1359949 九、發明說明 【發明所屬之技術領域】 本發明，是關於使用於液晶面板、積體電路等的平板 狀的被檢查體的檢查的探針組裝體及檢查裝置。 【先前技術】 液晶面板等的平板狀的被檢查體，一般是使用探針單 元進行檢查。這種的探針單元，是有將薄板狀的葉片型探 針複數枚並列構成的型式。如專利文獻1。此專利文獻1 的發明如以下。 探針組裝體1，是如第2圖及第3圖所示，包含：塊 體2、及於塊體2下側並列配置的帶狀的複數探針3、及 貫通探針3的細長一對的導引桿4、及收容探針3的一部 分的一對的開縫桿5、及在探針3的後端側穩定針尖位置 的長條的導引構件6、及將導引桿4支撐於塊體2的一對 的側蓋7。1359949. EMBODIMENT OF THE INVENTION The present invention relates to a probe assembly and an inspection apparatus for inspection of a flat object to be inspected such as a liquid crystal panel or an integrated circuit. [Prior Art] A flat object to be inspected such as a liquid crystal panel is generally inspected using a probe unit. Such a probe unit has a pattern in which a plurality of thin blade-shaped probes are arranged in parallel. As disclosed in Patent Document 1. The invention of Patent Document 1 is as follows. As shown in FIGS. 2 and 3, the probe assembly 1 includes a block body 2, a strip-shaped plurality of probes 3 arranged side by side on the lower side of the block body 2, and a slender one of the penetrating probes 3. a pair of guiding rods 4, a pair of slitting rods 5 for accommodating a part of the probes 3, and a long guiding member 6 for stabilizing the needle tip position on the rear end side of the probe 3, and the guiding rod 4 A pair of side covers 7 supported by the block 2.
各探針3，是具備：帶狀的中央領域3A、及從該中央 領域的前端及後端朝前方及後方延伸的一對的針尖領域 3B及3C。中央領域3A，是在各端部具有供導引桿4貫通 的導引孔3D。各探針3，是使導引桿4通過該導引孔3D ’使各針尖領域3B及3C嵌合於開縫桿5，並配設於塊體 2的下側。 由此’針尖領域3B的探針是設置於液晶面板上與電 極接觸並電連接，進行控制訊號的發訊等。 -4- 1359949 [專利文獻1]日本特開平10-132853號公報 【發明內容】 (本發明所欲解決的課題） 但是’前述探針是消耗品，有需要交換。此交 ’是有只交換一部分的探針的情況。例如，探針曲 而只交換此1根探針的情況。此情況，探針的交換 要很慎重。每根探針，因爲是非常地輕微且容易四 ’只交換多數並列的探針之中的一部分的情況，只 稍微接觸就會散乱、破損。因此，探針的交換作業 重地進行，而有作業效率差的問題。 本發明，爲了解決上述的問題點，其目的爲提 探針單元及檢查裝置，探針的交換可以容易且安全 (解決上述課題的手段） 爲了解決前述課題，本發明的探針組裝體’是 撐葉片型探針與被檢查體的電極電接觸，其特徵爲 :將複數前述葉片型探針一體地支撐的塊體片；及 在該塊體片的前端側及基端側使複數前述葉片§^探 端側及基端側隔有一定間隔地各別支撐的2個開縫 各別貫通複數前述葉片型探針將各葉片型探針一體 的1根以上的導引桿；及被固定於前述塊體片供支 導引桿用的側蓋；及將複數前述葉片型探針的前端 換作業 折1根 作業需 分五裂 與探針 需要慎 供一種 地進行 是供支 ，具備 各別設 針的前 桿；及 地支撐 撐前述 側或基 -5- 1359949 端側配設成由前述開縫桿挾持，前述葉片型探針的交換作 業時抑制使與前述開縫桿嵌合的前述葉片型探針的前端側 或基端側不會從該開縫桿脫落的交換軸；及安裝於前述塊 體片並覆蓋前述葉片型探針及前述開縫桿並且支撐前述交 換軸的內蓋；及面對於基端側或前端側的前述開縫桿的前 述葉片型探針側設置的嵌合部；及前述各葉片型探針之中 面對於前述開縫桿的嵌合部側設置與該嵌合部嵌合將該葉 片型探針對於該開縫桿定位並暫時固定的被嵌合部。 藉由前述結構，交換複數葉片型探針之中的一部分的 情況，是拆散前述各葉片型探針，將各葉片型探針的一端 的被嵌合部嵌合定位並暫時固定於前述開縫桿的嵌合部， 將他端由前述交換軸及前述開縫桿挾持，抑制各葉片型探 針的散亂。在此狀態下，拔取交換對象的葉片型探針交換 新的葉片型探針。 前述嵌合部，是由面對於前述開縫桿的前述葉片型探 針側設置的凸條所構成，前述被嵌合部’是由前述各葉片 型探針之中面對於前述開縫桿的嵌合部側設置的凹狀缺口 所構成較佳。 對於檢查裝置，具備：將被檢查體從外部搬入並在檢 查終了後朝外部搬運的組裝部、及支撐從該組裝部搬入的 被檢查體的試驗測量部’在前述測量部的探針單元，組入 前述探針組裝體較佳。 [發明的效果] m -6 - 1359949 如以上，因爲將前述各葉片型探針的一牺的被嵌合部 嵌合於前述開縫桿的嵌合部將該各葉片型探針對於該開縫 桿進行定位並暫時固定，將其端部挾持支撐於前述開縫桿 及交換軸之間，進行各葉片型探針的交換’所以可抑制各 葉片型探針散亂，探針的交換可以容易且安全地進行。 【實施方式】 以下，參照添付圖面說明本發明的實施例的探針組裝 體及檢查裝置。本實施例的檢查裝置’是使用於被檢查體 的檢査用的檢査裝置，具備：將被檢查體從外部搬入且檢 查終了後朝外部搬運的組裝部、及供支撐從該組裝部搬入 的被檢査體進行試驗用的測量部。此檢查裝置的前述測量 部的探針組裝體，是使用本實施例的探針組裝體。又，本 實施例的檢査裝置，因爲與前述習知的檢查裝置幾乎同樣 ，在此以探針組裝體爲中心作說明。且，本發明的檢查裝 置，對於可以使用本實施例的探針組裝體的裝置，全部可 以適用。 本實施例的探針單元11，是如第4圖所示，使用於作 爲被檢查體的液晶面板12的檢查。液晶面板12，是長方 形的形狀，且將複數電極（無圖示）在對應的長方形的相鄰 接的2個邊的緣部以預定間距形成。 探針單元11主要具備探針基座13、及探針組裝體14 〇 探針基座13’是被固定於檢查裝置的本體框架側。探 1359949 針基座13，是在被固定於本體框架側的狀態下，支撐探針 組裝體14。 探針組裝體14，是供支撐探針並與液晶面板12的電 極電接觸用的裝置。探針組裝體14是如第5圖所示主要 具備：懸吊基座16、及滑動塊體17、及探針托板18、及 FPC基座19、及探針塊體20。 懸吊基座16’是透過滑動塊體17等支撐後述探針塊 體20的葉片型探針38用的構件。懸吊基座16，是整體形 成幾乎立方體狀並固定於探針基座13。在懸吊基座16的 前端側’設有從上側推迫滑動塊體1 7用的屋簷部1 6A。 在屋簷部1 6 A中設有螺絲孔2 2，供螺絲2 3螺入。此螺絲 23的前端側是插入後述滑動塊體17的彈簧孔17B。在懸 吊基座16的前端側面的前述屋簷部16A的下側，設有使 滑動塊體17可上下方向滑動的導引軌道24。 滑動塊體17’是供可上下滑動地支撐探針塊體20用 的構件。滑動塊體17是形成大約立方體狀。在滑動塊體 17的下部’形成可覆蓋探針托板18大小的屋簷部17A。 探針托板18，是與包含此屋簷部17A的滑動塊體17的下 側面抵接並被支撐。在滑動塊體17的基端面（第5圖中的 右側面）’安裝有與懸吊基座16的軌道24嵌合並支撐滑 動塊體17的朝上下的移動之導引26。在滑動塊體17的上 側面’設有供彈簧28插入用的彈簧孔17B。彈簧28，是 被支撐於螺絲23並被插入彈簧孔17B內，將滑動塊體17 朝下方推迫。藉由此彈簧28所產生的推迫力，使後述各 ί -8- 1359949 接觸子56在與液晶面板12的各電極接觸的狀態下將各接 觸子56朝各電極側推迫。 探針托板18,是在被支撐於滑動塊體17的狀態下， 支撐FPC基座19及探針塊體20用的構件。探針托板18 ’是在其上側面被固定於滑動塊體1 7的下側面的狀態下 ’在下側面固定有FPC基座19及探針塊體20。 FPC基座19，是支撐FPC纜線27將外部裝置及後述 葉片型探針38電連接用的構件。FPC纜線27，其基端部 是與安裝於探針基座13的下側面的中繼基板29連接，前 端部是安裝於F PC基座19的下側面。在FPC基座19的 前端部’設有：與後述葉片型探針38的FPC側的接觸子 57電接觸的端子（無圖示）、保護此端子的導引薄膜（無圖 示）、驅動用積體電路（無圖示）等。 探針塊體20，是爲了對於液晶面板12的電路（無圖示 )進行檢查訊號發訊等而與液晶面板12的電極電接觸用的 構件。探針塊體20’是如第1圖所示，具備：塊體片33 、及開縫桿34、及導引桿3 5、及支撐銷3 6、及側蓋3 7、 及葉片型探針38。 塊體片33’是在其下側面將複數葉片型探針38隔有 一定間隔並一體地支撐用的構件。塊體片3 3，是使其下側 面配合葉片型探針38的上側面形狀凹陷形成。在塊體片 33的左右兩側（第1圖中的左上右下方向的兩側）中，複數 設置供固定側蓋37用的螺栓孔（無圖示）。在塊體片33的 上側面’複數設置將探針塊體20固定於探針托板18用的 -9- 1359949 螺栓孔4 1 » 開縫桿34，是將多數配設的葉片型探針38之中後述 各前端側腕部5 1及各FPC側腕部52各別正確地定位支撐 用的構件。