JP4674308B2 - Exercise device and chip mounter using the same - Google Patents

Description

  The present invention relates to an exercise device used for conveying articles and the like, and a chip mounter using the exercise device.

2. Description of the Related Art A variety of exercise devices used in a transfer device that transfers articles and the like, an automatic robot that performs various operations, or a machine tool has a movement function with one or more degrees of freedom according to its purpose. For example, Patent Document 1 discloses a six-degree-of-freedom motion device capable of three-axis translational motion and three-axis rotational motion (see Patent Document 1).
Further, Patent Document 2 describes a bonding head that is used for transferring semiconductor pellets in the manufacture of a semiconductor device and capable of translational movement in the three axial directions of the X, Y, and Z axes (Patent). Reference 2).
Japanese Patent Laid-Open No. 7-96900 Japanese Patent No. 2541083

It is preferable that the above-described various exercise devices are capable of high-speed operation because the speed of operation can be set in a wide range and the applications are expanded. In particular, when various types of exercise devices are used for manufacturing articles, the higher the speed of the operation, the higher the productivity. Therefore, the speed of the operation is always required. For example, in the case of a chip mounter that performs a process (die bonding process) that picks up a die cut from a wafer and fixes it on a lead frame in the previous process of the semiconductor manufacturing process, the cycle time of the process is the productivity of the semiconductor. There is a strong demand for something that can be further speeded up. As a method for speeding up the movement, it is conceivable to increase the output of a driving means such as a motor, but there is a limit to the motor output, and there is a problem that the motor becomes large. Furthermore, it is preferable that the degree of freedom of movement is high because the application range of the exercise device is widened. In addition, it is preferable that not only speeding up the operation but also improving the operation accuracy can be an exercise device that can be used for highly accurate work.
This time, the present inventor has found an exercise device that has a high acceleration performance and can generate a motion with a plurality of degrees of freedom by a mechanism completely different from the conventional one, and can improve the operation accuracy, and has reached the present invention.
That is, an object of the present invention is to provide an exercise device that can increase the acceleration of movement, obtain movement with a plurality of degrees of freedom, and further improve the operation accuracy, and a chip mounter using the exercise apparatus.

Inventions exercise device of the present invention has the following first, second exercise device. The first motion device is driven by two first linear actuators each having a first main driving portion driven so as to reciprocate and translate along a first axis, and by the driving force of the two first main driving portions. A single first follower, a first restricting means for restricting a motion generated in the first follower by the follow to a uniaxial translational motion and a uniaxial rotational motion in the same direction; and the uniaxial translational motion. while allowing a uniaxial rotational movement and comprises said two respective said two first engaging portion and a first follower engages at different locations on the first driven portion of the first main drive unit . The second motion device includes two second linear actuators each having a second main driving portion driven so as to reciprocate and translate along a second axis, and a single driven by the driving force of the two second main driving portions. A second follower, a second restricting means for restricting a motion generated in the second follower by the follow to a uniaxial translational motion and a uniaxial rotational motion along the second axis, and the uniaxial translational motion And two second engaging portions that engage each of the two second driven portions and the second driven portion at different positions on the second driven portion, while allowing uniaxial rotational movement. .

Each of the first and second exercise devices can obtain a two-degree-of-freedom movement by effectively utilizing the movements of the two actuators. In addition, since the single driven unit is driven by two main driving units driven by separate actuators, the driving force of the two main driving units concentrates on the driving of the single driven unit, and the movement of the driven unit Can be accelerated. Since the engaging part allows the movement of the driven part in two degrees of freedom, the movement of the driven part is not hindered and the mechanism is damaged even when a deviation occurs between the operations of the two linear actuators. Generation of internal force can be avoided. Further, since the movement of the driven portion is restricted by the restriction means, the control accuracy of the driven portion is increased as compared with the parallel mechanism or the like, and the control calculation and the control program can be simplified. And, by accelerating both of the two main moving parts, it is possible to improve the acceleration of the translational movement of the driven part, and to make the exercise apparatus particularly useful in applications where high acceleration of the translational movement is required. it can. Further, since the two engaging portions are engaged at different positions on the driven portion, a rotational moment can be generated in the driven portion, and the driven portion can be rotated as well as translated. As a result, a translational motion with one degree of freedom and a rotational motion with one degree of freedom having high acceleration can be obtained.
Furthermore, in addition to the above operations, the first and second exercise devices can also obtain the following operations and effects , respectively . That is, since the translational motions of the two main driving parts are parallel to each other and the translational motion of the driven part is restricted to the uniaxial translational motion in the same direction, the acceleration of the translational motion in the same direction can be further improved. it can. In addition, it is easy to simplify the structure of the device itself, contributing to downsizing, weight reduction, cost reduction, etc., and the operation of the driven part and the geometric correlation between the driven part and the driven part are further simplified. Control calculations and control programs can be further simplified.

The first was mutually parallel two main drive units described above, the motion device of the present invention having a second movement equipment further single coupled with both of the first driven portion and the second follower A first tip connecting portion that connects the first driven portion and the tip portion in a state that allows the tip portion to move along with the translational motion of the second driven portion along the second axis. A second tip connecting portion that connects the second driven portion and the tip portion in a state that allows the tip portion to move along with the translation of the first driven portion along the first axis. It is characterized by that.

In this case, have use the first, second exercise device described above, by connecting these with a single tip, it can be biaxially translation the tip at high speed. Moreover, the 1st driven part and the 2nd driven part are connected with the front-end | tip part in the state which accept | permits a mutual translation motion. If there is no such permissible state, for example, when the translational motion along the first axis is performed by the first exercise device, it is necessary to translate the tip portion in the first axis direction together with the second exercise device. However, in the present invention, since there is no such inconvenience, the tip portion can be translated biaxially with high acceleration.

Oite above exercise equipment having a tip capable of biaxial translation, a first rotation transmitting mechanism for transmitting the rotational movement of the first driven portion to the distal end portion, the rotational movement of the second follower Along the first axis and the second axis, either the second rotation transmission mechanism that transmits the rotation to the tip portion, or the rotation provided at the tip portion and transmitted by the first or second rotation transmission mechanism. A first conversion mechanism that converts the movement to a movement of a third degree of freedom other than translational movement, and rotation transmitted from the first or second rotation transmission mechanism provided at the distal end portion to the first axis. And a second conversion mechanism that converts the movement into a movement with a fourth degree of freedom other than the movement with the translation along the second axis and the movement with the third degree of freedom.

  In this case, the tip portion can be moved with four degrees of freedom by utilizing the high-speed rotational motion obtained from the first exercise device and the second exercise device, respectively. That is, the tip portion can obtain the third and fourth degrees of freedom with high acceleration in addition to the translational motion along the first axis and the second axis.

