KR101841108B1 - Bifurcated probe apparatus - Google Patents

Abstract

The present invention relates to a barrel having a hollow cylinder shape and having both ends opened to have a first opening and a second opening, a partition for partitioning the inside of the barrel, a part protruding from the first opening along the longitudinal direction of the barrel A first plunger disposed so as to partially protrude from the second opening along a longitudinal direction of the barrel, a first elastic member disposed between the first plunger and the partition and elastically supporting the first plunger, And a second elastic member disposed between the second plunger and the partition and elastically supporting the second elastic member.

Description

{BIFURCATED PROBE APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bisection type probe apparatus, and more particularly, to a bisection type probe apparatus capable of improving test reliability.

2. Description of the Related Art In recent years, a test apparatus and an inspection socket having a plurality of contact probes between a connection terminal of an IC package for testing or a connection terminal of a wafer and a connection terminal of a test circuit board are used in a wafer testing apparatus for an IC package or an integrated circuit In particular, a double-ended slide type probe is used in which a contact pressure is given and an impact is absorbed at a contact position by providing an elastic member between the contact portions at both ends of the contact probe.

In the above-described both-end slide type probe, for example, a configuration is known in which a head portion of a plunger in a barrel is slidably supported and a compression coil spring is interposed between the plunger head portion and the inner peripheral surface of the barrel .

However, in the conventional both-end slide type probe, although the plunger and the barrel, which are electrical contact members, are disposed on the same straight line with the barrel to smooth the electrical connection, the electric signal transmitted from the plunger is partially transmitted to the compression coil spring , A lot of impedance components are generated in the process of passing the electric signal transmitted to the barrel through the plunger as much as the axial length of the barrel, and the loss and distortion of the electric signal are generated.

Japanese Patent Application Laid-Open No. 2000-346872 (disclosed on December 15, 2000)

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a dual type probe apparatus capable of improving the reliability of inspection.

The present invention has been made in view of the above problems, and it is an object of the present invention to provide a method of manufacturing the same.

According to an aspect of the present invention, there is provided a dual-purpose probe apparatus having a hollow cylinder shape, a barrel having both ends opened to have a first opening and a second opening, A partition portion having a seating portion which is recessed in a direction approaching each other from the first opening portion and the second opening portion and formed at both ends along the longitudinal direction, A second plunger disposed so as to partially protrude from the second opening along the longitudinal direction of the barrel, a first plunger disposed between the first plunger and the partition and elastically supporting the first plunger, And a second elastic member disposed between the second plunger and the partition and elastically supporting the elastic member.

The first plunger may have an elastic supporting portion protruding in a conical shape on a surface facing the first elastic member, and a first contact portion contacting the terminals of the semiconductor package may be formed on the opposite side.

The second plunger may have an elastic support portion protruding in a conical shape on a surface facing the second elastic member, and a second contact portion contacting the contact pad located on the test board may be formed on the opposite side.

The first elastic member and the second elastic member may be coil springs.

The first elastic member and the second elastic member may have the same coil pitch.

The outer diameter of the first elastic member and the second elastic member may be smaller than the inner diameter of the barrel, and an insulating member may be formed on the surfaces of the first elastic member and the second elastic member.

The first elastic member and the second elastic member may each include an elastic rubber.

The first opening and the second opening of the barrel may be formed with a sealing portion bent to be in close contact with the outer circumferential surfaces of the first plunger and the second plunger.

The diameter of the large diameter portion located inside the barrel of the first plunger and the second plunger may be larger than the diameter of the small diameter portion located outside the barrel.

The partition may include an annular protrusion protruding radially inwardly so that one end surface of each of the first elastic member and the second elastic member facing each other is fixed in the barrel.

The inner diameter of the annular protrusion may be smaller than the outer diameter of the first elastic member and the second elastic member.

The annular projection may be formed by a roll caulking process.

The details of other embodiments are included in the detailed description and drawings.

The embodiments of the present invention have at least the following effects.

That is, the dual-purpose probe according to the embodiments of the present invention can stabilize the propagation path and minimize the impedance on the propagation path so that the high-frequency electric signal can be transmitted without distortion.

