CN102126208B

CN102126208B - Parallel connection type R-shaft expansion mechanical arm

Info

Publication number: CN102126208B
Application number: CN201110062722A
Authority: CN
Inventors: 刘延杰; 吴明月; 荣伟彬; 孙立宁
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2011-03-16
Filing date: 2011-03-16
Publication date: 2012-09-19
Anticipated expiration: 2031-03-16
Also published as: CN102126208A

Abstract

The invention provides a parallel connection type R-shaft expansion mechanical arm for a silicon wafer conveying robot. The parallel connection type R-shaft expansion arm is used for completing a working process of taking/putting a silicon wafer at a special position. When the change of the position of taking/putting the silicon wafer is not big relative to the turning radius of an R shaft, while the traveling track is relatively complex, the parallel connection type R-shaft expansion mechanical arm can be used for simplifying the working path and the traveling track of the R shaft and the programming difficulty and workload, and effectively improving the working efficiency. Power of the parallel connection type R-shaft expansion mechanical arm is provided through an independent W/T shaft motor and two W/R shaft motors, and the working program of the parallel connection type R-shaft expansion mechanical arm is uniformly controlled through a computer; and when the change of the working track of the R shaft is not big within the turning radius of the R shaft, and represents a relatively complex state, the W/T shaft motor and the two W/R shaft motors of the parallel connection type R-shaft expansion mechanical arm drive an execution mechanism to rotate at different angles in different directions according to the control of the program of the computer, so that two FORK combinations are driven to advance according to a working position so as to additionally obtain a group of working tracks, wherein a W/T shaft and a W/R shaft serve as rotation centers, and the length of centers of the FORK combinations protruding forwards serve as a radius; and therefore, the working process of taking/putting the silicon wafer at the special position is completed.

Description

A kind of parallel connection type R axle expansion mechanical arm

Technical field

The present invention relates in the semiconductor integrated circuit production line manufacturing field of equipment, a kind of parallel connection type R axle expansion mechanical arm that is used for the chip transmission robot, what be used to accomplish specific position picks and places the silicon chip workflow.When the position that picks and places silicon chip changes little with respect to the R axle radius of gyration and run trace when comparatively complicated; Adopt parallel connection type R axle expansion mechanical arm can simplify the operating path and the run trace of R axle; The difficulty of abbreviation program composition and workload, and can effectively increase work efficiency.

Background technology

For the chip transmission robot, the position that picks and places silicon chip sometimes is more special.When the position that picks and places silicon chip changes little with respect to the R axle radius of gyration and run trace when comparatively complicated, only utilize the R axle very difficulty or even impossible of flow process of finishing the work; Adopt parallel connection type R axle expansion mechanical arm this moment, operating path and run trace that can effective simplification R axle, the difficulty of abbreviation program composition and workload are increased work efficiency.The power of parallel connection type R axle expansion mechanical arm is provided by independently W/T spindle motor and two W/R spindle motors, by its working procedure of the unified control of computer; When the work track of R axle changes little in its radius of gyration and present comparatively complex state; W/T spindle motor and two controls that the W/R spindle motor is pressed computer program of parallel connection type R axle expansion mechanical arm; Driving execution mechanism begins to do the rotation of different angles, different directions; Driving two FORK combinations advances by the operating position; Thereby extra acquisition is pivot, is one group of work track of radius with the FORK combination center length of protracting with W/T axle and W/R axle, picks and places the silicon chip workflow with what accomplish specific position.

Summary of the invention

The object of the present invention is to provide a kind of parallel connection type R axle expansion mechanical arm that is used for the chip transmission robot, what be used to accomplish specific position picks and places the silicon chip workflow.The power of parallel connection type R axle expansion mechanical arm is provided by independently W/T spindle motor and two W/R spindle motors, by its working procedure of the unified control of computer.

