JP2006084212A - Both-end displacement type contact probe - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a both-end displacement type contact probe which is easily assembled, and allows stable both-end displacement and securement of electric contact. <P>SOLUTION: This probe is equipped with: a first conductive member 11 and a second conductive member 12 constituting electric contact parts respectively; a hollow elastic member 13 for energizing both conductive members 11, 12 in the direction wherein an interval between them is expanded when the first conductive member 11 and a second conductive member 12 approach each other from a prescribed interval in the axial direction; and a third conductive member 14 stored in the elastic member 13 and extending approximately in the axial direction of the elastic member 13. The elastic member 13 has: one end 13a for holding the first conductive member 11 in the coupled state; the other end 13b for holding the second conductive member 12 in the coupled state; and a middle part 13c for holding the third conductive member 14 in a prescribed attitude slidable along the first conductive member 11 and the second conductive member 12. Preferably, the third conductive member 14 has a higher conductivity than the first conductive member 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a contact probe, and more particularly to a both-end displacement contact probe equipped in a wafer testing apparatus and an inspection socket in which an IC package or an integrated circuit element is built.

  IC package or wafer testing equipment with integrated circuit elements is used for testing with multiple contact probes between the IC package or wafer connection terminal to be tested and the connection terminal on the test circuit board side. The contact probe is equipped with a compression member between the contact parts at both ends to provide the required contact pressure and absorb the variation in the contact position. ) Type.

  As this type of both-end-displacement spring probe, for example, the inner head of the plunger is slidably held in a bottomed cylindrical barrel, and between the inner head of the plunger and the inner bottom surface of the barrel. An internal spring probe interposing a compression coil spring (see FIG. 1 (a) of Patent Document 1), or a plunger having an inner head of a plunger slidably held in a bottomed cylindrical barrel, and a plunger There is an external spring probe (see FIG. 1B of Patent Document 1) in which a compression coil spring is interposed between the outer head and the barrel.

Further, the inner diameter of the barrel is reduced as shown in FIG. 5 of the patent publication, or the inner surface of one end of the socket is reduced as shown in FIGS. The plunger and barrel are prevented from coming off, and the inner ends of the plunger and barrel are slidably in contact with each other. There is something.
Japanese Patent No. 3210645

  However, in a conventional both-end-displacement contact probe, a sliding portion of a male and female electrical contact member (hereinafter also referred to as a contact member) such as a conductor plunger and a barrel is located in the barrel or inside the coil spring. Since the inner end of the plunger is assembled into the barrel and the compression coil spring is assembled, the inner end of the barrel is plastically deformed to prevent the barrel and plunger from coming off. It was necessary to do it, and assembly was not easy.

  In addition, in order to obtain good electrical contact between both contact members despite the fact that the plunger and barrel which are electrical contact members are coaxially arranged and guided so as to be aligned on the same straight line by a socket or the like, It has been necessary to secure the contact pressure of both contact members by aligning the winding ends of the compression coil springs so that the axes of both contact members are inclined. However, it is possible to achieve both a guide to the socket side of these contact members and a sliding clearance (clearance) suitable for sliding between the two members and an inclined posture to ensure the contact pressure between these contact members. This is a contradictory requirement and requires very strict component dimensional management, and also reduces the stability of axial displacement (approach and return) of both contact members during probe operation. Moreover, such a problem has become more prominent in a test apparatus that performs a long-time test at a high temperature.

  Further, the contact portion on the inspected object side such as an IC package is required to have a material having high hardness capable of withstanding repeated pressure contact in order to ensure stable electrical contact for many tests. Stable high conductivity is required, and moreover, it is necessary to select lead-free materials from recent environmental measures. However, it is difficult to select plunger and barrel materials that can satisfy all of these conditions. There were also problems in terms of durability and cost of the probe.

  The present invention has been made to solve such a conventional problem, and an object of the present invention is to provide a double-ended displacement contact probe that is easy to assemble and can achieve both stable double-ended displacement and electrical contact. .

  In order to solve the above-described problems, the both-end displacement contact probe of the present invention includes a first conductive member and a second conductive member that constitute an electrical contact portion, and the first conductive member and the second conductive member are shafts. A hollow elastic member that urges both conductive members in a direction that expands the distance when approaching a predetermined interval in the direction, and a third conductive member that is housed in the elastic member and extends in the axial direction. The elastic member holds one end of the first conductive member, the other end holds and couples the second conductive member, and the third conductive member is the first conductive member and the second conductive member. And an intermediate portion that is held in a predetermined slidable posture.

