TWI422829B - Inspection fixture, electrode structure and method for manufacturing electrode structure - Google Patents

Description

Inspection jig, electrode structure and electrode structure manufacturing method

The present invention relates to an inspection jig, an electrode structure, and a method of manufacturing an electrode structure for inspecting electrical characteristics of an inspection object of a substrate to be inspected.

In the inspection method regarding the electrical characteristics of the inspection object such as the wiring pattern of the substrate to be inspected, there are two contacts for providing the current supply contact and the voltage measurement contact, and the two contacts are simultaneously contacted. A method of performing inspection of an inspection object at a checkpoint (so-called four-contact method) (for example, Patent Document 1). In the four-contact method, by separating the current supply contact and the voltage measuring contact, since the current flowing between the voltage measuring contact and the check point can be suppressed to a substantially negligible level, the essence is The influence of the contact resistance between the contact piece for voltage measurement and the check point is eliminated, and the voltage between the two check points contacted by the contact for voltage measurement can be accurately measured.

A conventional probe and an inspection jig used in the four-contact method are provided in a pair of needle-shaped two needle-shaped contacts arranged in parallel in an insulated state, and are provided corresponding to each inspection point, and Two contacts are in contact with each check point at the same time.

In addition, in recent years, the fineness of the wiring pattern or the like provided on the substrate has progressed rapidly, and therefore the inspection jig must be made compact in accordance with the object to be inspected.

In order to respond to such densification, a substrate inspection jig disclosed in Patent Document 2 has been proposed. According to the technique disclosed in Patent Document 2, the rod-shaped contacts are housed inside the conductive cylindrical contact and the inside of the cylindrical contact, thereby being able to correspond to a narrow pitch.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-184374

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2007-205808

When the contact member disclosed in Patent Document 2 is used, the electrode portion that is electrically connected to the inspection device is formed into the same shape as the cross section of the contact member, or a connector that accommodates the shape of the recess of the cylindrical contact member or the like is used.

However, in the structure of such an electrode portion, the electrode portion (member) having a diameter larger than the outer diameter of the cylindrical contact member is formed, and the pitch of the electrode portion cannot correspond to a narrow pitch, or the structure of the electrode portion becomes complicated, which is a problem.

Therefore, the object of the present invention is to provide a method for manufacturing an inspection jig, an electrode structure, and an electrode structure, such as the above-described contact member (coaxial contact member) including a structure including a cylindrical contact member and a rod contact member. It is suitably used for such a contact member, and the structure of the electrode portion is made finer and easier.

In order to solve the above problems, the invention of claim 1 is an inspection jig comprising: a plurality of probes, one end of which is in contact with a check point of an inspection object to be inspected, and the other end is electrically connected to check electrical characteristics. The electrode portion of the inspection device is in contact with the holder; the holder is respectively guided to the predetermined inspection point and the electrode portion, and the probe is held; and the electrode body includes a plurality of the electrode portions; The needle includes: a first contact member having a substantially cylindrical shape formed of a conductive material; and a second contact member formed in an elongated shape by a conductive material and housed in an inner space of the first contact member in an insulated state from the first contact member The electrode portion includes: a first electrode portion that is in conduction contact with the first contact; and a second electrode portion that is in non-electrical contact with the first electrode portion and is in conduction contact with the second contact; The first electrode portion and the second electrode portion are arranged in a top view, and the center of the first electrode portion is separated from the center of the second electrode portion, and the maximum width of the first electrode portion is viewed from the top. It is smaller than the outer diameter of the first contact.

In the inspection jig according to the first aspect of the invention, the first electrode portion is formed in substantially the same size as the second electrode portion as viewed from the top. The shape is substantially the same, or a shape similar to the size of the second electrode portion is formed.

Further, the invention of claim 3 is the inspection jig according to the invention of claim 1 or 2, wherein the second electrode portion is disposed approximately at the center in the radial direction of the probe, and the first electrode The portion is arranged such that the arrangement direction of the plurality of probes is arranged at a predetermined angle by a line connecting the first electrode portion and the second electrode portion.

Further, the invention of claim 4 is in the inspection jig according to the invention of claim 3, wherein the predetermined angle is about 45 degrees.

Further, in the inspection jig according to the invention of claim 1 or 2, the first electrode portion and the second electrode portion are formed to protrude from the surface of the electrode body. .

In the inspection jig according to the invention of claim 1 or 2, the first electrode portion and the second electrode portion each include an electrode body and are linear. Inserting a through hole provided in the electrode body, the end surface of the substrate to be inspected is in the same plane as the surface of the electrode body; and a protruding portion is formed on the end surface of the electrode body by electroplating, from the electrode body The surface protrudes toward the side of the substrate to be inspected.

Further, the invention of claim 7 is the inspection jig according to the invention of claim 2, wherein an outer diameter of the second electrode portion is smaller than an inner diameter of the first contact member; the second electrode The portion is disposed to be located inside the inner circumference of the first contact member, and the first electrode portion is disposed at a position outside the outer circumference of the second contact member and abutting against an end portion of the first contact member.

Further, in the inspection jig according to the invention of claim 7, the second electrode portion is disposed such that the center thereof substantially coincides with the central axis of the second contact member. .

Further, the invention of claim 9 is the inspection jig according to the invention of claim 7, wherein the second electrode portion is disposed such that its center is offset from a central axis of the second contact.

Further, in the inspection jig of the invention of any one of claims 7 to 9, the outer diameter of the first electrode portion is smaller than the second electrode portion. path.

Further, the invention of claim 11 is an electrode structure provided in a substrate inspection jig; the substrate inspection jig includes the following plurality of probes: a check point at one end that is in contact with an inspection object to be inspected, and One end is electrically connected to an electrode portion conductive contact of an inspection device for inspecting electrical characteristics; the probe includes: a first contact member formed into a substantially cylindrical shape by a conductive material; and a second contact member formed of a conductive material in an elongated shape And being housed in the inner space of the first contact member in an insulated state from the first contact member; the electrode portion includes: a first electrode portion for electrically contacting the first contact member; and a second electrode portion; The first electrode portion is in electrical contact with the second contact member, and the first electrode portion and the second electrode portion are viewed from the top, and the center of the first electrode portion and the second electrode are viewed from a top view. The center of the portion is arranged to be separated, and the maximum width of the first electrode portion when viewed from the top is smaller than the outer diameter of the first contact.

