JP5131766B2 - Incorrect insertion prevention type Kelvin inspection jig - Google Patents

Description

  The present invention provides an erroneous insertion prevention type Kelvin for inspecting an electronic circuit or the like of an electronic component to be inspected by the Kelvin method by bringing two probes into contact with each terminal (electrode pad) provided on the electronic component to be inspected. The present invention relates to an inspection jig.

  Conventionally, a Kelvin method is known as a method for inspecting an electronic circuit of an electronic component to be inspected such as a semiconductor integrated circuit. In this inspection by the Kelvin method, two probes are brought into contact with each terminal of an electronic component to be inspected, one probe is used for supplying current and the other probe is used for monitoring voltage.

  FIG. 10 shows an example of a conventional Kelvin inspection jig. FIGS. 11A, 11B, and 11C show probes used for this. The probe 10 includes a cylindrical tube 11 made of conductive metal, and a plunger 20 made of conductive metal that is provided at the distal end of the tube 10 so as to slide and protrude in the axial direction and is held so as not to be detached from the tube 11. An abutting member 30 made of conductive metal which is provided on the rear end side of the tube, is slidable and protrudes in the axial direction and is held so as not to be detached from the tube 10, and a plunger 20 provided inside the tube. And a coil spring 31 that elastically contacts the end surface of the abutting member 30 on the inner side of the tube and biases the plunger 20 and the abutting member 30 in a direction protruding from the tube.

  The plunger 20 has a shaft portion 21 that is coaxial (concentric) with the cylindrical tube 11 and is slidable and protrudeable from the distal end of the tube, and a distal end side main body portion 22 on the distal end side.

  FIG. 11B is a plan view of the distal end side body 22, and both side surfaces 23 of the distal end side body 22 are two planes parallel to the axial direction of the tube 11 and the plunger 20. As can be seen from FIGS. 10 and 11B and 11C, the front end surface has a chevron shape having a ridge line 24 that passes through an intermediate position between the two planes (side surface 23) and is inclined with respect to the axial direction. is there. That is, when the distal end surface of the distal end side main body portion 22 defines an imaginary plane α (the ridge line 24 is located) that is inclined with respect to the axial direction and perpendicular to the side surface 23, the ridge line 24 on the imaginary plane α is defined. As shown in the figure, the inclined surfaces 25 and 26 are inclined in opposite directions with respect to the virtual plane α. As can be seen from FIG. 11B, the planar shape of the distal end side main body 22 viewed from the axial direction is point-symmetric with respect to the tube center O (the planar shape is the same even if rotated 180 degrees).

  As shown in FIG. 10, each probe 10 is disposed in a socket 40 made of an insulating material so that a pair of probes 10 contact each electrode pad as a terminal of an electronic component to be inspected. The plunger through-hole 50 on the socket 40 side through which the distal end side main body portion 22 of the plunger 20 penetrates has the same shape as that shown in the plan view of the distal end side main body portion 22 in FIG. It is point symmetric.

  The pair of probes 10 are arranged in the socket 40 so as to be parallel to each other, but in this case, the apex of the main body 22 on the distal end side of the plunger 20 so as to be compatible with a small-sized electrode pad of the electronic component to be inspected. The arrangement is such that P (which is the contact point with respect to the electrode pad at the highest position of the ridge line 24) are closest to each other.

  As known examples of the Kelvin inspection jig, for example, the following Patent Document 1 and Patent Document 2 are known.

JP 2008-45986 A Japanese Patent Laid-Open No. 2005-62100 discloses a current supply probe and a voltage monitoring probe having different structures suitable for applications. Further, Patent Document 2 realizes a lightweight probe for Kelvin inspection, in particular, a flying measuring machine, using a thin part of a metal linear body as a needle part.

  By the way, in the Kelvin inspection jig of FIG. 10, when the probe 10 is inserted into the socket 40 or when the probe is exchanged during the use period, the plunger through hole 50 of the socket 40 is shown as a virtual line F. There is a risk that the plunger 20 may be erroneously inserted in a horizontally reversed state (a state rotated 180 degrees). If there is such an erroneous insertion, the apex P of the plunger distal end side main body portion 22 is detached from the electrode pad to be inspected and cannot be inspected.

