CN104723332B - A kind of direct-drive type may be reversed wafer transfer robot - Google Patents

A kind of direct-drive type may be reversed wafer transfer robot Download PDF

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Publication number
CN104723332B
CN104723332B CN201510121144.7A CN201510121144A CN104723332B CN 104723332 B CN104723332 B CN 104723332B CN 201510121144 A CN201510121144 A CN 201510121144A CN 104723332 B CN104723332 B CN 104723332B
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forearm
wrist
rotating shaft
large arm
arm
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CN104723332A (en
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刘志峰
谷光伟
时政
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Beijing University of Technology
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Beijing University of Technology
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Abstract

A kind of direct-drive type may be reversed wafer transfer robot, base interior installs lifting and slew gear, and lifting and slew gear are connected with large arm one end, and the large arm other end is connected with forearm one end; the forearm other end is connected with one end of upset wrist, and the other end for overturning wrist is connected with vacuum suction end.During the wafer transfer robot motion, large arm, forearm, three connecting rods of upset wrist composition realize radial alignment stretching motion than speed motion surely;Upset wrist realizes rotary movement using motor driven vacuum absorption end.Directly driven using direct driving motor, simplify robot interior structure, cut down the number of intermediate links, improve robot transmission precision and efficiency.Less part mechanism, is easy to the Assembling Production of robot.The use of Steel Belt Transmission, can provide transmission accuracy, strengthen machine human reriability, reduce the generation of pollution particulate, improve the cleaniliness classs of robot.Upset wrist increases the robot upset free degree, strengthens the scope of application of robot.

Description

A kind of direct-drive type may be reversed wafer transfer robot
Technical field
The invention is related to wafer automated handling apparatus field, and in particular to a kind of wafer transfer clean-room robot.
Background technology
In super large-scale integration (IC) manufacture process, wafer needs the frequent transmission between hundreds of road techniques, brilliant Circle production line procedures are concentrated, and process velocity is fast, and working environment purity requirements are high, needs high performance wafer transfer robot. Existing R- θ type wafer transfers robot, is equipped with decelerator deceleration using servomotor (stepper motor) driving more and drives biography again Moving axis is rotated, and drive mechanism is complicated, installation difficulty, and most reducing gears (V belt translation, gear drive etc.) can make power transmission shaft inclined Put, more easily cause the generation of unbalance loading and redundancy radial load, cause Motor torque loss and precision to reduce.Driven using direct driving motor Dynamic, it is possible to reduce the use of reducing gear, direct driving motor is directly connected to load, produces without unbalance loading, high transmission accuracy, damages without moment of torsion Lose.The hollow design feature of direct driving motor, facilitates the inside cabling of robotic wafer control circuit and gas circuit, is also capable of achieving difference Coaxially arranged, the reduction number of components of transmission between centers, reduces the rotary inertia of rotating shaft, is easy to assembling.
Existing R- θ type wafer transfers robot, its radially (R to) linear motion determine ratio by large arm, forearm and wrist Example motion realize (principle it is visible [design and research of radial alignment sports type wafer-handling robot. Cong Ming, Zhang Shijun. manufacture Industry is automated. the 2nd phase 2005-02 of volume 27]).Use Timing Belt more prior art, using planet circular system transmission principle, use One Motor drive large arm, forearm and wrist joint.But Timing Belt has lacking for corner angle error, elastic deformation and fatigue wear Point, transmission system rigidity are low, easily cause vibration in speed and sudden change of acceleration or when changing very big, are also easy to produce particulate pollution Source.Using Steel Belt Transmission, no elastic deformation, high transmission accuracy, system stiffness are big.Steel Belt Transmission without the need for tensioning apparatus, without fatigue Abrasion, can improve robot reliability, increase robot service life.The generation that particulate can also be avoided to pollute, improves machine The cleanliness factor of device people.
The content of the invention
For problem above, the main purpose of the invention is to provide wafer transfer robot.Driven using direct driving motor, solution Certainly prior art type of drive, complex structure, installation difficulty, power transmission shaft be not coaxial, is driven the problem of unbalance loading etc..Passed using steel band The dynamic shortcoming for solving corner angle error, elastic deformation and fatigue wear in toothed belt transmission, improves transmission accuracy and service life, Robot cleanliness factor is provided.
The another object of the invention is to provide direct-drive type end and may be reversed wafer transfer robot.In wafer transfer process In, need the turning operation of wafer, direct-drive type end to may be reversed robot and can meet this kind of demand under various working.
