CN201373754Y

CN201373754Y - Multi-axis adjusting device

Info

Publication number: CN201373754Y
Application number: CN200920009486U
Authority: CN
Inventors: 邱毓英
Original assignee: Individual
Current assignee: Individual
Priority date: 2009-04-02
Filing date: 2009-04-02
Publication date: 2009-12-30
Anticipated expiration: 2019-04-02

Abstract

A multi-axis adjusting device comprises a lower base, an upper base and an adjusting seat; the lower base comprises a first fixing part and a first translating part moving along a first direction; the upper base is arranged underneath the lower base and comprises a second fixing part and a second translating part moving along a second direction; the adjusting seat is arranged above the upper base and accommodates the measurement object so as to rotate along a third direction; wherein the base is provided with a drive unit, wherein the drive unit is connected with the translating part through a screw cap, therefore a bolt rod can drive the screw cap arranged thereon to interlock the translating part, so as to produce displacement, and then the adjusting seat rotates along the shaft perpendicular to the bolt rod synchronously.

Description

The multiaxis adjusting gear

Technical field

The utility model is about a kind of multiaxis adjusting gear, is meant a kind of by three axial adjustment locating platform devices that simple and easy assembly constituted especially.

Background technology

Along with semiconductor, micro electronmechanical, electronics, photoelectricity, give birth to the development in succession of doctor and nano-technology industry, it has been trend that product moves towards compactization, its machine parts'precise is trickle, check, when the assembling Cargo Inspection is looked into, desired bearing accuracy is high.

Exploitation and utilization along with semi-conductor industry and nanosecond science and technology, making the demand of nano-scale localization platform grow up simultaneously fast also is one of gordian technique of development in science and technology of future, the linear slide rail commodity have been used on the industries such as precision optical machinery, robotization, various power transmission, semiconductor, medical treatment and space flight widely now, further and be applied on the high-precision micro-positioning platform, and the domestic and international at present detection technique for the high precision lead screw has been a maturation very, and still the detection technique for three locating platforms but still is in the stage of rudiment;

So precision and work efficiency when how effectively to increase by three locating platforms measurements must be considered.

Summary of the invention

The purpose of this utility model promptly is to provide a kind of multiaxis adjusting gear.A time purpose of the present utility model is to provide the multiaxis adjusting gear after a kind of little retrofit.Another purpose of the present utility model be to provide a kind of single pedestal its independently can be connected with the track that relatively moves between fixture and translation part, to realize the multiaxis adjusting gear of accurate positioning.Another purpose of the present utility model is to provide the multiaxis adjusting gear of a kind of Three Degree Of Freedom location, its accurately structure do not need to obtain to control three axle system kinematic errors via compensation parallelism error amount.

Can reach the multiaxis adjusting gear of above-mentioned utility model purpose, include: a bottom base, comprise one first fixture, reach the first translation part that moves along a first direction; One top base is positioned at this bottom base top, comprises one second fixture, reaches the second translation part that moves along a second direction; One adjusts seat, is positioned at above this top base and in order to put this measurement thing to rotate along a third direction.

The above technical scheme that the utility model adopts has reached the useful technique effect of high rigidity, high precision, load weight height and economy and durability.And advantages of compact and light structure, motion response is fast, the speed height.

Description of drawings

Fig. 1 is the schematic perspective view of its first embodiment of the utility model multiaxis adjusting gear;

Fig. 2 is the side schematic view of its first embodiment of the utility model multiaxis adjusting gear;

Fig. 3 is the schematic perspective view of its second embodiment of the utility model multiaxis adjusting gear;

Fig. 4 links the synoptic diagram of driver element for its second embodiment of multiaxis adjusting gear;

Fig. 5 is the diagrammatic cross-section of its pedestal of Fig. 4;

Fig. 6 adjusts the perspective exploded view of seat for the utility model;

Fig. 7 adjusts the diagrammatic cross-section of seat for the utility model;

Fig. 8 links the synoptic diagram of driver element for the multiaxis adjusting gear;

Fig. 9 links the synoptic diagram of driver element for its 3rd embodiment of multiaxis adjusting gear.

Embodiment

See also Fig. 1 to Fig. 5, multiaxis adjusting gear provided by the utility model mainly includes: a bottom base 1, a top base 2 and are adjusted 3 formations of seat.

This bottom base 1 comprises one first fixture 11, reaches the first translation part 12 that moves along a first direction;

This top base 2 is positioned at this bottom base 1 top, comprises one second fixture 21, reaches the second translation part 22 that moves along a second direction;

This adjustment seat 3 is positioned at these top base 2 tops and in order to put this measurement thing (or carrier platform) to rotate along a third direction.

This bottom base 1 (or top base 2) comprises that a fixture 11 (21) can be fixedly arranged on this stationary platform (not shown), square end portion is convexly equipped with a group connecting part 111 (211) that is the dovetail shape thereon, the then corresponding concave part that can be mated 121 (221) that is arranged with in the bottom, top of a translation part 12 (22), then this translation part 12 (22) can be along the vertically moving of group connecting part 111 (211), in order to do for providing the relative translation campaign with rolling body 13 (23) between this fixture 11 (21) and translation part 12 (22).

