TW201411141A - Test jig and manufacturing method therefor - Google Patents

Abstract

Provided are a test jig with a novel design for narrowing the contact pitch compared to conventional jigs, and a manufacturing method therefor. A slit (33b) is provided in the wall (33a) between two guide holes (33) (two adjacent guide holes (33)) that support the respective cylindrical tips (19) of two adjacent first plungers (1) so as to slide freely. The slit (33b) has a smaller width than the outer diameter of the cylindrical tips (19) of the first plungers (1) and extends over the entire length of the guide holes (33) in the longitudinal direction of the first plungers (1) (Z-axis direction). The center position of the slit (33b) in the width direction (X-axis direction) and the center positions of the cylindrical tips (19) in the same direction preferably coincide with each other. The two adjacent guide holes (33) communicate with each other through the slit (33b).

Description

Inspection jig and its manufacturing method

The present invention relates to an inspection jig used in inspecting a device to be measured such as a semiconductor integrated circuit, and a method of manufacturing the same.

When inspecting an inspection object such as a semiconductor integrated circuit, a contact probe is generally used in order to electrically connect the inspection object to the inspection substrate on the measuring device side.

Figure 15 is a front cross-sectional view of the inspection jig 900 supporting the conventional contact probe 800 with an insulating support 831; (A) shows a standby state (spring relief state), and (B) shows a four-terminal measurement state ( Spring compression state). In the figure, the first plunger 801 and the second plunger 802 of each contact probe 800 are shown in a non-sectional view.

The inspection jig 900 shown in the figure is for Kelvin measurement. In the four-terminal type measurement, the current supply probe and the voltage monitoring probe are brought into contact with the electrode of the inspection object 5, for example, the electrode bump 5a, and the electrical characteristics are measured (refer to Patent Document 1 or 2 below). . The jig 900 is inspected so that one of the two contact probes 800 having the same configuration is a current supply probe, and the other is a voltage monitoring probe.

Each of the contact probes 800 includes a first plunger 801, a second plunger 802, a spring 803, and a tube 804. The first plunger 801 is a connecting component that is connected to the inspection object 5, and the second plunger 802 is a connecting component that is connected to the inspection substrate 6 (connected to a measuring device (not shown)). The flange portion 812 of the first plunger 801 has a disk shape larger than the distal end side cylindrical portion 824 in order to prevent the contact probe 800 from being loosened in the state shown in Fig. 15(A). The protruding lengths of the front end side cylindrical portions 824 are made uniform. The front end surface of the front end side cylindrical portion 824 is a divided mountain shape (here, eight divisions), and the apex of the mountain exists on the outer circumference from the center at equal angular intervals.

In the contact probe 800 shown in FIG. 15, the flange portion 812 protrudes toward the adjacent contact probe 800 side, so that the distal end side cylindrical portions 824 of the adjacent contact probes 800 cannot be arranged close to each other. Therefore, the link pitch of the following description cannot be reduced.

Fig. 16(A) is an arrow view of A-A' of Fig. 15(B). Fig. 16 (B) is a cross-sectional view taken along line B-B' of Fig. 15 (B). Fig. 17 is an enlarged view of a peripheral portion of the front end of the first plunger 801 of Fig. 15; The connection pitch P1 of the adjacent contact probes 800 will be described with reference to these drawings.

The connection pitch P1 is as shown in the following equation.

P1=E+(F×2)+(G×2)+(H×2)...Form 1

E: minimum wall thickness of the insulating support 831

F: a gap between the insulating support body 831 and the side of the flange portion 812

G: difference in radius between the flange portion 812 and the front end side cylindrical portion 824

H: the distance from the side surface of the front end side cylindrical portion 824 (the side closest to the adjacent front end side cylindrical portion 824) to the apex of the mountain at the front end surface from. The distance is the distance in the direction in which the adjacent contact probes 800 are connected to each other. There is also a case where the rotation angle of the front end side cylindrical portion 824 is zero, but here is the maximum distance (the state of Fig. 16 (A)).

As described above, the protrusion of the flange portion 812, the joint pitch P1 has a direct impact and will prevent the pitch from shrinking. In addition, E and F in the above-mentioned lengths E to H are not designed to be zero (there is no further reduction of the lower limit).

Conventional technical literature Patent literature

Patent Document 1 Japanese Patent Laid-Open Publication No. 2008-45986

Patent Document 2 Japanese Patent Laid-Open Publication No. 2010-35837

The applicant of the present application has proposed a contact probe (Figs. 18 to 20) which narrows the connection pitch as compared with the prior art in Japanese Patent Application No. 2011-7332. In the contact probe, the flange portion 714 is non-cylindrical and does not protrude toward the adjacent contact probe side, and the distance between the adjacent end probe side cylindrical portions 719 of the adjacent contact probes is narrowed. Further, the contact rotation portion 719a of the front end side cylindrical portion 719 of the adjacent contact probe is maintained at an angle which is the shortest distance between the apexes of the mountain by the stop rotation effect of the flange portion 714. By this means, the joint pitch P2 shown by the following formula is realized.