Further, the invention of claim 12 is the method of manufacturing an electrode structure according to the invention of claim 11, wherein the conductive linear member forming the first electrode portion and the second electrode portion is penetrated The fixing body is disposed on the holding body having the retaining hole for holding the linear member, and the protruding portion of the linear member protruding from the retaining body is cut and removed so as to be flush with the retaining body.

According to the inventions of the first and second electrode portions, the first electrode portion and the second electrode portion are arranged such that the center of the first electrode portion is separated from the center of the second electrode portion. Moreover, the maximum width of the first electrode portion when viewed from the top is smaller than the outer diameter of the first contact member. Therefore, when a contact member such as a coaxial contact member is used, the pitch between the electrode portions can be narrowed even if the four-contact method is used. The inspections carried out can also be carried out with high reliability.

According to the invention of the second aspect of the invention, the first electrode portion is formed in substantially the same size as the second electrode portion and has substantially the same shape as viewed from the top, or is formed to be smaller than the size of the second electrode portion. The shape can further shorten the pitch between the electrode portions.

In particular, when the first electrode portion and the second electrode portion have the same shape, the same member can be used to reduce the cost. On the other hand, when the shape is similar, the positions of the first and second electrode portions can be easily grasped.

According to the invention of claim 3, the second electrode portion is disposed approximately at the center in the radial direction of the probe, and the first electrode portion is arranged in a plurality of pairs of straight lines connecting the first electrode portion and the second electrode portion. Since the arrangement direction of the needles is inclined at a predetermined angle, the pitch between the electrode portions can be further shortened.

According to the invention of claim 4, since the predetermined angle is about 45 degrees, the pitch between the electrode portions can be further shortened.

According to the invention of the fifth aspect of the invention, since the first electrode portion and the second electrode portion are formed to protrude from the surface of the electrode body, the electrode portions can be more stably contacted when they are in contact with the first and second contacts. .

According to the invention of the sixth aspect of the invention, the first electrode portion and the second electrode portion are formed by a linear electrode body and a protruding portion protruding from the electrode body by plating, so that the electrode portion can be easily fabricated. . Further, since the protruding portion is formed by plating with ease in thickness adjustment, the height of the protruding portion of the first and second electrode portions protruding from the surface of the electrode holding member can be easily adjusted.

According to the invention of claim 7, the outer diameter of the second electrode portion is smaller than the inner diameter of the first contact member, and the second electrode portion is disposed on the inner side of the inner circumference of the first contact member. Since the first electrode portion is disposed on the outer side of the outer periphery of the second contact member and can be in contact with the end portion of the first contact member, the electrode portions can be stably electrically contacted with the respective contact members.

According to the invention of the eighth aspect of the invention, since the second electrode portion is disposed such that its center substantially coincides with the central axis of the second contact member, the second electrode portion and the second contact member can be more stably contacted.

According to the invention of the ninth aspect of the invention, the second electrode portion is disposed such that its center is offset from the central axis of the second contact member. Therefore, when the second contact member is a tubular member, the second electrode portion becomes abutted. Contact with the cylindrical end of the second contact member for more stable contact.

According to the invention of claim 10, since the outer diameter of the first electrode portion is smaller than the outer diameter of the second electrode portion, the pitch between the electrode portions can be further shortened. Therefore, by using the present invention, it is possible to perform measurement of a shorter inspection object such as a bump pitch.

According to the invention of claim 12, the conductive linear members forming the first electrode portion and the second electrode portion are disposed in a retaining body having a retaining hole for holding the linear member, and The protruding portion of the linear member in which the retaining body protrudes is cut and removed so as to be flush with the retaining body, so that the electrode structure can be easily manufactured.

(Best form of implementing the invention)

[Structure of probe]

Fig. 1 is a side view of a probe used in an inspection jig according to an embodiment of the present invention. Fig. 2(a) is a side view of the first contact included in the probe of Fig. 1, and Fig. 2(b) is a side view of the second contact included in the probe of Fig. 1.

As shown in FIGS. 1 , 2 ( a ) and 2 ( b ), the probe 1 of the present embodiment includes a first contact 2 having a substantially cylindrical shape and a second contact 3 having an elongated shape. It is used to check the electrical characteristics of the inspection object of the substrate to be inspected. The inspection target may be, for example, a wiring pattern provided on a substrate to be inspected, a solder bump provided on the wiring pattern, or both a wiring pattern and a solder bump. The inspection contents include, for example, a conduction inspection for checking whether or not the wiring pattern is turned on, and an insulation inspection for checking whether the wiring patterns are insulated or the like. In particular, the probe 1 according to the present embodiment has a coaxial structure in which the second contact 3 is inserted into the first contact 2 in an insulated state as will be described later, and the two first and second contacts 2 are formed. 3 Electrically connected to the same inspection point of the inspection object, the electrical characteristics of the inspection object can be inspected by the 4-contact method. Further, in FIG. 1 and the like, the second contact 3 is slightly longer than the first contact 2.

The first contact 2 has a substantially cylindrical shape as shown in Fig. 2(a). In the configuration of the probe shown in Fig. 1 and the like, the first contact 2 is formed to be slightly shorter than the second contact 3 to be described later, but when the inspection is performed in contact with the inspection point, the first and second contacts can be contacted. The length is not specified; in addition, one of the first contact members 2 or the second contact members is formed long, and a long-distance contact member is formed with a telescopic member (for example, a spring member), thereby The length is contracted when it is connected to the inspection point, and the two contacts can be simultaneously contacted with the inspection point.

