KR20220121458A - Connector for electrical connection - Google Patents

Abstract

According to one embodiment of the present disclosure, a connector for electrical connection includes: an insulation unit with electric insulation; a conductive unit with electric conductivity supported by the insulation unit and extended in a vertical direction; and a plurality of hollow particles inserted into at least one between the insulation unit and the conductive unit and forming a hollow inside.

Description

Connector for electrical connection

The present disclosure relates to a connector for electrical connection disposed between a device under test and test equipment.

In an inspection process for determining whether a device under test, such as a manufactured semiconductor device, is defective, a connector for electrical connection is disposed between the device under test and test equipment. An inspection method is known in which a connector for electrical connection electrically connects a device to be inspected and test equipment and operates the device to be inspected to determine whether the device to be inspected is defective.

The electrical connection connector may include an insulating part formed of an elastic material such as silicon, and a plurality of conductive parts extending in the vertical direction in the insulating part to allow electricity to flow in the vertical direction. The connector for electrical connection requires a stroke (a range in which it is operated while maintaining electrical contact) when the device under test presses the connector for electrical connection.

SUMMARY Embodiments of the present disclosure provide a connector for electrical connection capable of improving a stroke and reducing a contact pressure with a device under test.

When the foaming agent is used to form air bubbles in the insulating portion in order to increase the stroke of the connector for electrical connection, it is very difficult to manufacture the pore size as intended by the designer. For example, when the foaming agent is used to form bubbles in the insulating portion, it is very difficult to make the size of the bubbles uniform. Embodiments of the present disclosure solve the problem of using a foaming agent as described above.

Since the conventional connector for electrical connection is made of a material that does not compress well, there is a problem in that the force required to compress the conductive part in the vertical direction is large. One embodiment of the present disclosure solves this problem.

The present disclosure provides embodiments of a connector for electrical connection disposed between a device under test and a test equipment to electrically connect the device under test and the test equipment to each other in an up-down direction. A connector for electrical connection according to a representative embodiment includes an electrically insulating insulating portion; an electrically conductive conductive part supported by the insulating part and extending in a vertical direction; and a plurality of hollow particles which are inserted into at least one of the insulating part and the conductive part and form a hollow therein.

In an embodiment, the plurality of hollow particles may include insulating parts inserted into the insulating part. A boundary may be formed between the insulating part inserted particle and the insulating part.

In an embodiment, the plurality of hollow particles may include a plurality of insulating part inserted particles inserted into the insulating part. The electrical connection connector may be configured such that a density of the plurality of insulating parts inserted particles in the peripheral portion of the conductive portion is greater than that of the portion spaced apart from the conductive portion.

In an embodiment, the plurality of hollow particles may include a plurality of conductive part inserted particles inserted into the conductive part. The conductive part may include: an upper electrode part forming an upper end of the conductive part; and a conductive connection part extending downward from the upper electrode part. The electrical connection connector may be configured such that a density of the plurality of conductive parts inserted particles in the upper electrode part is greater than that of the conductive connection part.

In one embodiment, the hollow particles may form a plurality of hollows separated from each other therein.

In one embodiment, the plurality of hollow particles may form a group of hollow particles agglomerated with each other.

In an embodiment, the plurality of hollow particles may include open particles that surround a perimeter of the hollow and open a part of the perimeter of the hollow.

In one embodiment, the hollow particles may include a membrane surrounding the periphery of the hollow. The film may include an insulating material.

In one embodiment, the insulating material may include any one of rubber, polyethylene, PMMA, and acrylic.

In an embodiment, the plurality of hollow particles may include conductive parts inserted into the conductive part. The conductive part insertion particle may include a conductive material forming at least a portion of an outer surface of the conductive part insertion particle.

In an embodiment, the plurality of hollow particles may include conductive parts inserted into the conductive part. The conductive part insertion particle may include a magnetizable magnetic material.

