TWI550980B - Connection connector and method of manufacturing the same - Google Patents

Connection connector and method of manufacturing the same Download PDF

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Publication number
TWI550980B
TWI550980B TW104117452A TW104117452A TWI550980B TW I550980 B TWI550980 B TW I550980B TW 104117452 A TW104117452 A TW 104117452A TW 104117452 A TW104117452 A TW 104117452A TW I550980 B TWI550980 B TW I550980B
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conductive
connector
sheet member
connection
sheet
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TW104117452A
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Chinese (zh)
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TW201611448A (en
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鄭永倍
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Isc股份有限公司
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R11/00Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts
    • H01R11/01Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts characterised by the form or arrangement of the conductive interconnection between the connecting locations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors

Description

連接用連接器以及連接用連接器的製造方法 Connector for connection and method of manufacturing connector for connection

本發明概念是有關於連接用連接器以及所述連接用連接器的製造方法,且更特定而言,是有關於導電粒子經配置以在所述連接用連接器的厚度方向密集的連接用連接器以及所述連接用連接器的製造方法。 The present invention relates to a connector for connection and a method of manufacturing the connector for the connection, and more particularly, to a connection for a conductive particle to be densely arranged in a thickness direction of the connector for connection. And a method of manufacturing the connector for the connection.

一般而言,待測試裝置與測試設備之間的穩定電連接是測試待測試裝置的電特性所必需的。連接用連接器通常用作為待測試裝置與測試設備之間用於連接的設備。 In general, a stable electrical connection between the device under test and the test equipment is necessary to test the electrical characteristics of the device under test. A connector for connection is generally used as a device for connection between a device to be tested and a test device.

連接用連接器將待測試裝置的端子連接至測試設備的襯墊以允許電信號在所述裝置與測試設備之間交換。為此目的,連接用連接器可包含各向異性薄片或彈簧式頂針以作為連接裝置。各向異性薄片可包含用於與待測試裝置的端子連接的彈性導電部分,且彈簧式頂針可包含用以使待測試裝置與測試設備之間的連接平穩且緩衝在連接期間可能發生的機械碰撞的彈簧。因此,此等各向異性薄片或彈簧式頂針被用於大部分測試座中。 A connector is used to connect the terminals of the device to be tested to the pads of the test device to allow electrical signals to be exchanged between the device and the test device. For this purpose, the connector for connection may comprise an anisotropic sheet or a spring-loaded thimble as a connecting means. The anisotropic sheet may comprise an elastic conductive portion for connection to a terminal of the device to be tested, and the spring-loaded thimble may comprise a smooth connection to cushion the device to be tested and the test device and to cushion mechanical collisions that may occur during the connection Spring. Therefore, such anisotropic sheets or spring-loaded thimbles are used in most test sockets.

就各向異性薄片而言,由於與需要電連接的待測試裝置 的端子的頻繁接觸,彈性導電部分的上部末端可能容易損壞。亦即,在具有大量導電粒子配置於柔軟矽橡膠中的形式的導電部分中,由於與待測試裝置的端子(其由金屬材料形成)的頻繁接觸,柔軟矽橡膠可能容易損壞。因此,安置於導電部分中的導電粒子可漂移離開導電部分,且因此,導電部分的導電性可能下降。 In the case of an anisotropic sheet, due to the device to be tested that requires electrical connection Frequent contact of the terminals, the upper end of the elastic conductive portion may be easily damaged. That is, in the conductive portion of the form having a large amount of conductive particles disposed in the soft rubber, the soft rubber may be easily damaged due to frequent contact with the terminal of the device to be tested which is formed of a metal material. Therefore, the conductive particles disposed in the conductive portion may drift away from the conductive portion, and thus, the conductivity of the conductive portion may decrease.

為了解決所述問題,韓國專利公開案第10-2006-0013429號揭露各向異性導電連接用連接器裝置10,如參看圖1所詳細描述。參看圖1,各向異性導電連接用連接器裝置10包含矩形的各向異性導電層10A、形成於各向異性導電層10A的表面上的薄片型連接用連接器20,以及具有矩形板形狀且支撐各向異性導電層10A的支撐構件30。各向異性導電連接用連接器裝置10的各向異性導電層10A包含各自在其厚度方向上延伸的多個導電路徑形成部分11,以及用於使多個導電路徑形成部分11彼此絕緣的絕緣部分14。在圖1中,多個導電路徑形成部分11視晶格點位置而以規則間距安置。另外,各向異性導電層10A由絕緣彈性聚合物材料形成,且導電路徑形成部分11中的每一者含有具有磁性且在各向異性導電層10A的厚度方向上成直線定向的導電粒子P。然而,絕緣部分14根本不包含或幾乎不包含導電粒子。在圖1中,各向異性導電層10A的中心部分的表面比周邊邊緣部分突出。有效導電路徑形成部分12(其電連接至連接目標電極,例如待測試的電路裝置的測試電極)形成於導電路徑形成部分11中的每一者的各向異性導電層10A的中心部分中。另外,無效導電路徑形成部分13(其未電連接至連接目標電極)形成於各向異性導電層10A的 周邊邊緣部分中。有效導電路徑形成部分12以對應於連接目標電極的圖案的圖案安置。絕緣部分14整體地形成以包圍個別的導電路徑形成部分11。因此,所有導電路徑形成部分11藉由絕緣部分14而相互絕緣。薄片型連接用連接器20具有可撓性的絕緣薄片21,且由金屬形成且在絕緣薄片21的厚度方向上延伸的多個電極結構22經配置以在絕緣薄片21的表面方向上彼此分開以形成對應於連接目標電極的圖案的圖案。 In order to solve the problem, the connector device 10 for anisotropic conductive connection is disclosed in Korean Patent Publication No. 10-2006-0013429, which is described in detail with reference to FIG. Referring to Fig. 1, an anisotropic conductive connection connector device 10 includes a rectangular anisotropic conductive layer 10A, a sheet-type connection connector 20 formed on a surface of an anisotropic conductive layer 10A, and has a rectangular plate shape and The support member 30 supporting the anisotropic conductive layer 10A. The anisotropic conductive layer 10A of the connector device 10 for anisotropic conductive connection includes a plurality of conductive path forming portions 11 each extending in the thickness direction thereof, and an insulating portion for insulating the plurality of conductive path forming portions 11 from each other 14. In Fig. 1, a plurality of conductive path forming portions 11 are arranged at regular intervals in accordance with lattice point positions. In addition, the anisotropic conductive layer 10A is formed of an insulating elastic polymer material, and each of the conductive path forming portions 11 contains conductive particles P having magnetic properties and oriented in a line direction in the thickness direction of the anisotropic conductive layer 10A. However, the insulating portion 14 does not contain or hardly contains conductive particles at all. In FIG. 1, the surface of the central portion of the anisotropic conductive layer 10A protrudes from the peripheral edge portion. An effective conductive path forming portion 12 (which is electrically connected to a connection target electrode such as a test electrode of a circuit device to be tested) is formed in a central portion of the anisotropic conductive layer 10A of each of the conductive path forming portions 11. In addition, the ineffective conductive path forming portion 13 (which is not electrically connected to the connection target electrode) is formed on the anisotropic conductive layer 10A. In the peripheral edge section. The effective conductive path forming portion 12 is disposed in a pattern corresponding to the pattern of the connection target electrodes. The insulating portion 14 is integrally formed to surround the individual conductive path forming portions 11. Therefore, all of the conductive path forming portions 11 are insulated from each other by the insulating portion 14. The sheet-type connecting connector 20 has a flexible insulating sheet 21, and a plurality of electrode structures 22 formed of metal and extending in the thickness direction of the insulating sheet 21 are disposed to be separated from each other in the surface direction of the insulating sheet 21 A pattern corresponding to a pattern connecting the target electrodes is formed.

