JP2008026260A - Chip parts jig for four-terminal measurement - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide chip parts jig for four-terminal measurement which reliably can measure bottom electrode type microchip parts by accurizing through four-terminal measurement method, while flexibly responding to even any chip part with differently sized area. <P>SOLUTION: This chip parts jig at least comprises one side terminal block 12 equipped with two contact terminals to separately be in contact with one electrode side in a pair of electrodes provided on bottom side of the chip, another side terminal block 32 equipped with two contact terminals to separately be in contact with another electrode side, and base 52 freely supporting mutual contact/release and positional fixation of these one side terminal block 12 and another side terminal block 32 so as to fit them in plane size of the chip. The above base 52 keeps a thrusting member 69 arranged which allows one electrode to contact with each contact terminal of the one side terminal block 12 and the other electrode with each contact terminal of the other side terminal block 32 to fix the chip. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  In addition to being able to measure the electrical characteristics of a minute chip component having electrodes on the bottom surface by a four-terminal measurement method, the present invention can flexibly accommodate chip components of different sizes while making electrical contact. This is a technique related to a chip component jig for four-terminal measurement that can be fixed in a fixed position.

FIG. 7 is an overall perspective view of the chip component measurement jig disclosed in Patent Document 1 below, and the entire chip component measurement jig 1 includes a chip component to be measured on a horizontal lower surface side. A base 2 composed of a housing or the like to which a stationary base portion 3 formed by exposing the contact terminals 5 and 5 that individually contact a pair of electrodes is fixed, and the contact terminals 5 disposed on the base 2. , 5 and a holding mechanism 6 for fixing the position of the chip component with the stationary base 3 under the state where the electrodes are in contact with each other.
JP 2004-138546 A

  In this case, the stationary base 3 is determined by the relationship between the insulating base body 4 fixedly screwed to the base 2 side and the size of the chip component at the substantially central portion of the base body 4. A concave portion 4a having vertical and horizontal widths, and a pair of conductive contact terminals that are arranged in an approximate position at an appropriate position on the concave portion 4a and are arranged adjacent to each other with their apex portions facing each other. 5 and 5.

  On the other hand, the holding mechanism 6 includes an abutment portion 7 that can be freely fixed in position on the base 1, and a bolt shaft portion 8 that is arranged upright with the male screw side protruding on the abutment portion 7. The bolt shaft portion 8 has its longitudinal direction perpendicular to the bolt shaft portion 8 and is freely inserted with an urging force in the upward direction, and a bolt that can freely push down the lifting arm portion 9 against the urging force. It is formed by a nut portion 8a screwed to the shaft portion 8 and a stopper 9a for stopping the lifting arm portion 9 from rotating.

  For this reason, at the time of measurement, it is possible to place the chip component on the stationary base 3 under a state where the position is fixed by the pressing force of the pressure contact portion suspended from the distal end side of the lifting arm portion 9. Become.

  However, in the case of using the chip component measuring jig 1 shown in FIG. 7, a chip component having electrodes on the lower surface can be measured by the two-terminal measurement method, but the measurement by the four-terminal measurement method with higher measurement accuracy is possible. There was an inconvenience that could not be dealt with.

  Further, in the case of using the chip part measuring jig 1 shown in FIG. 7, it is limited to the same chip part having the same surface size, and cannot be flexibly applied to chip parts having different surface sizes. There was also.

  In view of the above-mentioned problems seen in the conventional example, the present invention can measure the electrical characteristics of a small chip component of the bottom electrode type with a high accuracy by a four-terminal measurement method, and can also vary the size. It is an object of the present invention to provide a chip component jig for four-terminal measurement that can be flexibly adapted even to a chip component to be made.

  The present invention has been made to achieve the above-mentioned object, and each of the electrode parts in a pair of electrodes provided under a positional relationship in which chip parts as measurement target samples face each other on the lower surface side is separately provided. One side terminal block provided with two contact terminals to be contacted, the other side terminal block provided with two contact terminals respectively brought into contact with the other electrode side, and the one side terminal block and the other side And at least a base for freely supporting and fixing the position of the terminal block so as to correspond to the size of the lower surface of the chip component, and the base includes each contact terminal of the one-side terminal block. The most important thing is that one of the electrodes of the chip component is disposed, and the pressing member for placing the chip component is arranged by bringing the other electrode of the chip component into contact with each contact terminal of the other terminal block. Features.

