TWI303716B - - Google Patents

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Publication number
TWI303716B
TWI303716B TW091105005A TW91105005A TWI303716B TW I303716 B TWI303716 B TW I303716B TW 091105005 A TW091105005 A TW 091105005A TW 91105005 A TW91105005 A TW 91105005A TW I303716 B TWI303716 B TW I303716B
Authority
TW
Taiwan
Prior art keywords
probe
needle
holder
hole
cover
Prior art date
Application number
TW091105005A
Other languages
Chinese (zh)
Inventor
Yamamoto Hiroshi
Original Assignee
Tokyo Weld Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Weld Co Ltd filed Critical Tokyo Weld Co Ltd
Application granted granted Critical
Publication of TWI303716B publication Critical patent/TWI303716B/zh

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Forklifts And Lifting Vehicles (AREA)

Description

五、發明說明(1) 【發明之詳細.說明】 【發明所屬技術領域】 探針之探針裝公:里複數個連結元件日寺’能有效率地固定 【以往之技術】 探針以㈡::=電子元件之特性的裝置,其係將 示之剖面圖,即為接觸,以進行測量。第4圖所 安裝於傳送帶Η之外覃針裝置的一例。探針裝置10包含 象〜電子元件。才冰罢,而傳迗帶11是用來搬運檢查之對 定之針座12、絕缘 ^之中配置有下述用來將探針20固 外罩之轴心方向針座12朝箭頭Ζ之方向(即 罝15、露出於傳送帶Η上/甘/14七探針止旋導引裝 (未圖示)底面之探斜士κ 乂/、表面來支撐電子元件 針座之外圍播入 ^此外’第4圖中的Π表示從 在第4圖中,2〇 疋探針20的螺絲組。 探針管22、以^^^ 針。探針20包含探針軸承21、 成,透過形成G=23;•探針23之尖端有針尖…形 住返自如地與電:之探針孔16a,可以導引針尖23a 以此报兀件之終端接觸。 上下移動十裝置1〇之中’透過針座们4使針座12 端接觸。二與電子元件之終 下移動幅度十e内部的彈簧而吸收針座12上 又,、探針針體23所能上下移動之幅度的差距。 1303716 五、發明說明(2) 旋導裝置10的組裝方法。將針座12與探針止 ί 板13 一起扭緊固定於針座臂“上, 探十- 側開始,將探針2 0插入配置於針座1 2之 i:=L:72v並使探針軸承21與絕緣面板13相接接 2累4,、且17與針座12緊密扭緊嵌合,藉以使探針軸承η 疋於針座12。然後轉動探針㈣加以 ^ ^ ^ T ^ , # ^ 休針卡1 6,當針座臂1 4私古Ri 23a會接觸。 “時’電子兀件的終端與針尖 榦、隹t上^述’由於是從針座1 2的外圍壁面將螺絲組1 7扭 探針20,所以在探針20與針座12的外 =面之間’無法再配置其他的探針20。因此,探針2〇合 =!列乃至於2列、或者是]字形乃至於口字形的配曰 【發明所欲解決之課題】 1 若是包含上述現有針座之探針裝置的話,會出現以下 =題。也就是說隨著近年來電子元件的複數連 置時所需之探針20的數量也隨之增加。因此,若企圖以上 述方法來配置探針20的話,就必須將針座12加λ。此外, 若針座12變大的話,探針卡16相對於探針23的傾斜角度合 變大,因而出現探針20動作不佳、探針針體23損壞曰 量。 7 因此,本發明的目的為’在不使針座大型化的狀況 下’提供能有效固定多數探針的探針裝置。 【解決課題之方法】 tV. DESCRIPTION OF THE INVENTION (1) [Details of the Invention] [Technical Field] The probe is mounted on the probe: a plurality of connecting elements in the day can be efficiently fixed. [Prior Art] Probes (2) ::= The device of the characteristics of the electronic component, which is a cross-sectional view, that is, contact, for measurement. Fig. 4 shows an example of a needle device attached to the belt Η. The probe device 10 includes an image-to-electronic component. It is only iced, and the transfer belt 11 is a pair of needle holders 12 for carrying the inspection. The insulation is provided with the following axial direction of the probe 12 for the outer cover of the probe 20 in the direction of the arrow ( ( That is, 罝15, exposed on the conveyor belt / / Gan / 14 seven probe rotation guide (not shown) on the bottom of the probe κ 乂 /, the surface to support the periphery of the electronic component hub broadcast ^ In addition 4 in the figure shows the screw set from the probe 2 of Fig. 4. The probe tube 22 is a needle, and the probe 20 includes a probe bearing 21, which is formed to form a G=23. • The tip of the probe 23 has a needle tip... shaped to return to the ground and the power: the probe hole 16a, which can guide the tip 23a to contact the terminal of the device. Move up and down the ten device 1〇 through the needle holder The 4 contacts the end of the needle holder 12. The difference between the amplitude of the probe needle body 23 and the spring of the needle holder 12 is increased by the spring inside the electronic component. (2) The method of assembling the rotary guide 10. The needle holder 12 is fastened together with the probe stopper 13 to the needle arm, and the probe 10 is opened sideways. Initially, the probe 20 is inserted into the needle holder 1 2 i:=L: 72v and the probe bearing 21 is connected to the insulating panel 13 2, and the 17 is tightly tightly fitted with the hub 12 Therefore, the probe bearing η is placed on the needle holder 12. Then the probe (4) is rotated to ^ ^ ^ T ^ , # ^ the needle card 1 6, when the needle holder arm 14 is in contact with the Ri 23a. The terminal of the device and the tip of the tip are squeezed, because the probe 20 is twisted from the peripheral wall of the hub 12, so that between the probe 20 and the outer face of the hub 12' It is no longer possible to configure the other probes 20. Therefore, the probes 2 are combined with the !! column, or even the 2 columns, or the zigzag or the sigma-shaped configuration. [Problems to be solved by the invention] 1 If the above-mentioned existing hub is included In the case of the probe device, the following problem occurs. That is to say, the number of probes 20 required for the multiple connection of electronic components has increased in recent years. Therefore, if the probe is attempted to be configured as described above, In the case of 20, it is necessary to add λ to the needle holder 12. Further, if the needle holder 12 becomes larger, the inclination angle of the probe card 16 with respect to the probe 23 becomes larger, and thus the probe 2 appears. The operation of the probe needle body 23 is not good, and the probe needle body 23 is damaged. 7 Therefore, the object of the present invention is to provide a probe device capable of effectively fixing a plurality of probes without increasing the size of the needle holder. Method] t