The present invention provides direct-drive type end and may be reversed wafer transfer robot, adopts the following technical scheme that:A kind of direct-drive type Turnable wafer transfer robot, the robot include pedestal 1, lifting and slew gear 2, vacuum suction end 3, upset wrist 4th, forearm 5 and large arm 6;Lifting and slew gear 2 are installed inside the pedestal 1, lifting and slew gear 2 are (near with 6 one end of large arm End) connection, 6 other end of large arm (distal end) be connected with 5 one end of forearm (near-end), 5 other end of forearm (distal end) and overturns wrist 4 One end connects, and the other end for overturning wrist 4 is connected with vacuum suction end 3.
During the wafer transfer robot motion, pedestal 1 is fixed, lifting and slew gear 2 can around 1 center steering of pedestal, Can also move up and down along pedestal vertical direction (Z-direction);6 near-end of large arm can (θ be to fortune with 2 center steering of slew gear around lifting It is dynamic), 5 near-end of forearm is turned round around 6 distal center of large arm, and upset wrist 4 is turned round around 5 distal end of forearm, large arm 6, forearm 5 and upset hand The radial alignment motion (R is to motion) of robot arm is realized in the certainty ratio revolution of wrist 4;Upset 4 built-in turning structure of wrist, very The attached end 3 of suction is overturn around wrist housing horizontal axis;Wafer is adsorbed in vacuum suction end 3, drives wafer motion.
The elevating mechanism of above-mentioned wafer transfer robot, shown in refer to the attached drawing 2, the elevating mechanism include servomotor 101, Decelerator 102, shaft coupling 103, pedestal section bar 104, nut 108, leading screw 109, guide rail 105, slide block 107 and lifting connecting plate 106.Servomotor 101, decelerator 102, leading screw 109 and nut 108 are coaxially arranged on 1 side wall of pedestal and to constitute feed screw nut Auxiliary drive gear;Pedestal section bar 104 is pedestal lateral support, and guide rail 105 is fixed on pedestal section bar 104;The connection of nut 108 rises Drop connecting plate 106.
Servomotor 101 is connected with decelerator 102, and the output shaft of decelerator 102 is connected with leading screw 109 by shaft coupling 103 Connect;Leading screw 109 is fixed in the middle of the side wall of pedestal 1, and two guide rails 105 are fixed on the side wall both sides of pedestal 1;Each guide rail 105 On be separately installed with two slide blocks 107, two slide blocks 107 are connected with lifting connecting plate 106 respectively, to realize guide effect.
101 Jing decelerators 102 of the servomotor slow down, and drive the elevating movement of the nut 108 of screw pair, and then Lifting connecting plate 106 is driven to move up and down;
Center steering (θ is to the motion) mechanism of above-mentioned wafer transfer robot, including θ is to direct driving motor 204, θ to rotating shaft 203rd, crossed roller bearing b215, thrust bearing 213.θ is fixed on lifting connecting plate 106 to the base of direct driving motor 204, θ θ is connected to the output shaft end of direct driving motor 204 to rotating shaft 203 and is connected to rotating shaft connecting plate a205 with θ;θ connects to rotating shaft Plate b206 is connected by screw and is fixed on θ on rotating shaft connecting plate a205.
The outer ring of crossed roller bearing b215 is fixedly mounted on 201 inwall of connecting plate fixes sleeve, to bear θ to rotating shaft 203 radial load and power of toppling;Thrust bearing 213 is fixed upper bush 202 to shaft sleeve 214, connecting plate by θ and is arranged on θ To on the outer wall of rotating shaft 203.Thrust bearing 213 is to bear the axial force of robots arm's body.θ is to rotating shaft 203 and lid on pedestal 110 coordinate, while being provided with U-shaped big elastic rubber ring 217 and O-shaped wear-resisting high-strength degree sealing ring at 110 endoporus of lid on pedestal 216。
θ is rotated to 204 output shaft of direct driving motor direct drive θ to rotating shaft 203, drives crossed roller bearing b215 inner rings, θ To 213 times circle common rotations of shaft sleeve 214 and thrust bearing.U-shaped big elastic rubber ring 217 floats and bears θ to rotating shaft 203 Radial direction unbalance loading.
R constitutes the footpath of wafer transfer robot to direct driving motor 207, R to rotating shaft 208, large arm 6, forearm 5, upset wrist 4 To straight-line motion mechanism;R is coaxially mounted to θ to the inside of rotating shaft 203 to direct driving motor 207, and R pacifies to the bottom of direct driving motor 207 θ is mounted in on rotating shaft connecting plate b206;R is directly connected to R to rotating shaft 208 to the output shaft of direct driving motor 207, and R is to 208 He of rotating shaft θ is supported to 203 upper end of rotating shaft by crossed roller bearing a212 between rotating shaft 203 in θ, and 6 one end of large arm is connected to θ to rotating shaft On 203, other end connection 5 near-end of forearm (being near-end near 6 one end of large arm), 5 distal end of forearm connection upset wrist 4.