  In this case, at least each contact end portion side of each contact terminal is provided with flexibility to bend when the chip component is pressed through the pressing member, so that the one-side terminal block and the other are provided. It is preferable to arrange each separately on the side terminal block.

  According to the first aspect of the present invention, the one side terminal block provided with two contact terminals and the other side terminal block provided with two contact terminals are mutually connected to correspond to the size of the chip component. Since the contact and separation of the electrode and its position fixing are supported on the base side freely, the accuracy of the four-terminal measurement method is achieved while making the electrical characteristics of the small chip parts of the bottom electrode type well correspond to the size of the chip. Can be measured reliably.

  According to the invention of claim 2, the flexibility of bending downward when the chip component is pressed through the pressing member is imparted to each contact end side of the total of four contact terminals. Therefore, by forcibly positioning all the positions of each contact end on the same plane, a more reliable contact relationship can be ensured and highly accurate four-terminal measurement can be performed.

  FIG. 1 is an overall perspective view showing an example of the present invention with a part of a pressing member omitted, and FIG. 2 is a cross-sectional view taken along line AA in FIG. It is explanatory drawing expanded and shown under a state. FIG. 3 is a perspective view showing the external shape of the one-side terminal block constituting the present invention, and FIG. 4 is a cross-sectional view in the direction of arrows BB in FIG. In addition, the oval-shaped surrounding area | region in FIG. 1 shows the measurement area | region by a 4-terminal measuring method.

  According to these drawings, the whole of the four-terminal measuring chip component jig 11 has a positional relationship in which the chip component 71 as a measurement target sample faces each other as clearly shown in FIG. One side terminal block 12 provided with two contact terminals 20 and 23 to be brought into contact with one electrode 72 side of the pair of electrodes 72 and 73 originally provided, and the other electrode 73 side is brought into contact with each other. The other side terminal block 32 provided with the two contact terminals 40 and 43, and the one side terminal block 12 and the other side terminal block 32 are connected to and separated from each other so as to correspond to the size of the lower surface size of the chip component 71. At least a base 52 that freely supports the fixing of the position is provided. In addition, the code | symbol 19 in a figure shows the lower cover provided with an aluminum plate, for example, when opening the one side terminal block 12 or the base main-body part 13 in the left-right direction etc., preventing that an unintended garbage enters inside. Can be done.

  Among these, the base body 13 having a substantially rectangular parallelepiped shape constituting the one-side terminal base 12 has a substantially L-shaped lower side located on the front end side, as is apparent from FIGS. 3 and 4. A compartment portion 14 is formed in which the front side and the lower bottom side are opened by removing the shape, and the two contact terminals 20 and 23 can be disposed through the compartment portion 14. It has become.

  Further, the two contact terminals 20 and 23 each having a plate shape include upright pieces 20a and 23a each having an open end side as a contact end 21 and 24 to one electrode 72 of the chip component 71, and these upright pieces. The horizontal piece portions 20b and 23b extending in the horizontal direction from the end sides of the portions 20a and 23a and the hanging piece portions 20c and 23c extending from the end sides of the horizontal piece portions 20b and 23b are formed. .

  In this case, the two contact terminals 20 and 23 are arranged such that the horizontal piece portion 20b side of the contact terminal 20 is arranged upward and the horizontal piece portion 23b side of the contact terminal 23 is arranged downward, and the horizontal piece portions 20b and 23b are arranged. The spacer members 26 are interposed and connected together so that the contact end 24 side of the contact terminal 23 is arranged in the front row, and the contact end 21 side of the contact terminal 20 is arranged in the back row. become.

  This will be described in more detail with reference to the illustrated example. For the horizontal pieces 20b and 23b and the spacer material 26 in the contact terminals 20 and 23, the bolt material 29 is inserted into a portion where the two face to face each other at the time of combination. Through holes 22, 25, and 27 are formed.

