TWI588493B - Test socket - Google Patents
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- TWI588493B TWI588493B TW104133936A TW104133936A TWI588493B TW I588493 B TWI588493 B TW I588493B TW 104133936 A TW104133936 A TW 104133936A TW 104133936 A TW104133936 A TW 104133936A TW I588493 B TWI588493 B TW I588493B
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Description
一或多個示範性實施例涉及一種測試座(test socket),且更明確地說涉及一種具有可維持的電特性和可甚至經由頻繁測試過程而有效防止的使用壽命減少的測試座。 One or more exemplary embodiments relate to a test socket, and more particularly to a test socket having maintainable electrical characteristics and a reduced useful life that can be effectively prevented even through frequent testing procedures.
通常,需要在待測試裝置與測試設備之間穩定地形成電連接以便在待測試裝置上執行電性測試。測試座做為用於將待測試裝置連接到測試設備的設備。 Generally, it is necessary to stably form an electrical connection between the device to be tested and the test device to perform an electrical test on the device to be tested. The test stand is used as a device for connecting the device to be tested to the test device.
所述測試座用以將待測試裝置上的端子連接到測試設備的襯墊使得可在彼此之間雙向交換電信號。各向異性導電片和彈簧頂針主要用作所述測試座。在使用各向異性導電片的測試座中,其中導電粒子密集地分佈在彈性矽橡膠中的導電單元分別連接到待測試裝置上的端子。在使用彈簧頂針的測試座中,彈簧插入到外殼中,且隨後連接到待測試裝置上的端子。使用各向異性導電片的測試座和使用彈簧頂針的測試座兩者具有用於吸收可在連接到端子的過程中發生的電震動的結構。 The test socket is used to connect the terminals on the device to be tested to the pads of the test device such that electrical signals can be exchanged bidirectionally between each other. An anisotropic conductive sheet and a spring thimble are mainly used as the test socket. In the test socket using the anisotropic conductive sheet, the conductive units in which the conductive particles are densely distributed in the elastic ruthenium rubber are respectively connected to the terminals on the device to be tested. In a test socket using a spring thimble, a spring is inserted into the housing and then connected to the terminals on the device to be tested. Both the test socket using the anisotropic conductive sheet and the test socket using the spring thimble have a structure for absorbing electrical shock that can occur during connection to the terminal.
圖1中繪示用作測試座20的各向異性導電片(anisotropic conductive sheet)的實例。測試座20包含形成於其中待測試裝置2上的球型端子4接觸測試座20的每一區域中的導電單元8,和形成於其中待測試裝置2上的球型端子4並不接觸測試座20且充當支撐導電單元8的絕緣層的區域中的絕緣單元6。導電單元8包含其內密集地安置導電粒子8a的矽橡膠。測試座20安裝在其內提供多個襯墊10的測試設備9中。詳細地說,當測試設備9中包含的所述多個襯墊10分別接觸導電單元8時,測試座20安裝在測試設備9中。 An anisotropic conductive sheet (anisotropic) used as the test stand 20 is illustrated in FIG. An example of a conductive sheet). The test socket 20 includes a conductive unit 8 formed in each of the regions in which the ball terminal 4 on the device under test 2 contacts the test socket 20, and the ball terminal 4 formed on the device 2 to be tested does not contact the test socket 20 and serves as an insulating unit 6 in a region supporting the insulating layer of the conductive unit 8. The conductive unit 8 includes a ruthenium rubber in which the conductive particles 8a are densely arranged. The test stand 20 is mounted in a test device 9 in which a plurality of pads 10 are provided. In detail, when the plurality of pads 10 included in the test device 9 respectively contact the conductive unit 8, the test socket 20 is mounted in the test device 9.
在待測試裝置2由特定載具(未圖示)承載以用於電性測試之後,待測試裝置2朝向測試座20降低以接觸導電單元8。隨後,待測試裝置2通過使用按壓部件(未圖示)而按壓導電單元8。隨後,在導電單元8的厚度的方向中壓縮導電單元8,且因此,導電單元8中的導電粒子8a彼此接觸以達到導電狀態。如果特定電信號從測試設備9施加到待測試裝置2,那麼電信號經由導電單元8傳送到待測試裝置2,且因此,執行特定電性測試。 After the device under test 2 is carried by a specific carrier (not shown) for electrical testing, the device under test 2 is lowered toward the test socket 20 to contact the conductive unit 8. Subsequently, the device under test 2 presses the conductive unit 8 by using a pressing member (not shown). Subsequently, the conductive unit 8 is compressed in the direction of the thickness of the conductive unit 8, and thus, the conductive particles 8a in the conductive unit 8 are in contact with each other to reach a conductive state. If a specific electrical signal is applied from the test device 9 to the device under test 2, the electrical signal is transmitted via the conductive unit 8 to the device under test 2, and thus, a specific electrical test is performed.
測試座20在接觸待測試裝置2的若干過程中被反復地壓縮和擴展。如果導電單元8由於與待測試裝置2接觸而被壓縮,那麼導電單元8的中心凸出且所有導電單元8在平面方向中擴展。換句話說,導電單元8具有圖3中繪示的形狀。 The test stand 20 is repeatedly compressed and expanded in several processes of contacting the device 2 to be tested. If the conductive unit 8 is compressed due to contact with the device 2 to be tested, the center of the conductive unit 8 is convex and all the conductive units 8 are expanded in the planar direction. In other words, the conductive unit 8 has the shape illustrated in FIG.
絕緣單元6被提供在導電單元8附近以支撐導電單元8。絕緣單元6被一體地提供到導電單元8,且因此,支撐導電單元8。絕緣單元6還防止導電單元8的擴展。換句話說,絕緣單元6可 防止導電單元8的自由擴展。由此,因為絕緣單元6防止導電單元8的自由擴展,所以需要大的按壓力以在導電單元8的厚度的方向中按壓導電單元8。 An insulating unit 6 is provided adjacent to the conductive unit 8 to support the conductive unit 8. The insulating unit 6 is integrally provided to the conductive unit 8, and thus, supports the conductive unit 8. The insulating unit 6 also prevents expansion of the conductive unit 8. In other words, the insulating unit 6 can The free expansion of the conductive unit 8 is prevented. Thus, since the insulating unit 6 prevents the free expansion of the conductive unit 8, a large pressing force is required to press the conductive unit 8 in the direction of the thickness of the conductive unit 8.
