JP2007248237A - Contact probe pin - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a contact probe pin capable of securing reliability, while keeping superior high-frequency characteristics, and to provide a contact probe pin that can be manufactured with productivity. <P>SOLUTION: This contact probe pin is equipped with a conductive barrel, equipped with a hollow part having an opening part at least on one side; a conductive plunger arranged slidably in the electrical contact state with the inside surface of the barrel; and a spring, arranged expandably/contractibly between a projection part provided on the outside surface other than the sliding region to the barrel of the plunger and a projection part provided on the outside surface of the barrel, while involving the barrel. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an electronic component inspection component for measuring and inspecting electrical characteristics of an electronic component such as a semiconductor integrated circuit (IC), and more particularly to conduction in a semiconductor device, particularly an electronic component such as a semiconductor integrated circuit. The present invention relates to a contact probe pin (contactor, pogo pin) used for inspection of electrical characteristics.

In order to inspect various electrical characteristics of an electronic component such as a semiconductor integrated circuit, an inspection apparatus having a contact probe pin is used. One end of the probe pin is brought into contact with the wiring board of the inspection apparatus, and the other end is brought into contact with an inspection target of an electronic component such as a semiconductor integrated circuit, specifically, a solder ball or a bump. Then, an electric signal is exchanged between the electronic component such as a semiconductor integrated circuit and the inspection device via the probe pin, and the inspection is performed.
The general configuration of this probe pin is as follows. A plunger for contacting the wiring board, a plunger for contacting the object to be inspected, and a coiled spring sandwiched between both plungers are arranged inside a metal tube called a barrel. Since both ends are partially closed, each element in the barrel is held inside the barrel.
When the plunger is pressed against the wiring board or the object to be inspected by the coil spring, the contact resistance is reduced and the variation of the contact state during the inspection is suppressed, so that the reliability of the inspection result is improved.
For this reason, it is important that the coiled spring has an appropriate elastic repulsive force, and the material thereof is piano wire (SWP) at room temperature, burn-in and other stainless steel for springs (SUS302, SUS304) at high temperatures in other environmental resistance tests. In particular, at a high temperature of 130 ° C. or higher, a cobalt / nickel / chromium wire is used.

  On the other hand, electronic components such as semiconductor integrated circuits are further miniaturized and densified, and the pitch between terminals tends to be further narrowed. For this reason, the distance between connection terminals of electronic components such as semiconductor integrated circuits to be inspected tends to change from 0.5 mm to 0.3 mm. As the pitch becomes narrower in this way, it is necessary to reduce the barrel diameter, and accordingly, the diameter of the wire constituting the spring disposed in the barrel must also be reduced. For this reason, in order to obtain an appropriate elastic repulsion force, it is necessary to increase the number of times of spring winding. As a result, the contact probe pin becomes longer, the inductance component becomes larger, and the high frequency characteristics are deteriorated. In recent years, inspection of high-frequency characteristics has become important, and this point has been especially emphasized.

Against this background, a structure in which another coil spring is provided in the hollow portion of the coil spring has been proposed (see, for example, Patent Document 1).
International Publication WO2004 / 005944

In this structure, the portion responsible for the internal electrical conduction is in the form of a coil, so that the high-frequency characteristics are deteriorated and the initial purpose cannot be sufficiently achieved.
In addition, since the displacement (swinging) of the contact portion is restricted only by the elasticity of the spring, the contact state is difficult to stabilize, and the reliability of the inspection result is low. Furthermore, it has a double spring structure and is extremely difficult to manufacture.

An object of the present invention is to provide a contact probe pin that has good high-frequency characteristics and can realize reliability.
It is another object of the present invention to provide a contact probe pin having a configuration that satisfies the above-described object and has high productivity.

(Claim 1)
The invention provided to achieve the above object is a conductive barrel having a hollow portion having an opening on at least one side, and is slidably disposed while being in electrical contact with the inner surface of the barrel. An electrically conductive plunger that includes the barrel and is disposed so as to be expandable and contractable between a protrusion provided on the outer surface of the plunger other than the sliding region with respect to the barrel and a protrusion provided on the outer surface of the barrel. A contact probe pin having a spring.