Goal of the invention implementation procedure of the present invention is: a kind of parallel connection type R axle expansion mechanical arm comprises the big arm mechanism combination 1 of R axle; R axle forearm mechanism combination 2; The R axle is got sheet arm mechanism combination 3; W/T shaft housing combination 4; W/T shaft encoder 5; W/T axle servomotor 6; W/T axle harmonic speed reducer 7; The W/R axle connects base plate combination 8; W/R1 shaft encoder 9; W/R1 axle servomotor 10; W/R1 axle harmonic speed reducer 11; W/R2 shaft encoder 12; W/R2 axle servomotor 13; W/R2 axle harmonic speed reducer 14; W/R spindle motor shell combination out of my cabin 15; W/R1 through-drive axle 16; W/R2 through-drive axle 17; W/R spindle motor cabin loam cake 18; W/R1 axle FORK hold-down arm 19; W/R2 axle FORK hold-down arm 20; W/R1 axle gas circuit pipe joint 21; W/R2 axle gas circuit pipe joint 22; W/R1 axle FORK combination 23; W/R2 axle FORK combination 24.

1, the big arm mechanism combination 1 of R axle is installed on the T axle of fuselage; R axle forearm mechanism combination 2 is installed in the output of the big arm mechanism combination 1 of R axle; The R axle is got the output that sheet arm mechanism combination 3 is installed in R axle forearm mechanism combination 2.

2, get the output of sheet arm mechanism combination 3 at the R axle, W/T shaft housing combination 4 is installed; In the W/T shaft housing combination 4, W/T shaft encoder 5, W/T axle servomotor 6, W/T axle harmonic speed reducer 7 are installed successively from bottom to up; W/T shaft encoder 5 is installed in the back axle head of W/T axle servomotor 6, and the preceding axle head of W/T servomotor 6 is installed in the input of W/T axle harmonic speed reducer 7.

3,, the W/R axle is installed connects base plate combination 8 at the output of W/T axle harmonic speed reducer 7; The W/R axle connects on the cooperation seam of base plate combination 8, and W/R spindle motor shell combination out of my cabin 15 is installed; In the W/R spindle motor shell combination out of my cabin 15, two groups of parts are housed respectively from the bottom to top, form by W/R1 shaft encoder 9, W/R1 axle servomotor 10, W/R1 axle harmonic speed reducer 11 for one group; Another group is made up of W/R2 shaft encoder 12, W/R2 axle servomotor 13, W/R2 axle harmonic speed reducer 14; W/R1 shaft encoder 9 is installed in the back axle head of W/R1 axle servomotor 10, and the preceding axle head of W/R1 axle servomotor 10 is installed in the input of W/R1 axle harmonic speed reducer 11; W/R2 shaft encoder 12 is installed in the back axle head of W/R2 axle servomotor 13, and the preceding axle head of W/R2 axle servomotor 13 is installed in the input of W/R2 axle harmonic speed reducer 14.

4, on the upper end seam of W/R spindle motor shell combination out of my cabin 15, W/R spindle motor cabin loam cake 18 is installed; At the output of W/R1 axle harmonic speed reducer 11, W/R1 through-drive axle 16 is installed; The upper end of W/R1 through-drive axle 16 is equipped with W/R1 axle FORK hold-down arm 19; In the side of W/R1 axle FORK hold-down arm 19, W/R1 axle gas circuit pipe joint 21 is installed; On W/R1 axle FORK hold-down arm 19 front end seams, W/R1 axle FORK combination 23 is installed.

5,, W/R2 through-drive axle 17 is installed at the output of W/R2 axle harmonic speed reducer 14; In the upper end of W/R2 through-drive axle 17, W/R2 axle FORK hold-down arm 20 is installed; In the side of W/R2 axle FORK hold-down arm 20, W/R2 axle gas circuit pipe joint 22 is installed; On the front end seam of W/R2 axle FORK hold-down arm 20, W/R2 axle FORK combination 24 is installed.

6, in the side of W/R1 axle FORK hold-down arm 19, W/R1 axle gas circuit pipe joint 21 is installed, and links through gas circuit pipe joint 21 and system's control gas circuit, under the control of computer, accomplish and inhale sheet and film releasing action; In the side of W/R2 axle FORK hold-down arm 20, W/R2 axle gas circuit pipe joint 22 is installed, and links through gas circuit pipe joint 22 and system's control gas circuit, under the control of computer, accomplish and inhale sheet and film releasing action.

A kind of parallel connection type R of the present invention axle expansion mechanical arm has following advantage:

1, because parallel connection type R axle is expanded the application of mechanical arm, effectively expands the scope of application of chip transmission robot, do not carried out under the prerequisite of big structural modification, further strengthened the ability in chip transmission robot adaptation complex work path.

