CN102156053A - Test bench for assembly adjustment/simulated station transmission of dual-arm transmission robot - Google Patents
Test bench for assembly adjustment/simulated station transmission of dual-arm transmission robot Download PDFInfo
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- CN102156053A CN102156053A CN2011100627692A CN201110062769A CN102156053A CN 102156053 A CN102156053 A CN 102156053A CN 2011100627692 A CN2011100627692 A CN 2011100627692A CN 201110062769 A CN201110062769 A CN 201110062769A CN 102156053 A CN102156053 A CN 102156053A
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Abstract
The invention relates to a test bench for assembly adjustment/simulated station transmission of a dual-arm transmission robot. After the dual-arm transmission robot is assembled and when a T shaft is in a zero position through the adjustment of the test bench, the circle centers of the left and right arms FORK of the dual-arm transmission robot coincide up and down in the respective rotating plane of R shafts, and thus, the original positioning reference is provided for the motion trail of the circle centers of the left and right arms FORK of the dual-arm transmission robot. After the positioning reference is determined, the simulated station transmission experiment of a silicon wafer can be done on the test bench to test and verify the function indexes of the dual-arm transmission robot.
Description
Technical field
The present invention relates in semiconductor equipment manufacturing field a kind of testing table that is used for the assembling adjustment/simulation station transmission of both arms transferring robot.After the assembling of both arms transferring robot, adjustment through testing table, when the T axle was in zero-bit, the center of circle that can make tow-armed robot FORK overlapped up and down in R axle Plane of rotation separately, thereby provided original positioning reference for the movement locus at tow-armed robot FORK center.Benchmark can also transmit between the silicon chip station of simulating on the testing table after determining.
Background technology
On the viewpoint of theoretical and design, when the T of both arms transferring robot axle is in zero-bit, both arms are flat forward to be stretched, and the center of circle of left and right sides mechanical arm FORK overlaps.But because the existence of the rigging error of foozle, in fact the center of circle of the left and right sides mechanical arm FORK of both arms transferring robot does not overlap.For the center of circle that makes left and right sides mechanical arm FORK does not overlap degree less than set quota, need the both arms transferring robot when assembling and setting, the benchmark in the mechanical arm FORK center of circle, a definite left and right sides is arranged; When the mechanical arm FORK center of circle, the left and right sides according to this benchmark debug qualified after, the workflow that will determine according to the both arms transferring robot also, the transmission experiment of silicon chip is carried out, with the functional parameter of checking both arms transferring robot in the planning path between station.
Summary of the invention
The object of the present invention is to provide a kind of rational in infrastructurely, can make things convenient for, adjust reliably the testing table that left and right sides mechanical arm FORK mid point overlaps, the benchmark of determining both arms FORK mid point is provided by testing table.When both arms FORK according to this benchmark debug qualified after, on testing table, remove the benchmark/clamp module that is installed in T axle zero-bit, the simulation station is installed in situ, and come the planning path according to the workflow that the both arms transferring robot is determined, between station, carry out the transmission experiment of silicon chip, with the every functional parameter of check both arms transferring robot and the reliability of long-term operation.
Goal of the invention of the present invention is achieved in that a kind of testing table that is used for the assembling adjustment/simulation station transmission of both arms transferring robot, comprises simulation 1 station 1, main frame back up pad 2, simulate 2 station back up pads 3, simulate 2 stations 4, frame combination 5, simulate 1 film magazine 6, simulate 2 film magazines 7, simulation film magazine back up pad 8, benchmark/clamp module 9, mounting screw 10, regulating device base plate 11, left side forearm geocoded activity clamping plate 12, left arm rubber contact plate 13, left side forearm strap 14; forearm interfix plate 15; right arm rubber contact plate 16; right forearm geocoded activity clamping plate 17; right forearm strap 18; centralized positioning piece 19.
Above the test bed framework combination 5 of industrial aluminum profile assembling, main frame back up pad 2, simulation 2 station back up pads 3, simulation film magazine back up pad 8 are housed; Have on the main frame back up pad 2 in the main frame mounting hole, the main frame of both arms transferring robot is installed, the zero-bit position of T axle is according to the functions of use difference, but reference for installation/clamp module 9 or simulate 1 station 1; , simulation is equipped with simulation 2 stations 4 on the 2 station back up pads 3; Simulation 1 film magazine 6 and simulation 2 film magazines 7 are housed on the simulation film magazine back up pad 8.