When the contacts 2 and 3 shown in FIG. 1 or FIG. 2 are electrically connected to the inspection points and the electrode portions 22 and 23 of the substrate to be inspected, the contact points are clamped by the inspection points and the electrode portions 22 and 23, and the contacts 2 are attached. 3 itself is bent, and the two ends of the contacts 2, 3 respectively press the inspection point and the electrode portion. Thus, by the bending of the contacts 2, 3, the conduction state of the inspection points and the electrode portions 22, 23 can be obtained.

For example, the first contact member 2 may be provided with an expansion-contraction portion in at least one of its axial directions (not shown in the embodiment), and the second contact member 3 may also be in contact with the inspection point by including the expansion-contraction portion. It can be formed by simultaneous contact at the time of inspection. The expansion/contraction portion can be formed into a substantially coil spring shape and elastically expand and contract in the axial direction of the first contact 2 . Further, in the modification, the expansion and contraction portion may be provided at a plurality of points in the axial direction of the first contact 2 . The expansion/contraction portion is formed by cutting a part of the cylindrical member forming the first contact 2 into a substantially spiral shape using laser light or the like. The material of the cylindrical member forming the first contact 2 is made of a metal material (for example, nickel (Ni) or copper beryllium (CuBe)).

The second contact 3 is formed in a slender shape by a conductive material, and is inserted into the first contact 2 (more specifically, the central axis is inserted into the first contact 2 so that the central axis thereof substantially coincides with the central axis of the first contact 2) . As shown in FIG. 2(b), the second contact 3 may be formed in an elongated rod shape, but may have a cylindrical shape that is thinner than the first contact 2.

In the present embodiment, when the second contact 3 is formed into a substantially cylindrical shape, the expansion and contraction portion may be provided at least at one position in the axial direction, similarly to the first contact 2 . At this time, the elasticized portion is formed in a substantially coil spring shape that elastically expands and contracts in the axial direction of the second contact 3 . Further, in the modification, the expansion and contraction portion may be provided at a plurality of points in the axial direction of the second contact 3. The expansion/contraction portion is formed by cutting a part of the tubular member forming the second contact 3 into a substantially spiral shape using laser light or the like. The material of the cylindrical member forming the second contact 3 is made of a metal material (for example, nickel (Ni) or copper beryllium (CuBe)).

Since the second contact 3 is inserted into the first contact 2, the outer diameter of the second contact 3 is set to be smaller than the inner diameter of the first contact 2. Further, in order to ensure insulation between the first contact 2 and the second contact 3, an outer peripheral side surface (a radially outer surface of the outer peripheral surface) of the second contact 3 is provided with an insulating material (for example, a resin). Insulation layer. A method of forming an elastic layer after the insulating layer is formed on the rod-shaped member or the tubular member constituting the second contact 3 may be employed, or a method of forming an elastic layer in the tubular member or the rod-shaped member and providing an insulating layer.

Further, an insulating layer is not provided on both end faces (or both end faces and the outer peripheral side faces in the vicinity of the axial direction) of the tubular second contact 3 electrically connected to the inspection target or the electrode portion described later. As a modification, an insulating spacer may be interposed between the outer peripheral side surface of the second contact 3 and the inner peripheral portion of the first contact 2 . The configuration of the spacer may be, for example, a ring shape, a cylindrical shape, or a sheet shape. In the case of a sheet-like spacer, it may be configured such that it is inserted into the outer peripheral side surface of the second contact member 3 and inserted into the first contact member 2 or the like.

Here, the length of the first contact 2 in the axial direction is set to, for example, 5 to 100 mm. Further, as shown in FIG. 4 to be described later, the outer diameter R21 of the first contact 2 is set to, for example, 50 to 100 μm, and the inner diameter R22 is set to, for example, 40 to 90 μm. The length of the second contact 3 in the axial direction is set to, for example, 5 to 100 mm, and the outer diameter R31 is set to, for example, 20 to 80 μm. Moreover, when the second contact 3 is a tubular member as shown in FIG. 4, the inner diameter R32 is set to, for example, 10 to 70 μm.

As described above, the probe 1 according to the present embodiment is formed in a so-called coaxial state, that is, the second contact member 3 formed of a conductive material in a slender shape is inserted into a substantially cylindrical shape formed of a conductive material in a state of being insulated from the first contact member 2. The shape of the first contact 2 is inside. Therefore, it is possible to easily arrange the first contact 2 on the outer side and the second contact 3 on the inner side in an insulated state with high positional accuracy. As a result, in consideration of the fineness of the inspection target (for example, the wiring pattern) provided on the substrate to be inspected, the inspection by the four-contact method can be performed with high reliability.

Further, since the first and second contacts 2 and 3 constituting the probe 1 are formed in a substantially cylindrical shape or a rod shape, the front ends of the first and second contacts 2 and 3 are brought into contact with the object to be inspected. In the case of an object to be inspected which is easily damaged by solder bumps or the like due to the front ends of the first and second contacts 2 and 3, the first and second contacts can be made while reducing the damage to the object to be inspected. The electrical connection state (for example, contact resistance) of the members 2 and 3 to the inspection object is stable. In this regard, for example, in the conventional needle contact, when the contact is brought into contact with the inspection object, the front end of the contact enters the inspection object such as the solder bump, and the damage of the inspection object may become large.

Further, it is preferable that at least one of the first and second contacts 2 and 3 constituting the probe 1 (one portion in the present embodiment) is provided with an elastically stretchable portion that elastically expands and contracts in the axial direction. By providing such an expansion and contraction portion, the repulsive force at the time of compression in the axial direction is stabilized. As a result, when the front ends of the first and second contacts 2, 3 are in contact with the inspection target of the substrate to be inspected, the front ends of the first and second contacts 2, 3 and the inspection target can be made; and the first and the first 2 The pressing force between the rear end of the contacts 2, 3 and the electrode portion on the substrate inspection apparatus main body is stabilized, and the electrical connection state between the first and second contacts 2, 3 and the inspection object and the electrode portion can be made. (eg contact resistance) is stable.