In the above apparatus, each of the first driven portion and the second driven portion includes a rotating body, and the first and second rotation transmission mechanisms include a rotating body provided at the distal end portion and the driven portion. It is good also as a structure which is a belt-shaped member wound between the rotary bodies.
If it does in this way, the said 1st and 2nd rotation transmission mechanism can be obtained with a simple mechanism, and it contributes to simplification of an apparatus, size reduction, weight reduction, and cost reduction.

The present invention related to a chip mounter using the above apparatus is a chip mounter used in a semiconductor manufacturing process, and an adsorption collet for adsorbing a die cut from a wafer is attached to the tip of the exercise device. In addition, the first axis and the second axis are orthogonal to each other, and the first or second tip connecting portion has a posture maintaining mechanism that maintains a constant posture of the tip portion. To do.
If it does in this way, the translational motion which has the high acceleration property along the 1st axis | shaft and 2nd axis | shaft mentioned above can be utilized as main operation | movement of a chip mounter, and the cycle time of die bonding can be shortened.

  In the chip mounter, the suction collet is translated along a third axis perpendicular to the first axis and the second axis by the movement of the third degree of freedom, and the suction collet is moved by the movement of the fourth degree of freedom. It is preferable that the collet has a rotationally moving structure. In this way, it is possible to finely adjust the position and orientation of the die when the suction collet fixes the die on the lead frame by effectively utilizing the four-degree-of-freedom motion of the device.

In the first and second motion devices described above, the first and second linear actuators include a first ball screw and a second ball screw arranged in parallel with each other, and the first and second ball screws, respectively. A plurality of drive motors that are separately attached to each of the first and second ball screws, and a main movement portion that is attached to the first ball screw and translates by the shaft rotation of the first ball screw ; A first ball screw nut, and a second ball screw nut as the main moving portion, which is attached to the second ball screw and translates by axial rotation of the second ball screw . the second engagement portion, respectively, the first, a first rod connecting the first ball screw nut and the first position in the second follower, wherein the first, second in the second follower A second rod which connects the a location second ball screw nut, and wherein the first, second regulating means, respectively, said first and second follower rotatably supported by characterized in that it comprises a first, a translational movement of the second follower is axially guided in the same direction of the first and second ball screw guide member, associated with the driven.

In this case, a ball screw as a linear actuator comprising a main moving parts, the ball screw nut, and because using the driving motor, can be and smoothly motion follower only accurately controls the rotation of the drive motor. In addition, since the driving force of a plurality of driving motors is used to move one follower, the movement can be accelerated at a high speed. In addition, since the rod is used as the engaging portion that engages the main driving portion and the driven portion, the translational motion and the rotational motion of the driven portion can be controlled with high accuracy while having a simple structure. Furthermore, the guide member that rotatably supports the driven part and guides the translational movement thereof can restrict the translational movement in a certain direction while allowing the rotational movement of the driven part, thereby further improving the movement accuracy. Can do.

  By driving a single driven part with a plurality of linear actuators and providing a regulating means for regulating the movement of the driven part, the movement of the driven part can be increased at a high acceleration, and translational and rotational movements can be achieved. Can be obtained with high accuracy.

Embodiments of the present invention will be described below with reference to the drawings. First, the invention of the above-described exercise apparatus and chip mounter according to the present invention will be described based on specific examples, and subsequently, a reference example including the present invention and the invention of the chip mounter will be described.
FIG. 1 is an overall perspective view showing a schematic configuration of a chip mounter t according to an embodiment of the present invention, FIG. 2 and FIG. 4 are side views thereof, and FIG. 3 is a top view thereof.
In each drawing of the present application, the X axis, the Y axis, and the Z axis, which are three-dimensional orthogonal coordinate systems, are appropriately added as reference axes for easy understanding, and these reference axes are also described in the following description. This will be described as appropriate.

  This chip mounter t is configured as a four-degree-of-freedom exercise device by using two two-degree-of-freedom exercise devices having one degree of translation and one degree of rotation. FIG. 5 shows a simplified structure of the 4-DOF exercise device. Of the two two-degree-of-freedom exercise devices, the first exercise device 1 is arranged so as to be able to generate a translational movement along the first axis (Y-axis), and the second exercise device 2 is the first exercise device 2. It arrange | positions so that the translational motion along two axes (Z-axis) can be produced | generated. Each of the motion devices 1 and 2 is connected to a single (common) tip portion 3, and the tip portion 3 translates in the Y-axis direction and the Z-axis direction as the motion devices 1 and 2 translate. can do. A vacuum suction collet 4 for sucking a die cut from the wafer is attached to the tip portion 3, and the vacuum suction collet 4 moves in the Y-axis direction and the Z-axis direction as the tip portion 3 moves. Can translate. Note that an air suction mechanism (not shown) is attached to the front end (lower end) of the vacuum suction collet 4 so that the die can be sucked.

Although the first exercise device 1 and the second exercise device 2 have some differences, the basic configuration is similar. First, the first exercise device 1 will be described.
The first exercise device 1 has two linear actuators 5 that are linear (linear motion) drive systems as actuators. The two linear actuators 5 have the same specifications. Each linear actuator 5 includes a ball screw 6, a ball screw nut 7 as a main moving portion screwed to the ball screw 6, and a drive motor 8 that rotationally drives the ball screw nut 7 through a coupling 10.
The first exercise device 1 and the second exercise device 2 are fixed to a base portion (not shown).

  Although the linear actuator used in the present invention is not particularly limited, it is preferable to use a ball screw mechanism like the linear actuator 5 in that high-speed and high-precision linear driving can be easily obtained. In addition to the servo motor such as an AC servo motor, various motors capable of rotation control such as a stepping motor can be used as the drive motor 8, but control accuracy, high torque, maintainability, long-term use resistance, low An AC servo motor is preferably used because it is easy to use a general-purpose controller or driver in addition to loss characteristics. As a specific example of this AC servo motor, for example, HC-MFS43 of MR-J2S series manufactured by Mitsubishi Electric Corporation can be exemplified.

  FIG. 6 is a perspective view in which the vicinity of two ball screw nuts 7 in the first exercise device 1 is partially extracted and described. The axial centers of the two ball screws 6 in the first exercise device 1 are arranged in parallel to each other in the same plane (the same YZ plane). However, from the relationship of arrangement at the reference position, the two linear actuators 5 are arranged with different positions in the axial direction (Y-axis direction) (details of this point will be described later).

  The two ball screw nuts 7 in the first exercise device 1 are pulleys 9 (in FIG. 6) which are disk-like members as rotating bodies provided in a single driven portion driven by the driving force of the ball screw nut 7. Engaged). The first position in the pulley 9 and the ball screw nut (first ball screw nut) 7 are connected by a rod 11 (first rod), and the second position in the pulley 9 and the ball screw nut (second ball screw nut). ) 7 is connected by another rod 11 (second rod). Specifically, the engaging portion that engages the pulley 9 and the ball screw nut 7 is configured by a rod 11 that is a rod-like member being pivotally attached to each of the pulley 9 and the ball screw nut 7. Has been.

