JP5903888B2 - Connection terminal and inspection jig - Google Patents
Connection terminal and inspection jig Download PDFInfo
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- JP5903888B2 JP5903888B2 JP2011535812A JP2011535812A JP5903888B2 JP 5903888 B2 JP5903888 B2 JP 5903888B2 JP 2011535812 A JP2011535812 A JP 2011535812A JP 2011535812 A JP2011535812 A JP 2011535812A JP 5903888 B2 JP5903888 B2 JP 5903888B2
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- 239000000523 sample Substances 0.000 claims description 112
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 98
- 238000007747 plating Methods 0.000 claims description 60
- 229910052759 nickel Inorganic materials 0.000 claims description 49
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- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/22—Contacts for co-operating by abutting
- H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
- H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
- H01R13/2421—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means using coil springs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/22—Contacts for co-operating by abutting
- H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
- H01R13/2464—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point
- H01R13/2492—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point multiple contact points
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R2201/00—Connectors or connections adapted for particular applications
- H01R2201/20—Connectors or connections adapted for particular applications for testing or measuring purposes
Description
本発明は、対象物に予め設定される対象点と検査装置等とを電気的に接続する接続治具及び接続治具に用いられる絶縁被覆を有する接続端子に関する。なお、本発明の接続端子は、接続対象として検査装置に限定されず、所定二点間を電気的に接続するためにも用いられる。 The present invention relates to a connection jig for electrically connecting a target point set in advance to an object and an inspection device and the like, and a connection terminal having an insulating coating used for the connection jig. In addition, the connection terminal of this invention is not limited to a test | inspection apparatus as a connection object, It is used also for electrically connecting between two predetermined points.
接続治具は、接続端子（接触子、プローブ、探針、接触ピン等）を備えていて、それらを経由して、対象物に予め設定される対象点に、検査装置等から電流或いは電気信号を供給するとともに、その対象点から電気信号を検出することによって、対象点間の電気的特性を検出して、導通検査やリーク検査の動作試験等をする。 The connection jig includes a connection terminal (contact, probe, probe, contact pin, etc.), and a current or electrical signal from an inspection device or the like passes through them to a target point set in advance on the object. , And by detecting an electrical signal from the target point, the electrical characteristics between the target points are detected, and an operation test such as a continuity test or a leak test is performed.
その対象物としては、例えば、プリント配線基板、フレキシブル基板、セラミック多層配線基板、液晶ディスプレイやプラズマディスプレイ用の電極板又は半導体パッケージ用のパッケージ基板やフィルムキャリアなど種々の基板や、半導体ウェハや半導体チップやCSP (chip size package)などの半導体装置（LSI（Large Scale Integration）など）が該当する。尚、この接続端子は、上記の対象物と装置とを電気的に接続することを目的とすることもでき、更に、インターポーザやコネクタのように電極端と電極端とを接続する接続治具としても採用することができる。 Examples of such objects include printed wiring boards, flexible boards, ceramic multilayer wiring boards, electrode boards for liquid crystal displays and plasma displays, package boards for semiconductor packages and film carriers, semiconductor wafers and semiconductor chips. And semiconductor devices such as LSI (Large Scale Integration) such as CSP (chip size package). In addition, this connection terminal can also aim at electrically connecting said object and apparatus, and also as a connection jig which connects an electrode end and an electrode end like an interposer or a connector. Can also be adopted.
例えば、被検査物が基板であり、それに搭載されるものがＩＣ等の半導体回路や抵抗器などの電気・電子部品の場合には、基板に形成された検査対象部が配線や電極になる。その場合には、検査対象部の配線が、それらに電気信号を正確に伝達できることを保証するため、電気・電子部品を実装する前のプリント配線基板、液晶パネルやプラズマディスプレイパネルに配線が形成された回線基板に設けられた検査点間の抵抗値等の電気的特性を測定して、その配線の良否を判断している。 For example, when the object to be inspected is a substrate and what is mounted on the substrate is an electrical / electronic component such as a semiconductor circuit such as an IC or a resistor, the inspection target portion formed on the substrate is a wiring or an electrode. In that case, wiring is formed on the printed wiring board, liquid crystal panel, and plasma display panel before mounting the electrical / electronic components to ensure that the wiring of the inspection target part can accurately transmit electrical signals to them. The electrical characteristics such as the resistance value between the inspection points provided on the circuit board are measured, and the quality of the wiring is judged.
接続治具を検査治具として用いる場合には、被検査物の検査対象部の検査点に先端部を接触させてその検査対象部に、測定のための電流を供給したり電圧を測定したりするための複数のプローブが設けられている。 When using the connection jig as an inspection jig, the tip is brought into contact with the inspection point of the inspection target part of the object to be inspected, and a current for measurement or voltage measurement is performed on the inspection target part. A plurality of probes are provided.
本明細書では、上記の対象物を総称して「対象物」と称し、対象物に設定されるとともに接続端子が当接して導通状態となる部位を単に「対象点」と称する。尚、対象点と対象点とで挟まれる部位は「対象点間」として設定されることになる。 In the present specification, the above-described objects are collectively referred to as “objects”, and a portion that is set as an object and is brought into conduction by contact with a connection terminal is simply referred to as “object point”. Note that the portion sandwiched between the target points is set as “between target points”.
対象物が、LSIである場合には、LSIに形成される電子回路が対象部となり、この電子回路の表面パッドが夫々対象点となる。この場合には、LSIに形成される電子回路が所望の電気的特性を有していることを保証するために、対象点間の電気的特性を測定して、この電子回路の良否を判断する。 When the object is an LSI, an electronic circuit formed on the LSI is a target portion, and each surface pad of the electronic circuit is a target point. In this case, in order to ensure that the electronic circuit formed in the LSI has the desired electrical characteristics, the electrical characteristics between the target points are measured to judge the quality of the electronic circuit. .
また、対象物が、電気・電子部品を搭載する基板である場合には、基板に形成された配線が対象部となり、この配線の両端が対象点となる。この場合には、対象部となる配線が、それらに電気信号を正確に伝達できることを保証するため、電気・電子部品を実装する前の配線基板に形成された配線上の所定の対象点間の抵抗値やリーク電流等の電気的特性を測定して、その配線の良否を判断する。 Further, when the object is a substrate on which electric / electronic components are mounted, the wiring formed on the substrate is the target portion, and both ends of the wiring are the target points. In this case, in order to ensure that the wiring as the target part can accurately transmit the electrical signal to them, between the predetermined target points on the wiring formed on the wiring board before mounting the electric / electronic component. The electrical characteristics such as resistance value and leakage current are measured to judge the quality of the wiring.
具体的には、その配線の良否の判定は、各対象点に、電流供給用端子及び／又は電圧測定用の接続端子の先端を当接させて、その接続端子の電流供給用端子から対象点に測定用電流を供給するとともに対象点に当接させた接続端子の先端間の配線に生じた電圧を測定し、それらの供給電流と測定した電圧とから所定の対象点間における配線の抵抗値を算出することによって行う。 Specifically, the quality of the wiring is determined by bringing the current supply terminal and / or the tip of the voltage measurement connection terminal into contact with each target point, and the target point from the current supply terminal of the connection terminal. Measures the voltage generated in the wiring between the tips of the connection terminals that are in contact with the target point while supplying the measurement current to the target point, and the resistance value of the wiring between the predetermined target points based on the supply current and the measured voltage This is done by calculating
例えば、基板検査装置を用いて上記のいずれかの基板の検査を行う場合には、治具移動手段によって基板接続治具の検査用の接続端子（接触子、プローブ、探針、接触ピン等）を被検査基板の対象点まで移動させてそれに当接させて対象物の所定の検査を行い、検査が終了すると、治具移動手段により治具を対象点から待機位置まで移動させる、という制御が行われる。 For example, when any of the above-mentioned substrates is inspected using a substrate inspection apparatus, a connection terminal (contact, probe, probe, contact pin, etc.) for inspecting the substrate connection jig by the jig moving means Is controlled to move the jig from the target point to the standby position by the jig moving means when the inspection is completed. Done.
特許文献１は、周壁の一部がスプリングとなった筒体内に、直線状の接触子及び案内子からなる接触ピンを備え、接触子と案内子との間に鍔部が設けられていて、鍔部が筒体の下端に連結されているコイルスプリングプローブを開示する。
特許文献２は、線形素材の外周面に金めっき層を形成し、その上にさらにニッケルめっき層を形成した後に、線形素材を引っ張って線形素材の断面積を小さくする等によって、線形素材を除去することによって、ニッケル電鋳パイプを製造する方法を開示する。Patent Document 1 includes a contact pin made of a linear contactor and a guide in a cylindrical body in which a part of the peripheral wall is a spring, and a flange is provided between the contact and the guide, Disclosed is a coil spring probe in which a collar is connected to the lower end of a cylinder.
In Patent Document 2, after forming a gold plating layer on the outer peripheral surface of a linear material and further forming a nickel plating layer thereon, the linear material is removed by pulling the linear material to reduce the cross-sectional area of the linear material. A method of manufacturing a nickel electroformed pipe is disclosed.
特許文献３は、SUS線の外周面に絶縁被覆を形成し、それにレーザによりらせん状の溝を形成してSUS線の外周面を露出させ、そこに絶縁被覆と同じ厚さのニッケル被膜を形成し、それから、絶縁被覆を除去するとともにSUS線を引きぬいてコイル状スプリング構造を一部に備えるニッケル電鋳パイプを製造する方法を開示する。 In Patent Document 3, an insulating coating is formed on the outer peripheral surface of the SUS wire, and a spiral groove is formed on the outer surface of the SUS wire to expose the outer peripheral surface of the SUS wire, and a nickel coating having the same thickness as the insulating coating is formed there. Then, a method of manufacturing a nickel electroformed pipe having a coil spring structure in part by removing the insulation coating and pulling off the SUS wire is disclosed.
特許文献４は、マイクロパイプを別に製造し、そのマイクロパイプの外周面にレジスト膜を形成し、そのレジスト膜に、例えば現像によりらせん状に感光部分を溶かしてらせんスペースパターンを形成するとともに、そのマイクロパイプを周回するスペースパターンを所定間隔で形成し、それをエッチング処理することによって、スペースパターンで分断された複数のマイクロコイルを同時に形成する方法を開示する。 In Patent Document 4, a micropipe is manufactured separately, a resist film is formed on the outer peripheral surface of the micropipe, and a helical space pattern is formed on the resist film by, for example, developing a photosensitive portion in a spiral shape by development. Disclosed is a method of simultaneously forming a plurality of microcoils separated by a space pattern by forming a space pattern that circulates around a micropipe at predetermined intervals and etching it.
特許文献１のコイルスプリングプローブでは、接触子と案内子との間に鍔部を設けて、それらを筒体に連結する必要があり、部品点数及び組み立て工数が多くなっている。また、筒体のスプリング部が露出しているため、そのスプリング部が、筒体に対し相対的に移動しない検査用治具のプローブガイド部や挿通孔の壁面に接触したりすることがある。 In the coil spring probe of Patent Document 1, it is necessary to provide a flange between the contact and the guide and connect them to the cylinder, which increases the number of parts and the number of assembly steps. Moreover, since the spring part of the cylinder is exposed, the spring part may come into contact with the probe guide part of the inspection jig that does not move relative to the cylinder and the wall surface of the insertion hole.
また、近年、LSIの形成プロセスが向上し、LSIの微細化が推進され、LSI検査用パッドの狭ピッチ化や多数化が進んだことにより、検査対象の基板の複雑化や微細化がより進み、基板に設定される対象点がより狭く又は小さく形成されるようになったため、接続端子がより細く形成されている。そのため、多数の微細な接続端子をより効率よく製造することが求められている。接続端子には、隣接配置される接続端子同士が接触して短絡することを防止するために、接続端子表面に絶縁被膜を形成することが好ましいが、接続端子が微細になればなるほど、この絶縁被膜を形成することも極めて困難となる。 In recent years, the LSI formation process has been improved, LSI miniaturization has been promoted, and the pitch and number of LSI inspection pads have been reduced, resulting in more complex and miniaturized substrates to be inspected. Since the target point set on the substrate is formed narrower or smaller, the connection terminal is formed thinner. Therefore, it is required to manufacture a large number of fine connection terminals more efficiently. In order to prevent the adjacent connection terminals from coming into contact with each other and short-circuiting the connection terminals, it is preferable to form an insulating film on the connection terminal surface. It is also very difficult to form a film.
特許文献２及び３には、線形素材やSUS線を除去した段階で、微細なニッケル電鋳パイプやコイル状スプリング構造を一部に備えるニッケル電鋳パイプを製造する方法が開示されている。しかし、その製造されたニッケル電鋳パイプから接続治具に取り付けられる接続端子を製造するためには、さらに、そのパイプを接続端子に適した長さに切断したり、接続治具との係止部を形成したりする等の追加の工程が必要である。 Patent Documents 2 and 3 disclose a method of manufacturing a nickel electroformed pipe partially including a fine nickel electroformed pipe or a coiled spring structure at the stage where a linear material or SUS wire is removed. However, in order to manufacture a connection terminal to be attached to the connection jig from the manufactured nickel electroformed pipe, the pipe is further cut to a length suitable for the connection terminal, or locked with the connection jig. An additional process such as forming a part is required.
また、特許文献４には、特許文献２等により製造されたマイクロパイプを製造した後に、追加の工程によってマイクロコイルを製造する方法が開示されている。そのマイクロコイルから接続治具に取り付けられる接続端子を製造するためには、さらに、特許文献２及び３に関連して上述したような追加の工程が必要である。 Patent Document 4 discloses a method of manufacturing a microcoil through an additional process after manufacturing a micropipe manufactured according to Patent Document 2. In order to manufacture the connection terminal attached to the connection jig from the microcoil, an additional process as described above in connection with Patent Documents 2 and 3 is further required.
そこで、本発明は、部品点数の少ないプローブを提供することを目的とする。 Accordingly, an object of the present invention is to provide a probe with a small number of parts.
本発明は、組み立てが簡易なプローブを提供することを目的とする。 An object of the present invention is to provide a probe that can be easily assembled.
本発明は、スプリング部が露出せずに確実に機能するプローブを提供することを目的とする。 An object of this invention is to provide the probe which functions reliably, without exposing a spring part.
本発明は、簡易な構造でプローブを保持することのできる検査用治具を提供する。 The present invention provides an inspection jig capable of holding a probe with a simple structure.
本発明は、プローブを固定するための部材の追加を不要とする検査用治具を提供する。 The present invention provides an inspection jig that does not require the addition of a member for fixing a probe.
本発明は、部品点数を低減して構成を簡素化することのできる検査用治具を提供する。 The present invention provides an inspection jig capable of simplifying the configuration by reducing the number of parts.
また、本発明は、検査点への押圧力の調整をすることができる検査用治具を提供する。 The present invention also provides an inspection jig capable of adjusting the pressing force to the inspection point.
またさらに、本発明は、線形素材やSUS線を取り除いた段階で、追加の工程を必要とすることなく製造される、絶縁被膜を有する接続治具に取り付けられる接続端子及び接続治具を提供することを目的とする。 Furthermore, the present invention provides a connection terminal and a connection jig attached to a connection jig having an insulating film, which is manufactured without the need for an additional process when the linear material or the SUS wire is removed. For the purpose.
本発明は、線形素材やSUS線を取り除いた段階で、接続治具に保持されるための係止部を備える接続端子及び接続治具を提供することを目的とする。 An object of this invention is to provide a connection terminal and a connection jig provided with the latch part for hold | maintaining to a connection jig in the step which removed the linear raw material and the SUS wire.
また、本発明は、線形素材やSUS線を取り除いた段階で、追加の工程を必要とすることなく接続治具に取り付けられる絶縁被膜を有する接続端子の製造方法を提供することを目的とする。 It is another object of the present invention to provide a method of manufacturing a connection terminal having an insulating film that is attached to a connection jig without requiring an additional step when a linear material or SUS wire is removed.
さらに、本発明は、線形素材やSUS線を取り除いた段階で、追加の工程を必要とすることなく接続治具に取り付けられる、絶縁被膜を有する接続端子の高い量産性を有する製造方法を提供することを目的とする。 Furthermore, the present invention provides a manufacturing method having high mass productivity of connection terminals having an insulating coating that is attached to a connection jig without requiring an additional step at the stage of removing a linear material or SUS wire. For the purpose.
さらに、本発明は、対象点との接触特性を高めるために、対象点との当接部を有する円筒形状部を備え、円筒形状部の内側壁面の縁部と外側壁面の縁部との軸線方向に沿った位置が異なる、接続端子及び接続治具を提供することを目的とする。 Furthermore, in order to improve the contact characteristics with the target point, the present invention includes a cylindrical portion having a contact portion with the target point, and an axis line between the edge of the inner wall surface and the edge of the outer wall surface of the cylindrical portion. An object is to provide a connection terminal and a connection jig having different positions along the direction.
