KR101841107B1

KR101841107B1 - Bifurcated probe apparatus

Info

Publication number: KR101841107B1
Application number: KR1020160051644A
Authority: KR
Inventors: 정영배
Original assignee: 주식회사 아이에스시
Priority date: 2016-04-27
Filing date: 2016-04-27
Publication date: 2018-03-22
Also published as: KR20170122536A; WO2017188595A1; TWI641838B; TW201738569A

Abstract

The present invention relates to a barrel having a hollow cylinder shape and including a barrel having both ends opened to have a first opening and a second opening, an intermediate member disposed to be slidable along the inner circumferential surface of the barrel, A second plunger disposed so as to partially protrude from the second opening along the longitudinal direction of the barrel, a second plunger disposed between the first plunger and the intermediate member to elastically support the first plunger, 1 elastic member and a second elastic member disposed between the second plunger and the intermediate member and elastically supporting the second elastic member.

Description

{BIFURCATED PROBE APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dual-type probe apparatus, and more particularly, to a dual-probe apparatus capable of enhancing inspection reliability by facilitating electrical connection.

2. Description of the Related Art In recent years, a test apparatus and a test socket having a plurality of contact probes between a connection terminal of a semiconductor package for testing or a connection terminal of a wafer and a connection terminal of a test circuit board have been used in a semiconductor wafer testing apparatus for semiconductor packages or integrated circuits In particular, a double-ended slide type probe is used in which a contact pressure is given and an impact is absorbed at a contact position by providing an elastic member between the contact portions at both ends of the contact probe.

In the above-described both-end slide type probe, for example, a configuration is known in which a head portion of a plunger in a barrel is slidably supported and a compression coil spring is interposed between the plunger head portion and the inner peripheral surface of the barrel .

However, in the conventional both-end slide type probe, although the plunger and the barrel, which are electrical contact members, are disposed on the same straight line with the barrel to smooth the electrical connection, the electric signal transmitted from the plunger is partially transmitted to the compression coil spring , A lot of impedance components are generated in the process of passing the electric signal transmitted to the barrel through the plunger as much as the axial length of the barrel, and the loss and distortion of the electric signal are generated.

Japanese Patent Application Laid-Open No. 2000-346872 (disclosed on December 15, 2000)

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a dual type probe apparatus capable of improving the reliability of inspection.

The present invention has been made in view of the above problems, and it is an object of the present invention to provide a method of manufacturing the same.

According to an aspect of the present invention, there is provided a barrel having a hollow cylinder and having both ends opened to have a first opening and a second opening, the first barrel being slidable along an inner circumferential surface of the barrel, A first plunger arranged to partially protrude from the first opening along the longitudinal direction of the barrel, a second plunger disposed along the longitudinal direction of the barrel so as to protrude along the longitudinal direction of the barrel, A first plunger disposed between the first plunger and the intermediate member so as to partially protrude from the second opening, a first elastic member disposed between the first plunger and the intermediate member and elastically supporting the first plunger, and a second elastic member disposed between the second plunger and the intermediate member, 2 elastic members.

The first plunger may have an elastic supporting portion protruding in a conical shape on a surface facing the first elastic member, and a first contact portion contacting the terminals of the semiconductor package may be formed on the opposite side.

The second plunger may have an elastic support portion protruding in a conical shape on a surface facing the second elastic member, and a second contact portion contacting the contact pad located on the test board may be formed on the opposite side.

The first elastic member and the second elastic member may be coil springs.

The first elastic member and the second elastic member may have the same coil pitch.

The outer diameter of the first elastic member and the second elastic member may be smaller than the inner diameter of the barrel, and an insulating member may be formed on the surfaces of the first elastic member and the second elastic member.

The first elastic member and the second elastic member may each include an elastic rubber.

The first opening and the second opening of the barrel may be formed with a sealing portion bent to be in close contact with the outer circumferential surfaces of the first plunger and the second plunger.

The outer diameter of the portion of the first plunger and the second plunger located inside the barrel may be larger than the inner diameter of the sealing portion.

An annular engaging groove is formed in a circumferential direction on an outer circumferential surface of a portion of the first plunger located inside the barrel, and a locking protrusion protruding radially inwardly of the engaging groove to be inserted into the engaging groove is formed in the barrel have.

