TWI739219B - Connector for electrical connection - Google Patents

Abstract

The invention provides a connector which is located between the inspection device and the inspected device and electrically connects the inspection device and the inspected device. The connector includes a plurality of elastic conductive parts and elastic insulating parts. The plurality of elastic conductive parts can conduct electricity in the up-down direction. The elastic insulating part separates and insulates the plurality of elastic conductive parts in the horizontal direction. The elastic insulating portion includes a plurality of electromagnetic wave shielding portions, and the plurality of electromagnetic wave shielding portions includes a plurality of carbon nanotubes that are distributed and arranged in the vertical direction and have magnetism.

Description

Connector for electrical connection

The present invention relates to a connector which is in contact with two electronic devices and electrically connects the two electronic devices.

In order to perform electrical inspection on the inspected device, a connector that contacts the inspected device and the inspection device to electrically connect the inspected device and the inspection device is used in the art. The connector transmits the electrical signal of the inspection device to the inspected device, and transmits the electrical signal of the inspected device to the inspection device. As such a connector, a conductive rubber sheet is widely known in the art.

The conductive rubber sheet can be elastically deformed according to an external force applied to the device to be inspected. The conductive rubber sheet has a plurality of conductive parts that electrically connect the inspected device and the inspection device and transmit electrical signals, and an insulating part that separates and insulates the conductive parts. The insulating part may include hardened silicone rubber.

In order to perform high-reliability inspection on the inspected device, it is necessary to shield the electromagnetic waves that will be applied to the conductive part. As an example, Korean Laid-open Patent Publication No. 10-2010-0020793 proposes to bury a ground plate containing a metal material such as stainless steel in the insulating part.

[The problem to be solved by the invention]

The above-mentioned documents require the process of embedding the ground plate of metal material in the insulating part and the process of grounding the ground plate, which increases the number of manufacturing processes and the manufacturing cost of the connector. In order to make a stable contact between the inspected device and the connector, the elasticity of the connector must be maintained above a certain level, but the grounding plate embedded in the insulating part significantly reduces the elasticity of the connector.

As the distance between the conductive parts becomes finer, the possibility of crosstalk between the conductive parts and the influence of electromagnetic waves on the conductive parts increase. Therefore, in a connector such as a conductive rubber sheet, it is necessary to provide a high-level electromagnetic shielding structure for the conductive part. In particular, it is important that such an electromagnetic wave shielding structure does not reduce the flexibility of the connector, and is provided in the connector with a low cost and a simple structure. However, the electromagnetic wave shielding structure of the connector of the prior art not only increases the number of manufacturing processes of the connector, but also deteriorates the elasticity of the connector.

An embodiment of the present invention provides a connector that electrically connects two electronic devices and has an electromagnetic wave shielding structure. An embodiment of the present invention provides a connector that electrically connects two electronic devices and has a conductive part supporting structure and an electromagnetic wave shielding structure that are simultaneously formed. [Technical means to solve the problem]

The embodiment of the present invention relates to a connector that is located between two electronic devices and electrically connects the two electronic devices. The connector of an embodiment includes a plurality of elastic conductive parts and elastic insulating parts. The plurality of elastic conductive parts can conduct electricity in the up-down direction. The elastic insulating part separates and insulates the plurality of elastic conductive parts in the horizontal direction. The elastic insulating part includes a plurality of electromagnetic wave shielding parts. The plurality of electromagnetic wave shielding parts includes a plurality of carbon nanotubes which are distributed and arranged in the vertical direction and have magnetism.

In one embodiment, the elastic insulating portion includes a plurality of first spacers, which respectively surround the plurality of elastic conductive portions and extend in the vertical direction, so that the plurality of elastic conductive portions and the plurality of electromagnetic wave shielding portions are separated in the horizontal direction.

In one embodiment, the plurality of electromagnetic wave shielding parts have a cylindrical shape extending in the vertical direction, and the plurality of first spacer parts are respectively located inside each of the plurality of electromagnetic wave shielding parts.

In one embodiment, the elastic insulating part includes a second spacer disposed at the upper end or the lower end of each electromagnetic wave shielding part.

In one embodiment, the connector includes an insulating member. The insulating member includes through holes corresponding to a plurality of elastic conductive parts, and is attached to the elastic insulating part.

In one embodiment, each of the plurality of carbon nanotubes includes a plurality of magnetic particles. A plurality of carbon nanotubes are distributed and arranged in the vertical direction by the force of a plurality of magnetic particles arranged in a magnetic field.

In one embodiment, a plurality of magnetic particles are located inside each of the plurality of carbon nanotubes.

In one embodiment, a plurality of magnetic particles are chemically bonded to carbon atoms outside each of the plurality of carbon nanotubes.

In an embodiment, each of the plurality of carbon nanotubes has a plurality of hexagonal holes, and a part of the hexagonal holes of the plurality of hexagonal holes respectively has one of the plurality of magnetic particles.

In one embodiment, the plurality of magnetic particles may include nickel, cobalt, chromium, iron, iron carbide, iron oxide, chromium oxide, nickel oxide, nickel cobalt oxide, cobalt iron, and monomolecular magnet materials. Either.

In one embodiment, one of the two electronic devices is the inspection device, and the other of the two electronic devices is the inspected device inspected by the inspection device.

In one embodiment, the elastic insulating portion and the plurality of electromagnetic wave shielding portions are composed of a plurality of carbon nanotubes each containing a plurality of magnetic particles, and a first liquid polysilicone rubber in which a plurality of carbon nanotubes are dispersed. The first liquid molding material of the material is formed. A plurality of electromagnetic wave shielding parts are formed by applying a magnetic field to the first liquid forming material in the vertical direction, and a plurality of carbon nanotubes are distributed and arranged in the vertical direction by the force of the magnetic particles arranged in the magnetic field. The plurality of elastic conductive parts are formed by applying a magnetic field to a second liquid molding material including a plurality of conductive metal particles and a second liquid silicone rubber material dispersed with a plurality of conductive metal particles in the vertical direction. The conductive metal particles are in contact with each other in a manner that can conduct electricity in the vertical direction.

In one embodiment, by applying a magnetic field to the first liquid molding material in the vertical direction by the pairs of ring-shaped magnet portions arranged oppositely in the vertical direction, the plurality of electromagnetic wave shielding portions can be formed into cylindrical shapes, respectively. [Effects of Invention]

A connector according to an embodiment of the present invention includes an elastic insulating portion including an electromagnetic wave shielding portion. The electromagnetic wave shielding part can be formed when the elastic insulating part is formed. Therefore, the connector of an embodiment can form an electromagnetic wave shielding structure with a simple structure without additional manufacturing process. According to an embodiment, the electromagnetic wave shielding part included in the elastic insulating part includes a plurality of carbon nanotubes, so the elasticity of the elastic insulating part is not reduced. According to an embodiment, the electromagnetic wave shielding portion of the elastic insulating portion includes a plurality of carbon nanotubes that are distributed and arranged in the vertical direction and have magnetism. With the electromagnetic wave shielding part of this structure, the connector of one embodiment can have an improved electromagnetic wave shielding effect and an improved crosstalk prevention effect. According to one embodiment, the carbon nanotubes with magnetism each include a plurality of magnetic particles, and the carbon nanotubes with magnetic particles have an electromagnetic wave shielding effect superior to that of pure carbon nanotubes. In addition, carbon nanotubes with magnetic particles can be arranged in a desired area in the connector using a magnetic field applied in the vertical direction. In addition, the electromagnetic wave shielding performance can be changed to various levels by adjusting the size of the magnet that applies the magnetic field and changing the size of the electromagnetic wave shielding portion.

The embodiments of the present invention are exemplified for the purpose of explaining the technical idea of the present invention. The scope of rights of the present invention is not limited to the following embodiments or specific descriptions of these embodiments.