In one embodiment, the conductive part insertion particle, which forms at least a portion of the outer surface of the conductive part insertion particle may include a conductive material different from the magnetic material. The outer surface of the conductive part insertion particle may be formed by (i) mixing plating of the magnetic material and the conductive material, or (ii) plating the conductive material on the surface on which the magnetic material is plated.

In an embodiment, the shape of the hollow particle may be any one of a spherical shape, an elliptical shape, a columnar shape, a polyhedral shape, and an irregular shape.

In an embodiment, the conductive part may be formed by mixing an elastic insulating material and a plurality of conductive particles.

In one embodiment, the shape of the conductive particles may be any one of a spherical shape, an elliptical shape, a columnar shape, a polyhedral shape, an irregular shape, and a fibrous shape.

In one embodiment, the insulating part may include a silicone rubber.

In one embodiment, pores may be formed in the silicone rubber by a foaming agent.

In an embodiment, the plurality of hollow particles may be inserted into only the conductive part among the insulating part and the conductive part.

According to the embodiments of the present disclosure, it is possible to improve the stroke when the device under test presses the connector for electrical connection and lower the contact pressure.

According to the embodiments of the present disclosure, by forming a hollow inside the connector for electrical connection through the hollow particles, it is easy to manufacture the pore size inside the connector for electrical connection as intended by the designer.

According to an embodiment of the present disclosure, when the density of the hollow particles in the peripheral portion of the conductive part is relatively large, so that the terminal of the device under test contacts the conductive part and compresses the conductive part in the vertical direction, the conductive part is deformed in the horizontal direction Since it can be compressed in the up-down direction while the device to be inspected, the force required to press the conductive part is reduced, and the stroke of the conductive part can be improved. In addition, through this, individual operability of each of the plurality of conductive parts may be improved.

1 is a partial cross-sectional view of a connector 1 for electrical connection according to a first embodiment of the present disclosure.
2 is a partial cross-sectional view of a connector 2 for electrical connection according to a second embodiment of the present disclosure.
FIG. 3 is a partial cross-sectional view showing an example of torsional deformation that may occur when pressure is applied to the connector 2 for electrical connection of FIG. 2 .
4 is a partial cross-sectional view of a connector 3 for electrical connection according to a third embodiment of the present disclosure.
5 is a partial cross-sectional view of a connector 4 for electrical connection according to a fourth embodiment of the present disclosure.
6 is a partial cross-sectional view showing a state when the terminal 210 of the device under test 200 is pressed in contact with the connector 4 for electrical connection of FIG. 5 .
7 is a cross-sectional view of a hollow particle 150' according to a fifth embodiment of the present disclosure.
8 is a perspective view of a hollow particle 150 ″ according to a sixth embodiment of the present disclosure.
9 is a perspective view of a hollow particle 150 ″″ according to a seventh embodiment of the present disclosure.
10 is a perspective view of a hollow particle 150 ″″ according to an eighth embodiment of the present disclosure.
11 is a cross-sectional view of a hollow particle group 150G according to a ninth embodiment of the present disclosure.
12 is a cross-sectional view of a hollow particle according to a tenth embodiment of the present disclosure.
13 is a cross-sectional view of a hollow particle group 150G' according to an eleventh embodiment of the present disclosure.

Embodiments of the present disclosure are exemplified for the purpose of explaining the technical spirit of the present disclosure. The scope of the rights according to the present disclosure is not limited to the embodiments presented below or specific descriptions of these embodiments.

All technical and scientific terms used in this disclosure, unless otherwise defined, have the meanings commonly understood by one of ordinary skill in the art to which this disclosure belongs. All terms used in the present disclosure are selected for the purpose of more clearly describing the present disclosure and not to limit the scope of the present disclosure.

As used in this disclosure, expressions such as "comprising", "including", "having", etc. are open-ended terms connoting the possibility of including other embodiments, unless otherwise stated in the phrase or sentence in which the expression is included. (open-ended terms).

