201031927 六、發明說明： 【發明所屬之技術領域】 路等電2係關於—種在進行液晶面板或半導體積體電 手容♦件之導通㈣檢查杨作特缝查時，與該電 針單元。電極或端子朗且騎1:4信號讀送接收的探 【先前技術】201031927 VI. Description of the Invention: [Technical Fields of the Invention] The road isoelectric 2 system is related to the conduction of a liquid crystal panel or a semiconductor integrated circuit handpiece (4) when checking Yang Zuo special seam inspection, and the electroacupuncture unit . Probe of electrode or terminal and riding 1:4 signal read and receive [Prior Art]
之雷性^ 卩半導體積體電路歧晶面板#檢查對〗 查或動作特性檢查時，為了謀求檢则 Γ"叙信號處理裝置之間的電性連接，係採戶 二伴隨近=電性ί觸探針之探針單元。在探針單， 化、細微:的進二導由體將積接體電路或液晶面板之高積1 ㈣、商田W 接觸探針間之間距窄小化，e ，、 ㈣體化、細微化之檢查對㈣技術進步。Thunderness ^ 卩 semiconductor integrated circuit disparity panel #检对〗 When checking or checking the operation characteristics, in order to seek inspection, the electrical connection between the signal processing devices is accompanied by the nearest two = electrical ί Touch the probe unit of the probe. In the probe, the singularity and the fineness of the second conductor are narrowed by the height between the product 1 or the liquid crystal panel (4) and the contact between the contact probes of the commerce field, e, (4), and subtle The inspection of the (4) technological progress.
備板狀實現排列間隔之窄小化’揭示有一種與J ❹ 的探針單元相關之技術(參照例如料 數個接觸探^*卩170係具有：保持具’形成有用以收容福 且承受=:::重及彈簧機構’設置在保持具之上方 就實現排列間隔之窄 一種在具有絕緣性之薄片 端設置接觸子之探針薄片 2)。 小化的另一技術而言，亦揭示有 堍置複數個配線且在該配線之前 之相關技術（參照例如專利文獻 (專利文獻1)日本特許第375〇831號公報 321689 4 201031927 (專利文獻2)曰本特開第2003-98189號公報 ' 【發明内容】 (發明所欲解決之課題） 然而，在上述專利文獻1記載之技術中，由於必須將 接觸探針插入開縫，因此在設定間距時必須確保開缝寬产 之最低限度’而成為使間距窄小化時之妨礙。此外，在前 述專利文獻2記載之技術中’雖有助於檢查對象之排列間 ©隔之窄小化’但因在薄片中接觸子之單獨的行程小而無法 追隨檢查對象之變形或翹曲，因此有難以實現確實之接觸 的問題。 本發明係鑑於上述問題而研創者，其目的在於提供— 種可確實地對應檢查對象之電極或端子之排列間隔的窄小 化且可實現與電極或端子之確實接觸的探針單元。 (解決課題之手段） ^ 為了要解決上述課題’並達成上述目的，本發明之探 針單元係將2個不同電路構造予以電性連接者，該探針卵 元之特徵為具備：導電性之接觸探針，具有與前述2個 路構造之一方接觸之第1接觸部、與前述2個電路構造之 另一方接觸之第2接觸部、介置在前述第丨接觸部與前迷 第2接觸部之間且可在長度方向上伸縮自如之彈性部、連 接前述彈性部及前述第1接觸部之第1連接部、及迷接t 述彈性部及前述第2接觸部且形成有貫通於厚度方向的門 D部之第2連接部，前述第2接觸部係形成為沿著前迷^ 2連接部的寬度方向且比前述第2連接部之該寬度方^之 321689 5 201031927 端緣部更突出的板狀；絕緣性之探# ^ · 卞保持具’具右·、丄 條第1導引槽’分別以滑動自如之太斗 、/、有.钹數 之寬度方向之-方端緣部，且形成彼=持=接觸探針 伸；複數條第2導引槽，分別位於 :^線狀而延 槽之任一條相對向之處，以滑動自如“、條第1導弓丨 探針之寬度方向之另—方端緣部 ^式轉前述接觸 ;而延伸，·及複數條收容槽，分別對應)於^==線 導引槽之任一條而設置，且收容 條第2 ❹ 分；以及絕緣性之棒狀構件，形成朝板2 ^部^一部 觸探針之一部分的棒狀，且Α 貝通前述接 具。 〃兩、。Ρ固定在前述探針保持 再者，本發明之探針單开 ❹ 保持具係具有：平板狀之第發明中，前述探針 條第1導引槽；平板狀之第構件，形成有前述複數 條第2導引槽及前''持構件，形成有前述複數 持構件，分別連以及2個平板狀之支 部，前述棒狀構件之兩第1及第2保持構件之兩端 板狀之支持構件。 糸S別插入並固定於該2個平 再者，本發明之探斜 保持構件之前述第2 早凡係在前述發明中，前述第2 對之表面，前述接觸探^及前述收容槽係設置在彼此背 第2連接部與前述第 糸具有沿著長度方向設置在前述 保持構件之—端部的缺接觸。卩之間，且用以收容前述第2 再者，本發明之探L _ 單元係在前述發明中，前述收容 321689 6 201031927 槽係從前述第2保持構端 延伸之方向貫穿地設置二述第2導引槽所 再者，士& 且連通於刖述第2導引槽。 述收容槽之部分單元係在前述發明中’形成有前 的板厚為太。厚係比形成有前述第2導引槽之部分 (發明之效果） 〇 距m 引槽’因此為了使鄰接之接觸探針之間 乍小’只要減小導引槽之間隔即可。因此，可確 對應檢查對象之電極或端子之排列間隔的窄小化。 此外，根據本發明，由於在探針保持具設置用以收容 與檢查對象接觸之接觸探針的第2接觸部之一部分的收容 槽’因此能以高精確度進行與檢查對象之對位。因此，可 貫現與檢查對象之電極或端子之確實接觸。 【實施方式】 以下’參照附圖說明用以實施本發明之最佳形態（以 下稱為「實施形態」）。此外，圖式係示意性者，應注意各 部分厚度和寬度的關係、各部分厚度比率等亦有與實際者 不同的情形’圖式彼此間當然亦包含彼此的尺寸關係或比 率不同的部分之情形。 (實施形態1) 第1圖係顯示本發明之實施形態1之探針單元之構成 的斜視圖。第2圖係顯示本實施形態1之探針單元之内部 構成的圖，且為具有與第1圖之XZ平面平行之切斷面的局 321689 7 201031927 部剖面圖。該等圖所示之探 積體電路或液晶面板等檢查=70 1係在進打檢查半導體 之有無的導通檢查、及將;^象之配線圖案之短路或斷線 性檢杳時趾斑 、。唬輪出至檢查對象時之動作特 出檢:用；^屬於2個不同電路構造之檢查對象與產生輸 =:口之⑽理裝置予以電性連接的裝置。具體 铲處理雷敗Γ701知具備·在兩端部分別與檢查對象及信 ^個接觸探斜觸之複數個接觸探針2;用以收容並保持複 日Μ $ + 2之探針保持具3;及固定在探針保持具3 支持複數個接觸探針2之棒狀構件4。 首先’參照第2圖說明接觸探針2之構成。以下，在 =所:之接觸探針2中，將X軸方向之長度設定為寬 二Α古^方向之長度設定為厚度，將2軸方向之長度設 疋两间度。 接觸k針2係具有與連接在信號處理電 100之電極1〇1桩餓—姑 此綠暴板 對象2H 第1接觸部21 ;與液晶面板等檢查 電極201接觸之第2接觸部22 ;介 觸部21與第2妓组& 丨亙在弟1接 之盘ζ轴平 部22之間’且可在長度方向（第2圖 部Μ相间^方向）伸縮自如之彈性部23 ;具有與彈性 5之寬度及厚度，且連接第〗接觸部2ι 23之第1連接部24;及具有與彈性部23相 = 度，連接第2接觸部22及彈性部23，且形成有 厚方向的開口部25之第2連接部26。接觸探斜 金屬等導電性材料而呈板狀地形成。接觸 '、1用 佳為15至20//ηι左右。 卞2之板厚較 321689 8 201031927 第2接觸部22係沿著第2連接部26〜 2圖之與Χ轴平行之方向）且比第2連^的寬度方向（第 向之端緣部更突出。第2接觸部22係沿」^ 26之該寬度方 带狀’且在長度方向之端部中之位於離广長度方向延伸成 之處的端部（以下稱為前端部）係形成1接觸部21更遠 查時與檢查對象200之電極接觸。在形狀，且在檢 連接部26之間設置有從高度方向之 觸部22與第2 Φ ❾ 缺口部27。該缺口部W係在收容探、部朝端部凹陷之 的狀態下組裝在探針保持具3。第 二持具3之一部分 定在可從探針單元1之上方視認出前端:22之寬度係彀 從探針保持具3之表面朝χ軸正方向t的範圍，且至少 此外，為了謀求鄰接之2個出。 之絕緣’亦可在接觸探針2之表面的：：2之彼此接觸時 :著’說明探針保持具3。：:形成絕緣層。 長方體之外觀形狀，且具有：平㈣具3係形成大致 =保持接觸探針2之寬度方向:!保持構件31， 第2保持構件32 ’與第！ 端緣部·，平板狀之 以保持接觸探針 ，、、牛31平行地配置， 支持構件，分別連方向之另-方端緣部忒及^ 保持構件32之兩端， 保持構件31及&。 並予以固供插通棒狀構件4之 1導具有複數條第W 一: 方向―之未寬: 接觸部22之側的端緣邹。 201031927 第3圖係探針保持具3之上表面之放大局部剖面圖。如第 3圖所示，複數條第1導引槽311係形成彼此平行之直線 ： 狀而延伸。此外，鄰接之任意的2條第1導引槽311之間 隔全部相同。 第2保持構件32係具備：複數條第2導引槽321，分 別位於與複數條第1導引槽311之任一條相對向之處，並 保持接觸探針2之寬度方向之端緣部中之突出有第2接觸 部22之侧的彈性部23、第1連接部24及第2連接部26 ^ 之端緣部，且延伸成直線狀；及複數條收容槽322，設置 在與設有複數條第2導引槽321之表面相背對的表面，分 別對應於複數條第2導引槽321之任一條，且收容第2接 觸部22之一部分。彼此對應之第2導引槽312及收容槽 322係與位在該第2導引槽321之相對面的第1導引槽311 成為一組，而具有導引接觸探針2之伸縮動作的功能。 第4圖係顯示收容槽322之構成的局部放大斜視圖。 如第4圖所示，複數條收容槽322係形成彼此平行之直線 ❹ 狀而延伸。此外，鄰接之任意的2條收容槽322之間隔全 部相同，且與鄰接之2個第2導引槽321之間隔相等。收 容槽322之槽長度a係必須至少比接觸探針2之缺口部27 的深度b還長。在此，缺口部27之深度b係設定為：即使 第2接觸部22依從外部施加之預定荷重而在長度方向上收 縮，缺口部27之底部亦不會抵接於第2保持構件32之端 部的深度。此外，亦可遍及第2圖之z軸方向的全長形成 收容槽322。 10 321689 201031927 第1導引槽m及第2導5丨 接觸探針2之板厚大。此外，第 之槽寬度c係略比 槽321之槽深度d係具有在接觸導弓丨槽311及第2導引 可確實地保持之程度的值。再^針2不會脫落之情況下 311之底部與第2導引槽_321破此對向之第1導引槽 觸探針2之寬度略大的值。麵的距離6係、具有比接 支持構件33係具有插诵爐 Ο 定之固定用孔部331。支持構件^件4之端部並予以固 別螺固於第i保持構件3 i及第2 ^利用複數個螺絲S分 及第2保持構件32之端部。 探針保持具3係利用氧化链 ） 二氣切（Si02)等_、⑪ 碳酸酯等工程塑膠等絕緣材料而3等:硬化性樹脂'聚 第2導引槽321係在以光微^ 1導引槽311及 學_而^、fru 成圖案後，可藉由化 H r由利用切割機或端銑刀（__) 緣被膜塗布二屬等作為母材，以絕 材之表面，猎此實現探針保持具3。 棒狀構件4係藉由一供砧發、£访机加^ 、 口部乃而發揮防止接觸^地貝通複數個接觸探針2之開 接觸探針2從探針固持具3脱茨… =揮對接觸探針2施以初期換曲之功能。== 1導引/可抑難崎針2在第2連接部26之附近從第 1導弓丨槽3謂或第2導引槽321脫落。附近從第 棒狀構件4之與長度方向垂直㈣面、 不之剖面係形成將長方形 第2圖所 比接觸探針2之_^5? 做，其面積係 之開心之面積小4於棒狀構件4具有 Π 32】6只0 201031927 接觸探針 7動作順畅，並且可穩定地 者’由於棒狀構件4具有上述之：觸探針2。再 =針2在形成固定用孔部331時==广可對接觸 ::構件4之與長度方向垂直的=進行。此外’ 或正方形等，亦可為圓形。 狀可為例如多角形 棒狀構件4係利用剛性 陶:光等絕緣性材料所形成。 使施加荷重撓曲亦少之 槽=之探針單元1中，由於藉由第… 第2導引槽321來保掊接繊 全周進行保持之情形相 、觸祿針2，因此與遍及 持具3之間減低接觸探針2與探針保 進行接心#觸面積而使滑動阻力減少，並且可順暢从 2特有:針2之伸縮動作。再者，防止板狀之二？ 23之彈黃特4=，曲或扭曲之發生所致之彈性部 之電料時，首細使轉基板_ 藉由與探奸保持 =21接觸之方式進行定位，並且在 件（未圖示^'目同之由絕緣性材料所構成之固定播 板_的狀態53 μ持轉基板100配線基 與固定構件^ ’猎螺絲固定等方式連結探針保持具3 初期荷重之對接觸探針2施加初期荷重。