製造各向異性導電連接用連接器裝置10的方法說明於圖2及圖3中。詳細地,如圖2中所說明,薄片型連接用連接器20安置於模具中,且導電粒子P分散且填充在模製材料層19中。接下來,藉由操作安置於上部模具50中的鐵磁性基板51的上表面及下部模具55中的鐵磁性基板56的下表面上的電磁體(未圖示),具有強度分佈的平行磁場(亦即,具有大強度的平行磁場)在模製材料層19的厚度方向上施加在上部模具50的鐵磁性層52與下部模具55的鐵磁性層57(其對應於上部模具50的鐵磁性層52)之間。結果,如圖3中所示,分散在模製材料層19中的導電粒子可集中在每一導電路徑形成部分11(其安置於上部模具50的鐵磁性層52與下部模具55的鐵磁性層57之間)形成所在的區域中,且可在模製材料層19的厚度方向上成直線定向。 A method of manufacturing the anisotropic conductive connection connector device 10 will be described with reference to FIGS. 2 and 3. In detail, as illustrated in FIG. 2, the sheet-type connecting connector 20 is placed in a mold, and the conductive particles P are dispersed and filled in the molding material layer 19. Next, by operating an electromagnet (not shown) disposed on the upper surface of the ferromagnetic substrate 51 and the lower surface of the ferromagnetic substrate 56 in the lower mold 55 disposed in the upper mold 50, a parallel magnetic field having an intensity distribution ( That is, a parallel magnetic field having a large strength is applied to the ferromagnetic layer 52 of the upper mold 50 and the ferromagnetic layer 57 of the lower mold 55 in the thickness direction of the molding material layer 19 (which corresponds to the ferromagnetic layer of the upper mold 50) 52) between. As a result, as shown in FIG. 3, the conductive particles dispersed in the molding material layer 19 can be concentrated on each of the conductive path forming portions 11 (which are disposed in the ferromagnetic layer 52 of the upper mold 50 and the ferromagnetic layer of the lower mold 55). Between 57) is formed in the region where it is and can be oriented in a straight line in the thickness direction of the molding material layer 19.

接下來,藉由使模製材料層19硬化,各向異性導電層10A(其包含導電路徑形成部分11及絕緣部分14)形成,且薄片型連接用連接器20整體地附接在各向異性導電層10A的一個表面上,且各向異性導電層10A的周邊邊緣部分連接至支撐構件30且由 所述支撐構件30支撐。在導電路徑形成部分11中,導電粒子密集地含於彈性聚合物材料中,同時在各向異性導電層10A的厚度方向上成直線定向。絕緣部分14形成以包圍導電路徑形成部分11中的每一者且由絕緣彈性聚合物材料(其中導電粒子根本不存在或幾乎不存在)形成。 Next, by hardening the molding material layer 19, an anisotropic conductive layer 10A (which includes the conductive path forming portion 11 and the insulating portion 14) is formed, and the sheet-type connecting connector 20 is integrally attached to the anisotropy On one surface of the conductive layer 10A, and the peripheral edge portion of the anisotropic conductive layer 10A is connected to the support member 30 and The support member 30 is supported. In the conductive path forming portion 11, the conductive particles are densely contained in the elastic polymer material while being linearly oriented in the thickness direction of the anisotropic conductive layer 10A. The insulating portion 14 is formed to surround each of the conductive path forming portions 11 and is formed of an insulating elastic polymer material in which conductive particles are not present at all or hardly exist.

在如圖1中所說明的習知各向異性導電連接用連接器裝置中,當電極結構由鎳材料形成時,在薄片型連接用連接器被放入模具中的狀態中磁場施加至模製材料層19時,所述電極結構充當鐵磁性物質,藉此影響導電粒子的配置。在此情況下,由於所述電極結構中的每一者的下表面具有平面形狀,因此不容易配置導電粒子。 In the conventional anisotropic conductive connection connector device as illustrated in FIG. 1, when the electrode structure is formed of a nickel material, a magnetic field is applied to the molding in a state where the sheet-type connection connector is placed in the mold. In the case of the material layer 19, the electrode structure acts as a ferromagnetic substance, thereby affecting the configuration of the conductive particles. In this case, since the lower surface of each of the electrode structures has a planar shape, it is not easy to dispose the conductive particles.

當每兩個電極結構之間的間隔相對寬時,不存在問題。為了製造每兩個電極結構之間的間隔相對窄的產品,導電粒子必須以大致圓柱形形式配置在垂直方向上。然而,當所述電極結構中的每一者的下表面具有平面形狀時,形成於垂直方向上的磁力可不執行校正導電粒子的功能,且因此,如圖4中所示,連接每兩個導電路徑形成部分11的橋11'可於每兩個導電路徑形成部分11之間形成。橋11'由漂移離開導電路徑形成部分11的導電粒子形成。 When the spacing between each two electrode structures is relatively wide, there is no problem. In order to produce a product having a relatively narrow spacing between every two electrode structures, the conductive particles must be arranged in a substantially cylindrical form in the vertical direction. However, when the lower surface of each of the electrode structures has a planar shape, the magnetic force formed in the vertical direction may not perform the function of correcting the conductive particles, and thus, as shown in FIG. 4, each of the two conductive layers is connected The bridge 11' of the path forming portion 11 can be formed between every two conductive path forming portions 11. The bridge 11' is formed of conductive particles that drift away from the conductive path forming portion 11.

當橋11'產生時,所述電測試的可靠性可能下降。 When the bridge 11' is produced, the reliability of the electrical test may be degraded.

本發明概念提供一種連接用連接器,其可在製造過程期 間減少連接鄰近導電部分的橋的產生。 The inventive concept provides a connector for connection, which can be used in the manufacturing process The generation of a bridge connecting adjacent conductive portions is reduced.