然而,測試座20可需要特定壓力以具有導電性。這樣代表待測試的裝置2需要用所述壓力按壓測試座20以獲得導電性。在過去,當待測試裝置2中僅存在少量導電單元8時,不存在按壓測試座20時的問題。然而,因為存在朝向半導體裝置的高密度集成的增長的趨勢,所以待測試裝置2上端子的數目已增加。如果端子的數目增加,那麼導電單元8的數目也需要增加。由此,如果導電單元8的數目增加,那麼存在需要通過使用較大力來按壓測試座20以獲得導電性的問題。然而,可能技術上難以過度增加按壓部件按壓待測試裝置時所施加的按壓力,且當待測試裝置2將過度按壓力傳送到測試座20時,待測試裝置2可能損壞。 However, the test socket 20 may require a specific pressure to have electrical conductivity. This represents that the device 2 to be tested needs to press the test socket 20 with the pressure to obtain conductivity. In the past, when only a small number of conductive units 8 were present in the device under test 2, there was no problem when the test socket 20 was pressed. However, since there is a tendency to increase toward high-density integration of semiconductor devices, the number of terminals on the device under test 2 has increased. If the number of terminals is increased, the number of conductive units 8 also needs to be increased. Thus, if the number of the conductive units 8 is increased, there is a problem that it is necessary to press the test socket 20 by using a large force to obtain conductivity. However, it may be technically difficult to excessively increase the pressing force applied when the pressing member presses the device to be tested, and when the device under test 2 transmits excessive pressing force to the test seat 20, the device 2 to be tested may be damaged.
因此,在現有技術中,很難在具有多個端子的待測試裝置2上通過測試座有效地執行電性測試。 Therefore, in the prior art, it is difficult to efficiently perform an electrical test through the test stand on the device 2 to be tested having a plurality of terminals.
一或多個示範性實施例包含一種測試座,其用於即使當待測試裝置上的端子的數目增加時也容易地在待測試裝置上執行電性測試。 One or more exemplary embodiments include a test socket for easily performing an electrical test on a device to be tested even when the number of terminals on the device to be tested is increased.
額外方面將部分在以下描述中得到闡述,並且部分地,將從描述中顯而易見,或者可以通過對所呈現的實施例的實踐習 得。 Additional aspects will be set forth in the description which follows, and in part will be apparent from the description or Got it.
根據一或多個示範性實施例,一種被安置於待測試裝置上的端子與測試設備的襯墊之間且電連接所述端子和所述襯墊的測試座包含:第一薄片型連接器,其包含具有固定到特定位置的邊緣的第一絕緣片,以及經配置以安置在對應於待測試裝置上的端子的每一位置處的多個第一導電單元,其具有所述第一絕緣片的厚度的方向中的導電性,且被提供到所述第一絕緣片;多個導電彈性單元,其經配置以安置在所述第一薄片型連接器下方,在所述第一絕緣片的厚度的方向中在對應於待測試裝置上的端子的每一位置處延伸,由其內分佈多個導電粒子的絕緣彈性材料形成,其中所述多個導電彈性單元中的每一者的上部部分一體地提供到所述第一導電單元中的每一者;以及第二薄片型連接器,其包含安置在所述多個導電彈性單元下方且邊緣固定到特定位置的第二絕緣片,以及經配置以安置在對應於待測試裝置上的端子的每一位置處的多個第二導電單元,其具有所述第二絕緣片的厚度的方向中的導電性,且被提供到所述第二絕緣片,其中所述多個第二導電單元中的每一者的上部部分一體地提供到所述多個導電彈性單元中的每一者,其中所述多個導電彈性單元中的每一者的上部部分和下部部分的位置由所述第一薄片型連接器和所述第二薄片型連接器支撐,且空白空間(empty space)形成在所述多個導電彈性單元中的每一者附近,而不會阻止所述多個導電彈性單元在厚度方向中被按壓且在面的方向中擴展。 According to one or more exemplary embodiments, a test socket disposed between a terminal disposed on a device to be tested and a gasket of a test device and electrically connecting the terminal and the gasket includes: a first sheet type connector a first insulating sheet having an edge fixed to a specific position, and a plurality of first conductive units configured to be disposed at each position corresponding to the terminal on the device to be tested, having the first insulation Conductivity in the direction of the thickness of the sheet, and is provided to the first insulating sheet; a plurality of conductive elastic units configured to be disposed under the first sheet type connector, at the first insulating sheet The direction of the thickness extends at each position corresponding to the terminal on the device to be tested, formed of an insulating elastic material in which a plurality of conductive particles are distributed, wherein an upper portion of each of the plurality of conductive elastic units a portion integrally provided to each of the first conductive units; and a second sheet type connector including a second disposed under the plurality of conductive elastic units and having an edge fixed to a specific position a rim, and a plurality of second conductive units configured to be disposed at each position corresponding to the terminals on the device to be tested, having conductivity in a direction of a thickness of the second insulating sheet, and being provided To the second insulating sheet, wherein an upper portion of each of the plurality of second conductive units is integrally provided to each of the plurality of conductive elastic units, wherein the plurality of conductive elastic units The positions of the upper portion and the lower portion of each of the support are supported by the first sheet type connector and the second sheet type connector, and an empty space is formed in the plurality of conductive elastic units In the vicinity of each of them, the plurality of conductive elastic units are not prevented from being pressed in the thickness direction and expanded in the direction of the face.
所述多個導電彈性單元中的每一者的一側可被空白空間包圍,使得空白空間從所述多個導電彈性單元中的每一者的所述側的頂部延伸到底部。 One side of each of the plurality of conductive elastic units may be surrounded by a blank space such that a white space extends from a top of the side of the one of the plurality of conductive elastic units to a bottom.
所述多個導電彈性單元中的每一者的一側的頂部與底部之間的中間區域可被所述空白空間包圍。 An intermediate portion between the top and the bottom of one side of each of the plurality of conductive elastic units may be surrounded by the empty space.
第一絕緣片可包含由合成樹脂形成的膜,且多個通孔形成在對應於待測試裝置上的端子的每一位置處,且所述多個第一導電單元可穿透所述通孔且被所述第一絕緣片支撐。 The first insulating sheet may include a film formed of a synthetic resin, and a plurality of through holes are formed at each position corresponding to the terminal on the device to be tested, and the plurality of first conductive units may penetrate the through hole And supported by the first insulating sheet.
所述第一絕緣片的通孔的內徑可小於導電彈性單元的外徑,且因此,第一絕緣片中通孔的周圍區域可被導電彈性單元的上表面的一端支撐。 The inner diameter of the through hole of the first insulating sheet may be smaller than the outer diameter of the conductive elastic unit, and thus, the surrounding area of the through hole in the first insulating sheet may be supported by one end of the upper surface of the conductive elastic unit.
