WO2019058824A1

WO2019058824A1 - Robot hand, robot device, and method for manufacturing electronic apparatus

Info

Publication number: WO2019058824A1
Application number: PCT/JP2018/030502
Authority: WO
Inventors: 弘邦別府; 貴行古坊
Original assignee: ソニー株式会社
Priority date: 2017-09-21
Filing date: 2018-08-17
Publication date: 2019-03-28
Also published as: CN111065498A; TWI765085B; TW201919831A; CN111065498B; JP7167924B2; JPWO2019058824A1

Abstract

The robot hand relating to one embodiment of the present technology is provided with a hand main body, a suction unit, and a finger unit. The hand main body has a base section. The suction unit is attached to the base section, and has a suction section capable of moving in parallel in first axis direction. The finger unit is attached to the base section, and has first and second finger sections, which can independently rotate about a rotating axis parallel to a second axis intersecting the first axis.

Description

Robot hand, robot apparatus and method of manufacturing electronic device

The present technology relates to, for example, a robot hand used for manufacturing an electronic device, a robot device, and a method of manufacturing an electronic device.

In recent years, robot devices have been widely used in the manufacturing process of electronic devices. In this type of robot apparatus, as a workpiece holding mechanism of a robot hand, a suction method having a suction pad capable of vacuum suctioning a workpiece and a clamp method having a finger capable of gripping a workpiece are known. There is.

The suction type robot hand is advantageous when picking up a work placed on a flat surface, but when the suction force is weak, the work may be dropped from the suction pad during movement or posture conversion. On the other hand, although the clamping type robot hand holds relatively high holding power because it directly grips the work, when the work is a thin strip member such as FFC, the work placed flat can be stabilized stably. It can not be gripped.

Then, the robot hand which combines an adsorption method and a clamp method is known. For example, Patent Document 1 discloses a work gripping apparatus having a suction pad capable of holding a work by suction force, and a pair of holding claws for holding the work held by the suction pad from both sides thereof. .

JP, 2010-82748, A

In the gripping device described in Patent Document 1, the pair of gripping claws can only move for changing the distance between them. For this reason, when changing the posture of the work held by the suction pad, it is necessary to change the posture of the entire robot hand, and it is difficult to change the posture of the work in a limited space.

In view of the circumstances as described above, an object of the present technology is to provide a robot hand, a robot device, and an electronic apparatus capable of realizing a series of operations from suction of a work to posture conversion without changing the posture of the entire hand. It is in providing a manufacturing method.

A robot hand according to an embodiment of the present technology includes a hand body, a suction unit, and a finger unit.
The hand body has a base portion.
The suction unit is attached to the base portion and has a suction portion movable in parallel in a first axial direction.
The finger unit is attached to the base portion, and has first and second finger portions that can independently rotate around a rotation axis parallel to a second axis intersecting the first axis. Have.

In the robot hand, since the first and second finger portions are configured to be independently pivotable around the pivot axis, the work held by the suction unit can be pivoted around the pivot axis. It can be converted into an attitude rotated at an arbitrary angle.

The hand body further includes a joint axis parallel to a third axis intersecting with the first and second axes, and the base portion is configured to be rotatable around the joint axis. Good.
Thus, the suction unit and the finger unit can be rotated around the joint axis, and the finger unit can be rotated around the other axis of the rotation axis and the joint axis.

The hand body may further include first and second wire drive mechanisms for pivoting the first and second finger portions around the pivot axis, respectively.
The work can be gripped more properly by absorbing the timing deviation and positional deviation of the rotational movement of the individual finger portions by utilizing the spring property of the wire in each wire drive mechanism.

The first and second wire drive mechanisms may have a wire tension adjustment unit including a detection mechanism capable of detecting wire tension respectively.
Thereby, the wire tension in each wire drive mechanism can be adjusted appropriately.

The hand main body may further include a third wire driving mechanism for rotating the base portion around the joint axis.
Since the rotational drive source of the base portion can be configured in the same manner as that of the finger unit, the system can be simplified and the control affinity of each drive source can be enhanced.

