JP2009288156A - Inspection socket - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a highly-versatile inspection socket capable of securing the optimum contact pressure to a connection terminal of an inspection device and to a connection terminal of an inspection object, and coping with each different inspection object. <P>SOLUTION: By using a flange part 5a formed on the axial direction center part of a third conductive member 5 as a boundary, a first compression spring 6 is provided to encircle a first end 5b between a first conductive member 3 and the flange part 5a, and a second compression spring 7 is provided to encircle a second end 5c between a second conductive member 4 and the flange part 5a, and a radial direction outer peripheral part of the flange part 5a is inserted into a circular groove 11c formed in a through-hole 11 of a socket body 10, and a specification of the first compression spring 6 is different from that of the second compression spring 7. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to an inspection socket, and more particularly to an inspection socket for inspecting an IC package, an integrated circuit element, and the like.

  A plurality of contact probes are provided between a connection terminal of an IC package or an integrated circuit element to be tested and a connection terminal of a test circuit board which is an inspection device as an IC package or an integrated circuit element inspection. An inspection socket is known, and the contact probe provided in the inspection socket is provided with a compression spring between the plungers at both ends so that the required contact pressure can be applied and the variation in the contact position can be absorbed. There is a displacement (sliding) type.

Conventional inspection sockets equipped with this type of both-end-displacement contact probe are arranged on the body portion having a plurality of through-holes and on the opening side of one end of each through-hole, and are used as terminals of the object to be inspected. A plurality of first plungers as electrical contact portions to be in contact; a plurality of second plungers as electrical contact portions arranged on the opening side of the other end of each through hole; a first plunger and a second plunger; On the other hand, what is provided with the compression spring which can be urged | biased in the direction to mutually separate is known (for example, refer patent document 1).
JP 2006-71343 A

  However, in such a conventional inspection socket, since the first plunger and the second plunger are biased in the separation direction by a single compression spring, connection of an object to be inspected such as an IC package or a wafer is possible. It has been difficult to adjust the contact pressure when the first plunger and the second plunger are brought into contact with the terminal and the connection terminal of the test circuit board from which the inspection signal is extracted.

  That is, the first plunger that contacts the connection terminal of the object to be inspected requires high contact pressure, whereas the second plunger that contacts the connection terminal of the test circuit board is connected to the connection terminal of the test circuit board. It is necessary to suppress damage to the test circuit board by making contact with a good contact force so that an excessive load is not applied.

  In the conventional inspection socket provided with the both-end-displacement contact probe, the first plunger and the second plunger are biased in the separation direction by a single compression spring, so that the first contact with the connection terminal of the object to be inspected is performed. When a compression spring that generates a high contact pressure (load) in accordance with the contact pressure of one plunger is used, the contact pressure to the connection terminal of the test circuit board becomes high and it is difficult to suppress damage to the test circuit board.

  On the other hand, when a compression spring that generates a low contact pressure (load) in accordance with the contact pressure of the second plunger that contacts the connection terminal of the test circuit board is used, the contact pressure of the object to be inspected to the connection terminal becomes low. There is a risk of poor continuity.

  In addition, if the type of the object to be inspected changes, it is necessary to change to a double-ended displacement contact probe with specifications corresponding to it, that is, it is necessary to replace the double-ended displacement contact probe. There is a problem that versatility is low.

  The present invention has been made in order to solve such a problem, and it is possible to ensure an optimum contact pressure with respect to the connection terminal of the inspection apparatus and the connection terminal of the inspection object, and different inspection objects. It is intended to provide a highly versatile inspection socket that can handle the above.

  In order to achieve the above object, an inspection socket according to the present invention is arranged on a socket main body in which at least one or more through holes are formed and an opening side of one end of the through hole, and is a connection terminal for an object to be inspected. A first conductive member that constitutes an electrical contact portion for contacting the first contact member, and a first conductive member that is disposed on the opening side of the other end of the through hole and constitutes an electrical contact portion for contacting the connection terminal of the inspection device The first conductive member is slidably held and coupled to one end, and the second conductive member is slidably held and coupled to the other end. A third conductive member, a diameter-expanded portion formed at a predetermined position in the axial direction of the third conductive member, and having a diameter expanded outward in the radial direction of the third conductive member; the first conductive member and the diameter-expanded Provided so as to surround the third conductive member. A hollow first elastic member that biases the first conductive member in a direction away from the enlarged diameter portion, and the third conductive member is surrounded between the second conductive member and the enlarged diameter portion. A hollow second elastic member provided to urge the second conductive member in a direction away from the enlarged diameter portion, and a through hole of the socket body, and a radially outer peripheral portion of the enlarged diameter portion is inserted therethrough. It is comprised from what was provided with the insertion part made.

  With this configuration, the first elastic member is provided so as to surround the third conductive member between the first conductive member and the enlarged diameter portion, with the enlarged diameter portion formed in the axial direction of the third conductive member as a boundary. The second elastic member is provided so as to surround the second conductive member between the third conductive member and the enlarged diameter portion, and the insertion portion formed in the through hole of the socket body has a radial direction of the enlarged diameter portion. Since the outer peripheral portion is inserted, the specifications of the first elastic member and the second elastic member can be made different.

  For this reason, it is possible to select an elastic member that generates a load required for the object to be inspected and the inspection apparatus, and to bring the first elastic member into contact with the connection terminal of the object to be inspected with a high contact pressure. On the other hand, the occurrence of poor continuity can be prevented, while the second elastic member is brought into contact with the connection terminal of the inspection device so as not to apply an excessive load with a good contact force, thereby damaging the inspection device. Can be prevented.