所述第一絕緣片可包含絕緣彈性材料,且多個通孔形成在對應於待測試裝置上的端子的每一位置處,且第一導電單元可穿透所述通孔且被第一絕緣片支撐。 The first insulating sheet may include an insulating elastic material, and a plurality of through holes are formed at each position corresponding to the terminal on the device to be tested, and the first conductive unit may penetrate the through hole and be insulated by the first Sheet support.
所述多個第一導電單元可由導電金屬材料形成。 The plurality of first conductive units may be formed of a conductive metal material.
所述多個第一導電單元可包含與所述多個導電彈性單元的材料相同的材料。 The plurality of first conductive units may include the same material as that of the plurality of conductive elastic units.
所述多個導電彈性單元可一體地被提供到選自由以下各項組成的群組的至少一者:第一薄片型連接器和第二薄片型連接器。 The plurality of conductive elastic units may be integrally provided to at least one selected from the group consisting of: a first sheet type connector and a second sheet type connector.
所述多個導電彈性單元的絕緣彈性材料可由聚矽氧橡膠形成。 The insulating elastic material of the plurality of conductive elastic units may be formed of a polyoxyethylene rubber.
第一絕緣片的絕緣彈性材料可由聚矽氧橡膠形成。 The insulating elastic material of the first insulating sheet may be formed of a polyoxyethylene rubber.
構成所述多個導電彈性單元的絕緣彈性材料的硬度不同於構成所述第一絕緣片的絕緣彈性材料的硬度。 The hardness of the insulating elastic material constituting the plurality of conductive elastic units is different from the hardness of the insulating elastic material constituting the first insulating sheet.
第一絕緣片可包含具有多個孔隙的網格,且所述多個第一導電單元可填充所述網格中的孔隙且在第一絕緣片的厚度的方向中延伸。 The first insulating sheet may include a mesh having a plurality of apertures, and the plurality of first conductive units may fill the voids in the mesh and extend in a direction of a thickness of the first insulating sheet.
第一薄片型連接器和第二薄片型連接器可具有相同形狀。 The first sheet type connector and the second sheet type connector may have the same shape.
根據一或多個示範性實施例,一種經配置以安置於待測試裝置上的端子與測試設備的襯墊之間且電連接所述端子和所述襯墊的測試座包含:多個導電彈性單元,其經配置以在厚度的方向中在對應於待測試裝置上的端子的每一位置處延伸,由其中分佈多個導電粒子的絕緣彈性材料形成;以及一對薄片型連接器,其經配置以分別安置在所述多個導電彈性單元上和下方以便使其間的所述多個導電彈性單元分別連接到所述多個導電彈性單元的上部部分和下部部分以支撐所述多個導體彈性單元,且具有對應於彼此的形狀,其中所述多個導電彈性單元彼此分開且被空白空間包圍。 In accordance with one or more exemplary embodiments, a test socket configured between a terminal disposed on a device to be tested and a gasket of a test device and electrically connecting the terminal and the gasket includes: a plurality of conductive elastics a unit configured to extend at each position corresponding to a terminal on the device to be tested in a direction of thickness, formed of an insulating elastic material in which a plurality of conductive particles are distributed; and a pair of sheet-type connectors Arranging to be respectively disposed above and below the plurality of conductive elastic units such that the plurality of conductive elastic units therebetween are respectively connected to the upper and lower portions of the plurality of conductive elastic units to support the plurality of conductor elasticity The unit has a shape corresponding to each other, wherein the plurality of conductive elastic units are separated from each other and surrounded by a blank space.
2‧‧‧待測試裝置 2‧‧‧Testing device
4‧‧‧球型端子 4‧‧‧Ball terminals
6‧‧‧絕緣單元 6‧‧‧Insulation unit
8‧‧‧導電單元 8‧‧‧Conducting unit
8a‧‧‧導電粒子 8a‧‧‧ conductive particles
9‧‧‧測試設備 9‧‧‧Test equipment
10‧‧‧襯墊 10‧‧‧ cushion
20‧‧‧測試座 20‧‧‧ test seat
100‧‧‧測試座 100‧‧‧ test seat
110‧‧‧第一薄片型連接器 110‧‧‧First sheet connector
111‧‧‧第一絕緣片 111‧‧‧First insulation sheet
111a‧‧‧通孔 111a‧‧‧through hole
112‧‧‧第一導電單元 112‧‧‧First Conductive Unit
120‧‧‧導電彈性單元 120‧‧‧Electrical elastic unit
121‧‧‧導電粒子 121‧‧‧ conductive particles
125‧‧‧空白空間 125‧‧‧White space
130‧‧‧第二薄片型連接器 130‧‧‧Second sheet type connector
131‧‧‧第二絕緣片 131‧‧‧Second insulation sheet
132‧‧‧第二導電單元 132‧‧‧Second conductive unit
140‧‧‧待測試裝置 140‧‧‧Testing device
141‧‧‧端子 141‧‧‧ terminals
150‧‧‧測試設備 150‧‧‧Test equipment
151‧‧‧襯墊 151‧‧‧ cushion
212‧‧‧第一導電單元 212‧‧‧First Conductive Unit
232‧‧‧第二導電單元 232‧‧‧Second conductive unit
311‧‧‧第一絕緣片 311‧‧‧First insulating sheet
312‧‧‧第一導電單元 312‧‧‧First Conductive Unit
331‧‧‧第二絕緣片 331‧‧‧Second insulation sheet
332‧‧‧第二導電單元 332‧‧‧Second conductive unit
400‧‧‧測試座 400‧‧‧ test seat
410‧‧‧第一薄片型連接器 410‧‧‧First sheet connector
411‧‧‧第一絕緣片 411‧‧‧First insulation sheet
412‧‧‧第一導電單元 412‧‧‧First Conductive Unit
420‧‧‧導電彈性單元 420‧‧‧Electrical elastic unit
430‧‧‧第二薄片型連接器 430‧‧‧Second sheet type connector
431‧‧‧第二絕緣片 431‧‧‧Second insulation sheet
432‧‧‧第二導電單元 432‧‧‧Second conductive unit
通過下文結合附圖對實施例的描述,將可以清楚地知道並且 更容易地理解這些和/或其它方面,附圖中:圖1說明現有技術中的測試座。 The description of the embodiments will be clearly understood from the following description in conjunction with the drawings These and/or other aspects are more readily understood, and in the drawings: Figure 1 illustrates a test stand in the prior art.