The finger unit is typically configured to be capable of gripping a work sucked by the suction unit.
As a result, it is possible to realize by a series of operations from suction holding of the work to posture conversion.

Each of the first and second finger portions may have a movable range of 180 degrees.
Thereby, it is possible to invert the front and back of the work by the finger unit.

The finger unit may be configured to be capable of sandwiching the work sucked by the suction unit from the uniaxial direction.
Thereby, even a thin and flexible thin work can be properly held by the finger unit.

A robot apparatus according to an embodiment of the present technology includes a robot arm, a hand main body, a suction unit, and a finger unit.
The hand body has a base and is attached to the robot arm.
The suction unit is attached to the base portion and has a suction portion movable in parallel in a first axial direction.
The finger unit is attached to the base portion, and has first and second finger portions that can independently rotate around a rotation axis parallel to a second axis intersecting the first axis. And configured to be capable of gripping the workpiece adsorbed by the adsorption unit.

A method of manufacturing an electronic device according to an embodiment of the present technology is a method of manufacturing an electronic device having a connection member, which is an adsorption unit attached to a base portion of a robot hand and having a suction portion movable in parallel in a first axial direction. Including adsorbing the connecting member by a unit.
A finger unit having first and second finger portions attached to the base portion and pivotable independently about a pivot axis parallel to a second axis intersecting the first axis; The connection member adsorbed by the adsorption unit is gripped.
The posture of the connecting member is changed by rotating the finger unit holding the connecting member around the pivot shaft.

As described above, according to the present technology, it is possible to realize a series of operations from suction of a work to posture conversion without changing the posture of the entire hand.
In addition, the effect described here is not necessarily limited, and may be any effect described in the present disclosure.

1 is a schematic front view showing a robot apparatus according to an embodiment of the present technology. It is a schematic perspective view which shows the structure of the hand part in the said robot apparatus. It is an enlarged view of the principal part of the above-mentioned hand part. It is a principal part front view of the above-mentioned hand part. It is a principal part left view of the above-mentioned hand part. It is a principal part right view of the above-mentioned hand part. It is a principal part front view which shows the open state of the finger unit in the said hand part. It is a bottom view of FIG. It is a figure which shows the structure of the wire drive mechanism in the said robot apparatus. It is operation | movement explanatory drawing by the said robot apparatus, Comprising: It is a figure which shows the adsorption | suction process of a workpiece | work. It is operation | movement explanatory drawing by the said robot apparatus, Comprising: It is a figure which shows the adsorption | suction process of a workpiece | work. It is operation | movement explanatory drawing by the said robot apparatus, Comprising: It is a figure which shows the holding process of a workpiece | work. It is operation | movement explanatory drawing by the said robot apparatus, Comprising: It is a figure which shows the attitude | position conversion process of a workpiece | work.

Hereinafter, embodiments according to the present technology will be described with reference to the drawings.

FIG. 1 is a schematic front view showing a robot apparatus according to an embodiment of the present technology. In this embodiment, an application example of the present technology to an assembly robot used in a manufacturing process of an electronic device will be described.

[Schematic Configuration of Robot Device]
The robot apparatus 1 according to the present embodiment includes an assembly robot 100, a work bench 2 supporting a semi-finished product of the electronic device E, and a controller 3 controlling driving of the assembly robot 100.

The assembly robot 100 has a hand unit 101 (robot hand) and an articulated arm 102 (robot arm) capable of moving the hand unit 101 to any coordinate position with six-axis degrees of freedom.

The hand unit 101 grips a flexible linear or strip-like connecting member C having a connecting portion at its tip such as a cable, a harness, an FFC (Flexible Flat Cable), or an FPC (Flexible Printed Circuit) as a work, It is possible to convert this into a predetermined posture and assemble it into a predetermined part of the electronic device E.

