CN104723332B - A direct-drive-type wafer transport robot invertible - Google Patents

A direct-drive-type wafer transport robot invertible Download PDF

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CN104723332B
CN104723332B CN 201510121144 CN201510121144A CN104723332B CN 104723332 B CN104723332 B CN 104723332B CN 201510121144 CN201510121144 CN 201510121144 CN 201510121144 A CN201510121144 A CN 201510121144A CN 104723332 B CN104723332 B CN 104723332B
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arm
shaft
wrist
housing
end
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CN104723332A (en )
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刘志峰
谷光伟
时政
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北京工业大学
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一种直驱式可翻转晶圆传输机器人,基座内部安装升降和回转机构,升降和回转机构与大臂一端连接,大臂另一端与小臂一端连接,小臂另一端与翻转手腕的一端连接,翻转手腕的另一端与真空吸附末端连接。 A direct-drive type flip wafer transfer robot, the susceptor elevating and rotating mechanism is mounted, the lifting and slewing mechanism is connected to one end of the arm, the other end of the upper and lower arms connected at one end, another end of the arm and wrist flipping and the other end of the wrist inverted and vacuum-terminus. 所述晶圆传输机器人动作时,大臂、小臂、翻转手腕组成的三连杆定比速运动实现径向直线伸缩运动;翻转手腕使用电机驱动真空吸附末端实现翻转动作。 When the wafer transfer robot operation, three-link given boom, arm, wrist flip composed achieved radial line than the speed of movement of telescoping movement; flip of the wrist drive motor is used to achieve the end of the vacuum suction turning action. 采用直驱电机直接驱动,精简机器人内部结构,减少中间环节,提高机器人传动精度和效率。 Direct drive motor direct drive, streamlining of internal structure of the robot, reduce intermediate links, to improve the accuracy and efficiency of the robot drive. 较少的零件机构,便于机器人的装配生产。 It means fewer parts, ease of assembly robots. 钢带传动的使用,可以提供传动精度,增强机器人的可靠性,减少污染微粒的产生,提高机器人的洁净度等级。 Steel belt drive, transmission accuracy can be provided, to enhance reliability of the robot, reduce contaminant particles to improve the cleanliness level of the robot. 翻转手腕增加机器人翻转自由度,增强机器人的适用范围。 Flip Flip robot wrist increase the degree of freedom and enhance the scope of application of the robot.

Description

一种直驱式可翻转晶圆传输机器人 A direct-drive-type wafer transport robot invertible

技术领域 FIELD

[0001] 该发明涉及晶圆自动化搬运设备领域,具体涉及一种晶圆传输洁净机器人。 [0001] The invention relates to the field of automated wafer handling equipment, particularly, to a clean wafer handling robot.

背景技术 Background technique

[0002] 在超大规模集成电路(1C)制造过程中,晶圆需要在数百道工艺之间频繁传输,晶圆生产线工序集中,加工速度快,工作环境洁净度要求高,需要高性能的晶圆传输机器人。 [0002] (1C) in the manufacturing process, the wafer frequently transmitted VLSI between several hundred process, wafer production line concentration step, processing speed, working environment of high cleanliness requirements, require high performance crystal round transport robots. 现有的Re型晶圆传输机器人,多使用伺服电机(步进电机)驱动配以减速器减速再带动传动轴转动,传动结构复杂,安装困难,且多数减速机构(带传动、齿轮传动等)会使传动轴偏置,更易造成偏载和冗余径向力的产生,导致电机扭矩损失和精度降低。 Re conventional type wafer transfer robot, the use of multiple servo motor (stepping motor) driven together with the rotation shaft and then drive gear reducer, transmission structure complex, difficult to install, and most reduction mechanism (belt drive, gear drive, etc.) will bias the drive shaft, it is more likely to produce redundant partial load and radial forces, resulting in reduced motor torque and the loss of precision. 采用直驱电机驱动,可以减少减速机构的使用,直驱电机直接连接负载,无偏载产生,传动精度高,无扭矩损失。 Direct drive motor, the reduction mechanism can reduce the use of direct drive motor directly connected to a load, partial load without generating high driving accuracy, without loss of torque. 直驱电机中空的结构特点,方便晶圆机器人控制线路和气路的内部走线,还可实现不同传动轴间的同轴布置,减少零件数,减少转轴的转动惯量,便于装配。 Structural features a hollow direct drive motor, the robot wafer to facilitate gas passage inside the control circuit traces may also be implemented between different shaft coaxially disposed, to reduce the number of parts, reduce the moment of inertia of the shaft, to facilitate assembly.

[0003] 现有R-0型晶圆传输机器人,其径向(R向)直线运动通过大臂、小臂和手腕的定比例运动实现(原理可见[径向直线运动型硅片传输机器人的设计与研宄•丛明,张士军•制造业自动化.第27卷第2期2005-02])。 [0003] Existing R-0 type wafer transfer robot, which radial direction (R direction) by a predetermined ratio of movement of the linear motion of the boom, arm and wrist to achieve (visible principle [a radially linear movement type silicon wafer transport robot • design study based on CongMing, Zhang Jun manufacturing automation • the first volume 2 2005-0227]). 现有技术多使用同步带,利用行星轮系传动原理,使用一个电机驱动大臂、小臂和手腕关节。 Prior art belt often used, the principle of a planetary gear train transmission, using a motor-driven boom, arm and wrist. 但同步带具有棱角误差、弹性变形和疲劳磨损的缺点,传动系统刚度低,在速度和加速度突变或者变化很大时容易引起振动,易产生微粒污染源。 However, the timing belt having angular errors, shortcomings and fatigue wear of elastically deformable, low rigidity transmission system, changes or mutations likely to cause large vibrations in the speed and acceleration, easy to produce particulate contamination. 使用钢带传动,无弹性变形,传动精度高,系统刚度大。 Use steel belt, inelastic deformation, transmission accuracy, high system stiffness. 钢带传动无需张紧装置,无疲劳磨损,可以提高机器人可靠性,增加机器人使用寿命。 Without steel belt tensioner, no fatigue wear, can improve the reliability of the robot, to increase the service life of the robot. 还可以避免微粒污染的产生,提高机器人的洁净度。 Also avoid the generation of particles of pollution, improve the cleanliness of the robot.

发明内容 SUMMARY

[0004] 针对以上问题,该发明的主要目的是提供晶圆传输机器人。 [0004] To solve the above problems, a primary object of this invention is to provide a wafer transport robot. 采用直驱电机驱动,解决现有技术驱动方式,结构复杂,安装困难,传动轴不同轴,传动偏载等的问题。 Using the direct-drive motor driving problem, the prior art driving method to solve the complex structure, difficult to install, coaxial shaft, the transmission of partial load and the like. 采用钢带传动解决同步带传动中的棱角误差、弹性变形和疲劳磨损的缺点,提高传动精度和使用寿命, 提供机器人洁净度。 Solution using steel belt in the belt drive the angular error, and the shortcomings of the elastic deformation of fatigue wear, improve the transmission accuracy and service life, providing the robot cleanliness.

[0005] 该发明的另一目的是提供直驱式末端可翻转晶圆传输机器人。 [0005] Another object of the invention is to provide a direct drive end of the wafer transfer robot may be inverted. 在晶圆传输过程中,多种工况下需要晶圆的翻转操作,直驱式末端可翻转机^人可以满足此种需求。 In the transfer process of the wafer, the wafer is required under various conditions reversing operation, a direct drive reversing machine tip can meet such needs ^ al.

[0006] 本发明提供直驱式末端可翻转晶圆传输机器人,采用如下技术方案:一种直驱式可翻转晶圆传输机器人,该机器人包括基座1、升降和回转机构2、真空吸附末端3、翻转手腕4、小臂5和大臂6;所述基座1内部安装升降和回转机构2,升降和回转机^构2与大臂6一端(近端)连接,大臂6另一端(远端)与小臂5-端(近端)连接,小臂5另一端(远端)与翻转手腕4的一端连接,翻转手腕4的另一端与真空吸附末端3连接。 [0006] The present invention provides a direct drive terminal invertible wafer transfer robot, the following technical solutions: A direct drive invertible wafer transfer robot, the robot comprises a base 1, and a rotary elevating mechanism 2, the vacuum suction tip 3, flip of the wrist 4, 5 and 6 of the boom arm; the base is mounted inside a lifting and turning mechanism 2, the lifting mechanism and the rotating machine 2 ^ 6 to the boom end (proximal end) is connected to the other end of the boom 6 (distal) end and forearm 5- (proximal end) is connected to the arm 5 and the other end (distal end) connected to one end of the flip of the wrist 4, the other end of the flip of the wrist 4 connected to vacuum suction tip 3.