In the contact probe pin having such a configuration, an increase in inductance component is suppressed because the barrel is responsible for electrical conduction. Further, a spring having a diameter larger than that of a contact having a structure in which the spring is disposed in the barrel can be used. For this reason, the point that the spring length is shortened also contributes to the reduction of the inductance component.
Furthermore, since the inner surface of the barrel slides with the plunger, the movement of the plunger in directions other than the axial direction of the barrel is significantly restricted. For this reason, a contact is stabilized and the reliability of a test result increases.

(Claim 2)
The protruding portion of the plunger of the contact probe pin according to the present invention is configured separately from the rod-shaped shaft body portion, and the shaft body portion is the outermost peripheral diameter of the outer surface of the sliding region with respect to the barrel and other than the sliding region. The configuration may be such that the outermost peripheral diameter of the outer surface is substantially equal.
In this case, since the shaft body portion is substantially rod-shaped, outer diameter processing is facilitated.

(Claim 3)
In addition to the above configuration, the shaft body portion of the plunger has an outer surface formed by centerless processing, and the projecting portion is configured such that a ring-shaped plate is fitted into a recess provided on the outer surface. Good.
In this case, the outer diameter accuracy of the outer surface can be particularly increased, the electrical contact on the sliding surface is stabilized, and the reliability of the inspection result is increased.

(Claim 4)
Further, the plunger of the contact probe pin according to the present invention is composed of a rod-shaped shaft body portion including a sliding region with respect to the barrel, a tip portion that comes into contact with the object to be inspected, and a protruding portion that holds a spring. The outermost peripheral diameter of the outer surface may be larger than the outermost peripheral diameter of the outer surface of the shaft body portion.
Such a configuration is suitable when the object to be inspected is a solder ball having a large diameter. The distance between the contact points of the tip portion with the object to be inspected can be increased, and the contact state is stabilized. Further, the winding diameter of the spring can be reduced according to the outermost peripheral diameter of the outer surface of the sliding region, and it is easy to cope with the narrow pitch.

(Claim 5)
In addition to the above configuration, the tip portion and the shaft body portion may be configured separately.
With this configuration, the sliding portion that requires high machining accuracy has a simple shaft shape. For this reason, it is possible to apply a processing means that realizes high shape accuracy such as centerless processing, and the electrical contact on the sliding surface is stabilized, and the reliability of the inspection result is particularly increased.

(Claim 6)
Moreover, the barrel of the contact probe pin according to the present invention has a cup-like shape with one end closed, and the tubular hollow shaft portion and the closed end may be configured integrally.
In the case of such a configuration, the shape of the barrel is cup-shaped with the end portion that is lower in the used state being closed, so that abrasion powder due to sliding with the plunger hardly reaches the object to be inspected. This stabilizes the contact state between the barrel and the object to be inspected and increases the reliability of the inspection result.
Further, since the contact area with the object to be inspected and the contact area with the plunger are composed of the same member, electrical characteristic deterioration is less likely to occur compared to a structure in which two members are joined. For this reason, a favorable high frequency characteristic is implement | achieved.

(Claim 7)
In addition to the above configuration, the integrally formed hollow shaft portion and the closed end portion may be formed of a plating member, and the thickness of the hollow shaft portion may be substantially uniform.
Such a structure is a structure that is structurally excellent in objectivity, and therefore has excellent high frequency characteristics, and further improvement of high frequency characteristics is realized.
Moreover, since it is a plating member, it has high hardness and high rigidity, and is excellent in durability. For this reason, the further improvement of reliability is implement | achieved.

(Claim 8)
In addition to the above configuration, the integrally formed hollow shaft portion and closed end portion are removed from the structure obtained by forming a plating layer on the side surface and one end surface of the rod-shaped shaft member. It is good also as a structure containing the member formed.
In such a configuration, the surface of the plating layer facing the shaft member reversely transfers the shape of the shaft member. Therefore, when the shaft member is removed, the member has an inner diameter accuracy substantially equal to the outer diameter accuracy of the shaft member. . For this reason, the barrel using this member is excellent in sliding characteristics with the plunger even though the conductive characteristics with the plunger are high. Therefore, the contact probe pin having such a configuration realizes both high frequency characteristics and reliability at a high level.

