TWI641838B - Bifurcated probe apparatus - Google Patents

Abstract

The present invention provides a two-part type probe device, comprising: a tube body formed in a hollow cylindrical shape, open at both ends to have a first opening portion and a second opening portion; an intermediate member, Slidably disposed along an inner circumferential surface of the tubular body; a first plunger, a portion of which protrudes from the first opening portion along a length direction of the tubular body; a second plunger, a portion of which is along the tube a longitudinal direction of the body protruding from the second opening; a first elastic member disposed between the first plunger and the intermediate member to elastically support the first plunger and the intermediate member; and a second elastic member And disposed between the second plunger and the intermediate member to elastically support the second plunger and the intermediate member.

Description

Two-part probe device

The present invention relates to a two-part type probe device, and more particularly to a two-part type probe device capable of improving test reliability by achieving a smooth electrical connection.

Recently, in a test apparatus for a wafer for a semiconductor package or an integrated circuit, a test including a plurality of contact probes is used between a connection terminal of a semiconductor package or a wafer for testing and a connection terminal on a test circuit substrate side. The device or the test socket, in particular, uses a two-end slide type probe as the contact probe, and the both-end slide type probe is capable of imparting a desired contact pressure and absorbing an impact of a contact position by providing an elastic member between the contact portions at both ends.

As an example, the above-described two-end slide type probe is known to have a head portion slidably supported in a plunger body and to have a compression coil spring interposed between the plunger head portion and the inner peripheral surface of the tube body. between.

However, in the conventional two-end sliding probe, the plunger and the tube body as the electrical contact members should be arranged on the same straight line as the tube body to achieve a smooth electrical connection, but the electrical signal portion transmitted from the plunger is transmitted to the portion. Compressing the coil spring, or generating a large impedance component in the process of passing the electrical signal transmitted to the tube via the plunger through a distance corresponding to the length of the shaft of the tube body, resulting in loss and distortion of the electrical signal, thereby making the reliability of the test reduce.

Prior art literature Patent literature

(Patent Document 1) Japanese Laid-Open Patent Publication No. 2000-346872 (Publication Date: 2000.12.15).

Accordingly, it is an object of the present invention to provide a two-part type probe device capable of improving test reliability.

The object of the present invention is not limited to the above-described technical problems, and those skilled in the art can clearly understand the unmentioned or other objects by the following description.

In order to achieve the above object, a two-part probe device according to an embodiment of the present invention may include: a tube body formed in a hollow cylindrical shape, open at both ends to have a first opening portion and a second opening portion An intermediate member slidably disposed along an inner circumferential surface of the tubular body; a first plunger, a portion of which protrudes from the first opening portion along a length direction of the tubular body; a second plunger a portion protruding from the second opening portion along a length direction of the tubular body; a first elastic member disposed between the first plunger and the intermediate member to elastically support the first plunger and the intermediate member; A second elastic member is disposed between the second plunger and the intermediate member to elastically support the second plunger and the intermediate member.

The first plunger may be formed with a tapered support portion on the opposite side from the first elastic member, and the opposite side may be formed with a first contact portion in contact with the terminal of the semiconductor package.

The second plunger may be formed with a tapered support portion on the opposite side from the second elastic member, and the opposite side may be formed with a second contact portion in contact with the contact pad on the test board.

The first elastic member and the second elastic member may be coil springs.

The first elastic member and the second elastic member may have the same coil pitch.

The outer diameters of the first elastic member and the second elastic member may be formed to be smaller than an inner diameter of the tubular body, and an insulating member may be formed on surfaces of the first elastic member and the second elastic member.

The first elastic member and the second elastic member may each include an elastic rubber.

The first opening portion and the second opening portion of the tubular body may be formed with a sealing portion that is curved in close contact with the outer peripheral surfaces of the first plunger and the second plunger.

An outer diameter of a portion of the first plunger and the second plunger located inside the tubular body may be formed to be larger than an inner diameter of the sealing portion.

