KR20080075607A - Assembly for controlling uniformity of probe card and apparatus for inspecting electric condition having the same, and method for controlling uniformity using the same - Google Patents

Abstract

A flatness adjusting assembly, an electrical inspection device, and a flatness adjusting method are provided to easily adjust a flatness of a substrate, which is contacted with a DUT, by controlling a non-elastic coupling between the substrate and the DUT. A flatness adjusting assembly for an electrical inspection device includes a coupling unit(20) and an adjusting unit(22). The coupling unit couples first and second substrates(10,12) with each other. The first substrate has a first surface, which is contacted with a DUT(Device Under Test). The second substrate is arranged to face a second surface of the first substrate, which is opposed to the first substrate. The adjusting unit is elastically coupled with the coupling unit and adjusts a flatness of the first substrate by adjusting the non-elastic coupling between the adjusting unit and the first substrate.

Description

Assembly for controlling uniformity of probe card and apparatus for inspecting electric condition having the same, and method for controlling uniformity using the same

1 is a schematic configuration diagram showing an electrical test apparatus according to Embodiment 1 of the present invention.

FIG. 2 is an enlarged view of region I of FIG. 1.

3A to 3C are schematic views illustrating a position where the flat portion of FIG. 1 is installed.

4 is a schematic diagram illustrating a flatness control assembly for an electrical test apparatus according to Embodiment 2 of the present invention.

5 is a schematic configuration diagram showing an electrical test apparatus according to Embodiment 3 of the present invention.

6 is a schematic structural diagram showing an electrical inspection device according to a fourth embodiment of the present invention.

7A-7D are schematic diagrams illustrating a method of adjusting the degree of flatness of a first substrate using the flatness adjustment assembly for the electrical inspection device of FIG. 4.

The present invention relates to a flatness control assembly, an electrical test apparatus including the same, and a flatness control method using the same, and more particularly, a flatness control assembly for an electrical test apparatus in which electrical inspection is performed by contact with an inspected object. It relates to an electrical inspection device and a flatness control method using the same.

Recently, as semiconductor devices require high integration, the size of semiconductor substrates for manufacturing semiconductor devices has also increased. Accordingly, the size of an electrical inspection device such as a probe card for performing an electrical inspection of a semiconductor device is also increasing.

The electrical inspection device such as the probe card or the like is mainly positioned to face a first surface having a first surface contactable with a semiconductor substrate on which a circuit pattern to be inspected is formed, and a second surface of the first substrate opposite to the first surface. And a second substrate and an electrical contact portion for electrically connecting the first substrate and the second substrate.

In the electrical inspection using the electrical inspection apparatus including the first substrate, the second substrate, and the electrical contact portion, the flatness of the first substrate in contact with the inspected object serves as an important specification. This is because, when the electrical inspection is performed while the flatness of the first substrate mentioned above is out of the error range, the reliability thereof is lowered. That is, if the degree of flatness of the first substrate is out of the error range, sufficient contact with the object under test is not made. In particular, when the area where the first substrate is in contact with the inspected object is large, the aforementioned degree of flatness is more important.

Thus, the conventional electrical inspection apparatus is provided with a control screw for pressing down the first substrate and a spring for pressing the first substrate upward, and by operating the control screw and the spring appropriately to adjust the degree of flatness Doing. In particular, the adjusting screw is installed in a structure in which the adjusting screw interviews the second surface of the first substrate when the first substrate is pressed downward. Accordingly, the adjustment screw is appropriately adjusted to press the first substrate downward to adjust the flatness of the first substrate, and at the same time, the spring presses the first substrate upward to adjust the flatness of the first substrate. Facilitates electrical contact between the first substrate and the second substrate.

Examples of the electrical inspection device having an adjustment screw and a spring as a member for adjusting the degree of flatness are disclosed in Korean Patent Laid-Open Publication No. 2002-95151 and Korean Patent Publication No. 2006-126773.

However, the mentioned electrical inspection device frequently causes the first substrate to bend because the spring must be pressed upward when the adjusting screw is pressed downward. That is, since the first substrate is simultaneously pressed down and above, the first substrate is bent due to this. In addition, the electrical test apparatus mentioned above has a disadvantage that the structure is somewhat complicated because it includes an adjustment screw and a spring or the like as a member for adjusting the degree of flatness.

It is a first object of the present invention to provide a flatness control assembly for an electric inspection apparatus which has a simple structure and can easily adjust the degree of flatness.

It is a second object of the present invention to provide an electrical inspection device comprising the flatness control assembly mentioned.

It is a third object of the present invention to provide a flatness adjusting method of an electrical inspection apparatus which can easily use the aforementioned flatness adjusting assembly.

Flatness control assembly for an electrical inspection device according to an embodiment of the present invention for achieving the first object includes a connecting portion and the adjusting portion. The connecting portion connects a first substrate having a first surface in contact with the object under test and a second substrate facing the second surface of the first substrate opposite to the first surface. The control unit is inelastically coupled to the connection unit. Accordingly, the degree of flatness of the first substrate is easily adjusted by adjusting the inelastic coupling.