R to direct driving motor 207 and R to rotating shaft 208 with θ to 203 synchronous revolving of rotating shaft, while R is exported to direct driving motor 207 Axle can independently drive R to rotate to rotating shaft 203 to rotating shaft 208 relative to θ, revolution driving large arm 6 from R to rotating shaft 208 around θ to rotating shaft 203 center steerings, at the same 5 near-end of forearm around 6 distal end of large arm (large arm 6 away from one end from θ to rotating shaft 203) revolution, overturn wrist 4 Turn round around 5 distal end of forearm, it is fixed than angular speed motion by large arm 6, forearm 5 and 4 three connecting rod of upset wrist, realize the R of robot Move to linear telescopic.
In radial alignment motion (R to motion) mechanism of above-mentioned wafer transfer robot, large arm 6 include big arm housing 601, Large arm fixed pulley 210, forearm driving wheel 606, large arm half steel band 610, forearm live axle 604, crossed roller bearing up and down D612, crossed roller bearing e613, deep groove ball bearing b605.
Big arm housing 601 passes through large arm case top lid 607, big 602 upper-lower seal of arm housing lower cover.
R connects the near-end upper shell of big arm housing 601 to 208 upper end of rotating shaft, and large arm fixed pulley 210 is fixed on θ to turning 203 upper end of axle, large arm fixed pulley 210 and R are supported between rotating shaft 208 by crossed roller bearing d612;Under big arm housing Supported by crossed roller bearing e613 between lid 602 and large arm fixed pulley 210.
Half steel band 610 is fixedly mounted on the large arm fixed pulley 210 and forearm driving wheel of large arm planet circular system to large arm up and down Between 606,601 distal end lower house of big arm housing is fixedly connected forearm live axle 604, and forearm live axle 604 and forearm drive Supported by a pair of deep groove ball bearing b605 between driving wheel 606;By intersecting between little arm housing 501, large arm case top lid 607 Roller bearing c608 is supported;606 upper end of forearm driving wheel connects little 501 near-end of arm housing.
Big arm housing 601 (equivalent to planet carrier), large arm fixed pulley 210 (sun gear), 606 (planet of forearm driving wheel Wheel), half steel band 610 collectively constitutes planet cyclic gear train to large arm up and down.Big arm housing 601 is turned round to rotating shaft 203 around θ, is driven little Arm driving wheel 606 revolves round the sun around large arm fixed pulley 210, and half steel band 610 winds large arm around belt wheel up and down, and large arm fixed pulley 210 do not turn round with big arm housing 601, make forearm driving wheel 606 around 604 rotation of forearm live axle, and then drive little arm housing 501 near-ends are turned round around 601 distal end of big arm housing.
In radial alignment motion (R to motion) mechanism of above-mentioned wafer transfer robot, forearm 5 include little arm housing 501, Forearm fixed wheel 512, forearm half steel band 510, wrist driving wheel 504, wrist live axle 502 up and down;In little arm housing 501 Portion, 604 upper end of forearm live axle for being fixed on 601 distal end of big arm housing are connected with forearm fixed wheel 512;Wrist live axle 502 are fixed on 501 distal end lower house of little arm housing, and wrist driving wheel 504 is supported by upper and lower a pair of deep groove ball bearings a503 In 502 lower end of wrist live axle, supported by crossed roller bearing b506 between lid 507 in wrist rotating shaft 505 and forearm; And forearm half steel band 510 is connected between forearm fixed wheel 512 and wrist driving wheel 504 up and down;504 upper end of wrist driving wheel connects Wrist rotating shaft 505, the connection upset wrist 4 of wrist rotating shaft 505.
Little arm housing 501 is sealed by lid 507 on forearm.
When 501 near-end of little arm housing is turned round around 601 distal end of big arm housing, forearm fixed wheel 512 is quiet relative to big arm housing 601 Only, half steel band 510 winds forearm around forearm fixed wheel 512 and wrist driving wheel 504 up and down, constitutes forearm planet circular system.Wrist is driven Driving wheel 504 is turned round around wrist live axle 502, and wrist rotating shaft 505 is rotated around 501 distal end of little arm housing therewith.