The latching protrusion may be formed by a roll caulking process.

The intermediate member may be made of a conductive member.

The details of other embodiments are included in the detailed description and drawings.

The embodiments of the present invention have at least the following effects.

That is, the dual-purpose probe according to the embodiments of the present invention can stabilize the propagation path and minimize the impedance on the propagation path so that the high-frequency electric signal can be transmitted without distortion.

The effects according to the present invention are not limited by the contents exemplified above, and more various effects are included in the specification.

1 is a cross-sectional view of a dual-type probe apparatus according to a first embodiment of the present invention.
FIGS. 2 to 4 illustrate the operation of a dual-type probe according to an embodiment of the present invention.
5 is a cross-sectional view of a dual-type probe apparatus according to a second embodiment of the present invention.
6 is a cross-sectional view of a dual-type probe apparatus according to a third embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and the manner of achieving them, will be apparent from and elucidated with reference to the embodiments described hereinafter in conjunction with the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. To fully disclose the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims.

The terminology used herein is for the purpose of illustrating embodiments and is not intended to be limiting of the present invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. It is to be understood that the terms comprise and / or comprise are used in a generic sense to refer to the presence or addition of one or more other elements, steps, operations and / or elements other than the stated elements, steps, operations and / It is used not to exclude. And "and / or" include each and any combination of one or more of the mentioned items.

Further, the embodiments described herein will be described with reference to cross-sectional views and / or schematic drawings that are ideal illustrations of the present invention. Thus, the shape of the illustrations may be modified by manufacturing techniques and / or tolerances. Accordingly, the embodiments of the present invention are not limited to the specific forms shown, but also include changes in the shapes that are generated according to the manufacturing process. In addition, in the drawings of the present invention, each component may be somewhat enlarged or reduced in view of convenience of explanation. Like reference numerals refer to like elements throughout the specification.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described with reference to the accompanying drawings, which illustrate a bispecific probe according to embodiments of the present invention.

1 is a cross-sectional view of a dual-type probe apparatus according to a first embodiment of the present invention.

1, the dual-purpose probe according to the first embodiment of the present invention includes a barrel 100, an intermediate member 200, a first plunger 210, a second plunger 220, A second elastic member 310, and a second elastic member 320.

The barrel 100 may have a hollow shape with a hollow interior and a circular cross-sectional shape. The barrel 100 may have a first opening 101 and a second opening 102, both ends of which are opened along the longitudinal direction of the barrel 100, . The sealing portions 100a and 100b are formed in the first opening 101 and the second opening 102 so that the first plunger 210 and the second plunger 220 described below are not completely separated from the barrel 100 .

The sealing portions 100a and 100b are formed by bending the ends of the first and second openings 101 and 102 so as to surround the exposed outer peripheral surfaces of the first plunger 210 and the second plunger 220 . The diameters of the large diameter portions 210b and 220b located inside the barrel 100 of the first plunger 210 and the second plunger 220 are set to be larger than the diameters of the sealing portions 100a and 100b The first plunger 210 and the second plunger 220 are separated from the barrel 100 while the barrel 100 is moving in the longitudinal direction of the barrel 100 .

The barrel 100 may be formed of a metal material having electrical conductivity. For example, an electrically conductive metal plate material may have a predetermined elongation property and an excellent elasticity and strength and a low electrical resistance through heat treatment. In particular, beryllium copper 25 alloy ASTM C17200 and the like can be applied, but any material satisfying mechanical and electrical properties can be applied, and the present invention is not limited thereto.

First and second contact portions 210d and 220d that can be electrically connected to one end of each of the first plunger 210 and the second plunger 220 may be formed. The intermediate member 200 may be disposed between the first plunger 210 and the second plunger 220. That is, the first plunger 210, the intermediate member 200, and the second plunger 220 are disposed in series in the barrel 100 along the longitudinal direction to enable electrical connection between the electrodes and pads of the object to be inspected .

Specifically, the intermediate member 200 is disposed so as to be slidable in contact with the inner circumferential surface of the barrel 100, and at both ends along the longitudinal direction of the intermediate member 200, a first elastic member 310 and a second elastic member 310 Elastic supporting portions 201 and 202 for stably supporting the elastic member 320 may be respectively formed. In this embodiment, both ends of the elastic member 310 protrude in a conical shape toward the sides of the first elastic member 310 and the second elastic member 320. However, The present invention is not limited thereto.