In particular, the connection portion has a structure that is continuously fitted into the groove formed in the first substrate from the hole penetrating the second substrate, the adjusting portion is a structure for screwing the connection portion exposed by the hole of the second substrate It may have a structure that is continuously inserted into the groove formed in the second substrate from the hole penetrating the first substrate, the control unit may have a structure for screwing the connection portion exposed by the hole of the first substrate. have.

In addition, the connection portion has a structure that is fitted into the groove formed in the first substrate, the adjusting portion has a structure that is screwed with the connection portion fitted into the groove formed in the first substrate through the hole formed in the second substrate. Alternatively, the control unit may have a structure that fits into a groove formed in the second substrate, and the control unit may have a structure that screw-connects with a connection portion inserted into a groove formed in the second substrate through a hole formed in the first substrate.

An electrical inspection apparatus according to an embodiment of the present invention for achieving the second object includes a first substrate having a first surface in contact with the object to be inspected and a second surface facing the first surface, and the first substrate. A second substrate positioned opposite the second surface of the substrate. In addition, the electrical inspection apparatus includes a flat portion that inelastically couples the first substrate and the second substrate facing each other, and adjusts the degree of flatness of the first substrate by adjusting the inelastic coupling.

According to another aspect of the present invention, there is provided an electrical test apparatus having probe tips in electrical contact with an object under test, and a second surface opposite to the first surface includes: And a first substrate having pads electrically connected thereto, and a second substrate positioned opposite the second surface of the first substrate. In addition, the electrical inspection device is interposed between the first substrate and the second substrate facing each other, and in contact with the pads formed on the second surface of the first substrate to electrically connect the first substrate and the second substrate. An electrical contact portion and an inelastic coupling of the first substrate and the second substrate facing each other, and a flat portion for adjusting the degree of flatness of the first substrate by adjusting the inelastic coupling.

In the above-mentioned embodiments, the flat part includes a connection part connecting the first substrate and the second substrate to each other and an adjustment part inelastically coupled to the connection part. Thus, the degree of flatness of the first substrate is controlled by adjusting the inelastic coupling.

An electrical inspection apparatus according to another embodiment of the present invention for achieving the second object has a probe tip in electrical contact with the object under test on the first surface, the probe tips on the second surface opposite to the first surface A first substrate having pads electrically connected to the first substrate, a third surface facing the first surface of the first substrate, and an outer portion including an edge of the third surface is positioned to face the gripping portion. And a second substrate. In addition, the electrical inspection device includes a gripping portion for holding the edge of the first substrate, interposed between the first substrate and the second substrate facing each other, the pads formed on the second surface of the first substrate An electrical contact portion for electrically connecting the first substrate and the second substrate in contact with the second substrate, and inelastically coupling the second substrate and the gripping portion facing each other, and gripping the gripping portion by adjusting the inelastic coupling. It includes a flat portion for adjusting the degree of flatness of the first substrate.

In the above-mentioned embodiment, the flat part includes a connection part connecting the second substrate and the grip part to each other and an adjusting part inelastically coupled to the connection part. Thus, the degree of flatness of the first substrate held by the gripping portion is adjusted by adjusting the inelastic coupling.

According to an aspect of the present invention, there is provided a method of controlling flatness of an electrical inspection apparatus, the method including: a first substrate having a first surface in contact with an inspected object and a first substrate facing the first surface; The flatness of the first substrate is checked when performing the electrical inspection of the inspected object by using an electrical inspection device inelastically coupled to a second substrate facing the second surface. When the degree of flatness of the first substrate is out of the error range, the inelastic coupling is adjusted to adjust the degree of flatness of the first substrate within the error range.

As described above, in the flatness adjusting assembly, the electrical test apparatus including the same, and the flatness adjusting method using the same, the flatness of the member in contact with the inspected object is adjusted by using a control unit having an inelastic coupling. Therefore, in the present invention, a situation in which the member in contact with the subject under test bends due to pressure hardly occurs. In addition, the flatness control assembly of the present invention and the electrical inspection apparatus including the same may have a simple structure because the conventional member for pressing may be omitted.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided to ensure that the disclosed subject matter is thorough and complete, and that the scope of the invention to those skilled in the art will fully convey. In addition, in the drawings, each member is somewhat exaggerated for clarity.

Example 1

1 is a schematic configuration diagram showing an electrical test apparatus according to Embodiment 1 of the present invention.

Referring to FIG. 1, the electrical inspection apparatus 100 may be collectively referred to as a probe card, and the like, and the electrical inspection apparatus 100 according to the first embodiment may include the first substrate 10, the second substrate 12, and the like. And a flat portion 200. In addition, the electrical inspection device 100 in Embodiment 1 may further include an electrical contact portion 14 interposed between the first substrate 10 and the second substrate 12.

