JP7167924B2 - ROBOT HAND, ROBOT DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD - Google Patents

Description

The present technology relates to, for example, a robot hand, a robot apparatus, and an electronic device manufacturing method used for manufacturing electronic devices.

In recent years, robot devices have been widely used in the manufacturing process of electronic devices. In this type of robot device, there are two known work holding mechanisms for robot hands: a suction system having a suction pad capable of vacuum-sucking a work, and a clamp system having fingers capable of gripping a work. there is

A suction type robot hand is advantageous when picking up a workpiece placed on a flat surface, but if the suction force is weak, the workpiece may fall off the suction pad during movement or when changing posture. On the other hand, the clamp-type robot hand can obtain a relatively high holding force because it directly grips the workpiece. unable to grasp.

Therefore, there is known a robot hand that has both a suction method and a clamp method. For example, Patent Literature 1 discloses a workpiece gripping device having a suction pad capable of holding a workpiece with a suction force and a pair of gripping claws that sandwich and hold the workpiece held by the suction pad from both sides thereof. .

Japanese Unexamined Patent Application Publication No. 2010-82748

In the gripping device described in Patent Document 1, the pair of gripping claws can only move to change the distance between them. Therefore, when changing the posture of the work held by the suction pad, the posture of the entire robot hand must be changed, and it is difficult to change the posture of the work in a limited space.

In view of the circumstances as described above, the purpose of the present technology is to provide a robot hand, a robot device, and an electronic device capable of realizing a series of operations from workpiece adsorption to posture change without changing the posture of the entire hand. It is to provide a manufacturing method.

A robot hand according to one embodiment of the present technology includes a hand body, a suction unit, and a finger unit.
The hand body has a base portion.
The suction unit is attached to the base portion and has a suction portion capable of parallel movement in a first axial direction.
The finger unit is attached to the base portion and has first and second finger portions that are independently rotatable about rotation axes parallel to a second axis that intersects the first axis. have.

In the above robot hand, since the first and second finger portions are independently rotatable around the rotation axis, the workpiece held by the suction unit can be rotated around the rotation axis. It can be transformed into a posture rotated by an arbitrary angle.

The hand body may further have a joint axis parallel to a third axis that intersects the first and second axes, and the base portion may be configured to be rotatable around the joint axis. good.
As a result, the suction unit and the finger unit can be rotated about the joint axis, and the finger unit can be rotated about the axis other than the rotation axis and the joint axis.

The hand body may further include first and second wire driving mechanisms for rotating the first and second finger portions about the rotating shaft, respectively.
By utilizing the springiness of the wire in each wire drive mechanism, it is possible to absorb the timing deviation and positional deviation of the rotational motion of each finger portion, thereby more appropriately gripping the workpiece.

The first and second wire drive mechanisms may have wire tension adjustment units each including a detection mechanism capable of detecting wire tension.
Thereby, the wire tension in each wire driving mechanism can be appropriately adjusted.

The hand body may further include a third wire driving mechanism for rotating the base portion around the joint axis.
Since the rotational driving source of the base portion can be configured in the same manner as that of the finger unit, the system can be simplified, and the control compatibility of each driving source can be enhanced.

The finger unit is typically configured so as to be able to grip a workpiece that has been sucked by the suction section.
As a result, a series of operations from sucking and holding the workpiece to changing the posture can be realized.

Each of the first and second finger portions may have a range of motion of 180 degrees.
As a result, the work can be turned upside down by the finger unit.

The finger unit may be configured to be able to pinch the work sucked by the suction portion from the one axial direction.
As a result, even a flexible and thin workpiece can be properly held by the finger units.

A robot apparatus according to one embodiment of the present technology includes a robot arm, a hand body, a suction unit, and a finger unit.
The hand body has a base portion and is attached to the robot arm.
The suction unit is attached to the base portion and has a suction portion capable of parallel movement in a first axial direction.
The finger unit is attached to the base portion and has first and second finger portions that are independently rotatable about rotation axes parallel to a second axis that intersects the first axis. and is configured to be capable of gripping the work sucked by the suction part.

A method for manufacturing an electronic device according to one embodiment of the present technology is a method for manufacturing an electronic device having a connection member, and includes a suction portion attached to a base portion of a robot hand and capable of parallel movement in a first axial direction. It includes sucking the connecting member by a unit.
A finger unit having first and second finger portions attached to the base portion and independently rotatable about a rotation axis parallel to a second axis that intersects the first axis The connecting member sucked by the sucking portion is gripped.
By rotating the finger unit holding the connection member around the rotation shaft, the posture of the connection member is changed.