P2=E+(F×2)...Form 2

E: minimum wall thickness of the insulating support 731

F: a gap between the insulating support body 731 and the side surface of the front end side cylindrical portion 719

The connection pitch P2 expressed by Formula 2 is narrower than the conventional connection pitch P1 represented by Formula 1 by ΔP = (G × 2) + (H × 2). Here, as the lengths E and F cannot be reduced to be smaller than a predetermined lower limit value, in order to further reduce the pitch, means from other viewpoints are required.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an inspection jig and a method of manufacturing the same, which are novel means for narrowing the connection pitch as compared with the past.

One aspect of the present invention is an inspection jig. The inspection jig includes a plurality of contact probes and an insulating support body supported by the plurality of contact probes in series; each of the contact probes has: a first and a second plunger, one of which is The inspection object is connected and the other is connected to the inspection substrate; and the spring applies the potential energy to the first and second plungers in a direction separating from each other; the insulating support has the plurality of contact probes respectively a plurality of through-hole portions extending inward; each of the through-hole portions includes a guiding hole portion for guiding the front end portion of the first plunger of each of the contact probes to slid arbitrarily; The wall portion between the guide hole portions is provided with a connecting portion extending in the longitudinal direction of the first plunger at a smaller width than the outer diameter of the front end portion of the first plunger, and the two guiding holes are provided The departments are connected to each other.

The two guiding hole portions may also be close to each other in a range that does not overlap each other.

The inner surface of the joint portion may also be a part of the side surface of the round hole.

The insulating support may be a first insulating support body in which the guide hole portion is formed, and a storage hole portion in which a portion of each of the contact probes is accommodated in the axial direction of each of the guide hole portions. The second insulating support is combined.

Another aspect of the present invention is a method of manufacturing a test fixture. The method includes the steps of: forming a plurality of large-diameter through-holes that do not overlap each other with the insulator, and forming a small overlap between the two large-diameter through-holes and a portion of the adjacent two large-diameter through-holes a step of forming a first insulating support through the through hole; a step of inserting the contact probe into each of the plurality of through holes of the second insulating support; and, so that each of the contact probes is from the first (2) The step of assembling the first insulating support to the second insulating support so that the protruding portion of the insulating support penetrates the large-diameter through-holes.

Further, any combination of the above constituent elements and the present invention can be expressed as a system or the like, and is also effective as an aspect of the present invention.

According to the present invention, it is possible to realize an inspection jig that applies a new method of narrowing the joint pitch as compared with the past and a method of manufacturing the same.

1, 801‧‧‧1st plunger

2, 802‧‧‧ second plunger

3‧‧‧Coil spring

4, 804‧‧‧ pipe fittings

5‧‧‧Check objects

5a‧‧‧electrode bumps

6‧‧‧Inspection substrate

11, 21, 411, 421‧‧‧ base-side cylindrical

11d‧‧‧The seaming department

12‧‧‧1st Footpath

13‧‧‧2nd Footpath

14, 714, 812‧‧‧Flange

14a, 14b‧‧‧ side section

17‧‧‧3rd Footpath

19, 29, 719, 824‧‧‧ front end cylindrical part

19a, 29a, 719a‧ ‧ contact

Part of 19b, 19c‧‧

22‧‧‧ Small Trails Department

30,900‧‧‧Check fixtures

31, 731, 831‧‧ ‧ insulating support

31a‧‧‧1st floor

31b‧‧‧2nd floor

32‧‧‧through hole

33‧‧‧1st guide hole

33a‧‧‧ wall

33b‧‧‧slit

34‧‧‧2nd guiding hole

35‧‧‧Intermediate hole

100, 300, 400, 500, 800‧‧‧ contact probes

141~144‧‧‧ side

190‧‧‧ front side semi-cylindrical

197‧‧‧ points

311‧‧‧Main hole

312, 313‧‧‧Flange

401, 402‧‧‧ tightening

412, 422‧‧‧ rods

803 ‧ ‧ spring

Fig. 1 is a front sectional view showing an inspection jig 30 according to a first embodiment of the present invention; (A) is in a standby state (spring relief state), and (B) is a four-terminal measurement state (spring compression state).

Fig. 2 is a cross-sectional view taken along line H-H' of Fig. 1(A) (spring relief state).

Fig. 3(A) is a G-G' arrow view of Fig. 1(B). (B) is a cross-sectional view taken along line J-J' of Fig. 1(B). (C) is a view in which the first plunger 1 is viewed from the front end direction.

