TWI544704B - Connecting connector - Google Patents

Description

Connection connector

One or more exemplary embodiments are directed to a connection connector, and more particularly to a connection connector that can be periodically used over a long period of time without deterioration of electrical properties.

Electrical tests are typically performed to determine defects in test target devices such as fabricated semiconductor devices. For example, whether the substrate is short-circuited can be determined by transmitting a test signal to the test device. The test device and the test target device are not in direct contact with each other, but indirectly contact each other by using an intermediate called a connection connector.

This is because when the terminal of the test device directly contacts the terminal of the test target device, the terminal can be scratched or damaged during the repeated test. Also, if the terminal is damaged, the test device or test target device will have to be replaced, so the total cost will increase. Therefore, when the connection connector is used as an intermediate, the test target device can contact the connection connector of the test device. When the connection connector is scratched or damaged due to repeated contact, only the connection connector needs to be replaced, so the total replacement cost can be saved.

The anisotropic conductive connector disclosed in KR 10-2006-0013429 is an example of a connection connector.

The anisotropic conductive connector 10 of Figures 1 and 2 is rectangularly oriented The conductive film 10A is composed of a sheet-like connector 20 integrally provided on one surface of the anisotropic conductive film 10A and a rectangular plate-shaped support portion 30 supporting the anisotropic conductive film 10A. The anisotropic conductive film 10A in the anisotropic conductive connector 10 is composed of a plurality of cylindrical conductive path forming portions 11 respectively extending in the thickness direction and insulating portions for insulating the conductive path forming portions 11 from each other. 14 composition. In this example, the conduction path forming portion 11 is placed at a constant pitch in accordance with the position of the grid point.

The sheet-like connector 20 includes a flexible insulating sheet 21 and is provided on the anisotropic conductive film 10A. The plurality of electrode structures 22 formed of metal extending in the direction of the thickness of the insulating sheet 21 are spaced apart from each other in the planar direction of the insulating sheet 21 in accordance with the pattern corresponding to the pattern of the electrodes to be the connection objects in the insulating sheet 21. Further, the insulating sheet 21 is provided with a plurality of through holes 26 for coupling corresponding to the protruding portions 15 for coupling in the anisotropic conductive film 10A.

The embodiment illustrated in Figure 3 is similar to the embodiment illustrated in Figures 1 and 2. However, FIG. 3 differs from FIG. 1 and FIG. 2 in that the sheet-like connector 20 has an insulating sheet 21 composed of a mesh fabric, a non-woven fabric or a porous sheet in which a gap communicating with both sides of the insulating sheet 21 is provided. form. Further, the plurality of electrode structures 22 formed of metal extending in the direction of the thickness of the insulating sheet 21 are spaced apart from each other in the planar direction of the insulating sheet 21 in accordance with the pattern corresponding to the pattern of the electrodes to be the connection objects in the insulating sheet 21. open.

In the connection connector according to the prior art, when the terminal touches the electrode structure, the surface of the terminal of the test target device or the electrode structure may be damaged. In detail, when the metal terminal of the test target device directly contacts the electrode structure formed of metal, both surfaces may be damaged.

The damaged surface can not only reduce the durability of the connector but also reduce the conductivity.

One or more exemplary embodiments include a connection connector that can be used periodically over a long period of time without deterioration of electrical properties.

Additional aspects will be set forth in the description which follows, and in part will be apparent from the description.

According to one or more exemplary embodiments, a connection connector disposed between a test target device and a test device and configured to electrically connect a terminal of the test target device with a pad of the test device, the connection connector The invention comprises: an anisotropic conductive sheet composed of a plurality of conductive portions, wherein the plurality of conductive particles extend in a thickness direction at a region of the elastic insulating material, the region corresponding to a terminal of the test target device and being disposed in the conductive portion An insulating support portion disposed therebetween for supporting and isolating the conductive portion; a sheet-like connector interposed between the upper surface and the lower surface of the anisotropic conductive sheet and inserted in the anisotropic conductive sheet And a porous sheet having a plurality of voids; and a plurality of electrodes disposed corresponding to the conductive portion and integrally coupled to the porous sheet. Each of the electrodes is formed of a metallic material and electrically connected to each of the conductive portions.

