WO2015037696A1

WO2015037696A1 - Probe pin and ic socket

Info

Publication number: WO2015037696A1
Application number: PCT/JP2014/074175
Authority: WO
Inventors: 大熊　真史
Original assignee: オーキンスエレクトロニクスカンパニー，リミテッド
Priority date: 2013-09-13
Filing date: 2014-09-12
Publication date: 2015-03-19
Also published as: JP2015108608A

Abstract

Provided is a probe pin that is capable of inspection of an IC having a minute pitch, has a low risk of deformation or disassembly during use or after assembly of the probe pin even if the inner diameter of a coil spring is small, and is provided with: a first mobile member that is a plate-shaped body having an electrode contact section at one end and a first arm section at which a first slit has been formed having an open tip at the other end; a second mobile member that is a plate-shaped body having a substrate contact section at one end and a second arm at which a second slit has been formed of which the tip is not open at the other end; and a coil spring that is sandwiched by the first mobile member and the second mobile member. While the second slit envelops a protruding section of the first slit, the first mobile member and second mobile member are disposed in a manner so as to be perpendicular to each other, a portion of the inner surface of the first slit and a portion of the plate surface of the second slit configure a first sliding contact structure, and a portion of the plate surface of the protruding section of the first slit and a portion of the inner surface of the second slit configure a second sliding contact structure.

Description

Probe pin and IC socket

The present invention relates to a probe pin and an IC socket used for inspection of an IC (Integrated Circuit).

When inspecting an IC having a large number of terminals, an inspection connected to each terminal of the IC and an inspection device (IC tester) for inspecting the IC while suppressing electrical connection between adjacent terminals in the IC. Probe pins are used to electrically connect the electrodes corresponding to the respective terminals on the circuit board.

A typical configuration of the probe pin includes a tubular body that is opened while being partially closed at both ends, a coil spring disposed inside the tubular body, and the partially closed portion that is urged by the coil spring. And two contact members partially protruding from the tubular body in a state of being locked to each other. As another configuration, there is a probe pin constituted by two plate-like contact members obtained by pressing or etching a plate material and a coil spring. Since the tubular body is not necessary, the cost of parts of the probe pin can be reduced.

As a probe pin using such a plate-like contact member, there is a probe pin disclosed in Patent Document 1 or Patent Document 2.

For example, Patent Document 1 proposes a probe pin including an upper contact, a lower contact, and a coil spring. In this probe pin, each of the upper contact and the lower contact includes a slit having an opening, a window-like space, and a pair of hooks at the ends of the slit having the opening. Further, the upper contact and the lower contact are directed in opposite directions and are arranged in directions orthogonal to each other, and are inserted into the coil spring, and the hooks of both contacts are fitted into the window-like space of the other contact, respectively. The upper contact and the lower contact are coupled together. Each of the upper contact and the lower contact has a pair of protrusions, and when coupled to each other, the coil spring is held between the protrusions of both contacts.

Also, Patent Document 2 proposes a probe pin composed of an upper contact, a lower contact, and a coil spring. In this probe pin, the upper contact and the lower contact each have a slit having an opening and a hook-like hook at the end of the slit. Further, the upper contact and the lower contact are directed in opposite directions and are arranged in directions orthogonal to each other, and inserted into the coil spring, and the hooks of both contacts are respectively engaged with the ends of the coil spring. The upper contact and the lower contact are coupled together. Each of the upper contact and the lower contact has a pair of protrusions, and when coupled to each other, the coil spring is held between the protrusions of both contacts.

JP 2008-516398 A JP 2011-232181 A

However, in the probe pin of Patent Document 1, since the upper contact and the lower contact are coupled to each other inside the coil spring, when the inner diameter of the coil spring is reduced, the hook disposed inside the coil spring and the strength of the slit forming the hook are insufficient. After the assembly as the probe pin, the hook may open, and the upper contact and the lower contact may be separated.

Further, in the probe pin of Patent Document 2, the upper contact and the lower contact are each engaged with the coil spring by a claw-like hook, but the two contacts are not coupled to each other. For this reason, if the lengths of the two contacts vary, the longer contact may be detached from the coil spring. Further, in order to securely engage the hook-shaped hook with the end of the coil spring, it is desirable to make the hook-shaped hook larger than the diameter of the coil spring wire. There is a risk of causing a sliding failure inside.

In view of such a technical background, the present invention solves the above problems, and even if the inner diameter of the coil spring is small, there is little risk of disassembly or deformation after assembly of the probe pin or at the time of use. It is an object of the present invention to provide a probe pin that can be used.

A probe pin according to the present invention provided to solve the above-described problems is (1) an electrode contact portion for contacting a measurement target electrode, which is an electrode attached to the measurement target, and a wiring board of the measurement apparatus. A first movable member that is a plate-shaped body having a first contact part at one end and a first arm part formed with a first slit having an open front end at the other end. A second movable member which is a plate-like body having a second arm part at the other end, which has a second contact part which is the other of the electrode contact part and the substrate contact part at one end and a second slit which does not open at the tip. And a coil spring sandwiched between the first movable member and the second movable member and enclosing a part of the first movable member and the second movable member, wherein the first movable member is opposed to the first slit in the first slit. A protrusion provided on a part of the side surface and a first arm; A first locking part that locks with one end of the coil spring in the vicinity of the tip of the part, and the second movable member has a second locking part that locks with the other end of the coil spring in the vicinity of the second contact part. And the second slit provided in the second movable member is disposed so that the first movable member and the second movable member are orthogonal to each other while including the protruding portion of the first slit provided in the first movable member, The inner surface from the edge on the first contact portion side to the protrusion in the first slit, and the edge proximal to the end of the second slit from the end opposite to the second contact portion in the second movable member Up to the plate surface constitutes the first sliding contact structure, and the plate surface of the projecting portion of the first slit and the inner surface of the second slit provided in the second movable member constitute the second sliding contact structure. The first movable member and the second movable member by the first sliding contact structure and the second sliding contact structure Is possible to vary the relative position while maintaining electrical contact.

