JP6041565B2 - Inspection jig - Google Patents

Inspection jig Download PDF

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JP6041565B2
JP6041565B2 JP2012165790A JP2012165790A JP6041565B2 JP 6041565 B2 JP6041565 B2 JP 6041565B2 JP 2012165790 A JP2012165790 A JP 2012165790A JP 2012165790 A JP2012165790 A JP 2012165790A JP 6041565 B2 JP6041565 B2 JP 6041565B2
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plunger
contact
end side
inspection jig
insulating support
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JP2014025789A (en
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山本　次男
次男 山本
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Yokowo Co Ltd
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Yokowo Co Ltd
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Priority to JP2012165790A priority Critical patent/JP6041565B2/en
Priority to PCT/JP2013/069665 priority patent/WO2014017402A1/en
Priority to TW102126397A priority patent/TWI596345B/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
    • H01R13/2421—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means using coil springs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R2201/00—Connectors or connections adapted for particular applications
    • H01R2201/20—Connectors or connections adapted for particular applications for testing or measuring purposes

Description

本発明は、例えば半導体集積回路等の被測定デバイスの検査に使用する検査治具に関する。 The present invention is, for example, inspection jig again and again relates to use inspection of the device under test such as a semiconductor integrated circuit.

半導体集積回路等の検査対象物の検査を行う場合において、検査対象物と測定器側の検査用基板とを電気的に接続するために、コンタクトプローブが一般的に使用される。   When an inspection object such as a semiconductor integrated circuit is inspected, a contact probe is generally used to electrically connect the inspection object and an inspection substrate on the measuring instrument side.

図１５は、従来のコンタクトプローブ８００を絶縁支持体８３１で支持した検査治具９００の正断面図であり、（Ａ）は待機状態（スプリング開放状態）、（Ｂ）はケルビン測定状態（スプリング圧縮状態）を示す。なお、本図において、各コンタクトプローブ８００の第１プランジャー８０１及び第２プランジャー８０２は、非断面で示している。   15A and 15B are front sectional views of an inspection jig 900 in which a conventional contact probe 800 is supported by an insulating support 831. FIG. 15A is a standby state (spring release state), and FIG. 15B is a Kelvin measurement state (spring compression). Status). In the drawing, the first plunger 801 and the second plunger 802 of each contact probe 800 are shown in a non-sectional view.

本図に示す検査治具９００は、ケルビン測定用である。ケルビン測定とは、電流供給用プローブ及び電圧監視用プローブを検査対象物５の電極、例えば電極バンプ５ａに当接させて電気的特性を測定するものである（必要に応じて下記特許文献１又は２参照）。検査治具９００では、相互に同一構成の２本のコンタクトプローブ８００の一方を電流供給用プローブ、他方を電圧監視用プローブとする。   The inspection jig 900 shown in this figure is for Kelvin measurement. Kelvin measurement is to measure electrical characteristics by bringing a current supply probe and a voltage monitoring probe into contact with an electrode of an inspection object 5, for example, an electrode bump 5a (as described below, Patent Document 1 or 2). In the inspection jig 900, one of two contact probes 800 having the same configuration is used as a current supply probe, and the other is used as a voltage monitoring probe.

各コンタクトプローブ８００は、第１プランジャー８０１と、第２プランジャー８０２と、スプリング８０３と、チューブ８０４とを備える。第１プランジャー８０１は検査対象物５との接続部品であり、第２プランジャー８０２は検査用基板６（図示しない測定機器に接続される）との接続部品である。第１プランジャー８０１のフランジ部８１２は、先端側円柱部８２４よりも大径の円板形状であって、図１５（Ａ）に示す状態でのコンタクトプローブ８００の抜止めのため及び先端側円柱部８２４の突出長を揃えるために設けられる。先端側円柱部８２４の先端面は、分割山形状（ここでは８分割）であり、外周に中心から等角度間隔で山の頂点が存在する。   Each contact probe 800 includes a first plunger 801, a second plunger 802, a spring 803, and a tube 804. The first plunger 801 is a connection part to the inspection object 5, and the second plunger 802 is a connection part to the inspection substrate 6 (connected to a measuring device (not shown)). The flange portion 812 of the first plunger 801 has a disk shape larger in diameter than the distal end side cylindrical portion 824, and is used for retaining the contact probe 800 in the state shown in FIG. Provided to align the protruding length of the portion 824. The distal end surface of the distal end side cylindrical portion 824 has a divided mountain shape (in this case, divided into 8), and apexes of the mountain exist on the outer periphery at equal angular intervals from the center.

図１５に示すコンタクトプローブ８００では、フランジ部８１２が隣のコンタクトプローブ８００側に出っ張るため、隣り合うコンタクトプローブ８００の先端側円柱部８２４同士を近づけて配置することができない。このため、以下に説明するコンタクトピッチを小さくすることができない。   In the contact probe 800 shown in FIG. 15, the flange portion 812 protrudes toward the adjacent contact probe 800, and therefore the tip side cylindrical portions 824 of the adjacent contact probes 800 cannot be placed close to each other. For this reason, the contact pitch described below cannot be reduced.

図１６（Ａ）は、図１５（Ｂ）のA-A'矢視図である。図１６（Ｂ）は、図１５（Ｂ）のB-B'断面図である。図１７は、図１５の第１プランジャー８０１の先端周辺部拡大図である。これらの図を参照し、隣り合うコンタクトプローブ８００のコンタクトピッチＰ１について説明する。   FIG. 16A is a view taken along arrow AA ′ of FIG. FIG. 16B is a BB ′ cross-sectional view of FIG. FIG. 17 is an enlarged view of the periphery of the distal end of the first plunger 801 of FIG. With reference to these drawings, the contact pitch P1 of the adjacent contact probes 800 will be described.

コンタクトピッチＰ１は、次式で示される。
Ｐ１＝Ｅ＋（Ｆ×２）＋（Ｇ×２）＋（Ｈ×２） …式１
Ｅ：絶縁支持体８３１の最小肉厚
Ｆ：絶縁支持体８３１とフランジ部８１２の側面との隙間
Ｇ：フランジ部８１２と先端側円柱部８２４との半径差
Ｈ：先端側円柱部８２４の側面（隣の先端側円柱部８２４と最も距離が近い側面）から先端面の山の頂点までの距離。※距離は、隣り合うコンタクトプローブ８００同士を結ぶ方向に沿う距離である。先端側円柱部８２４の回転角度次第ではゼロになることもあるが、ここでは最大距離（図１６（Ａ）の状態）とする。 The contact pitch P1 is expressed by the following equation.
P1 = E + (F × 2) + (G × 2) + (H × 2) Equation 1
E: Minimum thickness of the insulating support 831 F: Gap between the insulating support 831 and the side surface of the flange portion 812 G: Radial difference between the flange portion 812 and the tip side cylindrical portion 824 H: Side surface of the tip side cylindrical portion 824 ( The distance from the adjacent tip side cylindrical part 824 to the apex of the peak on the tip surface. * The distance is a distance along the direction connecting adjacent contact probes 800. Although it may become zero depending on the rotation angle of the distal end side cylindrical part 824, it is set to the maximum distance (state of FIG. 16A) here.

上記のとおり、フランジ部８１２の出っ張りは、コンタクトピッチＰ１に直接影響しており、狭ピッチ化の妨げとなっている。なお、上記の長さＥ〜ＨのうちＥとＦは、設計上ゼロにすることは不可能である（これ以上小さくできない下限値が存在する）。   As described above, the protrusion of the flange portion 812 directly affects the contact pitch P1 and hinders narrowing of the pitch. Of the above lengths E to H, E and F cannot be set to zero by design (there is a lower limit value that cannot be further reduced).

