CN103413773B - A kind of full-automatic loading and unloading manipulator of silicon chip and control method of motion trace thereof - Google Patents

Abstract

The invention discloses the full-automatic loading and unloading manipulator of a kind of silicon chip and control method of motion trace thereof, for completing the full-automatic loading and unloading of silicon chip in multichannel chain type texturing, chain type cleaning and agglomerating plant.Manipulator of the present invention comprise mounting seat, shoulder joint, large arm, forearm, for silicon chip being grabbed the paw on multichannel solar battery sheet process equipment, by Electric Machine Control large arm, little arm swing, accurately controlled by the movement locus of Parametric designing and PID control realization manipulator.The invention solves chain type texturing, chain type is cleaned and agglomerating plant loading and unloading system takes up room greatly, mechanism is complicated, flexibility ratio is low, low-response, production cost are high, and silicon chip surface wearing and tearing are large and conversion efficiency is low, the problem that fragment rate is high.

Description

A kind of full-automatic loading and unloading manipulator of silicon chip and control method of motion trace thereof

Technical field

The present invention relates to photovoltaic apparatus field, particularly the full-automatic loading and unloading manipulator of a kind of silicon chip and control method of motion trace thereof, for the full-automatic loading and unloading of silicon chip in chain type texturing, chain type cleaning and agglomerating plant.

Background technology

The loading and unloading method of the multichannel solar battery sheet process equipments such as the cleaning of chain type texturing, chain type and agglomerating plant has been come by belt transport mostly, this equipment occupation space is large, mechanism is complicated, flexibility ratio is low, low-response, production cost are high, and it is large to the wearing and tearing of silicon chip surface in transmitting procedure, the conversion efficiency of solar cell is reduced, and cause a large amount of fragments, add production cost.

Summary of the invention

Technical problem to be solved by this invention is, not enough for prior art, the full-automatic loading and unloading manipulator of a kind of silicon chip and control method of motion trace thereof are provided, solve chain type texturing, chain type is cleaned and agglomerating plant loading and unloading system takes up room greatly, mechanism is complicated, flexibility ratio is low, low-response, production cost are high, and silicon chip surface wearing and tearing are large and conversion efficiency is low, the problem that fragment rate is high, meet the full-automatic loading and unloading of feeding, discharge platform in chain type texturing, chain type cleaning and agglomerating plant, for the full-automation of silicon wafer production line lays the first stone.

For solving the problems of the technologies described above, the technical solution adopted in the present invention is: the full-automatic loading and unloading manipulator of a kind of silicon chip, comprise mounting seat, shoulder joint, large arm, forearm, for silicon chip being grabbed the paw on multichannel solar battery sheet process equipment, described large arm is connected by elbow joint with forearm, described forearm is connected by wrist joint with paw, , described shoulder joint is arranged in described mounting seat, described shoulder joint is provided with motor mount, be provided with in described motor mount and drive its servomotor rotated around oneself motor axle relative to described mounting seat, the first dual-axle motor driving described large arm to rotate around oneself motor axle relative to described motor mount is also installed in described motor mount, described forearm is provided with the second dual-axle motor driving described forearm to rotate around oneself motor axle relative to described large arm, described forearm internal fixtion has horizontal air cylinder, the piston rod of described horizontal air cylinder is connected with contiguous block, and described horizontal air cylinder piston rod promotes described contiguous block around the axis of rotation be arranged in wrist joint, described paw is fixed with vertical cylinder near described carpal one end, described contiguous block is fixed with for generation of compressed-air actuated vacuum generator assembly, and described vacuum generator assembly is communicated with by the cylinder body of flexible pipe with described vertical cylinder piston upper end, described vertical cylinder block upper end is fixedly connected with described contiguous block, the piston rod of described vertical cylinder connects a sucker and divides gas to arrange, described sucker divides gas row to be fixed on sucker mounting panel, described sucker mounting panel is fixed with several for drawing the sucker of silicon chip, described sucker divides gas to arrange by soft air pipe and described sucker and is connected, described servomotor, the first dual-axle motor, the second dual-axle motor are all connected with PC.