Further, since the expansion/contraction portion is formed by cutting a part of the tubular members forming the first and second contacts 2 and 3 into a substantially spiral shape, the first and the third portions including the elastic portion of the coil spring shape can be easily produced. 2 contacts 2, 3.

The probe 1 described above has been described as being configured to be crimped to the probe point and the electrode portion by the expansion and contraction portion; however, the first contact member 2 and/or the second contact member 3 itself have flexibility. The member is formed, and one or both of the contacts are bent when pressed from both ends, whereby the probe 1 can also be formed to simultaneously contact the inspection point and the electrode portion.

The electrode structure of the present invention can be suitably utilized in the case where the elastic member is included, the flexibility of the contact itself, or the coaxial contact as described above.

[Check the structure of the fixture]

Fig. 3 is a cross-sectional view showing the structure of an inspection jig according to an embodiment of the present invention using the probe of Fig. 1. Fig. 4 is an enlarged view showing a part of the structure of Fig. 3. Fig. 5 is a view showing the positional relationship between the first and second contacts and the first and second electrode portions included in each probe of the inspection jig of Fig. 3; In addition, in FIG. 4 and FIG. 8 and FIG. 10 mentioned later, the probe holding member 21 is abbreviate|omitted for convenience of description. Further, in the configurations of FIGS. 3, 8, and 9, the second contact member 3 is a rod-shaped member; in the configuration of FIGS. 4, 5, 10, and 11, the second contact member 3 is shown as a tube. The case of a member.

As shown in FIGS. 3 to 5, the inspection jig 20 includes at least one probe 1, a probe holding member 21, first and second electrode portions 22 and 23 having the same number of probes as the probe group, and electrode holding. The member 24 is used to inspect the electrical characteristics of the inspection object of the substrate 6 to be inspected. Further, the probe holding member 21 corresponds to the holding body according to the present invention, and the first and second electrode portions 22 and 23 correspond to the electrode portion, and the first and second electrode portions 22 and 23 are assembled, and the electrode holding member 24 and the like are assembled. The constituent members correspond to the electrode body.

In the example shown in FIG. 3, the front end 1a of the probe 1 is in contact with the solder bumps 7 provided in the wiring pattern of the substrate 6 to be inspected. Therefore, the distal ends 2a and 3a of the first and second contacts 2 and 3 of the probe 1 are in contact with one inspection point (solder bump 7 or the like) of the substrate 6 to be inspected. The inspection current is supplied to the inspection substrate 6 side by one of the first and second contacts 2, 3, and the potential of the inspection point is measured by the other. Thereby, the inspection of the electrical characteristics of the inspection object set on the substrate 6 to be inspected is performed by the four-contact method.

Further, in the probe 1 shown in FIG. 3, the rear end 2b of the first contact 2 and the rear end 3b of the second contact 3 are arranged substantially in the same plane; the front end 2a and the second contact of the first contact 2 The front end 3a is disposed along the surface shape of the bump to be inspected, that is, the arc shape, and as shown in FIG. 3, the front end 2a of the first contact 2 is disposed in the second contact 3 The position where the front end 3a protrudes. As described above, by arranging the first contact 2 and the second contact 3, the respective contacts 2, 3 can reliably contact the electrode portions 22, 23 and the inspection points.

As shown in FIG. 3, the probe holding member 21 is a member for holding the probe 1, and is mainly formed of an insulating material, for example, a plurality of insertion holes 26 through which the probe 1 is inserted. Further, in a state where the probe 1 is held in the insertion hole 26, the front end 1a side of the probe 1 protrudes from the surface of the probe holding member 21 on the side of the substrate 6 to be inspected. On the other hand, the rear end 1b of the probe 1 is in a state of being in contact with the first and second electrode portions 22 and 23 held by the electrode holding member 24 to be described later. Further, the probe holding member 21 may be configured by superposing a plurality of sheets in the axial direction of the probe 1. At this time, the probe holding member 21 may be disposed in a state in which the sheets constituting the probe holding member 21 are spaced apart from each other in the axial direction of the probe 1.

As shown in FIGS. 3 and 4, the first electrode portion 22 and the second electrode 23 are electrically and independently provided to the first contact 2 and the second contact 3 of the probe 1 one after another, and after the first contact 2 The end 2b and the rear end 3b of the second contact 3 are in contact (contact) and electrically connected. The combination of the first and second electrode portions 22 and 23 is set such that the number of sets is the same as the number of the probes 1. The more detailed structure of the first and second electrode portions 22 and 23 will be described later.

The electrode holding member 24 is mainly formed of an insulating material, and is inserted into the first and second electrode portions 22 and 23, respectively, and has through holes 27 and 28 for holding the first and second electrode portions inserted into the respective through holes 27 and 28. 22, 23.

Each of the first and second electrode portions 22 and 23 includes electrode bodies 31 and 32 and a protruding portion 33, 34 and constitute. The electrode bodies 31 and 32 are formed of a substantially linear conductor (for example, a metal wire or a metal wire coated with a coating on the outer circumferential side of the metal wire), and a portion of the substrate side to be inspected from the electrode holding member 24 is to be inspected. The surface on the opposite side of the substrate 6 is inserted into the through holes 27 and 28 of the electrode holding member 24 to be held. In the held state, the end faces 31a, 32a of the electrode bodies 31, 32 on the side of the substrate 6 to be inspected are positioned substantially in the same plane as the surface 24a of the electrode holding member 24 on the side of the substrate 6 to be inspected.

The protruding portions 33, 34 are formed on the end faces 31a, 32a of the electrode bodies 31, 32 by plating, and protrude from the surface 24a of the electrode holding member 24 toward the substrate 6 to be inspected. The heights H3 and H4 (see FIG. 4) in which the protruding portions 33 and 34 protrude from the surface 24a of the electrode holding member 24 are set to, for example, 0.1 to 5 μm. Further, the details of the processes for the protruding portions 33 and 34 will be described later with reference to Figs. 6(a) and 6(b).