(Claim 9)
The barrel of the contact probe pin according to the present invention has a cup-like shape with one end closed, and has a closed end, a tubular hollow shaft portion, and a protrusion, The formed end portion and the protruding portion may be integrally formed.
In the case of such a configuration, the shape of the barrel is a cup shape in which the lower end in the state of use is closed, so that wear powder due to sliding with the plunger hardly reaches the object to be inspected. This stabilizes the contact state between the barrel and the object to be inspected and increases the reliability of the inspection result.
In addition, the portions other than the closed end and the protruding portion become a tubular hollow shaft portion having a simple shape, so that the manufacture is easy and the productivity is excellent.
Therefore, the contact probe pin having such a configuration achieves both high reliability and high productivity.

(Claim 10)
Furthermore, the barrel of the contact probe pin according to the present invention may have an opening at both ends, and the protrusion may be formed separately from the tubular hollow shaft.
In the case of such a configuration, the contact region with the object to be inspected and the contact region with the plunger are formed of the same member, so that electrical characteristics are less likely to deteriorate than in a configuration in which two members are joined. For this reason, a favorable high frequency characteristic is implement | achieved.
In addition, the portions other than the closed end and the protruding portion become a tubular hollow shaft portion having a simple shape, so that the manufacture is easy and the productivity is excellent.
Therefore, the contact probe pin having such a configuration realizes both high frequency characteristics and productivity at a high level.

(Claim 11)
In addition to the configuration according to the ninth or tenth aspect, the tubular hollow shaft portion of the barrel has a substantially uniform thickness, and may be formed of a plated member.
Such a structure is a structure that is structurally excellent in objectivity, and therefore has excellent high frequency characteristics, and further improvement of high frequency characteristics is realized.
Moreover, since it is a plating member, it has high hardness and high rigidity, and is excellent in durability. For this reason, the further improvement of reliability is implement | achieved.

(Claim 12)
In addition to the above configuration, the tubular hollow shaft portion of the barrel may include a member formed by removing the shaft member from the structure obtained by forming the plating layer on the side surface of the rod-shaped shaft member. .
In such a configuration, the surface of the plating layer facing the shaft member reversely transfers the shape of the shaft member. Therefore, when the shaft member is removed, the member has an inner diameter accuracy substantially equal to the outer diameter accuracy of the shaft member. . For this reason, the barrel using this member is excellent in sliding characteristics with the plunger even though the conductive characteristics with the plunger are high. Therefore, the contact probe pin having such a configuration realizes both high frequency characteristics and reliability at a high level.

(Claim 13)
Furthermore, the barrel of the contact probe pin according to the present invention may have a configuration in which the inner surface of the tubular hollow shaft portion has a conductive layer made of a material having excellent conductivity.
In this case, there is little deterioration of the electrical characteristics in the contact area with the plunger, and the high frequency characteristics are particularly excellent. Further, when hard gold plating is performed as a material having excellent conductivity, the sliding property is excellent and reliability is improved, which is particularly favorable.

(Claim 14)
In addition to the above configuration, the tubular hollow shaft portion of the barrel includes a member obtained by removing the shaft member from the structure obtained by sequentially forming a conductive layer and a plating layer on the side surface of the rod-shaped shaft member. It is good also as a structure.
In this case, in the barrel formed by removing the shaft member, the conductive layer is exposed as the innermost surface. For this reason, regardless of the thickness of the conductive layer, the shape accuracy of the inner surface of the barrel is at a high level reflecting the shape accuracy of the shaft member. On the other hand, when the conductive layer is formed later by a technique such as gold plating after the inner diameter of the barrel is processed, the shape accuracy of the inner surface deteriorates due to the variation in thickness as the thickness of the conductive layer increases. To do. For this reason, an upper limit exists in the thickness of the conductive layer in relation to the sliding characteristics.
Therefore, in the case of this configuration, the thickness of the conductive layer can be increased while maintaining the sliding characteristics, and as a result, the contact probe pin is excellent in electrical characteristics and durability.

