TWI588493B - Test socket - Google Patents

Description

Test stand

One or more exemplary embodiments relate to a test socket, and more particularly to a test socket having maintainable electrical characteristics and a reduced useful life that can be effectively prevented even through frequent testing procedures.

Generally, it is necessary to stably form an electrical connection between the device to be tested and the test device to perform an electrical test on the device to be tested. The test stand is used as a device for connecting the device to be tested to the test device.

The test socket is used to connect the terminals on the device to be tested to the pads of the test device such that electrical signals can be exchanged bidirectionally between each other. An anisotropic conductive sheet and a spring thimble are mainly used as the test socket. In the test socket using the anisotropic conductive sheet, the conductive units in which the conductive particles are densely distributed in the elastic ruthenium rubber are respectively connected to the terminals on the device to be tested. In a test socket using a spring thimble, a spring is inserted into the housing and then connected to the terminals on the device to be tested. Both the test socket using the anisotropic conductive sheet and the test socket using the spring thimble have a structure for absorbing electrical shock that can occur during connection to the terminal.

An anisotropic conductive sheet (anisotropic) used as the test stand 20 is illustrated in FIG. An example of a conductive sheet). The test socket 20 includes a conductive unit 8 formed in each of the regions in which the ball terminal 4 on the device under test 2 contacts the test socket 20, and the ball terminal 4 formed on the device 2 to be tested does not contact the test socket 20 and serves as an insulating unit 6 in a region supporting the insulating layer of the conductive unit 8. The conductive unit 8 includes a ruthenium rubber in which the conductive particles 8a are densely arranged. The test stand 20 is mounted in a test device 9 in which a plurality of pads 10 are provided. In detail, when the plurality of pads 10 included in the test device 9 respectively contact the conductive unit 8, the test socket 20 is mounted in the test device 9.

After the device under test 2 is carried by a specific carrier (not shown) for electrical testing, the device under test 2 is lowered toward the test socket 20 to contact the conductive unit 8. Subsequently, the device under test 2 presses the conductive unit 8 by using a pressing member (not shown). Subsequently, the conductive unit 8 is compressed in the direction of the thickness of the conductive unit 8, and thus, the conductive particles 8a in the conductive unit 8 are in contact with each other to reach a conductive state. If a specific electrical signal is applied from the test device 9 to the device under test 2, the electrical signal is transmitted via the conductive unit 8 to the device under test 2, and thus, a specific electrical test is performed.

The test stand 20 is repeatedly compressed and expanded in several processes of contacting the device 2 to be tested. If the conductive unit 8 is compressed due to contact with the device 2 to be tested, the center of the conductive unit 8 is convex and all the conductive units 8 are expanded in the planar direction. In other words, the conductive unit 8 has the shape illustrated in FIG.

An insulating unit 6 is provided adjacent to the conductive unit 8 to support the conductive unit 8. The insulating unit 6 is integrally provided to the conductive unit 8, and thus, supports the conductive unit 8. The insulating unit 6 also prevents expansion of the conductive unit 8. In other words, the insulating unit 6 can The free expansion of the conductive unit 8 is prevented. Thus, since the insulating unit 6 prevents the free expansion of the conductive unit 8, a large pressing force is required to press the conductive unit 8 in the direction of the thickness of the conductive unit 8.

However, the test socket 20 may require a specific pressure to have electrical conductivity. This represents that the device 2 to be tested needs to press the test socket 20 with the pressure to obtain conductivity. In the past, when only a small number of conductive units 8 were present in the device under test 2, there was no problem when the test socket 20 was pressed. However, since there is a tendency to increase toward high-density integration of semiconductor devices, the number of terminals on the device under test 2 has increased. If the number of terminals is increased, the number of conductive units 8 also needs to be increased. Thus, if the number of the conductive units 8 is increased, there is a problem that it is necessary to press the test socket 20 by using a large force to obtain conductivity. However, it may be technically difficult to excessively increase the pressing force applied when the pressing member presses the device to be tested, and when the device under test 2 transmits excessive pressing force to the test seat 20, the device 2 to be tested may be damaged.

Therefore, in the prior art, it is difficult to efficiently perform an electrical test through the test stand on the device 2 to be tested having a plurality of terminals.

One or more exemplary embodiments include a test socket for easily performing an electrical test on a device to be tested even when the number of terminals on the device to be tested is increased.