圖2說明圖1的測試座的操作。 Figure 2 illustrates the operation of the test stand of Figure 1.
圖3為圖2中繪示的操作的放大圖。 FIG. 3 is an enlarged view of the operation illustrated in FIG. 2.
圖4為根據示範性實施例的測試座的透視圖。 4 is a perspective view of a test socket in accordance with an exemplary embodiment.
圖5為圖4中繪示的測試座的橫截面圖。 Figure 5 is a cross-sectional view of the test stand illustrated in Figure 4.
圖6說明圖5的測試座的操作。 Figure 6 illustrates the operation of the test stand of Figure 5.
圖7為根據另一示範性實施例的測試座的透視圖。 FIG. 7 is a perspective view of a test stand in accordance with another exemplary embodiment.
圖8為圖7中繪示的測試座的橫截面圖。 Figure 8 is a cross-sectional view of the test socket illustrated in Figure 7.
圖9為根據另一示範性實施例繪示的測試座的橫截面圖。 9 is a cross-sectional view of a test stand illustrated in accordance with another exemplary embodiment.
圖10為根據另一示範性實施例繪示的測試座的橫截面圖。 FIG. 10 is a cross-sectional view of a test stand illustrated in accordance with another exemplary embodiment.
現在將詳細參考實施例,所述實施例的實例在附圖中說明,其中相同的參考標號始終指代相同的元件。在此方面,本發明的實施例可以具有不同形式並且不應被解釋為限於本文中所闡述的描述。因此,示範性實施例僅通過參考圖式在下文中進行描述以闡釋當前描述的各方面。 Reference will now be made in detail to the exemplary embodiments embodiments embodiments In this regard, the embodiments of the invention may have different forms and should not be construed as being limited to the descriptions set forth herein. Accordingly, the exemplary embodiments are described below only by referring to the figures in the description
在下文中,將參看附圖詳細地描述示範性實施例。 Hereinafter, exemplary embodiments will be described in detail with reference to the accompanying drawings.
根據示範性實施例,測試座100安置於待測試裝置140上的端子141與測試設備150的襯墊151之間,以便將端子141電連接到襯墊151。 According to an exemplary embodiment, the test socket 100 is disposed between the terminal 141 on the device under test 140 and the gasket 151 of the test device 150 to electrically connect the terminal 141 to the gasket 151.
測試座100包含第一薄片型連接器110、導電彈性單元120和第二薄片型連接器130。 The test socket 100 includes a first sheet type connector 110, a conductive elastic unit 120, and a second sheet type connector 130.
第一薄片型連接器110安置在導電彈性單元120上且支撐導電彈性單元120中的每一者的位置。第一薄片型連接器110的週邊邊緣可通過使用框架(未圖示)固定。 The first sheet-type connector 110 is disposed on the conductive elastic unit 120 and supports the position of each of the conductive elastic units 120. The peripheral edge of the first sheet type connector 110 can be fixed by using a frame (not shown).
第一薄片型連接器110包含第一絕緣片111和第一導電單元112。 The first sheet type connector 110 includes a first insulating sheet 111 and a first conductive unit 112.
第一絕緣片111由合成樹脂形成且具有通孔111a。然而,第一絕緣片111不限於此,且可由任何絕緣柔性材料形成。第一絕緣片111可由例如聚醯亞胺、液體-晶體聚合物或其組合等樹脂材料形成。然而,第一絕緣片111可由聚醯亞胺形成使得容易地通過蝕刻形成通孔。 The first insulating sheet 111 is formed of a synthetic resin and has a through hole 111a. However, the first insulating sheet 111 is not limited thereto and may be formed of any insulating flexible material. The first insulating sheet 111 may be formed of a resin material such as polyimide, liquid crystal polymer or a combination thereof. However, the first insulating sheet 111 may be formed of polyimide to form a via hole easily by etching.
通孔111a形成在對應於待測試裝置140上的端子141的每一位置處。通孔111a經形成以穿過第一絕緣片111的頂部表面和底部表面,且實質上具有圓形橫截面。通孔111a可具有直徑小於稍後將描述的導電彈性單元120的直徑。由此,因為第一絕緣片111中的通孔111a的內徑小於導電彈性單元120的外徑,所以第一絕緣片111中的通孔111a的週邊區域可被導電彈性單元120的上表面的週邊邊緣支撐。 The through hole 111a is formed at each position corresponding to the terminal 141 on the device 140 to be tested. The through hole 111a is formed to pass through the top and bottom surfaces of the first insulating sheet 111, and has a substantially circular cross section. The through hole 111a may have a diameter smaller than that of the conductive elastic unit 120 which will be described later. Thus, since the inner diameter of the through hole 111a in the first insulating sheet 111 is smaller than the outer diameter of the conductive elastic unit 120, the peripheral region of the through hole 111a in the first insulating sheet 111 can be covered by the upper surface of the conductive elastic unit 120. Peripheral edge support.
第一導電單元112填充通孔111a且被提供到第一絕緣片111以具有在第一導電單元112的厚度的方向中的導電性。第一導電單元112具有其內多個導電粒子121密集地安置在導電彈性材 料中的結構。第一導電單元112的組成材料類似於稍後將描述的導電彈性單元120的組成材料。 The first conductive unit 112 fills the through hole 111a and is supplied to the first insulating sheet 111 to have conductivity in a direction of the thickness of the first conductive unit 112. The first conductive unit 112 has a plurality of conductive particles 121 therein densely disposed on the conductive elastic material The structure in the material. The constituent material of the first conductive unit 112 is similar to the constituent material of the conductive elastic unit 120 which will be described later.
導電彈性單元120安置在第一薄片型連接器110下方,且在導電彈性單元120的厚度的方向中在對應於待測試裝置140上的端子141的每一位置處延伸。導電彈性單元120由其中安置所述多個導電粒子121的絕緣彈性材料形成,且導電彈性材料120中的每一者的上部部分被一體地提供到第一導電單元112中的每一者,且導電彈性單元120在水平方向中彼此分開。 The conductive elastic unit 120 is disposed under the first sheet-type connector 110 and extends at each position corresponding to the terminal 141 on the device to be tested 140 in the direction of the thickness of the conductive elastic unit 120. The conductive elastic unit 120 is formed of an insulating elastic material in which the plurality of conductive particles 121 are disposed, and an upper portion of each of the conductive elastic materials 120 is integrally provided to each of the first conductive units 112, and The conductive elastic units 120 are separated from each other in the horizontal direction.