On the pulley 9, the axis attachment position 9 a with the first rod 11 and the axis attachment position 9 b with the second rod 11 are different from each other (see FIG. 6). Specifically, the two shaft attachment positions 9a and 9b are arranged at the same radial position of the disk-shaped pulley 9 and at different positions from each other by 180 degrees.
Further, as shown in FIG. 6, the first motion device 1 has the same translational movement direction of the pulley 9 as the driven portion generated by following the translational motion of the ball screw nut 7 as the translational movement direction of the ball screw nut 7. As a restricting means for restricting to a single axis translational movement, the pulley 9 is rotatably supported at its center position 9c, and the translational movement of the pulley 9 is guided (regulated in the same direction as the axial direction of the ball screw 6 (that is, the Y axis direction)). The slide guide 12 is provided as a guide member. Further, the rotational movement of the pulley 9 is restricted to a uniaxial rotational movement at the center of the shaft attachment by a pivotable attachment structure at the center position 9c.
Since the rod 11 is rotatably engaged with the pulley 9 and the ball screw nut 7, the rotational movement of the pulley 9 is allowed. Further, the slide guide 12 also supports the pulley 9 so that the pulley 9 can rotate.

As described above, the pulley 9 engaged with the ball screw nut 7 as the main driving portion is driven as follows with the translational motion of the ball screw nut 7. FIG. 7 is a schematic diagram for explaining this follow-up, in which the pulley 9 is indicated by a simple circle, and the translation direction 57 of the ball screw nut 7 by the rod 11 and the linear actuator 5 is indicated by a simple straight line.
From the initial state shown in FIG. 7A, when the two ball screw nuts 7 are translated by a distance d1 in the same direction (right direction in FIG. 7) as shown in FIG. 7B, this is followed. The pulley 9 also translates by a distance d1 in the same direction. At this time, the pulley 9 performs only a translational motion and no rotational motion occurs. Further, from the initial state shown in FIG. 7A, when the two ball screw nuts 7 are translated in the opposite direction by the distance d2 as shown in FIG. 7C, the pulley 9 is driven by the angle θ1. Only rotational movement. At this time, the pulley 9 performs only a rotational movement, and no translational movement occurs. As described above, the translational motion and the rotational motion of the pulley 9 can be controlled with high accuracy only by controlling the translational motion of the ball screw nut 7 in the two linear actuators 5.

  In the front view shown in FIG. 7, the center position 9 c of the pulley 9 is located at the center of the interval between the two ball screw nut translational directions 57. In other words, the locus straight line at the center position 9 c due to the translational movement of the pulley 9 is at the same distance from the two locus straight lines 57 due to the translational movement of the two linear actuators 5. The engagement relationship between the first ball screw nut 7 and the pulley 9 and the engagement relationship between the second ball screw nut 7 and the pulley 9 are equivalent in the circumferential direction of the pulley 9. That is, in the initial state shown in FIG. 7A, the engagement angle between the first linear actuator 5 and the pulley 9 (both the rod 11 engages with the ball screw nut 7 and the pulley 9 in the front view of the pulley 9). The angle α1 between the straight line connecting the engagement points and the translational movement straight line 57 of the linear actuator 5 and the engagement angle α2 between the second linear actuator 5 and the pulley 9 are the same (α1 = α2). . This relationship (α1 = α2) is obtained when the ball screw nut 7 of the linear actuator 5 is translated by the same distance d1 in the same direction as shown in FIG. 7B, or as shown in FIG. 7C. It is also maintained when moving in the opposite direction by the same distance d2. This has the advantage that the calculation of the motion of the linear actuator 5 for controlling the motion of the pulley 9 is simplified.

  In the initial state as shown in FIG. 7A, the ball screw nut 7 in the first linear actuator 5 and the ball screw nut 7 in the second linear actuator 5 are different in the Y-axis direction position. Then, by arranging the first linear actuator 5 and the second linear actuator 5 in different positions in the Y-axis direction corresponding to the difference distance, the same translational movement stroke is ensured between the two linear actuators 5. In addition, the first exercise device 1 is downsized by suppressing unnecessary translational strokes.

  When the ball screw nut 7 of the first linear actuator 5 and the ball screw nut 7 of the second linear actuator 5 are translated in the same direction or in opposite directions at different speeds, the pulley 9 is translated. Although it will rotate at the same time, you may make such a movement.

In addition to the above configuration, the first exercise device 1 includes a first tip connecting portion 15 that connects the pulley 9 and the tip portion 3. The first tip connecting portion 15 has one end of a rod-like connecting rod 16 pivotally attached to the pulley 9 and its center position 9c, and the other end of the connecting rod 16 is rotatable to the tip 3. It is constituted by being attached to the shaft. By this connecting rod 16, the distal end portion 3 is driven along with the translational movement of the pulley 9.
Further, a belt-like member 17 is stretched between a shaft body 3a as a rotating body provided at the tip 3 and the pulley 9, and the rotational motion of the pulley 9 is transmitted to the shaft body 3a. That is, the pulley 9, the shaft body 3a, and the belt-like member 17 constitute a first rotation transmission mechanism.

Next, the second exercise device 2 will be described.
Since the basic configuration of the second exercise device 2 is the same as that of the first exercise device 1, the description of the same portion will be omitted below, and the same reference numerals as those of the first exercise device 1 will be given in the drawings.

  The second exercise device 2 has a second tip connecting portion 20 that is connected to the pulley 9 and the tip portion 3, but the second tip connecting portion 20 is different from the first tip connecting portion 15 described above, A posture maintaining mechanism 21 that maintains the posture of the distal end portion 3 constant is provided. Specifically, the second tip connecting portion 20 includes the first connecting rod 25 that is pivotally supported at the center position 9c of the pulley 9 and the predetermined position 3b of the tip portion 3 (see FIG. 5). Have two connecting rods (second connecting rod 26 and third connecting rod 27). One end of the second connecting rod 26 is pivotally attached to the center position 9 c of the pulley 9 like the first connecting rod 25, and the other end is rotatable to one end of the third connecting rod 27. It is attached to the shaft. Further, as described above, one end portion of the third connecting rod 27 is pivotally attached to the other end portion of the second connecting rod 26, and the other end portion is at a predetermined position 3c (see FIG. 5) in the tip portion 3. It is pivotally attached to the shaft. The predetermined position 3c is a position different from the above-described predetermined position 3b. Since the shaft portion z1 (see FIG. 5) for pivotally attaching the second connecting rod 26 and the third connecting rod 27 is not engaged with the pulley 9, the shaft portion z1 is interlocked with the rotational movement of the pulley 9. Will not move. On the other hand, since the first connecting rod 25 is pivotally attached to the pulley 9 at the center position 9c of the pulley 9 as described above, when the pulley 9 moves in translation, the distal end portion 3 is interlocked with this. Move.