(2) In the probe pin according to the present invention, the first locking portion includes a first flange portion protruding in the width direction of the plate-like body from the outer surface of the first arm portion, and a first slit in the first arm portion. It is good to comprise so that it may protrude in the end surface by the side of this opening, and at least one part may have a projection part inserted in the internal diameter side of the end of a coil spring.

(3) Further, in the probe pin according to the present invention, the first locking portion protrudes from the end surface of the first arm portion on the opening side of the first slit, and at least a part thereof is on the inner diameter side of one end of the coil spring. The first arm portion may be configured such that the end surface on the opening side of the first slit engages with one end of the coil spring.
(4) In the probe pin according to the present invention, the protrusion has a tapered portion on the outer surface that reduces the width of the protrusion as it approaches the tip, and the tapered portion engages with one end of the coil spring. You may comprise so that at least one part of the protrusion part provided in the 1st slit may block | close.
(5) In the probe pin according to the present invention, the second locking portion has a second flange portion that protrudes in the width direction of the plate-like body in the vicinity of the second contact portion and locks with the other end of the coil spring. May be.
(6) In the probe pin according to the present invention, the first arm portion is formed such that the slit width of the first slit increases toward the opening portion, and the first locking portion elastically deforms the first arm portion. You may comprise so that it may be latched by a coil spring by inserting a projection part into the end of a coil spring, making it deform | transform and closing the said opening part.
(7) In the probe pin according to the present invention, the first contact portion may be an electrode contact portion, and the second contact portion may be a substrate contact portion.
(8) In the probe pin according to the present invention, the first contact portion may be a substrate contact portion, and the second contact portion may be an electrode contact portion.
(9) In the probe pin according to the present invention, the substrate contact portion includes the first contact portion, the electrode contact portion includes the second contact portion and the auxiliary contact portion, and the auxiliary contact portion includes the plate-shaped member. The auxiliary member, which is a part of the member, is configured to be fitted perpendicularly to the second movable member and fixed to the second movable member by an additional slit provided in the second movable member. May be.
(10) In the probe pin according to the present invention, the auxiliary member may include a flange portion protruding in the plate width direction, and the flange portion may be configured to lock the coil spring.
(11) In the probe pin according to the present invention, the auxiliary member includes an auxiliary slit having an opening at the end opposite to the auxiliary contact portion, and the end of the auxiliary member on the opening side of the auxiliary slit is one end of the coil spring. The opening of the auxiliary slit may be closed by being inserted on the inner diameter side.
(12) The present invention provides an IC socket in which the probe pin according to the present invention is held at a position corresponding to an electrode attached to a measurement object by each of a plurality of through holes provided in the housing. provide.

In the present specification, a member made of an insulating rigid body, having a through hole in an array corresponding to the terminal of the IC to be inspected, and a member for holding the probe pin in the through hole is called a housing, An assembly in which the probe pin is held in the housing is called an IC socket.

According to the probe pin according to the present invention, even if the coil spring has a small inner diameter, there is little risk of disassembly or deformation after assembly or use of the probe pin. According to the IC socket of the present invention using such probe pins, it is possible to inspect an IC with a fine pitch.

Fig.1 (a) is sectional drawing in the surface parallel to the plate surface of the plate-shaped body of the 1st movable member 11 of the probe pin 1 which concerns on 1st Embodiment of this invention, FIG.1 (b) is shown in FIG. 3 is a cross-sectional view of a plane perpendicular to the plate surface of the plate-like body of the first movable member 11. FIG. The initial shape of the 1st movable member 11 obtained by processing a board | plate material is shown. The procedure for assembling the probe pin while closing the opening of the slit is shown. The probe pin 1 which concerns on 1st Embodiment of this invention shows the example which provided the taper part 117 in the projection part 115 of the 1st movable member 11. FIG. It is sectional drawing which shows the state in which the IC socket 2 holding the probe pin 1 which concerns on 1st Embodiment of this invention was mounted in the board | substrate 1000 for a test | inspection. It is sectional drawing which shows the state which IC socket 2 is test | inspecting IC2000 which is a measuring object. Fig.7 (a) is sectional drawing in the surface parallel to the plate | board surface of the plate-shaped body of the 1st movable member 31 of the probe pin 3 which concerns on 2nd Embodiment of this invention, FIG.7 (b) is shown in FIG. 4 is a cross-sectional view of a plane perpendicular to the plate surface of the plate-like body of the first movable member 31. FIG. Fig.8 (a) is sectional drawing in the surface parallel to the plate | board surface of the plate-shaped body of the 1st movable member 41 of the probe pin 4 which concerns on 3rd Embodiment of this invention, FIG.8 (b) is shown in FIG. 4 is a cross-sectional view of a plane perpendicular to the plate surface of the plate-like body of the first movable member 41. FIG. Fig.9 (a) is sectional drawing in the surface parallel to the plate | board surface of the plate-shaped body of the 1st movable member 51 of the probe pin 5 which concerns on 4th Embodiment of this invention, FIG.9 (b), 4 is a cross-sectional view of a plane perpendicular to the plate surface of the plate-like body of the first movable member 51. FIG. FIG. 10A shows a probe pin according to the third embodiment in which the second contact portion 421 is a one-point contact and the auxiliary contact portion 441 is not in contact with an electrode attached to an IC. It is sectional drawing in the surface parallel to the plate surface of the plate-shaped body of 1 movable member, and FIG.10 (b) is sectional drawing in the surface perpendicular | vertical to the plate surface of the plate-shaped body of 1st movable member.

