted on top of the Z-axis drive mechanism is supported, there is provided along the center axis T rotates with the drive shaft positioned R. R轴机构整体安装在机顶定位盖板组合57上,通过定位与驱动装置,使活动左右臂前后平移运动;而活动左右臂又通过安装的定位与驱动装置,使左右取片臂带动FORK组合作前后移动,最终完成规定的工作轨迹。 R-axis mechanism integrally mounted on the top cover plate combination 57 is positioned by positioning the drive means, the movable arm around, translational movement; turn left and right arm is positioned by means of the drive installed, the left and right arm-piece group led FORK cooperation move back and forth, and finally complete the required work trajectory. [0029] 机箱组合由机箱内衬套组合76、机箱内衬套门组合77构成,安装于Z轴传动支撑机构的下安装座67上,在R轴随动机箱49随R轴升起时,在机构中起遮蔽与隔绝作用。 [0029] The liner assembly-chassis 76, the chassis 77 constituting the inner liner compositions door of the enclosure, the lower mount attached to the Z-axis drive mechanism 67 is supported, the movable chassis 49 with the axis R with R rises in the shaft, the since the shielding effect in isolated bodies.

[0030] 在Z轴传动支撑机构中,三根支撑花键轴52下端安装于下安装座67上,上端安装在上定位座48上,构成整机的支撑。 [0030] Z-axis drive mechanism is supported, three supporting the lower end of a spline shaft 52 mounted on the lower mounting base 67, mounted on the upper end of the positioning seat 48, constituting the support of the machine. 三角支撑滑块42安装在三根支撑花键轴52上,并由三根支撑花键轴52提供沿Z轴上下移动的定位;三角支撑滑块42的中心孔内,用于安装T轴机构的部件;Z轴电机驱动模块组合51安装在下安装座67上,通过Z轴电机联轴器50、Z轴传动丝杠45、Z轴传动丝母46、Z轴丝杠轴承44与上定位座48相连接,构成Z轴驱动装置驱动路径的定位;Z轴传动丝母46通过螺栓紧固于三角支撑滑块42的安装孔内,使Z轴驱动装置通过三角支撑滑块42,完成对T轴机构与R轴机构的驱动。 Triangular support slider 42 is mounted on a three spline shaft 52 is supported by three supporting the spline shaft 52 to provide movement along the Z-axis is positioned lower; triangular supports the slider 42 of the central bore, means for mounting the T-axis mechanism ; Z-axis motor drive module assembly 51 is mounted on the lower mounting base 67, by coupling Z-axis motor 50, the Z-axis drive screw 45, the drive nut 46 is the Z-axis, the Z-axis on the positioning screw 44 and the bearing holder 48 with connector, constituting the positioning means of the Z-axis drive drive path; Z-axis drive nut 46 is bolted to the triangular support hole 42 of the slider mounting, the Z-axis driving device by a triangular support slider 42, to complete the T-axis mechanism and the R-axis drive mechanism.

[0031] 在T轴机构中,T轴电机组合41、T轴谐波减速器40通过螺栓紧固在Z轴传动支撑机构的三角支撑滑块42的中心孔内,T轴大臂轴39的下端通过定位止口,安装在T轴谐波减速器40的输出端;T轴大臂轴39的上端,通过定位止口与T轴联接盘47相联接;当T轴电机组合41通电运行时,T轴联接盘47可得到经过一定的传动比减速后的转速传给R轴机构;T轴编码器43安装于T轴电机组合41的后轴端,当T轴电机组合41通电运行时,T轴编码器43开始向控制计算机反馈T轴电机组合41的运行参数,以完成控制计算机对T轴电机组合41的控制。 [0031] In the T-axis mechanism, T 41 is a combination of the motor shaft, T-axis harmonic speed reducer 40 is fastened by a bolt in the Z-axis drive cam support mechanism supports the slider of the central bore 42, T-axis of the arm shaft 39 by positioning the lower end spigot mounted at the output shaft 40 of the harmonic reducer T; T-axis upper arm shaft 39 by positioning the T-spigot coupling disk 47 coupled to the shaft; axis T when the motor 41 is energized in combination runtime , T-axis plate 47 is coupled through a certain transmission ratio is obtained after the rotation speed reduction mechanism R-axis pass; T-axis encoder 43 is attached to the shaft after the T-axis motor assembly 41, when the T-axis motor 41 is energized in combination operation, the T-axis encoder 43 starts feedback T-axis motor 41 to a combination of operating parameters of a control computer, control the computer to perform a combination of the T-axis motor 41 is controlled.

[0032] 在R轴左右固定臂机构中,机顶定位盖板组合57通过定位止口与T轴机构中的T轴联接盘47联接,并以螺栓紧固;R轴随动机箱49也以螺栓紧固在机顶定位盖板组合57上;因此,机顶定位盖板组合57与R轴随动机箱49同时随T轴进行旋转,并带动R轴机构同时旋转;机顶定位盖板组合57上表面的凹槽内,安装有R轴右固定臂定位导轨33、R轴左固定臂定位导轨62、并以R轴右固定臂导轨定位钢棒56、R轴左固定臂导轨定位钢棒58、进行侧向靠紧定位;在R轴右固定臂定位导轨33上,安装有四个R轴右固定臂导轨滑块32,滑块上安装有R轴右固定臂滑座28 ;在R轴左固定臂定位导轨62上,安装有四个R轴左固定臂导轨滑块63,滑块上安装有R轴左固定臂滑座66 ;在机顶定位盖板组合57的后端定位槽内,安装有R轴右固定臂电机安装板36、R轴左固定臂电机安装板61 ;R轴右固定臂伺服电机37 [0032] R in the left and right arms fixed to the shaft means, the top cover is positioned by the positioning stopper 57 in combination with port T in the T-disc shaft coupling mechanism 47 coupled to the shaft, and bolted; R chassis follower shaft 49 also bolts positioned on the top cover 57 combination; Thus, top cover plate is positioned 57 in combination with R chassis 49 while the follower axis with the axis of rotation T, and R-axis drive mechanism while being rotated; top plate positioned composition the upper surface of the groove 57, is attached to the right R-axis positioning guide fixed arm 33, R-axis positioning guide arm 62 fixed to the left and to the right R-axis positioning guide arm fixed to the bar 56, R left axis positioning guide arm fixed to the bar 58, positioned laterally abut; R on the right axis