The effects according to the present invention are not limited by the contents exemplified above, and more various effects are included in the specification.

1 is a cross-sectional view of a dual-type probe apparatus according to a first embodiment of the present invention.
FIGS. 2 to 4 illustrate operation of a dual-type probe according to a first embodiment of the present invention.
5 is a cross-sectional view of a dual-type probe apparatus according to a second embodiment of the present invention.
FIG. 6 is a cross-sectional view of a dual-type probe according to a third embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and the manner of achieving them, will be apparent from and elucidated with reference to the embodiments described hereinafter in conjunction with the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. To fully disclose the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims.

The terminology used herein is for the purpose of illustrating embodiments and is not intended to be limiting of the present invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. It is to be understood that the terms comprise and / or comprise are used in a generic sense to refer to the presence or addition of one or more other elements, steps, operations and / or elements other than the stated elements, steps, operations and / It is used not to exclude. And "and / or" include each and any combination of one or more of the mentioned items.

Further, the embodiments described herein will be described with reference to cross-sectional views and / or schematic drawings that are ideal illustrations of the present invention. Thus, the shape of the illustrations may be modified by manufacturing techniques and / or tolerances. Accordingly, the embodiments of the present invention are not limited to the specific forms shown, but also include changes in the shapes that are generated according to the manufacturing process. In addition, in the drawings of the present invention, each component may be somewhat enlarged or reduced in view of convenience of explanation. Like reference numerals refer to like elements throughout the specification.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described with reference to the accompanying drawings, which illustrate a bispecific probe according to embodiments of the present invention.

1 is a cross-sectional view of a dual-type probe apparatus according to a first embodiment of the present invention.

As shown in FIG. 1, the dual-purpose probe according to the first embodiment of the present invention includes a barrel 100, a partition 200, a first plunger 210, a second plunger 220, A second elastic member 310, and a second elastic member 320.

The barrel 100 may have a hollow shape with a hollow interior and a circular cross-sectional shape. The barrel 100 may have a first opening 101 and a second opening 102, both ends of which are opened along the longitudinal direction of the barrel 100, . The first plunger 210 and the second plunger 220 may be bent at the first opening 101 and the second opening 102 so that the first plunger 210 and the second plunger 220 are not completely separated from the barrel 100 as described later.

That is, the sealing portions 100a and 100b, which are bent so as to surround the end portions of the first opening 101 and the second opening 102 in contact with the exposed outer peripheral surfaces of the first plunger 210 and the second plunger 220, . The diameters of the large diameter portions 210b and 220b located inside the barrel 100 of the first plunger 210 and the second plunger 220 are set to be larger than the diameters of the sealing portions 100a and 100b The first plunger 210 and the second plunger 220 can be prevented from completely disengaging from the inside of the barrel 100 while moving in the longitudinal direction by forming the first plunger 210 and the second plunger 220 larger than the diameter of the small diameter portions 210c and 220c, .

The barrel 100 may be formed of a metal material having electrical conductivity. For example, an electrically conductive metal plate material may have a predetermined elongation property and an excellent elasticity and strength and a low electrical resistance through heat treatment. In particular, beryllium copper 25 alloy ASTM C17200 and the like can be applied, but any material satisfying mechanical and electrical properties can be applied, and the present invention is not limited thereto.

A first plunger 210 and a second plunger 220 having electrical contacts 210d and 220d may be formed on both ends of the barrel 100, respectively. The inside of the barrel 100 can be completely partitioned by the partition 200 formed between the first plunger 210 and the second plunger 220.

That is, the first plunger 210, the partition 200 and the second plunger 220 are arranged in series in the barrel 100 along the longitudinal direction so that the electrodes and the pads of the object to be inspected can be electrically connected do.

The first contact portion 210d exposed from the barrel 100 of the first plunger 210 and the second contact portion 220d exposed from the barrel 100 of the second plunger 220 are inspected Make sure that the electrode and pad of the object are in contact with the appropriate pressure. Here, the first contact portion 210d of the first plunger 210 may refer to a portion of the object to be inspected which contacts the terminal 11 of the semiconductor package 10, and the second contact portion 210d of the second plunger 220 And the contact portion 220d may refer to a portion of the test board 20 that contacts the contact pad 21.

