TWI457571B - Inspection probe and inspection fixture - Google Patents
Inspection probe and inspection fixture Download PDFInfo
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- TWI457571B TWI457571B TW101126326A TW101126326A TWI457571B TW I457571 B TWI457571 B TW I457571B TW 101126326 A TW101126326 A TW 101126326A TW 101126326 A TW101126326 A TW 101126326A TW I457571 B TWI457571 B TW I457571B
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- 238000007689 inspection Methods 0.000 title 2
- 239000000523 sample Substances 0.000 title 1
- 238000001514 detection method Methods 0.000 claims description 79
- 230000008602 contraction Effects 0.000 claims description 28
- 238000004891 communication Methods 0.000 claims description 8
- 238000003825 pressing Methods 0.000 description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 239000011295 pitch Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004146 energy storage Methods 0.000 description 2
- -1 for example Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2836—Fault-finding or characterising
- G01R31/2844—Fault-finding or characterising using test interfaces, e.g. adapters, test boxes, switches, PIN drivers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2896—Testing of IC packages; Test features related to IC packages
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Geometry (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
本發明涉及一種將預先設定在被檢測物的檢測對象部上的檢測點與實施這種檢測的檢測裝置電性連接的檢測用夾具以及在檢測用夾具中使用的檢測用接觸件。The present invention relates to a detecting jig that electrically connects a detecting point set in advance on a detection target portion of a test object to a detecting device that performs such detection, and a detecting contact member used in the detecting jig.
安裝有檢測用接觸件的檢測用夾具經由該檢測用接觸件，針對被檢測物所具有的檢測對象部，從檢測裝置向既定的檢測位置供給電流或電信號，並從檢測對象部檢測電信號，藉此進行檢測對象部的電特性的檢測、動作測試的實施等。The detecting jig to which the detecting contact is attached is supplied with a current or an electric signal from the detecting device to the predetermined detecting position of the detecting target portion of the object to be detected, and the electric signal is detected from the detecting target portion. Thereby, the detection of the electrical characteristics of the detection target portion, the implementation of the operation test, and the like are performed.
作為被檢測物，例如有印刷線路基板、撓性基板、陶瓷多層線路基板、液晶顯示器或電漿顯示器用的電極板、以及半導體封裝用的封裝基板或薄膜載體等各種基板、或半導體晶圓、半導體晶片或CSP(晶片尺寸封裝，Chip size package)等的半導體裝置。Examples of the object to be detected include various substrates such as a printed circuit board, a flexible substrate, a ceramic multilayer wiring board, an electrode plate for a liquid crystal display or a plasma display, and a package substrate or a film carrier for a semiconductor package, or a semiconductor wafer. A semiconductor device such as a semiconductor wafer or a CSP (Chip size package).
在本說明書中，將上述的這些被檢測物統稱為「被檢測物」，將形成在被檢測物上的檢測對象部稱為「檢測部」。另外，可以在檢測部上設定用於實際檢測該檢測部的電特性的檢測點，並藉由將接觸件壓接在該檢測點上而與檢測部成為導通狀態。In the present specification, the above-described objects to be detected are collectively referred to as "detected objects", and the portion to be detected formed on the object to be detected is referred to as a "detecting portion". Further, a detection point for actually detecting the electrical characteristics of the detecting portion may be set in the detecting portion, and the detecting portion may be turned on by pressing the contact member at the detecting point.
這種檢測用夾具的接觸件的一端壓接在配線(檢測部)上的檢測點上，另一端壓接在與基板檢測裝置電性連接的電極部上。另外，經由該檢測用夾具，從基板檢測裝置供給用於測量配線的電特性的電流或電壓，並且將從配線中檢測的電信號向基板檢測裝置發送。One end of the contact of the detecting jig is pressed against the detection point on the wiring (detection portion), and the other end is pressed against the electrode portion electrically connected to the substrate detecting device. Further, a current or a voltage for measuring electrical characteristics of the wiring is supplied from the substrate detecting device via the detecting jig, and an electric signal detected from the wiring is transmitted to the substrate detecting device.
這種檢測用夾具例如可以例示出在專利文獻1中公開的夾具。在專利文獻1的檢測用夾具中，在導電性可移動體(接觸件)上安裝有螺旋彈簧。在這種檢測用夾具中，接觸件在被安裝在支架上時，因螺旋彈簧的收縮而被按壓在導電部上，提供了導電部與接觸件的良好的接觸狀態。Such a jig for detection can be exemplified by a jig disclosed in Patent Document 1, for example. In the detecting jig of Patent Document 1, a coil spring is attached to a conductive movable body (contact). In such a detecting jig, when the contact member is mounted on the bracket, the contact portion is pressed against the conductive portion by the contraction of the coil spring, providing a good contact state between the conductive portion and the contact member.
另外，為了破壞在檢測點的表面上形成的氧化膜等的絕緣層而使接觸件與檢測點導通接觸，調整接觸件，俾使接觸件與檢測點接觸以使螺旋彈簧收縮既定的量(既定長度)而可以獲得既定的按壓力。Further, in order to break the insulating layer such as an oxide film formed on the surface of the detection point, the contact member is brought into conductive contact with the detection point, the contact member is adjusted, and the contact member is brought into contact with the detection point to contract the coil spring by a predetermined amount (established amount) Length) can achieve a given pressing force.
特別是近年來因為基板上設定了大量的檢測點，所以為了對應這些檢測點，也大量安裝接觸件在支架上。因此，如上所述，如果接觸件的數量增加，則收縮的螺旋彈簧也增加，對支架而言須負擔很大的力。存在有負擔了很大的力的支架因所述的螺旋彈簧的力導致整體彎曲的問題。In particular, in recent years, since a large number of detection points are set on the substrate, a large number of contacts are mounted on the holder in order to correspond to these detection points. Therefore, as described above, if the number of the contacts is increased, the contracted coil spring is also increased, and a large force is required for the bracket. There is a problem that the bracket that is burdened with a large force causes an overall bending due to the force of the coil spring.
另一方面，要降低施加在支架上的力，就要研究降低螺旋彈簧的彈力，但在收縮既定長度的情況下螺旋彈簧不能提供所希望的按壓力，存在有接觸件與檢測點不能因足夠的按壓力導通接觸的問題。On the other hand, to reduce the force exerted on the bracket, it is necessary to study to reduce the elastic force of the coil spring, but the coil spring cannot provide the desired pressing force when the length is contracted, and there are enough contacts and detection points. The problem of conductive contact with the pressure.
專利文獻1：日本特開2003-215160號公報Patent Document 1: Japanese Laid-Open Patent Publication No. 2003-215160
本發明提供一種可以應對基板的微細化以及複雜化、並可以在檢測時提供強的按壓力且可以在非檢測時提供弱的按壓力的微細的接觸件以及使用這種接觸件的檢測用夾具。The present invention provides a fine contact member which can cope with the miniaturization and complication of a substrate, can provide a strong pressing force at the time of detection, and can provide a weak pressing force at the time of non-detection, and a detecting jig using the contact member .
