KR101588844B1 - Test connector with coil type Carbon Nano Tube - Google Patents

Abstract

The present invention relates to a test connector having a coiled carbon nanotube. More specifically, the test connector having a coiled carbon nanotube is arranged between a test target device and a test device to electrically connect terminals of the test target device and pads of the test device to each other, and comprises: conductive units each comprising a plurality of conductive particles arranged in an insulative elastic material in a thickness direction on a location corresponding to each terminal of the test target device; an insulative support unit arranged between the conductive units to enclose the conductive units and support the conductive units; and an elastic body arranged in each conductive unit, wherein a conductive wire is wound in a spiral direction. A plurality of elastic bodies are arranged adjacent to each other in the conductive unit.

Description

Technical Field [0001] The present invention relates to a test connector having a coiled carbon nanotube,

The present invention relates to an inspection connector having a coiled carbon nanotube, and more particularly, to an inspection connector having a coiled carbon nanotube that can maintain electrical conductivity under frequent contraction and expansion.

Generally, in order to inspect the electrical characteristics of a device to be inspected, the electrical connection between the device to be inspected and the testing device must be stable. A connector for inspection is usually used as an apparatus for connection between a device to be inspected and a testing apparatus.

The role of the inspection connector is to connect the terminals of the device under test and the pads of the testing device to each other so that electrical signals can be exchanged in both directions. To this end, an elastic conductive sheet or a pogo pin is used as the contact means used inside the inspection connector. The elastic conductive sheet is for connecting a conductive part having elasticity to a terminal of the device to be inspected. The pogo pin is provided with a spring inside to smoothly connect the device under test and the testing device, It can be used for most inspection connectors because it can absorb shock.

An example of such an inspection connector is shown in Fig. The inspection cutter 20 has a conductive silicon part 8 formed in a region where a ball lead 4 of a ball grid array (BGA) semiconductor element 2 is in contact with the conductive silicon part 8, And an insulating silicon part 6 formed in a region where the terminal 4 of the semiconductor element 2 does not contact so as to serve as an insulating layer. At this time, the conductive silicon part 8 is composed of the conductive particles 8a spaced apart from each other by a certain distance in the silicon rubber. Such an inspection connector 20 is used by being attached to a testing apparatus 9 provided with a plurality of pads 10. [ More specifically, the inspection connector 20 is mounted on the inspection apparatus 9 in a state in which the respective conductive silicon portions 8 are in contact with the pad 10 of the inspection apparatus 9.

When the semiconductor element is further lowered after the ball lead of the semiconductor element comes in contact with the conductive silicon part 8 for inspection of the connector for inspection, the conductive silicon part 8 It is compressed in the thickness direction and the electric conduction state is achieved. At this time, when a predetermined electrical signal is applied from the inspection device 9, the electrical signal is transmitted to the semiconductor element 2 via the conductive silicon part 8, and a predetermined electrical inspection is performed.

In such an electrical inspection process for the connector for inspection, the conductive silicon part frequently shrinks and expands. In such a process, the elasticity of the conductive silicon part may be reduced as the silicone rubber constituting the conductive silicon part is torn. When the elasticity of the conductive silicon part is reduced, the electrical conductivity is reduced.

In addition, the conductive particles constituting the conductive silicon part are supported by the silicone rubber. When the silicone rubber is torn in the course of frequent compression and expansion, it is difficult to firmly support the conductive particles. Therefore, And the release of such conductive particles is a major cause of reducing the overall electrical conductivity.

The present invention has been made to solve the above-mentioned problems, and more particularly, to an inspection connector for minimizing tearing of an insulating elastic material for holding conductive particles even under frequent contraction and expansion, thereby maintaining a stable electrical conduction performance for a long period of time The purpose is to provide.

In order to achieve the above object, according to the present invention, there is provided an inspection connector for electrically connecting a terminal of a device to be inspected and a pad of an inspection apparatus, the connector being disposed between the device to be inspected and the inspection apparatus,

A conductive part in which a plurality of conductive particles are arranged in a thickness direction in an insulating elastic material for each position corresponding to a terminal of the device to be inspected;

An insulating support portion disposed between the respective conductive portions to support the conductive portions while surrounding the conductive portions,

And an elastic body disposed inside each of the conductive portions and having a conductive wire wound in a spiral direction,

A plurality of the elastic bodies are disposed adjacent to each other in the conductive portion.