Each of the electrodes can be located between the upper surface and the lower surface of the conductive portion.

Each electrode may have the shape of a plate corresponding to a horizontal cross section of each conductive portion.

Each of the conductive portions may include a configuration above the electrode, contact measurement A terminal of the target device and a first conductive portion composed of the first conductive particles and a second conductive portion disposed under the electrode and composed of the second conductive particles.

The density per unit area of the first conductive particles of the first conductive portion may be greater than the density per unit area of the second conductive particles of the second conductive portion.

The first conductive particles of the first conductive portion may have an average diameter smaller than the average diameter of the second conductive particles of the second conductive portion.

The position of the sheet-like connector may be higher than the intermediate portion between the upper surface and the lower surface of the anisotropic conductive sheet.

The sheet-like connector may be located intermediate the upper surface and the lower surface of the anisotropic conductive sheet.

The guide sheet may be disposed on the upper surface of the anisotropic conductive sheet, and the guide sheet guides the test target device to contact the conductive portion by forming a through hole at a position corresponding to each of the conductive portions .

The porous sheet may comprise a mesh fabric or a non-woven fabric, and the voids of the porous sheet are filled with an elastic insulating material.

According to one or more exemplary embodiments, a connection connector disposed between a test target device and a test device and configured to electrically connect a terminal of the test target device with a pad of the test device, the connection connector includes An anisotropic conductive sheet comprising a plurality of conductive portions, wherein the plurality of conductive particles extend in a thickness direction at a region of the elastic insulating material, the region corresponding to a terminal of the test target device; the sheet-like connector being set by a porous sheet interposed between the upper surface and the lower surface of the anisotropic conductive sheet and inserted in the anisotropic conductive sheet; and a plurality of metal electrodes integrally coupled to the porous sheet and disposed in correspondence with the conductive portion The location of each of them is buried in the conductive portion.

The metal electrode may comprise a magnetic material.

10‧‧‧ Anisotropic Conductive Connector

10A‧‧‧ anisotropic conductive film

11‧‧‧ Conduction path formation

14‧‧‧Insulation

15‧‧‧ highlight

20‧‧‧Sheet connector

21‧‧‧Insulation sheet

22‧‧‧Electrode structure

26‧‧‧through hole

30‧‧‧ Rectangular plate-shaped support section

100‧‧‧Connecting connector

110‧‧‧ Anisotropic conductive sheets

111‧‧‧ Conductive part

112‧‧‧First conductive part

112a‧‧‧ Conductive particles

113‧‧‧Second conductive part

113a‧‧‧ Conductive particles

114‧‧‧Insulation

120‧‧‧Sheet connector

121‧‧‧Porous flakes

122‧‧‧ electrodes

130‧‧‧ Guide sheet

131‧‧‧through hole

140‧‧‧Test target device

141‧‧‧ terminals

150‧‧‧Testing device

151‧‧‧ cushion

200‧‧‧Connector

210‧‧‧Anisotropic conductive sheet

212‧‧‧First conductive part

212a‧‧‧First Conductive Particles

213‧‧‧Second conductive part

213a‧‧‧Second conductive particles

220‧‧‧Sheet connector

300‧‧‧Connector

310‧‧‧Anisotropic conductive sheet

320‧‧‧Sheet connector

400‧‧‧Connector

410‧‧‧Anisotropic conductive sheet

420‧‧‧Sheet connector

These and/or other aspects will become more apparent from the following description of the embodiments of the accompanying drawings, in which: FIG. 1 is used to describe a connector according to the prior art. Diagram of the instance.

Figure 2 is an enlarged view of a portion of Figure 1.

FIG. 3 is a diagram for describing another example of a connection connector according to the prior art.