請求項1之發明提供一種檢測用夾具，將成為被檢測對象並具有多個檢測點的被檢測物，與檢測該檢測點間的電特性的檢測裝置電性連接，其特徵在於具備：電極體，具備與該檢測裝置電性連接的多個電極部；檢測用接觸件，將該電極部與該檢測點電性連接；以及固持體，固持該檢測用接觸件；其中，該檢測用接觸件具備：導電性的筒狀構件，兩端具有開口，且前端開口部與該電極部的表面抵接；導電性的棒狀構件，從該筒狀構件的後端開口部突出並配置在該筒狀構件的內部，且後端與該檢測點接觸；以及固定部，將該筒狀構件與該棒狀構件電性連接；該固持體具備：第一板狀構件，具有將該前端開口部向該電極體引導的第一引導孔；以及第二板狀構件，具有將該棒狀構件的後端向該檢測點引導的第二引導孔；該筒狀構件具有：上筒部，具有與該電極部的表面接觸的前端開口部並將該棒狀構件的前端部容納在內部；第一缺口部，形成為與該上筒部直徑相同並與該上筒部連通連接，且在該筒狀構件的壁部形成沿長軸方向伸縮的螺旋狀的缺口；中筒部，形成為與該第一缺口部直徑相同並與該第一缺口部連通連接；第二缺口部，形成為與該中筒部直徑相同並與該中筒部連通連接，且在該筒狀構件的壁部形成沿長軸方向伸縮的螺旋狀的缺口；以及 下筒部，形成為與該第二缺口部直徑相同並與該第二缺口部連通連接，且具備該固定部；該第一缺口部或該第二缺口部中的任意一個在該棒狀構件與該檢測點抵接並實施檢測時達到收縮的極限。The invention of claim 1 provides a detecting jig that electrically connects a detected object having a plurality of detecting points to the object to be detected, and is electrically connected to a detecting device that detects electrical characteristics between the detecting points, and is characterized in that: the electrode body is provided a plurality of electrode portions electrically connected to the detecting device, a detecting contact member electrically connecting the electrode portion to the detecting point, and a holding body holding the detecting contact member; wherein the detecting contact member The conductive tubular member has an opening at both ends, and the front end opening abuts against the surface of the electrode portion; the conductive rod-shaped member protrudes from the rear end opening of the tubular member and is disposed in the tube The inside of the member, and the rear end is in contact with the detection point; and the fixing portion electrically connecting the tubular member to the rod member; the holding body includes: a first plate member having the front end opening a first guiding hole guided by the electrode body; and a second plate-shaped member having a second guiding hole guiding the rear end of the rod-shaped member toward the detecting point; the cylindrical member having: an upper tube portion having Electricity a front end opening portion of the surface of the pole portion is in contact with the front end portion of the rod-shaped member; the first notch portion is formed to have the same diameter as the upper tubular portion and is connected to the upper tubular portion, and is in the tubular shape a wall portion of the member forms a spiral notch that expands and contracts in a long axis direction; the middle tube portion is formed to have the same diameter as the first notch portion and is in communication with the first notch portion; and the second notch portion is formed with the middle portion The tubular portion has the same diameter and is in communication with the intermediate tubular portion, and a spiral notch that expands and contracts in the longitudinal direction is formed in the wall portion of the tubular member; The lower tubular portion is formed to have the same diameter as the second notch portion and is connected to the second notch portion, and is provided with the fixing portion; any one of the first notch portion or the second notch portion is in the rod member The limit of shrinkage is reached when the test point is abutted and the test is performed.
請求項2之發明提供如請求項第1項之檢測用夾具，其中該第一缺口部和該第二缺口部的螺旋的節距不同。The invention of claim 2, wherein the first notch portion and the second notch portion have different pitches of the spirals.
請求項3之發明提供如請求項第1或2項之檢測用夾具，其中該第一缺口部的缺口寬度與該第二缺口部的缺口寬度不同。The invention of claim 3, wherein the notch width of the first notch portion is different from the notch width of the second notch portion.
請求項4之發明提供一種檢測用接觸件，將成為被檢測對象的被檢測物的多個檢測點與在檢測用夾具的電極體上具備的多個電極部電性連接，該檢測用夾具電性連接該多個檢測點與檢測該檢測點間的電特性的檢測裝置，該檢測用接觸件具備：外側筒體，前端開口部成為與該電極部抵接的電極端；以及導電性的內側筒體，從該外側筒體的後端開口部突出並與該外側筒體的內部電性連接且同軸配置，且後端部成為與該檢測點壓接的檢測端；該外側筒體具有：外側上筒部，具有成為該電極端的前端開口部；筒狀的第一缺口部，與該外側上筒部直徑相同，且前端開口部與該外側上筒部的後端開口部連通連接並在周面上具備沿長軸方向形成的螺旋狀的缺口；外側中筒部，與該第一缺口部直徑相同，且與該第一缺口部連通連接；筒狀的第二缺口部，與該外側中筒部直徑相同，且與該外側中筒部連通連接並在周面上具備沿長軸方向形成的螺旋狀的缺口；以及外側下筒部，與該第二缺口部直徑相同，且與該第二缺口部連通連接並具備固定部；該內側筒體具有：內側下筒部，具有成為該檢測端的後端部；以及內側上筒部，配置在該外側筒體內部；其中，該固定部將該外側筒體與該內側筒體電性連接並固定，該第一缺口部和該第二缺口部的螺旋的節距不同。The invention of claim 4 provides a detecting contact, wherein a plurality of detecting points of the object to be detected are electrically connected to a plurality of electrode portions provided on the electrode body of the detecting jig, and the detecting jig is electrically The detecting device for connecting the plurality of detecting points and detecting the electrical characteristics between the detecting points, the detecting contact member comprising: an outer cylindrical body, the front end opening portion being an electrode end abutting the electrode portion; and a conductive inner side The tubular body protrudes from the rear end opening of the outer cylinder and is electrically connected to the inner portion of the outer cylinder and coaxially disposed, and the rear end portion is a detecting end that is pressed against the detection point; the outer cylinder has: The outer upper tubular portion has a distal end opening portion serving as the electrode end; the cylindrical first notch portion has the same diameter as the outer upper tubular portion, and the distal end opening portion communicates with the rear end opening portion of the outer upper tubular portion and is connected The circumferential surface has a spiral notch formed along the major axis direction; the outer middle tubular portion has the same diameter as the first notch portion and is in communication with the first notch portion; the cylindrical second notch portion and the outer side Middle tube a portion having the same diameter and communicating with the outer middle tubular portion and having a spiral notch formed along the longitudinal direction on the circumferential surface; and an outer lower tubular portion having the same diameter as the second notched portion and the second portion The notch portion is connected to each other and includes a fixing portion; the inner cylindrical body has an inner lower tubular portion having a rear end portion serving as the detecting end, and an inner upper tubular portion disposed inside the outer cylindrical body; wherein the fixing portion The outer cylinder is electrically connected and fixed to the inner cylinder, and the pitch of the spiral of the first notch and the second notch is different.
根據本發明的上述第1和第4項，由於將導電性的棒狀構件同軸地配置在具備兩處螺旋狀的缺口部的筒狀構件的內部且電性連接並固定，所以這些筒狀構件和棒狀構件作為一個檢測用接觸件而發揮作用。設置在筒狀構件上的缺口部一體地形成在筒狀構件上，並發揮在長軸方向上收縮的彈性部的作用。亦即，該檢測用接觸件只包括筒狀構件、棒狀構件和固定部而形成。因此，與使用螺旋彈簧的檢測用接觸件相比，可以減少零件數量，並簡單地形成檢測用接觸件。According to the first and fourth aspects of the present invention, the conductive rod-shaped member is coaxially disposed inside the cylindrical member having the two spiral notches, and is electrically connected and fixed. The rod member functions as a detecting contact. The notch portion provided in the tubular member is integrally formed on the tubular member and functions as an elastic portion that contracts in the longitudinal direction. That is, the detecting contact member is formed only by the cylindrical member, the rod member, and the fixing portion. Therefore, compared with the detecting contact member using the coil spring, the number of parts can be reduced, and the detecting contact member can be simply formed.
