CN102126209B

CN102126209B - W-shaft differential shaft transmission mechanism used for wafer-handling robot

Info

Publication number: CN102126209B
Application number: CN2011100627372A
Authority: CN
Inventors: 刘延杰; 吴明月; 荣伟彬; 孙立宁
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2011-03-16
Filing date: 2011-03-16
Publication date: 2012-08-15
Anticipated expiration: 2031-03-16
Also published as: CN102126209A

Abstract

The invention discloses a W-shaft differential shaft transmission mechanism used for a wafer-handling robot to complete a work flow of taking and placing wafers at special positions. The height dimension is small, so the W-shaft differential shaft transmission mechanism is suitable for an R-shaft spatial structure with certain limitation to the dimension in the height direction. The W-shaft differential shaft transmission mechanism expands the application range of the wafer-handling robot; moreover, the mounting process is simple, namely a tail FORK arm is detached from the tail of an R shaft forearm and is re-arranged on the output end of the W-shaft differential shaft transmission mechanism; in addition, the R shaft forearm is connected with the W-shaft differential shaft transmission mechanism through a special base, a control program is regulated again, and the W-shaft differential shaft transmission mechanism can be debugged and applied.

Description

A kind of W axle deviation shaft transmission mechanism that is used for the chip transmission robot

Technical field

The present invention relates in the semiconductor integrated circuit production line manufacturing field of equipment, a kind of W axle deviation shaft transmission mechanism that is used for the chip transmission robot, what be used to accomplish specific position picks and places the silicon chip workflow.Because the height dimension of W axle deviation shaft transmission mechanism is less, is applicable to the R shaft space structure that the short transverse size is had certain limitation.

Background technology

For the chip transmission robot; Sometimes the position that picks and places silicon chip is more special; Only utilize the R axle finish the work flow process very difficulty even maybe, this moment need be at one of the terminal installation of R axle forearm Aided Machine arm independently---what the W shaft transmission was accomplished specific position picks and places the silicon chip workflow.The power of W shaft transmission is by independently W spindle motor output, by its working procedure of the unified control of computer; Drive the FORK combination at output and do the rotation of certain angle around the W axle, thus extra acquisition be the center of circle, be one group of work track of radius with R axle movement locus with W axle pivot to FORK Center Length, pick and place the silicon chip workflow with what accomplish specific position.

Summary of the invention

The object of the present invention is to provide a kind of W axle deviation shaft transmission mechanism that is used for the chip transmission robot, what be used to accomplish specific position picks and places the silicon chip workflow.So-called deviation shaft transmission is meant that rotatablely moving of W spindle motor and W axle output respectively has pivot separately; Say from structure, be meant that W motor shaft and W output shaft install in different separately positions.Therefore the W spindle motor of deviation shaft transmission mechanism can be put with the W output shaft side by side, and the centre is through gear pair or be with carry-over moment synchronously, and the overall structure height dimension is less, is applicable to the R shaft space structure that the short transverse size is had certain limitation.

Implementation procedure of the present invention is: a kind of W axle deviation shaft transmission mechanism that is used for the chip transmission robot comprises: outer cover assembly 1, control circuit board welding combination 2, driving gear 3, driven gear 4, motor mounting plate 5, upper end bearing 6, driven rotating shaft 7, pedestal cover plate 8, W axle servomotor 9, connection back-up block 10, photoelectric sensor 11, photoelectric sensor catch 12, damping rubber pad 13, pedestal wire clamp 14, W axis robot pedestal 15, locking nut 16, bottom end bearing 17, FORK combination 18, runing rest 19.

1, W axle servomotor 9 is installed on the motor mounting plate 5 with screw through front end positioning spigot location; The positioning convex that connects back-up block 10 upper ends is installed in the locating slot of motor mounting plate 5 bottom surfaces, and is fastening with screw.

2, control circuit board 2 is installed on the inner bottom surface of assembling outer cover combination 1 with screw.

3, photoelectric sensor 11 is installed on the plane that connects back-up block 10 with screw.

4, runing rest 19 is installed in screw on the semi-circle plane of driven rotating shaft 7, again photoelectric sensor catch 12 is installed on the installed surface of driven rotating shaft 7 with screw.

5, upper end bearing 6 is packed in the bearing bore of motor mounting plate 5 with " hot charge practice "; The upper end diameter of axle of driven rotating shaft 7 is passed the interior ring of upper end bearing 6 and cooperates with it, compress and put in place.

6, the centre bore with driving gear 3 is through on the motor shaft of the W axle servomotor 9 that cooperates with it, with holding screw driving gear 3 is fixed on the side plane of motor shaft.The centre bore of driven gear 4 is through on the corresponding diameter of axle of the driven rotating shaft 7 that cooperates with it, driven gear 4 is fixed on the side plane of the driven rotating shaft 7 corresponding diameters of axle, and driving gear 3 and driven gear 4 are meshed fully with holding screw.