Further, when the probe holding member 21 to which the probe 1 is attached and the electrode holding member 24 in which the first and second electrode portions 22 and 23 are provided are fixed to each other by a predetermined fixture, the first and second combinations of the respective combinations The protruding portions 33 and 34 of the electrode portions 22 and 23 are electrically connected to the rear ends 2b and 3b of the first and second contacts 2 and 3 of the corresponding probe 1.

As described above, since the end portions of the first and second electrode portions 22 and 23 on the side of the substrate 6 to be inspected are provided with the protruding portions 33 and 34 projecting from the surface 24a of the electrode holding member 24 toward the substrate 6 to be inspected, it is simple. It is electrically connected to the rear ends 2b and 3b of the first and second contacts 2 and 3 corresponding to the protruding portions 33 and 34 of the first and second electrode portions 22 and 23.

Further, the electrode main bodies 31 and 32 of the first and second electrode portions 22 and 23 are inserted into the through holes 27 and 28 provided in the electrode holding member 24, and the end faces 31a and 32a on the side of the substrate 6 to be inspected are positioned. The surface 24a of the electrode holding member 24 is substantially in the same plane. Further, the protruding portions 33 and 34 projecting from the surface 24a of the electrode holding member 24 toward the substrate 6 to be inspected are plated on the side of the substrate 6 to be inspected of the electrode bodies 31 and 32 of the first and second electrode portions 22 and 23, respectively. End faces 31a, 32a. Therefore, the first and second electrode portions 22 and 23 projecting from the surface 24a of the electrode holding member 24 toward the substrate 6 to be inspected can be easily produced from the end portion on the side of the substrate 6 to be inspected.

Further, since the protruding portions 33 and 34 are formed by plating with ease in thickness adjustment, they are formed by 33 and 34. The electrode bodies 31 and 32 are formed of a substantially linear conductor (for example, a metal wire or a metal wire coated with a coating on the outer circumferential side of the metal wire), and a portion of the substrate side to be inspected from the electrode holding member 24 is to be inspected. The surface on the opposite side of the substrate 6 is inserted into the through holes 27 and 28 of the electrode holding member 24 to be held. In the held state, the end faces 31a, 32a of the electrode bodies 31, 32 on the side of the substrate 6 to be inspected are positioned substantially in the same plane as the surface 24a of the electrode holding member 24 on the side of the substrate 6 to be inspected.

The protruding portions 33, 34 are formed on the end faces 31a, 32a of the electrode bodies 31, 32 by plating, and protrude from the surface 24a of the electrode holding member 24 toward the substrate 6 to be inspected. The heights H3 and H4 (see FIG. 4) in which the protruding portions 33 and 34 protrude from the surface 24a of the electrode holding member 24 are set to, for example, 0.1 to 5 μm. Further, the details of the processes for the protruding portions 33 and 34 will be described later with reference to Figs. 6(a) and 6(b).

Further, when the probe holding member 21 to which the probe 1 is attached and the electrode holding member 24 in which the first and second electrode portions 22 and 23 are provided are fixed to each other by a predetermined fixture, the first and second combinations of the respective combinations The protruding portions 33 and 34 of the electrode portions 22 and 23 are electrically connected to the rear ends 2b and 3b of the first and second contacts 2 and 3 of the corresponding probe 1.

As described above, since the end portions of the first and second electrode portions 22 and 23 on the side of the substrate 6 to be inspected are provided with the protruding portions 33 and 34 projecting from the surface 24a of the electrode holding member 24 toward the substrate 6 to be inspected, it is simple. It is electrically connected to the rear ends 2b and 3b of the first and second contacts 2 and 3 corresponding to the protruding portions 33 and 34 of the first and second electrode portions 22 and 23.

Further, the electrode main bodies 31 and 32 of the first and second electrode portions 22 and 23 are inserted into the through holes 27 and 28 provided in the electrode holding member 24, and the end faces 31a and 32a on the side of the substrate 6 to be inspected are positioned. The surface 24a of the electrode holding member 24 is substantially in the same plane. Further, the protruding portions 33 and 34 projecting from the surface 24a of the electrode holding member 24 toward the substrate 6 to be inspected are plated on the side of the substrate 6 to be inspected of the electrode bodies 31 and 32 of the first and second electrode portions 22 and 23, respectively. End faces 31a, 32a. Therefore, the first and second electrode portions 22 and 23 projecting from the surface 24a of the electrode holding member 24 toward the substrate 6 to be inspected can be easily produced from the end portion on the side of the substrate 6 to be inspected.

Further, since the protruding portions 33 and 34 are formed by plating with ease in thickness adjustment, the height H3 of the protruding portions 33 and 34 of the first and second electrode portions 22 and 23 protruding from the surface 24a of the electrode holding member 24 can be easily adjusted. H4.

Here, the processes of the protruding portions 33 and 34 of the first and second electrode portions 22 and 23 will be described with reference to FIGS. 6(a) and 6(b). First, as shown in FIG. 6(a), the electrode bodies 31 and 32 of the first and second electrode portions 22 and 23 are formed. In the structure of FIG. 6(a), the electrode bodies 31, 32 are inserted into the through holes 27, 28 provided in the electrode holding member 24, and the end faces 31a, 32a on the side of the substrate 6 to be inspected are positioned in the electrode holding member. The surface 24a of the surface 24 is substantially in the same plane. For the manufacturing method of the structure, a method may be employed in which, for example, the metal wires (or the coated metal wires) on which the electrode bodies 31 and 32 are formed are inserted into the through holes 27 and 28 penetrating the electrode holding member 24, and A cutting mechanism (for example, a cutter) cuts off a portion (projecting portion) of the metal wire (or a covered metal wire) protruding from the surface 24a of the electrode holding member 24 toward the substrate 6 to be inspected. In this way, the first and second electrode portions 22 and 23 can be easily produced.