Fig. 4 is an enlarged view of a peripheral portion of the front end of the first plunger 1 of Fig. 1;

Fig. 5 is an enlarged view showing an enlarged view of Fig. 3(A) for size description.

Fig. 6 is a view showing a state in which the adjacent front end side cylindrical portions 19 are closest to each other in Fig. 5;

Figure 7 is an enlarged view of a more detailed description of the dimensions in Figure 5.

Fig. 8 is a view showing the shape of the second layer 31b of the insulating support 31.

FIG. 9 is a view of the first layer 31a of the insulating support 31 used in the inspection jig according to the second embodiment of the present invention as seen from the Z-axis direction.

Fig. 10 is an explanatory view of an inspection jig according to a third embodiment of the present invention; (A) is in a standby state (spring relief state), (B) is a four-terminal measurement state (spring compression state), and (C) is a system (B) K-K' section view.

Fig. 11 is an explanatory view of an inspection jig according to a fourth embodiment of the present invention; (A) is a standby state (spring relief state), and (B) is a four-terminal measurement state (spring compression state).

Fig. 12 (A) is an enlarged view of a peripheral portion of a front end of a first plunger 1 in an inspection jig according to a fifth embodiment of the present invention. (B) is a side view of the front end of the first plunger 1.

Fig. 13 is a front sectional view showing a four-terminal measurement state (spring compression state) of the inspection jig according to the sixth embodiment of the present invention.

Fig. 14(A) is an arrow view of A-A' of Fig. 13. (B) is a cross-sectional view taken along line B-B' of Fig. 13.

Figure 15 is a front cross-sectional view of the inspection jig 900 supporting the conventional contact probe 800 with an insulating support 831; (A) is in a standby state (spring relief state), and (B) is a four-terminal measurement state (spring) Compressed state).

Fig. 16(A) is an A-A' arrow view of Fig. 15(B). (B) is a cross-sectional view taken along line B-B' of Fig. 15(B).

Fig. 17 is an enlarged view of a peripheral portion of the front end of the first plunger 801 of Fig. 15;

Fig. 18 is an enlarged view of the peripheral portion of the front end of the inspection jig of Japanese Patent No. 2011-7332.

Figure 19 is a C-C' arrow view of Figure 18.

Figure 20 is a cross-sectional view taken along line D-D' of Figure 18.

Hereinafter, the best mode for carrying out the invention will be described in detail with reference to the accompanying drawings. The same or equivalent components, members, and the like shown in the drawings are denoted by the same reference numerals, and the repeated description is omitted as appropriate. In addition, the embodiment is not limited to the present invention and is exemplified, and all the features described in the embodiments or combinations thereof are not necessarily essential to the invention.

Fig. 1 is a front sectional view showing an inspection jig 30 according to a first embodiment of the present invention; (A) shows a standby state (spring relief state), and (B) shows a four-terminal measurement state (spring compression state). Fig. 2 is a cross-sectional view taken along line H-H' of Fig. 1(A) (spring relief state). In the figures, the first plunger 1 and the second plunger 2 of each of the contact probes 100 are shown in a non-sectional view. Figure 3(A) is the G-G' arrow view of Fig. 1(B). Fig. 3(B) is a cross-sectional view taken along line J-J' of Fig. 1(B). Fig. 3(C) is a view of the first plunger 1 as seen from the distal end direction. Fig. 4 is an enlarged view of a peripheral portion of a front end of the first plunger 1 of Fig. 1; Fig. 5 is an enlarged view showing an enlarged view of Fig. 3(A) for explaining the size. Fig. 6 is a view showing a state in which the adjacent front end side cylindrical portions 19 are closest to each other in Fig. 5; Fig. 7 is an enlarged view of a more detailed description of the dimensions in Fig. 5.

The inspection jig 30 of the present embodiment is a four-terminal type measurement, and one of the two contact probes 100 having the same configuration is a current supply probe, and the other is a voltage monitoring probe. The vertical three axes (X-axis, Y-axis, and Z-axis) are defined as follows: as shown in Fig. 1(A), the axial direction of the contact probe 100 is the Z-axis direction, and the direction in which the flange portion 14 to be described later protrudes is X. The direction perpendicular to the axial direction and the Z-axis direction and the X-axis direction is the Y-axis direction.