特開２００８−４５９８６号公報JP 2008-45986 A 特開２０１０−３８８３７号公報JP 2010-38837 A

本出願人は既に、特願2011-7332号において、従来と比較してコンタクトピッチを狭めることの可能なコンタクトプローブを提案している（図１８〜図２０）。このコンタクトプローブは、フランジ部７１４を非円柱形として隣接するコンタクトプローブ側に出っ張らないようにすることで、隣接するコンタクトプローブの先端側円柱部７１９同士の距離を狭めている。また、フランジ部７１４の回り止め効果を利用して、隣接するコンタクトプローブの先端側円柱部７１９の接触部７１９ａを山の頂点同士が最短距離となるような角度に保持している。これらの工夫により、次式に示すコンタクトピッチＰ２が実現されている。
Ｐ２＝Ｅ＋（Ｆ×２） …式２
Ｅ：絶縁支持体７３１の最小肉厚
Ｆ：絶縁支持体７３１と先端側円柱部７１９の側面との隙間 In the Japanese Patent Application No. 2011-7332, the present applicant has already proposed a contact probe capable of narrowing the contact pitch as compared with the prior art (FIGS. 18 to 20). In this contact probe, the flange portion 714 has a non-cylindrical shape so that it does not protrude to the adjacent contact probe side, thereby reducing the distance between the tip side cylindrical portions 719 of the adjacent contact probes. Further, by utilizing the anti-rotation effect of the flange portion 714, the contact portion 719a of the tip side cylindrical portion 719 of the adjacent contact probe is held at an angle such that the peaks are at the shortest distance. With these ideas, a contact pitch P2 represented by the following equation is realized.
P2 = E + (F × 2) ... Formula 2
E: Minimum thickness of the insulating support 731 F: Clearance between the insulating support 731 and the side surface of the distal end side cylindrical portion 719

式２で示すコンタクトピッチＰ２は、式１で示した従来のコンタクトピッチＰ１よりもΔＰ＝（Ｇ×２）＋（Ｈ×２）の分だけ狭くなっている。ここで、上述のとおり長さＥとＦは所定の下限値より小さくすることができないため、さらなる狭ピッチ化のためには、別の観点からの工夫が必要となる。   The contact pitch P2 shown in Formula 2 is narrower by ΔP = (G × 2) + (H × 2) than the conventional contact pitch P1 shown in Formula 1. Here, as described above, the lengths E and F cannot be made smaller than a predetermined lower limit value, and thus a device from another viewpoint is necessary for further narrowing the pitch.

本発明はこうした状況を認識してなされたものであり、その目的は、従来と比較してコンタクトピッチを狭める新たな工夫を施した検査治具を提供することにある。 The present invention has been made in view of such a situation, and an object of the present invention is to provide an inspection jig having a new contrivance for narrowing the contact pitch as compared with the prior art.

本発明のある態様は、検査治具である。この検査治具は、
複数のコンタクトプローブと、前記複数のコンタクトプローブを並列に支持する絶縁支持体とを備え、
各々のコンタクトプローブは、一方が検査対象物との接続用で他方が検査用基板との接続用の第１及び第２プランジャーと、前記第１及び第２プランジャーを互いに離れる方向に付勢するスプリングとを有し、
前記絶縁支持体は、前記複数のコンタクトプローブがそれぞれ内側に延在する複数の貫通孔部を有し、
各々の貫通孔部は、各々のコンタクトプローブの第１プランジャーの先端部を摺動自在にガイドするガイド孔部を含み、
隣り合う所定の２つのガイド孔部の間の壁部に前記第１プランジャーの前記先端部の外径よりも小さい幅で前記第１プランジャーの長さ方向に延びる連結部が設けられて前記２つのガイド孔部が相互に連通し、
前記連結部は、隣り合う前記第１プランジャーの前記先端部が互いに接触しない幅であり、
前記２つのガイド孔部を含む２つの貫通孔部の内側にそれぞれ延在する２つのコンタクトプローブは、各々の第１プランジャーの前記先端部において互いに最も近接し、前記先端部が検査対象物又は検査用基板との接触部を有する。 One embodiment of the present invention is an inspection jig. This inspection jig is
A plurality of contact probes; and an insulating support that supports the plurality of contact probes in parallel.
Each contact probe biases the first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate, and the first and second plungers in a direction away from each other. And a spring
The insulating support has a plurality of through-hole portions in which the plurality of contact probes respectively extend inward,
Each through hole includes a guide hole that slidably guides the tip of the first plunger of each contact probe,
A connecting portion extending in the length direction of the first plunger with a width smaller than the outer diameter of the tip end portion of the first plunger is provided on a wall portion between two adjacent adjacent guide hole portions. Two guide holes communicate with each other ,
The connecting portion has a width that the tip portions of the adjacent first plungers do not contact each other.
Two contact probes respectively extending inside two through-hole portions including the two guide hole portions are closest to each other at the tip portion of each first plunger, and the tip portion is an object to be inspected or that having a contact portion between the testing board.

前記２つのガイド孔部は互いに重ならない範囲で近接していてもよい。   The two guide holes may be close to each other as long as they do not overlap each other.

前記連結部の内面が丸穴の側面の一部であってもよい。   The inner surface of the connecting portion may be a part of the side surface of the round hole.

前記絶縁支持体は、前記ガイド孔部が形成された第１の絶縁支持体と、各々のガイド孔部に軸方向から連通して各々のコンタクトプローブの一部を収納する収納孔部が形成された第２の絶縁支持体とを組み合わせたものであってもよい。   The insulating support is formed with a first insulating support having the guide hole formed therein, and a storage hole for communicating with each guide hole from the axial direction and storing a part of each contact probe. A combination with the second insulating support may also be used.

なお、以上の構成要素の任意の組合せ、本発明の表現をシステムなどの間で変換したものもまた、本発明の態様として有効である。   It should be noted that any combination of the above-described constituent elements, or a conversion of the expression of the present invention between systems or the like is also effective as an aspect of the present invention.

本発明によれば、従来と比較してコンタクトピッチを狭める新たな工夫を施した検査治具が実現される。 According to the present invention, the inspection jig subjected to a new twist in comparison with conventional narrowing the contact pitch is realized.

本発明の第１の実施の形態に係る検査治具３０の正断面図であり、（Ａ）は待機状態（スプリング開放状態）、（Ｂ）はケルビン測定状態（スプリング圧縮状態）。It is a front sectional view of inspection jig 30 concerning a 1st embodiment of the present invention, (A) is a standby state (spring release state), and (B) is a Kelvin measurement state (spring compression state). 図１（Ａ）のH-H'断面図（スプリング開放状態）。HH 'sectional drawing of FIG. 1 (A) (spring open state). （Ａ）は、図１（Ｂ）のG-G'矢視図。（Ｂ）は、図１（Ｂ）のJ-J'断面図。（Ｃ）は、第１プランジャー１を先端方向から見た図。(A) is a GG 'arrow line view of FIG. 1 (B). (B) is JJ 'sectional drawing of FIG. 1 (B). (C) is the figure which looked at the 1st plunger 1 from the front-end | tip direction. 図１の第１プランジャー１の先端周辺部拡大図。FIG. 2 is an enlarged view of the periphery of the tip of the first plunger 1 of FIG. 1. 図３（Ａ）を寸法説明用に拡大した拡大図。The enlarged view which expanded FIG. 3 (A) for dimension description. 図５において隣り合う先端側円柱部１９同士が最も接近した場合の状態説明図。FIG. 6 is an explanatory diagram of a state when adjacent tip side cylindrical portions 19 in FIG. 5 are closest to each other. 図５におけるより詳細な寸法説明用拡大図。FIG. 6 is an enlarged view for explaining more detailed dimensions in FIG. 5. 絶縁支持体３１の第２層３１ｂの形状説明図。The shape explanatory view of the 2nd layer 31b of insulating support 31. 本発明の第２の実施の形態に係る検査治具で用いる絶縁支持体３１の第１層３１ａをＺ軸方向から見た図。The figure which looked at the 1st layer 31a of the insulating support body 31 used with the test jig | tool which concerns on the 2nd Embodiment of this invention from the Z-axis direction. 本発明の第３の実施の形態に係る検査治具の説明図であり、（Ａ）は待機状態（スプリング開放状態）、（Ｂ）はケルビン測定状態（スプリング圧縮状態）、（Ｃ）は（Ｂ）のK-K'断面図。It is explanatory drawing of the test | inspection jig | tool which concerns on the 3rd Embodiment of this invention, (A) is a standby state (spring release state), (B) is a Kelvin measurement state (spring compression state), (C) is ( KK 'sectional drawing of B). 本発明の第４の実施の形態に係る検査治具の説明図であり、（Ａ）は待機状態（スプリング開放状態）、（Ｂ）はケルビン測定状態（スプリング圧縮状態）。It is explanatory drawing of the test | inspection jig | tool which concerns on the 4th Embodiment of this invention, (A) is a standby state (spring release state), (B) is a Kelvin measurement state (spring compression state). （Ａ）は、本発明の第５の実施の形態に係る検査治具における第１プランジャー１の先端周辺部拡大図。（Ｂ）は、第１プランジャー１の先端部側面図。(A) is a front end peripheral part enlarged view of the 1st plunger 1 in the inspection jig concerning a 5th embodiment of the present invention. FIG. 4B is a side view of the distal end portion of the first plunger 1. 本発明の第６の実施の形態に係る検査治具のケルビン測定状態（スプリング圧縮状態）における正断面図。The front sectional view in the Kelvin measurement state (spring compression state) of the inspection jig concerning a 6th embodiment of the present invention. （Ａ）は、図１３のA-A'矢視図。（Ｂ）は、図１３のB-B'断面図。(A) is an AA 'arrow line view of FIG. (B) is BB 'sectional drawing of FIG. 従来のコンタクトプローブ８００を絶縁支持体８３１で支持した検査治具９００の正断面図であり、（Ａ）は待機状態（スプリング開放状態）、（Ｂ）はケルビン測定状態（スプリング圧縮状態）。It is a front sectional view of an inspection jig 900 in which a conventional contact probe 800 is supported by an insulating support 831. (A) is a standby state (spring release state), and (B) is a Kelvin measurement state (spring compression state). （Ａ）は、図１５（Ｂ）のA-A'矢視図。（Ｂ）は、図１５（Ｂ）のB-B'断面図。(A) is an AA 'arrow line view of FIG. 15 (B). (B) is BB 'sectional drawing of FIG. 15 (B). 図１５の第１プランジャー８０１の先端周辺部拡大図。FIG. 16 is an enlarged view of the periphery of the distal end of the first plunger 801 in FIG. 15. 特願2011-7332号の検査治具の先端周辺部拡大図。Enlarged view of the periphery of the tip of the inspection jig of Japanese Patent Application No. 2011-7332. 図１８のC-C'矢視図。CC 'arrow line view of FIG. 図１８のD-D'断面図。DD 'sectional drawing of FIG.