positioning guide arm 33 is fixed, is attached to four R a right shaft guide arm fixed to the slider 32, R attached to the carriage arm shaft 28 fixed to the right on the slide; the R the left axis positioning guide fixed arm 62, attached to four R fixing arm shaft left slide rails 63, R attached to the carriage arm shaft 66 fixed to a left slider; positioning the cover plate on the top rear end of the positioning groove 57 of the composition the attached arm fixed to the right R-axis motor mounting plate 36, R left axis motor mounting plate 61 is fixed to the arm; R axis servomotor 37 and right fixing arms 过定位凸缘,以螺钉安装在R轴右固定臂电机安装板36上;R轴左固定臂伺服电机60通过定位凸缘,以螺钉安装在R轴左固定臂电机安装板61上;将R轴右固定臂传动丝母31的螺纹旋入R轴右固定臂传动丝杠34的螺纹,使R轴右固定臂传动丝杠34 —端的凹孔套入R轴右固定臂伺服电机37的电机轴,以紧定螺钉固定;将R轴右固定臂传动丝杠34的另一端安装R轴右固定臂丝杠轴承25,并以R轴右固定臂前端支撑27装入轴承外环,然后将R轴右固定臂前端支撑27以螺栓安装在机顶定位盖板组合57的前端面上;将1?轴左固定臂传动丝母65的螺纹旋入R轴左固定臂传动丝杠59的螺纹,使R轴左固定臂传动丝杠59的一端的凹孔套入R轴左固定臂伺服电机60的电机轴,以紧定螺钉固定;将1?轴左固定臂传动丝杠59的另一端安装R轴左固定臂丝杠轴承70,并以R轴左固定臂前端支撑71装入轴承外环, Positioned over the flange, a screw mounted on the stationary arm and right R-axis motor mounting plate 36; the R-axis servomotor left arm is fixed by the positioning flange 60, a screw shaft mounted on the left R motor mounting plate 61 fixed to the arm; and R Right arm drive shaft fixing nut thread 31 is screwed into a right R-axis drive screw threaded fixing arm 34, the arm fixed to the right R-axis drive screw 34 - sleeve end into recesses and right R-axis motor 37 fixed to the arm of the servomotor axis, a tight set screw fixed; the other end of the fixed arm and right R-axis drive screw 34 is fixed to the right arm mounting axis R screw bearing 25, and is fixed to the right R-axis tip support arm 27 into the bearing outer ring, and then a screw shaft threadedly fixed to the left arm drive nut 65 screwed into the R-axis left arm drive screw 59 is fixed; the right R-axis arm is fixed to the tip support 27 bolted to the top face of the front end of the positioning plate 57 of the combination? the R axis a left end of the fixed arm recesses 59 of the drive screw motor shaft R shaft sleeve into the left arm of the servo motor 60 is fixed to a fixing screw adapter;? 1 to the other end of the screw shaft left gear arm 59 is fixed R installation screw shaft left bearing 70 fixed to the arm, and the arm distal end is fixed to a left shaft support 71 R into the bearing outer race, 然后将R轴左固定臂前端支撑71以螺栓安装在机顶定位盖板组合57的前端面上;将R轴右固定臂传动丝母31通过螺钉与R轴右固定臂滑座28联接,使其可沿R轴右固定臂定位导轨33前后平移;将R轴左固定臂传动丝母65通过螺钉与R轴左固定臂滑座66联接,使其可沿R轴左固定臂定位导轨62前后平移;将R轴右固定臂前端限位光电传感器26、R轴左固定臂前端电子限位光电传感器72分别安装在R轴右固定臂前端支撑27、R轴左固定臂前端支撑71的外侧面,将R轴右固定臂前端电子限位挡片29、R轴左固定臂前端电子限位挡片69分别安装在R轴右固定臂滑座28、R轴左固定臂滑座66的外侧面,调整至硬限位面大约5_距离时,光电传感器反馈信号,伺服电机停止运转;将1?轴右固定臂后端电子限位光电传感器35、R轴左固定臂后端电子限位光电传感器64分别安装在R轴右固定臂电机安装板36 R is then left fixing arm tip support shaft 71 is mounted to the front end face of the bolt is positioned top cover 57 combination; and R the right axis drive nut 31 is fixed by screws to the arm axis R the right securing arm 28 coupled to the carriage, so that R which may be positioned along the longitudinal axis of the rail arm 33 fixed to the right translation; the R-axis left arm drive nut 65 is fixed by screws to the R-axis slide arm 66 fixed to the left coupling, so as to be fixed to the front and rear left arm along the R axis positioning guide 62 translation; the front end of the fixed arm and right R-axis limit photosensor 26, R fixing shaft left arm tip electronic limit photosensor 72 are mounted to the right R-axis support fixed to the front end of the arm 27, R fixing shaft left support arm distal end of the outer side surface 71 the front end of the fixed arm right axis R electronic limit stop piece 29, R fixing shaft left arm tip electronic limit stops 69 are mounted on plate 28, a right outer side surface of the fixed arm axis R R-axis carriage left arm carriage 66 is fixed when a hard limit is adjusted to about 5_ surface distance, the photosensor feedback signal, the servo motor stops;? 1 to the rear end of the fixed arm shaft electronic limit the right photosensor 35, R fixing shaft left rear arm photoelectric electronic limit R sensor 64 are mounted on the right shaft mounting plate 36 fixed to the arm motor R轴左固定臂电机安装板61的外侧面,将R轴右固定臂后端电子限位挡片30、R轴左固定臂后端电子限位挡片68分别安装在R轴右固定臂滑座28、R轴左固定臂滑座66的外侧面,调整至硬限位面大约5_距离时,光电传感器反馈信号,伺服电机停止运转。 A left outer side R-axis motor mounting plate 61 fixed to the arm, the arm fixed to the rear end of the right shaft R electronic limit flaps 30, R fixing shaft left rear arm 68 an electronic limit stop piece are mounted on the right fixing arms sliding shaft R when the seat 28, left outer side R-axis arm is fixed to the carriage 66, is adjusted to about 5_ hard stop surface distance, the photosensor feedback signal, the servo motor stops.