Additional aspects will be set forth in the description which follows, and in part will be apparent from the description or Got it.

According to one or more exemplary embodiments, a test socket disposed between a terminal disposed on a device to be tested and a gasket of a test device and electrically connecting the terminal and the gasket includes: a first sheet type connector a first insulating sheet having an edge fixed to a specific position, and a plurality of first conductive units configured to be disposed at each position corresponding to the terminal on the device to be tested, having the first insulation Conductivity in the direction of the thickness of the sheet, and is provided to the first insulating sheet; a plurality of conductive elastic units configured to be disposed under the first sheet type connector, at the first insulating sheet The direction of the thickness extends at each position corresponding to the terminal on the device to be tested, formed of an insulating elastic material in which a plurality of conductive particles are distributed, wherein an upper portion of each of the plurality of conductive elastic units a portion integrally provided to each of the first conductive units; and a second sheet type connector including a second disposed under the plurality of conductive elastic units and having an edge fixed to a specific position a rim, and a plurality of second conductive units configured to be disposed at each position corresponding to the terminals on the device to be tested, having conductivity in a direction of a thickness of the second insulating sheet, and being provided To the second insulating sheet, wherein an upper portion of each of the plurality of second conductive units is integrally provided to each of the plurality of conductive elastic units, wherein the plurality of conductive elastic units The positions of the upper portion and the lower portion of each of the support are supported by the first sheet type connector and the second sheet type connector, and an empty space is formed in the plurality of conductive elastic units In the vicinity of each of them, the plurality of conductive elastic units are not prevented from being pressed in the thickness direction and expanded in the direction of the face.

One side of each of the plurality of conductive elastic units may be surrounded by a blank space such that a white space extends from a top of the side of the one of the plurality of conductive elastic units to a bottom.

An intermediate portion between the top and the bottom of one side of each of the plurality of conductive elastic units may be surrounded by the empty space.

The first insulating sheet may include a film formed of a synthetic resin, and a plurality of through holes are formed at each position corresponding to the terminal on the device to be tested, and the plurality of first conductive units may penetrate the through hole And supported by the first insulating sheet.

The inner diameter of the through hole of the first insulating sheet may be smaller than the outer diameter of the conductive elastic unit, and thus, the surrounding area of the through hole in the first insulating sheet may be supported by one end of the upper surface of the conductive elastic unit.

The first insulating sheet may include an insulating elastic material, and a plurality of through holes are formed at each position corresponding to the terminal on the device to be tested, and the first conductive unit may penetrate the through hole and be insulated by the first Sheet support.

The plurality of first conductive units may be formed of a conductive metal material.

The plurality of first conductive units may include the same material as that of the plurality of conductive elastic units.

The plurality of conductive elastic units may be integrally provided to at least one selected from the group consisting of: a first sheet type connector and a second sheet type connector.

The insulating elastic material of the plurality of conductive elastic units may be formed of a polyoxyethylene rubber.

The insulating elastic material of the first insulating sheet may be formed of a polyoxyethylene rubber.

The hardness of the insulating elastic material constituting the plurality of conductive elastic units is different from the hardness of the insulating elastic material constituting the first insulating sheet.

The first insulating sheet may include a mesh having a plurality of apertures, and the plurality of first conductive units may fill the voids in the mesh and extend in a direction of a thickness of the first insulating sheet.

The first sheet type connector and the second sheet type connector may have the same shape.

In accordance with one or more exemplary embodiments, a test socket configured between a terminal disposed on a device to be tested and a gasket of a test device and electrically connecting the terminal and the gasket includes: a plurality of conductive elastics a unit configured to extend at each position corresponding to a terminal on the device to be tested in a direction of thickness, formed of an insulating elastic material in which a plurality of conductive particles are distributed; and a pair of sheet-type connectors Arranging to be respectively disposed above and below the plurality of conductive elastic units such that the plurality of conductive elastic units therebetween are respectively connected to the upper and lower portions of the plurality of conductive elastic units to support the plurality of conductor elasticity The unit has a shape corresponding to each other, wherein the plurality of conductive elastic units are separated from each other and surrounded by a blank space.