[0007] 所述晶圆传输机器人动作时,基座1固定,升降和回转机构2可绕基座1中心回转, 还可沿基座垂直方向(Z向)做升降运动;大臂6近端可绕升降和回转机构2中心回转(0向运动),小臂5近端绕大臂6远端中心回转,翻转手腕4绕小臂5远端回转'大臂6、小臂5和翻转手腕4的定比例回转实现机器人手臂的径向直线运动(R向运动);翻转手腕4内置翻转结构,真空吸附末端3绕手腕壳体水平轴线翻转;真空吸附末端3吸附晶圆片,带动晶圆片运动。 [0007] When the wafer transfer robot operation, the base 1 is fixed, and a rotary elevating mechanism 2 is rotatable about a rotation center of the base, the base can be done the lifting movement in the vertical direction (Z-direction); a proximal end of the boom 6 2 about the center rotary elevating and rotating mechanism (0 to movement), the proximal end 5 of the arm 6 about the center of the distal end of arm rotation, flipping the wrist of the arm 4 about the swivel distal 5 'boom 6, arm 5 and wrist flipping Comparative Example 4 implement a given rotary motion of the robot arm of the radial line (R forward motion); inverted structure built flip of the wrist 4, the end of vacuum housing about a horizontal axis 3 of the wrist inverted; end of the vacuum suction of the wafer 3, the wafer drive piece movement.

[0008] 上述晶圆传输机器人的升降机构,参考附图2所示,该升降机构包括伺服电机1 〇1、 减速器102、联轴器103、基座型材104、螺母108、丝杠109、导轨105、滑块107和升降连接板106。 [0008] The elevating mechanism of the wafer transfer robot, reference is shown in Figure 2, the lift mechanism includes a servo motor 1 〇1, reduction gear 102, the coupling 103, the base profile 104, a nut 108, screw 109, rails 105, 106 of the slider 107 and the lifting webs. 伺服电机101、减速器102、丝杠109和螺母108同轴布置于基座1侧壁上并组成丝杠螺母副传动机构;基座型材104为基座侧面支撑,导轨105固定在基座型材104上;螺母108连接升降连接板106。 Servo motor 101, reducer 102 coaxial with the screw 109 and the nut 108 is disposed on the side wall and the base composition screw nut gear mechanism; base profile sides of the base 104 is supported by guide rails 105 fixed to the base profile on 104; 106 nut 108 connected to the lifting web.

[0009] 伺服电机101与减速器102连接,减速器102的输出轴通过联轴器103与丝杠1〇9连接;丝杠109固定在基座1的侧壁中间,两导轨105固定在基座1的侧壁两侧;所述各导轨1〇5 上分别安装有两个滑块107,两个滑块107分别与升降连接板1〇6连接,以实现导向作用。 [0009] The servo motor 101 and the reducer 102 is connected to an output shaft of the speed reducer 102 is connected to the lead screw 103 via a coupling 1〇9; lead screw 109 is fixed in the middle of the side wall of the base 1, two guide rails 105 fixed to the base sidewall on both sides of the seat 1; respectively mounted on the two guide rails 1〇5 sliders 107, two sliders 107 are connected to the elevating link plate 1〇6, in order to achieve a guiding role.

[0010] 所述伺服电机101经减速器102减速,驱动丝杠螺母副的螺母108的升降运动,进而带动升降连接板106上下运动; [0010] The servo motor 101 via reduction gear unit 102, drive nut screw nut 108 of the lifting movement, thereby bringing down the connecting plate 106 up and down movement;

[0011] 上述晶圆传输机器人的中心回转(0向运动)机构,包括e向直驱电机204、9向转轴203、交叉滚子轴承b215、推力轴承213。9向直驱电机204的底座固定在升降连接板106上,e 向转轴203连接在0向直驱电机204的输出轴端并与0向转轴连接板a205连接;9向转轴连接板b206通过螺钉连接安装固定在0向转轴连接板a205上。 [0011] The center of rotation of the wafer transfer robot (0 to motion) mechanism, comprising a direct drive motor e to 204,9 to shaft 203, cross roller bearings B215, 213.9 to the thrust bearing direct drive motor 204 fixed to the base the elevating link plate 106, e 203 is connected to the rotary shaft and the rotary shaft is connected to the connecting plate 204 a205 to the direct drive motor and the output shaft 0 0; 9 is connected to the connecting plate fixed to the shaft at the shaft coupling plate b206 0 by screws on a205.

[0012] 交叉滚子轴承b215的外圈固定安装在连接板固定套筒201内壁上,以承受0向转轴203的径向力和倾覆力;推力轴承213通过e向转轴套筒214、连接板固定上套筒202安装在0 向转轴203的外壁上。 [0012] b215 cross roller bearing outer ring fixed to an inner wall of the connecting plate 201 mounted on the fixed sleeve, 0 to withstand radial forces and overturning force to the rotating shaft 203; e through the thrust bearing 213 to the sleeve shaft 214, the connecting plate fixing an outer wall of the sleeve 202 is mounted to the shaft 203 at 0. 推力轴承213用以承受机器人臂体的轴向力。 The thrust bearing 213 for receiving the axial force of the robot arm. e向转轴2〇3与基座上盖110配合,同时在基座上盖110内孔处安装有U型大弹性橡胶圈217和0型耐磨高强度密封环216。 e with the shaft cover 110 and the base 2〇3, while the base cover 110 is attached to a U-shaped hole of the elastic rubber ring 217 large and high-strength wear-0 type seal ring 216.

[0013] 0向直驱电机204输出轴直接驱动0向转轴203转动,带动交叉滚子轴承b215内圈、0 向转轴套筒214和推力轴承213下圈共同转动。 [0013] 0 204 directly to the output drive shaft direct drive motor rotates the shaft 0203, driven by the inner cross roller bearing b215, 0 common rotation ring 214 and the sleeve shaft to the thrust bearing 213. U型大弹性橡胶圈217浮动承受0向转轴203的径向偏载。 A large U-shaped resilient rubber ring 217 radially floating shaft receiving partial load 0 to 203.

[0014] R向直驱电机207、R向转轴208、大臂6、小臂5、翻转手腕4组成晶圆传输机器人的径向直线运动机构;R向直驱电机207同轴安装在0向转轴2〇3内部,R向直驱电机207的底部安装在0向转轴连接板b206上;R向直驱电机207的输出轴直接连接R向转轴2〇8,R向转轴208和0向转轴203之间在0向转轴203上端通过交叉滚子轴承a212支撑,大臂6-端连接在0向转轴203上,另一端连接小臂5近端(靠近大臂6-端为近端),小臂5远端连接翻转手腕4。 [0014] R to the direct drive motor 207, the R & lt shaft 208, boom 6, arm 5, the wrist inverted radial linear motion mechanism consisting of the wafer transfer robot 4; R to the direct drive motor 207 is mounted coaxially to 0 2〇3 inner shaft, R 0 B206 mounted on the shaft to the bottom web 207 of the direct drive motor; R R is directly connected to the rotation shaft 2〇8 direct drive motor to the output shaft 207, R 208 and to the rotating shaft to the rotating shaft 0 0 to 203 between the upper end of the shaft through the cross roller bearing 203 is supported a212, 6 connected to the upper end of the arm shaft 203, and the other end connected to the arm 5 0 proximal end (near the end of the boom proximal 6-), inverting arm 5 connected to the distal end of the wrist 4.