そこで、本発明は、対象点間を接続する接続治具に用いられる接続端子であって、小径の導電部とそれを囲むように配置された大径の円筒形状部とを備え、前記小径の導電部又は前記大径の円筒形状部の少なくとも一方にばね部が形成され、前記小径の導電部の先端部の先端面が、前記大径の円筒形状部の先端面から突出し、さらに、前記小径の導電部の先端部が、前記大径の円筒形状部の先端部に接合され、前記ばね部が、サイドエッチングにより形成される側面を有することを特徴とする。 Therefore, the present invention is a connection terminal used in a connection jig for connecting between target points, and includes a small-diameter conductive portion and a large-diameter cylindrical portion disposed so as to surround the conductive portion, A spring portion is formed on at least one of the conductive portion or the large-diameter cylindrical portion, the tip surface of the tip portion of the small-diameter conductive portion protrudes from the tip surface of the large-diameter cylindrical portion, and further, the small diameter The leading end of the conductive portion is joined to the leading end of the large-diameter cylindrical portion, and the spring portion has a side surface formed by side etching.
その接続端子において、前記小径の導電部の先端部の先端面がエッチングにより形成されていてもよい。 In the connection terminal, the tip surface of the tip portion of the small-diameter conductive portion may be formed by etching.
また、本発明は、被検査物の対象部の電気的特性を検査するための検査装置用の検査用治具であって、小径の導電部とそれを囲むように配置された大径の円筒形状部とを備えるプローブであって、前記小径の導電部又は前記大径の円筒形状部の少なくとも一方にばね部が形成され、前記小径の導電部の先端部の先端面が、前記大径の円筒形状部の先端面から突出し、さらに、前記小径の導電部の先端部が、前記大径の円筒形状部の先端部に接合されたプローブと、該プローブの前記小径の導電部又は前記大径の円筒形状部の後端部の後端面に電気的に接続される導線を有する電極部と、前記プローブの前記小径の導電部の前記先端部を前記被検査物の前記対象部の所定の検査点へ案内するためのヘッド部であって、前記プローブの前記大径の円筒形状部の先端面が係止する係止部を備えるヘッド部と、前記プローブの前記小径の導電部又は前記大径の円筒形状部の前記後端部の前記後端面を前記電極部の前記導線に向けて案内するためのベース部とを備え、前記ばね部が、サイドエッチングにより形成される側面を有することを特徴とする。 Further, the present invention is an inspection jig for an inspection apparatus for inspecting electrical characteristics of a target portion of an object to be inspected, which is a small-diameter conductive portion and a large-diameter cylinder arranged so as to surround it. A probe having a shape portion, wherein a spring portion is formed on at least one of the small-diameter conductive portion or the large-diameter cylindrical shape portion, and a tip surface of a tip portion of the small-diameter conductive portion is the large-diameter A probe protruding from the distal end surface of the cylindrical portion, and the distal end portion of the small-diameter conductive portion joined to the distal end portion of the large-diameter cylindrical portion, and the small-diameter conductive portion or the large-diameter of the probe A predetermined inspection of the target portion of the object to be inspected with the electrode portion having a conductive wire electrically connected to the rear end surface of the rear end portion of the cylindrical portion, and the tip portion of the small-diameter conductive portion of the probe A head portion for guiding to a point, wherein the large diameter of the probe A head portion including a locking portion that locks a distal end surface of the cylindrical portion, and the rear end surface of the rear end portion of the small diameter conductive portion of the probe or the large diameter cylindrical shape portion of the electrode portion. And a base portion for guiding the lead wire, wherein the spring portion has a side surface formed by side etching.
その検査用治具において、前記ばね部が長軸方向のらせん状の壁面を有し、また、該ばね部が、該らせん状の壁面に沿って形成される絶縁層を有し、該絶縁層の端面が、前記ばね部の前記らせん状の壁面の端面に対しオーバーハングするようにしてもよい。 In the inspection jig, the spring portion has a helical wall surface in the long axis direction, and the spring portion has an insulating layer formed along the helical wall surface, and the insulating layer The end face may overhang with respect to the end face of the spiral wall surface of the spring portion.
その検査用治具において、前記ばね部の外径は３０から１００μｍであってもよい。 In the inspection jig, the outer diameter of the spring portion may be 30 to 100 μm.
その検査用治具において、前記円筒形状部がニッケルめっき層から構成されていてもよい。 In the inspection jig, the cylindrical portion may be composed of a nickel plating layer.
その検査用治具において、前記小径の導電部の先端部の先端面にサイドエッチングが形成されていてもよい。 In the inspection jig, side etching may be formed on the distal end surface of the distal end portion of the small-diameter conductive portion.
その検査用治具において、前記円筒形状部が、前記ニッケルめっき層の内側に金めっき層を備えてもよい。 In the inspection jig, the cylindrical portion may include a gold plating layer inside the nickel plating layer.
また、本発明は、被検査物の対象部の電気的特性を検査するための検査装置用の検査用治具に取り付けられるプローブであって、円筒形状部と、該円筒形状部内に配置された１又は２の棒状部とを備え、前記円筒形状部が、一方にある円筒形状の先端部と、他方にある円筒形状の後端部と、前記先端部と前記後端部との間に形成されたばね部とを備え、前記ばね部が、サイドエッチングにより形成される側面を有し、前記棒状部の一方が、前記円筒形状部の前記先端部に接合されるとともに該先端部から突出しており、前記棒状部の他方が存在するときには、該他方が、前記円筒形状部の前記後端部に接合されるとともに該後端部から突出していることを特徴とする。 Further, the present invention is a probe attached to an inspection jig for an inspection apparatus for inspecting electrical characteristics of a target portion of an object to be inspected, and is disposed in the cylindrical shape portion and the cylindrical shape portion 1 or 2 rod-shaped portions, and the cylindrical portion is formed between a cylindrical tip portion on one side, a cylindrical rear end portion on the other side, and the tip portion and the rear end portion. The spring part has a side surface formed by side etching, and one of the rod-like parts is joined to the tip part of the cylindrical part and protrudes from the tip part When the other of the rod-shaped portions exists, the other is joined to the rear end portion of the cylindrical portion and protrudes from the rear end portion.
さらに、本発明に係る検査用治具は、被検査物の対象部の電気的特性を検査するための検査装置用の検査用治具であり、小径の導電部とそれを囲むように配置された大径の円筒形状部とを備えるプローブであって、前記小径の導電部又は前記大径の円筒形状部の少なくとも一方にばね部が形成され、前記小径の導電部の先端部の先端面が、前記大径の円筒形状部の先端面から突出し、さらに、前記小径の導電部の先端部が、前記大径の円筒形状部の先端部に接合されたプローブと、該プローブの前記小径の導電部又は前記大径の円筒形状部の後端部の後端面に電気的に接続される導線を有する電極部と、前記プローブの前記小径の導電部の前記先端部を前記被検査物の前記対象部の所定の検査点へ案内するためのヘッド部であって、前記プローブの前記大径の円筒形状部の先端面が係止する係止部を備えるヘッド部と、前記プローブの前記小径の導電部又は前記大径の円筒形状部の前記後端部の前記後端面を前記電極部の前記導線に向けて案内するためのベース部とを備え、前記プローブの前記小径の導電部又は前記大径の円筒形状部の前記後端面が、前記電極部の前記導線に向かって移動する距離の大きさによって、前記プローブの前記小径の導電部の前記先端部が前記被検査物の前記対象部の所定の検査点を押圧する力の大きさが決定されることを特徴とする。 Furthermore, the inspection jig according to the present invention is an inspection jig for an inspection apparatus for inspecting the electrical characteristics of a target portion of an object to be inspected, and is disposed so as to surround a small-diameter conductive portion. A probe having a large-diameter cylindrical part, wherein a spring part is formed on at least one of the small-diameter conductive part or the large-diameter cylindrical part, and a tip surface of a tip part of the small-diameter conductive part is A probe projecting from the distal end surface of the large-diameter cylindrical portion, and the distal end portion of the small-diameter conductive portion joined to the distal end portion of the large-diameter cylindrical portion, and the small-diameter conductive portion of the probe An electrode portion having a lead wire electrically connected to a rear end face of a rear end portion of the cylindrical portion or the large-diameter cylindrical portion, and the tip portion of the small-diameter conductive portion of the probe as the object of the inspection object A head unit for guiding to a predetermined inspection point of the unit, And a rear end surface of the rear end portion of the small-diameter conductive portion of the probe or the large-diameter cylindrical portion of the probe. And a base portion for guiding the electrode portion toward the conducting wire of the electrode portion, and the rear end surface of the small-diameter conductive portion or the large-diameter cylindrical portion of the probe faces the conducting wire of the electrode portion. The magnitude of the force by which the tip portion of the small-diameter conductive portion of the probe presses a predetermined inspection point of the target portion of the object to be inspected is determined according to the magnitude of the moving distance. To do.
また、本発明に係る検査用治具は、被検査物の対象部の電気的特性を検査するための検査装置用の検査用治具であり、小径の円筒形状部と大径の円筒形状部とを備えるプローブであって、前記小径の円筒形状部が、円筒形状部の先端部及び後端部と、該先端部と該後端部との間の部分に形成されたばね部とを備え、前記小径の円筒形状部が前記大径の円筒形状部内に挿入され、前記小径の円筒形状部の前記先端部の先端面及び後端部の先端面が、それぞれ、前記大径の円筒形状部の先端面及び後端面から突出し、さらに、前記小径の円筒形状部の先端部が、前記大径の円筒形状部に接合されたプローブと、該プローブの前記小径の円筒形状部の前記後端部の後端面に電気的に接続される導線を有する電極部と、前記プローブの前記小径の円筒形状部の前記先端部を前記被検査物の前記対象部の所定の検査点へ案内するためのヘッド部であって、前記プローブの前記大径の円筒形状部の先端面が係止する係止部を備えるヘッド部と、前記プローブの前記大径の円筒形状部の前記後端部を前記電極部の前記導線に向けて案内するためのベース部とを備え、前記プローブの前記大径の円筒形状部の後端面が、前記電極部の前記導線に向かって移動する距離によって、前記プローブの前記小径の円筒形状部の前記先端部が前記被検査物の前記対象部の所定の検査点を押圧する力の大きさが決定されることを特徴とする。 The inspection jig according to the present invention is an inspection jig for an inspection apparatus for inspecting electrical characteristics of a target portion of an object to be inspected, and includes a small diameter cylindrical shape portion and a large diameter cylindrical shape portion. The small-diameter cylindrical portion includes a front end portion and a rear end portion of the cylindrical portion, and a spring portion formed at a portion between the front end portion and the rear end portion, The small-diameter cylindrical portion is inserted into the large-diameter cylindrical portion, and the tip surface of the tip portion and the tip surface of the rear end portion of the small-diameter cylindrical shape portion are each of the large-diameter cylindrical portion. A probe that protrudes from the front end surface and the rear end surface, and the front end portion of the small-diameter cylindrical portion is joined to the large-diameter cylindrical portion; and the rear end portion of the small-diameter cylindrical portion of the probe An electrode portion having a conductive wire electrically connected to the rear end surface, and the small diameter cylinder of the probe; A head portion for guiding the tip portion of the shaped portion to a predetermined inspection point of the target portion of the object to be inspected, wherein the tip surface of the large-diameter cylindrical portion of the probe is locked. And a base portion for guiding the rear end portion of the large-diameter cylindrical portion of the probe toward the conducting wire of the electrode portion, and the large-diameter cylinder of the probe The tip of the small-diameter cylindrical portion of the probe presses a predetermined inspection point of the target portion of the inspection object according to the distance that the rear end surface of the shape portion moves toward the conducting wire of the electrode portion The magnitude of the force to be determined is determined.
また、本発明に係る検査用治具は、被検査物の対象部の電気的特性を検査するための検査装置用の検査用治具であり、小径の円柱形状部と大径の円筒形状部とを備えるプローブであって、前記大径の円筒形状部が、該円筒形状部の先端部と後端部との間に形成された２つのばね部を備え、該２つのばね部が、互いに旋回方向が逆の螺旋形状に形成されており、前記小径の円柱形状部が前記大径の円筒形状部内に挿入され、前記小径の円柱形状部の先端部の先端面が、前記大径の円筒形状部の前記先端部の先端面から突出し、前記小径の円柱形状部の後端部の後端面と、前記大径の円筒形状部の前記後端部の後端面との間に空間が形成され、さらに、前記小径の円柱形状部の前記先端部が、前記大径の円筒形状部の前記先端部に接合されたプローブと、該プローブの前記大径の円筒形状部の前記後端部の前記後端面に電気的に接続される導線を有する電極部と、前記プローブの前記小径の円柱形状部の前記先端部を前記被検査物の前記対象部の所定の検査点へ案内するためのヘッド部であって、前記プローブの前記大径の円筒形状部の前記先端面が係止する係止部を備えるヘッド部と、前記プローブの前記小径の円柱形状部の前記後端部を前記電極部の前記導線に向けて案内するためのベース部とを備え、前記プローブの前記小径の円柱形状部の前記後端面が、前記電極部の前記導線に向かって移動する距離の大きさによって、前記プローブの前記小径の円柱形状部の前記先端部が前記被検査物の前記対象部の所定の検査点を押圧する力の大きさが決定されることを特徴とする。 The inspection jig according to the present invention is an inspection jig for an inspection apparatus for inspecting the electrical characteristics of a target portion of an object to be inspected, and includes a small-diameter columnar portion and a large-diameter cylindrical portion. The large-diameter cylindrical portion includes two spring portions formed between a tip portion and a rear end portion of the cylindrical portion, and the two spring portions are mutually connected. The small-diameter columnar portion is inserted into the large-diameter cylindrical portion, and the distal end surface of the small-diameter columnar portion is the large-diameter cylinder. A space is formed between the rear end surface of the rear end portion of the small-diameter cylindrical portion and the rear end surface of the rear end portion of the large-diameter cylindrical portion. Furthermore, the tip portion of the small-diameter columnar portion is joined to the tip portion of the large-diameter cylindrical portion. An electrode portion having a conductive wire electrically connected to the rear end surface of the rear end portion of the large-diameter cylindrical portion of the probe, and the tip portion of the small-diameter columnar portion of the probe A head portion for guiding to a predetermined inspection point of the target portion of the object to be inspected, the head portion including a locking portion for locking the distal end surface of the large-diameter cylindrical portion of the probe; A base portion for guiding the rear end portion of the small-diameter columnar portion of the probe toward the conductive wire of the electrode portion, and the rear end surface of the small-diameter columnar portion of the probe, The magnitude of the force by which the tip of the small-diameter cylindrical portion of the probe presses a predetermined inspection point of the target portion of the inspection object depending on the distance of the electrode portion that moves toward the conducting wire. Is determined.
その検査用治具において、前記ヘッド部に大径部と小径部とからなる貫通孔が形成されており、前記係止部が、前記大径部の貫通孔から前記小径部の貫通孔に移行する面によって構成されるようにしてもよい。 In the inspection jig, a through hole made of a large diameter portion and a small diameter portion is formed in the head portion, and the locking portion is transferred from the through hole of the large diameter portion to the through hole of the small diameter portion. You may make it comprise by the surface to perform.
その検査用治具において、該検査用治具に組み込む前の前記プローブの前記小径の円筒形状部の前記後端部の後端面から前記大径の円筒形状部の前記小径の円筒形状部の前記先端部が突出する側の端面までの長さは、前記電極部の前記導線の端面と前記係止部との間の距離よりも大きく、該プローブを該検査用治具に組み込むと前記ばね部に伸長する方向への付勢力が生じるようにしてもよい。 In the inspection jig, the small-diameter cylindrical part of the large-diameter cylindrical part from the rear end surface of the small-end cylindrical part of the small-diameter cylindrical part of the probe before being incorporated in the inspection jig. The length to the end surface on the side from which the tip protrudes is greater than the distance between the end surface of the conductive wire of the electrode portion and the locking portion, and when the probe is incorporated in the inspection jig, the spring portion An urging force in the extending direction may be generated.
また、その検査用治具において、前記プローブの前記大径の円筒形状部の後端面から突出する前記小径の円筒形状部の前記後端部の長さを変えることによって、該大径の円筒形状部内に後退する該小径の円筒形状部の前記先端部の長さを変えることができるようにしてもよい。 Further, in the inspection jig, by changing the length of the rear end portion of the small diameter cylindrical portion protruding from the rear end surface of the large diameter cylindrical portion of the probe, the large diameter cylindrical shape You may enable it to change the length of the said front-end | tip part of this small diameter cylindrical shape part which recedes in a part.
本発明によると、線形素材やSUS線を取り除いた段階で、追加の工程を必要とすることなく、絶縁被膜を有する接続治具に取り付けられる接続端子及び接続治具を提供することができる。 According to the present invention, it is possible to provide a connection terminal and a connection jig that are attached to a connection jig having an insulating coating without requiring an additional step when the linear material or the SUS wire is removed.
本発明によると、線形素材やSUS線を取り除いた段階で、接続治具に取り付けられるための係止部を備える接続端子及び接続治具を提供することができる。 According to the present invention, it is possible to provide a connection terminal and a connection jig provided with a locking portion to be attached to the connection jig when the linear material and the SUS wire are removed.