(Claim 15)
Or in addition to the structure concerning the said Claim 13, it is good also as a structure by which a lubricating member is disperse | distributed to a conductive layer.
In this case, the lubricating member improves the sliding characteristics and becomes a contact probe pin with excellent durability.

  As described above, according to the present invention, since the electric conduction is performed by the barrel and the plunger, the inductance component is hardly increased, and a coil spring is wound around the outside of the barrel, so that a spring wire having a large diameter is used. As a result, the length of the entire contact can be shortened, and furthermore, the variation of the contact state is suppressed by the sliding mechanism between the barrel and the plunger, and the contact state with the object to be inspected is stabilized. Thus, a contact probe pin with good high frequency characteristics and high reliability could be obtained.

  By making the protruding part of the plunger, which is the component, separate from the shaft body part, or by separating it from the tip part, the shaft body part can be made into a shape that can be processed centerlessly. It was possible to obtain a contact probe pin with a particularly high and high productivity.

  The reliability was further improved by making the barrel which is the component into a cup shape.

  Moreover, the contact probe pin which further improved the high frequency characteristic was able to be obtained by making the hollow shaft part of the barrel and the closed end part the same member. Furthermore, a particularly excellent contact probe pin could be obtained by using a plated member obtained by laminating the same member on the shaft member.

  Or the contact probe pin with high productivity was able to be obtained by making the closed end part and protrusion part of a barrel into the same member. Furthermore, a particularly excellent contact probe pin could be obtained by using a plating member in which a hollow shaft portion was laminated on a shaft member.

  Moreover, high frequency characteristics could be further improved by making the barrel into a hollow shaft shape. Furthermore, a particularly excellent contact probe pin could be obtained by using a plating member in which a hollow shaft portion was laminated on a shaft member.

  Furthermore, by making the inner surface of the barrel a material having excellent conductivity or having a lubrication member dispersed therein, a contact probe pin particularly excellent in high frequency characteristics and durability could be obtained.

  Hereinafter, as an embodiment according to the present invention, four examples will be described with reference to the drawings.

First, the first embodiment will be described with reference to FIG.
FIG. 1 conceptually shows a cross section of a contact probe pin according to a first embodiment.

  In the contact probe pin 110, a conductive plunger 112 is inserted into a hollow portion of a cup-shaped barrel 111 having conductivity and a hollow portion. The diameter of the hollow portion is set slightly larger (for example, about 5 to 10 μm) than the outer diameter of the plunger 112, and can be slid relative to each other by this clearance 116.

  A spring retainer 113 protruding in a ring shape is formed on the outer surface of the cup-shaped barrel 111. A ring-shaped spring retainer 114 is also formed in a region other than the sliding portion on the outer surface of the plunger 112.

  That is, the cup-shaped barrel 111 includes a tubular hollow portion, a closed end portion, and a spring presser 113. The plunger 112 includes a rod-shaped shaft body portion and a spring presser 114.

  A spring 115 is disposed so as to be sandwiched between the spring pressers 113 and 114. Due to the elasticity of the spring, the contact probe pin 110 can be expanded and contracted within a predetermined range.

  The first socket substrate 119 on the contact target side is provided with a plurality of through holes corresponding to the arrangement of test targets (not shown) such as solder balls and bumps. A protrusion 120 is provided at the opening of the through hole on the side facing the contact target. The inner diameter of the protrusion 120 and the outer diameter of the spring retainer 114 are adjusted such that when the contact probe pin 110 is disposed in the through hole, the spring retainer 114 of the plunger 112 contacts the protrusion 120.

  The second socket substrate 121 on the inspection apparatus side also has a similar through hole at a position corresponding to the through hole of the first socket substrate 119, and a protruding portion of the first socket substrate 119 is located in each through hole. A protrusion 122 having the same function as 120 is provided.

  The socket substrate 123 is obtained by abutting and fixing the first socket substrate 119 and the second socket substrate 121. The contact probe pin 110 is disposed between the protrusions 120 and 122 in the through hole of the socket substrate 123, and the spring 115 is set to be appropriately compressed in this state. For this reason, the cup-shaped barrel 111 and the plunger 112 are held by the protrusions 120 and 122 while being urged to the outside of the socket substrate 123. In addition, the protrusions 120 and 122 are arranged so that the tip portions 117 and 118 of the cup-shaped barrel 111 and the plunger 112 protrude at an appropriate height from the socket substrate 123 in a state of being disposed in the socket substrate 123. Is set.