[0015] 响直驱电机207及响转轴208随响转轴2〇3同步回转,同时响直驱电机207输出轴可独立驱动R向转轴208相对于0向转轴203转动,R向转轴208的回转驱动大臂6绕0向转轴203中心回转,同时小臂5近端绕大臂6远端(大臂6远离9向转轴203的一端)回转,翻转手腕4 绕小臂5远端回转,通过大臂6、小臂5和翻转手腕4三连杆定比角速度运动,实现机器人的R 向直线伸缩运动。 [0015] ring 207 and ring direct drive motor shaft 208 rotated in synchronization with the sound 2〇3 shaft, direct drive motor 207 while the ring may be independently driven output shaft R shaft 208 is rotated 203 0 with respect to the rotary shaft, the rotary shaft 208 to R driving the boom 6 about the center of the rotation shaft 203 from rotating in the 0, while the proximal end 5 of the arm 6 about the distal end of the boom (the boom 6 to 9 remote from the end of the shaft 203) rotation, flipping the wrist of the arm 4 about the distal turns 5, by boom 6, arm 5 and wrist flip link 4 fixed ratio three angular velocity motion, the robot R to achieve linear telescopic movement.

[0016] 上述晶圆传输机器人的径向直线运动(R向运动)机构中,大臂6包括大臂壳体601、 大臂固定带轮210、小臂驱动轮6〇6、大臂上下半钢带610、小臂驱动轮轴604、交叉滚子轴承d612、交叉滚子轴承e613、深沟球轴承b6〇5。 [0016] The radial line of motion of the wafer transfer robot (R forward movement) mechanism, the boom arm 6 comprises a housing 601, a pulley 210 fixed to the boom, the arm drive wheels 6〇6, big arm half steel 610, the arm drive axle 604, cross roller bearings d612, cross roller bearings e613, deep groove ball bearings b6〇5.

[0017] 大臂壳体601通过大臂壳体上盖607、大臂壳体下盖602上下密封。 [0017] The boom arm housing 601 by a housing cover 607, the lower boom 602 vertically seal housing cover.

[0018] R向转轴208上端连接大臂壳体601的近端上壳体,大臂固定带轮210固定在0向转轴203上端,大臂固定带轮21(^PR向转轴208之间通过交叉滚子轴承d612支撑;大臂壳体下盖602和大臂固定带轮21〇之间通过交叉滚子轴承e613支撑。 .一 [0018] R is connected to the upper end of the shaft housing 208 on the proximal end 601 of the housing boom, boom fixed sheave 210 fixed to the upper end of the shaft 203 to 0, a fixed pulley arm 21 (^ PR to pass between the rotating shaft 208 d612 supporting cross roller bearing; fixed sheave 602 and a lower boom arm between the housing cover by 21〇 cross roller bearing supporting a e613.

[0019]大臂上下半钢带610固定安装在大臂行星轮系的大臂固定市轮21〇和小臂驱动轮606之间,大臂壳体6〇1远端下壳体固定连接小臂驱动轮轴6〇4,小臂驱动轮轴6〇4和小臂驱动轮6〇6之间通过一对深沟球轴承b605支撑;小臂壳体501、大臂壳体上盖607之间通过交叉滚子轴承〇608支撑;小臂驱动轮606上端连接小臂壳体501近端。 [0019] Large steel half arm 610 is fixedly mounted on the boom of the planetary gear train of the boom and arm fixed market 21〇 wheel between the drive wheel 606, the lower arm housing is fixedly connected to the distal end of a small housing 6〇1 6〇4 arm drive axle, drive axle 6〇4 arm and arm drive wheels via a pair of deep groove ball bearings supported between 6〇6 b605; housing arm 501, the arm 607 between the housing cover by 〇608 cross roller bearing support; an upper arm 606 connected to the drive wheel 501 housing a proximal end of the arm. one

[0020]大臂壳体601 (相当于行星架)、大臂固定带轮21〇(太阳轮)、小臂驱动轮606 (行星轮)、大臂上下半钢带61〇共同组成行星周转轮系。 [0020] The boom housing 601 (corresponding to the carrier), the fixed sheave 21〇 boom (sun gear), an arm drive wheels 606 (planetary gear), the lower half of the large arm 61〇 strip composed planetary epicyclic system. 大臂壳体601绕0向转轴203回转,带动小臂驱动轮606绕大臂固定带轮21〇公转,大臂上下半钢带61〇绕带轮缠绕,而大臂固定带轮210不随大臂壳体6〇1回转,使小臂驱动轮606绕小臂驱动轮轴604自转,进而驱动小臂壳体501近端绕大臂壳体6〇1远端回转。 The boom housing 601 about the shaft 203 to 0 rotation, driving the boom arm about the drive wheel 606 fixed sheave 21〇 revolves 61〇 large arm around pulley half strip is wound, and the boom is not fixed sheave 210 with a large 6〇1 swing arm housing, the drive wheel 606 so that the arm 604 about the arm rotation drive axle, which in turn drives the arm housing about the proximal end 501 of the boom housing 6〇1 distal turns.

[0021] 上述晶圆传输机器人的径向直线运动(R向运动)机构中,小臂5包括小臂壳体501、 小臂定轮512、小臂上下半钢带51〇、手腕驱动轮504、手腕驱动轮轴502;在小臂壳体501内部,固定于大臂壳体6〇1远端的小臂驱动轮轴6〇4上端连接有小臂定轮512;手腕驱动轮轴502固定在小臂壳体501远端下壳体上,手腕驱动轮504通过上下一对深沟球轴承a5〇3支撑在手腕驱动轮轴502下端,在手腕转轴505和小臂上盖507之间通过交叉滚子轴承b506支撑; 而小臂上下半钢带510连接在小臂定轮512和手腕驱动轮504之间;手腕驱动轮504上端连接手腕转轴505,手腕转轴505连接翻转手腕4。 [0021] The radial line of motion of the wafer transfer robot (R forward movement) mechanism, the arm 5 comprises a housing arm 501, the arm 512 is fixed, the upper and lower semi-strip 51〇 arm, wrist drive wheels 504 wrist drive axle 502; 501 inside the housing arm, the arm is fixed to the distal end of the housing 6〇1 6〇4 upper arm drive axle wheel set is connected to the arm 512; the wrist drive axle 502 is fixed to the arm the distal end of the lower housing upper housing 501, drive wheel 504 by the wrist of the upper and lower deep groove ball bearings a5〇3 drive axle 502 supported in the lower end of the wrist, the wrist and arm shaft 505 between the upper cover 507 by crossed roller bearings b506 support; strip 510 and the upper and lower halves of the arm of the arm connected to the fixed wheel 512 and drive wheel 504 between the wrist; wrist drive wheel 504 connected to the upper end of the rotating shaft 505 of the wrist, the wrist rotation axis 505 is connected flip wrist 4.

[0022] 小臂壳体501通过小臂上盖507密封。 [0022] The housing 501 of the arm 507 is sealed by the upper lid arm.

[0023] 小臂壳体501近端绕大臂壳体6〇1远端回转时,小臂定轮512相对于大臂壳体601静止,小臂上下半钢带510绕小臂定轮512和手腕驱动轮504缠绕,组成小臂行星轮系。 When [0023] the arm housing about the proximal end 501 of the boom housing 6〇1 distal turns, the arm 512 with respect to the fixed wheel stationary housing boom 601, the arm 510 about the upper and lower halves of the arm fixed strip 512 and wrist drive wheel 504 is wound to form the arm planetary gear train. 手腕驱动轮504绕手腕驱动轮轴502回转,手腕转轴505随之绕小臂壳体501远端转动。 Wrist drive wheel 504 about the wrist drive axle 502 rotates, the wrist is rotated about the shaft 505 along the distal end 501 of the arm housing.

[0024] 参考附图5所示,手腕转轴505绕小臂壳体501远端回转,手腕转轴505上端固定连接翻转手腕4,翻转手腕4内部设计翻转机构,驱动真空吸附末端3翻转。 [0024] As shown in Figure 5 with reference to the wrist of the arm shaft 505 about the distal end of the rotary housing 501, shaft 505 is fixedly connected to the upper end of the wrist flip of the wrist 4, the wrist inverted internal design inverting mechanism 4, driving the vacuum suction tip 3 inverted.

[0025] 该晶圆传输机器人R向直线运动时,参考附图6所示为小臂5、大臂6相对回转动作示意(对比附图1中大小臂状态),同时真空吸附末端3实现了翻转动作。 [0025] When the wafer transfer robot R to the linear motion, with reference to the accompanying drawings arm 6 is shown in FIG. 5, the arm 6 relative rotation gesture (compare figures 1 state arm size), while the end of the vacuum suction realized 3 flip action.

