TWI765085B - Robot hand, robot device, and manufacturing method of electronic machine - Google Patents

Abstract

A robot hand according to one aspect of the present technology includes a hand body, a suction unit, and a finger unit. The above-mentioned hand body has a base. The suction unit is mounted on the base, and has a suction part that can move in parallel in the first axis direction. The finger unit is mounted on the base, and has first and second finger portions that can be independently rotated around a rotation axis parallel to a second axis intersecting the first axis.

Description

Robot hand, robot device, and method for manufacturing electronic machine

The present technology relates to, for example, a method of manufacturing a robot hand, a robotic device, and an electronic machine used in the manufacture of an electronic machine.

In recent years, robotic devices have been widely used in the manufacturing steps of electronic machines. In such a robot apparatus, as the workpiece holding mechanism of the robot hand, there are known an adsorption method having an adsorption pad capable of vacuum sucking a workpiece, and a clamping method having fingers capable of holding the workpiece.

The suction method of the robot hand is advantageous when picking up the workpiece placed on a flat surface, but when the suction force is weak, the workpiece may fall off from the suction pad in the middle of the movement or when the posture is changed. On the other hand, although the gripping robot hand obtains a relatively high holding force for directly holding the workpiece, when the workpiece is a belt-shaped member with a small thickness such as FFC, it cannot stably hold a planar placement the workpiece.

Therefore, there are known robot hands which have both a suction method and a gripping method. For example, in Patent Document 1, there is known a workpiece holding device including a suction pad capable of holding a workpiece by suction force, and a pair of holding claws that sandwich the workpiece held by the suction pad from both sides of the suction pad.

[Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2010-82748

In the holding device described in Patent Document 1, the pair of holding claws can move only by changing the interval. Therefore, when changing the posture of the workpiece held by the suction pad, it is necessary to change the posture of the entire robot hand, and it is difficult to change the posture of the workpiece in a limited space.

In view of the above situation, an object of the present technology is to provide a method for manufacturing a robot hand, a robot device, and an electronic device that can realize a series of actions from suction of a workpiece to posture change without changing the posture of the entire hand.

A robot hand according to one aspect of the present technology includes a hand body, a suction unit, and a finger unit.

The above-mentioned hand body has a base.

The suction unit is attached to the base, and has a suction part that can move in parallel in the first axis direction.

The finger unit is mounted on the base, and has first and second finger portions respectively independently rotatable around a rotation axis parallel to a second axis intersecting with the first axis.

In the above-mentioned robot hand, since the first and second fingers are independently rotatable around the rotation axis, the workpiece held by the suction unit can be converted into a posture that rotates at any angle around the rotation axis.

The hand body further has an articulation axis parallel to a third axis intersecting the first and second axes, respectively, and the base portion may be configured to be rotatable around the articulation axis.

Thereby, the suction unit and the finger unit can be rotated around the joint axis, and the finger unit can be rotated around the other axis of the rotation axis and the joint axis.

The said hand main body may further have the 1st and 2nd lead wire drive mechanism which makes the said 1st and 2nd finger part rotate about the said rotation axis, respectively.

The elasticity of the wires of each wire driving mechanism can be used to absorb the timing shift or position shift of the rotational motion of each finger, and more appropriately hold the workpiece.

The above-mentioned first and second lead wire driving mechanisms may also include lead wire tension adjustment units including detection mechanisms capable of detecting the lead wire tensions, respectively.

Thereby, the wire tension of each wire driving mechanism can be adjusted appropriately.

The hand body may further include a third wire driving mechanism for rotating the base around the joint axis.

Since the rotational driving source of the base can be constructed in the same way as the rotational driving source of the finger unit, the system can be simplified and the control affinity of each driving source can be improved.

Typically, the finger unit is configured to hold the workpiece sucked by the suction portion.

Thereby, a series of actions from the suction and holding of the workpiece to the posture change can be realized.

The first and second finger portions may have a movable range of 180 degrees, respectively.

Thereby, the front and back of the workpiece can be reversed by the finger unit.

The finger unit may be configured to be able to hold the workpiece sucked into the suction portion from the first axis direction.

Thereby, even if it is a thin workpiece with no thickness and flexibility, it can be properly held by the finger unit.