此開縫桿34，是由陶瓷所形成，不受熱的影響 可將葉片型探針38正確地支撐。前端側開縫桿34A是支 撐葉片型探針38的各前端側腕部51，FPC側開縫桿34B 是支撐葉片型探針38的各FPC側腕部52。各開縫桿34A 、34B，是設有多數開縫43的結構。各開縫43，是將葉 片型探針38的各前端側腕部51及各FPC側腕部52隔有 設定間隔地支撐用的開縫。前端側開縫桿34A的各開縫 43的間隔’是設定成使嵌合於各開縫43的前端側腕部51 的後述接觸子56整合於液晶面板12的各電極的間隔。 FPC側開縫桿34B的開縫43的間隔，是設定成使嵌合於 各開縫43的FPC側腕部52的後述接觸子57整合於FPC 纜線27的端子的間隔。 在前端側開縫桿3 4 A之中面向葉片型探針3 8側的位 置設有嵌合部45。此嵌合部45，是由面對於葉片型探針 3 8側設置的凸條所構成。此嵌合部4 5，是橫跨開縫桿3 4 的全長設置’讓全部的葉片型探針38的後述被嵌合部46 嵌合。藉由讓葉片型探針38的被嵌合部46嵌合於此嵌合 部45’進行交換作業時的葉片型探針38的上下前後（第6 圖中的上下左右）的定位及暫時固定。 導引桿35’是供支撐葉片型探針38用的構件。導引 桿35是形成大徑圓柱狀。大徑圓柱狀的導引桿35的直徑 -10- 1359949 ，是設定成可整合於葉片型探針38的後述導引桿孔53的 內徑的尺寸。這是爲了透過導引桿35進行葉片型探針38 的定位。即’在導引桿35嵌合於葉片型探針38的導引桿 孔53的狀態下定位此導引桿35的話，垂直於此導引桿35 的中心軸的方向的葉片型探針38的位置可正確地決定。 因此，將導引桿35的直徑設定成可整合於葉片型探針38 的導引桿孔53的內徑的尺寸，藉由定位導引桿35，垂直 於此導引桿35的中心軸的方向的葉片型探針38的定位可 會正確。 支撐銷36’是與導引桿35 —起支撐葉片型探針38用 的構件。支撐銷36是形成圓形棒狀。此支撐銷36的直徑 ，是設定成可整合於葉片型探針38的後述支撐銷孔54的 內徑的尺寸。這是爲了與導引桿35 —起通過支撐銷36進 行葉片型探針38的定位。 側蓋37，是供支撐導引桿35及支撐銷36用的板材。 側蓋3 7是使用2枚，安裝於塊體片3 3的兩側。在側蓋3 7 中，設有：蓋固定用螺栓孔、導引桿固定用螺栓孔、支撐 銷固定用螺栓孔（皆無圖示）等。各螺栓孔是正確被定位， 就可對於塊體片33正確地定位支撐導引桿35及支撐銷36 〇 葉片型探針38，是供與液晶面板12的電路的電極直 接接觸並進行檢查訊號發訊等的構件。葉片型探針38，是 如第1、6圖所示，由：本體板部50、及前端側腕部51、 及FPC側腕部52所構成。 ί S3 -11 - 1359949 本體板部50，是設有供導引桿35及支撐銷36通過用 的導引桿孔53、及支撐銷孔54。導引桿孔53，是其內徑 是設定成可整合於導引桿35外徑的尺寸。支撐銷孔54, 其內徑是設定成可整合於支撐銷36外徑的尺寸。由此， 本體板部50，可正確地被定位支撐。 前端側腕部5 1，是在其前端部支撐朝向下側的接觸子 56用的構件。在前端側腕部51中，在整合於液晶面板12 的電極的前端位置設有接觸子56。 FPC側腕部52，是由其基端部（第6圖中的右側端部） 支撐朝向上側的接觸子57用的構件。在FPC側腕部52中 ，在整合於FPC纜線27的端子的位置設有接觸子57。 進一步，在葉片型探針38之中面向前述開縫桿34的 嵌合部45側的位置設有被嵌合部46。被嵌合部46，是藉 由嵌合於嵌合部45，將葉片型探針38對於開縫桿34定位 並暫時固定用的部分。被嵌合部46，是藉由被設在各葉片 型探針38之中面向開縫桿34的嵌合部45的位置的凹狀 缺口構成。此被嵌合部46是藉由被嵌合於嵌合部45,使 葉片型探針38對於開縫桿34定位並暫時固定。 進一步，在前述探針塊體20中，交換軸61及內蓋62 ，是只有在葉片型探針38的交換作業時才設置。 交換軸61，是在前述葉片型探針38的交換作業時抑 制與前述開縫桿34的開縫43嵌合的葉片型探針38的基 端側也就是FPC側腕部52從此開縫43脫落用的軸。交換 軸61，是第1、7圖所示，將複數前述葉片型探針38的 ί S3 -12- 1359949 FPC側腕部52由前述開縫桿34挾持的方式，配設在面對 於開縫桿34的位置。交換軸61’是與開縫桿34接觸，挾 持插入開縫43內的葉片型探針38的FPC側腕部52也可 以，在與開縫桿34之間稍爲隔有空間，使插入於開縫43 內的葉片型探針38的FPC側腕部52不會從開縫43脫落 的方式進行挾持也可以。 內蓋62，是安裝於前述塊體片33將前述葉片型探針 38及前述開縫桿34覆蓋並且支撐前述交換軸61用的板材 。內蓋62，是與側蓋37同樣，由螺栓固定於塊體片33的 兩側並覆蓋開縫桿34及葉片型探針38。在內蓋62中，設 有：導引桿孔63、及支撐銷孔64、及交換軸孔65。 導引桿孔63，是通過導引桿35的孔，形成比導引桿 35的直徑大。在葉片型探針38的交換作業時，內蓋62安 裝於塊體片33之後，從導引桿孔63拔取導引桿35。 支撐銷孔64，是由供支撐銷36通過用的孔，形成比 支撐銷36的直徑大。在葉片型探針38的交換作業時，內 蓋62安裝於塊體片33之後，從支撐銷孔64拔取支撐銷 3 6〇 交換軸孔65，是供交換軸61通過用的孔。交換軸孔 65，是設定成與交換軸61幾乎相同直徑，在交換軸61通 過的狀態下不遊動地支撐交換軸61。交換軸61，是在通 過交換軸孔65的狀態下，與開縫桿34對峠地配設。這時 ，交換軸61，是如上述，有與開縫桿34接觸的情況及不 接觸的情況。由此，由交換軸6 1及開縫桿34隔有間隔地 I S] -13- 1359949 挾持支撐被插入此開縫桿34的開縫43的葉片型探針38 的FPC側腕部52。由此，抑制各葉片型探針38散亂，可 對於任意的葉片型探針38每次1根地進行拔取插入。 如以上結構的探針單元11具有如下作用。又，檢查 裝置整體的作用因爲是與習知的檢查裝置同樣，所以在此 以葉片型探針3 8的交換作業爲中心作說明。 葉片型探針38是通過導引桿35及支撐銷36，導引桿 35及支撐銷36是被固定於2個側蓋37，進一步，各側蓋 37是被固定於塊體片33構成探針組裝體14。而且，探針 組裝體14固定於探針基座13，探針組裝體14的葉片型探 針38的接觸子56是接觸液晶面板12的各電極，進行檢 査訊號發訊等。在此液晶面板12的檢查，當一部分的葉 片型探針38的接觸子56產生了曲折等的問題的情況時， 進行該葉片型探針38的交換。 此情況是首先取下探針塊體20。而且，如第1、7、8 圖所示’取下側蓋37安裝內蓋62，將交換軸61通過此內 蓋62的交換軸孔65。接著，從內蓋62的導引桿孔63及 支撐銷孔64拔取導引的桿35及支撐銷36卸下各葉片型 探針38。在此狀態下，各葉片型探針38，是使其被嵌合 部46嵌合於開縫桿34的嵌合部45，此葉片型探針38是 隔著開縫桿34,對於探針塊體20定位並暫時固定。葉片 型探針38的FPC側腕部52側，是由交換軸61及開縫桿 34所挾持被支撐（第8圖（a)的狀態）。 在此狀態下，將交換對象的葉片型探針38,將其被嵌 [S] -14- 1359949 合部46從開縫桿34的嵌合部45取下（第8圖（b)的狀態） ，將FPC側腕部52從開縫桿34及交換軸61之間拔取（第 8圖（c)的狀態）。接著’將新的葉片型探針38的FPC側腕 部52插入開縫桿34及交換軸61之間，將葉片型探針38 的被嵌合部46與開縫桿34的嵌合部45嵌合，將葉片型 探針38定位並暫時固定。 接著’將導引桿35貫通各葉片型探針38的導引桿孔 53’將支撑銷36貫通支擦銷孔54 —體地支撐各葉片型探 針38，取下內蓋62安裝側蓋37。而且，在此側蓋37安 裝導引桿35及支撐銷36，將探針塊體20組裝於探針組裝 體14，將探針組裝體14安裝於探針基座13。 如此’將各葉片型探針38的被嵌合部46嵌合於開縫 桿34的嵌合部45將各葉片型探針38對於開縫桿34定位 並暫時固定，將葉片型探針38的FPC側腕部52側挾持支 撐於開縫桿34及交換軸61之間，爲了進行葉片型探針38 的交換，抑制交換對象的葉片型探針38以外的各葉片型 探針38散亂，葉片型探針38的交換就可容易且安全地進 行。 進一步，在交換作業時，因爲安裝塊體片33的內蓋 62覆蓋開縫桿34及葉片型探針38，所以可以防止他物接 觸開縫桿34或葉片型探針38導致破損。 [變形例] 在前述實施例中，開縫桿34的嵌合部45雖形成凸狀 ί S3 -15- 1359949 ’葉片型探針38的被嵌合部46雖形成凹狀，但是與其相 反嵌合部45形成凹狀，被嵌合部46形成凸條也可以。且 ’雖在前端側開縫桿34A側設置嵌合部45，在FPC側開 縫桿34B側設置交換軸6 1，但是與其相反在前端側開縫 桿34A側設置交換軸61，在FPC側開縫桿34B側設置嵌 合部45也可以。此情況，也可以達成與前述同樣的作用 、效果。 在前述實施例中，交換軸61雖形成圓形的棒狀，但 是四角棒狀或平板棒狀等的其他的形狀也可以。此情況， 也可以達成與前述同樣的作用、效果。 在前述實施例中，雖同時設有導引桿35及支撐銷36 ，但是也有未設置支撐銷36的情況。有需要提高精度的 情況時設置支擦銷36。 【圖式簡單說明】 [第1圖]本發明的實施例的探針單元的探針組裝體的 分解立體圖》 [第2圖]習知的檢査裝置的探針組裝體的立體圖。 [第3圖]習知的檢査裝置的探針組裝體的側面剖面圖 〇 [第4圖]本發明的實施例的探針單元的立體圖。 [第5圖]本發明的實施例的探針單元的一部分切斷的 側面圖。 [第6圖]本發明的實施例的探針單元的葉片型探針的 ί S3 -16- 1359949 側面圖。 [第7圖]將本發明的實施例的探針單元的探針塊體從 其背面顯示的立體圖。 [第8圖]本發明的實施例的探針單元的葉片型探針的 交換作業的側面圖》 【主要元件符號說明】 11:探針單元，12:液晶面板，13:探針基座， 1 4 :探針組裝體，1 6 :懸吊基座，1 7 :滑動塊體，1 8 :探 針托板’ 1 9 : F P C基座，2 0 :探針塊體，2 2 :螺絲孔， 23 :螺絲，24 :軌道，26 :導引，27 : FPC纜線，28 :弹 簧，29:中繼基板，33:塊體片，34:開縫桿，34A:前 端側開縫桿，34B : FPC側開縫桿，35 :導引桿，36 :支 撑銷，37:側蓋，38:葉片型探針，43:開縫，45:嵌合 部，46 :被嵌合部，50 :本體板部，5 1 :前端側腕部， 52 :各F P C側腕部，53 :導引桿孔，54 :支撐銷孔， 56:接觸子，57:接觸子，61:交換軸，62:內蓋， 63:導引桿孔，64:支撐銷孔，65:交換軸孔。 -17-Each of the probes 3 includes a belt-shaped central region 3A and a pair of needle tip regions 3B and 3C extending forward and rearward from the front end and the rear end of the center region. The center area 3A has a guide hole 3D through which the guide rod 4 penetrates at each end. In each of the probes 3, the guide rods 4 are fitted to the slit bars 5 through the guide holes 3D', and the respective needle tip regions 3B and 3C are fitted to the lower side of the block 2. Thus, the probe of the tip region 3B is provided on the liquid crystal panel in contact with the electrode and electrically connected to perform control signal transmission. 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 This intersection is a case where there is only one part of the probe exchanged. For example, the probe is curved and only one probe is exchanged. In this case, the exchange of probes should be very careful. Since each probe is very slight and easy to exchange only a part of the majority of the parallel probes, only a slight contact will be scattered and damaged. Therefore, the exchange work of the probe is performed in a heavy manner, and there is a problem that the work efficiency is poor. In order to solve the above problems, the present invention aims to provide a probe unit and an inspection apparatus, and the exchange of probes can be easily and safely (a means for solving the above problems). In order to solve the above problems, the probe assembly of the present invention is The blade-type probe is in electrical contact with the electrode of the test object, and is characterized in that: a plurality of the blade-shaped probes integrally supported by the blade-type probe; and a plurality of the blades on the front end side and the base end side of the block piece § ^ two slits supported by the probe end side and the base end side at a predetermined interval, each of which is inserted into a plurality of guide vanes in which the blade type probes are integrated with each vane type probe; and fixed The side cover for supporting the guide rod of the block piece; and the folding operation of the front end of the plurality of the blade type probes is divided into five cracks and the probe needs to be carefully supplied for one purpose, and each has a support a front rod of the needle is not provided; and the end side of the ground support or the base - 5359949 is disposed to be held by the slit rod, and the blade type probe is prevented from being engaged with the slit rod during the exchange operation The front of the aforementioned blade type probe An exchange shaft from which the side or base end side does not fall off from the slit rod; and an inner cover attached to the block piece and covering the blade type probe and the slit rod and supporting the exchange shaft; and a surface for the base end a fitting portion provided on the blade type probe side of the slit rod on the side or the front end side; and a surface of each of the blade type probes provided on the fitting portion side of the slit rod to be fitted to the fitting portion The blade-type probe is positioned on the slotted rod and temporarily fixed to the fitted portion. According to the above configuration, when a part of the plurality of blade type probes is exchanged, the blade type probes are disassembled, and the fitted portions of one end of each of the blade type probes are fitted and positioned and temporarily fixed to the slits. The fitting portion of the rod holds the other end by the exchange shaft and the slit rod, and suppresses scattering of the blade type probes. In this state, the blade type probe for the exchange object is exchanged for the new blade type probe. The fitting portion is formed by a ridge provided on the blade type probe side of the slit rod, and the fitted portion 'is a surface of the blade type probe to the slit rod A concave notch provided on the side of the fitting portion is preferably formed. The inspection device includes: an assembly unit that carries the object to be inspected from the outside and that is transported to the outside after the inspection is completed, and a probe unit that supports the test