Shown in refer to the attached drawing 5, wrist rotating shaft 505 is turned round around 501 distal end of little arm housing, and 505 upper end of wrist rotating shaft is fixed and connected Upset wrist 4 is connect, 4 indoor design switching mechanism of wrist is overturn, drives vacuum suction end 3 to overturn.
When the wafer transfer robot R is to linear motion, refer to the attached drawing 6 show forearm 5,6 relative revolution action of large arm Illustrate (size arm state in contrast accompanying drawing 1), while vacuum suction end 3 realizes rotary movement.
Using above-mentioned technical proposal, the vertical displacement movement of wafer transfer robot, center steering motion, radially straight is realized Line is moved and flip-flop movement, meets the multitask requirement in wafer handling process.Directly driven using direct driving motor, simplify machine People's internal structure, cuts down the number of intermediate links, and improves robot transmission precision and efficiency.Less part mechanism, is easy to robot Assembling Production.The use of Steel Belt Transmission, can provide transmission accuracy, strengthen machine human reriability, reduce the product of pollution particulate It is raw, improve the cleaniliness classs of robot.Upset wrist increases the robot upset free degree, strengthens the scope of application of robot. Whole wafer transferring robot overcomes existing robot part's defect, and with good stability, high transmission accuracy, speed are fast, clean Degree grade is high, and electrical control is simple, the advantages of Assembling Production is efficient.
Description of the drawings
Fig. 1 is the part assembling drawing of wafer transfer robot of the present invention.
Fig. 2 is elevating movement mechanism of wafer transfer robot of the present invention and center steering motion cut-away view.
Fig. 3 is the internal view of Fig. 2.
Fig. 4 is wafer transfer robot radial alignment motion internal view of the present invention.
Fig. 5 is the three-dimensional structure diagram of Fig. 4.
Fig. 6 be wafer transfer robot of the present invention compared to Figure 1 compared with arm it is flexible with wrist rotary movement figure.
In figure:1:Pedestal, 2:Lifting and slew gear, 3:Vacuum suction end, 4:Upset wrist, 5:Forearm, 6:Large arm.
101:Servomotor, 102:Decelerator, 103:Shaft coupling, 104:Pedestal section bar, 105:Guide rail, 106:Lifting connection Plate, 107:Slide block, 108:Nut, 109:Leading screw, 110:Cover on pedestal.
201:Connecting plate fixes sleeve, 202:Connecting plate fixation upper bush, 203:θ to rotating shaft, 204:θ to direct driving motor, 205:θ to rotating shaft connecting plate a, 206:θ to rotating shaft connecting plate b, 207:R to direct driving motor, 208:R to rotating shaft, 209:θ is to rotating shaft Upper lid, 210:Large arm fixed pulley, 211:Crossed roller bearing upper press cover, 212:Crossed roller bearing a, 213:Thrust bearing, 214:θ to shaft sleeve, 215:Crossed roller bearing b, 216:O-shaped wear-resisting high-strength degree sealing ring, 217:U-shaped big elastic caoutchouc Circle.
424:Vacuum tracheae, 425:Wrist motor control lines.
501:Little arm housing, 502:Wrist live axle, 503:Deep groove ball bearing a, 504:Wrist driving wheel, 505:Wrist Rotating shaft, 506:Crossed roller bearing b, 507:Cover on forearm, 508:O-ring seal a, 509:Bearing gland, 510:Forearm is upper and lower Half steel band, 511:Forearm fixed wheel gland, 512:Forearm fixed wheel, 513;O-ring seal b.
601:Big arm housing, 602:Big arm housing lower cover, 603:O-ring seal c, 604:Forearm live axle, 605:It is deep Ditch ball bearing b, 606:Forearm driving wheel, 607:Large arm case top lid, 608:Crossed roller bearing c, 609:Bearing upper press cover, 610:Large arm half steel band up and down, 611:Crossed roller bearing back-up ring a, 612:Crossed roller bearing d, 613:Crossed roller bearing e, 614:Crossed roller bearing back-up ring b, 615:Bearing bottom end cover.
Specific embodiment
The specific embodiment of the present invention is elaborated below in conjunction with concrete legend.
As shown in figures 1 to 6, a kind of direct-drive type may be reversed wafer transfer robot, and the robot includes pedestal 1, lifting and returns Rotation mechanism 2, vacuum suction end 3, upset wrist 4, forearm 5 and large arm 6;Lifting and slew gear are installed inside the pedestal 1 2, lift and slew gear 2 is connected with 6 one end of large arm (near-end), 6 other end of large arm (distal end) is with 5 one end of forearm (near-end) even Connect, 5 other end of forearm (distal end) is connected with one end of upset wrist 4, the other end for overturning wrist 4 is connected with vacuum suction end 3 Connect.