An annular groove can be formed in the circumferential direction of the outer peripheral surface of the portion of the first plunger located inside the pipe body, and a hooking protrusion can be formed on the pipe body, and the hooking protrusion faces the hanging groove The radially inner side protrudes and is inserted into the hooking groove.

The hooking projection can be formed by a rolling riveting process.

The intermediate component can be implemented as a conductive component.

According to an embodiment of the present invention, at least the following effects are obtained:

That is, the two-part type probe device according to the embodiment of the present invention can realize a stable transmission path so that high-frequency electric signals can be transmitted without distortion, and impedance on the transmission path can be minimized.

The effects according to the present invention are not limited to the contents of the above examples, and various effects are included in the present specification.

10‧‧‧Semiconductor package

11‧‧‧ Terminal

20‧‧‧ test board

21‧‧‧Contact pads

100‧‧‧ tube body

100a, 100b‧‧‧ Sealing Department

101‧‧‧ first opening

102‧‧‧second opening

200‧‧‧Intermediate parts

201, 202‧‧‧ elastic support

210‧‧‧First plunger

220‧‧‧Second plunger

210a‧‧‧First elastic support

220a‧‧‧Second elastic support

210b, 220b‧‧‧The Great Trails Department

210c, 220c‧‧‧ Small Trails Department

210d‧‧‧First contact

220d‧‧‧Second contact

230‧‧‧First plunger

240‧‧‧Second plunger

230d, 240d‧‧‧Contacts

250‧‧‧ third plunger

250g‧‧‧hook slot

260‧‧‧fourth plunger

250d, 260d‧‧‧Contacts

310‧‧‧First elastic member

320‧‧‧Second elastic member

400‧‧‧Intermediate parts

410‧‧‧First elastic rubber

420‧‧‧Second elastic rubber

510, 520‧‧‧elastic rubber

Fig. 1 is a cross-sectional view showing a two-part probe device according to a first embodiment of the present invention.

[Fig. 2] - [Fig. 4] show the operation of the two-part type probe device according to an embodiment of the present invention.

Fig. 5 is a cross-sectional view showing a two-part probe device according to a second embodiment of the present invention.

6(a) and 6(b) are cross-sectional views of a two-part probe device according to a third embodiment of the present invention.

The advantages and features of the present invention, and the methods for achieving the same are clarified by the accompanying drawings and the embodiments described in detail below. However, the present invention is not limited to the embodiments described below, and can be realized by various forms that are different from each other. This embodiment is only for making the present invention fully disclosed for general knowledge of the technical field to which the present invention pertains. The scope of the invention is fully understood by those skilled in the art and the scope of the invention is determined by the scope of the invention.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. The singular forms "a", "the", and "the" It will be further understood that the term "comprising" and / or "comprising", when used in the specification, is intended to mean the s Characteristics, overalls, steps, operations, components, components and / Or the presence or addition of a group. Also, "and/or" includes the individual items recited and all combinations thereof.

Further, the embodiments described in the present specification are described with reference to cross-sectional views and/or schematic drawings which are ideal schematic views of the present invention. Thus, the form of the schematic can be modified in accordance with manufacturing techniques and/or tolerances and the like. Thus, the embodiments of the invention are not limited to the specific forms shown, but include variations in form in accordance with the manufacturing process. Further, in the respective drawings illustrated in the present invention, the respective elements shown may be slightly enlarged or reduced for convenience of explanation. The same element symbols throughout the specification denote the same elements.

Hereinafter, the present invention will be described by way of an embodiment of the present invention with reference to the accompanying drawings for explaining a two-part type probe device.

1 is a cross-sectional view of a two-part probe device in accordance with a first embodiment of the present invention.

As shown in FIG. 1, a two-part probe device according to a first embodiment of the present invention may include a pipe body 100, an intermediate member 200, a first plunger 210, a second plunger 220, a first elastic member 310, and a Two elastic members 320.