以下、図面を参照しながら本発明の好適な実施の形態を詳述する。なお、各図面に示される同一または同等の構成要素、部材等には同一の符号を付し、適宜重複した説明は省略する。また、実施の形態は発明を限定するものではなく例示であり、実施の形態に記述されるすべての特徴やその組み合わせは必ずしも発明の本質的なものであるとは限らない。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or equivalent component, member, etc. which are shown by each drawing, and the overlapping description is abbreviate | omitted suitably. In addition, the embodiments do not limit the invention but are exemplifications, and all features and combinations thereof described in the embodiments are not necessarily essential to the invention.

図１は、本発明の第１の実施の形態に係る検査治具３０の正断面図であり、（Ａ）は待機状態（スプリング開放状態）、（Ｂ）はケルビン測定状態（スプリング圧縮状態）を示す。図２は、図１（Ａ）のH-H'断面図（スプリング開放状態）である。これらの図において、各コンタクトプローブ１００の第１及び第２プランジャー１,２は、非断面で示している。図３（Ａ）は、図１（Ｂ）のG-G'矢視図である。図３（Ｂ）は、図１（Ｂ）のJ-J'断面図である。図３（Ｃ）は、第１プランジャー１を先端方向から見た図である。図４は、図１の第１プランジャー１の先端周辺部拡大図である。図５は、図３（Ａ）を寸法説明用に拡大した拡大図である。図６は、図５において隣り合う先端側円柱部１９同士が最も接近した場合の状態説明図である。図７は、図５におけるより詳細な寸法説明用拡大図である。   1A and 1B are front sectional views of an inspection jig 30 according to the first embodiment of the present invention, in which FIG. 1A is a standby state (spring release state), and FIG. 1B is a Kelvin measurement state (spring compression state). Indicates. FIG. 2 is a cross-sectional view taken along the line HH ′ of FIG. In these drawings, the first and second plungers 1 and 2 of each contact probe 100 are shown in a non-sectional view. FIG. 3A is a GG ′ arrow view of FIG. FIG. 3B is a cross-sectional view taken along the line JJ ′ of FIG. FIG. 3C is a view of the first plunger 1 as seen from the distal direction. FIG. 4 is an enlarged view of the periphery of the distal end of the first plunger 1 of FIG. FIG. 5 is an enlarged view of FIG. 3A enlarged for explaining the dimensions. FIG. 6 is an explanatory diagram of a state in which the adjacent front end side cylindrical portions 19 in FIG. 5 are closest to each other. FIG. 7 is an enlarged detailed view for explaining dimensions in FIG.

本実施の形態の検査治具３０は、ケルビン測定用であり、相互に同一構成の２本のコンタクトプローブ１００の一方を電流供給用プローブ、他方を電圧監視用プローブとする。コンタクトプローブ１００の軸方向をＺ軸方向、後述のフランジ部１４が突出する方向をＸ軸方向、Ｚ軸方向及びＸ軸方向の双方と垂直な方向をＹ軸方向とする直交３軸（Ｘ軸、Ｙ軸、Ｚ軸）を、図１（Ａ）に示すように定義する。   The inspection jig 30 of this embodiment is for Kelvin measurement, and one of two contact probes 100 having the same configuration is used as a current supply probe and the other as a voltage monitoring probe. Three orthogonal axes (X-axis) in which the axial direction of the contact probe 100 is the Z-axis direction, the direction in which a flange portion 14 described later projects is the X-axis direction, and the direction perpendicular to both the Z-axis direction and the X-axis direction is the Y-axis direction. , Y axis, Z axis) are defined as shown in FIG.

コンタクトプローブ１００は、第１プランジャー１と、第２プランジャー２と、スプリングとしてのコイルスプリング３と、チューブ４とを同軸に備える。第１プランジャー１は、検査対象物５との接続部品である。第２プランジャー２は、検査用基板６との接続部品である。銅又は銅合金等の導電性金属体であるチューブ４は、第１及び第２プランジャー１,２を摺動自在に保持するもので、第１及び第２プランジャー１,２の基端側とコイルスプリング３とを内部に収容する。例えばピアノ線やステンレス線等の一般的な導体金属材質で形成されたコイルスプリング３は、第１及び第２プランジャー１,２を互いに離れる方向に付勢するように第１及び第２プランジャー１,２に対して設けられ、第１及び第２プランジャー１,２に検査対象物５及び検査用基板６との接触力を与える。検査対象物５は、例えば電極が所定間隔で配列された半導体集積回路であり、図示の場合、電極バンプ５ａが所定間隔で配列されたものである。検査用基板６は、測定器側に接続される電極パッド（図示せず）を電極バンプ５ａに対応して所定間隔で有するものである。   The contact probe 100 includes a first plunger 1, a second plunger 2, a coil spring 3 as a spring, and a tube 4 coaxially. The first plunger 1 is a connection part with the inspection object 5. The second plunger 2 is a connection part with the inspection substrate 6. The tube 4 which is a conductive metal body such as copper or a copper alloy slidably holds the first and second plungers 1 and 2, and is proximal to the first and second plungers 1 and 2. And the coil spring 3 are housed inside. For example, a coil spring 3 formed of a general conductive metal material such as a piano wire or a stainless steel wire has a first and second plunger so as to urge the first and second plungers 1 and 2 away from each other. The first and second plungers 1 and 2 are provided with respect to the first and second plungers 1 and 2, and a contact force between the inspection object 5 and the inspection substrate 6 is applied thereto. The inspection object 5 is, for example, a semiconductor integrated circuit in which electrodes are arranged at a predetermined interval, and in the illustrated case, electrode bumps 5a are arranged at a predetermined interval. The inspection substrate 6 has electrode pads (not shown) connected to the measuring instrument side at predetermined intervals corresponding to the electrode bumps 5a.