Specifically, the first substrate 10 may be collectively referred to as a micro probe head (MPH), a space transformer (space transformer), etc., and thus, the first substrate 10 in Embodiment 1 may be used. Has a first surface 10a that is in contact with the subject and a second surface 10b that faces the first surface 10a. Here, as an example of the to-be-tested object, an integrated circuit element, such as a semiconductor memory element, is mentioned. In addition, the probe tips 16 may be provided on the first surface 10a of the first substrate 10 to be in electrical contact with the object under test. In addition, pads may be provided on the second surface 10b of the first substrate 10 to be electrically connected to the probe tips.

The second substrate 12 collectively refers to a printed circuit board which is a member included in the probe card which is the electrical inspection apparatus 100. The second substrate 12 in Embodiment 1 is made of the first substrate 10. 2 is located facing the surface 10b. At this time, the second substrate 12 has a third surface 12a and a fourth surface 12b opposite the third surface 12a. In particular, when positioning the second substrate 12 and the first substrate 10 to face each other, the third surface 12a of the second substrate 12 and the second surface 10b of the first substrate 10 face each other. Position it.

Thus, the electrical test apparatus 100 mentioned above is in electrical contact with the inspected object by the probe tips 16 of the first substrate 10, and the signal is transmitted from the first substrate 10 to the second substrate 12. It has a configuration that delivers to the tester controller (not shown) through.

Therefore, an electrical signal must be easily transmitted between the first substrate 10 and the second substrate 12. In this case, the transmission of the electrical signal between the first substrate 10 and the second substrate 12 may be achieved using various members. Therefore, the electrical inspection apparatus 100 may further include an electrical contact portion 14 electrically connecting the first substrate 10 and the second substrate 12 as mentioned above. Here, examples of the electrical contact 14 include an interposer, a pogo pin, and the like.

In addition, the electrical inspection apparatus 100 of Embodiment 1 may omit the electrical contact 14. As such, when omitting the electrical contact 14, the electrical inspection apparatus 100 may be in contact with each other on the second surface 10b of the first substrate 10 and the third surface 12a of the second substrate 12, respectively. Correspondingly forming pads and connecting them. That is, the first substrate 10 may be formed by connecting the pads formed on the second surface 10b of the first substrate 10 and the pads formed on the third surface 12a of the second substrate 12 correspondingly. Is directly connecting the circuit configuration formed on the second surface 10b of the circuit board and the circuit configuration formed on the third surface 12b of the second substrate 12. In this case, the connection of each of the pads may sufficiently achieve the electrical connection even with the movement of the first substrate 10 using the flat portion 200 to be described later if each of the pads has sufficient flexibility.

As such, the electrical contact 14 may not only be omitted when the electrical connection is not broken even when a movement occurs between the first substrate 10 and the second substrate 12. It can be provided.

Therefore, the electrical inspection apparatus 100 according to the first embodiment includes a first substrate 10 and a second substrate 12, and optionally includes an electrical contact unit 14 to perform electrical inspection of the inspected object. Perform.

However, the degree of flatness of the first substrate 10 also serves as an important specification in the electrical inspection of the inspected object using the electrical inspection apparatus 100 of the first embodiment. Therefore, the electrical inspection apparatus 100 in Embodiment 1 includes the flat portion 200 referred to as a member for adjusting the flatness of the first substrate 10.

In detail, the flat part 200 includes a connecting part 20 and an adjusting part 22. Here, the connecting portion 20 connects the first substrate 10 and the second substrate 12 to each other, and the adjusting portion 22 is inelastically coupled to the connecting portion 20.

In particular, the flat part 200 of the electrical inspection apparatus 100 of Example 1 has a structure fitted into the groove formed in the 1st board | substrate 10, as shown in FIG. In addition, the adjuster 22 has a structure that couples with a connection part fitted into a groove formed in the first substrate 10 through a hole formed in the second substrate 12. At this time, it is preferable that the adjusting portion 22 has a structure that is screwed with the connecting portion 20 because the movement should be easy.

As mentioned, the electrical inspection apparatus 100 of the first embodiment is a connecting portion 20 that fits into the groove of the first substrate 10 and an adjusting portion 22 that mechanically couples with the connecting portion 20 and a screw, for example. The degree of flatness of the first substrate 10 may be adjusted by using the? That is, in the electrical inspection apparatus 100 of the first embodiment, the flat portion 200 has an inelastic coupling, and the flatness of the first substrate 10 may be adjusted by adjusting the inelastic coupling. In other words, in the electrical inspection apparatus 100 of Example 1, the flat part 200 adjusts the degree of flatness of the first substrate 10 by adjusting the height according to the screwing of the adjusting part 22 having the screw coupling. will be.

In addition, the flat part 200 is a connection part for sufficiently fixing the connection part 20 to the first substrate 10 when connecting the first substrate 10 and the second substrate 12 using the connection part 20. And further comprising an adjustment-fixing part 26 for sufficiently securing the adjusting part 22 to the second substrate 12 when engaging the connecting part 20 using the fixing part 24 and the adjusting part 22. Can be.

