KR101672935B1

KR101672935B1 - Test socket

Info

Publication number: KR101672935B1
Application number: KR1020150099231A
Authority: KR
Inventors: 정영배
Original assignee: 주식회사 아이에스시
Priority date: 2015-07-13
Filing date: 2015-07-13
Publication date: 2016-11-04

Abstract

The present invention relates to a test socket, and more specifically to a test socket which is placed between a device to be tested and a testing device, and electrically connects a terminal of the device to be tested to a pad of the testing device. As a conducting unit placed on each location corresponding to a terminal of the device to be tested and shown a conductivity in a thickness direction, the conducting unit comprises: a conducting portion where multiple conductive particles within an elastic insulating material are arranged and placed in a thickness direction; and an insulating support which supports each of the conducting portions and insulates. The conductive particles comprise at least one first conductivity particle. The first conductivity particle is formed as a plate containing an upper surface, a lower surface, and a circumferential surface connecting edges of the upper surface to the lower surface. The first conductivity particle has a through-hole penetrating centers of the upper and the lower surfaces, and a first slit penetrating an inner circumferential surface of the through-hole and the circumferential surface. A concave groove which curves inwardly at a predetermined depth is formed on the upper surface. The elastic insulating material is filled in the through-hole, the first slit and the concave groove, and integrally connects the inside to the outside of the first conductivity particle.

Description

Test socket {Test socket}

The present invention relates to a test socket having conductive particles with through-holes formed therein, and more particularly, to a test socket having conductive particles capable of minimizing durability deterioration due to contact with a terminal of a device to be inspected frequently, will be.

In general, a test socket is used in an inspection process for determining whether a manufactured device to be inspected is defective or not. That is, the manufactured device to be inspected performs a predetermined electrical inspection to determine whether it is defective. At this time, the device to be inspected and the inspection device for inspection need not be in direct contact with each other, . The reason for this is that the inspection apparatus for inspection is relatively expensive, so that it is not easy to replace the apparatus when it is frequently worn or damaged due to contact with the device to be inspected, and the replacement cost is high. Accordingly, the test socket is replaceably mounted on the upper side of the inspection apparatus, and the inspection apparatus is electrically connected to the inspection apparatus by directly contacting the test socket, not the inspection apparatus. Therefore, an inspection signal output from the inspection apparatus is transmitted to the device under test through the test socket.

1 and 2, the test socket 10 is disposed between the device under test 50 and the inspecting device 40 and is disposed between the terminal 51 of the device under test 50 and the inspecting device 40. [ And electrically connecting the pads 41 of the insulating layer 40 to each other, and includes a conductive portion 20 and an insulating supporting portion 30. The conductive portions 20 are disposed at positions corresponding to the terminals of the device to be inspected and exhibit conductivity in the thickness direction, and a large number of conductive particles 21 are arranged in the thickness direction in the elastic insulating material.

The insulative support portion 30 supports and insulates the respective conductive portions 20. At this time, the pad 41 of the testing device 40 and the conductive part 20 are in contact with each other while the test socket 10 is mounted on the testing device 40, Can be brought into contact with the top of the conductive part (20) of the socket (10).

The inspected device 50 moved by an insert (not shown) is brought into contact with the conductive part 20 of the test socket 10 to be seated in the test socket 10, The electric signal is transmitted to the device under test 50 through the test socket 10, and a predetermined electrical inspection is performed.

The conductive part 20 of the test socket 10 is formed by arranging a plurality of conductive particles 21 in an insulating material. At this time, the terminal 51 of the device under test 50 is frequently connected to the conductive part 20. When the terminals 51 of the device under test 50 are frequently contacted with the conductive parts 20, the conductive particles 21 distributed in the insulating material can be easily released to the outside. Particularly, the conductive particles 21 are spherical, and the spherical conductive particles 21 are easily separated from the insulating material of the silicon rubber material. In the case where the conductive particles 21 are separated as described above, the conductive performance is deteriorated as a whole, and thus the reliability of the inspection as a whole is affected.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and it is an object of the present invention to provide a test socket in which conductive particles are firmly held in a conductive part.