  Further, when the plunger 20 is concentrically arranged with respect to the tube 11, it becomes difficult to narrow the interval between the apexes of the plunger 20 because of the structure, and it corresponds to the recent miniaturization of the electrode pad of the electronic component to be inspected. It becomes difficult to do.

  Also in the case of the above-mentioned Patent Document 1, there is no special countermeasure against erroneous insertion of the probe, and it is considered that a problem of erroneous insertion into the probe socket occurs during assembly or replacement. Also, in Patent Document 2, there is a possibility of erroneous insertion when the metal linear body having the needle portion formed on the distal end side main body portion is inserted into the cylinder during assembly.

  The present invention has been made in view of such a situation, and its purpose is to prevent erroneous insertion of the probe into the socket, and to reduce the distance between the apexes of the plungers of the paired probes. Accordingly, an object of the present invention is to provide a misinsertion-preventing Kelvin inspection jig that can be applied to a small-sized terminal (electrode pad) of an electronic component to be inspected.

In order to achieve the above object, an erroneous insertion prevention type Kelvin inspection jig according to an aspect of the present invention comprises a pair of probes each having a conductive tube and a conductive plunger provided at one end thereof,
The paired probes are provided in parallel, and an insulating socket having a plunger through-hole through which the distal-end body portion of the plunger passes,
The distal end side main body portion of the plunger in the paired probe is formed at a position eccentric with respect to the axial center of the tube in a direction in which the mutual distance between the distal end side main body portions becomes narrower, It penetrates in a state where it cannot circulate around the hole and cannot be reversed and inserted 180 degrees,
The opposing portions of the plungers are curved surfaces having the same curvature that matches the extended surface of the outer peripheral surface of the tube,
The distal end side main body portion is characterized in that the protruding height decreases from the facing portion side toward the opposite side.

  In the aspect, the plunger is integrally formed with an inner insertion portion that is inserted and fixed to the tube, a flange portion on a distal end side of the inner insertion portion, and the distal end side main body portion on the distal end side of the flange portion. However, the opposed portions of the plungers may be curved surfaces having no step between the outer peripheral surfaces of the tubes.

  In the above aspect, the plunger includes an inner sliding portion that is slidable with respect to an inner peripheral surface of the tube, and a distal-end-side body portion that is provided on the distal end side of the inner sliding portion via a shaft portion. It is formed integrally, and the opposing portion of the distal end side main body portion may be a curved surface having the same curvature that matches the extended surface of the outer peripheral surface of the tube.

  The said aspect WHEREIN: The structure which the said front end side main-body part has two flat surfaces parallel to the said axial direction, and the curved surface which makes the said opposing part may connect the said two flat surfaces.

  In the above aspect, the tip-side main body may have a curved surface or a flat surface having a curvature different from that of the curved surface of the facing portion.

  It should be noted that any combination of the above-described constituent elements, and those obtained by converting the expression of the present invention between methods and systems are also effective as aspects of the present invention.

  According to the erroneous insertion prevention type Kelvin inspection jig according to the present invention, the plungers of the paired probes are eccentric in the direction in which the mutual interval between the plungers becomes narrower with respect to the axial center of the tube of each probe. Because it is formed in this way, it will penetrate through the socket-side plunger through hole without being able to be flipped 180 degrees, and the probe may be inserted incorrectly during assembly or replacement when the probe is installed in the socket. Can be prevented in advance.

  Further, the opposing portions of the plungers are curved surfaces having the same curvature that matches the extended surface of the outer peripheral surface of the tube, and the protrusion height of the main body portion on the distal end side of the plunger from the opposing portion side to the opposite side is increased. By making the shape smaller, the distance between the apexes of the plungers can be shortened, and it is possible to deal with small-sized terminals (electrode pads) of the electronic components to be inspected.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or equivalent component, member, process, etc. which are shown by each drawing, and the overlapping description is abbreviate | omitted suitably. In addition, the embodiments do not limit the invention but are exemplifications, and all features and combinations thereof described in the embodiments are not necessarily essential to the invention.

  A first embodiment of an erroneous insertion prevention type Kelvin inspection jig according to the present invention will be described with reference to FIGS.