In particular, in the electrical inspection device 100 of Example 1, the connection-fixing portion 24 is of a pin type that is sufficiently fitted in the connection portion 20 from the first surface 10a of the first substrate 10. The adjustment-fixing part 26 is provided to have a structure, and the adjustment-fixing part 26 is provided to have a bolt type structure fully fitted in the adjustment part 22 exposed by the hole formed in the 2nd board | substrate 12. As shown in FIG.

Thus, the electrical inspection device 100 of Example 1 adjusts the degree of flatness using the connecting portion 20 and the adjusting portion 22, and then each of the connection-fixing portion 24 and the adjusting-fixing portion 26 is adjusted. It can be used to sufficiently secure each of the connecting portion 20 and the adjusting portion 22.

In addition, the flat part 200 mentioned above may have the first substrate 10 when inelastically coupling the first substrate 10 and the second substrate 12 that face each other, as shown in FIGS. 3A to 3C. ) And the second substrate 12 so as to be located in an area excluding the center of the relatively small substrate. Therefore, in the first embodiment, the flat part 200 is installed to be located in an area excluding the center of the first substrate 10. The reason is that the size of the first substrate 10 is smaller than that of the second substrate 12 in the structure of the general electrical inspection apparatus. Since the flat part 200 has a structure that is continuously installed on both the first substrate 10 and the second substrate 12, the flat part 200 determines the installation position based on the first substrate 12 having a relatively small size. . In addition, since both the first substrate 10 and the second substrate 12 have the same center, when the flat part 200 is installed in an area except the center of the first substrate 10, the second substrate 12 is disposed. Even in the case of the area except the center.

In addition, the flat part 200 according to the first embodiment is not limited to the number when the two or more flat parts 200 are installed to face each other when they are installed to be located in an area excluding the aforementioned center. That is, the electrical inspection apparatus 100 according to the first embodiment includes two flat parts 200 facing each other with respect to the center mentioned as in FIG. 3A or based on the center mentioned as in FIG. 3B. Three flat parts 200 may face each other, or four flat parts 200 may face each other based on the center mentioned as shown in FIG. 3C. In the above-mentioned examples, the electrical inspection apparatus 100 including two to four flat portions 200 is described. However, the electrical inspection apparatus 100 of Embodiment 1 includes five or more flat portions 200. It is okay.

However, even when the installation location of the flat part 200 satisfies the area excluding the center mentioned above, when the installation area is located close to the center, the structure for the installation of the electric-contact part 14 of the electrical inspection apparatus 100 is somewhat different. It gets complicated. Therefore, in Embodiment 1, a flat portion is formed in a relatively small substrate as shown in FIG. 3A, that is, an outer region after 70 (d2) from the center when the edge is 100 (d1) from the center of the first substrate 10. It is desirable to locate 200.

In addition, although the 1st board | substrate 10 and the 2nd board | substrate 12 each demonstrated the circular type about the electrical inspection apparatus 100 of Example 1, the shape is not limited. For example, when the condition having the same center is satisfied, the first substrate 10 may have a rectangular type, and the second substrate 12 may have a circular type, and the circular type of the first substrate 10 may be used. In addition, the 2nd board | substrate 12 may have a square type, and both the 1st board | substrate 10 and the 2nd board | substrate 12 may have a square type.

As mentioned, the electrical inspection apparatus 100 of the first embodiment includes a flat portion 200 having an inelastic coupling and whose installation number and installation position are limited. Therefore, the electrical inspection apparatus 100 of the first embodiment can easily adjust the degree of flatness of the first substrate 10 by appropriately adjusting the height using the flat portion 200.

Thus, using the electrical test apparatus 100 of the first embodiment, the situation in which the first substrate 10 is bent sufficiently by pressing the member such as the spring and the like in the related art can be sufficiently reduced. In addition, since the electrical inspection apparatus 100 of Embodiment 1 can omit a member such as a spring, the structure thereof can be simplified.

In the electrical test apparatus 100 of the first embodiment mentioned above, the flat part 200 is connected to the groove 20 of the first substrate 10 and the adjusting part 22 inelastically coupled to the connection part 20. It includes. However, the flat part 200 may have various structures in addition to the mentioned structure, and the embodiments thereof will be described later.

Example 2

4 is a schematic diagram illustrating a flatness control assembly for an electrical test apparatus according to Embodiment 2 of the present invention.

And, the flatness adjustment assembly in Embodiment 2 can replace the flat portion of the electrical inspection device of Embodiment 1 mentioned. Therefore, hereinafter, the flatness adjusting assembly will be described based on the electrical inspection device of the first embodiment. In addition, the flatness control assembly of Example 2 will be expressed as a flat portion.

Referring to FIG. 4, the flat part of the second embodiment includes a connection part and an adjusting part similarly to the flat part of the first embodiment.

