KR101606866B1 - Test connector - Google Patents

Abstract

The present invention relates to an inspection connector, and more particularly to an inspection connector arranged between a device to be inspected and an inspection device for electrically connecting the terminals of the device to be inspected and the pads of the inspection device, A conductive part having a plurality of conductive particles arranged in a thickness direction in an insulating elastic material for each position corresponding to a terminal of the inspection device; an insulating support part disposed between the conductive parts to support the conductive part while supporting the conductive part; And an elastic body disposed inside the conductive portion and having a conductive wire wound in a spiral direction, wherein the elastic body is disposed adjacent to each other in the conductive portion.

Description

Test connector {Test connector}

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an inspection connector, and more particularly, to an inspection connector that can obtain stable electrical characteristics even under high temperature conditions.

Generally, in order to inspect the electrical characteristics of a device to be inspected, the electrical connection between the device to be inspected and the testing device must be stable. A connector for inspection is usually used as an apparatus for connection between a device to be inspected and a testing apparatus.

The role of the inspection connector is to connect the terminals of the device under test and the pads of the testing device to each other so that electrical signals can be exchanged in both directions. To this end, an elastic conductive sheet or a pogo pin is used as the contact means used inside the inspection connector. The elastic conductive sheet is for connecting a conductive part having elasticity to a terminal of the device to be inspected. The pogo pin is provided with a spring inside to smoothly connect the device under test and the testing device, It can be used for most inspection connectors because it can absorb shock.

An example of such an inspection connector is shown in Fig. The inspection cutter 20 has a conductive silicon part 8 formed in a region where a ball lead 4 of a ball grid array (BGA) semiconductor element 2 is in contact with the conductive silicon part 8, And an insulating silicon part 6 formed in a region where the terminal 4 of the semiconductor element 2 does not contact so as to serve as an insulating layer. At this time, the conductive silicon part 8 is composed of the conductive particles 8a spaced apart from each other by a certain distance in the silicon rubber. Such an inspection connector 20 is used by being attached to a testing apparatus 9 provided with a plurality of pads 10. [ More specifically, the inspection connector 20 is mounted on the inspection apparatus 9 in a state in which the respective conductive silicon portions 8 are in contact with the pad 10 of the inspection apparatus 9.

When the semiconductor element is further lowered after the ball lead of the semiconductor element comes in contact with the conductive silicon part 8 for inspection of the connector for inspection, the conductive silicon part 8 It is compressed in the thickness direction and the electric conduction state is achieved. At this time, when a predetermined electrical signal is applied from the inspection device 9, the electrical signal is transmitted to the semiconductor element 2 via the conductive silicon part 8, and a predetermined electrical inspection is performed.

Such a semiconductor device may be inspected at room temperature, but may be inspected in a high temperature environment. Such an inspection is called a burn-in inspection, and there is a problem that electrical characteristics are deteriorated due to physical property problems during burn-in inspection. One of the reasons for deteriorating the electrical characteristics is that the silicone rubber constituting the conductive silicon part expands under a high temperature environment, and the distance between the conductive particles in the conductive silicon part is distant from each other. For example, as shown in FIG. 1, the conductive particles spaced apart from each other by a distance of S1 are separated from each other by a distance of S2 (S2> S1) as shown in FIG. 2 under a high temperature environment, So that the distance between them increases. When the spacing distance between the conductive particles is increased, it is difficult for the conductive particles to contact each other, which causes a problem that the overall electrical characteristics are deteriorated.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and it is an object of the present invention to provide an inspection connector which can obtain stable electrical characteristics even under high temperature conditions.

