CN102161199A - W-axis coaxial transmission mechanism for silicon wafer transmission robot - Google Patents

W-axis coaxial transmission mechanism for silicon wafer transmission robot Download PDF

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Publication number
CN102161199A
CN102161199A CN 201110062736 CN201110062736A CN102161199A CN 102161199 A CN102161199 A CN 102161199A CN 201110062736 CN201110062736 CN 201110062736 CN 201110062736 A CN201110062736 A CN 201110062736A CN 102161199 A CN102161199 A CN 102161199A
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axis
mounted
base
robot
shaft
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CN 201110062736
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CN102161199B (en )
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刘延杰
吴明月
孙立宁
荣伟彬
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哈尔滨工业大学
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Abstract

The invention relates to a W-axis coaxial transmission mechanism for a silicon wafer transmission robot, which used for finishing the working process of taking silicon wafers at specific positions and is applicable to an R-axis space structure without limitation in the height, size and direction. The W-axis coaxial transmission mechanism can widen the use range of the silicon wafer transmission robot; in addition, the W-axis coaxial transmission mechanism can be installed by a simple process which comprises the following steps of dismounting a tail FORK arm from the tail end of an R-axis small arm, reinstalling the tail FORK arm at the output end of the W-axis coaxial transmission mechanism, using a special base to connect the R-axis small arm and the W-axis coaxial transmission mechanism, and readjusting a control program and finally debugging and using.

Description

一种用于硅片传输机器人的W轴同轴传动机构 To give a W coaxial transmission mechanism for wafer transfer robot

技术领域 FIELD

[0001 ] 本发明涉及在半导体集成电路生产线设备制造领域内,一种用于硅片传输机器人的W轴同轴传动机构,用于完成特殊位置的取放硅片工作流程、并且对高度尺寸方向没有限制的R轴空间结构。 [0001] The present invention relates to the field of manufacturing integrated circuits in a semiconductor production line apparatus, a wafer W coaxial transmission gear mechanism for a robot, a work process is completed and transfer the wafers particular location, and the height direction dimension no R-axis of the spatial structural limitations.

背景技术 Background technique

[0002] 对于硅片传输机器人来说,有时取放片的位置比较特别,仅利用R轴来完成工作流程非常困难甚至不可能,此时需要在R轴小臂末端安装一个独立的辅助机械臂——W轴传动机构来完成特殊位置的取放硅片工作流程。 [0002] For the wafer transfer robot, the sheet may take place rather special position, using only the R-axis to complete the work process is very difficult or impossible, at this time need to install a separate robot arm on the arm end of the auxiliary shaft R --W shaft drive mechanism to perform a specific position and transfer the wafers workflow. W轴传动机构的动力由独立的W轴电机输出,由计算机统一控制其工作程序;在输出端带动FORK组合围绕W轴作一定角度的旋转,从而额外获得以R轴运动轨迹为圆心、以W轴旋转中心至FORK中心长度为半径的一组工作轨迹,以完成特殊位置的取放硅片工作流程。 Power W axis drive mechanism independent of the W-axis motor output, be controlled by a computer which procedures; drive FORK combined output of about W-axis rotational certain angle, so that additional was obtained as an R-axis trajectory of the center to W FORK rotational center to the center of a set of work path length radius, in order to perform a specific position and transfer the wafers workflow.

发明内容 SUMMARY

[0003] 本发明的目的在于提供一种用于硅片传输机器人的W轴同轴传动机构,用于完成特殊位置的取放硅片工作流程。 [0003] The object of the present invention to provide a coaxial transmission shaft W silicon wafers for transfer robot for accomplishing a particular location and transfer the wafers workflow. 所谓同轴传动,是指W轴电机与W轴输出的旋转运动拥有共同的旋转中心;从结构上说,是指W电机轴与W输出轴同轴安装,因此同轴传动机构的高度较高,应用于对高度尺寸方向没有限制的R轴空间结构。 The so-called coaxial drive means and the rotary motion of the motor shaft W W output shaft has a common center of rotation; Structurally, W refers to the motor shaft and the output shaft coaxially W, so the higher the height of the coaxial transmission mechanism , applied to the height dimension of the R-axis direction is not restricted spatial structure.