Hereinafter, probe pins and IC sockets according to the present invention will be described with reference to the drawings.

[First Embodiment]
Fig.1 (a) is sectional drawing in the surface parallel to the plate surface of the plate-shaped body of the 1st movable member 11 of the probe pin 1 which concerns on 1st Embodiment of this invention, FIG.1 (b) is shown in FIG. 3 is a cross-sectional view of a plane perpendicular to the plate surface of the plate-like body of the first movable member 11. FIG. The probe pin 1 according to the first embodiment of the present invention includes a first movable member 11, a second movable member 12, and a coil spring 13. The first movable member 11 and the second movable member 12 are each made of a plate-like body obtained by processing one plate material. Here, as a means for processing the plate material, press processing, etching processing or the like is assumed.

The first movable member 11 includes an electrode contact portion 111 for making contact with an electrode (also referred to as a terminal in the present specification) attached to an IC that is a measurement object at one end. Further, the first movable member 11 includes a first arm portion 116 in which a first slit 112 having an opening at the tip is formed at the other end portion. A protrusion of a predetermined length (in this specification, “length” means a length in the sliding direction of the probe pin) is formed on a part of the inner surface of the first slit 112 facing in parallel. 113 is provided. The first movable member 11 includes a first flange portion 114 projecting from the outer surface of the first arm portion 116 in the plate width direction at an end portion on the same side, and an opening side of the first slit 112 in the first arm portion 116. The protrusion part 115 which protrudes from the end surface of this is provided. The first flange portion 114 and the protruding portion 115 function as a first locking portion that locks with one end of the coil spring in the vicinity of the tip of the first arm portion 116. At least a part of the protruding portion 115 is inserted into the inner diameter side of the end portion of the coil spring 13 on the first flange portion 114 side. That is, the coil spring 13 includes at least a part of the protrusion 115 of the first movable member 11.

The second movable member 12 includes a substrate contact portion 121 for contacting an inspection substrate 1000 which is a wiring substrate of the measuring device at one end. Further, the second movable member 12 includes a second arm portion 124 in the vicinity of the other end portion, in which a second slit 122 having a window-like length with a leading end not opened is formed. Furthermore, the second movable member 12 includes a second flange portion 123 that protrudes outward in the plate width direction from the outer surface of the plate-like body in the vicinity of the substrate contact portion 121. The second flange portion 123 functions as a second locking portion that locks with the other end of the coil spring 13 in the vicinity of the substrate contact portion 121.

The first movable member 11 and the second movable member 12 are assembled so as to be orthogonal to each other while holding the coil spring 13 by the first flange portion 114 and the second flange portion 123. In the state after assembly, the coil spring 13 contains a part of the second movable member 12. Further, the second slit 122 provided in the second movable member 12 includes the protruding portion 113 of the first slit 112 provided in the first movable member 11.

In the probe pin 1 according to the first embodiment of the present invention arranged and assembled in this way, the inner side from the edge on the electrode contact portion 111 side to the protrusion 113 in the first slit 112 provided in the first movable member 11. The side surface and the plate surface (surface in the plate width direction) from the end of the second movable member 12 opposite to the substrate contact portion 121 to the edge of the second slit 122 have one sliding contact structure (first slide). Dynamic contact structure). Further, the plate surface of the protruding portion 113 in the first slit 112 provided in the first movable member 11 and the inner side surface of the second slit 122 provided in the second movable member 12 are another sliding contact structure (second sliding structure). Contact structure). With these sliding contact structures, the first movable member 11 and the second movable member 12 can change their relative positions while maintaining electrical contact. In addition, since the protrusion 113 of the first slit 112 is engaged with the edge of the second slit 122, the movable range of the first movable member 11 and the second movable member 12 is limited to each other. 11 and the second movable member 12 are not easily separated.

Further, in the probe pin 1 according to the first embodiment of the present invention, at least a part of the projection 115 provided on the end surface of the first flange portion 114 is the inner diameter side of the end portion on the first flange portion 114 side of the coil spring 13. Therefore, when the protrusion 115 is engaged with the inner diameter of the end of the coil spring 13, the slit width of the first slit 112 provided in the first movable member 11 is suppressed. As a result, even if the outer diameter of the probe pin 1 is reduced and the plate width of the two first arm portions 116 forming the first slit 112 in the first movable member 11 is reduced, the first slit 2 is provided. The interval between the two protrusions 113 is maintained, and the risk of separation of the first movable member 11 and the second movable member 12 after assembly of the probe pin 1 or during use is avoided.

Then, the manufacturing method of the probe pin 1 which concerns on 1st Embodiment of this invention is demonstrated. In the probe pin 1 according to the first embodiment of the present invention, the protrusion 113 of the first slit 112 included in the first movable member 11 is locked to the second slit 122 included in the second movable member 12. The gap between the two protruding portions 113 facing each other in the first slit 112 is required to be smaller than the plate thickness of the second movable member 12. Also in FIG. 1, the case where the clearance gap between the two protrusion parts 113 is very small is illustrated.

Here, it is assumed that the first movable member 11 and the second movable member 12 have the same thickness from the viewpoint of securing strength within the required size range, but the plate material is etched. Alternatively, when forming opposing protrusions and thin slits by pressing, it is difficult to make the gap smaller than the plate thickness of the plate material to be processed due to processing limitations.