FIG. 4 illustrates a diagram for describing a connection connector in accordance with an exemplary embodiment.

FIG. 5 is an explanatory view of the operation of the connection connector of FIG. 4.

6 through 8 are diagrams for describing a connection connector according to another exemplary embodiment.

Hereinafter, a connection connector according to the inventive concept will be described with reference to the accompanying drawings.

The connection connector 100 according to the exemplary embodiment is disposed between the test target device 140 and the test device 150, and is electrically connected to the terminal 141 of the test target device 140 and the pad 151 of the test device 150. The connection connector 100 includes an anisotropic conductive sheet 110, a sheet-like connector 120, and a guide sheet 130.

The anisotropic conductive sheet 110 has conductivity in the thickness direction when pressure is applied. The anisotropic conductive sheet 110 includes a plurality of conductive portions 111 and a plurality of insulating portions 114.

The conductive portion 111 is disposed at any place corresponding to the terminal 141 of the test target device 140 in a plurality of conductive particles extending in the thickness direction in the elastic insulating material. The elastic insulating material can be a polymeric material having a bridge structure. The cured polymeric material forming material can be used to obtain an elastic insulating material. Examples of the material may include: conjugated diene-based rubber, such as polybutadiene rubber, natural rubber, polyisoprene rubber, Styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, and hydrogenated product thereof; block copolymer rubber, such as , styrene-butadiene-diene block terpolymer rubber, styrene-isoprene block copolymer, and hydrogenated product thereof And chloroprene rubber, urethane rubber, polyester-based rubber, epichlorohydrin rubber, silicone rubber , ethylene-propylene copolymer rubber, ethylene-propylene-diene terpolymer rubber And similar.

As described above, when the anisotropic conductive sheet 110 must be weatherproof, it is necessary to use a material different from the conjugated diene-based rubber. In particular, ruthenium rubber can be used in view of molding and handling properties as well as electrical properties.

The conductive particles 112a and 113a may be magnetic particles. Examples of the conductive particles 112a and 113a may include particles of a magnetic metal such as iron, cobalt, nickel, an alloy thereof, or a particle containing the same; one of the above particles is a core particle and Particles plated with a highly conductive metal such as gold, silver, palladium, rhodium or the like; or non-magnetic metal particles, inorganic material particles such as glass beads or polymer particles are core particles and have been plated with, for example, nickel a particle of the surface of a core particle of a conductive magnetic metal of cobalt or the like.

In detail, nickel particles can be used as the core particles, and gold having high conductivity can be plated on the surface of the core particles.

The surface of the core particles can be coated using methods such as electroless plating, electrolytic plating, sputtering, and deposition. However, the method is not limited to this.

When core particles coated with a conductive metal are used as the conductive particles 112a and 113a, the coating ratio of the conductive metal on the surface of the particles (ratio of the coated area of the conductive metal to the surface area of the core particles) is preferably used. The ground is at least 40%, preferably at least 45%, or in detail, preferably at least 47% to 95%, such that high conductivity is obtained.

The coating amount of the conductive metal may preferably be from 0.5% by weight to 50% by weight of the core particles, more preferably from 2% by weight to 30% by weight, still more preferably from 3% by weight to 25% by weight, or In other words, it is preferably from 4% by weight to 20% by weight. When the conductive metal to be coated is gold, the coating amount may preferably be from 0.5% by weight to 30% by weight, more preferably from 2% by weight to 20% by weight, or still more preferably from 3% by weight to 20% by weight of the core particles. Weight% to 15% by weight.