The second connecting rod 26 is provided with a horizontal maintaining mechanism (not shown), and the horizontal maintaining mechanism maintains the horizontal state of the second connecting rod 26 regardless of the translational and rotational motion of the pulley 9. As the horizontal maintenance mechanism, for example, the following mechanism (A) or (B) can be considered.
(A) The second connecting rod 26 is fitted in a slide guide provided along the translational movement direction (Z-axis direction) of the pulley 9, and the second connecting rod 26 cannot rotate in the Z-axis direction. Move the slide.
(B) D-cut only at both ends of the shaft portion z2 (see FIG. 5) on which the second connecting rod 26 and the pulley 9 are pivoted, and engage the D-cut portion at one end with the second connecting rod 26. The D-cut portion at the other end is made non-rotatable and fitted into a slide groove (not shown) extending in the Z-axis direction separately provided on the base portion or the like so as not to rotate. The portion z2 is configured to be slidable in the Z-axis direction in a state where the shaft cannot be rotated. Further, a circular cross-section portion (a portion that is not D-cut) of the shaft portion z2 provided between the D cut portions at both ends is passed through the first connecting rod 25 and the pulley 9, and the pulley 9 and the first connecting rod 25 are passed through. Is rotatable with respect to the shaft portion z2.

  By the above-described horizontal maintenance mechanism, the second connecting rod 26 is always maintained in a horizontal state (a state parallel to the Y axis) regardless of the translational motion and the rotational motion of the pulley 9. And since the space | interval of each of the both ends of this 2nd connecting rod 26 and the two places 3b and 3c on the front-end | tip part 3 is always maintained constant by the 1st connecting rod 25 and the 3rd connecting rod 27, the front-end | tip The part 3 is also always maintained in a constant posture (horizontal posture) regardless of the movement of the pulley 9. Therefore, the vacuum suction collet 4 attached to the tip portion 3 is not tilted by the movement of the tip portion 3.

  The rotation of the pulley 9 of the second exercise device 2 is transmitted to the shaft body 3d as a rotating body provided at the tip 3 by the belt-like member 17. That is, the pulley 9, the shaft body 3d, and the belt-like member 17 constitute a second rotation transmission mechanism. The shaft body 3d is separate from the above-described shaft body 3a (see FIG. 5).

  As described above, by connecting the first exercise device 1 and the second exercise device 2 to the tip portion 3, the tip portion 3 can be translated in two directions, the Z-axis direction and the Y-axis direction. it can.

Here, the biaxial translational motion of the distal end portion 3 by the first exercise device 1 and the second exercise device 2 will be described in more detail.
The first tip connection portion 15 of the first exercise device 1 allows the movement of the tip portion 3 along with the translational motion of the pulley 9 of the second exercise device 2 along the Z axis in the first exercise device 1. The pulley 9 and the tip 3 are connected. That is, since the connecting rod 16 constituting the first tip connecting portion 15 is pivotally attached to the pulley 9 and the tip portion 3 at both ends thereof, the tip portion is obtained by turning both the shaft attaching portions. 3 is allowed to translate in the Z-axis direction (see the phantom line in FIG. 5). Similarly, the second tip connecting portion 20 of the second exercise device 2 also allows the second tip connection portion 20 to move along the Y axis in accordance with the translational movement of the pulley 9 of the first exercise device 1. The pulley 9 and the tip 3 of the exercise device 2 are connected.

  In addition, since both the 1st exercise device 1 and the 2nd exercise device 2 are connected with the front-end | tip part 3, when the front-end | tip part 3 carries out a translational movement, the 1st exercise device 1 and the 2nd Both of the exercise devices 2 are affected. For example, when the pulley 9 is translated without moving the pulley 9 of the first exercise device 1, the tip 3 moves linearly in the Z-axis direction in conjunction with the pulley 9 of the second exercise device 2. The first movement apparatus 1 is restrained by the connecting rod 16 and moves along a circle centering on the center position 9c of the pulley 9 of the first movement apparatus 1. Therefore, when it is desired to move the tip 3 in the Z-axis direction, it is necessary to simultaneously translate the pulley 9 of the first exercise device 1 and the pulley 9 of the second exercise device 2 (2 in FIG. 5). (See dotted line). Thus, when it is desired to move the distal end portion 3 in the Z-axis direction or the Y-axis direction, it is necessary to generate a translational motion simultaneously in both the first motion device 1 and the second motion device 2, The motion control of the distal end portion 3 including such control is performed by the control unit 30 (FIG. 5) that can control the rotation of all the drive motors 8 included in the first exercise device 1 and the second exercise device 2 in a unified manner. See).

In addition, when the front-end | tip part 3 is translated and moved to a Z-axis direction as shown to the dashed-two dotted line of FIG. 5 from the initial state as shown in FIGS. The rod 16 cannot maintain the horizontal alignment state and is inclined. Similarly, when the distal end portion 3 is translated in the Y-axis direction, the first connecting rod 25 and the third connecting rod 27 tilt without being able to maintain the vertical orientation state. Even in such a case, the posture (horizontal posture) of the distal end portion 3 is maintained by the posture maintaining mechanism 21 described above.
In the first exercise device 1, the distance between the pulley 9 and the shaft body 3 a is maintained by the connecting rod 16, so that the stretched state of the belt-like member 17 is always maintained regardless of the movement of the tip 3. . Similarly, in the second exercise device 2, the distance between the pulley 9 and the shaft body 3 d is maintained by the first connecting rod 25, so that the belt-like member 17 is always stretched regardless of the movement of the tip 3. Maintained.

  Since the chip mounter t as described above can translate the vacuum suction collet 4 attached to the tip 3 in the Y-axis direction and the Z-axis direction with high acceleration and high accuracy, the semiconductor as shown in FIG. It can be used for die bonding in the manufacturing process. In die bonding, the operation of repeatedly picking up the die 36 formed by cutting the wafer 35 by picking it up at the tip of the vacuum suction collet 4 and fixing it to the lead frame 37 is repeated, so that the vacuum suction collet 4 is moved in the Y-axis direction and Z-axis direction. Are reciprocally translated at high speed (see double arrows in FIG. 8). Therefore, the cycle time can be shortened by the chip mounter t described above. As shown in the frame of FIG. 8, when the vacuum suction collet 4 sucks the die 36, it translates directly above the die 36 and then descends to a position where it comes into contact with the die 36. The die 36 pushed up by the suction is sucked up and pulled up.