A robot device according to one aspect of the present technology includes a robot arm, a hand body, a suction unit, and a finger unit.

The hand body has a base and is attached to the robot arm.

The suction unit is attached to the base, and has a suction part that can move in parallel in the first axis direction.

The finger unit is mounted on the base, and has first and second finger portions respectively independently rotatable around a rotation axis parallel to a second axis intersecting with the first axis, and configured to hold and be adsorbed on the suction portion the workpiece.

A method of manufacturing an electronic device according to one aspect of the present technology is a method of manufacturing an electronic device having a connecting member, and the method includes a first The suction unit of the suction part that moves in parallel in the axial direction sucks the connecting member.

By means of a finger unit mounted on the base portion and having first and second finger portions respectively independently rotatable around a rotation axis parallel to the second axis intersecting the first axis, the finger unit that is adsorbed on the suction portion is held. The above-mentioned connecting member.

The posture of the connecting member is changed by rotating the finger unit holding the connecting member around the rotating shaft.

As described above, according to the present technology, without changing the posture of the entire hand, it is possible to realize a series of actions from the suction of the workpiece to the posture transition.

In addition, the effects described here are not intended to be limited, and any of the effects described in the present disclosure may be used.

1: Robotic device

2: Workbench

3: Controller

10: Hand body

11: Base

12: Institutional Department

13: Links

30: Adsorption unit

31: Adsorption nozzle

32: Drive cylinder

33: Fixed components

34: Connecting components

35: Guide member

40: Finger Unit

41: 1st finger

42: Second Finger

100: Assembly Robot

101: Hands

102: Multi-Articulated Arm

111: Rotary shaft

112: Joint axis

121: Large diameter part

122: Small diameter section

311: adsorption part

312: Connector

321: Drive rod

341: End 1

342: End 2

B: Abutment

C: Linear member

Ce: connecting part

D1~D3: 1st~3rd wire drive mechanism

E: electronic machine

G1: 1st guide pulley

G2: 2nd guide pulley

M: motor

Ma: body of revolution

P1, P3: pulley

R: wire support

R1: Unit 1

R2: Unit 2

r11, r12: Roller

W: wire

W1: wire

W2: Wire

W3: Wire

FIG. 1 is a schematic front view showing a robot apparatus according to an embodiment of the present technology.

FIG. 2 is a schematic perspective view showing the structure of the hand of the above-mentioned robot apparatus.

FIG. 3 is an enlarged view of the essential part of the above-mentioned hand.

Fig. 4 is a front view of the essential part of the above hand.

Fig. 5 is a left side view of the essential part of the hand.

Fig. 6 is a right side view of the essential part of the above hand.

FIG. 7 is a front view of an essential part showing the release state of the finger unit of the hand.

FIG. 8 is a bottom view of FIG. 7 .

FIG. 9 is a diagram showing the structure of the wire driving mechanism of the above-mentioned robot apparatus.

FIG. 10A is an explanatory diagram of the operation of the above-mentioned robot apparatus, and is a diagram showing a suction step of a workpiece.

FIG. 10B is an explanatory diagram of the operation of the above-mentioned robot apparatus, and is a diagram showing a suction step of a workpiece.

FIG. 10C is an explanatory diagram of the operation of the above-mentioned robot apparatus, and is a diagram showing a step of holding a workpiece.

FIG. 10D is an explanatory diagram of the operation of the above-mentioned robot apparatus, and is a diagram showing a step of changing the posture of the workpiece.

Hereinafter, embodiments of the present technology will be described with reference to the drawings.

FIG. 1 is a schematic front view showing a robot apparatus according to an embodiment of the present technology. In the present embodiment, an application example of the present technology to an assembly robot used in a manufacturing process of an electronic device will be described.

[Schematic configuration of the robot device]

The robot apparatus 1 of the present embodiment includes an assembly robot 100 , a workbench 2 that supports a semi-finished product of the electronic device E, and a controller 3 that controls the drive of the assembly robot 100 .

The assembly robot 100 has a hand 101 (robot hand) and a multi-joint arm 102 (robot arm) that can move the hand 101 to an arbitrary coordinate position with 6-axis degrees of freedom.