According to another aspect of the present invention, there is provided a test socket for electrically connecting a terminal of a device to be inspected and a pad of an inspecting device to each other, the test socket being disposed between the device to be inspected and the inspecting device,

A conductive portion disposed at a position corresponding to a terminal of the device to be inspected and exhibiting conductivity in a thickness direction, wherein the conductive portion includes a conductive portion in which a plurality of conductive particles are arranged in a thickness direction in an elastic insulating material; And

And an insulating supporting portion for supporting and insulating each of the conductive portions,

Wherein the conductive particles comprise at least one first conductive particle,

The first conductive particles may have a thickness

Wherein the first conductive particle has a through hole penetrating the center of the upper surface and a center of the lower surface of the first conductive particle, and a through hole penetrating the center of the upper surface and the lower surface of the lower surface of the through hole, And a concave groove is formed in the upper surface of the first slit,

The elastic insulation material integrally connects the inner and outer portions of the first conductive particles while filling the through holes, the first slits, and the recessed grooves.

In the test socket,

The concave grooves may be connected from the inner circumferential surface of the through hole to the upper surface edge thereof, and a plurality of the concave grooves may be spaced from each other along the circumference of the through hole.

In the test socket,

The depth of the concave groove may be 1/10 to 1/4 of the distance between the upper surface and the lower surface.

In the test socket,

Further comprising an insulating sheet fixed in contact with an upper surface of the insulating support and having an insertion hole formed at a position corresponding to the conductive portion,

The conductive portion may be inserted into the insertion hole.

In the test socket,

Wherein the conductive particles further comprise spherical second conductive particles,

The first conductive particles may be disposed on the conductive portion.

In the test socket,

The first conductive particles may be provided in a conductive portion inserted in the insertion hole of the insulating sheet.

According to an aspect of the present invention, there is provided a test socket for electrically connecting terminals of a device to be inspected and pads of an inspecting device, the test socket being disposed between an inspecting device and an inspecting device,

Wherein the conductive particles comprise at least one second conductive particle,

The second conductive particles may be, for example,

And a side portion extending upward from the edge of the lower portion,

The elastic insulating material may be integrally connected to the inner and outer portions of the second conductive particles while filling the inner space formed by the side portions.

In the test socket,

When the side portion is cut in the horizontal direction, the cross section may be annular.

Wherein the conductive particles comprise at least one third conductive particle,

The third conductive particles may be formed of a metal,

And a central hole is formed at the center thereof,

The inner diameter of the central hole increases from the lower end to the upper end.

In the test socket,

The outer diameter of the third conductive particles can be reduced from the lower end to the upper end.

In the test socket,

The third conductive particle may be provided with a second slit passing through the inner circumferential surface and the side surface of the through hole.

In the test socket,

The conductive particles may further include spherical fourth conductive particles.

In the test socket,

The spherical conductive particles may be disposed under the conductive portion.

According to the test socket of the present invention, since the conductive particles disposed in the conductive portion can be held firmly in the conductive portion by making contact with the surrounding insulating material as wide as possible, There is an advantage that the conductive particles are not easily separated from the conductive portion.

1 shows a test socket according to the prior art;
2 is an operation diagram of Fig.
3 illustrates a test socket in accordance with an embodiment of the present invention.
Fig. 4 shows an example of conductive particles in the test socket of Fig. 3; Fig.
Fig. 5 is a plan view of Fig. 4; Fig.
6 is a cross-sectional view taken along the line VI-VI of FIG.
7 illustrates a test socket according to another embodiment of the present invention.
8 illustrates a test socket in accordance with another embodiment of the present invention.
9 shows a test socket according to another embodiment of the present invention.
10 illustrates a test socket in accordance with another embodiment of the present invention.
11 is a view showing another example of conductive particles in a test socket of the present invention.
12 is a cross-sectional view taken along the line XI-XI of Fig.
13 is a view showing another example of conductive particles in a test socket of the present invention.
14 is a cross-sectional view taken along the line XIV-XIV in Fig.