In the inspection connector,

Even when the respective elastic members are spaced from each other, the contact between them can be maintained.

In the inspection connector,

When N is the number of times the conductive wire is wound in the spiral direction, N? 1/2.

In the inspection connector,

A plurality of conductive particles may be distributed around the elastic body.

In the inspection connector,

When the diameter of the conductive wire is represented by d, 0.01 mm <d <3 mm.

In the inspection connector,

When the outer diameter of the spirally wound conductive wire is represented by D, 0.01 mm <D <0.5 mm.

In the elastic body of the inspection connector, D > d.

In order to achieve the above object, according to the present invention, there is provided an inspection connector for electrically connecting a terminal of a device to be inspected and a pad of an inspection apparatus, the connector being disposed between the device to be inspected and the inspection apparatus,

A conductive part in which a plurality of conductive particles are arranged in a thickness direction in an insulating elastic material for each position corresponding to a terminal of the device to be inspected;

An insulating support portion disposed between the respective conductive portions to support the conductive portions while surrounding the conductive portions,

And an elastic spring disposed inside the conductive portion and having a conductive wire wound in a spiral direction,

The elastic spring is arranged so that at least two or more of the elastic springs are intertwined with each other inside each conductive part.

In the inspection connector,

The plurality of elastic springs are disposed adjacent to each other and a plurality of conductive particles may be distributed around the plurality of elastic springs.

In the inspection connector,

At least two or more elastic springs may be arranged in the thickness direction.

Since the inspecting connector according to the present invention is made by mixing the conductive particles and the elastic body in the form of spring and using the elastic body in the conductive part, the inspecting connector is elastically deformed in the process of repeatedly inspecting the inspecting device, Even when the insulating elastic material expands at high temperatures, the adjacent springs are intertwined with each other, so that the deterioration of the electrical characteristics can be minimized.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows a connector for inspection according to the prior art; Fig.
Fig. 2 is a view showing a state of the inspection connector of Fig. 1 under a high-temperature environment; Fig.
3 is a view showing a connector for inspection according to an embodiment of the present invention;
Fig. 4 is a view showing the operation of Fig. 3; Fig.
5 is a view showing a connector for inspection according to another embodiment of the present invention.
6 is a view showing a connector for inspection according to another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The inspection connector 100 according to the present invention is disposed between the device under test 140 and the inspection device 150 and is provided with the terminal 141 of the device 140 to be inspected and the pad 151 of the inspection device 150 ) To each other.

The inspection connector 100 includes a conductive portion 110, an insulating support portion 120, and a carbon nanotube 130.

The conductive part 110 includes a plurality of conductive particles 111 arranged in a thickness direction in an insulating elastic material for each position corresponding to the terminal 141 of the device under test 140. In the conductive part 110, the conductive particles 111 exhibiting magnetism are densely contained in a state aligned so as to be aligned in the thickness direction.

As the insulating elastic material forming the conductive portion 110, a heat-resistant polymer material having a crosslinked structure is preferable. As the curable polymer material forming material that can be used to obtain such a crosslinked polymer material, various materials can be used, and specific examples thereof include silicone rubber, polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, acrylonitrile -Butadiene copolymer rubber and hydrogenated products thereof, block copolymer rubbers such as styrene-butadiene-diene block copolymer rubber and styrene-isoprene block copolymer, and hydrogenated products thereof, chloroprene rubber, urethane rubber , A polyester rubber, an epichlorohydrin rubber, an ethylene-propylene copolymer rubber, an ethylene-propylene-diene copolymer rubber, and a soft liquid epoxy rubber.

Of these, silicone rubber is preferable from the viewpoints of moldability and electrical characteristics.

When the inspection connector 100 is used for a probe test or a burn-in test on an integrated circuit formed on a wafer, a cured product of addition type liquid silicone rubber (hereinafter referred to as &quot; silicone rubber cured product &quot; , And the permanent compression set at 150 캜 is preferably 30% or less, more preferably 20% or less, and even more preferably 10% or less. When the compression permanent distortion exceeds 30%, when the obtained connector 100 for inspection is repeatedly used many times or repeatedly in a high temperature environment, permanent distortion occurs in the conductive portion 110 So that the chain of the conductive particles 111 in the conductive part 110 is disturbed, and as a result, it may become difficult to maintain the desired conductivity.