As long as there are no other definitions, all technical and scientific terms used in the present invention have the meanings commonly understood by those with common sense in the technical field to which the present invention belongs. All terms used in the present invention are selected for the purpose of more clearly describing the present invention, and not for the purpose of limiting the scope of rights of the present invention.

The expression system used in the present invention such as "include", "have", "have", etc., as long as other meanings are not mentioned in the sentence or sentence containing the corresponding expression, it should be understood as having the possibility of including other embodiments The open-ended terms (open-ended terms).

As long as no other meaning is mentioned, the singular expression described in the present invention may include the plural meaning, and this situation is equally applicable to the singular expression described in the scope of the invention application.

The expressions such as "first" and "second" used in the present invention are used to distinguish plural constituent elements from each other, and do not limit the order or importance of corresponding constituent elements.

In the present invention, when a certain component is referred to as being “connected” or “coupled” to another component, it should be understood that a certain component can be directly connected or combined with another component, or can be Use other new components as a medium to connect or combine.

The direction indicator of "above" used in the present invention is based on the direction in which the connector is positioned relative to the inspection device, and the direction indicator of "below" refers to the opposite direction of the upper. The direction indicator of "up and down direction" used in the present invention includes an upper direction and a lower direction, but it should be understood as not referring to a specific one of the upper direction and the lower direction.

The embodiments will be described with reference to the embodiments shown in the accompanying drawings. In the accompanying drawings, the same or corresponding components are given the same reference signs. In addition, in the description of the following embodiments, repetitive description of the same or corresponding constituent elements may be omitted. However, even if the description of the constituent elements is omitted, it does not mean that such constituent elements are not included in a certain embodiment.

The embodiments described below and the examples shown in the accompanying drawings relate to a connector that is located between two electronic devices and electrically connects the two electronic devices. In the application example of the connector of the embodiment, one of the above-mentioned two electronic devices may be the inspection device, and the other of the above-mentioned two electronic devices may be the inspected device inspected by the inspection device, but the connector is The application example is not limited to this. The connector of the embodiment can be used to perform electrical connection by contacting any two electronic devices that need to be electrically connected. When the connector of the embodiment is applied to the inspection device and the inspected device, the connector of the embodiment can be used to electrically connect the inspection device and the inspected device when the inspected device is electrically inspected. As an example, the connector of the embodiment can be used for the final electrical inspection of the inspected device in the subsequent process of the semiconductor device manufacturing process. However, the inspection example of the connector of the application embodiment is not limited to the above-mentioned inspection.

Fig. 1 shows an example of a connector to which an embodiment is applied. To illustrate the embodiment, FIG. 1 shows an exemplary shape of a connector, an electronic device configuring the connector, and an electronic device contacting the connector.

1, a connector 100 of an embodiment is disposed between two electronic devices to perform electrical connection between the two electronic devices by contact. In the example shown in FIG. 1, one of the two electronic devices may be the inspection device 10, and the other may be the inspected device 20 inspected by the inspection device 10. When performing an electrical inspection on the inspected device 20, the connector 100 contacts the inspection device 10 and the inspected device 20 respectively to electrically connect the inspection device 10 and the inspected device 20 to each other.

As an example, the connector 100 can be combined to the test socket 30 as a sheet-shaped structure. The test socket 30 can have a frame 31 for holding and supporting the connector 100, and can be removably attached to the socket housing 40 by the frame 31. The socket housing 40 can be removably attached to the inspection device 10. The socket housing 40 accommodates therein the device to be inspected 20 that is transported to the inspection device 10 by the conveying device, so that the device to be inspected 20 is located in the inspection device 10.

The inspected device 20 may be a semiconductor package, but it is not limited to this. The semiconductor packaging system uses resin materials to encapsulate semiconductor IC (Integrated Circuit) chips, multiple lead frames, and multiple terminals into a hexahedral semiconductor device. The aforementioned semiconductor IC chip may be a memory IC chip or a non-memory IC chip. As the above-mentioned terminal, pins or solder balls can be used. The device to be inspected 20 shown in FIG. 1 has a plurality of hemispherical terminals 21 on its lower side.

The inspection device 10 can inspect the electrical characteristics, functional characteristics, and operating speed of the inspected device 20. The inspection device 10 may have a plurality of terminals 11 capable of outputting electrical test signals and receiving response signals in the board for performing inspection. The connector 100 can be arranged in such a way that it is in contact with the terminal 11 of the inspection device 10 through the test socket 30 and the socket housing 40. The terminal 21 of the inspected device 20 is electrically connected to the corresponding terminal 11 of the inspection device 10 through the connector 100. That is, the connector 100 electrically connects the terminal 21 of the inspected device and the terminal 11 of the inspection device corresponding to the terminal 21 of the inspected device along the vertical direction VD, thereby performing the inspection of the inspected device 20 by the inspection device 10.

Most of the connector 100 can contain elastic polymer materials, and the connector 100 can be elastic in the vertical direction VD and the horizontal direction HD. If an external force is applied to the connector 100 downward in the vertical direction VD, the connector 100 can be elastically deformed in the downward direction and the horizontal direction HD. The above-mentioned external force can be generated by the pusher device pressing the inspected device 20 toward the inspection device 10 side. With this external force, the terminal 21 of the inspected device and the connector 100 can be in contact in the vertical direction VD, and the connector 100 and the terminal 11 of the inspection device can be in contact in the vertical direction VD. If the above-mentioned external force is removed, the connector 100 can be restored to its original shape.

1, the connector 100 includes a plurality of elastic conductive parts 110 and elastic insulating parts 120. The plurality of elastic conductive parts 110 are positioned in the vertical direction VD and are configured to be conductive in the vertical direction VD. The elastic insulating portion 120 separates the plurality of elastic conductive portions 110 in the horizontal direction HD, and insulates the plurality of elastic conductive portions 110 from each other.

The elastic conductive portion 110 is in contact with the terminal 21 of the inspected device at its upper end, and is in contact with the terminal 11 of the inspection device at its lower end. Thereby, a conductive path in the vertical direction is formed between the terminal 11 and the terminal 21 corresponding to one elastic conductive portion 110 with the elastic conductive portion 110 as a medium. Therefore, the test signal of the inspection device can be transmitted from the terminal 11 through the elastic conductive portion 110 to the terminal 21 of the inspected device 20, and the response signal of the inspected device 20 can be transmitted from the terminal 21 via the elastic conductive portion 110 to the inspection device 10 Terminal 11. The upper and lower ends of the elastic conductive portion 110 may form the same plane as the upper surface and the lower surface of the elastic insulating portion 120 or slightly protrude from it.

The planar arrangement of the elastic conductive portion 110 can realize various arrangements according to the planar arrangement of the terminals 21 of the inspected device 20. For example, the elastic conductive parts 110 may be arranged in a matrix form or a pair of matrix forms in the quadrangular elastic insulating part 120. Alternatively, the elastic conductive parts 110 may be arranged in a plurality of rows along each side of the quadrangular elastic insulating part 120.

In the connector of the embodiment, the elastic insulating portion 120 includes a plurality of electromagnetic wave shielding portions 121 therein, and the plurality of electromagnetic wave shielding portions 121 are arranged between the plurality of elastic conductive portions 110 and extend in the vertical direction VD. That is, the elastic insulating portion 120 includes a plurality of electromagnetic wave shielding portions 121 to isolate and insulate the plurality of elastic conductive portions 110 in the horizontal direction HD. The plurality of electromagnetic wave shielding parts 121 includes a magnetic shielding material, so that electromagnetic waves from each elastic conductive part 110 are shielded to prevent crosstalk between adjacent elastic conductive parts 110.