Expressions in the singular described in this disclosure may include the meaning of the plural unless otherwise stated, and the same applies to expressions in the singular in the claims.

Expressions such as “first” and “second” used in the present disclosure are used to distinguish a plurality of components from each other, and do not limit the order or importance of the corresponding components.

Direction indicators such as "up" and "up" used in the present disclosure mean the direction in which the connector for electrical connection is positioned with respect to the test equipment, and direction indicators such as "down" and "down" indicate the opposite direction of the upward direction. it means. In addition, the "horizontal direction" used in the present disclosure means a direction perpendicular to the vertical direction. This is a standard for explaining so that the present disclosure can be clearly understood to the last, and it goes without saying that the upper side and the lower side may be defined differently depending on where the standard is placed. 1 shows an upper direction (U), a lower direction (D) and a horizontal direction (H).

With reference to examples shown in the accompanying drawings, embodiments are described. In the accompanying drawings, identical or corresponding components are assigned the same reference numerals. In addition, in the description of the embodiments below, overlapping description of the same or corresponding components may be omitted. However, even if description regarding components is omitted, it is not intended that such components are not included in any embodiment.

1 is a partial cross-sectional view of a connector 1 for electrical connection according to a first embodiment of the present disclosure. Referring to FIG. 1 , the device under test 200 may be a semiconductor device or the like. The device under test 200 includes a plurality of terminals 210 . The plurality of terminals 210 are disposed on the lower surface of the device under test 200 . When testing the device 200 to be inspected, the plurality of terminals 210 may contact the upper surface of the connector 1 for electrical connection.

The test equipment 300 includes a plurality of terminals 310 . The plurality of terminals 310 correspond to the plurality of terminals 210 . The plurality of terminals 310 are disposed on the upper surface of the test equipment 300 .

In this embodiment, each of the plurality of terminals 310 is disposed at a position facing each of the plurality of terminals 210 in the vertical direction. Although not shown, in another embodiment in which the plurality of conductive parts 130 are inclined with respect to the vertical direction, each of the plurality of terminals 310 connects each of the plurality of terminals 210 to the plurality of conductive parts 130 . It may be disposed at a position facing in an inclined direction.

When testing the device 200 to be tested, the plurality of terminals 310 of the test equipment 300 may contact the lower surface of the conductive part 130 of the connector 1 for electrical connection. The electrical connection connector 1 may be disposed between the device under test 200 and the test equipment 300 to electrically connect the device under test 200 and the test equipment 300 to each other in the vertical direction. The electrical connection connector 1 includes an electrically insulating insulating portion 110 . The electrical connection connector 1 includes an electrically conductive conductive portion 130 extending in the vertical direction. The insulating part 110 may support the conductive part 130 . The conductive part 130 may extend in the vertical direction within the insulating part 110 so that upper and lower ends of the conductive part 130 are exposed to the outside of the insulating part 110 .

The electrical connection connector 1 may include a plurality of conductive parts 130 . The plurality of conductive parts 130 may be arranged to be spaced apart from each other in the horizontal direction H. Although FIG. 1 shows a state in which three conductive parts 130 are arranged on a cross-section, the arrangement distance or number of the conductive parts 130 is not limited thereto.

The conductive part 130 may extend in the vertical direction. The conductive part 130 may extend in the vertical direction within the insulating part 110 to enable electricity to flow in the vertical direction. The conductive part 130 may extend in the vertical direction and a side surface thereof may be surrounded by the insulating part 110 .

Both ends of the conductive part 130 in the vertical direction may be exposed on the surface of the insulating part 110 in the vertical direction. The conductive part 130 may include an upper electrode part 131 exposed on the upper surface of the insulating part 110 and a lower electrode part 132 exposed on the lower surface of the insulating part 110 . The conductive part 130 may include a conductive connection part 133 that connects the upper electrode part 131 and the lower electrode part 132 and extends in the vertical direction. The upper electrode part 131 is configured to be contactable to the terminal 210 of the device under test 200 , and the lower electrode part 132 is configured to be contactable to the terminal 310 of the test equipment 300 .

