JP2003302439A - Probe contact device for display panel inspection - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To miniaturize a probe contact device when inspecting a display panel. <P>SOLUTION: A plurality of probes 22a are provided on the tip of a probe carrying leg 14, and a press block carrying leg 16 for opening and closing relatively to the probe carrying leg 14 is provided. A press block 24 provided on the tip of the press block carrying leg 16 faces relatively to the probes 22a across the display panel 12 with a prescribed pressing force. Hereby, the relative pressing force between the probe carrying leg 14 and the press block carrying leg 16 is never applied to a support part or the display panel. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe contact device for inspecting a display panel, and more particularly to an improvement in miniaturization of a probe contact device having a plurality of probes capable of simultaneously contacting a large number of panel electrodes.

[0002]

2. Description of the Related Art A display element such as a liquid crystal cell, an organic EL, an inorganic EL or the like is integrated with a large number of electrodes for power supply as a display panel in order to form various display devices. In such a display panel, in order to inspect the quality of each display cell, the connection between the electrode and the cell, the quality of the IC patterned on the panel, and the like, an external panel inspection device is used to inspect the electrode of the display panel. Is supplied, and the inspection result is output to the inspection device.

Conventionally, a probe contact device has been used for connecting such an inspection device and a display panel, and a probe is electrically predetermined for each of a large number of electrodes incorporated in the display panel. Contact under pressure and the desired test is performed. The panel inspection has been conventionally performed as a relatively simple conduction inspection or resistance measurement inspection such as cell lighting inspection, but in recent years, active inspection is performed while applying a heat load or a current load to the display panel. Things have also been requested.

[0004]

Therefore, a probe contact device corresponding to such various active tests has been required. However, in the conventional device, since the contact device itself is large, for example, a heat load is applied. There is a problem that the display panel and the probe contact device cannot be housed in the heating device for giving.

[0005] Such a conventional problem is mainly due to the necessity of a large and high-rigidity receiving substrate in order to obtain a contact pressure required for a good probe contact.

That is, when the contact pressure required between each electrode and the probe is 10 g, it is 4 in a normal display panel.
Since there is an electrode of about 00 pins, the pressure applied to the entire contact pressure receiving portion exceeds 4 kg, and it is conventionally necessary to provide a large and highly rigid substrate for reliably receiving such a weight. It was common.

For this reason, there has been a problem that the probe contact device becomes large in size and has high rigidity, and it is not possible to obtain a small size and low rigidity device suitable for the above-mentioned active inspection.

[0008]

In order to solve the above-mentioned conventional problems, the present invention has a probe-carrying leg having a plurality of probes at its tip and a pressing block at a position facing the probe, The present invention is characterized by including a pressing block supporting leg that can be opened and closed with respect to the leg, and pressing means that applies a relative pressing force by sandwiching the panel electrode of the display panel between the probe and the pressing block.

Further, according to the present invention, in the probe contact device according to the first aspect, the pressing block carrying leg is made of a spring plate, and also serves as a pressing means for applying a relative pressing force between the pressing block carrying leg and the probe carrying leg. And

In the probe contact device according to the second aspect of the present invention, the probe supporting leg is provided with an eccentric cam for opening and closing the pressing block supporting leg.

Further, according to the present invention, in the probe contact device according to any one of claims 1, 2 and 3, the reference surface for correctly positioning the electrode of the display panel with respect to the probe is provided at the tip of the probe carrying leg. Is provided.

[0012]

1 to 6 show a preferred first embodiment of a probe contact device according to the present invention.

The probe contact device according to the present invention is
The contact device itself has a structure for supporting the display panel. As shown in FIG. 1, the contact device itself is fixed to a support bar 10 having a trapezoidal cross section, and a display panel 12 is provided.
The probe can be pressed against the electrodes of the display panel 12 while supporting the.

The probe contact device has a probe supporting leg 14 and a pressing block supporting leg 16. The probe-carrying leg 14 is molded of plastic, engages with the support bar 10 by a groove 14a provided near the root thereof, and is supported by a back plate 18 and a stator 20 fixed to the back surface of the probe-carrying leg 14 to support the bar 10. And the probe supporting leg 14 are firmly fixed. The stator 2
The fixing of the support bar 10 and the probe supporting leg 14 by 0 is performed by the screw groove 14 provided at the lower end of the probe supporting leg 14.
This is done by firmly pressing the support bar 10 against the probe-carrying legs 14 by tightening a fixing screw that is screwed to b.