銅又は銅合金等の導電性金属体である第１プランジャー１は、基端側から順に、基端側円柱部１１と、第１小径部１２と、第２小径部１３と、フランジ部１４と、第３小径部１７と、先端側円柱部１９とを有する。同じく銅又は銅合金等の導電性金属体である第２プランジャー２は、基端側から順に、基端側円柱部２１と、小径部２２と、先端側円柱部２９とを有する。コイルスプリング３は、第１及び第２プランジャー１,２の基端側円柱部１１,２１の端面間に設けられ、各端面に離間方向の付勢力を与える。円筒状のチューブ４は、軸方向の異なる２箇所の中間部側面に、リング状に内側に凹んだ絞り部４０１,４０２を第１及び第２プランジャー１,２の抜止めのために有する。   The first plunger 1, which is a conductive metal body such as copper or copper alloy, has a base end side cylindrical portion 11, a first small diameter portion 12, a second small diameter portion 13, and a flange portion 14 in order from the base end side. And a third small diameter portion 17 and a distal end side cylindrical portion 19. Similarly, the second plunger 2, which is a conductive metal body such as copper or a copper alloy, has a proximal end side cylindrical portion 21, a small diameter portion 22, and a distal end side cylindrical portion 29 in order from the proximal end side. The coil spring 3 is provided between the end surfaces of the base end side cylindrical portions 11 and 21 of the first and second plungers 1 and 2 and applies an urging force in the separating direction to each end surface. The cylindrical tube 4 has ring portions 401 and 402 that are recessed inward in a ring shape on the side surfaces of two intermediate portions with different axial directions to prevent the first and second plungers 1 and 2 from being pulled out.

第１プランジャー１において、基端側円柱部１１は、絞り部４０１の内径よりも大径である。円柱状の第１小径部１２は、絞り部４０１の内径よりも小径である。軸方向について第１小径部１２の存在範囲内に絞り部４０１が位置する。したがって、基端側円柱部１１が絞り部４０１に引っ掛かり、第１プランジャー１はチューブ４からの抜けが防止される。円柱状の第２小径部１３は、絞り部４０１の内径よりも大径であり、常に一部がチューブ４内部に位置する。   In the first plunger 1, the base end side cylindrical portion 11 has a larger diameter than the inner diameter of the throttle portion 401. The columnar first small-diameter portion 12 has a smaller diameter than the inner diameter of the throttle portion 401. The throttle part 401 is located within the existence range of the first small diameter part 12 in the axial direction. Therefore, the base end side cylindrical portion 11 is caught by the throttle portion 401, and the first plunger 1 is prevented from coming off from the tube 4. The columnar second small diameter portion 13 has a larger diameter than the inner diameter of the throttle portion 401, and a part thereof is always located inside the tube 4.

フランジ部１４は、図３（Ｂ）,（Ｃ）に示すように、先端側円柱部１９よりも大径の円板の側面を、軸方向（Ｚ方向）から見て例えば略菱形となるように４面カットした形状である。なお、本図の例では、軸方向から見てフランジ部１４のＸ方向両端の頂点に相当する側面部分１４ａ,１４ｂは、カットされずに円弧面となっている。換言すれば、フランジ部１４は、４つの平面である側面１４１〜１４４を有し、側面１４１〜１４４（及びそれらと同一平面の延長面）で囲まれた領域が軸方向から見て略菱形となる形状である。そして、フランジ部１４は、図１（Ａ）に示すように、Ｘ方向から見ると、先端側円柱部１９よりも幅が狭く、かつ先端側円柱部１９の存在幅内にある、すなわち先端側円柱部１９の側面よりも外側に（軸方向と垂直な方向に）延びない。他方、図２に示すように、Ｙ方向から見ると、先端側円柱部１９よりも幅が広く、かつ先端側円柱部１９の側面よりも外側に（軸方向と垂直な方向に）延びる（突出する）。すなわち、図３（Ｃ）に示すように、フランジ部１４は、軸方向から見て、先端側円柱部１９の側面の一部１９ｂ,１９ｃから外側に延びる一方、当該一部１９ｂ,１９ｃを除く部分からは外側に延びない。なお、図３（Ｃ）に示すように、先端側円柱部１９の側面のうち軸方向から見てフランジ部１４が外側に延びる一部１９ｂ,１９ｃの範囲は、それぞれ軸方向から見て中心角θが９０°以内であるとよい。また、フランジ部１４は、軸方向から見て、中心軸からＸ方向に行くほど幅が狭くなるように延びる（先細に延びる）とよい。   As shown in FIGS. 3B and 3C, the flange portion 14 has, for example, a substantially rhombus shape when the side surface of the disk having a diameter larger than that of the distal end side cylindrical portion 19 is viewed from the axial direction (Z direction). The shape is cut into four sides. In the example of this figure, the side surface portions 14a and 14b corresponding to the apexes at both ends in the X direction of the flange portion 14 as viewed from the axial direction are not cut and are arc surfaces. In other words, the flange portion 14 has side surfaces 141 to 144 that are four planes, and a region surrounded by the side surfaces 141 to 144 (and an extension surface that is the same plane as those) has a substantially rhombus shape when viewed from the axial direction. This is the shape. As shown in FIG. 1 (A), the flange portion 14 is narrower than the distal end side cylindrical portion 19 and within the existing width of the distal end side cylindrical portion 19 when viewed from the X direction. It does not extend outward (in a direction perpendicular to the axial direction) from the side surface of the cylindrical portion 19. On the other hand, as shown in FIG. 2, when viewed from the Y direction, the width is wider than the distal end side cylindrical portion 19 and extends outwardly (in a direction perpendicular to the axial direction) from the side surface of the distal end side cylindrical portion 19. To do). That is, as shown in FIG. 3C, the flange portion 14 extends outward from the side portions 19b and 19c of the side surface of the distal end side cylindrical portion 19 when viewed from the axial direction, but excludes the portions 19b and 19c. It does not extend outward from the part. As shown in FIG. 3C, the range of the portions 19b and 19c in which the flange portion 14 extends outward when viewed from the axial direction on the side surface of the distal end side cylindrical portion 19 is the central angle when viewed from the axial direction. It is preferable that θ is within 90 °. Moreover, the flange part 14 is good to extend so that a width | variety may become narrow, so that it may go to a X direction from a central axis seeing from an axial direction.

円柱状の第３小径部１７は、基端がフランジ部１４の先端側端面と連なる。先端側円柱部１９は、チューブ４の外径よりも大径であり、そのため隣り合う先端側円柱部１９、１９の間隔がチューブ４、４の間隔よりも狭くなっている。先端側円柱部１９の先端は、検査対象物５の電極バンプ５ａと接触する接触部１９ａとなっている。接触部１９ａは、分割山形状（ここでは８分割）であり、外周に中心から等角度間隔（ここでは４５°間隔）で山の頂点が存在する。なお、図３（Ａ）,（Ｃ）では、山の稜線（凸部の稜線）を図示する一方、谷線の図示は省略している。   The columnar third small-diameter portion 17 has a proximal end continuous with the distal end side end surface of the flange portion 14. The distal end side cylindrical portion 19 has a larger diameter than the outer diameter of the tube 4, and therefore the interval between the adjacent distal end side cylindrical portions 19, 19 is narrower than the interval between the tubes 4, 4. The distal end of the distal end side cylindrical portion 19 is a contact portion 19 a that contacts the electrode bump 5 a of the inspection object 5. The contact portion 19a has a divided mountain shape (here, eight divisions), and has apexes at the outer periphery at equiangular intervals (here, 45 ° intervals) from the center. 3A and 3C, the ridge line of the mountain (ridge line of the convex portion) is illustrated, while the illustration of the valley line is omitted.

第２プランジャー２において、基端側円柱部２１は、絞り部４０２の内径よりも大径である。円柱状の小径部２２は、絞り部４０２の内径よりも小径である。軸方向について小径部２２の存在範囲内に絞り部４０２が位置する。したがって、基端側円柱部２１が絞り部４０２に引っ掛かり、第２プランジャー２はチューブ４からの抜けが防止される。先端側円柱部２９は、絞り部４０２の内径よりも大径であり、基端側が部分的にチューブ４内部に位置する。先端側円柱部２９の先端は、検査用基板６の電極パッド（不図示）と接触する接触部２９ａとなっている。接触部２９ａは、例えば円錐形状である。   In the second plunger 2, the base end side cylindrical portion 21 is larger in diameter than the inner diameter of the throttle portion 402. The columnar small diameter portion 22 has a smaller diameter than the inner diameter of the throttle portion 402. The throttle part 402 is located within the existence range of the small diameter part 22 in the axial direction. Therefore, the base end side cylindrical portion 21 is caught by the throttle portion 402, and the second plunger 2 is prevented from coming off from the tube 4. The distal end side cylindrical portion 29 is larger in diameter than the inner diameter of the throttle portion 402, and the proximal end side is partially located inside the tube 4. The distal end of the distal end side cylindrical portion 29 is a contact portion 29 a that comes into contact with an electrode pad (not shown) of the inspection substrate 6. The contact portion 29a has a conical shape, for example.