本發明概念亦提供一種製造所述連接用連接器的方法。 The inventive concept also provides a method of manufacturing the connector for connection.

根據本發明概念的一態樣,提供一種連接用連接器,其安置於需要彼此電連接的待測試裝置與測試設備之間且將所述裝置的端子分別地電連接至所述測試設備的襯墊,所述連接用連接器包含:包含薄片構件及導電電極的連接薄片,其中所述薄片構件具有形成於對應於所述裝置的所述端子的位置處的多個通孔且由可撓性且絕緣之材料形成,且所述導電電極與所述多個通孔組合且自所述薄片構件的上表面向上凸起以及自所述薄片構件的下表面向下凸起;以及包含導電部分及絕緣部分的各向異性薄片,其中所述導電部分安置在所述連接薄片的所述導電電極下,接觸所述導電電極且在所述各向異性薄片的厚度方向上具有導電性,且所述絕緣部分支撐所述導電部分且使所述導電部分絕緣,其中在所述連接薄片的所述導電電極的每一者中,自所述薄片構件的所述下表面向下凸起的部分的邊緣具有圓形形狀。 According to an aspect of the inventive concept, a connector for connection is provided between a device to be tested and a test device that are required to be electrically connected to each other and a terminal of the device is electrically connected to a lining of the test device, respectively. a pad, the connector for connection comprising: a connection sheet including a sheet member and a conductive electrode, wherein the sheet member has a plurality of through holes formed at positions corresponding to the terminals of the device and is flexible And an insulating material is formed, and the conductive electrode is combined with the plurality of through holes and protrudes upward from an upper surface of the sheet member and protrudes downward from a lower surface of the sheet member; and includes a conductive portion and An anisotropic sheet of an insulating portion, wherein the conductive portion is disposed under the conductive electrode of the connection sheet, contacts the conductive electrode and has conductivity in a thickness direction of the anisotropic sheet, and An insulating portion supports the conductive portion and insulates the conductive portion, wherein in each of the conductive electrodes of the connection sheet, from the sheet member The lower surface of the edge portion of the downward projections has a circular shape.

在所述導電電極的每一者中,自所述薄片構件的所述下表面向下凸起的所述部分可具有圓頂形狀或半球形形狀。 In each of the conductive electrodes, the portion that protrudes downward from the lower surface of the sheet member may have a dome shape or a hemispherical shape.

所述導電電極的上表面可鍍以鎳粉末或鎳-鑽石混合物粉末。 The upper surface of the conductive electrode may be plated with a nickel powder or a nickel-diamond mixture powder.

多個凸塊可配置於所述導電電極的每一者的所述上表面上,且以圓形形式配置,同時與所述導電電極的每一者的所述上表面的中心隔開特定距離。 A plurality of bumps may be disposed on the upper surface of each of the conductive electrodes and configured in a circular form while being spaced apart from a center of the upper surface of each of the conductive electrodes by a certain distance .

在所述導電電極的每一者中,自所述薄片構件的所述上表面向上凸起的部分可具有圓頂形狀。 In each of the conductive electrodes, a portion that protrudes upward from the upper surface of the sheet member may have a dome shape.

在所述導電部分中,自所述薄片構件的所述上表面向上凸起的部分的水平區域可大於自所述薄片構件的所述下表面向下凸起的部分的水平區域。 In the conductive portion, a horizontal area of a portion that protrudes upward from the upper surface of the sheet member may be larger than a horizontal area of a portion that protrudes downward from the lower surface of the sheet member.

所述導電部分可具有多個導電粒子在所述各向異性薄片的所述厚度方向上配置在彈性絕緣材料中的結構。 The conductive portion may have a structure in which a plurality of conductive particles are disposed in the elastic insulating material in the thickness direction of the anisotropic sheet.

根據本發明概念的另一態樣,提供一種連接用連接器的製造方法,所述連接用連接器安置於需要彼此電連接的待測試裝置與測試設備之間且將所述裝置的端子分別地電連接至所述測試設備的襯墊,所述方法包含:製備包含薄片構件及導電電極的連接薄片,其中所述薄片構件具有形成於對應於所述裝置的所述端子的位置處的多個通孔且由可撓性且絕緣之材料形成,所述導電電極包含鐵磁性物質、與所述多個通孔組合且自所述薄片構件的上表面向上凸起以及自所述薄片構件的下表面向下凸起,且在所述導電電極的每一者中,自所述薄片構件的所述下表面向下凸起的部分的邊緣具有圓形形狀;製備模具,在所述模具中,鐵磁性層安置於對應於所述連接薄片的所述導電電極的位置處且非磁性層安置於除對應於所述導電電極的所述位置以外的位置處,以及除了將所述連接薄片安置於所述模具中之外,亦將液體模製材料填充至所述模具中,在所述液體模製材料中,導電粒子分散在液體彈性材料中;以及將磁場在所述模具的垂直方向上施加至所述模具中,使得所述導電粒子在對應於所述導電電極的位置處排成行,以及 使所述液體模製材料硬化。 According to another aspect of the inventive concept, there is provided a method of manufacturing a connector for connection between a device to be tested and a test device that are required to be electrically connected to each other and a terminal of the device separately Electrically connected to the gasket of the test device, the method comprising: preparing a connection sheet comprising a sheet member and a conductive electrode, wherein the sheet member has a plurality of locations formed at positions corresponding to the terminals of the device a through hole and formed of a flexible and insulating material, the conductive electrode comprising a ferromagnetic substance, combined with the plurality of through holes and protruding upward from an upper surface of the sheet member and from a lower portion of the sheet member The surface is convex downward, and in each of the conductive electrodes, an edge of a portion that protrudes downward from the lower surface of the sheet member has a circular shape; a mold is prepared, in the mold, a ferromagnetic layer disposed at a position corresponding to the conductive electrode of the connection sheet and a non-magnetic layer disposed at a position other than the position corresponding to the conductive electrode, and In addition to disposing the connecting sheet in the mold, a liquid molding material is also filled into the mold, in which the conductive particles are dispersed in the liquid elastic material; and the magnetic field is a vertical direction of the mold is applied to the mold such that the conductive particles are aligned at a position corresponding to the conductive electrode, and The liquid molding material is hardened.

在所述導電電極的每一者中,自所述薄片構件的所述下表面向下凸起的所述部分可具有圓頂形狀或半球形形狀。 In each of the conductive electrodes, the portion that protrudes downward from the lower surface of the sheet member may have a dome shape or a hemispherical shape.

所述導電電極的每一者可包含選自鐵、鎳、鈷或其合金的至少一種材料。 Each of the conductive electrodes may comprise at least one material selected from the group consisting of iron, nickel, cobalt, or alloys thereof.