The conductive part 130 is formed of a conductive material. One conductive part 130 extending vertically may include a plurality of conductive particles. Here, of course, the conductive part 130 may include other components in addition to the plurality of conductive particles. The conductive part 130 may be configured to be flexible.

In an embodiment, the conductive part 130 may be formed by mixing an elastic insulating material having elasticity and a plurality of conductive particles having conductivity. For example, the elastic insulating material may be silicone rubber, rubber, plastic, urethane, or the like. For example, the shape of the conductive particles may be any one of a spherical shape, an elliptical shape, a columnar shape, a polyhedral shape, an irregular shape, and a fibrous shape. Here, reference may be made to FIGS. 8 to 10 , which are examples of shapes of hollow particles 150 to be described later as examples of ellipsoidal, polyhedral, and amorphous shapes. In addition, the conductive particles may be, for example, metal particles, carbon fibers, graphene, carbon nanowires, carbon nanotubes, and the like. The fibrous conductive particles may be formed of, for example, carbon fibers, graphene, carbon nanowires, or carbon nanotubes.

In another embodiment, the conductive part 130 may include a conductive elastic polymer material. For example, the conductive elastic polymer material may be poly(3,4-ethylenedioxythiophene) (PEDOT) or the like.

As an example of a manufacturing method, after mixing a conductive material (eg, the conductive particles, elastic polymer material) and an elastic insulating material in an uncured state (liquid phase), a magnetic field is generated in a vertical direction at a specific location, and the conductive material It may be aligned in the vertical direction at the specific position. In this state, as the liquid elastic insulating material is cured, the conductive part 130 may be disposed on the insulating part 110 .

As another example of the manufacturing method, the specific position may form a hole through the sheet-shaped elastic insulating material in the vertical direction after curing the elastic insulating material to form a sheet shape. The hole may be formed using a laser. Thereafter, the conductive material (eg, the conductive particles and the elastic polymer material) and the non-cured (liquid) elastic insulating material are injected into the hole and then cured to form the conductive part 130 .

The insulating part 110 has a thickness in the vertical direction. The insulating part 110 may be formed in a sheet shape. The insulating part may be formed of an elastically deformable insulating material. For example, the insulating part may be made of an elastic polymer material.

The insulating part 110 is formed of an electrically insulating material. The insulating part 110 may include an insulating elastic part 111 formed of an elastically deformable insulating material. The insulating elastic part 111 may be made of an insulating elastic polymer material.

The elastic polymer material may be a polymer material having a cross-linked structure. Examples of the curable polymeric material-forming material that can be used to obtain the crosslinked polymeric material include conjugated diene-based materials such as polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, and acrylonitrile-butadiene copolymer rubber. Rubber and its hydrogenated substances, styrene-butadiene-diene block copolymer rubber, block copolymer rubber such as styrene-isoprene block copolymer, and hydrogenated substances thereof, chloroprene, urethane rubber, polyester rubber, epicrolehydrin rubber , silicone rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, and the like.

For example, the insulating part 110 may include silicone rubber. The silicone rubber may have pores formed by a foaming agent. The insulating elastic part 111 may be formed of silicone rubber.

For example, the silicone rubber may be a polysiloxane material. The silicone rubber may be a liquid silicone rubber (LSR).

The insulating part 110 may further include an upper cover part 113 disposed on the upper surface of the insulating elastic part 111 (refer to FIG. 5 ). The upper cover part 113 may be attached to the upper surface of the insulating elastic part 111 . The upper cover part 113 may be formed of a material different from that of the insulating elastic part 111 . For example, the upper cover part 113 may be an insulating film. The upper end of the upper electrode part 131 is exposed on the upper surface of the upper cover part 113 . The upper cover part 113 may support the circumference of the upper electrode part 131 .