When carrying out the debugging of the mechanical arm FORK center of circle, both arms transferring robot left and right sides benchmark, benchmark/clamp module 9 is installed in the T axle zero-bit position of main frame back up pad 2, and fastening with mounting screw 10.Both arms transferring robot main frame is put into testing table and with only stationkeeping, then the T axle transferred to zero-bit; After the levelling zero-bit, with about the forearm of two arms abut against on the forearm interfix plate 15 of benchmark/clamp module 9, and clamp left forearm with left forearm strap 14, left forearm geocoded activity clamping plate 12; Clamp right forearm with right forearm strap 18, right forearm geocoded activity clamping plate 17.At this moment, the big arm of two arms and forearm are all fixing, and only getting the sheet arm can be movable.
Two joint bolts of getting sheet arm and FORK combination are unscrewed, and the sheet arm is got in rotation all around or translation up and down, the center of circle of the center of circle of FORK combination and centralized positioning piece 19 is fitted like a glove after, the screw that all are unclamped is fastening again puts in place.Keep existing tightening state, the synchronous band and the belt wheel of two forearms are installed engagement, adjust band pre-tightening mechanism synchronously, keeps enough pretightning forces, and the gear train of inspection both arms, guarantee not have unconfined freely rotate or mobile.Step is removed benchmark/clamp module 9 in accordance with regulations then.
When between station, carrying out the transmission experiment of silicon chip, simulation 1 station 1 is installed in the T axle zero-bit position of main frame back up pad 2, the workflow of determining according to the both arms transferring robot is come the planning path then, between station, carry out the transmission experiment of silicon chip, with the every functional parameter of check both arms transferring robot and the reliability of long-term operation.
A kind of testing table that is used for the assembling adjustment/simulation station transmission of both arms transferring robot of the present invention has following advantage:
1, in the present invention, the adjustment process that the mechanical arm FORK center of circle, the left and right sides overlaps is used the centralized positioning piece 19 of same benchmark, so bearing accuracy is higher, and repeatable accuracy is good.
2, after the adjustment of finishing the coincidence of the mechanical arm FORK center of circle, the left and right sides, need not to carry main frame, need only and remove benchmark/clamp module 9, will simulate the T axle zero-bit position that 1 station 1 is installed in main frame back up pad 2, can carry out the transmission test of silicon chip.Therefore the present invention can reduce the systematic error of station test, improves the chip transmission precision.
3, the present invention's assembling adjustment/simulation station transmission test platform, simple in structure, reliable effect, easy and simple to handle, the debugging cost that can effectively reduce the both arms transferring robot.
Description of drawings
Fig. 1 is used for the testing table vertical view of the assembling adjustment/simulation station transmission of both arms transferring robot for the present invention is a kind of, this moment, testing table was simulated 1 station 1 owing to having installed, and was in the transmission experiment state of silicon chip.
In Fig. 1, concrete numeral: 1-simulates 1 station, 2-main frame back up pad, 3-and simulates 2 station back up pads, 4-and simulate that 2 stations, 5-frame combination, 6-are simulated 1 film magazine, 7-simulates 2 film magazines, 8-simulation film magazine back up pad.
Fig. 2 is used for the testing table vertical view of the assembling adjustment/simulation station transmission of both arms transferring robot for the present invention is a kind of, testing table is in the mechanical arm FORK center of circle, left and right sides benchmark debugging mode because benchmark/clamp module 9 has been installed at this moment.
In Fig. 2, concrete numeral: 9-benchmark/clamp module
Fig. 3 is the 3 dimensional drawing of benchmark/clamp module 9.
In Fig. 3, concrete numeral: 10-mounting screw, 11-regulating device base plate, 12-left side forearm geocoded activity clamping plate, 13-left arm rubber contact plate, 14-left side forearm strap, 15-forearm interfix plate, 16-right arm rubber contact plate, the right forearm geocoded activity of 17-clamping plate, the right forearm strap of 18-, 19-centralized positioning piece.