  With this configuration, conduction between the first conductive member and the second conductive member is made via the third conductive member, and the third conductive member is slidable on the first conductive member and the second conductive member. Thus, it is stably held by the intermediate portion of the elastic member between the two conductive members, and the double-ended displacement type contact probe can achieve both stable double-ended displacement and electrical contact. In addition, since the first conductive member and the second conductive member are held and coupled to the one end portion and the other end portion of the elastic member, respectively, the first conductive member and the second conductive member can have a simple shape. Sophisticated dimensional control is not required for the conductive member and the sliding part of the second and third conductive members, and material selection and component processing of each conductive member is easy by separating the functions and dividing the sliding part. It becomes.

  In the present invention, the elastic member is a coil spring having the intermediate portion made smaller in pitch than other portions, or the elastic member is a coil spring having the intermediate portion closely wound. It should be constructed.

  Thereby, it becomes possible to stably hold the third conductive member in a predetermined posture in which the third conductive member can slide on the first conductive member and the second conductive member by an intermediate portion of the elastic member having a small shape change.

  More preferably, in the both-end displacement contact probe of the present invention, the one end portion and the other end portion of the third conductive member are housed in portions of the first conductive member and the second conductive member that face each other in the axial direction. A pair of recesses are formed, the third conductive member has an intermediate portion larger in diameter than one end and the other end, and one formed on either the first conductive member or the second conductive member When the third conductive member is inserted through the coil spring toward the concave portion of the coil spring and the coil spring is compressed further in the insertion direction than the intermediate portion of the coil spring, one end or the other end of the third conductive member The portion is close to or in contact with the side surface and the bottom surface inside the one recess, and the intermediate portion of the third conductive member is held by the intermediate portion of the elastic member.

  With this configuration, when the first conductive member or the second conductive member is held and coupled to one end portion or the other end portion of the elastic member and the third conductive member is inserted into the coil spring, the insertion portion is located further in the insertion direction than the intermediate portion of the coil spring. When the coil spring is in close contact with each other, one end portion or the other end portion of the third conductive member approaches or comes into contact with the bottom surface of the recess of the first conductive member or the second conductive member, and the intermediate portion of the third conductive member is elastic. It will be automatically held by the middle part of the member, and assembly can be facilitated.

  In this case, if the inner diameter of one end or the other end or both ends of the coil spring is larger than the inner diameter of the intermediate portion, the operation such as insertion of the third conductive member into the coil spring is performed. More improved.

  Furthermore, in the both-end displacement contact probe of the present invention, each of the first conductive member and the second conductive member protrudes to the one end in the axial direction from the flange portion that contacts the end surface of the coil spring. A conducting portion, a fitting portion protruding from the flange portion on the other side in the axial direction and fitted into a corresponding end inner periphery of the coil spring with a predetermined radial pressure, and axially inward of the fitting portion And a hole into which one end or the other end of the third conductive member is inserted.

  With this configuration, the depth of the hole can be set as appropriate to ensure a required both-end displacement stroke, and a self-holding function by the elastic members of the first conductive member and the second conductive member is generated. In other words, it is not necessary to carry out a retaining process or the like that increases man-hours. Further, the first conductive member and the second conductive member can be easily shared.

  The third conductive member may be made of a material having a higher conductivity than the first conductive member. Thereby, the electrical conductivity of the member having a long conduction path is increased, and preferable electrical characteristics are obtained.

  Further, when the third conductive member is made of a copper-based metal having a higher conductivity than the first conductive member, and the first conductive member is made of a conductive metal material harder than the third conductive member, As well as ensuring the mechanical characteristics, the wear resistance and durability of the first conductive member are enhanced.

Further, by making the second conductive member made of a material having a higher conductivity than the first conductive member, a required electrical connection on the test apparatus side can be stably secured.
The first conductive member and the second conductive member may be made of a conductive material equivalent to that of the third conductive member. If the material satisfies the electrical characteristics and other required characteristics, the required electrical and mechanical characteristics can be secured by using a material having substantially the same electrical conductivity.

  According to the present invention, conduction between the first conductive member and the second conductive member is performed via the third conductive member, and the intermediate portion of the elastic member interposed between the first conductive member and the second conductive member Since the third conductive member is stably held in a predetermined posture slidable on both the conductive members, stable both-end displacement by the first conductive member and the second conductive member and securing of electrical contact are compatible. The obtained double-ended displacement contact probe can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
1 to 3 are views showing a double-ended displacement contact probe according to a first embodiment of the present invention.