The insulating part 110 may further include a lower cover part (not shown) disposed on a lower surface of the insulating elastic part 111 . The lower cover part may be attached to the lower surface of the insulating elastic part 111 . The lower cover part may be formed of a material different from that of the insulating elastic part 111 . For example, the lower cover part may be an insulating film (film). The lower end of the conductive part 130 is exposed on the lower surface of the lower cover part. The lower cover part may support the circumference of the lower part of the lower electrode part 132 .

The electrical connection connector 1 may include a frame (not shown) disposed around the insulating elastic part 111 . For example, the frame may be a stainless steel (SUS) plate. The lower cover part may be attached to the lower side of the frame and the insulating elastic part 111 .

The connector 1 for electrical connection includes a plurality of hollow particles 150 forming a hollow 152 therein. The plurality of hollow particles 150 are inserted into at least one of the insulating part 110 and the conductive part 130 . Through this, the stroke when the device under test 200 presses the connector 1 for electrical connection can be improved and the contact pressure can be lowered. The plurality of hollow particles 150 may be configured to have a uniform size.

The plurality of hollow particles 150 may include insulating part inserted particles 150a inserted into the insulating part 110 . The plurality of hollow particles may include the conductive part inserted particle 150b inserted into the conductive part. In the first embodiment, the plurality of hollow particles 150 includes the insulating part inserted particle 150a and the conductive part inserted particle 150b, but the plurality of hollow particles 150 includes the insulating part inserted particle 150a and Any one of the conductive part insertion particles 150b may be included.

The hollow particle 150 includes a membrane 151 surrounding the perimeter of the hollow 152 . The film 151 may include an insulating material. The insulating material of the film 151 may be any one of rubber, polyethylene, polymethyl methacrylate (PMMA), and acrylic. For example, the film 151 may include a rubber or silicon material.

A boundary may be formed between the insulating part inserted particle 150a and the insulating part 110 . The boundary may be formed on the outer surface of the film 151 of the insulating part inserted particle 150a. For example, the boundary may be formed by forming the insulating part inserted particles 150a and the insulating part 110 of different materials. As another example, the boundary may be insulated from the insulating part inserted particle 150a during the process of the insulating elastic part 111 hardening after the insulating part inserted particle 150a is inserted into the liquid insulating elastic part 111 during the manufacturing process. It may be formed by not being completely integrated between the elastic parts 111 . On the other hand, when a foaming agent is used to form a connector for electrical connection, there is no configuration corresponding to the membrane 51, so that the boundary is not formed.

The conductive part inserted particle 150b may include a conductive material that forms at least a portion of the outer surface of the conductive part inserted particle 150b. Through this, the conductive part inserted particle 150b may also have a conduction function in the conductive part 130 . For example, the outer surface of the conductive part insertion particle 150b may be formed by plating a conductive material.

The conductive part insertion particle 150b may include a magnetizable magnetic material. Through this, by using a magnetic field, the conductive part inserted particles 150b together with the plurality of magnetizable conductive particles of the conductive part 130 may be vertically arranged at a predetermined position in the vertical direction.

The conductive part inserted particle 150b may include a magnetizable magnetic material and a conductive material that forms at least a portion of an outer surface of the conductive part inserted particle 150b. The conductive material may be different from the magnetic material. For example, the outer surface of the conductive insert particle 150b may be formed by mixing the magnetic material and the conductive material with plating. As another example, the conductive insert particles 150b may be formed by plating the conductive material on the surface on which the magnetic material is plated.