施加有 然後，WiL·早701係固定在檢錄置内之預定位置。 使用檢錢治具（探㈣卞。㈣使檢查野 201031927 象·之電極2〇1從探針單元ι之下 2接觸部22與電極2〇1垃 發迎U使第 施加r，探針2::=:= =極101與电極20!予以電性連接，以進行信號之接收傳 ❹ 持且發明的實施形態1，由於在探針保 持J 5χ置用則呆持接觸探針2之導引槽（第 311、第2導引槽321)，因 導引槽 此為了使鄰接之捿觸探針2的 間距乍小化，只要減小該導引槽之間隔即可。因此，可確 實地對應檢查對象200之電極2〇1等之排列間隔的窄小化。 此外，依據本實施形態1 ’由於在探針保持具3設置 有用以收容與檢查對象綱接觸之接觸探針2之第2接觸 部22之-部分的收容槽322，因此能以高精確度進行虚檢 ❹ 查對象之對位。因此’可實現與檢查對象扇之電極 201等之確實的接觸。 此外，依據本實施形態！，由於藉由收容稽322確實 地限制第2接觸部22，因此可使第2接觸部之前端部 的位置精確度提升，且可減少起因於接觸探針2之位置偏 離所致的斷路（第2接觸部22與電極2G1之接觸的偏離） /短路（接觸探針2彼此之接觸、與接觸對象之電極】〇1不 同之電極101的接觸）等不良情形的發生機率。此外，由 於可容許檢查對象2〇〇之位置偏離的範圍（袼度）變大， 因此前端部之位置精密度的提升係有助於製品安裝（初期 對位）時間之縮短、檢查穩定性之提升。 32]689 13 201031927 此外，依據本實施形態卜由於可使接觸探針2之前 端位置精確度提升’因此亦可對應檢查對象 的窄小化。 — 之電極201 此外，依據本實施形態丨，由於限 2接觸部22的前端部’因此可防止第2接觸部 部因偶發性地朝第2接觸部22之厚度方向施 = 撞擊而變形。 ）堝何室或 (實施形態2) 的斜L5圖=本發明之實施形態2之探針單元之構成 =，且Λ示本實施形態2之探針單元之内部 部剖面圖。該等圖所干之探千仃之切斷面的局 所不之铋針早兀5係具備：在兩端部分 :與象及信號處理電路接觸之複數個接觸探針6; 持複數個接觸探針6之探針保持且7 .及支 持複數個接觸探針6之棒狀構件4。 化、7’及支 第6 第6圖說明接觸探針6之構成。以下，在 度，將y轴方向6::將X轴方向之長度設定為寬 定為高度。 長度設疋為厚度，將Z軸方向之長度設 接觸探針6係& 第1接觸部化接觸之 觸部62;介置在M查對象200之電㈣1接觸之第2接 . e . . 1接觸部61與第2接觸部62之間，且 (第6圖之與z轴平行之方向）伸縮自如之 財與彈性部《㈣之寬度及厚度，且連接 321689 14 ❹ ❹ 保持構杜 1導引槽711係心=有複數條第1钊槽川，該第 方向之端緣部中 接觸探針6之寬度 02之側的端緣部。 201031927 第1接觸部6!及彈性部63之第】 性部63相同之寬度及厚度 4’及具有與彈 …形成有貫通於板厚方向二2接， 心接觸探針6係利用金屬紐之第2連接部 成。: 接觸。Ρ 62係較第2連接部 圖之與Χ财行之方向）之端 广度方向（第6 之寬度方向。第2接觸部⑺更大出於第2連接部66 之長度方向朝與第1接觸部21i 亦P沿著接觸探針2 下稱為前端部）係形成尖銳形狀目反之方向突出的端部（以 2二為了議求鄰接之 之表面部分形成絕緣層。、、邑緣’亦可在接觸探針2 長方體之外觀开^針^夺^ 7平探針保持具7係形成大致 用以保持接觸探針6之赏 板狀之第1保持構件71， 第2保持構件72，虚^向之一方端緣部；平板狀之 :保持接觸探針6之、：夺構件71平行地配置，且用 支持構件73， 寬度方向之另-方端緣部； 持構件72《兩端=結並支持第1保持構件71 予以固定。、且分別供播通棒狀構件4之兩端部並 第… 321689 15 201031927 與第3圖所示之複數條第1導引槽311同樣地，複數條第 1導引槽711係形成彼此平行之直線狀而延伸。此外，鄰 接之任意的2條第1導引槽711之間隔全部相同。 第2保持構件72係具備：複數條第2導引槽721，分 別位於複數條第1導引槽之任一條相對向之處，並保 持接觸探針6之寬度方向之端緣部中之突出有第2接觸部 62之側的彈性部63、第1連接部64及第2連接部66之端 緣部，且延伸成直線狀；及複數條收容槽722，從第6圖 之下表面侧的端部沿著第2導引槽721所延伸之方向（第 6圖之z軸方向）貫穿地設置，且分別連通於複數條第2 導引槽721之任一條，且收容第2接觸部62之一部分。彼 此對應之第2導引槽721及收容槽722係與位在該第2導 引槽721之對向面的第1導引槽711成為一組，而具有導 引接觸探針6之伸縮動作的功能。 第7圖係顯示收容槽722之構成的局部放大斜視圖。 如第7圖所示，複數條收容槽322係形成梳齒狀。此外， 鄰接之任意的2條收容槽722之間隔全部相同，且與鄰接 之2個第2導引槽721之間隔相等。收容槽722之槽深度 f係設定為：即使接觸探針6因荷重而被施以行程，第2 接觸部62亦不會到達收容槽722之底面的深度。 第1導引槽711及第2導引槽721之槽寬度（相當於 第3圖之c)係略比接觸探針6之板厚大。此外，第1導 引槽711及第2導引槽721之槽深度（相當於第3圖之d) 係具有在接觸探針6不會脫落之情況下可確實地保持之程 16 321689 201031927 度的值。再者，彼此對向之第 導引槽Ml之底部的距離 ^措7U之底部 接觸探針6之寬度略大的值。田於第3圖之〇係=2 支持構件73储有供_㉟ 、有比 固疋之固定用孔部731。支持，件4之端部並 谓固於第i保持構件7 :利用複數個The plate-like implementation of the narrowing of the arrangement interval has revealed a technique related to the probe unit of J ( (refer to, for example, the number of contact probes * 卩 170 series has: the holder is formed to be useful for containment and withstand = ::: The weight and the spring mechanism' is disposed above the holder to achieve a narrow arrangement of the probe sheets 2) in which the contacts are provided at the end of the insulating sheet. In another technique of the miniaturization, there is a related art in which a plurality of wirings are disposed and before the wiring (see, for example, Patent Document (Patent Document 1) Japanese Patent No. 375-831, No. 321 689 4 201031927 (Patent Document 2) In the technique described in the above-mentioned Patent Document 1, since it is necessary to insert the contact probe into the slit, the pitch is set. In the technique described in the above-mentioned Patent Document 2, the "interval between the alignments of the inspection objects" is narrowed down. However, since the individual stroke of the contact member in the sheet is small and it is impossible to follow the deformation or warpage of the inspection object, there is a problem that it is difficult to achieve a firm contact. The present invention has been made in view of the above problems, and its object is to provide a kind of It is surely corresponding to the narrowing of the arrangement interval of the electrodes or terminals of the inspection object, and the probe unit that can reliably contact the electrode or the terminal can be realized. In order to solve the above problems and achieve the above object, the probe unit of the present invention electrically connects two different circuit structures, and the probe egg element is characterized in that it has a conductive contact probe and has a first contact portion that is in contact with one of the two path structures, and a second contact portion that is in contact with the other of the two circuit structures, and is interposed between the second contact portion and the second contact portion. An elastic portion that is expandable and contractible in the longitudinal direction, a first connecting portion that connects the elastic portion and the first contact portion, and an elastic portion and the second contact portion that are connected to each other and that are formed in the thickness direction In the second connecting portion, the second contact portion is formed in a plate shape that protrudes in a width direction of the front connecting portion and is wider than an edge portion of the width of the second connecting portion of the 321689 5 201031927;探探探# ^ · 卞 具 ' 具 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 Holding = contact probe extension; a plurality of second guiding slots, respectively: Any one of the opposite sides of the shape and the groove is slidable freely, and the other end edge portion of the width direction of the first guide bow of the strip is transferred to the aforementioned contact; and the extension, and the plurality of storage slots , respectively, corresponding to any one of the line guiding grooves of the ^== line, and the second strip of the receiving strip; and the insulating rod-shaped member, forming a rod facing the plate 2 ^ part of a part of the probe In the first invention, the probe strip is first, and the probe is held in the probe, and the probe is in the form of a flat plate. a guide groove; a flat member; the