The contact probe 100 includes a first plunger 1 , a second plunger 2 , a coil spring 3 as a spring, and a tube 4 coaxially. The first plunger 1 is a connecting member that is connected to the inspection object 5. The second plunger 2 is a connecting member that is connected to the inspection substrate 6. The tubular member 4 of a conductive metal body such as copper or a copper alloy holds the first plunger 1 and the second plunger 2 so as to be slidable, and the base end sides of the first plunger 1 and the second plunger 2 are The coil spring 3 is housed inside. The coil spring 3 formed of a general conductor metal material such as a piano wire or a stainless steel wire is provided with potential energy in a direction separating the first plunger 1 and the second plunger 2 from each other with respect to the first plunger 1 and The second plunger 2 is provided, and the first plunger 1 and the second plunger 2 are brought into contact with the inspection object 5 and the inspection substrate 6 . force. The object to be inspected 5 is, for example, a semiconductor integrated circuit in which electrodes are arranged at predetermined intervals, and the electrode bumps 5a are arranged at predetermined intervals in the illustrated case. The inspection substrate 6 has electrode pads (not shown) connected to the measurement device side at predetermined intervals in correspondence with the electrode bumps 5a.

The first plunger 1 which is a conductive metal body such as copper or a copper alloy has a proximal end side cylindrical portion 11, a first small diameter portion 12, a second small diameter portion 13, and a flange portion in this order from the proximal end side. 14. The third small diameter portion 17 and the front end side cylindrical portion 19. Similarly, the second plunger 2, which is a conductive metal body such as copper or a copper alloy, has a proximal end side cylindrical portion 21, a small diameter portion 22, and a distal end side cylindrical portion 29 from the proximal end side. The coil spring 3 is provided between the end faces of the proximal end cylindrical portions 11 and 21 of the first plunger 1 and the second plunger 2, and imparts a biasing force in the separating direction to each end surface. The cylindrical pipe member 4 has a narrowing portion 401 which is recessed inwardly in the annular direction in order to prevent the first plunger 1 and the second plunger 2 from coming loose in the intermediate portion of the intermediate portion of the two axial directions. 402.

In the first plunger 1, the proximal end side cylindrical portion 11 has a larger diameter than the inner diameter of the tightening portion 401. The cylindrical first small diameter portion 12 has a diameter smaller than the inner diameter of the tightening portion 401. The tightening portion 401 is located in the axial direction of the first small diameter portion 12 in the axial direction. Therefore, the proximal end side cylindrical portion 11 is caught by the tightening portion 401, and the first plunger 1 is prevented from being loosened from the tubular member 4. The cylindrical second small diameter portion 13 has a larger diameter than the inner diameter of the tightening portion 401, and a portion is constantly located inside the tubular member 4.

As shown in Figs. 3(B) and (C), the shape of the flange portion 14 is such that the side surface of the circular plate having a diameter larger than the distal end side cylindrical portion 19 is cut out from the axial direction (Z direction). The shape of the diamond. In addition, this picture In the example, the side surface portions 14a and 14b corresponding to the apexes of the both ends of the flange portion 14 in the X direction are observed from the axial direction, and are formed into a circular arc surface without being cut. In other words, the flange portion 14 has a four-plane plane, that is, side surfaces 141 to 144, and a region surrounded by the side surfaces 141 to 144 (and an extended surface that is flush with the planes) is slightly diamond-shaped as viewed from the axial direction. shape. As shown in FIG. 1(A), the flange portion 14 is narrower than the front end side cylindrical portion 19 when viewed from the X direction, and is located within the existence width of the front end side cylindrical portion 19, that is, the front end side cylinder. The side of the portion 19 extends to the outside (in a direction perpendicular to the axial direction). On the other hand, as shown in FIG. 2, when viewed from the Y direction, the width is wider than the front end side cylindrical portion 19, and the side surface of the front end side cylindrical portion 19 is extended to the outside (in a direction perpendicular to the axial direction) (protruding) ). That is, as shown in Fig. 3(C), the flange portion 14 extends outward from a portion 19b, 19c of the side surface of the front end side cylindrical portion 19 as viewed in the axial direction; on the other hand, the portion 19b is not removed. The portion other than 19c extends to the outside. Further, as shown in Fig. 3(C), the range of the portions 19b and 19c extending outward from the flange portion 14 from the axial direction in the side surface of the distal end side cylindrical portion 19 is 90° from the axial direction. But within. In addition, the flange portion 14 may extend from the central axis so as to be narrower in width in the X direction from the central axis (it may be gradually narrowed toward the distal end).

The cylindrical third small diameter portion 17 has a base end connected to the front end side end surface of the flange portion 14. The front end side cylindrical portion 19 has a diameter larger than the outer diameter of the pipe member 4, so that the interval between the adjacent front end side cylindrical portions 19, 19 becomes narrower than the interval between the pipe members 4, 4. The front end of the distal end side cylindrical portion 19 is a contact portion 19a that comes into contact with the electrode bump 5a of the inspection object 5. The contact portion 19a is divided into a mountain shape (here, 8 divisions), and the apex of the mountain is present on the outer circumference from the center at equal angular intervals (here, 45° intervals). 3(A) and 3(C) illustrate the ridgeline of the mountain (the ridgeline of the convex portion), and the illustration of the valley line is omitted.