Mainly constituted as Fig. 6 and this adjustment shown in Figure 7 seat 3 by ring cowling 33 and a plurality of rolling body 34 on a chassis 31, the tumbler 32;

This chassis 31 is established in the form of annular discs, be equipped with plurality of holes 311 in its periphery, can be locked on later on the translation part of this top base 2 (or bottom base 1) for bolt 35 break-through of corresponding number and locate, and make that adjusting seat 3 can follow this translation part displacement, this chassis 31 is provided with an accommodation space 312 in its central inner, more is provided with the annular groove 313 of a reservation shape in the perisporium of this accommodation space 312;

This tumbler 32 is located in these chassis 31 its accommodation spaces 312, in its periphery outside, then be provided with a concave part 321 with respect to these chassis 31 its annular grooves 313, its end face then is provided with some screws 322, finishes the winding of itself and this carrier platform after being screwed into for a plurality of bolt (not shown) of passing this carrier platform (not shown);

Should go up ring cowling 33 and establish and be loop shaped and can be placed on this chassis 31 and this tumbler 32, on its periphery, also be provided with plurality of holes 331, can be corresponding and pass the back locking in the lump for bolt 35 with its hole of this chassis 31 311, group is fixed in the top, chassis.Around its ring interior portion and be formed with a limiting section 332, can constitute a scroll space 36 with these chassis 31 its annular grooves 313, these tumbler 32 its concave parts 321 after the winding, for a plurality of rolling bodys 37 for the steel ball formation, can be contained among this scroll space 36, this tumbler is rotated with respect to this chassis.This rolling body 37 can be roller, ball.

As shown in Figure 8, this bottom base 1 (or top base 2) is provided with a driver element 4, and this driver element 4 is connected with this translation part 12 (22) with nut 43, being provided with screw rod 42 drives the nut 43 interlock translation parts 12 (22) that spiral shells establish on it and produces displacements with relative fixed part 11 (21), and this driver element 4 more is connected with a controller (not shown), this controller is in order to drive screw 42, make 11 (21) the axially-movables of nut 43 interlock translation parts 12 (22) relative fixed parts, rotate along axle synchronously perpendicular to screw rod 42 and adjust seat 3 relative fixed parts 11 (21) along screw rod 42.

And comprise the driver element 4 of motor 41, can connect and establish a screw rod 42 and stretch out and utilize and nut 43 that this screw rod 42 screws togather, this nut 43 is fixed on the translation part 12 (22) of bottom base 1 (or top base 2), the screw rod 42 that makes this driver element 4 is with translation part 12 (22) its slips of bottom base 1 (or top base 2) or move in the same way, then, make this nut 43 will drive the shift motion person that this translation part 12 (22) produces X-direction or Y direction when driver element 4 spinning movements.

And for example shown in Figure 9, this adjustment seat 3 can be arranged between top base 2 tops or bottom base 1 and the top base 2, can make X-direction, Y direction or rotation displacement so that a carrier platform (not shown) that is fixed in adjustment seat 3 (or top bases 2) top to be provided.Adjust seat 3 and respectively be provided with on this top base 2 or the bottom base 1, can significantly reduce because interfere the error that is produced, and respectively each member of this top base 2 or bottom base 1 is is more manufactured and designed by modularity, can control its precision and energy mass production, price is not high, and be easy to contraposition, can thoroughly solve multiaxis and measure with adjustment and be not easy, with and expensive scarce fraud.

More than be illustrative to description of the present utility model; and it is nonrestrictive; those skilled in the art is understood, and can carry out many modifications, variation or equivalence to it within spirit that claim limits and scope, but they will fall in the protection domain of the present utility model all.

Claims

1. a multiaxis adjusting gear is characterized in that, comprising:

One bottom base comprises one first fixture, reaches the first translation part that moves along a first direction;

One top base is positioned at this bottom base top, comprises one second fixture, reaches the second translation part that moves along a second direction;

One adjusts seat, is positioned at this top base top and measures thing in order to put one, rotates along a third direction.

2. multiaxis adjusting gear according to claim 1 is characterized in that, provides the relative translation campaign with rolling body between described fixture and translation part.

3. multiaxis adjusting gear according to claim 1, it is characterized in that, described adjustment seat, comprise the chassis that is fixedly arranged on the translation part, its central inner has an accommodation space, one tumbler is installed with wherein, ring cowling is placed on this tumbler and organizes and is fixed in the top, chassis on one, the perisporium of this accommodation space is provided with annular groove, this tumbler then is provided with a concave part in the outside correspondence of its periphery, and with the inner limiting section that forms around its ring heart of ring cowling on this, mutual group constitutes a scroll space, a plurality of rolling bodys hold wherein, and this tumbler rotates with respect to this chassis.

4. multiaxis adjusting gear according to claim 1, it is characterized in that, described pedestal is provided with a driver element, and this driver element is connected with this translation part with nut, the nut interlock translation part relative fixed part that the screw drive spiral shell is established on it produces displacement, rotates synchronously and adjust seat relative fixed part.

5. multiaxis adjusting gear according to claim 2, it is characterized in that, described translation part is established a concave part in its bottom, described fixture then be convexly equipped with in its top one with the group connecting part of the corresponding cooperation of concave part, the relative translation on group connecting part longitudinally of the described translation part of confession is moved.

6. multiaxis adjusting gear according to claim 2 is characterized in that, the rolling body between described fixture and translation part is a roller.

7. multiaxis adjusting gear according to claim 3 is characterized in that, the described rolling body of adjusting seat is a ball.

8. multiaxis adjusting gear according to claim 4 is characterized in that described driver element more is connected with a controller, and this screw rod of this controller drives makes the axially-movable of this nut interlock translation part along this screw rod.

9. multiaxis adjusting gear according to claim 4, it is characterized in that, described driver element more is connected with a controller, this controller drives screw rod, make of the axially-movable of nut interlock translation part relative fixed part, rotate along axle synchronously perpendicular to screw rod and adjust seat relative fixed part along screw rod.