Embodiment
The invention will be further described in conjunction with the accompanying drawings:
Shown in accompanying drawing, a kind of testing table that is used for the assembling adjustment/simulation station transmission of both arms transferring robot comprises simulation 1 station 1, main frame back up pad 2, simulate 2 station back up pads 3, simulate 2 stations 4, frame combination 5, simulate 1 film magazine 6, simulate 2 film magazines 7, simulation film magazine back up pad 8, benchmark/clamp module 9, mounting screw 10, regulating device base plate 11, left side forearm geocoded activity clamping plate 12, left arm rubber contact plate 13, left side forearm strap 14; forearm interfix plate 15; right arm rubber contact plate 16; right forearm geocoded activity clamping plate 17; right forearm strap 18; centralized positioning piece 19.
Described a kind of testing table that is used for the assembling adjustment/simulation station transmission of two transfer arm robots, it is characterized by: above the test bed framework combination 5 of industrial aluminum profile assembling, main frame back up pad 2, simulation 2 station back up pads 3, simulation film magazine back up pad 8 are housed; Have on the main frame back up pad 2 in the main frame mounting hole, so that the main frame of both arms transferring robot to be installed, the zero-bit position of T axle is according to the functions of use difference, but reference for installation/clamp module 9 or simulate 1 station 1; , simulation is equipped with simulation 2 stations 4 on the 2 station back up pads 3; Simulation 1 film magazine 6 and simulation 2 film magazines 7 are housed on the simulation film magazine back up pad 8.
Described a kind of testing table that is used for the assembling adjustment/simulation station transmission of both arms transferring robot, when carrying out the benchmark debugging of the mechanical arm FORK center of circle, the both arms transferring robot left and right sides, benchmark/clamp module 9 is installed in the T axle zero-bit position of main frame back up pad 2, and fastening with mounting screw 10.Both arms transferring robot main frame is put into testing table and fix with only installation site, after then the T axle being transferred to zero-bit, about the forearm of two arms abut against on the forearm interfix plate 15 of benchmark/clamp module 9, and clamp left forearm with left forearm strap 14, left forearm geocoded activity clamping plate 12; Clamp right forearm with right forearm strap 18, right forearm geocoded activity clamping plate 17.At this moment, the big arm of two arms and forearm are all with fixing, and only getting the sheet arm can be movable.Two joint bolts of getting sheet arm and FORK combination are unscrewed, and the sheet arm is got in rotation all around or translation up and down, the center of circle of the center of circle of FORK combination and centralized positioning piece 19 is fitted like a glove after, the screw that all are unclamped is fastening again puts in place.Keep existing tightening state, the synchronous band and the belt wheel of two forearms are installed engagement, adjust band pre-tightening mechanism synchronously, keeps enough pretightning forces, and the gear train of inspection both arms, guarantee not have unconfined freely rotate or mobile.Step is removed benchmark/clamp module 9 in accordance with regulations then.
Described a kind of testing table that is used for the assembling adjustment/simulation station transmission of two transfer arm robots, when between station, carrying out the transmission experiment of silicon chip, remove benchmark/clamp module 9, simulation 1 station 1 is installed in the T axle zero-bit position of main frame back up pad 2, the workflow of determining according to the both arms transferring robot is come the planning path then, between each station, carry out the transmission experiment of silicon chip, with the every functional parameter of check both arms transferring robot and the reliability of long-term operation.
Claims (2)
1. a testing table that is used for the assembling adjustment/simulation station transmission of both arms transferring robot comprises simulation 1 station (1), main frame back up pad (2), simulate 2 station back up pads (3), simulate 2 stations (4), frame combination (5), simulate 1 film magazine (6), simulate 2 film magazines (7), simulation film magazine back up pad (8), benchmark/clamp module (9), mounting screw (10), regulating device base plate (11), left side forearm geocoded activity clamping plate (12), left arm rubber contact plate (13), left side forearm strap (14); forearm interfix plate (15); right arm rubber contact plate (16); right forearm geocoded activity clamping plate (17); right forearm strap (18); centralized positioning piece (19); It is characterized in that: described assembling adjustment/simulation station transmission test platform, above the test bed framework combination (5) of industrial aluminum profile assembling, main frame back up pad (2), simulation 2 station back up pads (3), simulation film magazine back up pad (8) are housed; Have in the main frame mounting hole on the described main frame back up pad (2), so that the main frame of both arms transferring robot to be installed; The zero-bit position of T axle is according to the functions of use difference, but reference for installation/clamp module (9) or simulate 1 station (1); On the described simulation 2 station back up pads (3), simulation 2 stations (4) are housed; On the described simulation film magazine back up pad (8), simulation 1 film magazine (6) and simulation 2 film magazines (7) are housed.