Next, the tip part 3 will be described in detail.
9 and 10 are perspective views showing the internal configuration of the distal end portion 3. Although the mechanism part of the front-end | tip part 3 is accommodated in the box-shaped housing 39, the inside of the housing 39 is also shown as a continuous line so that it may be easy to see in FIG.9 and FIG.10.
In the distal end portion 3, the axial rotation (rotational motion around the X axis) of the shaft body 3 a transmitted by the rotation transmission mechanism (first rotation transmission mechanism) of the first exercise device 1 described above along the X axis. Axial rotation (rotational motion about the X axis) of the shaft body 3d transmitted by the first conversion mechanism 40 that converts to translational motion and the rotation transmission mechanism (second rotation transmission mechanism) of the second exercise device 2 described above. And a second conversion mechanism 41 that converts the rotation into a rotational motion around the Z axis.

  First, the first conversion mechanism 40 is a mechanism using a ball screw. That is, the shaft body 3a is a ball screw, and when the shaft body 3a rotatably supported by the housing 39 rotates, the ball screw nut 44 screwed into the shaft body 3a translates in the X-axis direction, Further, the head slider 45 attached integrally with the ball screw nut 44 also translates in the X-axis direction together with the ball screw nut 44.

  The head slider 45 includes the ball screw nut 44 described above, a tip output portion 42 that protrudes downward from the bottom surface of the housing 39 and has a vacuum suction collet 4 attached to the lower end thereof, and a second conversion mechanism 41 that will be described in detail later. And a portion excluding the shaft body 3d. In other words, the head slider 45 includes most of the tip portion 3 excluding the housing 39 and the shaft bodies 3a and 3d. FIG. 13 is a diagram for explaining the configuration of the second conversion mechanism 41 described later, and also shows most of the configuration of the head slider 45. Two rails 43 laid in the X-axis direction are provided on the bottom surface of the housing 39, and the entire head slider 45 slides on the rails 43 and translates along with the translational motion of the shaft 3d described above. . Thereby, the vacuum suction collet 4 attached to the tip output part 42 translates in the X-axis direction.

11 and 12 are cross-sectional views (cross-sectional views taken along a plane including the axes of the shaft body 3a and the shaft body 3d) showing the state of translation of the head slider 45. FIG. When the shaft body 3a is rotated from the initial state of FIG. 11, the ball screw nut 44 and the head slider 45 are translated in the X-axis direction (upward in the drawing) (see the white arrow in FIG. 12).
As a relatively small ball screw used in the first conversion mechanism 40, for example, a precision miniature ball screw MRB0810 manufactured by KSS Corporation can be adopted.

Next, the second conversion mechanism 41 will be described.
In the second conversion mechanism 41, the shaft rotation of the shaft body 3d (rotation around the X axis) is converted into the shaft rotation (rotation around the Z axis) of the tip output portion 42 by the shaft body 3d ball spline and the wire pulley.
First, a mechanism for converting rotation around the X axis into rotation around the Z axis will be described. As shown in FIG. 13, a support body 38 that supports each member of the head slider 45 is provided in the head slider 45 described above. And, on this support 38, a first pulley 46 that rotates around the X axis by the rotation of the shaft 3d, a second pulley 47 that is coaxially integrated with the tip output portion 42 and is rotatable around the Z axis, A wire 48 wound around the first pulley 46 and the second pulley 47 and a rotatable rotating body 49 that changes the extending direction of the wire 48 by 90 degrees are attached. Then, the rotation of the first pulley 46 (rotation about the X axis) is converted into the rotation of the second pulley 47 (rotation about the Z axis) by the wire 48.
In addition to the wire pulley mechanism, a bevel gear or the like can be used as a mechanism for converting the rotation axis. However, considering the occurrence of backlash, the wire pulley mechanism is preferable to the bevel gear.

The second conversion mechanism 41 uses a ball spline 50 in addition to the rotation axis conversion mechanism described above. This will be described below.
The shaft body 3 d that transmits the rotation to the first pulley 46 is supported by the housing 39 of the distal end portion 3 so that the shaft body 3 d can rotate freely. However, the shaft body 3 d does not translate with the head slider 45. Therefore, when the head slider 45 translates in the X-axis direction along with the shaft rotation of the shaft body 3a, the entire rotary shaft conversion mechanism such as the first pulley 46 moves relative to the shaft body 3d in the X-axis direction. It becomes. The ball spline 50 is used to allow this relative movement, that is, to transmit the shaft rotation of the shaft body 3d to the first pulley 46 regardless of the relative position of the head slider 45. The ball spline 50 includes the shaft body 3d formed of a spline shaft, and a sleeve 51 that can transmit the torque of the shaft body 3d while allowing axial movement on the shaft body 3d. One pulley 46 is coaxially rotated together. Therefore, regardless of the relative position between the shaft body 3 d and the first pulley 46, the shaft rotation of the shaft body 3 d is transmitted to the first pulley 46 via the sleeve 51.
As a specific example of the ball spline 50, for example, LSAGF6 manufactured by Nippon Thomson Co., Ltd. can be cited.

  With the configuration as described above, the vacuum suction collet 4 attached to the tip output portion 42 of the tip portion 3 can translate in the X-axis direction and can also rotate (axially rotate). Therefore, in the chip mounter t, when the die 36 is fixed to the lead frame 37 in the die bonding step shown in FIG. 8, the direction of the die 36 and the position in the X-axis direction can be finely adjusted.

In the exercise devices 1 and 2 of the above embodiment, a link mechanism via a rod such as the rod 11 is used as an engaging portion that engages the pulley 9 as the driven portion and the two linear actuators 5 (the ball screw nut 7). Although adopted, an engagement portion comprising another mechanism is also possible.
14-17 is the schematic which shows the modification of this engaging part.

FIG. 14 employs a rack and pinion mechanism as the engaging portion. That is, the engaging portion 60 shown in FIG. 14 is parallel to the slide guide 12 and the pinion 61 as a driven portion that is rotatably supported by the slide guide 12 while the translation direction is restricted in the axial direction of the slide guide 12. An elastic spring having two racks 62 sandwiched between both sides of the pinion 61 and meshing with the pinion 61; and an elastic spring 63 for pressing the rack 62 toward the pinion 61 to maintain the meshing state. A rack 62 and a main driving portion 64 of a linear actuator (not shown) are connected via 63. Backlash can be suppressed by the elastic spring 63. In this embodiment, the posture of the rack 62 is maintained by providing two (or a plurality of) elastic springs 63 per rack 62. When the rack 62 is supported only by the elastic springs 63, it is difficult to maintain the attitude of the rack 62. Therefore, it is preferable to provide a separate attitude maintaining mechanism (not shown) for the rack 62. Also with the engaging portion 60, the translational motion and the rotational motion of the pinion 61 can be generated from the translational motion of the main driving portion 64, similarly to the motion devices 1 and 2 described above.
FIG. 15 shows a modification in which two identical pinions 61 are provided. As described above, when a plurality of pinions 61 are used, there is an advantage that the parallelism between the two racks 62 and the posture of each rack 62 can be maintained. In this case, since the plurality of pinions 61 are used, the parallelism between the two racks 62 and the posture of each rack 62 are maintained. Therefore, as in the embodiment of FIG. There is no need to provide two (or more) elastic springs 63 for one rack 62. That is, as shown in FIG. 15A, only one elastic spring 63 may be provided per rack 62.
In FIG. 16, one of the elastic springs 63 has a hinge structure 65. In this case, there is an advantage that the displacement of the relative position between the rack 62 and the main moving portion 64 can be suppressed.
As described above, the rack and pinion mechanism can be used as the engaging portion in the present invention. However, from the viewpoints of backlash generation, control accuracy (stop position accuracy), weight reduction, and the like, a link mechanism via a rod as in the above-described embodiment is preferable.

