KR101667929B1 - Silicon rubber socket - Google Patents

Silicon rubber socket Download PDF

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Publication number
KR101667929B1
KR101667929B1 KR1020150045635A KR20150045635A KR101667929B1 KR 101667929 B1 KR101667929 B1 KR 101667929B1 KR 1020150045635 A KR1020150045635 A KR 1020150045635A KR 20150045635 A KR20150045635 A KR 20150045635A KR 101667929 B1 KR101667929 B1 KR 101667929B1
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KR
South Korea
Prior art keywords
semiconductor element
contact
conductive
deflection
stepped
Prior art date
Application number
KR1020150045635A
Other languages
Korean (ko)
Other versions
KR20160117049A (en
Inventor
오창수
김보현
우승호
최원희
이윤형
Original Assignee
(주)티에스이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by (주)티에스이 filed Critical (주)티에스이
Priority to KR1020150045635A priority Critical patent/KR101667929B1/en
Publication of KR20160117049A publication Critical patent/KR20160117049A/en
Application granted granted Critical
Publication of KR101667929B1 publication Critical patent/KR101667929B1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433Sockets for IC's or transistors
    • G01R1/0441Details
    • G01R1/0466Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433Sockets for IC's or transistors
    • G01R1/0441Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2601Apparatus or methods therefor

Abstract

The present invention provides a silicone rubber socket in which a deflection compensating portion is formed in a silicon rubber socket, so that a terminal of a semiconductor device where sagging occurs and a conductive portion of the silicone rubber socket are uniformly contacted.
To this end, the present invention provides a semiconductor device comprising: an insulating part made of a silicon rubber for electrically connecting a terminal of a semiconductor device to a conductive pad of a test board; and at least one conductive layer formed by fusing a plurality of conductive particles and silicone rubber, Wherein a deflection compensating portion is formed on a portion of the conductive portion corresponding to a deflection position of the semiconductor element to compensate deflection of the semiconductor element when the terminal of the semiconductor element and the conductive portion come into contact with the conductive portion, Provide rubber socket.

Description

[0001] Silicon rubber socket [0002]

The present invention relates to a silicon rubber socket for testing semiconductor devices, and more particularly, to a silicon rubber socket for electrically connecting a terminal of a semiconductor device under test to a conductive pad of a test board.

When the manufacturing process of the semiconductor device is finished, a test for the semiconductor device is required. When testing a semiconductor device, a test socket for electrically connecting the test equipment and the semiconductor device is required. The test socket is a mediator component that allows signals from a tester to be transferred to a semiconductor device to be inspected through a test board during a test process. The test socket requires a stable electrical contact capability so that the discrete semiconductor device moves to the correct position and has the mechanical contact ability to make accurate contact with the test board and the signal distortion at the contact point at the time of signal transmission to be minimized.

Among them, the silicon rubber socket is characterized by being able to achieve a dense electrical connection without using any means such as soldering or mechanical coupling, and by being capable of flexible connection by absorbing mechanical shock or deformation, It is widely used as a socket for inspection of equipment.

The conventional silicone rubber socket is composed of a conductive portion which is in contact with a terminal of a semiconductor element and an insulating portion which serves as an insulating layer between the conductive portion.

The upper and lower ends of the conductive part respectively contact the terminals of the semiconductor device and the conductive pads of the test board connected to the test equipment, thereby electrically connecting the terminals and the conductive pads.

On the other hand, due to the development of the technology, a silicon rubber socket which contacts with a semiconductor element is required to be operated in such a circumstance because it requires a semiconductor device which operates at a high frequency and a high current and a high temperature.

However, there has been a problem in that when the terminals of the semiconductor element are brought into contact with the silicon rubber socket in the test process using the conventional silicone rubber socket, defective contact occurs due to deflection of the semiconductor element.

More specifically, the semiconductor device is sagged in one direction depending on the supporting structure. Since the silicon rubber socket is made in a flat state, the portion where deflection of the semiconductor device occurs is first contacted and deflection There is a problem that non-contact portions are brought into contact with each other at a later time, resulting in non-uniform contact with each other, thereby deteriorating the electrical characteristics and greatly affecting the life of the silicone rubber socket.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and an object of the present invention is to provide a silicone rubber socket in which a deflection compensating part is formed to uniformly contact a conductive part of a silicon rubber socket with a terminal of a semiconductor device, To provide a silicone rubber socket.

In order to achieve the above object, the present invention provides a semiconductor device comprising: an insulating part made of silicon rubber for electrically connecting a terminal of a semiconductor device and a conductive pad of a test board; a plurality of conductive particles and silicone rubber fused, Wherein the conductive part is provided with a deflection compensating part at a portion corresponding to a deflection position of the semiconductor element to compensate deflection of the semiconductor element when the terminal of the semiconductor element and the conductive part come into contact with the conductive part, And a silicone rubber socket.