  When the socket substrate 123 on which the contact probe pins 110 are arranged is brought into contact with a wiring board (not shown) on the inspection apparatus side, the cup-shaped barrel 111 is caused to repel the spring 115 with the contact with the wiring board. It moves to the inside of the socket substrate 121 while resisting. For this reason, even if the distance between the protrusion 122 of the second socket substrate 121 and the wiring substrate varies due to the low flatness of the second socket substrate 121 or the wiring substrate, the cup-shaped barrel 111 follows this. Thus, electrical connection with the wiring board can be reliably performed.

  Similarly, the plunger 112 moves so as to sink into the socket substrate 119 while resisting the elastic repulsion of the spring 115 in accordance with the contact with the test object such as a solder ball or a bump. For this reason, even if the distance between the projecting portion 120 of the first socket substrate 119 and the object to be inspected fluctuates, the elasticity of the spring absorbs this, so there is little possibility of causing a contact failure. At this time, since the plunger 112 moves along the inner surface of the cup-shaped barrel 111, the tip end portion 117 swings and the contact position with the object to be inspected shifts, or the object to be inspected is inadvertently damaged. Is suppressed.

  Hereinafter, components of the contact probe pin 110 will be described in detail.

  First, the cup-shaped barrel 111 is formed integrally with a tubular hollow shaft portion and a closed end portion to form a cup-shaped main body portion, and the cup-shaped main body portion and the ring-shaped spring retainer 113 are separated. It consists of

  If this spring retainer 113 is a ring-shaped plate having a C-ring with a part of the slit, it is easy to absorb the dimensional deviation and easy to assemble.

  The cup-shaped main body is made of a plating material. The plating material has high hardness and excellent wear resistance. In addition, a plating layer in which a lubricating material, for example, Teflon fine particles (Teflon is a registered trademark) is dispersed may be formed on the inner surface to increase the slidability. Gold plating for realizing electrical conduction may be applied. Here, when the gold plating layer is continuously formed not only on the inner surface of the cup-shaped barrel 111 but also on the entire surface, that is, the opening edge portion, the outer surface, and the tip end portion 118 in contact with the wiring board, the electric signal is transmitted to the gold plating layer. Is transmitted preferentially, and the contact probe pin has particularly good electrical characteristics.

  A typical manufacturing method of the cup-shaped barrel 111 is as follows.

  A conductive shaft, for example, a stainless steel shaft is processed to a predetermined coaxiality, and the region other than the region corresponding to the cup-shaped barrel is masked with a non-conductive material. Gold plating is performed using this conductive axis as the negative electrode, followed by nickel plating. As an example, the plating layer thickness of gold plating is about 1 to 10 μm, and the nickel plating layer thickness is about 100 μm.

  Next, the non-conductive material is removed from the plated conductor shaft, and the conductor shaft is further removed to make the structure made of plating independent to form a main body. As a result, the shape accuracy of the gold plating surface on the inner surface becomes substantially equal to the outer diameter accuracy of the conductor shaft. For example, the inner surface of the main body having an inner diameter of 300 μm can be finished with a cylindricity of about 5 μm.

  In addition, when performing gold plating, Teflon fine particles (Teflon is a registered trademark) can be dispersed in a plating bath to obtain Teflon-dispersed gold plating (Teflon is a registered trademark). In this plating layer, Teflon fine particles (Teflon is a registered trademark) have a lubricating function, and a contact probe pin having excellent sliding characteristics is realized.

  Subsequently, the cup-shaped barrel 111 is inserted into the hollow portion of the spring retainer 113 created by a known technique such as press working, and both are joined by welding or adhesion in a predetermined arrangement.

  Next, the structure of the plunger 112 will be described in detail including the manufacturing method.

  As with the cup-shaped barrel 111, the plunger 112 also has a spring retainer 114 that is separate from the shaft body.