7, bottom end bearing 17 is packed in the bottom end bearing chamber of pedestal cover plate 8 with " hot charge practice ", and compress and put in place.The pedestal cover plate 8 that bottom end bearing 17 is housed is penetrated in the axle of driven rotating shaft 7 lower ends, the corresponding diameter of axle matches with the interior ring of bottom end bearing 17, compresses to put in place; At driven rotating shaft 7 screw thread position bottom locking nut 16 is installed, and is tightened and put in place.The positioning convex of pedestal cover plate 8 upper surfaces is matched with the lower surface locating slot that connects back-up block 10, put in place with screw-driving.

8, be installed in pedestal wire clamp 14 on the inner bottom surface of W axis robot pedestal 15 with screw; Damping rubber pad 13 is put into the seam of W axis robot pedestal 15; Align the bottom surface boss of pedestal cover plate 8, attach together pedestal cover plate 8 and W axis robot pedestal 15, and with screw-driving.

9, outer cover assembly 1 is covered in the mechanism above the pedestal cover plate 8, with screw-driving.

10, the FORK combination 18 and the matching surface of runing rest 19 are cleaned out, in the cannelure of runing rest 19 bottom surfaces, put into the gas circuit sealing gasket, align runing rest 19 and make up 18 gas circuit through hole, with screw attachment FORK combination 18 and runing rest 19 with FORK.

After accomplishing above assembling, rotate FORK combination 18 with hand, FORK combination 18 can be rotated to the two sides.During the energising debugging, FORK combination 18 rotational angles to two ends should be controlled by the angle of photoelectric sensor catch 12.

A kind of W axle deviation shaft transmission mechanism that is used for the chip transmission robot of the present invention has following advantage:

1, the W axle deviation shaft transmission mechanism of chip transmission robot has been expanded the scope of application of chip transmission robot, can satisfy the requirement that picks and places the silicon chip workflow of specific position.

2, retrofit process is simple; Only need to be reinstalled in the output of W axle deviation shaft transmission mechanism, and to use special-purpose base that R axle forearm and W axle deviation shaft transmission mechanism are linked from the terminal FORK arm of the terminal dismounting of R axle forearm; After readjusting control program, can debug and use.

3, compare with W axle coaxial gear set; W axle deviation shaft transmission mechanism is owing to must use the moment transmission mechanism between W spindle motor and W axle output shaft; Therefore use different gearratios, can avoid the slow-speed of revolution section of servomotor job insecurity, make system works stable.

4, compare with W axle coaxial gear set, W axle deviation shaft transmission mechanism is applicable to the R shaft space structure that the short transverse size is had certain limitation because the overall structure height dimension is less.

Description of drawings

Fig. 1 is the 3 dimensional drawing that is used for the W axle deviation shaft transmission mechanism of chip transmission robot.

Fig. 2 is the explosive effect figure that is used for the W axle deviation shaft transmission mechanism of chip transmission robot.

In the accompanying drawings, concrete numeral: 1-outer cover assembly, 2-control circuit board welding combination, 3-driving gear, 4-driven gear, 5-motor mounting plate, 6-upper end bearing, the driven rotating shaft of 7-, 8-pedestal cover plate, 9-W axle servomotor, 10-connect back-up block, 11-photoelectric sensor, 12-photoelectric sensor catch, 13-damping rubber pad, 14-pedestal wire clamp, 15-W axis robot pedestal, 16-locking nut, 17-bottom end bearing, 18-FORK combination, 19-runing rest.

The specific embodiment

In conjunction with accompanying drawing the present invention is described further:

Shown in accompanying drawing; A kind of W axle deviation shaft transmission mechanism that is used for the chip transmission robot comprises: outer cover assembly 1, control circuit board welding combination 2, driving gear 3, driven gear 4, motor mounting plate 5, upper end bearing 6, driven rotating shaft 7, pedestal cover plate 8, W axle servomotor 9, connection back-up block 10, photoelectric sensor 11, photoelectric sensor catch 12, damping rubber pad 13, pedestal wire clamp 14, W axis robot pedestal 15, locking nut 16, bottom end bearing 17, FORK combination 18, runing rest 19.

W axle servomotor 9 is installed on the positioning spigot of motor mounting plate 5 through the front end locating flange; The positioning convex that connects back-up block 10 upper ends is installed in the locating slot of motor mounting plate 5 bottom surfaces;

Control circuit board welding combination 2 is installed on the inner bottom surface of outer cover assembly 1;

Photoelectric sensor 11 is installed on the plane that connects back-up block 10;

Runing rest 19 is installed on the semi-circle plane of driven rotating shaft 7; Photoelectric sensor catch 12 is installed on the plane of driven rotating shaft 7;

Upper end bearing 6 is loaded in the bearing bore of motor mounting plate 5; The driven rotating shaft 7 upper end diameters of axle pass the interior ring of upper end bearing 6, cooperate with it;