plurality of second guide grooves and the front ''holding members are formed, and the plurality of holding members are formed, respectively, and two flat-shaped branches, two of the rod-shaped members A support member having a plate shape at both ends of the first and second holding members. The second aspect of the probe holding member of the present invention is the second aspect of the invention, the surface of the second pair, the contact probe and the storage tank system. The second connecting portion and the second turn on the back side of each other have a contact contact provided at an end portion of the holding member along the longitudinal direction. In addition to the second aspect of the present invention, in the first aspect of the invention, the storage unit 321689 6 201031927 is provided with a groove extending from the second holding end. 2, the guide groove is further, and the second guide groove is connected to the description. Some of the units of the storage tank are in the above-described invention, and the front plate thickness is too large. The thickness ratio is a portion in which the second guide groove is formed (the effect of the invention). The distance between the contact probes is small, so that the interval between the adjacent contact probes is reduced as long as the interval between the guide grooves is reduced. Therefore, it is possible to make sure that the arrangement interval of the electrodes or terminals of the inspection object is narrowed. Further, according to the present invention, since the probe holder is provided with the housing groove of the portion of the second contact portion for receiving the contact probe that is in contact with the inspection object, the alignment with the inspection object can be performed with high accuracy. Therefore, the actual contact with the electrode or terminal of the inspection object can be achieved. [Embodiment] Hereinafter, the best mode for carrying out the invention (hereinafter referred to as "embodiment") will be described with reference to the drawings. In addition, the drawings are schematic, it should be noted that the relationship between the thickness and the width of each part, the thickness ratio of each part, and the like are also different from the actual ones. 'The drawings also include portions having different dimensional relationships or ratios from each other. situation. (Embodiment 1) FIG. 1 is a perspective view showing a configuration of a probe unit according to Embodiment 1 of the present invention. Fig. 2 is a view showing the internal structure of the probe unit of the first embodiment, and is a cross-sectional view of a portion 321689 7 201031927 having a cut surface parallel to the XZ plane of Fig. 1. The inspection of the detector circuit or the liquid crystal panel shown in the above figures = 70 1 is the continuity check of the presence or absence of inspection of the semiconductor, and the toe spot when the wiring pattern of the image is short-circuited or linearly detected. . The action when the wheel is turned to the inspection object is checked: used; ^ is a device that is electrically connected to the inspection object of two different circuit structures and the (10) device that generates the output port. The specific shovel treatment 雷 Γ Γ 知 知 知 知 知 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在And a rod member 4 fixed to the probe holder 3 supporting a plurality of contact probes 2. First, the configuration of the contact probe 2 will be described with reference to Fig. 2 . Hereinafter, in the contact probe 2 of =, the length in the X-axis direction is set to be the width of the width direction, and the length in the two-axis direction is set to two degrees. The contact k-pin 2 has a second contact portion 22 that is in contact with the electrode 1 such as a liquid crystal panel, and a second contact portion 22 that is in contact with the inspection electrode 201 such as a liquid crystal panel; The contact portion 21 and the second cymbal group & 丨亘 between the 1 ζ ζ 平 平 平 且 且 且 且 且 且 且 且 且 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性The width and thickness of the elastic member 5 are connected to the first connecting portion 24 of the contact portion 2, and the second connecting portion 22 and the elastic portion 23 are connected to the elastic portion 23, and the opening is formed in the thick direction. The second connecting portion 26 of the portion 25. It is formed in a plate shape by contacting a conductive material such as a metal. Contact ', 1 is preferably 15 to 20//ηι. The thickness of 卞2 is larger than 321689 8 201031927. The second contact portion 22 is along the second connecting portion 26 to 2 in the direction parallel to the Χ axis and is wider than the width direction of the second connecting portion (the first end edge portion) The second contact portion 22 is formed in the end portion of the end portion of the longitudinal direction of the width of the second portion 22 and extends in the longitudinal direction (hereinafter referred to as the front end portion). The contact portion 21 is in contact with the electrode of the inspection object 200 at a further distance. In the shape, the contact portion 22 from the height direction and the second Φ 缺口 notch portion 27 are provided between the inspection connection portions 26. The notch portion W is attached to The probe holder is assembled to the probe holder 3 in a state in which the end portion is recessed. One of the second holders 3 is positioned such that the front end of the probe unit 1 can be viewed from the top of the probe unit 1 : a width of 22 is maintained from the probe The surface of the surface 3 has a range in the positive direction t of the yoke axis, and at least in addition, in order to achieve two adjacent ridges, the insulation 'may also be in contact with each other on the surface of the contact probe 2:: 2: Needle holder 3.:: An insulating layer is formed. The outer shape of the rectangular parallelepiped has: a flat (four) with a three-line formation = Maintaining the width direction of the contact probe 2: the holding member 31, the second holding member 32' and the ... end edge portion, the flat plate is held in contact with the probe, and the cattle 31 are arranged in parallel, and the supporting members are respectively In the direction of the other end edge portion 忒 and the two ends of the holding member 32, the holding members 31 and < and the solid guide for the insertion of the rod member 4 has a plurality of ones of the first one: the direction - the Width: The edge of the side of the contact portion 22. 