Specifically, in the flat part 300 according to the second embodiment, the connection part 30 has a structure that is continuously fitted into the groove formed in the first substrate 10 from a hole penetrating the second substrate 12. In addition, the adjusting part 32 has a structure in which the second substrate 12 is screwed with the connection part 30 exposed by the hole.

In addition, when the flat portion 300 in the second embodiment also uses the connecting portion 30 to connect the first substrate 10 and the second substrate 12, the connecting portion 30 is sufficient for the first substrate 10. Adjustment-fixing portion 36 which sufficiently secures the adjusting portion 32 to the second substrate 12 when combined with the connecting portion 30 using the connection-fixing portion 34 and the adjusting portion 32 that are securely fixed. ) May be further included. In particular, as in Embodiment 1, the connection-fixing part 34 is provided so that the fin type having a structure sufficiently fitted to the connection part 30 from the first surface 10a of the first substrate 10 has a structure, and is adjusted. The fixing part 36 is provided to have a bolt type structure that is sufficiently fitted to the adjusting part 32 exposed by the hole formed in the second substrate 12.

Thus, even in the case of the electrical inspection apparatus including the flat portion 300 of the second embodiment, after adjusting the degree of flatness using the connecting portion 30 and the adjusting portion 32, the connection-fixing portion 34 and the adjustment- Each of the fixing parts 36 may sufficiently fix each of the connection part 30 and the adjusting part 32.

In addition, in the case of the flat part 300 of the second embodiment, since the installation position, the number of installations, etc. of the flat part 200 of the first embodiment mentioned above are the same, detailed description thereof will be omitted.

Thus, even when the electric test apparatus including the flat part 300 of the second embodiment is used, the situation in which the first substrate 10 is bent sufficiently due to the pressing of a member such as a spring and the like can be sufficiently reduced. In addition, since the electrical inspection apparatus of Embodiment 2 can also omit a member such as a spring, the structure thereof can be simplified.

Although not shown, another example may include a connecting portion having a structure that is continuously fitted into a groove formed in the second substrate from a hole penetrating the first substrate, and a screw coupling structure with a connecting portion exposed by the hole of the first substrate. A flat part including an adjusting part, a connecting part having a structure fitted into a groove formed in the second substrate and an adjusting part having a structure for screwing the connection part fitted into the groove formed in the second substrate through a hole formed in the first substrate A flat part etc. to mention are mentioned. In addition, even if mentioned, it may further include a connection-fixing for fixing the connection and the adjustment-fixing for fixing the control.

As such, when the flat portion mentioned above has a structure of inelastic coupling, the structure thereof is not limited.

Example 3

5 is a schematic configuration diagram showing an electrical test apparatus according to Embodiment 3 of the present invention.

In addition, since the structure of the electrical inspection apparatus 500 of Example 3 is substantially similar to the electrical inspection apparatus 100 of Example 1, the same code | symbol is used for the same member, and the detailed description is abbreviate | omitted.

Referring to FIG. 5, the electrical inspection apparatus 500 of the third embodiment includes the same first substrate 10 and the second substrate 12 as the electrical inspection apparatus 100 of the first embodiment. In addition, the electrical inspection apparatus 500 of the third embodiment may further include an electrical contact portion 14 electrically connecting the first substrate 10 and the second substrate 12.

And the electrical inspection apparatus 500 of Example 3 includes the holding part 50 holding the edge of the 1st board | substrate 10. FIG. Specifically, the gripping portion 50 has a structure for continuously gripping the edge of the first surface 10a of the first substrate 10, the edge of the second surface 10b and the side surface of the first substrate 10. . That is, the holding part 50 is provided with the side surface to have the structure of the interference fitting type, and the 1st board | substrate 10 is inserted in the side surface. In addition, since the grip 50 holds the edge of the first substrate 10, the grip 50 and the third surface 12a of the second substrate 12 face each other.

However, in the case of the flat part 600 provided in the electrical inspection apparatus 500 according to the third embodiment, when the gripper 50 is determined as an extension of the first substrate 10, Since the position where the flat part 200 is installed, the number of the installed parts, and the like are almost similar, a detailed description thereof will be omitted.

Thus, in the electrical inspection apparatus 500 of the third embodiment, the flat portion 600 inelastically couples the holding portion 50 and the second substrate 12 facing each other, and by controlling the inelastic coupling mentioned above. The flatness of the first substrate 10 held by the grip portion 50 is adjusted.

Here, the flat part 600 mentioned above includes a connection part 60 connecting the second substrate 12 and the grip part 50 to each other, and an adjusting part 62 inelastically coupled to the connection part 60. In particular, the connection part 60 has a structure that fits into the groove formed in the grip part 50, and the adjusting part 62 is fitted into the groove formed in the grip part 50 by passing through a hole formed in the second substrate 12. It has a structure that is screwed with the connecting portion (60).