在根據本發明概念的連接用連接器中,連接薄片的每一導電電極的下邊緣具有圓形形狀,且因此執行在製造過程中累積磁力的功能,藉此使橋的產生減至最少。 In the connector for connection according to the inventive concept, the lower edge of each of the conductive electrodes of the connection sheet has a circular shape, and thus performs a function of accumulating magnetic force during the manufacturing process, thereby minimizing the generation of the bridge.

10‧‧‧各向異性導電連接用連接器裝置 10‧‧‧Connector device for anisotropic conductive connection

10A‧‧‧各向異性導電層 10A‧‧‧Anisotropic conductive layer

11‧‧‧導電路徑形成部分 11‧‧‧ Conductive path forming part

11'‧‧‧橋 11'‧‧‧ Bridge

12‧‧‧有效導電路徑形成部分 12‧‧‧ Effective conductive path forming part

13‧‧‧無效導電路徑形成部分 13‧‧‧Invalid conductive path forming part

14‧‧‧絕緣部分 14‧‧‧Insulation

19‧‧‧模製材料層 19‧‧‧Molded material layer

20‧‧‧薄片型連接用連接器 20‧‧‧Sheet type connector

21‧‧‧絕緣薄片 21‧‧‧Insulation sheet

22‧‧‧電極結構 22‧‧‧Electrode structure

30‧‧‧支撐構件 30‧‧‧Support members

50、151‧‧‧上部模具 50, 151‧‧‧ upper mold

51、56、1512、1521‧‧‧鐵磁性基板 51, 56, 1512, 1521‧‧‧ ferromagnetic substrate

52、57、1511、1522‧‧‧鐵磁性層 52, 57, 1511, 1522‧‧‧ ferromagnetic layer

55、152‧‧‧下部模具 55, 152‧‧‧ lower mold

100‧‧‧連接用連接器 100‧‧‧Connector connector

110‧‧‧連接薄片 110‧‧‧Connecting sheets

120‧‧‧薄片構件 120‧‧‧Sheet members

121‧‧‧通孔 121‧‧‧through hole

130‧‧‧導電電極 130‧‧‧Conductive electrode

131‧‧‧上部電極 131‧‧‧Upper electrode

132‧‧‧下部電極 132‧‧‧lower electrode

133‧‧‧連接電極 133‧‧‧Connecting electrode

134‧‧‧鎳粉末 134‧‧‧ Nickel powder

135‧‧‧凸塊 135‧‧ ‧bumps

140‧‧‧各向異性薄片 140‧‧‧ anisotropic sheet

141‧‧‧導電部分 141‧‧‧Electrical part

142‧‧‧絕緣部分 142‧‧‧Insulation

150‧‧‧模具 150‧‧‧Mold

170‧‧‧裝置 170‧‧‧ device

171‧‧‧端子 171‧‧‧terminal

180‧‧‧測試設備 180‧‧‧Test equipment

181‧‧‧襯墊 181‧‧‧ cushion

1411、P‧‧‧導電粒子 1411, P‧‧‧ conductive particles

1513、1523‧‧‧非磁性層 1513, 1523‧‧‧ non-magnetic layer

圖1為習知各向異性導電連接用連接器的圖。 Fig. 1 is a view showing a conventional connector for anisotropic conductive connection.

圖2及圖3為說明製造圖1的習知各向異性導電連接用連接器的方法的圖。 2 and 3 are views for explaining a method of manufacturing the conventional anisotropic conductive connection connector of Fig. 1.

圖4為說明藉由使用圖2及圖3中所說明的方法製造的各向異性導電連接用連接器的實例的圖。 4 is a view illustrating an example of an anisotropic conductive connection connector manufactured by using the method illustrated in FIGS. 2 and 3.

圖5為根據本發明概念的例示性實施例的連接用連接器的圖。 FIG. 5 is a diagram of a connector for connection according to an exemplary embodiment of the inventive concept.

圖6A至圖6C為說明製造圖5的連接用連接器的方法的圖。 6A to 6C are views for explaining a method of manufacturing the connector for connection of Fig. 5.

圖7A及圖7B為說明製造根據本發明概念的另一例示性實施例的連接用連接器的方法的圖。 7A and 7B are diagrams illustrating a method of manufacturing a connector for connection according to another exemplary embodiment of the inventive concept.

圖8為根據本發明概念的另一例示性實施例的連接用連接器 的圖。 FIG. 8 is a connector for connection according to another exemplary embodiment of the inventive concept. Figure.

現將參看附圖更全面地描述本發明概念,本發明概念的例示性實施例展示於所述附圖中。 The inventive concept will now be described more fully hereinafter with reference to the accompanying drawings.

參看圖5,根據本發明概念的例示性實施例的連接用連接器100安置於需要彼此電連接的待測試之裝置170與測試設備180之間,且將裝置170的端子171分別地電連接至測試設備180的襯墊181。 Referring to FIG. 5, a connector 100 for connection according to an exemplary embodiment of the inventive concept is disposed between a device 170 to be tested and a test device 180 that are required to be electrically connected to each other, and electrically connects the terminals 171 of the device 170 to the terminals 171, respectively. The pad 181 of the test device 180.

連接用連接器100包含連接薄片110及各向異性薄片140。 The connector 100 for connection includes a connection sheet 110 and an anisotropic sheet 140.

連接薄片110安置於各向異性薄片140的上表面上以接觸裝置170的端子171,且包含薄片構件120及導電電極130。 The connection sheet 110 is disposed on the upper surface of the anisotropic sheet 140 to contact the terminal 171 of the device 170, and includes the sheet member 120 and the conductive electrode 130.

薄片構件120具有形成於分別對應於裝置170的端子171的位置處的多個通孔,且由可撓性且絕緣之材料形成。薄片構件120可由以下各者形成:熱固性樹脂,諸如聚醯亞胺樹脂或環氧樹脂;聚酯樹脂,諸如聚對苯二甲酸伸乙酯(PET)樹脂或聚對苯二甲酸丁二酯樹脂;或熱塑樹脂,諸如聚氯乙烯樹脂、聚苯乙烯樹脂、聚丙烯腈樹脂、聚乙烯樹脂、聚丙烯樹脂、丙烯酸類樹脂、聚丁二烯樹脂、聚苯醚聚苯硫醚、聚醯胺或聚甲醛。較佳地,薄片構件120可由聚醯亞胺樹脂形成。 The sheet member 120 has a plurality of through holes formed at positions corresponding to the terminals 171 of the device 170, respectively, and is formed of a flexible and insulating material. The sheet member 120 may be formed of a thermosetting resin such as a polyimide resin or an epoxy resin, a polyester resin such as a polyethylene terephthalate (PET) resin or a polybutylene terephthalate resin. Or thermoplastic resin, such as polyvinyl chloride resin, polystyrene resin, polyacrylonitrile resin, polyethylene resin, polypropylene resin, acrylic resin, polybutadiene resin, polyphenylene ether polyphenylene sulfide, polyfluorene Amine or polyoxymethylene. Preferably, the sheet member 120 may be formed of a polyimide resin.