[0033] 在R轴左右活动臂结构中,R轴右活动臂臂体24、R轴左活动臂臂体80分别安装在R轴左右固定臂机构中的R轴右固定臂滑座28、R轴左固定臂滑座66的上端面上,并可随R轴右固定臂滑座28、R轴左固定臂滑座66沿导轨作前后平移运动;在R轴右活动臂臂体24上表面的槽内,安装有R轴右活动臂定位导轨18,并以R轴右活动臂导轨定位钢棒85进行侧向靠紧定位;在R轴左活动臂臂体80上表面的槽内,安装有R轴左活动臂定位导轨81,并以R轴左活动臂定位导轨定位钢棒84进行侧向靠紧定位;在R轴右活动臂定位导轨 [0033] about the R-axis movable arm structures, R right axis movable arm of the arm body 24, R left axis movable arm arm 80 are mounted around the R-axis is fixed the arm mechanism R-axis and right fixing arms of the carriage 28, R left axis fixed arm upper end face of the carriage 66, and is fixed with the right R-axis carriage arm 28, R fixing shaft left arm carriage 66 back and forth translational movement along the rail; the R axis on the right surface of the movable arm 24 arm the tank is mounted movable arm and right R-axis positioning guide 18, and the movable arm to the right R-axis guide rails 85 for lateral positioning against the steel rod is positioned; the movable arm 80 in the left arm of the groove surface of the R-axis, the installation R-axis movable arm has a left positioning guide 81, the movable arm and the left positioning guide positioning the bar 84 positioned against the lateral axis R; R-axis positioning guide in the right arm is

18上,安装有四个R轴右活动臂导轨滑块16,滑块上安装有R轴右活动臂滑座19 ;在R轴左活动臂定位导轨81上,安装有四个R轴左活动臂导轨滑块79,滑块上安装有R轴左活动臂滑座83 ;在R轴右活动臂臂体24后端的定位槽内,安装有R轴右活动臂电机安装板21,R轴右活动臂伺服电机23通过定位凸缘,以螺钉安装在R轴右活动臂电机安装板21上;在R轴左活动臂臂体80后端的定位槽内,安装有R轴左活动臂电机安装板74,R轴左活动臂伺服电机73通过定位凸缘,以螺钉安装在R轴左活动臂电机安装板74上;将R轴右活动臂传动丝母14的螺纹旋入R轴右活动臂传动丝杠17的螺纹,使R轴右活动臂传动丝杠17 —端的凹孔套入R轴右活动臂伺服电机23的电机轴,以紧定螺钉固定;将R轴左活动臂传动丝母8的螺纹旋入R轴左活动臂传动丝杠78的螺纹,使R轴左活动臂传动丝杠78 —端的凹孔套入R 18, is attached to the movable arm and right four R-axis rail slider 16 mounted movable arm and right R-axis carriage 19 on the slider; R axis on the left positioning guide the movable arm 81 is attached to the R-axis left four activities rail slider arm 79, is mounted on the left slide block R-axis carriage movable arm 83; the right arm is in the R-axis arm positioning groove 24 of the rear end member, 21 is, right axis R R attached to the movable arm and right shaft motor mounting plate servo motor 23 through the movable arm positioning flange, a screw is mounted on a movable arm and right R-axis motor mounting plate 21; R left arm movable arm shaft positioning groove 80 of the rear end of the body, is attached to the R-axis motor mounting plate left arm activity 74, R-axis servomotor left arm is positioned by a flange 73, a screw mounted on the left arm motor mounting plate 74 active R-axis; the right arm is the threaded drive nut 14 is screwed into the R-axis arm is a right drive shaft R screw thread 17 of the movable arm and right R-axis drive screw 17-- recesses sleeve onto the motor shaft end and right R-axis servomotor 23, the movable arm to tight fixing screws; and R activity left arm drive shaft nut 8 R threaded into the threaded shaft drives the movable arm left screw 78, so that the left arm is R-axis drive screw 78-- end set into the recesses R 左活动臂伺服电机73的电机轴,以紧定螺钉固定;将R轴右活动臂传动丝杠17的另一端安装R轴右活动臂丝杠轴承10,并以R轴右活动臂前端支撑9装入轴承外环,然后将R轴右活动臂前端支撑9以螺栓安装在R轴右活动臂臂体24的前端面上;将R轴左活动臂传动丝杠78的另一端安装R轴左活动臂丝杠轴承7,并以R轴左活动臂前端支撑4装入轴承外环,然后将R轴左活动臂前端支撑4以螺栓安装在R轴左活动臂臂体80的前端面上;将R轴右活动臂传动丝母14通过螺钉与R轴右活动臂滑座19联接,使其可沿R轴右活动臂定位导轨18前后平移;将R轴左活动臂传动丝母8通过螺钉与R轴左活动臂滑座83联接,使其可沿R轴左活动臂定位导轨81前后平移;将R轴右活动臂前端电子限位光电传感器13、R轴左活动臂前端电子限位光电传感器5分别安装在R轴右活动臂前端支撑9、R轴左活动臂前端支撑4 Left arm is servomotor motor shaft 73, a tight set screw is fixed; the other end of the movable arm and right R-axis drive screw 17 is mounted movable arm and right R screw shaft bearing 10, and the movable arm to the right R-axis tip support 9 load bearing outer ring, and then the right front end of the movable arm shaft supporting R 9 is bolted to the front end face of the movable arm and right R-axis arm 24; the other end of the left arm is R-axis drive screw shaft 78 is mounted a left R movable arm spindle bearing 7, the front end of the moveable arm and the left support shaft R 4 into the bearing outer race, the front end of the movable arm and the left shaft supporting R 4 are mounted on the front end face of the bolt shaft R left arm body 80 of the movable arm; activities of the right arm drive nut 14 by a screw shaft R and R right axis movable arm coupled to the carriage 19, so as to be movable arm and right along the R axis positioning guide 18 before and after the translation; the R event left arm drive shaft nut 8 by screws R axis movable arm and the left slide 83 is coupled so that it can translate along the longitudinal axis R left positioning guide the movable arm 81; the front end of the movable arm and right R-axis electronic limit photosensor 13, R moveable arm distal left axis photoelectric electronic limit sensor 5 are mounted right axis R activity tip support arm 9, the front end of the left arm is supported shaft 4 R 外侧面,将R轴右活动臂前端电子限位挡片12、R轴左活动臂前端电子限位挡片6分别安装在R轴右活动臂滑座19、R轴左活动臂滑座83的外侧面,调整至硬限位面大约5_距离时,光电传感器反馈信号,伺服电机停止运转;将R轴右活动臂后端电子限位光电传感器22、 R轴左活动臂后端电子限位光电传感器75分别安装在R轴右活动臂电机安装板21、R轴左活动臂电机安装板74的外侧面,将R轴右活动臂后端电子限位挡片20、R轴左活动臂后端电子限位挡片82分别安装在R轴右活动臂滑座19、R轴左活动臂滑座83的外侧面,调整至硬限位面大约5mm距离时,光电传感器反馈信号,伺服电机停止运转。 An outer side surface, the right front end of the movable arm shaft electronic limit flaps R 12, R moveable arm shaft left front end electronics limit the flap 6 are mounted in the movable arm and right R-axis carriage 19, R left axis slide 83 is movable arm the outer side surface is adjusted to approximately 5_ hard limit distance, the photosensor feedback signal, the servo motor stops; the rear end of the movable arm and right R-axis electronic limit photosensor 22, R moveable arm shaft left rear electronic limit photosensor 75 are mounted on the movable arm and right R-axis motor mounting plate 21, a left outer side R-axis moving arm of a motor mounting plate 74, after 20, R movable arm shaft left and right rear end of the movable arm shaft electronic limit stop sheet R end electronic limit stops are mounted on plate 82, an outer left side surface of the movable arm R-axis carriage 83 is movable arm and right R-axis slider 19, to adjust the surface of the hard limit distance of about 5mm, the feedback signal of the photosensor, the servo motor is stopped operation.