2 is a partial cross-sectional view of a connector 2 for electrical connection according to a second embodiment of the present disclosure. Referring to FIG. 2 , unlike the connector 1 for electrical connection according to the first embodiment described above, the connector 2 for electrical connection according to the second embodiment includes an insulating part insert particle 150a, but a conductive part Insertion particle 150b is not included. In the second embodiment compared to the first embodiment, the conductivity is further improved by increasing the density of the conductive particles of the conductive part 130 , but the degree of improvement in stroke and the degree of lowering of the contact pressure are reduced.

As in the second embodiment, as the number of the insulating part inserted particles 150a increases, the torsional deformation (shear deformation) of the electrical connection connector 2 when the device under test 200 presses the electrical connection connector 1 . This may be more likely to occur. FIG. 3 is a partial cross-sectional view showing an example of torsional deformation that may occur when pressure is applied to the connector 2 for electrical connection of FIG. 2 .

In order to reduce the possibility of occurrence of torsional deformation as described above, a portion having a relatively low density of the plurality of insulating part inserted particles 150a inserted into the insulating part 110 may be formed. 4 is a partial cross-sectional view of a connector 3 for electrical connection according to a third embodiment of the present disclosure. Referring to FIG. 4 , the connector for electrical connection 3 has a larger density of the plurality of insulating parts inserted particles 150b in the peripheral portion of the conductive portion 130 than in the portion spaced apart from the conductive portion 130 . can be configured. In the peripheral portion of the conductive part 130 of the connector 3 for electrical connection, the density of the plurality of insulating part inserted particles 150b is relatively high, so that when the conductive part 130 is compressed up and down, it moves in a horizontal direction. It is easy to change, so that it is possible to improve the above-mentioned stroke and lower the contact pressure. At the same time, in the portion spaced apart from the conductive part 130 of the connector 3 for electrical connection, the density of the plurality of insulating parts inserted particles 150b is relatively low, so that the above-described excessive torsion is relatively large because the rigidity is relatively large. The possibility of occurrence of deformation can be reduced, and the lifespan of the connector for electrical connection can be improved.

5 is a partial cross-sectional view of a connector 4 for electrical connection according to a fourth embodiment of the present disclosure. 6 is a partial cross-sectional view showing a state when the terminal 210 of the device under test 200 is pressed in contact with the connector 4 for electrical connection of FIG. 5 . 5 and 6, unlike the connector 1 for electrical connection according to the first embodiment described above, the connector for electrical connection 4 according to the fourth embodiment includes the conductive part insertion particle 150b. However, it does not include the insulating part insert particle (150a).

5 and 6 , the conductive part 130 may include an upper electrode part 131 forming an upper end of the conductive part 130 . The conductive part 130 may include a conductive connection part 133 extending downward from the upper electrode part 131 . The conductive part 130 may include a lower electrode part 132 forming a lower end of the conductive part 130 . The conductive connection part 133 connects the upper electrode part 131 and the lower electrode part 132 to each other.

The electrical connection connector 4 may be configured such that the density of the plurality of conductive part insertion particles 150b in the upper electrode part 131 is greater than that of the conductive connection part 133 . Through this, by reducing the modulus of elasticity of the upper electrode part 131 , the upper electrode part has a shape surrounding the terminal 210 when the upper electrode part 131 is pressed downward by the terminal 210 of the device under test 200 . (131) can be easily deformed. Accordingly, the contact area between the terminal 210 and the upper electrode part 131 may increase and contact resistance may decrease.

In another embodiment not shown, the electrical connection connector may be configured such that the density of the plurality of conductive part insertion particles 150b in the lower electrode part 132 is greater than that of the conductive connection part 133 . Through this, by reducing the elastic modulus of the lower electrode part 132 , the lower electrode part has a shape surrounding the terminal 310 when the lower electrode part 132 is pressed upward by the terminal 310 of the test equipment 300 . (132) can be easily deformed.