In order to achieve the above object, according to the present invention, there is provided an inspection connector for electrically connecting a terminal of a device to be inspected and a pad of an inspection apparatus, the connector being disposed between the device to be inspected and the inspection apparatus,

A conductive part in which a plurality of conductive particles are arranged in a thickness direction in an insulating elastic material for each position corresponding to a terminal of the device to be inspected;

An insulating support portion disposed between the respective conductive portions to support the conductive portions while surrounding the conductive portions,

And an elastic body disposed inside each of the conductive portions and having a conductive wire wound in a spiral direction,

A plurality of the elastic bodies are disposed adjacent to each other in the conductive portion.

In the inspection connector,

Even when the respective elastic members are spaced from each other, the contact between them can be maintained.

In the inspection connector,

When N is the number of times the conductive wire is wound in the spiral direction, N? 1/2.

In the inspection connector,

A plurality of conductive particles may be distributed around the elastic body.

In the inspection connector,

When the diameter of the conductive wire is represented by d, 0.01 mm <d <3 mm.

In the inspection connector,

When the outer diameter of the spirally wound conductive wire is represented by D, 0.01 mm <D <0.5 mm.

In the elastic body of the inspection connector, D > d.

In order to achieve the above object, according to the present invention, there is provided an inspection connector for electrically connecting a terminal of a device to be inspected and a pad of an inspection apparatus, the connector being disposed between the device to be inspected and the inspection apparatus,

A conductive part in which a plurality of conductive particles are arranged in a thickness direction in an insulating elastic material for each position corresponding to a terminal of the device to be inspected;

An insulating support portion disposed between the respective conductive portions to support the conductive portions while surrounding the conductive portions,

And an elastic spring disposed inside the conductive portion and having a conductive wire wound in a spiral direction,

The elastic spring is arranged so that at least two or more of the elastic springs are intertwined with each other inside each conductive part.

In the inspection connector,

The plurality of elastic springs are disposed adjacent to each other and a plurality of conductive particles may be distributed around the plurality of elastic springs.

In the inspection connector,

At least two or more elastic springs may be arranged in the thickness direction.

Since the inspecting connector according to the present invention is formed by mixing the conductive particles with the elastic body in spring form and using the same in the conductive portion, even when the insulating elastic material is expanded at a high temperature, the neighboring springs are intertwined with each other. There is an advantage that the degradation can be minimized.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows a connector for inspection according to the prior art; Fig.
Fig. 2 is a view showing a state of the inspection connector of Fig. 1 under a high-temperature environment; Fig.
3 is a view showing a connector for inspection according to an embodiment of the present invention;
Fig. 4 is a view showing the operation of Fig. 3; Fig.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The inspection connector 100 according to the present invention is disposed between the device under test 140 and the inspection device 150 and is provided with the terminal 141 of the device 140 to be inspected and the pad 151 of the inspection device 150 ) To each other.

The inspection connector 100 includes a conductive portion 110, an insulating support portion 120, and an elastic body 130.

The conductive part 110 includes a plurality of conductive particles 111 arranged in a thickness direction in an insulating elastic material for each position corresponding to the terminal 141 of the device under test 140. In the conductive part 110, the conductive particles 111 exhibiting magnetism are densely contained in a state aligned so as to be aligned in the thickness direction.

As the insulating elastic material forming the conductive portion 110, a heat-resistant polymer material having a crosslinked structure is preferable. As the curable polymer material forming material that can be used to obtain such a crosslinked polymer material, various materials can be used, and specific examples thereof include silicone rubber, polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, acrylonitrile -Butadiene copolymer rubber and hydrogenated products thereof, block copolymer rubbers such as styrene-butadiene-diene block copolymer rubber and styrene-isoprene block copolymer, and hydrogenated products thereof, chloroprene rubber, urethane rubber , A polyester rubber, an epichlorohydrin rubber, an ethylene-propylene copolymer rubber, an ethylene-propylene-diene copolymer rubber, and a soft liquid epoxy rubber.

Of these, silicone rubber is preferable from the viewpoints of moldability and electrical characteristics.