另外，提供一種微細的接觸件以及使用該接觸件的檢測用夾具，該檢測用接觸件可以在檢測時提供強的按壓力而在非檢測時提供弱的按壓力。Further, there is provided a fine contact member and a detecting jig using the same, which can provide a strong pressing force at the time of detection and a weak pressing force at the time of non-detection.
根據本發明的上述第2項，由於第一缺口部與第二缺口部的螺旋節距不同，所以可以簡便地產生檢測時和非檢測時的按壓力之差。According to the second aspect of the invention, since the spiral pitch of the first notch portion and the second notch portion are different, the difference in pressing force between the detection time and the non-detection can be easily generated.
根據本發明的上述第3項，由於第一缺口部與第二缺口部的缺口寬度不同，所以可以簡便地產生檢測時和非檢測時的按壓力之差。According to the third aspect of the present invention, since the notch widths of the first notch portion and the second notch portion are different, the difference in pressing force between the detection time and the non-detection can be easily generated.
d1‧‧‧螺旋節距D1‧‧‧spiral pitch
L‧‧‧間隔L‧‧‧ interval
1‧‧‧檢測用夾具1‧‧‧Detection fixture
2‧‧‧接觸件2‧‧‧Contacts
3‧‧‧固持體3‧‧‧Retaining body
4‧‧‧電極體4‧‧‧Electrode body
5‧‧‧導線部5‧‧‧Wire Department
8‧‧‧被檢測物8‧‧‧Tested objects
21‧‧‧筒狀構件21‧‧‧Cylinder members
21a、21b‧‧‧開口部21a, 21b‧‧‧ openings
21c‧‧‧上筒部21c‧‧‧Upper tube
21d‧‧‧第一缺口部21d‧‧‧First gap
21e‧‧‧中筒部21e‧‧‧中管部
21f‧‧‧第二缺口部21f‧‧‧second gap
21g‧‧‧下筒部21g‧‧‧Under the tube
22‧‧‧棒狀構件22‧‧‧ rod members
22a‧‧‧前端部22a‧‧‧ front end
22b‧‧‧後端部22b‧‧‧ back end
23‧‧‧固定部23‧‧‧ Fixed Department
31‧‧‧第一板狀構件31‧‧‧First plate member
31h‧‧‧第一引導孔31h‧‧‧First lead hole
32‧‧‧第二板狀構件32‧‧‧Second plate member
32h‧‧‧第二引導孔32h‧‧‧Second guiding hole
41‧‧‧電極部41‧‧‧Electrode
81‧‧‧檢測點81‧‧‧Checkpoint
圖1是顯示本發明的檢測用夾具的概略結構圖。Fig. 1 is a schematic block diagram showing a jig for detection of the present invention.
圖2是本發明的檢測用接觸件的概略剖面圖。Fig. 2 is a schematic cross-sectional view showing a detecting contact of the present invention.
圖3是本發明的檢測用接觸件的筒狀構件的概略剖面圖。Fig. 3 is a schematic cross-sectional view showing a cylindrical member of the detecting contact of the present invention.
圖4是本發明的檢測用接觸件的棒狀構件的概略剖面圖。Fig. 4 is a schematic cross-sectional view showing a rod-shaped member of the detecting contact of the present invention.
圖5是顯示本發明的檢測用接觸件的安裝狀態的概略剖面圖。Fig. 5 is a schematic cross-sectional view showing a mounted state of the detecting contact of the present invention.
圖6是顯示本發明的檢測用夾具的檢測時的動作狀態的概略剖面圖。Fig. 6 is a schematic cross-sectional view showing an operation state at the time of detection of the detecting jig of the present invention.
下面說明用於實施本發明的優選實施方式。Preferred embodiments for carrying out the invention are described below.
圖1是顯示本發明的檢測用夾具的第一實施方式的概略結構圖。本發 明的檢測用夾具1具備：多個接觸件2；將這些接觸件2呈多針狀固持的固持體3；支持該固持體3且具有與各個接觸件2接觸並成為導通狀態的電極部41的電極體4；以及從電極部41電性連接並延伸設置的導線部5。Fig. 1 is a schematic block diagram showing a first embodiment of a detecting jig of the present invention. This hair The detecting jig 1 of the present invention includes a plurality of contacts 2, a holding body 3 that holds the contacts 2 in a multi-needle shape, and an electrode portion 41 that supports the holding body 3 and that is in contact with each of the contacts 2 and is in an ON state. The electrode body 4; and the wire portion 5 electrically connected from the electrode portion 41 and extending.
另外，在圖1中，作為多個接觸件2顯示了三根接觸件並顯示了分別對應的三根導線部5，但它們並不限於三根，而可以與設定在檢測對象上的檢測點相對應而決定之。In addition, in FIG. 1, three contact pieces are shown as a plurality of contacts 2 and three lead wires 5 respectively corresponding to each other are shown, but they are not limited to three, but may correspond to detection points set on the detection target. Decided.
本發明的特徵在於：利用形成在導電性的筒狀構件上的缺口部發揮作為彈性部的功能，藉由改變至少設置在兩處的缺口部的彈性特性，可以提供在檢測中所需的接觸壓力和用於始終與電極部41接觸的壓接力。The present invention is characterized in that the notch portion formed on the conductive cylindrical member functions as an elastic portion, and by changing the elastic characteristics of the notched portions provided at least at two places, it is possible to provide the contact required in the detection. The pressure and the crimping force for always contacting the electrode portion 41.
藉由如本發明所示那樣構成檢測用接觸件，可以應對基板的微細化以及複雜化，並可以降低零件數量並簡單化，還可以在檢測時向檢測點提供大的接觸壓力並在非檢測時向固持體提供小的接觸壓力。By constituting the detecting contact member as shown in the present invention, it is possible to cope with the miniaturization and complication of the substrate, and it is possible to reduce the number of parts and to simplify the simplification, and to provide a large contact pressure to the detecting point during detection and to perform non-detection. Provides a small contact pressure to the holder.
下面說明在本發明的檢測用夾具中使用的檢測用接觸件2。圖2是本發明的檢測用接觸件2的概略剖面圖。Next, the detecting contact 2 used in the detecting jig of the present invention will be described. Fig. 2 is a schematic cross-sectional view of the detecting contact 2 of the present invention.
檢測用接觸件2的一端與檢測點導通接觸，而另一端與後述的電極部41導通接觸，藉此將檢測點與電極部電性連接。One end of the detecting contact 2 is in conduction contact with the detection point, and the other end is in conduction contact with an electrode portion 41 to be described later, whereby the detection point is electrically connected to the electrode portion.
該檢測用接觸件2具有筒狀構件21和棒狀構件22(參照圖2)。The detecting contact 2 has a tubular member 21 and a rod member 22 (see Fig. 2).
筒狀構件21在兩端具有開口部21a、21b，一方的前端開口部21a與電極部41的表面抵接。該筒狀構件21可以用導電性的材料形成，例如可以利用銅、鎳或它們的合金來形成。The tubular member 21 has openings 21a and 21b at both ends, and one of the distal end openings 21a is in contact with the surface of the electrode portion 41. The cylindrical member 21 may be formed of a conductive material, for example, copper, nickel, or an alloy thereof.