2, parallel connection type R axle expansion mechanical arm is simple in structure, and control is convenient, is beneficial to adjustment, and is with low cost.

Description of drawings

Fig. 1 is the 3 dimensional drawing of a kind of parallel connection type R of the present invention axle expansion mechanical arm.

Fig. 2 is the three-dimensional, exploded view of a kind of parallel connection type R of the present invention axle expansion mechanical arm.

In the accompanying drawings, concrete numeral: the big arm mechanism combination of 1-R axle, the combination of 2-R axle forearm mechanism, 3-R axle are got the combination of sheet arm mechanism, the combination of 4-W/T shaft housing, 5-W/T shaft encoder, 6-W/T axle servomotor, 7-W/T axle harmonic speed reducer, the combination of 8-W/R axle connection base plate, 9-W/R1 shaft encoder, 10-W/R1 axle servomotor, 11-W/R1 axle harmonic speed reducer, 12-W/R2 shaft encoder, 13-W/R2 axle servomotor, 14-W/R2 axle harmonic speed reducer, the shell combination out of my cabin of 15-W/R spindle motor, 16-W/R1 through-drive axle, 17-W/R2 through-drive axle, 18-W/R spindle motor cabin loam cake, 19-W/R1 axle FORK hold-down arm, 20-W/R2 axle FORK hold-down arm, 21-W/R1 axle gas circuit pipe joint, 22-W/R2 axle gas circuit pipe joint, 23-W/R1 axle FORK combination, 24-W/R2 axle FORK combination.

The specific embodiment

In conjunction with accompanying drawing the present invention is described further:

Shown in accompanying drawing, a kind of parallel connection type R axle expansion mechanical arm comprises: the big arm mechanism combination of R axle 1, R axle forearm mechanism combination 2, R axle are got sheet arm mechanism combination 3, W/T shaft housing combination 4, W/T shaft encoder 5, W/T axle servomotor 6, W/T axle harmonic speed reducer 7, W/R axle and are connected base plate combination 8, W/R1 shaft encoder 9, W/R1 axle servomotor 10, W/R1 axle harmonic speed reducer 11, W/R2 shaft encoder 12, W/R2 axle servomotor 13, W/R2 axle harmonic speed reducer 14, W/R spindle motor shell combination out of my cabin 15, W/R1 through-drive axle 16, W/R2 through-drive axle 17, W/R spindle motor cabin loam cake 18, W/R1 axle FORK hold-down arm 19, W/R2 axle FORK hold-down arm 20, W/R1 axle gas circuit pipe joint 21, W/R2 axle gas circuit pipe joint 22, W/R1 axle FORK combination 23, W/R2 axle FORK combination 24.

The big arm mechanism combination 1 of R axle is installed on the T axle of fuselage; R axle forearm mechanism combination 2 is installed in the output of the big arm mechanism combination 1 of R axle; The R axle is got the output that sheet arm mechanism combination 3 is installed in R axle forearm mechanism combination 2.

Get the output of sheet arm mechanism combination 3 at the R axle, W/T shaft housing combination 4 is installed; In the W/T shaft housing combination 4, W/T shaft encoder 5, W/T axle servomotor 6, W/T axle harmonic speed reducer 7 are installed successively from bottom to up; W/T shaft encoder 5 is installed in the back axle head of W/T axle servomotor 6, and the preceding axle head of W/T servomotor 6 is installed in the input of W/T axle harmonic speed reducer 7.

At the output of W/T axle harmonic speed reducer 7, the W/R axle is installed connects base plate combination 8; The W/R axle connects on the cooperation seam of base plate combination 8, and W/R spindle motor shell combination out of my cabin 15 is installed; In the W/R spindle motor shell combination out of my cabin 15, two groups of parts are housed respectively from the bottom to top, form by W/R1 shaft encoder 9, W/R1 axle servomotor 10, W/R1 axle harmonic speed reducer 11 for one group; Another group is made up of W/R2 shaft encoder 12, W/R2 axle servomotor 13, W/R2 axle harmonic speed reducer 14; W/R1 shaft encoder 9 is installed in the back axle head of W/R1 axle servomotor 10, and the preceding axle head of W/R1 axle servomotor 10 is installed in the input of W/R1 axle harmonic speed reducer 11; W/R2 shaft encoder 12 is installed in the back axle head of W/R2 axle servomotor 13, and the preceding axle head of W/R2 axle servomotor 13 is installed in the input of W/R2 axle harmonic speed reducer 14.