導電彈性單元120中的每一者的上部部分被一體地提供到第一導電單元112中的每一者的下部部分,且導電彈性單元120中的每一者的下部部分被一體地提供到第二導電單元132中的每一者的上部部分。換句話說,導電彈性單元120被一體地提供到第一導電單元112和第二導電單元132。空白空間125可形成在每一導電彈性單元120周圍,使得當在導電彈性單元120的厚度的方向中按壓導電彈性單元120時不會在平面方向中阻止導電彈性單元120的擴展。詳細地說,空白空間125可形成在導電彈性單元120的側部處且從導電彈性單元120的頂部延伸到底部(以便包圍導電彈性單元120的整個側部)。然而,空白空間125不限於此,且可形成於所述多個導電彈性單元120間在平面方向中擴展最多的導電彈性單元120的頂部與底部之間的中間區域中。 Upper portions of each of the conductive elastic units 120 are integrally provided to a lower portion of each of the first conductive units 112, and lower portions of each of the conductive elastic units 120 are integrally provided to the first The upper portion of each of the two conductive units 132. In other words, the conductive elastic unit 120 is integrally provided to the first conductive unit 112 and the second conductive unit 132. A blank space 125 may be formed around each of the conductive elastic units 120 such that the expansion of the conductive elastic unit 120 is not prevented in the planar direction when the conductive elastic unit 120 is pressed in the direction of the thickness of the conductive elastic unit 120. In detail, the blank space 125 may be formed at the side of the conductive elastic unit 120 and extend from the top to the bottom of the conductive elastic unit 120 (to surround the entire side of the conductive elastic unit 120). However, the blank space 125 is not limited thereto, and may be formed in an intermediate portion between the top and the bottom of the conductive elastic unit 120 which is most expanded in the planar direction between the plurality of conductive elastic units 120.
構成導電彈性單元120的絕緣彈性材料可為具有可交聯結構的聚合材料。各種可固化聚合材料可用于形成所述絕緣彈性 材料。可固化聚合材料的實例可為:共軛二烯類橡膠(conjugated diene-based rubber),例如聚丁二烯橡膠(poly butadiene rubber)、天然橡膠、聚異戊二烯橡膠(polyisoprene rubber)、苯乙烯-丁二烯共聚物橡膠(styrene-butadiene copolymer rubber)、丙烯腈-丁二烯共聚物橡膠(acrylonitrile-butadiene copolymer rubber)或類似者,或其氫添加劑;嵌段共聚物橡膠(block copolymer rubber),例如苯乙烯-丁二烯-二烯嵌段共聚物橡膠(styrene-butadiene-diene block copolymer rubber)、苯乙烯-異戊二烯嵌段共聚物(styrene-isoprene block copolymer)或類似者,或其氫添加劑;氯丁二烯橡膠(chloroprene rubber);胺基甲酸酯橡膠(urethane rubber);聚酯類橡膠(polyester-based rubber);表氯醇橡膠(epichlorohydrin rubber);聚矽氧橡膠(silicone rubber);伸乙基-丙烯共聚物橡膠(ethylene-propylene copolymer rubber);伸乙基-丙烯-二烯共聚物橡膠(ethylene-propylene-diene copolymer rubber);或類似者。 The insulating elastic material constituting the conductive elastic unit 120 may be a polymeric material having a crosslinkable structure. Various curable polymeric materials can be used to form the insulating elasticity material. Examples of the curable polymeric material may be: conjugated diene-based rubber, such as poly butadiene rubber, natural rubber, polyisoprene rubber, benzene Styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber or the like, or a hydrogen additive thereof; block copolymer rubber , for example, styrene-butadiene-diene block copolymer rubber, styrene-isoprene block copolymer or the like, Or a hydrogen additive thereof; a chloroprene rubber; a urethane rubber; a polyester-based rubber; an epichlorohydrin rubber; a polyoxyxene rubber (silicone rubber); ethylene-propylene copolymer rubber; ethylene-propylene-diene copolymer rubber ); or similar.
如上文所描述,在其中對於所獲得的導電彈性單元120需要耐候性的情況下,優選的是使用除共軛二烯橡膠以外的材料,且尤其優選的是關於模制和加工特性及電特性而使用聚矽氧橡膠。 As described above, in the case where weather resistance is required for the obtained conductive elastic unit 120, it is preferable to use a material other than the conjugated diene rubber, and it is particularly preferable regarding molding and processing characteristics and electrical characteristics. Use polyoxymethylene rubber.
另外,所述多個導電粒子121可由磁性材料形成。所述多個導電粒子121的實例可為例如鐵、鈷、鎳或類似者等磁性金屬的粒子、其合金的粒子或含有磁性金屬的粒子、通過使用上文 提及的粒子作為核心粒子並用具有精細導電性的金屬(例如金、銀、鈀或銠)電鍍核心粒子的表面而獲得的粒子,或通過使用非磁性金屬粒子、例如玻璃珠粒等無機材料粒子或聚合物粒子作為核心粒子並用導電磁性金屬(例如鎳或鈷)電鍍核心粒子的表面而獲得的粒子。 In addition, the plurality of conductive particles 121 may be formed of a magnetic material. Examples of the plurality of conductive particles 121 may be particles of a magnetic metal such as iron, cobalt, nickel or the like, particles of an alloy thereof or particles containing a magnetic metal, by using the above a particle obtained by using the particle as a core particle and plating a surface of a core particle with a metal having fine conductivity (for example, gold, silver, palladium or iridium), or by using a non-magnetic metal particle, such as an inorganic material particle such as glass beads Or particles obtained by polymerizing the core particles as core particles and electroplating the surface of the core particles with a conductive magnetic metal such as nickel or cobalt.
在上文描述的粒子當中,可使用通過使用鎳粒子作為核心粒子並用具有精細導電性的金電鍍核心粒子的表面而獲得的粒子。 Among the particles described above, particles obtained by using nickel particles as core particles and plating the surface of the core particles with gold having fine conductivity can be used.
用導電金屬電鍍核心粒子的表面的方法可(例如)為化學電鍍方法、電解電鍍方法、濺鍍方法、沉積方法或類似者,但不限於此。 The method of plating the surface of the core particles with a conductive metal may be, for example, an electroless plating method, an electrolytic plating method, a sputtering method, a deposition method, or the like, but is not limited thereto.