Therefore, as a specific method for manufacturing the probe pin 1 according to the first embodiment of the present invention, the initial shape of the first movable member 11 obtained by etching or pressing a plate material is illustrated in FIG. As described above, the first arm portion 116 that forms the first slit 112 may be formed slightly obliquely. That is, since the first arm portion 116 is formed so that the slit width of the first slit 112 becomes larger toward the opening portion, the gap between the protruding portions 113 is also wider than the plate thickness, and etching processing or press processing is performed. Can be manufactured.

Here, since the material of the first movable member 11 is a thin metal plate that can be etched or pressed, a copper alloy such as phosphor bronze or beryllium copper, or stainless steel is assumed. Has some elasticity. Therefore, the first slit 112 can be opened and closed within the elastic range of the first arm portion 116. FIG. 3 illustrates a procedure for assembling the probe pin while closing the opening of the slit. When assembling the probe pin 1, for example, using tweezers or the like, the first arm portion 116 is elastically deformed to close the first slit 112, and the protrusion 115 formed at the end of the first flange portion 114 is coiled. 13 is inserted into the inner diameter side of the end. Since the protrusion 115 is engaged with the inner diameter of the coil spring 13, it is possible to prevent the slit width from expanding due to the elastic repulsion force of the first arm portion 116.

In the state where the probe pin 1 is assembled, the protrusion 113 provided in the first slit 112 does not have a gap and may be in contact therewith. Specifically, as shown in FIG. 4, a tapered portion 117 is provided on the outer surface of the projecting portion 115 so that the width of the projecting portion 115 decreases toward the tip, and the tapered portion 117 is locked to the inner diameter of the coil spring 13. By doing so, you may contact | adhere the two protrusion parts 113 which oppose. Since there is no gap between the two protruding portions 113 facing each other, the protruding portion 113 can be reliably locked by the second slit 122 provided in the second movable member 12, and the first movable member 11 and the second movable member can be separated. This is preferable because the property is reduced. In the present invention, even when the two projecting portions facing each other in the assembled state of the probe pin are in close contact with each other and there is no gap, the slit having the open end in the state before assembly is “open slit”. It is assumed that the opening of the slit is blocked by the protrusion being locked to the inner diameter of the coil spring.

As described above, the probe pin according to the first embodiment of the present invention can be manufactured within a range of restrictions in etching processing or press processing. Moreover, the manufacturing method of said 1st movable member is applicable also to the probe pin in below-mentioned embodiment.

In the probe pin according to the first embodiment of the present invention shown in FIG. 1, the first movable member 11 is provided for the purpose of suppressing the first movable member 11 from being inclined with respect to the second movable member 12. The protrusion 113 of the first slit 112 has a certain length. The length of the protrusion 113 may be shorter than the length illustrated in the figure. The first movable member 11 has a clearance 115 between the inner surface of the second slit 122 and the plate surface of the protruding portion 113 of the first slit 112, with the protrusion 115 inserted on the inner diameter side of the end of the coil spring 13 as a fulcrum. The first movable member 11 can be inclined in the thickness direction. If this inclination becomes excessive, when the probe pin 1 is used, the electrode contact portion 111 may come into contact with a position shifted from the terminal of the IC to be inspected, and electrical contact with the IC terminal may not be ensured. . With respect to this point, in the probe pin of this embodiment, the range in which the protrusion 113 of the first slit 112 slides can be increased to reduce the tiltable range, and the first time when the probe pin 1 is used. It can suppress that the movable member 11 inclines too much.

FIG. 5 is a cross-sectional view showing a state in which the IC socket 2 holding the probe pin 1 according to the first embodiment of the present invention is placed on the inspection substrate 1000. FIG. 6 is a cross-sectional view showing a state where the IC socket 2 is inspecting an IC 2000 that is a measurement object.

The IC socket 2 holds the probe pin 1 at a position corresponding to an electrode attached to the IC 2000 that is a measurement object, by each of the plurality of through holes 210 provided in the housing 21. Specifically, the housing 21 is divided into two in the main surface inward direction. The through hole 210 has a first opening 211 provided on the surface facing the measurement object IC 2000 and a second opening 212 provided on the surface facing the inspection substrate 1000 so that the diameters of the first opening 211 and the first opening 211 are the same. It is formed smaller than the hole diameter of the hollow part 213 provided between the second opening part 212. A first in-hole step 214 is provided at the boundary between the first opening 211 and the hollow 213, and a second in-hole step 215 is provided at the boundary between the second opening 212 and the hollow 213. In the assembled state of the IC socket 2, the first in-hole step portion 214 is engaged with the first flange portion 114, and the second in-hole step portion 215 is engaged with the second flange portion 123. Thereby, the probe pin 1 is held in the through hole 210.

Here, the cross-sectional shape of the through-hole 210 is such that the hollow portion 213 in which the coil spring 13 is accommodated is circular according to the outer shape of the coil spring 13. Further, the cross-sectional shape of the portion from the first hole step 214 to the first opening 211 where a part of the first arm portion 116 and the second arm portion 124 is accommodated may be formed in a circular shape. In the probe pin 1 according to the present embodiment, since the first movable member 11 is prevented from being excessively inclined in the plate thickness direction, the inclination of the probe pin 1 is not limited by the inner surface of the through hole 210. At the time of use, there is little risk that the electrode contact portion 111 contacts a position shifted from the terminal of the IC to be inspected and electrical contact with the IC terminal cannot be secured. For this reason, it is good for the cross-sectional shape of the part in which the 1st movable member 11 is accommodated in the through-hole 210 to be circular. Thereby, the processing of the housing 21 can be facilitated. In order to further suppress the inclination of the first movable member 11, the cross-sectional shape of the portion in which the first arm portion 116 and the second arm portion 124 are accommodated in the through-hole 210 is circular, and the first shape is changed from there. The cross-sectional shape of the part reaching the first opening 211 may be a rectangle.