The articulated arm 102 is connected to the workbench 2 or a drive unit (not shown) disposed close to the workbench 2. The articulated arm 102 is configured as a transport mechanism that moves the hand unit 101 or converts its posture. The articulated arm 102 is typically composed of a vertical articulated arm, a horizontal articulated arm or the like, but may be composed of an XYZ orthogonal robot (3-axis robot) or the like.

The controller 3 is typically configured by a computer having a CPU (Central Processing Unit) and a memory, and is configured to control the driving of the assembly robot 100 in accordance with the program stored in the memory.

[Assembly robot]
FIG. 2 is a schematic perspective view showing the configuration of the hand unit 101 of the assembly robot 100, and FIG. 3 is an enlarged view of the main part of the hand unit 101. As shown in FIG.
As shown in the figure, the hand unit 101 includes a hand body 10, a suction unit 30, and a finger unit 40.

(Hand body)
The hand main body 10 has a base portion 11, a mechanical portion 12 and a connecting portion 13.

The base portion 11 supports the suction unit 30 and the finger unit 40. The base portion 11 has a rotational axis 111 parallel to the Y-axis direction and a joint axis 112 parallel to the X-axis direction.

The mechanical portion 12 is formed in a multistage cylindrical shape having a large diameter portion 121 and a small diameter portion 122. The large diameter portion 121 has one end (upper end) attached to the articulated arm 102, and the small diameter portion 122 is provided at the center of the other end (lower end) of the large diameter portion 121. The mechanism unit 12 accommodates a drive source for rotating the finger unit around the rotation shaft 111, a drive source for rotating the base unit 11 around the joint shaft 112, and a power transmission mechanism and adjustment mechanism of these drive sources.

The connecting portion 13 connects between the base portion 11 and the small diameter portion 122 of the mechanical portion 12. The connecting portion 13 has a rectangular cylindrical metal tube portion accommodating a power transmission member (drive wire) for transmitting the power of various drive sources in the mechanical portion 12 to each portion of the base portion 11.

4 is a front view of the main part of the hand unit 101, FIG. 5 is a left side view thereof, FIG. 6 is a right side view thereof, FIG. 7 is a front view of the main part showing the open state of the finger unit 40, and FIG. FIG. Hereinafter, details of the suction unit 30 and the finger unit 40 will be described.

(Suction unit)
In the present embodiment, the suction unit 30 includes a suction nozzle 31 having a suction portion 311, a drive cylinder 32 for reciprocating the suction nozzle 31 in the Z-axis direction, and a fixing member for fixing between the suction nozzle 31 and the drive cylinder 32. 33 and a connecting member 34 connecting between the drive cylinder 32 and the base portion 11.

The suction nozzle 31 has a suction portion 311 at one end (lower end) and a connection portion 312 connected to a negative pressure source (not shown) at the other end (upper end). The negative pressure source is constituted by, for example, a small pump installed in the mechanism unit 12.

The suction position of the connection member C by the suction unit 311 is not particularly limited, and in the present embodiment, as shown in FIG. 8, the position is near the end of the connection member C on the connection portion Ce side. The suction position is not limited to the widthwise central region of the connecting member C, and is a position biased from the widthwise center of the connecting member C to the edge on one side (finger unit 40 side) as shown in FIG. It is also good.

The drive cylinder 32 is fixed to the connecting member 34 and has a drive rod 321 which can be extended and retracted in the Z-axis direction. The fixing member 33 connects the suction nozzle 31 and the drive rod 321 to each other, and is configured to be able to move the suction nozzle 31 (the suction portion 311) in parallel in the Z-axis direction by driving the drive rod 321. A guide member 35 movable in parallel in the Z-axis direction is fixed between the fixing member 33 and the connecting member 34, whereby movement accuracy of the suction portion 311 along the Z-axis direction is secured.

The connecting member 34 has a first end 341 supporting the drive cylinder 32 and a second end 342 fixed to the base 11. The second end 342 is fixed between the pivot shaft 111 and the joint shaft 112 using a suitable fastener such as a screw member. Thus, the suction unit 30 is configured to be rotatable around the joint shaft 112 together with the base 11.