また、本発明によると、線形素材やSUS線を取り除いた段階で、追加の工程を必要とすることなく接続治具に取り付けられる絶縁被膜を有する接続端子を製造することができる。 In addition, according to the present invention, it is possible to manufacture a connection terminal having an insulating film that is attached to a connection jig without requiring an additional step when the linear material or the SUS wire is removed.
さらに、本発明によると、線形素材やSUS線を取り除いた段階で、追加の工程を必要とすることなく接続治具に取り付けられる絶縁被膜を有する接続端子を高い量産性で製造することができる。 Furthermore, according to the present invention, it is possible to manufacture a connection terminal having an insulating coating attached to a connection jig without requiring an additional process at a stage where the linear material or the SUS wire is removed with high productivity.
また、本発明の接続端子は、円筒形状の側面が傾斜して形成されることになるので、対象物に接触した場合に、接触安定性に優れるとともに、接続端子の当接部にはんだごみが付着することを防止することができる。 In addition, since the connecting terminal of the present invention is formed with an inclined cylindrical side surface, it has excellent contact stability when it contacts an object, and solder dust is present at the contact portion of the connecting terminal. Adhesion can be prevented.
さらに、本発明によると、部品点数の少ないプローブを提供することができる。 Furthermore, according to the present invention, a probe with a small number of parts can be provided.
本発明によると、組み立てが簡易なプローブを提供することができる。 According to the present invention, it is possible to provide a probe that can be easily assembled.
本発明によると、スプリング部が露出しないプローブを提供することができる。 According to the present invention, it is possible to provide a probe in which the spring portion is not exposed.
本発明によると、簡易な構造でプローブを固定することができる検査用治具を提供することができる。 According to the present invention, it is possible to provide an inspection jig capable of fixing a probe with a simple structure.
本発明によると、プローブを固定するための部材の追加が不要な検査用治具を提供することができる。 According to the present invention, it is possible to provide an inspection jig that does not require the addition of a member for fixing the probe.
本発明によると、部品点数が少なく構成が簡素な検査用治具を提供することができる。 According to the present invention, it is possible to provide an inspection jig having a small number of parts and a simple configuration.
本発明によると、検査点への押圧力の調整をすることができる検査用治具を提供することができる。 ADVANTAGE OF THE INVENTION According to this invention, the jig | tool for an inspection which can adjust the pressing force to an inspection point can be provided.
また、本発明によると、収縮した時のプローブのねじれや曲がりを防ぐことのできる検査治具を提供することができる。 Further, according to the present invention, it is possible to provide an inspection jig that can prevent the probe from being twisted or bent when contracted.
本発明の検査用治具及び接続端子は、被検査物が有する検査対象部に、検査装置から電力或いは電気信号を所定検査位置に供給するとともに、検査対象部から電気信号を検出することによって、検査対象部の電気的特性を検出したり、動作試験を行ったりすることを可能にする。 The inspection jig and the connection terminal of the present invention supply an electric power or an electric signal from an inspection apparatus to a predetermined inspection position to an inspection target portion of the inspection object, and detect an electric signal from the inspection target portion. It is possible to detect electrical characteristics of an inspection target part and to perform an operation test.
被検査物として、例えば、プリント配線基板、フレキシブル基板、セラミック多層配線基板、液晶ディスプレイやプラズマディスプレイ用の電極板、及び半導体パッケージ用のパッケージ基板やフィルムキャリアなど種々の基板や、半導体ウェハや半導体チップやCSP(Chip size package)などの半導体装置を例示することができる。 Examples of objects to be inspected include various substrates such as printed wiring boards, flexible boards, ceramic multilayer wiring boards, electrode plates for liquid crystal displays and plasma displays, package boards and film carriers for semiconductor packages, semiconductor wafers and semiconductor chips. And a semiconductor device such as a CSP (Chip size package).
また、本発明に係る接続端子は、対象物と装置とを電気的に接続することを目的とすることもでき、更に、インターポーザやコネクタのように電極端と電極端とを接続する接続治具としても採用することができる。 In addition, the connection terminal according to the present invention can be used to electrically connect an object and an apparatus, and further, a connection jig for connecting an electrode end and an electrode end like an interposer or a connector. Can also be adopted.
本明細書では、これらの上記の被検査物を総称して「被検査物」とし、被検査物に形成される検査対象部を「検査対象部」と称する。また、本明細書では、上記の対象物を総称して「対象物」と称し、対象物に設定されるとともに接続端子が当接して導通状態となる部位を単に「対象点」と称する。尚、対象点と対象点とで挟まれる部位は「対象点間」として設定されることになる。 In the present specification, these inspection objects are collectively referred to as “inspection object”, and an inspection object part formed on the inspection object is referred to as an “inspection object part”. Further, in the present specification, the above-described objects are collectively referred to as “objects”, and a portion that is set to the object and is brought into a conductive state by contacting the connection terminal is simply referred to as “object point”. Note that the portion sandwiched between the target points is set as “between target points”.
以下に、添付図面に基づいて、基板や半導体装置の被検査物の検査対象部の検査用のプローブが取り付けられた検査用治具について説明を行う。 Below, based on an accompanying drawing, the inspection jig to which the probe for the inspection of the inspection object part of the inspection object of a substrate or a semiconductor device was attached is explained.
なお、各添付図において、各部材の厚さ、長さ、形状、部材同士の間隔等は、理解の容易のために、拡大・縮小・変形・簡略化等を行っている。 In each attached drawing, the thickness, length, shape, interval between members, etc. are enlarged, reduced, deformed, simplified, etc. for easy understanding.
［検査用治具の概略の構成］
図１は、本発明の一実施形態に係る検査用治具１０の概略の構成を示す一部断面正面図である。検査用治具１０は、ヘッド部１２、ベース部１４及び電極部１６を備える。ヘッド部１２及びベース部１４は、樹脂あるいはセラミックス等の絶縁性の板状部材からなる。ヘッド部１２及びベース部１４は、棒状の支持部材１１及びその周囲に環装されたスペーサ１１ｓによって所定の距離だけ離隔されて保持されている。[Schematic configuration of inspection jig]
FIG. 1 is a partial cross-sectional front view showing a schematic configuration of an inspection jig 10 according to an embodiment of the present invention. The inspection jig 10 includes a head portion 12, a base portion 14, and an electrode portion 16. The head portion 12 and the base portion 14 are made of an insulating plate member such as resin or ceramics. The head portion 12 and the base portion 14 are held apart by a predetermined distance by a rod-like support member 11 and a spacer 11s that is mounted around the support member 11.
ヘッド部１２には複数の貫通孔１２ｈが形成されていて、それに挿入されたプローブ２０の先端部２２ｆが所定の位置に案内される。ベース部１４には複数の貫通孔１４ｈが形成されていて、それに挿入されたプローブ２０の後端部２２ｒが電極部１６へ案内される。 The head portion 12 is formed with a plurality of through holes 12h, and the tip portion 22f of the probe 20 inserted therein is guided to a predetermined position. A plurality of through holes 14 h are formed in the base portion 14, and the rear end portion 22 r of the probe 20 inserted therein is guided to the electrode portion 16.
プローブ２０の後端部２２ｒは、電極部１６に固定された導線１８の端部と接触しており、導線１８は図示せぬ検査装置に接続されている。 The rear end portion 22r of the probe 20 is in contact with the end portion of the conducting wire 18 fixed to the electrode portion 16, and the conducting wire 18 is connected to an inspection device (not shown).
図１においては、図面の簡略化のために、一部のプローブ２０のみを示す。 In FIG. 1, only a part of the probes 20 is shown for simplification of the drawing.
また、図１に示すように、被検査物の検査時には、検査用治具１０の下方に、検査対象の被検査物３０を配置し、検査用治具１０を下降させてプローブ２０の先端部２２ｆｅを所定の検査点、例えば、３０ｄｎに接触させ、それにより、検査対象部の電気的特性の検査を行う。 Further, as shown in FIG. 1, when inspecting an inspection object, the inspection object 30 to be inspected is arranged below the inspection jig 10, and the inspection jig 10 is lowered to move the tip of the probe 20. 22fe is brought into contact with a predetermined inspection point, for example, 30dn, thereby inspecting the electrical characteristics of the inspection target portion.
［プローブの構造］
図２Ａから図２Ｄは、図１の検査用治具に用いることができる一実施形態に係るプローブ２０を説明するための概略構成図である。[Probe structure]
2A to 2D are schematic configuration diagrams for explaining a probe 20 according to an embodiment that can be used in the inspection jig of FIG.
図２Ａは、図１の検査用治具に用いることができる一実施形態に係るプローブ２０を示す。プローブ２０は、大径の円筒形状部２４とそれに挿入されている導電性の小径の円筒形状部２２（導電部）とから構成されている。 FIG. 2A shows a probe 20 according to an embodiment that can be used in the inspection jig of FIG. The probe 20 includes a large-diameter cylindrical portion 24 and a conductive small-diameter cylindrical portion 22 (conductive portion) inserted therein.
小径の円筒形状部２２は、円筒形状の先端部２２ｆと、円筒形状の後端部２２ｒと、それらの間に形成されたばね部２２ｓとからなり、ばね部２２ｓは螺旋形状に形成されている。 The small-diameter cylindrical portion 22 includes a cylindrical tip portion 22f, a cylindrical rear end portion 22r, and a spring portion 22s formed therebetween, and the spring portion 22s is formed in a spiral shape.
小径の円筒形状部２２の先端部２２ｆの先端面２２ｆｅ近くの部分は、大径の円筒形状部２４の先端面２４ｆｅから突出している。また、小径の円筒形状部２２の後端部２２ｒの後端面２２ｒｅ近くの部分は、大径の円筒形状部２４の後端面２４ｒｅから突出している。 A portion of the distal end portion 22f of the small diameter cylindrical portion 22 near the distal end surface 22fe protrudes from the distal end surface 24fe of the large diameter cylindrical portion 24. A portion near the rear end surface 22re of the rear end portion 22r of the small diameter cylindrical portion 22 protrudes from the rear end surface 24re of the large diameter cylindrical portion 24.
また、大径の円筒形状部２４の先端面２４ｆｅ近くの位置Ｐでは、大径の円筒形状部２４と小径の円筒形状部２２の先端部２２ｆとが、例えば、抵抗溶接、レーザ溶接又はかしめによって接合されていて、互いに固定されている。そのため、大径の円筒形状部２４と小径の円筒形状部２２の先端部２２ｆとは一体となって移動する。 Further, at the position P near the distal end surface 24fe of the large-diameter cylindrical portion 24, the large-diameter cylindrical portion 24 and the distal-end portion 22f of the small-diameter cylindrical portion 22 are, for example, formed by resistance welding, laser welding, or caulking. They are joined and fixed together. Therefore, the large-diameter cylindrical portion 24 and the distal end portion 22f of the small-diameter cylindrical portion 22 move together.
後述するように、検査時に、小径の円筒形状部２２の先端面２２ｆｅが検査点に当接してそれから押されると、小径の円筒形状部２２の後端面２２ｒｅが検査用治具の導線１８の端面に押し付けられ、それにより、小径の円筒形状部２２の後端部２２ｒが大径の円筒形状部２４の中に入り込む。その入り込んだ距離が、ばね部２２ｓの収縮する長さになる。ばねの荷重はばねの変位に比例するため、その収縮の長さが変わることによって、円筒形状部２２の先端面２２ｆｅが検査点を押す力（荷重）の大きさが変わる。 As will be described later, when the front end surface 22fe of the small-diameter cylindrical portion 22 abuts on the inspection point and is pressed after the inspection, the rear end surface 22re of the small-diameter cylindrical portion 22 becomes the end surface of the conductor 18 of the inspection jig. As a result, the rear end 22r of the small-diameter cylindrical portion 22 enters the large-diameter cylindrical portion 24. The entered distance is the length by which the spring portion 22s contracts. Since the load of the spring is proportional to the displacement of the spring, the magnitude of the force (load) at which the tip surface 22fe of the cylindrical portion 22 presses the inspection point is changed by changing the length of the contraction.
そのため、例えば、後端面２４ｒｅから突出する後端面２２ｒｅ近くの円筒形状部２２の長さが長い別の寸法の小径の円筒形状部を用いて、後端面２２ｒｅが円筒形状部２４の中に入り込むまでの距離を大きくすると、先端面２２ｆｅが検査点に加える荷重の大きさを調整できる範囲を大きくすることができる。 Therefore, for example, until the rear end surface 22re enters the cylindrical portion 24 using a small-diameter cylindrical portion having a different length and the length of the cylindrical portion 22 near the rear end surface 22re protruding from the rear end surface 24re. When the distance is increased, the range in which the load applied to the inspection point by the tip surface 22fe can be adjusted can be increased.
詳しくは後述のとおり、小径の円筒形状部２２の先端部２２ｆを大径の円筒形状部２４に固定したことにより、ばね部２２ｓは、検査前には、後端部２２ｒを導線１８の端面に押し付ける予圧を与える付勢部として機能するとともに、検査時には、先端部２２ｆを検査点に適切な弾性力で押しつけて接触抵抗を低減させる押圧部として機能する。 As will be described in detail later, by fixing the front end portion 22f of the small-diameter cylindrical portion 22 to the large-diameter cylindrical portion 24, the spring portion 22s allows the rear end portion 22r to be connected to the end face of the conductor 18 before inspection. In addition to functioning as an urging portion that applies a preload to be pressed, at the time of inspection, it functions as a pressing portion that reduces the contact resistance by pressing the tip 22f against the inspection point with an appropriate elastic force.
なお、接合の位置Ｐは、後述の図３に示すとおり、大径の円筒形状部２４の先端がヘッド部１２の貫通孔１２ｈに挿入されたときに、貫通孔１２ｈから外に出た位置にある。そのような位置において接合を行ったのは、接合の際にその部分がやや変形することがあり、その変形が貫通孔１２ｈに影響を与えないようにするためである。 In addition, as shown in FIG. 3 to be described later, the joining position P is a position where the tip of the large-diameter cylindrical portion 24 protrudes from the through hole 12h when the tip of the large cylindrical portion 24 is inserted into the through hole 12h of the head portion 12. is there. The reason for joining at such a position is that the part may be slightly deformed at the time of joining, so that the deformation does not affect the through hole 12h.
図２Ｂは、プローブ２０を構成する小径の円筒形状部２２を示す。円筒形状部２２として、例えば、外径が、約２５から２８０μｍで、内径が１５から２６０μｍのニッケルあるいはニッケル合金のチューブを用いることができる。この実施形態では、一例として、外径が、約５０μｍ、内径が約３５μｍ、全長Ｌ１が約６ｍｍのニッケルチューブを用いるが、それに限定されるものではない。 FIG. 2B shows a small diameter cylindrical portion 22 constituting the probe 20. As the cylindrical portion 22, for example, a nickel or nickel alloy tube having an outer diameter of about 25 to 280 μm and an inner diameter of 15 to 260 μm can be used. In this embodiment, as an example, a nickel tube having an outer diameter of about 50 μm, an inner diameter of about 35 μm, and an overall length L1 of about 6 mm is used, but is not limited thereto.
また、円筒形状の先端部２２ｆの長さＬ２は約２ｍｍで、ばね部２２ｓの長さＬ３は約２ｍｍで、後端部２２ｒの長さＬ４は約２ｍｍである。これらの値は一例であり、それらに限定されるものではない。 Further, the length L2 of the cylindrical front end portion 22f is about 2 mm, the length L3 of the spring portion 22s is about 2 mm, and the length L4 of the rear end portion 22r is about 2 mm. These values are examples and are not limited thereto.
小径の円筒形状部２２は、例えば、次のような製法によって製造することができる。 The small-diameter cylindrical portion 22 can be manufactured, for example, by the following manufacturing method.
［製法例１］
（１）まず、円筒形状部２２の中空部を形成するための芯線（図示せず）を用意する。なお、この芯線は、円筒形状部２２の内径を規定する所望の太さ（上記の実施形態では、直径が約３５μｍ）のＳＵＳ線を用いる。
（２）次いで、芯線（ＳＵＳ線）にフォトレジスト被膜を塗布し、この芯線の周面を覆う。そのフォトレジスト被膜の所望の部分を露光・現像・加熱処理して螺旋状のマスクを形成する。例えば、芯線を中心軸の周りに回転及び上下動させながらレーザにより所定の部分を露光して螺旋状のマスクを形成する。円筒形状部２２においては、円筒形状の先端部２２ｆと円筒形状の後端部２２ｒとの間の長さＬ３のばね部２２ｓ及び全長Ｌ１に分離する端部に対応する位置にマスクを形成する。
（３）次いで、その芯線にニッケルめっきを実施する。このとき、芯線は導電性であるため、フォトレジストマスクが形成されていない箇所にニッケルめっきが付着する。
（４）次いで、フォトレジストマスクを除去して、芯線を引き抜き、全長Ｌ１の円筒形状部２２を形成する。[Production Example 1]
(1) First, a core wire (not shown) for forming the hollow portion of the cylindrical portion 22 is prepared. As the core wire, a SUS wire having a desired thickness (in the above embodiment, the diameter is about 35 μm) that defines the inner diameter of the cylindrical portion 22 is used.