measurement unit that is carried in from the assembly unit, and the probe unit in the measurement unit. It is preferred to incorporate the aforementioned probe assembly. [Effects of the Invention] m -6 - 1359949 As described above, the fitting portions of the saddle probes are fitted to the fitting portions of the slit bars, and the respective blade-type probes are opened. The sewing rod is positioned and temporarily fixed, and the end portion is supported between the slit rod and the exchange shaft to exchange the blade type probes. Therefore, the scattering of the blade type probes can be suppressed, and the exchange of the probes can be performed. It is easy and safe to carry out. [Embodiment] Hereinafter, a probe assembly and an inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings. The inspection apparatus of the present embodiment is an inspection apparatus for inspection of an object to be inspected, and includes an assembly unit that carries the object to be inspected from the outside, and that is transported to the outside after inspection, and a support that is carried in from the assembly unit. The measuring unit for the test body is tested. The probe assembly of the above-described measuring portion of the inspection apparatus is a probe assembly using the present embodiment. Further, the inspection apparatus of the present embodiment is almost the same as the above-described conventional inspection apparatus, and the probe assembly will be mainly described herein. Further, the inspection apparatus of the present invention can be applied to all of the apparatuses to which the probe assembly of the present embodiment can be used. The probe unit 11 of the present embodiment is used for inspection of the liquid crystal panel 12 as a test object as shown in Fig. 4. The liquid crystal panel 12 has a rectangular shape, and a plurality of electrodes (not shown) are formed at a predetermined pitch on the edges of the adjacent two sides of the corresponding rectangle. The probe unit 11 mainly includes a probe base 13 and a probe assembly 14 〇 The probe base 13' is fixed to the body frame side of the inspection device. The 1359949 needle base 13 supports the probe assembly 14 in a state of being fixed to the body frame side. The probe assembly 14 is a device for supporting the probe and electrically contacting the electrodes of the liquid crystal panel 12. As shown in Fig. 5, the probe assembly 14 mainly includes a suspension base 16, a slide block 17, a probe holder 18, an FPC base 19, and a probe block 20. The suspension base 16' is a member for supporting the blade type probe 38 of the probe block 20 which will be described later through the slide block body 17 or the like. The suspension base 16 is formed in an almost cubic shape as a whole and is fixed to the probe base 13. An eave portion 16A for pushing the slider body 17 from the upper side is provided at the front end side of the suspension base 16. A screw hole 22 is provided in the eaves portion 1 6 A for screwing the screw 2 3 . The front end side of this screw 23 is a spring hole 17B into which a slider body 17 to be described later is inserted. On the lower side of the eave portion 16A on the front end side of the suspension base 16, a guide rail 24 for sliding the slider body 17 in the vertical direction is provided. The slide block 17' is a member for supporting the probe block 20 so as to be slidable up and down. The sliding block 17 is formed in an approximately cubic shape. An eave portion 17A that covers the size of the probe holder 18 is formed at a lower portion ' of the slider block 17'. The probe holder 18 abuts and is supported by the lower side surface of the slide block 17 including the eave portion 17A. A guide 26 that is fitted to the rail 24 of the suspension base 16 and supports the upward movement of the slide block 17 is attached to the base end surface (the right side surface in Fig. 5) of the slide block 17. A spring hole 17B for inserting the spring 28 is provided on the upper side surface of the slide block body 17. The spring 28 is supported by the screw 23 and inserted into the spring hole 17B to urge the slide block 17 downward. By the urging force generated by the spring 28, each of the contact fingers 56, which will be described later, is urged toward the respective electrode sides with the respective electrodes