(Finger unit)
The finger unit 40 has a first finger portion 41 and a second finger portion 42. The first and

second finger portions

41 and 42 are attached to the base portion 11 and configured to be independently pivotable about the pivot shaft 111.

The finger unit 40 is configured to be able to grip the workpiece sucked by the suction unit 311. In the present embodiment, the finger unit 40 is configured to be capable of sandwiching the connection member C adsorbed by the adsorption portion in the thickness direction (Z-axis direction).

The first and

second finger portions

41 and 42 are configured to be capable of independently and independently pivoting between a clamp position close to each other and an open position separate from each other. The movable range (maximum rotation angle) of each

finger portion

41, 42 is not particularly limited, and is 180 degrees in the present embodiment.

The finger units 40 are arranged at predetermined intervals in the X-axis direction and the Y-axis direction with respect to the suction unit 30 so as not to interfere with the suction unit 30 in the open position (see FIG. 7). The finger unit 40 is set to a height at which the tip (lower end) thereof is positioned above the lowest position of the suction portion 311.

In the present embodiment, the first and

second finger portions

41 and 42 are made of an appropriate material such as a metal material or a synthetic resin material. Each of the first and

second finger portions

41 and 42 has a clamp surface having a width direction in the Y-axis direction, and is configured to clamp the workpiece with the clamp surface.

The hand body 10 has first and second wire driving mechanisms D1 and D2 for rotating the first and

second finger portions

41 and 42 around the pivot shaft 111, respectively. The hand main body 10 further includes a third wire driving mechanism D3 for rotating the base 11 around the joint shaft 112. The first to third wire driving mechanisms D1 to D3 are installed inside the mechanical portion 12 (large diameter portion 121) as shown in FIG.

The first to third wire driving mechanisms D1 to D3 have the same configuration, and include a motor M, a pulley P, and a wire W as shown in FIG. At the tip of the rotation shaft of the motor M, a rotating body Ma having a spiral groove formed on the circumferential surface is attached. A metal wire W is bridged between the circumferential surface of the rotating body Ma and the pulley P to be driven via the inside of the small diameter portion 122 of the mechanical portion 12 and the connecting portion 13. The motor M is, for example, a servomotor, and uses the wire W as a power transmission member to rotate the pulley P in a desired rotational direction by a desired amount of rotation (rotational angle).

As shown in FIGS. 5 and 6, the pulley P1 in the first wire drive mechanism D1 is provided at the proximal end of the first finger portion 41, and the first wire driving mechanism D1 is connected to the first wire W1 across the pulley P1. The finger portion 41 is configured to be pivotable around the pivot shaft 111.
The pulley P2 in the second wire drive mechanism D2 is provided at the base end of the second finger portion 42, and the second finger portion 42 is the pivot shaft 112 via the wire W2 bridged over the pulley P2. It is configured to be rotatable around.
Then, as shown in FIG. 4, the pulley P3 in the third wire driving mechanism D3 is provided at the upper end of the base portion 11, and the base portion 11 is the joint shaft 112 via the wire W3 bridged over the pulley P3. It is configured to be rotatable around the

By adopting the first to third wire drive mechanisms D1 to D3, the

respective finger portions

41 and 42 and the base portion 11 can be configured with the drive system of the same system, so the system can be simplified. In addition, the control affinity of each driving source can be enhanced.

The wires W1 and W2 are, as shown in FIG. 4, a first guide pulley G1 inserted into the joint shaft 112 adjacent to the pulley P3 and a pair of the guide guide G1 provided between the rotating shaft 111 and the joint shaft 112. The pulleys P1 and P2 are respectively bridged through the second guide pulley G2. As shown in FIG. 6, the pair of second guide pulleys G2 has an axis parallel to the X-axis direction, and is provided adjacent to the Y-axis direction. Each of the second guide pulleys G2 is formed of two rows of pulley groups each independently supporting the wires W1 and W2 bridged by the pulleys P1 and P2.