Hereinafter, a test socket according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

3, a test socket 10 according to the present invention is disposed between an inspected device 150 and an inspection device 160 and includes a terminal 151 of the device 150 to be inspected and an inspection device 160 The pad portion 161 is electrically connected to the conductive portion 110 and the insulating support portion 120.

A plurality of the conductive parts 110 are disposed at positions corresponding to the terminals 151 of the device under test 150. The conductive parts 110 are electrically conductive in a thickness direction and do not show conductivity in a plane direction perpendicular to the thickness direction will be. In the conductive part 110, a plurality of conductive particles 111 are arranged in the thickness direction in the elastic insulating material.

At this time, the elastic insulation material is preferably a polymer material having a crosslinked structure. As the curable polymeric substance-forming material that can be used to obtain such an elastic material, various materials can be used. Specific examples thereof include polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, acrylonitrile- Block copolymer rubbers such as styrene-butadiene-diene block copolymer rubber and styrene-isoprene block copolymer and hydrogenated products thereof, chloroprene rubber, urethane rubber, polyester Based rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, and ethylene-propylene-diene copolymer rubber.

In the above, when weatherability is required for the conductive part 110 to be obtained, it is preferable to use a material other than the conjugated diene rubber, and in particular, from the viewpoints of moldability and electrical characteristics, it is preferable to use silicone rubber.

As the silicone rubber, it is preferable that the liquid silicone rubber is crosslinked or condensed. The liquid silicone rubber preferably has a viscosity of 10 ⁵ poise or less at a strain rate of 10 ^-1 s, and may be any of condensation type, addition type, vinyl type, and hydroxyl type. Specific examples thereof include dimethyl silicone raw material, methyl vinyl silicone raw material and methylphenyl vinyl silicone raw material.

As the conductive particles 111, conductive particles 111 exhibiting magnetism are used. Specific examples of such conductive particles (111) include particles of metal having magnetic properties such as iron, cobalt, nickel, or alloys thereof, or particles containing these metals, or particles thereof as core particles, The surface of which is coated with a metal having a good conductivity such as gold, silver, palladium, or rhodium, or inorganic particles or polymer particles such as non-magnetic metal particles or glass beads as core particles, , Plated with a conductive magnetic metal such as cobalt, and the like.

Among them, it is preferable to use the nickel particles as the core particles and the surface of which is plated with gold having good conductivity.

At this time, as shown in FIGS. 4 to 6, the conductive particles 111 include at least one or more first conductive particles 112. (The conductive particles can be formed into various shapes, one of which is defined as the first conductive particles 112).

The first conductive particles 112 may have a top surface 112a, a bottom surface 112b, and a peripheral surface 112c (or side surface) connecting the edges of the top surface 112a and the bottom surface 112b. .

The plate-shaped first conductive particles 112 are formed with a through hole 112d passing through the center of the upper surface 112a and the center of the lower surface 112b. The plate-shaped first conductive particles 112 are provided with a first slit 112e passing through the inner circumferential surface of the through hole 112d and the circumferential surface 112c, (112a) is formed with a concave groove (112f) that is recessed at a predetermined depth. That is, the first conductive particles 112 have a shape in which a predetermined concave groove 112f is formed on the upper surface 112a in the form of a plate having a substantially C-shaped cross-section extending in the thickness direction.

The elastic insulation material may integrally connect the inner and outer portions of the first conductive particles 112 while filling the through holes 112d, the first slits 112e, and the recessed grooves 112f.

That is, the through holes 112d, the first slits 112e, and the concave grooves 112f of the first conductive particles 112 are filled with the elastic insulating material, and are integrally formed with the elastic insulating material around the first conductive particles 112 So that each of the conductive particles 111 is firmly coupled to the elastic insulating material. That is, the conductive particles 111 can be firmly disposed in the elastic insulating material as they are integrated with the elastic insulating material and have a wide contact area.