在其中使用通過用導電金屬塗覆核心粒子的表面而獲得的導電粒子121的情況下,粒子的表面中導電金屬的塗覆率(導電金屬的塗覆區域與核心粒子的表面區域的比率)優選等於或高於40%,進一步優選等於或高於45%,且特別優選地為47到95%,因為可獲得高導電性。 In the case where the conductive particles 121 obtained by coating the surface of the core particles with a conductive metal are used, the coating ratio of the conductive metal (the ratio of the coated region of the conductive metal to the surface region of the core particles) in the surface of the particles is preferably It is equal to or higher than 40%, further preferably equal to or higher than 45%, and particularly preferably from 47 to 95% because high conductivity can be obtained.
此外,導電金屬的塗覆量優選為核心粒子的0.5到50質量百分比,更優選地為2到30質量百分比,進一步優選為3到25質量百分比,且特別優選地為4到20質量百分比。在其中待塗覆的導電金屬為金的情況下,塗覆量為優選核心粒子的0.5到30質量百分比,更優選地為2到20質量百分比且進一步優選為3到15質量百分比。 Further, the coating amount of the conductive metal is preferably from 0.5 to 50% by mass, more preferably from 2 to 30% by mass, further preferably from 3 to 25% by mass, and particularly preferably from 4 to 20% by mass, based on the core particles. In the case where the conductive metal to be coated is gold, the coating amount is 0.5 to 30% by mass, more preferably 2 to 20% by mass, and further preferably 3 to 15% by mass, based on the preferred core particles.
第二薄片型連接器130包含安置在導電彈性單元120下 方的第二絕緣片131,且安置在對應於待測試裝置140上的端子141的每一位置處的多個第二導電單元132在所述多個第二導電單元132的厚度的方向中為導電的。所述多個第二導電單元132被提供到第二絕緣片131,且所述多個第二導電單元132中的每一者的上部部分被一體地提供到導電彈性單元120中的每一者。 The second sheet type connector 130 is disposed under the conductive elastic unit 120 a second second insulating sheet 131, and a plurality of second conductive units 132 disposed at each position corresponding to the terminal 141 on the device to be tested 140 are in the direction of the thickness of the plurality of second conductive units 132 Conductive. The plurality of second conductive units 132 are provided to the second insulating sheet 131, and an upper portion of each of the plurality of second conductive units 132 is integrally provided to each of the conductive elastic units 120 .
第二薄片型連接器130支撐導電彈性單元120的下部部分,而第二薄片型連接器130的週邊區域的位置由框架(未圖示)固定。第二薄片型連接器130可具有與第一薄片型連接器110的形狀相同的形狀。並且,第二薄片型連接器130可安置為對應於第一薄片型連接器110以便使導電彈性單元120處於其間。 The second sheet type connector 130 supports the lower portion of the conductive elastic unit 120, and the position of the peripheral area of the second sheet type connector 130 is fixed by a frame (not shown). The second sheet type connector 130 may have the same shape as that of the first sheet type connector 110. Also, the second sheet type connector 130 may be disposed to correspond to the first sheet type connector 110 so that the conductive elastic unit 120 is interposed therebetween.
根據示範性實施例,測試座100可具有如下效果:測試座100安裝在測試設備150中,此時測試座100中包含的第二導電單元132接觸測試設備150的襯墊151。隨後,待測試裝置140逐漸朝向測試設備150降低,使得待測試裝置140上的端子141接觸第一薄片型連接器110中包含的第一導電單元112的頂部表面。隨後,通過使用特定按壓工具(未圖示)以便在導電彈性單元120的厚度的方向中按壓導電彈性單元120而按壓待測試裝置140。 According to an exemplary embodiment, the test socket 100 may have an effect that the test socket 100 is installed in the test apparatus 150, at which time the second conductive unit 132 included in the test socket 100 contacts the gasket 151 of the test apparatus 150. Subsequently, the device under test 140 is gradually lowered toward the test device 150 such that the terminal 141 on the device under test 140 contacts the top surface of the first conductive unit 112 included in the first sheet-type connector 110. Subsequently, the device to be tested 140 is pressed by using a specific pressing tool (not shown) to press the conductive elastic unit 120 in the direction of the thickness of the conductive elastic unit 120.
由此,如果按壓導電彈性單元120,那麼導電彈性單元120在導電彈性單元120的厚度的方向中壓縮,而導電彈性單元120在垂直於所述厚度的方向的平面方向中擴展。在此過程中,導電彈性單元120中包含的所述多個導電粒子121彼此接觸且進入 到導電狀態中。 Thus, if the conductive elastic unit 120 is pressed, the conductive elastic unit 120 is compressed in the direction of the thickness of the conductive elastic unit 120, and the conductive elastic unit 120 is expanded in the planar direction perpendicular to the direction of the thickness. In the process, the plurality of conductive particles 121 included in the conductive elastic unit 120 are in contact with each other and enter Into the conductive state.
下文,根據示範性實施例,測試座100具有如下優點:根據示範性實施例,因為測試座100並未具備在所述多個導電彈性單元120中的每一者附近的單獨絕緣單元,所以可容易地按壓導電彈性單元120。換句話說,因為測試座100並不包含用於阻止導電彈性單元120擴展的絕緣單元而是包含在所述多個導電彈性單元120附近的空白空間125,所以可通過極少力容易地按壓導電彈性單元120。 Hereinafter, according to an exemplary embodiment, the test socket 100 has an advantage that, according to an exemplary embodiment, since the test socket 100 does not have a separate insulating unit in the vicinity of each of the plurality of conductive elastic units 120, The conductive elastic unit 120 is easily pressed. In other words, since the test socket 100 does not include an insulating unit for preventing the expansion of the conductive elastic unit 120 but a blank space 125 included in the vicinity of the plurality of conductive elastic units 120, the conductive elasticity can be easily pressed with little force. Unit 120.
因此,測試座100可使導電彈性單元120能夠在即使無過度壓力的情況下且即使當許多端子141呈現於待測試裝置140上時也具有導電性。 Therefore, the test socket 100 can enable the conductive elastic unit 120 to have electrical conductivity even without excessive pressure and even when a plurality of terminals 141 are presented on the device under test 140.
另外,因為導電彈性單元120的上部部分和下部部分被第一薄片型連接器110和第二薄片型連接器130穩定地支撐,所以導電彈性單元120可即使經由頻繁測試過程而穩定地維持在原始位置處。 In addition, since the upper portion and the lower portion of the conductive elastic unit 120 are stably supported by the first sheet type connector 110 and the second sheet type connector 130, the conductive elastic unit 120 can be stably maintained at the original even after a frequent test process Location.