2‧‧‧Testing device

4‧‧‧Ball terminals

6‧‧‧Insulation unit

8‧‧‧Conducting unit

8a‧‧‧ conductive particles

9‧‧‧Test equipment

10‧‧‧ cushion

20‧‧‧ test seat

100‧‧‧ test seat

110‧‧‧First sheet connector

111‧‧‧First insulation sheet

111a‧‧‧through hole

112‧‧‧First Conductive Unit

120‧‧‧Electrical elastic unit

121‧‧‧ conductive particles

125‧‧‧White space

130‧‧‧Second sheet type connector

131‧‧‧Second insulation sheet

132‧‧‧Second conductive unit

140‧‧‧Testing device

141‧‧‧ terminals

150‧‧‧Test equipment

151‧‧‧ cushion

212‧‧‧First Conductive Unit

232‧‧‧Second conductive unit

311‧‧‧First insulating sheet

312‧‧‧First Conductive Unit

331‧‧‧Second insulation sheet

332‧‧‧Second conductive unit

400‧‧‧ test seat

410‧‧‧First sheet connector

411‧‧‧First insulation sheet

412‧‧‧First Conductive Unit

420‧‧‧Electrical elastic unit

430‧‧‧Second sheet type connector

431‧‧‧Second insulation sheet

432‧‧‧Second conductive unit

The description of the embodiments will be clearly understood from the following description in conjunction with the drawings These and/or other aspects are more readily understood, and in the drawings: Figure 1 illustrates a test stand in the prior art.

Figure 2 illustrates the operation of the test stand of Figure 1.

FIG. 3 is an enlarged view of the operation illustrated in FIG. 2.

4 is a perspective view of a test socket in accordance with an exemplary embodiment.

Figure 5 is a cross-sectional view of the test stand illustrated in Figure 4.

Figure 6 illustrates the operation of the test stand of Figure 5.

FIG. 7 is a perspective view of a test stand in accordance with another exemplary embodiment.

Figure 8 is a cross-sectional view of the test socket illustrated in Figure 7.

9 is a cross-sectional view of a test stand illustrated in accordance with another exemplary embodiment.

FIG. 10 is a cross-sectional view of a test stand illustrated in accordance with another exemplary embodiment.

Reference will now be made in detail to the exemplary embodiments embodiments embodiments In this regard, the embodiments of the invention may have different forms and should not be construed as being limited to the descriptions set forth herein. Accordingly, the exemplary embodiments are described below only by referring to the figures in the description

Hereinafter, exemplary embodiments will be described in detail with reference to the accompanying drawings.

According to an exemplary embodiment, the test socket 100 is disposed between the terminal 141 on the device under test 140 and the gasket 151 of the test device 150 to electrically connect the terminal 141 to the gasket 151.

The test socket 100 includes a first sheet type connector 110, a conductive elastic unit 120, and a second sheet type connector 130.

The first sheet-type connector 110 is disposed on the conductive elastic unit 120 and supports the position of each of the conductive elastic units 120. The peripheral edge of the first sheet type connector 110 can be fixed by using a frame (not shown).

The first sheet type connector 110 includes a first insulating sheet 111 and a first conductive unit 112.

The first insulating sheet 111 is formed of a synthetic resin and has a through hole 111a. However, the first insulating sheet 111 is not limited thereto and may be formed of any insulating flexible material. The first insulating sheet 111 may be formed of a resin material such as polyimide, liquid crystal polymer or a combination thereof. However, the first insulating sheet 111 may be formed of polyimide to form a via hole easily by etching.

The through hole 111a is formed at each position corresponding to the terminal 141 on the device 140 to be tested. The through hole 111a is formed to pass through the top and bottom surfaces of the first insulating sheet 111, and has a substantially circular cross section. The through hole 111a may have a diameter smaller than that of the conductive elastic unit 120 which will be described later. Thus, since the inner diameter of the through hole 111a in the first insulating sheet 111 is smaller than the outer diameter of the conductive elastic unit 120, the peripheral region of the through hole 111a in the first insulating sheet 111 can be covered by the upper surface of the conductive elastic unit 120. Peripheral edge support.

The first conductive unit 112 fills the through hole 111a and is supplied to the first insulating sheet 111 to have conductivity in a direction of the thickness of the first conductive unit 112. The first conductive unit 112 has a plurality of conductive particles 121 therein densely disposed on the conductive elastic material The structure in the material. The constituent material of the first conductive unit 112 is similar to the constituent material of the conductive elastic unit 120 which will be described later.