  First, the configuration will be described with reference to FIG. 1. The both-end-displacement contact probe (hereinafter, also simply referred to as a probe) of the present embodiment is a first conductive member that constitutes an electrical contact portion at each end in the axial direction. 11 and the second conductive member 12, and the entirety thereof is arranged in a socket 20 of a test apparatus (not shown) with a partition wall portion 23 at a predetermined pitch (a constant interval in the left-right direction in FIG. 1) in parallel with each other. It is installed.

  A compression coil spring 13 is interposed between the first conductive member 11 and the second conductive member 12, and contact portions 11a and 12a which are outer ends of the first conductive member 11 and the second conductive member 12 are Each is biased so as to be axially displaceable by the compression coil spring 13 and protrudes outward from the socket 20. In addition, each of the first conductive member 11 and the second conductive member 12 is formed to have a larger diameter than the contact portions 11a and 12a, and at one end face of the compression coil spring 13 on the proximal end side of the contact portions 11a and 12a. Flange portions 11f and 12f that are in contact with each other, and fitting portions 11e and 12e that protrude inwardly from the flange portions 11f and 12f (on the other side in the axial direction) and are fitted on the corresponding inner periphery of the compression coil spring 13, These fitting portions 11e, 12e have bottomed or penetrating holes 11c, 12c extending in the radial direction inward in the radial direction. The contact portions 11 a and 12 a of the first conductive member 11 and the second conductive member 12 are conductive portions that protrude from the flange portions 11 f and 12 f to one side in the axial direction, respectively, and guide hole portions 21 and 22 of the socket 20. Thus, it is held so as to be displaceable (slidable) in the axial direction.

  The first conductive member 11 that frequently engages and disengages from the inspection object is made of a hard metal material having high conductivity and wear resistance, such as titanium (Ti) metal and carbon steel (SK), and is a test substrate. The second conductive member 12 engaged with the side is not required to be as hard as the first conductive member 11, and is made of a copper-based metal such as phosphor bronze, brass or beryllium copper. The first conductive member 11 and the second conductive member 12 can each be easily turned by using a material having free cutting ability.

  The compression coil spring 13 can be formed of any cross-sectional shape and material (for example, a piano wire for spring, stainless steel wire, or plastic), and is more conductive than the first conductive member 11 and the second conductive member 12. Is a member that is not required. Further, the compression coil spring 13 is configured so that when the first conductive member 11 and the second conductive member 12 are closer than a predetermined interval in the axial direction, both the conductive members 11 and 12 are arranged in a direction in which the interval is expanded (vertical direction in the drawing). It is a hollow elastic member to be urged. The elastic member here can be formed not only of metal, but also of a viscoelastic material such as rubber, plastic, or a composite product thereof. It is good also as a cylinder shape which has the some band-shaped bending part and opening part which were bent or curved.

  In the present embodiment, the compression coil spring 13 is formed of an unequal pitch coil spring having an intermediate portion smaller than both end portions 13a and 13b (other portions). A so-called tightly wound compression coil spring, that is, the inner diameters of both end portions 13a and 13b of the compression coil spring 13 are larger than the inner diameter of the intermediate portion 13c of the compression coil spring 13. It has a spring shape. The overall shape of the compression coil spring 13 is not limited to a zigzag shape, and may be a normal cylindrical shape, a conical shape, or other shapes, and the spring wire is not limited to a circular cross section (for example, a square shape). It may be a cross section).

  The first conductive member 11 and the second conductive member 12 are electrically connected by the third conductive member 14 housed in the compression coil spring 13. The third conductive member 14 is made of a material having a higher conductivity than the first conductive member 11 or a material having a higher conductivity than the both conductive members 11 and 12, and is formed of a copper-based metal such as oxygen-free copper or beryllium copper, for example. Has been. The third conductive member 14 extends in a direction that is substantially parallel to the axial direction of the compression coil spring 13 but slightly tilted (substantially in the axial direction; in the drawing, the tilt is exaggerated). The first end 14a of the third conductive member 14 is in the hole 11c of the first conductive member 11, and the second end 14b of the third conductive member 14 is in the hole 12c of the second conductive member 12, respectively. It is slidably inserted.

  The third conductive member 14 has an intermediate portion 14c located between the first end portion 14a and the second end portion 14b. The intermediate portion 14c is the first end portion 14a and the second end portion 14b. It has a larger diameter. The intermediate portion 14c having an enlarged diameter of the third conductive member 14 has, for example, a disc shape whose outer peripheral surface has an arc shape or a “<” shape cross section, A shape in which an annular groove or a spiral groove is formed, a shape in which a plurality of convex portions are formed at a predetermined interval in the circumferential direction, and the like are not particularly limited. The third conductive member 14 is not required to be as hard as the first conductive member 11.