The pipe body 100 may have a hollow hollow shape inside, and its cross-sectional shape may be formed in a circular shape, and both ends in the longitudinal direction of the pipe body 100 may be opened to have the first opening portion 101 and the second opening portion 102. At this time, the sealing portions 100a and 100b may be formed in the first opening portion 101 and the second opening portion 102 so as to prevent the first plunger 210 and the second plunger 220, which will be described later, from being completely separated from the tubular body 100.

That is, the ends of the first opening portion 101 and the second opening portion 102 may be formed to be in contact with the exposed outer peripheral surfaces of the first plunger 210 and the second plunger 220 and surround the first plunger 210 and the second column The sealed portions 100a and 100b are bent so as to expose the outer peripheral surface of the plug 220. At this time, the diameters of the large diameter portions 210b, 220b of the first plunger 210 and the second plunger 220 located inside the tubular body 100 are the sealing portions 100a, 100b. The reference is formed to be larger than the diameter of the small diameter portions 210c, 220c located outside the tubular body 100, thereby preventing the first plunger 210 and the second plunger 220 from moving from the tubular body 100 when the inside of the tubular body 100 moves in the longitudinal direction. Get rid of.

The tube body 100 may be formed of a metal material having electrical conductivity. As an example, a metal plate having conductivity, a material having a predetermined stretchability, a good elasticity and strength by heat treatment, and a low electrical resistance can be used. In particular, beryllium copper 25 alloy ASTM C17200 or the like can be used, but any material can be used as long as it satisfies mechanical and electrical properties, and thus is not limited thereto.

Each of the first plunger 210 and the second plunger 220 may be formed with an electrically connectable first contact portion 210d and a second contact portion 220d. Also, an intermediate member 200 may be disposed between the first plunger 210 and the second plunger 220. That is, the first plunger 210, the intermediate member 200, and the second plunger 220 are arranged in series in the longitudinal direction inside the tubular body 100 to achieve electrical connection between the electrode of the detection target and the pad.

Specifically, the intermediate member 200 is disposed to be slidable in a state of being in contact with the inner peripheral surface of the pipe body 100, and both ends in the longitudinal direction of the intermediate member 200 may be respectively formed with a first elastic member for stably supporting a later-described one. 310 and elastic support portions 201, 202 of the second elastic member 320. In the present embodiment, the both ends have a conical shape protruding toward the first elastic member 310 and the second elastic member 320 side, but any shape may be adopted as long as a part thereof can be inserted into a hollow portion of each elastic member. Therefore, it is not limited to this.

Also, in the present invention, the intermediate member 200 can be implemented as a conductive member. At this time, since the intermediate member 200 is disposed to be slidable in a state of being in contact with the inner peripheral surface of the pipe body 100, in this case, electrical connection can also be achieved between the pipe body 100 and the intermediate member 200.

The first plunger 210, the second plunger 220, and the intermediate member 200 may all be disposed on the same axis as the tubular body 100. At this time, the first contact portion 210d of the first plunger 210 exposed from the tube body 100 and The second contact portion 220d of the second plunger 220 exposed from the tube body 100 is in contact with the electrode and the pad of the detection target at an appropriate contact pressure.

The first contact portion 210d of the first plunger 210 may refer to a portion that is in contact with the terminal 11 of the semiconductor package 10 of the detection target. Moreover, the second contact portion 220d of the second plunger 220 may refer to a portion that is in contact with the contact pad 21 of the test board 20.

Further, the first contact portion 210d formed on the upper end surface of the first plunger 210 and the second contact portion 220d formed on the lower end surface of the second plunger 220 are respectively in direct contact with the terminal and the contact pad or the like, which may Various shapes are formed to ensure a mutual contact area with a terminal or a contact pad or the like. For example, in the case of being in contact with the terminal of the semiconductor package, it may be formed in a crown shape in which the center portion is recessed and the peripheral portion protrudes so as to easily surround the terminal, and in the case of contact with the contact pad of the test board, may be a dome The shape is outstanding.

Preferably, the first contact portion 210d and the second contact portion 220d are made of a conductive material having good hardness so as to maintain stable electricity with the terminals or pads of the test substrate even if the test object such as a semiconductor package is repeatedly contacted. contact.