201031927 Fig. 3 is an enlarged partial cross-sectional view of the upper surface of the probe holder 3. As shown in Fig. 3, the plurality of first guiding grooves 311 are formed parallel to each other. The straight line extends in a shape. The interval between any two adjacent first guide grooves 311 is the same. The second holding member 32 includes a plurality of second guide grooves 321 which are respectively located at a plurality of The elastic portion 23, the first connecting portion 24, and the second connection that protrude from the side of the second contact portion 22 among the end edges of the probe 2 in the width direction of the probe groove 311 are opposed to each other. The end portion of the portion 26 ^ and extending in a straight line; and a plurality of receiving grooves 322 are provided The surface of the second guiding groove 321 opposite to the surface of the second guiding groove 321 corresponds to any one of the plurality of second guiding grooves 321 and accommodates one of the second contact portions 22. The second guiding groove 312 corresponding to each other The storage groove 322 has a function of guiding the telescopic operation of the contact probe 2 in a group of the first guide grooves 311 located on the surface opposite to the second guide groove 321, and the fourth embodiment shows the housing groove 322. A partially enlarged oblique view of the configuration. As shown in Fig. 4, the plurality of receiving grooves 322 are formed in a straight line shape extending parallel to each other. Further, the spacing between any two adjacent receiving grooves 322 is the same and adjacent to each other. The intervals of the two second guiding grooves 321 are equal. The groove length a of the receiving groove 322 must be at least longer than the depth b of the notch portion 27 of the contact probe 2. Here, the depth b of the notch portion 27 is set such that even if the second contact portion 22 contracts in the longitudinal direction in accordance with a predetermined load applied from the outside, the bottom portion of the notch portion 27 does not abut against the end of the second holding member 32. The depth of the department. Further, the housing groove 322 may be formed over the entire length of the z-axis direction of Fig. 2 . 10 321689 201031927 1st guide groove m and 2nd guide 5丨 The contact probe 2 has a large plate thickness. Further, the first groove width c is slightly larger than the groove depth d of the groove 321 so as to be surely held by the contact guide groove 311 and the second guide. When the second needle 2 does not fall off, the bottom of the 311 and the second guiding groove _321 break the value of the width of the probe groove 2 which is slightly larger than the width of the first guiding groove. The distance 6 of the surface is provided, and the fixing support member 33 has a fixing hole portion 331 which is defined by the insertion furnace. The end portion of the support member 4 is fixedly screwed to the i-th holding member 3i and the second portion by the plurality of screws S and the end portion of the second holding member 32. The probe holder 3 is made of an insulating material such as an oxidized chain), such as an oxidized chain (SiO 2 ), such as _, 11 carbonate, or the like, and the like: 3 or the like: a curable resin 'poly second guide groove 321 is attached to the light micro 1 1 After the guide groove 311 and the pattern _ and ^, fru are patterned, the genus can be coated by the cutting machine or the end mill (__) edge film by using the cutting machine or the end mill (__) as the base material, and the surface of the material is used. The probe holder 3 is realized. The rod-shaped member 4 is opened by the probe holder 2 by means of an anvil, a visitor, and a mouth to prevent contact with the plurality of contact probes 2 of the contact probe 2 from the probe holder 3... = The function of initial adjustment of the touch probe 2 is applied. == 1 The guide/suppressible needle 2 is detached from the first guide groove 3 or the second guide groove 321 in the vicinity of the second connecting portion 26. In the vicinity, the vertical (four) surface of the rod-shaped member 4 is formed in a vertical direction (four) plane, and the cross-section is formed by the _^5 of the contact probe 2 in the rectangular second drawing, and the area of the area is happy to be 4 in the shape of a rod. The member 4 has Π 32] 6 only 0 201031927 The contact probe 7 operates smoothly and can be stabilized 'because the rod member 4 has the above-described touch probe 2 . Further, when the needle 2 is formed, the fixing hole portion 331 is made == wide and the contact :: the member 4 is perpendicular to the longitudinal direction. In addition, the square or the like may also be circular. The shape may be, for example, a polygonal rod member 4 formed of an insulating material such as a rigid ceramic: light. In the probe unit 1 in which the deflection of the applied load is small, the second guiding groove 321 is used to hold the entire circumference and hold the contact phase, and the contact pin 2 is used. Between the three, the contact probe 2 and the probe are kept in contact with each other to reduce the sliding resistance, and the sliding resistance can be smoothly changed from 2 to 2: the telescopic movement of the needle 2. Furthermore, to prevent the second shape? 