When the inspection connector 100 is used for a probe test or a burn-in test on an integrated circuit formed on a wafer, a cured product of addition type liquid silicone rubber (hereinafter referred to as &quot; silicone rubber cured product &quot; , And the permanent compression set at 150 캜 is preferably 10% or less, more preferably 8% or less, and even more preferably 6% or less. When the compression permanent distortion exceeds 10%, when the obtained test connector 100 is repeatedly used a plurality of times or repeatedly in a high temperature environment, permanent distortion occurs in the conductive portion 110 So that the chain of the conductive particles 111 in the conductive part 110 is disturbed, and as a result, it may become difficult to maintain the desired conductivity.

The silicone rubber cured product preferably has a durometer A hardness of 10 to 60 at 23 캜, more preferably 15 to 60, particularly preferably 20 to 60 Do. When the Durometer A hardness is less than 10, the insulating support portion that insulates the conductive portions 110 from each other when pressed is excessively distorted, and it becomes difficult to maintain the desired insulation property between the conductive portions 110 have. On the other hand, when the durometer A hardness exceeds 60, a pressing force due to a considerably large load is required in order to provide appropriate distortion to the conductive portion 110, so that the object to be inspected tends to be deformed or damaged Loses.

As the conductive particles 111 contained in the conductive portion 110 in the inspection connector 100, it is preferable to use a conductive material having a magnetic property from the viewpoint that a magnetic field can be applied to easily move the conductive particles 111 in the molding material desirable. As specific examples of the conductive particles 111 exhibiting such magnetism, metal particles showing magnetism such as iron, nickel, and cobalt, particles of these alloys, or particles containing these metals, or particles thereof as core particles, The surface of the particles is plated with a metal having a good conductivity such as gold, silver, palladium or rhodium, or inorganic particles or polymer particles such as non-magnetic metal particles or glass beads are used as core particles, Plated with a conductive magnetic material such as nickel or cobalt or a material obtained by coating the core particle with both a conductive magnetic material and a metal having good conductivity.

Among these, nickel particles are preferably used as the core particles, and the surface thereof is plated with metal having good conductivity such as gold or silver.

The means for covering the surface of the core particle with the conductive metal is not particularly limited, but can be performed by, for example, electroless plating.

In the case of using the conductive particles 111 in which the surface of the core particles is coated with a conductive metal, the coating ratio of the conductive metal on the surface of the particles (the coating ratio of the conductive metal to the surface area of the core particles Area ratio) is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 95%.

The covering amount of the conductive metal is preferably 2.5 to 50% by weight, more preferably 3 to 30% by weight, still more preferably 3.5 to 25% by weight, and most preferably 4 to 20% by weight Particularly preferred. When the conductive metal to be coated is gold, the covering amount is preferably 3 to 30% by weight, more preferably 3.5 to 25% by weight, still more preferably 4 to 20% by weight, Particularly preferably 10% by weight. When the conductive metal to be coated is silver, the covering amount is preferably 3 to 30% by weight, more preferably 4 to 25% by weight, still more preferably 5 to 23% by weight of the core particles, Particularly preferably 6 to 20% by weight.

The particle diameter of the conductive particles 111 is preferably 1 to 500 탆, more preferably 2 to 400 탆, still more preferably 5 to 300 탆, and particularly preferably 10 to 150 탆.

The particle diameter distribution (Dw / Dn) of the conductive particles 111 is preferably 1 to 10, more preferably 1 to 7, further preferably 1 to 5, particularly preferably 1 to 4 .

By using the conductive particles 111 satisfying these conditions, the obtained inspection connector 100 can be easily pressed and deformed and the conductive particles 110 in the inspection connector 100 can be easily separated from the conductive particles 111 Sufficient electrical contact can be obtained.

The shape of the conductive particles 111 is not particularly limited, but a spherical shape or a star shape is preferable in that it can be easily dispersed in the polymer material forming material.