A probe assembly 22 is fixed to the tip of the probe carrying leg 14. As is well known, the probe assembly 22 is composed of a loop probe capable of stable contact even under a low stylus pressure, a thin metal wire is wound in a loop shape on a thin plate made of an insulating material, and the base is hardened with a resin and partly cut off The exposed metal tip is used as an individual probe. The loop probe assembly 22 is firmly fixed to the tip of the probe carrying leg 14 by a support piece 23. Then, in order to confirm that each probe end of the loop probe is in proper contact with each electrode of the display panel, a peep window 14c is provided at the tip of the probe carrying leg 14, and a microscope or the like is used if necessary. The contact state between the probe and the electrode can be confirmed.

A pressing reference base 14d of the display panel 12 is integrally provided at the tip of the probe carrying leg 14, and supplies a pressing reference surface 14e and a contact pressure reference surface 14f to the display panel 12. . FIG. 5 shows a state in which the display panel 12 is supported by the probe contact device, and the probe 22a is in contact with the electrode 12a of the display panel 12 at a predetermined contact pressure. Further, FIG. 6 shows the relationship between the pressing reference base 14d and the probe 22a before the display panel 12 is supported by the probe contact device, and as is clear from the figure, the tip of the probe 22a is closer to the contact pressure reference surface 14f. The probe 22a projects by P, and when the probe 22a actually contacts, the probe 22a retracts by the protrusion amount P as shown in FIG. 5, so that a desired contact pressure is applied between the probe 22a and the electrode 12a. As is apparent from FIG. 2, the pressing reference bases 14d are provided on both outer sides of the probe assembly 22.

In the present invention, in order to support the display panel 12, the probe contact device includes the above-mentioned probe carrier leg 14 and the pressing block carrier leg 16 which can be opened and closed with respect to the probe carrier leg 14. In the illustrated embodiment, the pressing block carrying leg 16 is formed of a flat plate made of a spring material, and its base is firmly fixed to the probe carrying leg 14. A pressing block 24 is fixed to the tip of the probe assembly 22 so as to face the probe assembly 22. As shown in FIG. 5, the pressing block 24 has a structure in which a thin rubber plate 24b is attached to the surface of an aluminum substrate 24a fixed to the pressing block carrying leg 16. Then, the pressing block carrying leg 16 is
In its own free posture, as shown in FIG. 5, the pressing block 24 is pressed against the pressing reference base 14d through the display panel 12. The pressing force at this time is sufficiently larger than the total pressure of the reaction forces from the probes 22a, and for example, a pressing force of 4 kg or more can be provided. What is characteristic of the present invention is that such a large pressing force is obtained by the relative pressing force between the probe supporting leg 14 and the pressing block supporting leg 16, and unlike the conventional case, That is, it is not necessary to receive a large pressing force from the device board facing the device. That is, the pressing force between the legs 14 and 16 does not exert any force on the support portion. The pressing force between 16 does not affect. Also, the support bar 10
Not limited to the above, as a support portion of the probe contact device, for example, the plug portion 1 provided at the lower end of the probe carrying leg 14
Even when 4g becomes the support part, the plug part 14g
The relative pressing force of the both legs 14 and 16 does not affect.

Further, in the present embodiment, the pressing block carrying leg 16 supports the pressing block 24 and also serves as a pressing means for applying a relative pressing force between the both legs 14 and 16 by its own springiness. . Of course, in the present invention, it is also possible to rotatably support the pressing block supporting leg 16 on the probe supporting leg 14 and to apply a desired relative pressing force by using another spring member or the like as a pressing means.