23, the yellow special 4 =, the electric material of the elastic part caused by the occurrence of the twist or the twist, the first fine transfer substrate _ by means of contact with the detective hold = 21, and in the piece (not shown ^ 'The same state of the fixed board made of insulating material _ state 53 μ holding board 100 wiring base and fixing member ^ 'Hunting screw fixing etc. connection probe holder 3 initial load pair contact probe 2 The initial load is applied. After application, the WiL·Early 701 is fixed at a predetermined position in the recording set. Use the check fixture (Exploration (4) 卞. (4) Make the inspection field 201031927 The electrode 2〇1 from the probe unit ι The lower 2 contact portion 22 and the electrode 2〇1 are flushed to make the first application r, and the probe 2::=:==the pole 101 and the electrode 20! are electrically connected to receive and transmit signals and invent In the first embodiment, since the guide groove (the 311th and the second guide groove 321) of the contact probe 2 is held while the probe is held by the J5, the guide groove is used to make the adjacent probe The pitch of 2 is reduced as long as the interval between the guide grooves is reduced. Therefore, the electrode 2 of the inspection object 200 can be surely matched. In addition, according to the first embodiment, the probe holder 3 is provided with a portion for accommodating the second contact portion 22 of the contact probe 2 that is in contact with the inspection target. Since the groove 322 can perform the alignment of the virtual inspection target with high accuracy, it is possible to achieve a reliable contact with the electrode 201 of the inspection target fan, etc. Further, according to the present embodiment, Since the second contact portion 22 is surely restricted, the positional accuracy of the front end portion of the second contact portion can be improved, and the disconnection due to the positional deviation of the contact probe 2 can be reduced (the second contact portion 22 and the electrode 2G1) The probability of occurrence of a problem such as a deviation of the contact) / a short circuit (contact between the contact probes 2 and the electrode of the contact object), which is different from the contact of the electrode 101, and the position of the inspection object 2 The range of deviation (twist) becomes large, so the positional precision of the front end portion contributes to shortening the time for product mounting (initial alignment) and improving inspection stability. 32]689 13 201031927 According to the present embodiment, since the accuracy of the position of the front end of the contact probe 2 can be improved, the narrowing of the inspection object can be performed. - The electrode 201. Further, according to the present embodiment, the front end of the contact portion 22 is limited. Therefore, it is possible to prevent the second contact portion from being deformed by accidental impact in the thickness direction of the second contact portion 22. The tilt chamber L5 of the room or (the second embodiment) = the second embodiment of the present invention The configuration of the probe unit = and shows a cross-sectional view of the internal portion of the probe unit of the second embodiment. The details of the cut surface of the probe are as follows: At both ends: a plurality of contact probes 6 in contact with the image processing circuit; a probe holding a plurality of contact probes 6; and a rod member 4 supporting a plurality of contact probes 6. 7, 7' and 6th, Fig. 6 illustrates the configuration of the contact probe 6. Hereinafter, in the y-axis direction 6:: the length in the X-axis direction is set to be the height. The length is set to a thickness, and the length in the Z-axis direction is set to the contact probe 6 system & the contact portion 62 of the first contact portion contact; the second (4) contact of the M-inspection object 200 is connected to the second connection. e. 1 between the contact portion 61 and the second contact portion 62, and (the direction parallel to the z-axis in Fig. 6) expands and contracts the width and thickness of the elastic portion "(4), and connects 321689 14 ❹ 保持The guide groove 711 is a core portion having a plurality of first groove grooves, and an edge portion of the end portion of the first direction that contacts the side of the width 02 of the probe 6 is formed. 201031927 The first contact portion 6! and the first portion of the elastic portion 63 have the same width and thickness 4', and have a second connection with the elastic layer 63, and the core contact probe 6 is made of metal. The second connecting portion is formed. : Contact. Ρ 62 is the end width direction of the second connection portion and the direction of the second line (the sixth width direction. The second contact portion (7) is larger than the first contact portion 66 in the longitudinal direction toward the first contact The portion 21i is also referred to as a tip end portion of the contact probe 2 (hereinafter referred to as a tip end portion), and an end portion protruding in a direction opposite to the direction (in order to discuss the surface portion adjacent to the surface, an insulating layer is formed). The appearance of the rectangular parallelepiped of the contact probe 2 is opened. The flat probe holder 7 is formed with a first holding member 71 for holding the shape of the contact probe 6, and the second holding member 72, virtual ^ To one of the end edges; the flat shape: the contact probe 6 is held, the member 71 is arranged in parallel, and the support member 73 is used, the other end edge portion in the width direction; the holding member 72 "both ends = knot Further, the first holding member 71 is supported and fixed, and the both ends of the rod-shaped member 4 are respectively broadcasted... 