The conductive elastic unit 120 is disposed under the first sheet-type connector 110 and extends at each position corresponding to the terminal 141 on the device to be tested 140 in the direction of the thickness of the conductive elastic unit 120. The conductive elastic unit 120 is formed of an insulating elastic material in which the plurality of conductive particles 121 are disposed, and an upper portion of each of the conductive elastic materials 120 is integrally provided to each of the first conductive units 112, and The conductive elastic units 120 are separated from each other in the horizontal direction.

Upper portions of each of the conductive elastic units 120 are integrally provided to a lower portion of each of the first conductive units 112, and lower portions of each of the conductive elastic units 120 are integrally provided to the first The upper portion of each of the two conductive units 132. In other words, the conductive elastic unit 120 is integrally provided to the first conductive unit 112 and the second conductive unit 132. A blank space 125 may be formed around each of the conductive elastic units 120 such that the expansion of the conductive elastic unit 120 is not prevented in the planar direction when the conductive elastic unit 120 is pressed in the direction of the thickness of the conductive elastic unit 120. In detail, the blank space 125 may be formed at the side of the conductive elastic unit 120 and extend from the top to the bottom of the conductive elastic unit 120 (to surround the entire side of the conductive elastic unit 120). However, the blank space 125 is not limited thereto, and may be formed in an intermediate portion between the top and the bottom of the conductive elastic unit 120 which is most expanded in the planar direction between the plurality of conductive elastic units 120.

The insulating elastic material constituting the conductive elastic unit 120 may be a polymeric material having a crosslinkable structure. Various curable polymeric materials can be used to form the insulating elasticity material. Examples of the curable polymeric material may be: conjugated diene-based rubber, such as poly butadiene rubber, natural rubber, polyisoprene rubber, benzene Styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber or the like, or a hydrogen additive thereof; block copolymer rubber , for example, styrene-butadiene-diene block copolymer rubber, styrene-isoprene block copolymer or the like, Or a hydrogen additive thereof; a chloroprene rubber; a urethane rubber; a polyester-based rubber; an epichlorohydrin rubber; a polyoxyxene rubber (silicone rubber); ethylene-propylene copolymer rubber; ethylene-propylene-diene copolymer rubber ); or similar.

As described above, in the case where weather resistance is required for the obtained conductive elastic unit 120, it is preferable to use a material other than the conjugated diene rubber, and it is particularly preferable regarding molding and processing characteristics and electrical characteristics. Use polyoxymethylene rubber.

In addition, the plurality of conductive particles 121 may be formed of a magnetic material. Examples of the plurality of conductive particles 121 may be particles of a magnetic metal such as iron, cobalt, nickel or the like, particles of an alloy thereof or particles containing a magnetic metal, by using the above a particle obtained by using the particle as a core particle and plating a surface of a core particle with a metal having fine conductivity (for example, gold, silver, palladium or iridium), or by using a non-magnetic metal particle, such as an inorganic material particle such as glass beads Or particles obtained by polymerizing the core particles as core particles and electroplating the surface of the core particles with a conductive magnetic metal such as nickel or cobalt.

Among the particles described above, particles obtained by using nickel particles as core particles and plating the surface of the core particles with gold having fine conductivity can be used.

The method of plating the surface of the core particles with a conductive metal may be, for example, an electroless plating method, an electrolytic plating method, a sputtering method, a deposition method, or the like, but is not limited thereto.

In the case where the conductive particles 121 obtained by coating the surface of the core particles with a conductive metal are used, the coating ratio of the conductive metal (the ratio of the coated region of the conductive metal to the surface region of the core particles) in the surface of the particles is preferably It is equal to or higher than 40%, further preferably equal to or higher than 45%, and particularly preferably from 47 to 95% because high conductivity can be obtained.

Further, the coating amount of the conductive metal is preferably from 0.5 to 50% by mass, more preferably from 2 to 30% by mass, further preferably from 3 to 25% by mass, and particularly preferably from 4 to 20% by mass, based on the core particles. In the case where the conductive metal to be coated is gold, the coating amount is 0.5 to 30% by mass, more preferably 2 to 20% by mass, and further preferably 3 to 15% by mass, based on the preferred core particles.

