JP2018077185A - Probe pin - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a probe pin that enables only a plunger to be easily interchanged, and contributes to resource saving and reduction in interchange costs.SOLUTION: A probe pin 1 comprises: a barrel 2 that has hallow space 3; barrel 2 closed end part 2a and opening end part 2b; an elastic body 4 that is disposed in he barrel 2; a plunger 5 that is housed in the barrel 2; a slide part 5a that serves as a portion housed in the barrel 2 of the plunger 5; a pin part 5b that extends outward the barrel 2 from the slide part 5a, and is smaller in a diameter than the slide part; a groove-shaped outer peripheral groove part 6 that is formed along a peripheral direction in an outer peripheral lateral face on an opening end part 2b side; a through-hole 7 that is formed by penetrating from a bottom part of the outer peripheral groove part 6 inside the barrel 2; an almost annular shaped rig 8 that is fit in the outer peripheral groove part 6, and has a pair of separation end parts 8a having a part of the ring separated apart; and a protrusion part 9 that protrudes in an inner side direction from the ring 8 to extend in the hollow space 3 through the through-hole 7.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a probe pin used for inspection of electrical characteristics in a semiconductor manufacturing process or the like.

  In order to accurately inspect various parameters of electronic components in various electronic devices, line resistance values between conductor patterns, and the like, probe pins serving as these inspection devices are known. This probe pin is used by energizing it while temporarily contacting a subject to be examined (see, for example, Patent Document 1).

  As represented by Patent Document 1, the probe pin is formed of a substantially cylindrical barrel (sleeve) whose one end is closed and a plunger (contact pin) that moves in the barrel in the axial direction. Yes. The plunger is biased in the outer direction of the barrel by a spring disposed in the barrel. In order to prevent the plunger from jumping out from the other end portion of the barrel by this urging, the other end portion of the barrel is rounded (caulked) inward. Thereby, since a plunger contact | abuts to a bending edge part, it does not jump out of a barrel.

JP 2014-96332 A

  However, there are cases where it is desired to replace only the plunger. At this time, it is necessary to extend the bending process formed at the end of the barrel straight again. This processing is extremely difficult and impractical. Therefore, even if only the plunger is damaged or the like and the barrel is still usable, it is necessary to replace the entire probe pin. This wastes resources and increases replacement costs.

  The present invention has been made in consideration of the above-described prior art, and an object of the present invention is to provide a probe pin that makes it possible to easily replace only the plunger and contribute to saving resources and reducing replacement costs.

  In order to achieve the above object, according to the present invention, a substantially hollow cylindrical barrel having a hollow space inside, a closed end formed by closing one end of the barrel, and the other end of the barrel. An open end formed with an open end, an elastic body disposed in the barrel and biasing axially outward of the barrel, and the open end in the barrel more than the elastic body A plunger that is disposed on the side and is partially accommodated in the barrel; a solid cylindrical sliding portion that forms the plunger and is accommodated in the barrel; and the sliding Groove shape formed along the circumferential direction on the outer peripheral side surface of the barrel on the opening end side and the pin portion having a smaller diameter than the sliding portion extending from the portion along the axial direction of the barrel from the portion The outer peripheral groove portion and the bottom portion of the outer peripheral groove portion penetrate into the barrel. A substantially annular ring having a pair of spaced-apart end portions that are fitted in the outer peripheral groove portion and partly separated from each other, and projecting inwardly from the ring to define the through-hole. There is provided a probe pin characterized by comprising a protrusion passing through the hollow space.

  Preferably, a projecting piece extending in the outer direction of the outer peripheral groove is formed at the separated end.

  According to the present invention, since the protruding portion of the ring extends from the through hole formed in the outer peripheral groove portion of the barrel, the sliding portion comes into contact with the protruding portion. For this reason, even if the plunger is urged outward from the opening end of the barrel by the elastic body, the plunger can be prevented from jumping out of the barrel. Furthermore, the ring can be easily removed from the barrel by opening the ring from the separated end. For this reason, when the ring is removed, there is no member that holds the sliding portion, so that only the plunger can be easily replaced. Therefore, when it is desired to replace only the plunger, it is not necessary to replace the whole including the barrel, which can contribute to saving resources and reducing replacement cost.