The conductive portion 111 includes the first conductive portion 112 and the second conductive portion 113 due to the electrode 122 of the sheet-like connector 120 which will be described below. The first conductive portion 112 is above the electrode 122, can contact the terminal 141 of the test target device 140, and includes the first conductive particles 112a. The second conductive portion 113 is under the electrode 122 and contains the second conductive particles 113a. Elastic insulation material and the first pass The conductive particles of the conductive portion 112 and the second conductive portion 113 may be formed of the same material. However, the density per unit area of the first conductive particles 112a of the first conductive portion 112 is greater than the density per unit area of the second conductive particles 113a of the second conductive portion 113. The average diameter of the first conductive particles 112a of the first conductive portion 112 may be smaller than the average diameter of the second conductive particles 113a of the second conductive portion 113. That is, the small particles may be densely arranged in the first conductive portion 112 above the electrode 122 to improve the test target device 140 when the terminal 141 of the test target device 140 above the electrode 122 contacts the first conductive portion 112. The electrical connection between the terminal 141 and the electrode 122.

The sheet-like connector 120 includes a porous sheet 121 and an electrode 122.

The porous sheet 121 is between the upper surface and the lower surface of the anisotropic conductive sheet 110. The porous sheet 121 is inserted into the anisotropic conductive sheet 110 and contains a plurality of voids. The void is filled with an elastic insulating material such that the porous sheet 121 is integrally coupled to the anisotropic conductive sheet 110. The porous sheet 121 can be formed by using a material such as a mesh fabric or a non-woven fabric. The woven or non-woven fabric may be formed with organic fibers. Examples of the organic fiber may include a fluororesin fiber such as polytetrafluoroethylene fiber, aramid fiber, polyethylene fiber, polyarylate fiber, nylon fiber. (nylon fiber), polyester fiber and the like. Further, the organic fiber may have a linear thermal expansion coefficient which is exactly or substantially the same as the linear thermal expansion coefficient of the material to which the target object is attached. For example, the linear thermal expansion coefficient of the material may be 30 x 10-6 to -5 x 10-6/K, in particular, 10 x 10-6 to -3 x 10-6/K. Then, it is possible to suppress thermal expansion of the anisotropic conductive film. Therefore, it is possible to stably maintain a good electrical connection state on the connection target object even when the temperature is changed When receiving a heat history. Also, the organic fibers may have a diameter of from 10 μm to 200 μm.

The electrode 122 is disposed at a position corresponding to the conductive portion 111 and integrally coupled to the porous sheet 121. The electrode 122 can be coupled to the porous sheet 121 by passing through the porous sheet 121 in the thickness direction. The electrode 122 is stably fixed to the porous sheet 121 by filling the void of the metal porous sheet 121 with a metal material. The electrode 122 is formed as a plate (circular plate) having a circular cross section corresponding to the conductive portion 111. The electrode 122 may be disposed between the upper surface and the lower surface of the conductive portion 111 and divide the conductive portion 111 into the first conductive portion 112 and the second conductive portion 113.

Electrode 122 can comprise a metal such as nickel, copper, gold, silver, palladium or iron. The electrode 122 can be formed entirely by using a single type of metal or an alloy of two or more types of metals. Alternatively, the electrode 122 may be formed by stacking two or more types of metals.

Also, the surface of the electrode 122 may be coated by a chemically stable and conductive metal such as gold, silver or palladium in order to prevent oxidation and reduce the contact resistance of the electrode 122.

The guide sheet 130 is disposed on the anisotropic conductive sheet 110. The guide sheet 130 may be formed by forming the through holes 131 at positions corresponding to each of the conductive portions 111 to guide the test target device 140 to contact the conductive portion 111.

The guide sheet 130 may comprise any flexible and moldable synthetic resin material, for example, a thermosetting resin such as a polyimide resin or an epoxy resin; such as polyethylene terephthalate a polyester resin of a polyethylene terephthalate resin or a polybutylene terephthalate resin; or a polyvinyl chloride resin, a polystyrene resin, or a polypropylene Nitrile resin (polyacrylnitrile resin), polyethylene resin, polypropylene resin, acrylic resin, polybutadiene resin, polyphenylene ether, polyphenylene sulfide A thermoplastic resin of polyphenylene sulfide, polyamide or polyoxymethylene.

The connection connector 100 can have the following effects.