The hand 101 is constituted by a flexible linear or The belt-shaped connecting member C is held, and can be converted into a specific posture and assembled in a specific part of the electronic device E. As shown in FIG.

The multi-joint arm 102 is connected to the workbench 2 or a drive unit (not shown) disposed near the workbench 2 . The articulated arm 102 is configured as a conveying mechanism that moves the hand 101 or changes its posture. The articulated arm 102 is typically constituted by a vertical articulated arm, a horizontal articulated arm, or the like, but may also be constituted by an XYZ Cartesian coordinate robot (3-axis robot) or the like.

The controller 3 is typically composed of a computer having a CPU (Central Processing Unit) and a memory, and is configured to control the driving of the assembly robot 100 according to a program stored in the memory.

[Assembly Robot]

FIG. 2 is a schematic perspective view showing the structure of the hand 101 of the assembly robot 100 , and FIG. 3 is an enlarged view of an important part of the hand 101 .

As shown in the figure, the hand 101 includes a hand body 10 , a suction unit 30 and a finger unit 40 .

(hand body)

The hand body 10 has a base portion 11 , a mechanism portion 12 and a connection portion 13 .

The base 11 supports the adsorption unit 30 and the finger unit 40 . The base 11 has a direction parallel to the Y axis. The rotation axis 111 and the joint axis 112 parallel to the X-axis direction.

The mechanism portion 12 is formed in a multi-stage cylindrical shape having a large-diameter portion 121 and a small-diameter portion 122 . One end (upper end) of the large diameter portion 121 is attached to the multi-joint arm 102 , and the small diameter portion 122 is provided at the center of the other end (lower end) of the large diameter portion 121 . The mechanism portion 12 accommodates a drive source for rotating the finger unit around the rotation axis 111 , a drive source for rotating the base portion 11 around the joint axis 112 , a power transmission mechanism and an adjustment mechanism for these drive sources, and the like.

The connection part 13 connects between the base part 11 and the small diameter part 122 of the mechanism part 12 . The connection part 13 has a metal cylindrical part in the shape of a square cylinder, and the cylindrical part accommodates a power transmission member (driving lead wire) for transmitting the power of various driving sources of the mechanism part 12 to each part of the base part 11 .

FIG. 4 is a front view of the main part of the hand 101, FIG. 5 is a left side view of the same, FIG. 6 is a right side view of the same, FIG. 7 is a front view of the main part showing the release state of the finger unit 40, and FIG. . Hereinafter, the details of the suction unit 30 and the finger unit 40 will be described.

(adsorption unit)

The suction unit 30 of the present embodiment includes: a suction nozzle 31 having a suction part 311; a driving cylinder 32 for reciprocating the suction nozzle 31 in the Z-axis direction; and a fixing member 33 for connecting the suction nozzle 31 with the driving cylinder 32 and the connecting member 34, which connects the driving cylinder 32 and the base 11.

The suction nozzles 31 have suction portions 311 at one end portion (lower end portion) and suction portions 311 at the other end portion (upper end portion), respectively. part) has a connecting part 312 connected to a negative pressure source not shown. The above-mentioned negative pressure source is constituted by, for example, a small pump provided in the mechanism portion 12 .

The suction position of the suction part 311 to the connecting member C is not particularly limited, but in this embodiment, as shown in FIG. In addition, the suction position is not limited to the central area in the width direction of the connecting member C, and may be a position at the edge portion deviated from the widthwise center of the connecting member C to one side (the finger unit 40 side) as shown in FIG. 8 .

The driving cylinder 32 is fixed to the connecting member 34, and has a driving rod 321 that can extend and contract in the Z-axis direction. The fixing member 33 is configured to connect the suction nozzle 31 and the driving rod 321 to each other, and the suction nozzle 31 (the suction part 311 ) can be moved in parallel in the Z-axis direction by the driving of the driving rod 321 . Between the fixing member 33 and the connecting member 34, a guide member 35 that can move in parallel in the Z-axis direction is fixed, thereby ensuring the movement accuracy of the suction portion 311 along the Z-axis direction.