[0004] 本发明的实现过程为:一种用于硅片传输机器人的W轴同轴传动机构,包括外罩组合1、W轴伺服电机2、电机固定板3、光电传感器挡片4、旋转支架5、从动旋转轴6、上轴承7、基座盖板8、F0RK组合9、下轴承10、锁紧螺母11、基座线夹12、W轴机械手基座13、阻尼橡胶垫14、控制线路板安装架15、光电传感器16、伺服电机支架17、控制线路板18。 [0004] The implementation process of the present invention is: to give a W-axis drive mechanism coaxially wafer transfer robot, comprising a combination of the housing 1, W-axis servo motor 2, the motor fixing plate 3, the photosensor flap 4, a swing arm 5, the driven rotating shaft 6, the upper bearing 7, the base plate 8, F0RK combination 9, the lower bearing 10, lock nut 11, the base clamp 12, W-axis robot base 13, damper rubber 14, the control circuit board mounting frame 15, the photosensor 16, the servo motor bracket 17, control circuit board 18.

[0005] W轴伺服电机2通过前端定位止口定位,用螺钉安装于电机固定板3上;伺服电机支架17上端用螺钉安装在电机固定板3底面的定位槽内。 [0005] W-axis servo motor 2 by positioning the distal end positioning spigot, a screw attached to the motor fixing plate 3; the servo motor bracket 17 is mounted on the upper end of the bottom surface of the positioning groove motor fixing plate 3 by screws.

[0006] 控制线路板安装架15以螺钉安装在电机固定板3上面的螺孔内;控制线路板18 以螺钉安装在控制线路板安装架15上。 [0006] The control circuit board 15 mounts a screw mounted within motor fixing plate 3 above the screw; screw control circuit board 18 is mounted on the control circuit board 15 mounting bracket.

[0007] W轴伺服电机2的电机轴直接伸入从动旋转轴6的配合孔内,通过从动旋转轴6侧面的螺孔,以紧定螺钉固定在电机轴侧面的平面上。 [0007] W-axis servo motor 2 is directly motor shaft extending into the mating hole of the driven rotating shaft 6, driven by a screw rotating shaft 6 side to set screws attached to the flat side of the motor shaft.

[0008] 将旋转支架5以螺钉安装在从动旋转轴6半圆平面上,再将光电传感器挡片4以螺钉安装在从动旋转轴6的安装面上。 [0008] The rotation bracket 5 is mounted on a screw driven rotating shaft 6 a semicircular plane, then the photosensor flaps 4 a screw on the mounting surface of the driven shaft 6.

[0009] 将FORK组合9与旋转支架5的配合表面清理干净,在旋转支架5底面的环形槽内放入气路密封垫,对正旋转支架5与FORK组合9的气路通孔,以螺钉联接FORK组合9与旋转支架5。 [0009] 9 The cleaning composition FORK mating surface of the rotary support 5 clean, into the gas passage in the annular seal groove bottom surface of the rotation bracket 5, of the gas holes lead to positive rotation bracket 5 and 9 FORK combination of a screw 9 coupled with the rotary support combination FORK 5.

[0010] 将光电传感器16以螺钉安装在伺服电机支架17的平面上。 [0010] The photosensor 16 is mounted on the screw plane of the servo motor bracket 17.