  In addition, the turning process etc. can be facilitated by using the material with free-cutting property for the 3rd conductive member 14, and the 3rd conductive member 14 is forged using the material with good extensibility. It is also possible. Furthermore, in the present embodiment, the intermediate portion 14c of the third conductive member 14 is formed integrally with the first end portion 14a and the second end portion 14b from the same material. It is also possible to form the end portion 14a and the second end portion 14b from a different material.

  Both end portions 13a and 13b of the compression coil spring 13 are formed so as to have smaller inner diameters than the fitting portions 11e and 12e of the first conductive member 11 and the second conductive member 12, respectively. When the fitting portions 11e and 12e of the first conductive member 11 and the second conductive member 12 are respectively fitted, the fitting portions 11e and 12e are tightened from the both end portions 13a and 13b of the compression coil spring 13 with a predetermined radial pressure. It has become. That is, the compression coil spring 13 has one end portion 13a that holds and couples the first conductive member 11, and the other end portion 13b that holds and couples the second conductive member 12, thereby self-holding the displacement portions at both ends of the probe. It comes to show the function. In addition, on the outer periphery of the fitting portions 11e and 12e of the first conductive member 11 and the second conductive member 12, coupling strengthening concave portions 11n and 12n (not shown in detail) are provided, for example, an annular groove, a spiral groove, a D-cut groove, at least a pair of It can be formed in a form such as a parallel groove, and the holding coupling can be structured not only with a tightening force but also with a function of preventing the removal. Further, the inner end portions of the fitting portions 11e and 12e of the first conductive member 11 and the second conductive member 12 can be chamfered on the outer periphery, or can be partially or entirely inclined at a predetermined taper angle.

  The intermediate portion 13c of the compression coil spring 13 holds the third conductive member 14 in a predetermined posture so that the third conductive member 14 can stably slide on the first conductive member 11 and the second conductive member 12. Thus, the inner diameter of the intermediate portion 13c is smaller than the outer diameter of the intermediate portion 14c of the third conductive member 14 whose diameter is increased by a predetermined dimension. Thereby, for example, the outer periphery of the intermediate portion 14c of the third conductive member 14 enters the valley between the wire rods near the inner periphery of the intermediate portion 13c of the compression coil spring 13, and is in contact with a part of the remaining half periphery. Thus, a stable inclination posture of the third conductive member 14 is obtained.

  Next, a method for assembling the both-end displacement contact probe of this embodiment will be described with reference to FIG.

  First, as shown in FIG. 2A, either the first conductive member 11 or the second conductive member 12, for example, the fitting portion 12 e of the second conductive member 12 is fitted into the other end portion 13 b of the compression coil spring 13. At the same time, the other end portion 13 b of the compression coil spring 13 is engaged with the flange portion 12 f of the second conductive member 12, and the second conductive member 12 is held and coupled to the other end portion 13 b of the coil spring 13. At this time, the coil spring 13 and the second conductive member 12 are held so that they can be separated when an extraction force of a certain value or more is applied without being easily removed by normal conveyance, vibration, and drop impact after assembly. It becomes a combined state.

  Next, the third conductive member 14 is inserted straight along the central axis of the second conductive member 12 from the second end 14b side through the compression coil spring 13 toward the hole 12c formed in the second conductive member 12. (Refer to FIG. 2A and FIG. 2B). Thereby, it will be in the state where the wire rod of compression coil spring 13 was compressed, for example, the state almost stuck, in the insertion direction direction side rather than middle part 13c of compression coil spring 13 (refer to Drawing 2 (b)).

  At this time, the first end portion 14a or the second end portion 14b of the third conductive member 14 is in contact with both the side surface and the bottom surface of one hole portion 12c formed in the second conductive member 12, or the The intermediate portion 14 c of the third conductive member 14 enters and is held in the intermediate portion 13 c of the compression coil spring 13 in contact with one side and close to the other.

  At this time, if the second end 14b of the third conductive member 14 is brought into contact with the bottom surface of the hole 12c of the second conductive member 12, as shown in FIG. 13 is the sum (h1 + h2) of the compression height h1 of the lower half in the drawing and the depth h2 from the spring receiving surface of the flange portion 12f to the bottom surface (contact point) of the recess 12c. The linearity and shape of the compression coil spring 13 and the depth h2 of the hole 12c are set so as to be equal to the length (Lp / 2) that is approximately ½ of the length. The total length of the hole 12c is the sum of the insertion depth h3 and the depth h2 (h2 + h3) necessary for holding and coupling the insertion portion 12e of the second conductive member 12 to the other end portion 13b of the compression coil spring 13. ) Is set.