The connecting member 34 has a first end portion 341 that supports the drive cylinder 32 and a second end portion 342 that is fixed to the base portion 11 . The second end portion 342 is fixed between the rotating shaft 111 and the joint shaft 112 using appropriate fasteners such as screw members. Thereby, the suction unit 30 is configured to be rotatable about the joint shaft 112 together with the base 11 .

(finger unit)

The finger unit 40 has a first finger portion 41 and a second finger portion 42 . The first and second finger portions 41 and 42 are attached to the base portion 11 , and are configured to be independently rotatable around the rotational axis 111 .

The finger unit 40 is configured to hold the workpiece sucked by the suction part 311 . In the present embodiment, the finger unit 40 is configured to hold the connecting member C sucked to the suction portion from the thickness direction (Z-axis direction).

The first and second finger portions 41 and 42 are configured to be respectively independently rotatable between a holding position approaching each other and a releasing position separated from each other. The movable range (maximum rotation angle) of each of the finger portions 41 and 42 is not particularly limited, but is 180 degrees in this embodiment.

The finger unit 40 is arranged at a certain interval in the X-axis direction and the Y-axis direction of the suction unit 30 so as not to interfere with the suction unit 30 at the release position (refer to FIG. 7 ). The front end (lower end) of the finger unit 40 is set to be higher than the lowermost position of the suction part 311 on the upper side.

In the present embodiment, the first and second finger portions 41 and 42 are formed of suitable materials such as metal materials and synthetic resin materials. Each of the first and second finger portions 41 and 42 has a gripping surface having a width direction in the Y-axis direction, and is configured to grip the workpiece by the gripping surface.

The hand body 10 has first and second lead wire driving mechanisms D1 and D2 for respectively rotating the first and second finger portions 41 and 42 around the rotating shaft 111 . The hand body 10 further includes a third wire driving mechanism D3 for rotating the base 11 around the joint shaft 112 . The first to third lead wire driving mechanisms D1 to D3 are provided inside the mechanism portion 12 (large diameter portion 121 ) as shown in FIG. 1 .

The first to third lead wire driving mechanisms D1 to D3 have the same configuration, and as shown in FIG. 9 , include a motor M, a pulley P, and a lead wire W. As shown in FIG. At the front end of the rotating shaft of the motor M, a spiral formed on the peripheral surface is installed. The rotating body Ma of the groove. Between the peripheral surface of the rotating body Ma and the pulley P, which is a driving object, a metal wire W is spanned through the small-diameter portion 122 of the mechanism portion 12 and the inside of the connecting portion 13 . The motor M is constituted by, for example, a servo motor, and uses the lead wire W as a power transmission member to rotate the pulley P by a desired rotation amount (rotation angle) in a desired rotation direction.

As shown in FIGS. 5 and 6 , the pulley P1 of the first wire driving mechanism D1 is provided at the base end of the first finger portion 41 , and the first finger portion 41 can be wound through the wire W1 spanned on the pulley P1 . The moving shaft 111 rotates.

The pulley P2 of the second wire driving mechanism D2 is provided at the base end of the second finger portion 42 , and is configured so that the second finger portion 42 can be rotated around the rotating shaft 112 via the wire W2 spanned by the pulley P2 .

4, the pulley P3 of the third wire drive mechanism D3 is provided on the upper end of the base 11, and the base 11 is configured to rotate around the joint shaft 112 via the wire W3 spanned on the pulley P3.

By adopting the first to third wire drive mechanisms D1 to D3, the finger portions 41, 42 and the base portion 11 can be constituted by the same driving system, so that the system can be simplified and the control efficiency of each driving source can be improved. Affinity.

As shown in FIG. 4 , the wires W1 and W2 pass through the first guide pulley G1 which is adjacent to the pulley P3 and is inserted into the joint shaft 112 and a pair of second guide pulleys G2 provided between the rotation shaft 111 and the joint shaft 112 , They are respectively erected on the pulleys P1 and P2. As shown in FIG. 6, a pair of 2nd guide pulley G2 has the axial center parallel to the X-axis direction, and is provided adjacent to the Y-axis direction. Each of the second guide pulleys G2 is constituted by a two-row pulley group that independently supports the conducting wires W1 and W2 spanned by the pulleys P1 and P2.