An eccentric cam 26 is provided in this embodiment to open and close the pressing block carrying leg 16 with respect to the probe carrying leg 14. The cam shaft 28 of the eccentric cam 26 is a bearing 14h provided on the probe carrying leg 14,
The eccentric cam 26 is supported by 14i and the eccentric cam 26 presses the block-carrying leg 16 to open and close the probe-carrying leg 14. FIG. 3 shows the pressing block supporting leg 16 in a substantially closed state, and FIG. 4 shows the opened state. To rotate the eccentric cam 26, a lever 30 is integrally provided on the cam 26, and the pressing block carrying leg 16 can be opened and closed by rotating the lever 30 with a predetermined actuator. .

As described above, according to the present embodiment, the probe contact device itself can support the display panel 12, and also supports the display panel 12 and obtains a desired contact pressure. There is an advantage that the pressing force does not have any adverse effect on the supporting portion of the probe contact device.

FIG. 7 shows a preferred embodiment of an inspection apparatus capable of inspecting a large number of display panels at the same time while applying a thermal load by utilizing the advantages of this embodiment.

As shown in FIG. 1, a plug plate 32 is fixed to a plug portion 14g provided at the lower end of the probe carrying leg 14 of the probe contact device. In this state, one plug plate 32 is provided as shown in FIG. Four probe contact devices are positioned and fixed in the correct positions on the support bar 10 of FIG. Then, each display panel 12 is guided to the probe contact device in the state where the pressing block carrying leg 16 is opened as shown by the arrow, and is supported and fixed at an appropriate position.
The display panel in the embodiment has a liquid crystal cell made of an amorphous TFT or a polysilicon TFT, and the polysilicon TFT liquid crystal panel has an IC patterned inside the panel. When each probe contact device holds the display panel 12 between them, the camera monitor 36 confirms the correct contact position between each probe and the electrode via the microscope 34. In this way, one support bar-1
After the two pairs of probe contact devices fixed to 0 support one display panel 12 each, the support bar 10 is carried to the socket substrate 38 as shown by the arrow and inserted into the socket at the predetermined position. As a result, the electrodes on the socket side and the respective probes 22a are reliably electrically connected, and the electrical connection with the inspection device (not shown) can be completed. Of course, each probe 22a and the plug plate 32 are electrically connected by a cable such as an FPC (not shown). The socket substrate 38, while being mounted with a large number of display panels 12, is carried to, for example, a heating device, and a desired electrical characteristic can be inspected while performing a heat load test.

As described above, according to the present invention, it is possible to obtain a reliable contact pressure between each probe and the electrode while miniaturizing the device, and to perform a simple cell lighting inspection or various loads. It is also widely applicable to electrical characteristic inspection.

As described above, according to the present invention, the probe contact device itself can support the display panel. However, according to the present invention, the probe contact device is provided for the display panel fixed on the substrate. It is also possible to perform a predetermined gripping action. As described above, the feature of the present invention is that the relative pressing force between the probe supporting leg and the pressing block supporting leg does not apply a large load to the supporting portion, but when the display panel is fixed, the probe Unless the contact device itself can move its position with a certain margin, a large force is applied to the display panel.

In order to avoid such a situation, the second embodiment of the present invention has a structure in which the probe contact device itself can be rotated by a predetermined amount as shown in FIGS.

The structure of the probe contact device itself is slightly different from that of the first embodiment described above, but basically, the probe supporting leg and the pressing block supporting leg face each other with a relative pressing force. Therefore, the members corresponding to those of the first embodiment are denoted by reference numerals with 100 added, and detailed description thereof will be omitted.

In the case of this embodiment, since the display panel is fixed to the substrate or the like, the electrodes of the display panel are connected to the probe 12.
When gripping between 2a and the pressing block 124, the probe contact device itself must move in the gripping direction because the substrate is fixed. For this reason, in the second embodiment, the rotating substrate 140 is integrally fixed to the base of the probe carrying leg 114. This rotating substrate 14
0 is rotatably supported by the base 142. That is, the rotating substrate 140 is fixed to the support shaft 148 supported by the bearing plates 144 and 146 of the base 142, so that the probe contact device itself can freely rotate about the support shaft 148. .

Further, the rotation restricting portion 14 is provided on the rotation substrate 140.
0a is provided, and the rotational position in the counterclockwise direction in FIG. 8 is regulated by the stopper 150 fixed to the base 142.