然而,薄片構件120不限於此且可由網狀物或非編織品形成。較佳地,薄片構件120可由有機纖維形成。有機纖維之實例 可包含氟樹脂纖維,諸如聚四氟乙烯纖維、芳族聚醯胺纖維、聚乙烯纖維、聚芳酯纖維、尼龍纖維以及聚酯纖維。 However, the sheet member 120 is not limited thereto and may be formed of a mesh or a non-woven fabric. Preferably, the sheet member 120 may be formed of organic fibers. Organic fiber example Fluororesin fibers such as polytetrafluoroethylene fibers, aromatic polyamide fibers, polyethylene fibers, polyarylate fibers, nylon fibers, and polyester fibers may be included.

另外,薄片構件120可由具有相同或類似於連接目標構件的材料的線性熱膨脹係數的 In addition, the sheet member 120 may be of a linear thermal expansion coefficient having the same or similar material as the connection target member.

有機纖維形成,例如,具有30×10-6至-5×10-6/K且特別地10×10-6至-3×10-6/K的線性熱膨脹係數的有機纖維。在此情況下,由於各向異性導電層的熱膨脹受抑制,因此與連接目標構件的電連接可穩定地維持,即使薄片構件120經受由溫度變化引起的熱歷程。 The organic fiber is formed, for example, an organic fiber having a linear thermal expansion coefficient of 30 × 10 -6 to -5 × 10 -6 / K and particularly 10 × 10 -6 to -3 × 10 -6 / K. In this case, since the thermal expansion of the anisotropic conductive layer is suppressed, the electrical connection with the connection target member can be stably maintained even if the sheet member 120 is subjected to a heat history caused by a temperature change.

形成於薄片構件120中的通孔121的內徑可小於導電電極130的最大外徑。通孔121可藉由雷射形成。然而,本發明概念不限於此,且舉例而言,通孔121可藉由諸如鑽孔之機械加工形成。 The inner diameter of the through hole 121 formed in the sheet member 120 may be smaller than the maximum outer diameter of the conductive electrode 130. The through hole 121 can be formed by laser. However, the inventive concept is not limited thereto, and for example, the through hole 121 may be formed by machining such as drilling.

導電電極130與薄片構件120的通孔121組合,且自薄片構件120的上表面向上凸起以及自薄片構件120的下表面向下凸起。導電電極130的上表面平坦,且導電電極130的下表面具有圓頂形狀或半球形形狀。詳細地,導電電極130包含自薄片構件120向上凸起的上部電極131、自薄片構件120向下凸起的下部電極132以及連接上部電極131與下部電極132且插入通孔121中的連接電極133。上部電極131具有大致圓盤形狀,且下部電極132具有大致圓頂或半球形形狀。 The conductive electrode 130 is combined with the through hole 121 of the sheet member 120, and protrudes upward from the upper surface of the sheet member 120 and protrudes downward from the lower surface of the sheet member 120. The upper surface of the conductive electrode 130 is flat, and the lower surface of the conductive electrode 130 has a dome shape or a hemispherical shape. In detail, the conductive electrode 130 includes an upper electrode 131 that protrudes upward from the sheet member 120, a lower electrode 132 that protrudes downward from the sheet member 120, and a connection electrode 133 that connects the upper electrode 131 and the lower electrode 132 and is inserted into the through hole 121. . The upper electrode 131 has a substantially disk shape, and the lower electrode 132 has a substantially dome shape or a hemispherical shape.

導電電極130可由具有極佳導電性的鐵磁性物質(例如,鐵、鎳、鈷或其合金)形成。多個導電電極130附接至薄片構件 120以分別對應於裝置170的端子171且彼此分開。 The conductive electrode 130 may be formed of a ferromagnetic substance (for example, iron, nickel, cobalt, or an alloy thereof) having excellent conductivity. A plurality of conductive electrodes 130 are attached to the sheet member 120 to correspond to the terminals 171 of the device 170 and are separated from each other, respectively.

導電電極130的上表面可鍍以鎳粉末134或鎳-鑽石混合物粉末。詳細地,僅鎳粉134可安置於導電電極130的上表面上。然而,鑽石粉末以及鎳粉末134可安置於導電電極130的上表面上以容易地移除裝置170的電極表面上的外來物質。 The upper surface of the conductive electrode 130 may be plated with nickel powder 134 or a nickel-diamond mixture powder. In detail, only the nickel powder 134 may be disposed on the upper surface of the conductive electrode 130. However, diamond powder and nickel powder 134 may be disposed on the upper surface of the conductive electrode 130 to easily remove foreign matter on the electrode surface of the device 170.

在導電電極130中,自薄片構件120向上凸起的上部電極131的水平區域大於自薄片構件120向下凸起的下部電極132的水平區域。 In the conductive electrode 130, the horizontal area of the upper electrode 131 that protrudes upward from the sheet member 120 is larger than the horizontal area of the lower electrode 132 that protrudes downward from the sheet member 120.

各向異性薄片140安置在連接薄片110的導電電極130下且接觸導電電極130。各向異性薄片140包含在其厚度方向上具有導電性的導電部分141以及用於支撐導電部分141且使所述導電部分141絕緣的絕緣部分142。 The anisotropic sheet 140 is disposed under the conductive electrode 130 of the connection sheet 110 and contacts the conductive electrode 130. The anisotropic sheet 140 includes a conductive portion 141 having conductivity in a thickness direction thereof and an insulating portion 142 for supporting the conductive portion 141 and insulating the conductive portion 141.

導電部分141具有大量導電粒子1411在各向異性薄片140的厚度方向上配置在彈性絕緣材料中的結構。 The conductive portion 141 has a structure in which a large amount of conductive particles 1411 are disposed in the elastic insulating material in the thickness direction of the anisotropic sheet 140.

用於形成導電部分141的所述彈性絕緣材料可為交聯彈性聚合物。所述交聯彈性聚合物可自各種可固化聚合物形成材料獲得,例如:共軛二烯橡膠,諸如聚丁二烯橡膠、天然橡膠、聚異戊二烯橡膠、苯乙烯-丁二烯共聚物橡膠或丙烯腈-丁二烯共聚物橡膠,以及其氫化材料;嵌段共聚物橡膠,諸如苯乙烯-丁二烯-二烯嵌段共聚物橡膠或苯乙烯-異戊二烯嵌段共聚物橡膠,以及其氫化材料;氯丁二烯橡膠;胺基甲酸酯;聚酯橡膠;表氯醇橡膠;聚矽氧橡膠;乙烯-丙烯共聚物橡膠;以及乙烯-丙烯-二烯共聚物橡膠。 The elastic insulating material for forming the conductive portion 141 may be a crosslinked elastic polymer. The crosslinked elastic polymer can be obtained from various curable polymer forming materials, for example, conjugated diene rubber, such as polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymerization. Rubber or acrylonitrile-butadiene copolymer rubber, and hydrogenated materials thereof; block copolymer rubber, such as styrene-butadiene-diene block copolymer rubber or styrene-isoprene block copolymer Rubber, and its hydrogenated material; chloroprene rubber; urethane; polyester rubber; epichlorohydrin rubber; polyoxyxene rubber; ethylene-propylene copolymer rubber; and ethylene-propylene-diene copolymer rubber.