  In addition, contact terminals 20 and 23 that are integrally combined via a spacer material 26 at a predetermined position on the side of the exposed surface 14 a that serves as the ceiling of the compartment 14 in the base body 13. Is formed with a female screw portion 15 for fixing the position of the screw through the bolt material 29, and the bolt material 29 is screwed to the female screw portion 15 to attach the contact terminals 20, 23 side to the base body portion 13 side. Can be done.

  In this case, a stationary part 16 on which the chip component 71 is placed via the one electrode 72 side is formed in a region located in the central part on the upper corner side of the front end of the base body part 13. 16, the contact end 21 of the contact terminal 20 and the contact end 24 of the contact terminal 23 can be exposed and arranged at the same time with one electrode 72.

  Moreover, the base body 13 has a cutout 17 formed at a corner facing the inner corner that is the boundary between the upright piece 20a and the horizontal piece 20b of the contact terminal 20, and the cutout 17 It is also possible to follow even when the inner corner which is the boundary portion between the upright piece 20a and the horizontal piece 20b is slightly curved. The spacer member 26 is formed so that the gap 28 can be secured by reducing the thickness of the portion facing the upright piece 20a located on the upright piece 20a side of the contact terminal 20. For this reason, the contact terminal 20 can be provided with flexibility for bending when the contact end 21 is pushed in from above by an external force.

  The other upright piece portion 23 a and the horizontal piece portion 23 b of the contact terminal 23 are arranged so as to be freely bent downward via the spacer material 26. In this case, the spacer member 26 has a cut portion 26a formed at a corner portion facing an inner corner portion that is a boundary portion between the upright piece portion 23a and the horizontal piece portion 23b of the contact terminal 23, and the cut portion 26a It is also possible to follow even when the inner corner portion, which is the boundary portion between the upright piece portion 23a and the horizontal piece portion 23b, is slightly curved. Further, since the upright piece portion 23a and the horizontal piece portion 23b of the contact terminal 23 are simply brought into contact with the spacer member 26 in an unfixed state, the contact end 24 of the contact terminal 23 is pushed in from above by an external force. When it is bent, it can be bent downward.

  In addition, the base body 13 has a female screw hole 18 that penetrates in a vertical direction at a portion located in the vicinity of the compartment 14, and a pinching screw 58 is inserted into the female screw hole 18 on the upper surface of the one side support piece 55. And screwed through the long hole 57. At this time, the one-side terminal block 12 is fixed so as to be lifted toward the inner wall surface of the one-side support piece 55. As a result, the entire base body 13 can be fixed to the base 52 via the one-side support piece 55.

  The other-side terminal block 32 is formed to have the same structure as the one-side terminal block 12, and is similar to the one-side terminal block 12 in the arrangement relationship facing the one-side terminal block 12 on the base 52 side. The position is fixed to. In addition, about the structure of the other side terminal block 32, the code | symbol corresponding to the one side terminal block 12 is attached | subjected in the figure, and the detailed description is abbreviate | omitted.

  A total of four bases 52 connected to the contact terminals 20, 23, 40, and 43, respectively, for freely supporting the one-side terminal block 12 and the other-side terminal block 32 to contact and separate each other and to fix their positions. The base body 53 having the connection terminals 54 and the base body 53 are fixed on the base body 53 so that the one-side terminal block 12 and the other-side terminal block 32 are exposed to the stationary portions 16 and 36, respectively. It is configured to include at least one side support piece portion 55 and another side support piece portion 65 that are separately supported so as to be able to come into contact with and separate from each other under the state of being brought into contact with each other.

  In this case, the one-side support piece portion 55 and the other-side support piece portion 65 serve as a base body portion for functioning as a guide member when the one-side terminal block 12 and the other-side terminal block 32 are brought into contact with or separated from each other. The position is fixed on 53.

  This will be described in detail with respect to the positional relationship between the one-side support piece 55 and the one-side terminal block 12. A space portion 56 is formed that can be moved forward and backward (left and right in the illustrated example) while the position is restricted with the stationary portion 16 being exposed. A long hole 57 is formed in which the advancing / retreating direction of the table 12 is the length direction.