The insulating support part 120 is disposed around the conductive part 110 to support the conductive part 110 while insulating each conductive part 110 and is made of an insulating elastic material and conductive particles 111 ) Is contained at all or hardly contained. It is preferable that the insulating support portion 120 is made of the same material as the insulating elastic material constituting the conductive portion 110. For example, a silicone rubber. However, it should be understood that the present invention is not limited thereto and various materials may be used.

The elastic members 130 are disposed inside the respective conductive parts 110 and the conductive wires are wound in the spiral direction so that a plurality of elastic members 130 are disposed adjacent to each other in the conductive parts 110. When the conductive part 110 is compressed in the thickness direction by the pressing of the terminal 141 of the device under test 140, the respective elastic bodies 130 disposed adjacent to each other are configured to be in contact with each other.

The elastic body 130 may have a shape similar to that of a conventional spring (a spring-like elastic body 130 is referred to as an 'elastic spring'), in which the number of times the conductive wire is wound in the spiral direction Number of turns') is N, it is preferable that N &gt; = 1/2. A plurality of conductive particles 111 are distributed around the elastic body 130 so that the elastic body 130 and the conductive particles 111 form a conductive path in which electricity flows in the thickness direction.

It is preferable that 0.01 mm <D <0.5 mm when the diameter of the conductive wire is 0.01 mm <d <3 mm and the outer diameter of the spirally wound conductive wire is D In addition, in the elastic body 130, D > d is preferable because the elastic body 130 can be easily entangled with the adjacent elastic body 130.

It is preferable that the elastic body 130 is a magnetic fiber and the length thereof is smaller than the thickness of the conductive part 110. Specifically, it is preferable that the elastic body 130 has a length equal to or less than 1/2 of the length in the thickness direction of the conductive part so that at least two elastic bodies 130 can be arranged in the thickness direction in the conductive part 110. On the other hand, the magnetic fiber constituting the elastic body 130 may be made of a magnetic metal fiber made of, for example, stainless steel such as nickel, iron, cobalt, SUS, or other alloy. In this case, it is preferable that the surface of the magnetic metal fibers is coated with a conductive metal coating made of a metal such as gold, silver, copper, rhodium, pearlite or an alloy thereof. By covering with such a conductive metal, the electric resistance value can be lowered.

In addition, the conductive wire constituting the elastic body 130 may be made of a non-magnetic fiber in which a magnetic metal is coated on the surface thereof. In this case, as the non-magnetic fiber, non-magnetic metal fibers such as stainless steel such as phosphor bronze, brass, SUS, and carbon fiber can be used. Nickel, nickel cobalt alloy, iron and the like can be used as the magnetic metal. In addition, non-magnetic inorganic fibers such as glass fibers and aramid fibers, or non-magnetic organic fibers may be used as the non-magnetic fibers. In this case, it is preferable that the surface is coated with a conductive metal coating.

The inspection connector 100 according to an embodiment of the present invention has the following operational effects.

The inspected device 140 is mounted on the inspection connector 150 in a state where the inspection connector 100 is mounted on the inspection device 150 so that the conductive part 110 is brought into contact with the pad 151 of the inspection device 150 100). The inspection connector 100 is lowered so that the terminals 141 of the device under test 140 are brought into contact with the upper surface of the conductive portion 110 as shown in FIG. When a predetermined electrical signal is applied from the inspection apparatus 150, the signal is transmitted to the inspected device 140 through the conductive unit 110 to perform a predetermined electrical inspection.

If the test is performed in a high temperature environment (150 ° C or higher), the conductive particles 111 in the conductive portion 110 are separated from each other even if the silicone rubber as the insulating elastic material undergoes excessive expansion. Also, the elastic members 130 move in directions away from each other in accordance with the expansion of the silicone rubber. However, since a plurality of elastic members 130 are interlocked with each other, even when the elastic members 130 move away from each other, the contact state is maintained, so that the electrical characteristics are not lowered.