當各向異性薄片140需要耐候性時,可使用除上文所述 的橡膠中的共軛二烯橡膠外的橡膠,且特別地,根據模製可加工性及電特性,可使用矽橡膠。 When the anisotropic sheet 140 requires weather resistance, it can be used in addition to the above The rubber other than the conjugated diene rubber in the rubber, and in particular, ruthenium rubber can be used depending on the moldability and electrical properties.

使用磁性導電粒子作為導電粒子1411,因為磁性導電粒子可藉由稍後將描述的方法定向。導電粒子1411的實例可包含具有磁性的金屬(諸如鐵、鈷或鎳)的粒子、所述金屬的合金的粒子或含有此等金屬的粒子;使用此等粒子作為核心粒子且使核心粒子的表面鍍以具有高導電性的金屬(例如金、銀、鈀、銠或類似者)的粒子;使用非磁性金屬粒子、無機物質粒子(諸如玻璃珠或聚合粒子)作為核心粒子且使核心粒子的表面鍍以具有導電磁性金屬(諸如鎳或鈷)的粒子,以及類似者。 Magnetic conductive particles are used as the conductive particles 1411 because the magnetic conductive particles can be oriented by a method to be described later. Examples of the conductive particles 1411 may include particles of a magnetic metal such as iron, cobalt or nickel, particles of an alloy of the metal or particles containing such metals; using such particles as core particles and making the surface of the core particles a particle plated with a metal having high conductivity (for example, gold, silver, palladium, rhodium or the like); using non-magnetic metal particles, inorganic substance particles such as glass beads or polymer particles as core particles and surface of the core particles Plated with particles having a conductive magnetic metal such as nickel or cobalt, and the like.

較佳地,可使用藉由將鎳粒子(核心粒子)的表面鍍以具有相對較高導電性的金獲得的粒子。 Preferably, particles obtained by plating the surface of the nickel particles (core particles) with gold having a relatively high conductivity can be used.

絕緣部分142在支撐導電部分141時使導電部分141絕緣且整體地連接至導電部分141。絕緣部分142可由與用於形成導電部分141的彈性絕緣材料相同的材料形成,但不限於此。絕緣部分142可由不同於用於形成導電部分141的彈性絕緣材料的材料形成。舉例而言,絕緣部分142可由具有彈性高於用於形成導電部分141的彈性絕緣材料的材料形成。 The insulating portion 142 insulates the conductive portion 141 and integrally connects to the conductive portion 141 while supporting the conductive portion 141. The insulating portion 142 may be formed of the same material as the elastic insulating material for forming the conductive portion 141, but is not limited thereto. The insulating portion 142 may be formed of a material different from the elastic insulating material used to form the conductive portion 141. For example, the insulating portion 142 may be formed of a material having an elasticity higher than that of the elastic insulating material for forming the conductive portion 141.

參看圖6A至圖6C在下文描述製造連接用連接器100的方法。 A method of manufacturing the connector 100 for a connection will be described below with reference to FIGS. 6A to 6C.

如圖6A中所說明,製備包含薄片構件120及導電電極130的連接薄片110。通孔121(展示於圖5中)在對應於待測試之裝置170的端子171(展示於圖5中)的位置處形成於薄片構件 120中,且薄片構件120由可撓性且絕緣的材料形成。導電電極130由鐵磁性物質形成,與薄片構件120的通孔121組合,且自薄片構件120的上表面向上凸起以及自薄片構件120的下表面向下凸起。自薄片構件120的下表面向下凸起的部分邊緣具有圓形形狀。 As illustrated in FIG. 6A, a connection sheet 110 including a sheet member 120 and a conductive electrode 130 is prepared. A through hole 121 (shown in FIG. 5) is formed on the sheet member at a position corresponding to the terminal 171 (shown in FIG. 5) of the device 170 to be tested. 120, and the sheet member 120 is formed of a flexible and insulating material. The conductive electrode 130 is formed of a ferromagnetic substance, combined with the through hole 121 of the sheet member 120, and protrudes upward from the upper surface of the sheet member 120 and protrudes downward from the lower surface of the sheet member 120. A portion of the edge that protrudes downward from the lower surface of the sheet member 120 has a circular shape.

接下來,如圖6B中所說明,製備模具150,且將連接薄片110安置於模具150中。在模具150中,在對應於連接薄片110的導電電極130的位置處安置鐵磁性層1511,且在除了對應於導電電極130的位置以外的位置處安置非磁性層1513。模具150包括上部模具151及下部模具152。在上部模具151中,於鐵磁性基板1512的表面上在對應於導電電極130的位置處形成鐵磁性層1511,且於鐵磁性基板1512的表面上在除了對應於導電電極130以外的位置的位置處形成非磁性層1513。模製表面是由鐵磁性層1511及非磁性層1513形成。同樣地,在下部模具152中,鐵磁性層1522及非磁性層1523形成於鐵磁性基板1521上。另外,將液體模製材料(其中導電粒子1411分散在液體彈性材料中)填充至模具150中。 Next, as illustrated in FIG. 6B, the mold 150 is prepared, and the connection sheet 110 is placed in the mold 150. In the mold 150, the ferromagnetic layer 1511 is disposed at a position corresponding to the conductive electrode 130 of the connection sheet 110, and the non-magnetic layer 1513 is disposed at a position other than the position corresponding to the conductive electrode 130. The mold 150 includes an upper mold 151 and a lower mold 152. In the upper mold 151, a ferromagnetic layer 1511 is formed on the surface of the ferromagnetic substrate 1512 at a position corresponding to the conductive electrode 130, and on a surface of the ferromagnetic substrate 1512 at a position other than the position corresponding to the conductive electrode 130. A non-magnetic layer 1513 is formed. The molding surface is formed of a ferromagnetic layer 1511 and a non-magnetic layer 1513. Similarly, in the lower mold 152, a ferromagnetic layer 1522 and a non-magnetic layer 1523 are formed on the ferromagnetic substrate 1521. In addition, a liquid molding material in which the conductive particles 1411 are dispersed in the liquid elastic material is filled into the mold 150.