In addition, in the case of the flat portion 600 mentioned above, as in the electrical test apparatus 100 of the first embodiment, the adjustment for fixing the connection-fixing portion 64 and the adjusting portion 62 for fixing the connecting portion 60. And may further include a fixing portion 66. However, in the case of the connection-fixing part 64, unlike the structure of the first embodiment, it has a structure connected to the connection part 60 from the surface of the holding part 50.

Therefore, the electrical inspection apparatus 500 of Embodiment 3 may also easily adjust the degree of flatness of the first substrate 10 inelastically by appropriately adjusting the adjusting portion 62 coupled to the connecting portion 60.

In addition, the electrical inspection apparatus 500 of the third embodiment is positioned in contact with the fourth surface of the second substrate 12 to reinforce the structure of the second substrate 12 and the first reinforcement 52 and the second substrate. A part of the side surface of the third surface of the part 12 is partially interviewed with a part of the side surface of the gripping part 50 so that the structure of the first substrate 10 together with the structure of the second substrate 12 is formed. It may further include a second reinforcing portion 54 and the like to reinforce. In addition, in addition to the first reinforcement portion 52 and the second reinforcement portion 54 mentioned above, the electrical inspection apparatus 500 of the third embodiment may be appropriately provided with a reinforcement member for reinforcing the structure of the electrical inspection apparatus 500. Can be.

Thus, even when the electrical test apparatus 500 of the third embodiment is used, a situation in which the first substrate 10 is bent sufficiently due to the pressing of a member such as a spring and the like can be sufficiently reduced. In addition, since the electrical inspection apparatus 500 of Embodiment 3 can omit a member, such as a spring, the structure can be simplified.

The electrical inspection apparatus 500 according to the third embodiment mentioned above passes through a connection portion 60 having a structure fitted into a groove formed in the grip portion 50 and a hole formed in the second substrate 12 to hold the grip portion 50. Although the flat part 600 including the adjusting part 62 which has a structure which screw-connects with the connection part 60 inserted in the groove | channel formed in the inside is demonstrated, the flatness degree of the 1st board | substrate 10 is changed by inelastic coupling. In the case of easy adjustment, it may be provided in various forms. For example, although not shown, a connecting portion having a structure that is continuously inserted into a groove formed in the holding portion from a hole penetrating the second substrate, and an adjusting portion having a structure for screwing the connection portion exposed by the hole of the second substrate The flat part to contain is mentioned.

Example 4

6 is a schematic structural diagram showing an electrical inspection device according to a fourth embodiment of the present invention.

In addition, since the structure of the electrical inspection apparatus of Example 4 is almost similar to that of the electrical inspection apparatus of Example 3 except for the holding portion, the same reference numerals are used for the same members, and the detailed description thereof will be omitted.

Referring to FIG. 6, the electrical inspection apparatus 800 of Embodiment 4 also includes a first substrate 10, a second substrate 12, an electrical contact portion 14, a flat portion 600, and the like.

However, in the electrical inspection device 800 of the fourth embodiment, the gripping portion 700 grips the first substrate 10 by screwing instead of the structure of the clamping type of the gripping portion 50 according to the third embodiment. It has a structure of the form. That is, the gripping portion 700 mentioned above has a structure capable of continuously gripping the first surface 10a, the second surface 10b, and the side surface of the first substrate 10 by screwing. Therefore, the gripping portion 700 includes a first gripping portion 70, a second gripping portion 72 and a gripping-engaging portion 74. Thus, the edge of the first surface 10a of the first substrate 10 is interviewed using the first gripper 70, and the second of the first substrate 10 is used by the second gripper 72. The first surface of the first substrate 10 by interviewing the surface 10b and its sides and then joining the first and second gripping portions 70 and 72 using the gripping-engaging portion 74. 10a, the 2nd surface 10b, and the side surface are hold | maintained continuously.

In addition, although the holding part 700 in Embodiment 4 mentioned has the structure which screw-bonds on the 2nd surface 10b of the 1st board | substrate 10, this month is the 1st table of the 1st board | substrate 10. It may also be provided with a structure that is screwed on the surface (10a).

As such, the electrical inspection apparatus 800 in Embodiment 4 also has inelastic inadequate adjustment by adjusting the adjusting portion 62 coupled to the connecting portion 60 because the flat portion 600 has the same structure as in Embodiment 3. As a result, the flatness of the first substrate 10 can be easily adjusted.

Thus, even when the electrical inspection apparatus 800 of the fourth embodiment is used, a situation in which the first substrate 10 is bent sufficiently due to the pressing of a member such as a spring and the like can be sufficiently reduced. In addition, since the electrical inspection device 800 of the fourth embodiment can omit a member such as a spring, the structure thereof can be simplified.

How to adjust flatness

Hereinafter, a method of adjusting the degree of flatness of the first substrate using the flatness control assembly for the electrical inspection apparatus of FIG. 4 will be described.

7A-7D are schematic diagrams illustrating a method of adjusting the degree of flatness of a first substrate using the flatness adjustment assembly for the electrical inspection device of FIG. 4.