In order to describe the embodiment of the connector, refer to FIG. 2 to FIG. 19. Figures 2 to 19 schematically show the shape of the connector, the shape of the elastic conductive part, the shape of the element constituting the elastic conductive part, the shape of the elastic insulating part, and the shape of the element constituting the electromagnetic wave shielding part. These are only for An example selected for understanding the embodiment.

FIG. 2 is a plan view showing a part of the connector of an embodiment, and FIG. 3 is a cross-sectional view schematically showing a part of the connector of an embodiment. 2 and 3, the connector 100 of an embodiment includes the elastic conductive portion 110 and the elastic insulating portion 120.

Each elastic conductive portion 110 functions as a conductive portion between the inspection device and the device to be inspected, and performs signal transmission in the vertical direction VD. The elastic conductive portion 110 may have a cylindrical shape extending in the vertical direction VD. In this cylindrical shape, the diameter in the middle can be smaller than the diameters of the upper and lower ends.

Each elastic conductive portion 110 includes a plurality of conductive metal particles 111 that can be contacted in a manner of conducting electricity in the vertical direction VD. The conductive metal particles 111 that can be electrically conductive in the up-down direction form a conductive path in the elastic conductive portion 110 for signal transmission in the up-down direction VD. The conductive metal particles 111 can be filled with the elastic polymer material forming the elastic insulating portion 120. In addition, each elastic conductive portion 110 has a particle holding portion 112 that holds conductive metal particles 111 in contact in the vertical direction VD. The particle holding part 112 may include an elastic polymer material constituting the elastic insulating part 120 and may hold the conductive metal particles 111 in the shape of the elastic conductive part 110. Therefore, the elastic conductive portion 110 has elasticity in the vertical direction VD and the horizontal directions HD1 and HD2. When the elastic conductive portion 110 is pressed downward in the vertical direction VD by the terminal of the inspected device, the elastic conductive portion 110 can slightly expand in the horizontal directions HD1 and HD2, and the elastic insulating portion 120 can allow such expansion of the elastic conductive portion 110.

The conductive metal particles 111 can be formed by coating the surface of the core particles with a highly conductive metal. The core particles may include metallic materials such as iron, nickel, and cobalt, or may include elastic resin materials. As the highly conductive metal covering the surface of the core particle, gold, silver, rhodium, platinum, chromium, etc. can be used.

The elastic insulating portion 120 can form a quadrangular elastic area of the connector 100. The plurality of elastic conductive parts 110 are separated and insulated from each other at equal or unequal intervals along the horizontal directions HD1 and HD2 by the elastic insulating part 120. The elastic insulating part 120 is formed as an elastic body, and a plurality of elastic conductive parts 110 are inserted into the elastic insulating part 120 in the thickness direction of the elastic insulating part 120 (vertical direction VD). The elastic insulating portion 120 includes an elastic polymer material and has elasticity in the vertical direction VD and the horizontal direction HD. The elastic insulating portion 120 not only maintains the elastic conductive portion 110 in its shape, but also maintains the elastic conductive portion 110 in the up and down direction.

The elastic insulating portion 120 may include a hardened silicone rubber material. For example, the elastic insulating portion 120 can be formed by injecting liquid silicone rubber into a forming mold for forming the connector 100 and hardening. As the liquid silicone rubber material for forming the elastic insulating portion 120, addition-molding liquid silicone rubber, condensation type liquid silicone rubber, liquid silicone rubber containing vinyl or hydroxyl groups, etc. can be used. As a specific example, the above-mentioned liquid silicone rubber material may include dimethyl silicone rubber, methyl vinyl silicone rubber, methyl phenyl vinyl silicone rubber, and the like.

The elastic insulating portion 120 includes a plurality of electromagnetic wave shielding portions 121, so that electromagnetic waves from the elastic conductive portion 110 are shielded, and crosstalk between the elastic conductive portions 110 is prevented. The plurality of electromagnetic wave shielding portions 121 are spaced apart from each elastic conductive portion 110 at least in the horizontal directions HD1 and HD2.

In one embodiment, the elastic insulating portion 120 includes a plurality of first spacer portions 124 surrounding the plurality of elastic conductive portions 110 respectively. The first spacer 124 has a substantially cylindrical shape and can extend between the upper end and the lower end of the elastic insulating portion 120 in the vertical direction VD. The elastic conductive portion 110 is located in the first spacer portion 124. In the elastic insulating portion 120, the electromagnetic wave shielding portion 121 is located on the outer side of one first spacer portion 124. The first spacing portion 124 separates the elastic conductive portion 110 and the electromagnetic wave shielding portion 121 in the horizontal directions HD1 and HD2 and separates the elastic conductive portion 110 from the electromagnetic wave shielding portion 121. The first spacer 124 includes the same material as the aforementioned elastic polymer material constituting the elastic insulating portion 120.

In one embodiment, the electromagnetic wave shielding portion 121 includes a plurality of carbon nanotubes 122 distributed and arranged along the vertical direction VD and having magnetism. The electromagnetic wave shielding part 121 realizes the function of shielding electromagnetic waves due to the magnetic carbon nanotube 122. As an example, armchair-type carbon nanotubes, single-wall carbon nanotubes, or multi-wall carbon nanotubes can be used as the carbon nanotubes constituting the electromagnetic wave shield 121. Furthermore, according to one embodiment, magnetic particles formed from ferromagnetic materials magnetized in the absence of an external magnetic field are contained in pure carbon nanotubes, whereby carbon nanotubes 122 have magnetism. That is, the carbon nanotube 122 includes a plurality of magnetic particles that exert magnetism.

As shown in FIG. 2, the electromagnetic wave shielding portion 121 including a plurality of carbon nanotubes 122 can be randomly arranged in the elastic insulating portion 120 along the horizontal directions HD1 and HD2 at unequal intervals. The electromagnetic wave shielding portion 121 can have different shapes and sizes. The planar configuration of the electromagnetic wave shield 121 shown in FIG. 2 is an example. The electromagnetic wave shielding portion 121 is more densely arranged on the outer side of each of the plurality of first spacer portions 124 than the arrangement shown in FIG. 2, and therefore can be adjacent to each other almost seamlessly.

The plurality of carbon nanotubes 122 are held in the shape of the electromagnetic wave shielding portion 121 by the elastic polymer material constituting the elastic insulating portion 120. Therefore, the electromagnetic wave shielding portion 121 may include a plurality of carbon nanotubes 122 and the above-mentioned elastic polymer material. As shown in FIG. 3, in the electromagnetic wave shield 121, a plurality of carbon nanotubes 122 are uniformly distributed and arranged along the vertical direction VD. In addition, in the carbon nanotubes 122 uniformly distributed and arranged along the vertical direction VD, at least two adjacent carbon nanotubes 122 can be inclined in the vertical direction VD, the horizontal direction HD, or the vertical direction and the horizontal direction. Contact each other in the direction. Here, the situation where the carbon nanotubes are uniformly distributed and arranged in the up and down direction may include: the carbon nanotubes 122 belonging to an electromagnetic wave shielding part along the up and down direction VD, the direction slightly inclined with respect to the up and down direction VD, or the up and down direction VD Distributed and arranged in orthogonal directions.

As shown in FIG. 3, in one electromagnetic wave shield 121, a plurality of carbon nanotubes 122 are positioned along any one of the vertical direction, the horizontal direction, and the oblique direction, so that they can be distributed and arranged in the vertical direction. The plurality of carbon nanotubes 122 positioned as described above can be held by hardened liquid silicone rubber in the middle of forming the connector 100, for example. That is, the liquid silicone rubber is hardened to form the elastic insulating portion 120, so that a plurality of carbon nanotubes 122 are arranged in the vertical direction, and the carbon nanotubes 122 can be positioned in any one of the vertical direction, the horizontal direction, and the oblique direction, respectively. . The plurality of carbon nanotubes 122 are distributed and arranged in the vertical direction VD by the force of the magnetic particles included in each carbon nanotube 122 being arranged in a magnetic field. For example, when a magnetic field is applied in the vertical direction VD, the plurality of carbon nanotubes 122 can be distributed and arranged in the vertical direction and contact with each other by the force of the magnetic particles arranged in the magnetic field along the lines of magnetic force by the magnetic force. In addition, in the middle of the behavior of the carbon nanotubes 122, the carbon nanotubes 122 can be positioned in the up-down direction, the horizontal direction, or the oblique direction, so as to be evenly distributed and arranged in the up-down direction. Related to this, the position of the magnetic particles in the carbon nanotubes, the amount of magnetic particles contained in the carbon nanotubes, the amount of carbon nanotubes with magnetic particles, the viscosity of the liquid silicone rubber material, etc. can be compared The behavior of rice carbon tubes has an impact.