321689 15 201031927 Similarly to the plurality of first guiding grooves 311 shown in FIG. 3, a plurality of The first guiding grooves 711 are formed to extend in a straight line parallel to each other, and are adjacent to any two of the first ones. The second holding member 72 is provided with a plurality of second guiding grooves 721 located at opposite sides of any of the plurality of first guiding grooves, and maintaining the width of the contact probe 6. The end portion of the end portion of the direction protrudes from the elastic portion 63 on the side of the second contact portion 62, the end portion of the first connecting portion 64 and the second connecting portion 66, and extends in a straight line; and a plurality of receiving grooves 722, The end portion on the lower surface side of the sixth drawing is provided to penetrate in the direction in which the second guiding groove 721 extends (the z-axis direction in FIG. 6), and is connected to the plurality of second guiding grooves 721, respectively. And accommodating one of the second contact portions 62. The second guiding groove 721 and the receiving groove 722 corresponding to each other are grouped with the first guiding groove 711 located on the opposite surface of the second guiding groove 721. Further, the function of guiding the telescopic movement of the contact probe 6 is shown in Fig. 7. Fig. 7 is a partially enlarged perspective view showing the configuration of the accommodation groove 722. As shown in Fig. 7, the plurality of accommodation grooves 322 are formed in a comb shape. The spacing between any two adjacent receiving slots 722 is the same and is between the adjacent two second guiding slots 721. The groove depth f of the receiving groove 722 is set such that even if the contact probe 6 is stroked by the load, the second contact portion 62 does not reach the depth of the bottom surface of the receiving groove 722. The first guiding groove 711 and The groove width of the second guiding groove 721 (corresponding to c in FIG. 3) is slightly larger than the thickness of the contact probe 6. Further, the groove depth of the first guiding groove 711 and the second guiding groove 721 (equivalent D) in Fig. 3 has a value of 16 321 689 2010 31 927 degrees which can be surely maintained without the contact probe 6 falling off. Further, the distance from the bottom of the first guiding groove M1 opposite to each other ^ The bottom of the 7U contact probe 6 has a slightly larger width. In Fig. 3, the support member 73 stores a fixing hole portion 731 for _35 and having a fixed ratio. Support, the end of the piece 4 is fixed to the i-th holding member 7: using a plurality of
探針保持具7係利用與第2保持構件72之 S 具3相同之絶緣性材料而實^元態1所說明之探針保持 在具有以上構成之探針 電極則與接觸探針6 二5中’當檢查對象2〇〇之 且第2接觸部62會在第6圖 2方向收縮’並 轉。此時，由於第平面上產生順時針之微小旋 幾乎不會發生朝第6圖:部62係保持在收容槽722，因此 承古 圖之丫軸方向的位置偏離。因此，能 φ 立门1確度進行第2接觸部62之定位。此外，第2接觸 ^ 2之刖端係微小地旋轉且一面刮電極2〇〗一面與該電極 20^接觸’因此可去除形成在電極洲之表面的氧化膜或 者在該表面之髒污，而可實現穩定之電性接觸。 >依據以上說明之本發明的實施形態2 ，與上述實施形 態1同樣地，可確實地對應檢查對象200之電極201等之 耕列間隔的窄小化，且可實現與電極201等之確實的接觸。 此外’依據本實施形態2，不會過度損傷檢查對象 2〇〇’可適當地去除形成在檢查對象2〇〇之電極201等之表 面的氧化膜或附著在該表面之辦汚等，而可實現穩定之電 17 321689 201031927 性接觸 (實施形態3) 第8圖係顯不本發明之實施形態3之探 的斜視圖。第9圖係顯不本實施形蘇3 元之構成 構成的圖，且為具有與第8圖之χζ平面針單元之内部 部剖面圖。該等圖所示之探針單元8係具行之切斷面的局 探針6，·用以收容並保持複數個接觸探7 :複數個接觸 9; 6 ^ ^ 探十保持具9係形成 有：平板狀之第】保持構件91 t方體之外觀形狀，且夏 度方向之一方端緣部；平板^保持接觸探針6之寬 保持構件71平行地配置，^第2保持構件92，與第1 向之另-方端緣部 用以保持接觸探針6之寬 持第1保持構件91及個支持構件93，分別連結^ 供插通棒狀構件4之 呆持構件92之兩端，龙且八 第1保持構件91:具部有並福予以固定。 乃別 槽 911 係，動 方向之端緣部中之 核持接觸探針6 广:3_示之複數條第::觸部62之側的端緣部： 係形成彼此平同樣地’複數條第 接之的2條第二狀而廷伸。此外，· 第2保持構件72 > 之間隔全部相同。 2料槽切及複數部I具有複數條第 別位於與複數條第1導"=2’該㈣引槽。 曰之任-條相對向之處，並 321689 18 201031927 保持接觸探針6之寬度方向之端部中之突出有第2接觸部 ' 62之側的彈性部63、第1連接部64及第2連接部66之端 ' 部，且延伸成直線狀，該收容槽922係從第9圖之下表面 側的端部沿著第2導引槽921所延伸之方向（第9圖之z 軸方向）貫穿地設置，且分別連通於複數條第2導引槽921 之任一條，且收容第2接觸部62之一部分；以及複數個突 起部92b，從薄壁部92a之表面中之與形成有第2導引槽 q 921之表面相背對的表面沿著薄壁部92a之厚度方向（第9 圖之z軸正方向）彼此平行地突起。 第10圖係顯示突起部92b附近之構成的局部放大斜 視圖。第11圖係第10圖之箭頭A方向的側面圖。突起部 92b之從薄壁部92a往寬度方向之突起量係從第10圖之上 方朝下方逐漸地變大，而途中開始突起量成為一定。因此， 突起部92b之與xz平面平行之剖面係形成梯形狀。鄰接之 任意的2個突起部92b之間隔係與鄰接之2個收容槽922 ® 之間隔相等。換言之，突起部92b係從鄰接之2個收容槽 922之間沿著薄壁部92a之厚度方向突起。 收容槽922之槽深度g係與突起部92b之從薄壁部 92a的突起量為一定之部分的高度（z軸方向之長度）相 等。因此，形成有收容槽922之部分的第2保持構件92 之板厚（第9圖之z軸方向的長度）係比形成有第2導引 槽921之部分的板厚大。 第1導引槽911及第2導引槽921之槽寬度（相當於 第3圖之c)係比接觸探針6之板厚略大。此外，第1導 19 321689 201031927 引槽911及第9道；7,城m 係具有在接==槽深度(相當於第3圖之d) 产㈣。Γ 會脫落之情況下可確實地保持之f i引栲Q者’彼此對向之第1導引槽911之底部與第： 接觸探針6之寬度略场值。 ）係具有比 荷重而被;^以922之槽深度g係設定為：即使接觸探針6因 仃篁而破施叫程，第2接觸部62衫會到達 因 之底面的深度。 槽922 © 固定插通棒狀構件4之端部並予以The probe holder 7 is made of the same insulating material as the S tool 3 of the second holding member 72, and the probe described in the actual state 1 is held in the probe electrode having the above configuration and the contact probe 6 2 When the object 2 is inspected and the second contact portion 62 is contracted in the direction of FIG. 6 and rotated. At this time, since the clockwise minute rotation on the first plane hardly occurs in the sixth drawing: the portion 62 is held in the accommodating groove 722, the position of the yaw axis in the yaw axis direction is deviated. Therefore, the positioning of the second contact portion 62 can be performed with the accuracy of the φ door 1 . In addition, the end of the second contact 2 is slightly rotated and the side of the electrode 2 is in contact with the electrode 20'. Therefore, the oxide film formed on the surface of the electrode can be removed or soiled on the surface. Stable electrical contact can be