Next, as shown in FIG. 6(b), the end faces 31a, 32a of the electrode bodies 31, 32 provided on the electrode holding member 24 are immersed in the plating solution 37 of the plating tank 36, and the counter electrode body Electroplating is applied to the end faces 31a, 32a of 31, 32. Thereby, the end faces 31a, 32a of the electrode bodies 31, 32 form protrusions 33, 34 protruding from the surface 24a of the electrode holding member 24 toward the substrate 6 to be inspected.

Next, the positional relationship between the first and second contacts 2, 3 of the probe 1 and the first and second electrode portions 22, 23 will be described with reference to Figs. 4 and 5 .

In the present embodiment, as shown in FIG. 4 and FIG. 5, the first electrode portion 22 and the second electrode portion 23 are arranged in a top view, and are disposed such that the center of the first electrode portion 22 is separated from the center of the second electrode portion 23. . The distance between the center of the first electrode portion 22 and the center of the second electrode portion 23 is set to be larger than the sum of the radius of the first electrode portion 22 and the radius of the second electrode portion 23. Moreover, the maximum width (outer diameter R5 in the present embodiment) of the first electrode portion 22 at the time of top view is set to be smaller than the outer diameter R21 of the first contact 2 . In other words, the arrangement of the first electrode portion 22 and the second electrode portion 23 in the present embodiment is different from the multiple structure (for example, a concentric structure) in which the second electrode portion 23 surrounds the outer periphery of the first electrode portion 22. Therefore, the pitch between the combinations of the first and second electrode portions 22 and 23 can be narrowed, and even if the inspection is performed by the four-contact method, it can be performed with high reliability.

The planar shape of the first and second electrode portions 22 and 23 as viewed from the side of the substrate 6 to be inspected is substantially circular, but any shape such as a rectangle may be employed. Further, in the configuration shown in FIGS. 4 and 5, the planar shape of the first electrode portion 22 and the planar shape of the second electrode portion 23 are set to be the same in size and shape. Therefore, the first member and the second electrode portions 22 and 23 can be formed by the same member, and the cost can be reduced. In the other configuration, the planar shape of the first electrode portion 22 and the planar shape of the second electrode portion 23 may be similar shapes having different sizes, as shown in FIG. When the shape is similar, there is an advantage that the positions of the first and second electrode portions 22 and 23 can be easily grasped.

Further, in the present embodiment, as shown in FIGS. 4 and 5, the outer diameter R6 of the protruding portion 34 of the second electrode portion 23 is set to exceed the inner diameter R32 of the second contact member 3, and is smaller than the first contact member 2. The size of the inner diameter R22. More specifically, in the present embodiment, the outer diameter R6 of the protruding portion 34 is set larger than the inner diameter R32 of the second contact 3 and smaller than the outer diameter R31 of the second contact 3. Further, the outer diameter R5 of the protruding portion 33 of the first electrode portion 22 is not particularly limited, but in the present embodiment, the outer diameter R6 of the protruding portion 34 of the second electrode portion 23 is substantially the same size.

Further, the second electrode portion 23 is disposed such that its outer edge portion is located inside the inner circumference 2c of the first contact 2 of the corresponding probe 1. More specifically, in the present embodiment, the second electrode portion 23 is disposed such that the outer edge portion thereof is located inside the outer periphery 3c of the second contact 3 of the corresponding probe 1.

On the other hand, the first electrode portion 22 is disposed outside the outer periphery 3c of the rear end 3b of the second contact 3 of the corresponding probe 1, and is at a position where it can abut against the rear end 2b of the first contact 2. More preferably, the first electrode portion 22 is disposed so as to be located substantially between the inner circumference 2c and the outer circumference 2d of the rear end 2b of the first contact 2 with the portion 22a closest to the central axis C1 of the corresponding probe 1.

With such a configuration, when the inspection jig 20 is assembled, the first electrode portion 22 is prevented from being in contact with the second contact member 3 by mistake, or the second electrode portion 23 is accidentally brought into contact with the first contact member 2, and the like. The rear ends 2b and 3b of the first and second contacts 2 and 3 can be reliably brought into contact with the first and second electrode portions 22 and 23 to be electrically connected.

Further, in the present embodiment, the second electrode portion 23 has a center C23 and a central axis C1 of the probe 1 including the corresponding second contact 3 (this central axis C1 substantially coincides with the central axis of the first contact 2) ) Configuration in a roughly consistent manner. Thereby, any part of the peripheral edge portion of the second electrode portion 23 (or a portion covering substantially the entire circumference) can be surely brought into contact with and electrically connected to the rear end 3b of the second contact member 3.

In the present embodiment, as shown in FIG. 5, when the second electrode portion 23 of each combination is used as a reference, the direction in which the first electrode portion 22 is separated from the second electrode portion 23 can be changed. In the configuration shown in FIG. 5, the line L1 connecting the center of the first electrode portion 22 and the center of the second electrode portion 23 of each combination to the array direction L2 in which the plurality of probes 1 are arranged side by side is at a predetermined angle θ (for example, about 45). The first and second electrode portions 22 and 23 are disposed so as to be inclined. Thereby, even when the pitch between the probes 1 is shortened, the pitch between the respective combinations of the first and second electrode portions 22 and 23 can be easily shortened to cope with them. This effect is most effective when the predetermined angle θ is set at about 45 degrees.

In the modification of this point, as shown in FIG. 7, the line L1 of the center of the first electrode portion 22 and the center of the second electrode portion 23 of each combination may be connected, and the plurality of probes 1 may be arranged side by side. The first and second electrode portions 22 and 23 are arranged such that the direction L2 is substantially parallel.

4 and 5, the case where the second contact 3 is a tubular member has been described, but the same effect can be obtained even if it is a rod-shaped member.

Hereinafter, a modification of the configuration according to the above embodiment will be described.

In the modification shown in FIGS. 8 and 9, the second electrode portion 23 is slightly offset from the center axis C1 of the probe 1 including the corresponding second contact member 3 by the center C23 (this central axis C1 is in contact with the first contact). The central axis of the piece 2 is approximately the same).