The first elastic member 310 disposed between the first plunger 210 and the intermediate member 200 may be a compression coil spring.

In the case where the first elastic member 310 is a compression coil spring, a surface of the first plunger 210 opposite to the first elastic member 310 may be formed with a first elastic support portion 210a that protrudes in a conical shape. Here, as for the shape of the first elastic supporting portion 210a, any shape may be adopted as long as a part can be inserted into the hollow portion of the first elastic member 310 so as to stably support the one end of the first elastic member 310, and thus is not limited thereto.

Similarly, in the case where the second elastic member 320 is a compression coil spring, the opposite side of the second plunger 220 from the second elastic member 320 may be formed with a second elastic support portion 220a that protrudes in a tapered shape. The second elastic supporting portion 220a of the second plunger 220 can stably support the second elastic member 320 by being coupled to the hollow portion of the second elastic member 320.

The first elastic member 310 and the second elastic member 320 may be formed to have the same coil pitch, wherein, in the case where the intermediate member 200 is disposed at an intermediate portion of the overall length of the tubular body 100, the first elastic member 310 and the second elastic member The 320s are preferably formed to have the same coil pitch such that the mutual reciprocating distances are the same, but in the case of assembly tolerances or in the case where the intermediate member 200 is not disposed at the intermediate portion of the overall length of the tubular body 100, the first elastic members 310 and The mutual reciprocating distance of the two elastic members 320 should be changed, and therefore, the mutual coil pitches may be different.

The outer diameters of the first elastic member 310 and the second elastic member 320 may be formed to be smaller than the inner diameter of the pipe body 100, and the respective surfaces of the first elastic member 310 and the second elastic member 320 may further include an insulating member (not shown) show). The insulating member may be formed on the surfaces of the first elastic member 310 and the second elastic member 320 by a method such as bonding, deposition, or coating.

As described above, when the insulating member is formed on the surfaces of the first elastic member 310 and the second elastic member 320, it is possible to prevent the electric signal transmitted through the pipe body 100 from being unnecessarily transmitted to the first elastic member 310 and the second The elastic member 320 generates an impedance.

In addition, if the first plunger 210, the second plunger 220, and the intermediate member 200 are not arranged in series on the same axis due to redundant tolerances when assembling the first plunger 210, the second plunger 220, and the intermediate member 200, The first plunger 210, the second plunger 220, and the intermediate member 200 cannot stably move in the axial direction from the inner circumferential surface of the tubular body 100 with a certain gap therebetween, resulting in an internal circumferential surface of the tubular body 100. Irregular contact occurs, and impedance can occur in this case, so proper assembly tolerances are required.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an operation of a two-part type probe device according to an embodiment of the present invention will be described with reference to the accompanying drawings.

2 through 4 illustrate the operation of a two-part probe device in accordance with an embodiment of the present invention.

As shown in FIG. 2, in order to test the semiconductor package, the external terminals 11 of the semiconductor package 10 may be spaced apart above the tube 100, and the contact pads 21 of the test board 20 may be located below the tube 100.

Then, as shown in FIG. 3, in order to test the semiconductor package, if the external terminal 11 of the semiconductor package 10 and the contact pad 21 of the test board 20 are oriented toward the first plunger 210 and the second plunger 220 of the tube body 100, The first plunger 210 and the second plunger 220 of the tube 100 are sandwiched between the external terminal 11 of the conductor package 10 and the contact pad 21 of the test board 20, and then the external terminal 11 of the semiconductor package and the first plunger 210 A contact portion 210d is in contact, and the second contact portion 220d of the second plunger 220 is in contact with the contact pad 21 of the test board 20, respectively.

At this time, the first elastic member 310 and the second elastic member 320 are elastically supported by the first elastic member 310 and the second elastic member 320 inside the tubular body 100 to absorb not only the impact at the time of contact but also the external terminal 11 and The contact pad 21 provides sufficient contact pressure, and, as shown in FIG. 4, the semiconductor package 10 and the test board 20 are electrically connected, thereby achieving electrical signal connection along the arrows. In particular, as described above, in the case where the intermediate member 200 is realized as a conductive member, electrical connection is also achieved between the tubular body 100 and the intermediate member 200.