In the second plunger 2, the proximal end side cylindrical portion 21 has a larger diameter than the inner diameter of the tightening portion 402. The cylindrical small diameter portion 22 has a diameter smaller than the inner diameter of the tightening portion 402. The tightening portion 402 is located within the existence range of the small diameter portion 22 in the axial direction. Therefore, the proximal end side cylindrical portion 21 is caught by the tightening portion 402, and the second plunger 2 is prevented from coming loose from the tubular member 4. The front end side cylindrical portion 29 has a diameter larger than the inner diameter of the tightening portion 402, and a portion of the proximal end side thereof is located inside the tubular member 4. The front end of the distal end side cylindrical portion 29 serves as a contact portion 29a that comes into contact with an electrode pad (not shown) of the inspection substrate 6. The contact portion 29a is, for example, a conical shape.

The inspection jig 30 includes an insulating support 31 having a through hole portion 32 for arranging the plurality of contact probes 100 in parallel at predetermined intervals, and a contact probe is inserted into each of the through holes 32 100. Specifically, the contact probe 100 configured by integrally assembling the first plunger 1 , the second plunger 2 , the coil spring 3 , and the tube 4 is inserted into the through hole portion 32 disposed in the insulating support 31 . Further, in order to incorporate the contact probe 100 into the through hole portion 32, the structure of the insulating support 31 is divided into a first layer 31a and a second layer 31b.

The first guide hole portion 33 formed in the first layer 31a of the through hole portion 32 is a circular hole having a diameter larger than that of the front end side cylindrical portion 19 of the first plunger 1, and is slidably supported by the first one. The front end side cylindrical portion 19 of the plunger 1. Formed at the lower end of the second layer 31b of the through hole portion 32 The second guide hole portion 34 is a circular hole having a diameter slightly larger than the front end side cylindrical portion 29 of the second plunger 2, and slidably supports the front end side cylindrical portion 29 of the second plunger 2. The intermediate hole portion 35 (accommodation hole portion) formed in a portion other than the second guide hole portion 34 in the second layer 31b of the through hole portion 32, the diameter of the intermediate hole portion 35 is smaller than that of the first guide hole portion 33 and slightly It is larger than the pipe member 4, and is in the vicinity of the boundary with the first layer 31a (the space for the flange portion 14 to move) as shown in Fig. 2 in the X direction. The first guide hole portion 33 is joined to the flange portion 14 to restrict loosening of the contact probe 100. The second guiding hole portion 34 has a smaller diameter than the tube member 4 and is engaged with one end of the contact probe 100 to restrict the looseness of the tube member 4.

As shown in Fig. 1 (A), (B), Fig. 3 (A) and Fig. 4, the two first guide hole portions 33, 33 (two adjacent first guide hole portions 33, 33) The wall portion 33a is provided with a slit 33b as a communicating portion, and the first guiding hole portion 33 supports the front end side cylindrical portion 19 of the adjacent two first plungers 1 and 1 so as to be slidable, 19 so as to be in contact with one of the electrode bumps 5a. The slit 33b is a width K smaller than the outer diameter of the front end side cylindrical portion 19 of the first plunger 1 (Fig. 3(A)), and extends in the longitudinal direction (Z-axis direction) of the first plunger 1 throughout The entire length of the first guiding hole portion 33. The center position of the slit 33b in the width direction (X-axis direction) and the center position of the front end side cylindrical portion 19 in the same direction should preferably coincide with each other. The two adjacent first guide hole portions 33 are communicated with each other by the slit 33b.

In the inspection jig 30, the adjacent contact probes 100 and 100 and the side surface of the distal end side cylindrical portion 19 have a portion where the flange portion 14 does not extend outward from the axial direction (symbol 19b in FIG. 3(C), The portions other than the portion indicated by 19c are opposite to each other. In this embodiment, adjacent connections The connection pitch P4 of the touch probes 100 and 100 is expressed by the following equation (refer to FIG. 3(A), FIG. 4 and FIG. 5).

P4=E3+(F×Z)...Form 3

E3: It is assumed that the distance between the side faces of the two first guiding hole portions 33, 33 without the slit 33b

F: a gap between the first guiding hole portion 33 and the side surface of the front end side cylindrical portion 19

E3 of Formula 3 can be reduced to a smaller minimum thickness E (Formula 1 and Formula 2) than the manufacturing technique of the insulating support 31, so the connection pitch P4 of the present embodiment can be compared with Equations 1 and 2. The connection pitches P1 and P2 are narrower. However, as shown in Fig. 6, when the adjacent front end side cylindrical portions 19, 19 are closest to each other, they must be kept out of contact (P6 has a positive value hereinafter). The closest distance between P6 is as shown in the following equation.