The silicone rubber cured product preferably has a durometer A hardness of 10 to 80 at 23 캜, more preferably 15 to 80, particularly preferably 20 to 80 Do. When the Durometer A hardness is less than 10, the insulating support portion that insulates the conductive portions 110 from each other when pressed is excessively distorted, and it becomes difficult to maintain the desired insulation property between the conductive portions 110 have. On the other hand, when the durometer A hardness exceeds 60, a pressing force due to a considerably large load is required in order to provide appropriate distortion to the conductive portion 110, so that the object to be inspected tends to be deformed or damaged Loses.

As the conductive particles 111 contained in the conductive portion 110 in the inspection connector 100, it is preferable to use a conductive material having a magnetic property from the viewpoint that a magnetic field can be applied to easily move the conductive particles 111 in the molding material desirable. As specific examples of the conductive particles 111 exhibiting such magnetism, metal particles showing magnetism such as iron, nickel, and cobalt, particles of these alloys, or particles containing these metals, or particles thereof as core particles, The surface of the particles is plated with a metal having a good conductivity such as gold, silver, palladium or rhodium, or inorganic particles or polymer particles such as non-magnetic metal particles or glass beads are used as core particles, Plated with a conductive magnetic material such as nickel or cobalt or a material obtained by coating the core particle with both a conductive magnetic material and a metal having good conductivity.

Among these, nickel particles are preferably used as the core particles, and the surface thereof is plated with metal having good conductivity such as gold or silver.

The means for covering the surface of the core particle with the conductive metal is not particularly limited, but can be performed by, for example, electroless plating.

In the case of using the conductive particles 111 in which the surface of the core particles is coated with a conductive metal, the coating ratio of the conductive metal on the surface of the particles (the coating ratio of the conductive metal to the surface area of the core particles Area ratio) is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 95%.

The covering amount of the conductive metal is preferably 2.5 to 50% by weight, more preferably 3 to 30% by weight, still more preferably 3.5 to 25% by weight, and most preferably 4 to 20% by weight Particularly preferred. When the conductive metal to be coated is gold, the covering amount is preferably 3 to 30% by weight, more preferably 3.5 to 25% by weight, still more preferably 4 to 20% by weight, Particularly preferably 10% by weight. When the conductive metal to be coated is silver, the covering amount is preferably 3 to 30% by weight, more preferably 4 to 25% by weight, still more preferably 5 to 23% by weight of the core particles, Particularly preferably 6 to 20% by weight.

The particle diameter of the conductive particles 111 is preferably 1 to 500 탆, more preferably 2 to 400 탆, still more preferably 5 to 300 탆, and particularly preferably 10 to 150 탆.

By using the conductive particles 111 satisfying these conditions, the obtained inspection connector 100 can be easily pressed and deformed and the conductive particles 110 in the inspection connector 100 can be easily separated from the conductive particles 111 Sufficient electrical contact can be obtained.

The shape of the conductive particles 111 is not particularly limited, but a spherical shape or a star shape is preferable in that it can be easily dispersed in the polymer material forming material.

The insulating support part 120 is disposed around the conductive part 110 to support the conductive part 110 while insulating each conductive part 110 and is made of an insulating elastic material and conductive particles 111 ) Is contained at all or hardly contained. It is preferable that the insulating support portion 120 is made of the same material as the insulating elastic material constituting the conductive portion 110. For example, a silicone rubber. However, it should be understood that the present invention is not limited thereto and various materials may be used.

The carbon nanotubes 130 are disposed between the conductive particles 111 in the respective conductive parts 110 and are wound in a coil shape. The carbon nanotubes 130 are formed in a bundle shape in which a single strand or a plurality of strands are bundled, and the carbon nanotubes 130 are elongated in one direction in a state of being wound in a fine coil shape to have a fiber shape as a whole. The carbon nanotubes 130 have an extension length smaller than the horizontal diameter of the conductive portions 110 and are formed in the conductive portions 110 with various orientations such as vertical (thickness direction), horizontal (planar direction) .