  The erroneous insertion prevention type Kelvin inspection jig is provided with a pair of probes 60 per socket (electrode pad) of an electronic component to be inspected in a socket 90 made of an insulating material.

  The probe 60 is provided with a cylindrical tube 61 made of conductive metal, a conductive metal plunger 70 fixed to the tube front end side, and a tube rear end side, and can slide and protrude in the axial direction of the tube 61. The contact member 80 made of conductive metal held so as not to come out of the tube 61, and provided inside the tube as shown in FIG. 3, is elastically contacted with the end surfaces of the plunger 70 and the contact member 80 on the inner side of the tube. And a coil spring 81 that urges the contact member 80 in a direction protruding from the tube 61.

  As shown in the enlarged sectional view of FIG. 4A, the plunger 70 has an inner insertion portion 77 to be inserted inside the distal end side body portion of the tube 61, a flange portion 78 formed on the distal end side, and a flange portion 78. And a distal end side main body portion 72 formed integrally with the distal end side (formed integrally with a conductive metal).

  A constricted portion 77a having a small diameter is formed at an intermediate position of the inner insertion portion 77. After the inner insertion portion 77 is fitted into the tube 61, the outer peripheral portion of the tube 61 corresponding to the inner insertion portion 77 is squeezed to reduce the diameter. By forming the convex portion 62 on the inner peripheral side of the tube 61, the convex portion 62 is fixed and held on the tube 61 so that the convex portion 62 engages with the constricted portion 77a and the plunger 70 does not fall off the tube 61. .

  The flange portion 78 has an outer peripheral surface coinciding with the outer peripheral surface of the tube 61 tip side main body portion. If the outer periphery of the tube 61 is cylindrical, it is a disc having the same diameter and is arranged concentrically with the tube 61.

  The distal end side main body portion 72 standing on the flange portion 78 is formed eccentrically from the axial center O of the tube 61, and both side surfaces 73 of the distal end side main body portion 72 are formed on the tube 61 as shown in FIG. There are two planes parallel to the axial direction. One of the remaining two planes connecting the two planes (side surface 73) is a circular arc surface 79 and the other is a plane 85. The circular arc surface 79 has the same radius of curvature as the flange portion 78 and is a curved surface that is continuous with the outer peripheral surface of the flange portion 78 without a step. As a result, a curved surface having no step is formed over the outer peripheral surface of the upper end portion of the tube 61, the outer peripheral surface of the flange portion 78 of the plunger 70, and the arc surface 79 of the distal end side main body portion 72.

  Further, the distal end surface of the distal end side main body portion 72 of the plunger 70 passes through an intermediate position between the two planes (side surface 73) and can be seen from FIGS. 2, 4A, 4B, and 4C. It is a mountain shape having a ridge line 74 inclined with respect to the direction. That is, when the distal end surface of the distal end side main body 72 defines a virtual plane β (the ridge line 74 is located) that is inclined with respect to the axial direction and perpendicular to the side surface 73, the ridge line 74 on the virtual plane β is defined. As shown, each of the inclined surfaces 75 and 76 is inclined in the opposite direction with respect to the virtual plane β. The apex P of the distal end side main body portion 72 is a point where the ridge line 74 reaches the circular arc surface 79, and the distal end side main body portion 72 has a shape in which the protruding height decreases toward the flat surface 85 on the opposite side. As can be seen from FIG. 4 (B), the planar shape of the distal end side main body portion 72 viewed from the axial direction is in an eccentric position with respect to the tube center O (offset in the direction of the apex P), and is asymmetrical ( The planar shape does not become the same when rotated 180 degrees).

  As shown in FIG. 1, a socket 90 made of an insulating material has a structure in which a retainer 100, a pin block 110, and a pin plate 120 are laminated and integrated, and the intermediate pin block 110 has a probe 60, that is, a tube 61 thereof. Is inserted therethrough, and the probe 60 is slidably inserted in the axial direction thereof. A tube through-hole 111 is formed in the pin plate 120 laminated on the rear end side with respect to the pin block 110, and the abutting member 80 protrudes outward at the rear end position, and the rear of the tube 61. A small diameter portion 122 is formed so that the end side does not come out in the rear end direction. Since the tube 61 is formed shorter than the tube through hole 111, a space 121 that defines the sliding range of the tube 61 in the axial direction is formed in the tube through hole 111. The retainer 100 is formed with a tube through-hole 111 and a plunger through-hole 101 through which the distal end side main body 72 of the plunger 70 penetrates at the distal end side.