[0026] 采用上述技术方案,实现晶圆传输机器人的垂直升降运动、中心回转运动、径向直线运动和翻转运动,满足晶圆搬运过程中的多任务要求。 [0026] The foregoing technical solution, to achieve vertical movement of the wafer transfer robot, the center of rotary motion, linear motion and radial tilting motion, multitasking meet the requirements of the wafer during transport. 采用直驱电机直接驱动,精简机器人内部结构,减少中间环节,提高机器人传动精度和效率。 Direct drive motor direct drive, streamlining of internal structure of the robot, reduce intermediate links, to improve the accuracy and efficiency of the robot drive. 较少的零件机构,便于机器人的装配生产。 It means fewer parts, ease of assembly robots. 钢带传动的使用,可以提供传动精度,增强机器人的可靠性,减少污染微粒的产生,提高机器人的洁净度等级。 Steel belt drive, transmission accuracy can be provided, to enhance reliability of the robot, reduce contaminant particles to improve the cleanliness level of the robot. 翻转手腕增加机器人翻转自由度,增强机器人的适用范围。 Flip Flip robot wrist increase the degree of freedom and enhance the scope of application of the robot. 整个晶圆传输机器人克服现有机器人部分缺陷,具有稳定性好,传动精度高,速度快,洁净度等级高,电气控制简单,装配生产高效等优点。 Entire wafer transfer robot overcome the defects robot part, has good stability, high transmission accuracy, high speed and high level of cleanliness, a simple electrical control, and high efficiency of the assembly.

附图说明 BRIEF DESCRIPTION

[0027]图1是本发明晶圆传输机器人的部件装配图。 [0027] FIG. 1 is an assembly view of the wafer transfer robot according to the present invention.

[0028]图2是本发明晶圆传输机器人升降运动机构和中心回转运动机构内部结构图。 [0028] FIG. 2 is a central vertical movement mechanism and the rotation mechanism internal structure of the wafer transfer robot according to the present invention. [0029]图3是图2的内部剖视图。 [0029] FIG. 3 is an internal cross-sectional view of Figure 2.

[0030]图4是本发明晶圆传输机器人径向直线运动机构内部剖视图。 [0030] FIG. 4 is a cross-sectional view of the interior of the wafer transfer robot according to the present invention, a radial line motion mechanism.

[0031] 图5是图4的立体结构图。 [0031] FIG. 5 is a perspective view of the structure of Figure 4.

[0032] 图6是本发明晶圆传输机器人与图1相比较的手臂伸缩与手腕翻转动作图。 [0032] FIG. 6 is a telescopic arm as compared with the wrist inverted view of a wafer transfer operation of the robot according to the present invention and FIG.

[0033] 图中:1:基座,2:升降和回转机构,3:真空吸附末端,4:翻转手腕,5:小臂,6:大臂。 [0033] FIG: 1: base 2: elevating and rotating mechanism, 3: end of vacuum, 4: flip wrist, 5: arm 6: arm.

[0034] 101:伺服电机,102:减速器,103:联轴器,104:基座型材,105:导轨,106:升降连接板,107:滑块,108:螺母,109:丝杠,110:基座上盖。 [0034] 101: servo motor, 102: reduction gear, 103: clutch, 104: a base profile, 105: guide rail 106: lifting webs, 107: Slider, 108: nut, 109: screw, 110 : base cover.

[0035] 201:连接板固定套筒,202:连接板固定上套筒,203:0向转轴,204:0向直驱电机, 205:0向转轴连接板a,206: e向转轴连接板b,207:R向直驱电机,208: R向转轴,209: 9向转轴上盖,210:大臂固定带轮,211:交叉滚子轴承上压盖,212:交叉滚子轴承a,213:推力轴承, 214:0向转轴套筒,215:交叉滚子轴承b,216:0型耐磨高强度密封环, 217:U型大弹性橡胶圈。 [0035] 201: plate fixedly sleeve, 202: plate fixedly to the sleeve, 203: 0 to the rotation shaft 204: connection plate to the shaft E: 0 to direct drive motor, 205: 0 to web shaft a, 206 b, 207: R, 208 to direct drive motor: R, 209 to the shaft: rotating shaft 9 to the upper cover, 210: fixed pulley arm, 211: cross roller bearing gland, 212: cross roller bearing a, 213: thrust bearing, 214: 0 to sleeve shaft, 215: cross roller bearing b, 216: 0-type seal ring wear high-strength, 217: U-type large elastic rubber ring.

[0036] 424:真空气管,425:手腕电机控制线路。 [0036] 424: a vacuum tube, 425: motor control circuit wrist.

[0037] 501:小臂壳体,502:手腕驱动轮轴,503:深沟球轴承a,504:手腕驱动轮,505:手腕转轴,506:交叉滚子轴承b,507:小臂上盖,508:0型密封圈a,509:轴承压盖,510:小臂上下半钢带,511:小臂定轮压盖,512:小臂定轮,513;0型密封圈b。 [0037] 501: housing arm, 502: wrist drive axle, 503: deep groove ball bearings a, 504: drive wheels wrist, 505: wrist shaft, 506: cross roller bearing b, 507: arm cover, 508: 0-ring a, 509: bearing cover, 510: upper and lower half strip arm, 511: fixed wheel arm gland, 512: fixed wheel arm 513; 0-ring b.

[0038] 601:大臂壳体,602:大臂壳体下盖,603:0型密封圈c,604:小臂驱动轮轴,605:深沟球轴承b,606:小臂驱动轮,607:大臂壳体上盖,608:交叉滚子轴承c,609:轴承上压盖, 610 :大臂上下半钢带,611:交叉滚子轴承挡圈3,612:交叉滚子轴承(1,613 :交叉滚子轴承6, 614:交叉滚子轴承挡圈b,615:轴承下端盖。 [0038] 601: housing boom, 602: lower arm housing cover, 603: 0-ring c, 604: arm drive axle, 605: deep groove ball bearings b, 606: arm drive wheel 607 : boom housing cover, 608: cross roller bearing c, 609: bearing gland, 610: big arm half strip, 611: cross roller bearing ring 3,612: cross roller bearing (1,613 : cross roller bearing 6, 614: cross roller bearing ring b, 615: lower end cap bearing.

具体实施方式 detailed description

[0039] 以下结合具体图例详细阐述本发明的具体实施例。 [0039] The following detailed illustration of the present invention is described in detail specific embodiments.

[0040] 如图1-6所示,一种直驱式可翻转晶圆传输机器人,该机器人包括基座1、升降和回转机构2、真空吸附末端3、翻转手腕4、小臂5和大臂6;所述基座1内部安装升降和回转机构2,升降和回转机构2与大臂6-端(近端)连接,大臂6另一端(远端)与小臂5-端(近端)连接,小臂5另一端(远端)与翻转手腕4的一端连接,翻转手腕4的另一端与真空吸附末端3连接。 [0040] As shown in Figure 1-6, a direct-drive type flip wafer transfer robot, the robot comprises a base 1, and a rotary elevating mechanism 2, the vacuum suction tip 3, 4 flip of the wrist, arm 5 and a large an arm 6; 1 inside the lift mounting base and the turning mechanism 2, the turning mechanism 2 and the lifting arm is connected to the end of 6- (proximal end), the boom 6 and the other end (distal end) and the end arm 5- (near end), the arm 5 and the other end (distal end) with one end connected to the flip of the wrist 4, the other end of the flip of the wrist 4 is connected to the vacuum suction tip 3.

[0041] 所述晶圆传输机器人动作时,基座1固定,升降和回转机构2可绕基座1中心回转, 还可沿基座垂直方向(Z向)做升降运动;大臂6近端可绕回转机构2中心回转(0向运动),小臂5近端绕大臂6远端中心回转,翻转手腕4绕小臂5远端回转,大臂6、小臂5和翻转手腕4的定比例回转实现机器人手臂的径向直线运动(R向运动);翻转手腕4内置翻转结构,真空吸附末端3绕手腕壳体水平轴线翻转;真空吸附末端3吸附晶圆片,带动晶圆片运动。 [0041] When the wafer transfer robot operation, the base 1 is fixed, and a rotary elevating mechanism 2 is rotatable about a rotation center of the base, the base can be done the lifting movement in the vertical direction (Z-direction); a proximal end of the boom 6 turning mechanism 2 is rotatable about the center of rotation (0 to movement), the proximal end 5 of the arm 6 about the center of the distal end of arm rotation, flipping the wrist of the arm 4 about the distal turns 5, the boom 6, arm 5 and the wrist inverted 4 achieve a given proportion of rotary motion of the robot arm radial line (R forward motion); inverted structure built flip of the wrist 4, the end of vacuum housing about a horizontal axis 3 of the wrist inverted; vacuum suction tip 3 wafer, a wafer moving drive .