Specifically, the through-hole 112d and the first slit 112e are filled with an elastic insulating material to prevent the first conductive particles 112 from separating from the conductive portion 110. FIG. In addition, the concave groove 112f is filled with an elastic insulating material so that the first conductive particles 112 are prevented from rotating in the conductive portion 110. That is, the first conductive particles 112 are prevented from performing unnecessary rotation in the conductive portion 110, thereby minimizing the dislocation of the first conductive particles 112 or preventing deterioration of the conductive performance.

The concave groove 112f is connected from the inner circumferential surface of the through hole 112d to the edge of the upper surface 112a and a plurality of the concave grooves 112f may be disposed apart from each other along the through hole 112d. As the number of concave grooves 112f increases, the first conductive particles 112 do not rotate unnecessarily in the conductive portion 110 even when the terminals 151 of the device under test 150 are pressed, There is an advantage that the position can be maintained. At this time, the depth of the concave groove 112f is preferably approximately 1/10 to 1/4 of the distance (thickness) between the upper surface 112a and the lower surface 112b. If the concave groove 112f is too deep, the strength of the first conductive particles 112 as a whole becomes weak. If the concave groove 112f is too shallow, the concave groove 112f can not function properly.

The insulative support 120 insulates the conductive parts 110 from each other so that electricity does not flow between the conductive parts 110 when the conductive parts 110 are supported 112b, And may be made of the same material, specifically, silicone rubber may be used. Although it is possible that no conductive particles are present in the insulating supporting portion 120, it is possible that a small amount of conductive particles are distributed if electric conduction between the conductive portions 110 is prevented.

In this test socket of the present invention, the conductive particles can be manufactured by MEMS technology.

The test socket according to an embodiment of the present invention has the following operational effects.

First, after inserting the test socket into the inspecting apparatus 160, the inspecting device 150 is placed on the test socket. At this time, the conductive part 110 of the test socket 100 is placed in a state in which it is electrically conductive by being pressed by the terminal 151 of the device under test 150. At this time, the electric signal is transmitted to the terminal 151 of the device under test 150 through the conductive part 110 by applying a predetermined electrical signal from the testing device 160, Can be performed.

In the test socket of the present invention, the through holes 112d, the first slits 112e, and the concave grooves 112f are formed in the respective first conductive particles 112, and the through holes 112d, Since the concave groove 112f is filled with the elastic insulating material, the first conductive particles 112 can be firmly positioned in the conductive part 110 and the unnecessary rotation in the conductive part 110 is also prevented Position stability can be maximized.

Even when the terminals 151 of the inspected device 150 frequently contact the conductive parts 110, the first conductive particles 112 are less likely to be separated from the conductive parts 110. Since the first conductive particles 112 can be held in the conductive portion 110 as it is, the conductive property of the conductive portion 110 does not deteriorate even when the conductive particles 110 are used for a long period of time, .

The test socket according to an embodiment of the present invention may be modified as follows.

However, the present invention is not limited to this. For example, as shown in FIG. 7, the upper end of the conductive part 210 may be connected to the upper surface of the insulating supporting part 220 It is also possible to protrude from the top. At this time, the insulating sheet 230 is disposed on the upper surface of the insulating supporting portion 220. It is possible to fix the insulating sheet 230 having the insertion hole 231 at the position corresponding to the conductive portion 210 in contact with the upper surface of the insulating supporting portion 220. At this time, the conductive part 210 is inserted in the insertion hole 231.

The insulating sheet 230 may be made of a resin material such as a liquid crystal polymer, a polyimide resin, a polyester resin, a polyaramid resin or a polyamide resin, a glass fiber reinforced epoxy resin, a glass fiber reinforced polyester resin, Fiber reinforced resin materials such as glass fiber reinforced polyimide resin, and composite resin materials containing an inorganic material such as alumina, boron nitride and the like as a filler in an epoxy resin or the like can be used.