検査治具３０は、コンタクトプローブ１００を複数本平行に配置するための貫通孔部３２を所定間隔で有する絶縁支持体３１を備え、各貫通孔部３２にコンタクトプローブ１００を挿入配置したものである。具体的には、第１プランジャー１、第２プランジャー２、コイルスプリング３及びチューブ４を一体的に組み立ててコンタクトプローブ１００を構成したものを、絶縁支持体３１の貫通孔部３２に挿入配置する。なお、絶縁支持体３１は、コンタクトプローブ１００を貫通孔部３２内に組み込むために、第１層３１ａ及び第２層３１ｂに分割された構造となっている。   The inspection jig 30 includes an insulating support 31 having through-hole portions 32 at a predetermined interval for arranging a plurality of contact probes 100 in parallel, and the contact probes 100 are inserted and arranged in the respective through-hole portions 32. . Specifically, the first plunger 1, the second plunger 2, the coil spring 3, and the tube 4 that are integrally assembled to constitute the contact probe 100 are inserted and disposed in the through hole portion 32 of the insulating support 31. To do. The insulating support 31 has a structure divided into a first layer 31 a and a second layer 31 b in order to incorporate the contact probe 100 into the through-hole portion 32.

貫通孔部３２の第１層３１ａに形成される第１のガイド孔部３３は、第１プランジャー１の先端側円柱部１９よりも若干大径の丸穴であって第１プランジャー１の先端側円柱部１９を摺動自在に支持する。貫通孔部３２の第２層３１ｂの下端部に形成される第２のガイド孔部３４は、第２プランジャー２の先端側円柱部２９よりも若干大径の丸穴であって第２プランジャー２の先端側円柱部２９を摺動自在に支持する。貫通孔部３２の第２層３１ｂの第２ガイド孔部３４を除く部分に形成される中間孔部３５（収納孔部）は、第１のガイド孔部３３よりも小径で、チューブ４よりも若干大径であるとともに、第１層３１ａとの境界付近（フランジ部１４の可動用のスペース）で図２に示すようにＸ方向に広げられている。第１のガイド孔部３３は、フランジ部１４に係合してコンタクトプローブ１００の抜け出しを規制する。第２のガイド孔部３４は、チューブ４よりも小径であり、コンタクトプローブ１００の一端に係合してチューブ４の抜け出しを規制する。   The first guide hole portion 33 formed in the first layer 31 a of the through hole portion 32 is a round hole having a slightly larger diameter than the distal end side cylindrical portion 19 of the first plunger 1. The front end side cylindrical portion 19 is slidably supported. The second guide hole portion 34 formed at the lower end portion of the second layer 31b of the through hole portion 32 is a round hole having a slightly larger diameter than the distal end side cylindrical portion 29 of the second plunger 2, and is a second plan. The cylindrical part 29 at the front end side of the jar 2 is slidably supported. An intermediate hole portion 35 (housing hole portion) formed in a portion of the second hole 31 excluding the second guide hole portion 34 of the through hole portion 32 is smaller in diameter than the first guide hole portion 33 and is smaller than the tube 4. It has a slightly larger diameter and is widened in the X direction as shown in FIG. 2 near the boundary with the first layer 31a (space for moving the flange portion 14). The first guide hole portion 33 engages with the flange portion 14 to restrict the contact probe 100 from coming off. The second guide hole portion 34 has a smaller diameter than the tube 4 and engages with one end of the contact probe 100 to restrict the tube 4 from coming out.

図１（Ａ）,（Ｂ）、図３（Ａ）及び図４に示すように、１つのバンプ電極５ａに接触するように隣り合う２つの第１プランジャー１、１の先端側円柱部１９、１９をそれぞれ摺動自在に支持する２つの第１のガイド孔部３３、３３（隣り合う２つの第１のガイド孔部３３、３３）の間の壁部３３ａには、連通部としてのスリット３３ｂが設けられている。スリット３３ｂは、第１プランジャー１の先端側円柱部１９の外径よりも小さい幅Ｋ（図３（Ａ））で、第１プランジャー１の長手方向（Ｚ軸方向）に第１のガイド孔部３３の全長に渡って延びる。スリット３３ｂの幅方向（Ｘ軸方向）の中心位置と先端側円柱部１９の同方向の中心位置は好ましくは相互に一致する。スリット３３ｂにより隣り合う２つの第１のガイド孔部３３が相互に連通する。   As shown in FIGS. 1 (A), 1 (B), 3 (A) and 4, the front end side cylindrical portion 19 of two first plungers 1 and 1 adjacent to each other so as to contact one bump electrode 5a. , 19 are slidably supported on the wall 33a between the two first guide hole portions 33, 33 (two adjacent first guide hole portions 33, 33). 33b is provided. The slit 33b has a width K (FIG. 3A) smaller than the outer diameter of the distal end side cylindrical portion 19 of the first plunger 1 and is a first guide in the longitudinal direction (Z-axis direction) of the first plunger 1. It extends over the entire length of the hole 33. The center position in the width direction (X-axis direction) of the slit 33b and the center position in the same direction of the distal end side cylindrical portion 19 preferably coincide with each other. Two adjacent first guide hole portions 33 communicate with each other through the slit 33b.

検査治具３０において、隣り合うコンタクトプローブ１００、１００は、先端側円柱部１９の側面のうち軸方向から見てフランジ部１４が外側に延びない部分（図３（Ｃ）において符号１９ｂ,１９ｃで示す部分以外の部分）同士が対面する。本実施の形態では、隣り合うコンタクトプローブ１００、１００のコンタクトピッチＰ４は、次式で示される（図３（Ａ）、図４及び図５参照）。
Ｐ４＝Ｅ３＋（Ｆ×２） …式３
Ｅ３：スリット３３ｂが無いと仮定した場合の２つの第１のガイド孔部３３、３３の側面間距離
Ｆ：第１のガイド孔部３３と先端側円柱部１９の側面との隙間 In the inspection jig 30, adjacent contact probes 100, 100 are portions of the side surface of the distal end side cylindrical portion 19 where the flange portion 14 does not extend outward when viewed from the axial direction (reference numerals 19 b, 19 c in FIG. 3C). Parts other than the part shown) face each other. In the present embodiment, the contact pitch P4 between adjacent contact probes 100, 100 is expressed by the following equation (see FIGS. 3A, 4 and 5).
P4 = E3 + (F × 2) Equation 3
E3: Distance between the side surfaces of the two first guide hole portions 33, 33 when it is assumed that there is no slit 33b. F: Clearance between the first guide hole portion 33 and the side surface of the tip side cylindrical portion 19

式３のＥ３は、絶縁支持体３１の製造技術上の最小肉厚Ｅ（式１及び式２）よりも小さくすることができるため、本実施の形態のコンタクトピッチＰ４は、式１及び式２に示すコンタクトピッチＰ１及びＰ２よりも狭めることが可能である。ただし、図６に示すように隣り合う先端側円柱部１９、１９同士が最も近接したときにも両者が接触しない（下記のＰ６が正の値を持つ）ことが必要となる。最近接時のピッチＰ６は次式で示される。
Ｐ６＝Ｐ４−Ｆ２×２ …式４
Ｐ４：通常時のコンタクトピッチ（式３）
Ｆ２：第１のガイド孔部３３の中心にある先端側円柱部１９が隣の先端側円柱部１９に最も接近するときの移動距離（図５） Since E3 in Formula 3 can be made smaller than the minimum thickness E (Formula 1 and Formula 2) in the manufacturing technology of the insulating support 31, the contact pitch P4 in the present embodiment is expressed by Formula 1 and Formula 2. The contact pitches P1 and P2 shown in FIG. However, as shown in FIG. 6, even when the adjacent tip side cylindrical portions 19, 19 are closest to each other, it is necessary that they do not come into contact with each other (P6 below has a positive value). The closest pitch P6 is expressed by the following equation.
P6 = P4-F2 × 2 Formula 4
P4: Normal contact pitch (Formula 3)
F2: Distance traveled when the tip-side cylindrical portion 19 at the center of the first guide hole portion 33 is closest to the adjacent tip-side cylindrical portion 19 (FIG. 5).