The conductive part is provided on one side of the body part and has a first contact part to be in contact with a terminal of the semiconductor device to be tested, and a second contact part provided on the other side of the body part to be in contact with the conductive pad of the test board. And a contact portion.

The deflection compensation unit may include a first stepped portion formed on one side of the first contact portion so as to be stepped downwardly at one side of the center of the first contact portion to correspond to the sagging of one side of the semiconductor element.

The deflection compensating unit may include a first stepped portion formed on one side of the first contact portion so as to be stepped downwardly and a second stepped portion formed on the other side of the first contacted portion in a downward direction so as to correspond to the sagging of both sides of the semiconductor element .

The deflection compensation unit may include a central stepped portion formed at a center of the first contact portion so as to be stepped downward in correspondence with the sagging of the central portion of the semiconductor element.

The upper end of the insulating portion may further include a guide plate having a guide hole for guiding the contact position between the terminal of the semiconductor element and the first contact portion and for preventing the conductive particles from falling out and falling out. do.

The silicone rubber socket according to the present invention provides the effect of improving the contact efficiency by allowing the terminals of the semiconductor element and the conductive portion of the silicone rubber socket to be in uniform contact with each other by forming the deflection compensation portion in the conductive portion of the silicone rubber socket. can do.

Accordingly, it is possible to prevent the deterioration of electrical characteristics and to improve the life of the silicone rubber socket.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of a silicon rubber socket according to a first embodiment of the present invention. Fig.
2 is a schematic view of a silicon rubber socket according to a second embodiment of the present invention.
3 is a schematic view of a silicon rubber socket according to a third embodiment of the present invention.
4 is a schematic view of a silicon rubber socket according to a fourth embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention in which the above objects can be specifically realized will be described with reference to the accompanying drawings. In describing the present embodiment, the same designations and the same reference numerals are used for the same components, and additional description thereof will be omitted in the following.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic view of a silicon rubber socket according to a first embodiment of the present invention, and FIG. 2 is a schematic view of a silicon rubber socket according to a second embodiment of the present invention.

FIG. 3 is a schematic view of a silicon rubber socket according to a third embodiment of the present invention, and FIG. 4 is a schematic view of a silicon rubber socket according to a fourth embodiment of the present invention.

2 to 4, a silicon rubber socket 100 according to the present invention includes an insulating portion 110, a conductive portion 120, and a deflection compensating portion 130.

The insulating part 110 is formed of a silicone rubber 110a to form an outer appearance of the silicone rubber socket 100 and supports the conductive part 120 to be described later upon receiving a contact load.

More specifically, the insulating portion 110 formed of the silicone rubber 110a absorbs the contact force when the terminals 11 of the semiconductor element 10 or the conductive pads 21 of the test board 20 are contacted, Thereby protecting the unit 120.

The conductive part 120 is formed by fusing the conductive particles 120a and the silicone rubber 110a and is provided to penetrate the insulating part 110. [

The conductive particles 120a may be formed of a single conductive metal material such as iron, copper, zinc, chromium, nickel, silver, cobalt, aluminum or the like or a conductive metal alloy material composed of two or more metals of these metal elements, In the embodiment of the present invention, a nickel-cobalt (NiCO) alloy is proposed in consideration of economical aspects and conductivity.

In addition, the conductive particles 120a according to the present invention are improved in strength and durability through rhodium (RH) plating. On the other hand, the method for plating the conductive particles 120a with rhodium is not particularly limited, but plating can be performed by, for example, chemical plating or electrolytic plating.

The conductive part 120 according to the present invention includes a body part 121 forming an external appearance and a first contact part provided on one side of the body part 121 and contacting the terminal 11 of the semiconductor device 10 to be tested And a second contact portion 123 provided on the other side of the body portion 121 and contacting the conductive pad 21 of the test board 20.

The insulator 110 according to the present invention may further include a guide plate 140 provided with a guide hole 141 at an upper end thereof.

That is, the guide plate 140 has a first contact portion 122 inserted in the guide hole 141 to guide the contact position between the terminal 11 of the semiconductor element 10 to be tested and the first contact portion 122 And serves to prevent the conductive particles 120a of the first contact portion 122 from being released to the outside.

The deflection compensating part 130 according to the present invention is formed at a portion corresponding to the sagging position of the semiconductor device 10 to compensate for sagging of the semiconductor device 10 so that the terminal of the semiconductor device and the conductive part of the silicon rubber socket 100 (120) can be uniformly contacted with each other.

1, the deflection compensating part 130 according to the first embodiment of the present invention includes a first contact part 122 and a second contact part 122 so as to correspond to a side of the semiconductor element 10, And a first stepped portion 131 formed so as to be stepped in a direction.