[0042] 上述晶圆传输机器人的升降机构,参考附图2所示,该升降机构包括伺服电机101、 减速器102、联轴器103、基座型材104、螺母108、丝杠109、导轨105、滑块107和升降连接板106。 [0042] The elevating mechanism of the wafer transfer robot, reference is shown in Figure 2, the lift mechanism includes a servo motor 101, reduction gear 102, the coupling 103, the base profile 104, a nut 108, screw 109, guide rails 105 , the connecting plate 106 and lift the slider 107. 伺服电机101、减速器102、丝杠109和螺母108同轴布置于基座1侧壁上并组成丝杠螺母副传动机构;基座型材104为基座侧面支撑,导轨105固定在基座型材104上;螺母108连接升降连接板106。 Servo motor 101, reducer 102 coaxial with the screw 109 and the nut 108 is disposed on the side wall and the base composition screw nut gear mechanism; base profile sides of the base 104 is supported by guide rails 105 fixed to the base profile on 104; 106 nut 108 connected to the lifting web.

[0043] 伺服电机101与减速器102连接,减速器102的输出轴通过联轴器103与丝杠109连接;丝杠109固定在基座1的侧壁中间,两导轨105固定在基座1的侧壁两侧;所述各导轨105 上分别安装有两个滑块107,两个滑块107分别与升降连接板1〇6连接,以实现导向作用。 [0043] The servo motor 101 and the reducer 102 is connected to an output shaft of the speed reducer 102 is connected through a coupling 103 to the spindle 109; lead screw 109 is fixed in the middle of the side wall of the base 1, two guide rails 105 fixed to the base 1 sides of the side walls; two sliders 107 are respectively mounted, two sliders 107 are respectively connected to the elevating link plate 1〇6 on the guide rails 105, to achieve a guiding role.

[0044] 所述伺服电机101经减速器10 2减速,驱动丝杠螺母副的螺母108的升降运动,进而带动升降连接板106上下运动。 [0044] 101 by the servo motor 10 of the second reduction gear unit, the drive nut screw nut 108 of the lifting movement, thereby bringing down the connecting plate 106 up and down.

[0045] 上述晶圆传输机器人的中心回转(e向运动)机构,包括e向直驱电机204、0向转轴203、交叉滚子轴承b215、推力轴承213。0向直驱电机204的底座固定在升降连接板1〇6上,e 向转轴203连接在e向直驱电机204的输出轴端并与0向转轴连接板a2〇5连接;0向转轴连接板b206通过螺钉连接安装固定在9向转轴连接板a2〇5上。 [0045] The center of rotation of the wafer transfer robot (e backward motion) mechanism, comprising a direct drive motor e to 204,0 to shaft 203, cross roller bearings B215, 213.0 thrust bearing 204 is fixed to the direct drive motor base 1〇6 the elevating link plate, e 203 e is connected and connected to the direct drive motor output shaft 204 and the shaft connecting plate a2〇5 0 to the rotation shaft; 0 is connected to the mounting shaft coupling plate 9 is fixed by screws b206 to the shaft connecting plate a2〇5.

[0046] 交叉滚子轴承b215的外圈固定安装在连接板固定套筒201内壁上,以承受0向转轴203的径向力和倾覆力;推力轴承21 3通过9向转轴套筒214、连接板固定上套筒2〇2安装在9 向转轴203的外壁上。 [0046] b215 cross roller bearing outer ring fixed to an inner wall of the connecting plate 201 mounted on the fixed sleeve, 0 to withstand the radial force and overturning force of the rotation shaft 203; and a thrust bearing sleeve 213 are connected to the shaft 214 by 9 2〇2 plate is fixed on the sleeve 9 is mounted to the outer wall of the shaft 203. 推力轴承213用以承受机器人臂体的轴向力。 The thrust bearing 213 for receiving the axial force of the robot arm. 9向转轴2〇3与基座上盖110配合,同时在基座上盖110内孔处安装有u型大弹性橡胶圈217和0型耐磨高强度密封环216〇 9 with the top cover 110 and the rotary shaft 2〇3 base, while the base cover is mounted within the hole 110 u-large resilient rubber ring 217 and the 0-type seal ring wear-resistant high strength 216〇

[0047] 0向直驱电机204输出轴直接驱动9向转轴203转动,带动交叉滚子轴承M15内圈、0 向转轴套筒214和推力轴承21 3下圈共同转动。 [0047] 0 204 directly to the output drive shaft direct drive motor rotates the shaft 9203, driven by a common rotatable cross roller bearing inner ring of M15, the 0 ring bearing 213 to shaft sleeve 214 and the thrust. U型大弹性橡胶圈217浮动承受0向转轴2〇3的径向偏载。 A large U-shaped resilient rubber ring 217 radially floating partial load receiving 0 to 2〇3 shaft.

[0048] 上述晶圆传输机器人的径向直线运动(R向运动)机构,包括R向直驱电机2〇7、R向转轴208、大臂6、小臂5、翻转手腕4;R向直驱电机2〇7同轴安装在e向转轴2〇3内部,R向直驱电机207的底部安装在0向转轴连接板b 2〇6上;R向直驱电机207的输出轴直接连接R向转轴208,R向转轴208和0向转轴203之间在0向转轴203上端通过交叉滚子轴承a212支撑,大臂6 一端连接在9向转轴203上,另一端连接小臂5近端(靠近大臂6-端为近端),小臂5远端连接翻转手腕4。 [0048] The radial line of motion of the wafer transfer robot (R forward movement) mechanism, comprising a direct drive motor 2〇7 to R, R to the shaft 208, the boom 6, arm 5, the wrist inverted. 4; R to the linear 2〇7 drive motor is mounted coaxially to the drive shaft directly to the interior 2〇3, R e at the bottom of the motor 207 is mounted on the shaft connecting plate b 2〇6 0; R & lt direct drive motor to the output shaft 207 directly connected to R & lt to the shaft 208, the shaft 208 and 0 R & lt connection between the rotating shaft 203 to the rotation axis 0 toward the upper end by a cross roller bearing 203 is supported a212, the boom 6 is connected to one end of the rotary shaft 9 to 203, the other end of the proximal end of the arm 5 ( 6- near the proximal end of the arm), an arm 5 connected to the distal end of the wrist 4 inverted.

[0049] R向直驱电机207及R向转轴2〇8随0向转轴2〇3同步回转,同时R向直驱电机207输出轴可独立驱动R向转轴2〇8相对于e向转轴2〇3转动,R向转轴2〇8的回转驱动大臂6绕0向转轴203中心回转,同时小臂5近端绕大臂6远端(大臂6远离9向转轴203的一端)回转,翻转手腕4 绕小臂5远端回转,通过大臂6、小臂5和翻转手版4二连杆疋比角速度运动,头现机器人的R 向直线伸缩运动。 [0049] R to R and the direct drive motor 207 to the rotation shaft 2〇8 rotated in synchronization with the rotation shaft 2〇3 0, while the R direct drive motor output shaft 207 to the rotation shaft 2〇8 R independently driven with respect to the rotation shaft 2 e 〇3 rotated, R 6 drive the boom swivel about 0 to 203 to the rotary shaft 2〇8 shaft center while the proximal end 5 of the arm 6 about the distal end of the boom (boom 6 to 9 remote from the end of the shaft 203) rotates, flip wrist arm 4 about the distal turns 5, 6 by the boom, the arm 5 and the second link plates 4 flip hand piece goods ratio of angular velocity motion, the robot R to the first current linear telescopic movement.

