CN102126209B - W-shaft differential shaft transmission mechanism used for wafer-handling robot - Google Patents

W-shaft differential shaft transmission mechanism used for wafer-handling robot Download PDF

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CN102126209B
CN102126209B CN 201110062737 CN201110062737A CN102126209B CN 102126209 B CN102126209 B CN 102126209B CN 201110062737 CN201110062737 CN 201110062737 CN 201110062737 A CN201110062737 A CN 201110062737A CN 102126209 B CN102126209 B CN 102126209B
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shaft
axis
driven
mounted
bearing
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CN 201110062737
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Chinese (zh)
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CN102126209A (en )
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刘延杰
吴明月
孙立宁
荣伟彬
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哈尔滨工业大学
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Abstract

The invention discloses a W-shaft differential shaft transmission mechanism used for a wafer-handling robot to complete a work flow of taking and placing wafers at special positions. The height dimension is small, so the W-shaft differential shaft transmission mechanism is suitable for an R-shaft spatial structure with certain limitation to the dimension in the height direction. The W-shaft differential shaft transmission mechanism expands the application range of the wafer-handling robot; moreover, the mounting process is simple, namely a tail FORK arm is detached from the tail of an R shaftforearm and is re-arranged on the output end of the W-shaft differential shaft transmission mechanism; in addition, the R shaft forearm is connected with the W-shaft differential shaft transmission mechanism through a special base, a control program is regulated again, and the W-shaft differential shaft transmission mechanism can be debugged and applied.

Description

一种用于硅片传输机器人的W轴差轴传动机构 W-axis spindle drive mechanism for a differential wafer transfer robot for

技术领域 FIELD

[0001 ] 本发明涉及在半导体集成电路生产线设备制造领域内,一种用于硅片传输机器人的W轴差轴传动机构,用于完成特殊位置的取放硅片工作流程。 [0001] The present invention relates to the field of manufacturing integrated circuits in a semiconductor production line apparatus, a difference in the W-axis spindle drive mechanism for the wafer transfer robot for accomplishing a particular location and transfer the wafers workflow. 由于W轴差轴传动机构的高度尺寸较小,适用于对高度方向尺寸有一定限制的R轴空间结构。 Due to the small difference in height dimension of the W-axis spindle drive mechanism for the R-axis spatial structure and size is limited to the height direction.

背景技术 Background technique

[0002] 对于硅片传输机器人来说,有时取放硅片的位置比较特别,仅利用R轴来完成工作流程非常困难甚至不可能,此时需要在R轴小臂末端安装一个独立的辅助机械臂一W轴传动机构来完成特殊位置的取放硅片工作流程。 [0002] For the wafer transfer robot, the wafer position may take place rather special, is very difficult to accomplish using only the axis R workflow even impossible, at this time need to install a separate auxiliary machinery at the end of the arm shaft R a W-axis arm drive mechanism to perform a specific position and transfer the wafers workflow. W轴传动机构的动力由独立的W轴电机输出,由计算机统一控制其工作程序;在输出端带动FORK组合围绕W轴作一定角度的旋转,从而额外获得以R轴运动轨迹为圆心、以W轴旋转中心至FORK中心长度为半径的一组工作轨迹,以完成特殊位置的取放硅片工作流程。 Power W axis drive mechanism independent of the W-axis motor output, be controlled by a computer which procedures; drive FORK combined output of about W-axis rotational certain angle, so that additional was obtained as an R-axis trajectory of the center to W FORK rotational center to the center of a set of work path length radius, in order to perform a specific position and transfer the wafers workflow.