式４におけるＦ２は、以下の式で求められる（図７も参照）。

Figure 0006041565
Ｒ１：先端側円柱部１９の半径
Ｒ２：第１のガイド孔部３３の半径
Ｋ：スリット３３ｂの幅 F2 in Equation 4 is obtained by the following equation (see also FIG. 7).
Figure 0006041565
 R1: Radius R2 of the front end side cylindrical portion 19: Radius K of the first guide hole portion 33: Width of the slit 33b

式５のＦ２を式４に当てはめると、以下のようになる。すなわち、ＫはＰ６＞０となるように設定される。

Figure 0006041565
When F2 of Formula 5 is applied to Formula 4, it becomes as follows. That is, K is set so that P6> 0.
Figure 0006041565

検査治具３０の製造の流れは次のとおりである。まず、互いに重ならない大径貫通孔（第１のガイド孔部３３に対応）を絶縁体に複数形成し、隣り合う２つの大径貫通孔の双方と部分的に重なる小径貫通孔（スリット３３ｂに対応）を前記２つの大径貫通孔の間に形成して絶縁支持体３１の第１層３１ａを成す。一方、図８に示すように、絶縁支持体３１の第２層３１ｂを成す。図８において、メイン孔部３１１は、図１に示す第１及び第２プランジャー１,２の基端側、コイルスプリング３、チューブ４を収容するものである。メイン孔部３１１のＸ方向両側にメイン孔部３１１と連なって存在する所定深さのフランジ用穴部３１２,３１３は、メイン孔部３１１よりも小径で、フランジ部１４のうち軸方向から見て先端側円柱部１９の側面から外側に延長した部分がＺ方向に移動する空間を確保する。加工順序としては、まずフランジ用穴部３１２,３１３の加工後に、メイン孔部３１１を加工する。続いて、絶縁支持体３１の第２層３１ｂの複数の貫通孔（複数の中間孔部３５とガイド孔部３４）の各々にコンタクトプローブ１００を挿通し、各々のコンタクトプローブ１００のうち絶縁支持体３１の第２層３１ｂから突出した部分が各々の第１のガイド孔部３３を貫通するように絶縁支持体３１の第１層３１ａを第２層３１ｂに組み付ける。   The flow of manufacturing the inspection jig 30 is as follows. First, a plurality of large-diameter through-holes (corresponding to the first guide hole 33) that do not overlap each other are formed in the insulator, and small-diameter through-holes (in the slit 33b) that partially overlap with both adjacent two large-diameter through-holes. The first layer 31a of the insulating support 31 is formed between the two large-diameter through holes. On the other hand, as shown in FIG. 8, the second layer 31b of the insulating support 31 is formed. In FIG. 8, the main hole 311 accommodates the proximal end sides of the first and second plungers 1, 2 shown in FIG. 1, the coil spring 3, and the tube 4. The flange hole portions 312 and 313 having a predetermined depth that are continuous with the main hole portion 311 on both sides in the X direction of the main hole portion 311 are smaller in diameter than the main hole portion 311 and viewed from the axial direction of the flange portion 14. A space where the portion extending outward from the side surface of the front end side cylindrical portion 19 moves in the Z direction is secured. As a processing order, first, after processing the hole portions 312 and 313 for the flange, the main hole portion 311 is processed. Subsequently, the contact probe 100 is inserted into each of the plurality of through holes (the plurality of intermediate hole portions 35 and the guide hole portion 34) of the second layer 31b of the insulating support member 31, and the insulating support member of each contact probe 100 is inserted. The first layer 31a of the insulating support 31 is assembled to the second layer 31b so that the portion of the 31 protruding from the second layer 31b penetrates each first guide hole 33.

検査治具３０を使用して検査を行う場合、検査治具３０は検査用基板６上に位置決め載置され、この結果、コイルスプリング３が所定長だけ縮んで第２プランジャー２の先端側円柱部２９の接触部２９ａが検査用基板６の電極パッドに弾接する。半導体集積回路等の検査対象物５が無い状態では、第１プランジャー１はフランジ部１４が第１のガイド孔部３３で規制されるまで突出方向に移動しており、先端側円柱部１９の突出量は最大となっている。検査対象物５が検査治具３０の絶縁支持体３１に対して所定の間隔で対向配置されることにより、先端側円柱部１９は後退してコイルスプリング３はさらに圧縮され、その結果、先端側円柱部１９は検査対象物５の電極バンプ５ａに弾接する。この状態で検査対象物５の検査が実行される。   When the inspection jig 30 is used for inspection, the inspection jig 30 is positioned and placed on the inspection substrate 6, and as a result, the coil spring 3 is contracted by a predetermined length and the tip side cylinder of the second plunger 2. The contact portion 29 a of the portion 29 is in elastic contact with the electrode pad of the inspection substrate 6. In a state where there is no inspection object 5 such as a semiconductor integrated circuit, the first plunger 1 moves in the protruding direction until the flange portion 14 is regulated by the first guide hole portion 33, and The amount of protrusion is the maximum. By disposing the inspection object 5 so as to face the insulating support 31 of the inspection jig 30 at a predetermined interval, the distal end side cylindrical portion 19 is retracted and the coil spring 3 is further compressed. As a result, the distal end side The cylindrical portion 19 is in elastic contact with the electrode bump 5a of the inspection object 5. In this state, the inspection object 5 is inspected.

本実施の形態によれば、下記の効果を奏することができる。   According to the present embodiment, the following effects can be achieved.

(1) 隣り合う２つの第１のガイド孔部３３の間の壁部３３ａにスリット３３ｂを設けるという新たな工夫により、従来と比較してコンタクトピッチを狭めることが可能となる。 (1) The contact pitch can be reduced as compared with the conventional case by providing a new device in which a slit 33b is provided in the wall 33a between two adjacent first guide hole portions 33.

(2) 隣り合うコンタクトプローブ１００は、先端側円柱部１９の側面のうち軸方向から見てフランジ部１４が外側に延びない部分同士が対面するため、従来の円柱形のフランジの場合と比較してコンタクトピッチを狭めることが可能となる。 (2) Since adjacent contact probes 100 face each other in the side surface of the tip side cylindrical portion 19 where the flange portion 14 does not extend outward when viewed from the axial direction, compared to the case of a conventional cylindrical flange. This makes it possible to narrow the contact pitch.

(3) フランジ部１４が第１プランジャー１の回り止めとなるため、隣り合うコンタクトプローブ１００の先端側円柱部１９の接触部１９ａを、山の頂点同士が最短距離となるような角度に保持できる。このことも、従来と比較してコンタクトピッチを狭める点で有利である。 (3) Since the flange portion 14 prevents the first plunger 1 from rotating, the contact portion 19a of the tip side cylindrical portion 19 of the adjacent contact probe 100 is held at an angle such that the apexes of the peaks are the shortest distance. it can. This is also advantageous in that the contact pitch is narrowed compared to the conventional case.

図９は、本発明の第２の実施の形態に係る検査治具で用いる絶縁支持体３１の第１層３１ａをＺ軸方向から見た図である。本実施の形態の検査治具は、第１の実施の形態のものと比較して、絶縁支持体３１の第１層３１ａにおいてスリット３３ｂの内面が丸穴の側面の一部である点で相違し、その他の点で一致する。スリット３３ｂの内面が丸穴の側面の一部であることにより、他の貫通孔と同様にスリット３３ｂの加工にも一般的な汎用ドリルを使用可能で好ましい。   FIG. 9 is a view of the first layer 31a of the insulating support 31 used in the inspection jig according to the second embodiment of the present invention as seen from the Z-axis direction. The inspection jig of the present embodiment is different from that of the first embodiment in that the inner surface of the slit 33b is a part of the side surface of the round hole in the first layer 31a of the insulating support 31. And match in other respects. Since the inner surface of the slit 33b is a part of the side surface of the round hole, a general general-purpose drill can be used for processing the slit 33b as well as other through holes.