圖3是本發明的筒狀構件的概略剖面圖。Fig. 3 is a schematic cross-sectional view showing a tubular member of the present invention.
該筒狀構件21如圖3所示，具有上筒部21c、第一缺口部21d、中筒部21e、第二缺口部21f和下筒部21g。As shown in FIG. 3, the tubular member 21 has an upper tubular portion 21c, a first notch portion 21d, a middle tubular portion 21e, a second notch portion 21f, and a lower tubular portion 21g.
上筒部21c具有與電極部41的表面接觸的前端開口部21a，並在內部容納後述的棒狀構件22的前端部22a。該上筒部21c是筒狀構件21的一部分，具有在外徑和內徑方面都與筒狀構件21相等的形狀。The upper tubular portion 21c has a distal end opening portion 21a that is in contact with the surface of the electrode portion 41, and accommodates a distal end portion 22a of a rod-shaped member 22 to be described later. The upper tubular portion 21c is a part of the tubular member 21 and has a shape equal to the outer diameter and the inner diameter of the tubular member 21.
第一缺口部21d被形成為與上筒部21c直徑相同並與上筒部21c連通連接，在筒狀構件21的壁部形成在長軸方向上伸縮的螺旋狀的缺口而成。該第一缺口部21d由於形成在筒狀構件21的壁面上，所以成為在外徑和內徑方面都與筒狀構件21相等的形狀。The first notch portion 21d is formed to have the same diameter as the upper tubular portion 21c and is connected to the upper tubular portion 21c, and a wall portion of the tubular member 21 is formed with a spiral notch that expands and contracts in the longitudinal direction. Since the first notch portion 21d is formed on the wall surface of the tubular member 21, it has a shape equal to the cylindrical member 21 in both the outer diameter and the inner diameter.
中筒部21e被形成為與第一缺口部21d直徑相同並與第一缺口部21d連通連接。該中筒構件21e是筒狀構件21的一部分，具有在外徑和內徑方面都與筒狀構件21相等的形狀。The intermediate tubular portion 21e is formed to have the same diameter as the first notch portion 21d and is in communication with the first notch portion 21d. The middle tubular member 21e is a part of the tubular member 21 and has a shape equal to the outer diameter and the inner diameter of the cylindrical member 21.
第二缺口部21f被形成為與中筒部21e直徑相同並與中筒部21e連通連接，在筒狀構件21的壁部形成在長軸方向上伸縮的螺旋狀的缺口而成。該第二缺口部21f由於形成在筒狀構件21的壁面上，所以成為在外徑和內徑方面都與筒狀構件21相等的形狀。The second notch portion 21f is formed to have the same diameter as the intermediate tubular portion 21e and is connected to the intermediate tubular portion 21e, and a wall portion of the tubular member 21 is formed with a spiral notch that expands and contracts in the longitudinal direction. Since the second notch portion 21f is formed on the wall surface of the tubular member 21, it has a shape equal to the cylindrical member 21 in both the outer diameter and the inner diameter.
下筒部21g被形成為與第二缺口部21f直徑相同並與第二缺口部21f連通連接。下筒部21g具備用於將後述的棒狀構件22與筒狀構件21固定並電性連接的固定部23。該下筒部21g是筒狀構件21的一部分，並具有在外徑和內徑方面都與筒狀構件21相等的形狀。另外，該下筒部21g具有後端開口部21b。The lower tubular portion 21g is formed to have the same diameter as the second cutout portion 21f and is in communication with the second cutout portion 21f. The lower tubular portion 21g includes a fixing portion 23 for fixing and electrically connecting the rod-shaped member 22 to be described later to the tubular member 21. The lower tubular portion 21g is a part of the tubular member 21 and has a shape equal to the outer diameter and the inner diameter of the tubular member 21. Further, the lower tubular portion 21g has a rear end opening portion 21b.
筒狀構件21如上所述，具有上筒部21c、第一缺口部21d、中筒部21e、第二缺口部21f和下筒部21g而形成，各個部分構成了筒狀構件21。As described above, the tubular member 21 has the upper tubular portion 21c, the first cutout portion 21d, the intermediate tubular portion 21e, the second cutout portion 21f, and the lower tubular portion 21g, and each of the portions constitutes the tubular member 21.
第一缺口部21d在棒狀構件22與檢測點抵接並實施檢測時(檢測時)達到收縮的極限。這使得由形成在第一缺口部21d上的缺口所造成的空間因第一缺口部21d的收縮而成為該缺口(的空間)消失的狀態，使第一缺口部21d達到收縮的極限。達到收縮的極限的第一缺口部21d因為不再發生進一步的收縮，所以變為發揮與上筒部21c、中筒部21e或下筒部21g同樣的功能。The first notch portion 21d reaches the limit of contraction when the rod-shaped member 22 abuts on the detection point and performs detection (at the time of detection). This causes the space caused by the notch formed in the first notch portion 21d to become a state in which the space of the notch disappears due to the contraction of the first notch portion 21d, and the first notch portion 21d reaches the limit of contraction. The first notch portion 21d that has reached the limit of contraction has a function similar to that of the upper tubular portion 21c, the intermediate tubular portion 21e, or the lower tubular portion 21g because no further contraction occurs.
如上所述，在檢測時，雖然第一缺口部21d達到了收縮的極限，但第二缺口部21f沒有達到收縮的極限。這是因為，在棒狀構件22與檢測點抵接的情況下，藉由使第二缺口部21f具有收縮的餘量，可以利用第二缺口部21f的收縮來吸收檢測點(凸起)的高度偏差。As described above, at the time of detection, although the first notch portion 21d reaches the limit of contraction, the second notch portion 21f does not reach the limit of contraction. This is because when the rod-shaped member 22 abuts against the detection point, by making the second notch portion 21f have a contraction margin, the contraction of the second notch portion 21f can be utilized to absorb the detection point (protrusion). Height deviation.
在棒狀構件22未與檢測點抵接的情況下(非檢測時)，檢測用接觸件2處於被後述的固持體3所固持的狀態，因此成為第一缺口部21d和第二缺口部21f收縮的狀態。此時，第一缺口部21d處於收縮到收縮的極限附近的狀態，而第二缺口部21f成為少量收縮的狀態。When the rod-shaped member 22 is not in contact with the detection point (at the time of non-detection), the detecting contact 2 is in a state of being held by the holding body 3 to be described later, and thus the first notch portion 21d and the second notch portion 21f are formed. The state of contraction. At this time, the first notch portion 21d is in a state of being contracted to the vicinity of the limit of contraction, and the second notch portion 21f is in a state of being contracted by a small amount.
亦即，在非檢測時，第一缺口部21d大幅收縮，而第二缺口部21f少量收縮。在檢測時，第一缺口部21d不再進一步收縮(因為達到了收縮極限)，而只有第二缺口部21f收縮。That is, at the time of non-detection, the first notch portion 21d is largely contracted, and the second notch portion 21f is contracted a small amount. At the time of detection, the first notch portion 21d is no longer further contracted (because the contraction limit is reached), and only the second notch portion 21f is contracted.
第一缺口部21d和第二缺口部21f如上所述，在檢測時和非檢測時功能不同，而為了具有這種功能差異，形成為螺旋的節距不同的方式。在顯示筒狀構件的一種實施方式的概略剖面圖的圖3中，第一缺口部21d的螺旋節距d1與第二缺口部21f的螺旋節距d2被不同地形成。As described above, the first notch portion 21d and the second notch portion 21f have different functions at the time of detection and at the time of non-detection, and in order to have such a functional difference, the pitch of the spiral is different. In FIG. 3 showing a schematic cross-sectional view of an embodiment of the cylindrical member, the spiral pitch d1 of the first notch portion 21d and the spiral pitch d2 of the second notch portion 21f are formed differently.