  Further, when the type of the object to be inspected is changed, the first conductive member or the first elastic member is changed by changing the shape or size of the first conductive member or changing the spring load of the first elastic member. It can respond by changing to the specification according to a to-be-inspected object, and can improve the versatility of a socket apparatus.

  Further, since the contact pressure with respect to the connection terminal of the inspection apparatus is always constant, the second conductive member and the second elastic member can be standardized. In addition to this, when the first conductive member is contaminated or worn during inspection and the contact function of the object to be inspected with respect to the connection terminal decreases, the contact function is restored by replacing only the first conductive member. can do. As a result, the replacement cost can be greatly reduced.

  In addition, when replacing parts, the first conductive member and the second conductive member may be replaced individually, so that the number of discarded parts can be reduced and environmental measures can be taken.

  Furthermore, since the first elastic member and the second elastic member are separated via the enlarged diameter portion, the first conductive member and the second conductive member are in contact with the connection terminal of the object to be inspected and the connection terminal of the inspection apparatus, respectively. Sometimes, the repulsive force of the first elastic member having a large spring load does not affect the second elastic member having a small spring load. For this reason, it is not necessary to consider the durability of the second elastic member, the replacement period of the second elastic member can be lengthened, and the maintenance cost of the inspection socket can be reduced.

In addition, the inspection socket according to the present invention is configured by different specifications of the first elastic member and the second elastic member.
With this configuration, it is possible to select an elastic member that generates a load required for the object to be inspected and the inspection apparatus, and the first elastic member is brought into contact with the connection terminal of the object to be inspected with a high contact pressure. In addition, it is possible to further prevent the occurrence of poor conduction, and it is possible to prevent the inspection device from being damaged by bringing the second elastic member into contact with the connection terminal of the inspection device with a low contact pressure. .

  In the inspection socket according to the present invention, the socket body is divided with the insertion portion as a boundary, and the first socket body in which a first groove constituting one of the insertion portions is formed and the other of the insertion portions. The first socket body is formed with one side of the through hole and the other side of the through hole is formed in the second socket body. Consists of things.

  With this configuration, when the double-end displacement contact probe composed of the first conductive member, the second conductive member, the third conductive member, the first elastic member, and the second elastic member is assembled to the socket body, the first groove or the second groove After positioning the enlarged diameter portion of the third conductive member and mounting the double-end displacement contact probe on the first socket body or the second socket body, the second groove or the first groove is positioned on the enlarged diameter portion and By attaching the socket main body or the first socket main body to the first socket main body or the second socket main body, the enlarged-diameter portion can be easily inserted into the insertion portion, and the both-end displacement contact probe can be assembled to the socket main body.

  Further, in the inspection socket according to the present invention, the socket main body is divided at the insertion portion, and the first socket main body having a groove or a flat portion constituting one of the insertion portions and the other of the insertion portions is configured. And a second socket body having a flat surface portion or a groove, wherein one side of the through hole is formed in the first socket body, and the other side of the through hole is formed in the second socket body. Has been.

  With this configuration, when the double-end displacement contact probe comprising the first conductive member, the second conductive member, the third conductive member, the first elastic member, and the second elastic member is assembled to the socket body, the third conductive member is inserted into the groove. By positioning the enlarged diameter portion and mounting the double-end displacement contact probe on the first socket body or the second socket body, the second socket body or the first socket body is attached to the first socket body or the second socket body. The enlarged diameter portion can be easily inserted into the insertion portion, and the double-end displacement contact probe can be assembled to the socket body.

  In addition, a groove is formed in one of the first socket main body and the second socket main body, and either one of the first socket main body and the second socket main body has a flat surface portion that constitutes the insertion portion together with the groove. The insertion portion can be configured by machining the groove in only one of the socket body or the second socket body, the socket body can be easily manufactured, and the manufacturing cost of the socket body is prevented from increasing. be able to.

  Further, in the inspection socket according to the present invention, the first socket main body is provided separately from the main body portion on one side of the through hole and the main body portion, and the inner peripheral area of the through hole on the one side A socket cover having an opening with a smaller opening area, and the first engaging portion is constituted by the socket cover portion between the opening and the one through hole.

  With this configuration, since the second engaging portion of the first conductive member and the second conductive member is engaged with the first engaging portion, the first conductive member, the second conductive member, the first elastic member, and the second elastic member are engaged. It is possible to prevent the member from coming out of the socket body.

  In the inspection socket according to the present invention, the first socket main body is provided separately from the main body portion in which one of the through holes is formed and the main body portion, and is smaller than an inner peripheral area of the through hole. A socket cover having an opening having an opening area, and the first engagement portion is constituted by the socket cover portion between the opening and the through hole.

  With this configuration, the first socket body in which the first conductive member is disposed is configured by a main body portion in which a through hole is formed and a socket cover having an opening portion having an opening area smaller than the inner peripheral area of the through hole. Therefore, it is unnecessary to form the through hole and the opening in one socket body in two steps.

  Further, the first elastic member and the second elastic member are separated via the enlarged diameter portion, and it is possible to prevent the spring load from affecting each other between the first elastic member and the second elastic member. That is, when there is a single spring member as in the prior art, when the second conductive member contacts and compresses the connection terminal of the inspection device, the first conductive member is socketed by the repulsive force of the single elastic member. Since the contact with the cover is caused by a strong contact force, it is necessary to increase the strength of the socket cover (for example, increase the plate thickness).

  In the present invention, since the spring load does not affect the first elastic member and the second elastic member, the initial spring load of the first elastic member can be reduced. Therefore, the second engaging portion of the first conductive member does not contact the first engaging portion of the socket cover with a strong contact force.