In other words, the first contact portion 210d formed on the upper end surface of the first plunger 210 and the second contact portion 220d formed on the lower end surface of the second plunger 220 are connected to the terminals, And may be formed in various shapes for securing mutual contact areas with terminals, contact pads, and the like. For example, in the case of contacting a terminal of a semiconductor package, the terminal may be formed in a crown shape in which the central portion is recessed and the peripheral portion thereof is protruded so as to facilitate the terminal, and when the contact pad is in contact with the contact pad of the test board, .

Each of the contact portions 210d and 220d is preferably made of a conductive material having excellent hardness so as to maintain stable electrical contact with the terminals or pads of the test substrate even when repeatedly contacting the object to be inspected such as a semiconductor package or the like.

At both ends along the longitudinal direction of the partition 200, a seating part 201 (corresponding to the shape of the first and second elastic supporting parts 210a and 220a of the first plunger 210 and the second plunger 220) , 202 may be formed.

When the first and second elastic supports 210a and 220a of the first plunger 210 and the second plunger 220 are excessively moved toward the partition 200 to prevent collision and interference, As shown in Fig.

In addition, when the first plunger 210 and the second plunger 220 are compressed, the centering function of the first elastic member 310 and the second elastic member 320 is also obtained.

The partitioning part 200 completely blocks the internal space between the first plunger 210 and the second plunger 220 and the first plunger 210, the barrel 100, the second plunger 220, (Not shown). At this time, the contact portion 210d exposed from the barrel 100 of the first plunger 210 and the contact portion 220d exposed from the barrel 100 of the second plunger 220 are electrically connected to the electrode of the semiconductor package and the pad With appropriate contact pressure.

The first elastic member 310 disposed between the first plunger 210 and the partition 200 may be a compression coil spring. The second elastic member 320, which will be described later, may also be a compression coil spring.

When the first elastic member 310 is a compression coil spring, a first resilient supporting portion 210a protruding in a conical shape is formed on one surface of the first plunger 210 facing the first elastic member 310 . The first elastic support portion 210a may be any shape that can be inserted into the hollow portion of the first elastic member 310 so that one end of the first elastic member 310 can be stably supported.

Likewise, a second elastic supporting portion 220a protruding in a conical shape may be formed on a surface of the second plunger 220 facing the second elastic member 320. The second elastic supporting portion 220a stably supports one end of the second elastic member 320. [

The first elastic member 310 and the second elastic member 320 may be formed to have the same coil pitch. Here, when the partition 200 is disposed in the middle of the total length of the barrel 100, the first elastic member 310 and the second elastic member 320 are formed to have the same coil pitch, The first elastic member 310 and the second elastic member 320 may be reciprocated in the reciprocating movement distance of the first elastic member 310 and the second elastic member 320 when the partition 200 is not disposed in the middle of the total length of the barrel 100, The mutual coil pitch may be changed.

The outer diameters of the first elastic member 310 and the second elastic member 320 are smaller than the inner diameter of the barrel 100 and the surfaces of the first elastic member 310 and the second elastic member 320 are insulated Member (not shown) may be further included. The insulating member may be formed on the surface of the first elastic member 310 and the second elastic member 320 by a method such as adhesion, vapor deposition or coating.

When the insulating member is formed on the surfaces of the first elastic member 310 and the second elastic member 320, electrical signals transmitted through the barrel 100 are unnecessarily transmitted to the first elastic member 310 and the second elastic member 320, It is possible to prevent the impedance from being generated.

When the first plunger 210 and the second plunger 220 are not disposed in series on the coaxial axis due to a required tolerance in assembling the first plunger 210 and the second plunger 220, It is difficult to stably move in the axial direction while maintaining a certain clearance from the inner circumferential surface of the barrel 100, so that even if irregular contact with the inner circumferential surface of the barrel 100 occurs, an impedance may be generated.