  The engagement portion 70 shown in FIG. 16 is based on a friction drive system, and a disc-like member 71 as a driven portion that is rotatably supported by the slide guide 12 while the translational direction is restricted in the axial direction of the slide guide 12. The pinion disk-like member 71 is sandwiched with a predetermined pressure and has two main driving portions 72 that are reciprocally translated in a direction parallel to the slide guide 12 by a linear actuator (not shown). The main driving portion 72 is driven by friction between the outer peripheral surface 71a of the disk-like member 71 and the contact surface 72a of the main driving portion 72 that contacts the outer peripheral surface 71a. In this case, backlash is eliminated unless slipping occurs, and the friction coefficient of the contact surface can be increased by surface processing of the contact surface, paint, or the like.

  The engaging part 80 shown in FIG. 17 is based on a belt drive system. The engaging portion 80 has two disc-shaped members 81 as the driven portion that are rotatably supported by the slide guide 12 while the translational direction is restricted in the axial direction of the slide guide 12 and two pieces having the same length. Steel belts 82 and 83 are provided. The first main driving portion 84 and the second main driving portion 85 are reciprocally translated in the same axial direction by two linear actuators (not shown). One end of each of the steel belts 82 and 83 is fixed to the first main driving portion 84, and the other end is fixed to the second main driving portion 85. The first steel belt 82 is wound around the disk-shaped member 81 from one side of the disk-shaped member 81, and the second steel belt 83 is wound around the disk-shaped member 81 from the other side of the disk-shaped member 81. It has been. And the fixing position of the both ends of each steel belt 82 and 83 is set to the positional relationship where both the steel belts 82 and 83 are stretched together. Even in such a configuration, the translational motion of the disk-like member 81 by the translational motions of the first main driving portion 84 and the second main driving portion 85 is the same as the above-described exercise devices 1 and 2 and the modified examples of FIGS. And rotational motion is generated. The engagement portion of the present invention may be a mechanism using such a steel belt. However, from the viewpoint of deterioration of the stop position accuracy due to the elongation of the steel belt due to the inertial force during acceleration / deceleration, the link via the rod described above. A mechanism is preferred. However, from the viewpoint that it is easy to reduce the backlash compared to the link mechanism using the rod as described above, and it is easy to reduce the backlash compared to the rack and pinion mechanism described above, a mechanism using a steel belt is used. preferable. In particular, when the inertial force during acceleration / deceleration is not so much of a problem, the advantage of the mechanism using the steel belt relative to the link mechanism via the rod is relatively increased. The mechanism used is preferred.

The exercise device and the chip mounter described above are only one embodiment of the present invention, and the present invention is not limited to such a form.
A reference example will be described below.

FIG. 18 is a schematic diagram for explaining the operation principle of the exercise device D1 as a reference example . The exercise device D1 includes a first main driving portion S1 that is driven to move with a first degree of freedom by a first actuator (not shown), and a second free movement by a second actuator (not shown). Second driven part S2 driven so as to make a certain degree of movement, a single driven part J driven by the driving force of each of the driven parts S1, S2, and the movement generated in the driven part J by the driven Restricting means (not shown) for restricting the movement to the two degrees of freedom allowed by the movement of the first main moving part S1 and the second main moving part S2, and the two degrees of freedom movement restricted by the restricting means A first engagement portion k1 and a second engagement portion k2 (two engagement portions k1, 2) that engage the first driven portion S1 and the second driven portion S2 with the driven portion J while allowing them. k2).

  In the exercise device D1, the movements of the first main driving portion S1 and the second main driving portion S2 are both linear translational motions (linear motion). Then, the movement of the driven portion J is performed by the above-mentioned restricting means by a translational motion x (translational motion of one degree of freedom) along the driven portion translational direction Jh and a rotational motion θ (one degree of freedom of freedom) around the center c of the driven portion J. Rotational motion). In addition, the two engaging portions k1 and k2 engage the driven portion J with each of the first main driving portion S1 and the second main driving portion S2 at different positions T1 and T3 on the driven portion J. .

  The first main driving part S1 is driven to translate along the first translation direction S1h (indicated by a two-dot chain line), and the second main driving part S2 is driven in the second translation direction S2h (indicated by a two-dot chain line). ) To translate along. As the restricting means for restricting the motion of the driven portion J to the translational motion and the rotational motion, a structure such as the slide guide 12 used in the first motion device 1 described above can be exemplified. Specific examples of the first main driving portion S1 and the second main driving portion S2 include a ball screw nut 7 driven by the linear actuator 5 as described above, and the first engaging portion k1 and the second main driving portion S2. As a specific example of the engaging portion k2, a link mechanism using the rod 11 or the like described above can be given.

In the first exercise device 1 and the second exercise device 2 described, the translation directions (the first translation direction S1h and the second translation direction S2h) of the two main moving portions are parallel, but in the exercise device D1, the first translation device 1 and the second exercise device 2 are parallel. The translation direction S1h and the second translation direction S2h are not parallel (that is, the angle A1 formed by the driven portion translation direction Jh and the first translation direction S1h, and the angle formed by the driven portion translation direction Jh and the second translation direction S2h). A2 is not the same). Further, the first translation direction S1h or the second translation direction S2h and the driven portion translation direction Jh are not parallel (that is, the angle A1 is not 0 and the angle A2 is not 0) .

In the reference example , the movement of the main driving part and the movement of the driven part are not particularly limited. For example, in the case of an exercise apparatus having two main driving parts driven by an actuator, the first main driving part may be a translational movement and the second main driving part may be a rotary movement, and the first and second main driving parts may be either May also rotate. Similarly, in the case of an exercise device having three main driving parts, the three main driving parts may be configured to translate, or any two of the three may be translated and one may be rotated. In addition, any two of the three may rotate and one may translate, and the three main driving portions may also rotate.