Further, in the present invention, the intermediate member 200 may be made of a conductive member. At this time, since the intermediate member 200 is disposed so as to be slidable in contact with the inner circumferential surface of the barrel 100, electrical connection is also established between the barrel 100 and the intermediate member 200 in this case.

The first plunger 210, the second plunger 220 and the intermediate member 200 may all be disposed coaxially with the barrel 100. The first contact portion 210d exposed from the barrel 100 of the first plunger 210 and the second contact portion 220d exposed from the barrel 100 of the second plunger 220 are electrically connected to the electrodes And the pad with appropriate contact pressure.

The first contact portion 210d of the first plunger 210 may refer to a portion of the object to be inspected which contacts the terminal 11 of the semiconductor package 10. [ The second contact portion 220d of the second plunger 220 may refer to a portion of the test board 20 contacting the contact pad 21.

In other words, the first contact portion 210d formed on the upper end surface of the first plunger 210 and the second contact portion 220d formed on the lower end surface of the second plunger 220 are in direct contact with the terminals and the contact pads May be formed in various shapes to secure mutual contact areas with terminals, contact pads, and the like. For example, in the case of contacting a terminal of a semiconductor package, the terminal may be formed in a crown shape in which the central portion is recessed and the peripheral portion thereof is protruded so as to facilitate the terminal, and when the contact pad is in contact with the contact pad of the test board, .

The first contact portion 210d and the second contact portion 220d are preferably made of a conductive material having excellent hardness so as to maintain stable electrical contact with a terminal or a pad of the test substrate even when repeatedly contacting the object to be inspected such as a semiconductor package Do.

The first elastic member 310 disposed between the first plunger 210 and the intermediate member 200 may be a compression coil spring.

When the first elastic member 310 is a compression coil spring, a first resilient supporting portion 210a protruding in a conical shape may be formed on one surface of the first plunger 210 facing the first elastic member 310. Here, the first elastic supporting portion 210a may be any shape that can be partially inserted into the hollow portion of the first elastic member 310 so that one end of the first elastic member 310 can be stably supported. Therefore, It does not.

Likewise, when the second elastic member 320 is a compression coil spring, a second elastic supporting portion 220a protruding in a conical shape is formed on a surface of the second plunger 220 facing the second elastic member 320 And the second elastic supporting portion 220a of the second plunger 220 is coupled to the hollow portion of the second elastic member 320 to be stably supported.

The first elastic member 310 and the second elastic member 320 may be formed to have the same coil pitch. Here, when the intermediate member 200 is disposed at the middle of the total length of the barrel 100, the first elastic member 310 and the second elastic member 320 are formed at the same coil pitch so that the reciprocal movement distances are the same When the intermediate member 200 is not disposed in the middle of the total length of the barrel 100 according to the assembly tolerance or design, the reciprocal movement distance (distance) between the first elastic member 310 and the second elastic member 320 The coils pitches may be different from each other.

The outer diameters of the first elastic member 310 and the second elastic member 320 are smaller than the inner diameter of the barrel 100 and the surfaces of the first elastic member 310 and the second elastic member 320 are insulated Member (not shown) may be further included. The insulating member may be formed on the surface of the first elastic member 310 and the second elastic member 320 by a method such as adhesion, vapor deposition or coating.

When the insulating member is formed on the surfaces of the first elastic member 310 and the second elastic member 320, electrical signals transmitted through the barrel 100 are unnecessarily transmitted to the first elastic member 310 and the second elastic member 320, It is possible to prevent the impedance from being generated.

If the first plunger 210, the second plunger 220, and the intermediate member 200 are not arranged in series on the same axis due to a required tolerance, the first plunger 210, the second plunger 220 And the intermediate member 200 can not be stably moved along the axial direction while maintaining a certain clearance from the inner circumferential surface of the barrel 100 so that irregular contact with the inner circumferential surface of the barrel 100 may occur, , A proper assembly tolerance is required.

Hereinafter, the operation of the dual-purpose probe according to one embodiment of the present invention will be described with reference to the drawings.