  Further, the inner diameter d1 of the hole 12c of the second conductive member 12 is set such that the third conductive member 14 has a central axis of the second conductive member 12 with respect to the outer diameter d2 of the second end 14b of the third conductive member 14. In consideration of the inclination θ of the central axis, the appropriate gap g for sliding between the second conductive member 12 and the third conductive member 14, and the reduction amount e due to the dimensional tolerance of the combination of components, etc. It is set large with a predetermined dimensional margin (d1 ≧ d2 / cos θ + g + e; g> (h1 + h2) sin θ).

  When the intermediate portion 14c of the third conductive member 14 is held and coupled into the intermediate portion 13c of the compression coil spring 13, the fitting portion 11e of the remaining first conductive member 11 is then inserted as shown in FIG. While being fitted into one end portion 13 a of the compression coil spring 13, the flange portion 11 f of the first conductive member 11 is in contact with the other end portion 13 b of the compression coil spring 13, so that the first conductive member 11 is in addition to the compression coil spring 13. It is held and coupled to the end 13b. At this time, the third conductive member 14 has an inclination larger than the final inclination θ with respect to the central axis of the first conductive member 11 or the second conductive member 12, and the inclination is the hole 12 c of the second conductive member 12. Is regulated within a predetermined angle range. Further, by applying appropriate chamfering or the like to the entrance portion of the hole portion 12c of the second conductive member 12 or the first end portion 14a of the third conductive member 14, the third conductive material is introduced into the hole portion 12c of the second conductive member 12. The first end portion 14a of the member 14 can be surely inserted, and when the one end portion 13a of the compression coil spring 13 is brought into a close contact state, the first end portion 14a of the third conductive member 14 is the second end portion 14a. The first conductive member 11 is held and coupled to the one end portion 13 a of the compression coil spring 13 while substantially contacting the bottom surface of the hole 12 c of the conductive member 12.

  Next, the operation will be described.

  In the both-end displacement contact probe of the present embodiment configured as described above, as shown in FIG. 3, the first connection terminal of the inspection object 30 such as an IC package to be tested or an integrated circuit is built. The contact portion 11a of the conductive member 11 contacts, and the contact portion 12a of the second conductive member 12 contacts the connection terminal 41 of the test board 40 constituting the inspection device or the diagnostic device. The compression coil spring 13 allows displacements S1 and S2 at both ends of the probe by both contact portions 11a and 12a, and is necessary for making electrical connection to the first conductive member 11 and the second conductive member 12. Contact pressure is applied.

  1 to 3, only a part of the test apparatus related to the single-end-displacement contact probe is illustrated, but the above-described configuration and the structure of electrical connection are not illustrated. The same is true for.

  As described above, in the both-end displacement contact probe of the present embodiment, conduction between the first conductive member 11 and the second conductive member 12 is performed via the third conductive member 14 having high conductivity. The member 14 is stably held by the intermediate portion 13c of the compression coil spring 13 in a predetermined posture that can slide on the first conductive member 11 and the second conductive member 12. Therefore, stable axial displacement at both ends of the probe and securing of electrical contact can be achieved at the same time. In addition, for each of the first conductive member 11, the second conductive member 12, and the third conductive member 14, an optimum material can be selected from the viewpoint of required wear resistance, conductivity, workability, and the like. A material capable of ensuring the required conductivity can be selected for the third conductive member 14 having a long path, and a material having a suitable hardness can be selected for the first conductive member 11 requiring wear resistance. Furthermore, selection of lead-free compatible materials can be facilitated. Further, since the sliding portions are distributed on the first conductive member 11 side and the second conductive member 12 side, the depths of the holes 11c and 12c of both the conductive members 11 and 12 are set to a required both-end displacement stroke. The depth can be reduced to about half, and it is not necessary to drill a deep hole as in the conventional barrel, and the cost can be reduced.

  In the present embodiment, since the first conductive member 11 and the second conductive member 12 are held and coupled to the one end 13a and the other end 13b of the compression coil spring 13, respectively, the first conductive member 11 and the second conductive member are connected. The member 12 can have a short axial length and a simple shape, and high dimensional control is required for the sliding portions of the first conductive member 11 and the second conductive member 12 and the third conductive member 14. Absent.

  Further, in the present embodiment, the first conductive member 11 or the second conductive member 12 is held and coupled to one end 13 a or the other end 13 b of the compression coil spring 13, and the third conductive member 14 is inserted into the compression coil spring 13. Then, at the same time as the compression coil spring 13 is compressed further in the insertion direction than the intermediate portion 13c of the compression coil spring 13, the first end portion 14a or the second end portion 14b of the third conductive member 14 is the first conductive member. 11 or the second conductive member 12 is in contact with the inner side surface and bottom surface of the hole 11c or 12c, and the intermediate portion 14c of the third conductive member 14 is automatically held by the intermediate portion 13c of the compression coil spring 13. become. Therefore, assembly is easy.