  As with the spring retainer 113 of the cup-shaped barrel 111, the spring retainer 114 can be easily connected by using a C-ring shape. In order to prevent the spring retainer 114 from shifting in the axial direction, a recess may be provided at a predetermined position of the shaft body, and the spring retainer 114 may be disposed in the recess. In addition, as a material of the spring holding | suppressing 114, a phosphor bronze can be mentioned from a viewpoint of workability, for example.

The shaft body portion of the plunger 112 is preferably made of a hard material such as stainless steel or beryllium copper, which is easily processed. The entire shape including the region inserted into the cup-shaped barrel 111 has substantially the same diameter. For this reason, the shaft body portion can be centerless processed, and it is possible to realize a high coaxiality, for example, 5 μm or less for a diameter of 300 μm.
By using the cup-shaped barrel 111 made of the above-mentioned axial plating layer and the plunger 112 by this centerless processing, the clearance in the sliding region of both plungers can be set to 10 μm or less.

  The shape of the tip portion 117 with respect to the object to be inspected may be flat or may have a so-called crown shape with a sharp tip as shown in FIG. When the tip shape is complicated, only the tip portion 117 may be formed by electroforming, and may be joined to the shaft portion using a known joining means such as a conductive adhesive. Or only the front-end | tip part 117 may be created with high hardness materials, such as beryllium copper and tungsten, and this may be joined with a shaft body part.

  In addition, by applying gold plating to the entire surface of the shaft body portion and the tip end portion 117 of the plunger 112, good electric signal transmission characteristics can be obtained. Even when the tip portion 117 is bonded by bonding, good electric conduction characteristics can be obtained regardless of the adhesive material.

Next, the spring 115 will be described.
As the material of the spring 115, a known material such as stainless steel or piano wire can be used. In addition, the coil diameter can be increased as compared with a general inner spring structure. For this reason, the diameter of the wire can be increased, and as a result, the number of turns of the spring required to obtain the same elasticity can be reduced as compared with the inner spring structure. This contributes to shortening of the spring length, and further, the entire length of the contact probe pin 110 is shortened, which contributes to the reduction of inductance.

  As a modification, the plunger is composed of a rod-shaped shaft body portion including a sliding region with respect to the barrel, a tip portion that contacts the object to be inspected, and a protruding portion that holds a spring, and the outer diameter of the tip portion is the shaft body portion. It may be larger than the outer diameter. In this case, the distance between contact points with respect to the object to be inspected is increased, and the contact state is stabilized. In addition, since the outer diameter of the sliding region is small, the winding diameter of the spring can be reduced according to this diameter, and it is easy to cope with a narrow pitch.

  Furthermore, if the tip portion and the shaft body portion are configured separately, the shaft body portion has a shaft shape. At this time, the shaft portion may be manufactured by centerless processing using a high hardness material such as tungsten. And you may join with the front-end | tip part manufactured with beryllium copper, electroformed nickel, etc. by a well-known means.

  A conceptual diagram of the cross section of the plunger thus obtained is shown in FIG. In FIG. 5A, the plunger 510 includes a tip member 511, a shaft member 512, and a ring-shaped member 513. The tip member 511 has an opening corresponding to the outer diameter of the shaft member 512 at the center. Is formed. A shaft member 512 is inserted into the opening, and is joined to the tip member 511 by a welded portion 514.

  In FIG. 5B, the plunger 520 is composed of a tip member 521, a shaft member 522, and a ring-shaped member 523, and the tip member 521 is disposed on the opposite side to the side in contact with the object to be inspected. A recess corresponding to the outer diameter of the member 522 is formed. A shaft member 522 is inserted into the recess, and is joined to the tip portion member 521 by a welded portion 524.

Next, a second embodiment will be described with reference to FIG.
FIG. 2 conceptually shows a cross section of the contact probe pin according to the second embodiment.

  Most of the configuration of the contact probe pin 210 according to the present embodiment is the same as that of the contact probe pin 110 according to the first embodiment. However, instead of the cup-shaped barrel 111, a cylindrical barrel 211 having a through hole is used. Used.