P6=P4-F2×2...Form 4

P4: Normal joint spacing (Equation 3)

F2: the moving distance of the front end side cylindrical portion 19 located at the center of the first guiding hole portion 33 and the adjacent front end side cylindrical portion 19 ( FIG. 5 )

F2 in Equation 4 is calculated by the following equation (see also FIG. 7).

R1: radius of the front end side cylindrical portion 19

R2: radius of the first guiding hole portion 33

K: width of the slit 33b

Substituting F2 of Formula 5 into Formula 4 is as follows. That is, K is set to P6>0.

※ P 4=( R 2- R 1)+ E 3+( R 2- R 1)

The manufacturing process of the inspection jig 30 is as follows. First, a plurality of large-diameter through-holes (corresponding to the first guiding hole portion 33) that do not overlap each other are formed in the insulator, and two large-diameter through-holes adjacent to each other are formed between the two large-diameter through-holes The small-diameter through-holes (which correspond to the slits 33b) partially overlapped each other constitute the first layer 31a of the insulating support 31. On the other hand, as shown in FIG. 8, the second layer 31b of the insulating support 31 is formed. In FIG. 8, the main hole portion 311 accommodates the proximal end sides of the first plunger 1 and the second plunger 2 shown in FIG. 1, the coil spring 3, and the tube member 4. The flange hole portions 312 and 313 which are connected to the main hole portion 311 and have a predetermined depth on both sides of the main hole portion 311 in the X direction are smaller in diameter than the main hole portion 311, and ensure that the flange portion 14 is viewed from the axial direction. A space in which the portion extending toward the outer side from the side surface of the front end side cylindrical portion 19 moves in the Z direction. The processing sequence is first processing of the flange hole portions 312, 313, and then the main hole portion 311 is processed. Next, the contact probes 100 are respectively inserted into a plurality of through holes (the plurality of intermediate hole portions 35 and the guide hole portions) of the second layer 31b of the insulating support body 31. 34) The first layer 31a and the second layer 31b of the insulating support 31 are penetrated through the respective first guide hole portions 33 in the respective contact probes 100 from the second layer 31b of the insulating support 31. combination.

When the inspection jig 30 is used for inspection, the inspection jig 30 is positioned and placed on the inspection substrate 6, and as a result, the coil spring 3 is compressed only by a predetermined length and the front end side cylindrical portion 29 of the second plunger 2 is in contact with each other. The portion 29a is in elastic contact with the electrode pads of the inspection substrate 6. In the state where the inspection object 5 such as the semiconductor integrated circuit is not provided, the first plunger 1 is moved in the protruding direction until the flange portion 14 is restricted by the first guide hole portion 33, and the amount of protrusion of the distal end side cylindrical portion 19 is maximized. When the inspection object 5 is placed opposite to the insulating support body 31 of the inspection jig 30 at a predetermined interval, the distal end side cylindrical portion 19 is retracted and the coil spring 3 is further compressed. As a result, the distal end side cylindrical portion 19 and the inspection object 5 are pressed. The electrode bumps 5a are in elastic contact. In this state, the inspection of the inspection object 5 is carried out.

According to this embodiment, the following effects can be achieved.

(1) By the new means of providing the slit 33b in the wall portion 33a between the adjacent two first guide hole portions 33, the connection pitch can be narrowed compared with the past.

(2) In the adjacent contact probe 100, the portion of the side surface of the front end side cylindrical portion 19 that faces the outer side of the flange portion 14 from the axial direction is opposed to each other, so that it is a conventional cylindrical flange The situation can narrow the link spacing.

(3) Since the flange portion 14 serves as the stop rotation member of the first plunger 1, the contact portion 19a of the distal end side cylindrical portion 19 of the adjacent contact probe 100 can be held such that the apexes of the mountains are the shortest distance from each other. Angle. This also helps to narrow the joint spacing compared to the past.

FIG. 9 is a view of the first layer 31a of the insulating support 31 used in the inspection jig according to the second embodiment of the present invention as seen from the Z-axis direction. The inspection jig of the present embodiment differs from the inspection jig of the first embodiment in that the inner surface of the slit 33b is a part of the side surface of the circular hole in the first layer 31a of the insulating support 31, and the other portions are Consistent. Since the inner surface of the slit 33b is a part of the side surface of the circular hole, a general-purpose general-purpose drill can be used for the processing of the slit 33b similarly to the other through-holes.