First, when the conductive portion 111 is touching the pad 151 of the test device 150, the connection connector 100 is mounted on the test device 150. Next, the test target device 140 is lowered such that the terminal 141 of the test target device 140 contacts the conductive portion 111 of the connection connector 100. When the test target device 140 is further lowered and the conductive portion 111 for connection is pressed in the thickness direction, the conductive particles 112a and 113a of the conductive portion 111 are in contact with each other. Therefore, the conductive portion 111 becomes electrically conductive.

In this state, when the test device 150 applies an electrical signal, an electrical test is performed while transmitting a signal to the test target device 140 via the conductive portion 111 and the electrode 122.

In the connection connector 100 according to the exemplary embodiment, the durability of the anisotropic conductive sheet 110 can be improved because the sheet-like connector 120 is disposed inside the anisotropic conductive sheet 110. That is, since the sheet-like connector 120 formed of the mesh fabric or the non-woven fabric is disposed inside the anisotropic conductive sheet 110 formed of the ruthenium rubber, the durability of the anisotropic conductive sheet 110 can be improved.

In detail, the anisotropic conductive sheet 110 can be prevented by preventing the anisotropic conductive sheet 110 from excessively expanding in the plane direction perpendicular to the thickness direction. The conductive portion 111 is damaged.

Further, since the electrode 122 of the sheet-like connector 120 is buried inside the conductive portion 111, the electrode 122 does not directly contact the terminal 141 of the test target device 140, and therefore, the electrode 122 and the terminal 141 are prevented from being damaged. That is, although the surface of the terminal 141 or the electrode 122 may be damaged when the electrode 122 formed of a metal material and the terminal 141 are directly in contact with each other according to the present exemplary embodiment, the conductive portion which will be elastic and moldable The 111 is disposed above the electrode 122, so that the electrode 122 and the terminal 141 can be prevented from being damaged.

Also, due to frequent contact with the terminal 141 of the test target device 140, the conductive portion 111 above the electrode 122 may also be damaged. However, since the relatively stable sheet-like connector 120 is included, even when the upper portion of the conductive portion 111 is damaged, the electrode 122 can directly contact the terminal 141 of the test target device 140 and maintain the conductivity.

In the sheet-like connector according to the above exemplary embodiment, the first conductive particles in the first conductive portion are smaller than the second conductive particles in the second conductive portion, and are densely arranged than the second conductive particles The first conductive particle.

However, as in the connection connector 200 of FIG. 6, the first conductive particles 212a of the first conductive portion 212 and the second conductive particles 213a of the second conductive portion 213 may have the same size and density distribution. That is, when the sheet-like connector 220 is disposed in the anisotropic conductive sheet 210 and the first conductive portion 212 and the second conductive portion 213 are respectively located in the upper region and the lower region of the electrode, the first conductivity The first conductive particles 212a of the portion 212 and the second conductive particles 213a of the second conductive portion 213 may have the same size and density.

The exemplary embodiment of Figures 4 and 5 describes the position ratio of the tab connector An example in which the intermediate portion between the upper surface and the lower surface of the anisotropic conductive sheet is slightly higher. However, the exemplary embodiment is not limited thereto, and the sheet-like connector may be modified as illustrated in FIG.

For example, in the connection connector 300 of FIG. 7, the sheet-like connector 320 is located at an intermediate portion between the upper portion and the lower portion of the anisotropic conductive sheet 310.

Further, according to another exemplary embodiment, in the connection connector 400 of FIG. 8, the position of the sheet-like connector 420 may be higher or lower than the intermediate portion between the upper portion and the lower portion of the anisotropic conductive sheet 410. .

According to another exemplary embodiment, although not illustrated, the upper end of the conductive portion may protrude. That is, although the exemplary embodiments of FIGS. 4 and 5 illustrate that the upper end of the conductive portion is flush with the upper end of the insulating support portion, and the upper end of the conductive portion may protrude above the upper end of the insulating support portion.