  In this case, the inner diameter D1 of the one end portion 13a or the other end portion 13b of the compression coil spring 13 or the both end portions 13a and 13b is larger than the inner diameter D3 of the intermediate portion 13c. Workability such as insertion into the compression coil spring 13 is improved.

  Furthermore, in the both-end displacement contact probe of the present embodiment, the required both-end displacement stroke by the first conductive member 11 and the second conductive member 12 is set by appropriately setting the depths (h2 + h3) of the holes 11c and 12c. (S1 + S2) can be ensured, and the self-holding function of the first conductive member 11 and the second conductive member 12 by the compression coil spring 13 is generated, so that there is no need for a retaining process that requires a lot of assembly work. It becomes. Further, the first conductive member 11 and the second conductive member 12 can be mechanically the same shape, and both the conductive members 11 and 12 can be shared.

(Embodiment 2)
FIG. 4 is a view showing a double-ended displacement contact probe according to the second embodiment of the present invention. In this embodiment, the shape of the contact portions of the first conductive member and the second conductive member is different from that of the first embodiment, and both the conductive members are made to have the same shape so as to be shared. In addition, a straight cylindrical compression coil spring is employed for the compression coil spring, which is an elastic member, instead of the above-described pinching shape, and other configurations are the same as those of the above-described embodiment. Therefore, the same components as those described above will be described with the same reference numerals as those in the above embodiment.

  As shown in FIG. 4, the both-end-displacement contact probe of this embodiment has a first conductive member 51 and a second conductive member 52 that respectively constitute an electrical contact portion on both ends in the axial direction. A plurality of sockets 20 are arranged in parallel with each other at a predetermined pitch (a constant interval in the left-right direction in FIG. 4).

  Between the first conductive member 51 and the second conductive member 52, a compression coil spring 53 having a cylindrical shape (the intermediate portion may be slightly smaller in diameter) is interposed, and the first conductive member 51 and the second conductive member 52 are interposed. Contact portions 51 a and 52 a which are outer end portions of the conductive member 52 protrude outward from the socket 20 so as to be axially displaceable. In addition, each of the first conductive member 51 and the second conductive member 52 is formed to have a larger diameter than the contact portions 51a and 52a, and one end face of the compression coil spring 53 on the proximal end side of the contact portions 51a and 52a. Flange portions 51f and 52f that are in contact with each other, and fitting portions 51e and 52e that protrude inward (on the other side in the axial direction) from these flange portions 51f and 52f and are fitted into the corresponding inner periphery of the compression coil spring 53, These holes 51c and 52c have bottomed or penetrating holes that extend in the axial direction inside the fitting portions 51e and 52e. The contact portions 51a and 52a of the first conductive member 51 and the second conductive member 52 are conductive portions that protrude from the flange portions 51f and 52f to one side in the axial direction, respectively.

  When the first conductive member 51 and the second conductive member 52 are closer than the predetermined interval in the axial direction, the compression coil spring 53 biases both the conductive members 51 and 52 in the direction of expanding the interval (vertical direction in the figure). This is a hollow elastic member. In the present embodiment, the compression coil spring 53 is formed of an unequal pitch cylindrical coil spring whose intermediate portion 53c is smaller than both end portions 53a and 53b (other portions). The inner diameters of both end portions 53a and 53b of 53 are substantially the same as the inner diameter of the intermediate portion 53c of the compression coil spring 53 (the inner diameter of the intermediate portion 53c may be slightly smaller).

  The first conductive member 51 and the second conductive member 52 are electrically connected to the third conductive member 14 formed of a metal material having high conductivity, for example, a copper-based metal and housed in the compression coil spring 53. In order to facilitate the insertion, the outer peripheral surface of the intermediate portion 14c has, for example, a cross-sectional arc shape. The third conductive member 14 extends in a direction that is substantially parallel to the axial direction of the compression coil spring 53 but slightly tilted (substantially in the axial direction; in the drawing, the tilt is exaggerated). The first end 14a of the third conductive member 14 is in the hole 51c of the first conductive member 51, and the second end 14b of the third conductive member 14 is in the hole 52c of the second conductive member 52, respectively. It is slidably inserted.

