CN208179573U - A kind of multifunctional semiconductor arm end effector - Google Patents
A kind of multifunctional semiconductor arm end effector Download PDFInfo
- Publication number
- CN208179573U CN208179573U CN201820563621.4U CN201820563621U CN208179573U CN 208179573 U CN208179573 U CN 208179573U CN 201820563621 U CN201820563621 U CN 201820563621U CN 208179573 U CN208179573 U CN 208179573U
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- finger
- end effector
- arm end
- semiconductor arm
- multifunctional semiconductor
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a kind of multifunctional semiconductor arm end effectors, the end effector includes system turnover device, system adsorbent equipment, system lifting apparatus and system wafer-scanning device, to solve the problems, such as that existing manipulator end effector has a single function.The semiconductor mechanical hand end effector structures of the utility model are small in size, it can be achieved that a variety of crawl functions, more light and flexible.
Description
Technical field
The utility model relates to robotic technology fields, and in particular to a kind of multifunctional semiconductor arm end execution
Device.
Background technique
Manipulator is referred to as the industrial robot of earliest period, can imitate certain holding functions of manpower and arm, to by solid
The automatic pilot determined program crawl, carry object or operational instrument.In semicon industries such as integrated circuit, chip manufacturings
In, largely transmission silicon wafer wafer is transported using manipulator.Silicon chip conveying mechanical hand is chip transmission and fixed in semiconductor technology chain
The core equipment of position, directly affects processing quality and production efficiency.
The end of manipulator is known as end effector, and end effector usually utilizes vacuum principle can pine by semiconductor crystal wafer
It clamps on it with opening.Currently, domestic semicon industry arm end effector has a single function, cannot realize simultaneously overturning,
Adsorb, lift and wafer-scanning function, these functions generally require the individually designed mechanism outside manipulator and realize, and volume compared with
Greatly, a large amount of working space is occupied.
In view of this, currently needing that the design of end effector is further improved, so that end effector has
Multiple functions, such as can be with constantly realizing that wafer overturn, adsorb, lift and scanning function.
Utility model content
It is existing to solve the purpose of this utility model is to provide a kind of multifunctional semiconductor arm end effector
The problem of arm end effector has a single function.The semiconductor mechanical hand end effector structures of the utility model are small in size,
A variety of crawl functions, more light and flexible can be achieved.
To achieve the above object, the technical solution of the utility model is a kind of execution of multifunctional semiconductor arm end
Device, the end effector include system turnover device, system adsorbent equipment, system lifting apparatus and system wafer-scanning dress
It sets,
The system turnover device includes driving shaft part disposed in parallel and driven shaft portion, and driving shaft part is successively wrapped
Include active synchronization belt wheel, driving shaft and oscillating cylinder；Driven shaft portion successively include driven shaft, bearing block and bearing assembly, from
Dynamic synchronous pulley；Wherein, the driven synchronous pulley of active synchronization belt wheel passes through synchronous band connection transmitting power,
The system adsorbent equipment include sequentially connected first finger, the first finger mount, the first finger connector,
Rotate gas-tpe fitting and vacuum suction air flue；Wherein, the first finger connector and driven axis connection, the first finger tips have
Vacuum absorption holes, vacuum suction air flue connect vacuum absorption holes and rotation gas-tpe fitting,
The system lifting apparatus includes that sequentially connected second finger, second finger fixing piece are connected with second finger
Part；Wherein, second finger end is equipped with and lifts locating slot,
The system wafer-scanning device includes sensor amplifier and sensing head.
Further, the second finger and the first finger are between the upper and lower every stacked.
In one embodiment, the second finger end has vacuum absorption holes, and the first finger tips are equipped with and lift
Locating slot, and the first finger and the locating slot of lifting of second finger are oppositely arranged.
In one embodiment, the bearing block and bearing assembly are double-row self-aligning bearing block and bearing assembly, and with
Driven shaft is gap-matched.
In one embodiment, driven shaft end is externally threaded, using the shaft shoulder position and with the first finger connector
It is fastened by screw.
Further, the driven synchronous pulley two sides are respectively provided with prelocalization collar and rear set collar to realize axial direction
Positioning, and it is circumferentially positioned with fastening screw and driven shaft realization.
Further, the rear set collar realizes axially position by location nut, and the driven shaft passes through screw thread and connects
Connect rotation gas-tpe fitting.