Hereinafter, the operation of the dual-purpose probe according to one embodiment of the present invention will be described with reference to the drawings.

FIGS. 2 to 4 illustrate operation of a dual-type probe according to a first embodiment of the present invention.

2, the external terminals 11 of the semiconductor package 10 are spaced apart from each other on the upper side of the barrel 100 for inspection of the semiconductor package, and the contact pads 20 of the test board 20 are disposed on the lower side of the barrel 100, (21) can be located.

3, the external terminals 11 of the semiconductor package 10 and the contact pads 21 of the test board 20 are connected to the first plunger 210 of the barrel 100, The external terminals 11 of the semiconductor package are brought into contact with the first contact portion 210d of the first plunger 210 and the second contact portion 210d of the second plunger 220 is sandwiched toward the second plunger 220, The contact pads 21 of the test board 20 are contacted with the contact pads 220d.

At this time, the first plunger 210 and the second plunger 220 are elastically supported by the first elastic member 310 and the second elastic member 320 in the barrel 100, As shown in FIG. 4, the semiconductor package 10 and the test board 20 are electrically connected to each other so that electrical signals are connected along arrows.

5 is a cross-sectional view of a dual-type probe apparatus according to a second embodiment of the present invention.

5, the configuration according to the first embodiment differs from that according to the first embodiment of the present invention in that the first elastic member and the second elastic member are made of non-conductive rubber, Since the constitution and operation principle are all the same, a duplicate description will be omitted.

5, in the dual-purpose probe apparatus according to the second embodiment of the present invention, a first elastic rubber 330 is disposed in the barrel 100 between the first plunger 210 and the partition 200 And a second elastic rubber 340 may be disposed between the second plunger 220 and the partition 200. The first elastic rubber 330 and the second elastic rubber 340 may have a cylindrical shape and have a smaller diameter than the inner diameter of the barrel 100.

One end of the first elastic rubber 330 may be in surface contact with one surface of the first plunger 210 and the other end may be in surface contact with one surface of the partition 200. Similarly, one end of the second elastic rubber 330 is in surface contact with one surface of the second plunger 220, and the other end thereof is in surface contact with the one surface of the partition 200 to form the first plunger 210 and the second plunger 220, So that the first elastic member 220 and the second elastic member 340 slide along the longitudinal direction of the barrel 100 while being elastically supported by the first and second elastic rubbers 330 and 340.

The first elastic rubber 330 is disposed between the first plunger 210 and the partition 200 and the second elastic rubber 340 is disposed between the second plunger 220 and the partition 200 The same conduction path as that of the first embodiment shown in FIG. 4 is formed in the process of electrical connection through the contact portions 210d and 220d of the first plunger 210 and the second plunger 220, respectively.

FIG. 6 is a cross-sectional view of a dual-type probe according to a third embodiment of the present invention.

6, the partition 100e is spaced a predetermined distance along the longitudinal direction of the barrel, and the inner space is formed by the annular protrusions 100c and 100d formed on the outer circumferential surface, as compared with the structure according to the first embodiment. And the other configurations are the same, so that redundant description is omitted.

The annular protrusions 100c and 100d may be formed on the outer circumferential surface of the barrel 100 so as to fix one end surface of the first elastic member 310 and the second elastic member 320 facing each other, have. That is, the partition portion 100e has annular protrusions 100c and 100d which are recessed toward the radially inner side of the barrel 100 so as to have a diameter smaller than the diameters of the first elastic member 310 and the second elastic member 320 And the end portions of the first elastic member 310 and the second elastic member 320 facing each other are fixed to the annular protrusions 100c and 100d so that movement of the barrel 100 along the longitudinal direction can be restricted have.

In this embodiment, annular protrusions 100c and 100d are formed on the outer peripheral surface of the barrel 100 and a roll-caulking process is performed from the outer side of the barrel 100 toward the radially inward side of the barrel 100 . That is, the annular protrusions 100c and 100d protrude inward in the radial direction on the outer peripheral surface of the barrel 100 by the roll caulking process so that the first and second elastic members 310 and 320 are engaged . The method of fixing the first elastic member 310 and the second elastic member 320 to the inner circumferential surface of the barrel 100 may be a method of forming a snap-fit on the inner circumferential surface of the barrel 100 The present invention is not limited thereto.