As shown in FIG. 3, a plurality of carbon nanotubes 122 may be arranged in a linear shape along the vertical direction VD in the electromagnetic wave shield 121. For example, when the length of the carbon nanotube is relatively short and the amount of magnetic particles contained in the carbon nanotube is relatively large, the carbon nanotube may take a linear shape in the electromagnetic wave shield 121.

Figure 4 shows another example of the distribution and arrangement of carbon nanotubes in the vertical direction. As shown in FIG. 4, the carbon nanotubes 122 can be arranged in a curved shape along the vertical direction VD. For example, when the length of the carbon nanotube is relatively long and the amount of magnetic particles contained in the carbon nanotube is relatively small, the carbon nanotube 122 may take a curved shape in the electromagnetic wave shield 121. The carbon nanotube 122 in a curved shape can be positioned along the up and down direction, the horizontal direction, or the oblique direction.

The plurality of carbon nanotubes 122 are distributed and arranged in the vertical direction VD by the force of the magnetic particles arranged along the lines of magnetic force by the magnetic force. Regarding the formation of the electromagnetic wave shielding portion by the distribution and arrangement of such carbon nanotubes, refer to FIGS. 5 to 8 showing an example of manufacturing a connector according to an embodiment.

Fig. 5 schematically shows an example of manufacturing a connector according to an embodiment. Referring to FIG. 5, the connector of an embodiment can be formed by using a forming mold 411 and the magnetic field applying parts 421 and 422 arranged up and down on the forming mold 411. The first liquid forming material 413 can be injected into the forming cavity 412 of the forming mold 411 as the elastic polymer material for forming the connector. The first liquid molding material 413 includes the first liquid silicone rubber material and the plurality of carbon nanotubes 122, and the plurality of carbon nanotubes are dispersed in the first liquid silicone rubber material. The first liquid silicone rubber material can be one of the liquid silicone rubber materials exemplified above. Each carbon nanotube 122 includes the above-mentioned plurality of magnetic particles.

After the first liquid forming material 413 is injected into the forming cavity 412, the first and second magnetic field applying parts 421 and 422 can apply a magnetic field in the vertical direction VD. The first magnetic field application portion 421 and the second magnetic field application portion 422 are arranged to face each other in the up-down direction of the molding die 411 (ie, the connector up-down direction). The first and second magnetic field applying parts 421 and 422 have magnet parts 423 and 424 for applying a magnetic field and a plurality of holes 425 and 426 for not applying a magnetic field. The magnet portions 423, 424 and the hole portions 425, 426 may be formed in a shape in which holes are pierced in a quadrilateral flat plate. A plurality of holes 425 and 426 are respectively positioned along the up-down direction in each elastic conductive portion of the connector. Therefore, no magnetic field is applied to the vertically positioned holes 425 and 426 in the vertical direction VD.

If a magnetic field is applied by the magnet parts 423 and 424, the magnetic particles contained in each carbon nanotube 122 are attracted by the magnetic force of the magnetic field and arranged along the lines of magnetic force in the magnetic field. The carbon nanotubes 122 are uniformly distributed and arranged in the vertical direction VD by the force of the magnetic particles arranged along the lines of magnetic force in the magnetic field. As described above, the electromagnetic wave shield 121 is formed by the carbon nanotube 122 in which the magnetic particles move. Since no magnetic field is applied to the holes 425 and 426 arranged in the vertical direction, there are almost no carbon nanotubes 122 in the holes 425 and 426 facing up and down in the forming cavity 412.

The viscosity of the first liquid silicone rubber material can produce resistance to the movement of carbon nanotubes. Therefore, it is possible to select the first liquid silicone rubber material with a viscosity that allows the carbon nanotubes to be positioned in the vertical direction at a desired level. For example, considering the shielding properties of the electromagnetic wave shielding part along the direction of the carbon nanotubes, a liquid silicone rubber material with an appropriate viscosity can be selected.

In addition, the size of the carbon nanotubes 122 can be adjusted by adjusting the size of the holes 425 and 426 provided in the magnetic field applying portions 421 and 422. Thereby, the size and shielding properties of the electromagnetic wave shielding part can be adjusted.

After the plurality of carbon nanotubes 122 are distributed and arranged in the vertical direction VD, the first liquid silicone rubber material of the first liquid molding material 413 is hardened. Thus, as shown in FIG. 6, a workpiece 430 corresponding to the connector can be formed. The material 430 forms a silicone rubber part 431 containing only silicone rubber material in the vertical direction due to the holes 425 and 426 corresponding to the elastic conductive parts of the connector. The part of the material 430 other than the silicone rubber part 431 can become an elastic insulating part including an electromagnetic wave shielding part formed by carbon nanotubes distributed and arranged in the vertical direction. Therefore, the elastic insulating part of the connector may include an electromagnetic wave shielding part and be formed together with the electromagnetic wave shielding part.

7, each silicone rubber portion 431 of the material 430 has a through hole 432 along the vertical direction VD. As an example, the material 430 may be irradiated with a laser in the vertical direction VD to form the through hole 432. The part of the silicone rubber part 431 other than the through hole 432 can be the first partition part of the above-mentioned elastic insulating part.

Referring to FIG. 8, the second liquid molding material 414 is injected into the through hole 432 to fill the through hole 432. The second liquid molding material 414 includes a second liquid silicone rubber material and the plurality of conductive metal particles 111, and the plurality of conductive metal particles 111 are dispersed in the second liquid silicone rubber material. The second liquid silicone rubber material can be one of the liquid silicone rubber materials exemplified above, and can be the same as the first liquid silicone rubber material. After that, if a magnetic field is applied to the second liquid molding material 414 filled in the through hole 432 in the vertical direction VD, the conductive metal particles 111 in the second liquid molding material 414 are arranged in the magnetic field and can conduct electricity in the vertical direction VD. The way to contact. Thereby, the conductive metal particles 111 contacting each other in the vertical direction VD can form the elastic conductive portion of the connector. In addition, the liquid silicone rubber material other than the conductive metal particles 111 in the second liquid molding material 414 can form the particle holding portion of the elastic conductive portion in the through hole 432. After that, the liquid silicone rubber material in the through hole 432 hardens to form the connector 100 shown in FIG. 2.