(2) Next, a photoresist film is applied to the core wire (SUS wire) to cover the peripheral surface of the core wire. A desired portion of the photoresist film is exposed, developed, and heated to form a spiral mask. For example, a spiral mask is formed by exposing a predetermined portion with a laser while rotating and moving the core wire around the central axis. In the cylindrical portion 22, a mask is formed at a position corresponding to the spring portion 22s having a length L3 between the cylindrical tip portion 22f and the cylindrical rear end portion 22r and the end portion separated into the full length L1.
(3) Next, nickel plating is performed on the core wire. At this time, since the core wire is conductive, nickel plating adheres to a portion where the photoresist mask is not formed.
(4) Next, the photoresist mask is removed, the core wire is pulled out, and the cylindrical portion 22 having the full length L1 is formed.
また、円筒形状部２２は、下記の方法でも製造することもできる。 The cylindrical portion 22 can also be manufactured by the following method.
［製法例２］
（１）まず、製法例１と同様に、円筒形状部２２の中空部を形成するための芯線（図示せず）を用意し、その芯線にニッケルを所望の厚さめっきして、芯線の周面にニッケルめっき層を形成する。
（２）次に、そのニッケルめっき層の表面にフォトレジストを塗布する。そのフォトレジストの所望の部分を露光・現像・加熱処理して螺旋状のマスクを形成する。例えば、芯線を中心軸の周りに回転及び上下動させながら、レーザにより露光して螺旋状のマスクを形成する。円筒形状部２２においては、円筒形状の先端部２２ｆと円筒形状の後端部２２ｒとの間の長さＬ３のばね部２２ｓ及び全長Ｌ１に分離する端部に対応する位置にマスクを形成する。
（３）次いで、ニッケルめっきをエッチング除去する。このとき、フォトレジストマスクが形成されていない箇所のニッケルめっきが除去される。
（４）次いで、フォトレジストマスクを除去して、芯線を引き抜き、全長Ｌ１の円筒形状部２２を形成する。[Production Example 2]
(1) First, as in Production Method 1, a core wire (not shown) for forming the hollow portion of the cylindrical portion 22 is prepared, nickel is plated on the core wire to a desired thickness, A nickel plating layer is formed on the surface.
(2) Next, a photoresist is applied to the surface of the nickel plating layer. A desired portion of the photoresist is exposed, developed, and heated to form a spiral mask. For example, a spiral mask is formed by exposing with a laser while rotating and moving the core wire around the central axis. In the cylindrical portion 22, a mask is formed at a position corresponding to the spring portion 22s having a length L3 between the cylindrical tip portion 22f and the cylindrical rear end portion 22r and the end portion separated into the full length L1.
(3) Next, the nickel plating is removed by etching. At this time, the nickel plating in a portion where the photoresist mask is not formed is removed.
(4) Next, the photoresist mask is removed, the core wire is pulled out, and the cylindrical portion 22 having the full length L1 is formed.
上記の製法は例示であり、円筒形状部の製造方法は、それらの製法に限定されるものではない。 The above manufacturing methods are examples, and the manufacturing method of the cylindrical portion is not limited to these manufacturing methods.
図２Ｃは、プローブ２０を構成する大径の円筒形状部２４を示す。大径の円筒形状部２４は、ニッケルあるいはニッケル合金のチューブから作ることができ、その寸法として、例えば、外径が３５μｍから３００μｍで、内径が２５μｍから２８０μｍで、長さＬ５が３から３０ｍｍである。これらの値は一例であり、それらに限定されるものではない。
なお、大径の円筒形状部２４の周面を必要に応じて絶縁被膜しても良い。FIG. 2C shows the large-diameter cylindrical portion 24 constituting the probe 20. The large-diameter cylindrical portion 24 can be made of a nickel or nickel alloy tube. The dimensions thereof are, for example, an outer diameter of 35 μm to 300 μm, an inner diameter of 25 μm to 280 μm, and a length L5 of 3 to 30 mm. is there. These values are examples and are not limited thereto.
The peripheral surface of the large-diameter cylindrical portion 24 may be coated with an insulating film as necessary.
図２Ｄは、プローブ２０の製造方法を説明するための概念図である。最初に、例えば上記の製法により製造した小径の円筒形状部２２と大径の円筒形状部２４とを用意して、大径の円筒形状部２４内に小径の円筒形状部２２を挿入して、ばね部２２ｓが円筒形状部２４によって覆われるようにする一方、先端部２２ｆ及び後端部２２ｒのそれぞれの一部を円筒形状部２４から突出させて露出させる。その際、円筒形状部２４から突出させる後端部２２ｒの長さを決める。それにより、ばね部２２ｓがその大きさに応じた変位を行えるようにして、このプローブの円筒形状部２２の先端面２２ｆｅの検査点を押す力（荷重）の大きさを調整し、また、プレート１２ｕからの先端部２２ｆに突出量のばらつきを極力小さくする。 FIG. 2D is a conceptual diagram for explaining a method for manufacturing the probe 20. First, for example, a small-diameter cylindrical portion 22 and a large-diameter cylindrical portion 24 manufactured by the above manufacturing method are prepared, and the small-diameter cylindrical portion 22 is inserted into the large-diameter cylindrical portion 24, While the spring portion 22s is covered with the cylindrical portion 24, a part of each of the front end portion 22f and the rear end portion 22r is protruded from the cylindrical portion 24 and exposed. At this time, the length of the rear end portion 22r that protrudes from the cylindrical portion 24 is determined. Thereby, the spring portion 22s can be displaced according to its size, the magnitude of the force (load) for pushing the inspection point of the tip end face 22fe of the cylindrical portion 22 of this probe is adjusted, and the plate The variation in the amount of protrusion from 12u to the tip 22f is minimized.
次に、大径の円筒形状部２４の先端近くの位置Ｐにおいて、大径の円筒形状部２４と小径の円筒形状部２２の先端部２２ｆとを接合して、互いに一体として移動するようにする。例えば、抵抗溶接による場合には、図２Ｄに示すように、対向する一対の電極部４０によって大径の円筒形状部２４の位置Ｐを挟み、加圧しながら短時間定電流を流す。それにより、その位置において、大径の円筒形状部２４と小径の円筒形状部２２の先端部２２ｆとを溶接する。それに代えて、その位置Ｐに力を加えてかしめて変形させて、それらを結合させてもよい。 Next, at a position P near the tip of the large-diameter cylindrical portion 24, the large-diameter cylindrical portion 24 and the tip portion 22f of the small-diameter cylindrical portion 22 are joined to move together. . For example, in the case of resistance welding, as shown in FIG. 2D, the position P of the large-diameter cylindrical portion 24 is sandwiched between a pair of opposing electrode portions 40, and a constant current is allowed to flow for a short time while pressing. Thereby, the large-diameter cylindrical portion 24 and the distal end portion 22f of the small-diameter cylindrical portion 22 are welded at that position. Alternatively, they may be deformed by applying a force to the position P to combine them.
［検査用治具の概要］
図３は、検査用治具の一部の拡大断面図である。図３に示すように、ヘッド部１２の下面には板厚の薄いプレート１２ｕが取り付けられている。ヘッド部１２には大径部１２ｈ１が形成され、プレート１２ｕには小径部１２ｈ２が形成されている。ただし、プレート１２ｕを用いることなく、ヘッド部１２自体に大径部１２ｈ１と小径部１２ｈ２とを一体形成してもよい。[Outline of inspection jig]
FIG. 3 is an enlarged cross-sectional view of a part of the inspection jig. As shown in FIG. 3, a thin plate 12 u is attached to the lower surface of the head portion 12. The head portion 12 has a large diameter portion 12h1, and the plate 12u has a small diameter portion 12h2. However, the large-diameter portion 12h1 and the small-diameter portion 12h2 may be integrally formed on the head portion 12 itself without using the plate 12u.
大径部１２ｈ１には、プローブ２０の大径の円筒形状部２４の先端部が挿入されていて、その円筒形状部２４の先端面２４ｆｅが、プレート１２ｕの内面（図３に向かうと上方の面）に当接している。それにより、プレート１２ｕは大径の円筒形状部２４の先端面２４ｆｅの係止部を形成する。また、小径部１２ｈ２には、プローブ２０の小径の円筒形状部２２の先端部２２ｆが挿入されている。 The distal end portion of the large-diameter cylindrical portion 24 of the probe 20 is inserted into the large-diameter portion 12h1, and the distal end surface 24fe of the cylindrical-shaped portion 24 is the inner surface of the plate 12u (the upper surface as viewed in FIG. 3). ). As a result, the plate 12u forms a locking portion for the distal end surface 24fe of the large-diameter cylindrical portion 24. Further, the distal end portion 22f of the small diameter cylindrical portion 22 of the probe 20 is inserted into the small diameter portion 12h2.
一方、ベース部１４の貫通孔１４ｈには、プローブ２０の大径の円筒形状部２４の後端部が挿入されているが、図３に示すとおり、その後端面２４ｒｅは導線１８には当接してなく、円筒形状部２４の後端部から突出する小径の円筒形状部２２の後端部２２ｒの後端面２２ｒｅが導線１８の端面１８ｅと当接している。 On the other hand, the rear end portion of the large-diameter cylindrical portion 24 of the probe 20 is inserted into the through hole 14h of the base portion 14, but the rear end surface 24re is in contact with the conductor 18 as shown in FIG. The rear end surface 22re of the small-diameter cylindrical portion 22 protruding from the rear end portion of the cylindrical portion 24 is in contact with the end surface 18e of the conducting wire 18.
後端面２４ｒｅは導線１８の端面１８ｅまで移動することができるため、後端面２４ｒｅから導線１８の端面１８ｅまでの距離が、ばね部２２ｓの収縮することのできる長さになる。なお、プレート１２ｕから突出する複数のプローブ２０の先端部２２ｆの突出量にばらつきが生じることがあり、そのため、後端面２４ｒｅの後退する移動距離に相違が生じることがあるが、そのような場合であっても、移動により端面１８ｅに最も近づく後端面２４ｒｅが、その端面１８ｅに衝突しないように、後端面２４ｒｅから端面１８ｅまでの距離を設定してもよい。 Since the rear end face 24re can move to the end face 18e of the conducting wire 18, the distance from the rear end face 24re to the end face 18e of the conducting wire 18 becomes a length that allows the spring portion 22s to contract. Note that there may be variations in the protruding amounts of the tip portions 22f of the plurality of probes 20 protruding from the plate 12u, and therefore there may be a difference in the moving distance of the rear end surface 24re retracting. Even in such a case, the distance from the rear end face 24re to the end face 18e may be set so that the rear end face 24re closest to the end face 18e by the movement does not collide with the end face 18e.
また、図３の状態になるためには、プローブ２０を検査用治具１０に組み込む前における、大径の円筒形状部２４の先端面２４ｆｅから小径の円筒形状部２２の後端部２２ｒの後端面２２ｒｅまでの自然長が、係止部のプレート１２ｕの内面から導線１８の端面１８ｅまでの距離よりも大きくなければならない。 In order to achieve the state shown in FIG. 3, the rear end portion 22 r of the small-diameter cylindrical portion 22 extends from the front end surface 24 fe of the large-diameter cylindrical portion 24 before the probe 20 is assembled into the inspection jig 10. The natural length to the end surface 22re must be larger than the distance from the inner surface of the plate 12u of the locking portion to the end surface 18e of the conducting wire 18.
その大きさの相違があるため、図３のようにプローブ２０を検査用治具１０に組み込んだときには、小径の円筒形状部２２の後端部２２ｒの後端面２２ｒｅが、導線１８の端面１８ｅから押されることになり、その相違の大きさの分だけ、ばね部２２ｓが縮んで、後端部２２ｒが大径の円筒形状部２４内に押し込まれている。 Because of the difference in size, when the probe 20 is incorporated in the inspection jig 10 as shown in FIG. 3, the rear end surface 22re of the rear end portion 22r of the small-diameter cylindrical portion 22 is separated from the end surface 18e of the conductor 18. The spring portion 22s is contracted by an amount corresponding to the difference, and the rear end portion 22r is pushed into the large-diameter cylindrical portion 24.
図３では、ばね部２２ｓが縮んだ分だけ、そのばね部に伸長する方向への付勢力が生じている。一方、小径の円筒形状部２２の先端部２２ｆは、位置Ｐにおいて大径の円筒形状部２４に固定されており、その円筒形状部２４の先端面２４ｆｅはプレート１２ｕの内面に当接している。そのため、そのばね部の付勢力は、検査点にプローブが接触しない場合でも、小径の円筒形状部２２の後端部２２ｒの後端面２２ｒｅを導線１８の端面に一定の力で押しつけることのできる予圧として作用する。その結果、その後端面２２ｒｅと導線１８の端面との安定した接触を確保することができる。 In FIG. 3, as much as the spring portion 22s contracts, an urging force is generated in the extending direction of the spring portion. On the other hand, the distal end portion 22f of the small diameter cylindrical portion 22 is fixed to the large diameter cylindrical portion 24 at the position P, and the distal end surface 24fe of the cylindrical portion 24 is in contact with the inner surface of the plate 12u. Therefore, the biasing force of the spring portion is a preload that can press the rear end surface 22re of the rear end portion 22r of the small-diameter cylindrical portion 22 against the end surface of the conductor 18 with a constant force even when the probe does not contact the inspection point. Acts as As a result, stable contact between the rear end face 22re and the end face of the conductor 18 can be ensured.
図４は、図３の検査用治具を用いて被検査物の検査を行うときの状況を説明するための検査用治具の一部の拡大断面図である。 FIG. 4 is an enlarged sectional view of a part of the inspection jig for explaining a situation when the inspection object is inspected using the inspection jig of FIG.
基板等の被検査物の検査時には、検査用治具１０を下降させてプローブ２０の小径の円筒形状部２２の先端部２２ｆの先端面２２ｆｅを被検査物３０の配線等の検査対象部上の所定の検査点３０ｄ１に当接させ、検査点３０ｄ１を押すようにする。そうすると、図４に示すように、プローブ２０の小径の円筒形状部２２の先端部２２ｆは、ヘッド部１２の貫通孔１２ｈ内に押し込まれることになる。上記のとおり、小径部の円筒形状部２２の先端部２２ｆと大径の円筒形状部２４とは位置Ｐにおいて接合されているため、先端部２２ｆが押し上げられると、それとともに大径の円筒形状部２４も押し上げられて、大径の円筒形状部２４の先端面２４ｆｅが係止部のプレート１２ｕの内面から離れる。その結果、小径の円筒形状部２２のばね部２２ｓが圧縮されて、ばね部２２ｓに付勢力が生じ、その付勢力によって、先端面２２ｆｅは検査点３０ｄ１に押し付けられることになる。そのため、その先端面２２ｆｅと検査点３０ｄ１とを確実に接触させることができる。 When inspecting an object to be inspected such as a substrate, the inspection jig 10 is lowered so that the distal end surface 22fe of the distal end portion 22f of the small-diameter cylindrical portion 22 of the probe 20 is on the inspection target portion such as the wiring of the inspected object 30 The test point 30d1 is brought into contact with the predetermined test point 30d1, and the test point 30d1 is pushed. Then, as shown in FIG. 4, the distal end portion 22 f of the small-diameter cylindrical portion 22 of the probe 20 is pushed into the through hole 12 h of the head portion 12. As described above, the distal end portion 22f of the small-diameter cylindrical portion 22 and the large-diameter cylindrical portion 24 are joined at the position P. Therefore, when the distal end portion 22f is pushed up, the large-diameter cylindrical portion 24 is also pushed up, and the front end surface 24fe of the large-diameter cylindrical portion 24 is separated from the inner surface of the locking portion plate 12u. As a result, the spring portion 22s of the small-diameter cylindrical portion 22 is compressed, and a biasing force is generated in the spring portion 22s, and the tip surface 22fe is pressed against the inspection point 30d1 by the biasing force. Therefore, the front end face 22fe and the inspection point 30d1 can be reliably brought into contact with each other.
また、その際に、小径の円筒形状部２２の後端部２２ｒの後端面２２ｒｅは、既にばね部２２ｓの一定の付勢力で導線１８の端面１８ｅに押し付けられているが、小径の円筒形状部２２の先端部２２ｆの先端面２２ｆｅが検査点３０ｄ１に押し付けられることによりばね部２２ｓはさらに縮む。図４では、円筒形状部２４の後端面２４ｒｅと導線１８の端面１８ｅまでの間に空間があるため、検査点３０ｄ１をより大きな約３ｇ程度の力で押してばね部２２ｓをさらに縮ませることによって、後端面２４ｒｅはさらに端面１８ｅまで接近することができる。それにより、より大きな付勢力で、後端面２２ｒｅも導線１８の端面１８ｅに押しつけられるようになる。 At this time, the rear end surface 22re of the rear end portion 22r of the small-diameter cylindrical portion 22 is already pressed against the end surface 18e of the conductor 18 by the constant urging force of the spring portion 22s. When the distal end surface 22fe of the distal end portion 22f of 22 is pressed against the inspection point 30d1, the spring portion 22s further contracts. In FIG. 4, since there is a space between the rear end surface 24re of the cylindrical portion 24 and the end surface 18e of the conducting wire 18, the spring portion 22s is further contracted by pushing the inspection point 30d1 with a larger force of about 3 g, The rear end face 24re can further approach the end face 18e. Accordingly, the rear end surface 22re is also pressed against the end surface 18e of the conductor 18 with a larger biasing force.