During the wafer transfer robot motion, pedestal 1 is fixed, lifting and slew gear 2 can around 1 center steering of pedestal, Can also move up and down along pedestal vertical direction (Z-direction);6 near-end of large arm can be little around 2 center steering of slew gear (θ is to motion) 5 near-end of arm is turned round around 6 distal center of large arm, and upset wrist 4 is turned round around 5 distal end of forearm, large arm 6, forearm 5 and upset wrist 4 The radial alignment motion (R is to motion) of robot arm is realized in certainty ratio revolution;Upset 4 built-in turning structure of wrist, vacuum are inhaled Attached end 3 is overturn around wrist housing horizontal axis;Wafer is adsorbed in vacuum suction end 3, drives wafer motion.
The elevating mechanism of above-mentioned wafer transfer robot, shown in refer to the attached drawing 2, the elevating mechanism include servomotor 101, Decelerator 102, shaft coupling 103, pedestal section bar 104, nut 108, leading screw 109, guide rail 105, slide block 107 and lifting connecting plate 106.Servomotor 101, decelerator 102, leading screw 109 and nut 108 are coaxially arranged on 1 side wall of pedestal and to constitute feed screw nut Auxiliary drive gear;Pedestal section bar 104 is pedestal lateral support, and guide rail 105 is fixed on pedestal section bar 104;The connection of nut 108 rises Drop connecting plate 106.
Servomotor 101 is connected with decelerator 102, and the output shaft of decelerator 102 is connected with leading screw 109 by shaft coupling 103 Connect;Leading screw 109 is fixed in the middle of the side wall of pedestal 1, and two guide rails 105 are fixed on the side wall both sides of pedestal 1;Each guide rail 105 On be separately installed with two slide blocks 107, two slide blocks 107 are connected with lifting connecting plate 106 respectively, to realize guide effect.
101 Jing decelerators 102 of the servomotor slow down, and drive the elevating movement of the nut 108 of screw pair, and then Lifting connecting plate 106 is driven to move up and down.
Center steering (θ is to the motion) mechanism of above-mentioned wafer transfer robot, including θ is to direct driving motor 204, θ to rotating shaft 203rd, crossed roller bearing b215, thrust bearing 213.θ is fixed on lifting connecting plate 106 to the base of direct driving motor 204, θ θ is connected to the output shaft end of direct driving motor 204 to rotating shaft 203 and is connected to rotating shaft connecting plate a205 with θ;θ connects to rotating shaft Plate b206 is connected by screw and is fixed on θ on rotating shaft connecting plate a205.
The outer ring of crossed roller bearing b215 is fixedly mounted on 201 inwall of connecting plate fixes sleeve, to bear θ to rotating shaft 203 radial load and power of toppling;Thrust bearing 213 is fixed upper bush 202 to shaft sleeve 214, connecting plate by θ and is arranged on θ To on the outer wall of rotating shaft 203.Thrust bearing 213 is to bear the axial force of robots arm's body.θ is to rotating shaft 203 and lid on pedestal 110 coordinate, while being provided with U-shaped big elastic rubber ring 217 and O-shaped wear-resisting high-strength degree sealing ring at 110 endoporus of lid on pedestal 216。
θ is rotated to 204 output shaft of direct driving motor direct drive θ to rotating shaft 203, drives crossed roller bearing b215 inner rings, θ To 213 times circle common rotations of shaft sleeve 214 and thrust bearing.U-shaped big elastic rubber ring 217 floats and bears θ to rotating shaft 203 Radial direction unbalance loading.
Radial alignment motion (R to motion) mechanism of above-mentioned wafer transfer robot, including R to direct driving motor 207, R to Rotating shaft 208, large arm 6, forearm 5, upset wrist 4;R is coaxially mounted to θ to the inside of rotating shaft 203 to direct driving motor 207, and R is to straight drive The bottom of motor 207 is installed in θ on rotating shaft connecting plate b206;R is directly connected to R to rotating shaft to the output shaft of direct driving motor 207 208, R are supported by crossed roller bearing a212 to 203 upper end of rotating shaft in θ to rotating shaft 208 and θ between rotating shaft 203, large arm 6 One end is connected to θ in rotating shaft 203, other end connection 5 near-end of forearm (being near-end near 6 one end of large arm), the connection of 5 distal end of forearm Upset wrist 4.