of the liquid crystal panel 12 in contact with each other. The probe holder 18 is a member for supporting the FPC base 19 and the probe block 20 in a state of being supported by the slide block 17. The probe holder 18' is fixed to the lower side of the slide block 17 by its upper side. The FPC base 19 and the probe block 20 are fixed to the lower side. The FPC base 19 is a member for supporting the FPC cable 27 to electrically connect an external device and a blade type probe 38 to be described later. The FPC cable 27 has a base end portion connected to the relay substrate 29 attached to the lower side surface of the probe base 13, and a front end portion attached to the lower side surface of the F PC base 19. A terminal (not shown) that electrically contacts the contact 57 on the FPC side of the blade-type probe 38 to be described later, a guide film (not shown) that protects the terminal, and a drive are provided at the distal end portion ' of the FPC base 19 Use an integrated circuit (not shown), etc. The probe block 20 is a member for electrically contacting the electrodes of the liquid crystal panel 12 in order to perform inspection signal transmission or the like on a circuit (not shown) of the liquid crystal panel 12. As shown in Fig. 1, the probe block 20' includes a block piece 33, a slit bar 34, a guide bar 35, a support pin 36, a side cover 37, and a blade profile. Needle 38. The block piece 33' is a member for integrally supporting the plurality of blade type probes 38 at a certain interval on the lower side thereof. The block piece 3 3 is formed by recessing the lower side surface of the blade type probe 38 with its lower side surface. In the left and right sides of the block piece 33 (both sides in the upper left and lower right directions in Fig. 1), a plurality of bolt holes (not shown) for fixing the side cover 37 are provided. On the upper side of the block 33, a plurality of -9- 1359949 bolt holes 4 1 for fastening the probe block 20 to the probe holder 18 are provided, and the slit probe 34 is a plurality of blade type probes. Each of the distal end side wrist portion 51 and each of the FPC side wrist portions 52, which will be described later, is correctly positioned to support the member for support. This slit rod 34 is formed of ceramic and can be properly supported by the vane type probe 38 without being affected by heat. The distal end side slit bars 34A are the distal end side wrist portions 51 that support the blade type probes 38, and the FPC side slit bars 34B are the FPC side wrist portions 52 that support the blade type probes 38. Each of the slit bars 34A and 34B has a structure in which a plurality of slits 43 are provided. Each of the slits 43 is a slit for supporting the distal end side wrist portion 51 and each of the FPC side wrist portions 52 of the leaf type probe 38 with a predetermined interval therebetween. The interval ′ of the slits 43 of the distal end side slit rods 34A is set so that the contact 56 of the distal end side wrist portion 51 fitted to each of the slits 43 is integrated into the respective electrodes of the liquid crystal panel 12. The interval between the slits 43 of the FPC side slit bars 34B is set so that the contact 57 of the FPC side arm portion 52 fitted to each of the slits 43 is integrated into the terminals of the FPC cable 27. A fitting portion 45 is provided at a position facing the blade type probe 38 side of the front end side slit bar 3 4 A. This fitting portion 45 is constituted by a ridge provided on the side of the blade type probe 38. The fitting portion 45 is provided over the entire length of the slit bar 34. The fitting portion 46 of the blade type probe 38, which will be described later, is fitted. Positioning and temporary fixing of the blade-type probe 38 in the up-and-down direction (upper, lower, left and right in FIG. 6) when the fitting portion 46 of the blade-type probe 38 is fitted to the fitting portion 45' is exchanged . The guide rod 35' is a member for supporting the blade type probe 38. The guide rod 35 is formed in a large-diameter cylindrical shape. The diameter of the large-diameter cylindrical guide rod 35, -10- 1359949, is set to be integrated into the inner diameter of the guide rod hole 53 which will be described later of the vane type probe 38. This is to position the blade type probe 38 through the guide