[0011] 将上轴承7、下轴承10分别以“热装法”装入基座盖板8的上、下轴承腔内,并压紧到位。 [0011] The upper bearing 7, the lower bearing 10, respectively, "hot charge method" loaded on the base plate 8 and the lower bearing cavity and pressed into place. 将装有上轴承7、下轴承10的基座盖板8穿入从动旋转轴6下端的轴内,并以上轴承7、下轴承10的内环相配合,压紧到位,并在从动旋转轴6最下端的螺纹部位安装锁紧螺母11,并拧紧到位。 7 with the upper bearing, the lower bearing 8 of the base plate 10 of the inner shaft 6 penetrates the lower end of the driven rotating shaft, and the above bearing 7, the bearing inner ring 10 is fitted, pressed in place, and driven threaded portion 6 of the lowermost end of the rotary shaft assembly lock nut 11, and tightened in place. 在安装过程中应使基座盖板8上表面的定位凹槽与伺服电机支架17的外形相配合,以螺钉拧紧到位。 During the installation of the base plate 8 should be positioned on the shape of the groove surface of the servo motor bracket 17 cooperates to tighten the screws in place.

[0012] 将基座线夹12以螺钉安装在W轴机械手基座13的内底面上,将阻尼橡胶垫14放入W轴机械手基座13的止口内,对正基座盖板8的下底面凸台,合装基座盖板8与W轴机械手基座13,并以螺钉拧紧。 [0012] In the base clamp screw 12 is mounted in the bottom surface of the W-axis of the robot base 13, 14 of the damping rubber stopper into the mouth of the W-axis of the robot base 13, the base plate 8 positive the bottom surface of the boss, the base plate 8 and the multipacks W-axis robot base 13, and to tighten the screws.

[0013] 将外罩组合1罩在基座盖板8上面的机构上,以螺钉拧紧。 [0013] The combination of a cap on the cover 8 above the base plate means to tighten the screws.

[0014] 完成以上装配后,用手转动FORK组合9,FORK组合9能向两面转动。 [0014] After the above assembly, rotation of the hand FORK composition 9, composition 9 can be rotated FORK sides. 通电调试时, FORK组合9向两端的转动角度应受光电传感器挡片4的角度控制。 When debugging power, FORK composition 9 to be rotated by an angle across the photosensor 4 is controlled flap angle.

[0015] 本发明一种用于硅片传输机器人的W轴同轴传动机构,具有如下优点: [0015] W-axis drive mechanism of the present invention is a coaxial transfer robot for silicon wafers, has the following advantages:

[0016] 1、硅片传输机器人的W轴同轴传动机构,扩展了硅片传输机器人的使用范围,可以满足特殊位置的取放硅片工作流程的要求。 [0016] 1, W gear coaxially wafer transfer robot, and extends the use of the wafer transfer robot, to meet the specific requirements of the position of the pick and place wafers workflow.

[0017] 2、改装过程简单,只需从R轴小臂末端拆除末端FORK手臂,重新安装在W轴同轴传动机构的输出端,并使用专用的底座使R轴小臂与W轴同轴传动机构相联接,重新调整控制程序后,即可调试及应用。 [0017] 2, the conversion process is simple, just dismantled from the arm tip end of the arm FORK R axis, again mounted on the output end of the coaxial transmission mechanism W-axis, and a dedicated base of the R axis coaxial with the axis of the arm W transmission mechanism to link the re-adjustment control program, and you can debug the application.

附图说明 BRIEF DESCRIPTION

[0018] 图1为用于硅片传输机器人的W轴同轴传动机构的三维立体图。 [0018] FIG. 1 is a perspective view of a coaxial three W-axis drive mechanism of the wafer transfer robot.

[0019] 图2为用于硅片传输机器人的W轴同轴传动机构的爆炸效果图。 [0019] FIG. 2 is a coaxial transmission W for a wafer transfer robot explosions FIG.