R to direct driving motor 207 and R to rotating shaft 208 with θ to 203 synchronous revolving of rotating shaft, while R is exported to direct driving motor 207 Axle can independently drive R to rotate to rotating shaft 203 to rotating shaft 208 relative to θ, revolution driving large arm 6 from R to rotating shaft 208 around θ to rotating shaft 203 center steerings, at the same 5 near-end of forearm around 6 distal end of large arm (large arm 6 away from one end from θ to rotating shaft 203) revolution, overturn wrist 4 Turn round around 5 distal end of forearm, it is fixed than angular speed motion by large arm 6, forearm 5 and 4 three connecting rod of upset wrist, realize the R of robot Move to linear telescopic.
The lifting of above-mentioned wafer transfer robot and slew gear 2 (R is to motion), large arm 6 include big arm housing 601, big Arm fixed pulley 210, forearm driving wheel 606, large arm half steel band 610, forearm live axle 604, crossed roller bearing up and down D612, crossed roller bearing e613, deep groove ball bearing 605.
Big arm housing 601 passes through large arm case top lid 607, big 602 upper-lower seal of arm housing lower cover.
R connects the near-end upper shell of big arm housing 601 to 208 upper end of rotating shaft, and large arm fixed pulley 210 is fixed on θ to turning 203 upper end of axle, large arm fixed pulley 210 and R are supported between rotating shaft 208 by crossed roller bearing d612;Under big arm housing Supported by crossed roller bearing e613 between lid 602 and large arm fixed pulley 210.
Half steel band 610 is fixedly mounted on the large arm fixed pulley 210 and forearm driving wheel of large arm planet circular system to large arm up and down Between 606,601 distal end lower house of big arm housing is fixedly connected forearm live axle 604, and forearm live axle 604 and forearm drive Supported by a pair of deep groove ball bearings 605 between driving wheel 606;By intersecting between little arm housing 501, large arm case top lid 607 Roller bearing c608 is supported;606 upper end of forearm driving wheel connects little 501 near-end of arm housing.
Big arm housing 601 (equivalent to planet carrier), large arm fixed pulley 210 (sun gear), 606 (planet of forearm driving wheel Wheel), half steel band 610 collectively constitutes planet cyclic gear train to large arm up and down.Big arm housing 601 is turned round to rotating shaft 203 around θ, is driven little Arm driving wheel 606 revolves round the sun around large arm fixed pulley 210, and half steel band 610 winds large arm around belt wheel up and down, and large arm fixed pulley 210 do not turn round with big arm housing 601, make forearm driving wheel 606 around 604 rotation of forearm live axle, and then drive little arm housing 501 near-ends are turned round around 601 distal end of big arm housing.
In radial alignment motion (R to motion) mechanism of above-mentioned wafer transfer robot, forearm 5 include little arm housing 501, Forearm fixed wheel 512, forearm half steel band 510, wrist driving wheel 504, wrist live axle 502 up and down;In little arm housing 501 Portion, 604 upper end of forearm live axle for being fixed on 601 distal end of big arm housing are connected with forearm fixed wheel 512;Wrist live axle 502 are fixed on 501 distal end lower house of little arm housing, and wrist driving wheel 504 is supported by upper and lower a pair of deep groove ball bearings a503 In 502 lower end of wrist live axle, supported by crossed roller bearing b506 between lid 507 in wrist rotating shaft 505 and forearm; And forearm half steel band 510 is connected between forearm fixed wheel 512 and wrist driving wheel 504 up and down;504 upper end of wrist driving wheel connects Wrist rotating shaft 505, the connection upset wrist 4 of wrist rotating shaft 505.
Little arm housing 501 is sealed by lid 507 on forearm.
When 501 near-end of little arm housing is turned round around 601 distal end of big arm housing, forearm fixed wheel 512 is quiet relative to big arm housing 601 Only, half steel band 510 winds forearm around forearm fixed wheel 512 and wrist driving wheel 504 up and down, constitutes forearm planet circular system.Wrist is driven Driving wheel 504 is turned round around wrist live axle 502, and wrist rotating shaft 505 is rotated around 501 distal end of little arm housing therewith.
Shown in refer to the attached drawing 5, wrist rotating shaft 505 is turned round around 501 distal end of little arm housing, and 505 upper end of wrist rotating shaft is fixed and connected Upset wrist 4 is connect, 4 indoor design switching mechanism of wrist is overturn, drives vacuum suction end 3 to overturn.
When the wafer transfer robot R is to linear motion, refer to the attached drawing 6 show forearm 5,6 relative revolution action of large arm Illustrate (size arm state in contrast accompanying drawing 1), while vacuum suction end 3 realizes rotary movement.