achieved. According to the second embodiment of the present invention described above, in the same manner as in the first embodiment, the narrowing of the arrangement interval of the electrodes 201 and the like of the inspection object 200 can be reliably performed, and the electrode 201 and the like can be realized. s contact. In addition, according to the second embodiment, the oxide film formed on the surface of the electrode 201 or the like of the inspection object 2 or the like can be appropriately removed without excessive damage to the inspection object 2〇〇, and the stain can be adhered to the surface. Stable electric power 17 321 689 201031927 Sexual contact (Embodiment 3) Fig. 8 is a perspective view showing a third embodiment of the present invention. Fig. 9 is a cross-sectional view showing the internal configuration of the planar needle unit having the same shape as that of Fig. 8 . The probe unit 8 shown in the figures is a local probe 6 having a cut surface, for accommodating and holding a plurality of contact probes 7 : a plurality of contacts 9; 6 ^ ^ There is: a flat shape] a shape of the t-shaped body of the holding member 91, and one end edge portion of the summer direction; the flat holding member 71 holding the contact probe 6 is disposed in parallel, and the second holding member 92, The first holding member 91 and the one supporting member 93 for holding the contact probe 6 with the first-side edge portion of the first direction are respectively coupled to the both ends of the holding member 92 of the rod-shaped member 4 , the dragon and the eighth first holding member 91: the part has a blessing to be fixed. It is a slot 911 system, and the core holding contact probe 6 in the end portion of the moving direction is wide: 3_ shows a plurality of strips:: the edge portion on the side of the contact portion 62: the same as the flat ones The second one of the second is the second shape. Further, the intervals of the second holding members 72 > are all the same. The 2 trough cut and the complex portion I have a plurality of strips located at the first and the first strip "=2'. In the end portion of the width direction of the contact probe 6, the elastic portion 63 on the side of the second contact portion '62, the first connecting portion 64, and the second portion are held in the end portion of the contact probe 6 in the width direction. The end portion of the connecting portion 66 extends linearly, and the receiving groove 922 extends from the end portion on the lower surface side of the ninth drawing along the second guiding groove 921 (the z-axis direction of FIG. 9). Each of the plurality of second guiding grooves 921 and the one of the second contact portions 62 are accommodated in a penetrating manner, and a plurality of protrusions 92b are formed from the surface of the thin portion 92a. The surfaces of the second guiding grooves q 921 facing away from each other are protruded in parallel with each other along the thickness direction of the thin portion 92a (the z-axis positive direction of the ninth diagram). Fig. 10 is a partially enlarged perspective view showing the configuration of the vicinity of the projection 92b. Fig. 11 is a side view of the arrow A direction of Fig. 10. The amount of projection of the projection 92b from the thin portion 92a in the width direction gradually increases from the upper side in the tenth diagram toward the lower side, and the amount of projection starts to be constant in the middle. Therefore, the cross section of the protrusion 92b parallel to the xz plane forms a trapezoidal shape. The interval between the adjacent two projections 92b is equal to the interval between the adjacent two housing grooves 922®. In other words, the projection 92b protrudes from the adjacent two housing grooves 922 in the thickness direction of the thin portion 92a. The groove depth g of the accommodating groove 922 is equal to the height (length in the z-axis direction) of the projection portion 92b from the thin portion 92a. Therefore, the thickness of the second holding member 92 (the length in the z-axis direction in Fig. 9) of the portion in which the receiving groove 922 is formed is larger than the thickness of the portion in which the second guiding groove 921 is formed. The groove width of the first guiding groove 911 and the second guiding groove 921 (corresponding to c in Fig. 3) is slightly larger than the thickness of the contact probe 6. In addition, the first guide 19 321689 201031927 slot 911 and the 9th; 7, the city m system has the connection == groove depth (corresponding to d of Figure 3) production (four). In the case where Γ will fall off, the width of the bottom of the first guiding groove 911 and the width of the contact probe 6 which are opposite to each other can be surely maintained. The groove depth g of 922 is set such that the second contact portion 62 reaches the depth of the bottom surface even if the contact probe 6 is broken due to flaws. The groove 922 is fixedly inserted into the end of the rod member 4 and given