rod 35. That is, the blade type probe 38 which is perpendicular to the direction of the central axis of the guide rod 35 when the guide rod 35 is fitted in the state in which the guide rod 35 is fitted to the guide rod hole 53 of the vane type probe 38 The location can be determined correctly. Therefore, the diameter of the guide rod 35 is set to a size that can be integrated into the inner diameter of the guide rod hole 53 of the vane type probe 38, by positioning the guide rod 35, perpendicular to the central axis of the guide rod 35. The orientation of the blade type probe 38 in the direction may be correct. The support pin 36' is a member for supporting the blade type probe 38 together with the guide rod 35. The support pin 36 is formed in a circular bar shape. The diameter of the support pin 36 is set to be integrated into the inner diameter of the support pin hole 54 of the blade type probe 38 which will be described later. This is to position the blade type probe 38 through the support pin 36 together with the guide rod 35. The side cover 37 is a plate for supporting the guide bar 35 and the support pin 36. The side cover 37 is used in two pieces and is attached to both sides of the block piece 33. The side cover 3 7 is provided with a bolt hole for fixing the cover, a bolt hole for fixing the guide rod, and a bolt hole for fixing the support pin (all are not shown). The bolt holes are correctly positioned, so that the support guide rod 35 and the support pin 36 and the blade type probe 38 can be correctly positioned for the block 33, and the electrodes of the circuit of the liquid crystal panel 12 are directly in contact with each other and the inspection signal is performed. Components such as messaging. The blade type probe 38 is composed of a main body plate portion 50, a distal end side wrist portion 51, and an FPC side wrist portion 52 as shown in Figs. ί S3 -11 - 1359949 The main body plate portion 50 is provided with a guide rod hole 53 through which the guide rod 35 and the support pin 36 pass, and a support pin hole 54. The guide rod hole 53 has a size in which the inner diameter is set to be integrated with the outer diameter of the guide rod 35. The support pin hole 54 has an inner diameter which is set to be integrated into the outer diameter of the support pin 36. Thereby, the main body plate portion 50 can be positioned and supported correctly. The distal end side wrist portion 51 is a member for supporting the contact member 56 toward the lower side at the front end portion thereof. In the distal end side wrist portion 51, a contact 56 is provided at a distal end position of the electrode integrated in the liquid crystal panel 12. The FPC side arm portion 52 is a member for supporting the contact member 57 facing the upper side by the base end portion (the right end portion in Fig. 6). In the FPC side arm portion 52, a contact 57 is provided at a position integrated in the terminal of the FPC cable 27. Further, the fitting portion 46 is provided at a position facing the fitting portion 45 side of the slit rod 34 among the vane type probes 38. The fitted portion 46 is a portion for fitting and temporarily fixing the blade type probe 38 to the slit rod 34 by fitting to the fitting portion 45. The fitted portion 46 is formed by a concave notch provided in the position of the fitting portion 45 of the slit rod 34 among the vane-type probes 38. The fitted portion 46 is fitted to the fitting portion 45, and the vane type probe 38 is positioned and temporarily fixed to the slit rod 34. Further, in the probe block 20, the exchange shaft 61 and the inner cover 62 are provided only when the blade type probe 38 is exchanged. The exchange shaft 61 is a base end side of the vane type probe 38 that is fitted to the slit 43 of the slit rod 34 during the exchange operation of the vane type probe 38, that is, the FPC side arm portion 52 from the slit 43 A shaft for shedding. The exchange shaft 61 is provided in the first and seventh figures, and the LY S3 -12-1359949 FPC side arm portion 52 of the plurality of the blade type probes 38 is held by the slit rod 34, and is disposed on the surface for slitting. The position of the rod 34. The exchange shaft 61' is in contact with the slit rod 34, and the FPC side arm portion 52 of the vane type probe 38 inserted into the slit 43 may be slightly spaced from the