このように、後端面２４ｒｅから導線１８の端面１８ｅまでの距離の大きさによって、先端面２２ｆｅが検査点３０ｄ１を押す力と、後端面２２ｒｅが導線１８の端面１８ｅを押す力とを調整することができる。 In this way, the force by which the front end surface 22fe pushes the inspection point 30d1 and the force by which the rear end face 22re pushes the end face 18e of the conducting wire 18 are adjusted according to the magnitude of the distance from the rear end face 24re to the end face 18e of the conducting wire 18. Can do.
検査が終了して検査用治具１０が被検査物から離れると、ばね部２２ｓの付勢力によって、小径の円筒形状部２２の先端部２２ｆが、図４において下方に押し戻される。その際、その先端部２２ｆと大径の円筒形状部２４とは位置Ｐにおいて接合されているため、大径の円筒形状部２４も同時に押し戻され、円筒形状部２４の先端面２４ｆｅが係止部のプレート１２ｕの内面に当接する。その状態が、図３に示す状態である。 When the inspection is finished and the inspection jig 10 is separated from the object to be inspected, the distal end portion 22f of the small-diameter cylindrical portion 22 is pushed back downward in FIG. 4 by the urging force of the spring portion 22s. At that time, since the distal end portion 22f and the large-diameter cylindrical portion 24 are joined at the position P, the large-diameter cylindrical portion 24 is also pushed back at the same time, and the distal end surface 24fe of the cylindrical portion 24 is engaged with the locking portion. It contacts the inner surface of the plate 12u. This state is the state shown in FIG.
［他の実施形態］
上記の実施形態は基板を被検査物として説明をしたが、それに限定されるものではなく、被検査物として半導体装置も含む。[Other Embodiments]
In the above-described embodiment, the substrate is described as an inspection object. However, the present invention is not limited thereto, and includes a semiconductor device as the inspection object.
上記の実施形態として、小径の円筒形状部２２の後端部２２ｒの端面２２ｒｅは平坦に表したが、複数の先鋭形状の突部を持つようなクラウン形状に形成してもよい。また、小径の円筒形状部２２の先端部２２ｆの先端面２２ｆｅも平坦形状として表したが、複数の先鋭形状の突起を持つようなクラウン形状でもよい。また、先端面２２ｆｅを溶融して半球形状に形成してもよく、先端面及び後端面を絞り込んで尖らせてもよい。 In the above embodiment, the end surface 22re of the rear end portion 22r of the small-diameter cylindrical portion 22 is shown flat, but may be formed in a crown shape having a plurality of sharpened protrusions. In addition, the tip surface 22fe of the tip portion 22f of the small-diameter cylindrical portion 22 is also expressed as a flat shape, but may be a crown shape having a plurality of sharpened protrusions. Further, the front end surface 22fe may be melted to form a hemispherical shape, or the front end surface and the rear end surface may be narrowed down and sharpened.
また、図３及び図４の実施形態では、被検査物３０には、プローブ２０の小径の円筒形状部２２の先端部２２ｆの先端面２２ｆｅが接しているが、小径の円筒形状部２２内に、後述する図５Ａ及び図５Ｂの導電性の円柱形状部５２ｆのような円柱形状部を挿入して、その円柱形状部の先端部を円筒形状部２２から突出させ、さらに、位置Ｐにおいて、円柱形状部を円筒形状部２２に接合するように構成することによって、その円柱形状部の先端部が被検査物３０に接するようにしてもよい。 3 and 4, the inspection object 30 is in contact with the distal end surface 22fe of the distal end portion 22f of the small-diameter cylindrical portion 22 of the probe 20, but the small-diameter cylindrical portion 22 is in contact therewith. 5A and 5B, which will be described later, are inserted into a columnar portion such as the conductive columnar portion 52f, the tip of the columnar portion is protruded from the cylindrical portion 22, and a column is formed at the position P. By forming the shape portion so as to be joined to the cylindrical shape portion 22, the tip end portion of the columnar shape portion may be in contact with the inspection object 30.
図５Ａ及び図５Ｂは、他の実施形態に係るプローブ５０を示す。プローブ５０は、大径の円筒形状部５４とそれに挿入されている小径の円柱形状部５２（導電部）とから構成されている。 5A and 5B show a probe 50 according to another embodiment. The probe 50 includes a large-diameter cylindrical portion 54 and a small-diameter columnar portion 52 (conductive portion) inserted therein.
大径の円筒形状部５４は、先端部５４ｆと、後端部５４ｒと、それらの間に形成された２つのばね部５４ｓ１，５４ｓ２と、それらのばね部を連結する連結部５４ｃとからなる。２つのばね部５４ｓ１，５４ｓ２はそれぞれ螺旋形状に形成されており、旋回方向が互いに逆になっている。つまり、ばね部５４ｓ１が連結部５４ｃから例えば左巻き方向に旋回して後端部５４ｒに到達しているとすると、ばね部５４ｓ２は連結部５４ｃから右巻き方向に旋回して先端部５４ｆに到達している。 The large-diameter cylindrical portion 54 includes a front end portion 54f, a rear end portion 54r, two spring portions 54s1 and 54s2 formed therebetween, and a connecting portion 54c that connects these spring portions. The two spring portions 54s1 and 54s2 are each formed in a spiral shape, and the turning directions are opposite to each other. That is, if the spring portion 54s1 turns from the connecting portion 54c, for example, in the left-handed direction and reaches the rear end portion 54r, the spring portion 54s2 turns from the connecting portion 54c in the right-handed direction and reaches the front end portion 54f. ing.
大径の円筒形状部５４及びばね部５４ｓ１，５４ｓ２は、上記の実施例の円筒形状部２２及びばね部２２ｓと同様に製造することができる。 The large-diameter cylindrical portion 54 and the spring portions 54s1 and 54s2 can be manufactured in the same manner as the cylindrical portion 22 and the spring portion 22s of the above-described embodiment.
小径の円柱形状部５２の先端部５２ｆは、大径の円筒形状部５４の先端部５４ｆから突出している。一方、小径の円柱形状部５２の後端部５２ｒは、大径の円筒形状部５４の後端部５４ｒの後端面５４ｒｅの手前の位置に留まっていて、大径の円筒形状部５４の後端面５４ｒｅと小径の円柱形状部５２の後端面５２ｒｅとの間には空間が形成されている。 The distal end portion 52 f of the small diameter cylindrical portion 52 protrudes from the distal end portion 54 f of the large diameter cylindrical portion 54. On the other hand, the rear end portion 52r of the small-diameter columnar portion 52 remains at a position in front of the rear end surface 54re of the rear end portion 54r of the large-diameter cylindrical portion 54, and the rear end surface of the large-diameter cylindrical portion 54 A space is formed between 54re and the rear end surface 52re of the small-diameter cylindrical portion 52.
また、大径の円筒形状部５４の先端部５４ｆの位置Ｐでは、その先端部５４ｆと小径の円柱形状部５２とが、例えば、抵抗溶接、レーザ溶接又はかしめによって接合されていて、互いに固定されている。そのため、小径の円柱形状部５２と大径の円筒形状部５４の先端部５４ｆとは一体となって動く。それ以外の部分においては、大径の円筒形状部５４と小径の円柱形状部５２とは固定されてなく、互いに別々に動くことができる。 Further, at the position P of the distal end portion 54f of the large-diameter cylindrical portion 54, the distal end portion 54f and the small-diameter columnar portion 52 are joined by, for example, resistance welding, laser welding, or caulking, and are fixed to each other. ing. Therefore, the small-diameter columnar portion 52 and the distal end portion 54f of the large-diameter cylindrical portion 54 move together. In other parts, the large-diameter cylindrical portion 54 and the small-diameter columnar portion 52 are not fixed and can move separately from each other.
後述するように、基板等の検査時に、大径の円筒形状部５４の後端部５４ｒの後端面５４ｒｅが検査治具の電極（導線１８）に接触した状態で、小径の円柱形状部５２の先端部５２ｆの先端面５２ｆｅが検査点に当接して押しつけられると、押しつけられた力の大きさの分だけ、小径の円柱形状部５２が、大径の円筒形状部５４の先端部５４ｆとともに後退する。そのため、大径の円筒形状部５４の２つのばね部５４ｓ１，５４ｓ２が収縮するとともに、小径の円柱形状部５２が、それらの内側の空間内を後退する。それらのばねの収縮した長さの分だけ、それらのばねは元の長さに戻ろうとする付勢力を発揮する。ばねの荷重はばねの長さの変位に比例するため、その収縮の長さが変わると、２つのばね部５４ｓ１，５４ｓ２によって円柱形状部５２の先端部５２ｆの先端面５２ｆｅが検査点を押す力（荷重）の大きさが変わる。 As will be described later, when inspecting a substrate or the like, the rear end surface 54re of the large-diameter cylindrical portion 54 is in contact with the electrode (conducting wire 18) of the inspection jig. When the distal end surface 52fe of the distal end portion 52f is pressed against the inspection point, the small-diameter columnar portion 52 retreats together with the distal end portion 54f of the large-diameter cylindrical portion 54 by the amount of the pressed force. To do. Therefore, the two spring portions 54s1 and 54s2 of the large-diameter cylindrical portion 54 contract, and the small-diameter columnar portion 52 retreats in the space inside them. The springs exert a biasing force to return to the original length by the contracted length of the springs. Since the load of the spring is proportional to the displacement of the length of the spring, when the length of contraction changes, the force by which the tip surface 52fe of the tip portion 52f of the cylindrical portion 52 presses the inspection point by the two spring portions 54s1 and 54s2. The size of (load) changes.
そのため、大径の円筒形状部５４の先端部５４ｆの位置Ｐにおいてかしめ等を行う際に、小径の円柱形状部５２の先端部５２ｆが先端部５４ｆから突出する長さを変えることによって、先端面５２ｆｅが検査点に加える荷重の大きさを変えることができる。 Therefore, when caulking or the like is performed at the position P of the distal end portion 54f of the large-diameter cylindrical portion 54, the length of the distal end surface 52f of the small-diameter columnar portion 52 is changed by changing the length protruding from the distal end portion 54f. The magnitude of the load that 52fe applies to the inspection point can be changed.
また、２つのばね部５４ｓ１，５４ｓ２は、プローブ５０が検査治具に取り付けられた際に、大径の円筒形状部５４の後端部５４ｒの後端面５４ｒｅを導線１８に適切な力で押しつけるための予圧を与える付勢部として機能する。また、小径の円柱形状部５２を大径の円筒形状部５４の先端部５４ｆに固定したことにより、２つのばね部５４ｓ１，５４ｓ２は、小径の円柱形状部５２の先端面５２ｆｅを検査点に適切な弾性力で押しつけて接触抵抗を安定させる押圧部としても機能する。 The two spring portions 54s1 and 54s2 press the rear end surface 54re of the rear end portion 54r of the large-diameter cylindrical portion 54 against the conductor 18 with an appropriate force when the probe 50 is attached to the inspection jig. It functions as an urging part that gives a preload. Further, by fixing the small-diameter columnar portion 52 to the distal end portion 54f of the large-diameter cylindrical portion 54, the two spring portions 54s1 and 54s2 are suitable for using the distal end surface 52fe of the small-diameter columnar portion 52 as an inspection point. It also functions as a pressing part that stabilizes the contact resistance by pressing with a strong elastic force.
なお、接合の位置Ｐは、図３の実施形態の場合と同様に、図６に示すように、大径の円筒形状部５４の先端部５４ｆがヘッド部１２−１の大径部の貫通孔１２−１ｈ１に挿入されたときに、小径部の貫通孔１２−１ｈ２よりも外の位置にある。 As in the embodiment of FIG. 3, the joining position P is such that the tip 54f of the large-diameter cylindrical portion 54 is a through-hole in the large-diameter portion of the head portion 12-1, as shown in FIG. When inserted into 12-1h1, it is at a position outside the through hole 12-1h2 of the small diameter portion.
図６は、図５Ａ及び図５Ｂに示すプローブ５０を取り付けた検査用治具の一部断面図である。図６に示すように、ヘッド部１２−１には、大径部の貫通孔１２−１ｈ１及び小径部の貫通孔１２−１ｈ２が形成されており、ベース部１４−１には、一部が拡張した貫通孔１４−１ｈが形成されている。 FIG. 6 is a partial cross-sectional view of an inspection jig to which the probe 50 shown in FIGS. 5A and 5B is attached. As shown in FIG. 6, the head portion 12-1 has a large-diameter through-hole 12-1h1 and a small-diameter through-hole 12-1h2, and a portion of the base portion 14-1 is partially formed. An expanded through hole 14-1h is formed.
ヘッド部１２−１の大径部１２−１ｈ１には、プローブ５０の大径の円筒形状部５４の先端部５４ｆが挿入されていて、その先端面５４ｆｅが、大径部１２−１ｈ１から小径部１２−１ｈ２に移る段差の面に当接している。そのように、その段差の面は先端面５４ｆｅの係止部を形成する。小径部１２−１ｈ２には、プローブ５０の小径の円筒形状部５２の先端部５２ｆが挿入されている。 The distal end portion 54f of the large diameter cylindrical portion 54 of the probe 50 is inserted into the large diameter portion 12-1h1 of the head portion 12-1, and the distal end surface 54fe extends from the large diameter portion 12-1h1 to the small diameter portion. 12-1h2 is in contact with the step surface. As such, the stepped surface forms a locking portion of the front end surface 54fe. The distal end portion 52f of the small diameter cylindrical portion 52 of the probe 50 is inserted into the small diameter portion 12-1h2.
一方、ベース部１４−１の貫通孔１４−１ｈには、プローブ５０の大径の円筒形状部５４の後端部５４ｒと連結部５４ｃの一部とが挿入されていて、後端面５４ｒｅが導線１８の端面１８ｅに当接している。小径の円柱形状部５２の後端面５２ｒｅはその端面１８ｅから離れている。 On the other hand, the rear end portion 54r of the large-diameter cylindrical portion 54 of the probe 50 and a part of the connecting portion 54c are inserted into the through hole 14-1h of the base portion 14-1, and the rear end face 54re is a conductor. 18 is in contact with the end face 18e. The rear end surface 52re of the small-diameter cylindrical portion 52 is separated from the end surface 18e.
また、検査用治具に組み込む前には、プローブ５０の大径の円筒形状部５４の先端面５４ｆｅから後端面５４ｒｅまでの自然長は、検査治具のヘッド部１２−１の大径部１２−１ｈ１から小径部１２−１ｈ２に移る段差の面（係止部）から導線１８の端面１８ｅまでの距離よりも大きい。そのため、図６のようにプローブ５０を検査用治具に組み込んだときには、大径の円筒形状部５４が係止部と端面１８ｅとから押されるため、２つのばね部５４ｓ１，５４ｓ２がその大きさの相違分だけ収縮することになる。その収縮により、それらのばね部は元の長さに戻ろうとする付勢力を発揮する。 Before being incorporated into the inspection jig, the natural length from the front end surface 54fe to the rear end surface 54re of the large-diameter cylindrical portion 54 of the probe 50 is the large-diameter portion 12 of the head portion 12-1 of the inspection jig. It is larger than the distance from the surface of the step (locking portion) moving from −1h1 to the small diameter portion 12-1h2 to the end surface 18e of the conductor 18. Therefore, when the probe 50 is incorporated in the inspection jig as shown in FIG. 6, the large-diameter cylindrical portion 54 is pushed from the locking portion and the end face 18e, so that the two spring portions 54s1 and 54s2 have the size. It will shrink by the difference. Due to the contraction, the spring portions exert a biasing force to return to the original length.
その検査用治具を用いて被検査物の検査を行う時には、検査用治具を下降させてプローブ５０の小径の先端部５２ｆｅを被検査物３０の配線等の検査対象部上の所定の検査点３０ｄ１に当接させて所定の大きさの力で検査点３０ｄ１を押すようにする。そうすると、プローブ５０の小径の円柱形状部５２の先端部５２ｆは、ヘッド部１２−１の貫通孔１２−１ｈ２内に押し込まれることになる。その際、上記のとおり、小径部の円柱形状部５２と大径の円筒形状部５４の先端部５４ｆとは位置Ｐにおいて接合されているため、先端部５２ｆが押し上げられると、それとともに大径の円筒形状部５４の先端部５４ｆも押し上げられて、その先端面５４ｆｅが係止部から離れる。その結果、大径の円筒形状部５４の２つのばね部５４ｓ１，５４ｓ２が圧縮されるため、それらのばね部には元の長さに戻ろうとする付勢力が生じる。その付勢力によって、先端面５２ｆｅは検査点３０ｄ１に押し付けられることになり、その先端面５２ｆｅと検査点３０ｄ１との安定した接触を確保することができるようになる。 When inspecting an object to be inspected using the inspection jig, the inspection jig is lowered and a small-diameter tip 52fe of the probe 50 is subjected to a predetermined inspection on an inspection target portion such as wiring of the inspection object 30. The inspection point 30d1 is pushed with a predetermined amount of force by contacting the point 30d1. If it does so, the front-end | tip part 52f of the small diameter cylindrical shape part 52 of the probe 50 will be pushed in in the through-hole 12-1h2 of the head part 12-1. At that time, as described above, the columnar portion 52 of the small diameter portion and the tip portion 54f of the large diameter cylindrical portion 54 are joined at the position P. Therefore, when the tip portion 52f is pushed up, a large diameter The distal end portion 54f of the cylindrical portion 54 is also pushed up, and the distal end surface 54fe is separated from the locking portion. As a result, since the two spring portions 54s1 and 54s2 of the large-diameter cylindrical portion 54 are compressed, an urging force is generated in the spring portions to return to the original length. By the urging force, the front end surface 52fe is pressed against the inspection point 30d1, and stable contact between the front end surface 52fe and the inspection point 30d1 can be ensured.