When the coil diameter of the carbon nanotubes 130 is d, the coil diameter d is preferably 0.3 to 30 占 퐉, and more preferably 0.5 to 10 占 퐉. The carbon nanotubes 130 having such a fine coil diameter are disposed between the conductive particles 111 to give elastic restoring force to the conductive portion 110 together with the silicone rubber without interfering with the conductive particles 111 . In other words, the carbon nanotubes 130 are contained in the insulating elastic material of the conductive part 110, and are wound in a coil and provide an elastic force while being elongated or compressed in the longitudinal direction, It is possible to minimize the tear of the silicone rubber, which is an insulating elastic material, by applying an elastic force. At this time, when the coil diameter is less than 0.3 탆, it is difficult to provide a sufficient elastic force. If the coil diameter is larger than 30 탆, the electric current may be interrupted between the conductive particles 111, which is undesirable.

It is preferable that the carbon nanotubes 130 have a coil diameter smaller than that of the conductive particles 111. That is, when the particle diameter of the conductive particles 111 is D, the coil diameter d of the carbon nanotubes 130 is preferably smaller than the particle diameter D of the conductive particles 111.

Since the carbon nanotubes 130 have high self-resistance, at least one of gold, silver, and nanoparticles may be coated on the surface of the carbon nanotubes 130 to form a conductive state. In addition, it is possible to manufacture by electromagnetism by plating a magnetic material such as nickel or by attaching nanoparticles. When the coating layer is formed on the carbon nanotubes 130 as described above, it is possible to improve the electrical conductivity by contacting the conductive particles 111 adjacent to each other in a state of being embedded in the insulating elastic material.

The coiled carbon nanotubes 130 are amorphous carbon fibers having a unique structure that a fiber material can not have, and have excellent elasticity. Since the coiled carbon nanotubes 130 exhibit super elasticity which is three times or more as long as the original length of the coil, the coiled carbon nanotubes 130 provide sufficient elasticity together with the silicone rubber as the insulating elastic material in the conductive part 110.

The coiled carbon nanotubes 130 may be manufactured using a catalyst for producing carbon nanotubes. For example, a heating process for heating a catalyst, a source gas and a carrier gas are supplied, and the source gas is contacted with the catalyst , And a growth step of growing a carbon nanostructure.

In the heating process, the catalyst is heated to a temperature not lower than the lowest temperature at which the raw material gas can be decomposed by the catalyst. The heating temperature may be appropriately adjusted depending on the kind of the catalyst and the type of the raw material gas. For example, the heating temperature can be set to 600 ° C or higher.

In the growth step, a raw material gas and a carrier gas are supplied to the catalyst to grow carbon nanotubes. Specifically, the supplied raw material gas is decomposed by contacting with the surface of the heated catalyst. As a result, carbon atoms decomposed and produced are deposited on the catalyst surface to form coiled carbon nanotubes. The pressure in the reaction chamber in such a growth step can be suitably controlled by the reaction conditions employed and can be carried out, for example, at atmospheric pressure. The length of the nanotubes, and the like.

The inspection connector 100 according to an embodiment of the present invention has the following operational effects.

The inspected device 140 is mounted on the inspection connector 150 in a state where the inspection connector 100 is mounted on the inspection device 150 so that the conductive part 110 is brought into contact with the pad 151 of the inspection device 150 100). The inspection connector 100 is lowered so that the terminals 141 of the device under test 140 are brought into contact with the upper surface of the conductive portion 110 as shown in FIG. When a predetermined electrical signal is applied from the inspection apparatus 150, the signal is transmitted to the inspected device 140 through the conductive unit 110 to perform a predetermined electrical inspection.

When such a coiled carbon nanotube is used to be mixed with the conductive particles 111, the elasticity of the silicone rubber constituting the conductive part 110 is compensated and the conductive part 110 is used as a base material The silicone rubber is not easily torn by an external force, and the elasticity can be maintained even if tearing occurs in the silicone rubber, so that the elasticity is not greatly deteriorated.