在該圖3中，以成為第一缺口部21d的螺旋節距d1短，而第二缺口部21f的螺旋節距長的方式相對地形成。另外，在圖3中，形成第一缺口部21d的壁面的寬度和形成第二缺口部21f的壁面的寬度是以相同的長度形成的。另外，這些螺旋的寬度並沒有特別的限定，只要可以起到第一缺口部21d和第二缺口部21f的功能則可以任意調整。In FIG. 3, the spiral pitch d1 which is the first notch portion 21d is short, and the spiral pitch of the second notch portion 21f is relatively long. Further, in Fig. 3, the width of the wall surface on which the first notch portion 21d is formed and the width of the wall surface on which the second notch portion 21f is formed are formed in the same length. Further, the width of these spirals is not particularly limited, and may be arbitrarily adjusted as long as it functions as the first notch portion 21d and the second notch portion 21f.
第一缺口部21d和第二缺口部21f如上所述，在檢測時和非檢測時可以收縮的收縮量(收縮長度)不同，藉此形成為功能不同的方式。亦即，非檢測時的收縮量受第一缺口部21d和第二缺口部21f的影響，而檢測時的收縮量因第一缺口部21d處於收縮極限而只受第二缺口部21f的影響。因此，第二缺口部21f的缺口寬度形成得比第一缺口部21d的缺口寬度寬。藉由這樣地形成，在非檢測時第一缺口部21d和第二缺口部21f收縮，而在檢測時 只有第二缺口部21f可以進一步收縮。As described above, the first notch portion 21d and the second notch portion 21f are different in contraction amount (contraction length) which can be contracted at the time of detection and non-detection, thereby forming a different function. That is, the amount of contraction at the time of non-detection is affected by the first notch portion 21d and the second notch portion 21f, and the amount of contraction at the time of detection is affected only by the second notch portion 21f because the first notch portion 21d is at the contraction limit. Therefore, the notch width of the second notch portion 21f is formed to be wider than the notch width of the first notch portion 21d. By forming in this way, the first notch portion 21d and the second notch portion 21f are contracted at the time of non-detection, and at the time of detection Only the second notch portion 21f can be further contracted.
在上述的說明中，說明了在棒狀構件22抵接於檢測點並實施檢測時，達到第一缺口部21d的收縮的極限的情況，但也可以代替第一缺口部21d，使第二缺口部21f達到收縮的極限。在本發明中，只要第一缺口部21d或第二缺口部21f中的任意一個達到收縮的極限即可。In the above description, the case where the limit of the contraction of the first notch portion 21d is reached when the rod-shaped member 22 abuts on the detection point and the detection is performed is described. However, instead of the first notch portion 21d, the second notch may be provided. The portion 21f reaches the limit of contraction. In the present invention, any one of the first notch portion 21d or the second notch portion 21f may reach the limit of contraction.
本發明的筒狀構件21如上所述，具有上筒部21c、第一缺口部21d、中筒部21e、第二缺口部21f和下筒部21g，而為了製造這種筒狀構件21，可以採用以下的製造方法。As described above, the tubular member 21 of the present invention has the upper tubular portion 21c, the first cutout portion 21d, the intermediate tubular portion 21e, the second cutout portion 21f, and the lower tubular portion 21g, and in order to manufacture such a tubular member 21, The following manufacturing methods were employed.
(1)首先，準備形成筒狀構件的中空部的芯線(未圖示)。另外，對於該芯線，使用規定筒狀構件的內徑的所希望的粗細的、具有導電性的芯線(例如，直徑30μm，不銹鋼(SUS))。(1) First, a core wire (not shown) that forms a hollow portion of the tubular member is prepared. Further, a core wire having a desired thickness and having a desired thickness (for example, a diameter of 30 μm, stainless steel (SUS)) for defining the inner diameter of the cylindrical member is used for the core wire.
(2)接著，在芯線(不銹鋼線)上塗敷光致抗蝕劑塗層並覆蓋該芯線的周面。對該光致抗蝕劑的所希望的部分進行曝光/顯影/加熱處理而形成螺旋狀的掩模。此時，例如，可以使芯線沿著中心軸旋轉，並利用激光進行曝光來形成螺旋狀的掩模。為了形成本發明的筒狀構件，將用於形成第一缺口部和第二缺口部的兩處的掩模形成在既定位置上。(2) Next, a photoresist coating is applied on the core wire (stainless steel wire) and covers the peripheral surface of the core wire. A desired portion of the photoresist is subjected to exposure/development/heat treatment to form a spiral mask. At this time, for example, the core wire can be rotated along the central axis and exposed by a laser to form a spiral mask. In order to form the tubular member of the present invention, a mask for forming two portions of the first notch portion and the second notch portion is formed at a predetermined position.
(3)接著，對該芯線實施鍍鎳。此時，因為芯線是導電性的，所以未形成光致抗蝕劑掩模的部位被鍍鎳。(3) Next, the core wire is subjected to nickel plating. At this time, since the core wire is electrically conductive, the portion where the photoresist mask is not formed is plated with nickel.
(4)接著，去除光致抗蝕劑掩模，拉出芯線，形成所希望的長度的筒狀構件。當然也可以在將芯線完全拉出後將筒體切斷。(4) Next, the photoresist mask is removed, and the core wire is pulled out to form a cylindrical member of a desired length. It is of course also possible to cut the cylinder after the core wire has been completely pulled out.
圖4是顯示本發明的棒狀構件的概略剖面圖。Fig. 4 is a schematic cross-sectional view showing a rod-shaped member of the present invention.
棒狀構件22是後端部22b與檢測點相接觸的導電性的構件。棒狀構件22具有細長的形狀，並且例如可以形成為圓柱形狀或圓筒形狀。該棒狀構 件22可以從筒狀構件21的後端開口部21b突出並配置在筒狀構件21內部。The rod-shaped member 22 is a conductive member in which the rear end portion 22b is in contact with the detection point. The rod member 22 has an elongated shape and may be formed, for example, in a cylindrical shape or a cylindrical shape. The rod structure The member 22 can protrude from the rear end opening portion 21b of the tubular member 21 and be disposed inside the tubular member 21.
棒狀構件22的前端部22a可以配置在筒狀構件21的內部，但優選的是配置在筒狀構件21的上筒部21c內。棒狀構件22的前端部22a由於配置在上筒部21c內部，所以貫通第一缺口部21d和第二缺口部21f的部分，具有作為這些缺口部伸縮的引導裝置的功能。棒狀構件22的前端部22a可以被調整成不與後述的電極體4抵接的方式。The front end portion 22a of the rod-shaped member 22 may be disposed inside the tubular member 21, but is preferably disposed in the upper tubular portion 21c of the tubular member 21. Since the distal end portion 22a of the rod-shaped member 22 is disposed inside the upper tubular portion 21c, the portion that penetrates the first notch portion 21d and the second notch portion 21f has a function as a guiding device that expands and contracts these notches. The distal end portion 22a of the rod-shaped member 22 can be adjusted so as not to abut against the electrode body 4 to be described later.