Driving gear 3 centre bores match with the motor shaft of W axle servomotor 9, driving gear 3 are fixed on the side plane of motor shaft with holding screw; The centre bore of driven gear 4 cooperates with the corresponding diameter of axle of driven rotating shaft 7, driven gear 4 is fixed on the side plane of the driven rotating shaft 7 corresponding diameters of axle with holding screw, and driving gear 3 meshes with driven gear 4 fully;

Bottom end bearing 17 is loaded in the bottom end bearing chamber of pedestal cover plate 8; The lower end axle of driven rotating shaft 7 penetrates from the interior annular distance of bottom end bearing 17, and the corresponding diameter of axle matches with the interior ring of bottom end bearing 17; Locking nut 16 is installed at driven rotating shaft 7 screw thread position bottom; The positioning convex of pedestal cover plate 8 upper surfaces is matched with the lower surface locating slot that connects back-up block 10, put in place with screw-driving.

Pedestal wire clamp 14 is installed on the inner bottom surface of W axis robot pedestal 15; Damping rubber pad 13 is put into the seam of W axis robot pedestal 15; Align the bottom surface boss of pedestal cover plate 8, attach together pedestal cover plate 8 and W axis robot pedestal 15, and with screw-driving.

Outer cover assembly 1 covers in the mechanism above the pedestal cover plate 8, with screw-driving;

FORK combination 18 is cleaned out with the matching surface of runing rest 19, in the cannelure of runing rest 19 bottom surfaces, puts into the gas circuit sealing gasket, aligns runing rest 19 and makes up 18 gas circuit through hole with FORK, with screw attachment FORK combination 18 and runing rest 19.

Claims

1. W axle deviation shaft transmission mechanism that is used for the chip transmission robot comprises: outer cover assembly (1), control circuit board welding combination (2), driving gear (3), driven gear (4), motor mounting plate (5), upper end bearing (6), driven rotating shaft (7), pedestal cover plate (8), W axle servomotor (9), connect back-up block (10), photoelectric sensor (11), photoelectric sensor catch (12), damping rubber pad (13), pedestal wire clamp (14), W axis robot pedestal (15), locking nut (16), bottom end bearing (17), FORK and make up (18), runing rest (19); It is characterized in that: the W axle servomotor (9) of said W axle deviation shaft transmission mechanism is installed on the positioning spigot of motor mounting plate (5) through the front end locating flange; The positioning convex that connects back-up block (10) upper end is installed in the locating slot of motor mounting plate (5) bottom surface; Said control circuit board welding combination (2) is installed on the inner bottom surface of outer cover assembly (1); Said photoelectric sensor (11) is installed on the plane that connects back-up block (10); Said runing rest (19) is installed on the semi-circle plane of driven rotating shaft (7); Photoelectric sensor catch (12) is installed on the plane of driven rotating shaft (7); Said upper end bearing (6) is loaded in the bearing bore of motor mounting plate (5); Driven rotating shaft (7) the upper end diameter of axle passes the interior ring of upper end bearing (6), cooperates with it; Said driving gear (3) centre bore matches with the motor shaft of W axle servomotor (9), with holding screw driving gear (3) is fixed on the side plane of motor shaft; The centre bore of driven gear (4) cooperates with the corresponding diameter of axle of driven rotating shaft (7), driven gear (4) is fixed on the side plane of the corresponding diameter of axle of driven rotating shaft (7) with holding screw; Said driving gear (3) meshes with driven gear (4) fully; Said bottom end bearing (17) is loaded in the bottom end bearing chamber of pedestal cover plate (8); The lower end axle of said driven rotating shaft (7) penetrates from the interior annular distance of bottom end bearing (17), and the corresponding diameter of axle matches with the interior ring of bottom end bearing (17); Locking nut (16) is installed at said driven rotating shaft (7) screw thread position bottom; Said installation process should make the positioning convex of pedestal cover plate (8) upper surface match with the lower surface locating slot that connects back-up block (10), puts in place with screw-driving; Said pedestal wire clamp (14) is installed on the inner bottom surface of W axis robot pedestal (15); Damping rubber pad (13) is put into the seam of W axis robot pedestal (15); Align the bottom surface boss of pedestal cover plate (8), attach together pedestal cover plate (8) and W axis robot pedestal (15), and with screw-driving; Said outer cover assembly (1) covers in the mechanism above the pedestal cover plate (8), with screw-driving; Said FORK combination (18) is cleaned out with the matching surface of runing rest (19); In the cannelure of runing rest (19) bottom surface, put into the gas circuit sealing gasket; Align runing rest (19) and make up the gas circuit through hole of (18), with screw attachment FORK combination (18) and runing rest (19) with FORK.

2. according to the said a kind of W axle deviation shaft transmission mechanism that is used for the chip transmission robot of claim 1, it is characterized in that: after the said W axle deviation shaft transmission mechanism assembling, rotate FORK combination (18) with hand, FORK combination (18) can be rotated to the two sides; During the energising debugging, FORK combination (18) should receive the angle control of photoelectric sensor catch (12) to the rotational angle at two ends.