  For this reason, the socket cover having such a strength that the first elastic member and the first conductive member do not come out of the first socket body can be used, and the thickness of the socket cover can be reduced. For this reason, the height of the socket body can be lowered by the amount that the thickness of the socket cover can be reduced, and the inspection socket can be downsized.

  In addition, when replacing the first elastic member and the first conductive member, the replacement work can be performed with the socket cover removed from the main body, so that the replacement work of the first elastic member and the first conductive member can be performed. Workability can be improved.

  Further, in the inspection socket according to the present invention, one end of the first elastic member is fitted to the outer peripheral portion of the first conductive member, and the other end of the first elastic member is the first portion on the enlarged diameter side. 3 is fitted to the outer peripheral portion of the conductive member, one end of the second elastic member is fitted to the outer peripheral portion of the second conductive member, and the other end of the second elastic member is the side of the enlarged diameter portion. It is comprised from what is fitted by the outer peripheral part of a 3rd electrically-conductive member.

  With this configuration, the both-end displacement contact probe composed of the first conductive member, the second conductive member, the third conductive member, the first elastic member, and the second elastic member can be integrated and assembled to the socket body. The workability of the contact probe assembly work can be improved.

  As described above, the present invention can ensure the optimum contact pressure for the connection terminal of the inspection apparatus and the connection terminal of the object to be inspected, and is versatile enough to handle different objects to be inspected. A high inspection socket can be provided.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
1 to 10 are views showing a first embodiment of an inspection socket according to the present invention.

  First, the configuration will be described. In FIG. 1, the inspection socket device 1 includes a double-ended displacement contact probe (hereinafter also simply referred to as a probe) 2 and a socket body 10.

  The probe 2 has a first conductive member 3 and a second conductive member 4 that respectively constitute an electrical contact portion at both ends in the axial direction, and is housed in the through hole 11 of the socket body 10. Although not shown, through holes are formed in the socket body 10 at a predetermined pitch (a constant interval in the left-right direction in FIG. 1) in parallel with each other, and the probe 2 is accommodated in the through holes. ing.

  The first conductive member 3 is disposed on the opening 11a side (one end) above the through-hole 11 and comes into contact with the connection terminal 21a (see FIG. 4) of the object 21 to be inspected.

  The second conductive member 4 is disposed on the opening 11b side below (the other end of) the through-hole 11 and is in contact with the connection terminal 22a (see FIG. 4) of the printed wiring board 22 that is an inspection device. It has become.

  The third conductive member 5 is accommodated in the through hole 11 of the socket body 10, and the third conductive member 5 is slidably held and coupled to the upper end (one end) and the lower end ( The second conductive member 4 is slidably held and coupled to the other end.

  Further, a flange portion 5 a as a diameter-expanded portion is formed at the axially central portion of the third conductive member 5, and the flange portion 5 a is expanded in the radial direction outward of the third conductive member 5. .

  The upper side of the flange portion 5a of the third conductive member 5 constitutes a first end portion 5b, and the first conductive member 3 and the flange portion 5a are hollow so as to surround the first end portion 5b. A first compression spring 6 that is a first elastic member is provided.

  The lower side of the flange portion 5a of the third conductive member 5 constitutes a second end portion 5c, and the second conductive member 4 and the flange portion 5a are hollow so as to surround the second end portion 5c. A second compression spring 7 that is a second elastic member is provided.

  The first compression spring 6 biases the first conductive member 3 in a direction away from the flange portion 5 a, and the contact portion 3 a that is the outer end portion of the first conductive member 3 is an opening portion 11 a of the socket body 10. Projecting outwards.

  The second compression spring 7 biases the second conductive member 4 in a direction away from the flange portion 5 a, and the contact portion 4 a that is the outer end portion of the second conductive member 4 is an opening portion 11 b of the socket body 10. Projecting outwards. Moreover, the contact part 4a is formed in the crown shape with which a triangular uneven | corrugated | grooved part continues.

  Further, an annular groove 11c as an insertion portion is formed in the through hole 11 of the socket body 10, and a radially outer peripheral portion of the flange portion 5a is inserted into the annular groove 11c.

  Each of the first conductive member 3 and the second conductive member 4 is formed to have a diameter larger than that of the contact portions 3a and 4a, and at the base end side of the contact portions 3a and 4a, the upper end surface of the first compression spring 6 and the second conductive member 4 are formed. 2 Flange portions 3f and 4f that contact the lower end surface of the compression spring 7, and project from the flange portions 3f and 4f toward the flange portion 5a and are fitted into the upper end of the first compression spring 6 and the lower end of the second compression spring 7. The fitting portions 3e and 4e and the bottomed or penetrating holes 3c and 4c extending inward in the radial direction of the fitting portions 3e and 4e.

  The contact portions 3 a and 4 a of the first conductive member 3 and the second conductive member 4 are conductive portions that protrude from the flange portions 3 f and 4 f to one side in the axial direction, respectively, and the openings 11 a and 11 b of the socket body 10. Thus, it is held so as to be displaceable (slidable) in the axial direction.

  Further, the opening areas of the openings 11a and 11b are formed to be smaller than the inner peripheral area of the through hole 11, so that the annular engagement as the first engaging part is made between the openings 11a and 11b and the through hole 11. Portions 11d and 11e are formed, and the flange portion 3f of the first conductive member 3 and the flange portion 4f of the second conductive member 4 are engaged with the annular engagement portions 11d and 11e, so that the first conductive member 3 and The second conductive member 4 is prevented from coming out of the socket body 10. In the present embodiment, the flange portion 3f of the first conductive member 3 and the flange portion 4f of the second conductive member 4 constitute a second engaging portion.