FIGS. 2 to 4 illustrate the operation of a dual-type probe according to an embodiment of the present invention.

2, the external terminals 11 of the semiconductor package 10 are spaced apart from each other on the upper side of the barrel 100 for inspection of the semiconductor package, and the contact pads 20 of the test board 20 are disposed on the lower side of the barrel 100, (21) can be located.

3, the external terminals 11 of the semiconductor package 10 and the contact pads 21 of the test board 20 are connected to the first plunger 210 of the barrel 100, The external terminals 11 of the semiconductor package are brought into contact with the first contact portion 210d of the first plunger 210 and the second contact portion 210d of the second plunger 220 is sandwiched toward the second plunger 220, The contact pads 21 of the test board 20 are contacted with the contact pads 220d.

At this time, the first plunger 210 and the second plunger 220 are elastically supported by the first elastic member 310 and the second elastic member 320 in the barrel 100, The semiconductor package 10 and the test board 20 are electrically connected to each other so as to provide sufficient contact pressure to the external terminals 11 and the contact pads 21 as shown in Fig. Signal connection is established. Particularly, as described above, when the intermediate member 200 is made of a conductive member, electrical connection is also made between the barrel 100 and the intermediate member 200.

The first elastic member 310 and the second elastic member 320 may be bent while the first elastic member 310 and the second elastic member 320 are compressed by applying pressure to the upper end of the barrel 100, The outer circumferential surface of the intermediate member 200 is in sliding contact with the inner circumferential surface of the barrel 100 so that the barrel 100 is parallel to the barrel 100 through the intermediate member 200 so that stable electrical connection can be ensured .

Compared to the case of forming the plunger and the elastic member having the length corresponding to the entire length of the barrel 100 as in the conventional case, since the first plunger 210 and the second plunger 220 are divided into two, Since the first elastic member 310 and the second elastic member 320 can be formed in a short length by the intermediate member 200 even if the assembly tolerance occurs, the stability and durability of the spring and the increase in the compression range of the probe device effective.

Therefore, the propagation path is stable and the impedance on the propagation path can be minimized so that the high-frequency electric signal can be transmitted without distortion.

5 is a cross-sectional view of a dual-type probe apparatus according to a second embodiment of the present invention.

The second type of probe according to the second embodiment of the present invention is different from the first embodiment in that the first elastic member and the second elastic member are made of a nonconductive rubber, Therefore, redundant descriptions are omitted.

5, a first elastic rubber 410 is disposed in the barrel 100 between the first plunger 230 and the intermediate member 400 and a second elastic rubber 410 is disposed between the second plunger 240 and the intermediate member 400. [ The second elastic rubber 420 may be disposed. The first elastic rubber 410 and the second elastic rubber 420 may be formed into a cylindrical shape having the same sectional shape as the barrel 100 and formed to have a smaller diameter than the inner diameter of the barrel 100.

One end of the first elastic rubber 410 may be in surface contact with one surface of the first plunger 230 and the other end may be in contact with one surface of the intermediate member 400. Similarly, one end of the second elastic rubber 420 is in surface contact with one surface of the second plunger 240, and the other end is disposed in contact with one surface of the intermediate member 200, so that the first plunger 230 and the second plunger 240 are elastically supported by the first elastic rubber 410 and the second elastic rubber 420 along the longitudinal direction inside the barrel 100 to be slid.

The first elastic rubber 410 is disposed between the first plunger 230 and the intermediate member 400 and the second elastic rubber 420 is disposed between the second plunger 240 and the intermediate member 400 The same conduction path as that of the first embodiment shown in FIG. 4 is formed in the process of electrically connecting through the contact portions 230d and 240d of the first plunger 210 and the second plunger 220, respectively.

6 is a cross-sectional view of a dual-type probe apparatus according to a third embodiment of the present invention.

In the case of FIG. 6A, in comparison with the configuration according to the first embodiment, the pair of plungers is elastically supported by the compression coil spring, 6 (b) is different in that elastic rubber is applied in place of the compression coil spring in the configuration of Fig. 6 (a), and in the case of Fig. 6 Since the other configurations are the same, the redundant description will be omitted.