  That is, the cylindrical barrel 211 is composed of a tubular hollow shaft portion and a spring presser. The tubular hollow shaft portion and the spring retainer are separated. For this reason, when manufacturing a tubular hollow shaft part by forming a plating layer on the shaft, a large number of hollow shaft parts can be formed on one shaft, and the shape is high in production efficiency.

  A plunger is inserted into one opening of the cylindrical barrel 211 in the same manner as the cup-shaped barrel 111, and is connected to the wiring board of the inspection apparatus at the opening edge of the other opening.

  The opening edge portion 212 on the side connected to the wiring board may use various shapes as necessary, and may have a crown shape as shown in FIG. This is realized by forming the cylindrical barrel 211 by the same manufacturing method as that for the cup-shaped barrel 111 by reversing the shape in which the masking shape by the nonconductive material is desired.

  The inner surface of the cylindrical barrel 211 is also preferably subjected to gold plating from the viewpoint of improving the electric conduction characteristics. At this time, it is particularly preferable that gold plating is continuously applied to the opening edge 212 that is in contact with the wiring board to obtain a contact probe pin with particularly little deterioration in electrical characteristics.

Next, a third embodiment will be described with reference to FIG.
FIG. 3 conceptually shows a cross section of the contact probe pin according to the third embodiment.

Most of the configuration of the contact probe pin 310 according to the present embodiment is the same as that of the contact probe pin 110 according to the first embodiment, but a lid member 312 is provided on the tubular hollow shaft 311 instead of the cup-shaped barrel 111. What was joined is used.
That is, the barrel according to the present embodiment includes a tubular hollow shaft portion 311 and a lid member 312 in which a closed end portion and a spring retainer are integrated.

  The tubular hollow shaft portion 311 is desirably manufactured by the same manufacturing method as the main body portion of the cup-shaped barrel 111. At this time, it is not necessary to use the end portion of the shaft that becomes the mother die like the cup-shaped barrel 111. For this reason, it is possible to form a large number of tubular hollow shaft portions 311 at a time by performing masking with a mask made of a plurality of strip-shaped non-conductive materials on the shaft forming the matrix, which is efficient. .

  The lid member 312 is inserted from one opening side of the tubular hollow shaft 311 and fixed by a known method such as fitting. The material is preferably a material having excellent wear resistance because it is in direct contact with the wiring board. For example, it can be obtained by cutting using beryllium copper or tungsten.

Next, a fourth embodiment will be described with reference to FIG.
FIG. 4 conceptually shows a cross section of the contact probe pin according to the fourth embodiment.

Most of the configuration of the contact probe pin 410 according to the present embodiment is the same as that of the contact probe pin 310 according to the third embodiment, but is slidable with respect to the tubular hollow shaft portion 412 instead of the lid member 312. Is used.
That is, the barrel according to the present embodiment includes a tubular hollow shaft portion 412, a second plunger 411 slidably disposed, and a spring retainer 414.

  The second plunger 411 has essentially the same structure as the plunger 413 and has a hook-shaped spring retainer 414. That is, the component, material, and manufacturing method of the second plunger 411 may be the same as those of the plunger 413. Therefore, it is desirable in that the manufacturing equipment can be shared.

  The contact probe pin of the present invention achieves both good high-frequency characteristics and high reliability at a level that could not be realized in the past. In addition, it is possible to further improve reliability by adopting a structure that facilitates high processing accuracy and high productivity. By using such highly reliable contacts, not only the reliability of an IC or the like to be inspected can be increased, but also the disposal of contacts for the purpose of ensuring reliability can be reduced. In this way, it contributes not only to improving the reliability of the inspection process but also to resource saving, which is preferable from the viewpoint of environmental activities.

The conceptual diagram of the cross section of the contact probe pin which concerns on 1st Example of this invention. The conceptual diagram of the cross section of the contact probe pin which concerns on 2nd Example of this invention. The conceptual diagram of the cross section of the contact probe pin which concerns on 3rd Example of this invention. The conceptual diagram of the cross section of the contact probe pin which concerns on 4th Example of this invention. The conceptual diagram of the cross section of the plunger which concerns on the modification of 1st Example of this invention.