At this time, the first electrode portion 22 and the second electrode portion 23 are set to be in contact with the rear end faces of the first contact 2 and the second contact 3, respectively. Therefore, the separation distance between the first electrode portion 22 and the second electrode portion 23 is formed to have the size of the gap between the first contact 2 and the second contact 3 .

When the second contact 3 is formed of a tubular member, the outer diameter R6 of the protruding portion 34 of the second electrode portion 23 is set to a size substantially equal to the inner diameter of the second contact member 3, and the second electrode portion 23 is The protruding portion 34 is formed in a conductive contact with a part of the end surface of the second contact 3, and the protruding portion 33 of the first electrode portion 22 is formed to be in contact with a part of the end surface of the first contact 2 later.

In the modification shown in FIG. 10 and FIG. 11 , since the outer diameter R5 of the first electrode portion 22 is in constant contact with a part of the end surface of the first contact member 2, the thickness of the first contact member 2 is substantially the same as the thickness in the radial direction. Formed slightly larger. The outer diameter R6 of the second electrode portion 23 is formed to be smaller or substantially the same as the outer diameter of the second contact. Further, the outer diameter R5 of the first electrode portion 22 is set smaller than the outer diameter R6 of the second electrode portion 23. Thereby, the narrow pitch between each combination of the first and second electrode portions 22 and 23 can be achieved. At this time, the protruding portion 34 of the second electrode portion 23 is in conduction contact with the peripheral edge of the second contact 3, and a part of the front end of the protruding portion 34 is housed inside the second contact 3. By forming in this way, the second electrode portion 23 can be stably in contact with the second contact 3, and the position of the second contact 3 can be stabilized, and the electrode portions 22, 23 and the respective contacts 2 can be reliably ensured. 3 conduction contact. Further, in the configuration of Fig. 10, the second contact member 3 is a tubular member, but a rod member may be used.

Further, in Fig. 11, the electrode portions 22 and 23 are arranged side by side, but they may be arranged at a position of 45 degrees as shown in Fig. 5 to further shorten the pitch between the electrode portions 22 and 23. In response to the narrow spacing of the bumps.

Further, in another modification, a crotch portion extending radially outward from the outer peripheral side surface of the first contact 2 of the probe 1 is provided, and the insertion hole 26 of the probe holding member 21 can be provided in the insertion hole 26. An abutting portion (for example, a step portion) that prevents the probe 1 from coming off when the side of the substrate 6 to be inspected abuts against the crotch portion, and the probe 1 is compressed in the axial direction between the abutting portion and the electrode portions 22 and 23 Hold on.

Further, in the electrode structure shown in FIGS. 3, 4, and 10, the central axis of the second electrode portion 23 and the central axis of the second contact 3 are arranged to be substantially coaxially arranged. At this time, when the second contact 3 is a tubular member, the outer diameter of the second electrode portion 23 is formed to be larger than the inner diameter of the second contact 3 . Moreover, when the second contact 3 is a rod-shaped member, the outer diameter of the second electrode portion 23 is formed to be smaller than the inner diameter of the first contact 2 or smaller than the outer diameter of the second contact 3.

Moreover, in the electrode structure shown in FIG. 8, the central axis of the second electrode portion 23 and the central axis of the second contact 3 are arranged to be slightly offset. In this case, when the second contact member 3 is a tubular member, the outer diameter of the second electrode portion 23 is formed to be larger than the thickness of the second contact member 3, and is disposed in contact with a part of the bottom surface of the second contact member 3. . When the second contact member 3 is a rod-shaped member, the outer diameter of the second electrode portion 23 is formed so as not to contact the first contact member 2 in consideration of the gap and thickness of the first contact member 2 and the second contact member 3. size of.

Further, the first electrode portion 22 and the second electrode portion 23 preferably have the same outer diameter. Since the member used in the above-described manufacturing method does not need to be distinguished from the member used for the first or second electrode portions 22 and 23, it can be easily manufactured by using the same member, that is, a conductive wire.

1. . . Probe

1a. . . Probe front

1b. . . Probe end

2. . . First contact

3. . . Second contact

2a, 3a. . . Front end of the contact

2b, 3b. . . Rear end of the contact

2c. . . Inner circumference of the rear end of the first contact

2d. . . The outer circumference of the rear end of the first contact

3c. . . The outer circumference of the rear end of the second contact

6. . . Substrate to be inspected

7. . . Solder bump

20. . . Inspection fixture

twenty one. . . Probe holding member

twenty two. . . First electrode portion

twenty three. . . Second electrode portion

22a. . . a portion of the first electrode portion close to the central axis of the probe

twenty four. . . Electrode holding member

24a. . . Surface of the electrode holding member to be inspected on the substrate side

26. . . Insert hole

27, 28. . . Through hole

31, 32. . . Electrode body

31a, 32a. . . End face of the electrode body to be inspected on the substrate side

33, 34. . . Protruding

36. . . Plating tank

37. . . Plating solution

C1. . . Central axis of the probe

C23. . . Center of the second electrode portion

H3, H4. . . The height at which the protrusion protrudes from the surface of the electrode holding member

L1. . . a line connecting the center of the first electrode portion and the center of the second electrode portion of each combination

L2. . . Multiple probes arranged side by side

R5‧‧‧ outer diameter of the protruding portion of the first electrode portion (maximum width of the first electrode portion)

R6‧‧‧ outer diameter of the protrusion of the second electrode portion

R21, R31‧‧‧ outer diameter of the contact

R22, R32‧‧‧ contact piece inner diameter

θ‧‧‧A predetermined angle at which the line connecting the center of the first electrode portion and the center of the second electrode portion of each combination is inclined in the direction in which the plurality of probes are arranged side by side

Fig. 1 is a side view of a probe used in an inspection jig according to an embodiment of the present invention.