发明内容 SUMMARY

[0003] 本发明的目的在于提供一种用于娃片传输机器人的W轴差轴传动机构,用于完成特殊位置的取放硅片工作流程。 [0003] The object of the present invention to provide a W-axis spindle drive mechanism for a differential transfer robot for baby sheet, for performing a particular location and transfer the wafers workflow. 所谓差轴传动,是指W轴电机与W轴输出的旋转运动各有各自的旋转中心;从结构上说,是指W电机轴与W输出轴在各自不同的位置安装。 The so-called differential drive shaft means of each of the W-axis rotational motion of the rotation center of the motor output shaft and each W; Structurally, W means W output shaft and the motor shaft mounted in different positions. 因此差轴传动机构的W轴电机可以与W输出轴并排置放,中间通过齿轮付或同步带传递力矩,整体结构高度尺寸较小,适用于对高度方向尺寸有一定限制的R轴空间结构。 Thus the difference between the motor shaft W axis drive mechanism placed side by side with the output shaft W, the intermediate transfer belt or by gear pairs torque, a smaller overall height dimension configuration, the R-axis spatial structure suitable for certain restrictions on the size of the height direction.

[0004] 本发明的实现过程为:一种用于娃片传输机器人的W轴差轴传动机构,包括:外罩装配组合I、控制线路板焊接组合2、主动齿轮3、从动齿轮4、电机安装板5、上端轴承6、从动旋转轴7、基座盖板8、W轴伺服电机9、联接支撑块10、光电传感器11、光电传感器挡片12、阻尼橡胶垫13、基座线夹14、W轴机械手基座15、锁紧螺母16、下端轴承17、FORK组合18、旋转支架19。 [0004] The implementation process of the present invention is: to give a W-axis drive shaft differential transmission mechanism for a robot doll sheet, comprising: a housing assembly combination I, combination welding control circuit board 2, the driving gear 3, driven gear 4, the motor mounting plate 5, an upper bearing 6, 7 a driven rotation shaft, the base plate 8, W-axis servo motor 9, coupled to the support block 10, the photosensor 11, the photosensor flaps 12, damping rubber pad 13, the base clamp 14, W-axis robot base 15, lock nut 16, the lower end of the bearing 17, FORK combination 18, the rotating gantry 19.

[0005] I、W轴伺服电机9通过前端定位止口定位,用螺钉安装于电机安装板5上;联接支撑块10上端的定位凸起安装在电机安装板5底面的定位槽内,用螺钉紧固。 [0005] I, W-axis servo motor 9 through a port located in the front stop position, a screw mounted on a motor mounting plate 5; positioning the upper end of the coupling 10 mounted in the support block projection positioning groove bottom surface of the motor mounting plate 5 by screws tightened.

[0006] 2、控制线路板2以螺钉安装在装配外罩组合I的内底面上。 [0006] 2, the control board 2 is mounted on a screw fitting inner bottom surface of the housing I in combination.

[0007] 3、将光电传感器11以螺钉安装在联接支撑块10的平面上。 [0007] 3, the photosensor 11 is screwed on the coupling plane 10 of the support block.

[0008] 4、将旋转支架19以螺钉安装在从动旋转轴7的半圆平面上,再将光电传感器挡片12以螺钉安装在从动旋转轴7的安装面上。 [0008] 4, the swivel bracket 19 mounted on a screw driven semicircular plane of the rotating shaft 7, and then the photosensor flaps 12 to screw on the mounting surface of the driven rotating shaft 7.

[0009] 5、将上端轴承6以“热装法”装入电机安装板5的轴承腔内;将从动旋转轴7的上端轴径穿过上端轴承6的内环并与之配合,压紧到位。 [0009] 5, the upper bearing 6 to the "hot charge method" into the bearing chamber 5, the motor mounting plate; an upper end of the shaft diameter of the inner ring 7 of the bearing 6 through the upper end and mates with the rotary shaft of the driven pressure tight place.