7 is a cross-sectional view of a hollow particle 150' according to a fifth embodiment of the present disclosure. Referring to FIG. 7 , the hollow particle 150 ′ may form a plurality of hollow 152 separated from each other therein. For example, the hollow particle 150' may form three hollows 152a, 152b, and 152c separated from each other. The hollow particle 150 ′ may include a partition 153 that separates and partitions the plurality of hollows 152 from each other. The partition 153 may be fixed to the inner surface of the membrane 151 .

8 is a perspective view of a hollow particle 150 ″ according to a sixth embodiment of the present disclosure. 9 is a perspective view of a hollow particle 150 ″″ according to a seventh embodiment of the present disclosure. 10 is a perspective view of a hollow particle 150 ″″ according to an eighth embodiment of the present disclosure.

8 to 10 , the hollow particle may have any one of a spherical shape, an elliptical shape, a columnar shape, a polyhedral shape, and an irregular shape. As in the above-described embodiment, the hollow particles 150 and 150' may be spherical. Referring to FIG. 8 , the hollow particle 150 ″ according to the sixth embodiment may have an elliptical shape. The hollow particles may have a polyhedral shape such as a hexahedral shape (refer to FIG. 9 ) or a tetrahedral shape. Referring to FIG. 10 , the hollow particles 150 ″″ according to the eighth embodiment may be amorphous.

11 is a cross-sectional view of a hollow particle group 150G according to a ninth embodiment of the present disclosure. Referring to FIG. 11 , in the ninth embodiment, a plurality of hollow particles 150 may form a group of hollow particles 150G aggregated with each other. The hollow particle group 150G may be composed of a plurality of hollow particles 150 attached to each other.

12 is a cross-sectional view of a hollow particle according to a tenth embodiment of the present disclosure. 12, the plurality of hollow particles of the connector for electrical connection 10, the open-type particles (150P, 150P') that surround the perimeter of the hollow 152 doedoe opening a part of the perimeter of the hollow 152 (150P, 150P') may include When the closed particle in which the hollow 152 is closed by the membrane 151 is pressed, the volume of the hollow 152 decreases, thereby increasing the internal pressure and generating a repulsive force. The open particles 150P and 150P' are hollow when pressed. (152) Part of the air inside the open particles (150P, 150P') to escape to the outside, it is possible to reduce the width of the increase in the internal pressure and reduce the repulsive force. Accordingly, through the tenth embodiment, the stroke may be further improved and the contact pressure with the device 200 to be inspected may be further lowered.

The open particles 150P and 150P' include the film 151 in which the hole 151a is formed. The hole 151a is connected to the hollow 152 inside the membrane 151 . The open particles may have various shapes, such as a spherical shape, an elliptical shape, a columnar shape, a polyhedral shape, an amorphous shape, and a fibrous shape. 12 shows, for example, a spherical open particle 150P and an amorphous open particle 150P'.

13 is a cross-sectional view of a hollow particle group 150G' according to an eleventh embodiment of the present disclosure. Referring to FIG. 13 , in the eleventh embodiment, the plurality of hollow particles may include closed particles 150Q in which the hollow 152 is closed by a membrane 151 and open particles 150P. The plurality of hollow particles may form a hollow particle group 150G' in which the closed particles 150Q and the open particles 150P are aggregated. The hollow particle group 150G' may include closed particles 150Q and open particles 150P attached to each other.

Although the technical spirit of the present disclosure has been described above by way of some embodiments and examples shown in the accompanying drawings, it does not depart from the technical spirit and scope of the present disclosure that can be understood by those of ordinary skill in the art to which the present disclosure belongs. It should be understood that various substitutions, modifications, and alterations within the scope may be made. Further, such substitutions, modifications, and alterations are intended to fall within the scope of the appended claims.