[0034] 在R轴左右取片臂及FORK组合机构中,R轴右取片臂臂体15、R轴左取片臂臂体3分别安装在R轴左右活动臂机构中的R轴右活动臂滑座19、R轴左活动臂滑座83的上端面上,并可随R轴右活动臂滑座19、R轴左活动臂滑座83沿导轨作前后平移运动;F0RK组合I总共有两个,分别安装在R轴右取片臂臂体15、R轴左取片臂臂体3的前端定位槽内,FORK组合I的进气口部位安装有密封垫圈;R轴右取片臂气路管接头11、R轴左取片臂气路管接头2分别安装在R轴右取片臂臂体15、R轴左取片臂臂体3的外侧面;当设备工作时,在控制计算机指令的控制下,气路沿R轴右取片臂气路管接头11、R轴左取片臂气路管接头2,通过R轴右取片臂臂体15、R轴左取片臂臂体3内部气路,到达FORK组合I的吸附口,以完成吸片与放片的动作。 R Right axis event [0034] about the R-axis-piece arm and FORK combination mechanism, R right axis-piece boom arm 15, R-axis left-piece boom arm 3 are mounted around the R-axis moveable arm mechanism is the carriage arm 19, the upper end of the movable arm R-axis carriage 83 left surface, right axis R and the movable arm with the carriage 19, left axis R moveable arm carriage 83 back and forth translational movement along the rail; F0RK total composition I two, are attached to an arm-piece of the arm body 15 at a right R-axis, the R axis a left distal end-piece boom arm positioning groove of the body 3, the air intake portion FORK composition I sealing gasket attached; R axis a right arm-pieces gas passage pipe joint 11, R-axis left-piece arm manifold fittings 2 are mounted on the outer side surface of the R-axis and right-piece boom arm 15, R-axis left-piece boom arm 3; when device works in the control under the control of computer instructions, the air passage along the R axis a right-piece arm manifold tube joint 11, R-axis left-piece arm manifold tube joint 2, 15-piece boom arm by R right axis, R-axis left-piece arm arm 3 inside air passage to reach the combination FORK I adsorption port to complete the discharge operation of the suction disc sheet.

Claims (2)

  1. 1.一种娃片传输机器人,包括:FORK组合(I)、R轴左取片臂气路管接头(2)、R轴左取片臂臂体(3)、R轴左活动臂前端支撑(4)、R轴左活动臂前端电子限位光电传感器(5)、R轴左活动臂前端电子限位挡片(6)、R轴左活动臂丝杠轴承(7)、R轴左活动臂传动丝母(8)、R轴右活动臂前端支撑(9)、R轴右活动臂丝杠轴承(10)、R轴右取片臂气路管接头(11)、R轴右活动臂前端电子限位挡片(12)、R轴右活动臂前端电子限位光电传感器(13)、R轴右活动臂传动丝母(14)、R轴右取片臂臂体(15)、R轴右活动臂导轨滑块(16)、R轴右活动臂传动丝杠(17)、R轴右活动臂定位导轨(18)、R轴右活动臂滑座(19)、R轴右活动臂后端电子限位挡片(20)、R轴右活动臂电机安装板(21)、R轴右活动臂后端电子限位光电传感器(22)、R轴右活动臂伺服电机(23)、R轴右活动臂臂体(24)、R轴右固定臂丝杠轴承(25)、R轴右固定臂前端限位 A baby substrate transport robot, comprising: FORK composition (I), R-pieces left arm shaft pipe joint gas path (2), R-axis arm left arm-piece (3), R activity left arm tip support shaft (4), R moveable arm shaft left front end electronics limit the photosensor (5), R moveable arm shaft front end electronics left limit stop sheet (6), R left movable arm spindle shaft bearing (7), R left axis activities arm drive nut (8), R and right movable arm tip support shaft (9), R screw bearings right axis movable arm (10), R right axis arm-piece pipe joint gas path (11), R right axis movable arm electronic limit distal flap (12), R-axis and right front-end electronics limit the movable arm photosensor (13), R right axis movable arm drive nut (14), R-axis arm and right arm-piece (15), R Right axis rail slider movable arm (16), R and right movable arm drive screw shaft (17), R right axis positioning guide the movable arm (18), R right axis carriage movable arm (19), R right axis movable arm electronic rear limit stop piece (20), R right axis movable arm motor mounting plate (21), R movable arm and right rear axle electronic limit photosensor (22), R-axis servomotor and right movable arm (23), R-axis movable arm and right arm (24), R the right securing arm spindle shaft bearing (25), R the right securing arm shaft distal limit 电传感器(26)、R轴右固定臂前端支撑(27)、R轴右固定臂滑座(28)、R轴右固定臂前端电子限位挡片(29)、R轴右固定臂后端电子限位挡片(30)、R轴右固定臂传动丝母(31)、R轴右固定臂导轨滑块(32)、R轴右固定臂定位导轨(33)、R轴右固定臂传动丝杠(34)、R轴右固定臂后端电子限位光电传感器(35)、R轴右固定臂电机安装板(36)、R轴右固定臂伺服电机(37)、Z轴上电子限位挡片(38)、T轴大臂轴(39)、T轴谐波减速器(40)、T轴电机组合(41)、三角支撑滑块(42)、T轴编码器(43)、Z轴丝杠轴承(44)、Z轴传动丝杠(45)、Ζ轴传动丝母(46)、Τ轴联接盘(47)、上定位座(48)、R轴随动机箱(49)、Z轴电机联轴器(50)、Z轴电机驱动模块组合(51)、支撑花键轴(52)、Z轴下电子限位挡片组合(53)、Z轴下电子限位光电传感器(54)、Z轴上电子限位传感器(55)、R轴右固定臂导轨定位钢棒(56)、机顶定位盖板组合(57)、R轴 Electrical sensor (26), R the right securing arm tip support shaft (27), R right axis fixed arm carriage (28), R the right securing arm shaft front end electronics limit stop sheet (29), R fixing arm rear right axis electronic limit stop piece (30), R right axis drive nut fixed arm (31), R right axis rail slider fixed arm (32), R right axis positioning guide fixed arm (33), R right securing arm drive shaft threaded spindle (34), R electronic rear arm right axis fixed limit photosensor (35), R right axis motor mounting plate fixed to the arm (36), R-axis servomotor and right fixing arms (37), Z-axis electronic limited bit flap (38), T-axis arm shaft (39), T-axis harmonic speed reducer (40), T combination motor shaft (41), triangular supports the slider (42), T-axis encoder (43), Z-axis spindle bearing (44 is), the Z-axis drive screw (45), [zeta] drive shaft nut (46), Τ shaft coupling disk (47), the positioning seat (48), R chassis shaft follower (49) , Z-axis motor coupling (50), a Z-axis motor drive module assembly (51), supporting the spline shaft (52), the combination of an electronic limit stop piece Z-axis (53), electronic limit the Z-axis photoelectric sensor (54), Z-axis limit sensor electronics (55), R right axis positioning guide arm fixed to the bar (56), top plate positioned composition (57), R shaft 