図１０は、本発明の第３の実施の形態に係る検査治具の説明図であり、（Ａ）は待機状態（スプリング開放状態）、（Ｂ）はケルビン測定状態（スプリング圧縮状態）、（Ｃ）は（Ｂ）のK-K'断面図である。本実施の形態の検査治具は、第１の実施の形態のものと比較して、チューブ４を無くした点で相違し、その他の点で一致する。すなわち、コンタクトプローブ３００の第１プランジャー１は、図１等に示す第１の実施の形態の基端側円柱部１１、第１小径部１２、第２小径部１３をチューブ４と略同径の基端側円柱部４１１に置き換え、基端側円柱部４１１の基端側端面の中央部からそれより小径の棒状部４１２を軸方向に突出させた構成である。基端側円柱部４１１の基端側端面の縁部にはコイルスプリング３が当接する。棒状部４１２はコイルスプリング３の内側に延びる。コンタクトプローブ３００の第２プランジャー２は、第１の実施の形態の基端側円柱部２１、小径部２２をチューブ４と略同径の基端側円柱部４２１に置き換え、基端側円柱部４２１の基端側端面の中央部からそれより小径の棒状部４２２を軸方向に突出させた構成である。基端側円柱部４２１の基端側端面の縁部にはコイルスプリング３が当接する。棒状部４２２はコイルスプリング３の内側に延びる。コイルスプリング３は、第１の先端側円柱部１９よりも小径で、基端側円柱部４１１,４２１の基端側端面に離間方向の付勢力を与える。第１プランジャー１、第２プランジャー２およびコイルスプリング３がコンタクトプローブ３００を構成している。複数のコンタクトプローブ３００の配列は、第１の実施の形態と同じでよい。   FIG. 10 is an explanatory diagram of an inspection jig according to a third embodiment of the present invention, where (A) is a standby state (spring release state), (B) is a Kelvin measurement state (spring compression state), ( C) is a cross-sectional view taken along the line KK ′ of FIG. The inspection jig of the present embodiment is different from that of the first embodiment in that the tube 4 is eliminated, and is identical in other points. That is, the first plunger 1 of the contact probe 300 has the base end side cylindrical portion 11, the first small diameter portion 12, and the second small diameter portion 13 of the first embodiment shown in FIG. The base end side cylindrical portion 411 is replaced with a rod-shaped portion 412 having a smaller diameter from the center portion of the base end side end surface of the base end side cylindrical portion 411 in the axial direction. The coil spring 3 abuts on the edge portion of the base end side end surface of the base end side cylindrical portion 411. The rod-like portion 412 extends inside the coil spring 3. The second plunger 2 of the contact probe 300 replaces the proximal-side cylindrical portion 21 and the small-diameter portion 22 of the first embodiment with a proximal-side cylindrical portion 421 having substantially the same diameter as the tube 4, and thus a proximal-side cylindrical portion. In this configuration, a rod-shaped portion 422 having a smaller diameter is protruded in the axial direction from the central portion of the base end side end surface of 421. The coil spring 3 abuts on the edge portion of the base end side end surface of the base end side cylindrical portion 421. The rod-like portion 422 extends inside the coil spring 3. The coil spring 3 has a smaller diameter than the first distal end side cylindrical portion 19 and applies a biasing force in the separating direction to the proximal end surfaces of the proximal end cylindrical portions 411 and 421. The first plunger 1, the second plunger 2, and the coil spring 3 constitute a contact probe 300. The arrangement of the plurality of contact probes 300 may be the same as in the first embodiment.

図１１は、本発明の第４の実施の形態に係る検査治具の説明図であり、（Ａ）は待機状態（スプリング開放状態）、（Ｂ）はケルビン測定状態（スプリング圧縮状態）である。本実施の形態の検査治具は、図１等に示す第１の実施の形態のものと比較して、コンタクトプローブ４００の第１プランジャー１のフランジ部１４が無くなった点で相違し、その他の点で一致する。この場合、第１プランジャー１の上方への抜け防止機能はチューブ４の絞り部４０１が持つことになり、フランジ部１４による抜止めと比較して抜け防止力が弱いものの、例えば検査治具を上下ひっくり返して利用しない製品への適用には問題がない。   11A and 11B are explanatory diagrams of an inspection jig according to the fourth embodiment of the present invention, in which FIG. 11A is a standby state (spring release state), and FIG. 11B is a Kelvin measurement state (spring compression state). . The inspection jig of the present embodiment is different from that of the first embodiment shown in FIG. 1 and the like in that the flange portion 14 of the first plunger 1 of the contact probe 400 is eliminated. Match in terms of. In this case, the throttle portion 401 of the tube 4 has a function to prevent the first plunger 1 from coming off upward, and the ability to prevent the flange from pulling out is weaker than that of the flange portion 14. There is no problem in applying the product upside down and not using it.

図１２（Ａ）は、本発明の第５の実施の形態に係る検査治具における第１プランジャー１の先端周辺部拡大図である。図１２（Ｂ）は、第１プランジャー１の先端部側面図である。本実施の形態の検査治具は、図１等に示す第１の実施の形態のものと比較して、第１プランジャー１の先端側円柱部１９の接触部１９ａが特許文献１と同様に軸方向に対して斜めでさらにこの斜めとは異なる方向で互いに逆向きに傾いた２つの面で切断して切断面の中央部に稜線を設けた形状とされている点で相違し、その他の点で一致する。   FIG. 12A is an enlarged view of the periphery of the distal end of the first plunger 1 in the inspection jig according to the fifth embodiment of the present invention. FIG. 12B is a side view of the distal end portion of the first plunger 1. The inspection jig of the present embodiment is similar to that of the first embodiment shown in FIG. It differs in that it is cut in two planes that are oblique to the axial direction and that are inclined in opposite directions in a direction different from this diagonal, and that has a ridge line at the center of the cut surface. Match on a point.

図１３は、本発明の第６の実施の形態に係る検査治具のケルビン測定状態（スプリング圧縮状態）における正断面図である。図１４（Ａ）は、図１３のA-A'矢視図である。図１４（Ｂ）は、図１３のB-B'断面図である(コイルスプリング省略)。   FIG. 13 is a front sectional view of the inspection jig in the Kelvin measurement state (spring compression state) according to the sixth embodiment of the present invention. FIG. 14A is a view taken in the direction of arrows AA ′ in FIG. FIG. 14B is a cross-sectional view taken along the line BB ′ of FIG. 13 (coil spring omitted).

本実施の形態の検査治具は、図１等に示す第１の実施の形態のものと比較して、第１プランジャー１の先端側円柱部１９が断面半円形の先端側半円柱部１９０に変わっており、それに合わせてガイド孔部３３の形状も丸穴から断面半円形に変わっている。先端側半円柱部１９０の先端は軸方向に対して斜めに切り欠かれている。隣り合う先端側半円柱部１９０は、円弧側同士が向かい合い、且つ、斜めに切り欠かれた傾斜面が互いに背中合わせとなるように配置される。また、スリット３３ｂは絶縁支持体３１の第１層３１ａだけでなく第２層３１ｂにも延びている（隣り合う第１のガイド孔部３３の間だけでなく、隣り合う中間孔部３５の間にも延びている）。   The inspection jig according to the present embodiment has a tip-side semi-cylindrical portion 190 in which the tip-side columnar portion 19 of the first plunger 1 has a semicircular cross section, as compared with the first embodiment shown in FIG. Accordingly, the shape of the guide hole 33 is changed from a round hole to a semicircular cross section. The tip of the tip-side semi-cylindrical portion 190 is cut away obliquely with respect to the axial direction. The adjacent tip-side semi-cylindrical portions 190 are arranged so that the arc sides face each other and the inclined surfaces cut out obliquely are back to back. The slit 33b extends not only to the first layer 31a but also to the second layer 31b of the insulating support 31 (not only between the adjacent first guide hole portions 33 but also between the adjacent intermediate hole portions 35). Also extends).