The full-automatic loading and unloading manipulator control method of motion trace of silicon chip is:

1) priming stroke of horizontal air cylinder piston rod, large arm lengths, forearm lengths is established to be respectively S, d ₁and d ₂, silicon chip is crawled to be respectively to large arm during multichannel solar battery sheet process equipment the n-th passage and the projected length of forearm in XOZ plane with

2) directly over the silicon chip establishing original position paw to be positioned at need to capture, and paw and horizontal plane, the actual range between original position mounting seat and silicon box is l ₀, then

$\left\{\begin{array}{c}{l}_{1_0}+l_{2_0}=l_0\\ {\mathrm{\α}}_0=\arccos \left(l_{1_0}/d_1\right)\\ {\mathrm{\β}}_0=\arccos \left(l_{2_0}/d_2\right)\\ {\mathrm{sin\α}}_0={\mathrm{sin\β}}_0=d_2/d_1\end{array}\right.,$

α is tried to achieve according to above-mentioned equation group ₀and β ₀, then d ₀=S/cos β ₀, wherein be respectively original position large arm and forearm projected length in the plane, α ₀for the angle of original position large arm and horizontal plane, β ₀for the angle of original position forearm and horizontal plane, d ₀for the stroke of horizontal air cylinder piston rod when manipulator is in original position;

3) silicon chip crawled to multichannel solar battery sheet process equipment the n-th passage time, the distance of positional distance mounting seat that multichannel solar battery sheet process equipment loading and unloading platform n-th passage places silicon chip is l _n:

$\left\{\begin{array}{c}{\mathrm{\α}}_n=\arccos \left(l_{1_n}/d_1\right)\\ {\mathrm{\β}}_n=\arccos \left(l_{2_n}/d_2\right)\\ l_n=l_{1_n}+l_{2_n}\\ {\mathrm{sin\α}}_n={\mathrm{sin\β}}_n=d_2/d_1\end{array}\right.,$

Silicon chip is tried to achieve crawled to large arm during multichannel solar battery sheet process equipment the n-th passage and the angle α of horizontal plane according to above-mentioned equation group _n, forearm and horizontal plane angle β _n, then d _n=S/cos β _n, d _nfor the crawled stroke to horizontal air cylinder piston rod during multichannel solar battery sheet process equipment the n-th passage of silicon chip;

4) set the actual range of original position multichannel solar battery sheet process equipment loading and unloading platform and silicon chip as u, then silicon chip is crawled to the rotational angle of servomotor during multichannel solar battery sheet process equipment the n-th passage is

5), after establishing silicon chip to capture, the actual range that multichannel solar battery sheet process equipment loading and unloading platform n-th passage places the positional distance mounting seat of silicon chip is y _n, then biased error e _ncomputing formula be: | e _n(k) |=| l _n(k)-y _n(k) |, wherein e _nk biased error that () captures for kth time, l _nk () has captured the distance of the positional distance mounting seat of rear multichannel solar battery sheet process equipment loading and unloading platform n-th passage placement silicon chip for kth time, y _nk () has captured the actual range of the positional distance mounting seat of rear multichannel solar battery sheet process equipment loading and unloading platform n-th passage placement silicon chip for kth time;

6) PID controller is utilized to calculate the secondary displacement components u (k) having captured rear paw of kth:

$u\left(k\right)=k_{p}e\left(k\right)+k_i{\∫}_0^{k}e\left(\mathrm{\τ}\right)d\mathrm{\τ}+k_d\frac{de\left(k\right)}{dk},$

Wherein, k _pfor PID controller proportionality coefficient, k _ifor PID controller proportionality coefficient, k _dfor PID controller proportionality coefficient;

7) if | e _n(k) |≤e _nm, then make | e _n(k) |=e _nm, jump to 9); Otherwise, enter 8); Wherein e _nmfor the systematic error of multichannel solar battery sheet process equipment loading and unloading platform n-th passage;

8) if | e _n(k) |>=e ₀, enter 9); Otherwise, jump to 10); Wherein e ₀for the admissible error of multichannel solar battery sheet process equipment;

9) if u _n(k-1)=u _n(k), y _n(k-1)=y _n(k), e _n(k-2)=e _n(k-1) set up simultaneously, then start grasping manipulation next time;

10) 1 is returned), until capture complete.