左固定臂导轨定位钢棒(58)、R轴左固定臂传动丝杠(59)、R轴左固定臂伺服电机(60)、R轴左固定臂电机安装板(61)、R轴左固定臂定位导轨(62)、R轴左固定臂导轨滑块(63)、R轴左固定臂后端电子限位光电传感器(64)、R轴左固定臂传动丝母(65)、R轴左固定臂滑座(66)、下安装座(67)、R轴左固定臂后端电子限位挡片(68)、R轴左固定臂前端电子限位挡片(69)、R轴左固定臂丝杠轴承(70)、R轴左固定臂前端支撑(71)、R轴左固定臂前端电子限位光电传感器(72)、R轴左活动臂伺服电机(73)、R轴左活动臂电机安装板(74)、R轴左活动臂后端电子限位光电传感器(75)、机箱内衬套组合(76)、机箱内衬套门组合(77)、R轴左活动臂传动丝杠(78)、R轴左活动臂导轨滑块(79)、R轴左活动臂臂体(80)、R轴左活动臂定位导轨(81)、R轴左活动臂后端电子限位挡片(82)、R轴左活动臂滑座(83)、R轴左活动臂定位导轨 Left positioning rail steel bar fixed arm (58), R left axis fixed arm drive screw (59), R-axis servomotor left fixed arm (60), R left axis motor mounting plate fixed to the arm (61), R fixing shaft left positioning guide arm (62), R left axis rail slider fixed arm (63), R fixing shaft left rear arm electronic limit photosensor (64), R fixing shaft left arm drive nut (65), R left axis fixed arm carriage (66), the mount (67), R fixing shaft left rear arm electronic limit stop piece (68), R fixing shaft left arm tip electronic limit stop piece (69), R fixing shaft left screw bearing arm (70), R left fixed arm tip support shaft (71), R fixing shaft left arm tip electronic limit photosensor (72), R-axis servomotor left movable arm (73), R left axis movable arm the motor mounting plate (74), R moveable arm shaft left rear electronic limit photosensor (75), the inner liner assembly chassis (76), the door assembly chassis bush (77), R activity left arm drive screw shaft (78), R left axis rail slider movable arm (79), the R-axis movable arm left arm body (80), a left moveable arm R axis positioning guide (81), a left rear end of the movable arm shaft electronic limit stop sheet R (82), R left axis carriage movable arm (83), R moveable arm left axis positioning guide 定位钢棒(84)、R轴右活动臂导轨定位钢棒(85);其特征在于:所述的娃片传输机器人整体结构为:以Z轴传动支撑机构为机体的主支撑,支撑整机重量及R轴悬臂的力矩,并为T轴机构与R轴机构提供沿Z轴上下移动的驱动与定位;所述T轴机构安装于Z轴传动支撑机构之上,为R轴提供沿T轴中心旋转的驱动与定位;所述R轴机构整体安装在机顶定位盖板组合(57)上,通过定位与驱动装置,使活动左右臂前后平移运动;而活动左右臂又通过导轨的定位与伺服电机驱动装置,使左右取片臂带动FORK组合作前后移动,最终完成规定的工作轨迹;所述机箱组合由机箱内衬套组合(76)、机箱内衬套门组合(77)构成,安装于Z轴传动支撑机构的下安装座(67)上,在R轴随动机箱(49)随R轴升起时,在机构中起遮蔽与隔绝作用;所述Z轴传动支撑机构中,三根支撑花键轴(52)下端安装于下安装座( Positioning the bar (84), R is positioned right axis movable arm rail steel bar (85); characterized in that: the substrate transport robot baby unitary structure is: the Z axis drive mechanism for the support of the main support body, supporting the whole weight and torque shaft of the arm R and the positioning drive to provide movement along the Z-axis of the mechanism of the T-axis mechanism R-axis; means the T-axis on the Z-axis drive is mounted on the support means, provided along the axis of the R axis T center of rotation and the positioning drive; R of the shaft means integrally mounted on the top cover plate is positioned composition (57), and by a positioning drive means, the movable arm around, translational movement; and left and right arm is positioned through the guide rail and the servo motor driving device, driven by the left and right arm-piece moving back and forth cooperation FORK group, finalize predetermined work path; the combination of the chassis chassis liner assembly (76), the door assembly chassis bush (77), and install Z-axis drive mechanism supported on the mount (67), the follower shaft R chassis (49) is lifted with the R axis, and isolated from the shielding effect in the mechanism; the Z-axis drive mechanism is supported, three supporting the spline shaft (52) attached to the lower end of the lower mount ( 67)上,上端安装在上定位座(48)上,构成整机的支撑;所述三角支撑滑块(42)安装在三根支撑花键轴(52)上,并由三根支撑花键轴(52)提供沿Z轴上下移动的定位;所述三角支撑滑块(42)的中心孔内,用于安装T轴机构的部件;所述Z轴电机驱动模块组合(51)安装在下安装座(67)上,通过Z轴电机联轴器(50)、Z轴传动丝杠(45)、Z轴传动丝母(46)、Z轴丝杠轴承(44)与上定位座(48)相连接,构成Z轴驱动装置驱动路径的定位;所述Z轴传动丝母(46)通过螺栓紧固于三角支撑滑块(42)的安装孔内,使Z轴驱动装置通过三角支撑滑块(42),完成对T轴机构与R轴机构的驱动;所述T轴机构中,T轴电机组合(41)、T轴谐波减速器(40)通过螺栓紧固在Z轴传动支撑机构的三角支撑滑块(42)的中心孔内,T轴大臂轴(39)的下端通过定位止口,安装在T轴谐波减速器(40)的输出端;T轴大臂轴(39)的上端,通过定位 67), mounted on the upper end of the positioning seat (48), constituting the support of the machine; said triangular support slide (42) mounted on three supporting the spline shaft (52), supported by three spline shaft ( 52) providing a lower positioning along the Z-axis moves; central bore of the triangular support slide (42), means for mounting the T-axis mechanism; the combination of the Z-axis motor drive module (51) attached to the lower mount ( 67), by coupling Z-axis motor (50), a Z-axis drive screw (45), Z axis drive nut (46 is), the Z-axis spindle bearing (44) is connected to the locating seat (48) constituting the Z-axis driving device for driving the positioning path; the Z-axis drive nut (46) is bolted to the triangular supports the slider (42) of the mounting hole, so that the Z-axis driving device by triangulation supports the slider (42 ), to complete the T-axis driving mechanism and the mechanism of the R axis; the T-axis mechanism, a combination of the T-axis motor (41 is), the T-axis harmonic speed reducer (40) by bolting triangular supporting the Z-axis drive mechanism supports the slider (42) of the central bore, the lower end of the T-axis arm shaft (39) by locating the spigot, is mounted on the T-axis harmonic speed reducer (40) output terminal; T-axis arm shaft (39) the upper end, by positioning 止口与T轴联接盘(47)相联接;当T轴电机组合(41)通电运行时,T轴联接盘(47)可得到经过一定的传动比减速后的转速传给R轴机构;所述T轴编码器(43)安装于T轴电机组合(41)的后轴端,当T轴电机组合(41)通电运行时,T轴编码器(43)开始向控制计算机反馈T轴电机组合(41)的运行参数,以保证控制计算机对T轴电机组合(41)的正确控制;所述R轴左右固定臂机构中,机顶定位盖板组合(57)通过定位止口与T轴机构中的T轴联接盘(47)联接,并以螺栓紧固;R轴随动机箱(49)也以螺栓紧固在机顶定位盖板组合(57)上,因此机顶定位盖板组合(57)与R轴随动机箱(49)同时随T轴进行旋转,并带动R轴机构同时旋转;所述机顶定位盖板组合(5 7)上表面的凹槽内,安装有R轴右固定臂定位导轨(33)、R轴左固定臂定位导轨(62)、并以R轴右固定臂导轨定位钢棒(56)、R轴左固定臂导轨定位钢棒(58)、进行 