Explanation of symbols

110 Contact probe pin 111 according to the first embodiment 111 Cup-shaped barrel 112 Plunger 113 Cup-shaped barrel spring retainer 114 Plunger spring retainer 115 Spring 116 Clearance between plunger and cup-shaped barrel 117 Contact with the wiring substrate of the cup-shaped barrel Area 118 Plunger tip 119 First socket substrate 120 facing the object to be inspected First socket substrate protrusion 121 Second socket substrate 122 facing the wiring substrate Second socket substrate protrusion 123 Socket substrate 210 Contact probe pin 211 according to the second embodiment Tubular barrel 212 Opening edge portion 310 on the side connected to the wiring board Contact probe pin 311 according to the third embodiment Tubular hollow shaft portion 312 Lid member 410 Fourth Working on the examples Contact probe pin 411 Second plunger 412 Tubular hollow shaft portion 413 Plunger 510 Plunger 511 according to a modification of the first embodiment 512 Tip member 512 Shaft member 513 Ring-shaped member 514 Welded portion 520 First embodiment Another plunger 521 according to the modification A member for front end 522 A shaft member 523 A ring-shaped member 524 A welded portion

Claims (15)

A conductive barrel having a hollow portion with an opening in at least one of the sides;
A conductive plunger slidably disposed in electrical contact with the inner surface of the barrel;
A spring that is disposed so as to extend and contract between a protruding portion provided on an outer surface of the plunger other than a sliding region with respect to the barrel and a protruding portion provided on an outer surface of the barrel, including the barrel. A contact probe pin comprising: The protruding portion of the plunger is configured separately from the rod-shaped shaft body portion, and the shaft body portion has an outermost outer diameter of an outer surface of a sliding region with respect to the barrel and an outermost outer diameter of an outer surface other than the sliding region. The contact probe pin according to claim 1, wherein The plunger shaft body portion has an outer surface formed by centerless processing,
The contact probe pin according to claim 2, wherein the protruding portion is formed by fitting a ring-shaped plate into a recess provided on the outer surface. The plunger is
It is composed of a rod-shaped shaft body portion including a sliding region with respect to the barrel, a tip portion that comes into contact with the object to be inspected, and a protruding portion that holds a spring.
The contact probe pin according to claim 1, wherein an outermost peripheral diameter of an outer surface of the tip portion is larger than an outermost peripheral diameter of an outer surface of the shaft body portion. The contact probe pin according to claim 4, wherein the tip portion and the shaft body portion are configured separately. The contact probe pin according to claim 1, wherein the barrel has a cup-like shape with one end closed, and the tubular hollow shaft portion and the closed end are integrally formed. The contact probe pin according to claim 6, wherein the integrally formed hollow shaft portion and the closed end portion are formed of a plating member, and the thickness of the hollow shaft portion is substantially uniform. The integrally configured hollow shaft and closed end are:
The contact probe pin according to claim 7, comprising a member obtained by removing the shaft member from a structure obtained by forming a plating layer on the side surface and one end surface of the rod-shaped shaft member. The barrel has a cup-like shape with one end closed, and has the closed end, a tubular hollow shaft portion, and a protrusion, the closed end and the protrusion The contact probe pin according to claim 1, wherein the contact probe pin is integrally formed. The contact probe pin according to claim 1, wherein the barrel has openings at both ends, and the protruding portion is formed separately from the tubular hollow shaft portion. The contact probe pin according to claim 9 or 10, wherein the tubular hollow shaft portion of the barrel has a substantially uniform thickness and is formed of a plating member. The tubular hollow shaft portion of the barrel is
The contact probe pin of Claim 11 containing the member by which the said shaft member is removed from the structure obtained by forming a plating layer on the side surface of a rod-shaped shaft member. The contact probe pin according to claim 1, wherein an inner surface of the tubular hollow shaft portion of the barrel has a conductive layer made of a material having excellent conductivity. The tubular hollow shaft portion of the barrel is
14. The contact probe pin according to claim 13, comprising a member obtained by removing the shaft member from a structure obtained by sequentially forming the conductive layer and the plating layer on the side surface of the rod-shaped shaft member. The contact probe pin according to claim 13, wherein a lubricating member is dispersed in the conductive layer.

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