[0020] 在附图中,具体数字表示:1-外罩组合、2-W轴伺服电机、3-电机固定板、4-光电传感器挡片、5-旋转支架、6-从动旋转轴、7-上轴承、8-基座盖板、9-F0RK组合、10-下轴承、 11-锁紧螺母、12-基座线夹、13-W轴机械手基座、14-阻尼橡胶垫、15-控制线路板安装架、 16-光电传感器、17-伺服电机支架、18-控制线路板。 [0020] In the drawings, specific numerals: 1 - housing combination, 2-W-axis servo motor, the motor fixing plate 3-, 4- photosensor flaps, 5-rotation bracket, the rotation shaft driven 6-, 7 - bearing, the base plate 8-, 9-F0RK composition, 10 a lower bearing, locking nut 11-, 12- clamp base, 13-W-axis robot base, 14-damping rubber pad 15 control circuit board mount, the photosensor 16-, 17- servo motor bracket, the control circuit board 18.

具体实施方式 Detailed ways

[0021] 结合附图对本发明作进一步说明: [0021] DRAWINGS The present invention is further described:

[0022] 参照附图所示,一种用于硅片传输机器人的W轴同轴传动机构,包括外罩组合1、W 轴伺服电机2、电机固定板3、光电传感器挡片4、旋转支架5、从动旋转轴6、上轴承7、基座盖板8、FORK组合9、下轴承10、锁紧螺母11、基座线夹12、W轴机械手基座13、阻尼橡胶垫14、控制线路板安装架15、光电传感器16、伺服电机支架17、控制线路板18。 1, W-axis servo motor 2, the motor fixing plate 3, the photosensor flap 4, a swing arm 5 [0022] Referring to the drawings shown a wafer W coaxial transmission gear mechanism for a robot, comprising a combination of a housing the driven rotating shaft 6, the upper bearing 7, the base plate 8, FORK combination 9, the lower bearing 10, lock nut 11, the base clamp 12, W-axis robot base 13, damper rubber 14, the control circuit mount plate 15, the photosensor 16, the servo motor bracket 17, control circuit board 18.

[0023] W轴伺服电机2通过前端定位止口定位,安装于电机固定板3上;伺服电机支架17 上端安装在电机固定板3底面的定位槽内。 [0023] W-axis servo motor 2 by positioning the front end spigot is positioned, attached to the motor fixing plate 3; upper servo motor bracket 17 is mounted on the bottom surface of the positioning groove motor fixing plate 3.

[0024] 控制线路板安装架15安装在电机固定板3上;控制线路板18安装在控制线路板安装架15上。 [0024] The control circuit board 15 is mounted on a mount plate fixed to the motor 3; a control circuit board 18 is mounted on the control circuit board 15 mounting bracket.

[0025] W轴伺服电机2的电机轴直接伸入从动旋转轴6的配合孔内,以紧定螺钉固定在电机轴侧平面上。 [0025] W-axis servo motor 2 is directly motor shaft extending into the mating hole of the driven rotating shaft 6, set screw secured to the motor shaft side of the plane.

[0026] 旋转支架5安装在从动旋转轴6半圆平面上,光电传感器挡片4安装在从动旋转轴6的安装面上。 [0026] The rotation bracket 5 is mounted on the rotary shaft 6 driven semicircular plane, the photosensor bracket 4 mounted on the mounting surface of the driven rotating shaft 6.

[0027] FORK组合9安装在旋转支架5的配合表面。 [0027] FORK composition 9 is mounted on the mating surface of the rotary support 5. [0028] 光电传感器16安装在伺服电机支架17的平面上。 [0028] The photosensor 16 is mounted on the plane of the servo motor bracket 17.

[0029] 上轴承7、下轴承10分别装在基座盖板8的上、下轴承腔内,装有上轴承7、下轴承10的基座盖板8与从动旋转轴6相配合,在从动旋转轴6最下端的螺纹部位安装锁紧螺母11 ;应使基座盖板8上表面的定位凹槽与伺服电机支架17的外形相配合。 [0029] The upper bearing 7, the lower bearing 10 are mounted on the base plate 8 and the lower bearing cavity, with the upper bearing 7, the base plate 10 of the lower bearing 8 and the driven rotary shaft 6 engaged, a threaded lock nut 11 is mounted in the lowermost end portion 6 of the driven rotating shaft; a base plate 8 should be positioned on the groove and the surface shape of the servo motor bracket 17 cooperates.