  Both end portions 53a and 53b of the compression coil spring 53 have inner diameters larger than the fitting portions 51e and 52e of the first conductive member 51 and the second conductive member 52, respectively, as in the case of the compression coil spring 13 of the above-described embodiment. When the fitting portions 51e and 52e of the first conductive member 51 and the second conductive member 52 are fitted into the compression coil spring 53, respectively, the fitting portions 51e and 52e are formed on the compression coil spring 53. The two ends 53a and 53b are fastened with a predetermined radial pressure. That is, the compression coil spring 53 has one end 53a that holds and couples the first conductive member 51 and the other end 53b that holds and couples the second conductive member 52, thereby self-holding the displacement portions at both ends of the probe. It comes to show the function. In addition, on the outer circumferences of the fitting portions 51e and 52e of the first conductive member 51 and the second conductive member 52, recesses 51n and 52n for strengthening the coupling as shown by phantom lines in the drawing can be formed, and the first conductive member As described in the above embodiment, the outer peripheries of the inner end portions of the fitting portions 51e and 52e of the first conductive member 51 and the second conductive member 52 can be chamfered or partially or entirely inclined at a predetermined taper angle.

  The compression coil spring 53 further includes an intermediate portion 53c that holds the intermediate portion 14c of the third conductive member 14 in a predetermined posture so that the third conductive member 14 can slide on the first conductive member 51 and the second conductive member 52. The inner diameter of the intermediate portion 53c is smaller than the outer diameter of the intermediate portion 14c of the third conductive member 14 by a predetermined dimension.

  Also in the both-end displacement contact probe of the present embodiment configured as described above, conduction between the first conductive member 51 and the second conductive member 52 is made through the third conductive member 14, and this third conductive member. 14 is stably held by the intermediate portion 53c of the compression coil spring 53 in a predetermined posture slidable by the first conductive member 51 and the second conductive member 52. It is possible to achieve both secure contact. Further, since the first conductive member 51 and the second conductive member 52 are held and coupled to the one end portion 53a and the other end portion 53b of the compression coil spring 53, respectively, the first conductive member 51 and the second conductive member 52 are axially long. Therefore, the slidable portion between the first conductive member 51, the second conductive member 52, and the third conductive member 14 is not required to have high dimensional management.

  In addition, even if the depth of the holes 51c and 52c is relatively shallow, the first conductive member 51 and the second conductive member 52 can ensure a large both-end displacement stroke close to the sum of these hole depths. The part processing cost can be reduced, and the self-holding function of the first conductive member 51 and the second conductive member 52 by the compression coil spring 53 is generated, and the assembly cost can also be reduced.

  Furthermore, since the first conductive member 51 and the second conductive member 52 can be used in common, not only can the manufacturing cost be reduced, but the shape of both ends of the contact probe in the axial direction is the same and the directionality is lost. Therefore, handling and assembly to the socket 20 can be facilitated.

  In the above-described expanded embodiment, the third conductive member 14 has a disk-shaped intermediate portion 14c, and the shape of both ends thereof is shown in a conical shape, but the shape of the intermediate portion of the third conductive member is The outer peripheral portion may include a circumferential portion and a flat surface, may have a predetermined number of parallel surfaces, may be made of metal or resin having protrusions or annular or spiral ridges. Further, the shaft portion and the intermediate portion constituting both end portions of the third conductive member are configured as separate pieces, and the intermediate portion is provided with a plurality of engaging protrusions having a specific shape for exhibiting a required holding function. In this case, a retainer that holds the intermediate portion of the third conductive member is attached to the elastic member side, and the third conductive member is not expanded or reduced in diameter. It is also conceivable to hold the member.

  In addition, in order to clarify the contact points at both ends of the third conductive member, a portion having an enlarged diameter at both ends, or an annular recess having an appropriate length located in the recess of the first and second conductive members is provided. It may be provided. Furthermore, it is not always necessary to dispose both end portions and the intermediate portion of the third conductive member on the same axis, and both end portions of the third conductive member are slightly decentered with respect to the central axes of the first and second conductive members. In addition, a stable sliding method in which the third conductive member arranged in an eccentric middle part is not inclined so as to be parallel to each other, or the inner peripheral surface and / or the bottom surface of the concave portion of the first and second conductive members is the first and second As a sliding surface having a gentle inclination angle with respect to the axis of the conductive member, it is also possible to increase the sliding contact pressure between these and the third conductive member only when the first and second conductive members are approaching. In addition, the first conductive member and the second conductive member are substantially the same as the third conductive member as long as the material satisfies the electrical characteristics and other required characteristics (for example, wear resistance, strength, ease of processing, etc.). Needless to say, it may be formed of a material having an equivalent electrical conductivity, and even in such a case, required electrical and mechanical characteristics can be ensured.