When using the test socket in a high temperature environment, as the insulating sheet 230, a coefficient of linear thermal expansion of 3 ㅧ 10 ^-5 / K or less is preferable to use that of, and more preferably 1 ^10-6 to 2 ㅧ ㅧ ^{10- 5} / K, particularly preferably 1 10 ^-6 to 6 10 ^-6 / K. By using such an insulating sheet, positional shift due to thermal expansion of the insulating sheet can be suppressed. The thickness of the insulating sheet is preferably 10 to 200 占 퐉, and more preferably 15 to 100 占 퐉. When the insulating sheet 230 is disposed on the upper surface of the insulating supporting portion 220, the foreign matter can be easily removed even if the foreign matter adhered to the terminal of the device under test is applied to the insulating sheet. Also, when the insulating sheet 230 having a small thermal expansion coefficient is used, the position of the conductive part 210 can be maintained.

In the embodiment of FIG. 7, only the first conductive particles are formed from the top to the bottom of the conductive part. However, the present invention is not limited thereto. In the test socket in which the insulating sheet is disposed as shown in FIG. 8, It is also possible that only the first conductive particles 312 are distributed on the upper portion of the conductive portion 310 and the spherical fourth conductive particles 313 are disposed on the lower portion of the conductive portion 310. Specifically, it is possible that the first conductive particles 312 are distributed on the upper side of the conductive part 310 inserted into the insulating sheet 330. Thus, when the first conductive particles 312 are disposed on the upper part and the spherical fourth conductive particles 313 are disposed on the lower part, the overall manufacturing cost can be reduced. Generally, the spherical conductive particles have a simple shape and thus have a low manufacturing cost. On the other hand, the manufacturing cost of the first conductive particles can be increased because of the complexity of the shape of the spherical conductive particles. In view of this point, it goes without saying that it is possible to arrange the first conductive particles on the upper side of the conductive portion where the conductive particles are frequently released.

Further, it is possible that the insulating sheet is removed in the embodiment of Fig. For example, in the embodiment of FIG. 9, the first conductive particles 412 are disposed on the conductive part 410 and the conductive part 410 is disposed on the conductive part 410 in such a manner that the upper end of the conductive part 410 protrudes from the upper end of the insulating supporting part 420 410 are arranged in the lower part of the first conductive particles 413.

10, the first conductive particles 512 are disposed on the conductive part 510 in the embodiment of FIG. 3 (the top and bottom surfaces are flat), and the spherical fourth conductive And the particles 513 are arranged.

11 and 12 show another form of the conductive particles. Specifically, an example of the second conductive particles 613 is disclosed. The second conductive particles 613 include a plate-like lower portion 613a and a side portion 613b extending upward from an edge of the lower portion 613a. The elastic insulating material is formed by the side portions 613b And the inner and outer portions of the second conductive particles 613 are integrally connected while filling the formed inner space. At this time, the cross section of the second conductive particles 613 when cut in the horizontal direction may be annular.

The second conductive particles 613 have a shape of a container so that the inner space inside the container is filled with an elastic insulating material so that the second conductive particles 613 can be firmly held in the conductive part.

The second conductive particles 613 may be used alone in the conductive portion, but the present invention is not limited thereto and may be used together with the first conductive particles or may be used together with the fourth conductive particles.

13 and 14 show another embodiment of the conductive particles. Specifically, an example of the third conductive particles 714 is disclosed. The third conductive particles 714 are formed in a ring shape having a central hole 714a at the center, and the inner diameter of the central hole 714a can be increased from the lower end to the upper end. The outer diameter of the third conductive particles 714 may be reduced from the lower end to the upper end. The third conductive particles 714 may be provided with a second slit 714b passing through the inner circumferential surface and the side surface of the through hole.

Specifically, the third conductive particles 714 may be configured so that the through holes and the second slits 714b are filled with an elastic insulating material, so that the third conductive particles 714 can not be easily separated from the conductive portions. In addition, since the upper end is sharp, it is possible to reliably contact the terminal of the device to be inspected when the terminal of the device to be inspected comes into contact with the terminal.

Although the third conductive particles 714 can be disposed in the conductive portion alone, it is also possible to use them together with the first conductive particles, the second conductive particles, and the fourth conductive particles.

Although the test socket of the present invention has been described above with reference to the various embodiments, it should be understood that the scope of the present invention is not limited thereto and any scope of reasonably construed from the scope of the present invention falls within the scope of the present invention.