The second sheet type connector 130 is disposed under the conductive elastic unit 120 a second second insulating sheet 131, and a plurality of second conductive units 132 disposed at each position corresponding to the terminal 141 on the device to be tested 140 are in the direction of the thickness of the plurality of second conductive units 132 Conductive. The plurality of second conductive units 132 are provided to the second insulating sheet 131, and an upper portion of each of the plurality of second conductive units 132 is integrally provided to each of the conductive elastic units 120 .

The second sheet type connector 130 supports the lower portion of the conductive elastic unit 120, and the position of the peripheral area of the second sheet type connector 130 is fixed by a frame (not shown). The second sheet type connector 130 may have the same shape as that of the first sheet type connector 110. Also, the second sheet type connector 130 may be disposed to correspond to the first sheet type connector 110 so that the conductive elastic unit 120 is interposed therebetween.

According to an exemplary embodiment, the test socket 100 may have an effect that the test socket 100 is installed in the test apparatus 150, at which time the second conductive unit 132 included in the test socket 100 contacts the gasket 151 of the test apparatus 150. Subsequently, the device under test 140 is gradually lowered toward the test device 150 such that the terminal 141 on the device under test 140 contacts the top surface of the first conductive unit 112 included in the first sheet-type connector 110. Subsequently, the device to be tested 140 is pressed by using a specific pressing tool (not shown) to press the conductive elastic unit 120 in the direction of the thickness of the conductive elastic unit 120.

Thus, if the conductive elastic unit 120 is pressed, the conductive elastic unit 120 is compressed in the direction of the thickness of the conductive elastic unit 120, and the conductive elastic unit 120 is expanded in the planar direction perpendicular to the direction of the thickness. In the process, the plurality of conductive particles 121 included in the conductive elastic unit 120 are in contact with each other and enter Into the conductive state.

Hereinafter, according to an exemplary embodiment, the test socket 100 has an advantage that, according to an exemplary embodiment, since the test socket 100 does not have a separate insulating unit in the vicinity of each of the plurality of conductive elastic units 120, The conductive elastic unit 120 is easily pressed. In other words, since the test socket 100 does not include an insulating unit for preventing the expansion of the conductive elastic unit 120 but a blank space 125 included in the vicinity of the plurality of conductive elastic units 120, the conductive elasticity can be easily pressed with little force. Unit 120.

Therefore, the test socket 100 can enable the conductive elastic unit 120 to have electrical conductivity even without excessive pressure and even when a plurality of terminals 141 are presented on the device under test 140.

In addition, since the upper portion and the lower portion of the conductive elastic unit 120 are stably supported by the first sheet type connector 110 and the second sheet type connector 130, the conductive elastic unit 120 can be stably maintained at the original even after a frequent test process Location.

According to an exemplary embodiment, the test socket may be modified as follows: The test sockets illustrated in Figures 7 and 8 are described as follows: According to the embodiments described above, the first conductive unit and the second conductive unit are described as being electrically conductive The same material is formed in the unit. However, the first conductive unit 212 and the second conductive unit 232 are not limited thereto and may be formed of a metal material.

The first conductive unit 212 and the second conductive unit 232 may be formed of a material such as nickel, copper, silver, palladium, iron, or the like. The entire first conductive unit 212 and the whole The second conductive unit 232 may be formed of a single metal or an alloy of two or more types of metals, or may be formed to have a structure in which two or more types of metals form a layered structure. In addition, the surface of the first conductive unit 212 and the second conductive unit 232 contacting the terminal or the pad may be formed of a chemically stable and very conductive metal such as gold, silver, palladium or the like in order to prevent oxidation and reduction of the surface. Small contact resistance.

The test stand illustrated in FIG. 9 is as follows: According to the embodiment described above, the first insulating sheet and the second insulating sheet comprise a film having a through hole thereon, such as polyimide, and the like, and the first conductive unit and The second conductive units are provided to each other via the through holes. However, the first insulating sheet and the second insulating sheet are not limited thereto. The first insulating sheet 311 and the second insulating sheet 331 may be formed of a porous material having a plurality of pores.