In one embodiment, the location nut uses the form of double location nuts, to carry out locking axially position.
Further, the active synchronization belt wheel is away from driving shaft distal end connection shaft end baffle, and is fixed by positioning screw
To realize that dextrad positions；Active synchronization belt wheel and the driving shaft shaft shoulder are against realization left-hand positioning.
Further, oscillating cylinder lower slide connects oscillating cylinder mounting base.
In one embodiment, it is equipped with threaded hole on the right side of oscillating cylinder mounting base, there is synchronous belt tensioning in threaded hole
Power adjusts screw.Adjusting the screw-in of screw and back-out by synchronous belt tensile force can make oscillating cylinder in oscillating cylinder mounting base
Two sides are mobile to the left and right, to realize that the tensile force of synchronous belt is adjusted.
Further, the oscillating cylinder also has magnetic switch away from driving shaft distal end side.Magnetic switch can be to swing
Cylinder moves left and right limit position and is monitored in real time, and whether in place signal is fed back to manipulator to judge cylinder moving.
Further, the system turnover device further includes solenoid valve and speed governing valve；The oscillating cylinder side also has
Gas nozzle and angular adjustment jackscrew.The total gas circuit of system initially enters solenoid valve air inlet side, and solenoid valve goes out gas side and speed governing valve air inlet side
It is connected, speed governing valve goes out gas side and is connected with oscillating cylinder gas nozzle.Oscillating cylinder angular adjustment jackscrew can carry out 270 Du Neiren to cylinder
Angular adjustment of anticipating is to realize any angle overturning in 270 degree of the first finger；Two, cylinder or so can be realized by solenoid valve
Direction overturning；Cylinder reversal rate, dynamics can be adjusted by speed governing valve.
Further, the bearing block and bearing assembly are connected on connecting plate；The oscillating cylinder mounting base passes through pendulum
Dynamic Cylinder mount bracket is connected on connecting plate.In one embodiment, above-mentioned connection can be connected by screw to.
Further, sensor amplifier is connected on connecting plate by amplifier mounting base；Sensing head is connected to connection
On plate.In one embodiment, above-mentioned connection can be connected by screw to；Sensor amplifier is held in amplifier mounting base
Together.Sensor amplifier and sensing head can be achieved to wafer number, storage position, whether cross-layer, whether the states such as lamination into
Row scanning, and signal is fed back into manipulator.
In one embodiment, the vacuum suction air flue runs through the first finger, the first finger mount, the first finger
The inside of connector, driven shaft, bearing block and bearing assembly and driven synchronous pulley, connection vacuum absorption holes and rotation tracheae connect
Head.
The utility model method has the advantages that
1, the semiconductor mechanical hand end effector that the utility model is related to is integrated with overturning, adsorbs, lifts and wafer-scanning function
Can, greatly reduce the external corollary apparatus of manipulator.
2, compact structure is, it can be achieved that a variety of crawl functions, more light and flexible.
3, technically reliable, easy for installation is convenient for large-scale promotion.
Detailed description of the invention
Fig. 1 is the three-dimensional view of multifunctional semiconductor arm end effector in one embodiment of the utility model.
Fig. 2 is the top view of multifunctional semiconductor arm end effector in one embodiment of the utility model.
Wherein appended drawing reference are as follows:
1. the first finger；2. vacuum absorption holes；3. lifting locating slot；4. the first finger mount；5. the first finger connects
Part；6. driven shaft；7. double-row self-aligning bearing block and bearing assembly；8. driven synchronous pulley；Set collar after 9.；10. positioning spiral shell
It is female；11. positioning screw；12. shaft end baffle；13. active synchronization belt wheel；14. driving shaft；15. oscillating cylinder；16. gas nozzle；17.
Oscillating cylinder angular adjustment jackscrew；18. oscillating cylinder mounting bracket；19. oscillating cylinder mounting base；20. solenoid valve；21. speed regulation
Valve；22. high speed rotation gas-tpe fitting；23. magnetic switch；24. synchronous belt tensile force adjusts screw；25. prelocalization collar；26.
Sensor amplifier；27. sensing head；28. amplifier mounting base；29. connecting plate；30. second finger.
Specific embodiment
The following examples illustrate the utility model, but is not intended to limit the scope of the present invention.