As described above, according to the present technology, it is possible to realize a series of operations from workpiece adsorption to posture change without changing the posture of the entire hand.
Note that the effects described here are not necessarily limited, and may be any of the effects described in the present disclosure.

1 is a schematic front view of a robotic device according to an embodiment of the present technology; FIG. It is a schematic perspective view which shows the structure of the hand part in the said robot apparatus. FIG. 4 is an enlarged view of a main part of the hand section; FIG. 4 is a front view of a main portion of the hand section; Fig. 3 is a left side view of a main portion of the hand section; It is a right view of the principal part of the said hand part. FIG. 4 is a front view of a main part showing an open state of a finger unit in the hand section; FIG. 8 is a bottom view of FIG. 7; It is a figure which shows the structure of the wire drive mechanism in the said robot apparatus. FIG. 10 is an operation explanatory diagram of the robot apparatus, showing a workpiece suction process; FIG. 10 is an operation explanatory diagram of the robot apparatus, showing a workpiece suction process; FIG. 10 is an operation explanatory diagram of the robot device, showing a process of gripping a workpiece; FIG. 4 is an operation explanatory diagram of the robot device, showing a process of changing the posture of the workpiece;

Hereinafter, embodiments according to the present technology will be described with reference to the drawings.

1 is a schematic front view showing a robot apparatus according to an embodiment of the present technology; FIG. In this embodiment, an application example of the present technology to an assembly robot used in the manufacturing process of electronic devices will be described.

[Schematic configuration of the robot device]
The robot apparatus 1 of this embodiment includes an assembly robot 100 , a workbench 2 that supports a semi-finished electronic device E, and a controller 3 that controls driving of the assembly robot 100 .

The assembly robot 100 has a hand portion 101 (robot hand) and an articulated arm 102 (robot arm) capable of moving the hand portion 101 to an arbitrary coordinate position with six degrees of freedom.

The hand unit 101 grips a flexible linear or belt-like connection member C having a connection portion at its tip, such as a cable, harness, FFC (Flexible Flat Cable), or FPC (Flexible Printed Circuit), as a work. It is configured to be able to convert this into a predetermined posture and attach it to a predetermined portion of the electronic device E. FIG.

The articulated arm 102 is connected to the workbench 2 or a drive unit (not shown) arranged close to the workbench 2 . The articulated arm 102 is configured as a transport mechanism that moves the hand unit 101 or changes its posture. The articulated arm 102 is typically composed of a vertical articulated arm, a horizontal articulated arm, or the like, but may be composed of an XYZ orthogonal robot (three-axis robot) or the like.

The controller 3 is typically composed of a computer having a CPU (Central Processing Unit) and memory, and is configured to control the driving of the assembly robot 100 according to the program stored in the memory.

[Assembly robot]
FIG. 2 is a schematic perspective view showing the configuration of the hand section 101 of the assembly robot 100, and FIG.
As shown in the figure, the hand section 101 has a hand main body 10 , a suction unit 30 and a finger unit 40 .

(hand body)
The hand body 10 has a base portion 11 , a mechanism portion 12 and a connecting portion 13 .

Base portion 11 supports suction unit 30 and finger unit 40 . The base portion 11 has a rotation shaft 111 parallel to the Y-axis direction and a joint shaft 112 parallel to the X-axis direction.

The mechanism portion 12 is formed in a multistage cylindrical shape having a large diameter portion 121 and a small diameter portion 122 . One end (upper end) of the large-diameter portion 121 is attached to the articulated arm 102 , and the small-diameter portion 122 is provided at the center of the other end (lower end) of the large-diameter portion 121 . The mechanism section 12 accommodates a drive source that rotates the finger unit around the rotation shaft 111, a drive source that rotates the base portion 11 around the joint shaft 112, a power transmission mechanism, an adjustment mechanism, and the like for these drive sources.

The connecting portion 13 connects between the base portion 11 and the small diameter portion 122 of the mechanism portion 12 . The connecting portion 13 has a metal tubular portion in the shape of a rectangular tube that accommodates a power transmission member (drive wire) that transmits power of various drive sources in the mechanism portion 12 to each portion of the base portion 11 .