1303716 五、發明說明⑷ k針裝置3〇包含安裝於傳送帶Η上 :Η:用來搬運檢查對象—電子元件 卜广31 ’而傳送 、(=罩::面板33、使針座4〇朝第i圖中箭圖下 弓丨f署3 方向)上下移動之針座臂34、探ίΤ 羞置35、露出於傳送帶Η上仏針止旋導 件(夫同-、 > 并表面來支撐雷工- 螺絲i :彳二卡36,,第1圖的Κι 探針2〇。係…⑽之外圍插入下述螺絲孔45,用以表固不定 端部=、圖探中針二代表探針。探針20包含探針軸承(基 端有針尖23a开/成携、、/Λ探針針體23。探針針體23之尖 Τ大形成,透過形成於探針卡36之描# ^ π 心太 圖,往返自如地與電子二 各8個外側,針ί4°包含:呈板狀之本體部分41 ; ^们外側探針插入孔及内侧探針插入孔,盆 體部分〇,而且稍微朝探針卡36之 ·本 斜。本體部分4!具有側壁41a_41d,圓十錐】6:=傾 槽)形成於從侧壁41c到側壁41a的部分。/ θ (凹 溝槽44與内側探針插人孔43僅# ^㈣μ 壁=、41d到外側探針插入孔42的部分,有螺絲 錐狀溝槽相嵌>:Π4斷4ΚίΓί:Γ ’其係與圓 座臂34、絕緣面板3而3且結=螺_與針 ,”其次”探針裝置30之組裝方法。將針座40、絕緣面 板33、以及探針止旋導引裝置35與針座臂34扭轉連接成一1303716 V. INSTRUCTIONS (4) The k-needle device 3〇 is mounted on the conveyor belt Η: Η: used to carry the inspection object—the electronic component Bu Guang 31' and transmits, (= hood:: panel 33, the needle holder 4 〇 In the figure, the arrow is in the direction of the arrow. The direction of the needle is 34. The needle arm 34 is moved up and down, and the needle is placed on the conveyor belt. The needle is stopped on the belt. (French-, > and the surface supports the mine. Work - Screw i: 彳二卡36, Κι probe 2〇 of Fig. 1. Insert the following screw holes 45 on the periphery of the system (10) to form the indefinite end =, in the probe, the needle 2 represents the probe The probe 20 includes a probe bearing (the base end has a needle tip 23a open/carry, and/or a probe needle body 23. The tip of the probe needle body 23 is formed to be transmitted through the probe card 36. π 心太图, round-trip freely with 8 outer sides of the electronic two, the needle ί4° includes: a plate-shaped body portion 41; ^ the outer probe insertion hole and the inner probe insertion hole, the basin portion is 〇, and slightly The probe card 36 is slanted. The body portion 4! has a side wall 41a_41d, and a round cone 6:= tilting groove is formed in a portion from the side wall 41c to the side wall 41a. / θ ( The concave groove 44 and the inner probe insertion hole 43 are only #^(tetra)μ wall=, 41d to the outer probe insertion hole 42 portion, and the screw-conical groove is embedded with the following: Π4断4ΚίΓί:Γ The method of assembling the round arm 34, the insulating panel 3 and the 3, the junction = screw and the needle, and the "second" probe device 30. The needle holder 40, the insulating panel 33, and the probe rotation guide 35 and the hub The arm 34 is twisted and connected into one