２つのばね部５４ｓ１，５４ｓ２は、上記の通り、旋回方向が逆であるため、押し縮められた際に生じる付勢力は、連結部５４ｃを同一方向に旋回させる方向に作用する。そのため、それらのばね部は、同一方向に旋回させた２つの螺旋状のばねを連結した場合に比べると、折れ曲がりにくくまた捻じれにくい。 Since the two spring portions 54s1 and 54s2 have the opposite turning directions as described above, the urging force generated when the two spring portions 54s1 and 54s2 are pressed and contracted acts in the direction of turning the connecting portion 54c in the same direction. Therefore, those spring portions are less likely to bend and twist than when two spiral springs swung in the same direction are connected.
なお、図５Ａ、図５Ｂ及び図６の実施形態に限定されるものではないが、被検査物３０に接する円柱形状部５２ｆの先端面５２ｆｅの形状は、平坦でもよく、球面形状のように湾曲して突出した形状でもよく、後述する図１０Ａに示すようないわゆる王冠の実施形態のように小さな突起が突出した形状でもよく、また、円柱形状部の長手方向軸線を斜めに交差する面で切断した形状でもよい。例えば、被検査物３０に、それらの形状の円柱形状部の先端部が押しあてられた場合に、ばね部の作用により、円柱形状部が長手方向の軸線を中心に旋回するときには、それらの形状の先端面が被検査物３０の表面の酸化膜をひっかいたり削り取ったりすることが可能になる。 Although not limited to the embodiment of FIGS. 5A, 5B, and 6, the shape of the tip surface 52fe of the cylindrical portion 52f that contacts the object 30 may be flat or curved like a spherical shape. It may be a shape that protrudes, or may have a shape in which a small protrusion protrudes, as in the so-called crown embodiment shown in FIG. 10A to be described later, and is cut along a plane that obliquely intersects the longitudinal axis of the cylindrical portion The shape may be sufficient. For example, when the tip of the cylindrical part of those shapes is pressed against the object to be inspected 30, when the cylindrical part turns around the longitudinal axis by the action of the spring part, those shapes It becomes possible to scratch or scrape the oxide film on the surface of the object 30 to be inspected.
［接続端子の製造例］
図７Ａから図７Ｈまでは、本発明に係る一実施形態の接続端子を製造するための各工程の一実施例を示す断面図である。なお、全図において、各部材の厚さ、長さ、形状、部材同士の間隔、隙間等は、理解の容易のために、適宜、拡大・縮小・変形・簡略化等をしている。図の説明の際の上下・左右の表現は、その図に向かった状態でのその図面の面に沿った方向を表すものとする。[Example of manufacturing connection terminals]
7A to 7H are cross-sectional views showing one example of each process for manufacturing the connection terminal of one embodiment according to the present invention. In all the drawings, the thickness, length, shape, spacing between members, gaps, and the like of each member are appropriately enlarged, reduced, deformed, simplified, etc. for easy understanding. In the description of the drawing, the vertical and horizontal expressions represent directions along the plane of the drawing in the state of facing the drawing.
図７Ａは、芯材７０の外周面上に金めっき層７２を形成し、さらにその上にニッケルめっき層７４を形成して製造した電鋳管（円筒形状管）の断面図を示す。芯材７０としては例えば外径が５μｍから３００μｍの金属線や樹脂線を用いることができる。金属線としては例えばＳＵＳ線を用いることができ、樹脂線としてはナイロン樹脂やポリエチレン樹脂等の合成樹脂線を用いることができる。また、金めっき層７２の厚さは約０．１μｍから１μｍであり、ニッケルめっき層７４の厚さは、約５μｍから５０μｍである。電鋳管の長さは、搬送作業の容易性等の観点から５０ｃｍ以下が望ましいが、それに限定されるものではなく、切断することなく連続的に製造してもよい。 FIG. 7A shows a cross-sectional view of an electroformed tube (cylindrical tube) manufactured by forming a gold plating layer 72 on the outer peripheral surface of the core member 70 and further forming a nickel plating layer 74 thereon. As the core material 70, for example, a metal wire or a resin wire having an outer diameter of 5 μm to 300 μm can be used. For example, a SUS wire can be used as the metal wire, and a synthetic resin wire such as a nylon resin or a polyethylene resin can be used as the resin wire. The gold plating layer 72 has a thickness of about 0.1 μm to 1 μm, and the nickel plating layer 74 has a thickness of about 5 μm to 50 μm. The length of the electroformed tube is preferably 50 cm or less from the viewpoint of ease of carrying work and the like, but is not limited thereto, and may be continuously manufactured without being cut.
図７Ｂは、図７Ａに示された電鋳管のニッケルめっき層７４の外周面上に絶縁膜７６を形成したものを示す。絶縁膜７６は後述の所定の溝の形成の際にレジストとしても機能する。その絶縁膜の厚さは約２μｍから５０μｍである。絶縁膜７６として、例えば、フッ素コーティング又はシリコーン樹脂材を用いて形成してもよい。 FIG. 7B shows an insulating film 76 formed on the outer peripheral surface of the nickel plating layer 74 of the electroformed pipe shown in FIG. 7A. The insulating film 76 also functions as a resist when forming a predetermined groove described later. The thickness of the insulating film is about 2 μm to 50 μm. The insulating film 76 may be formed using, for example, a fluorine coating or a silicone resin material.
次に、図７Ｃに示すように、絶縁膜７６を例えば３ｍｍから３０ｍｍの間隔を置いて所定の幅だけ周回して除去して溝７８ａ，７８ｂ，７８ｃを形成し、また、それらの溝と溝との間の絶縁膜の一部をらせん状に除去してらせん状の溝７９ａ，７９ｂを形成する。それらの溝を形成した部分には、ニッケルめっき層７４が露出する。 Next, as shown in FIG. 7C, the insulating film 76 is removed by turning around a predetermined width at intervals of, for example, 3 mm to 30 mm to form grooves 78a, 78b, and 78c. Part of the insulating film between them is removed spirally to form spiral grooves 79a and 79b. The nickel plating layer 74 is exposed at the portions where the grooves are formed.
これらの溝を形成する際には、絶縁膜７６にレーザービームを照射して、絶縁膜７６を除去する方法を採用することができる。この場合、芯材７０を周方向に回転させながら、溝の位置にレーザービームを直接照射し、その照射により絶縁膜７６を除去する。なお、この方法で使用するレーザービームの出力は、絶縁膜７６のみを除去することができ、且つニッケルめっき層を損傷することがない出力に調整される。 In forming these grooves, a method of irradiating the insulating film 76 with a laser beam and removing the insulating film 76 can be employed. In this case, the position of the groove is directly irradiated with the laser beam while rotating the core member 70 in the circumferential direction, and the insulating film 76 is removed by the irradiation. The output of the laser beam used in this method is adjusted so that only the insulating film 76 can be removed and the nickel plating layer is not damaged.
次に、図７Ｄに示すように、絶縁膜７６をマスクとして用いて、溝７８ａ，７８ｂ，７８ｃ，７９ａ，７９ｂに露出したニッケルめっき層７４をエッチング除去して金めっき層７２を露出させる。その際、ニッケルめっき層７４と芯材７０との間に金めっき層７２が存在するため、エッチングの際にニッケルエッチング液が芯材まで到達することを防止することができる。そのエッチング処理により除去されたニッケルめっき層７４の溝７８ａ，７８ｂ，７８ｃ，７９ａ，７９ｂに露出した端面は、エッチング液による腐食作用を利用するため、サイドエッチング部が形成されているという特徴を有する（後述する）。 Next, as shown in FIG. 7D, using the insulating film 76 as a mask, the nickel plating layer 74 exposed in the grooves 78a, 78b, 78c, 79a, 79b is removed by etching to expose the gold plating layer 72. At this time, since the gold plating layer 72 exists between the nickel plating layer 74 and the core material 70, it is possible to prevent the nickel etching solution from reaching the core material during etching. The end surfaces exposed in the grooves 78a, 78b, 78c, 79a, 79b of the nickel plating layer 74 removed by the etching process have a feature that side etching portions are formed in order to use the corrosive action of the etching solution. (Described later).
また、らせん状の溝７９ａ、７９ｂは、その部分にある絶縁膜７６をレーザによって除去した後に、その部分に露出したニッケルめっき層７４をエッチングによって除去することによって形成したため、そのらせん状の溝間にある部分（後述するばね部）のニッケルめっき層７４の端面にはサイドエッチング部が形成されており、この積層された絶縁膜７６が、そのニッケルめっき層７４に対してオーバーハングしている状態となる。 Further, since the spiral grooves 79a and 79b are formed by removing the insulating film 76 in the portions by laser and then removing the nickel plating layer 74 exposed in the portions by etching, the spiral grooves 79a and 79b are formed between the spiral grooves. A side-etched portion is formed on the end face of the nickel plating layer 74 in a portion (spring portion described later), and the laminated insulating film 76 is overhanging with respect to the nickel plating layer 74 It becomes.
図７Ｅでは、レーザービームを照射して、溝７８ａ，７８ｂ，７８ｃを形成している絶縁膜７６を端面から所定の長さを除去して、ニッケルめっき層７４を露出させる。その露出したニッケルめっき層７４は、接続治具用の接続端子に形成される際に、検査対象部に接触する先端部又は検査装置に接続される接続治具の電極に接触する後端部として機能する部分になり、接続治具の構造に応じて、それらの必要な長さが定まる。そのため、それらを考慮して絶縁膜７６を除去する長さを決定すればよい。 In FIG. 7E, the nickel plating layer 74 is exposed by irradiating a laser beam to remove a predetermined length from the end face of the insulating film 76 forming the grooves 78a, 78b, 78c. When the exposed nickel plating layer 74 is formed on the connection terminal for the connection jig, the exposed nickel plating layer 74 serves as a front end part that contacts the inspection target part or a rear end part that contacts the electrode of the connection jig connected to the inspection apparatus. They become functional parts, and their required lengths are determined according to the structure of the connecting jig. Therefore, the length for removing the insulating film 76 may be determined in consideration of them.
次に、超音波洗浄を行って、図７Ｆに示すように、溝７８ａ，７８ｂ，７８ｃ，７９ａ，７９ｂに露出した金めっき層７２を除去する。 Next, ultrasonic cleaning is performed to remove the gold plating layer 72 exposed in the grooves 78a, 78b, 78c, 79a, and 79b as shown in FIG. 7F.
次に、図７Ｇに示すように、芯材７０を白抜き矢印で示すように両端を離れる方向に引っ張って断面積が小さくなるように変形する。一端を固定して他端のみを引っ張るようにしてもよい。芯材７０が延伸してその断面積が小さくなると、芯材７０の外周面を被覆していた金めっき層７２がその外周面から剥離して電鋳管の内側に残り、芯材７０と金めっき層７２との間に空間７８が形成される。 Next, as shown in FIG. 7G, the core member 70 is deformed so that the cross-sectional area is reduced by pulling the core member 70 in the direction away from both ends as indicated by white arrows. One end may be fixed and only the other end may be pulled. When the core material 70 is stretched to reduce its cross-sectional area, the gold plating layer 72 covering the outer peripheral surface of the core material 70 is peeled off from the outer peripheral surface and remains inside the electroformed tube. A space 78 is formed between the plated layer 72.
次に、図７Ｈに示すように、芯材７０を抜き取ると、溝７８ａ，７８ｂ，７８ｃによって隣り合う部分が離れて、接続端子７１と接続端子７３とが、別個のものとして形成されることになる。このように、図７Ｈに示すように、芯材７０を抜き取った段階で、他の追加の工程を必要とすることなく接続端子を完成させることができる。なお、図７Ａから図７Ｈは、簡略化して電鋳管の一部のみを示しているため、図７Ｈの工程では、２個の接続子のみが製造されたようになっているが、長い電鋳管を使用することによって、多数の接続端子を一度に製造することができる。 Next, as shown in FIG. 7H, when the core member 70 is extracted, the adjacent portions are separated by the grooves 78a, 78b, and 78c, and the connection terminal 71 and the connection terminal 73 are formed separately. Become. As described above, as shown in FIG. 7H, the connection terminal can be completed without requiring another additional process at the stage where the core member 70 is extracted. 7A to 7H show only a part of the electroformed pipe in a simplified manner, so that only two connectors are manufactured in the process of FIG. 7H. By using a cast pipe, a large number of connection terminals can be manufactured at once.
図７Ｈに示すように、接続端子７１，７３は、導電性材料の円筒形状管のニッケルめっき層７４を備え、その両端側には、ニッケルめっき層が露出した先端部及び後端部が形成されており、また、先端部と後端部との間には、長軸方向のらせん状の壁面を有するばね部が形成されており、そのらせん状の壁面に沿って絶縁層７６が形成されている。 As shown in FIG. 7H, each of the connection terminals 71 and 73 includes a nickel-plated layer 74 of a cylindrical tube made of a conductive material, and a front end portion and a rear end portion where the nickel plating layer is exposed are formed on both ends thereof. In addition, a spring portion having a helical wall surface in the major axis direction is formed between the front end portion and the rear end portion, and an insulating layer 76 is formed along the helical wall surface. Yes.
本発明の接続端子は、上記の如き寸法の条件下において製造することができるが、特に、外径が３０から１００μｍ、内径が２０から９０μｍ、絶縁被覆の厚みが２〜１５μｍに形成される場合において、接続治具に用いられる接続端子として好適に用いることができる。 The connection terminal of the present invention can be manufactured under the conditions of the dimensions as described above. In particular, when the outer diameter is 30 to 100 μm, the inner diameter is 20 to 90 μm, and the thickness of the insulating coating is 2 to 15 μm. Can be suitably used as a connection terminal used in a connection jig.
図８Ａから図１０Ｂは、接続端子の先端部の当接部の形状に特徴のあるいくつかの実施形態を示す。これらの接続端子も、検査用プローブのみならず、対象物と所定の装置とを電気的に接続する接続治具に、更に、インターポーザやコネクタのように電極端と電極端とを接続する接続治具にも使用することができる。 FIG. 8A to FIG. 10B show some embodiments characterized by the shape of the contact portion of the tip end portion of the connection terminal. These connection terminals are connected not only to inspection probes, but also to connection jigs that electrically connect an object to a predetermined device, and connection treatments that connect electrode ends to electrode ends like interposers and connectors. Can also be used on tools.
図８Ａは、本発明の一実施形態に係る接続端子８６の当接部８１ａを示す拡大正面図である。当接部８１ａは、対象物の対象点に少なくともその一部が接触して電気的接続を行う部分である。図８Ｂは、図８Ａの接続端子８６の底面図である。接続端子８６は、対象物に設けられた対象点と所定の接続点とを電気的に接続するもので、導電性材料のめっき層からなる円筒形状部８１を備える。 FIG. 8A is an enlarged front view showing the contact portion 81a of the connection terminal 86 according to one embodiment of the present invention. The abutting portion 81a is a portion that makes electrical connection with at least a part of the object point of the object. FIG. 8B is a bottom view of the connection terminal 86 of FIG. 8A. The connection terminal 86 electrically connects a target point provided on the target and a predetermined connection point, and includes a cylindrical portion 81 made of a plating layer of a conductive material.
図８Ｂに示すように、円筒形状部８１は、内側壁面と外側壁面とから形成されていて、中央に空間を有する。円筒形状部８１の先端部（図８Ａにおいて下側の部分）には、外側壁面の縁部８２と内側壁面の縁部８４とそれらの間を結ぶ面８３とを含む当接部８１ａが形成されている。 As shown in FIG. 8B, the cylindrical portion 81 is formed of an inner wall surface and an outer wall surface, and has a space in the center. An abutting portion 81a including an edge 82 of the outer wall surface, an edge 84 of the inner wall surface, and a surface 83 connecting them is formed at the tip of the cylindrical portion 81 (the lower portion in FIG. 8A). ing.
当接部８１ａの面８３は、例えば、エッチングにより形成することができる。その方法を説明する。例えば、図７Ｂに示すように、電鋳管のニッケルめっき層７４の外周面上に絶縁膜７６を形成して円筒形状体を作る。接続端子の長さに応じて、絶縁膜７６をマスクとして用いて、レーザービームによって、円筒形状体から、接触子としての必要性に応じて所定の長さの絶縁膜７６を除去し、エッチング処理すると、図８Ａに示す当接部が露出する。 The surface 83 of the contact part 81a can be formed by etching, for example. The method will be described. For example, as shown in FIG. 7B, an insulating film 76 is formed on the outer peripheral surface of the nickel plating layer 74 of the electroformed tube to make a cylindrical body. Depending on the length of the connection terminal, the insulating film 76 is used as a mask, and the insulating film 76 having a predetermined length is removed from the cylindrical body by a laser beam according to the necessity as a contact, using an etching process. Then, the contact portion shown in FIG. 8A is exposed.