Referring to FIG. 7, the connecting portion 30 is inserted into a hole passing through the second substrate 12, and the adjusting portion 32 having an inelastic coupling is coupled to the connecting portion 30 exposed by the aforementioned hole. . At this time, the adjusting portion 32 has a structure that is screwed with the connection portion 30 as part of achieving an inelastic coupling.

Referring to FIG. 7B, after coupling the connecting portion 30 and the adjusting portion 32 as mentioned above, the connecting portion 30 is inserted into a groove formed in the first substrate 10. Then, the connection part 30 is sufficiently fixed to the first substrate 10 using the connection-fixing part 34.

Subsequently, referring to FIGS. 7C and 7D, the degree of flatness of the first substrate 10 is adjusted by performing fine adjustment using the control unit 32 mentioned above, and the degree of flatness of the first substrate 10 is in an error range. When satisfied, the adjustment-fixing part 36 is used to sufficiently fix the adjusting part 32.

As mentioned, in the case of using the flatness adjusting assembly, that is, the flat portion 300 of the present invention, the degree of flatness of the first substrate 10 can be easily adjusted inelastically.

In addition, the method for adjusting the degree of flatness of the first substrate 10 using the flatness adjusting assembly mentioned above is merely an example, and it is appropriate to combine the control part 32 and the connection part 30 regardless of the order thereof. The degree of flatness of the first substrate 10 may be adjusted inelastically.

That is, when the electrical inspection of the inspected object is performed using the aforementioned electrical inspection device, the degree of flatness of the first substrate 10 is checked, and when the degree of flatness of the first substrate 10 is out of an error range, the flatness By adjusting the inelastic coupling using the unit 300, the degree of flatness of the first substrate 10 is adjusted within an error range.

As mentioned, the electrical inspection apparatus of the present invention can easily adjust the degree of flatness of the substrate in contact with the inspected object by adjusting the inelastic coupling, including the flat portion having the inelastic coupling.

Thus, the electrical inspection apparatus of the present invention may omit a member such as a spring to adjust the degree of flatness of the substrate in contact with the inspected object. Therefore, the electrical inspection apparatus of the present invention can sufficiently reduce the situation in which the substrate in contact with the inspected object is bent by pressurization of a member such as a spring or the like, and can also simplify its structure.

Therefore, the electrical inspection device of the present invention can not only expect the improvement of the reliability according to the electrical inspection, but also can sufficiently expect the improvement of cost reduction, maintenance, etc. by simplifying the structure.

While the above has been described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify and change the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. It will be appreciated.

Claims (26)