接下來,如圖6C中所說明,在垂直方向上將磁場施加至模具150中,使得導電粒子1411在對應於導電電極130的位置處排成行,且所述液體模製材料硬化以使連接用連接器100完整。 Next, as illustrated in FIG. 6C, a magnetic field is applied to the mold 150 in the vertical direction such that the conductive particles 1411 are lined up at positions corresponding to the conductive electrodes 130, and the liquid molding material hardens to make the connection Complete with connector 100.

在根據本發明概念的例示性實施例的連接用連接器100中,導電粒子1411藉由將磁場施加至連接用連接器100而在連接用連接器100的厚度方向上排成行,且因此,具有圓頂狀下部部 分的導電電極130在形成導電部分141的過程中累積磁力,藉此使將導電部分141彼此連接的橋的產生減至最少。 In the connection connector 100 according to the exemplary embodiment of the inventive concept, the conductive particles 1411 are aligned in the thickness direction of the connection connector 100 by applying a magnetic field to the connection connector 100, and thus, With a dome-shaped lower part The divided conductive electrodes 130 accumulate magnetic forces in the process of forming the conductive portions 141, thereby minimizing the generation of bridges connecting the conductive portions 141 to each other.

詳細地,在連接薄片110插入於模具150中的狀態中,連接薄片110的導電電極130與形成於模具150中的鐵磁性層1511一起使導電粒子1411配置在厚度方向上。在此過程中,導電粒子1411可密集地配置,因為導電電極130的下部部分中的每一者具有不具成角邊緣的圓頂或半球形形狀。 In detail, in a state where the connection sheet 110 is inserted into the mold 150, the conductive electrode 130 of the connection sheet 110 together with the ferromagnetic layer 1511 formed in the mold 150 causes the conductive particles 1411 to be disposed in the thickness direction. In this process, the conductive particles 1411 may be densely arranged because each of the lower portions of the conductive electrodes 130 has a dome or hemispherical shape without an angled edge.

另外,在根據本發明概念的例示性實施例的連接用連接器100中,導電電極130中的每一者的上部截面積大於導電電極130中的每一者的下部截面積,且因此,導電電極130可容易接觸待測試之裝置170的端子171。具體言之,導電部分141始終處於接觸狀態中,而待測試之裝置170是自托盤轉移以接觸連接用連接器100,且在此過程中,裝置170的端子171可不與導電電極130正確地對準。然而,由於導電電極130的大小相對較大,因此裝置170的端子171可一定接觸導電電極130,即使裝置170稍微偏離其常規位置。 In addition, in the connector 100 for connection according to an exemplary embodiment of the inventive concept, an upper sectional area of each of the conductive electrodes 130 is larger than a lower sectional area of each of the conductive electrodes 130, and thus, conductive The electrode 130 can easily contact the terminal 171 of the device 170 to be tested. Specifically, the conductive portion 141 is always in a contact state, and the device 170 to be tested is transferred from the tray to contact the connector 100 for connection, and in the process, the terminal 171 of the device 170 may not be correctly aligned with the conductive electrode 130. quasi. However, since the size of the conductive electrode 130 is relatively large, the terminal 171 of the device 170 may necessarily contact the conductive electrode 130 even if the device 170 is slightly offset from its normal position.

根據本發明概念的例示性實施例連接用連接器100可進行如下修改。 The connector 100 for connection according to an exemplary embodiment of the inventive concept may be modified as follows.

在上文所述的例示性實施例中,雖然導電電極130的上表面鍍以鎳粒子,但本發明概念不限於此。舉例而言,如圖7A及圖7B中所說明,多個凸塊135可配置於每一導電電極130的上表面上,且以圓形形式配置,同時與每一導電電極130的上表面的中心隔開特定距離。 In the exemplary embodiment described above, although the upper surface of the conductive electrode 130 is plated with nickel particles, the inventive concept is not limited thereto. For example, as illustrated in FIGS. 7A and 7B , a plurality of bumps 135 may be disposed on the upper surface of each of the conductive electrodes 130 and disposed in a circular form while being on the upper surface of each of the conductive electrodes 130 . The center is separated by a certain distance.

又,在上文所述的例示性實施例中,雖然導電電極130的上表面是平坦的,但本發明概念不限於此。舉例而言,如圖8中所說明,自薄片構件120的上表面向上凸起的每一導電電極130的部分可具有圓頂形狀。 Also, in the above-described exemplary embodiment, although the upper surface of the conductive electrode 130 is flat, the inventive concept is not limited thereto. For example, as illustrated in FIG. 8, a portion of each of the conductive electrodes 130 that protrude upward from the upper surface of the sheet member 120 may have a dome shape.

所述例示性實施例應僅從描述意義上考慮且不用於限制的目的。因此,本發明概念的範疇並非由本發明概念的詳細描述界定,而是由所附申請專利範圍界定,且在範疇內的所有差異將解釋為包含於本發明概念中。 The illustrative embodiments should be considered in a descriptive sense only and not for the purpose of limitation. Therefore, the scope of the inventive concept is not defined by the detailed description of the present invention, but is defined by the scope of the appended claims, and all the differences within the scope will be construed as being included in the inventive concept.

100‧‧‧連接用連接器 100‧‧‧Connector connector

110‧‧‧連接薄片 110‧‧‧Connecting sheets

120‧‧‧薄片構件 120‧‧‧Sheet members

121‧‧‧通孔 121‧‧‧through hole

130‧‧‧導電電極 130‧‧‧Conductive electrode

131‧‧‧上部電極 131‧‧‧Upper electrode

132‧‧‧下部電極 132‧‧‧lower electrode

133‧‧‧連接電極 133‧‧‧Connecting electrode

134‧‧‧鎳粉末 134‧‧‧ Nickel powder

140‧‧‧各向異性薄片 140‧‧‧ anisotropic sheet

141‧‧‧導電部分 141‧‧‧Electrical part

142‧‧‧絕緣部分 142‧‧‧Insulation

170‧‧‧待測試裝置 170‧‧‧Testing device

171‧‧‧待測試裝置的端子 171‧‧‧ Terminals of the device to be tested

180‧‧‧測試設備 180‧‧‧Test equipment

181‧‧‧測試設備的襯墊 181‧‧‧Test equipment gasket

1411‧‧‧導電粒子 1411‧‧‧ conductive particles

Claims (10)