  In the state where the contact member 80 is not in contact with the electrode, the probe 60 is actually positioned below the tube through-hole 111 and the space 121 is formed above. In FIG. 1, the probe 60 is shown to be positioned above the tube through-hole 111.

  FIG. 5A shows the arrangement of the plunger through-hole 101 on the retainer 100 side through which the distal end side main body 72 of the pair of plungers 70 penetrates, and the arcuate surface 79 of the paired distal end side main body portion 72 is the opposing portion. Are facing each other. At this time, the interval between the apexes P of the distal end side main body portion 22 is the shortest distance.

  FIG. 5B shows that the tip-side main body 72 does not circulate even when the clearance between the tip-side main body 72 and the plunger through-hole 101 reaches the maximum value due to processing errors.

  FIG. 5C shows that the tip side main body 72 is inverted 180 degrees (in the opposite direction) even when the clearance between the tip side main body 72 and the plunger through-hole 101 becomes the maximum value due to a processing error. Indicates that you cannot do it. The shaded area in the figure is an interference area and does not enter the opposite direction.

  FIG. 6 shows how the probe 60 is inserted into the socket-side retainer 100 during assembly or probe replacement. When the plunger 70 is inserted into the plunger through-hole 101 formed in the retainer 100, the arc surface 79 near the apex P of the plunger 70 is first pressed against the inner periphery of the plunger through-hole 101 and moved in the direction of the arrow while maintaining this state. To do. Thus, the probe 60 is stably inserted so as not to rotate unnecessarily during insertion. At this time, the boundary between the tube through-hole 111 and the plunger through-hole 101 is the same or the plunger through-hole 101 protrudes outward from the tube through-hole 111, so that the plunger 70 is smoothly inserted without being caught by the boundary. be able to.

  FIG. 7 shows a state in which an electronic component to be inspected is inspected using the erroneous insertion prevention type Kelvin inspection jig according to the first embodiment.

  The bottom substrate 130 is disposed on the rear end side of the socket 90, and the contact member 80 of the probe 60 that makes a pair with the electrodes 131 and 132 on the substrate 130 is in elastic contact. In addition, the electronic component 200 to be inspected is pressed onto the inspection object mounting surface 91 of the socket 90. At this time, the coil spring 81 inside the probe 60 is compressed and the protruding amount of the contact member 80 is reduced, so that the distal end side main body portion 72 of the paired plunger 70 has the same terminal ( The electrode pad 201 is elastically contacted and electrically connected. For example, if one electrode 131 of the substrate 130 is a current supply electrode, the probe 60 connected thereto functions as a current supply probe, and if the other electrode 132 is a voltage monitoring electrode, the probe connected thereto. 60 functions as a voltage monitoring probe.

  According to the present embodiment, the following effects can be achieved.

(1) Since the plungers 70 of the paired probes 60 are formed at positions eccentric to the axial center of the tubes 61 of the probes 60 in a direction in which the mutual distance between the plungers becomes narrow, It will penetrate through the plunger through-hole 101 in a state in which it cannot be inverted 180 degrees, and erroneous insertion of the probe 60 (insertion with the left and right reversed) during assembly or replacement when the probe 60 is installed in the socket 90 will occur in advance. Can be prevented.

(2) The opposing portions of the plungers 70 are arc surfaces 79 having no step between the outer peripheral surfaces of the upper portions of the tubes, and the distal end side main body portion 72 of the plunger 70 is located on the opposite side from the arc surface 79 that is the opposing portion. By adopting a shape in which the protrusion height decreases toward the plane 85, the distance between the plunger vertices P can be shortened, and it is possible to cope with a small-sized terminal (electrode pad) of the electronic component to be inspected.

(3) The plunger 70 has a structure in which the inner insertion portion 77, the flange portion 78, and the distal end side main body portion 72 are integrally formed, and the inner insertion portion 77 is fixed to the tube 61. The structure can be simplified as compared with the structure provided to be movable.