棒狀構件22的後端部22b直接與檢測點抵接。該後端部22b的形狀並沒有特別限定，可以選擇王冠形狀、尖銳形狀、或三棱錐形狀等形狀。棒狀構件22的後端部22b可以從筒狀構件21的後端開口部21b突出，而該後端部22b的突出長度可以被設定為至少比後述的固持體3的第二板狀構件32的厚度更長。The rear end portion 22b of the rod-shaped member 22 directly abuts against the detection point. The shape of the rear end portion 22b is not particularly limited, and a shape such as a crown shape, a sharp shape, or a triangular pyramid shape may be selected. The rear end portion 22b of the rod-shaped member 22 may protrude from the rear end opening portion 21b of the cylindrical member 21, and the protruding length of the rear end portion 22b may be set to be at least smaller than the second plate-like member 32 of the holding body 3 to be described later. The thickness is longer.
棒狀構件22可以用導電性的材料形成，例如可以採用銅(Cu)、鎳(Ni)或它們的合金等。The rod member 22 may be formed of a conductive material, and for example, copper (Cu), nickel (Ni), or an alloy thereof may be used.
固定部23將筒狀構件21與棒狀構件22電性連接。固定部23可以形成在筒狀構件21的下筒部21g上，向著棒狀構件22的後端部22b設置。The fixing portion 23 electrically connects the tubular member 21 and the rod member 22 . The fixing portion 23 may be formed on the lower tubular portion 21g of the tubular member 21 and provided toward the rear end portion 22b of the rod-shaped member 22.
該固定部23例如可以示例出壓緊、激光焊接、電弧焊接或黏合劑等方法，只要可以將筒狀構件21與棒狀構件22電性連接、並且不會使筒狀構件21和棒狀構件22的形狀有大的變形的固定方法就可以採用。The fixing portion 23 can be exemplified by a method such as pressing, laser welding, arc welding, or an adhesive, as long as the cylindrical member 21 can be electrically connected to the rod member 22 without causing the cylindrical member 21 and the rod member. A fixing method in which the shape of 22 has a large deformation can be employed.
檢測用夾具1具備固持檢測用接觸件2的固持體3。The detecting jig 1 includes a holding body 3 that holds the detecting contact 2 .
固持體3可以由絕緣材料形成。固持體3具有第一板狀構件31，該第一板狀構件31具有將筒狀構件21的前端開口部21a向後述的電極體4的電極部41引導的第一引導孔31h。固持體3具有第二板狀構件32，該第二板狀構件32具有將棒狀構件22的後端部22b向檢測點引導的第二引導孔32h。The holder 3 may be formed of an insulating material. The holding body 3 has a first plate-shaped member 31 having a first guiding hole 31h that guides the front end opening portion 21a of the tubular member 21 to the electrode portion 41 of the electrode body 4 to be described later. The holding body 3 has a second plate-shaped member 32 having a second guiding hole 32h that guides the rear end portion 22b of the rod-shaped member 22 toward the detection point.
第一板狀構件31的第一引導孔31h被形成為在第一板狀構件31的厚度方向上具有相同的直徑的貫通孔，該貫通孔的外徑可以被形成為具有比 筒狀構件21的上筒部21c的外徑稍大的直徑。利用該第一引導孔31h，可以將筒狀構件21的前端開口部21a向設置在電極體4上的既定的電極部41引導。The first guide holes 31h of the first plate member 31 are formed as through holes having the same diameter in the thickness direction of the first plate member 31, and the outer diameter of the through holes may be formed to have a ratio The outer diameter of the upper cylindrical portion 21c of the tubular member 21 is slightly larger than the outer diameter. The front end opening portion 21a of the tubular member 21 can be guided to a predetermined electrode portion 41 provided on the electrode body 4 by the first guide hole 31h.
第一板狀構件31的厚度優選為形成得比上筒部21c的長度短。這是為了避免伸縮的第一缺口部21d與第一板狀構件31相接觸而發生磨損。The thickness of the first plate member 31 is preferably formed to be shorter than the length of the upper tubular portion 21c. This is to prevent the first notch portion 21d which is stretched and contracted from coming into contact with the first plate member 31 to be worn.
第二板狀構件32可以被配置為與第一板狀構件31具有既定的間隔並具有用於將檢測用接觸件2的棒狀構件22的後端部22b向檢測點引導的第二引導孔32h。第二板狀構件32的厚度可以調整為在檢測時棒狀構件22的後端部22b可以與檢測點抵接的充分的長度。The second plate member 32 may be configured to have a predetermined interval from the first plate member 31 and have a second guide hole for guiding the rear end portion 22b of the rod member 22 of the detecting contact 2 toward the detection point. 32h. The thickness of the second plate member 32 can be adjusted to a sufficient length at which the rear end portion 22b of the rod member 22 can abut against the detection point.
第二引導孔32h可以被形成為具有在第二板狀構件32的厚度方向上貫通的相同的直徑，並形成為具有比棒狀構件22的外徑大且比筒狀構件21的外徑小的外徑。藉由這樣地形成第二引導孔32h，在將檢測用接觸件2插入固持體3時，檢測用接觸件2的筒狀構件21的後端開口部21b被第二板狀構件32的表面和電極體4所夾持，成為使檢測用接觸件2的棒狀構件22的後端部22b從第二板狀構件32突出的狀態。The second guiding hole 32h may be formed to have the same diameter penetrating in the thickness direction of the second plate member 32, and is formed to have a larger outer diameter than the rod member 22 and smaller than the outer diameter of the cylindrical member 21. The outer diameter. By forming the second guiding hole 32h in this way, when the detecting contact 2 is inserted into the holding body 3, the rear end opening portion 21b of the cylindrical member 21 of the detecting contact 2 is covered by the surface of the second plate member 32. The electrode body 4 is sandwiched, and the rear end portion 22b of the rod-shaped member 22 of the detecting contact 2 protrudes from the second plate member 32.
第二板狀構件32可以被配置為距離電極部41具有既定的間隔L，而該既定的間隔L可以設定為比無負荷狀態下筒狀構件21的長軸方向的長度短的方式。該既定的間隔L與筒狀構件21的自然長度的長度之差成為第一缺口部21d和第二缺口部21f的收縮量。另外，利用該既定的間隔L，第一缺口部21d可以被設定為成為收縮到收縮的極限附近程度的狀態，而第二缺口部21f可以被設定成少量收縮的狀態。另外，在檢測用接觸件2的棒狀構件22與檢測點抵接的情況下，筒狀構件21成為比既定的間隔L更加短的長度。此時，第一缺口部21d達到收縮極限，而第二缺口部21f收縮。The second plate member 32 may be disposed to have a predetermined interval L from the electrode portion 41, and the predetermined interval L may be set to be shorter than the length in the long axis direction of the tubular member 21 in the no-load state. The difference between the predetermined interval L and the length of the natural length of the tubular member 21 is the amount of contraction of the first notch portion 21d and the second notch portion 21f. Further, with the predetermined interval L, the first notch portion 21d can be set to a state of being contracted to the vicinity of the limit of contraction, and the second notch portion 21f can be set to a state of being contracted by a small amount. Further, when the rod-shaped member 22 of the detecting contact 2 abuts against the detection point, the tubular member 21 has a length shorter than a predetermined interval L. At this time, the first notch portion 21d reaches the contraction limit, and the second notch portion 21f contracts.
藉由這樣地形成，在將檢測用接觸件2安裝到固持體3上時，筒狀構件21的第一缺口部21d和第二缺口部21f收縮而成為蓄能狀態，筒狀構件 21以分別按壓電極部41和第二板狀構件32的狀態安裝。When the detecting contact 2 is attached to the holding body 3, the first notch portion 21d and the second notch portion 21f of the tubular member 21 are contracted to be in an energy storage state, and the tubular member is formed. 21 is attached in a state where the electrode portion 41 and the second plate member 32 are pressed, respectively.