Fig. 10 is an explanatory view of an inspection jig according to a third embodiment of the present invention; (A) is in a standby state (spring relief state), and (B) is a four-terminal measurement state (spring compression state), (C) A cross-sectional view of the K-K' of the system (B). The inspection jig of the present embodiment differs from the inspection jig of the first embodiment in that the tube 4 is not provided, and the other portions are identical. In other words, the first plunger 1 of the contact probe 300 has the proximal end side cylindrical portion 11, the first small diameter portion 12, and the second small diameter portion 13 of the first embodiment shown in Fig. 1 and the like. The base end side cylindrical portion 411 having a diameter slightly the same as that of the pipe member 4 is replaced, and the rod portion 412 having a diameter smaller than the base end side cylindrical portion 411 is axially oriented from the central portion of the proximal end side end surface of the proximal end side cylindrical portion 411. protruding. An edge portion of the proximal end side end surface of the proximal end side cylindrical portion 411 abuts against the coil spring 3. The rod portion 412 extends toward the inner side of the coil spring 3. The second plunger 2 of the contact probe 300 is configured such that the proximal end side cylindrical portion 21 and the small diameter portion 22 of the first embodiment are replaced with a proximal end side cylindrical portion 421 having a diameter slightly larger than that of the tube member 4, and The center portion of the proximal end side end surface of the proximal end side cylindrical portion 421 protrudes in the axial direction from the rod-shaped portion 422 having a smaller diameter than the proximal end side cylindrical portion 421. The proximal end side end surface of the proximal end side cylindrical portion 421 The edge portion abuts against the coil spring 3. The rod portion 422 extends toward the inner side of the coil spring 3. The coil spring 3 has a smaller diameter than the first distal end side cylindrical portion 19, and gives a biasing force in the separating direction to the proximal end side end faces of the proximal end side cylindrical portions 411 and 421. The first plunger 1 , the second plunger 2 , and the coil spring 3 constitute a contact probe 300 . The arrangement of the plurality of contact probes 300 may be the same as in the first embodiment.

Fig. 11 is an explanatory view of an inspection jig according to a fourth embodiment of the present invention; (A) is in a standby state (spring relief state), and (B) is a four-terminal measurement state (spring compression state). The inspection jig of the present embodiment differs from the inspection jig of the first embodiment shown in FIG. 1 and the like in that the flange portion 14 of the first plunger 1 of the contact probe 400 is not provided, and the other portions are identical. In this case, the tightening portion 401 of the pipe member 4 has a function of preventing the first plunger 1 from coming loose above, and the loosening preventing force is weaker than the anti-drop function generated by the flange portion 14, but is applied, for example, to There is no problem in the product that does not use the inspection fixture upside down.

Fig. 12 (A) is an enlarged view of a peripheral portion of a front end of a first plunger 1 in an inspection jig according to a fifth embodiment of the present invention. Fig. 12 (B) is a side view of the front end portion of the first plunger 1. The inspection jig of the present embodiment differs from the inspection jig of the first embodiment shown in FIG. 1 and the like in that the shape of the contact portion 29a of the front end side cylindrical portion 19 of the first plunger 1 is the same as that of Patent Document 1. The surface is inclined with respect to the axial direction, and further cut in two planes inclined in opposite directions from each other in the direction different from the inclination, and ridge lines are provided at the central portion of the cut surface, and the other portions are aligned.

Fig. 13 is a front sectional view showing a four-terminal measurement state (spring compression state) of the inspection jig according to the sixth embodiment of the present invention. Figure 14(A) is the arrow view of A-A' of Fig. 13. Fig. 14 (B) is a cross-sectional view taken along line B-B' of Fig. 13 (the spiral spring is omitted).

In the inspection jig of the first embodiment, the front end side cylindrical portion 19 of the first plunger 1 is changed to a cross-sectional semicircular front end side semi-cylindrical portion 190 as compared with the inspection jig of the first embodiment shown in FIG. 1 and the like. In cooperation with this, the shape of the guiding hole portion 33 is also changed from a circular hole to a semicircular shape. The front end of the front end side semi-cylindrical portion 190 is cut obliquely with respect to the axial direction. The adjacent front end side semi-cylindrical portions 190 are disposed such that the arcuate sides face each other and the inclined faces which are obliquely cut away are opposed to each other. Further, the slit 33b extends not only to the first layer 31a of the insulating support 31 but also to the second layer 31b (not only between the adjacent first guide hole portions 33 but also between the adjacent intermediate hole portions 35) .