その等方的なエッチングにより、ニッケルめっき層８４の端部にサイドエッチング部が形成される。その際、円筒形状体の各端部において、エッチング液が、絶縁膜７６から近いニッケルめっき層７４の円筒形状体の外側壁面に回り込んでその外側壁面を侵食するため、外側壁面は、内側壁面よりも侵食される。なお、絶縁膜７６は必ずしも必要ではないので、絶縁膜を形成しない場合には、レジスト膜を使用してエッチングを行う。 By the isotropic etching, a side etching portion is formed at the end of the nickel plating layer 84. At that time, at each end of the cylindrical body, the etching solution wraps around the outer wall surface of the cylindrical body of the nickel plating layer 74 close to the insulating film 76 and erodes the outer wall surface. More eroded than. Note that since the insulating film 76 is not always necessary, when the insulating film is not formed, etching is performed using a resist film.
円筒形状体の端部にサイドエッチング部が形成された結果、図８Ａに現れているように、面８３の形状は、平坦ではなく、湾曲したものとなる（湾曲形状面８３）。その湾曲の広さや大きさや曲率は、エッチング液の薬液の配合率、濃度、温度等を変更したり、又はエッチングの際の印加電圧の大きさ等の諸条件を変更することによって変えることができる。 As a result of forming the side etching portion at the end of the cylindrical body, as shown in FIG. 8A, the shape of the surface 83 is not flat but curved (curved shape surface 83). The breadth, size, and curvature of the curve can be changed by changing the compounding ratio, concentration, temperature, etc. of the chemical solution of the etching solution, or by changing various conditions such as the magnitude of the applied voltage during etching. .
図９Ａは、接続端子９６−１の当接部９１−１ａの一部の断面を示す。当接部９１−１ａは、外側壁面の縁部９２−１と内側壁面の縁部９４−１とそれらの間の面９３−１とを含む。当接部９１−１ａは、図８Ａ及び図８Ｂに示す当接部８１ａと同様に、湾曲する面９３−１を有する。その図に示すように、接続端子９６−１の軸線方向（図９Ａにおいて、上下方向）に沿って、外側壁面の縁部９２−１と内側壁面の縁部９４−１とが異なる位置にある。つまり、図９Ａにおいて、外側壁面の縁部９２−１の位置が、内側壁面の縁部９４−１の位置よりも、軸線方向に沿って、上方（接続端子の後端部側）にある。そのため、面９３−１は、外側壁面の縁部９２−１と内側壁面の縁部９４−１とを斜め方向に結ぶように延在し、それにより、内側壁面の縁部９４−１は鋭利な先端を形成している。これにより、その鋭利な先端が対象物の対象点に容易に食い込むことができるため、接続端子と対象物との接触特性（接触安定性）が向上する。また、その鋭利な先端部への付着物は、次の当接の際に剥がれ易く、その自浄作用により、接続端子と対象物との接触特性が向上する。 FIG. 9A shows a partial cross section of the contact portion 91-1a of the connection terminal 96-1. The contact portion 91-1a includes an edge portion 92-1 on the outer wall surface, an edge portion 94-1 on the inner wall surface, and a surface 93-1 therebetween. The contact part 91-1a has a curved surface 93-1, similarly to the contact part 81a shown in FIGS. 8A and 8B. As shown in the figure, the edge portion 92-1 of the outer wall surface and the edge portion 94-1 of the inner wall surface are in different positions along the axial direction of the connection terminal 96-1 (vertical direction in FIG. 9A). . That is, in FIG. 9A, the position of the edge portion 92-1 on the outer wall surface is above the position of the inner wall surface edge 94-1 along the axial direction (on the rear end side of the connection terminal). Therefore, the surface 93-1 extends so as to connect the edge portion 92-1 of the outer wall surface and the edge portion 94-1 of the inner wall surface in an oblique direction, whereby the edge portion 94-1 of the inner wall surface is sharp. The tip is formed. Thereby, since the sharp tip can easily bite into the target point of the target object, the contact characteristic (contact stability) between the connection terminal and the target object is improved. Moreover, the adhering matter to the sharp tip portion is easily peeled off at the time of the next contact, and the contact characteristics between the connection terminal and the object are improved by the self-cleaning action.
また、図９Ｂは、他の実施形態に係る接続端子９６−２の当接部９１−２ａの一部の断面を示す。当接部９１−２ａは、外側壁面の縁部９２−２と内側壁面の縁部９４−２とそれらの間の面９３−２とを含む。図９Ｂに示すように、図９Ａの当接部９１−１ａと同様に、当接部９１−２ａの内側壁面の縁部９４−２は鋭利な先端を有するが、図９Ａの当接部９１−１ａの面９３−１と比べて、図９Ｂの当接部９１−２ａの面９３−２の湾曲面の曲率が小さく、外側壁面の縁部９２−２よりも図面の上方（接続端子９６−２の後端側）に面９３−２の頂点（又は底面）が位置し、凹形状に形成なっている。 FIG. 9B shows a partial cross section of the contact portion 91-2a of the connection terminal 96-2 according to another embodiment. The contact portion 91-2a includes an edge portion 92-2 of the outer wall surface, an edge portion 94-2 of the inner wall surface, and a surface 93-2 therebetween. As shown in FIG. 9B, like the contact portion 91-1a in FIG. 9A, the edge portion 94-2 of the inner wall surface of the contact portion 91-2a has a sharp tip, but the contact portion 91 in FIG. 9A. The curvature of the curved surface of the surface 93-2 of the contact portion 91-2a in FIG. 9B is smaller than that of the surface 93-1 of FIG. -2 (the rear end side), the apex (or the bottom surface) of the surface 93-2 is positioned and formed in a concave shape.
図１１Ａは、円筒形状体のニッケルめっき層の端部に、サイドエッチングにより、当接部を形成した一例を説明するための走査電子顕微鏡による拡大写真である。その写真に示す接続端子の当接部は、外径が約５０μｍ、内径が約４０μｍ、外側壁面の縁部と内側壁面の縁部との軸線方向の距離が約４μｍであり、その写真から明らかなように、外側壁面の縁部と内側壁面の縁部との間の面は湾曲している。 FIG. 11A is an enlarged photograph taken by a scanning electron microscope for explaining an example in which a contact portion is formed by side etching at an end portion of a nickel-plated layer of a cylindrical body. The contact part contact portion shown in the photograph has an outer diameter of about 50 μm, an inner diameter of about 40 μm, and the axial distance between the edge of the outer wall surface and the edge of the inner wall surface is about 4 μm. As such, the surface between the edge of the outer wall surface and the edge of the inner wall surface is curved.
図９Ａと図９Ｂとにそれぞれ示す内側壁面の縁部９４−１，９４−２の近く、つまり、先端部に近い面９３−１，９３−２の傾斜の大きさの相違の概略は、図９Ａにおいては、内側壁面から面９４−１の接線までの角度は、接線の接点の位置が内側壁面の縁部９４−１から外側壁面の縁部９２−１まで移動する間に、約２０度から８０度まで変化するのに対し、図９Ｂにおいては、内側壁面から面９３−２の接線までの角度は、接線の位置が内側壁面の縁部９４−２から外側壁面の縁部９２−２まで移動する間に、約１５度から１２０度まで変化する。すなわち、図９Ａの当接部９１−１ａの先端部の方が、図９Ｂの当接部９１−２ａの先端部よりも鋭利である。 FIG. 9A and FIG. 9B show the outline of the difference in inclination between the edges 94-1 and 94-2 of the inner wall surface, that is, the surfaces 93-1 and 93-2 near the tip. In 9A, the angle from the inner wall surface to the tangent line of the surface 94-1 is about 20 degrees while the position of the contact point of the tangent line moves from the edge portion 94-1 of the inner wall surface to the edge portion 92-1 of the outer wall surface. 9B, in FIG. 9B, the angle from the inner wall surface to the tangent of the surface 93-2 is such that the position of the tangent is from the edge 94-2 of the inner wall surface to the edge 92-2 of the outer wall surface. Change from about 15 degrees to 120 degrees. That is, the tip of the contact portion 91-1a in FIG. 9A is sharper than the tip of the contact portion 91-2a in FIG. 9B.
図１０Ａは、図８Ａの接続端子８６の当接部８１ａと異なる形状の当接部１６１ａを備える接続端子１６６の拡大正面図である。図１０Ｂは、図１０Ａの接続端子１６６の底面図である。接続端子１６６は、図８Ａの接続端子８６と同様に、対象物に設けられた対象点と所定の接続点とを電気的に接続するもので、導電性材料のめっき層からなる円筒形状部６１を備える。 FIG. 10A is an enlarged front view of the connection terminal 166 including a contact portion 161a having a shape different from that of the contact portion 81a of the connection terminal 86 in FIG. 8A. 10B is a bottom view of the connection terminal 166 of FIG. 10A. Similar to the connection terminal 86 of FIG. 8A, the connection terminal 166 electrically connects a target point provided on the target and a predetermined connection point, and the cylindrical portion 61 made of a plating layer of a conductive material. Is provided.
図１０Ｂに示すように、円筒形状部１６１は、内側壁面と外側壁面とから形成されていて、中央に空間を有する。円筒形状部１６１の先端部（図１０Ａにおいて下側の部分）には、外側壁面の縁部１６２と内側壁面の縁部１６４とそれらの間を結ぶ面１６３とを含む当接部１６１ａが形成されている。 As shown in FIG. 10B, the cylindrical portion 161 is formed of an inner wall surface and an outer wall surface, and has a space in the center. An abutting portion 161a including an outer wall edge 162, an inner wall edge 164, and a surface 163 connecting them is formed at the tip of the cylindrical portion 161 (the lower portion in FIG. 10A). ing.
ただし、図８Ａの面８３とは異なり、図１０Ａに示すように、当接部１６１ａの面１６３の縁部１６２，１６４には、円筒形状部１６１の円周面に沿って、等間隔に、略Ｕ字形状の切欠き部が形成されている。このような切欠き部は、当接部８１ａの面８３同様に、エッチング処理により形成することができる。 However, unlike the surface 83 of FIG. 8A, as shown in FIG. 10A, the edges 162 and 164 of the surface 163 of the contact portion 161a are equidistantly spaced along the circumferential surface of the cylindrical portion 161. A substantially U-shaped notch is formed. Such a notch can be formed by an etching process in the same manner as the surface 83 of the contact portion 81a.
例えば、図７Ｂに示すように、電鋳管のニッケルめっき層７４の外周面上に絶縁膜７６を形成して円筒形状体を作る。接続端子の長さに応じて、レーザービームにより、円筒形状体の各端部の円周に沿って、絶縁膜７６を略Ｕ字形状に除去してニッケルめっき層７４を露出させる。その状態で、残りの絶縁膜７６をマスクとして用いて、円筒形状体をエッチング処理する。その際、円筒形状体の各端部において、エッチング液が、絶縁膜７６の縁からニッケルめっき層７４の円筒形状体の外側壁面に回り込んでその外側壁面を侵食するため、外側壁面は、内側壁面よりも腐食される。その結果、絶縁膜７６を略Ｕ字形状に除去した位置にあるニッケルめっき層７４も略Ｕ字形状に侵食される。 For example, as shown in FIG. 7B, an insulating film 76 is formed on the outer peripheral surface of the nickel plating layer 74 of the electroformed tube to make a cylindrical body. Depending on the length of the connection terminal, the insulating film 76 is removed in a substantially U shape along the circumference of each end portion of the cylindrical body by a laser beam to expose the nickel plating layer 74. In this state, the cylindrical body is etched using the remaining insulating film 76 as a mask. At that time, at each end of the cylindrical body, the etchant wraps around the outer wall surface of the cylindrical body of the nickel plating layer 74 from the edge of the insulating film 76 and erodes the outer wall surface. More corroded than the wall. As a result, the nickel plating layer 74 at the position where the insulating film 76 is removed in a substantially U shape is also eroded into a substantially U shape.
その結果、図１０Ａに示すように、当接部１６１ａにおいては、外側壁面の縁部１６２の最も突出した位置１６２ｔと外側壁面の縁部１６２の最も引っ込んだ位置１６２ｂとは、接続端子１６６の軸線方向に沿って大きく離れており、また、内側壁面の縁部１６４の最も突出した位置１６４ｔと内側壁面の縁部１６４の最も引っ込んだ位置１６４ｂも、接続端子１６６の軸線方向に沿って大きく離れている。 As a result, as shown in FIG. 10A, in the abutting portion 161a, the most protruded position 162t of the outer wall edge 162 and the most retracted position 162b of the outer wall edge 162 are the axis of the connection terminal 166. The position 164t at which the inner wall surface edge 164 is most protruded and the position 164b at which the inner wall edge 164 is most retracted are also greatly separated along the axial direction of the connection terminal 166. Yes.
図１１Ｂは、円筒形状体のニッケルめっき層の端部に、サイドエッチングにより、図１１Ａの形状とは異なる図６Ａに示す形状（以下、「クラウン形状」という）の当接部を形成した一例を説明するための走査電子顕微鏡による拡大写真である。その写真に示す接続端子の当接部は、外径が約５０μｍ、内径が約４０μｍ、外側壁面の縁部と内側壁面の縁部との軸線方向の距離が約５μｍである。また、外側壁面の縁部の最も突出した位置と外側壁面の縁部の最も低い位置との距離は約１８μｍであり、内側壁面の縁部の最も突出した位置と内側壁面の縁部の最も低い位置との距離は約１５μｍである。その写真から明らかなように、外側壁面の縁部と内側壁面の縁部との間の面は湾曲している。 FIG. 11B shows an example in which a contact portion of the shape shown in FIG. 6A (hereinafter referred to as “crown shape”) different from the shape of FIG. 11A is formed by side etching at the end of the nickel plating layer of the cylindrical body. It is an enlarged photograph by the scanning electron microscope for demonstrating. The contact portion contact portion shown in the photograph has an outer diameter of about 50 μm, an inner diameter of about 40 μm, and an axial distance between the edge of the outer wall surface and the edge of the inner wall surface is about 5 μm. The distance between the most protruding position of the edge of the outer wall surface and the lowest position of the edge of the outer wall surface is about 18 μm, and the most protruding position of the edge of the inner wall surface and the lowest of the edge of the inner wall surface The distance from the position is about 15 μm. As is apparent from the photograph, the surface between the edge of the outer wall surface and the edge of the inner wall surface is curved.
本発明の製造方法で記載される製造方法を用いて製造した接触端子は、その端面（側面）が内側から外側に湾曲に傾斜する。 The contact terminal manufactured using the manufacturing method described in the manufacturing method of the present invention has its end surface (side surface) inclined in a curve from the inside to the outside.
上記の図７Ａから図７Ｈの実施例においては、絶縁膜７６を形成し、それを必要に応じて、レジスト膜として使用した。上記の図８Ａから図１１Ｂの実施例においては、絶縁膜は必ずしも必要ではないので、エッチングの際には、レジスト膜を使用してもよい。 In the embodiments of FIGS. 7A to 7H described above, the insulating film 76 is formed and used as a resist film as necessary. In the above-described embodiments shown in FIGS. 8A to 11B, an insulating film is not always necessary. Therefore, a resist film may be used for etching.
また、上記の図８Ａから図１１Ｂの実施例において、円筒形状部８１等の当接部８１ａ等は、単一のめっき層からなるように描いているが、その層の内側、つまり、円筒形状部８１等の中心軸線側に、面８３等の形成や対象物の対象点との接触安定性の観点から、例えば、金めっき層を形成してもよい。ただし、その場合、金めっき層は当接部の先端部の内側壁面の縁部周辺では剥離してしまって存在しないことがある。 8A to 11B, the abutting portion 81a and the like of the cylindrical portion 81 and the like are drawn so as to consist of a single plating layer, but the inside of the layer, that is, the cylindrical shape. For example, a gold plating layer may be formed on the central axis side of the part 81 and the like from the viewpoint of forming the surface 83 and the like and contact stability with the target point of the target object. However, in that case, the gold plating layer may be peeled off and not present around the edge of the inner wall surface of the tip of the contact portion.
そのため、円筒形状部８１等の当接部８１ａ等が、ニッケルめっき層とその内側の金めっき層とから構成されているように、複数のめっき層によって形成されている場合には、外側壁面の縁部８２等は、当接部において、最も外側に形成されているめっき層の外側壁面の縁部を意味し、内側壁面の縁部８４等は、内側のめっき層の内側壁面の縁部を意味するが、当接部の先端部において、一部のめっき層が剥がれていて存在しない場合には、存在する内側のめっき層の内側壁面の縁部を意味する。 Therefore, when the contact portion 81a such as the cylindrical portion 81 is formed of a plurality of plating layers such as a nickel plating layer and an inner gold plating layer, The edge portion 82 and the like mean the edge portion of the outer wall surface of the plating layer formed on the outermost side in the contact portion, and the edge portion 84 and the like of the inner wall surface means the edge portion of the inner wall surface of the inner plating layer. Meaning, when a part of the plating layer is peeled off and does not exist at the tip of the contact portion, it means the edge of the inner wall surface of the inner plating layer.