When the inspected device 140 contacts the socket for inspection and compresses the columnar conductive part 110 composed of the conductive particles 111 and the silicone rubber, the columnar conductive part receives a compressive force and mainly rotates about the axis of the particle column When the coiled carbon nanotube is expanded together with the silicone rubber and the device to be inspected is separated from the test socket, the coiled carbon nanotube is restored to its original state, There are advantages. Particularly, when the coiled carbon nanotube is arranged along the surface direction of the test socket, it is easy to expand together with the conductive part which expands in the transverse direction.

However, in the present invention, since the silicon rubber and the coiled carbon nanotube are given elastic force together, the tearing of the silicone rubber tends to occur, It is possible to minimize the deterioration of the conductive performance of the conductive particles 111 due to separation of the conductive particles 111 from the conductive part.

The inspection connector according to the present invention can be modified as follows.

Although the upper end of the conductive part has the same height as the insulating support part in the above embodiment, the present invention is not limited thereto. It is also possible to provide a protruding part at the upper end of the conductive part as shown in FIG.

That is, a plurality of conductive particles are densely arranged in the conductive part 210 of the inspection socket 200 and the protrusions 240 are formed in a state where the conductive parts 210 are supported by the insulating support part 220. [ Or may be integrally formed on the upper end of the conductive part 210. [

At this time, the first conductive particles 241 having a particle diameter smaller than that of the conductive particles of the conductive part 210 are densely distributed in the insulating elastic material 240, The tube 230 can be provided.

As the first conductive particles 241 are disposed in the protrusion 240 at a high density, the electrical conductivity is improved and the elastic force can be supplemented according to the arrangement of the coiled carbon nanotubes 230 do.

In the above-described embodiment, the coiled carbon nanotubes are disposed only in the conductive portion, but the present invention is not limited thereto.

6, in the inspection socket 300 having the conductive part 310 and the insulating support part 320, the coiled carbon nanotubes 330 are electrically connected to the conductive part 310 and the insulating support part 320, As shown in Fig. When the coiled carbon nanotubes 330 are also dispersedly disposed on the insulating support portion 320 as described above, there is an advantage in that the insulating support portion 320 is also resiliently retained.

While the present invention has been described with reference to the exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention.

100 ... inspection connector 110 ... conductive part
111 ... conductive particles 120 ... insulating paper
130 ... Coil-shaped carbon nanotubes 140 ... Inspection device
141 ... Terminal 150 ... Inspection device
151 ... pad

Claims (10)

A testing connector for electrically connecting a terminal of a device to be inspected and a pad of an inspecting device to each other, the insulated connector being disposed between the inspected device and the inspecting device,
A conductive part in which a plurality of conductive particles are arranged in a thickness direction in an insulating elastic material for each position corresponding to a terminal of the device to be inspected;
An insulating support portion disposed between the respective conductive portions to support the conductive portions while surrounding the conductive portions,
And carbon nanotubes disposed between the conductive particles and wound in a coil shape in each of the conductive parts,
Wherein the carbon nanotubes have a coil diameter smaller than a particle diameter of the conductive particles. The method according to claim 1,
Wherein the coil diameter of the carbon nanotubes is 0.3 to 30 占 퐉. The method according to claim 1,
Wherein the carbon nanotubes are wound in a coil shape so as to be elongated in one direction. The method of claim 3,
Wherein the carbon nanotubes extend in a plane direction perpendicular to the thickness direction. The method of claim 3,
Wherein the length of the carbon nanotubes is smaller than the diameter of the conductive portions in the horizontal direction. The method according to claim 1,
Wherein the carbon nanotubes are coated with at least one of gold, silver or nanoparticles on the surface thereof. The method according to claim 1,
Wherein the carbon nanotubes are coated with a magnetic metal on the surface thereof. 8. The method according to claim 6 or 7,
Wherein the carbon nanotubes are in contact with conductive particles adjacent to each other. The method according to claim 1,
Wherein the carbon nanotubes wound in a coil shape are dispersedly disposed on the insulating support portion. The method according to claim 1,
And a protruding portion protruding upward from the insulating support portion at an upper end of the conductive portion,
Wherein the projecting portion has a plurality of first conductive particles dispersed in the insulating elastic material and having a particle diameter smaller than that of the conductive particles,
Wherein the carbon nanotubes are provided in the protrusions. &Lt; RTI ID = 0.0 &gt; 11. &lt; / RTI &gt;

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