As described above, the connector 100 of an embodiment can be formed by the first liquid forming material 413 and the second liquid forming material 414. The first liquid molding material 413 includes a plurality of carbon nanotubes 122 each containing a plurality of magnetic particles, and the above-mentioned first liquid silicone rubber material in which a plurality of carbon nanotubes 122 are dispersed. The second liquid molding material 414 includes a plurality of conductive metal particles 111 and a second liquid silicone rubber material in which the plurality of conductive metal particles 111 are dispersed. The elastic insulating portion 120 may be formed of the first liquid molding material 413, and may be formed together with a plurality of electromagnetic wave shielding portions 121. The plurality of electromagnetic wave shielding portions 121 can be formed by applying a magnetic field to the first liquid forming material 413 in the vertical direction VD, and the plurality of carbon nanotubes 122 are formed by the force of the magnetic particles arranged in the magnetic field by the magnetic force. VD distribution and arrangement along the up and down direction. That is, a plurality of electromagnetic wave shielding parts 121 can be formed by the following method: a plurality of carbon nanotubes 122 are distributed and arranged along the vertical direction VD by applying a magnetic field and the behavior of magnetic particles in the applied magnetic field. The elastic insulating portion 120 of the connector 100 can be formed by the following method: after forming a plurality of electromagnetic wave shielding portions 121 including a plurality of carbon nanotubes 122, the first liquid silicone rubber in the first liquid molding material 413 The material hardens. The plurality of elastic conductive parts 110 can be formed by the following method: the second liquid of the above-mentioned second liquid silicone rubber material including a plurality of conductive metal particles 111 and a plurality of conductive metal particles 111 dispersed along the vertical direction VD A magnetic field is applied to the molding material 414, and the plurality of conductive metal particles 111 are in contact with each other in a manner capable of conducting VD in the vertical direction. Regarding the formation of the plurality of elastic conductive parts 110, after the elastic insulating part 120 is formed from the first liquid forming material 413, the elastic insulating part 120 can be injected into the plurality of through holes 432 formed in the elastic insulating part 120 for each of the plurality of elastic conductive parts 110. The second liquid molding material 414.

Fig. 9 shows a modification of the connector of an embodiment. Referring to FIG. 9, the elastic insulating portion 120 includes a second spacer 125 disposed at the upper end and the lower end of each electromagnetic wave shielding portion 121. The second spacer 125 may be arranged above the upper end of the electromagnetic wave shielding portion 121 and below the lower end of the electromagnetic wave shielding portion 121 in the vertical direction VD. The upper surface of the second spacer 125 on the upper side may become a part of the upper surface of the elastic insulating part 120, and the lower surface of the second spacer 125 on the lower side may become a part of the lower surface of the elastic insulating part 120. The second spacer 125 does not expose the upper and lower ends of the electromagnetic wave shielding portion 121, and can prevent the terminal 21 of the inspected device from contacting the electromagnetic wave shielding portion 121 when the device to be inspected (see FIG. 1) is inspected. The second spacer 125 can be formed so as to cover the upper end and the lower end of the electromagnetic wave shielding portion 121 in the middle of forming the elastic conductive portion 110. For example, as shown in FIG. 8, in the process of injecting the second liquid forming material into the through hole to form the elastic conductive part, the second liquid silicone rubber material of the second liquid forming material can cover the upper and lower surfaces of the material 430. Then, the second liquid silicone rubber material located above the upper end and below the lower end of the electromagnetic wave shielding portion 121 is hardened, so that the second spacer 125 can be formed.

In the example shown in FIG. 9, the second spacer 125 is arranged above the upper end of the electromagnetic wave shielding portion 121 and below the lower end. As another example, the second spacer 125 may be arranged only above the upper end or below the lower end of the electromagnetic wave shielding portion 121.

Fig. 10 is a cross-sectional view schematically showing a connector of another embodiment. The connector 200 shown in FIG. 10 includes an insulating member 230 covering the elastic insulating portion 120. The insulating member 230 can be attached to the upper and lower surfaces of the elastic insulating portion 120 by covering the upper and lower surfaces of the elastic insulating portion 120, respectively. . Since the insulating member 230 covers the upper surface and the lower surface of the elastic insulating portion 120, the upper and lower ends of the electromagnetic wave shielding portion 121 are located inside the insulating member 230.

The insulating member 230 may be formed in a thin film shape. The insulating member 230 includes a plurality of through holes 231 pierced along the vertical direction VD. The plurality of through holes 231 respectively correspond to the plurality of elastic conductive parts 110. The upper end or lower end of each elastic conductive portion 110 is filled with the through hole 231. The upper end and the lower end of each elastic conductive part 110 may be at the same level as the upper or lower surface of the insulating member 230. As another example, the upper end and the lower end of each elastic conductive portion 110 may also protrude more than the upper surface or the lower surface of the insulating member 230.

As an example, the insulating member 230 may include a polyimide film having insulating properties or a film including a polymer having insulating properties. When the inspected device is inspected, the terminal 21 (refer to FIG. 1) of the inspected device is in contact with the upper end of the elastic conductive portion 110. However, since the electromagnetic wave shielding portion 121 is separated from the upper end portion of the elastic conductive portion 110 inserted into the through hole 231 by the insulating member 230, the insulating member 230 can prevent contact between the terminal 21 of the device under inspection and the electromagnetic wave shielding portion 121.

In the example shown in FIG. 10, the insulating member 230 is provided on the upper surface and the lower surface of the elastic insulating portion 120. As another example, the insulating member 230 may also be provided only on the upper surface of the elastic insulating portion 120 facing the inspected device.

The through hole 231 of the insulating member 230 may be formed in the middle of forming the connector 200. As another embodiment, the insulating member 230 with the through hole 231 can also be attached to the upper surface and the lower surface of the elastic insulating portion 120 of the formed connector 200. As shown in FIG. 10, the inner peripheral surface of the through hole 231 may be vertical. As another example, the inner peripheral surface of the through hole 231 may also be inclined at a specific angle with respect to the vertical direction VD.

11 to 14 show examples of forming the connector of the embodiment shown in FIG. 10. 11, the insulating member 230 and the first liquid molding material 413 can be put into the molding cavity 412 together. The insulating member 230 shown in FIG. 11 is not formed with the above-mentioned through hole. Using the same method as the method described with reference to FIG. 5, the carbon nanotubes 122 are distributed and arranged in the vertical direction VD by applying a magnetic field, thereby forming the electromagnetic wave shielding portion of the connector of this embodiment. As shown in FIG. 12, the material 430A is formed after the first liquid silicone rubber material of the first liquid molding material 413 is hardened. The insulating member 230 covers the upper surface and the lower surface of the material 430A. As shown in FIG. 13, a through hole 432 is formed in the material 430A by laser processing. The through hole 432 can be formed by laser processing. In addition, the through hole 432 is formed by laser processing to remove a part of the insulating member 230, thereby forming the through hole 231 in the insulating member 230. In addition, the part of the silicone rubber part 431 other than the through hole 432 can be the first partition part of the elastic insulating part. As shown in FIG. 14, the second liquid molding material 414 is injected into the through hole 432. A magnetic field is applied to the second liquid molding material 414 filled with the through-hole 432 in the vertical direction VD, and the conductive metal particles 111 are contacted in a manner capable of conducting conduction in the vertical direction VD by the magnetic force of the magnetic field. After that, the second liquid silicone rubber material in the through hole 432 hardens. Thereby, the connector 200 shown in FIG. 10 can be formed.

FIG. 15 is a perspective view schematically showing a part of the connector of still another embodiment, and FIG. 16 is a cross-sectional view schematically showing a part of the connector of still another embodiment.

15 and 16, the electromagnetic wave shielding portion 121 of the connector 300 of the present embodiment has a cylindrical shape or a ring shape, and extends between the upper end and the lower end of the elastic insulating portion 120 in the vertical direction VD. The first spacing portion 124 of the elastic insulating portion 120 is located inside the electromagnetic wave shielding portion 121. That is, the electromagnetic wave shielding portion 121 is formed in a cylindrical shape or a ring shape surrounding the first spacer portion 124. In addition, the electromagnetic wave shielding portion 121 in this embodiment is formed as a structure that completely surrounds an elastic conductive portion 110. In addition, in this embodiment, a plurality of electromagnetic wave shielding portions 121 having a cylindrical shape or a ring shape may be spaced at equal intervals in the horizontal direction HD1 or the horizontal direction HD2.