It is understood that the exemplary embodiments described herein are considered in a descriptive sense only and not for the purpose of limitation. Descriptions of features or aspects within each exemplary embodiment are generally considered to be useful for other similar features or aspects in other exemplary embodiments.

Although one or more exemplary embodiments have been described with reference to the drawings, it will be understood by those skilled in the art that, without departing from the spirit and scope of the inventive concept as defined by the appended claims There are various changes in form and detail.

100‧‧‧Connecting connector

110‧‧‧ Anisotropic conductive sheets

111‧‧‧ Conductive part

112‧‧‧First conductive part

113‧‧‧Second conductive part

114‧‧‧Insulation

120‧‧‧Sheet connector

121‧‧‧Porous flakes

122‧‧‧ electrodes

130‧‧‧ Guide sheet

131‧‧‧through hole

140‧‧‧Test target device

141‧‧‧ terminals

150‧‧‧Testing device

151‧‧‧ cushion

Claims (12)

A connection connector disposed between the test target device and the test device and configured to electrically connect the terminal of the test target device with the pad of the test device, the connection connector comprising: anisotropic conduction a sheet comprising a plurality of conductive portions, wherein the plurality of conductive particles extend in a thickness direction at a region of the elastic insulating material, the region corresponding to the terminal of the test target device and configured in the An insulating support portion disposed between the conductive portions and configured to support and isolate the conductive portion; a sheet-like connector including a porous sheet disposed on an upper surface of the anisotropic conductive sheet Between the lower surfaces, inserted in the anisotropic conductive sheet and having a plurality of voids; and a plurality of electrodes corresponding to the conductive portion and integrally coupled to the porous sheet, wherein the electrodes Each of the layers is formed of a metallic material and electrically connected to each of the conductive portions. The connector of claim 1, wherein each of the electrodes is located between an upper surface and a lower surface of the conductive portion. The connection connector of claim 1, wherein each of the electrodes has a shape corresponding to a plate of a horizontal cross section of each of the conductive portions. The connection connector of claim 1, wherein each of the conductive portions includes: a first conductive portion disposed above the electrode to contact the test target The terminal of the device is composed of first conductive particles; and the second conductive portion is disposed under the electrode and composed of second conductive particles. The connection connector of claim 4, wherein a density per unit area of the first conductive particles of the first conductive portion is greater than the second conduction of the second conductive portion The density per unit area of a particle. The connection connector of claim 4, wherein an average diameter of the first conductive particles of the first conductive portion is smaller than that of the second conductive particles of the second conductive portion The average diameter. The connection connector of claim 1, wherein the position of the sheet-like connector is higher than an intermediate portion between the upper surface and the lower surface of the anisotropic conductive sheet. The connection connector of claim 1, wherein the sheet-like connector is located intermediate the upper surface and the lower surface of the anisotropic conductive sheet. The connection connector of claim 1, wherein a guide sheet is disposed on the upper surface of the anisotropic conductive sheet by corresponding to each of the conductive portions A through hole is formed at the position, and the guiding sheet guides the test target device to contact the conductive portion. The connector of claim 1, wherein the porous sheet comprises a mesh fabric or a non-woven fabric, and the void of the porous sheet is filled with the elastic insulating material. a connection connector disposed between the test target device and the test device and configured to electrically connect the terminal of the test target device with the a gasket of the test device, the connection connector comprising: an anisotropic conductive sheet comprising a plurality of conductive portions, wherein the plurality of conductive particles extend in a thickness direction at a region of the elastic insulating material, the region corresponding to The terminal of the test target device; a sheet-like connector comprising a porous sheet. The porous sheet is disposed between the upper surface and the lower surface of the anisotropic conductive sheet and inserted in the anisotropic conductive sheet; and a plurality of metal electrodes integrally coupled with the porous sheet and Disposed at a position corresponding to each of the conductive portions and buried in the conductive portion. The connection connector of claim 11, wherein the metal electrode comprises a magnetic material.