A spring receiving portion 140b is provided on the side opposite to the rotation restricting portion 140a.
A biasing spring 152 provided between 0b and the base 142 applies a counterclockwise biasing force in FIG. 8 to the probe contact device. The biasing force is provided so as to approximately balance with the load in the clockwise direction due to the weight of the probe contact device. As a result, the probe contact device grips the display panel and the probe 122a
The probe contact device can freely rotate about the support shaft 148 when it comes into contact with the electrode, and the force due to the movement at this time can be balanced and compensated by its own weight and the urging force of the urging spring 152. Become. Therefore, this embodiment also has an advantage that no extra force is applied to the display panel.

Although the probe in the embodiment is shown as a loop probe, other needles or a conductor contact patterned on a flexible substrate can be used.

[0031]

As described above, according to the present invention, the contact pressure between each probe and the electrode is obtained by the relative urging force between the probe supporting leg and the pressing block supporting leg. There is an advantage that the device itself can be downsized without exerting any force on the supporting portion of the contact device or the display panel and the display panel is not adversely affected.

Further, since the probe contact device according to the present invention can be miniaturized, it is possible to provide a probe contact device which is extremely suitable for active inspection and the like.

[Brief description of drawings]

FIG. 1 is a perspective view of a display panel inspection state showing a first embodiment of the present invention.

FIG. 2 is a perspective view showing a state in which a probe supporting leg and a pressing block supporting leg are disassembled in the first embodiment.

FIG. 3 is a side view showing a state in which the pressing block carrying legs are substantially closed.

FIG. 4 is a side view showing a state in which a pressing block carrying leg is opened.

FIG. 5 is an enlarged sectional view showing a state where an electrode and a probe are in contact with each other.

FIG. 6 is an explanatory diagram showing a relationship between a probe and a base in a state where the probe is separated from an electrode.

FIG. 7 is an explanatory diagram showing a display panel inspection state using the probe contact device of the first embodiment.

FIG. 8 is a sectional view of an essential part showing a second embodiment of the present invention.

FIG. 9 is a side view of the second embodiment.

[Explanation of symbols]

10 support bar, 12 display panel, 12a electrode, 1
4,114 probe supporting leg, 14d pressing reference base, 16,116 pressing block supporting leg, 22,1
22 probe assembly, 22a, 122a probe, 24, 124 pressing block, 26, 126 eccentric cam.

Continued front page    (72) Inventor Hiroshi Kumazawa             1-10-14 Itabashi, Itabashi-ku, Tokyo Stock market             Company Tokyo Cathode Institute (72) Inventor Hajime Kono             1-10-14 Itabashi, Itabashi-ku, Tokyo Stock market             Company Tokyo Cathode Institute (72) Inventor Megumi Mine             1-10-14 Itabashi, Itabashi-ku, Tokyo Stock market             Company Tokyo Cathode Institute (72) Inventor Satoshi Ninomiya             1-10-14 Itabashi, Itabashi-ku, Tokyo Stock market             Company Tokyo Cathode Institute F term (reference) 2G011 AA01 AB01 AC06 AC14 AC21                       AE01 AF06                 2G014 AA13 AB21 AC10                 2H092 GA45 GA56 GA57 MA57 NA14                       NA15 NA16 NA25 NA30

Claims (4)

[Claims] 1. A probe supporting leg having a plurality of probes at its tip, a pressing block at a position facing the probe, and a pressing block supporting leg that can be opened and closed with respect to the probe supporting leg, and a probe and pressing. The panel electrode of the display panel is sandwiched between the block and the pressing means for applying a relative pressing force,
Probe contact device for display panel inspection. 2. The probe contact device according to claim 1, wherein the pressing block supporting leg is made of a spring plate and also serves as a pressing means for applying a relative pressing force between the pressing block supporting leg and the probe supporting leg. Probe contact device for panel inspection. 3. The probe contact device for inspecting a display panel according to claim 2, wherein the probe carrying leg is provided with an eccentric cam for opening and closing the pressing block carrying leg. . 4. The probe contact device according to claim 1, 2 or 3, wherein a reference surface for correctly positioning an electrode of the display panel with respect to the probe is provided at a tip of the probe carrying leg. A probe contact device for inspecting a display panel.