On the other hand, in the process of applying pressure to the upper end of the pipe body 100 while the first elastic member 310 and the second elastic member 320 are compressed, even if the first elastic member 310 or the second elastic member 320 occurs Further, since the outer peripheral surface of the intermediate member 200 is slid in contact with the inner peripheral surface of the tubular body 100 and is kept parallel to the tubular body 100 by the intermediate member 200, stable electrical connection can be ensured.

Also, the present invention has a configuration in which the first plunger 210 and the second plunger 220 are divided as compared with the case where the plunger and the elastic member having a length corresponding to the total length of the tubular body 100 are formed in the prior art, and therefore, Even if a predetermined assembly tolerance occurs, the first elastic member 310 and the second elastic member 320 can be formed into a short length by the intermediate member 200, respectively, thereby improving the reliability, durability, and enlargement of the probe device. The aspect of the compression range is valid.

Therefore, a stable transmission path can be realized to transmit high-frequency electric signals without distortion, and the impedance on the transmission path can be minimized.

Figure 5 is a cross-sectional view of a two-part probe device in accordance with a second embodiment of the present invention.

The two-part type probe device according to the second embodiment of the present invention is different from the configuration according to the first embodiment in that the first elastic member and the second elastic member are formed of a non-conductive rubber, and other structures are the same Therefore, the repeated explanation is omitted.

Referring to FIG. 5, inside the tubular body 100, a first elastic rubber 410 may be disposed between the first plunger 230 and the intermediate member 400, and a second elastic rubber 420 may be disposed between the second plunger 240 and the intermediate member 400. . The first elastic rubber 410 and the second elastic rubber 420 may be formed in a cylindrical shape identical to the cross-sectional shape of the tubular body 100 and formed to have a diameter smaller than the inner diameter of the tubular body 100.

Also, one end of the first elastic rubber 410 may be in contact with one surface of the first plunger 230, and the other end may be in contact with one surface of the intermediate member 400. Similarly, one end of the second elastic rubber 420 is in contact with one surface of the second plunger 240, and the other end is in contact with one surface of the intermediate member 400 such that the first plunger 230 and the second plunger 240 are along the length inside the tubular body 100. The direction is elastically supported and slid by the first elastic rubber 410 and the second elastic rubber 420.

As described above, if the first elastic rubber 410 is disposed between the first plunger 230 and the intermediate member 400, and the second elastic rubber 420 is disposed between the second plunger 240 and the intermediate member 400, then passes through the first column During the electrical connection of the respective contacts 230d, 240d of the plug 230 and the second plunger 240, the same conduction path as that of the first embodiment shown in Fig. 4 is formed.

6(a) and 6(b) are cross-sectional views of a two-part probe device according to a third embodiment of the present invention.

In the case of Fig. 6(a), the two-part type probe device according to the third embodiment of the present invention is different from the configuration according to the first embodiment in that a pair of plungers are elastically supported by a compression coil spring Any one of the pair of plungers is fixed by the tubular body, and in the case of FIG. 6(b), the difference is that elastic rubber is used instead of the compression coil spring in the configuration of FIG. 6(a), and the other The structures are the same, so overlapping descriptions are omitted.

Next, a plunger fixed to the tubular body in a pair of plungers is defined as a third plunger 250, and the other plunger is defined as a fourth plunger 260.

The third plunger 250 may be fixed by various means between the outer circumferential surface of the third plunger 250 and the inner circumferential surface of the tubular body 100 so as to be fixed to the inner circumferential surface of the tubular body 100.

For example, the outer circumferential surface of the third plunger 250 may be coupled to the inner circumferential surface of the tubular body 100 by an interference fit or may be coupled to the inner circumferential surface of the tubular body 100 by a snap fit.