(4) The plunger 90 is formed in the socket 90 from the tube through hole 111 to the plunger through hole 101 without any step (strictly, there is a slight step), and the probe 60 is set in the plunger through hole 101 as shown in FIG. Can be inserted smoothly without being caught. Even if a step is generated, the plunger through-hole 101 protrudes to the outer periphery from the tube through-hole 111 as shown in FIG. 5 and is a step in a direction that does not affect the insertion.

  A second embodiment of the erroneous insertion prevention type Kelvin inspection jig according to the present invention will be described with reference to FIGS.

  In the second embodiment, the shape of the plunger tip side main body portion of the probe 10 shown in FIGS. 10 and 11 is eccentric with respect to the axial center of the tube as in the first embodiment. It is said. That is, the probe 140 is a cylindrical tube 11 made of conductive metal, and a conductive metal plunger that is provided on the tip side thereof, is slidable in the axial direction, and is protruded so as not to come out of the tube 11. 150, an abutting member 30 made of conductive metal that is provided on the rear end side of the tube, is slidable and protrudes in the axial direction, and is held so as not to come out of the tube 11, and is provided inside the tube 11. And the coil spring 31 that urges the plunger 150 and the abutting member 30 in a direction protruding from the tube 11 in elastic contact with the end surface of the plunger 150 and the abutting member 30 inside the tube 11.

  As shown in FIG. 9A, the plunger 150 includes an inner sliding portion 158 that is slidable with respect to the inner peripheral surface of the cylindrical tube 11, and a shaft portion 151 that is coaxial (concentric) with the tube 11 and that can protrude from the distal end of the tube. And a distal end side main body portion 152 on the distal end side. The distal end side main body portion 152 is formed eccentrically from the axial center O of the tube 11, and both side surfaces 153 of the distal end side main body portion 152 are two planes parallel to the axial direction of the tube 11 as shown in FIG. The remaining two surfaces that connect the two planes (side surfaces 153) are one of a circular arc surface 159 and the other of which is a plane 165. The circular arc surface 159 has the same radius of curvature as the outer peripheral surface of the tube 11 and matches the extended surface of the outer peripheral surface of the tube 11. The shape of the distal end surface of the distal end side main body 152 and the position of the apex P are the same as those in the first embodiment.

  The pair of probes 140 is disposed in a socket 90 in which a retainer 170 made of an insulating material, a pin block 110, and a pin plate 180 are laminated and integrated in the same manner as in the first embodiment. However, since the plunger 150 can slide with respect to the tube 11 to reduce the protruding amount, the tube 11 of the probe 140 is fixed to the pin block 110.

  Also in the case of the second embodiment, the relationship between the distal end side main body 152 of the plunger 150 and the plunger through-hole 101 on the socket 90 side is the same as that in FIG. Incorrect insertion of the probe 140 (insertion with the left and right reversed) can be prevented in advance.

  The present invention has been described above by taking the embodiment as an example. However, it is understood by those skilled in the art that various modifications can be made to each component and each processing process of the embodiment within the scope of the claims. By the way. Hereinafter, modifications will be described.

  The shape of the surface of the paired probes other than the facing portion of the plunger tip-side main body can be changed as appropriate. For example, in the first embodiment, the curved surface serving as the facing portion is the circular arc surface 79 and the opposite side is the flat surface 85, but instead of the flat surface, it may be formed of a curved surface having a different curvature from the circular arc surface 79.

  In the description of each embodiment, for the sake of convenience of explanation, the case where a pair of probes is disposed with respect to a socket is illustrated. However, it is common that a plurality of pairs of probes are disposed with respect to a socket.

  In each embodiment, the paired probes are symmetrically arranged with the same shape, but the current supply probe has a large diameter (for example, tube diameter: 0.58 mm) and the voltage monitoring probe has a small diameter (for example, tube diameter: 0.3 mm).