13037161303716

體。將探針2 0從探針針體 孔42及内側探針插入孔4 3 相接。接著將螺絲組50插 插入孔42内的探針2〇。最 插入構槽44之中,並透過 43内之探針20。 23側插入針座40之外側探針插入 ,並使絕緣面板3 3與探針軸承2 j 入螺絲孔45,用以固定外側探針 後,將斷面呈梯形之固定元件46 螺絲釘4 7來固定内侧探針插入孔 然後利用圖中未標示之傳動能源 i圖所示箭頭Z之方向上下移動,藉以 十座:以第 得當針尖23a下降而較探針卡36之表面-稍23二 子兀件旎沒有障礙地通過探針卡36之上方,者 昇時:電子元件之終端能與針尖23a相接觸。田針-23&上 以此方法形成的探針裝置30中,當 4:時’除了從外圍扭轉固定之外,還;座 件46來固定探針2。。所以針 =内4以固疋疋 列,合計丘丨夕俨#9n : 固疋外侧2列及内侧2 化,即可固定多數的探針20。因不:將針座大型 針體23的傾拉&痒辦, 仅針卡36相對於探針 t體U的傾斜角度變小,可以防止探針2〇 針針體23的損壞等問題。 的動作不良及探 再者’本發明不限定於以上實 明的範圍内,t然可能有各種變化:=例在不脫離本發 【發明之效果】 如果利用本發明,可能做到無需將針 有效率地固定多數之探針。 1化’ P可 1303716 圖式簡單說明 【構造圖之簡單說明】 【第1圖】 有關本發明一實施例之探針裝置的剖面圖。 【第2圖】 該探針裝置之側面圖。 【第3圖】 安裝於該探針裝置内之針座的底面圖。 【第4圖】 以往之探針裝置的剖面圖。 【符號說明】 2 0探針 3 0探針裝置 31 外罩 3 6探針卡 4 0 針座 4 2 外側探針插入孔 43内側探針插入孔 44 溝槽 4 5 螺絲孔 4 6固定元件body. The probe 20 is brought into contact from the probe needle hole 42 and the inner probe insertion hole 43. The set of screws 50 is then inserted into the probe 2'' into the hole 42. It is most inserted into the groove 44 and passes through the probe 20 in the 43. The 23 side insertion needle 40 is inserted into the outer side of the probe, and the insulating panel 3 3 and the probe bearing 2 j are inserted into the screw hole 45 for fixing the outer probe, and the cross section is a trapezoidal fixing member 46 screw 47 Fix the inner probe insertion hole and then move up and down in the direction of the arrow Z shown by the unillustrated transmission energy i in the figure, by ten seats: lowering the first tip 23a than the surface of the probe card 36 - slightly 23 two pieces The 旎 passes over the probe card 36 without any obstacles, and the terminal of the electronic component can come into contact with the tip 23a. In the probe device 30 formed by this method, in the probe device 30 formed by this method, in addition to the torsion fixation from the periphery, the holder 46 fixes the probe 2. . Therefore, the needle = the inner 4 is a solid 疋疋 column, and the total number of the probes 20 can be fixed by a total of 2 rows and the inner side of the solid sputum. Since the tilting of the large needle body 23 of the needle holder is performed, only the inclination angle of the needle card 36 with respect to the probe body U becomes small, and the problem of damage of the probe 2 needle needle body 23 can be prevented. The malfunction and the inventor's invention are not limited to the above-described scope, and there may be various changes: = the example does not deviate from the present invention. [The effect of the invention] If the present invention is utilized, it is possible to eliminate the need for the needle Most of the probes are fixed efficiently. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view of a probe device according to an embodiment of the present invention. [Fig. 2] A side view of the probe device. [Fig. 3] A bottom view of a hub mounted in the probe device. [Fig. 4] A cross-sectional view of a conventional probe device. [Description of symbols] 2 0 probe 3 0 probe device 31 Cover 3 6 probe card 4 0 needle holder 4 2 outer probe insertion hole 43 inner probe insertion hole 44 groove 4 5 screw hole 4 6 fixing element