[0030] 基座线夹12安装在W轴机械手基座13的内底面上,阻尼橡胶垫14放入W轴机械手基座13的止口内;对正基座盖板8的下底面凸台,合装基座盖板8与W轴机械手基座13。 [0030] The clamp base 12 is mounted on the inner bottom surface of the base 13 W-axis robot, the damping rubber spigot 14 in the W-axis robot base 13; positive base plate 8 at the bottom surface of the boss, the base plate 8 and the multipack W-axis robot base 13.

[0031] 外罩组合1罩在基座盖板8上面的机构上,以螺钉紧固。 [0031] The combination of the housing cover 1 on the base plate 8 above mechanism, a screw fastening.

[0032] 完成以上装配后,用手转动FORK组合9,FORK组合9能向两面转动。 [0032] After the above assembly, rotation of the hand FORK composition 9, composition 9 can be rotated FORK sides. 通电调试时, FORK组合9向两端的转动角度应受光电传感器挡片4的角度控制。 When debugging power, FORK composition 9 to be rotated by an angle across the photosensor 4 is controlled flap angle.

Claims (2)

1. 一种用于硅片传输机器人的W轴同轴传动机构,包括:外罩组合(1)、W轴伺服电机O)、电机固定板(3)、光电传感器挡片G)、旋转支架(5)、从动旋转轴(6)、上轴承(7)、基座盖板(8)、FORK组合(9)、下轴承(10)、锁紧螺母(11)、基座线夹(12)、W轴机械手基座(13)、阻尼橡胶垫(14)、控制线路板安装架(15)、光电传感器(16)、伺服电机支架(17)、控制线路板(18);其特征在于:所述W轴伺服电机(2)通过前端定位止口定位,安装于电机固定板C3)上;所述伺服电机支架(17)上端安装在电机固定板C3)底面的定位槽内;所述控制线路板安装架(15)安装在电机固定板(3)的上表面;所述控制线路板(18)安装在控制线路板安装架(15)上;所述W轴伺服电机2的电机轴直接伸入从动旋转轴6的配合孔内, 以紧定螺钉固定在电机轴侧平面上;所述旋转支架(¾安装在从动旋 A wafer W coaxial transmission gear mechanism for a robot, comprising: a housing composition (. 1), W-axis servomotor O), motor fixing plate (3), a photoelectric sensor flag G), rotating gantry ( 5), a driven rotary shaft (6), the upper bearing (7), the base plate (8), FORK composition (9), the lower bearing (10), locknut (11), the base clamp (12 ), W-axis robot base (13), the damping rubber (14), the control circuit board mounting bracket (15), the photosensor (16), the servo motor bracket (17), the control circuit board (18); characterized in that : the W-axis servo motor (2) is positioned through the front opening stop is positioned, attached to the motor fixing plate C3); said servo motor bracket (17) mounted on the upper end of the motor fixing plate C3) positioning groove bottom surface; the control circuit board mounting bracket (15) mounted to the motor fixing plate (3) upper surface; said control circuit board (18) mounted on the control circuit board mounting bracket (15); the W-axis servo motor shaft 2 of the motor extends into the bore of the driven directly with the rotary shaft 6, to set screw is fixed to the motor shaft side of the plane; the rotation bracket (mounted on the driven rotating ¾ 转轴(6)半圆平面上, 光电传感器挡片(4)安装在从动旋转轴(6)的安装面上;所述FORK组合(9)安装在旋转支架(5)的配合表面;所述光电传感器(16)安装在伺服电机支架(17)的平面上;所述上轴承(7)、下轴承(10)分别装在基座盖板(8)的上、下轴承腔内,装有上轴承(7)、下轴承(10)的基座盖板(8),轴承内环与从动旋转轴(6)相配合,在从动旋转轴(6)最下端的螺纹部位安装锁紧螺母(11);所述基座盖板(8)上表面的定位凹槽与伺服电机支架(17)的外形相配合;所述基座线夹(12)安装在W轴机械手基座(13)的内底面上,阻尼橡胶垫(14)放入W 轴机械手基座(1¾的止口内;对正基座盖板(8)的下底面凸台,合装基座盖板(8)与W轴机械手基座(13);所述外罩组合(1)罩在基座盖板(8)上面的机构上,以螺钉紧固。 