  Moreover, since the ring can be easily opened by pinching the protruding piece by providing the protruding piece on the ring, the working efficiency in exchanging the plunger is improved.

It is a schematic sectional drawing of the probe pin which concerns on this invention. It is a schematic sectional drawing of the opening edge part vicinity of the probe pin which concerns on this invention. It is AA sectional drawing of FIG. It is the schematic of a ring. It is a schematic sectional drawing which shows the state which fitted the ring in the opening edge part shown in FIG. FIG. 6 is a schematic view of another ring. FIG. 7 is a schematic cross-sectional view showing a state where the ring of FIG. 6 is fitted into the opening end shown in FIG. 3. It is a schematic sectional drawing of the opening edge part vicinity of another probe pin which concerns on this invention. It is BB sectional drawing of FIG. It is the schematic of another ring. It is a schematic sectional drawing which shows the state which fitted the ring of FIG. 10 in the opening edge part shown in FIG.

  As shown in FIG. 1, a probe pin 1 according to the present invention includes a barrel 2 having a substantially hollow cylindrical shape. The inside that is the inside of the barrel 2 is formed as a hollow space 3. One end of the barrel 2 is closed and formed as a closed end 2a. The other end of the barrel 2 is opened and formed as an open end 2b. A compression coil spring 4, which is an elastic body, is disposed in the hollow space 3 in the barrel 2. The compression coil spring 4 is disposed along the axial center of the barrel 2 so as to be urged outward in the axial direction of the barrel 2. And the plunger 5 is arrange | positioned rather than this compression coil spring 4 at the opening end part 2b side. As can be seen with reference to FIG. 1, the plunger 5 is housed in the barrel 2 in part but not in its entirety.

  The plunger 5 has a solid cylindrical sliding portion 5 a that is a portion accommodated in the barrel 2. The sliding portion 5 a has an outer shape that is substantially the same as the inner diameter of the barrel 2. Therefore, the sliding portion 5a can move, that is, slide while contacting the inside of the barrel 2. A pin portion 5b extends from the sliding portion 5a to the outside of the barrel 2 along the axial direction of the barrel 2. A head portion 5c is integrally formed at the tip of the pin portion 5b. The pin portion 5b has a substantially rod shape having a smaller diameter than the sliding portion 5a. Moreover, it is not essential to provide the head part 5c.

  When the plunger 5 is pressed against the subject (not shown), the probe 5 formed of the barrel 2, the compression coil spring 4, and the plunger 5 resists the compression coil spring 4. And slides in the barrel 2. A crimp terminal is fastened with a nut to the closed end 2a of the barrel 2 so that a current flows. When actually used as an inspection, the barrel 2 is fitted into a resin (insulating material) directly or via a connecting member called a socket (receptacle).

  Here, as apparent from FIG. 2 and FIG. 3, an outer peripheral groove portion 6 having a continuous groove shape along the circumferential direction is formed on the outer peripheral side surface of the barrel 2 on the opening end side 2b. . A part of the bottom 6 a of the outer peripheral groove 6 is further cut away, and a through hole 7 that penetrates into the barrel 2 is formed. In the figure, a total of two through holes 7 are provided at positions facing each other. A ring 8 is fitted in the outer circumferential groove 6. As shown in FIG. 4, the ring 8 has a substantially annular shape, and a part thereof is spaced apart and has a pair of spaced end portions 8a. The ring 8 is formed of a flexible material, for example, metal (SUS) or resin. Therefore, the ring 8 can be easily opened, and the ring 8 is opened when fitted into the outer peripheral groove 6. A part of the ring 8 includes a protruding portion 8b protruding inward. The inner direction is a direction that protrudes inward from the inner diameter of the annular shape drawn as the basic structure of the ring 8. Therefore, if it is a circular arc with respect to the inner diameter of the ring 8 as shown in FIG. 4, it can be said that it protrudes inward. Thus, if the protrusion 8b is formed to be wide by using an arc, the strength as the ring 8 is preferably increased. As shown in FIG. 5, the protrusion 8 b extends through the through hole 7 and into the hollow space 3. In FIG. 5, the sliding portion 5a and the pin portion 5b are shown.