根據示範性實施例,測試座可修改如下:圖7和8中繪示的測試座的描述如下:根據上文描述的實施例,第一導電單元和第二導電單元被描述為由與導電彈性單元相同的材料形成。然而,第一導電單元212和第二導電單元232並不限於此,且可由金屬材料形成。 According to an exemplary embodiment, the test socket may be modified as follows: The test sockets illustrated in Figures 7 and 8 are described as follows: According to the embodiments described above, the first conductive unit and the second conductive unit are described as being electrically conductive The same material is formed in the unit. However, the first conductive unit 212 and the second conductive unit 232 are not limited thereto and may be formed of a metal material.
第一導電單元212和第二導電單元232可由例如鎳、銅、銀、鈀、鐵或類似者等材料形成。整個第一導電單元212和整個 第二導電單元232可由單一金屬或兩個或更多類型的金屬的合金形成,或形成為具有其中兩個或更多類型的金屬形成分層結構的結構。另外,第一導電單元212和第二導電單元232在上面接觸端子或襯墊的表面可由例如金、銀、鈀或類似者等化學上穩定且非常導電的金屬形成,以便防止表面的氧化和減小接觸電阻。 The first conductive unit 212 and the second conductive unit 232 may be formed of a material such as nickel, copper, silver, palladium, iron, or the like. The entire first conductive unit 212 and the whole The second conductive unit 232 may be formed of a single metal or an alloy of two or more types of metals, or may be formed to have a structure in which two or more types of metals form a layered structure. In addition, the surface of the first conductive unit 212 and the second conductive unit 232 contacting the terminal or the pad may be formed of a chemically stable and very conductive metal such as gold, silver, palladium or the like in order to prevent oxidation and reduction of the surface. Small contact resistance.
圖9中繪示的測試座的描述如下:根據上文描述的實施例,第一絕緣片和第二絕緣片包含例如聚醯亞胺等其上具有通孔的膜,且第一導電單元和第二導電單元經由所述通孔而提供到彼此。然而,第一絕緣片和第二絕緣片並不限於此。第一絕緣片311和第二絕緣片331可由具有若干孔隙的多孔材料形成。 The test stand illustrated in FIG. 9 is as follows: According to the embodiment described above, the first insulating sheet and the second insulating sheet comprise a film having a through hole thereon, such as polyimide, and the like, and the first conductive unit and The second conductive units are provided to each other via the through holes. However, the first insulating sheet and the second insulating sheet are not limited thereto. The first insulating sheet 311 and the second insulating sheet 331 may be formed of a porous material having a plurality of pores.
第一絕緣片311和第二絕緣片331中包含的多孔薄片可為通過使用有機纖維形成的網格或非編織物。有機纖維可為氟樹脂纖維,例如聚四氟乙烯纖維(polytetrafluoroethylene fiber)、芳綸纖維(aramid fiber)、聚乙烯纖維(polyethylene fiber)、聚芳酯纖維(polyarylate fiber)、耐綸纖維(nylon fiber)、聚酯纖維(polyester fiber)或類似者。通過使用其中線性熱膨脹的係數為30×10-6到-5×10-6/K(確切地說,10×10-6到-3×10-6/K)的有機纖維,此外,有可能抑制第一導電單元和第二導電單元的熱膨脹。因此,同樣在其中接收由溫度的改變造成的熱歷程的情況下,有可能穩定地維持極好的電連接狀態。此外,優選的是使用具有10到200μm的直徑的有機纖維。 The porous sheet contained in the first insulating sheet 311 and the second insulating sheet 331 may be a mesh or a non-woven fabric formed by using organic fibers. The organic fiber may be a fluororesin fiber, such as polytetrafluoroethylene fiber, aramid fiber, polyethylene fiber, polyarylate fiber, nylon fiber. ), polyester fiber or the like. By using an organic fiber having a coefficient of linear thermal expansion of 30 × 10 -6 to -5 × 10 -6 /K (specifically, 10 × 10 -6 to -3 × 10 -6 /K), in addition, it is possible The thermal expansion of the first conductive unit and the second conductive unit is suppressed. Therefore, also in the case where the heat history caused by the change in temperature is received therein, it is possible to stably maintain an excellent electrical connection state. Further, it is preferred to use an organic fiber having a diameter of 10 to 200 μm.
因為第一導電單元312和第二導電單元332填充形成於第一絕緣片311和第二絕緣片331上的孔隙且因此與第一絕緣片311和第二絕緣片331形成為一體,所以第一導電單元312和第二導電單元332可不與第一絕緣片311和第二絕緣片331分隔開。 Since the first conductive unit 312 and the second conductive unit 332 fill the voids formed on the first insulating sheet 311 and the second insulating sheet 331, and thus are integrally formed with the first insulating sheet 311 and the second insulating sheet 331, the first The conductive unit 312 and the second conductive unit 332 may not be spaced apart from the first insulating sheet 311 and the second insulating sheet 331.
如參看圖9所描述,如果第一絕緣片311由多孔材料形成,那麼與絕緣片相比可確保柔性。因此,即使待測試裝置上的端子的大小彼此不同,所有所述多個第一導電單元312也可接觸待測試裝置上的所述端子。 As described with reference to Fig. 9, if the first insulating sheet 311 is formed of a porous material, flexibility can be ensured as compared with the insulating sheet. Therefore, even if the sizes of the terminals on the device to be tested are different from each other, all of the plurality of first conductive units 312 can contact the terminals on the device to be tested.
根據上文描述的實施例,第一薄片型連接器的第一絕緣片和第二薄片型連接器的第二絕緣片描述為由聚醯亞胺或液體-晶體聚合物所製成的膜形成,但不限於此。第一絕緣片和第二絕緣片可由例如聚矽氧橡膠等絕緣彈性材料形成。詳細地說,圖10中繪示的測試座400可經形成使得構成第一絕緣片411和第二絕緣片431的絕緣彈性材料為具有與導電彈性單元420的聚矽氧橡膠相同的物理特性的聚矽氧橡膠。然而,絕緣彈性材料不限於此,且可具有不同於導電彈性單元420的絕緣彈性材料的硬度。舉例來說,如果第一絕緣片411和導電彈性單元420兩者由聚矽氧橡膠形成,那麼其兩者可為具有相同物理特性的聚矽氧橡膠,但不限於此。第一絕緣片411可為具有不同於導電彈性單元420的硬度的硬度的聚矽氧橡膠。 According to the embodiment described above, the first insulating sheet of the first sheet type connector and the second insulating sheet of the second sheet type connector are described as a film formed of polyimide or liquid crystal polymer. , but not limited to this. The first insulating sheet and the second insulating sheet may be formed of an insulating elastic material such as polyoxyethylene rubber. In detail, the test socket 400 illustrated in FIG. 10 may be formed such that the insulating elastic material constituting the first insulating sheet 411 and the second insulating sheet 431 has the same physical properties as the polyoxyoxyethylene rubber of the conductive elastic unit 420. Polyoxyethylene rubber. However, the insulating elastic material is not limited thereto, and may have hardness different from that of the conductive elastic unit 420. For example, if both the first insulating sheet 411 and the conductive elastic unit 420 are formed of polyoxyxene rubber, both of them may be polyoxyxene rubber having the same physical properties, but are not limited thereto. The first insulating sheet 411 may be a polyoxyethylene rubber having a hardness different from that of the conductive elastic unit 420.