4 is a front view of the essential parts of the hand part 101, FIG. 5 is a left side view of the same, FIG. 6 is a right side view of the same, FIG. 7 is a front view of the essential parts showing the open state of the finger unit 40, and FIG. It is a diagram. Details of the suction unit 30 and the finger unit 40 will be described below.

(Suction unit)
In the present embodiment, the suction unit 30 includes a suction nozzle 31 having a suction portion 311, a drive cylinder 32 that reciprocates the suction nozzle 31 in the Z-axis direction, and a fixing member that fixes between the suction nozzle 31 and the drive cylinder 32. 33 and a connecting member 34 connecting between the driving cylinder 32 and the base portion 11 .

The suction nozzle 31 has a suction portion 311 at one end (lower end) and a connection portion 312 connected to a negative pressure source (not shown) at the other end (upper end). The negative pressure source is composed of, for example, a small pump installed in the mechanism section 12 .

The suction position of the connection member C by the suction portion 311 is not particularly limited, and in the present embodiment, as shown in FIG. The suction position is not limited to the central region in the width direction of the connecting member C, and as shown in FIG. good too.

The drive cylinder 32 is fixed to the connecting member 34 and has a drive rod 321 that can extend and contract in the Z-axis direction. The fixing member 33 connects the suction nozzle 31 and the drive rod 321 to each other, and is configured to be able to move the suction nozzle 31 (suction portion 311 ) in parallel in the Z-axis direction by driving the drive rod 321 . A guide member 35 capable of parallel movement in the Z-axis direction is fixed between the fixing member 33 and the connecting member 34, thereby ensuring the movement accuracy of the adsorption portion 311 along the Z-axis direction.

The connecting member 34 has a first end 341 supporting the drive cylinder 32 and a second end 342 fixed to the base portion 11 . The second end portion 342 is fixed between the rotating shaft 111 and the joint shaft 112 using an appropriate fastener such as a screw member. Thereby, the adsorption unit 30 is configured to be rotatable around the joint shaft 112 together with the base 11 .

(Finger unit)
The finger unit 40 has a first finger portion 41 and a second finger portion 42 . The first and second finger portions 41 and 42 are attached to the base portion 11 and configured to be independently rotatable around the rotating shaft 111 .

The finger unit 40 is configured so as to be able to grip the work sucked by the suction portion 311 . In the present embodiment, the finger units 40 are configured to be able to sandwich the connection member C sucked by the suction portion from its thickness direction (Z-axis direction).

The first and second finger portions 41, 42 are configured to be individually and independently pivotable between clamped positions proximate each other and open positions spaced apart from each other. The movable range (maximum rotation angle) of each finger portion 41, 42 is not particularly limited, and is 180 degrees in this embodiment.

The finger unit 40 is arranged at predetermined intervals in the X-axis direction and the Y-axis direction with respect to the adsorption unit 30 so as not to interfere with the adsorption unit 30 in the open position (see FIG. 7). The tip (lower end) of the finger unit 40 is set at a height above the lowest position of the suction portion 311 .

In this embodiment, the first and second finger portions 41 and 42 are made of an appropriate material such as metal material or synthetic resin material. The first and second finger portions 41 and 42 each have a clamping surface having a width direction in the Y-axis direction, and are configured to clamp a workpiece between the clamping surfaces.

The hand body 10 has first and second wire driving mechanisms D1 and D2 for rotating the first and second finger portions 41 and 42 around the rotating shaft 111, respectively. The hand main body 10 further has a third wire driving mechanism D3 that rotates the base portion 11 around the joint shaft 112 . The first to third wire drive mechanisms D1 to D3 are installed inside the mechanism portion 12 (large diameter portion 121), as shown in FIG.

The first to third wire driving mechanisms D1 to D3 have the same configuration, and have a motor M, a pulley P and a wire W as shown in FIG. A rotating body Ma having spiral grooves formed on its peripheral surface is attached to the tip of the rotating shaft of the motor M. As shown in FIG. A metal wire W is stretched between the peripheral surface of the rotating body Ma and the pulley P to be driven via the small-diameter portion 122 of the mechanism portion 12 and the connecting portion 13 . The motor M is composed of, for example, a servomotor, and rotates the pulley P in a desired rotation direction by a desired rotation amount (rotation angle) using the wire W as a power transmission member.