[0010] 6、将主动齿轮3的中心孔穿在与之配合的W轴伺服电机9的电机轴上,以紧定螺钉将主动齿轮3固定在电机轴的侧平面上。 [0010] 6, the central bore through the drive gear 3 is engaged with the motor shaft in the W-axis servomotor 9, to the upper plane of the adapter screw of the motor shaft drive gear 3 is fixed. 将从动齿轮4的中心孔穿在与之配合的从动旋转轴7的相应轴径上,以紧定螺钉将从动齿轮4固定在从动旋转轴7相应轴径的侧平面上,并使主动齿轮3与从动齿轮4完全啮合。 4 from the central hole of the driven gear threaded on the respective shaft diameter of the driven rotating shaft 7 engaged therewith, to set screw 4 is fixed to the gear 7 a respective side of the plane of the driven shaft diameter of the driven rotating shaft, and 4 so that the driving gear is fully engaged with the driven gear 3. [0011] 7、将下端轴承17以“热装法”装入基座盖板8的下端轴承腔内,并压紧到位。 [0011] 7, the lower bearing 17 with "hot charge method" lower load bearing cavity 8 of the base plate and pressed into place. 将装有下端轴承17的基座盖板8穿入从动旋转轴7下端的轴内,相应轴径与下端轴承17的内环相配合,压紧到位;在从动旋转轴7最下端的螺纹部位安装锁紧螺母16,并拧紧到位。 The bearing 17 with the lower end of the base plate 8, the lower end of the shaft 7 penetrates a driven rotation shaft, and the shaft diameter corresponding to the lower end of the bearing inner ring 17 is fitted, pressing into place; lowermost end of the driven rotating shaft 7 threaded lock nut mounting portion 16, and screwed into place. 在安装过程中应使基座盖板8上表面的定位凸起与联接支撑块10的下表面定位槽相配合,以螺钉拧紧到位。 During the installation of the base plate 8 should be positioned on the surface of the protrusion cooperates with the lower surface of the positioning groove 10 of the support block is coupled to tighten the screws in place.

[0012] 8、将基座线夹14以螺钉安装在W轴机械手基座15的内底面上,将阻尼橡胶垫13放入W轴机械手基座15的止口内,对正基座盖板8的下底面凸台,合装基座盖板8与W轴机械手基座15,并以螺钉拧紧。 [0012] 8, the base clamp screw 14 mounted in the bottom surface of the W-axis robot base 15, the damping rubber pad 13 into the spigot W-axis robot base 15, the base plate 8 positive under the bottom surface of the boss, the base plate 8 and the multipacks W-axis robot base 15, and to tighten the screws.

[0013] 9、将外罩装配组合I罩在基座盖板8上面的机构上,以螺钉拧紧。 [0013] 9, the cover assembly on the composition I cap 8 above the base plate means to tighten the screws.

[0014] 10、将FORK组合18与旋转支架19的配合表面清理干净,在旋转支架19底面的环形槽内放入气路密封垫,对正旋转支架19与FORK组合18的气路通孔,以螺钉联接FORK组合18与旋转支架19。 [0014] 10, 18 the cleaning composition FORK rotary support 19 and the mating surface of the clean gas passage into the annular gasket groove 19 of the bottom surface of the rotation bracket, FORK 19 in combination with air holes lead to the normal rotation of the bracket 18, a screw coupled with the rotary bracket 18 in combination FORK 19.

[0015] 完成以上装配后,用手转动FORK组合18,FORK组合18能向两面转动。 [0015] After the above assembly, rotation of the hand FORK composition 18, composition 18 can be rotated FORK sides. 通电调试时,FORK组合18向两端的转动角度应受光电传感器挡片12的角度控制。 When debugging power, FORK composition 18 to be rotated by an angle across the photosensor 12 controls the angle of the flap.

[0016] 本发明一种用于娃片传输机器人的W轴差轴传动机构,具有如下优点: [0016] W-axis shaft differential gear mechanism present invention provides a transfer robot for baby sheet, has the following advantages:

[0017] I、娃片传输机器人的W轴差轴传动机构,扩展了娃片传输机器人的使用范围,可以满足特殊位置的取放硅片工作流程的要求。 [0017] I, W axial differential gear mechanism shaft of the transfer robot sheet Wa, Wa extends the use of the sheet transfer robot, to meet the specific requirements of the position of the pick and place wafers workflow.

[0018] 2、改装过程简单,只需从R轴小臂末端拆除末端FORK手臂,重新安装在W轴差轴传动机构的输出端,并使用专用的底座使R轴小臂与W轴差轴传动机构相联接,重新调整控制程序后,即可调试及应用。 [0018] 2, the conversion process is simple, just dismantled from the arm tip end of the arm FORK axis R, W reinstalled at the output shaft of the differential gear mechanism shaft, and a dedicated base of the R-axis and W-axis arm shaft difference transmission mechanism to link the re-adjustment control program, and you can debug the application.