A connection portion connecting a first substrate having a first surface in contact with the object to be tested and a second substrate positioned opposite to a second surface of the first substrate opposite the first surface; And And an adjusting portion inelastically coupled to the connection portion, the adjusting portion adjusting the degree of flatness of the first substrate by adjusting the inelastic coupling. The connection part of claim 1, wherein the connection part has a structure that is continuously inserted into a groove formed in the first substrate from a hole passing through the second substrate, and the adjustment part is connected to the connection part and the screw exposed by the hole of the second substrate. Flatness control assembly for an electrical inspection device, characterized in that having a structure for coupling. The connection part of claim 1, wherein the connection part has a structure that is continuously inserted into a groove formed in the second substrate from a hole passing through the first substrate, and the adjusting part is connected to the connection part and the screw exposed by the hole of the first substrate. Flatness control assembly for an electrical inspection device, characterized in that having a structure for coupling. The method of claim 1, wherein the connecting portion has a structure that is fitted to the groove formed in the first substrate, the adjusting portion is screwed with the connecting portion fitted into the groove formed in the first substrate through the hole formed in the second substrate Flatness control assembly for an electrical inspection device, characterized in that having a structure to. The method of claim 1, wherein the connecting portion has a structure that is fitted into the groove formed in the second substrate, the adjusting portion is screwed with the connecting portion fitted into the groove formed in the second substrate through the hole formed in the first substrate Flatness control assembly for an electrical inspection device, characterized in that having a structure to. The apparatus of claim 1, further comprising: a connection-fixing part for fixing the connection part when connecting the first substrate and the second substrate using the connection part; And And adjusting-fixing to secure the control when engaging the connection with the control. A first substrate having a first surface in contact with the test object and a second surface opposite the first surface; A second substrate facing the second surface of the first substrate; And And an inelastic coupling between the first substrate and the second substrate facing each other, and a flat portion for adjusting the degree of flatness of the first substrate by adjusting the inelastic coupling. The method of claim 7, wherein the flat portion, A connection part connecting the first substrate and the second substrate to each other; And And an adjusting portion inelastically coupled to the connection portion and adjusting a flatness of the first substrate by adjusting the inelastic coupling. The method of claim 7, wherein the flat part is positioned in an area excluding the center of the relatively small size of the first substrate and the second substrate when inelastically coupling the first substrate and the second substrate facing each other. Electrical inspection device, characterized in that. 10. The method of claim 9, wherein at least two planar portions of the first substrate and the second substrate are located at an outer region after 70 from the center when the edge is 100 from the center of the substrate having the smaller size. Electrical inspection device, characterized in that located on both sides as a reference. 8. The apparatus of claim 7, further comprising: a connection-fixing part for fixing the connection part when connecting the first substrate and the second substrate using the connection part; And And an adjusting-fixing part for fixing the adjusting part when engaging the connecting part using the adjusting part. The electrical inspection apparatus according to claim 7, wherein the first substrate and the second substrate are electrically connected. A first substrate having probe tips in electrical contact with a test object in a first surface, and pads in electrical contact with the probe tips in a second surface opposite the first surface; A second substrate facing the second surface of the first substrate; An electrical contact portion interposed between the first substrate and the second substrate facing each other and in contact with pads formed on the second surface of the first substrate to electrically connect the first substrate and the second substrate; And And an inelastic coupling of the first substrate and the second substrate facing each other, and a flat portion adjusting the degree of flatness of the first substrate by adjusting the inelastic coupling. The method of claim 13, wherein the flat portion, A connection part connecting the first substrate and the second substrate to each other; And And an adjusting portion inelastically coupled to the connection portion and adjusting a flatness of the first substrate by adjusting the inelastic coupling. 15. The method of claim 13, wherein the flat portion is located in an area excluding the center of the relatively small size of the first substrate and the second substrate when inelastically coupling the first substrate and the second substrate facing each other Electrical inspection device, characterized in that. 16. The method of claim 15, wherein at least two planar portions of the first substrate and the second substrate are located at an outer region after 70 from the center when the edge is 100 from the center of the substrate having the smaller size. Electrical inspection device, characterized in that located on both sides as a reference. 14. The apparatus of claim 13, further comprising: a connection-fixing part for fixing the connection part when connecting the first substrate and the second substrate using the connection part; And And an adjusting-fixing part for fixing the adjusting part when engaging the connecting part using the adjusting part. A first substrate having probe tips in electrical contact with a test object in a first surface, and pads in electrical contact with the probe tips in a second surface opposite the first surface; A holding part for holding an edge of the first substrate; A second substrate having a third surface facing the first surface of the first substrate, the outer portion including an edge of the third surface being positioned facing the gripping portion; An electrical contact portion interposed between the first substrate and the second substrate facing each other and in contact with pads formed on the second surface of the first substrate to electrically connect the first substrate and the second substrate; And And an inelastic coupling of the second substrate and the gripping portion facing each other, and a flat portion for adjusting the degree of flatness of the first substrate held by the gripping portion by adjusting the inelastic coupling. The method of claim 18, wherein the flat portion, A connection part connecting the second substrate and the grip part to each other; And And an adjusting portion inelastically coupled to the connection portion and adjusting a flatness of the first substrate held by the holding portion by adjusting the inelastic coupling. 19. The method of claim 18, wherein the connection portion has a structure that is continuously fitted into the groove formed in the gripping portion from the hole penetrating the second substrate, the adjustment portion is screwed with the connection portion exposed by the hole of the second substrate An electrical inspection device having a structure to be. 19. The structure of claim 18, wherein the connecting portion has a structure fitted into a groove formed in the gripping portion, and the adjustment portion is screwed with the connecting portion inserted into the groove formed in the holding portion through a hole formed in the second substrate. An electrical inspection device having a. 19. The apparatus of claim 18, further comprising: a connection-fixing part for engaging with the connection part fitted in the groove to fix the connection part when connecting the first substrate and the grip part using the connection part; And And an adjusting-fixing part for fixing the adjusting part by combining with the adjusting part exposed to the hole when engaging the connecting part using the adjusting part. 19. The apparatus of claim 18, further comprising: a first reinforcing portion positioned to be in contact with a fourth surface of the second substrate facing the third surface to reinforce the structure of the second substrate; And A second reinforcement part which is positioned to be in contact with a part of the third surface of the second substrate and part of a side surface is in contact with a part of the side of the gripping part to reinforce the structure of the first substrate together with the structure of the second substrate; Electrical inspection device, characterized in that it further comprises. 19. The method of claim 18, wherein the flat portion is located in an area excluding the center of the relatively small size of the first substrate and the second substrate when inelastically coupling the first substrate and the second substrate facing each other Electrical inspection device, characterized in that. 25. The method of claim 24, wherein at least two planar portions of the first substrate and the second substrate are located at an outer region after 70 from the center when the edge is 100 from the center of the substrate having the smaller size. Electrical inspection device, characterized in that located on both sides as a reference. The test object using an electrical test apparatus inelastically coupled to a first substrate having a first surface in contact with the test object and a second substrate facing the second surface of the first substrate opposite the first surface Confirming the degree of flatness of the first substrate when performing an electrical inspection of the carcass; And And adjusting the inelastic coupling to adjust the flatness of the first substrate to within the error range when the flatness of the first substrate is out of the error range.

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