The lead wire W1 is stretched over the pulley P1 via one of the pair of first guide pulleys G1 and the pair of second guide pulleys, which are disposed on the inner side of the pulley P3 at the center of the joint shaft 112 . The lead wire W2 is stretched over the pulley P2 via the other one of the pair of the first guide pulleys G1 and the pair of the second guide pulleys on the outside through the pair of the first guide pulleys G1 on the inside. As shown in FIGS. 5 and 6 , the pulleys P1 and P2 are arranged adjacent to each other in the axial direction (Y-axis direction) of the rotating shaft 111 .

By adopting a wire drive mechanism for the drive system of the finger unit 40, the power transmission mechanism can be simplified and space-saving. Furthermore, the elasticity of the wires W1 and W2 can be used to absorb the timing shift or the position shift of the rotational actions of the respective finger portions 41 and 42 .

The first to third wire driving mechanisms D1 to D3 have wire tension adjusting units, which include detection mechanisms that can detect the wire tension of each wire driving mechanism, respectively.

As shown in FIG. 9 , in each of the lead wire driving mechanisms D1 to D3, the motor M is installed on the base B via the load unit C. The load unit C constitutes a detection mechanism for detecting the tension of the wire W when the pulley P is rotationally driven by the motor M.

The structure of the lead wire tension adjustment unit is not particularly limited, but as shown in FIG. The lead wire supporter R includes a first unit R1 having a pair of rollers r11 and r12 on the upstream side and the downstream side of the lead wire W wound around the rotating body Ma of the motor M, respectively, and a second unit R2 having a common pair of rollers r11 and r12 The rollers r12 on the upstream side and the downstream side of the wire W are supported by the ground. The second unit R2 is configured to be uniaxial with respect to the first unit R1 relative movement.

The lead wire support portion R constructed as described above constitutes a lead wire tension adjustment unit capable of arbitrarily adjusting the tension of the lead wire W. FIG. The lead wire supporter R adjusts the tension of the lead wire W so that the lead wire tension becomes a specific value or range based on the output of the detection mechanism including the load cell C. The specific tension of the wires W (W1-W3) may be the same or different for the respective wire-driving mechanisms D1-D3.

[The action of the robot device]

Next, typical operations of the robot apparatus 100 and the hand 101 configured as described above will be described.

As described above, the robot apparatus 1 of the present embodiment holds one end side of the connecting member C such as the FFC by the hand 101, converts it into a specific posture, and performs the connecting operation to the specific part of the electronic device E. 10A-D are schematic diagrams illustrating a series of movements of the hand 101 accompanying the above-mentioned operation.

The robot apparatus 1 has a suction step of the connecting member C, a holding step of the connecting member C, and a posture conversion step of the connecting member C. Each operation of the robot apparatus 1 to be described later is controlled by the controller 3 .

In the suction step, after the robot device 1 stops the arm 101 at the directly upper position of the connecting member C, the suction portion 311 of the suction unit 30 is lowered downward to suction and hold the surface near the end of the connecting member C (refer to FIG. 8 , 10A). After the suction of the connecting member C, the arm portion 101 makes the suction portion 311 It ascends, and the connection member C is arrange|positioned at the side of the finger unit 40 (refer FIG. 10B).

The connection member C is typically placed on the upper surface of the electronic device W. As shown in FIG. The movement of the arm portion 101 to the directly upper position of the connecting member C may also use a camera. The camera can be installed on the arm 101 or on the multi-joint arm 102 .

In the holding step, the arm portion 101 is held by the finger unit 40 to hold the connecting member C (refer to FIG. 10C ) sucked by the suction portion 311 . In the illustrated example, the second finger portion 42 is rotated 180 degrees around the rotation axis 111 via the second lead wire driving mechanism D2 while the first finger portion 41 is in a standby state at a position facing the upper surface of the connecting member C. . Thereby, the connecting member C sucked by the suction part 311 is clamped in the Z-axis direction by the finger unit 40 .

After the holding step of the connecting member C by the finger unit 40 is completed, the suction action of the connecting member C by the suction unit 30 is released.