As shown in FIGS. 5 and 6, the pulley P1 in the first wire drive mechanism D1 is provided at the base end of the first finger portion 41, and the first wire W1 is connected to the first wire drive mechanism D1 via a wire W1 that is stretched over the pulley P1. finger portion 41 is configured to be rotatable around a rotation shaft 111 .
The pulley P2 in the second wire driving mechanism D2 is provided at the proximal end of the second finger portion 42, and the second finger portion 42 is connected to the rotating shaft 112 via the wire W2 that is stretched over the pulley P2. It is configured to be rotatable around.
As shown in FIG. 4, the pulley P3 in the third wire driving mechanism D3 is provided at the upper end of the base portion 11, and the base portion 11 is connected to the joint shaft 112 via a wire W3 that is stretched over the pulley P3. is configured to be rotatable around the

By adopting the first to third wire drive mechanisms D1 to D3, the finger portions 41 and 42 and the base portion 11 can be configured with the same drive system, respectively, thereby simplifying the system. At the same time, it is possible to increase the affinity of control of each drive source.

The wires W1 and W2 are, as shown in FIG. It is spanned over the pulleys P1 and P2 via the second guide pulley G2. As shown in FIG. 6, the pair of second guide pulleys G2 have axes parallel to the X-axis direction and are provided adjacent to each other in the Y-axis direction. Each second guide pulley G2 is composed of two rows of pulley groups that independently support the wires W1 and W2 that are stretched over the pulleys P1 and P2.

The wire W1 is stretched over the pulley P1 via a pair of inner first guide pulleys G1 sandwiching a pulley P3 arranged in the center of the joint shaft 112 and one of a pair of second guide pulleys. The wire W2 is stretched over the pulley P2 via a pair of outer first guide pulleys G1 sandwiching the inner pair of first guide pulleys G1 and the other of the pair of second guide pulleys. The pulleys P1 and P2 are arranged adjacent to each other in the axial direction (Y-axis direction) of the rotation shaft 111, as shown in FIGS.

By adopting the wire drive mechanism for the drive system of the finger unit 40, simplification of the power transmission mechanism and space saving can be realized. Furthermore, by utilizing the springiness of the wires W1 and W2, it is possible to absorb timing deviations and positional deviations of the rotational motions of the individual finger portions 41 and 42. FIG.

The first to third wire drive mechanisms D1 to D3 each have a wire tension adjustment unit including a detection mechanism capable of detecting the wire tension of each wire drive mechanism.

As shown in FIG. 9, in each of the wire driving mechanisms D1 to D3, the motor M is installed on the base B with the load cell C interposed therebetween. The load cell C constitutes a detection mechanism for detecting the tension of the wire W when the pulley P is rotationally driven by the motor M. As shown in FIG.

The structure of the wire tension adjusting unit is not particularly limited, and for example, as shown in FIG. The wire support portion R includes a first unit R1 having a pair of rollers r11 and r12 respectively supporting the upstream side and downstream side of the wire W wound around the rotating body Ma of the motor M, and the upstream side and downstream side of the wire W. and a second unit R2 having a roller r12 that commonly supports the . The second unit R2 is configured to be uniaxially movable relative to the first unit R1.

The wire support portion R configured as described above constitutes a wire tension adjustment unit capable of arbitrarily adjusting the tension of the wire W. As shown in FIG. The wire support portion R adjusts the tension of the wire W based on the output of the detection mechanism including the load cell C so that the wire tension is within a predetermined value or range. The predetermined tension of the wire W (W1-W3) may be the same or different for each wire driving mechanism D1-D3.

[Operation of the robot device]
Next, typical operations of the robot device 100 and the hand unit 101 configured as described above will be described.

As described above, the robot apparatus 1 of the present embodiment grips one end side of the connection member C such as the FFC by the hand unit 101, converts it into a predetermined posture, and connects it to a predetermined portion of the electronic device E. do the work. 10A to 10D are schematic diagrams for explaining a series of operations of the hand unit 101 accompanying the above work.

The robot apparatus 1 has a process of sucking the connection member C, a process of gripping the connection member C, and a process of changing the attitude of the connection member C. As shown in FIG. Each operation of the robot device 1 to be described later is controlled by the controller 3 .

In the suction step, the robot device 1 stops the arm portion 101 at a position directly above the connection member C, and then lowers the suction portion 311 of the suction unit 30 to suck and hold the surface of the connection member C near the end. (see FIGS. 8 and 10A). After the connection member C is sucked, the arm section 101 raises the suction section 311 to dispose the connection member C on the side of the finger unit 40 (see FIG. 10B).