  Then, the long hole 57 makes the pinching screw 68 abut on the front end 57a side when the one-side terminal block 12 is in the positional relationship shown in FIG. The screw 68 is formed to have a length that abuts the rear end 57b.

  The other side support piece portion 65 is formed to have the same structure as the one side support piece portion 55, and is arranged on the base 52 with the one side support piece portion 55 facing the one side support piece portion 55. The position is fixed similarly to the portion 55. In addition, about the structure of the other side support piece part 65, the code | symbol corresponding to the one side support piece part 55 is attached | subjected in a figure, and the detailed description is abbreviate | omitted.

  In addition, in the base body 53 constituting the base 52, one electrode 72 of the chip component 71 is connected to each contact terminal 20, 23 of the one-side terminal block 12, and each contact terminal of the other-side terminal block 32. A pressing member 69 for placing the chip part 71 on the placement parts 16 and 36 by placing the other electrode 73 of the chip part 71 in contact with the parts 40 and 43 is provided.

  The pressing member 69 only needs to have a structure capable of fixing the position of the chip component 71 having a different size on the stationary portions 16 and 36. For example, as shown in FIG. An appropriate structure such as a screw member 69a screwed up and down on the base body 53 and a pressing plate 69b attached to the screw member 69a and abutting on the chip component 71 side is used. Things can be adopted.

  Next, the operation and effect of the present invention having the above-described configuration will be described. First, the chip component 71 serving as the measurement target sample for this time is selected. The chip component 71 includes a pair of electrodes 72 and 73 disposed in a positional relationship facing each other on the horizontal lower surface side, as is apparent from FIG. 6, for example.

  When the selected chip component 71 has the smallest surface size, the screw screw 58 that fixes the position of the one-side terminal block 12 to the base 52 side, and the other-side terminal block 32. The one side terminal block 12 is advanced into the space 56 of the one side support piece 55, and the other side terminal block 32 is the other side support piece. The inside of the space part 66 of the part 65 is advanced. As a result, the scissors screw 58 contacts the front end 57a of the long hole 57, and the scissors screw 68 contacts the front end 67a of the long hole 67. As a result, the movement of the one side terminal block 12 and the other side terminal block 32 also stops. At this stop position, the pinching screw 58 and the pinching screw 68 are tightened to fix the position, and can be brought close to each other as shown in FIG.

  Under the state of FIG. 1, by bringing the one-side terminal block 12 and the other-side terminal block 32 close to each other, a measurement unit shown as an elliptical enclosed region in the drawing is secured, as shown in FIG. The selected chip component 71 is placed.

  In this case, the chip component 71 includes the two contact terminals 20 and 23 included in the one-side terminal block 12 on one electrode 72 and the two contact terminals 40 and 43 included in the other-side terminal block 32 on the other electrode 73. Can be placed under the positional relationship of contacting each other.

  Further, a pressing member 69 is disposed on the base 52, and the pressing contact plate 69 b constituting the pressing member 69 is pressed against the upper surface of the chip component 71, thereby ensuring an electrical contact relationship. Can be.

  Moreover, if the positions of the contact ends 21, 24, 41, 44 of the contact terminals 20, 23, 40, 43 are not on the same plane, the upper surface of the chip component 71 is pushed down more strongly by the pressing plate 69b. All the positions of the contact ends 21, 24, 41, 44 are located on the same plane by deflecting only one of the upright pieces 20 a, 23 a, 40 a, 43 a already in contact. Therefore, a more reliable four-terminal measurement can be performed while ensuring a more reliable contact relationship.

  Thus, after completing the four-terminal measurement for the chip component 71 that is the sample to be measured this time, the chip component 71 can be recovered by following the reverse procedure.

  On the other hand, when the selected chip component 71 has the largest surface size, the screw screw 58 that fixes the position of the one-side terminal block 12 to the base 52 side, and the other-side terminal block Loosen the pinching screw 68 that fixes the position 32 to the base 52 side, the one-side terminal block 12 retreats in the space 56 of the one-side support piece 55, and the other-side terminal block 32 supports the other side. The space 66 of the piece 65 is retreated.