In the posture conversion step, the arm portion 101 converts the connection member C into a specific posture by rotating the finger unit 40 holding the connection member C around the rotation axis 111 . The posture after the conversion is not particularly limited, and typically, a posture suitable for the next step is adopted.

In the posture conversion step, the first and second finger portions 41 and 42 are respectively rotated around the rotation axis 111 synchronously. Thereby, the attitude|position of the connection member C can be changed, maintaining the holding state of the connection member C. The arm portion 101 not only rotates the finger unit 40 around the rotation axis 111 , but also rotates around the joint axis 112 . Thereby, the freedom degree of the posture of the connection member C is improved.

After the posture transition step of the connection member C is completed, the arm portion 101 conveys and connects the connection portion Ce (see FIG. 8 ) of the connection member C to a specific assembly position on the electronic device W. As shown in FIG.

As described above, according to the present embodiment, a series of operations from the suction holding of the workpiece to the posture change can be realized. In particular, even a workpiece (connecting member C) with no thickness like FFC can be properly picked up by the suction operation of the suction unit 30 . Furthermore, since the workpiece adsorbed by the suction unit 30 can be held by the finger unit 40 , the holding force of the workpiece is improved, and the posture change operation of the workpiece can also be performed stably.

According to the present embodiment, since the first and second finger portions 41 and 42 are configured to be independently rotatable around the rotating shaft 111, respectively, the workpiece (connecting member C) held by the suction unit 30 can be stably converted into a rotating The posture in which the moving shaft 111 rotates at any angle. This makes it possible to convert the workpiece held by the suction unit 30 into another posture without changing the posture of the entire hand 101 . Therefore, the space required for changing the posture of the workpiece can be reduced, so that the transfer of the workpiece to the narrow area is facilitated.

Furthermore, since the wire driving mechanisms D1 and D2 are used for the driving sources of the first and second finger portions 41 and 42, the elasticity of the wires can be used to absorb the timing shift or positional shift of the rotational motion of each finger portion 41 and 42. shift. For example, when the workpiece is held by the two fingers 41 and 42, even if the target positions (holding positions) of the two are set to slightly overlapped positions, the overlapping portions can be absorbed by the elasticity of the wires W1 and W2. Thereby, the workpiece can be stably held with a specific holding force.

In addition, due to the tension detection and adjustment mechanism of the wires W1 and W2, the finger unit The maintenance of 40 is easier, and the tension setting corresponding to the type of workpiece can be quickly performed.

Although the embodiment of the present technology has been described above, the present technology is not limited to the above-described embodiment, and various modifications can of course be added.

For example, in the above embodiment, as the workpiece, a linear or belt-shaped connecting member C having flexibility like FFC has been described. However, the type of workpiece is not limited to this. This technology can also be applied to the processing of other components without thickness such as strips. Furthermore, the present technology can be applied not only to industrial robots, but also to home robots, medical robots, and the like.

In the adsorption unit 30, the adsorption part 311 can be moved in parallel by driving the adsorption nozzle 31 to move up and down by the driving cylinder 32, but the adsorption nozzle 31 itself may have a retractable adsorption part.

Furthermore, based on the wire tension detected by the wire tension detection mechanism, the adjustment unit may be dynamically controlled so that the tension of each wire becomes a specific value. In this way, the wire tension can be adjusted in real time.

In addition, this technique can also employ|adopt the following structures.

(1) A robot hand comprising: a hand body having a base; a suction unit mounted on the base and having a suction part capable of parallel movement in a first axis direction; and The finger unit, which is mounted on the base, has first and second finger portions respectively independently rotatable around a rotation axis parallel to a second axis intersecting with the first axis.

(2) The robot hand according to the above (1), wherein the hand body further has a joint axis which is parallel to a third axis that intersects the first and second axes respectively, and the base is configured to be able to surround the joint axis swirl.

(3) The robot hand according to the above (1) or (2), wherein the hand body further has a first and a second wire driving mechanism, which make the first and second finger parts rotate around the rotation axis, respectively verb: move.

(4) The robot hand according to the above (3), wherein the first and second wire driving mechanisms have wire tension adjusting units including detection mechanisms capable of detecting wire tensions, respectively.