The wire W1 is bridged over the pulley P1 via a pair of inner first guide pulleys G1 sandwiching the pulley P3 disposed at the center of the joint shaft 112 and one of the pair of second guide pulleys. The wire W2 is bridged to the pulley P2 via the pair of outer first guide pulleys G1 sandwiching the pair of inner first guide pulleys G1 and the other of the pair of second guide pulleys. The pulleys P1 and P2 are disposed adjacent to each other in the axial direction (Y-axis direction) of the pivot shaft 111, as shown in FIGS.

By adopting a wire drive mechanism in the drive system of the finger unit 40, simplification of the power transmission mechanism and space saving can be realized. Furthermore, by utilizing the spring property of the wires W1 and W2, it is possible to absorb timing deviation and positional deviation of the rotation operation of the

individual finger portions

41 and 42.

The first to third wire drive mechanisms D1 to D3 have wire tension adjustment units each including a detection mechanism capable of detecting the wire tension of each wire drive mechanism.

As shown in FIG. 9, in each wire driving mechanism D1 to D3, the motor M is installed on the base B via the load cell C. The load cell C constitutes a detection mechanism that detects the tension of the wire W when the motor M rotationally drives the pulley P.

The configuration of the wire tension adjustment unit is not particularly limited. For example, as shown in FIG. 9, the wire tension adjustment unit has a wire support R that supports the wire W stretched between the motor M and the pulley P. The wire support portion R includes a first unit R1 having a pair of rollers r11 and r12 supporting the upstream side and the downstream side of the wire W wound around the rotating body Ma of the motor M, and the upstream side and the downstream side of the wire W And a second unit R2 having a roller r12 for supporting in common. The second unit R2 is configured to be movable relative to the first unit R1 in one axial direction.

The wire support portion R configured as described above constitutes a wire tension adjustment unit capable of arbitrarily adjusting the tension of the wire W. The wire support R adjusts the tension of the wire W based on the output of the detection mechanism including the load cell C so that the wire tension has a predetermined value or range. The predetermined tension of the wires W (W1 to W3) may be the same or different for each of the wire driving mechanisms D1 to D3.

[Operation of Robot Device]
Next, typical operations of the robot apparatus 100 and the hand unit 101 configured as described above will be described.

As described above, the robot apparatus 1 according to the present embodiment grips one end side of the connection member C such as FFC with the hand unit 101, converts it into a predetermined posture, and connects it to a predetermined part of the electronic device E Do the work. 10A to 10D are schematic views for explaining a series of operations of the hand unit 101 in connection with the above operation.

The robot apparatus 1 has a suction process of the connection member C, a gripping process of the connection member C, and a posture conversion process of the connection member C. Each operation of the robot apparatus 1 described later is controlled by the controller 3.

In the adsorption step, the robot device 1 stops the arm portion 101 at a position immediately above the connection member C, and then lowers the adsorption portion 311 of the adsorption unit 30 downward to adsorb and hold the surface near the end of the connection member C (See FIG. 8, 10A). After suction of the connection member C, the arm unit 101 raises the suction portion 311 to arrange the connection member C on the side of the finger unit 40 (see FIG. 10B).

The connection member C is typically mounted on the top surface of the electronic device W. A camera may be used to move the arm unit 101 to a position immediately above the connection member C. The camera may be installed on the arm unit 101 or may be installed on the articulated arm 102.

In the gripping process, the arm unit 101 grips the connection member C sucked by the suction unit 311 by the finger unit 40 (see FIG. 10C). In the illustrated example, while the first finger portion 41 stands by at a position facing the upper surface of the connection member C, the second finger portion 42 is rotated around the pivot shaft 111 via the second wire drive mechanism D2. Rotate it 180 degrees. Thus, the connection member C adsorbed by the adsorption unit 311 is nipped by the finger unit 40 in the Z-axis direction.

After the gripping process of the connection member C by the finger unit 40 is completed, the suction operation of the connection member C by the suction unit 30 is released.