slit rod 34 so as to be inserted therein. The FPC side arm portion 52 of the blade type probe 38 in the slit 43 may be held without being detached from the slit 43. The inner cover 62 is a plate material that is attached to the block piece 33 to cover the blade type probe 38 and the slit rod 34 and supports the exchange shaft 61. Similarly to the side cover 37, the inner cover 62 is fixed to both sides of the block piece 33 by bolts and covers the slit rod 34 and the blade type probe 38. The inner cover 62 is provided with a guide rod hole 63, a support pin hole 64, and an exchange shaft hole 65. The guide rod hole 63 is formed through the hole of the guide rod 35 to be formed larger than the diameter of the guide rod 35. At the time of the exchange operation of the blade type probe 38, the inner cover 62 is attached to the block piece 33, and the guide rod 35 is taken out from the guide rod hole 63. The support pin hole 64 is formed by a hole through which the support pin 36 passes, and is formed larger than the diameter of the support pin 36. At the time of the exchange operation of the blade type probe 38, the inner cover 62 is attached to the block piece 33, and the support pin 3 6 交换 exchange shaft hole 65 is taken out from the support pin hole 64 to be a hole through which the exchange shaft 61 passes. The exchange shaft hole 65 is set to have almost the same diameter as the exchange shaft 61, and supports the exchange shaft 61 without moving in a state where the exchange shaft 61 passes. The exchange shaft 61 is disposed opposite the slit rod 34 in a state where the shaft hole 65 is exchanged. At this time, the exchange shaft 61 is in contact with the slit rod 34 as described above and may not be in contact with each other. Thereby, the FPC side arm portion 52 of the vane type probe 38 that is inserted into the slit 43 of the slit rod 34 is held by the exchange shaft 61 and the slit rod 34 with a gap of I S] -13 - 1359949. Thereby, the blade type probes 38 are suppressed from being scattered, and any of the blade type probes 38 can be inserted and inserted one at a time. The probe unit 11 having the above structure has the following effects. Further, since the entire operation of the inspection apparatus is the same as that of the conventional inspection apparatus, the description will be made focusing on the exchange operation of the vane type probe 38. The blade type probe 38 is guided by the guide rod 35 and the support pin 36, and the guide rod 35 and the support pin 36 are fixed to the two side covers 37. Further, each side cover 37 is fixed to the block piece 33 to form a probe. Needle assembly 14. Further, the probe assembly 14 is fixed to the probe base 13, and the contact 56 of the blade-type probe 38 of the probe assembly 14 contacts the respective electrodes of the liquid crystal panel 12 to perform inspection signal transmission and the like. In the inspection of the liquid crystal panel 12, when a contact problem of a part of the blade type probe 38 causes a problem such as a meandering, the exchange of the blade type probe 38 is performed. In this case, the probe block 20 is first removed. Further, as shown in Figs. 1, 7, and 8, the inner cover 62 is attached to the side cover 37, and the exchange shaft 61 is passed through the exchange shaft hole 65 of the inner cover 62. Next, the guide rod 35 and the support pin 36 which are taken out from the guide rod hole 63 of the inner lid 62 and the support pin hole 64 are used to detach the blade type probes 38. In this state, each of the vane type probes 38 is fitted to the fitting portion 45 of the slit rod 34 by the fitting portion 46. The vane type probe 38 is interposed between the slit rods 34 and the probe. The block 20 is positioned and temporarily fixed. The FPC side arm portion 52 side of the vane type probe 38 is held by the exchange shaft 61 and the slit rod 34 (the state shown in Fig. 8(a)). In this state, the blade type probe 38 to be exchanged is removed from the fitting portion 45 of the slit rod 34 by the fitting [S] -14 - 1359949 joint portion 46 (the state of Fig. 8 (b) The FPC side arm portion 52 is taken out from between the slit rod 34 and the exchange shaft 61 (the state of Fig. 8(c)). Then, the FPC side arm portion 52 of the new vane type probe 38 is inserted between the slit rod 34 and the exchange shaft 61, and the fitting portion 46 of the vane type probe 38 and the fitting portion 45 of the slit rod 34 are fitted. The fitting is performed to position and temporarily fix the blade type probe 38. Then, the guide rod 35 is inserted through the guide rod hole 53' of each of the vane type probes 38 to support the vane type probes 38 through the support pin holes 54 and the inner cover 62 is removed. 