[0019] 3、与W轴同轴传动机构相比较,W轴差轴传动机构由于在W轴电机与W轴输出轴之间必须使用力矩传动机构,因此应用不同的传动比,可以避开伺服电机工作不稳定的低转速段,使系统工作稳定。 [0019] 3, compared with the coaxial gear W, W-axis drive mechanism due to the difference in shaft torque transmission mechanism must be used between the axis W and W-axis motor output shaft, the gear ratio of different applications, can avoid servo low speed motor operation unstable period, to make the system stable.

[0020] 4、与W轴同轴传动机构相比较,W轴差轴传动机构由于整体结构高度尺寸较小,适用于对高度方向尺寸有一定限制的R轴空间结构。 [0020] 4, compared with the coaxial gear W, W-axis drive mechanism due to the small difference in shaft height dimension of the overall structure, the R-axis spatial structure applicable to certain restrictions on the size of the height direction.

附图说明 BRIEF DESCRIPTION

[0021] 图I为用于娃片传输机器人的W轴差轴传动机构的三维立体图。 [0021] Figure I is a perspective view of a three-axis differential gear axis W baby sheet transport robot.

[0022] 图2为用于硅片传输机器人的W轴差轴传动机构的爆炸效果图。 [0022] FIG. 2 is a difference in the W-axis spindle drive mechanism for the wafer transfer robot explosions FIG.

[0023] 在附图中,具体数字表示:1_外罩装配组合、2-控制线路板焊接组合、3-主动齿轮、4-从动齿轮、5-电机安装板、6-上端轴承、7-从动旋转轴、8-基座盖板、9-W轴伺服电机、10-联接支撑块、11-光电传感器、12-光电传感器挡片、13-阻尼橡胶垫、14-基座线夹、15-W轴机械手基座、16-锁紧螺母、17-下端轴承、18-F0RK组合、19-旋转支架。 [0023] In the drawings, specific figures showing: 1_ housing assembly combination, the control board for solder compositions 2-, 3- driving gear, a driven gear 4-, 5- motor mounting plate, the upper end of the bearing 6-, 7- a driven rotation shaft, the base plate 8-, 9-W axis servo motor, 10 coupling the support block, 11 a photoelectric sensor, a photoelectric sensor flag 12-, 13- damping rubber pad, 14-base clamp, 15-W-axis robot base, 16 a lock nut, 17 a lower end bearing, 18-F0RK composition, 19- swivel bracket.

具体实施方式 detailed description

[0024] 结合附图对本发明作进一步说明: [0024] DRAWINGS The present invention is further described:

[0025] 参照附图所不,一种用于娃片传输机器人的W轴差轴传动机构,包括:外罩装配组合I、控制线路板焊接组合2、主动齿轮3、从动齿轮4、电机安装板5、上端轴承6、从动旋转轴7、基座盖板8、W轴伺服电机9、联接支撑块10、光电传感器11、光电传感器挡片12、阻尼橡胶垫13、基座线夹14、W轴机械手基座15、锁紧螺母16、下端轴承17、FORK组合18、旋转支架19。 2, the driving gear 3, driven gear 4, the motor mount housing assembly combination I, the control board for solder compositions: [0025] Referring to the drawings are not a difference between the W-axis spindle drive mechanism for baby sheet transfer robot, comprising plate 5, an upper bearing 6, 7 a driven rotation shaft, the base plate 8, W-axis servo motor 9, coupled to the support block 10, the photosensor 11, the photosensor flaps 12, damping rubber pad 13, the base 14 clamp , W-axis robot base 15, lock nut 16, the lower end of the bearing 17, FORK combination 18, the rotating gantry 19.