第10頁 17/Page 10 17/

Claims (1)

丨麵補 年月曰 修正 六、申請專利範圍 1. 一種探針裝 待測物特性, 外罩; 待測物支撐 支樓該待測物 針座,其係 針之基端部固 針座臂,其 與該針座之間 該針座’其 固定器主 外侧探針 側,並使該固 即插入該外側 螺絲組, 插入孔的探針 内侧探針 側,並使該固 即插入該内側 凹槽,其 成,以及 固定元件, 用以將插入該 體0 置,其係使探針的針尖接觸待測物以測量該 其中包含: 部,其 ’並導 形成於該外罩另一方之開口側,用以將該探 定; 係固定於該外罩,而配置於該待測物支撐部 係包含 體; 插入孔 定器主 探針插 其旋入 固定於 插入孔 定器主 探針插 係從該 其係安 内側探 係形成於該外罩一方之開口側,用以 引該針尖; ,其係配置於該固定器主體 體穿過該外罩之軸心方向, 入孔; 螺絲孔中,用以將插入於該外側探針 該固定器本體; ,其係配置於該固定器主體 體穿過該外罩之軸心方向, 入孔; 固定器主體之該另一方之開口側形 裝於該凹槽中,並且能裝卸 針插入孔的該探針固定於該 的外圍 而該探針 的中心 而該探針 自如,係 固定器主丨面补年月曰曰6, the scope of application for patents 1. A probe for the characteristics of the object to be tested, the outer cover; The needle holder 'between the needle holder' has its main outer side probe side, and the solid is inserted into the outer screw set, and the inner side probe side of the probe is inserted into the hole, and the solid is inserted into the inner concave side. a slot, a forming member, and a fixing member for inserting the body, wherein the tip of the probe contacts the object to be tested to measure the portion thereof: the portion is formed on the open side of the other side of the cover The probe is fixed to the cover, and is disposed on the support portion of the test object; the insertion probe is inserted into the main probe and is screwed into the main probe of the insertion hole. The inner side of the inner cover is formed on the opening side of the outer cover for guiding the needle tip; and the inner body of the fixed body is disposed in the axial direction of the outer cover, and is inserted into the hole; Will be inserted into the outer probe of the holder , the system is disposed in the axial direction of the holder body and enters the hole; the open side of the other side of the holder body is shaped in the groove, and the probe can be inserted into the needle insertion hole The needle is fixed to the periphery of the probe and the probe is free, and the probe is free 第11頁 2007.10.02.012Page 11 2007.10.02.012 第12頁 2007.10.02.013Page 12 2007.10.02.013
TW091105005A 2001-03-26 2002-03-15 TWI303716B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001087066A JP3862963B2 (en) 2001-03-26 2001-03-26 Probe device

Publications (1)

Publication Number Publication Date
TWI303716B true TWI303716B (en) 2008-12-01

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Application Number Title Priority Date Filing Date
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JP (1) JP3862963B2 (en)
KR (1) KR100452144B1 (en)
CN (1) CN1173185C (en)
TW (1) TWI303716B (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4335350A (en) * 1980-05-23 1982-06-15 Chen James T C Apparatus for probing semiconductor wafers
JP2000266779A (en) * 1999-03-18 2000-09-29 Toshiba Corp Multiprobe unit
TW533309B (en) * 1999-06-22 2003-05-21 Nihon Micronics Kk Probe device

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JP3862963B2 (en) 2006-12-27
CN1376926A (en) 2002-10-30
KR100452144B1 (en) 2004-10-08
CN1173185C (en) 2004-10-27
JP2002286748A (en) 2002-10-03
KR20020076123A (en) 2002-10-09

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