In addition, the base end side cylindrical portion 11 of the first plunger 1 has the same diameter as the distal end side semi-cylindrical portion 190 and extends from the distal end side semi-cylindrical portion 190 toward the proximal end side, and has a shape of the tube member 4. In other words, the base end side end surface of the proximal end cylindrical portion 11 is formed with a hole portion 197 at a predetermined depth, and the coil spring 3 and the proximal end side cylindrical portion 21 of the second plunger 2 are located in the hole portion 197. The opening portion side of the hole portion 197 is reduced in diameter by, for example, caulking processing, that is, the base end of the proximal end side cylindrical portion 11 of the first plunger 1 is caulked to form the caulking portion 11d, and the second plunger is prevented. The base end side cylindrical portion 21 of 2 is loose. The guide hole portion 34 has a diameter smaller than the proximal end side cylindrical portion 11 of the first plunger 1 and larger than the front end side cylindrical portion 29 of the second plunger 2. The coil spring 3 is provided between the end surface of the proximal end side cylindrical portion 21 of the second plunger 2 and the bottom surface of the hole portion 197, and imparts a biasing force in the separating direction to each end surface. The first plunger 1, the second plunger, and the coil spring 3 constitute a contact probe 500.

FIG. 13 shows a state in which the inspection jig of the present embodiment is placed on the inspection substrate 6 (the terminal is not shown). When the inspection substrate 6 is brought into contact with the bottom surface of the second layer 31b of the insulating support 31, the upward movement of the proximal end side cylindrical portion 11 of the first plunger 1 is prevented from coming into contact with the first layer 31a, and the compression spiral is suppressed. By the spring 3, the second plunger 2 is elastically brought into contact with the terminal (not shown) of the inspection substrate 6, and the first plunger 1 is biased toward the outer side (upper side) of the insulating support 31.

In the present embodiment, the guide hole portion 33 of the first layer 31a of the insulating support 31 is semicircular in shape with the cross-sectional shape of the distal end side semi-cylindrical portion 190, thereby preventing the first plunger 1 from rotating. The first plunger 1 can be prevented from being loosened from the second layer 31b of the insulating support 31.

The present invention has been described with reference to the embodiments. However, those skilled in the art can understand various modifications of the components and the various processes of the embodiments. The contents of the modification are mentioned below.

One type of contact probe for four-terminal measurement may not have the same shape. For example, the diameter of the contact probe for current supply may be larger than that of the contact probe for voltage monitoring.

The use of the contact probe and the socket is not limited to the four-terminal measurement, and the electrode bump 5a may have the same number as the contact probe.

1‧‧‧1st plunger

2‧‧‧2nd plunger

3‧‧‧Coil spring

4‧‧‧ Pipe fittings

5‧‧‧Check objects

5a‧‧‧electrode bumps

6‧‧‧Inspection substrate

11, 21‧‧‧ base-side cylindrical part

12‧‧‧1st Footpath

13‧‧‧2nd Footpath

14‧‧‧Flange

17‧‧‧3rd Footpath

19, 29‧‧‧ front side cylindrical part

19a, 29a‧‧Contacts

22‧‧‧ Small Trails Department

30‧‧‧Check fixture

31‧‧‧Insulation support

31a‧‧‧1st floor

31b‧‧‧2nd floor

32‧‧‧through hole

33‧‧‧1st guide hole

33a‧‧‧ wall

33b‧‧‧slit

34‧‧‧2nd guiding hole

35‧‧‧Intermediate hole

100‧‧‧Contact probe

Claims (5)

An inspection jig having a plurality of contact probes and an insulating support body supporting the plurality of contact probes in series; each contact probe having: a first and a second plunger, one for checking The object is connected and the other is connected to the inspection substrate; and the spring applies a potential energy to the first and second plungers in a direction separating from each other; and the insulating support has the plurality of contact probes respectively a plurality of through-hole portions extending inward; each of the through-hole portions includes a guide hole portion for guiding the front end portion of the first plunger of each of the contact probes to arbitrarily slide; and two adjacent ones are adjacent to each other The wall portion between the guide hole portions is provided with a connecting portion extending in the longitudinal direction of the first plunger at a smaller width than the outer diameter of the front end portion of the first plunger, and the two guiding holes are formed Connected to each other. The inspection jig according to item 1 of the patent application, wherein the two guiding hole portions are close to each other in a range that does not overlap each other. The inspection jig according to claim 1 or 2, wherein the inner surface of the joint portion is a part of a side surface of the round hole. The inspection jig according to any one of claims 1 to 3, wherein the insulating support body is a first insulating support body in which the guide hole portion is formed, and each of the guide hole portions is formed The second insulating support that communicates with the housing hole portion of one of the contact probes is connected in the axial direction. A manufacturing method for inspecting a jig includes the steps of: forming a plurality of large-diameter through-holes that do not overlap each other in the insulator, and forming two adjacent large diameter paths between the two large-diameter through-holes a step of forming a first insulating support by partially overlapping the small-diameter through-holes; and a step of inserting the contact probe into each of the plurality of through-holes of the second insulating support; and The first insulating support is assembled to the second insulating support so that the portion protruding from the second insulating support penetrates the large-diameter through-holes.