Claims (4)

1. a kind of direct-drive type may be reversed wafer transfer robot, it is characterised in that:The robot includes pedestal (1), lifting and returns Rotation mechanism (2), vacuum suction end (3), upset wrist (4), forearm (5) and large arm (6);Install inside the pedestal (1) and rise Drop and slew gear (2), lifting and slew gear (2) are connected with large arm (6) one end, large arm (6) other end and forearm (5) one end Connection, forearm (5) other end are connected with one end of upset wrist (4), overturn the other end and the vacuum suction end of wrist (4) (3) connect;
During the wafer transfer robot motion, pedestal (1) is fixed, lifts and slew gear (2) is around pedestal (1) center steering, Also move up and down along pedestal vertical direction;Large arm (6) near-end can be near around lifting and slew gear (2) center steering, forearm (5) End is turned round around large arm (6) distal center, and upset wrist (4) is turned round around forearm (5) distal end, large arm (6), forearm (5) and upset hand The radial alignment motion of robot arm is realized in the certainty ratio revolution of wrist (4);Upset wrist (4) built-in turning structure, vacuum are inhaled Attached end (3) is overturn around wrist housing horizontal axis;Wafer is adsorbed in vacuum suction end (3), drives wafer motion;Wafer The elevating mechanism of the lifting of transferring robot and slew gear (2) includes servomotor (101), decelerator (102), shaft coupling (103), pedestal section bar (104), nut (108), leading screw (109), guide rail (105), slide block (107) and lifting connecting plate (106); Servomotor (101), decelerator (102), leading screw (109) and nut (108) are coaxially arranged on the wall of pedestal (1) side and to constitute silk Thick stick nut auxiliary drive gear;Pedestal section bar (104) is pedestal lateral support, and guide rail (105) is fixed on pedestal section bar (104); Nut (108) connection lifting connecting plate (106);
Servomotor (101) is connected with decelerator (102), and the output shaft of decelerator (102) passes through shaft coupling (103) and leading screw (109) connect;Leading screw (109) is fixed in the middle of the side wall of pedestal (1), and two guide rails (105) are fixed on the side wall two of pedestal (1) Side;Be separately installed with two slide blocks (107) on each guide rail (105), two slide blocks (107) respectively with lifting connecting plate (106) connect, to realize guide effect;
The servomotor (101) Jing decelerators (102) is slowed down, and drives the elevating movement of the nut (108) of screw pair, enters And drive lifting connecting plate (106) to move up and down;The lifting of wafer transfer robot and the center steering machine of slew gear (2) Structure, including θ is to direct driving motor (204), θ to rotating shaft (203), crossed roller bearing b (215), thrust bearing (213);θ is to straight drive The base of motor (204) is fixed in lifting connecting plate (106), and θ is connected to θ to the defeated of direct driving motor (204) to rotating shaft (203) Go out shaft end and be connected to rotating shaft connecting plate a (205) with θ;θ is connected by screw to rotating shaft connecting plate b (206) and is fixed on θ To in rotating shaft connecting plate a (205);
The outer ring of crossed roller bearing b (215) is fixedly mounted on connecting plate fixes sleeve (201) inwall, to bear θ to rotating shaft (203) radial load and power of toppling;Thrust bearing (213) fixes upper bush (202) to shaft sleeve (214), connecting plate by θ Installed in θ on the outer wall of rotating shaft (203);Thrust bearing (213) is to bear the axial force of robots arm's body;θ is to rotating shaft (203) coordinate with lid (110) on pedestal, while cover on pedestal at (110) endoporus being provided with U-shaped big elastic rubber ring (217) With O-shaped wear-resisting high-strength degree sealing ring (216);
θ directly drives θ to direct driving motor (204) output shaft and rotates to rotating shaft (203), drives in crossed roller bearing b (215) Circle, θ enclose common rotation under shaft sleeve (214) and thrust bearing (213);U-shaped big elastic rubber ring (217) is floated and bears θ To the radial direction unbalance loading of rotating shaft (203);
R is to direct driving motor (207), R to rotating shaft (208), large arm (6), forearm (5), upset wrist (4) composition wafer transfer machine The radial alignment motion of people;R is coaxially mounted to θ to rotating shaft (203) inside to direct driving motor (207), and R is to direct driving motor (207) bottom is installed in θ in rotating shaft connecting plate b (206);R to the output shaft of direct driving motor (207) be directly connected to R to turn Axle (208), R pass through crossed roller bearing a to rotating shaft (203) upper end in θ between rotating shaft (203) to rotating shaft (208) and θ (212) support, large arm (6) one end is connected to θ in rotating shaft (203), other end connection forearm (5) near-end, forearm (5) distal end connects Connect upset wrist (4);