When the stroke of horizontal air cylinder piston rod is not stressed using horizontal air cylinder piston rod, (now stroke is for 0) is as reference.

Compared with prior art, the beneficial effect that the present invention has is: robot manipulator structure of the present invention is simple, it is little to take up room, flexibility ratio is high, accurate positioning, response is fast, fragment rate is low, can 360 ° of rotations; Control method precision of the present invention is high; The invention solves chain type texturing, chain type is cleaned and agglomerating plant loading and unloading system takes up room greatly, mechanism is complicated, flexibility ratio is low, low-response, production cost are high, and silicon chip surface wearing and tearing are large and conversion efficiency is low, the problem that fragment rate is high.

Accompanying drawing explanation

Fig. 1 is one embodiment of the invention manipulator perspective view;

Fig. 2 is one embodiment of the invention forearm and paw structural representation;

Fig. 3 is one embodiment of the invention shoulder joint structural representation; Fig. 3 (a) is shoulder joint cutaway view; Fig. 3 (b) is Fig. 3 (a) A-A face cutaway view;

Fig. 4 is one embodiment of the invention movement track parameters design con-trol block diagram;

Fig. 5 is one embodiment of the invention Parametric designing schematic diagram; Fig. 5 (a) is the projective parameter design drawing of manipulator of the present invention in XOZ plane; Fig. 5 (b) is the projective parameter design drawing of manipulator of the present invention in YOZ plane; Wherein XOZ plane and YOZ plane orthogonal;

Fig. 6 is one embodiment of the invention PID control flow chart.

Embodiment

As shown in Figure 1-Figure 3, one embodiment of the invention comprises mounting seat 1, shoulder joint 6, large arm 7, forearm 9, for silicon chip being grabbed the paw 11 on multichannel solar battery sheet process equipment, described large arm 7 is connected by elbow joint 8 with forearm 9, described forearm 9 is connected by wrist joint 10 with paw 11, described shoulder joint 6 is arranged in described mounting seat 1, described shoulder joint 6 is provided with motor mount 4, the servomotor 3 driving described motor mount 4 to rotate around oneself motor axle relative to described mounting seat 1 is installed in described motor mount 4, the first dual-axle motor 5 driving described large arm 7 to rotate around oneself motor axle relative to described motor mount 4 is also installed in described motor mount 4, described forearm 9 is provided with the second dual-axle motor 12 driving described forearm 9 to rotate around oneself motor axle relative to described large arm 7, described forearm 9 internal fixtion has horizontal air cylinder 14, the piston rod of described horizontal air cylinder 14 is connected with contiguous block 16, and described horizontal air cylinder 14 piston rod promotes described contiguous block 16 and rotates around the rotating shaft 15 be arranged in wrist joint 10, described paw 11 is fixed with vertical cylinder 17 near one end of described wrist joint 10, described contiguous block 16 is fixed with for generation of compressed-air actuated vacuum generator assembly 23, described vacuum generator assembly 23 is communicated with by the cylinder body of flexible pipe with described vertical cylinder 17 piston upper end, described vertical cylinder 17 cylinder body upper end is fixedly connected with described contiguous block 16, the piston rod of described vertical cylinder 17 connects a sucker and divides gas to arrange 13, described sucker divides gas row 13 to be fixed on sucker mounting panel 18, described sucker mounting panel 18 is fixed with several for drawing the sucker 20 of silicon chip, described sucker 20 divides gas to arrange 13 by soft air pipe 22 and described sucker and is connected, described servomotor 3, first dual-axle motor 5, second dual-axle motor 12 is all connected with PC.