And T rabbet shaft coupling disk (47) is coupled; composition when the T-axis motor (41) powered running, T shaft coupling disk (47) can be obtained after a certain rotational speed is decelerated by the gear ratio R to pass shaft mechanism; the said T-axis encoder (43) mounted on the T-axis motor assembly (41) of the shaft, when the combination of T-axis motor (41) powered running, the T-axis encoder (43) starting the feedback control to the T-axis motor combination computer (41) the operating parameters, in order to ensure proper control of the control computer of the T-axis motor assembly (41); R about the axis of the fixed arm mechanism, the top cover positioned composition (57) through the T-axis positioning mechanism rabbet the T-axis coupling disk (47) is coupled, and bolted; R & lt chassis follower shaft (49) also bolted on the top plate positioned composition (57), thus positioning the cover top composition ( 57) and the follower axis R chassis (49) rotates simultaneously with the T-axis, and R-axis drive mechanism while being rotated; the groove is positioned on the top cover plate combination (57) surface mounted right axis R positioning guide fixed arm (33 is), R left axis positioning guide fixed arm (62), and is fixed to the right arm R-axis positioning guide the bar (56 is), the R-axis positioning guide arm fixed to the left the bar (58), for 向靠紧定位;所述R轴右固定臂定位导轨(33)上,安装有四个R轴右固定臂导轨滑块(32),滑块上安装有R轴右固定臂滑座(28);所述R轴左固定臂定位导轨(62)上,安装有四个R轴左固定臂导轨滑块(63),滑块上安装有R轴左固定臂滑座¢6);所述机顶定位盖板组合(57)的后端定位槽内,安装有R轴右固定臂电机安装板(36)、R轴左固定臂电机安装板(61);所述R轴右固定臂伺服电机(37)通过定位凸缘,以螺钉安装在R轴右固定臂电机安装板(36)上;所述R轴左固定臂伺服电机(60)通过定位凸缘,以螺钉安装在R轴左固定臂电机安装板(61)上;所述R轴右固定臂传动丝母(31)的螺纹旋入R轴右固定臂传动丝杠(34)的配合螺纹,并使R轴右固定臂传动丝杠(34) —端的凹孔套入R轴右固定臂伺服电机(37)的电机轴,以紧定螺钉固定;将R轴右固定臂传动丝杠(34)的另一端安装R轴右固定臂丝杠轴承(25),并 Positioned to abut; R on the right axis positioning guide fixed arm (33) mounted four fixed arm and right R-axis rail slider (32) is mounted fixed to the right arm R-axis carriage (28) on the slide ; R on the left axis positioning guide fixed arm (62), R is attached to four fixed arm shaft left slide rails (63), R is attached to the carriage arm fixing shaft left ¢. 6) on the slider; said machine positioning a top cover plate combination (57) of the rear end of the positioning groove, is attached to the right R-axis motor mounting plate fixed to the arm (36), fixed to the left arm R axis motor mounting plate (61); said R-axis servomotor and right fixing arms (37) by the positioning flange, a screw mounted on the stationary arm and right R-axis motor mounting plate (36); said R-axis servomotor left fixed arm (60) by the positioning flange, a screw shaft mounted on the left stationary R the arm motor mounting plate (61); the right securing arm R drive shaft nut (31) threaded into the fixing arm and right R-axis drive screw (34) of the mating threads, and the right R-axis drive wire fixing arm bars (34) - recesses end set into the R-axis and right fixing arms servomotor (37) of the motor shaft, a tight set fixing screw; the other terminal R of the right axis fixed arm drive spindle (34) mounted R right axis fixed arm screw bearings (25), and 以R轴右固定臂前端支撑(27)配合孔装入轴承外环,然后将R轴右固定臂前端支撑(27)以螺栓安装在机顶定位盖板组合(57)的前端面上;所述R轴左固定臂传动丝母(65)的螺纹旋入R轴左固定臂传动丝杠(59)的配合螺纹,并使R轴左固定臂传动丝杠(59)的一端的凹孔套入R轴左固定臂伺服电机(60)的电机轴,以紧定螺钉固定;将R轴左固定臂传动丝杠(59)的另一端安装R轴左固定臂丝杠轴承(70),并以R轴左固定臂前端支撑(71)的配合孔装入轴承外环,然后将R轴左固定臂前端支撑(71)以螺栓安装在机顶定位盖板组合(57)的前端面上;所述R轴右固定臂传动丝母(31)通过螺钉与R轴右固定臂滑座(28)联接,使其可沿R轴右固定臂定位导轨(33)前后平移;所述R轴左固定臂传动丝母(65)通过螺钉与R轴左固定臂滑座(66)联接,使其可沿R轴左固定臂定位导轨¢2)前后平移;所述R轴右固定臂前端限位 Right axis R to the fixed arm tip support (27) into the bearing outer ring fitting hole, and then fixed to the right R-axis arm supporting the front end (27) mounted to the front end face of a bolt top cover positioned composition (57); the said threaded shaft R is fixed left arm drive nut (65) screwed into the R-axis drive screw left fixing arm (59) of the mating threads, the left end of the fixed arm and the R-axis drive screw (59) of the sleeve recesses the R axis motor shaft fixed to the left arm servomotor (60), a tight set screw fixed; the other end fixed to the left arm R-axis drive screw (59) is fixed to the left arm mounting axis R screw bearings (70), and R fitting hole left fixing arm tip support shaft (71) is charged with a bearing outer ring, and the R-axis left arm distal end is fixed a support (71) mounted to the front end face of a bolt top cover positioned composition (57); the R-axis drive nut and right fixing arms (31) by screws fixing the right arm and the R-axis carriage (28) is coupled so that it can move forward and backward along the R axis positioning guide right securing arm (33); the left axis R fixing arm drive nut (65) and R axis by screws fixing the left arm of the carriage (66) is coupled, so that it can be fixed guide arm is positioned along the R axis left ¢ 2) move forward and backward; right axis R of the front end of the fixed arm stopper 电传感器(26)、R轴左固定臂前端电子限位光电传感器(72)分别安装在R轴右固定臂前端支撑(27)、R轴左固定臂前端支撑(71)的外侧面,将R轴右固定臂前端电子限位挡片(29)、R轴左固定臂前端电子限位挡片(69)分别安装在R轴右固定臂滑座(28)、R轴左固定臂滑座(66)的外侧面,调整至两硬限位面大约5_距离时,光电传感器反馈信号,伺服电机停止运转;所述R轴右固定臂后端电子限位光电传感器(35)、R轴左固定臂后端电子限位光电传感器¢4)分别安装在R轴右固定臂电机安装板(36)、R轴左固定臂电机安装板(61)的外侧面,将R轴右固定臂后端电子限位挡片(30)、R轴左固定臂后端电子限位挡片(68)分别安装在R轴右固定臂滑座(28)、R轴左固定臂滑座(66)的外侧面,调整至两硬限位面大约5_距离时,光电传感器反馈信号,伺服电机停止运转;所述R轴左右活动臂结构中,R轴右活动 Electrical sensor (26 is), the front end of the fixed arm left axis R electronic limit photosensor (72) are mounted on the front end of the fixed arm R a right support shaft (27), a left outer side R-axis support fixed to the front end of the arm (71), the R Right axis fixed arm front end electronics limit stop sheet (29), R fixing shaft left arm tip electronic limit stop piece (69) are mounted on the fixed arm and right R-axis carriage (28), R left axis fixed arm carriage ( 66) the outer side limiting surface is adjusted to approximately two hard 5_ from photosensor feedback signal, the servo motor stops; right axis R of the rear end of the fixed arm electronic limit photosensor (35), left axis R the rear end of the fixed arm photosensor ¢ electronic limit. 