[0026] W轴伺服电机9通过前端定位凸缘,安装于电机安装板5的定位止口上;联接支撑块10上端的定位凸起安装在电机安装板5底面的定位槽内; [0026] W-axis servo motor 9 through the front locating flange, mounted on a motor mounting plate 5 is positioned spigot; positioning an upper end coupled to support block 10 mounted on the mounting protrusion 5 of the bottom surface of positioning plate slot machine;

[0027] 控制线路板焊接组合2安装在外罩装配组合I的内底面上; [0027] The control circuit board is mounted weld compositions inner bottom surface in the housing assembly of the combination of I 2;

[0028] 光电传感器11安装在联接支撑块10的平面上; [0028] The photosensor 11 is mounted on a coupling plane 10 of the support block;

[0029] 旋转支架19安装在从动旋转轴7的半圆平面上;光电传感器挡片12安装在从动旋转轴7的平面上; [0030] 上端轴承6装于电机安装板5的轴承腔内;从动旋转轴7上端轴径穿过上端轴承6的内环,与之配合; [0029] The rotary bracket 19 is mounted on a semicircular plane of the driven rotating shaft 7; flaps photosensor 12 is mounted on the plane of rotation of the driven shaft 7; [0030] The upper bearing 6 is mounted on the motor mounting plate bearing cavity 5 ; driven rotary shaft 7 through the upper end of the upper shaft diameter of the inner bearing ring 6, mating therewith;

[0031] 主动齿轮3中心孔与W轴伺服电机9的电机轴相配合,以紧定螺钉将主动齿轮3固定在电机轴的侧平面上;从动齿轮4的中心孔与从动旋转轴7的相应轴径配合,以紧定螺钉将从动齿轮4固定在从动旋转轴7相应轴径的侧平面上,主动齿轮3与从动齿轮4完全啮合; [0031] The drive gear 3 and the center hole of the W-axis servomotor 9 cooperates motor shaft, the set screw to the drive gear 3 is fixed to the motor shaft side of the plane; the central hole of the driven gear and the driven rotary shaft 4 7 the mating shaft diameter corresponding to the set screw 4 driven gear 7 fixed to the side plane corresponding to the driven shaft diameter of the rotary shaft, the driving gear is completely engaged with the driven gear 3 4;

[0032] 下端轴承17装于基座盖板8的下端轴承腔内;从动旋转轴7的下端轴从下端轴承17的内环孔穿入,相应轴径与下端轴承17的内环相配合;从动旋转轴7最下端的螺纹部位安装锁紧螺母16 ;在安装过程中应使基座盖板8上表面的定位凸起与联接支撑块10的下表面定位槽相配合,以螺钉拧紧到位。 [0032] The lower bearing 17 is mounted to the lower end of the base plate 8 of the bearing cavity; the lower end of the rotation shaft of the driven shaft 7 from the lower end of the bearing hole 17 penetrates the inner ring, and the shaft diameter corresponding to the lower end of the bearing inner ring 17 mates ; lowermost end of the rotary shaft 7 driven threaded lock nut mounting portion 16; should cover the susceptor during the installation surface of the positioning protrusion 8 on the lower surface of the positioning groove cooperating with the supporting block 10 is coupled to the screw tightening place.

[0033] 基座线夹14安装在W轴机械手基座15的内底面上;阻尼橡胶垫13放入W轴机械手基座15的止口内;对正基座盖板8的下底面凸台,合装基座盖板8与W轴机械手基座15,并以螺钉拧紧。 [0033] The clip 14 is mounted on the base inner bottom surface of the W-axis robot base 15; damping rubber pad 13 into the spigot 15 W-axis of the robot base; positive base plate 8 at the bottom surface of the boss, the base plate 8 and the multipack W-axis robot base 15, and to tighten the screws.

[0034] 外罩装配组合I罩在基座盖板8上面的机构上,以螺钉拧紧; [0034] I cap cover fitted on the composition 8 above the base plate means to tighten the screws;

[0035] FORK组合18与旋转支架19的配合表面清理干净,在旋转支架19底面的环形槽内放入气路密封垫,对正旋转支架19与FORK组合18的气路通孔,以螺钉联接FORK组合18与旋转支架19。 [0035] FORK composition mating surface 18 and the swivel bracket 19 is clean, the air passage into the annular gasket groove 19 of the bottom surface of the rotation bracket, and the gas composition of 19 FORK hole lead to the normal rotation of the bracket 18, a screw connection FORK 18 and the rotary bracket 19 in combination.