37. Further, the side cover 37 is mounted with the guide rod 35 and the support pin 36, the probe block 20 is assembled to the probe assembly 14, and the probe assembly 14 is attached to the probe base 13. Thus, the fitting portion 45 of the blade-type probe 38 is fitted to the fitting portion 45 of the slit rod 34, and the blade-type probes 38 are positioned and temporarily fixed to the slit rod 34, and the blade-type probe 38 is attached. The side of the FPC side arm portion 52 is supported between the slit rod 34 and the exchange shaft 61. In order to exchange the blade type probe 38, the blade type probes 38 other than the blade type probe 38 to be exchanged are suppressed from being scattered. The exchange of the blade type probe 38 can be performed easily and safely. Further, at the time of the exchange operation, since the inner cover 62 of the mounting block 33 covers the slit rod 34 and the blade type probe 38, it is possible to prevent the object from contacting the slit rod 34 or the blade type probe 38 from being damaged. [Modification] In the above-described embodiment, the fitting portion 45 of the slit rod 34 is formed in a convex shape ί S3 -15 - 1359949 'The fitting portion 46 of the blade type probe 38 is concave, but is embedded in the opposite direction. The joint portion 45 is formed in a concave shape, and the fitting portion 46 may be formed as a ridge. In addition, the fitting portion 45 is provided on the side of the front end side slit rod 34A, and the exchange shaft 61 is provided on the side of the FPC side slit rod 34B. On the contrary, the exchange shaft 61 is provided on the side of the front end side slit rod 34A, on the FPC side. The fitting portion 45 may be provided on the side of the slit rod 34B. In this case, the same actions and effects as described above can be achieved. In the above embodiment, the exchange shaft 61 has a circular rod shape, but may have other shapes such as a square rod shape or a flat rod shape. In this case, the same actions and effects as described above can be achieved. In the foregoing embodiment, although the guide rod 35 and the support pin 36 are provided at the same time, there are cases where the support pin 36 is not provided. The branching pin 36 is provided when there is a need to improve the accuracy. [Brief Description of the Drawings] [Fig. 1] An exploded perspective view of a probe assembly of a probe unit according to an embodiment of the present invention. [Fig. 2] A perspective view of a probe assembly of a conventional inspection apparatus. [Fig. 3] A side cross-sectional view of a probe assembly of a conventional inspection apparatus 第 [Fig. 4] A perspective view of a probe unit of an embodiment of the present invention. Fig. 5 is a side view showing a part of the probe unit of the embodiment of the present invention cut off. [Fig. 6] A side view of the blade type probe of the probe unit of the embodiment of the present invention, ί S3 -16-1359949. Fig. 7 is a perspective view showing the probe block of the probe unit of the embodiment of the present invention from the back side thereof. [Fig. 8] Side view of the exchange operation of the blade type probe of the probe unit of the embodiment of the present invention" [Explanation of main element symbols] 11: probe unit, 12: liquid crystal panel, 13: probe base, 1 4 : Probe assembly, 1 6 : Suspension base, 1 7 : Slide block, 1 8 : Probe holder ' 1 9 : FPC base, 2 0 : Probe block, 2 2 : Screw Hole, 23: Screw, 24: Track, 26: Guide, 27: FPC cable, 28: Spring, 29: Relay base, 33: Block, 34: Slot, 34A: Front side slit , 34B : FPC side slitting rod, 35: guide rod, 36: support pin, 37: side cover, 38: blade type probe, 43: slit, 45: fitting, 46: fitted portion, 50: body plate section, 5 1 : front end side wrist, 52: each FPC side wrist, 53: guide rod hole, 54: support pin hole, 56: contact, 57: contact, 61: exchange shaft, 62: inner cover, 63: guide rod hole, 64: support pin hole, 65: exchange shaft hole. -17-