(5) The robot hand according to any one of (2) to (4) above, wherein the hand body further has a third wire drive mechanism that rotates the base around the joint axis.

(6) The robot hand according to any one of (1) to (5) above, wherein the finger unit is configured to hold the workpiece adsorbed on the adsorption portion.

(7) The robot hand according to any one of (1) to (6) above, wherein the first and second finger portions respectively have a movable range of 180 degrees.

(8) The robot hand according to the above (7), wherein the finger unit is configured to be able to hold the workpiece sucked to the suction portion from the first axis direction.

(9) A robotic device comprising: a robot arm; a hand body, which has a base part and is attached to the robot arm; a suction unit, which is attached to the base part and has a suction part that can move in parallel in the first axis direction; and a finger unit which is attached to the base part and has The first and second finger portions that can be independently rotated around a rotation axis parallel to the second axis intersecting the first axis.

(10) A method of manufacturing an electronic device, wherein the electronic device is provided with a connecting member, and the manufacturing method comprises, by means of a suction unit mounted on a base of a robot hand and having a suction part that can move in parallel in the first axis direction, suction The above-mentioned connecting member is held and sucked by a finger unit mounted on the above-mentioned base portion and having first and second finger portions respectively independently rotatable around a rotational axis parallel to a second axis intersecting the above-mentioned first axis. The said connection member of the said adsorption|suction part changes the attitude|position of the said connection member by rotating the finger unit holding the said connection member about the said rotation axis.

10‧‧‧Hand body

11‧‧‧Base

13‧‧‧Connections

30‧‧‧Adsorption unit

31‧‧‧Adsorption nozzle

32‧‧‧Drive cylinder

33‧‧‧Fixing components

34‧‧‧Connecting components

35‧‧‧Guiding member

40‧‧‧Finger unit

41‧‧‧First Finger

42‧‧‧Second Finger

111‧‧‧Rotating shaft

112‧‧‧Joint shaft

321‧‧‧Drive lever

341‧‧‧End 1

342‧‧‧End 2

Claims (9)

A robot hand, comprising: a hand body, which includes a base; an adsorption unit, which is mounted on the base and includes an adsorption part that can move in parallel in a first axis direction; and a finger unit, which is mounted on the base and includes a The first and second fingers rotate independently around a rotation axis parallel to the second axis intersecting the first axis; and the first and second fingers respectively have a movable range of 180 degrees. The robot hand of claim 1, wherein the hand body further includes a joint axis parallel to a third axis intersecting the first and second axes respectively, and the base is configured to be rotatable around the joint axis. The robot hand according to claim 1, wherein the hand body further comprises first and second wire driving mechanisms, which respectively rotate the first and second finger parts around the rotation axis. The robot hand of claim 3, wherein the first and second wire driving mechanisms include wire tension adjustment units, and the wire tension adjustment units include detection mechanisms capable of detecting the wire tensions, respectively. The robot hand of claim 2, wherein the hand body further includes a third wire driving mechanism for rotating the base around the joint axis. The robot hand according to claim 1, wherein the finger unit is configured to hold the workpiece adsorbed on the adsorption portion. The robot hand of claim 1, wherein the finger unit is configured to hold the workpiece sucked to the suction portion from the first axis direction. A robot device comprising: a robot arm; a hand body including a base and mounted on the robot arm; an adsorption unit mounted on the base and including an adsorption part that can move in parallel in a first axis direction; and a finger unit , which is installed on the above-mentioned base, and includes the first and second finger parts that can be independently rotated around a rotation axis parallel to the second axis that intersects the above-mentioned first axis; and the above-mentioned first and second finger parts are respectively Has a 180-degree range of motion. A manufacturing method of an electronic machine, the electronic machine includes a connecting member, the manufacturing method includes a suction device that can be moved in parallel in a first axis direction by being mounted on a base of a robot hand The adsorption unit of the attached part is used for adsorbing the connecting member, by being mounted on the base part and comprising a rotation axis parallel to the second axis intersecting the first axis, the first and second fingers respectively independently rotating The finger unit of the portion holds the connecting member sucked to the suction portion, and the posture of the connecting member is changed by rotating the finger unit holding the connecting member around the rotation axis.

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