2. a kind of testing table that is used for the assembling adjustment/simulation station transmission of both arms transferring robot according to claim 1, it is characterized in that: described assembling adjustment/simulation station transmission test platform, when carrying out the benchmark debugging of the mechanical arm FORK center of circle, the both arms transferring robot left and right sides, benchmark/clamp module (9) is installed in the T axle zero-bit position of main frame back up pad (2), and fastening with mounting screw (10); Both arms transferring robot main frame is put into the mounting hole of testing table main frame back up pad (2) and fix with only installation site, after then the T axle being transferred to zero-bit, about the forearm of two arms abut against on the forearm interfix plate (15) of benchmark/clamp module (9), and clamp left forearm with left forearm strap (14), left forearm geocoded activity clamping plate (12); Clamp right forearm with right forearm strap (18), right forearm geocoded activity clamping plate (17); At this moment, the big arm of two arms and forearm are all with fixing, only getting the sheet arm can be movable, two joint bolts of getting sheet arm and FORK combination are unscrewed, the sheet arm is got in rotation all around or translation up and down, after the center of circle of the center of circle of FORK combination and centralized positioning piece (19) was fitted like a glove, the screw that all are unclamped is fastening again put in place.Keep existing tightening state, the synchronous band and the belt wheel of two forearms are installed engagement, adjust band pre-tightening mechanism synchronously, keeps enough pretightning forces, and the gear train of inspection both arms, guarantee not have unconfined freely rotate or mobile.Step is removed benchmark/clamp module (9) in accordance with regulations then; Described assembling adjustment/simulation station transmission test platform, when between station, carrying out the transmission experiment of silicon chip, remove benchmark/clamp module (9), to simulate 1 station (1) and be installed in the T axle zero-bit position of main frame back up pad (2), the workflow of determining according to the both arms transferring robot is come the planning path then, between each station, carry out the transmission experiment of silicon chip, with the every functional parameter of check both arms transferring robot and the reliability of long-term operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100627692A CN102156053A (en) | 2011-03-16 | 2011-03-16 | Test bench for assembly adjustment/simulated station transmission of dual-arm transmission robot |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011100627692A CN102156053A (en) | 2011-03-16 | 2011-03-16 | Test bench for assembly adjustment/simulated station transmission of dual-arm transmission robot |
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| CN102156053A true CN102156053A (en) | 2011-08-17 |
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| CN2011100627692A Pending CN102156053A (en) | 2011-03-16 | 2011-03-16 | Test bench for assembly adjustment/simulated station transmission of dual-arm transmission robot |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1170655A (en) * | 1996-05-31 | 1998-01-21 | Memc电子材料有限公司 | Automated wafer lapping system |
| JPH1044074A (en) * | 1996-07-30 | 1998-02-17 | Nippon Telegr & Teleph Corp <Ntt> | Multi-work method and device thereof |
| CN101436562A (en) * | 2008-12-12 | 2009-05-20 | 哈尔滨工业大学 | Large elevating magnification ratio double-arm crystal transmission manipulator |
| WO2010073860A1 (en) * | 2008-12-26 | 2010-07-01 | 三井造船株式会社 | Cleaning robot system and method of controlling same |
| CN101908497A (en) * | 2010-07-14 | 2010-12-08 | 哈尔滨工业大学 | Double-arm transmission robot applied to high-cleanliness environment |
-
2011
- 2011-03-16 CN CN2011100627692A patent/CN102156053A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1170655A (en) * | 1996-05-31 | 1998-01-21 | Memc电子材料有限公司 | Automated wafer lapping system |
| JPH1044074A (en) * | 1996-07-30 | 1998-02-17 | Nippon Telegr & Teleph Corp <Ntt> | Multi-work method and device thereof |
| CN101436562A (en) * | 2008-12-12 | 2009-05-20 | 哈尔滨工业大学 | Large elevating magnification ratio double-arm crystal transmission manipulator |
| WO2010073860A1 (en) * | 2008-12-26 | 2010-07-01 | 三井造船株式会社 | Cleaning robot system and method of controlling same |
| CN101908497A (en) * | 2010-07-14 | 2010-12-08 | 哈尔滨工业大学 | Double-arm transmission robot applied to high-cleanliness environment |
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Application publication date: 20110817 |