As shown in FIG. 2, the socket body 10 includes a first socket body 13 and a second socket body 14 that are divided with an annular groove 11 c as a boundary, and one of the annular grooves 11 c is provided in the first socket body 13. A first groove 13a is formed, and the second socket body 14 is formed with a second groove 14a that forms the other of the annular groove 11c.
Further, the first socket body 13 is formed with a first through hole 11 f that constitutes one side of the through hole 11, and the second socket body 14 has a second penetration that constitutes the other side of the through hole 11. A hole 11g is formed. In addition, the division surface of the 1st socket main body 13 and the 2nd socket main body 14 is shown by P1, P2 in FIG.

Further, as shown in FIG. 3, the flange portion 5a is formed in a circular shape, and is formed in the annular groove 11c so as to be in close contact with the annular groove 11c through a predetermined gap with the annular groove 11c. It is inserted.
3 is a view taken in the direction of the arrow AA in FIG. 2B, and the first socket body 13 and the second socket body so that the first groove 13a and the second groove 14a have the same shape. 14 is formed.

  The first conductive member 3 that frequently contacts and separates from the connection terminal 21a of the object to be inspected 21 is a hard metal material having high electrical conductivity and wear resistance, such as titanium (Ti) -based metal and carbon steel (SK). The second conductive member 4 that contacts the connection terminal 22a of the printed wiring board 22 is not required to be as hard as the first conductive member 3, and is made of, for example, a copper-based metal such as phosphor bronze, brass, and beryllium copper. . The first conductive member 3 and the second conductive member 4 can be easily turned by using a material having free-cutting properties.

  The first compression spring 6 and the second compression spring 7 can be formed of any cross-sectional shape and material (for example, piano wire for spring, stainless steel wire, or plastic). Compared to the conductive member 4, the member is not required to have conductivity.

  The first compression spring 6 and the second compression spring 7 are hollow elastic members that urge the first conductive member 3 and the second conductive member 4 in a direction away from the flange portion 5a. Here, the elastic member can be formed of not only a metal but also a viscoelastic material such as rubber, a plastic, or a composite product thereof.

  The first conductive member 3 and the second conductive member 4 are electrically connected by the third conductive member 5 housed in the first compression spring 6 and the second compression spring 7. The third conductive member 5 is made of a material having a higher conductivity than the first conductive member 3 or a material having a higher conductivity than the two conductive members 3 and 4, and is made of, for example, a copper-based metal such as oxygen-free copper or beryllium copper. Is formed.

  The upper end of the first end 5b of the third conductive member 5 is slidably inserted into the hole 3c of the first conductive member 3, and the second end 5c of the third conductive member 5 is 2 is slidably inserted into the hole 4 c of the conductive member 4.

  In the present embodiment, the flange portion 5a of the third conductive member 5 is integrally formed with the same material as the first end portion 5b and the second end portion 5c. It is also possible to form the first end portion 5b and the second end portion 5c from a different material.

  The upper end of the first compression spring 6 and the lower end of the second compression spring 7 are formed to have smaller inner diameters than the fitting portions 3e and 4e of the first conductive member 3 and the second conductive member 4, respectively. When the fitting portions 3e and 4e of the first conductive member 3 and the second conductive member 4 are fitted into the upper end of the compression spring 6 and the lower end of the second compression spring 7, respectively, the fitting portions 3e and 4e are connected to the first compression spring 6 respectively. The upper end of the second compression spring 7 and the lower end of the second compression spring 7 are tightened with a predetermined radial pressure.

  On the other hand, in the present embodiment, the first compression spring 6 and the second compression spring 7 have different specifications.

  This is because the contact pressures of the first conductive member 3 and the second conductive member 4 when contacting the connection terminal 21a of the test object 21 and the connection terminal 22a of the printed wiring board 22 are different.

  That is, the first conductive member 3 that is in contact with the connection terminal 21a of the object to be inspected 21 requires a high contact pressure in order to prevent contact failure and the like, whereas the printed wiring board 22 The second conductive member 4 that is in contact with the connection terminal 22a needs to suppress damage to the printed wiring board 22 by contacting the connection terminal 22a of the printed wiring board 22 with a good contact force so that an excessive load is not applied. is there.

  In the present embodiment, the specifications of the first compression spring 6 and the second compression spring 7 are set such that the first conductive member 3 and the second conductive member 4 are connected to the connection terminal 21a of the test object 21 and the connection terminal 22a of the printed wiring board 22. The contact pressure is set to be the optimum when contacting each of the two.

  For example, the load of the first compression spring 6 required when the first conductive member 3 is brought into contact with the connection terminal 21 a of the object to be inspected 30 is brought into contact with the connection terminal 22 a of the printed wiring board 22. It is assumed that the load of the second compression spring 7 necessary for making the load is 12 g.

  When the spring constants of the first compression spring 6 and the second compression spring 7 are the same, the strokes of the first compression spring 6 and the second compression spring 7 can be set separately.

  For example, if the spring constants of the first compression spring 6 and the second compression spring 7 are 60 g / mm, the stroke of the first compression spring 6 is 0.5 mm, and the stroke of the second compression spring 7 is 0.2 mm, The compression spring 6 can generate a load of 60 × 0.5 = 30 g, and the second compression spring 7 can generate a load of 60 × 0.2 = 12 g.

  On the other hand, it is also conceivable to make the spring constants of the first compression spring 6 and the second compression spring 7 different.

  For example, the spring constant of the first compression spring 6 is 60 g / mm, the spring constant of the second compression spring 7 is 30 g / mm, the stroke of the first compression spring 6 is 0.5 mm, and the stroke of the second compression spring 7 is 0. Assuming 4 mm, the first compression spring 6 can generate a load of 60 g × 0.5 = 30 g, and the second compression spring 7 can generate a load of 30 × 0.4 = 12 g.