The porous sheet contained in the first insulating sheet 311 and the second insulating sheet 331 may be a mesh or a non-woven fabric formed by using organic fibers. The organic fiber may be a fluororesin fiber, such as polytetrafluoroethylene fiber, aramid fiber, polyethylene fiber, polyarylate fiber, nylon fiber. ), polyester fiber or the like. By using an organic fiber having a coefficient of linear thermal expansion of 30 × 10 ^-6 to -5 × 10 ^-6 /K (specifically, 10 × 10 ^-6 to -3 × 10 ^-6 /K), in addition, it is possible The thermal expansion of the first conductive unit and the second conductive unit is suppressed. Therefore, also in the case where the heat history caused by the change in temperature is received therein, it is possible to stably maintain an excellent electrical connection state. Further, it is preferred to use an organic fiber having a diameter of 10 to 200 μm.

Since the first conductive unit 312 and the second conductive unit 332 fill the voids formed on the first insulating sheet 311 and the second insulating sheet 331, and thus are integrally formed with the first insulating sheet 311 and the second insulating sheet 331, the first The conductive unit 312 and the second conductive unit 332 may not be spaced apart from the first insulating sheet 311 and the second insulating sheet 331.

As described with reference to Fig. 9, if the first insulating sheet 311 is formed of a porous material, flexibility can be ensured as compared with the insulating sheet. Therefore, even if the sizes of the terminals on the device to be tested are different from each other, all of the plurality of first conductive units 312 can contact the terminals on the device to be tested.

According to the embodiment described above, the first insulating sheet of the first sheet type connector and the second insulating sheet of the second sheet type connector are described as a film formed of polyimide or liquid crystal polymer. , but not limited to this. The first insulating sheet and the second insulating sheet may be formed of an insulating elastic material such as polyoxyethylene rubber. In detail, the test socket 400 illustrated in FIG. 10 may be formed such that the insulating elastic material constituting the first insulating sheet 411 and the second insulating sheet 431 has the same physical properties as the polyoxyoxyethylene rubber of the conductive elastic unit 420. Polyoxyethylene rubber. However, the insulating elastic material is not limited thereto, and may have hardness different from that of the conductive elastic unit 420. For example, if both the first insulating sheet 411 and the conductive elastic unit 420 are formed of polyoxyxene rubber, both of them may be polyoxyxene rubber having the same physical properties, but are not limited thereto. The first insulating sheet 411 may be a polyoxyethylene rubber having a hardness different from that of the conductive elastic unit 420.

The conductive elastic unit 420 and the first sheet type connector 410 may be integrally provided to each other. In addition, the conductive elastic unit 420 and the second sheet type connector 430 may be Provided to each other in one. "Integrally supplied to each other" means that the conductive elastic unit 420, the first sheet type connector 410, the second sheet type connector 430, and the first conductive unit 412 and the second conductive unit 432 are provided so as to be integrally formed with each other. A test socket having such a structure can be placed into a mold by sandwiching the first sheet type connector 410, the second sheet type connector 430, and a liquid polymer material (a material obtained by mixing a liquid polyoxyethylene rubber with conductive particles) And manufacturing the first sheet type connector 410, the second sheet type connector 430, and the liquid polymer material.

According to an exemplary embodiment, in the test socket, when the positions of the upper and lower portions of the conductive elastic unit are fixed by using the first sheet type connector and the second sheet type connector, there is a gap near each of the conductive elastic units Space, so deformation of the conductive elastic unit is not prevented when the conductive elastic unit is being compressed. Therefore, the conductive elastic unit can be deformed with only a small amount of force.

In other words, even if the pressing force applied to the conductive elastic unit is not large, conductivity can be obtained because the terminal on the device to be tested sufficiently presses the conductive elastic unit. Therefore, the electrical test can be easily performed.

It is to be understood that the exemplary embodiments described herein are considered in a Descriptions of features or aspects within each exemplary embodiment should generally be considered as other similar features or aspects that may be used in other exemplary embodiments.

Although one or more exemplary embodiments have been described with reference to the drawings, it will be understood by those of ordinary skill in the art And various details change.