  Further, for the driven part J, for example, in the case of an exercise device provided with two main driven parts driven by an actuator, the movement of the driven part J restricted by the restricting means is the movement of the first degree of freedom. Is a rotational motion, and the motion of the second degree of freedom may be a translational motion, the motion of the first and second degrees of freedom may be a rotational motion, The second degree of freedom motion may be a translational motion. Similarly, in the case of an exercise device having three main driving parts, the three-degree-of-freedom movement of the driven part J regulated by the regulating means may be a rotational movement in all three degrees of freedom or a translational movement in all three degrees of freedom. Of the three degrees of freedom, one degree of freedom may be a rotational movement and two degrees of freedom may be a translational movement, or one of the three degrees of freedom may be a translational movement and two degrees of freedom may be a rotational movement.

Further, when the main driving unit and the driven unit perform translational motion, the translational motion is not limited to uniaxial translational motion (linear motion), and may be translational motion that moves along a curve.
In addition, if the movement of at least one degree of freedom of the movement of the driven part J is a translational movement, it can be suitably applied to an exercise apparatus including a translational movement, which is an exercise apparatus that often requires a high acceleration. Is preferable.

  An example in which both the first and second main driving parts rotate is an exercise device D2 shown in FIG. In this case, a first main driving portion R1 that is rotationally driven by a first actuator (motor or the like) (not shown) to rotate about the rotation center cr1 and a second actuator (motor) that is also not shown. Etc.) is engaged with the driven portion J by the second main driving portion R2 that is rotationally driven so as to perform the rotational motion r2 about the rotation center cr2. The mode of movement restriction to the driven portion J by a restriction means (not shown) is the same as that of the exercise device D1, and is a uniaxial translational motion x in the driven portion translational direction Jh and a rotational motion θ around the center point c. As the structure of the first engaging portion k1 and the second engaging portion k2, the same as the above-described exercise device D1 or the first exercise device 1 (link mechanism using a rod) can be adopted.

An example of an exercise device having three main moving parts is shown in FIG.
The exercise device D3 shown in the figure has a first main driving portion S1 that is driven to move with a first degree of freedom by a first actuator (not shown), and a second actuator (not shown). A second main driving portion S2 driven to move with two degrees of freedom and a third main driving portion S3 driven to move with a third degree of freedom by a third actuator (not shown). And a single driven part J driven by the driving force of the first to third main driving parts S1, S2 and S3, and a motion generated in the driven part J by the driving, the first to third main driving parts Restricting means ks for restricting the movement with three degrees of freedom allowed by the movements of S1, S2, S3, and the first to third main driving portions S1 while allowing the movement with three degrees of freedom restricted by the restricting means ks. , S2, S3 and the follower J are engaged with each other. And a engaging portion k1, k2, k3. Although not shown in the drawing, as the engaging portions k1, k2, and k3, as in the above-described exercise device D1, for example, there are rotating portions at both ends of the rod, and the rotating portion at one end of the rod is the driven portion J. It is possible to adopt a configuration in which the rotating part on the other end side is connected to the main moving parts S1 to S3. However, particularly in the case of the exercise device D3, a rotation device that allows three-dimensional rotation such as a ball joint is preferably used for the engagement positions T1, T2, T3, T4, T5, and T6.

  In the exercise device D3, the follower J is translated by the restricting means ks in the follower translation direction Jh (translation in the X, Y, and Z axes in the X, Y, and Z axes in the three-dimensional orthogonal coordinate system of FIG. 20) x. The movement is restricted to a total of three degrees of freedom of the rotational movement θy about the Y axis and the rotational movement θz about the Z axis in the three-dimensional orthogonal coordinate system. In order to enable such regulation, the universal joint U is used in the regulation means ks. That is, of the two rotation axes allowed by the universal joint U, the first rotation axis U1 is oriented in the Y-axis direction, and the second rotation axis U2 is oriented in the Z-axis direction. I am letting. As a result, the movement of the driven part J is restricted to the rotational movements θy and θz having the two degrees of freedom. And by restricting one end side via this universal joint U with the linear guide LG, the translational motion of the driven part J is controlled to the driven part translational direction Jh. Then, at three positions T1, T3, and T5 on the member bz attached to the other end via the universal joint U, the driven portion J and S1, S2, and S3 are engaged with each other.

  In the exercise device D3, the first main driving unit S1, the second main driving unit S2, and the third main driving unit S3 are all driven in translation. The first translation direction S1h of the first main driving part S1, the second translation direction S2h of the second main driving part S2, and the third translation direction S3h of the third main driving part S3 are not parallel to each other. Also, the relationship between the translation directions S1h to S3h and the driven portion translation direction Jh is not parallel to each other. In the exercise apparatus of the present invention, as described above, the translational directions of the main driving parts or the relation between the translational directions 1h to S3h of the main driving part and the driven part translational direction Jh may or may not be parallel. Good. Further, in the present invention, the first main driving part S1, the second main driving part S2, and the third main driving part S3 are not limited to being all driven in translation, and as described above, a part of these three main driving parts. Or all may be rotationally driven.

  The restricting means in the present invention restricts the motion generated in the driven portion to a motion with a degree of freedom allowed by the motion of all the main moving portions (two or three). This point will be described. . FIGS. 21 and 22 are diagrams for explaining this, but in each of the drawings, only one main driving portion S1 and one engaging portion k1 engaged with the main driving portion S1 are described, and the driven portion J is engaged. The description of other main moving parts and other engaging parts is omitted. First, the premise items will be described with reference to FIG.

  As shown by the first main driving portion S1 in FIG. 18, the driving force vector x1 generated in the first main driving portion S1 by a linear actuator (not shown) is transmitted to the driven portion J through the first engagement portion k1. The Of the orthogonal components obtained by disassembling the driving force vector x1 acting on the driven portion J from the position T1 on the driven portion J, the ineffective component z1 that cancels the restraining force of the restricting means that restricts the movement of the driven portion J is driven. The translational direction or rotational motion is generated in the driven portion J by the active component y1 which does not contribute to the motion of the portion J (translational motion and rotational motion) but does not cancel out the restraining force of the regulating means that regulates the motion of the driven portion J. The If the two (or three) main driving parts are regulating means that can generate such an active ingredient y1 in the driven part, in the present invention, “the two movements generated in the driven part (or It corresponds to the “regulatory means for restricting the movement to the degree of freedom allowed by the movement of the three main driving parts”. In other words, it may be a restricting means configured so that at least a part of the driving force of each main driving portion effectively acts on the movement of the driven portion.