Servomotor 3 main shaft drive motor mount pad 4 is mounted opposite the rotation that base 1 does 0 ~ 360 °, first dual-axle motor 5 main shaft drive large arm 7 is done 0 ~ 90 ° relative to motor mount 4 and is rotated, second dual-axle motor 12 main shaft one end is fixedly connected with large arm 7, its main shaft rotarily drives forearm 9 and does-90 ° ~ 0 ° relative to large arm 7 and rotate, vertical cylinder 17 promotes sucker and divides gas to arrange 13 to move downward and realize sucker 20 grasping movement, soft air pipe 22 divides gas to arrange 13 in sucker and is communicated with sucker 20, and sucker divides gas to arrange 13 and the gas uniform of a passage is divided into four parts.Sucker mounting panel 18 divides gas to arrange 13 by screw 19 and sucker to be fixedly connected with, and sucker 20 is arranged in the notch of sucker mounting panel 18, fixes, sucker 20 spacing can be regulated to meet the crawl of different specification size cell piece with clamp nut 21.Sucker 20 can move up and down by small distance when capturing silicon chip, prevents the collision to silicon chip, reduces the generation of fragment.

Movement track parameters design process is shown in Fig. 4, reasonably automatically converts distance parameter to the rotational angle parameter of 3 motors and the elongation parameter of horizontal air cylinder, preset the angle value α of a required n passage by Parametric designing _n, β _n, θ _nwith distance parameter d _n, be then input in PC, α _nfor having captured the angle of rear large arm and horizontal plane, β _nfor having captured the angle of rear forearm and horizontal plane, d _nfor the crawled stroke to horizontal air cylinder piston rod during multichannel solar battery sheet process equipment the n-th passage of silicon chip.The length of horizontal air cylinder priming stroke, large arm and forearm is respectively S, d ₁and d ₂, large arm 7 and forearm 9 projector distance on the middle horizontal plane XOZ of Fig. 5 (a) is respectively with .Originally manipulator is in required crawl directly over silicon chip, and paw is in vertical position, and the actual range between original position mounting seat and silicon box is l ₀, then have $l_{1_0}+l_{2_0}=l_0,{\mathrm{\α}}_0=\arccos \left(l_{1_0}/d_1\right)$ With ${\mathrm{\β}}_0=arccos(l_{2_0}/d_2)$ Set up, the height apart from ground during paw crawl silicon chip remains consistent, then have sin α ₀/ sin β ₀=d ₂/ d ₁, can α be calculated by above-mentioned equation ₀, β ₀and d ₀=S/cos β ₀.The distance presetting the positional distance mounting seat having captured rear multichannel solar battery sheet process equipment loading and unloading platform n-th passage placement silicon chip is l _n(wherein n=1,2,3......), then have with sin α _n/ sin β _n=d ₂/ d ₁set up, can α be calculated by above-mentioned equation _nand β _n, for reducing silicon chip fragment rate, the height apart from ground during paw crawl silicon chip remains consistent, and keeps vertical state, then d _n=S/cos β _n.Because the actual range of loading and unloading platform and silicon chip is that equipment self determines, its actual range is u, then α _nfor silicon chip is crawled to large arm during multichannel solar battery sheet process equipment the n-th passage and angle, the β of horizontal plane _nfor the crawled angle (see Fig. 5 (b)) to forearm during multichannel solar battery sheet process equipment the n-th passage and horizontal plane of silicon chip.

If paw exceeds the biased error that equipment allows when capturing silicon chip, then need the actual range automatic capturing according to track, if the actual range that kth time has captured the positional distance mounting seat of rear multichannel solar battery sheet process equipment loading and unloading platform n-th passage placement silicon chip is y _n, then biased error is | e _n(k) |=| l _n(k)-y _n(k) | (wherein n=1,2,3......), its pid algorithm flow chart as shown in Figure 6, e in figure ₀band (biased error namely allowed) is allowed, e for equipment error exports _nmfor the systematic error of multichannel solar battery sheet process equipment loading and unloading platform n-th passage, the step that PID controls is:

PID controller is utilized to calculate the secondary displacement components u (k) having captured rear paw of kth:

$u\left(k\right)=k_{p}e\left(k\right)+k_i{\∫}_0^{k}e\left(\mathrm{\τ}\right)d\mathrm{\τ}+k_d\frac{de\left(k\right)}{dk},$

Wherein, k _pfor PID controller proportionality coefficient, k _ifor PID controller proportionality coefficient, k _dfor PID controller proportionality coefficient; If | e _n(k) |≤e _nm, then make | e _n(k) |=e _nm, jump to 9); Otherwise, enter 8); Wherein e _nmfor the systematic error of multichannel solar battery sheet process equipment loading and unloading platform n-th passage; If | e _n(k) |>=e ₀, enter 9); Otherwise, jump to 10); Wherein e ₀for the admissible error of multichannel solar battery sheet process equipment; If u _n(k-1)=u _n(k), y _n(k-1)=y _n(k), e _n(k-2)=e _n(k-1) set up simultaneously, then start grasping manipulation next time, until capture complete.

Claims (5)

1. the full-automatic loading and unloading manipulator of silicon chip, comprise mounting seat (1), shoulder joint (6), large arm (7), forearm (9), for silicon chip being grabbed the paw (11) on multichannel solar battery sheet process equipment, described large arm (7) is connected by elbow joint (8) with forearm (9), described forearm (9) is connected by wrist joint (10) with paw (11), it is characterized in that, described shoulder joint (6) is arranged in described mounting seat (1), described shoulder joint (6) is provided with motor mount (4), be provided with in described motor mount (4) and drive its servomotor (3) rotated around oneself motor axle relative to described mounting seat (1), the first dual-axle motor (5) driving described large arm (7) to rotate around oneself motor axle relative to described motor mount (4) is also installed in described motor mount (4), described forearm (9) is provided with the second dual-axle motor (12) driving described forearm (9) to rotate around oneself motor axle relative to described large arm (7), described forearm (9) internal fixtion has horizontal air cylinder (14), the piston rod of described horizontal air cylinder (14) is connected with contiguous block (16), and described horizontal air cylinder (14) piston rod promotes described contiguous block (16) and rotates around the rotating shaft (15) be arranged in wrist joint (10), described paw (11) is fixed with vertical cylinder (17) near one end of described wrist joint (10), described contiguous block (16) is fixed with for generation of compressed-air actuated vacuum generator assembly (23), described vacuum generator assembly (23) is communicated with by the cylinder body of flexible pipe with described vertical cylinder (17) piston upper end, described vertical cylinder (17) cylinder body upper end is fixedly connected with described contiguous block (16), the piston rod of described vertical cylinder (17) connects a sucker and divides gas to arrange (13), described sucker divides gas row (13) to be fixed on sucker mounting panel (18), described sucker mounting panel (18) is fixed with several for drawing the sucker (20) of silicon chip, described sucker (20) divides gas to arrange (13) by soft air pipe (22) and described sucker and is connected, described servomotor (3), the first dual-axle motor (5), the second dual-axle motor (12) are all connected with PC.

2. the full-automatic loading and unloading manipulator of silicon chip according to claim 1, is characterized in that, described motor mount (4) is 0 ~ 360 ° relative to the angle that described mounting seat (1) rotates.

3. the full-automatic loading and unloading manipulator of silicon chip according to claim 1, is characterized in that, described large arm (7) is 0 ~ 90 ° relative to the angle that described motor mount (4) rotates.

4. the full-automatic loading and unloading manipulator of silicon chip according to claim 1, is characterized in that, described forearm (9) is-90 ° ~ 0 ° relative to the angle that described large arm (7) is rotated.