4) are attached to the right in the R-axis motor mounting plate fixed to the arm (36), a left outer side R-axis motor mounting plate fixed to the arm (61), the rear end of the fixed arm right axis R electronic limit stop piece (30), R fixing shaft left rear arm electronic limit stop piece (68) are mounted on the fixed arm and right R-axis carriage (28), R left axis fixed arm carriage (66) of the outer when the side surface is adjusted to approximately two 5_ hard limit distance, the photosensor feedback signal, the servo motor stops; movable arm structure around the R axis, right axis R activity 臂体(24)、R轴左活动臂臂体(80)分别安装在R轴左右固定臂机构中的R轴右固定臂滑座(28)、R轴左固定臂滑座(66)的上端面上,并可随R轴右固定臂滑座(28)、R轴左固定臂滑座(66)沿导轨作前后平移运动;所述R轴右活动臂臂体(24)上表面的槽内,安装有R轴右活动臂定位导轨(18),并以R轴右活动臂导轨定位钢棒(85)进行侧向靠紧定位;所述R轴左活动臂臂体(80)上表面的槽内,安装有R轴左活动臂定位导轨(81),并以R轴左活动臂定位导轨定位钢棒(84)进行侧向靠紧定位;所述R轴右活动臂定位导轨(18)上,安装有四个R轴右活动臂导轨滑块(16),滑块上安装有R轴右活动臂滑座(19);所述R轴左活动臂定位导轨(81)上,安装有四个R轴左活动臂导轨滑块(79),滑块上安装有R轴左活动臂滑座(83);所述R轴右活动臂臂体(24)后端的定位槽内,安装有R轴右活动臂电机安装板(21),R轴右活动臂伺 Upper arm (24), R left axis movable arm arm (80) are mounted about the R-axis is fixed the arm mechanism R-axis and right fixing arms of the carriage (28), R left axis fixed arm carriage (66) end surface, and the right axis R with the fixed arm carriage (28), fixed to the left arm R-axis carriage (66) for translational movement along the longitudinal guide rails; (24) R of the surface of the movable arm and right arm shaft groove the attached movable arm and right R-axis positioning guide (18), and the movable arm to the right R-axis positioning guide steel bars (85) positioned laterally abutting; R axis on the left arm member movable arm (80) surface slot, a left attached to the R-axis positioning guide the movable arm (81), and the R axis to the left positioning guide arm is positioned the bar (84) positioned laterally abutting; said movable arm and right R-axis positioning guide (18 a), four are mounted movable arm and right R-axis slide rails (16), is attached to the movable arm and right R-axis carriage (19) on the slider; R on the left axis positioning guide the movable arm (81), mounted there are four R-axis rail slider left movable arm (79), R is attached to the carriage shaft left movable arm (83) on the slider; (24) the rear end of the positioning groove of the movable arm and right R-axis arm, mounted R activity has a right arm shaft motor mounting plate (21), R servo right axis movable arm 电机(23)通过定位凸缘,以螺钉安装在R轴右活动臂电机安装板(21)上;所述R轴左活动臂臂体(80)后端的定位槽内,安装有R轴左活动臂电机安装板(74),R轴左活动臂伺服电机(73)通过定位凸缘,以螺钉安装在R轴左活动臂电机安装板(74)上;所述R轴右活动臂传动丝母(14)的螺纹旋入R轴右活动臂传动丝杠(17)的配合螺纹,使R轴右活动臂传动丝杠(17) —端的凹孔套入R轴右活动臂伺服电机(23)的电机轴,以紧定螺钉固定;所述R轴左活动臂传动丝母(8)的螺纹旋入R轴左活动臂传动丝杠(78)的配合螺纹,使R轴左活动臂传动丝杠(78) —端的凹孔套入R轴左活动臂伺服电机(73)的电机轴,以紧定螺钉固定;所述R轴右活动臂传动丝杠(17)的另一端安装R轴右活动臂丝杠轴承(10),并以R轴右活动臂前端支撑(9)的配合孔装入轴承外环,然后将R轴右活动臂前端支撑(9)以螺栓安装在R轴右活动 Motor (23) by the positioning flange, a screw is mounted on a movable arm and right R-axis motor mounting plate (21); the R axis movable arm left arm body (80) of the rear end of the positioning groove, the shaft is attached to a left activities R arm motor mounting plate (74), a left moveable arm R axis servomotor (73) by the positioning flange, a screw shaft mounted on the left arm is R motor mounting plate (74); R drive nut of the movable arm and right shaft (14) is screwed into the movable arm and right R-axis drive screw (17) of the mating threads, so that the movable arm and right R-axis drive screw (17) - end set into recesses R axis servomotor and right movable arm (23) motor shaft, a tight set screw is fixed; the R event left arm drive shaft nut (8) screwed into a threaded R drive screw shaft left movable arm (78) of the mating threads, so that the left arm is R-axis drive wire bars (78) - end set into recesses R axis servomotor left movable arm (73) of the motor shaft, a tight set screw fixed; the other end of the movable arm and right R-axis drive screw (17) is mounted right axis R movable arm bearing screw (10), and with the right shaft hole R activity distal support arm (9) is charged with a bearing outer ring, and then the right R-axis movable arm supporting the front end (9) is bolted to the right axis R activity 臂体(24)的前端面上;所述R轴左活动臂传动丝杠(78)的另一端安装R轴左活动臂丝杠轴承(7),并以R轴左活动臂前端支撑(4)的配合孔装入轴承外环,然后将R轴左活动臂前端支撑(4)以螺栓安装在R轴左活动臂臂体(80)的前端面上;所述R轴右活动臂传动丝母(14)通过螺钉与R轴右活动臂滑座(19)联接,使其可沿R轴右活动臂定位导轨(18)前后平移;所述R轴左活动臂传动丝母(8)通过螺钉与R轴左活动臂滑座(83)联接,使其可沿R轴左活动臂定位导轨(81)前后平移;所述R轴右活动臂前端电子限位光电传感器(13)、R轴左活动臂前端电子限位光电传感器(5)分别安装在R轴右活动臂前端支撑(9)、R轴左活动臂前端支撑(4)的外侧面,将R轴右活动臂前端电子限位挡片(12)、R轴左活动臂前端电子限位挡片(6)分别安装在R轴右活动臂滑座(19)、R轴左活动臂滑座(83)的外侧面,调整至两硬限位面大 The front end surface of the arm (24); another end of the movable