Shaft (6) on a semicircular plane, photosensor flap (4) mounted on the mounting surface of the driven rotating shaft (6); said composition FORK (9) mounted on the mating surface of the rotary support (5); said photo a sensor (16) mounted on the plane of the servo motor bracket (17); said upper bearing (7), the lower bearing (10) are mounted on the base plate (8), the lower bearing cavity, with the a bearing (7), the lower bearing (10) of the base plate (8), the bearing inner ring and the driven rotary shaft (6) cooperates, in (6) the lowermost portion of the driven rotating shaft threaded lock nut mounted (11); the outer shape of the base plate (8) and the servo motor bracket positioning groove (17) of the cooperating surface; said base clamp (12) mounted on the W-axis robot base (13) the inner bottom surface of the damping rubber (14) in the W-axis robot susceptor (1¾ of the spigot; bottom surface of the base plate boss positive (8), the engagement means of the base plate (8) and W axis robot base (13); a combination of the housing (1) on the base cover plate (8) above mechanism, a screw fastening.
2.根据权利要求1所述一种用于硅片传输机器人的W轴同轴传动机构,其特征在于: 所述W轴同轴传动机构装配后,用手转动FORK组合(9),F0RK组合(9)能向两面转动;通电调试时,FORK组合(9)向两端的转动角度应受光电传感器挡片的扇形角度控制。 The coaxial shaft of the actuator. 1 W silicon wafers for transfer robot as claimed in claim wherein: W after assembling the coaxial transmission mechanism rotated by hand FORK composition (9), F0RK combination (9) can be rotated on both sides; debugging when energized, FORK composition (9) to be rotated in an angle across the photoelectric sensor flag control the fan angle.
CN 201110062736 2011-03-16 2011-03-16 W-axis coaxial transmission mechanism for silicon wafer transmission robot CN102161199B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013139125A1 (en) * 2012-03-23 2013-09-26 哈尔滨工业大学 Z-axis servo motor integrated with power-off braking device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003012830A1 (en) * 2000-12-01 2003-02-13 Wafermasters, Incorporated Wafer processing system including a robot
CN1779936A (en) * 2005-10-19 2006-05-31 哈尔滨工业大学 Silicon wafer carrying robot with two-dimensional parallel driven
JP2008264980A (en) * 2007-04-24 2008-11-06 Kawasaki Heavy Ind Ltd Substrate carrier robot
CN101383313A (en) * 2008-10-24 2009-03-11 陈百捷 Manipulator for fetching and delivering silicon chip
CN101863015A (en) * 2006-07-11 2010-10-20 株式会社安川电机 Multi-joint robot

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003012830A1 (en) * 2000-12-01 2003-02-13 Wafermasters, Incorporated Wafer processing system including a robot
CN1779936A (en) * 2005-10-19 2006-05-31 哈尔滨工业大学 Silicon wafer carrying robot with two-dimensional parallel driven
CN101863015A (en) * 2006-07-11 2010-10-20 株式会社安川电机 Multi-joint robot
JP2008264980A (en) * 2007-04-24 2008-11-06 Kawasaki Heavy Ind Ltd Substrate carrier robot
CN101383313A (en) * 2008-10-24 2009-03-11 陈百捷 Manipulator for fetching and delivering silicon chip

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013139125A1 (en) * 2012-03-23 2013-09-26 哈尔滨工业大学 Z-axis servo motor integrated with power-off braking device

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