  As a result, the scissors screw 58 abuts on the rear end 57b of the long hole 57 and the scissors screw 68 abuts on the rear end 67b of the long hole 67. As a result, the one side terminal block 12 and the other side terminal block 32 move. In this stop position, the pinching screw 58 and the pinching screw 68 are tightened to fix the position, and can be separated from each other as shown in FIG.

  Under the state of FIG. 6, by separating the one-side terminal block 12 and the other-side terminal block 32, it is possible to place the chip component 71 on the measurement unit secured as a large surface area.

  In this case, as in the case of FIG. 2, the chip component 71 includes the two contact terminals 20 and 23 included in the one-side terminal block 12 on one electrode 72 and the other terminal block 32 included in the other electrode 73 2. The contact terminals 40 and 43 of the book can be placed under the positional relationship of contacting each other.

  Also in this case, since the electrical contact relationship can be ensured by pressing the pressing plate 69b against the upper surface of the chip component 71, any of the upright pieces 20a, By bending only 23a, 40a, and 43a downward, all positions of the contact ends 21, 24, 41, and 44 are located on the same plane, ensuring a reliable contact relationship, and highly accurate four-terminal measurement. Will be able to do.

  Thus, after finishing the four-terminal measurement for the chip component 71 having the largest size, which is the sample to be measured this time, the chip component 71 can be recovered by following the reverse procedure.

  Note that the above has described the operation and effect of the chip component 71 having the minimum size shown in FIG. 2 and the chip component 71 having the maximum size shown in FIG. 6 as an example. Can be applied as a four-terminal measuring chip component jig 11 for chip components having different sizes.

The whole perspective view which abbreviate | omits a part of pressing member and shows an example of this invention. FIG. 2 is a partially omitted illustration showing an enlarged cross-sectional structure in the direction of arrows AA in FIG. The perspective view which shows the external appearance shape of the one side terminal block which comprises this invention. Sectional drawing in the BB arrow direction in FIG. The whole perspective view which shows the state at the time of applying this invention to the chip component with a large surface size. FIG. 5 is a partially omitted illustration showing an enlarged cross-sectional structure in the direction of arrows CC in FIG. 5. Whole perspective view of chip component measuring jig shown in Patent Document 1

Explanation of symbols

11 Four-terminal measurement chip component jig 12 One-side terminal block 32 Other-side terminal block 13, 33 Base body section 14, 34 Compartment section 15, 35 Female thread section 16, 36 Fixed section 17, 37 Cut section 18, 38 Female thread Hole 20, 23, 40, 43 Contact terminal 20a, 23a, 40a, 43a Standing piece 20b, 23b, 40b, 43b Horizontal piece 20c, 23c, 40c, 43c Hanging piece 21, 24, 41, 44 Contact end 22 , 25, 42, 45 Through hole 26, 46 Spacer 26a, 46a Cutout part 27, 47 Through hole 28, 48 Air gap 29, 49 Bolt material 52 Base 53 Base body part 54 Connection terminal 55 One side support piece part 65 Others Side support piece portion 56, 66 Space portion 57, 67 Long hole 57a, 67a Front end 57b, 67b Front end 58, 68 Tightening screw 69 Pressing member 69a Screw member 69 b Holding plate 71 Chip parts 72, 73 Electrode

Claims (2)

A one-side terminal block provided with two contact terminals that are individually brought into contact with one of the electrode sides of a pair of electrodes provided under a positional relationship in which a chip component as a measurement target sample faces the lower surface side; The other side terminal block provided with two contact terminals to be brought into contact with the other electrode side separately, and the one side terminal block and the other side terminal block are adapted to correspond to the lower surface size of the chip component. At least a base that freely supports contact and separation and its position fixing,
In the base, one of the electrodes of the chip component is brought into contact with each contact terminal of the one-side terminal block, and the other electrode of the chip component is brought into contact with each contact terminal of the other-side terminal block. A four-terminal measuring chip component jig, characterized in that a pressing member is provided for fixing the terminal. At least each contact end side of each contact terminal is provided with flexibility to bend when the chip component is pressed through the pressing member, and the one-side terminal block and the other-side terminal block. The four-terminal measuring chip component jig according to claim 1, which is separately provided.

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