在圖5中，第二引導孔32h被顯示為具有相同的直徑的貫通孔，但也可以採用由具有配置在同一軸上的兩個不同外徑的兩個孔(上孔和下孔，未圖示)形成的貫通孔。在此情況下，上孔具有比筒狀構件21的外徑稍大的直徑並配置在第二板狀構件32的電極部一側，而下孔具有比筒狀構件21的外徑小而比棒狀構件22的外徑稍大的直徑並配置在第二板狀構件32的檢測點一側。In FIG. 5, the second guiding holes 32h are shown as through holes having the same diameter, but it is also possible to adopt two holes (upper holes and lower holes) having two different outer diameters disposed on the same axis, The through hole formed in the figure). In this case, the upper hole has a diameter slightly larger than the outer diameter of the cylindrical member 21 and is disposed on the electrode portion side of the second plate member 32, and the lower hole has a smaller outer diameter than the outer diameter of the cylindrical member 21. The rod member 22 has a slightly larger outer diameter and is disposed on the detection point side of the second plate member 32.
藉由這樣地形成上孔和下孔，在將檢測用接觸件2從第一引導孔31h插入並安裝在固持體3上時，利用筒狀構件21的後端開口部21b的外徑與下孔的直徑的不同，可以配置成將筒狀構件21卡止而只有棒狀構件22從第二引導孔32h突出的方式。By forming the upper hole and the lower hole in this manner, when the detecting contact 2 is inserted from the first guiding hole 31h and mounted on the holding body 3, the outer diameter and the lower end of the rear end opening portion 21b of the cylindrical member 21 are utilized. The difference in diameter of the holes may be configured to lock the tubular member 21 and only the rod member 22 protrudes from the second guide hole 32h.
在圖5所示的實施方式中，第一板狀構件31和第二板狀構件32被配置成具有既定的間隔，但也可以在第一板狀構件31和第二板狀構件32之間設置第三板狀構件(未圖示)。該第三板狀構件可以層疊一個或二個以上的板狀構件，並可以配置在由該間隔產生的空間中。在此情況下，例如，第三板狀構件也可以藉由層疊與第一板狀構件31相同的多個板狀構件來形成。另外，形成在第三板狀構件上的貫通孔只要具有檢測用接觸件2的筒狀構件21貫通的大小即可，其斷面形狀不作特別限定。In the embodiment shown in FIG. 5, the first plate member 31 and the second plate member 32 are configured to have a predetermined interval, but may also be between the first plate member 31 and the second plate member 32. A third plate member (not shown) is provided. The third plate member may be laminated with one or two or more plate members, and may be disposed in a space created by the interval. In this case, for example, the third plate member may be formed by laminating a plurality of plate members identical to the first plate member 31. In addition, the through hole formed in the third plate-shaped member may have a size in which the tubular member 21 of the detecting contact 2 penetrates, and the cross-sectional shape thereof is not particularly limited.
電極體4具備與檢測裝置電性連接的多個電極部41。該電極體4所具備的電極部41被配置成與各個檢測用接觸件2相對應的方式。該電極部41與筒狀構件21的前端開口部21a壓接並成為導通狀態。The electrode body 4 includes a plurality of electrode portions 41 that are electrically connected to the detecting device. The electrode portion 41 included in the electrode assembly 4 is disposed so as to correspond to each of the detecting contacts 2 . The electrode portion 41 is pressed against the front end opening portion 21a of the tubular member 21 to be in an on state.
電極部41是用細的導線形成的，在圖5中被配置為該導線的斷面與電極體4的表面成為同一平面的方式。該導線的斷面成為電極部41，並與筒狀構件21的前端開口部21a壓接。The electrode portion 41 is formed of a thin wire, and is arranged such that the cross section of the wire is flush with the surface of the electrode body 4 in Fig. 5 . The cross section of the wire is the electrode portion 41, and is pressed against the front end opening portion 21a of the tubular member 21.
以上是本發明的第一種實施方式的檢測用夾具1的結構的說明。The above is the description of the configuration of the detecting jig 1 according to the first embodiment of the present invention.
下面說明為了組裝檢測用夾具1，將檢測用接觸件2安裝在固持體3上的情況。Next, a case where the detecting contact 2 is attached to the holding body 3 in order to assemble the detecting jig 1 will be described.
在將固持體3安裝在檢測用夾具1上時，首先，將檢測用接觸件2插入固持體3。在將檢測用接觸件2插入固持體3的情況下，檢測用接觸件2的棒狀構件22的後端部22b穿過第一引導孔31h。接著，使該後端部22b穿過第二引導孔32h而插入並從第二引導口32h貫通。When the holding body 3 is attached to the detecting jig 1, first, the detecting contact 2 is inserted into the holding body 3. When the detecting contact 2 is inserted into the holding body 3, the rear end portion 22b of the rod-shaped member 22 of the detecting contact 2 passes through the first guiding hole 31h. Next, the rear end portion 22b is inserted through the second guide hole 32h and penetrated from the second guide port 32h.
插入固持體3的檢測用接觸件2利用筒狀構件21的後端開口部21b而卡止在固持體3上。筒狀構件21的前端開口部21a和棒狀構件22的後端部22b被配置成從第一引導孔31h和第二引導孔32h分別向外側突出的方式。The detecting contact 2 inserted into the holding body 3 is locked to the holding body 3 by the rear end opening portion 21b of the tubular member 21. The front end opening portion 21a of the tubular member 21 and the rear end portion 22b of the rod-shaped member 22 are disposed so as to protrude outward from the first guiding hole 31h and the second guiding hole 32h, respectively.
如果將檢測用接觸件2插入固持體3，則第一板狀構件31向電極體4抵接，使得筒狀構件21的前端開口部21a向既定的電極部41按壓並相接。此時，由於筒狀構件21壓接在電極部41上，所以各個第一缺口部21d和第二缺口部21f收縮並成為蓄能狀態。此時，第一缺口部21d處於收縮到收縮的極限附近階段的狀態，而第二缺口部21f成為只少量收縮的狀態。When the detecting contact 2 is inserted into the holding body 3, the first plate-shaped member 31 comes into contact with the electrode body 4, so that the front end opening portion 21a of the tubular member 21 is pressed against and in contact with the predetermined electrode portion 41. At this time, since the tubular member 21 is pressed against the electrode portion 41, each of the first notch portions 21d and the second notch portions 21f contracts and becomes an energy storage state. At this time, the first notch portion 21d is in a state of being contracted to the vicinity of the limit of contraction, and the second notch portion 21f is in a state of being contracted only by a small amount.
這樣，完成了具有檢測用接觸件2的檢測用夾具1。Thus, the detecting jig 1 having the detecting contact 2 is completed.
下面，說明在檢測中使用檢測用夾具1的情況(檢測時)。Next, the case where the detecting jig 1 is used for the detection (at the time of detection) will be described.
圖6是顯示使用了檢測用接觸件的檢測用夾具的在檢測時的狀態的概略剖面圖。FIG. 6 is a schematic cross-sectional view showing a state at the time of detection of the detecting jig using the detecting contact.
在進行檢測時，將檢測用夾具1安裝在檢測裝置(未圖示)上，導線5與檢測裝置的控制機構電性連接。At the time of detection, the detecting jig 1 is attached to a detecting device (not shown), and the lead wire 5 is electrically connected to the control means of the detecting device.