As shown in FIG. 21, all of the driving force (vector x1) transmitted from the first main driving portion S1 to the driven portion J via the first engaging portion k1 regulates the movement of the driven portion J. In a state (hereinafter also referred to as a singular state) that cancels with the restraining force of the restricting means, the driving force from the first main driving portion S1 does not contribute to the movement of the driven portion J at all. However, due to the inertia of the motion of the driven portion J and the driving force from another main driving portion (not shown) (second main driving portion S2 in FIG. 18), the driven portion J performs some motion (translational motion or rotational motion). If it does, the said singular state will be avoided, the follower part J will be in the state which can obtain an effective drive force from all the main drive parts, and the follower part J can move with the drive force from a main drive part. The state shown in FIG. 22 is also the above-described singular state. In this case, however, the follower J is subject to some motion (the follower translational direction) due to the inertia of the motion of the follower J or the driving force from another not shown main drive. If the translational movement in the Jh direction or the rotational movement around the center c of the driven part J) is performed, the singular state is avoided, and the driven part J can obtain an effective driving force from all the driven parts. Therefore, an exercise apparatus including such a singular state is also included in the present invention.
However, in the case of an exercising device in which all the main driving parts engaged with the driven part J can simultaneously take the state of the singular state (hereinafter also referred to as a simultaneous singular state), Although the simultaneous singular state can be avoided, if the driven part J is stationary in the simultaneous singular state, it is not preferable in the present invention because the driven part J cannot be moved even if the driven part is driven. .

1 is an overall perspective view showing a schematic configuration of a chip mounter according to an embodiment of the present invention. It is a front view of the chip mounter of FIG. It is the top view which looked at the chip mounter of FIG. 1 from upper direction. It is a side view of the chip mounter of FIG. It is a figure which shows the outline of the mechanism of the exercise device used for the chip mounter of FIG. It is the perspective view which extracted the vicinity part of a pulley. It is the schematic for demonstrating the translational motion and rotational motion of a pulley. It is a figure for demonstrating a die-bonding process. It is an expansion perspective view of a front-end | tip part. FIG. 10 is an enlarged perspective view of a tip portion viewed from a direction different from FIG. 9. It is sectional drawing of the front-end | tip part in an initial state. FIG. 12 is a cross-sectional view of the tip portion in a state where the head slider has moved in the X-axis direction from the state of FIG. 11. It is a figure which shows the substantially whole head slider. It is a figure which shows the modification of an engaging part. It is a figure which shows the other modification of an engaging part. It is a figure which shows the other modification of an engaging part. It is a figure which shows the other modification of an engaging part. It is the schematic of the exercise device which shows a reference example . It is the schematic of the exercise device which shows a reference example . It is the schematic of the exercise device which shows a reference example . It is a figure for demonstrating a singular state. It is a figure for demonstrating a singular state.

Explanation of symbols

t Chip Mounter 1 First Exercise Device 2 Second Exercise Device 3 Tip 3a Shaft (Rotary Body Provided at the Tip)
3d shaft body (rotary body provided at the tip)
4 Vacuum adsorption collet (adsorption collet)
5 Linear actuator 6 Ball screw (first ball screw, second ball screw)
7 Ball screw nut (Main moving part: 1st ball screw nut, 2nd ball screw nut)
8 Drive motor 9 Pulley (Rotating body)
11 Rod (first rod, second rod)
12 Slide guide (guide member)
DESCRIPTION OF SYMBOLS 15 1st front-end | tip connection part 17 Belt-shaped member 20 2nd front-end | tip connection part 21 Posture maintenance mechanism 40 1st conversion mechanism 41 2nd conversion mechanism 60,70,80 Engagement part S1 1st main drive part S2 2nd main drive part S2 3rd main drive part ks control means k1 1st engaging part (engaging part)
k2 Second engagement portion (engagement portion)

Claims (6)

Two first linear actuators each having a first main driving part driven so as to reciprocate along the first axis, a single first driven part driven by the driving force of the two first main driving parts, A first restricting means for restricting a motion generated in the first driven portion by the driven to a uniaxial translational motion and a uniaxial rotational motion along the first axis; and permitting the uniaxial translational motion and the uniaxial rotational motion. However, a first exercise device including two first engagement portions that engage each of the two first driven portions and the first driven portion at different positions on the first driven portion; ,
Two second linear actuators each having a second main driving portion driven to reciprocate along the second axis, a single second driven portion driven by the driving force of the two second main driving portions, Second restriction means for restricting movement generated in the second driven portion by the driven to uniaxial translational movement and uniaxial rotational movement along the second axis, and allowing the uniaxial translational movement and uniaxial rotational movement. However, a second exercise device including two second engagement portions that engage each of the two second driven portions and the second driven portion at different positions on the second driven portion, and ,
A single tip connected to both the first follower and the second follower;
A first tip coupling portion that couples the first driven portion and the tip portion in a state that allows movement of the tip portion accompanying translational motion of the second driven portion along the second axis;
A second tip coupling portion that couples the second driven portion and the tip portion in a state that allows movement of the tip portion accompanying translational motion of the first driven portion along the first axis;
An exercise apparatus comprising: A first rotation transmission mechanism for transmitting the rotational movement of the first follower to the tip;
A second rotation transmission mechanism for transmitting the rotational movement of the second driven portion to the tip portion;
One of the rotations provided at the tip and transmitted by the first and second rotation transmission mechanisms is converted into a motion with a third degree of freedom other than a translational motion along the first axis and the second axis. A first conversion mechanism;
Any of the rotations provided at the tip and transmitted by the first and second rotation transmission mechanisms, except for the translational motion along the first axis and the second axis and the motion of the third degree of freedom. A second conversion mechanism that converts the motion to a fourth degree of freedom motion;
Exercise device of claim 1, further comprising a. Each of the first driven part and the second driven part has a rotating body,
The said 1st and 2nd rotation transmission mechanism is a belt-shaped member wound between the rotary body provided in the said front-end | tip part, and the rotary body of the said follower part, The Claim 2 characterized by the above-mentioned. The exercise device described . The first and second linear actuators are respectively
A first ball screw and a second ball screw arranged in parallel to each other;
A plurality of drive motors attached separately to each of the first and second ball screws and rotating the first and second ball screws;
A first ball screw nut as the main driving part, which is attached to the first ball screw and translates by axial rotation of the first ball screw;
A second ball screw nut as the main moving part, which is attached to the second ball screw and translates by axial rotation of the second ball screw;
With
The first and second engaging portions are respectively
A first rod connecting the first position of the first and second driven parts and the first ball screw nut;
A second rod connecting the second position of the first and second driven parts and the second ball screw nut;
With
The first and second regulating means are respectively
A guide member that rotatably supports the first and second driven portions and guides the translational motion of the first and second driven portions accompanying the follow in the same direction as the axial direction of the first and second ball screws. ,
Exercise device according to any one of claims 1-3, characterized in that it comprises a. A chip mounter used in a semiconductor manufacturing process,
An adsorption collet for adsorbing a die cut from the wafer is attached to the tip of the exercise device according to any one of claims 2 to 4,
The first axis and the second axis are orthogonal to each other,
The chip mounter according to claim 1, wherein the first or second tip connecting portion includes a posture maintaining mechanism for maintaining a constant posture of the tip portion. The suction collet is translated along a third axis perpendicular to the first axis and the second axis by the movement of the third degree of freedom;
The chip mounter according to claim 5, wherein the suction collet is rotationally moved by the movement of the fourth degree of freedom.

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