The IC socket 2 is designed such that the coil spring 13 included in the probe pin 1 is slightly compressed in a state where it is placed on the inspection substrate 1000, that is, in a state shown in FIG. With this design, when the IC socket 2 is placed on the inspection substrate 1000, contact pressure is always applied to the contact portion between the substrate contact portion 121 and the inspection substrate 1000. It is preferable because dust and the like are prevented from adhering. In general, when the IC socket is placed on the inspection substrate 1000, the compression of the coil spring in this manner is called preloading. Although preloading is preferably performed, it may not be performed.

Further, as described above, the IC socket placed on the inspection substrate 1000 is connected to each terminal of the IC 2000 to be inspected by an external device or a cover attached to the IC socket 2 in the use state shown in FIG. Is fixed so as to press the electrode contact portion 111 of each probe pin 1 of the IC socket by a certain length. In FIG. 6, a portion for fixing the IC 2000 such as an external device or a cover attached to the IC socket is omitted. As shown in FIG. 6, when the IC socket 2 is in use, the coil spring 13 included in the probe pin 1 is compressed to a predetermined length, and the electrode contact between each terminal of the IC 2000 to be inspected and each probe pin 1 of the IC socket 2 A predetermined contact pressure is applied to the contact portion with the portion 111, so that an electrically stable inspection is possible.

[Second Embodiment]
Fig.7 (a) is sectional drawing in the surface parallel to the plate | board surface of the plate-shaped body of the 1st movable member 31 of the probe pin 3 which concerns on 2nd Embodiment of this invention, FIG.7 (b) is shown in FIG. 4 is a cross-sectional view of a plane perpendicular to the plate surface of the plate-like body of the first movable member 31. FIG. The probe pin 3 according to the second embodiment of the present invention is the probe according to the first embodiment described above in that the first movable member 31 includes the substrate contact portion 311 and the second movable member 32 includes the electrode contact portion 321. Different from pin 1.

In the probe pin 3 according to the second embodiment of the present invention shown in FIG. 7, the structure in which the coil spring 33 is sandwiched between the first flange portion 314 and the second flange portion 323 as in the probe pin 1 according to the first embodiment. Have However, in the probe pin 3 of this embodiment, unlike the probe pin 1 according to the first embodiment, the first movable member 31 includes the substrate contact portion 311, and the second movable member 32 includes the electrode contact portion 321.

As shown in FIG. 7, if the second movable member 32 is configured to include the electrode contact portion 321, the entire length of the probe pin 3 becomes long. For example, when the probe pin 3 is used, an excessive lateral load is applied to the electrode contact portion 321. In the case where there is a risk that the second movable member 32 includes the electrode contact portion 321, the strength of the electrode contact portion 321 can be increased. When the first movable member 31 includes the substrate contact portion 311, as shown in FIG. 7, the first flange portion 314 is lengthened, and the end surface of the first flange portion 314 on the substrate contact portion 311 side is set to the first surface. It is desirable to provide it at a position closer to the substrate contact portion 311 than the edge of the slit 312. When the probe pin 3 is used, the movable range of the end portion of the second movable member 32 on the second slit 322 side is within the hollow portion 213 of the IC socket 2 described above, so that the end portion is the through hole of the IC socket. The risk of contact with the inner surface is preferably reduced.

[Third Embodiment]
Fig.8 (a) is sectional drawing in the surface parallel to the plate | board surface of the plate-shaped body of the 1st movable member 41 of the probe pin 4 which concerns on 3rd Embodiment of this invention, FIG.8 (b) is shown in FIG. 4 is a cross-sectional view of a plane perpendicular to the plate surface of the plate-like body of the first movable member 41. FIG.

In the probe pin according to the present invention, in the configuration of the probe pin according to the second embodiment, that is, in the configuration in which the second movable member includes the electrode contact portion, an auxiliary member made of another plate material is fixed to the second movable member. By doing so, the shape of the electrode contact portion may be three-dimensional. In the following, the third embodiment will be described with respect to parts different from the second embodiment. Since the structure, manufacturing method, and the like not particularly described are the same as those of the probe pin 3 according to the second embodiment described above, the description thereof is omitted here.

In the probe pin 4 according to the third embodiment of the present invention, as shown in FIG. 8, the second movable member 42 has one edge near the electrode contact portion 421 and the other edge near the second flange portion 423. A third arm portion 426 defining a window-like third slit 425 having a portion. Furthermore, the probe pin 4 according to the third embodiment of the present invention includes an auxiliary member 44 which is a plate-like body having the following configuration.

The auxiliary member 44 includes an auxiliary contact portion 441 for making contact with an electrode attached to an IC that is a measurement object at one end. Further, the auxiliary member 44 includes a fourth arm portion 443 in which a fourth slit 442 having an opening at the tip thereof is formed at an end portion on the auxiliary contact portion 441 side. Further, the auxiliary member 44 includes a third flange portion 444 that protrudes in the plate width direction from the outer side surface and an auxiliary protrusion portion 445 that protrudes from the end surface of the third flange portion 444 at the other end portion. The third flange portion 444 and the auxiliary projection portion 445 may function as a second locking portion that locks with one end of the coil spring 43. In this case, at least a part of the auxiliary protrusion 445 is inserted into the inner diameter side of the end of the coil spring 43 on the third flange portion 444 side. That is, the coil spring 43 includes at least a part of the auxiliary protrusion 445 of the auxiliary member 44.