檢測裝置例如具備使承載被檢測物8的承載台分別在xyz軸方向上移動的移動機構，以使既定的檢測用接觸件2的棒狀構件22的後端部22b壓接在被檢測物8的多個檢測點81上的方式，使載物台在xyz軸方向上移動並進行檢測。The detecting device includes, for example, a moving mechanism that moves the stage on which the object 8 to be detected is moved in the xyz-axis direction, so that the rear end portion 22b of the rod-shaped member 22 of the predetermined detecting contact 2 is pressed against the object 8 to be detected. The manner of the plurality of detection points 81 causes the stage to move in the xyz axis direction and detect.
當檢測裝置以可以使所希望的檢測用接觸件2的後端部22b抵接於既 定的檢測點81上的方式進行載物台的定位時，就以使各個檢測用接觸件2的後端部22b與各個檢測點81導通接觸的方式進行移動。When the detecting device can abut the rear end portion 22b of the desired detecting contact 2 When the stage is positioned in the predetermined detection point 81, the rear end portion 22b of each of the detecting contacts 2 is moved in contact with each of the detection points 81.
此時，如果所希望的後端部22b抵接於既定的檢測點81，則首先，由於後端部22b成為被壓接的狀態，所以筒狀構件21的第一缺口部21d和第二缺口部21f收縮。在此情況下，快到收縮量極限之前的第一缺口部21d達到收縮極限，而第二缺口部21f收縮。At this time, if the desired rear end portion 22b abuts against the predetermined detection point 81, first, since the rear end portion 22b is in a state of being pressed, the first notch portion 21d and the second notch of the cylindrical member 21 are formed. The portion 21f contracts. In this case, the first notch portion 21d immediately before the contraction amount limit reaches the contraction limit, and the second notch portion 21f contracts.
因此，在非檢測時，第一缺口部21d和第二缺口部21f起作用，而在檢測時，第二缺口部21f起作用。亦即，在非檢測時，施加在固持體3的第二板狀構件32上的負荷由第一缺口部21d和第二缺口部21f產生，因此可以設置成比檢測時的負荷小的負荷。可以在檢測時提供強的按壓力而在非檢測時提供弱的按壓力。Therefore, at the time of non-detection, the first notch portion 21d and the second notch portion 21f act, and at the time of detection, the second notch portion 21f functions. That is, at the time of non-detection, the load applied to the second plate member 32 of the holding body 3 is generated by the first notch portion 21d and the second notch portion 21f, so that a load smaller than the load at the time of detection can be provided. It can provide a strong pressing force at the time of detection and a weak pressing force at the time of non-detection.
L‧‧‧間隔L‧‧‧ interval
1‧‧‧檢測用夾具1‧‧‧Detection fixture
2‧‧‧接觸件2‧‧‧Contacts
3‧‧‧固持體3‧‧‧Retaining body
4‧‧‧電極體4‧‧‧Electrode body
8‧‧‧被檢測物8‧‧‧Tested objects
21a、21b‧‧‧開口部21a, 21b‧‧‧ openings
21d‧‧‧第一缺口部21d‧‧‧First gap
21f‧‧‧第二缺口部21f‧‧‧second gap
22b‧‧‧後端部22b‧‧‧ back end
31‧‧‧第一板狀構件31‧‧‧First plate member
31h‧‧‧第一引導孔31h‧‧‧First lead hole
32‧‧‧第二板狀構件32‧‧‧Second plate member
32h‧‧‧第二引導孔32h‧‧‧Second guiding hole
41‧‧‧電極部41‧‧‧Electrode
81‧‧‧檢測點81‧‧‧Checkpoint
Claims (4)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011159519A JP5845678B2 (en) | 2011-07-21 | 2011-07-21 | Inspection contact and inspection jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201329457A TW201329457A (en) | 2013-07-16 |
| TWI457571B true TWI457571B (en) | 2014-10-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101126326A TWI457571B (en) | 2011-07-21 | 2012-07-20 | Inspection probe and inspection fixture |
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| Country | Link |
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| JP (1) | JP5845678B2 (en) |
| KR (1) | KR101312340B1 (en) |
| CN (1) | CN102890166B (en) |
| TW (1) | TWI457571B (en) |
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| JP6317270B2 (en) * | 2015-02-03 | 2018-04-25 | 株式会社日本マイクロニクス | Electrical connection device and pogo pin |
| TW201723492A (en) * | 2015-12-31 | 2017-07-01 | 旺矽科技股份有限公司 | Probe structure and probe device |
| JP2017142080A (en) * | 2016-02-08 | 2017-08-17 | 日本電産リード株式会社 | Contact terminal, inspection tool, and inspection device |
| WO2018101232A1 (en) * | 2016-11-30 | 2018-06-07 | 日本電産リード株式会社 | Contact terminal, inspection jig, and inspection device |
| CN109596677A (en) * | 2018-11-02 | 2019-04-09 | 大族激光科技产业集团股份有限公司 | A kind of quality detection device, method, system and integrated probe component |
| JP2022060711A (en) | 2020-10-05 | 2022-04-15 | 東京特殊電線株式会社 | Contact probe |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201102662A (en) * | 2009-05-29 | 2011-01-16 | Nidec Read Corp | Inspection fixture |
| TW201102669A (en) * | 2009-06-02 | 2011-01-16 | Nidec Read Corp | Inspection fixture, inspection probe |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3990915B2 (en) | 2002-01-23 | 2007-10-17 | 日本発条株式会社 | Conductive contact |
| US6945827B2 (en) * | 2002-12-23 | 2005-09-20 | Formfactor, Inc. | Microelectronic contact structure |
| JP4614434B2 (en) * | 2004-09-30 | 2011-01-19 | 株式会社ヨコオ | probe |
| JP2010281592A (en) * | 2009-06-02 | 2010-12-16 | Nidec-Read Corp | Probe and inspection jig |
| JP5381609B2 (en) * | 2009-10-20 | 2014-01-08 | 日本電産リード株式会社 | Inspection jig and contact |
| GB201000344D0 (en) * | 2010-01-11 | 2010-02-24 | Cambridge Silicon Radio Ltd | An improved test probe |
| JP4572303B1 (en) * | 2010-02-12 | 2010-11-04 | 株式会社ルス・コム | Method for manufacturing contact for electric current inspection jig, contact for electric current inspection jig manufactured thereby, and electric current inspection jig including the same |
-
2011
- 2011-07-21 JP JP2011159519A patent/JP5845678B2/en not_active Expired - Fee Related
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2012
- 2012-07-20 CN CN201210252405.5A patent/CN102890166B/en active Active
- 2012-07-20 TW TW101126326A patent/TWI457571B/en not_active IP Right Cessation
- 2012-07-20 KR KR1020120079080A patent/KR101312340B1/en active IP Right Grant
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201102662A (en) * | 2009-05-29 | 2011-01-16 | Nidec Read Corp | Inspection fixture |
| TW201102669A (en) * | 2009-06-02 | 2011-01-16 | Nidec Read Corp | Inspection fixture, inspection probe |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201329457A (en) | 2013-07-16 |
| JP2013024716A (en) | 2013-02-04 |
| CN102890166B (en) | 2015-03-25 |
| KR20130011964A (en) | 2013-01-30 |
| CN102890166A (en) | 2013-01-23 |
| JP5845678B2 (en) | 2016-01-20 |
| KR101312340B1 (en) | 2013-09-27 |
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