As depicted in figs. 1 and 2, it is shown that multifunctional semiconductor arm end is held in one embodiment of the utility model
The three-dimensional view and top view of row device.Wherein, it is provided with vacuum absorption holes 2 on the first finger 1 and lifts locating slot 3 and is provided with vacuum
Adsorb air flue (not shown).First finger 1, the first finger mount 4, the first finger connector 5 are tightened together by screw.
Vacuum suction air flue (not shown) is provided on first finger mount 4, the first finger connector 5.First finger connector 5 with from
Moving axis 6 is fastened by screw.Driven shaft 6 uses hollow design, and rear end is tapped with internal screw thread, is externally threaded simultaneously, and front end uses
Shaft shoulder positioning, rear end connects driven synchronous pulley 8, and carries out locking axially position using double location nuts 10, with high speed rotation
Gas-tpe fitting 22 is threadedly coupled.Driven shaft 6 is gap-matched with double-row self-aligning bearing and bearing block assembly 7.Double-row self-aligning axis
Seat and bearing assembly 7 is held to be connected on connecting plate 29 using screw.Driven synchronous pulley 8 passes through rear set collar 9 and prelocalization
Collar 25 realizes axially position, and circumferentially positioned with holding screw and the realization of 6 perpendicular contact of driven shaft.Active synchronization belt wheel 13 with
Driven synchronous pulley 8 passes through synchronous band connection and transmits power.Vacuum suction air flue runs through the first finger 1, the first finger mount
4, the inside of the first finger connector 5, driven shaft 6, bearing block and bearing assembly 7 and driven synchronous pulley 8 connects vacuum suction
Hole 2 and rotation gas-tpe fitting 22.
14 end of driving shaft is tapped with internal screw thread, and positioning screw 11 tightens together shaft end baffle 12 to master with driving shaft 14
Dynamic synchronous pulley 13 realizes forward location.Active synchronization belt wheel 13 is with 14 shaft shoulder of driving shaft to positioning after realizing.Driving shaft
14 are connect by screw with oscillating cylinder 15.Oscillating cylinder 15 is slidably connected with oscillating cylinder mounting base 19.Oscillating cylinder installation
19 right side of seat is equipped with threaded hole, in threaded hole there is synchronous belt tensile force to adjust screw 24, adjusts spiral shell by synchronous belt tensile force
The screw-in of nail 24 can be such that oscillating cylinder 15 moves in the lateral direction with back-out, to realize that the tensile force of synchronous belt is adjusted.It swings
Cylinder mounting base 19 is connect with oscillating cylinder mounting bracket 18 using screw.Oscillating cylinder mounting bracket 18 passes through with connecting plate 29
Screw connection.
15 side of oscillating cylinder also has gas nozzle 16 and angular adjustment jackscrew 17.Oscillating cylinder angular adjustment jackscrew 17 can be right
Cylinder carries out any angle in 270 degree and adjusts, to realize any angle overturning in 270 degree of the first finger 1.Magnetic switch 23
Cylinder Derivative limit on the left or on the right position can be monitored in real time, whether in place signal is fed back into manipulator to judge cylinder moving.System
Total gas circuit of uniting initially enters 20 air inlet side of solenoid valve, and solenoid valve 20 goes out gas side and is connected with 21 air inlet side of speed governing valve, and speed governing valve 21 goes out
Gas side is connected with oscillating cylinder gas nozzle 16.It can realize that cylinder or so both direction is overturn by solenoid valve 20.Pass through speed governing valve 21
Cylinder reversal rate, dynamics can be adjusted.
Sensor amplifier 26 is closely together with amplifier mounting base 28.Amplifier mounting base 28 passes through with connecting plate 29
Screw connection.Sensing head 27 is connect by screw with connecting plate 29.Sensor amplifier 26 and sensing head 27 can be realized to wafer
Quantity, storage position, whether cross-layer, whether the states such as lamination are scanned, and signal is fed back into manipulator.
Although above having made detailed description to the utility model with generality explanation and specific embodiment,
On the basis of the utility model, it can be made some modifications or improvements, this is apparent to those skilled in the art
's.Therefore, these modifications or improvements on the basis of without departing from the spirit of the present invention, belong to the utility model and want
Seek the range of protection.