As described above, according to the present invention, even if the first elastic member or the second elastic member is bent during the compression of the first elastic member and the second elastic member, And the second elastic member are stably supported to be kept parallel to the barrel, so that stable electrical connection can be maintained. Further, as compared with the case of forming the plunger and the elastic member having a length corresponding to the entire length of the barrel as in the prior art, the first plunger and the second plunger are divided into two parts, so that even if a small amount of assembly tolerance occurs, It is effective in terms of stability of the spring due to the first elastic member and the second elastic member of short length, durability, and an increase in the compression range of the probe apparatus. (In the first and third embodiments of the present invention, the first elastic member and the second elastic member may be compression coil springs, and in the second embodiment, the first elastic member and the second elastic member may be elastic rubber).

Therefore, the propagation path is stable and the impedance on the propagation path can be minimized so that the high-frequency electric signal can be transmitted without distortion.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, You will understand. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is defined by the appended claims rather than the foregoing detailed description, and all changes or modifications derived from the meaning and scope of the claims and the equivalents thereof are included in the scope of the present invention Should be interpreted.

100: Barrel
200:
210: first plunger
220: second plunger
310: first elastic member
320: second elastic member

Claims (12)

A barrel formed in a hollow cylinder shape and having both ends opened to have a first opening and a second opening;
A partition formed integrally with the barrel and partitioned inside the barrel, the partition being recessed in a direction approaching each of the first and second openings and formed at both ends along the longitudinal direction;
A first plunger disposed to partially protrude from the first opening along a longitudinal direction of the barrel;
A second plunger disposed to partially protrude from the second opening along a longitudinal direction of the barrel;
A first elastic member disposed between the first plunger and the partition and elastically supporting the first elastic member; And
And a second elastic member disposed between the second plunger and the partition and elastically supporting the second elastic member. The method according to claim 1,
Wherein an elastic supporting portion protruding in a conical shape is formed on one surface of the first plunger opposite to the first elastic member and a first contact portion is formed on the opposite side of the elastic supporting portion in contact with the terminals of the semiconductor package. The method according to claim 1,
And a second contact portion contacting the contact pad located on the test board is formed on the opposite side of the second plunger, Type probe. The method according to claim 1,
Wherein the first elastic member and the second elastic member are coil springs. 5. The method of claim 4,
Wherein the first elastic member and the second elastic member have the same coil pitch. 5. The method of claim 4,
Wherein an outer diameter of the first elastic member and the second elastic member is smaller than an inner diameter of the barrel, and an insulating member is formed on a surface of the first elastic member and the second elastic member. The method according to claim 1,
Wherein the first elastic member and the second elastic member each include an elastic rubber. The method according to claim 1,
Wherein a sealing portion bent to be in close contact with an outer circumferential surface of the first plunger and the second plunger is formed in the first opening and the second opening of the barrel. 9. The method of claim 8,
Wherein the diameter of the large diameter portion located inside the barrel of the first plunger and the second plunger is larger than the diameter of the small diameter portion located outside the barrel. A barrel formed in a hollow cylinder shape and having both ends opened to have a first opening and a second opening;
A partition for partitioning the inside of the barrel;
A first plunger disposed to partially protrude from the first opening along a longitudinal direction of the barrel;
A second plunger disposed to partially protrude from the second opening along a longitudinal direction of the barrel;
A first elastic member disposed between the first plunger and the partition and elastically supporting the first elastic member; And
And a second elastic member disposed between the second plunger and the partition and elastically supporting the second elastic member,
Wherein the partition part includes an annular projection projecting radially inwardly so that one end face of each of the first and second elastic members is fixed inside the barrel, Nested probe. 11. The method of claim 10,
Wherein an inner diameter of the annular protrusion is smaller than an outer diameter of the first elastic member and the second elastic member. delete

Images