[0050] 上述晶圆传输机器人的升降和回转机构2 (R向运动),大臂6包括大臂壳体6〇1、大臂固定带轮210、小臂驱动轮6〇6、大臂上下半钢带61〇、小臂驱动轮轴6〇4、交叉滚子轴承d612、交叉滚子轴承e613、深沟球轴承605。 [0050] The lifting and turning mechanism of the wafer transfer robot 2 (R forward movement), the boom 6 comprises a housing 6〇1 boom, boom fixed sheave 210, drive wheels 6〇6 arm, large arm semi-steel 61〇, arm drive axle 6〇4, cross roller bearings d612, cross roller bearings e613, deep groove ball bearing 605.

[0051] 大臂壳体601通过大臂壳体上盖607、大臂壳体下盖6〇2上下密封。 [0051] The boom arm housing 601 by a housing cover 607, the lower seal 6〇2 vertical boom housing cover.

[0052] R向转轴208上端连接大臂壳体601的近端上壳体,大臂固定带轮2丨〇固定在0向转轴203上端,大臂固定带轮210和R向转轴208之间通过交叉滚子轴承d61 2支撑;大臂壳体下盖602和大臂固定带轮210之间通过交叉滚子轴承e613支撑。 Fixed to the upper end of the shaft between 0 and 203, the arm 210 and a pulley fixed to the shaft 208 R [0052] R connected to the proximal end of the boom to the upper end of the housing 601 of the shaft housing 208, the fixed arm pulley 2 billion Shu by cross roller bearing support d61 2; 602 and a lower pulley fixed to the boom arm between the cover housing 210 by a cross roller bearing is supported e613.

[0053] 大臂上下半钢带610固定安装在大臂行星轮系的大臂固定带轮21〇和小臂驱动轮606之间,大臂壳体601远端下壳体固定连接小臂驱动轮轴6〇4,小臂驱动轮轴6〇4和小臂驱动轮606之间通过一对深沟球轴承6〇5支撑;小臂壳体5〇1、大臂壳体上盖607之间通过交叉滚子轴承c608支撑;小臂驱动轮606上端连接小臂壳体501近端。 The boom and arm fixed sheave 21〇 [0053] Large steel half arm 610 is fixedly mounted on a planetary gear train between the drive wheel arm 606, the distal end of the lower arm housing 601 is fixedly connected to the drive arm housing 6〇4 axle, drive axle 6〇4 arm and arm drive wheels via a pair of deep groove ball bearings supported between 6〇5 606; 5〇1 housing arm, the arm 607 through the housing between the upper cover c608 cross roller bearing support; an upper arm 606 connected to the drive wheel 501 housing a proximal end of the arm.

[0054] 大臂壳体601 (相当于行星架)、大臂固定带轮2丨〇(太阳轮)、小臂驱动轮606 (行星轮)、大臂上下半钢带610共同组成行星周转轮系。 [0054] The boom housing 601 (corresponding to the carrier), the fixed arm pulley 2 Shu square (sun gear), an arm drive wheels 606 (planetary gear), the lower half of the large arm 610 together constitute a planetary strip epicyclic system. 大臂壳体6〇1绕0向转轴203回转,带动小臂驱动轮606绕大臂固定带轮210公转,大臂上下半钢带610绕带轮缠绕,而大臂固定带轮210不随大臂壳体601回转,使小臂驱动轮606绕小臂驱动轮轴604自转,进而驱动小臂壳体501近端绕大臂壳体6〇1远端回转。 The boom housing 6〇1 0 to about shaft 203 rotates, driving the drive wheel 606 about the boom arm fixed pulley 210 revolves large arm 610 around pulley half strip is wound, and the boom is not fixed sheave 210 with a large swing arm housing 601, drive wheel 606 so that the arm 604 about the arm rotation drive axle, which in turn drives the arm housing about the proximal end 501 of the boom housing 6〇1 distal turns. - -

[0055] 上述晶圆传输机器人的径向直线运动®向运动)机构中,小臂5包括小臂壳体501、 小臂定轮512、小臂上下半钢带510、手腕驱动轮5〇4、手腕驱动轮轴502;在小臂壳体501内部,固定于大臂壳体601远端的小臂驱动轮轴604上端连接有小臂定轮512•,手腕驱动轮轴502固定在小臂壳体501远端下壳体上,手腕驱动轮504通过上下一对深沟球轴承a503支撑在手腕驱动轮轴502下端,在手腕转轴505和小臂上盖507之间通过交叉滚子轴承b506支撑; 而小臂上下半钢带510连接在小臂定轮512和手腕驱动轮504之间;手腕驱动轮504上端连接手腕转轴505,手腕转轴505连接翻转手腕4。 [0055] The radial line of motion of the wafer transfer robot motion to ®) mechanism, the arm 5 comprises a housing arm 501, the arm 512 is fixed, the upper and lower semi-strip arm 510, a wrist drive wheels 5〇4 wrist drive axle 502; arm inside the housing 501, 601 fixed to the distal end of the boom arm drive axle housing connected to the upper end of the arm 604 fixed wheel 512 •, wrist drive axle 502 is fixed to the arm housing 501 the distal end of the lower housing, the drive wheel 504 by the wrist of the upper and lower deep groove ball bearings a503 drive axle 502 supported in the lower end of the wrist, the wrist and arm shaft 505 between the upper cover 507 through the cross roller bearing b506 support; and small arm 510 connected to the lower half of the strip arm 512 fixed wheel between the drive wheel 504 and wrist; wrist drive wheel 504 connected to the upper end of the rotating shaft 505 of the wrist, the wrist rotation axis 505 is connected flip wrist 4.

[0056] 小臂壳体501通过小臂上盖507密封。 [0056] The housing 501 of the arm 507 is sealed by the upper lid arm.

[0057] 小臂壳体501近端绕大臂壳体601远端回转时,小臂定轮512相对于大臂壳体601静止,小臂上下半钢带51〇绕小臂定轮512和手腕驱动轮504缠绕,组成小臂行星轮系。 When [0057] the arm 601 about the distal end of the proximal housing 501 housing rotary arm, an arm 512 fixed wheel 601 with respect to stationary housing boom, the arm up and down about a half strip 51〇 fixed wheel 512 and the arm wrist drive wheel 504 is wound to form the arm planetary gear train. 手腕驱动轮504绕手腕驱动轮轴5〇2回转,手腕转轴5〇5随之绕小臂壳体501远端转动。 Wrist drive wheel 504 about the wrist drive axle 5〇2 rotation, the distal end of the wrist shaft will rotate about the arm 5〇5 housing 501.

[0058] 参考附图5所示,手腕转轴5〇5绕小臂壳体501远端回转,手腕转轴5〇5上端固定连接翻转手腕4,翻转手腕4内部设计翻转机构,驱动真空吸附末端3翻转。 [0058] Referring to Figure 5, the wrist about the arm shaft housing 501 5〇5 distal turn, is fixedly connected to the upper end of the wrist shaft 5〇5 flip of the wrist 4, the wrist inverted internal design inverting mechanism 4, driving the vacuum suction tip 3 flip.

[0059] 该晶圆传输机器人响直线运动时,参考附图6所示为小臂5、大臂6相对回转动作示意(对比附图1中大小臂状态),同时真空吸附末端3实现了翻转动作。 [0059] When the wafer transfer robot ring linear motion, with reference to the accompanying drawings illustrates an arm 6 5, 6 relative to swivel arm gesture (compare figures 1 state arm size), while the vacuum suction tip 3 is overturned action.