Claims (10)
1. a kind of multifunctional semiconductor arm end effector, which is characterized in that the end effector includes system overturning
Device, system adsorbent equipment, system lifting apparatus and system wafer-scanning device,
The system turnover device includes driving shaft part disposed in parallel and driven shaft portion, and driving shaft part successively includes master
Dynamic synchronous pulley, driving shaft and oscillating cylinder；Driven shaft portion successively includes driven shaft, bearing block and bearing assembly, driven same
Walk belt wheel；Wherein, the driven synchronous pulley of active synchronization belt wheel passes through synchronous band connection transmitting power,
The system adsorbent equipment includes sequentially connected first finger, the first finger mount, the first finger connector, rotation
Gas-tpe fitting and vacuum suction air flue；Wherein, the first finger connector and driven axis connection, the first finger tips have vacuum
Adsorption hole, vacuum suction air flue connect vacuum absorption holes and rotation gas-tpe fitting,
The system lifting apparatus includes sequentially connected second finger, second finger fixing piece and second finger connector；Its
In, second finger end is equipped with and lifts locating slot,
The system wafer-scanning device includes sensor amplifier and sensing head.
2. multifunctional semiconductor arm end effector according to claim 1, which is characterized in that the second finger
With the first finger between the upper and lower every stacked.
3. multifunctional semiconductor arm end effector according to claim 2, which is characterized in that the second finger
End has vacuum absorption holes, and the first finger tips are equipped with and lift locating slot, and the first finger and second finger lift positioning
Slot is oppositely arranged.
4. multifunctional semiconductor arm end effector according to claim 1, which is characterized in that the driven synchronization
Belt wheel two sides are respectively provided with prelocalization collar and rear set collar to realize axially position, and are realized with fastening screw and driven shaft
It is circumferentially positioned.
5. multifunctional semiconductor arm end effector according to claim 4, which is characterized in that locating shaft after described
Ring passes through double location nuts and realizes axially position, and the driven shaft is connected through a screw thread rotation gas-tpe fitting.
6. multifunctional semiconductor arm end effector according to claim 1, which is characterized in that the oscillating cylinder
Lower slide connects oscillating cylinder mounting base；It is equipped with threaded hole on the right side of the oscillating cylinder mounting base, has in threaded hole and synchronizes
Band tensile force adjusts screw.
7. multifunctional semiconductor arm end effector according to claim 6, which is characterized in that the oscillating cylinder
Also there is magnetic switch away from driving shaft distal end side.
8. multifunctional semiconductor arm end effector according to claim 1, which is characterized in that the system overturning
Device further includes solenoid valve and speed governing valve；The oscillating cylinder side also has gas nozzle and angular adjustment jackscrew.
9. multifunctional semiconductor arm end effector according to claim 8, which is characterized in that the oscillating cylinder
Angular adjustment jackscrew can carry out any angle in 270 degree to cylinder and adjust to realize the first finger any angle in 270 degree
Overturning.
10. multifunctional semiconductor arm end effector according to claim 1, which is characterized in that the vacuum is inhaled
Attached air flue through the first finger, the first finger mount, the first finger connector, driven shaft, bearing block and bearing assembly and from
The inside of dynamic synchronous pulley, connection vacuum absorption holes and rotation gas-tpe fitting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820563621.4U CN208179573U (en) | 2018-04-19 | 2018-04-19 | A kind of multifunctional semiconductor arm end effector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820563621.4U CN208179573U (en) | 2018-04-19 | 2018-04-19 | A kind of multifunctional semiconductor arm end effector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208179573U true CN208179573U (en) | 2018-12-04 |
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ID=64434282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820563621.4U Active CN208179573U (en) | 2018-04-19 | 2018-04-19 | A kind of multifunctional semiconductor arm end effector |
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| Country | Link |
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| CN (1) | CN208179573U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112077561A (en) * | 2020-10-28 | 2020-12-15 | 沈阳智勤机器人系统工程有限公司 | End effector system suitable for robot |
| CN116922423A (en) * | 2023-07-25 | 2023-10-24 | 上海稷以科技有限公司 | Wafer transmission manipulator system and method |
-
2018
- 2018-04-19 CN CN201820563621.4U patent/CN208179573U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112077561A (en) * | 2020-10-28 | 2020-12-15 | 沈阳智勤机器人系统工程有限公司 | End effector system suitable for robot |
| CN116922423A (en) * | 2023-07-25 | 2023-10-24 | 上海稷以科技有限公司 | Wafer transmission manipulator system and method |
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