100 ... ... . Test socket 110 ... conductive part
111 ... conductive particles 112 ... first conductive particles
112a ... upper surface 112b ... lower surface
112c ... circumferential surface 112d ... through hole
112e ... first slit 112f ... concave groove
120 ... insulative support

Claims

A test socket which is disposed between a device to be inspected and an inspection device and electrically connects the terminals of the device to be inspected and the pads of the inspection device to each other,
A conductive portion disposed at a position corresponding to a terminal of the device to be inspected and exhibiting conductivity in a thickness direction, wherein the conductive portion includes a conductive portion in which a plurality of conductive particles are arranged in a thickness direction in an elastic insulating material; And
And an insulating supporting portion for supporting and insulating each of the conductive portions,
Wherein the conductive particles comprise at least one first conductive particle,
The first conductive particles may have a thickness
Wherein the first conductive particle has a through hole penetrating the center of the upper surface and a center of the lower surface of the first conductive particle, and a through hole penetrating the center of the upper surface and the lower surface of the lower surface of the through hole, And a concave groove is formed in the upper surface of the first slit,
Wherein the elastic insulation material integrally connects the inner and outer portions of the first conductive particles while filling the through hole, the first slit, and the recessed groove.

The method according to claim 1,
Wherein the concave groove is connected from an inner circumferential surface of the through hole to a top surface edge thereof, and a plurality of the concave grooves are spaced from each other along the perimeter of the through hole.

3. The method of claim 2,
Wherein a depth of the concave groove is 1/10 to 1/4 of a distance between the upper surface and the lower surface.

The method according to claim 1,
Further comprising an insulating sheet fixed in contact with an upper surface of the insulating support and having an insertion hole formed at a position corresponding to the conductive portion,
And the conductive portion is inserted in the insertion hole.

The method according to claim 1,
Wherein the conductive particles further comprise spherical second conductive particles,
Wherein the first conductive particles are disposed on top of the conductive portion.

5. The method of claim 4,
Wherein the first conductive particles are provided in a conductive portion inserted in an insertion hole of the insulating sheet.

A test socket which is disposed between a device to be inspected and an inspection device and electrically connects the terminals of the device to be inspected and the pads of the inspection device to each other,
A conductive portion disposed at a position corresponding to a terminal of the device to be inspected and exhibiting conductivity in a thickness direction, wherein the conductive portion includes a conductive portion in which a plurality of conductive particles are arranged in a thickness direction in an elastic insulating material; And
And an insulating supporting portion for supporting and insulating each of the conductive portions,
Wherein the conductive particles comprise at least one second conductive particle,
The second conductive particles may be, for example,
And a side portion extending upward from the edge of the lower portion,
Wherein the elastic insulation material integrally connects the inner and outer portions of the second conductive particles while filling the inner space formed by the side portions.

8. The method of claim 7,
And the end portion is annular in cross section when cut in the horizontal direction.

A test socket which is disposed between a device to be inspected and an inspection device and electrically connects the terminals of the device to be inspected and the pads of the inspection device to each other,
A conductive part disposed at a position corresponding to a terminal of the device to be inspected and exhibiting conductivity in a thickness direction, wherein the conductive part includes a conductive part in which a plurality of conductive particles are arranged in a thickness direction in an elastic insulating material; And
And an insulating supporting portion for supporting and insulating each of the conductive portions,
Wherein the conductive particles comprise at least one third conductive particle,
The third conductive particles may be formed of a metal,
And a central hole is formed at the center thereof,
Wherein the central hole increases in diameter from the lower end to the upper end.

10. The method of claim 9,
And the outer diameter of the third conductive particle is reduced from the lower end toward the upper end.

10. The method of claim 9,
And the third conductive particle is provided with a second slit passing through the inner circumferential surface and the side surface of the central hole.

12. The method according to any one of claims 7 to 11,
Wherein the conductive particles further comprise spherical fourth conductive particles.

13. The method of claim 12,
And the spherical conductive particles are disposed under the conductive portion.