200: device under test, 210: terminal of device under test, 300: test equipment, 310: terminal of test equipment, 1, 2, 3, 4, 10: connector for electrical connection, 110: insulation, 111: insulation elasticity Part, 113: upper cover part, 130: conductive part, 131: upper electrode part, 132: lower electrode part, 133: conductive connection part, 150, 150', 150'', 150''', 150'''': Hollow Particles, 150a: Insulation Insertion Particles, 150b Conductive Part Insertion Particles, 150G, 150G': Hollow Particle Group, 150P, 150P': Open Particles, 150Q: Closed Particles, 151: Membrane, 151a: Holes, 152 , 152a, 152b, 152c: hollow, 153: partition

Claims (18)

It is a connector for electrical connection disposed between the device under test and the test equipment to electrically connect the device under test and the test equipment to each other in the vertical direction,
an electrically insulating insulating part;
an electrically conductive conductive part supported by the insulating part and extending in a vertical direction; and
Inserted into at least one of the insulating portion and the conductive portion, comprising a plurality of hollow particles forming a hollow therein,
Connector for electrical connection. According to claim 1,
The plurality of hollow particles includes an insulating part inserted particle inserted into the insulating part,
A boundary is formed between the insulating part inserted particle and the insulating part,
Connector for electrical connection. According to claim 1,
The plurality of hollow particles includes a plurality of insulating part inserted particles inserted into the insulating part,
Compared to the portion spaced apart from the conductive portion, in the peripheral portion of the conductive portion is configured such that the density of the plurality of insulating portion inserted particles is large,
Connector for electrical connection. According to claim 1,
The plurality of hollow particles, including a plurality of conductive part inserted particles inserted into the conductive part,
The conductive part,
an upper electrode part forming an upper end of the conductive part; and
and a conductive connection part extending downward from the upper electrode part;
Compared to the conductive connection part, the upper electrode part is configured so that the density of the plurality of conductive part insertion particles is large,
Connector for electrical connection. According to claim 1,
The hollow particles form a plurality of hollows separated from each other therein,
Connector for electrical connection. According to claim 1,
The plurality of hollow particles form a group of hollow particles agglomerated with each other,
Connector for electrical connection. The method of claim 1,
The plurality of hollow particles, surrounding the perimeter of the hollow, comprising an open particle that opens a part of the perimeter of the hollow,
Connector for electrical connection. According to claim 1,
The hollow particles include a membrane surrounding the periphery of the hollow,
wherein the film comprises an insulating material;
Connector for electrical connection. 9. The method of claim 8,
The insulating material includes any one of rubber, polyethylene, PMMA, and acrylic,
Connector for electrical connection. According to claim 1,
The plurality of hollow particles, including the conductive part inserted particles inserted into the conductive part,
The conductive part insertion particle comprises a conductive material forming at least a part of the outer surface of the conductive part insertion particle,
Connector for electrical connection. According to claim 1,
The plurality of hollow particles, including the conductive part inserted particles inserted into the conductive part,
The conductive part insertion particle comprises a magnetizable magnetic material,
Connector for electrical connection. 12. The method of claim 11,
The conductive part insertion particle forms at least a part of the outer surface of the conductive part insertion particle and includes a conductive material different from the magnetic material,
The outer surface of the conductive part insertion particle is formed by (i) mixing and plating the magnetic material and the conductive material, or (ii) forming the conductive material on the surface on which the magnetic material is plated.
Connector for electrical connection. According to claim 1,
The shape of the hollow particles is any one of spherical, elliptical, columnar, polyhedral and amorphous,
Connector for electrical connection. According to claim 1,
The conductive part is formed by mixing an elastic insulating material and a plurality of conductive particles,
Connector for electrical connection. 15. The method of claim 14,
The shape of the conductive particles is any one of a spherical, elliptical, columnar, polyhedral, amorphous and fibrous shape,
Connector for electrical connection. According to claim 1,
The insulating part comprises a silicone rubber,
Connector for electrical connection. 17. The method of claim 16,
The silicone rubber has pores formed by a foaming agent,
Connector for electrical connection. According to claim 1,
The plurality of hollow particles are inserted into only the conductive part among the insulating part and the conductive part,
Connector for electrical connection.

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