  Thus, since the protruding portion 8b of the ring 8 extends from the through hole 7 formed in the outer peripheral groove portion 6 of the barrel 2 into the hollow space 3, the sliding portion 5a comes into contact with the protruding portion 8b. . For this reason, even if the plunger 5 is urged outward from the opening end 2 b of the barrel 2 by the compression coil spring (elastic body) 4, the plunger 5 can be prevented from jumping out of the barrel 2. Therefore, in order to prevent the plunger 5 from popping out, it is not necessary to bend the opening end 2b. Furthermore, the ring 8 can be easily removed from the barrel 2 by opening the ring 8 from the separated end 8a. For this reason, when the ring 8 is removed, there is no member for pressing the sliding portion 5a, so that the plunger 5 can be taken out from the open end 2b. That is, only the plunger 5 can be easily replaced. Therefore, when it is desired to replace only the plunger 5, it is not necessary to replace the whole including the barrel 2, and it is possible to contribute to saving resources and reducing replacement cost.

  As shown in FIGS. 6 and 7, a protruding piece 9 may be provided at the separated end 8 a of the ring 8. The protruding piece 9 is formed to extend from the separated end portion 8a to the outer side of the outer peripheral groove portion 6. By providing such a protruding piece 9 on the ring 8, it is possible to easily open the ring 8 by pinching the protruding piece 9, so that the working efficiency in replacing the plunger 5 is improved. In FIG. 7, the sliding portion 5a and the pin portion 5b are shown.

  In order to obtain the effects as described above, the present invention is not limited to the above structure. For example, as shown in FIGS. 8 and 9, a total of four through holes 7 may be provided at positions facing each other. Then, four protruding pieces 9 may be provided on the ring 8 so as to correspond to the through holes 7 (see FIG. 10). Even in such a structure, since the protruding piece 9 extends to the hollow space 3, the plunger 5 can be prevented from coming off (see FIG. 11). In addition, in FIG. 11, the sliding part 5a and the pin part 5b are described.

1: probe pin, 2: barrel, 2a: closed end, 2b: open end, 3: hollow space, 4: compression coil spring (elastic body), 5: plunger, 5a: sliding part, 5b: pin part 5c: head portion, 6: outer peripheral groove portion, 6a: bottom portion, 7: through hole, 8: ring, 8a: separated end portion, 8b: protruding portion, 9: protruding piece

Claims (2)

A substantially hollow cylindrical barrel having a hollow space inside;
A closed end formed by closing one end of the barrel;
An open end formed by opening the other end of the barrel;
An elastic body disposed in the barrel and biased axially outward of the barrel;
A plunger that is disposed closer to the opening end than the elastic body in the barrel and a part of which is accommodated in the barrel;
A solid cylindrical-shaped sliding portion that is the portion that is formed in the barrel and is accommodated in the barrel, and extends from the sliding portion along the axial direction of the barrel to the outside of the barrel. And a small diameter pin part,
A groove-shaped outer peripheral groove formed along the circumferential direction on the outer peripheral side surface of the barrel on the opening end side;
A through hole formed through the barrel from the bottom of the outer peripheral groove,
A substantially annular ring having a pair of spaced end portions that are fitted into the outer circumferential groove and partly separated;
A probe pin comprising: a projecting portion projecting inward from the ring and extending into the hollow space through the through hole.   2. The probe pin according to claim 1, wherein a projecting piece extending in an outer direction of the outer circumferential groove is formed at the separated end.

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