Figs. 17 and 18 show an example of forming the connector shown in Figs. 15 and 16. The connector 300 shown in FIGS. 15 and 16 can be formed in the same manner as in the above-mentioned embodiment by using a plurality of carbon nanotubes distributed and arranged in the up and down direction by applying a magnetic field to form an electromagnetic wave shielding portion, and then forming an electromagnetic wave shielding portion. The material is used to form through holes for forming elastic conductive parts, and conductive metal particles are contacted in a conductive manner by applying a magnetic field.

Referring to FIG. 17, the first and second magnetic field applying parts 421 and 422 are provided with magnet parts 463 and 464 arranged opposite to each other in the vertical direction VD at the position of each elastic conductive part. The magnet parts 463, 464 are cylindrical or ring-shaped, and circular holes 465, 466 are formed inside the ring. The magnet parts 463 and 464 arranged opposite to each other along the vertical direction VD at the position of each elastic conductive part constitute a pair. If each pair of magnet portions 463, 464 applies a magnetic field in the vertical direction VD, the carbon nanotube 122 in the first liquid molding material 413 gathers in each magnet portion 463, 464 into a cylindrical shape or ring shape due to its magnetic particles. In addition, the carbon nanotubes 122 are gathered into a cylindrical shape, and are uniformly distributed and arranged in the vertical direction VD, thereby forming the cylindrical electromagnetic wave shielding portion 121 shown in FIG. 15. That is, according to this embodiment, by applying a magnetic field to the first liquid molding material 413 in the vertical direction VD by the cylindrical magnet portions 463 and 464 arranged opposite to each other in the vertical direction VD, the electromagnetic wave shielding portion can be formed as Cylindrical shape or ring shape. In addition, by adjusting the diameter of the magnet portions 463 and 464 and the size of the holes 465 and 466, the size and shielding properties of the electromagnetic wave shielding portion can be variously changed.

Referring to FIG. 18, a cylindrical or annular electromagnetic wave shielding portion 121 is formed on the material 430B corresponding to the connector of this embodiment, and a silicone rubber portion 431 is formed inside the electromagnetic wave shielding portion 121. A through hole 432 for forming an elastic conductive part is formed in the silicone rubber part 431 by laser processing. The part of the silicone rubber part 431 excluding the through hole 432 can be the first partition part of the elastic insulating part. Thereafter, the above-mentioned second liquid molding material is injected into the through hole 432, and the conductive metal particles are brought into contact with each other in a manner capable of conducting VD in the vertical direction by applying a magnetic field. The second liquid silicone rubber material in the second liquid molding material hardening. Thereby, the connector 300 shown in FIG. 15 can be formed.

Fig. 19 schematically shows a modification of the connector of another embodiment. Referring to FIG. 19, the connector 300 of this embodiment may include the insulating member 230 shown in FIG. 10. In this case, the connector 300 provided with the insulating member can be formed by the forming method described with reference to FIGS. 11 to 14.

Carbon nanotubes that are uniformly distributed and arranged in the vertical direction to form an electromagnetic wave shield can have magnetic particles in various forms. As the above-mentioned magnetic particles, particles formed of a ferromagnetic substance magnetized in a state without an external magnetic field can be used. For example, the above-mentioned magnetic particles may include any one of nickel, cobalt, chromium, iron, iron carbide, iron oxide, chromium oxide, nickel oxide, nickel cobalt oxide, cobalt iron, and monomolecular magnet materials. As the iron carbide, triiron carbide (Fe ₃ C) can be used. As the iron oxide, ferrite (Fe ₂ O ₃ ), ferrite tetroxide (Fe ₃ O ₄ ), or ferrite can be used. As the monomolecular magnet material, Mn12 monomolecular magnet, Dysprosium(III) acetylacetonate hydrate, or Terbium(III) bis-phthalocyanine can be used.

20 to 31, various examples of carbon nanotubes containing magnetic particles in the connector of the embodiment will be described. The magnetic particles in the examples of carbon nanotubes described with reference to FIG. 20 to FIG. 31 are only examples selected for the illustrative description of carbon nanotubes containing magnetic particles. The magnetic particles in one of the above examples of the magnetic particles can be included in the carbon nanotube in the form described with reference to FIGS. 20 to 31.

Figure 20 shows an example of carbon nanotubes containing magnetic particles. Referring to FIG. 20, a plurality of magnetic particles 123 may be located inside a carbon nanotube 122. That is, the carbon nanotube 122 can contain the magnetic particles 123 in a form in which the magnetic particles 123 are inserted into the inner space of the carbon nanotube 122. For an example of inserting magnetic particles into the inner space of the carbon nanotube, refer to Figures 21 to 25.

Carbon nanotubes can be generated and grown by chemical vapor deposition (CVD). In the middle of generating and growing carbon nanotubes by chemical vapor deposition, the above-mentioned magnetic particles can be used as a catalyst to be inserted into the inner space of the carbon nanotubes. As an example, the production and growth of carbon nanotubes using chemical vapor deposition can be carried out by the following method: hydrocarbon gas is supplied as a transfer gas to a reactor for chemical vapor deposition, and it is installed in the reactor. The substrate grows carbon nanotubes in the vertical direction. Figures 21 to 23 schematically show examples of carbon nanotubes being generated and grown by chemical vapor deposition and magnetic particles are inserted into the inner space of the carbon nanotubes.

21, the magnetic particles 123 or clusters of magnetic particles 123 are weakly bonded to the surface of the substrate 511 containing silicon or aluminum. The hydrocarbon gas supplied as the transfer gas is decomposed into carbon and hydrogen by thermal decomposition on the upper portion of the magnetic particles 123. At the upper end of the magnetic particles 123, the temperature and carbon concentration increase due to thermal decomposition, and the magnetic particles 123 are separated from the substrate 511. As the carbon spreads and precipitates in a colder area, the carbon nanotube 122 can be formed by including the magnetic particles 123 from the substrate 511 in the vertical direction.

Referring to FIG. 22, the magnetic particle clusters 513 are deposited on the surface of the substrate 511. The magnetic particle clusters 513 on the surface of the substrate 511 are exposed to the hydrocarbon gas. The hydrocarbon gas is catalytically heated and decomposed on the surface of the cluster 513 to be decomposed into hydrogen and carbon. The decomposed carbon diffuses and precipitates from the high-concentration high-temperature region to the cold region of the cluster 513, so that the carbon nanotube 122 can include the magnetic particle cluster 513 and is formed from the substrate 511 in the up and down direction.

Referring to FIG. 23, while carbon nanotubes are grown by chemical vapor deposition, the inside of the carbon nanotubes can be filled with magnetic particles. In the middle of the carbon nanotube 122 growing at a slow speed, the magnetic particle clusters installed in the crucible vaporize and can be put into the growing carbon nanotube. The magnetic particle clusters are attached to the open ends of the carbon nanotubes 122, so that the carbon nanotubes 122 can grow at a faster speed. The cluster 513 is deformed due to the force of the rapidly growing carbon nanotubes around the magnetic particle cluster 513. If the supply of the magnetic particle clusters 513 as the catalyst material is stopped, the carbon nanotubes 122 can grow slowly again.

A graphine sheet with magnetic particles can be rolled up in a way to become a carbon nanotube to form a carbon nanotube with magnetic particles inserted in the internal space. Fig. 24 schematically shows an example of rolling up a graphene sheet with magnetic particles attached to form a carbon nanotube. 24, the magnetic particles 123 can be attached to the graphene sheet 521 using arc discharge, and the graphene sheet 521 is rolled up to form a carbon nanotube 122 with magnetic particles inserted. For example, a solution containing magnetic particles can be put into a container having a cathode electrode and an anode electrode made of graphite, and a direct current is supplied to the cathode electrode and the anode electrode to perform arc discharge between the cathode electrode and the anode electrode. With arc discharge, the temperature inside the container can rise to about 3000 degrees. At this temperature, the magnetic particles are ionized into nanoparticles, and graphene sheets are formed from electrodes made of graphite, and magnetic particles can be attached to the graphene sheets.