On the upper end seam of W/R spindle motor shell combination out of my cabin 15, W/R spindle motor cabin loam cake 18 is installed; At the output of W/R1 axle harmonic speed reducer 11, W/R1 through-drive axle 16 is installed; The upper end of W/R1 through-drive axle 16 is equipped with W/R1 axle FORK hold-down arm 19; In the side of W/R1 axle FORK hold-down arm 19, W/R1 axle gas circuit pipe joint 21 is installed; On W/R1 axle FORK hold-down arm 19 front end seams, W/R1 axle FORK combination 23 is installed.

At the output of W/R2 axle harmonic speed reducer 14, W/R2 through-drive axle 17 is installed; In the upper end of W/R2 through-drive axle 17, W/R2 axle FORK hold-down arm 20 is installed; In the side of W/R2 axle FORK hold-down arm 20, W/R2 axle gas circuit pipe joint 22 is installed; On the front end seam of W/R2 axle FORK hold-down arm 20, W/R2 axle FORK combination 24 is installed.

In the side of W/R1 axle FORK hold-down arm 19, W/R1 axle gas circuit pipe joint 21 is installed, and links through gas circuit pipe joint 21 and system's control gas circuit, under the control of computer, accomplish and inhale sheet and film releasing action; In the side of W/R2 axle FORK hold-down arm 20, W/R2 axle gas circuit pipe joint 22 is installed, and links through gas circuit pipe joint 22 and system's control gas circuit, under the control of computer, accomplish and inhale sheet and film releasing action.