5. the full-automatic loading and unloading manipulator control method of motion trace of silicon chip that one of Claims 1 to 4 is described, it is characterized in that, the method is:

1) priming stroke of horizontal air cylinder piston rod, large arm lengths, forearm lengths is established to be respectively S, d ₁and d ₂, silicon chip is crawled to be respectively to large arm during multichannel solar battery sheet process equipment the n-th passage and the projected length of forearm in XOZ plane with

2) directly over the silicon chip establishing original position paw to be positioned at need to capture, and paw and horizontal plane, the actual range between mounting seat and silicon box is l ₀, then

$\left\{\begin{array}{c}{l}_{1_0}+l_{2_0}=l_0\\ {\mathrm{\α}}_0=\arccos (l_{1_0}/d_1)\\ {\mathrm{\β}}_0=\arccos (l_{2_0}/d_2)\\ {\mathrm{sin\α}}_0/{\mathrm{sin\β}}_0=d_2/d_1\end{array}\right.,$

α is tried to achieve according to above-mentioned equation group ₀and β ₀, then d ₀=S/cos β ₀, wherein be respectively original position large arm and the projected length of forearm in XOZ plane, α ₀for the angle of original position large arm and horizontal plane, β ₀for the angle of original position forearm and horizontal plane, d ₀for the stroke of horizontal air cylinder piston rod when manipulator is in original position;

3) silicon chip crawled to multichannel solar battery sheet process equipment the n-th passage time, the distance of positional distance mounting seat that multichannel solar battery sheet process equipment loading and unloading platform n-th passage places silicon chip is l _n:

$\left\{\begin{array}{c}{\mathrm{\α}}_n=arccos(l_{1_n}/d_1)\\ {\mathrm{\β}}_n=arccos(l_{2_n}/d_2)\\ l_n=l_{1_n}+l_{2_n}\\ {\mathrm{sin\α}}_n/{\mathrm{sin\β}}_n=d_2/d_1\end{array}\right.,$

Silicon chip is tried to achieve crawled to large arm during multichannel solar battery sheet process equipment the n-th passage and the angle α of horizontal plane according to above-mentioned equation group _n, forearm and horizontal plane angle β _n, then d _n=S/cos β _n, d _nfor the crawled stroke to horizontal air cylinder piston rod during multichannel solar battery sheet process equipment the n-th passage of silicon chip;

4) set the actual range of original position multichannel solar battery sheet process equipment loading and unloading platform and silicon chip as u, then silicon chip is crawled to the rotational angle of servomotor during multichannel solar battery sheet process equipment the n-th passage is

5), after establishing silicon chip to capture, the actual range that multichannel solar battery sheet process equipment loading and unloading platform n-th passage places the positional distance mounting seat of silicon chip is y _n, then biased error e _ncomputing formula be: | e _n(k) |=| l _n(k)-y _n(k) |, wherein e _nk biased error that () captures for kth time, l _nk () has captured the distance of the positional distance mounting seat of rear multichannel solar battery sheet process equipment loading and unloading platform n-th passage placement silicon chip for kth time, y _nk () has captured the actual range of the positional distance mounting seat of rear multichannel solar battery sheet process equipment loading and unloading platform n-th passage placement silicon chip for kth time;

6) PID controller is utilized to calculate the secondary displacement components u (k) having captured rear paw of kth:

$u\left(k\right)=k_{p}e\left(k\right)+k_i{\∫}_0^{k}e\left(\mathrm{\τ}\right)d\mathrm{\τ}+k_d\frac{de\left(k\right)}{dk},$

Wherein, k _pfor PID controller proportionality coefficient, k _ifor PID controller proportionality coefficient, k _dfor PID controller proportionality coefficient;

7) if | e _n(k) |≤e _nm, then make | e _n(k) |=e _nm, jump to 9); Otherwise, enter 8); Wherein e _nmfor the systematic error of multichannel solar battery sheet process equipment loading and unloading platform n-th passage;

8) if | e _n(k) |>=e ₀, enter 9); Otherwise, jump to 10); Wherein e ₀for the admissible error of multichannel solar battery sheet process equipment;

9) if y _n(k-1)=y _n(k), e _n(k-2)=e _n(k-1) set up simultaneously, then start grasping manipulation next time;

10) 1 is returned), until capture complete.