Hereinafter, a plunger fixed to the barrel among the pair of plungers is defined as a third plunger 250, and the other plunger is defined as a fourth plunger 260. [

The third plunger 250 can be fixed by various means between the outer circumferential surface of the third plunger 250 and the inner circumferential surface of the barrel 100 so that the third plunger 250 can be fixed to the inner circumferential surface of the barrel 100.

For example, the outer circumferential surface of the third plunger 250 may be interference-fit or snap-fit-coupled to the inner circumferential surface of the barrel 100.

An annular engaging groove 250g is formed on the outer circumferential surface of the third plunger 250 and a roll-caulking process is performed inward from the outer side surface of the barrel 100 in the radial direction of the engaging groove 250g As an example. That is, on the outer circumferential surface of the barrel 100 by the roll caulking process, a locking protrusion 100c protruding radially inward of the locking groove 250g and inserted into the locking groove 250g can be formed. The method of fixing the third plunger 250 to the inner circumferential surface of the barrel 100 may be performed by various methods.

When the third plunger 250 is pressed along the compression direction in a state where the terminal and the pad are in contact with the contact portion 250d of the third plunger 250 and the contact portion 260d of the fourth plunger 260, The intermediate member 200 is slid because the fourth plunger 260 presses the intermediate member 200 upward in the figure. At this time, as the intermediate member 200 moves upward, the first elastic member 310 is compressed upward, and electrical connection is made along the longitudinal direction of the barrel 100.

6 (b) is a cross-sectional view of the plunger in which elastomeric rubber (510, 520) is used instead of the compression coil spring used in Fig. 6 (a) It is possible to prevent an electric signal from being unnecessarily transmitted and lost.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, You will understand. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is defined by the appended claims rather than the foregoing detailed description, and all changes or modifications derived from the meaning and scope of the claims and the equivalents thereof are included in the scope of the present invention Should be interpreted.

100: Barrel
200: intermediate member
210: first plunger
220: second plunger
310: first elastic member
320: second elastic member

Claims

A barrel formed in a hollow cylinder shape and having both ends opened to have a first opening and a second opening;
An intermediate member disposed to be slidable along an inner circumferential surface of the barrel so as to be slid in a state in which the front circumferential surface closely contacts the inner circumferential surface of the barrel;
A first plunger disposed to partially protrude from the first opening along a longitudinal direction of the barrel;
A second plunger disposed to partially protrude from the second opening along a longitudinal direction of the barrel;
A first elastic member disposed between the first plunger and the intermediate member and elastically supporting the first elastic member; And
And a second elastic member disposed between the second plunger and the intermediate member and elastically supporting the second elastic member.

The method according to claim 1,
Wherein an elastic supporting portion protruding in a conical shape is formed on one surface of the first plunger opposite to the first elastic member and a first contact portion is formed on the opposite side of the elastic supporting portion in contact with the terminals of the semiconductor package.

The method according to claim 1,
And a second contact portion contacting the contact pad located on the test board is formed on the opposite side of the second plunger, Type probe.

The method according to claim 1,
Wherein the first elastic member and the second elastic member are coil springs.

5. The method of claim 4,
Wherein the first elastic member and the second elastic member have the same coil pitch.

6. The method of claim 5,
Wherein an outer diameter of the first elastic member and the second elastic member is smaller than an inner diameter of the barrel, and an insulating member is formed on a surface of the first elastic member and the second elastic member.

The method according to claim 1,
Wherein the first elastic member and the second elastic member each include an elastic rubber.

The method according to claim 1,
Wherein a sealing portion bent to be in close contact with an outer circumferential surface of the first plunger and the second plunger is formed in the first opening and the second opening of the barrel.

9. The method of claim 8,
Wherein the outer diameter of the portion of the first plunger and the second plunger located inside the barrel is larger than the inner diameter of the sealing portion.

The method according to claim 1,
An annular engaging groove is formed in a circumferential direction on the outer circumferential surface of a portion of the first plunger located inside the barrel, and a locking protrusion protruding radially inwardly of the engaging groove to be inserted into the engaging groove is formed in the barrel Characterized by a bi-directional probe.

11. The method of claim 10,
Wherein the latching protrusion is formed by a roll crimping process.

The method according to claim 1,
Wherein the intermediate member is made of a conductive member.