[0036] 完成以上装配后,用手转动FORK组合18,FORK组合18能向两面转动。 [0036] After the above assembly, rotation of the hand FORK composition 18, composition 18 can be rotated FORK sides. 通电调试时,FORK组合18向两端的转动角度应受光电传感器挡片12的角度控制。 When debugging power, FORK composition 18 to be rotated by an angle across the photosensor 12 controls the angle of the flap.

Claims (2)

  1. 1. 一种用于硅片传输机器人的W轴差轴传动机构,包括:外罩装配组合(I)、控制线路板焊接组合(2)、主动齿轮(3)、从动齿轮(4)、电机安装板(5)、上端轴承¢)、从动旋转轴(7)、基座盖板(8)、W轴伺服电机(9)、联接支撑块(10)、光电传感器(11)、光电传感器挡片(12)、阻尼橡胶垫(13)、基座线夹(14)、W轴机械手基座(15)、锁紧螺母(16)、下端轴承(17)、FORK组合(18)、旋转支架(19);其特征在于:所述W轴差轴传动机构的W轴伺服电机(9)通过前端定位凸缘,安装于电机安装板(5)的定位止口上;联接支撑块(10)上端的定位凸起安装在电机安装板(5)底面的定位槽内;所述控制线路板焊接组合(2)安装在外罩装配组合⑴的内底面上;所述光电传感器(11)安装在联接支撑块(10)的平面上;所述旋转支架(19)安装在从动旋转轴(7)的半圆平面上;光电传感器 Differential gear axis W axis A wafer transfer robot, comprising: a housing assembly in combination (the I), a control board for solder composition (2), the driving gear (3), the driven gear (4), the motor a mounting plate (5), an upper bearing ¢), the driven rotating shaft (7), the base plate (8), W-axis servo motor (9), coupling the support block (10), the photosensor (11), the photosensor flaps (12), the damping rubber pad (13), a base clamp (14), W-axis robot base (15), locknut (16), lower bearing (17), FORK composition (18), rotation bracket (19); characterized in that: said differential shaft axis W W-axis drive mechanism of the servo motor (9) through the front end of the positioning flange, mounted on the motor mounting plate (5) is positioned spigot; coupling a support block (10) the upper end of the positioning projection mounted to the motor mounting plate (5) positioning groove bottom surface; said control circuit board soldering composition (2) mounted on the inner bottom surface of the housing assembly ⑴ composition; said photo sensor (11) mounted on the coupling the plane support block (10); and the rotation bracket (19) mounted on the driven semi-plane axis of rotation (7); a photosensor 片(12)安装在从动旋转轴(7)的平面上;所述上端轴承(6)装于电机安装板(5)的轴承腔内;从动旋转轴(7)上端轴径穿过上端轴承¢)的内环,与之配合;所述主动齿轮(3)中心孔与W轴伺服电机(9)的电机轴相配合,以紧定螺钉将主动齿轮(3)固定在电机轴的侧平面上;从动齿轮(4)的中心孔与从动旋转轴(7)的相应轴径配合,以紧定螺钉将从动齿轮(4)固定在从动旋转轴(7)相应轴径的侧平面上;所述主动齿轮(3)与从动齿轮(4)完全啮合;所述下端轴承(17)装于基座盖板(8)的下端轴承腔内;所述从动旋转轴(7)的下端轴从下端轴承(17)的内环孔穿入,相应轴径与下端轴承(17)的内环相配合;所述从动旋转轴(7)最下端的螺纹部位安装锁紧螺母(16);所述安装过程应使基座盖板(8)上表面的定位凸起与联接支撑块(10)的下表面定位槽相配合,以螺钉拧紧到位 Sheet (12) is mounted in the plane of rotation of the driven shaft (7); said upper bearing (6) mounted on the motor mounting plate (5) of the bearing cavity; (7) passes through the upper end of the upper end of the rotary shaft of the driven shaft diameter bearing ¢) of the inner ring, fitted thereto; a motor shaft of the driving gear (3) with a central hole W-axis servomotor (9) cooperating, the set screw to the drive gear (3) fixed to the side of the motor shaft on a plane; the respective shaft diameter center hole of the driven gear (4) with the driven rotating shaft (7) fit, a set screw is fixed to the driven gear (4) of the driven shaft diameter corresponding to the rotation shaft (7) the upper plane; the driving gear (3) and the driven gear (4) fully engaged; said