100‧‧‧ test seat

110‧‧‧First sheet connector

111‧‧‧First insulation sheet

112‧‧‧First Conductive Unit

120‧‧‧Electrical elastic unit

130‧‧‧Second sheet type connector

Claims (15)

A test socket configured to be disposed between a terminal on a device to be tested and a gasket of a test device and electrically connecting the terminal and the gasket, the test socket comprising: a first sheet type connector, A first insulating sheet having an edge fixed to a specific position, and a plurality of first conductive units configured to be disposed at each position corresponding to the terminal on the device to be tested, having Conductivity in the direction of the thickness of the first insulating sheet, and is supplied to the first insulating sheet; a plurality of conductive elastic units configured to be disposed under the first sheet type connector, in the Extending in a direction of a thickness of an insulating sheet at each position corresponding to the terminal on the device to be tested, formed of an insulating elastic material in which a plurality of conductive particles are distributed, wherein the plurality of conductive elastic units An upper portion of each of the first conductive units is integrally provided to each of the first conductive units; and a second sheet type connector including a plurality of conductive elastic units disposed under the plurality of conductive elastic units a second insulating sheet at a position, and a plurality of second conductive units configured to be disposed at each of the positions corresponding to the terminals on the device to be tested, having a thickness at the second insulating sheet Conductivity in the direction, and is supplied to the second insulating sheet, wherein an upper portion of each of the plurality of second conductive units is integrally provided to each of the plurality of conductive elastic units Where the positions of the upper portion and the lower portion of each of the plurality of conductive elastic units are supported by the first sheet type connector and the second sheet type connector, and A blank space is formed in the vicinity of each of the plurality of conductive elastic units without preventing the plurality of conductive elastic units from being pressed in the direction of the thickness and expanding in the direction of the face. The test socket of claim 1, wherein one side of each of the plurality of conductive elastic units is surrounded by the blank space such that the blank space is from the plurality of conductive elastic units The top of the side of each of them extends to the bottom. The test stand according to claim 1, wherein an intermediate portion between a top and a bottom of one side of each of the plurality of conductive elastic units is surrounded by the empty space. The test stand according to claim 1, wherein the first insulating sheet comprises a film formed of a synthetic resin, and a plurality of through holes are formed in each of the terminals corresponding to the device to be tested And the first conductive unit penetrates the through hole and is supported by the first insulating sheet. The test seat according to claim 4, wherein an inner diameter of the through hole of the first insulating sheet is smaller than an outer diameter of the conductive elastic unit, and thus, the first insulating sheet The surrounding area of the through hole is supported by one end of the upper surface of the conductive elastic unit. The test socket according to claim 1, wherein the first insulating sheet comprises an insulating elastic material, and a plurality of through holes are formed at each position corresponding to the terminal on the device to be tested, And the first conductive unit penetrates the through hole and is supported by the first insulating sheet. The test stand of claim 4, wherein the plurality of first conductive units are formed of a conductive metal material. The test stand of claim 4, wherein the plurality of first conductive units comprise the same material as the plurality of conductive elastic units. The test stand of claim 1, wherein the plurality of conductive elastic units are integrally provided to at least one selected from the group consisting of: the first sheet type connector and the Second sheet type connector. The test stand according to claim 1, wherein the insulating elastic material of the plurality of conductive elastic units is formed of polyoxyxene rubber. The test socket according to claim 6, wherein the insulating elastic material of the first insulating sheet is formed of polyoxyxene rubber. The test stand according to claim 6, wherein the insulating elastic material constituting the plurality of conductive elastic units has a hardness different from that of the insulating elastic material constituting the first insulating sheet. The test socket of claim 1, wherein the first insulating sheet comprises a grid having a plurality of pores, and the plurality of first conductive units fill the pores in the grid and The first insulating sheet extends in the direction of the thickness. The test stand of claim 1, wherein the first sheet type connector and the second sheet type connector have the same shape. A test socket configured to be disposed between a terminal on a device to be tested and a gasket of a test device and electrically connect the terminal and the gasket, the test socket comprising: a plurality of conductive elastic units Configuring to extend at each position corresponding to the terminal on the device to be tested in a direction of thickness, formed of an insulating elastic material in which a plurality of conductive particles are distributed; and a pair of sheet-type connectors, Arranged to be respectively disposed above and below the plurality of electrically conductive elastic units to have the plurality of electrically conductive elastic units therebetween, respectively connected to the upper and lower portions of the plurality of electrically conductive elastic units to support the plurality of a conductor elastic unit comprising a pair of insulating sheets and a pair of conductive units, the insulating sheet having a plurality of through holes formed at each position corresponding to the terminal on the device to be tested, The conductive unit penetrates the through hole and is supported by the insulating sheet and has conductivity in a direction of a thickness of the insulating sheet, wherein the plurality of conductive elastic units are separated from each other and are hollow A space enclosed.