Capillary effect can also be used to form carbon nanotubes with magnetic particles inserted into the internal space. Figure 25 shows an example of using capillary effect to insert magnetic particles into carbon nanotubes. Referring to FIG. 25, carbon nanotubes 532 are grown on the surface of the holes of the substrate 531 containing alumina by chemical vapor deposition. The transport fluid 533 containing the above-mentioned magnetic particles is dropped onto the carbon nanotube 532. Thus, the conveying fluid 533 fills the carbon nanotube 532 by the capillary effect. The conveying fluid 533 can be filled with the carbon nanotube 532 entirely or partially. After that, when the conveying fluid 533 is dried, the magnetic particles 123 are put into the inside of the carbon nanotube 532. Thereby, a carbon nanotube 122 with magnetic particles 123 inserted into the inner space can be formed. If the substrate 531 containing alumina is dissolved in a sodium hydroxide (NaOH) solution, a carbon nanotube 122 with magnetic particles 123 inserted into the inner space can be obtained. As another example, by dissolving the substrate 531 in a sodium hydroxide (NaOH) solution, the carbon nanotubes 532 generated by chemical vapor deposition and grown on the substrate 531 containing alumina are separated from the substrate 531. After that, the transfer fluid 533 is dropped onto the carbon nanotube 532, and the inside of the carbon nanotube 532 is filled with the transfer fluid 533 by the capillary effect. Thereafter, the conveying fluid 533 is dried, thereby obtaining a carbon nanotube 122 in which magnetic particles 123 are inserted in the inner space.

In the example of the carbon nanotube described with reference to FIGS. 21 to 25, the carbon nanotube 122 may have a closed end. Figure 26 shows a carbon nanotube with magnetic particles inserted and one end closed. Referring to FIG. 26, the carbon nanotube 122 with one end closed can prevent the magnetic particles 123 inserted into the inner space from escaping from the carbon nanotube 122.

Figure 27 shows another example of carbon nanotubes containing magnetic particles. Referring to FIG. 27, the magnetic particles 123 may be bonded to the carbon nanotube 122 on the outer side of a carbon nanotube 122. In detail, each magnetic particle 123 can be bonded to the carbon atom of the carbon nanotube 122 by chemical bonding. Figures 28 and 29 schematically show examples of magnetic particles bonded to carbon atoms of carbon nanotubes through chemical bonding.

28, if the pure carbon nanotubes 541 are treated with nitric acid (HNO ₃ ), hydroxyl (OH) and carboxyl groups (COOH) are attached to the carbon atoms of the carbon nanotubes 541. Thereafter, nickel and cobalt are used as precursors to be attached to the carbon nanotubes 541 with hydroxyl (OH) and carboxyl (COOH). Thereafter, the carbon nanotube 122 shown in FIG. 27, that is, the magnetic particles 123 bonded to the carbon atoms of the carbon nanotube by chemical bonding, can be obtained by hydrothermal treatment and annealing treatment. Meter carbon tube 122. The magnetic particles 123 at this time may be nickel cobalt oxide (NiCo ₂ O ₄ ).

FIG. 29 shows another example of magnetic particles bonding to carbon atoms of carbon nanotubes through chemical bonding, and shows a situation in which magnetic particles are bonded to carbon atoms of carbon nanotubes through a so-called click chemical reaction. As shown on the left side of FIG. 29, carbon nanotubes 542 modified with alkyne are bonded to a dendrimer having an azide containing magnetic particles 123 (magnetic particles of iron oxide in FIG. 29). In this case, the carbon nanotube 542 and the above-mentioned dendrimer together with sodium ascorbate and copper sulfate (CuSO ₄ ) were put into mixing tetrahydrofolic acid and tetrahydrofolic acid at a ratio of 3:1. It reacts with a solution of water (H _{2 O).} As a result, as shown on the right side of FIG. 29, a carbon nanotube 122 with magnetic particles 123 bonded to the carbon atoms of the carbon nanotube 122, that is, a carbon nanotube 122 with magnetic particles 123 bonded to the outer surface of the carbon nanotube, can be obtained.

Figure 30 shows another example of carbon nanotubes containing magnetic particles. Referring to FIG. 30, the carbon nanotube 122 has a plurality of hexagonal holes composed of 6 carbon atoms on the graphitic wall. A part of the hexagonal holes among the plurality of hexagonal holes respectively have one of the plurality of magnetic particles 123. The plurality of magnetic particles 123 are randomly located in one of the plurality of hexagonal holes, respectively. In the carbon nanotube shown in FIG. 30, the magnetic particles are not located in the inner space of the carbon nanotube or the outside of the carbon nanotube, and the magnetic particles 123 are located in the hexagonal hole of the carbon nanotube and are confined in the hexagonal hole. That is, the carbon nanotube 122 shown in FIG. 30 has a particle-free surface structure, and therefore does not affect the contact between the carbon nanotubes 122.

Figure 31 schematically shows an example of a carbon nanotube with magnetic particles located in the hexagonal hole of the carbon nanotube. As shown on the left side of FIG. 31, a substrate 551 including a plate 552 containing aluminum and a template 553 containing anodic aluminum oxide and having a plurality of holes 554 on the plate 552 can be used. Carbon nanotubes can be generated along the cylindrical wall 555 of the hole 554 of the template 553. The cylindrical wall surface 555 is coated with the above-mentioned magnetic particles (for example, Fe ₃ O _{4 ).} The substrate 551 on which the cylindrical wall surface 555 is coated with magnetic particles is arranged in a reactor for chemical vapor deposition. By heating in the reactor, Fe ₃ O _{4 is} reduced to FeC. As shown on the right side of FIG. 31, the carbon nanotube 122 is generated and grown along the cylindrical wall 555 by chemical vapor deposition. There is no space between the cylindrical wall 555 and the carbon nanotube 122, so the magnetic particles cannot escape to the outside of the carbon nanotube 122 and are confined in the hexagonal hole of the carbon nanotube 122.

Above, the technical idea of the present invention has been described by some embodiments and the examples shown in the accompanying drawings. However, it should be understood that the technology of the present invention can be understood by those with common sense in the technical field to which the present invention belongs. Various substitutions, changes, and changes are made within the scope of thought and scope. In addition, such replacements, changes and alterations should be understood as falling within the scope of the attached invention application patent.

10: Check the device 11: Terminal 20: Device under inspection 21: Terminal 30: Test socket 31: Frame 40: socket shell 100: connector 110: Elastic conductive part 111: Conductive metal particles 112: Particle holding part 120: Elastic insulating part 121: Electromagnetic wave shielding part 122: Carbon Nanotube 123: Magnetic particles 124: The first compartment 125: The second compartment 200: Connector 230: Insulating member 231: Through hole 300: Connector 411: forming die 412: forming cavity 413: The first liquid forming material 414: The second liquid forming material 421: The first magnetic field application part 422: The second magnetic field application part 423, 424: Magnet part 425, 426: Hole 430: Material 430A: Material 430B: Material 431: Silicone Rubber Department 432: Through hole 463, 464: Magnet part 465, 466: Hole 511: substrate 513: Magnetic particle cluster (cluster) 521: Graphene sheet 531: Substrate 532: Carbon Nanotube 533: Handling fluids 541: Carbon Nanotube 542: Carbon Nanotube 551: Substrate 552: Board 553: template 554: hole 555: Cylindrical wall HD: horizontal direction HD1: horizontal direction HD2: horizontal direction VD: Up and down direction

Fig. 1 is a cross-sectional view schematically showing an example of a connector to which an embodiment is applied.

Fig. 2 is a plan view schematically showing a connector of an embodiment.

Fig. 3 is a cross-sectional view schematically showing a part of the connector of an embodiment.

Fig. 4 is a cross-sectional view schematically showing another example of the distribution and arrangement of carbon nanotubes in the vertical direction.