  Thus, by making the 1st compression spring 6 and the 2nd compression spring 7 into another specification, the 1st conductive member 3 and the 2nd conductive member 4 connect the connection terminal 21a and the printed wiring board 22 of the to-be-inspected object 21. An optimum contact pressure can be set when contacting each of the terminals 22a.

Next, a method for assembling the inspection socket 1 of the present embodiment will be described with reference to FIG.
First, as shown in FIG. 2A, the fitting portion 4e of the second conductive member 4 is fitted into the lower end of the second compression spring 7 in the second through hole 11g of the second socket body 14 in the divided state. The second compression spring 7 and the second conductive member 4 are inserted.

  Next, after the second end 5c of the third conductive member 5 is inserted through the second compression spring 7, the second end 5c is inserted through the second through hole 11g, and the lower end of the second end 5c is connected to the second conductive portion. The flange 5a is positioned in the second groove 14a while being inserted through the hole 4c of the member 4.

  Next, as shown in FIG. 2B, the first compression spring 6 with the upper end inserted into the insertion portion 3 e of the first conductive member 3 is inserted into the first end portion 5 b of the third conductive member 5. Next, the first end 5b is inserted into the first through hole 11f of the first socket body 13, the first groove 13a is positioned at the flange portion 5a, and the first socket body 13 is attached to the second socket body 14. The probe 2 is assembled to the socket body 10 with the flange portion 5a inserted through the annular groove 11c. This is the state of FIG.

Next, the operation will be described.
In the inspection socket 1 of the present embodiment configured as described above, as shown in FIG. 4, the connection terminal 21 a of the inspection target object 21 such as an IC package to be tested or an integrated circuit is formed. The contact part 3a of the first conductive member 3 comes into contact, and the contact part 4a of the second conductive member 4 comes into contact with the connection terminal 22a of the printed wiring board 22 constituting the inspection device or the diagnostic device. In addition, since the contact part 4a is formed in the crown shape, the contact part 4a is stably in contact with the connection terminal 22a of the printed wiring board 22.

  Further, the first compression spring 6 and the second compression spring 7 having different specifications allow displacements S1 and S2 of the first conductive member 3 and the second conductive member 4 by the contact portions 3a and 4a, and the first compression. When the spring 6 and the second compression spring 7 are compressed to generate a spring load, a required contact pressure for electrical connection to the first conductive member 3 and the second conductive member 4 is applied.

  As described above, in the present embodiment, the first end portion 5b is formed between the first conductive member 3 and the flange portion 5a with the flange portion 5a formed in the axial center portion of the third conductive member 5 as a boundary. The first compression spring 6 is provided so as to surround the second compression spring 7 so as to surround the second end 5c between the second conductive member 4 and the flange portion 5a. Since the radially outer peripheral portion of the flange portion 5a is inserted into the annular groove 11c formed in the groove 11, the specifications of the first compression spring 6 and the second compression spring 7 can be made different.

  For this reason, it is possible to select the first compression spring 6 and the second compression spring 7 that generate the necessary loads on the inspection object 21 and the printed wiring board 22, respectively. While it is possible to prevent the occurrence of poor conduction by contacting the connection terminal 21a of the inspection object 21 with a high contact pressure, the second compression spring 7 is connected to the connection terminal 22a of the printed wiring board 22 with a good contact force. It is possible to prevent the printed wiring board 22 from being damaged by being brought into contact so that an excessive load is not applied.

  Further, when the type of the inspection target object 21 is changed, the shape or size of the first conductive member 3 is changed, or the load generated by the first compression spring 6 is changed, whereby the inspection target object 21 is changed. It can respond by changing to the thing of the specification according to, and can improve the versatility of the socket 1 for inspection.

  Furthermore, since the contact pressure with respect to the connection terminal 22a of the printed wiring board 22 is always constant, the second conductive member 4 and the second compression spring 7 can be standardized. In addition to this, when the first conductive member 3 is contaminated or worn during inspection and the contact function of the test object 21 with respect to the connection terminal 21a is lowered, only the first conductive member 3 is replaced. The contact function can be restored. As a result, the replacement cost of the inspection socket 1 can be greatly reduced.

  Further, when replacing the parts, the first conductive member 3 and the second conductive member 4 may be replaced individually, so that the number of discarded parts can be reduced and environmental measures can be taken.

  Further, in the present embodiment, by forming the opening areas of the openings 11 a and 11 b to be smaller than the inner peripheral area of the through hole 11, the annular engagement portions 11 d and 11 d between the openings 11 a and 11 b and the through hole 11 are formed. 11e is formed, and the flange portions 3f and 4f of the first conductive member 3 and the second conductive member 4 are engaged with the annular engaging portions 11d and 11e. Therefore, the first conductive member 3, the second conductive member 4, The first compression spring 6 and the second compression spring 7 can be prevented from coming out of the socket body 10.

  Further, in the present embodiment, the socket body 10 is formed with the first socket body 13 formed with the first groove 13a constituting one of the annular grooves 11c and the second groove 14a constituting the other of the annular grooves 11c. Since the first through hole 11f is formed in the first socket body 13 and the second through hole 11g is formed in the second socket body 14, the flange portion 5a is formed in the annular groove 11c. The probe 2 can be easily inserted and assembled to the socket body 10.