In the present embodiment, as an example, the outer peripheral surface of the third plunger 250 is formed with an annular hooking groove 250g and is rolled and riveted from the outer side surface of the pipe body 100 to the radially inner side of the hooking groove 250g ( Rollcaulking) process situation. In other words, by the rolling and caulking process, the outer circumferential surface of the pipe body 100 can be formed with a hooking projection 100c that protrudes inward in the radial direction of the hooking groove 250g and is inserted into the hooking groove 250g. Will be The method of fixing the three plungers 250 to the inner circumferential surface of the pipe body 100 can be realized by various methods, and thus is not limited thereto.

Therefore, if the contact portion 250d of the third plunger 250 and the contact portion 260d of the fourth plunger 260 are pressurized in the compression direction in a state in which the terminal and the pad are in contact with each other, the third plunger 250 is pressed. In the fixed state, the fourth plunger 260 presses the intermediate member 200 upward in the drawing, so that the intermediate member 200 slides. At this time, the intermediate member 200 is moved upward so that the first elastic member 310 is compressed upward, thereby achieving electrical connection along the longitudinal direction of the tubular body 100.

In Fig. 6(b), the compression coil spring used in Fig. 6(a) is replaced with the elastic rubber 510, 520, which not only elastically supports the respective plungers, but also prevents unnecessary electric signals transmitted through the pipe body 100. The ground is conveyed and causes losses.

Numerous variations and modifications may be made to the preferred embodiments without departing from the principles of the invention. Therefore, the preferred embodiments disclosed herein are used in a general and descriptive sense only and not for the purpose of limitation. The scope of the present invention is defined by the scope of the appended claims, and is not intended to In the range.

Claims (12)

A two-part probe device, comprising: a tube body formed in a hollow cylindrical shape, open at both ends to have a first opening portion and a second opening portion; an intermediate member along the The inner peripheral surface of the tubular body is slidably disposed, and the intermediate member is arranged to be slidable in a state where the entire circumferential surface of the intermediate member is in contact with the inner peripheral surface of the tubular body; a first plunger, a portion of which is along a longitudinal direction of the tubular body protruding from the first opening; a second plunger protruding from the second opening along a longitudinal direction of the tubular body; a first elastic member disposed at the first a first plunger and the intermediate member are elastically supported between the plunger and the intermediate member; and a second elastic member is disposed between the second plunger and the intermediate member to elastically support the second plunger and The intermediate part. The two-part probe device of claim 1, wherein the first plunger is formed with a tapered support elastic support on a side opposite to the first elastic member, and opposite sides thereof are formed. There is a first contact that is in contact with the terminals of the semiconductor package. The two-part probe device of claim 1, wherein the second plunger is formed with a tapered support elastic support portion on a side opposite to the second elastic member, and opposite sides are formed a second contact that is in contact with a contact pad located on the test board. The two-part probe device of claim 1, wherein the first elastic member and the second elastic member are coil springs. The two-part probe device of claim 4, wherein the first elastic member and the second elastic member have the same coil pitch. The two-part probe device of claim 5, wherein an outer diameter of the first elastic member and the second elastic member is formed to be smaller than an inner diameter of the tubular body, and the first elastic member is An insulating member is formed on a surface of the second elastic member. The two-part probe device of claim 1, wherein the first elastic member and the second elastic member respectively comprise an elastic rubber. The two-part probe device of claim 1, wherein the first opening portion and the second opening portion of the tube body are formed with a sealing portion, the sealing portion and the first plunger and the second portion The outer peripheral surface of the plunger is tightly bent. The two-part probe device of claim 8, wherein an outer diameter of a portion of the first plunger and the second plunger located inside the tubular body is formed to be larger than an inner diameter of the sealing portion . The two-part type probe device according to claim 1, wherein an annular groove is formed in an outer circumferential surface of a portion of the first plunger located inside the pipe body, and The tubular body is formed with a hooking projection that protrudes to the radially inner side of the hooking groove and is inserted into the hooking groove. . The two-part probe device of claim 10, wherein the hooking projection is formed by a rolling riveting process. The two-part probe device of claim 1, wherein the intermediate member is implemented as a conductive member.