lower bearing (17) mounted to the base cover plate (8) bearing the lower end of the cavity; said driven rotating shaft ( 7) the lower end of the inner shaft from the lower end of the bearing hole (17) penetrates, with the shaft diameter corresponding to the lower end of the bearing (17) cooperating inner ring; (7) the lowermost portion of the threaded shaft driven rotary mounted locking the nut (16); the mounting procedure should cover the susceptor (8) is positioned on the surface of the convex surface is positioned under the coupling slot support block (10) cooperating, in order to tighten the screws in place 所述基座线夹(14)安装在W轴机械手基座(15)的内底面上;阻尼橡胶垫(13)放入W轴机械手基座(15)的止口内;对正基座盖板(8)的下底面凸台,合装基座盖板(8)与W轴机械手基座(15),并以螺钉拧紧;所述外罩装配组合(I)罩在基座盖板(8)上面的机构上,以螺钉拧紧;所述FORK组合(18)与旋转支架(19)的配合表面清理干净,在旋转支架(19)底面的环形槽内放入气路密封垫,对正旋转支架(19)与FORK组合(18)的气路通孔,以螺钉联接FORK组合(18)与旋转支架(19)。 Said base clamp (14) mounted on the inner bottom surface of the W-axis robot base (15); a damping rubber pad (13) into the W-axis robot base (15) of the rabbet; positive base plate (8) at the bottom surface of the boss, the base plate closing means (8) and the W-axis robot base (15), and to tighten the screws; mounting the cover composition (I) of the base cover plate (8) the above mechanism to tighten the screw; FORK composition of the mating surface (18) and the rotary support (19) clean, in the rotary support (19) placed in the bottom of the annular gas path seal groove, forward rotation of the bracket lead to air holes (19) in combination with the FORK (18), a screw coupling FORK composition (18) and the rotary support (19).
  2. 2.根据权利要求I所述一种用于娃片传输机器人的W轴差轴传动机构,其特征在于:所述W轴差轴传动机构装配后,用手转动FORK组合(18),F0RK组合(18)能向两面转动;通电调试时,FORK组合(18)向两端的转动角度,应受光电传感器挡片(12)的角度控制。 2. I claim the one differential axle gear axis W Wa substrate transport robot, wherein: the W-axis drive mechanism rear axle differential assembly, rotated by hand FORK composition (18), F0RK combination (18) can be rotated on both sides; debugging when energized, FORK composition (18) to the ends of the rotation angle, should photosensor flaps (12) controlled by the angle.
CN 201110062737 2011-03-16 2011-03-16 W-shaft differential shaft transmission mechanism used for wafer-handling robot CN102126209B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1779936A (en) 2005-10-19 2006-05-31 哈尔滨工业大学 Silicon wafer carrying robot with two-dimensional parallel driven
CN1970246A (en) 2005-11-23 2007-05-30 沈阳新松机器人自动化股份有限公司 Planar multiple-articulation robot
JP2008264980A (en) 2007-04-24 2008-11-06 Kawasaki Heavy Ind Ltd Substrate carrier robot
CN101863015A (en) 2006-07-11 2010-10-20 株式会社安川电机 Multi-joint robot

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1779936A (en) 2005-10-19 2006-05-31 哈尔滨工业大学 Silicon wafer carrying robot with two-dimensional parallel driven
CN1970246A (en) 2005-11-23 2007-05-30 沈阳新松机器人自动化股份有限公司 Planar multiple-articulation robot
CN101863015A (en) 2006-07-11 2010-10-20 株式会社安川电机 Multi-joint robot
JP2008264980A (en) 2007-04-24 2008-11-06 Kawasaki Heavy Ind Ltd Substrate carrier robot

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