The second movable member 42 and the auxiliary member 44 include the second movable member 42 while holding the coil spring 43 between the second flange portion 423 and the third flange portion 444 and the first flange portion 414 of the first movable member 41. And the auxiliary member 44 are assembled so as to be orthogonal to each other. In the state after assembly, the plate surface from the bottom edge of the fourth slit 442 to the end opposite to the auxiliary contact portion 441 in the auxiliary member 44 is included in the third slit 425 of the second movable member 42. Here, the length of the third slit 425 of the second movable member 42 is set to be substantially the same as the length from the bottom edge of the fourth slit 442 to the end opposite to the auxiliary contact portion 441 in the auxiliary member 44. The auxiliary member 44 is fixed to the second movable member 42 so as not to fluctuate in the movable direction of the second movable member 42. Further, the auxiliary member 44 is not easily separated from the coil spring 43 because the auxiliary protrusion 445 provided in the auxiliary member 44 is engaged with the inner diameter of the coil spring 43.

As a specific method of assembling the second movable member 42 and the auxiliary member 44, the auxiliary member 44 is slightly inclined with respect to the second movable member 42, and the fourth slit 442 of the auxiliary member 44 is formed on the second movable member 42. The second movable member 42 and the auxiliary member 44 are inserted parallel to the side edge of the third slit 425 on the electrode contact portion 421, and the fourth slit of the auxiliary member 44 is inserted into the third slit 425 of the second movable member 42. What is necessary is just to include the plate surface from the bottom edge part of 442 to the edge part on the opposite side to the auxiliary contact part 441. Therefore, the slit width of the fourth slit 442 of the auxiliary member 44 is set slightly larger than the plate thickness of the second movable member 42 so that the insertion portion of the second movable member 42 can be inserted slightly obliquely. .

Here, the end face of the second flange part 423 of the second movable member 42 holding the one end of the coil spring 43 and the third flange part 444 of the auxiliary member 44 on the coil spring 43 side are the same in the probe pin 4 illustrated in FIG. The height is set, and both the second flange portion 423 and the third flange portion 444 hold one end of the coil spring 43, but the second movable member 42 and the auxiliary member 44 are fixed so as not to fluctuate with each other. Therefore, any one of the flange portions may hold one end of the coil spring 43. For example, there may be a step in the second flange portion 423 and the third flange portion 444 due to manufacturing tolerances of the second movable member 42 and the auxiliary member 44.

The electrode contact portion 421 included in the second movable member 42 and the auxiliary contact portion 441 included in the auxiliary member 44 are each V-shaped in the probe pin 4 illustrated in FIG. . Here, since the second movable member 43 and the auxiliary member 44 are arranged so as to be orthogonal to each other, the electrode contact portion of the probe pin 4 illustrated in FIG. 8 is formed from four inclined surfaces arranged at an angle of 90 degrees. It is formed. This is the same as the four peaks formed when the electrode contact portion is three-dimensionally processed called a crown cut in the structure of a typical probe pin having the tubular body described above, and is attached to an IC that is a measurement object, for example. In the case where the electrode to be soldered is a solder ball, even if the solder ball is displaced, a plurality of inclined surfaces are in contact with the solder ball, and when the probe pin 4 is used, the electrode attached to the IC and the electrode contact portion of the probe pin 4 Electrical contact with is stable and preferable. Usually, the electrode contact portion is worn by repeated use of the probe pin. When the electrode contact part has four peaks formed by crown cutting, the area of the contact of the electrode contact part gradually increases as the peak part wears due to contact with the electrode attached to the IC, and is constant. When the area is as described above, the electrical contact with the electrode attached to the IC becomes unstable. On the other hand, even if the electrode contact portion of the probe pin 4 according to the third embodiment illustrated in FIG. 8 is worn out at the portion that directly contacts the electrode attached to the IC, the area of the portion is the plate-like body. The cross-sectional area can be maintained, and the electrical contact is not easily destabilized. Therefore, the probe pin 4 according to the third embodiment illustrated in FIG. 8 is also excellent in the durability of the electrode contact portion.

Further, in the probe pin 4 illustrated in FIG. 8, the plate width of the second movable member 42 from the electrode contact portion 421 to the second flange portion 423 and the auxiliary contact portion 441 to the third flange portion 444 of the auxiliary member 44. And the plate width of the second flange portion 423 in the second movable member 42 and the plate width of the third flange portion 444 in the auxiliary member 44 are set to substantially the same plate width. Therefore, the cross-sectional shape in the direction orthogonal to the movable direction of the portion from the electrode contact portion to the flange portion in the probe pin 4 and the cross-sectional shape in the same direction of the flange portion are respectively cross-shaped. Here, as described above, the probe pin 4 is held in the circular through hole of the IC socket when in use, but the movable part constituted by the second movable member 42 and the auxiliary member 44 in the probe pin 4 is Since the cross-sectional shape is a cross shape, it is possible to suppress inclination in any direction within the circular through hole. Therefore, the risk that the movable part is excessively inclined to cause a sliding failure is also reduced.

[Fourth Embodiment]
Fig.9 (a) is sectional drawing in the surface parallel to the plate | board surface of the plate-shaped body of the 1st movable member 51 of the probe pin 5 which concerns on 4th Embodiment of this invention, FIG.9 (b), 4 is a cross-sectional view of a plane perpendicular to the plate surface of the plate-like body of the first movable member 51. FIG.