In the posture conversion process, the arm unit 101 converts the connection member C into a predetermined posture by rotating the finger unit 40 holding the connection member C around the rotation axis 111. The posture after conversion is not particularly limited, and typically, a posture suitable for the next step is employed.

In the posture conversion step, the first and

second finger portions

41 and 42 rotate around the rotation shaft 111 in synchronization with each other. Thereby, the posture of the connecting member C can be changed while maintaining the gripping state of the connecting member C. The arm unit 101 may rotate the finger unit 40 not only around the pivot axis 111 but also around the joint axis 112. Thereby, the degree of freedom of the posture of the connection member C is enhanced.

After the process of converting the posture of the connection member C is completed, the arm unit 101 conveys and connects the connection portion Ce (see FIG. 8) of the connection member C to a predetermined installation position on the electronic device W.

As described above, according to the present embodiment, it is possible to realize a series of operations from suction holding of a work to posture conversion. In particular, even for a work (connection member C) without a thickness such as FFC, the pickup operation of the work can be properly performed by the suction operation by the suction unit 30. Further, since the work held by the suction unit 30 can be held by the finger unit 40, the holding power of the work can be enhanced, and therefore, the work of changing the posture of the work can be stably performed.

According to the present embodiment, since the first and

second finger portions

41 and 42 are configured to be independently pivotable around the pivot shaft 111, the work held by the suction unit 30 (connection It is possible to stably convert the member C) into a posture in which the member C) is rotated about the rotation shaft 111 by an arbitrary angle. Thereby, it is possible to convert the work held by the suction unit 30 into another posture without changing the posture of the hand part 101 as a whole. Therefore, the space required for posture conversion of the workpiece can be reduced, which facilitates transport of the workpiece to the narrow area.

Furthermore, since the wire drive mechanisms D1 and D2 are adopted as the drive sources of the first and

second finger portions

41 and 42, the timing of the rotational movement of the

individual finger portions

41 and 42 using the spring property of the wire. Misalignment and misalignment can be absorbed. For example, when gripping a work with two

finger portions

41 and 42, even if the target positions (gripping positions) are set at slightly overlapping positions, the overlap of the overlapping portions is absorbed by the springiness of the wires W1 and W2. can do. Thus, the workpiece can be stably gripped with a predetermined holding force.

Moreover, since the detection and adjustment mechanism of the tension of the wires W1 and W2 is provided, maintenance of the finger unit 40 is easy, and tension setting can be performed quickly according to the type of work.

As mentioned above, although embodiment of this technique was described, this technique is not limited only to the above-mentioned embodiment, of course, a various change can be added.

For example, in the above embodiment, although a flexible linear or strip-like connecting member C such as FFC has been described as an example of the work, the type of the work is not limited to this, for example, plate-like, The present technology is also applicable to the handling of other non-thick members such as cards, coins, and strips. Furthermore, the present technology is applicable not only to industrial robots, but also to home robots, medical robots, and the like.

In the suction unit 30, the suction unit 311 is configured to be movable in parallel by moving the suction nozzle 31 up and down with the drive cylinder 32, but the suction nozzle 31 itself may have a suction unit that can expand and contract.

Furthermore, based on the wire tension detected by the wire tension detection mechanism, it may be configured to be able to dynamically control the adjustment unit so that the tension of each wire becomes a predetermined value. This makes it possible to adjust the wire tension in real time.