The connection member C is typically placed on the upper surface of the electronic device W. As shown in FIG. A camera may be used to move the arm portion 101 to the position directly above the connecting member C. FIG. The camera may be installed on the arm section 101 or may be installed on the articulated arm 102 .

In the gripping step, the arm section 101 grips the connection member C sucked by the suction section 311 with the finger unit 40 (see FIG. 10C). In the illustrated example, the second finger portion 42 is rotated around the rotation shaft 111 via the second wire driving mechanism D2 while the first finger portion 41 is kept waiting at a position facing the upper surface of the connection member C. 180 degrees. As a result, the connecting member C sucked by the sucking portion 311 is clamped by the finger units 40 in the Z-axis direction.

After the process of gripping the connection member C by the finger unit 40 is completed, the suction operation of the connection member C by the suction unit 30 is released.

In the posture changing process, the arm portion 101 rotates the finger unit 40 holding the connecting member C around the rotating shaft 111 to transform the connecting member C to a predetermined posture. The posture after conversion is not particularly limited, and typically a posture suitable for the next process is adopted.

In the posture changing process, the first and second finger portions 41 and 42 rotate around the rotation shaft 111 in synchronization with each other. Thereby, the posture of the connecting member C can be changed while maintaining the gripping state of the connecting member C. FIG. The arm portion 101 may rotate the finger unit 40 not only about the rotation shaft 111 but also about the joint shaft 112 . Thereby, the degree of freedom of the posture of the connection member C is increased.

After the process of changing the posture of the connection member C is completed, the arm unit 101 transports the connection portion Ce (see FIG. 8) of the connection member C to a predetermined installation position on the electronic device W and connects.

As described above, according to the present embodiment, it is possible to implement a series of operations from sucking and holding the workpiece to changing the posture. In particular, even a workpiece (connecting member C) having no thickness such as an FFC can be properly picked up by the adsorption operation of the adsorption unit 30 . Furthermore, since the finger unit 40 can grip the work sucked by the suction unit 30, the holding force of the work is enhanced, and therefore the posture changing work of the work can be stably performed.

According to this embodiment, since the first and second finger portions 41 and 42 are configured to be independently rotatable around the rotation shaft 111, the work (connection) held by the suction unit 30 is The member C) can be stably converted to a posture rotated by an arbitrary angle around the rotation shaft 111 . As a result, the workpiece held by the suction unit 30 can be changed to another posture without changing the posture of the hand unit 101 as a whole. Therefore, the space required for changing the posture of the work can be reduced, making it easier to transport the work to a narrow area.

Furthermore, since the wire drive mechanisms D1 and D2 are employed as the drive sources for the first and second finger portions 41 and 42, the springiness of the wires can be used to control the timing of the rotation of the individual finger portions 41 and 42. Misalignment and misalignment can be absorbed. For example, when gripping a workpiece with the two fingers 41 and 42, even if the target positions (gripping positions) of the fingers 41 and 42 are set to slightly overlap each other, the overlap is absorbed by the elasticity of the wires W1 and W2. can do. As a result, the workpiece can be stably held with a predetermined holding force.

Moreover, since it has a mechanism for detecting and adjusting the tension of the wires W1 and W2, the maintenance of the finger unit 40 is easy, and the tension can be quickly set according to the type of workpiece.

Although the embodiments of the present technology have been described above, the present technology is not limited to the above-described embodiments, and can of course be modified in various ways.

For example, in the above embodiments, a flexible linear or strip-shaped connection member C such as FFC was used as an example of the work, but the type of work is not limited to this. This technology can also be applied to handling other thin members such as cards, coins, strips, and the like. Furthermore, the present technology can be applied not only to industrial robots, but also to household robots, medical robots, and the like.

In the suction unit 30, the suction section 311 can be moved in parallel by vertically moving the suction nozzle 31 with the drive cylinder 32, but the suction nozzle 31 itself may have an expandable suction section.

Furthermore, based on the wire tension detected by the wire tension detection mechanism, the adjustment unit may be dynamically controlled so that the tension of each wire becomes a predetermined value. This makes it possible to adjust the wire tension in real time.