As described above, the probe pin 4 according to the third embodiment of the present invention enables the second movable member 42 and the auxiliary member 44 to be assembled, so that the slit width of the fourth slit 442 of the auxiliary member 44 is the second movable member. It is set slightly larger than the plate thickness of the member 42. When the probe pin 4 has a small outer diameter and the auxiliary contact portion 441 provided in the auxiliary member 44 has a small plate width, the slit width of the fourth slit 442 is as small as possible in order to maintain the shape of the auxiliary contact portion 441. It is desirable. In such a case, the structure of the auxiliary member is similar to the structure of the first movable member provided in the probe pin 1 according to the first embodiment of the present invention described above, and the second movable member is not inclined. It is good also as a structure which can assemble a member and an auxiliary member. In the following, the fourth embodiment will be described with respect to parts different from the third embodiment. Since the structure, manufacturing method, and the like not particularly described are the same as those of the probe pin 4 according to the third embodiment described above, the description thereof is omitted here.

In the probe pin 5 according to the fourth embodiment of the present invention, as shown in FIG. 9, the second movable member 52 is formed with a fifth slit 527 having an opening at the end on the electrode contact portion 521 side. The fifth arm portion 528 is provided. Further, the second movable member 52 includes a sixth arm portion 5210 that defines a window-like sixth slit 529 in the vicinity of the second flange portion 523.

Furthermore, the probe pin 5 according to the fourth embodiment of the present invention includes an auxiliary member 54 having the following configuration. The auxiliary member 54 includes an auxiliary contact portion 541 for contacting an electrode attached to an IC that is a measurement object at one end portion. Further, the auxiliary member 54 includes a seventh arm portion 547 formed with a seventh slit 546 having an opening at the tip of the other end portion. A part of the inner surface of the seventh slit 546 facing in parallel is provided with

auxiliary protrusions

548a and 548b having a predetermined length. The auxiliary member 54 has a third flange portion 544 protruding in the plate width direction from the outer surface of the seventh arm portion 547 at the end portion on the same side, and an end surface on the opening side of the seventh slit 546 in the seventh arm portion 547. Auxiliary projections 545 projecting from the The third flange portion 544 and the auxiliary projection portion 545 function as a second locking portion that locks with one end of the coil spring 53 in the vicinity of the tip of the seventh arm portion 547. At least a part of the auxiliary protrusion 545 is inserted into the inner diameter side of the end of the coil spring 53 on the third flange 544 side. That is, the coil spring 53 includes at least a part of the auxiliary protrusion 545 of the auxiliary member 54.

The second movable member 52 and the auxiliary member 54 include the second movable member 52 while holding the coil spring 53 between the second flange portion 523 and the third flange portion 544 and the first flange portion 514 of the first movable member 51. And the auxiliary member 54 are assembled so as to be orthogonal to each other. In a state after assembly, the sixth slit 529 provided in the second movable member 52 includes

auxiliary projections

548a and 548b of the seventh slit 546 provided in the auxiliary member 54, and the edge of the seventh slit 546 provided in the auxiliary member 54 The window-shaped slits from the

first protrusions

548 a and 548 b include the plate surface from the bottom edge of the fifth slit 527 to the edge of the sixth slit 529 of the second movable member 52. Here, the length from the edge of the seventh slit 546 provided to the auxiliary member 54 to the

auxiliary protrusions

548 a and 548 b is from the bottom edge of the fifth slit 527 of the second movable member 52 to the edge of the sixth slit 529. The auxiliary member 54 is fixed to the second movable member 52 so as not to fluctuate in the movable direction of the second movable member 52. Further, since the auxiliary protrusions 545 included in the auxiliary member 54 are engaged with the inner diameter of the coil spring 53, the auxiliary member 54 is not easily separated from the coil spring 53.

As a specific method for manufacturing the auxiliary member 54, an auxiliary member obtained by etching or pressing a plate material in the same manner as the first movable member provided in the probe pin 1 according to the first embodiment of the present invention described above. Similarly to the initial shape of the first movable member 11 shown in FIG. 2, the initial shape of 54 may be formed with the seventh arm portion 547 forming the seventh slit 546 slightly inclined. Further, the specific method of assembling the second movable member 52 and the auxiliary member 54 is also the second at the opening of the seventh slit 546 provided in the auxiliary member 54, similarly to the probe pin 1 according to the first embodiment of the present invention. The movable member 52 is inserted from the electrode contact portion 521 side, and then the seventh arm portion 547 is elastically deformed to close the seventh slit 546 and the auxiliary projection portion 545 formed at the end of the third flange portion 544. May be inserted into the inner diameter side of the end of the coil spring 53.

Also, in the probe pin 5 according to the fourth embodiment of the present invention, as the first movable member 11 shown in FIG. The two

auxiliary protrusions

548a and 548b facing each other may be brought into close contact with each other by providing a taper portion in which the width of the protrusion 545 is reduced and the taper portion is locked to the inner diameter of the coil spring 53.

In the probe pin 4 according to the above-described third embodiment or the probe pin 5 according to the fourth embodiment, when the electrode attached to the IC that is the measurement object is a pad-like electrode, the second contact The tip of one of the contact portion and the auxiliary contact portion may be a one-point contact, and the other contact portion may have a shape that does not contact an electrode attached to the IC. As an example, in the probe pin 4 according to the third embodiment, a probe pin having a shape in which the second contact portion 421 is a one-point contact and the auxiliary contact portion 441 is not in contact with an electrode attached to an IC is shown in FIG. In the present invention, even if the contact portion of either the second contact portion or the auxiliary contact portion is not in contact with the electrode attached to the IC, the electrode contact portion is in contact with the second contact portion and the auxiliary contact portion. It is assumed that it is composed of a contact portion, and one end portion is not in contact with the electrode attached to the IC when the probe pin is used.