The present technology can also be configured as follows.
(1) A hand body having a base portion,
A suction unit attached to the base portion and having a suction portion movable in parallel in a first axial direction;
A finger unit attached to the base portion and having first and second finger portions that can independently rotate around a rotation axis parallel to a second axis intersecting the first axis. Equipped robot hand.
(2) The robot hand according to (1) above,
The hand body further comprises an articulation axis parallel to a third axis intersecting the first and second axes respectively;
The robot hand configured to be rotatable about the joint axis.
(3) The robot hand according to (1) or (2) above,
The robot hand further includes first and second wire drive mechanisms for pivoting the first and second finger portions around the pivot axis, respectively.
(4) The robot hand according to (3) above,
The first and second wire driving mechanisms each have a wire tension adjustment unit including a detection mechanism capable of detecting wire tension.
(5) The robot hand according to any one of (2) to (4) above,
The robot hand further includes a third wire drive mechanism for rotating the base portion around the joint axis.
(6) The robot hand according to any one of (1) to (5) above,
The finger unit is configured to be capable of gripping a work sucked by the suction unit.
(7) The robot hand according to any one of (1) to (6) above,
The first and second finger portions each have a movable range of 180 degrees.
(8) The robot hand according to (7) above,
The finger unit is configured to be capable of sandwiching a work sucked by the suction unit from the uniaxial direction.
(9) With the robot arm
A hand body having a base and attached to the robot arm;
A suction unit attached to the base portion and having a suction portion movable in parallel in a first axial direction;
A finger unit attached to the base portion and having first and second finger portions that can independently rotate around a rotation axis parallel to a second axis intersecting the first axis. Robot equipment to be equipped.
(10) A method of manufacturing an electronic device having a connecting member,
Suctioning the connecting member by a suction unit having a suction unit attached to a base portion of the robot hand and movable in parallel in a first axial direction;
A finger unit having first and second finger portions that are independently pivotable about a pivot axis attached to the base portion and parallel to a second axis intersecting the first axis; Gripping the connection member adsorbed by the adsorption unit;
A method of manufacturing an electronic device, wherein a posture of the connection member is changed by rotating a finger unit holding the connection member around the rotation axis.

DESCRIPTION OF SYMBOLS 1 ... Robot apparatus 3 ... Controller 10 ... Hand main body 11 ... Base part 30 ... Suction unit 40 ... Finger unit 41 ... 1st finger part 42 ... 2nd finger part 100 ... Assembly robot 101 ... Hand part 102 ... Articulated arm 311 ... adsorption section C ... linear member

Claims

A hand body having a base portion,
A suction unit attached to the base portion and having a suction portion movable in parallel in a first axial direction;
A finger unit attached to the base portion and having first and second finger portions that can independently rotate around a rotation axis parallel to a second axis intersecting the first axis. Equipped robot hand.
The robot hand according to claim 1, wherein
The hand body further comprises an articulation axis parallel to a third axis intersecting the first and second axes respectively;
The robot hand configured to be rotatable about the joint axis.
The robot hand according to claim 1, wherein
The robot hand further includes first and second wire drive mechanisms for pivoting the first and second finger portions around the pivot axis, respectively.
The robot hand according to claim 3, wherein
The first and second wire driving mechanisms each have a wire tension adjustment unit including a detection mechanism capable of detecting wire tension.
The robot hand according to claim 2, wherein
The robot hand further includes a third wire drive mechanism for rotating the base portion around the joint axis.
The robot hand according to claim 1, wherein
The finger unit is configured to be capable of gripping a work sucked by the suction unit.
The robot hand according to claim 1, wherein
The first and second finger portions each have a movable range of 180 degrees.
The robot hand according to claim 7, wherein
The finger unit is configured to be capable of sandwiching a work sucked by the suction unit from the uniaxial direction.
With a robot arm,
A hand body having a base and attached to the robot arm;
A suction unit attached to the base portion and having a suction portion movable in parallel in a first axial direction;
It has a first and a second finger portion attached to the base portion and capable of independently rotating around a rotational axis parallel to a second axis intersecting the first axis, the adsorption A robot apparatus comprising: a finger unit configured to be capable of gripping a workpiece attracted to a part.
A method of manufacturing an electronic device having a connection member, comprising:
Suctioning the connecting member by a suction unit having a suction unit attached to a base portion of the robot hand and movable in parallel in a first axial direction;
A finger unit having first and second finger portions that are independently pivotable about a pivot axis attached to the base portion and parallel to a second axis intersecting the first axis; Gripping the connection member adsorbed by the adsorption unit;
A method of manufacturing an electronic device, wherein a posture of the connection member is changed by rotating a finger unit holding the connection member around the rotation axis.