  In the present embodiment, since the first compression spring 6 and the second compression spring 7 are separated via the flange portion 5a, the first conductive member 3 and the second conductive member 4 are connected to the object 21 to be inspected. When contacting the terminal 21a and the connection terminal 22a of the printed wiring board 22, the repulsive force of the first compression spring 6 having a large spring load does not affect the second compression spring 7 having a small spring load.

  For this reason, it is not necessary to consider the durability of the second compression spring 7, the replacement period of the second compression spring 7 can be lengthened, and the maintenance cost of the inspection socket 1 can be reduced.

  Further, as shown in FIG. 5, the contact portion 4i may be formed in a conical shape. Even if it does in this way, while being able to process the contact part 4i easily, the front-end | tip of the contact part 4i can be made to contact the connection terminal 22a of the printed wiring board 22 reliably.

  Further, as shown in FIG. 6, the contact portion 4j may be formed in a curved surface shape. Even if it does in this way, while being able to process the contact part 4j easily, the front-end | tip of the contact part 4j can be made to contact the connection terminal 22a of the printed wiring board 22 reliably.

  Further, in this embodiment, the enlarged diameter portion is constituted by the circular flange portion 5a and the insertion portion is constituted by the annular groove 11c. However, as shown in FIG. In addition to the flange portion 23, the insertion portion includes a rectangular second groove 23 a formed of straight portions A and B formed in the second socket body 14 and a second groove 23 a formed in the first socket body 13. You may comprise from the 1st groove | channel (illustration omitted) of the same shape.

In this way, the pitch of the through holes 11 can be reduced by making the plurality of through holes 11 formed in parallel to each other at a predetermined pitch in the socket body 10 adjacent to each other through the straight portions A. The socket body 10 can be reduced in size, and the inspection socket 1 can be reduced in size.
Moreover, since the pitch of the adjacent through-holes 11 can be reduced, a minute inspection object 21 can be inspected. Specifically, if the pitch of the through holes 11 can be reduced even if the pitch of the connection terminals 21a of the inspection object 21 is as small as 0.4 mm or 0.3 mm, for example, Since the pitch of the two conductive members 4 can be reduced, it is possible to cope with the inspection of the minute inspection object 21.

  Further, as shown in FIG. 8, the enlarged diameter portion is composed of four arm portions 24 that are expanded radially outward of the third conductive member 5, and the insertion portion is formed in the second socket body 14. The pair of second grooves 24a extending over a predetermined length in the circumferential direction of the through hole 11 and the second grooves 24a formed in the first socket body 13 so that the arm portions 24 are inserted every two. And a first groove (not shown) having the same shape.

  The number of the arm portions 24 is not limited to four, and two arm portions 24 may be provided at symmetrical positions sandwiched by the axis of the third conductive member 5, and five or more are provided at equal intervals around the axis of the third conductive member 5. May be.

In the present embodiment, the upper end of the first compression spring 6 and the lower end of the second compression spring 7 are inserted into the insertion portion 3e of the first conductive member 3 and the insertion portion 4e of the second conductive member 4, The first compression spring 6 and the first conductive member 3 are integrated with the second compression spring 7 and the second conductive member 4, but the fitting portions 3e and 4e are eliminated as shown in FIG. And the lower end of the second compression spring 7 may be brought into contact with the flange portions 3f and 4f.
In the present embodiment, the first conductive member 3 and the first compression spring 6, the second conductive member 4 and the second compression spring 7, and the third conductive member 5 are separately assembled to the socket body 10. However, the probe 2 may be integrated and assembled.

  That is, as shown in FIG. 10, the first compression is performed so that the lower end of the first compression spring 6 and the upper end of the second compression spring 7 are fitted to the first end 5b and the second end 5c on the flange portion 5a side. Fitting portions 5d and 5e having a larger diameter than the lower end of the spring 6 and the upper end of the second compression spring 7 are provided, and the lower end of the first compression spring 6 and the upper end of the second compression spring 7 are fitted into the fitting portions 5d and 5e. Combine.

  In this way, since the upper end of the first compression spring 6 and the lower end of the second compression spring 7 are fitted into the fitting portion 3e of the first conductive member 3 and the fitting portion 4e of the second conductive member 4, the first The first conductive member 3 and the second conductive member 4 are supported by the third conductive member 5 via the first compression spring 6 and the second compression spring 7, and the so-called self-holding function is exhibited to integrate the probe 2. Can do.

  If it does in this way, the probe 2 can be easily assembled | attached to the socket main body 10, and the workability | operativity of the assembly | attachment operation | work of the test | inspection socket 1 can be improved further.

  Moreover, you may form the annular recessed part which the lower end of the 1st compression spring 6 and the 2nd compression spring 7 engage with the outer peripheral part of fitting part 5d, 5e. In this way, the lower end of the first compression spring 6 and the upper end of the second compression spring 7 can be firmly fitted by the fitting portions 5d and 5e, and the self-holding function can be more reliably generated. .

(Second Embodiment)
FIG. 11 is a diagram showing a second embodiment of the inspection socket according to the present invention. The same reference numerals are given to the same components as those in the first embodiment, and the description will be omitted.
In FIG. 11, the first socket main body 13 is provided separately from the main body portion 32 in which the first through hole 11f is formed, and the main body portion 32, and has an opening area smaller than the inner peripheral area of the first through hole 11f. A socket cover 31 having an opening (one end of the through hole 11) 31a. The socket cover 31 is fastened to the main body 32 by a bolt (not shown).

  Further, an annular engagement portion 31d as a first engagement portion is configured by the socket cover 31 portion between the opening portion 31a of the socket cover 31 and the first through hole 11f, and the first engagement portion 31d includes a first engagement portion 31d. By engaging the flange portion 3 f of the conductive member 3, the first conductive member 3 is prevented from coming out of the first socket body 13.