Claims (4)

  1. 1.一种直驱式可翻转晶圆传输机器人,其特征在于:该机器人包括基座(1)、升降和回转机构(2)、真空吸附末端(3)、翻转手腕⑷、小臂⑶和大臂(6);所述基座⑴内部安装升降和回转机构(2),升降和回转机构(2)与大臂(6) -端连接,大臂(6)另一端与小臂(5) -端连接,小臂(5)另一端与翻转手腕(4)的一端连接,翻转手腕(4)的另一端与真空吸附末端⑶连接; 所述晶圆传输机器人动作时,基座(1)固定,升降和回转机构(2)绕基座(1)中心回转, 还沿基座垂直方向做升降运动;大臂(6)近端可绕升降和回转机构(2)中心回转,小臂(5)近端绕大臂⑶远端中心回转,翻转手腕⑷绕小臂⑶远端回转,大臂(6)、小臂⑶和翻转手腕(4)的定比例回转实现机器人手臂的径向直线运动;翻转手腕(4)内置翻转结构,真空吸附末端⑶绕手腕壳体水平轴线翻转;真空吸附末端( 3)吸附晶圆片,带动 A direct drive invertible wafer transfer robot, characterized in that: the robot includes a base (1), and a rotary elevating mechanism (2), the end of vacuum (3), the wrist flip ⑷, arm and ⑶ boom (6); said inner mounting base ⑴ lifting and turning mechanism (2), and a rotary elevating mechanism (2) and the boom (6) - end and the other end of the boom (6) with an arm (5 ) - terminal is connected, an arm (5) and another end of the flip of the wrist (4) is connected to the other end of the flip of the wrist (4) and the vacuum connection end ⑶; when operation of the wafer transfer robot, the base (1 ) is fixed, and a rotary elevating mechanism (2) around the base (1) the center of rotation further lifting movement in the vertical direction to make the base; boom (6) rotatable about a proximal end and a rotary elevating mechanism (2) the center of rotation, an arm (5) about the proximal end of the distal end of the boom ⑶ rotated through, flipping around the wrist of the arm ⑶ ⑷ distal turns, the boom (6), and flip ⑶ wrist arm (4) the ratio of a given implementation of the robot arm swing radially linear motion; flip of the wrist (4) built-inverted structure, the end of vacuum ⑶ wrist housing about a horizontal axis inversion; vacuum end (3) adsorption of the wafer, drive 圆片运动;晶圆传输机器人的升降和回转机构(2)的升降机构包括伺服电机(101)、减速器(102)、联轴器(103)、基座型材(104)、螺母(1〇8)、丝杠(109)、导轨(105)、滑块(107)和升降连接板(106); 伺服电机(101)、减速器(1〇2)、丝杠(109)和螺母(108)同轴布置于基座(1)侧壁上并组成丝杠螺母副传动机构;基座型材(1〇4)为基座侧面支撑,导轨(1〇5)固定在基座型材(104)上; 螺母(108)连接升降连接板(1〇6); 伺服电机(101)与减速器(1〇2)连接,减速器(1〇2)的输出轴通过联轴器(1〇3)与丝杠(109)连接;丝杠(109)固定在基座(1)的侧壁中间,两导轨(1〇5)固定在基座(1)的侧壁两侦所述各导轨(105)上分别安装有两个滑块(107),两个滑块(107)分别与升降连接板(106)连接,以实现导向作用; 所述伺服电机(101)经减速器(1〇2)减速,驱动丝杠螺母副的螺母(108) Moving the wafer; wafer transfer robot and a rotary elevating mechanism (2) of the lift mechanism includes a servo motor (101), a speed reducer (102), coupling (103), the base profile (104), the nut (1〇 8), screw (109), the guide rail (105), a slider (107) and the lifting plate (106); the servo motor (101), a speed reducer (1〇2), screw (109) and a nut (108 ) coaxially disposed in the base (1) and screw nut gear mechanism composed of the side wall; a base profile (1〇4) support for the sides of the base, the guide rail (1〇5) fixed to the base profile (104) on; a nut (108) connected to the lifting plate (1〇6); servo motor (101) and a reducer (1〇2) connected to a speed reducer (1〇2) output shaft through a coupling (1〇3) connected with the screw (109); the threaded sidewall (109) fixed to the side wall intermediate the base (1), the two guide rails (1〇5) fixed to the base (1) to detect the two guide rails (105 a) there are respectively mounted two sliders (107), two slides (107) are connected with the lifting plate (106), to achieve a guiding role; said servo motor (101) via a speed reducer (1〇2) deceleration, the drive nut of the screw nut (108) 升降运动,进而带动升降连接板(106)上下运动;晶圆传输机器人的升降和回转机构(2)的中心回转机构,包括9向直驱电机(2〇4)、 9向转轴(203)、交叉滚子轴承b (215)、推力轴承(213) 向直驱电机(204)的底座固定在升降连接板(1〇6)上,响转轴(2〇3)连接在响直驱电机(204)的输出轴端并与9向转轴连接板a (205)连接;9向转轴连接板b (2〇6)通过螺钉连接安装固定在0 向转轴连接板a (205)上; 交叉滚子轴承b (215)的外圈固定安装在连接板固定套筒(2〇1)内壁上,以承受0向转轴(203)的径向力和倾覆力;推力轴承(2丨3)通过0向转轴套筒(214)、连接板固定上套筒(2〇2) 安装在G向转轴(203)的外壁上;推力轴承(213)用以承受机器人臂体的轴向力; 0向转轴(203)与基座上盖(110)配合,同时在基座上盖(11〇)内孔处安装有U型大弹性橡胶圈(217) 和0型耐磨高强度密封环(216); 0向直驱电机( Lifting motion so as to drive the lifting plate (106) moving up and down; wafer transfer robot and a rotary elevating mechanism (2) the center of the rotation mechanism, including the direct drive motor 9 (2〇4), the rotary shaft 9 (203), cross roller bearing b (215), a thrust bearing (213) to the direct drive motor (204) fixed to the lift base plate (1〇6), the shaft ring (2〇3) connected in direct drive motor ring (204 ) is connected to the output shaft 9 and the link plate shaft a (205); coupling plate 9 to the rotary shaft B (2〇6) mounted by screwing on a connecting plate fixed to the rotary shaft 0 to a (205); cross roller bearing b (215) fixedly mounted on the outer ring (2〇1) fixed to the inner wall of the sleeve web, 0 to withstand radial forces and overturning force to the rotation shaft (203); and a thrust bearing (2 Shu 3) to the rotary shaft through 0 a sleeve (214), the connecting plate fixed to the sleeve (2〇2) mounted on the outer wall of the G axis (203); and a thrust bearing (213) for receiving the axial force of the robot arm; 0 to the shaft (203 ) and the base cover (110) with, at the same time (11〇) mounted within the bore at a large U-shaped elastic rubber ring (217) and a 0-type high-strength wear-resistant sealing ring (216) in the base cover; 0 to direct drive motor ( 204)输出轴直接驱动9向转轴(203)转动,带动交叉滚子轴承b (2丨5)内圈、9向转轴套筒(214)和推力轴承(213)下圈共同转动;U型大弹性橡胶圈(217)浮动承受9 向转轴(203)的径向偏载; R向直驱电机(207)、R向转轴(208)、大臂(;6)、小臂(5)、翻转手腕⑷组成晶圆传输机器人的径向直线运动机构;R向直驱电机(207)同轴安装在0向转轴(203)内部,R向直驱电机(207)的底部安装在0向转轴连接板b (206)上;R向直驱电机(2〇7)的输出轴直接连接R向转轴(208),R向转轴(208)和0向转轴(203)之间在0向转轴(2〇3)上端通过交叉滚子轴承a (212)支撑,大臂(6) -端连接在0向转轴(203)上,另一端连接小臂⑶近端,小臂⑶远端连接翻转手腕(4); R向直驱电机(207)及R向转轴(208)随0向转轴(203)同步回转,同时R向直驱电机(207) 输出轴可独立驱动R向转轴(208)相对于0向转轴(203)转动,R向转轴(208)的回转驱动大臂(6 204) directly drives the output shaft 9 rotates the shaft (203), to drive cross roller bearing b (2 Shu 5) of the inner ring, the sleeve 9 to the shaft (214) and the thrust bearing ring rotate together (213); U type large an elastic rubber ring (217) receiving floating shaft 9 radially partial load (203); to R & lt direct drive motor (207), R to the shaft (208), the boom (; 6), an arm (5), flipped ⑷ wrist radial linear motion mechanism consisting of the wafer transfer robot; R & lt (207) mounted coaxially to the direct drive motor mounted inside the base, R to the direct drive motor (207) to the shaft (203) is connected to a rotary shaft at 0 0 panel b (206) on; R R is directly connected to the shaft (208) to the direct drive motor (2〇7) an output shaft, at 0 to the rotation shaft (2 R between the shaft (208) and a 0 to a shaft (203) 〇3) by an upper cross roller bearing a (212) supported by the boom (6) - connected to the end of the shaft (203), and the other end connected to the proximal end of the arm ⑶ 0, the distal end of the arm is connected flip ⑶ wrist ( . 