以上、本発明に係る被検査物検査用の検査用治具及びそれに用いることのできるプローブの実施形態について説明したが、本発明はその実施形態に拘束されるものではなく、当業者が容易になしえる追加、削除、改変等は、本発明に含まれるものであり、また、本発明の技術的範囲は、添付の特許請求の範囲の記載によって定められることを承知されたい。 As described above, the embodiment of the inspection jig for inspecting the inspection object according to the present invention and the probe that can be used for the inspection jig has been described. However, the present invention is not limited to the embodiment and can be easily performed by those skilled in the art. It should be understood that additions, deletions, modifications, and the like that can be made are included in the present invention, and the technical scope of the present invention is defined by the description of the appended claims.
１０・・・検査用治具
１１・・・支持部材
１１ｓ・・・スペーサ
１２・・・ヘッド部
１２ｈ、１４ｈ・・・貫通孔
１２ｈ１・・・大径部
１２ｈ２・・・小径部
１４・・・ベース部
１６・・・電極部
２０・・・プローブ
２２・・・小径の円筒形状部
２４・・・大径の円筒形状部
２２ｆ・・・先端部
２２ｒ・・・後端部
２２ｆｅ，２４ｆｅ・・・先端面
２２ｒｅ，２４ｒｅ・・・後端面
２２ｓ・・・ばね部
７０・・・芯材
７１，７３・・・接続端子
７２・・・金めっき層
７４・・・ニッケルめっき層
７６・・・絶縁膜DESCRIPTION OF SYMBOLS 10 ... Inspection jig | tool 11 ... Support member 11s ... Spacer 12 ... Head part 12h, 14h ... Through-hole 12h1 ... Large diameter part 12h2 ... Small diameter part 14 ... Base portion 16 ... electrode portion 20 ... probe 22 ... small-diameter cylindrical portion 24 ... large-diameter cylindrical portion 22f ... tip portion 22r ... rear end portions 22fe, 24fe,. Front end surfaces 22re, 24re ... rear end surface 22s ... spring portion 70 ... core material 71, 73 ... connection terminal 72 ... gold plating layer 74 ... nickel plating layer 76 ... insulation film
Claims (9)
小径の導電部とそれを囲むように配置された大径の円筒形状部とを備え、
前記小径の導電部又は前記大径の円筒形状部の少なくとも一方にばね部が形成され、
前記小径の導電部の先端部の先端面が、前記大径の円筒形状部の先端面から突出し、
さらに、前記小径の導電部の先端部が、前記大径の円筒形状部の先端部に接合され、
前記ばね部が、サイドエッチングにより形成された側面を有し、
前記小径の導電部の先端部が、サイドエッチングにより形成された先端面を有する、接続端子。 A connection terminal used for a connection jig for connecting between target points,
A small-diameter conductive portion and a large-diameter cylindrical portion arranged so as to surround it,
A spring portion is formed on at least one of the small-diameter conductive portion or the large-diameter cylindrical portion,
The tip surface of the tip portion of the small diameter conductive portion protrudes from the tip surface of the large diameter cylindrical portion,
Furthermore, the tip of the small diameter conductive portion is joined to the tip of the large diameter cylindrical portion,
Said spring section, have a side formed by side etching,
A connection terminal , wherein a tip portion of the small-diameter conductive portion has a tip surface formed by side etching .
小径の導電部とそれを囲むように配置された大径の円筒形状部とを備え、
前記小径の導電部又は前記大径の円筒形状部の少なくとも一方にばね部が形成され、
前記小径の導電部の先端部の先端面が、前記大径の円筒形状部の先端面から突出し、
さらに、前記小径の導電部の先端部が、前記大径の円筒形状部の先端部に接合され、
前記ばね部が、サイドエッチングにより形成された側面を有し、
前記ばね部が、長軸方向のらせん状の壁面を有し、また、該ばね部が、該らせん状の壁面に沿って形成された絶縁層を有し、該絶縁層の端面が、前記ばね部の前記らせん状の壁面の端面に対しオーバーハングしている、接続端子。 A connection terminal used for a connection jig for connecting between target points,
A small-diameter conductive portion and a large-diameter cylindrical portion arranged so as to surround it,
A spring portion is formed on at least one of the small-diameter conductive portion or the large-diameter cylindrical portion,
The tip surface of the tip portion of the small diameter conductive portion protrudes from the tip surface of the large diameter cylindrical portion,
Furthermore, the tip of the small diameter conductive portion is joined to the tip of the large diameter cylindrical portion,
Said spring section, have a side formed by side etching,
The spring portion has a spiral wall surface in the major axis direction, the spring portion has an insulating layer formed along the spiral wall surface, and an end surface of the insulating layer is the spring. A connection terminal overhanging the end face of the spiral wall surface of the part .
小径の導電部とそれを囲むように配置された大径の円筒形状部とを備えるプローブであって、
前記小径の導電部又は前記大径の円筒形状部の少なくとも一方にばね部が形成され、
前記小径の導電部の先端部の先端面が、前記大径の円筒形状部の先端面から突出し、
さらに、前記小径の導電部の先端部が、前記大径の円筒形状部の先端部に接合されたプローブと、
該プローブの前記小径の導電部又は前記大径の円筒形状部の後端部の後端面に電気的に接続される導線を有する電極部と、
前記プローブの前記小径の導電部の前記先端部を前記被検査物の前記対象部の所定の検査点へ案内するためのヘッド部であって、前記プローブの前記大径の円筒形状部の先端面が係止する係止部を備えるヘッド部と、
前記プローブの前記小径の導電部又は前記大径の円筒形状部の前記後端部の前記後端面を前記電極部の前記導線に向けて案内するためのベース部とを備え、
前記ばね部が、サイドエッチングにより形成された側面を有し、
前記小径の導電部の先端部が、サイドエッチングにより形成された先端面を有する、検査用治具。 An inspection jig for an inspection apparatus for inspecting electrical characteristics of a target portion of an object to be inspected,
A probe comprising a small-diameter conductive portion and a large-diameter cylindrical portion arranged so as to surround it,
A spring portion is formed on at least one of the small-diameter conductive portion or the large-diameter cylindrical portion,
The tip surface of the tip portion of the small diameter conductive portion protrudes from the tip surface of the large diameter cylindrical portion,
Furthermore, a probe in which the tip of the small-diameter conductive portion is joined to the tip of the large-diameter cylindrical portion;
An electrode portion having a conducting wire electrically connected to a rear end surface of the rear end portion of the small diameter conductive portion or the large diameter cylindrical portion of the probe;
A head portion for guiding the tip portion of the small-diameter conductive portion of the probe to a predetermined inspection point of the target portion of the inspection object, and a tip surface of the large-diameter cylindrical portion of the probe A head portion provided with a locking portion that locks;
A base portion for guiding the rear end surface of the rear end portion of the small-diameter conductive portion or the large-diameter cylindrical portion of the probe toward the conducting wire of the electrode portion;
Said spring section, have a side formed by side etching,
An inspection jig, wherein a tip portion of the small-diameter conductive portion has a tip surface formed by side etching .
小径の導電部とそれを囲むように配置された大径の円筒形状部とを備えるプローブであって、
前記小径の導電部又は前記大径の円筒形状部の少なくとも一方にばね部が形成され、
前記小径の導電部の先端部の先端面が、前記大径の円筒形状部の先端面から突出し、
さらに、前記小径の導電部の先端部が、前記大径の円筒形状部の先端部に接合されたプローブと、
該プローブの前記小径の導電部又は前記大径の円筒形状部の後端部の後端面に電気的に接続される導線を有する電極部と、
前記プローブの前記小径の導電部の前記先端部を前記被検査物の前記対象部の所定の検査点へ案内するためのヘッド部であって、前記プローブの前記大径の円筒形状部の先端面が係止する係止部を備えるヘッド部と、
前記プローブの前記小径の導電部又は前記大径の円筒形状部の前記後端部の前記後端面を前記電極部の前記導線に向けて案内するためのベース部とを備え、
前記ばね部が、サイドエッチングにより形成された側面を有し、
前記ばね部が、長軸方向のらせん状の壁面を有し、また、該ばね部が、該らせん状の壁面に沿って形成された絶縁層を有し、該絶縁層の端面が、前記ばね部の前記らせん状の壁面の端面に対しオーバーハングしている、検査用治具。 An inspection jig for an inspection apparatus for inspecting electrical characteristics of a target portion of an object to be inspected,
A probe comprising a small-diameter conductive portion and a large-diameter cylindrical portion arranged so as to surround it,
A spring portion is formed on at least one of the small-diameter conductive portion or the large-diameter cylindrical portion,
The tip surface of the tip portion of the small diameter conductive portion protrudes from the tip surface of the large diameter cylindrical portion,
Furthermore, a probe in which the tip of the small-diameter conductive portion is joined to the tip of the large-diameter cylindrical portion;
An electrode portion having a conducting wire electrically connected to a rear end surface of the rear end portion of the small diameter conductive portion or the large diameter cylindrical portion of the probe;
A head portion for guiding the tip portion of the small-diameter conductive portion of the probe to a predetermined inspection point of the target portion of the inspection object, and a tip surface of the large-diameter cylindrical portion of the probe A head portion provided with a locking portion that locks;
A base portion for guiding the rear end surface of the rear end portion of the small-diameter conductive portion or the large-diameter cylindrical portion of the probe toward the conducting wire of the electrode portion;
Said spring section, have a side formed by side etching,
The spring portion has a spiral wall surface in the major axis direction, the spring portion has an insulating layer formed along the spiral wall surface, and an end surface of the insulating layer is the spring. An inspection jig overhanging the end face of the spiral wall surface of the portion .
円筒形状部と、該円筒形状部内に配置された１又は２の棒状部とを備え、
前記円筒形状部が、一方にある円筒形状の先端部と、他方にある円筒形状の後端部と、前記先端部と前記後端部との間に形成されたばね部とを備え、
前記ばね部が、サイドエッチングにより形成された側面を有し、
前記棒状部の一方が、前記円筒形状部の前記先端部に接合されるとともに該先端部から突出しており、該先端部が、サイドエッチングにより形成された先端面を有し、前記棒状部の他方が存在するときには、該他方が、前記円筒形状部の前記後端部に接合されるとともに該後端部から突出している、プローブ。 A probe attached to an inspection jig for an inspection apparatus for inspecting electrical characteristics of a target portion of an object to be inspected,
A cylindrical portion, and one or two rod-shaped portions disposed in the cylindrical portion,
The cylindrical portion includes a cylindrical tip portion on one side, a cylindrical rear end portion on the other side, and a spring portion formed between the tip portion and the rear end portion,
The spring portion has a side surface formed by the side etching,
One of the rod-like portions is joined to the tip portion of the cylindrical portion and protrudes from the tip portion, the tip portion has a tip surface formed by side etching , and the other of the rod-like portions The probe is joined to the rear end portion of the cylindrical portion and protrudes from the rear end portion.
円筒形状部と、該円筒形状部内に配置された１又は２の棒状部とを備え、
前記円筒形状部が、一方にある円筒形状の先端部と、他方にある円筒形状の後端部と、前記先端部と前記後端部との間に形成されたばね部とを備え、
前記ばね部が、サイドエッチングにより形成された側面を有し、
前記棒状部の一方が、前記円筒形状部の前記先端部に接合されるとともに該先端部から突出しており、前記棒状部の他方が存在するときには、該他方が、前記円筒形状部の前記後端部に接合されるとともに該後端部から突出しており、
前記ばね部が、長軸方向のらせん状の壁面を有し、また、該ばね部が、該らせん状の壁面に沿って形成された絶縁層を有し、該絶縁層の端面が、前記ばね部の前記らせん状の壁面の端面に対しオーバーハングしている、プローブ。 A probe attached to an inspection jig for an inspection apparatus for inspecting electrical characteristics of a target portion of an object to be inspected,
A cylindrical portion, and one or two rod-shaped portions disposed in the cylindrical portion,
The cylindrical portion includes a cylindrical tip portion on one side, a cylindrical rear end portion on the other side, and a spring portion formed between the tip portion and the rear end portion,
The spring portion has a side surface formed by the side etching,
One of the rod-shaped portions is joined to the tip portion of the cylindrical portion and protrudes from the tip portion, and when the other of the rod-shaped portions is present, the other is the rear end of the cylindrical portion. And protrudes from the rear end portion ,
The spring portion has a spiral wall surface in the major axis direction, the spring portion has an insulating layer formed along the spiral wall surface, and an end surface of the insulating layer is the spring. The probe overhangs with respect to the end face of the spiral wall surface of the part .
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| Application Number | Priority Date | Filing Date | Title |
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| JP2010057016 | 2010-03-15 | ||
| JP2010057016 | 2010-03-15 | ||
| PCT/JP2011/055980 WO2011115082A1 (en) | 2010-03-15 | 2011-03-14 | Connection terminal and connection jig |
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| JP2011182002A Division JP2013007730A (en) | 2010-03-15 | 2011-08-23 | Connection terminal and connection jig |
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| JPWO2011115082A1 JPWO2011115082A1 (en) | 2013-06-27 |
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| JP2011535812A Active JP5903888B2 (en) | 2010-03-15 | 2011-03-14 | Connection terminal and inspection jig |
| JP2011182002A Pending JP2013007730A (en) | 2010-03-15 | 2011-08-23 | Connection terminal and connection jig |
| JP2012177110A Active JP5751222B2 (en) | 2010-03-15 | 2012-08-09 | Connection terminal and connection jig |
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| JP2012177110A Active JP5751222B2 (en) | 2010-03-15 | 2012-08-09 | Connection terminal and connection jig |
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| TW (1) | TWI510787B (en) |
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| JP2014025737A (en) * | 2012-07-25 | 2014-02-06 | Nidec-Read Corp | Inspecting tool and contact |
| TW201533449A (en) | 2014-02-24 | 2015-09-01 | Mpi Corp | Probing device with spring-barrel probe |
| JP6411169B2 (en) | 2014-10-22 | 2018-10-24 | 株式会社日本マイクロニクス | Electrical contact and electrical connection device |
| JP6484137B2 (en) | 2014-11-26 | 2019-03-13 | 株式会社日本マイクロニクス | Probe and contact inspection device |
| TWI570415B (en) * | 2015-10-02 | 2017-02-11 | A spring probe having an outer sleeve and a probe device having the spring probe | |
| JP6890921B2 (en) * | 2015-10-21 | 2021-06-18 | 株式会社日本マイクロニクス | Probe card and contact inspection device |
| JP2017142080A (en) | 2016-02-08 | 2017-08-17 | 日本電産リード株式会社 | Contact terminal, inspection tool, and inspection device |
| WO2017208690A1 (en) * | 2016-05-31 | 2017-12-07 | 日本電産リード株式会社 | Contact conduction jig and inspection device |
| CN110036300B (en) * | 2016-11-30 | 2020-03-06 | 日本电产理德股份有限公司 | Contact terminal, inspection jig, and inspection device |
| JP6961351B2 (en) * | 2017-02-07 | 2021-11-05 | 株式会社日本マイクロニクス | jig |
| JP6892277B2 (en) | 2017-02-10 | 2021-06-23 | 株式会社日本マイクロニクス | Probes and electrical connections |
| KR101915151B1 (en) * | 2017-03-31 | 2018-11-05 | 주식회사 오킨스전자 | Method for assembling probe pin using spot welding and system for electro-resistance welding therefor |
| WO2019221076A1 (en) * | 2018-05-14 | 2019-11-21 | Ｗｉｔ株式会社 | Inspection jig and probe exchange system |
| KR102110150B1 (en) * | 2019-01-08 | 2020-06-08 | (주)티에스이 | Protective member for conduction part of data signal transmission connector, manufacturing method for the same, data signal transmission connector having the protective member and manufacturing method for the data signal transmission connector |
| TW202032137A (en) * | 2019-02-22 | 2020-09-01 | 日商日本電產理德股份有限公司 | Test jig |
| JP7206140B2 (en) * | 2019-03-22 | 2023-01-17 | 株式会社ヨコオ | inspection equipment |
| KR102245540B1 (en) * | 2020-04-09 | 2021-04-28 | 주식회사 메가터치 | Probe for battery test and the probing module |
| KR102235724B1 (en) * | 2020-04-10 | 2021-04-02 | 주식회사 메가터치 | Metal material manufacturing method for electronic component, the metal material and pogo pin manufactured by the metal material |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2013007730A (en) | 2013-01-10 |
| JP5751222B2 (en) | 2015-07-22 |
| JPWO2011115082A1 (en) | 2013-06-27 |
| WO2011115082A1 (en) | 2011-09-22 |
| JP2013007750A (en) | 2013-01-10 |
| TW201217790A (en) | 2012-05-01 |
| TWI510787B (en) | 2015-12-01 |
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