  Thus, in this Embodiment, the 1st socket main body 13 by which the 1st electrically-conductive member 3 is arrange | positioned is compared with the main-body part 32 in which the 1st through-hole 11f was formed, and the internal peripheral area of the 1st through-hole 11f. Since the socket cover 31 has the opening 31a having a small opening area, it is unnecessary to form the first through hole 11f and the opening 31a in one first socket body 13 in two steps.

That is, in order to open the first through hole 11f and the opening 31a in one first socket body 13, first, the opening 31a is opened by cutting, and then the opening 31a is positioned on the lower side. Two processes for opening the first through hole 11f from the dividing surface P1 side of the first socket body 13 are required.
In the present embodiment, the main body portion 32 in which the first through hole 11f is formed and the socket cover 31 in which the opening portion 31a is formed are integrated by a bolt, so the opening portion 31a and the first through hole are integrated. 11f can be easily formed, and the first socket body 13 can be easily manufactured.

  Moreover, in this Embodiment, the 1st compression spring 6 and the 2nd compression spring 7 are isolate | separated via the flange part 5a, and a spring load mutually influences the 1st compression spring 6 and the 2nd compression spring 7. There is no.

  That is, when there is a single compression spring as in the prior art, when the second conductive member 4 contacts and compresses the connection terminal 22a of the printed wiring board 22, the first conductive member 3 is a single compression spring. Therefore, the socket cover 31 needs to be increased in strength (for example, thicker).

  In the present embodiment, since the spring load does not affect each other between the first compression spring 6 and the second compression spring 7, the initial spring load of the first compression spring 6 can be reduced, and the first compression spring The flange portion 3 f of the first conductive member 3 does not come into contact with the annular engagement portion 31 d of the socket cover 31 with a strong contact force due to the spring load of the spring 6.

  For this reason, the socket cover 31 having such a strength that the first compression spring 6 and the first conductive member 3 do not come out of the first socket body 13 can be used, and the thickness of the socket cover 31 can be reduced. For this reason, the height of the socket body 10 can be reduced by the amount that the thickness of the socket cover 31 can be reduced, and the inspection socket 1 can be downsized.

  Further, when replacing the first compression spring 6 and the first conductive member 3, the bolts are removed from the socket cover 31 and the main body portion 32, and then the replacement work is performed with the socket cover 31 removed from the main body portion 32. Therefore, the workability of the replacement work of the first compression spring 6 and the first conductive member 3 can be improved.

(Third embodiment)
12 and 13 are views showing a third embodiment of the inspection socket according to the present invention. The same reference numerals are given to the same components as those in the first embodiment, and the description will be omitted.

  As shown in FIG. 12, the socket body 10 is divided with the annular groove 11c as a boundary, and the second socket body 14 in which the groove 41 constituting one of the annular grooves 11c is formed and the plane constituting the other of the annular groove 11c. The first socket body 13 has a portion 42, and the first through hole 11 f is formed in the first socket body 13, and the second through hole 11 g is formed in the second socket body 14. In addition, the division surface of the 1st socket main body 13 and the 2nd socket main body 14 is shown by P1, P2 in FIG.

A method of assembling the inspection socket 1 according to the present embodiment will be described with reference to FIG.
First, as shown in FIG. 13A, the fitting portion 4e of the second conductive member 4 is fitted into the lower end of the second compression spring 7 in the second through hole 11g of the second socket body 14 in the divided state. The second compression spring 7 and the second conductive member 4 are inserted.

  Next, after the second end 5c of the third conductive member 5 is inserted through the second compression spring 7, the second end 5c is inserted through the second through hole 11g, and the lower end of the second end 5c is connected to the second conductive portion. The flange 5a is positioned in the groove 41 while being inserted into the hole 4c of the member 4.

  Next, as shown in FIG. 13B, the first compression spring 6 with the upper end inserted into the insertion portion 3 e of the first conductive member 3 is inserted into the first end portion 5 b of the third conductive member 5. Next, by inserting the first end 5b through the first through hole 11f of the first socket body 13 and attaching the first socket body 13 to the second socket body 14 so as to cover the groove 41 with the flat portion 42, The probe 2 is assembled to the socket body 10 with the flange portion 5a inserted through the annular groove 11c. This is the state of FIG.

  In the present embodiment, the socket body 10 is separated from the first socket body 13 having the second socket body 14 in which the groove 41 constituting one of the annular grooves 11c is formed and the flat portion 42 constituting the other of the annular groove 11c. Since the first through hole 11f is formed in the first socket body 13 and the second through hole 11g is formed in the second socket body 14, the flange portion 5a is easily inserted into the annular groove 11c and the probe 2 is formed. Can be assembled to the socket body 10.

  In the present embodiment, the groove 41 is formed in the second socket body 14, and the first socket body 13 includes the flat portion 42 that forms the annular groove 11 c together with the groove 41, so that only the second socket body 14 is provided. By processing the groove 41, the annular groove 11c can be formed. For this reason, manufacture of the socket main body 10 can be performed easily and it can prevent that the manufacturing cost of the socket main body 10 increases.

  The groove 41 may be formed in the first socket body 13 and the second socket body 14 may have a flat surface portion 42.

  Further, in the present embodiment, the configuration of the second conductive member 4 may be the same as that in FIGS. 5 and 6 of the first embodiment, and the configuration of the insertion portion and the enlarged diameter portion is the same as that of the first embodiment. 7 and 8 of the embodiment may be the same.

  As described above, the inspection socket according to the present invention can secure an optimum contact pressure with respect to the connection terminal of the inspection apparatus and the connection terminal of the inspection object, and can cope with different inspection objects. Thus, it has the effect that versatility can be enhanced, and is useful as a test socket for inspecting IC packages, integrated circuit elements, and the like.