R to direct driving motor (207) and R to rotating shaft (208) with θ to rotating shaft (203) synchronous revolving, while R is to direct driving motor (207) Output shaft can independently drive R to rotate to rotating shaft (203) to rotating shaft (208) relative to θ, revolution driving large arm of the R to rotating shaft (208) (6) around θ to rotating shaft (203) center steering, while forearm (5) near-end is turned round around large arm (6) distal end, upset wrist (4) is around forearm (5) distal end revolution, it is fixed than angular speed motion by large arm (6), forearm (5) and (4) three connecting rod of upset wrist, realize robot R is moved to linear telescopic;In the radial alignment motion of above-mentioned wafer transfer robot, large arm (6) is including big arm housing (601), large arm fixed pulley (210), forearm driving wheel (606), large arm half steel band (610), forearm live axle up and down (604), crossed roller bearing d (612), crossed roller bearing e (613), deep groove ball bearing b (605);
Big arm housing (601) is by large arm case top lid (607), big arm housing lower cover (602) upper-lower seal;
R connects the near-end upper shell of big arm housing (601) to rotating shaft (208) upper end, large arm fixed pulley (210) be fixed on θ to Rotating shaft (203) upper end, large arm fixed pulley (210) and R are supported between rotating shaft (208) by crossed roller bearing d (612); It is big to be supported by crossed roller bearing e (613) between arm housing lower cover (602) and large arm fixed pulley (210);
Half steel band (610) is fixedly mounted on the large arm fixed pulley (210) and forearm driving wheel of large arm planet circular system to large arm up and down (606), between, big arm housing (601) distal end lower house is fixedly connected forearm live axle (604), forearm live axle (604) Supported by a pair of deep groove ball bearing b (605) and forearm driving wheel (606) between;Little arm housing (501), large arm case top lid (607) supported by crossed roller bearing c (608) between;Forearm driving wheel (606) upper end connects little arm housing (501) near-end.
2. a kind of direct-drive type according to claim 1 may be reversed wafer transfer robot, it is characterised in that:Big arm housing (601), half steel band (610) collectively constitutes planet epicyclic wheel up and down for large arm fixed pulley 210, forearm driving wheel (606), large arm System;Big arm housing (601) is turned round to rotating shaft (203) around θ, drives forearm driving wheel (606) public around large arm fixed pulley (210) Turn, half steel band (610) winds large arm around belt wheel up and down, and large arm fixed pulley (210) is not turned round with big arm housing (601), is made Forearm driving wheel (606) is around forearm live axle (604) rotation, and then drives little arm housing (501) near-end around big arm housing (601) distal end revolution.
3. a kind of direct-drive type according to claim 1 may be reversed wafer transfer robot, it is characterised in that:Wafer transfer machine In the radial alignment motion of device people, forearm (5) includes little arm housing (501), forearm fixed wheel (512), the upper and lower half steel of forearm Band (510), wrist driving wheel (504), wrist live axle (502);It is internal in little arm housing (501), it is fixed on big arm housing (601) forearm live axle (604) upper end of distal end is connected with forearm fixed wheel (512);Wrist live axle (502) is fixed on little On the lower house of arm housing (501) distal end, wrist driving wheel (504) is supported on wrist by upper and lower a pair of deep groove ball bearings a (503) Live axle (502) lower end, by crossed roller bearing b (506) between lid (507) in wrist rotating shaft (505) and forearm Support;And forearm half steel band (510) is connected between forearm fixed wheel (512) and wrist driving wheel (504) up and down;Wrist driving wheel (504) upper end connection wrist rotating shaft (505), wrist rotating shaft (505) connection upset wrist (4);
Little arm housing (501) is by covering (507) sealing on forearm.
4. a kind of direct-drive type according to claim 1 may be reversed wafer transfer robot, it is characterised in that:Little arm housing (501), when near-end is turned round around big arm housing (601) distal end, forearm fixed wheel (512) is static relative to big arm housing (601), forearm Half steel band (510) is wound around forearm fixed wheel (512) and wrist driving wheel (504) up and down, constitutes forearm planet circular system;Wrist drives Wheel (504) is turned round around wrist live axle (502), and wrist rotating shaft (505) is rotated around little arm housing (501) distal end therewith;
Wrist rotating shaft (505) is turned round around little arm housing (501) distal end, and wrist rotating shaft (505) upper end is fixedly connected upset wrist (4) wrist (4) indoor design switching mechanism is overturn, vacuum suction end (3) upset is driven.
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