  As described above, according to the present invention, the first conductive member and the second conductive member are electrically connected via the third conductive member, and the intermediate portion of the compression coil spring 13 interposed between the two conductive members is used. Since the third conductive member is stably held in a predetermined slidable manner on the first conductive member and the second conductive member, stable both-end displacement and electrical contact by the first conductive member and the second conductive member The contact probe using springs, especially the annealing test of wafers incorporating IC packages and integrated circuit elements, and other test equipment and sockets for inspection are equipped. Useful for double-ended displacement contact probes.

It is the front sectional drawing which shows schematic structure of the both-ends displacement type contact probe which concerns on the 1st Embodiment of this invention with a part of socket for a test | inspection. It is explanatory drawing explaining the assembly system of the both-ends displacement type contact probe which concerns on the 1st Embodiment of this invention. It is the front sectional view which shows the mounting state and operation state at the time of a test of the both-ends displacement type contact probe concerning a 1st embodiment of the present invention. It is the front sectional drawing which shows schematic structure of the both-ends displacement type contact probe which concerns on the 2nd Embodiment of this invention.

Explanation of symbols

11, 51 First conductive member 11a, 12a, 51a, 52a Contact part 11c, 12c, 51c, 52c Hole part 11e, 12e, 51e, 52e Insertion part 11f, 12f, 51f, 52f Flange part 11n, 12n, 51n, 52n Coupling reinforcement recesses 12 and 52 Second conductive members 13 and 53 Compression coil spring (elastic member)
13a, 53a One end portion 13b, 53b The other end portion 13c, 53c Intermediate portion 14 Third conductive member 14a First end portion 14b Second end portion 14c Intermediate portion 20 Socket 30 Test object 40 Test board 41 Connection terminal

Claims (10)

A first conductive member and a second conductive member, each of which constitutes an electrical contact portion;
A hollow elastic member that urges both the conductive members in a direction to expand the interval when the first conductive member and the second conductive member are closer than a predetermined interval in the axial direction;
A third conductive member housed in the elastic member and extending in the axial direction,
The elastic member has one end portion holding and coupling the first conductive member, the other end portion holding and coupling the second conductive member, and the third conductive member as the first conductive member and the second conductive member. A double-ended displacement contact probe characterized by having an intermediate portion that is held in a predetermined slidable posture.   The double-ended displacement contact probe according to claim 1, wherein the elastic member is constituted by a coil spring in which the intermediate portion has a smaller pitch than other portions.   The double-ended displacement contact probe according to claim 1 or 2, wherein the elastic member is configured by a coil spring having the intermediate portion in close contact winding. A pair of recesses for accommodating one end portion and the other end portion of the third conductive member are formed at portions of the first conductive member and the second conductive member facing in the axial direction,
The third conductive member has an intermediate portion having a larger diameter than the one end and the other end;
The third conductive member is inserted through the coil spring toward one of the recesses formed in either the first conductive member or the second conductive member, and on the far side in the insertion direction from the intermediate portion of the coil spring. When the coil spring is compressed, one end portion or the other end portion of the third conductive member approaches or abuts the side surface and the bottom surface inside the one recess, and the intermediate portion of the third conductive member is elastic. 4. The both-end-displacement contact probe according to claim 2, wherein the contact probe is held at an intermediate portion of the member.   5. The both-end displacement contact probe according to claim 2, wherein an inner diameter of one end portion or the other end portion or both end portions of the coil spring is larger than an inner diameter of the intermediate portion.   Each of the first conductive member and the second conductive member includes a flange portion that abuts on an end face of the coil spring, a conductive portion that protrudes from the flange portion to one axial direction, and the other axial direction from the flange portion. And an end portion of the third conductive member that extends in the axial direction inside the insertion portion and is fitted into the inner periphery of the corresponding end portion of the coil spring with a predetermined radial pressure. 6. The both-end-displacement contact probe according to claim 2, further comprising a hole portion into which the other end portion is inserted.   The double-ended displacement contact probe according to any one of claims 1 to 6, wherein the third conductive member is made of a material having a higher conductivity than the first conductive member.   The third conductive member is made of a copper-based metal having a higher conductivity than the first conductive member, and the first conductive member is made of a conductive metal material harder than the third conductive member. 8. A double-ended displacement contact probe according to item 7.   The double-ended displacement contact probe according to any one of claims 1 to 8, wherein the second conductive member is made of a material having a higher conductivity than the first conductive member.   The both-end displacement contact probe according to claim 1, wherein each of the first conductive member and the second conductive member is made of a conductive material equivalent to the third conductive member.

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