導電彈性單元420和第一薄片型連接器410可一體地提供到彼此。另外,導電彈性單元420和第二薄片型連接器430可 一體地提供到彼此。「一體地提供到彼此」表示導電彈性單元420、第一薄片型連接器410、第二薄片型連接器430以及第一導電單元412和第二導電單元432經提供以便彼此形成為一體。具有此結構的測試座可通過將第一薄片型連接器410、第二薄片型連接器430和液體聚合物材料(通過將液體聚矽氧橡膠與導電粒子混合而獲得的材料)安置到模具中且硬化所述第一薄片型連接器410、所述第二薄片型連接器430和所述液體聚合物材料來製造。 The conductive elastic unit 420 and the first sheet type connector 410 may be integrally provided to each other. In addition, the conductive elastic unit 420 and the second sheet type connector 430 may be Provided to each other in one. "Integrally supplied to each other" means that the conductive elastic unit 420, the first sheet type connector 410, the second sheet type connector 430, and the first conductive unit 412 and the second conductive unit 432 are provided so as to be integrally formed with each other. A test socket having such a structure can be placed into a mold by sandwiching the first sheet type connector 410, the second sheet type connector 430, and a liquid polymer material (a material obtained by mixing a liquid polyoxyethylene rubber with conductive particles) And manufacturing the first sheet type connector 410, the second sheet type connector 430, and the liquid polymer material.
根據示範性實施例,在測試座中,當通過使用第一薄片型連接器和第二薄片型連接器固定導電彈性單元的上部部分和下部部分的位置時,因為每一導電彈性單元附近存在空白空間,所以當正壓縮導電彈性單元時不會阻止導電彈性單元的變形。因此,導電彈性單元可僅以極少力發生變形。 According to an exemplary embodiment, in the test socket, when the positions of the upper and lower portions of the conductive elastic unit are fixed by using the first sheet type connector and the second sheet type connector, there is a gap near each of the conductive elastic units Space, so deformation of the conductive elastic unit is not prevented when the conductive elastic unit is being compressed. Therefore, the conductive elastic unit can be deformed with only a small amount of force.
換句話說,即使導電彈性單元上施加的按壓力不大,因為待測試裝置上的端子足夠地按壓導電彈性單元,也可獲得導電性。因此,可容易地執行電性測試。 In other words, even if the pressing force applied to the conductive elastic unit is not large, conductivity can be obtained because the terminal on the device to be tested sufficiently presses the conductive elastic unit. Therefore, the electrical test can be easily performed.
應理解,本文中所描述的示範性實施例應僅在描述性意義上考慮,而非出於限制的目的。每一示範性實施例內的特徵或方面的描述應通常被視為可用於其它示範性實施例中的其它相似特徵或方面。 It is to be understood that the exemplary embodiments described herein are considered in a Descriptions of features or aspects within each exemplary embodiment should generally be considered as other similar features or aspects that may be used in other exemplary embodiments.
雖然已參看圖式描述一或多個示範性實施例,但所屬領域的一般技術人員應理解,可在不脫離所附權利要求書所界定的發明概念的精神和範圍的情況下在其中作出形式和細節上的各種 改變。 Although one or more exemplary embodiments have been described with reference to the drawings, it will be understood by those of ordinary skill in the art And various details change.
100‧‧‧測試座 100‧‧‧ test seat
110‧‧‧第一薄片型連接器 110‧‧‧First sheet connector
111‧‧‧第一絕緣片 111‧‧‧First insulation sheet
112‧‧‧第一導電單元 112‧‧‧First Conductive Unit
120‧‧‧導電彈性單元 120‧‧‧Electrical elastic unit
130‧‧‧第二薄片型連接器 130‧‧‧Second sheet type connector
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KR101839592B1 (en) * | 2016-11-23 | 2018-04-26 | 주식회사 아이에스시 | Electrical test assembly and Electrical test socket |
JP6842355B2 (en) * | 2017-04-28 | 2021-03-17 | 株式会社アドバンテスト | Carrier for electronic component testing equipment |
KR101920855B1 (en) * | 2017-05-11 | 2018-11-21 | 주식회사 아이에스시 | Electrical test socket |
IT201700100522A1 (en) * | 2017-09-07 | 2019-03-07 | Technoprobe Spa | Interface element for an electronic device test device and its manufacturing method |
KR102002694B1 (en) * | 2017-09-29 | 2019-07-23 | 주식회사 새한마이크로텍 | Conductive contact and anisotropic conductive sheet with the same |
KR101911496B1 (en) * | 2018-04-13 | 2018-12-28 | 황동원 | Socket device for testing a semiconductor device |
KR102093854B1 (en) * | 2019-04-12 | 2020-03-26 | 주식회사 아이에스시 | Test socket |
KR20220071977A (en) * | 2019-11-22 | 2022-05-31 | 미쓰이 가가쿠 가부시키가이샤 | Anisotropic conductive sheet, electrical inspection device and electrical inspection method |
KR102270276B1 (en) * | 2020-04-10 | 2021-06-28 | 주식회사 오킨스전자 | Test rubber socket and method for manufacturing thereof |
KR102342480B1 (en) * | 2020-08-21 | 2021-12-23 | (주)티에스이 | Test socket and test apparatus having the same |
KR102310726B1 (en) * | 2021-03-05 | 2021-10-12 | (주)위드멤스 | Flexible contactor and method for manufacturing the same |
KR102511313B1 (en) * | 2021-03-11 | 2023-03-20 | (주)위드멤스 | Contactor array and manufacturing method thereof |
KR102597496B1 (en) * | 2021-09-07 | 2023-11-02 | 주식회사 아이에스시 | Socket for electrical connector |
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