More specifically, when the semiconductor element 10 is supported on only one side and the other side is in a free-end state, the free end side of the semiconductor element 10 is deflected. The first step portion 131 is formed so that one side of the first contact portion 122, that is, a portion corresponding to the free end of the semiconductor element 10 is stepped, so that the first step portion 131 can be uniformly contacted with each other. The width b of the first step 131 is preferably equal to the deflection width a of the semiconductor element 10.

2, the deflection compensating part 130 according to the second embodiment of the present invention includes a first contact part 122 and a second contact part 122 so as to correspond to sagging at both ends of the semiconductor element 10, And a second stepped portion 132 formed on the other side of the first stepped portion 131 so as to be stepped downward.

That is, in the first embodiment according to the present invention, the first step 131 is formed so as to correspond to a side of the other side, but in the second embodiment according to the present invention, the first step 131 And the second step portion 132 are formed.

More specifically, when the supported state of the semiconductor element 10 is supported at the center and the remaining two sides are in the free-end state, both free ends of the semiconductor element 10 are deflected. The first step portion 131 and the second step portion 132 are formed on both sides of the first contact portion 122, that is, the portions corresponding to both free ends of the semiconductor element 10 are stepped, . The width b of the first step portion 131 and the second step portion 132 is preferably the same as the deflection width b of the semiconductor element 10.

3, the deflection compensating part 130 according to the third embodiment of the present invention includes a first contact part 122 that is stepped downward in the downward direction so as to correspond to the center of the semiconductor element 10, And a central stepped portion 133 formed.

That is, in the first embodiment according to the present invention, the first stepped portion 131 is formed so as to correspond to the side on which one side is sagged. In the second embodiment according to the present invention, 131 and the second stepped portion 132 are formed. However, in the third embodiment according to the present invention, the central stepped portion 133 is formed to correspond to the center of the sidewall.

More specifically, in a state in which the semiconductor element 10 is supported and both sides are supported, deflection occurs in the central portion of the semiconductor element 10. Accordingly, the central stepped portion 133 is formed so that the center of the first contact portion 122, that is, the portion corresponding to the central portion of the semiconductor element 10 is stepped, so that the central step portion 133 can be uniformly contacted with each other. The width b of the central stepped portion 133 is preferably equal to the deflection width a of the semiconductor element 10.

As described above, in each of the embodiments, each step portion is formed so as to correspond to the portion where the semiconductor element 10 is sagged. However, in the fourth embodiment according to the present invention, (134). ≪ / RTI > In the fourth embodiment, detailed description of the same components as those of the above-described embodiments will be omitted.

The operation of the silicone rubber socket 100 according to the embodiment of the present invention will be described below.

First, a test board 20 provided with a silicon rubber socket 100 is prepared. At this time, the second contact portion 123 of the conductive portion 120 contacts and is electrically connected to the conductive pad 21 of the test board 20. The terminal 11 of the semiconductor element 10 transferred to the upper portion of the silicon rubber socket 100 is electrically connected by being elastically contacted by pressing the first contact portion 122 of the conductive portion 120 at a predetermined pressure .

In this state, a test signal is transmitted to the semiconductor device 10 through the silicon rubber socket 100 through the test board 20, and a test process is performed.

At this time, even if deflection occurs in the semiconductor element due to the deflection compensating part 130 provided in the conductive part 120, the contact can be uniformly made and the contact efficiency can be improved. Accordingly, the silicone rubber socket 100 can be prevented from deteriorating in electrical characteristics, thereby maximally improving the service life of the silicone rubber socket 100.

As described above, the present invention is not limited to the above-described specific preferred embodiments, and various changes and modifications may be made by those skilled in the art without departing from the scope of the present invention as claimed in the claims. And such variations are within the scope of the present invention.

100: silicone rubber socket 110: insulating part
110a: Silicone rubber 120: Conductive part
120a: conductive particles 121:
122: first contact portion 123: second contact portion
130: Deflection compensating part 131: First step
132: second step 133: central step
134: plural stepped portions 140: guide plate
141: Guide hole

Claims (6)