Note that the present technology can also have the following configuration.
(1) a hand body having a base;
a suction unit attached to the base portion and having a suction portion capable of parallel movement in a first axial direction;
a finger unit attached to said base portion and having first and second finger portions each independently rotatable about a pivot axis parallel to a second axis intersecting said first axis; Equipped robot hand.
(2) The robot hand according to (1) above,
the hand body further has a joint axis parallel to a third axis that intersects the first and second axes,
The robot hand, wherein the base portion is rotatable about the joint axis.
(3) The robot hand according to (1) or (2) above,
The hand main body further includes first and second wire driving mechanisms for respectively rotating the first and second finger portions around the rotating shaft.
(4) The robot hand according to (3) above,
The robot hand, wherein the first and second wire drive mechanisms have wire tension adjustment units each including a detection mechanism capable of detecting wire tension.
(5) The robot hand according to any one of (2) to (4) above,
The robot hand, wherein the hand main body further includes a third wire driving mechanism that rotates the base portion around the joint axis.
(6) The robot hand according to any one of (1) to (5) above,
The robot hand, wherein the finger unit is configured to be capable of gripping a workpiece adsorbed by the adsorption part.
(7) The robot hand according to any one of (1) to (6) above,
Each of the first and second finger parts has a movable range of 180 degrees Robot hand.
(8) The robot hand according to (7) above,
The robot hand, wherein the finger unit is configured to be able to pinch the work sucked by the sucking part from the one-axis direction.
(9) a robotic arm;
a hand body having a base portion and attached to the robot arm;
a suction unit attached to the base portion and having a suction portion capable of parallel movement in a first axial direction;
a finger unit attached to said base portion and having first and second finger portions each independently rotatable about a pivot axis parallel to a second axis intersecting said first axis; Robotic device equipped.
(10) A method for manufacturing an electronic device having a connection member,
sucking the connection member by a suction unit having a suction portion attached to the base portion of the robot hand and capable of parallel movement in the first axial direction;
A finger unit having first and second finger portions mounted on the base portion and independently rotatable about a rotation axis parallel to a second axis that intersects the first axis, holding the connecting member sucked by the sucking part;
A method of manufacturing an electronic device, comprising: rotating a finger unit gripping the connecting member about the rotating shaft to change a posture of the connecting member.

DESCRIPTION OF SYMBOLS 1... Robot apparatus 3... Controller 10... Hand main body 11... Base part 30... Suction unit 40... Finger unit 41... First finger part 42... Second finger part 100... Assembly robot 101... Hand part 102... Multi-joint arm 311... Adsorption part C... Linear member

Claims (9)

a hand body having a base;
a suction unit attached to the base portion and having a suction portion capable of parallel movement in a first axial direction;
having first and second finger portions attached to the base portion and independently rotatable around a rotation axis parallel to a second axis intersecting the first axis; a finger unit configured to grip a workpiece attracted to a part and to change the posture of the gripped workpiece by rotating around the rotation shaft while gripping the workpiece; Equipped robot hand. The robot hand according to claim 1,
the hand body further has a joint axis parallel to a third axis that intersects the first and second axes,
The robot hand, wherein the base portion is rotatable about the joint axis. The robot hand according to claim 1,
The hand main body further includes first and second wire driving mechanisms for respectively rotating the first and second finger portions around the rotating shaft. The robot hand according to claim 3,
The robot hand, wherein the first and second wire drive mechanisms have wire tension adjustment units each including a detection mechanism capable of detecting wire tension. The robot hand according to claim 2,
The robot hand, wherein the hand main body further includes a third wire driving mechanism that rotates the base portion around the joint axis. The robot hand according to claim 1,
Each of the first and second finger parts has a movable range of 180 degrees Robot hand. The robot hand according to claim 6 ,
The robot hand, wherein the finger unit is configured to be able to pinch the work sucked by the suction part from the first axial direction. a robot arm;
a hand body having a base portion and attached to the robot arm;
a suction unit attached to the base portion and having a suction portion capable of parallel movement in a first axial direction;
having first and second finger portions attached to the base portion and independently rotatable around a rotation axis parallel to a second axis intersecting the first axis; a finger unit configured to grip a workpiece attracted to a part and to change the posture of the gripped workpiece by rotating around the rotation shaft while gripping the workpiece; Robotic device equipped. A method for manufacturing an electronic device having a connection member,
sucking the connection member by a suction unit having a suction portion attached to the base portion of the robot hand and capable of parallel movement in the first axial direction;
A finger unit having first and second finger portions mounted on the base portion and independently rotatable about a rotation axis parallel to a second axis that intersects the first axis, gripping the connection member sucked by the sucking part;
A method of manufacturing an electronic device, comprising: rotating a finger unit gripping the connecting member about the rotating shaft to change a posture of the connecting member.

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