In the inspection connector 100 according to the embodiment of the present invention, the conductive particles 111 and the spring-shaped elastic body 130 are mixed and used. In this case, the elastic body 130 is made of the conductive particles 111 There is an advantage that stable electrical characteristics can be obtained by reducing the number of electrical contacts.

Also, the inspection connector 100 according to an embodiment of the present invention has an advantage that the overall contact force can be lowered due to the elasticity of the elastic body 130 itself.

Also, in the inspection connector 100 according to an embodiment of the present invention, when the spring-like elastic bodies 130 are tangled with each other and the silicone rubber expands under a high-temperature environment so that the distance between the conductive particles 111 is increased, There is an advantage that the contact characteristics can be maintained. At this time, it is preferable that the spring-like elastic body 130 has one or more turns and the pitch of the spring-like elastic body 130 is larger than the diameter of the wire, so that the elastic bodies 130 can be tangled with each other.

Although the inspection connector according to the embodiment of the present invention has been described above, the present invention is not limited thereto. For example, the shape of the elastic body is limited to the shape of a spring. However, the present invention is not limited thereto. The silicone rubber constituting the conductive body can be any shape as long as the contact between the elastic bodies adjacent to each other when the silicone rubber expands under a high- For example, "C" and "S" can be used. That is, it goes without saying that various shapes can be used in the conductive portion regardless of the spring shape or the number of turns.

While the present invention has been described with reference to the exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention.

100 ... inspection connector 110 ... conductive part
111 ... conductive particles 120 ... insulating paper
130 ... elastic body 140 ... inspected device
141 ... Terminal 150 ... Inspection device
151 ... pad

Claims (10)

A testing connector for electrically connecting a terminal of a device to be inspected and a pad of an inspecting device to each other, the insulated connector being disposed between the inspected device and the inspecting device,
A conductive part in which a plurality of conductive particles are arranged in a thickness direction in an insulating elastic material for each position corresponding to a terminal of the device to be inspected;
An insulating support portion disposed between the respective conductive portions to support the conductive portions while surrounding the conductive portions,
And an elastic body disposed inside each of the conductive portions and having a conductive wire wound in a spiral direction,
Wherein a plurality of the elastic members are disposed adjacent to each other in the conductive portion,
And d is a diameter of the conductive wire, 0.01 mm <d <3 mm,
When the outer diameter of the spirally wound conductive wire is D, 0.01 mm <D <0.5 mm,
D > d. The method according to claim 1,
Wherein the elastic members are configured to maintain contact with each other even when the elastic members are spaced apart from each other. The method according to claim 1,
And N &gt; 1/2 when the number of times the conductive wire is wound in the spiral direction is N. [ The method according to claim 1,
And a plurality of conductive particles are distributed around the elastic body. delete delete delete A testing connector for electrically connecting a terminal of a device to be inspected and a pad of an inspecting device to each other, the insulated connector being disposed between the inspected device and the inspecting device,
A conductive part in which a plurality of conductive particles are arranged in a thickness direction in an insulating elastic material for each position corresponding to a terminal of the device to be inspected;
An insulating support portion disposed between the respective conductive portions to support the conductive portions while surrounding the conductive portions,
And an elastic spring disposed inside the conductive portion and having a conductive wire wound in a spiral direction,
At least two elastic springs are disposed so as to be intertwined with each other inside each of the conductive parts,
Wherein a plurality of the elastic springs are disposed adjacent to each other in the conductive portion,
And d is a diameter of the conductive wire, 0.01 mm <d <3 mm,
When the outer diameter of the spirally wound conductive wire is D, 0.01 mm <D <0.5 mm,
D > d. 9. The method of claim 8,
Wherein the plurality of elastic springs are disposed adjacent to each other and a plurality of conductive particles are distributed around the plurality of elastic springs. 9. The method of claim 8,
Wherein at least two elastic springs are arranged in the thickness direction.

Images