Fig. 5 is a cross-sectional view schematically showing an example of manufacturing the connector shown in Fig. 2.

Fig. 6 is a cross-sectional view schematically showing an example of manufacturing the connector shown in Fig. 2 and showing materials corresponding to the connector.

FIG. 7 shows an example in which through holes corresponding to the elastic conductive portions are formed in the material shown in FIG. 6.

FIG. 8 shows an example of forming a connector of an embodiment by injecting a liquid molding material into the through hole shown in FIG. 7.

Fig. 9 is a cross-sectional view schematically showing a modification of the connector of an embodiment.

Fig. 10 is a cross-sectional view schematically showing a connector of another embodiment.

Fig. 11 is a cross-sectional view schematically showing an example of manufacturing the connector shown in Fig. 10.

Fig. 12 is a cross-sectional view schematically showing an example of manufacturing the connector shown in Fig. 10, and shows materials corresponding to the connector.

FIG. 13 shows an example in which through holes corresponding to the elastic conductive portions are formed in the material shown in FIG. 12.

FIG. 14 shows an example of forming a connector of another embodiment by injecting a liquid molding material into the through hole shown in FIG. 13.

Fig. 15 is a perspective view schematically showing a part of a connector of another embodiment.

Fig. 16 is a cross-sectional view schematically showing a part of a connector of another embodiment.

Fig. 17 is a cross-sectional view schematically showing an example of manufacturing the connector shown in Fig. 15.

Fig. 18 shows an example of forming a through hole corresponding to the elastic conductive portion in the material.

Fig. 19 is a cross-sectional view schematically showing a modification of the connector of another embodiment.

Figure 20 shows an example of carbon nanotubes containing magnetic particles.

Fig. 21 schematically shows an example of forming the carbon nanotube illustrated in Fig. 20.

Fig. 22 schematically shows another example of forming the carbon nanotube illustrated in Fig. 20.

Fig. 23 schematically shows another example of forming the carbon nanotube illustrated in Fig. 20.

Fig. 24 schematically shows another example of forming the carbon nanotube illustrated in Fig. 20.

Fig. 25 schematically shows another example of forming the carbon nanotube illustrated in Fig. 20.

Figure 26 schematically shows a carbon nanotube with closed ends.

Figure 27 shows another example of carbon nanotubes containing magnetic particles.

Fig. 28 schematically shows an example of forming the carbon nanotube illustrated in Fig. 27.

Fig. 29 schematically shows another example of forming the carbon nanotube illustrated in Fig. 27.

Figure 30 shows another example of carbon nanotubes containing magnetic particles.

Fig. 31 schematically shows an example of forming the carbon nanotube illustrated in Fig. 30.

100: connector

110: Elastic conductive part

111: Conductive metal particles

112: Particle holding part

120: Elastic insulating part

121: Electromagnetic wave shielding part

122: Carbon Nanotube

124: The first compartment

HD1: horizontal direction

HD2: horizontal direction

VD: Up and down direction

Claims (13)

A connector, which is located between two electronic devices and electrically connects the two electronic devices, comprising: a plurality of elastic conductive parts, which can conduct electricity in the vertical direction; The elastic conductive parts are separated and insulated in the horizontal direction, wherein the elastic insulating part includes: a plurality of electromagnetic wave shielding parts, which are located between the plurality of elastic conductive parts and include a plurality of carbon nanotubes with magnetism; and A plurality of first spacers respectively surround the plurality of elastic conductive parts, the plurality of first spacers extend in the vertical direction, and the plurality of elastic conductive parts and the plurality of electromagnetic wave shielding parts are separated in the horizontal direction , Wherein the plurality of electromagnetic wave shielding parts shield the elastic electromagnetic waves of the plurality of elastic conductive parts and prevent crosstalk between the plurality of elastic conductive parts, and the plurality of carbon nanotubes are distributed and arranged along the up and down direction And contact each other to form the above-mentioned plural electromagnetic wave shielding parts. The connector of claim 1, wherein the plurality of electromagnetic wave shielding portions are in a cylindrical shape extending in the vertical direction, and the plurality of first spacer portions are respectively located inside each of the plurality of electromagnetic wave shielding portions. The connector of claim 1, wherein the elastic insulating portion includes an electromagnetic wave shield The second spacer at the upper or lower end. The connector of claim 1, wherein the connector further includes an insulating member, and the insulating member includes a plurality of through holes corresponding to the plurality of elastic conductive portions, and is attached to the elastic insulating portion. The connector of claim 1, wherein each of the plurality of carbon nanotubes includes a plurality of magnetic particles. The connector of claim 5, wherein the plurality of carbon nanotubes are distributed and arranged in the up-down direction by the force of the magnetic arrangement of the plurality of magnetic particles in a magnetic field. The connector of claim 5, wherein the plurality of magnetic particles are located inside each of the plurality of carbon nanotubes. The connector of claim 5, wherein the plurality of magnetic particles are chemically bonded to carbon atoms outside each of the plurality of carbon nanotubes. Such as the connector of claim 5, wherein each of the plurality of carbon nanotubes has a plurality of hexagonal holes, and a part of the hexagonal holes of the plurality of hexagonal holes respectively has one of the plurality of magnetic particles. The connector according to any one of claims 7 to 9, wherein the plurality of magnetic particles include nickel, cobalt, chromium, iron, iron carbide, iron oxide, chromium oxide, nickel oxide, nickel cobalt oxide, Any of cobalt iron and monomolecular magnet materials. Such as the connector of claim 1, wherein one of the two electronic devices is an inspection device, and the other of the two electronic devices is a device to be inspected by the inspection device. A connector, which is located between an inspection device and a device to be inspected and electrically connects the inspection device and the device to be inspected, comprising: a plurality of elastic conductive parts, which can conduct electricity in the vertical direction; and an elastic insulating part , Which separates and insulates the plurality of elastic conductive parts in the horizontal direction, wherein the elastic insulating part includes: a plurality of electromagnetic wave shielding parts, which are located between the plurality of elastic conductive parts, and the plurality of electromagnetic wave shielding parts shield The elastic electromagnetic waves of the plurality of elastic conductive parts and the prevention of crosstalk between the plurality of elastic conductive parts; and a plurality of first spacers respectively surrounding the plurality of elastic conductive parts, the plurality of first spacers Extending in the vertical direction, the plurality of elastic conductive parts and the plurality of electromagnetic wave shielding parts are separated in the horizontal direction, wherein the plurality of electromagnetic wave shielding parts include a plurality of carbon nanotubes, each of the plurality of carbon nanotubes Comprising a plurality of magnetic particles, wherein the elastic insulating part and the plurality of electromagnetic wave shielding parts are composed of a first liquid silicone rubber material comprising the plurality of carbon nanotubes and the plurality of carbon nanotubes dispersed The first liquid molding material is formed, in which the plurality of electromagnetic wave shielding portions are formed in the following manner, namely, along the upper and lower sides A magnetic field is applied to the first liquid forming material in the direction, and the plurality of carbon nanotubes are distributed and arranged in the vertical direction by the force of the magnetic particles being arranged in the magnetic field, and the plurality of carbon nanotubes are brought into contact with each other, And the plurality of elastic conductive portions are formed by forming a second liquid silicone rubber material including a plurality of conductive metal particles and a second liquid polysiloxane rubber material dispersed with the plurality of conductive metal particles in the vertical direction. 2. A magnetic field is applied to the liquid molding material, and the plurality of conductive metal particles are brought into contact with each other so as to be conductive in the vertical direction. The connector of claim 12, wherein the plurality of electromagnetic wave shielding portions are respectively formed by applying a magnetic field to the first liquid molding material in the vertical direction by each pair of ring-shaped magnet portions arranged oppositely in the vertical direction It is cylindrical.

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