arm left axis R drive screw (78) is mounted movable arm R left screw shaft bearing (7), and the R axis to the left front end of the movable arm support (4 ) is charged with a bearing outer ring fitting hole, and then the left arm is R tip support shaft (4) mounted on the front end face of the bolt to the R-axis movable arm left arm body (80); said movable arm and right R-axis drive wire female (14) by a screw and a right R-axis carriage movable arm (19) is coupled so that it can move forward and backward along the right R-axis positioning guide the movable arm (18); a movable arm left of the R axis drives the nut (8) R screw shaft and a left carriage movable arm (83) is coupled so that it can move forward and backward along the R axis positioning guide left movable arm (81); said movable arm distal right axis R electronic limit photosensor (13 is), the axis R limit activity left arm tip electronic photosensor (5) are mounted on the outer side surface of the front end of the movable arm and right R-axis support (. 9), left axis R movable arm supporting the front end (4) of the movable arm distal right axis R electronic limit flaps (12 is), the front end of the movable arm left axis R electronic limit stop piece (6) are mounted on the movable arm and right R-axis carriage (19), a left outer side R-axis carriage movable arm (83) is adjusted to two large hard limiting surfaces 5_距离时,光电传感器反馈信号,伺服电机停止运转;所述R轴右活动臂后端电子限位光电传感器(22)、R轴左活动臂后端电子限位光电传感器(75)分别安装在R轴右活动臂电机安装板(21)、R轴左活动臂电机安装板(74)的外侧面,将R轴右活动臂后端电子限位挡片(20)、R轴左活动臂后端电子限位挡片(82)分别安装在R轴右活动臂滑座(19)、R轴左活动臂滑座(83)的外侧面,调整至两硬限位面大约5mm距离时,光电传感器反馈信号,伺服电机停止运转;所述R轴左右取片臂及FORK组合机构中,R轴右取片臂臂体(15)、R轴左取片臂臂体(3)分别安装在R轴左右活动臂机构中的R轴右活动臂滑座(19)、R轴左活动臂滑座(83)的上端面上,并可随R轴右活动臂滑座(19)、R轴左活动臂滑座(83)沿导轨作前后平移运动;所述FORK组合(I)总共有两个,分别安装在R轴右取片臂臂体(15)、R轴左取片臂臂体(3) When 5_ distance, the photosensor feedback signal, the servo motor stops; right axis R of the rear end of the movable arm electronic limit photosensor (22 is), the rear end of the movable arm left axis R electronic limit photosensor (75) respectively mounted an outer side surface of the right arm is in the R-axis motor mounting plate (21 is), the left arm is R axis motor mounting plate (74), the rear end of the movable arm and right R-axis electronic limit stop sheet (20 is), the left axis of the movable arm R when the rear end of the electronic limit stop piece (82) are mounted on the movable arm and right R-axis carriage (19), a left outer side R-axis carriage movable arm (83), two hard limit is adjusted to about 5mm from the surface, photosensor feedback signal, the servo motor stops; R about the axis of the arm and the unload mechanism FORK combinations, R-axis arm and right arm-piece (15), the R-axis arm left arm-piece (3) are mounted R Right axis carriage movable arm (19) about the axis of the movable arm mechanism R, R left axis carriage movable arm (83) of the upper surface, and with the movable arm and right R-axis carriage (19), the axis R left carriage movable arm (83) for translational movement along the longitudinal guide rails; FORK said composition (I) a total of two, are attached to an arm-piece arm (15) at right axis R, R-axis arm the left arm-piece (3) 前端定位槽内,FORK组合(I)的进气口部位安装有密封垫圈;所述R轴右取片臂气路管接头(11)、R轴左取片臂气路管接头(2)分别安装在R轴右取片臂臂体(15)、R轴左取片臂臂体(3)的外侧面;当设备工作时,在控制计算机指令的控制下,气路沿R轴右取片臂气路管接头(11)、R轴左取片臂气路管接头(2,)通过R轴右取片臂臂体(15)、R轴左取片臂臂体(3)内部气路,到达FORK组合(I)的吸附口,以完成吸片与放片的动作。 Distal positioning slot, FORK composition (I) of the air inlet portion is attached to a sealing gasket; the R-axis and right arm-piece pipe joint gas path (11), R left axis arm-piece pipe joint gas path (2), respectively mounting-piece boom arm (15) R right axis, R-axis left-piece boom arm (3) of the outer side surface; when the device operates under control of computer instructions, the air passage along the R axis a right-pieces arm manifold fitting (. 11), the R-axis left-piece arm manifold fitting (2)-piece boom arm (15) R right axis, (3) internal circuit R-axis left-piece boom arm arriving FORK composition (I) of the suction port, the suction disc to complete the discharge operation of the sheet.
  2. 2.根据权利要求1所述的娃片传输机器人,其特征在于:所述R轴机构包括R轴左右固定臂、R轴左右活动臂的驱动装置,都是使用独立的伺服电机驱动,由控制计算机独立控制。 2. baby sheet transfer robot according to claim 1, wherein: the R axis about the R-axis mechanism comprises a mounting arm about axis R of the movable arm driving means, is the use of a separate servo motor, the control computer controlled independently.
CN 201110062743 2011-03-16 2011-03-16 Silicon slice transmission robot CN102157417B (en)

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Publication number Priority date Publication date Assignee Title
CN1779936A (en) 2005-10-19 2006-05-31 哈尔滨工业大学 Silicon wafer carrying robot with two-dimensional parallel driven
CN101436562A (en) 2008-12-12 2009-05-20 哈尔滨工业大学 Large elevating magnification ratio double-arm crystal transmission manipulator
CN101664928A (en) 2009-09-29 2010-03-10 大连理工大学 Vacuum robot

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1779936A (en) 2005-10-19 2006-05-31 哈尔滨工业大学 Silicon wafer carrying robot with two-dimensional parallel driven
CN101436562A (en) 2008-12-12 2009-05-20 哈尔滨工业大学 Large elevating magnification ratio double-arm crystal transmission manipulator
CN101664928A (en) 2009-09-29 2010-03-10 大连理工大学 Vacuum robot

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