Fig. 2(a) is a side view of the first contact included in the probe of Fig. 1, and Fig. 2(b) is a side view of the second contact included in the probe of Fig. 1.

Fig. 3 is a cross-sectional view showing the structure of an inspection jig according to an embodiment of the present invention using the probe of Fig. 1.

Fig. 4 is an enlarged view showing a part of the structure of Fig. 3.

Fig. 5 is a view showing the positional relationship between the first and second contacts and the first and second electrode portions included in each probe of the inspection jig of Fig. 3;

6(a) and 6(b) are explanatory views of processes of the protruding portions of the first and second electrode portions.

Fig. 7 shows a modification of the structure shown in Fig. 5.

Fig. 8 shows a modification of the inspection jig shown in Figs. 3 and 4.

Fig. 9 shows the positional relationship between the first and second contacts and the first and second electrode portions included in each probe of the configuration shown in Fig. 8.

Fig. 10 shows another modification of the inspection jig shown in Figs. 3 and 4.

Fig. 11 shows the positional relationship between the first and second contacts and the first and second electrode portions included in each probe of the configuration shown in Fig. 10.

1. . . Probe

1a. . . Probe front

1b. . . Probe end

2. . . First contact

3. . . Second contact

2a, 3a. . . Front end of the contact

2b, 3b. . . Rear end of the contact

6. . . Substrate to be inspected

7. . . Solder bump

20. . . Inspection fixture

twenty one. . . Probe holding member

twenty two. . . First electrode portion

twenty three. . . Second electrode portion

twenty four. . . Electrode holding member

24a. . . Surface of the electrode holding member to be inspected on the substrate side

26. . . Insert hole

27, 28. . . Through hole

31, 32. . . Electrode body

31a, 32a. . . End face of the electrode body to be inspected on the substrate side

33, 34. . . Protruding

C1. . . Central axis of the probe

C23. . . Center of the second electrode portion

Claims (11)

An inspection jig includes: a plurality of probes, one end of which is in contact with a check point of an inspection object of a substrate to be inspected, and the other end of which is electrically connected to an electrode portion of an inspection device for inspecting electrical characteristics; a holding body, The probe is respectively guided to the predetermined inspection point and the electrode portion, and the probe is held; and the electrode body includes a plurality of the electrode portions; wherein the probe comprises: a first contact, The conductive material is formed into a substantially cylindrical shape; and the second contact member is formed in an elongated shape by a conductive material, and is housed in the inner space of the first contact member in a state insulated from the first contact member; the electrode portion includes: a first electrode portion is in conduction contact with the first contact member; and the second electrode portion is in non-electrical contact with the first electrode portion, and is in conduction contact with the second contact member; and the second electrode portion is disposed in the probe The first electrode portion is disposed such that a straight line connecting the first electrode portion and the second electrode portion is inclined at a predetermined angle with respect to an arrangement direction of the plurality of probes; and the first electrode portion and the first electrode portion are arranged The second electrode portion is viewed from the top To the center line of the first electrode portion of the second portion of the center electrode disposed separated, the maximum width of the first electrode portion is smaller than the outer diameter of the first contact of a top view when observed. The inspection jig according to the first aspect of the invention, wherein the first electrode portion has substantially the same size and substantially the same shape as the second electrode portion as viewed from the top, or is formed to be larger than the second electrode portion. Small and similar shapes. For example, the inspection jig of claim 2, wherein the predetermined angle is about 45 degrees. The inspection jig according to claim 1 or 2, wherein the first electrode portion and the second electrode portion are formed to protrude from a surface of the electrode body. The inspection jig according to claim 1 or 2, wherein the first electrode portion and the second electrode portion each include an electrode body that is linearly inserted into a through hole provided in the electrode body, and the to-be-checked The end surface of the substrate side is located on the same plane as the surface of the electrode body; and the protruding portion is formed on the end surface of the electrode body by electroplating, and protrudes from the surface of the electrode body toward the substrate side to be inspected. The inspection jig according to the second aspect of the invention, wherein an outer diameter of the second electrode portion is smaller than an inner diameter of the first contact member; and the second electrode portion is disposed further inside than an inner circumference of the first contact member The first electrode portion is disposed at a position outside the outer circumference of the second contact member and abutting against an end portion of the first contact member. The inspection jig of claim 6, wherein the second electrode portion is disposed such that a center thereof approximately coincides with a central axis of the second contact member. The inspection jig of claim 6, wherein the second electrode portion is disposed such that its center is offset from a central axis of the second contact. The inspection jig according to any one of claims 6 to 8, wherein an outer diameter of the first electrode portion is smaller than an outer diameter of the second electrode portion. An electrode structure is provided on a substrate inspection jig; the substrate inspection jig includes a plurality of probes: one end of the probes is in contact with a check point of an inspection object of the substrate to be inspected, and the other end of the conduction contact is electrically connected An electrode portion of the inspection device for inspecting electrical characteristics; The probe includes: a first contact member having a substantially cylindrical shape formed of a conductive material; and a second contact member formed in an elongated shape by a conductive material and housed in the state of being insulated from the first contact member An internal space of the first contact member; the electrode portion includes: a first electrode portion that is in conduction contact with the first contact; and a second electrode portion that is in non-electrical contact with the first electrode portion (2) the contact member is in conductive contact; the second electrode portion is disposed substantially at a center in a radial direction of the probe, and the first electrode portion is disposed such that a line connecting the first electrode portion and the second electrode portion is connected to the plurality of probes The arrangement direction is inclined at a predetermined angle; and the first electrode portion and the second electrode portion are arranged in a top view, and the center of the first electrode portion is separated from the center of the second electrode portion, and is viewed from the top view. The maximum width of the first electrode portion is smaller than the outer diameter of the first contact. A method of manufacturing an electrode structure according to claim 10, wherein the conductive member having the first electrode portion and the second electrode portion is formed to have a conductive member. a retaining body for holding the retaining hole of the linear member; and the protruding portion of the linear member protruding from the retaining body is cut and removed so as to be flush with the retaining body.