It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is front sectional drawing of a socket for a test | inspection. It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is a figure explaining the procedure of the assembly method of the socket for a test | inspection. It is an AA direction arrow line view of FIG.2 (b). It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is front sectional drawing of the socket for a test | inspection which shows the operation state at the time of a test. It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is front sectional drawing of the socket for a test | inspection provided with the 2nd electroconductive member of another structure. It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is front sectional drawing of the socket for a test | inspection provided with the 2nd electroconductive member of another structure. It is a figure which shows 1st Embodiment of the socket for an inspection which concerns on this invention, and is front sectional drawing of the socket for an inspection provided with the enlarged diameter part of another structure. It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is front sectional drawing of the socket for a test | inspection provided with the enlarged diameter part of another structure. It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is front sectional drawing of the socket for a test | inspection provided with the 1st conductive member and the 2nd conductive member of another structure. It is a figure which shows 1st Embodiment of the test | inspection socket which concerns on this invention, and is a figure which shows the both-ends displacement type contact probe of another structure. It is a figure which shows 2nd Embodiment of the socket for an inspection which concerns on this invention, and is front sectional drawing of the socket for an inspection. It is a figure which shows 3rd Embodiment of the socket for an inspection which concerns on this invention, and is front sectional drawing of the socket for inspection. It is a figure which shows 3rd Embodiment of the socket for an inspection which concerns on this invention, and is a figure explaining the procedure of the assembly method of the socket for an inspection.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inspection socket 2 Both-ends displacement type contact probe 3 1st electroconductive member 3f, 4f Flange part (2nd engaging part)
4 Second conductive member 5 Third conductive member 5a Flange portion (expanded diameter portion)
5b 1st end part 5c 2nd end part 6 1st compression spring (1st elastic member)
7 Second compression spring (second elastic member)
DESCRIPTION OF SYMBOLS 10 Socket main body 11 Through-hole 11a, 11b, 31a Opening part 11c Annular groove (insertion part)
11d, 11e, 31d Annular engagement part (first engagement part)
11f 1st through-hole (one side of a through-hole)
11g Second through hole (the other side of the through hole)
13 1st socket main body 13a 1st groove | channel 14 2nd socket main body 14a, 23a, 24a 2nd groove | channel 21 Inspected object 21a Connection terminal 22 Printed wiring board (inspection apparatus)
22a Connection terminal 23 Flange (expanded part)
24 Arm part (expanded part)
31 Socket cover 32 Body 41 Groove 42 Flat part

Claims (7)

A socket body in which at least one or more through holes are formed;
A first conductive member that is disposed on the opening side of one end of the through hole and that constitutes an electrical contact portion for contacting a connection terminal of an object to be inspected;
A second conductive member disposed on the opening side of the other end of the through hole and constituting an electrical contact portion for contacting the connection terminal of the inspection device;
A third conductive member housed in a through-hole of the socket body, wherein the first conductive member is slidably held and coupled at one end, and the second conductive member is slidably held and coupled at the other end; ,
An enlarged diameter portion formed at a predetermined position in the axial direction of the third conductive member and expanded radially outward of the third conductive member;
A hollow first elasticity provided between the first conductive member and the enlarged diameter portion so as to surround the third conductive member and biasing the first conductive member away from the enlarged diameter portion. Members,
A hollow second elasticity provided between the second conductive member and the enlarged diameter portion so as to surround the third conductive member and biasing the second conductive member away from the enlarged diameter portion. Members,
An inspection socket, comprising: an insertion portion formed in a through-hole of the socket body, through which a radially outer peripheral portion of the enlarged diameter portion is inserted. The inspection socket according to claim 1, wherein specifications of the first elastic member and the second elastic member are different. The socket body is divided with the insertion portion as a boundary, and a first socket body in which a first groove constituting one of the insertion portions is formed and a second groove constituting the other of the insertion portion is formed. Consists of a second socket body,
The inspection socket according to claim 1, wherein one side of the through hole is formed in the first socket body, and the other side of the through hole is formed in the second socket body. . The socket body is divided with the insertion portion as a boundary, and a first socket body having a groove or a flat portion constituting one of the insertion portions and a second socket having a flat portion or a groove constituting the other of the insertion portions Consists of the body,
The inspection socket according to claim 1, wherein one side of the through hole is formed in the first socket body, and the other side of the through hole is formed in the second socket body. . The first socket body and the second socket body are formed such that each opening area of the opening at one end and the other end of the through hole is smaller than an inner peripheral area of the through hole. A first engagement portion is formed between the opening at one end and the other end and the through hole,
5. The inspection socket according to claim 3, wherein the first conductive member and the second conductive member are each formed with a second engagement portion that engages with the first engagement portion. 6. . The first socket body has a body portion on which one side of the through hole is formed, and an opening portion that is provided separately from the body portion and has an opening area smaller than an inner peripheral area of the through hole on the one side. 5. The inspection according to claim 3, further comprising a socket cover, wherein the first engagement portion is constituted by the socket cover portion between the opening and the through hole on the one side. Socket. One end of the first elastic member is fitted to the outer peripheral portion of the first conductive member, and the other end of the first elastic member is fitted to the outer peripheral portion of the third conductive member on the enlarged diameter portion side. ,
One end of the second elastic member is fitted to the outer peripheral portion of the second conductive member, and the other end of the second elastic member is fitted to the outer peripheral portion of the third conductive member on the enlarged diameter portion side. The inspection socket according to any one of claims 1 to 6, wherein the socket is for inspection.

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