The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

1, 3, 4, 5 Probe pins 11, 31, 41, 51 First

movable member

12, 32, 42, 52 Second

movable member

13, 33, 43, 53

Coil spring

111, 321, 421, 521

Electrode contact portion

112 , 312 First slit 113

Protruding portion

114, 314, 414, 514 First flange portion 115 Protruding portion 116 First arm portion 117

Tapered portion

121, 311

Substrate contact portion

122, 322 Second slit 123, 323, 423, 523 First 2 flange portion 124 second arm portion 2 IC socket 21 housing 210 through hole 211 first opening portion 212 second opening portion 213 hollow portion 214 first hole step portion 215 second hole step portion 425 third slit 426

third Arm portions

44 and 54

Auxiliary members

441 and 541 Auxiliary contact portion 442 Fourth slit 443 Fourth arm portion 4 4, 544

Third flange portion

445, 545 Auxiliary protrusion 527 Fifth slit 528 Fifth arm portion 529 Sixth slit 5210 Sixth arm portion 546 Seventh slit 547

Seventh arm portions

548a, 548b Auxiliary protrusion 1000 Inspection substrate 2000 IC

Claims

It has a first contact portion at one end which is one of an electrode contact portion for contacting a measurement target electrode which is an electrode attached to the measurement target and a substrate contact portion for contacting a wiring board of the measurement apparatus, A first movable member which is a plate-like body having a first arm portion formed with a first slit having an opening at the other end;
A plate-shaped body having a second contact portion at one end, which is the other of the electrode contact portion and the substrate contact portion, and having a second arm portion at the other end formed with a second slit that does not open at the tip. A movable member;
A probe pin that is sandwiched between the first movable member and the second movable member and includes a coil spring that includes part of the first movable member and the second movable member;
The first movable member is
A protrusion provided on a part of the opposing inner surface of the first slit;
A first locking portion that locks with one end of the coil spring in the vicinity of the tip of the first arm portion;
Have
The second movable member is
A second locking portion that locks with the other end of the coil spring in the vicinity of the second contact portion;
The first movable member and the second movable member are orthogonal to each other while the second slit included in the second movable member includes the protruding portion of the first slit included in the first movable member. Placed in
The inner surface of the first slit from the edge on the first contact portion side to the protruding portion, and the end of the second slit from the end of the second movable member on the side opposite to the second contact portion. The plate surface to the edge proximal to the first sliding contact structure,
The plate surface of the projecting portion in the first slit and the inner surface of the second slit provided in the second movable member constitute a second sliding contact structure,
The first sliding contact structure and the second sliding contact structure allow the first movable member and the second movable member to change relative positions while maintaining electrical contact. Probe pin.
The first locking portion is
A first flange portion projecting in the width direction of the plate-like body from the outer surface of the first arm portion; and projecting from an end surface of the first arm portion on the opening side of the first slit, at least a part of which is the coil spring The probe pin according to claim 1, further comprising: a protrusion inserted into an inner diameter side of one end of the probe pin.
The first locking portion is
The first arm portion has a protrusion that protrudes from an end surface of the first slit on the opening side, and at least a part thereof is inserted into the inner diameter side of one end of the coil spring,
2. The probe pin according to claim 1, wherein an end surface of the first arm portion on an opening side of the first slit is engaged with one end of the coil spring.
The protruding portion has a tapered portion on the outer surface that reduces the width of the protruding portion as it approaches the tip, and the tapered portion engages with one end of the coil spring, whereby the protruding portion is provided in the first slit. The probe pin according to claim 2 or 3, wherein at least a part of the protrusion is closed.
The said 2nd latching | locking part has the 2nd flange part which protrudes in the width direction of a plate-shaped body in the vicinity of the said 2nd contact part, and latches with the other end of the said coil spring. The probe pin according to any one of the above.
The first arm portion is formed such that the slit width of the first slit increases toward the opening,
The first locking portion is locked to the coil spring by inserting the projection into one end of the coil spring while elastically deforming the first arm portion to close the opening. The probe pin according to any one of claims 1 to 5.
The probe pin according to any one of claims 1 to 6, wherein the first contact portion is the electrode contact portion, and the second contact portion is the substrate contact portion.
The probe pin according to any one of claims 1 to 6, wherein the first contact portion is the substrate contact portion, and the second contact portion is the electrode contact portion.
The substrate contact portion comprises the first contact portion, the electrode contact portion comprises the second contact portion and an auxiliary contact portion,
The auxiliary contact portion is a part of an auxiliary member made of a plate-like member,
The auxiliary member is fixed with respect to the second movable member by being fitted perpendicularly to the second movable member by an additional slit provided in the second movable member. The probe pin according to any one of 1 to 6.
10. The probe pin according to claim 9, wherein the auxiliary member includes a flange portion protruding in a plate width direction, and the flange portion engages the coil spring.
The auxiliary member includes an auxiliary slit having an opening at an end opposite to the auxiliary contact portion side,
The end of the auxiliary member opposite to the auxiliary contact portion is inserted into the inner diameter side of one end of the coil spring, and the opening of the auxiliary slit is closed. Probe pin.
An IC socket in which the probe pin according to any one of claims 1 to 11 is held at a position corresponding to an electrode attached to an object to be measured by each of a plurality of through holes provided in the housing.