分別螺固;^ 持構件93_用複數個螺絲S :第！保持構件91及第2保持構件％之 衣十保持具9係利用與實施形態明 具3相同之絕緣性材料而實現。 斤发月之鈦針保持 ，據具有以上構成之探針單元9 觸部62之部分的第2保 由於收’ 2接 ◎ 51槽吻之部分的板原女構件％之板厚比形成有第2導 62朝寬度方:(第= 之^轴方向）之動作。因此 及厚度方向‘（第9圖 之前端的對位，且能以高精確 ^進行第2接觸部62 之間距-致，並且可更確實：吏複數個第2接觸部62 因偶發性地朝第2接觸部12之1止^2接觸部22之前端部 擊而變形。 又方向施加的偏荷重或撞 再者，依據探針保持具9， 邹92a之突起量係從第1G圖、龙起部似之從薄壁 〈上方朝下方變大，因此在檢 321689 201031927 查時容易地從探針單元8之上方視認第2接觸部62之前端 部。因此，可確實地掌握第2接觸部62與檢查對象2〇〇 之電極201的接觸狀況。 依據以上說明之本發明的實施形態3，與上述實施形 態1、2同樣地，可確實地對應檢查對象2〇〇之電極2〇ι 等之排列間隔的窄小化，且可實現與電極2〇1等之確實的 接觸。 ❿ ❹ 此外，依據本實施形態3，藉由在第2保持構件％ 之收容槽922之周邊設置朝第2保持構件％之寬度方向突 起的突起部92b’即可限制接觸探針6之第2接觸部62的 動作，且實現第2接觸部62之前端部的正確對位，並且可 更確實地防止第2接觸部62之前端部往厚度方向的變形。 以上雖詳細說明作為實施本發明之最佳形態之實施 形態！至3，但本發明並非由上述實施形態所限定者。例 如’本發明之探針單元亦可應用在用於晶圓等級檢查之高 密度探針單A的檢查。如此，本發明係可 之各種實施_等者，在錢離由巾請專職8所=^ 技術思想的範圍内’可進行各種設計變更等。’之 (產業上之町利用性） 如上所=本發明之探針單元係適用進 電路或液晶歧等檢查對象之導 導體積體 查時，特別是適用於將接觸探針之排關二生檢 【圖式簡單説明】 h乍小化時。 第1圖係顯示本發明之 貫施㈣1之探針單元之構成 321689 201031927 的斜視圖。 第2圖係顯示本發明之實施形態1之探針單元之構成 的部分剖面圖。 . 第3圖係顯示本發明之實施形態1之探針單元所具備 之探针保持具之上表面附近之構成的圖。 第4圖係顯示本發明之實施形態1之探針單元所具備 之探針保持具之第2保持構件之收容槽附近之構成的圖。 第5圖係顯示本發明之實施形態2之探針單元之構成 & 〇 的斜視圖。 第6圖係顯示本發明之實施形態2之探針單元之構成 的部分剖面圖。 第7圖係顯示本發明之實施形態2之探針單元所具備 之探針保持具之第2保持構件之收容槽附近之構成的圖。 第8圖係顯示本發明之實施形態3之探針單元之構成 的斜視圖。 第9圖係顯示本發明之實施形態3之探針單元之構成 ❹ 的部分剖面圖。 第10圖係顯示本發明之實施形態3之探針單元所具 備之探針保持具之第2保持構件之突起部附近之構成的 圖。 第11圖係第10圖之箭頭A方向的側面圖。 【主要元件符號說明】 探針單元 接觸探針 22 321689 201031927Screwing separately; ^ Holding member 93_ with multiple screws S: No.! The holding member 91 and the second holding member % of the clothing ten holder 9 are realized by the same insulating material as that of the embodiment. Titanium needle holding of the squid, the second layer of the probe unit 9 having the above-mentioned probe unit 9 is formed by the thickness ratio of the original female component of the portion of the portion of the cushion 2 Guide 62 toward the width side: (the = ^ axis direction) action. Therefore, the thickness direction '(the alignment of the front end of the ninth figure, and the distance between the second contact portions 62 can be made with high precision), and it can be more certain: the plurality of second contact portions 62 are occasionally turned toward the first 2 The first end of the contact portion 12 is deformed by the front end portion of the contact portion 22. The bias load or the collision applied in the direction is further, according to the probe holder 9, the protrusion amount of the 92a is from the 1G map, the dragon Since the portion is enlarged from the upper side toward the lower side of the thin wall, the front end portion of the second contact portion 62 is easily viewed from above the probe unit 8 at the time of inspection 321689 201031927. Therefore, the second contact portion 62 can be surely grasped. In the third embodiment of the present invention, the third embodiment of the present invention can reliably correspond to the electrode 2〇ι of the inspection target 2, as in the first and second embodiments. In addition, according to the third embodiment, the second holding is provided around the receiving groove 922 of the second holding member %. The protruding portion 92b' of the member in the width direction of the member can be The operation of the second contact portion 62 of the contact probe 6 is restricted, and the correct alignment of the front end portion of the second contact portion 62 is achieved, and the deformation of the front end portion of the second contact portion 62 in the thickness direction can be more reliably prevented. Although the embodiments of the present invention are described in detail, the third embodiment is not limited to the above embodiments. For example, the probe unit of the present invention can also be applied to wafer level inspection. The inspection of the density probe single A. Thus, the present invention is applicable to various implementations, etc., and various design changes can be made within the scope of the technical idea of the money. As the above, the probe unit of the present invention is applied to the guide volume of the inspection object such as the circuit or the liquid crystal, and is particularly suitable for the inspection of the contact probe. [Simplified illustration] 1 is a perspective view showing a configuration of a probe unit of the present invention (4) 1 321 689 201031927. Fig. 2 is a partial cross-sectional view showing a configuration of a probe unit according to Embodiment 1 of the present invention. . . . 3 is a view showing a configuration of the vicinity of the upper surface of the probe holder of the probe unit according to the first embodiment of the present invention. FIG. 4 is a view showing a probe provided in the probe unit according to the first embodiment of the present invention. FIG. 5 is a perspective view showing a configuration of a probe unit according to a second embodiment of the present invention. FIG. 6 is a perspective view showing an embodiment of the present invention. Fig. 7 is a view showing the configuration of the vicinity of the storage groove of the second holding member of the probe holder provided in the probe unit according to the second embodiment of the present invention. The figure shows a perspective view of the configuration of the probe unit according to the third embodiment of the present invention. Fig. 9 is a partial cross-sectional view showing the configuration of a probe unit according to a third embodiment of the present invention. Fig. 10 is a view showing the configuration of the vicinity of the projection of the second holding member of the probe holder of the probe unit according to the third embodiment of the present invention. Fig. 11 is a side view of the arrow A direction of Fig. 10. [Main component symbol description] Probe unit Contact probe 22 321689 201031927
3、7、9 4 21、61 22 > 62 23 ' 63 24 ' 64 25 ' 65 26、66 27 31 、 71 、 91 32 ' 72 ' 92 33 ' 73 ' 93 92a 92b 100 101 、 201 200 311 、 711 、 911 321、 721、921 322、 722、922 331 、 731 、 931 5 探針保持具 棒狀構件 第1接觸部 第2接觸部 彈性部 第1連接部 開口部 第2連接部 缺口部 第1保持構件 第2保持構件 支持構件 薄壁部 突起部 配線基板 電極 檢查對象 第1導引槽 第2導引槽 收容槽 固定用孔部 螺絲 23 3216893,7,9 4 21,61 22 > 62 23 ' 63 24 ' 64 25 ' 65 26,66 27 31 , 71 , 91 32 ' 72 ' 92 33 ' 73 ' 93 92a 92b 100 101 , 201 200 311 , 711 , 911 321 , 721 , 921 322 , 722 , 922 331 , 731 , 931 5 probe holder bar member first contact portion second contact portion elastic portion first connection portion opening portion second connection portion notch portion first Holding member second holding member supporting member thin portion protruding portion wiring substrate electrode inspection target first guiding groove second guiding groove receiving groove fixing hole portion screw 23 321689