4); R synchrocyclotron to the direct drive motor (207) and R to the shaft (208) with a 0 to the shaft (203), and R to the direct drive motor (207) output shaft can be driven independently R to the shaft (208) with respect to 0 rotated shaft (203), R boom driving (the rotary shaft 6 (208) )绕响转轴(203)中心回转,同时小臂⑶近端绕大臂(6)远端回转,翻转手腕⑷绕小臂(5)远端回转,通过大臂(6)、小臂(5)和翻转手腕(4)三连杆定比角速度运动,实现机器人的R向直线伸缩运动;上述晶圆传输机器人的径向直线运动机构中,大臂(6)包括大臂壳体(601)、大臂固定带轮(210)、小臂驱动轮(606)、大臂上下半钢带(610)、小臂驱动轮轴(604)、交叉滚子轴承d (612)、交叉滚子轴承e (613)、深沟球轴承b (605); 大臂壳体(601)通过大臂壳体上盖(607)、大臂壳体下盖(602)上下密封; R向转轴(208)上端连接大臂壳体(601)的近端上壳体,大臂固定带轮(210)固定在0向转轴(203)上端,大臂固定带轮(210)和R向转轴(208)之间通过交叉滚子轴承d (612)支撑; 大臂壳体下盖(602)和大臂固定带轮(210)之间通过交叉滚子轴承e (613)支撑; 大臂上下半钢带(610)固定安装在大臂行星轮系的大臂固定 ) Ring around the shaft (203) the center of rotation, while the proximal end of the arm about ⑶ boom (6) distal turn, flip forearm around the wrist ⑷ (5) distal turn, through the boom (6), an arm (5 ) and flip of the wrist (4) three angular velocity ratio of a given link motion, the robot R to achieve linear telescopic movement; radial linear motion mechanism of the wafer transfer robot, a boom (6) comprises a boom housing (601) , arm fixed sheave (210), a drive wheel arm (606), the large arm half strip (610), an arm drive axle (604), cross roller bearing d (612), cross roller bearing e (613), deep groove ball bearings b (605); arm housing (601) through the boom housing cover (607), the lower boom vertically seal housing cover (602); (208) to the upper end of the rotation shaft R between the connecting arm housing (601) on the proximal end of the housing, fixed to the boom sheave (210) is fixed to 0 to the shaft (203) an upper end, a boom fixed sheave (210) to the rotary shaft and R (208) supported by a cross roller bearing d (612); between the lower arm housing cover (602) and a boom fixed sheave (210) by a cross roller bearing e (613) a support; big arm half strip (610 arm) fixedly mounted to a planetary gear train fixed to the boom 带轮(210)和小臂驱动轮(606) 之间,大臂壳体(601)远端下壳体固定连接小臂驱动轮轴(604),小臂驱动轮轴(604) 和小臂驱动轮(606)之间通过一对深沟球轴承b (605)支撑;小臂壳体(501)、大臂壳体上盖(607) 之间通过交叉滚子轴承c (608)支撑;小臂驱动轮(606)上端连接小臂壳体(501)近端。 Between the pulley (210) and a drive wheel arm (606), the arm housing (601) at a distal end fixedly connected to the arm drive axle housing (604), an arm drive axle (604) and the drive wheel arm between the support (606) by a pair of deep groove ball bearings b (605); an arm housing (501), between the housing cover arm (607) by a cross roller bearing c (608) is supported; arm wheels (606) connected to the upper end of the arm housing (501) proximal end.
  2. 2. 根据权利要求1所述的一种直驱式可翻转晶圆传输机器人,其特征在于:大臂壳体(601)、大臂固定带轮210、小臂驱动轮(606)、大臂上下半钢带(610)共同组成行星周转轮系;大臂壳体(601)绕0向转轴(203)回转,带动小臂驱动轮(606)绕大臂固定带轮(210)公转,大臂上下半钢带(610)绕带轮缠绕,而大臂固定带轮(210)不随大臂壳体(601)回转,使小臂驱动轮(606)绕小臂驱动轮轴(604)自转,进而驱动小臂壳体(501)近端绕大臂壳体(601)远端回转。 According to one of the claims 1 direct drive invertible wafer transfer robot, wherein: the arm housing (601), a pulley 210 fixed to the boom, the arm driving wheel (606), the boom upper and lower half-strip (610) together constitute a planetary epicyclic gear train; arm housing (601) about 0 to shaft (203) rotates, driven by drive wheel arm (606) of the boom about a fixed sheave (210) revolves large arm half strip (610) is wound around the pulley, and the sheave fixing arm (210) does not rotate with the arm housing (601), so that the drive wheel arm (606) about the drive axle of the arm (604) rotation, Further the drive arm housing (501) about the proximal end of the housing arm (601) distal turns.
  3. 3. 根据权利要求1所述的一种直驱式可翻转晶圆传输机器人,其特征在于:晶圆传输机器人的径向直线运动机构中,小臂(5)包括小臂壳体(501)、小臂定轮(512)、小臂上下半钢带(510)、手腕驱动轮(504)、手腕驱动轮轴(502);在小臂壳体(501)内部,固定于大臂壳体(601)远端的小臂驱动轮轴(604)上端连接有小臂定轮(512);手腕驱动轮轴(502)固定在小臂壳体(501)远端下壳体上,手腕驱动轮(504)通过上下一对深沟球轴承a (503)支撑在手腕驱动轮轴(502)下端,在手腕转轴(505)和小臂上盖(507)之间通过交叉滚子轴承b (506)支撑;而小臂上下半钢带(510)连接在小臂定轮(512)和手腕驱动轮(504)之间;手腕驱动轮(504)上端连接手腕转轴(505),手腕转轴(505)连接翻转手腕⑷; 小臂壳体(501)通过小臂上盖(507)密封。 According to one of the claims 1 direct drive invertible wafer transfer robot, characterized in that: the radial linear motion mechanism of the wafer transfer robot, the arm (5) comprises a housing arm (501) , fixed wheel arm (512), the upper and lower half-arm strip (510), a wrist drive wheel (504), a wrist drive shaft (502); in the (501) inside the housing arm, the arm is fixed to the housing ( 601) of the distal end of the arm drive shaft (604) is connected to the upper end of the arm fixed wheel (512); a wrist drive shaft (502) is fixed (501) at the distal end of the housing arm housing, a wrist drive wheel (504 ) support (502) at the lower end of the wrist drive axle through a pair of upper and lower deep groove ball bearings (503), a wrist rotating shaft (505) between the cover and the arm (507) by a cross roller bearing b (506) is supported; the upper and lower half strip arm (510) connected to the fixed wheel arm (512) and wrist driving wheel (504) between; wrist drive wheel (504) connected to the upper end of the wrist shaft (505), a wrist rotating shaft (505) connected to flip wrist ⑷; forearm housing (501) by an arm cover (507) sealed.
  4. 4. 根据权利要求1所述的一种直驱式可翻转晶圆传输机器人,其特征在于:小臂壳体(501)近端绕大臂壳体(601)远端回转时,小臂定轮(512)相对于大臂壳体(601)静止,小臂上下半钢带(510)绕小臂定轮(512)和手腕驱动轮(504)缠绕,组成小臂行星轮系;手腕驱动轮(504)绕手腕驱动轮轴(502)回转,手腕转轴(505)随之绕小臂壳体(501)远端转动; 手腕转轴(505)绕小臂壳体(501)远端回转,手腕转轴(505)上端固定连接翻转手腕(4),翻转手腕⑷内部设计翻转机构,驱动真空吸附末端(3)翻转。 According to one of the claims 1 direct drive invertible wafer transfer robot, wherein: when the arm housing (501) about the proximal end of the housing arm (601) distal turn, an arm fixed wheel (512) relative to the arm housing (601) at rest, the upper and lower half-arm strip (510) around a fixed wheel arm (512) and wrist driving wheel (504) is wound to form the arm planetary gear train; wrist drive wheel (504) about the wrist drive shaft (502) rotates, the rotation shaft of the wrist (505) along the arm about a housing (501) rotates distal end; wrist axis (505) about the arm housing (501) distal turn, wrist the shaft (505) fixedly connected to the upper end of the wrist inverted (4), the internal flip wrist design ⑷ inverting mechanism, the vacuum suction driving end (3) inverted.
CN 201510121144 2015-03-19 2015-03-19 A direct-drive-type wafer transport robot invertible CN104723332B (en)

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