Claims

1. a parallel connection type R axle expansion mechanical arm comprises: the big arm mechanism combination of R axle (1); R axle forearm mechanism combination (2); The R axle is got sheet arm mechanism combination (3); W/T shaft housing combination (4); W/T shaft encoder (5); W/T axle servomotor (6); W/T axle harmonic speed reducer (7); The W/R axle connects base plate combination (8); W/R1 shaft encoder (9); W/R1 axle servomotor (10); W/R1 axle harmonic speed reducer (11); W/R2 shaft encoder (12); W/R2 axle servomotor (13); W/R2 axle harmonic speed reducer (14); The W/R spindle motor is shell combination (15) out of my cabin; W/R1 through-drive axle (16); W/R2 through-drive axle (17); W/R spindle motor cabin loam cake (18); W/R1 axle FORK hold-down arm (19); W/R2 axle FORK hold-down arm (20); W/R1 axle gas circuit pipe joint (21); W/R2 axle gas circuit pipe joint (22); W/R1 axle FORK makes up (23); W/R2 axle FORK makes up (24); It is characterized in that: said parallel connection type R axle expansion mechanical arm; What be used to accomplish specific position picks and places the silicon chip workflow; Its drive unit has used independently W/T axle driver module and independently W/R1, W/R2 driver module, by its working procedure of the unified control of computer; The big arm mechanism combination of said R axle (1) is installed on the T axle of fuselage; Said R axle forearm mechanism's combination (2) is installed in the output of the big arm mechanism combination of R axle (1); Said R axle is got the output that sheet arm mechanism combination (3) is installed in R axle forearm mechanism combination (2); Said R axle is got the output of sheet arm mechanism combination (3), and W/T axle driver module is installed; Said W/T axle driver module comprises the combination of W/T shaft housing (4), W/T shaft encoder (5), W/T axle servomotor (6), W/T axle harmonic speed reducer (7); In the said W/T shaft housing combination (4), W/T shaft encoder (5), W/T axle servomotor (6), W/T axle harmonic speed reducer (7) are installed successively from bottom to up; Said W/T shaft encoder (5) is installed in the back axle head of W/T axle servomotor (6), and the preceding axle head of W/T servomotor (6) is installed in the input of W/T axle harmonic speed reducer (7); The output of said W/T axle harmonic speed reducer (7) is equipped with the W/R axle and connects base plate combination (8); The W/R axle connects on the cooperation seam of base plate combination (8), and the shell combination (15) out of my cabin of W/R spindle motor is installed; In the said W/R spindle motor shell combination out of my cabin (15), two groups of parts are housed respectively from the bottom to top, form the W/R1 driver module by W/R1 shaft encoder (9), W/R1 axle servomotor (10), W/R1 axle harmonic speed reducer (11) for one group; Another group is formed the W/R2 driver module by W/R2 shaft encoder (12), W/R2 axle servomotor (13), W/R2 axle harmonic speed reducer (14); Said W/R1 shaft encoder (9) is installed in the back axle head of W/R1 axle servomotor (10), and the preceding axle head of W/R1 axle servomotor (10) is installed in the input of W/R1 axle harmonic speed reducer (11); Said W/R2 shaft encoder (12) is installed in the back axle head of W/R2 axle servomotor (13), and the preceding axle head of W/R2 axle servomotor (13) is installed in the input of W/R2 axle harmonic speed reducer (14); On the upper end seam of said W/R spindle motor shell combination (15) out of my cabin, W/R spindle motor cabin loam cake (18) is installed; The output of said W/R1 axle harmonic speed reducer (11) is equipped with W/R1 through-drive axle (16); The upper end of said W/R1 through-drive axle (16) is equipped with W/R1 axle FORK hold-down arm (19), in the side of W/R1 axle FORK hold-down arm (19), W/R1 axle gas circuit pipe joint (21) is installed; On said W/R1 axle FORK hold-down arm (19) the front end seam, W/R1 axle FORK combination (23) is installed; The output of said W/R2 axle harmonic speed reducer (14) is equipped with W/R2 through-drive axle (17); The upper end of said W/R2 through-drive axle (17) is equipped with W/R2 axle FORK hold-down arm (20), in the side of W/R2 axle FORK hold-down arm (20), W/R2 axle gas circuit pipe joint (22) is installed; On the front end seam of said W/R2 axle FORK hold-down arm (20), W/R2 axle FORK combination (24) is installed; The side of said W/R1 axle FORK hold-down arm (19) is equipped with W/R1 axle gas circuit pipe joint (21), and links through gas circuit pipe joint (21) and system's control gas circuit, under the control of computer, accomplishes and inhales sheet and film releasing action; The side of said W/R2 axle FORK hold-down arm (20) is equipped with W/R2 axle gas circuit pipe joint (22), and links through gas circuit pipe joint (22) and system's control gas circuit, under the control of computer, accomplishes and inhales sheet and film releasing action; The W/T axle servomotor (6) of said parallel connection type R axle expansion mechanical arm is accepted computer instruction; During the energising running; Be installed in W/T shaft encoder (5) the entry into service work of motor shaft rear end, the duty of record W/T axle servomotor (6) and to control computer feedback data; The front end of motor shaft is installed in the input of W/T axle harmonic speed reducer (7); Make the rotating speed of the output acquisition certain gear ratio of W/T axle harmonic speed reducer (7); Reach the W/R axle and connect the shell combination (15) out of my cabin of base plate combination (8), W/R spindle motor; Drive W/R mechanism and obtain to be the center of circle, to be the movement locus of radius with W/T axle turning cylinder down to FORK combination center length; Said W/R1 axle servomotor (10), W/R2 axle servomotor (13) are accepted computer instruction respectively, are switched on when turning round separately; Be installed in separately W/R1 shaft encoder (9), the W/R2 shaft encoder (12) of motor shaft rear end and start working respectively, write down the duty of servomotor separately and to control computer feedback data; The front end of two servo motor shafts is installed in the input of W/R1 axle harmonic speed reducer (11), W/R2 axle harmonic speed reducer (14) respectively; Make the output of W/R1 axle harmonic speed reducer (11), W/R2 axle harmonic speed reducer (14) export the rotating speed that obtains a stable drive ratio separately; Through W/R1 through-drive axle (16), W/R2 through-drive axle (17), W/R1 axle FORK hold-down arm (19), W/R2 axle FORK hold-down arm (20); Reach W/R1 axle FORK combination (23) at last, W/R2 axle FORK make up (24), drive W/R1 axle FORK combination (23), W/R2 axle FORK combination (24) and obtain being the center of circle, being the movement locus of radius down to FORK combination center length separately with servomotor rotating shaft separately; The said above W/T axle movement locus and the stack of W/R axle movement locus are exactly the work track at W/R1 axle FORK combination (23), W/R2 axle FORK combination (24) center.