また、第１プランジャー１の基端側円柱部１１は、先端側半円柱部１９０と同径で先端側半円柱部１９０から基端側に延び、チューブ４を兼ね備えた形状となっている。すなわち、基端側円柱部１１の基端側端面から、所定深さに渡って穴部１９７が形成され、穴部１９７内にコイルスプリング３と第２プランジャー２の基端側円柱部２１が位置する。穴部１９７は、開口側が例えばかしめ加工で小径化されており、つまり第１プランジャー１の基端側円柱部１１の基端がかしめられてかしめ部１１ｄが形成されており、第２プランジャー２の基端側円柱部２１の抜けが防止される。ガイド孔部３４は、第１プランジャー１の基端側円柱部１１よりも小径で、かつ第２プランジャー２の先端側円柱部２９よりも大径である。コイルスプリング３は、第２プランジャー２の基端側円柱部２１の端面と穴部１９７の底面との間に設けられ、各端面に離間方向の付勢力を与える。第１プランジャー１、第２プランジャーおよびコイルスプリング３がコンタクトプローブ５００を構成する。   Further, the base end side cylindrical portion 11 of the first plunger 1 has the same diameter as the front end side semi-cylindrical portion 190, extends from the front end side semi-cylindrical portion 190 to the base end side, and has a shape including the tube 4. That is, a hole 197 is formed over a predetermined depth from the base end side end surface of the base end side cylindrical portion 11, and the base end side cylindrical portion 21 of the coil spring 3 and the second plunger 2 is formed in the hole 197. To position. The hole portion 197 has an opening side that is reduced in diameter by, for example, caulking, that is, the base end of the base end side cylindrical portion 11 of the first plunger 1 is caulked to form a caulking portion 11d, and the second plunger 2 is prevented from coming off the base end side cylindrical portion 21. The guide hole 34 has a smaller diameter than the proximal end side cylindrical portion 11 of the first plunger 1 and a larger diameter than the distal end side cylindrical portion 29 of the second plunger 2. The coil spring 3 is provided between the end surface of the base end side cylindrical portion 21 of the second plunger 2 and the bottom surface of the hole portion 197, and applies an urging force in the separating direction to each end surface. The first plunger 1, the second plunger and the coil spring 3 constitute a contact probe 500.

図１３は、本実施の形態の検査治具を検査用基板６（端子は図示せず）上にセットした状態を示している。検査用基板６を絶縁支持体３１の第２層３１ｂ下面に当接させると、第１プランジャー１の基端側円柱部１１が第１層３１ａに当接したところで上方への移動が阻止されて、コイルスプリング３が圧縮される、これにより、第２プランジャー２は検査用基板６の端子（図示せず）に弾接され、第１プランジャー１は絶縁支持体３１の外側（上方）に向かって付勢されている。   FIG. 13 shows a state in which the inspection jig of the present embodiment is set on the inspection substrate 6 (terminals are not shown). When the inspection substrate 6 is brought into contact with the lower surface of the second layer 31b of the insulating support 31, the upward movement is prevented when the base end side cylindrical portion 11 of the first plunger 1 comes into contact with the first layer 31a. Thus, the coil spring 3 is compressed, whereby the second plunger 2 is elastically contacted with a terminal (not shown) of the inspection substrate 6, and the first plunger 1 is outside (upward) of the insulating support 31. It is urged toward.

本実施の形態では、絶縁支持体３１の第１層３１ａのガイド孔部３３を先端側半円柱部１９０の断面形状に合わせて半円形にすることによって、第１プランジャー１が回ってしまうのを防ぐことができるとともに、第１プランジャー１が絶縁支持体３１の第２層３１ｂから抜けでるのを防止することができる。   In the present embodiment, the first plunger 1 rotates by making the guide hole portion 33 of the first layer 31a of the insulating support 31 semicircular in accordance with the cross-sectional shape of the tip side semicylindrical portion 190. It is possible to prevent the first plunger 1 from coming off from the second layer 31b of the insulating support 31.

以上、実施の形態を例に本発明を説明したが、実施の形態の各構成要素や各処理プロセスには請求項に記載の範囲で種々の変形が可能であることは当業者に理解されるところである。以下、変形例について触れる。   The present invention has been described above by taking the embodiment as an example. However, it is understood by those skilled in the art that various modifications can be made to each component and each processing process of the embodiment within the scope of the claims. By the way. Hereinafter, modifications will be described.

ケルビン測定用の一組のコンタクトプローブは、同一形状でなくてよく、例えば電流供給用のコンタクトプローブを電圧監視用のものよりも大径にしてもよい。   The pair of contact probes for Kelvin measurement need not have the same shape. For example, the contact probe for supplying current may have a larger diameter than that for voltage monitoring.

コンタクトプローブ及びソケットの用途はケルビン測定に限らず、電極バンプ５ａがコンタクトプローブと同数存在するものであってもよい。   The use of the contact probe and the socket is not limited to the Kelvin measurement, and the same number of electrode bumps 5a as the contact probe may exist.

１ 第１プランジャー
２ 第２プランジャー
３ コイルスプリング
４ チューブ
５ 検査対象物
５ａ 電極バンプ
６ 検査用基板
１４ フランジ部
１９,２９ 先端側円柱部
３０ 検査治具
３１ 絶縁支持体
１００ コンタクトプローブ DESCRIPTION OF SYMBOLS 1 1st plunger 2 2nd plunger 3 Coil spring 4 Tube 5 Inspection object 5a Electrode bump 6 Inspection board 14 Flange part 19,29 Tip side cylindrical part 30 Inspection jig 31 Insulation support body 100 Contact probe

Claims (4)

複数のコンタクトプローブと、前記複数のコンタクトプローブを並列に支持する絶縁支持体とを備え、
各々のコンタクトプローブは、一方が検査対象物との接続用で他方が検査用基板との接続用の第１及び第２プランジャーと、前記第１及び第２プランジャーを互いに離れる方向に付勢するスプリングとを有し、
前記絶縁支持体は、前記複数のコンタクトプローブがそれぞれ内側に延在する複数の貫通孔部を有し、
各々の貫通孔部は、各々のコンタクトプローブの第１プランジャーの先端部を摺動自在にガイドするガイド孔部を含み、
隣り合う所定の２つのガイド孔部の間の壁部に前記第１プランジャーの前記先端部の外径よりも小さい幅で前記第１プランジャーの長さ方向に延びる連結部が設けられて前記２つのガイド孔部が相互に連通し、
前記連結部は、隣り合う前記第１プランジャーの前記先端部が互いに接触しない幅であり、
前記２つのガイド孔部を含む２つの貫通孔部の内側にそれぞれ延在する２つのコンタクトプローブは、各々の第１プランジャーの前記先端部において互いに最も近接し、前記先端部が検査対象物又は検査用基板との接触部を有する、検査治具。 A plurality of contact probes; and an insulating support that supports the plurality of contact probes in parallel.
Each contact probe biases the first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate, and the first and second plungers in a direction away from each other. And a spring
The insulating support has a plurality of through-hole portions in which the plurality of contact probes respectively extend inward,
Each through hole includes a guide hole that slidably guides the tip of the first plunger of each contact probe,
A connecting portion extending in the length direction of the first plunger with a width smaller than the outer diameter of the tip end portion of the first plunger is provided on a wall portion between two adjacent adjacent guide hole portions. Two guide holes communicate with each other ,
The connecting portion has a width that the tip portions of the adjacent first plungers do not contact each other.
Two contact probes respectively extending inside two through-hole portions including the two guide hole portions are closest to each other at the tip portion of each first plunger, and the tip portion is an object to be inspected or that having a contact portion between the testing board, the inspection jig. 前記２つのガイド孔部は互いに重ならない範囲で近接している請求項１に記載の検査治具。   The inspection jig according to claim 1, wherein the two guide holes are close to each other without overlapping each other. 前記連結部の内面が丸穴の側面の一部である請求項１又は２に記載の検査治具。   The inspection jig according to claim 1, wherein an inner surface of the connecting portion is a part of a side surface of the round hole. 前記絶縁支持体は、前記ガイド孔部が形成された第１の絶縁支持体と、各々のガイド孔部に軸方向から連通して各々のコンタクトプローブの一部を収納する収納孔部が形成された第２の絶縁支持体とを組み合わせたものである、請求項１から３のいずれか一項に記載の検査治具。   The insulating support is formed with a first insulating support having the guide hole formed therein, and a storage hole for communicating with each guide hole from the axial direction and storing a part of each contact probe. The inspection jig according to any one of claims 1 to 3, wherein the inspection jig is combined with a second insulating support.
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