An insulating part 110 formed of a silicone rubber 110a for electrically connecting the terminal 11 of the semiconductor element 10 and the conductive pad 21 of the test board 20, A silicon rubber socket (100) comprising at least one conductive part (120) formed to fuse a silicone rubber (110a) to penetrate the insulation part (110)
When the terminal 11 of the semiconductor element 10 and the conductive portion 120 are in contact with each other, the conductive portion 120 is deflected in a portion corresponding to the deflection position of the semiconductor element 10 in order to compensate deflection of the semiconductor element. And a compensation unit 130 is formed
The conductive part 120
A body portion 121 forming an outer appearance;
A first contact portion 122 provided on one side of the body portion 121 and in contact with the terminal 11 of the semiconductor device 10 to be tested; And,
And a second contact part 123 provided on the other side of the body part 121 and contacting the conductive pad 21 of the test board 20,
Wherein the deflection compensation unit (130) is formed such that a first contact portion (122) of the conductive portion (120) corresponding to a deflection position of the semiconductor element (10) is stepped downward.
delete The method according to claim 1,
The deflection compensating unit 130 compensates
And a first stepped portion (131) formed on one side of the center of the first contact portion (122) so as to correspond to the sagging of the semiconductor element (10) in a downward direction.
The method according to claim 1,
The deflection compensating unit 130 compensates
A first stepped portion 131 formed on one side of the first contact portion 122 so as to be stepped downward so as to correspond to the sagging of both sides of the semiconductor element 10; And a second stepped portion (132) formed on the other side thereof so as to be stepped downward.
The method according to claim 1,
The deflection compensating unit 130 compensates
And a central stepped portion (133) stepped downward in the center of the first contact portion (122) to correspond to the center of the semiconductor element (10).
6. The method according to any one of claims 1 to 5,
At the upper end of the insulation part 110
A guide plate 140 provided with a guide hole 141 for guiding the contact position between the terminal of the semiconductor element and the first contact portion 122 and preventing the conductive particles 120a from being deviated and depressed to the outside Characterized in that it comprises a silicone rubber socket.
KR1020150045635A 2015-03-31 2015-03-31 Silicon rubber socket KR101667929B1 (en)

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KR1020150045635A KR101667929B1 (en) 2015-03-31 2015-03-31 Silicon rubber socket

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150045635A KR101667929B1 (en) 2015-03-31 2015-03-31 Silicon rubber socket

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KR20160117049A KR20160117049A (en) 2016-10-10
KR101667929B1 true KR101667929B1 (en) 2016-10-20

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210158041A (en) 2020-06-23 2021-12-30 (주)하이그레이드 Method of reconstructing damaged silicone rubber socket
KR20220121555A (en) 2021-02-25 2022-09-01 주식회사 엔티에스 Camera module test socket

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KR101969791B1 (en) * 2017-10-23 2019-04-17 주식회사 오킨스전자 Ground circuit metal plate, and test socket using the same
KR101967401B1 (en) * 2017-12-29 2019-04-10 에스케이하이닉스 주식회사 Test socket
KR101999834B1 (en) * 2018-03-27 2019-07-12 세메스 주식회사 Test Apparatus
KR102090961B1 (en) * 2018-10-25 2020-03-19 주식회사 오킨스전자 Device for test socket having a plurality of vertically stacked rubber sockets
KR102102816B1 (en) * 2019-01-08 2020-04-22 (주)티에스이 Data signal transmission connector and manufacturing method for the same
KR102175797B1 (en) * 2019-03-25 2020-11-06 주식회사 아이에스시 Electrical test socket
KR102220172B1 (en) * 2020-03-03 2021-02-25 (주)티에스이 Data signal transmission connector
KR102360133B1 (en) 2020-06-24 2022-02-09 양희성 Test socket for semiconductor package
KR102359547B1 (en) * 2020-09-25 2022-02-08 (주)티에스이 Test socket and test apparatus having the same
KR102644473B1 (en) * 2021-08-27 2024-03-07 주식회사 티에스이 Test apparatus for semiconductor package

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001185259A (en) * 1999-12-27 2001-07-06 Daito:Kk Contact structure of ic socket
JP2010157472A (en) 2009-01-05 2010-07-15 Shin Etsu Polymer Co Ltd Connector with guide for ball grid array package
WO2013162343A1 (en) 2012-04-27 2013-10-31 Lee Jae Hak Test socket which allows for ease of alignment
KR101366171B1 (en) * 2013-02-19 2014-02-24 주식회사 아이에스시 Test socket with high density conduction section

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001185259A (en) * 1999-12-27 2001-07-06 Daito:Kk Contact structure of ic socket
JP2010157472A (en) 2009-01-05 2010-07-15 Shin Etsu Polymer Co Ltd Connector with guide for ball grid array package
WO2013162343A1 (en) 2012-04-27 2013-10-31 Lee Jae Hak Test socket which allows for ease of alignment
KR101366171B1 (en) * 2013-02-19 2014-02-24 주식회사 아이에스시 Test socket with high density conduction section

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210158041A (en) 2020-06-23 2021-12-30 (주)하이그레이드 Method of reconstructing damaged silicone rubber socket
KR20220121555A (en) 2021-02-25 2022-09-01 주식회사 엔티에스 Camera module test socket

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