It is a longitudinal section showing a 1st embodiment of a mistake insertion prevention type Kelvin inspection jig concerning the present invention. It is a perspective view of the principal part of 1st Embodiment. It is a longitudinal cross-sectional view of the probe used in 1st Embodiment. It is a principal part expansion of the said probe, (A) is a longitudinal cross-sectional view, (B) is a top view, (C) is the partial right view of the front end side main-body part of a plunger. It is a relationship between the plunger through-hole on the socket side and the plunger tip-side main body in the first embodiment, and (A) is a cross-sectional plan view showing the plunger tip-side main body properly disposed in a pair of plunger through-holes. , (B) is a cross-sectional plan view showing that the plunger tip side main body does not circulate even when the clearance is the maximum value, and (C) is an error of the plunger tip side main body in the opposite direction even if the clearance is the maximum value. It is explanatory drawing which shows not inserting. In 1st Embodiment, it is a principal part expanded sectional view explaining the insertion operation of the plunger by the side of a probe to the plunger through-hole by the side of a socket. In 1st Embodiment, it is a longitudinal cross-sectional view in the case of test | inspecting an electronic component to be inspected. It is a longitudinal cross-sectional view which shows 2nd Embodiment of the jig | tool for incorrect insertion prevention type Kelvin inspection which concerns on this invention. It is a probe used by 2nd Embodiment, (A) is a longitudinal cross-sectional view, (B) is a top view, (C) is the partial right view of the front end side main-body part of a plunger. It is a perspective view of the principal part of the conventional kelvin inspection jig. FIGS. 10A and 10B are probes used in the Kelvin inspection jig of FIG. 10, wherein FIG. 10A is a longitudinal sectional view, FIG. 10B is a plan view of a plunger tip-side body portion, and FIG. FIG.

Explanation of symbols

10, 60, 140 Probe 11, 61 Tube 20, 70, 150 Plunger 21, 151 Shaft part 22, 72, 152 Tip side body part 23, 73, 153 Side face 24, 74 Ridge line 25, 26, 75, 76 Inclined face 30 , 80 Contact member 40, 90 Socket 50, 101 Plunger through hole 77 Inner insertion portion 78 Flange portion 79, 159 Arc surface 85 Plane 200 Electronic component to be inspected

Claims (5)

A pair of probes having a conductive tube and a conductive plunger provided at one end thereof;
The paired probes are provided in parallel, and an insulating socket having a plunger through-hole through which the distal-end body portion of the plunger passes,
In the paired probes, the distal end side main body portion of the plunger is formed at a position eccentric with respect to the axial center of the tube in a direction in which the mutual distance between the front end side main body portions becomes narrower, It penetrates in a state where it cannot circulate around the hole and cannot be reversed and inserted 180 degrees,
The opposing portions of the plungers are curved surfaces having the same curvature that matches the extended surface of the outer peripheral surface of the tube,
The misleading prevention type Kelvin inspection jig, wherein the distal end side main body portion has a shape in which a protruding height decreases from the facing portion side toward the opposite side.   2. The erroneous insertion preventing Kelvin inspection jig according to claim 1, wherein the plunger includes an inner insertion portion that is inserted and fixed to the tube, a flange portion on a distal end side of the inner insertion portion, and a distal end of the flange portion. The front-end side main body portion on the side is integrally formed, and the opposing portion of the plunger is a curved surface having no step between the outer peripheral surface of the tube and the erroneous insertion prevention type Kelvin inspection treatment. Ingredients.   2. The erroneous insertion prevention type Kelvin inspection jig according to claim 1, wherein the plunger includes an inner sliding portion slidable with respect to an inner peripheral surface of the tube, and a shaft portion on a distal end side of the inner sliding portion. The distal end side main body portion provided via is integrally formed, and the facing portion of the distal end side main body portion is a curved surface having the same curvature that matches the extended surface of the outer peripheral surface of the tube. Incorrect insertion prevention type Kelvin inspection jig.   4. The erroneous insertion prevention type Kelvin inspection jig according to claim 1, wherein the tip-side main body has two planes parallel to the axial direction, and a curved surface forming the facing portion is the two planes. 5. An error insertion prevention type Kelvin inspection jig.   5. The erroneous insertion prevention type Kelvin inspection jig according to claim 1, wherein the distal-end-side main body portion has a curved surface having a curvature different from a curved surface of the facing portion on a surface opposite to the facing portion. Or, a flat, jig for inspecting misinsertion type Kelvin.

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