一種連接用連接器,其安置於需要彼此電連接的待測試的裝置與測試設備之間且將所述裝置的端子分別地電連接至所述測試設備的襯墊,所述連接用連接器包括: 連接薄片,其包括薄片構件及導電電極,其中所述薄片構件具有形成於分別對應於所述裝置的所述端子的位置處的多個通孔且包括可撓性且絕緣之材料,且所述導電電極分別地與所述多個通孔組合且自所述薄片構件的上表面向上凸起以及自所述薄片構件的下表面向下凸起;以及 各向異性薄片,其包括導電部分及絕緣部分,其中所述導電部分安置在所述連接薄片的所述導電電極下,所述導電部分接觸所述導電電極且在所述各向異性薄片的厚度方向上具有導電性,且所述絕緣部分支撐所述導電部分且使所述導電部分絕緣, 其中,在所述連接薄片的所述導電電極的每一者中,自所述薄片構件的下表面向下凸起的部分的邊緣具有圓形形狀。A connector for connection between a device to be tested and a test device that are required to be electrically connected to each other and electrically connect a terminal of the device to a pad of the test device, the connector for use includes a connection sheet including a sheet member and a conductive electrode, wherein the sheet member has a plurality of through holes formed at positions respectively corresponding to the terminals of the device and includes a flexible and insulating material, and The conductive electrodes are respectively combined with the plurality of through holes and protrude upward from the upper surface of the sheet member and protrude downward from the lower surface of the sheet member; and an anisotropic sheet including the conductive portion and An insulating portion, wherein the conductive portion is disposed under the conductive electrode of the connection sheet, the conductive portion contacts the conductive electrode and has conductivity in a thickness direction of the anisotropic sheet, and the insulation Partially supporting and insulating the electrically conductive portion, wherein in each of the electrically conductive electrodes of the connection sheet, from the sheet member An edge surface of the downwardly convex portions has a circular shape. 如申請專利範圍第1項所述的連接用連接器,其中,在所述導電電極的每一者中,自所述薄片構件的下表面向下凸起的部分具有圓頂形狀或半球形形狀。The connector for connection according to claim 1, wherein, in each of the conductive electrodes, a portion that protrudes downward from a lower surface of the sheet member has a dome shape or a hemispherical shape . 如申請專利範圍第1項所述的連接用連接器,其中所述導電電極的上表面鍍以鎳粉末或鎳-鑽石混合物粉末。The connector for connection according to claim 1, wherein the upper surface of the conductive electrode is plated with a nickel powder or a nickel-diamond mixture powder. 如申請專利範圍第1項所述的連接用連接器,其中多個凸塊以圓形形式配置於所述導電電極的每一者的上表面上,同時與所述導電電極的每一者的上表面的中心隔開特定距離。The connector for connection according to claim 1, wherein a plurality of bumps are disposed in a circular form on an upper surface of each of the conductive electrodes while simultaneously with each of the conductive electrodes The center of the upper surface is separated by a specific distance. 如申請專利範圍第1項或第2項所述的連接用連接器,其中,在所述導電電極的每一者中,自所述薄片構件的上表面向上凸起的部分具有圓頂形狀。The connector for connection according to the first or second aspect of the invention, wherein, in each of the conductive electrodes, a portion that protrudes upward from an upper surface of the sheet member has a dome shape. 如申請專利範圍第1項所述的連接用連接器,其中,在所述導電部分中,自所述薄片構件的上表面向上凸起的部分的水平區域大於自所述薄片構件的下表面向下凸起的部分的水平區域。The connector for connection according to claim 1, wherein in the conductive portion, a horizontal portion of a portion that protrudes upward from an upper surface of the sheet member is larger than a surface of the sheet member The horizontal area of the lower raised portion. 如申請專利範圍第1項所述的連接用連接器,其中所述導電部分具有多個導電粒子在所述各向異性薄片的所述厚度方向上配置在彈性絕緣材料中的結構。The connector for connection according to claim 1, wherein the conductive portion has a structure in which a plurality of conductive particles are disposed in the elastic insulating material in the thickness direction of the anisotropic sheet. 一種連接用連接器的製造方法,所述連接用連接器安置於需要彼此電連接的待測試的裝置與測試設備之間且將所述裝置的端子分別地電連接至所述測試設備的襯墊,所述連接用連接器的製造方法包括: 製備包括薄片構件及導電電極的連接薄片,其中所述薄片構件具有形成於分別對應於所述裝置的所述端子的位置處的多個通孔且包括可撓性且絕緣之材料,所述導電電極包括鐵磁性物質,所述導電電極分別地與所述多個通孔組合且自所述薄片構件的上表面向上凸起以及自所述薄片構件的下表面向下凸起,且在所述導電電極的每一者中,自所述薄片構件的下表面向下凸起的部分的邊緣具有圓形形狀; 製備模具,在所述模具中,鐵磁性層安置於分別地對應於所述連接薄片的所述導電電極的位置處且非磁性層安置於除分別地對應於所述導電電極的位置以外的位置處,以及除了將所述連接薄片安置於所述模具中之外,亦將液體模製材料填充至所述模具中,在所述液體模製材料中,導電粒子分散在液體彈性材料中;以及 將磁場在所述模具的垂直方向上施加至所述模具,使得所述導電粒子在分別對應於所述導電電極的位置處排成行,以及使所述液體模製材料硬化。A manufacturing method of a connector for connection between a device to be tested and a test device that are required to be electrically connected to each other and electrically connecting a terminal of the device to a pad of the test device The manufacturing method of the connector for connection includes: preparing a connection sheet including a sheet member and a conductive electrode, wherein the sheet member has a plurality of through holes formed at positions respectively corresponding to the terminals of the device and A flexible and insulating material, the conductive electrode comprising a ferromagnetic substance, the conductive electrode being combined with the plurality of through holes and protruding upward from an upper surface of the sheet member and from the sheet member a lower surface of the lower surface, and in each of the conductive electrodes, an edge of a portion that protrudes downward from a lower surface of the sheet member has a circular shape; a mold is prepared, in the mold, a ferromagnetic layer disposed at a position respectively corresponding to the conductive electrode of the connection sheet and a non-magnetic layer disposed at a position other than the position corresponding to the conductive electrode, respectively At a position, and in addition to placing the connecting sheet in the mold, filling a liquid molding material into the mold, in which the conductive particles are dispersed in the liquid elastic material; And applying a magnetic field to the mold in a vertical direction of the mold such that the conductive particles are aligned at positions respectively corresponding to the conductive electrodes, and the liquid molding material is hardened. 如申請專利範圍第8項所述的連接用連接器的製造方法,其中,在所述導電電極的每一者中,自所述薄片構件的下表面向下凸起的部分具有圓頂形狀或半球形形狀。The method of manufacturing the connector according to claim 8, wherein in each of the conductive electrodes, a portion that protrudes downward from a lower surface of the sheet member has a dome shape or Hemispherical shape. 如申請專利範圍第8項所述的連接用連接器的製造方法,其中所述導電電極的每一者包括選自鐵、鎳、鈷或其合金的至少一種材料。The method of manufacturing a connector according to claim 8, wherein each of the conductive electrodes comprises at least one material selected from the group consisting of iron, nickel, cobalt, or an alloy thereof.
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