201102662 六、發明說明： 【發明所屬之技術領域】 輯騎就奴在機錄之檢查縣部上的檢查 讀„"查的檢絲置進行電連接的檢_夾具。. 部，用夾具係對於被檢查物所具有的檢查對象 檢查對;“測出電力或電氣信號，並從 特性，或者進行猎此可檢測出檢查對象部的電氣 多查物可例示如：印刷配線基板、撓性基板、陶曼 :日;顯/器、或電漿顯示㈣的電極板、及半導 圓、^導體^心^或膜式載體等各種基板，或者半導體晶 二iif i 寸封裝（csp，chip如_卿）等 將該等上述被檢查物總稱為“被檢查物，，’ /成在被仏查物的檢查對象部稱為“對象部”。 【先前技術】 ㈣以n被檢查物之—實施形態即電路基板上形成有複數 用來供給電力或流過電氣信號，讀搭« 配線不巧導致電路基板_料良。 因此已知 半導抓已多次有人提出對如形成在電路基板或 ίίί^ί查物之配線的對象部是否良好進行判定的檢 綠3 置為了對例如為被檢查物之基板上所形成的配 制具備與預先設定在配線上之複數檢 針（接觸件）的檢查用夾具來實施檢查。 點’另-二;i夹具之接觸件的—端被壓接在配線上的i查 錄在與基板檢絲置電連搂的電極部。然後， 猎由私查用夾具，從基板檢查裝置供給用以測定配線之電氣 4 201102662 =性的電流或電壓’並往基板檢查裝置發送來自配線的電氣信 ;複r，檢查用夹具所具有二= 進订，觸，本身的細線化、接觸件間關距狹小化 貝 列如專利文獻〗所揭示之檢知夾具係彻制y妝 ίϊϊ件’該接觸件形成具有彈簧功能的狹縫。該專利文獻] :之孔部的保持構件中，以該孔部尤=二 件，:著之巧長的接觸 存在成本變極高的問題。則化必須形成細長的孔部， 【專利文獻1】日本特開平1Q —288626號公報。 【發明内容】 (發明所欲解決之課題） 及痛明提供檢查用夾具’該檢查用夾具能因應基板之细微化 及稷雜化，财成構件她減少的簡潔化構造。、… (解決課題之手段） 2先&定於該被檢查物之檢查體上的既定之檢查點， :接蜀件之立而引導向該檢查點的第一導引孔；第二 、 之姑ΐίΐ1 r記載之發明提供檢查用夾具，將成為被檢杳對象 ^=^^查該被檢查物上所形成的檢查體之電“= 電連接;其特徵在於:包含:接觸件， 另一端 :有用以 该接觸件之另丨拔疋间隔，亚且設有用以將 柳耕之另導向該電極部的第二導引孔；及電極體，形 係配置成與該第-板狀構件間具有蚊間隔…—板狀構件 201102662 成有複數個該電極部；其巾，該接觸件包含：外側 y開Π部；及内側筒體，收納於該外側筒體之 配^ 成從該外側筒體之兩端分別突出；該内側筒體呈立置 =端，接於該檢查點，並且第—筒部貫通插;;到該第—以孔 :之隹形ίϊ與該第;筒部呈同軸狀，在該内側筒 並且，楚-:都二，’第二筒#’另一端抵接於該電極部’ 並且5亥苐一同邛貝通插入到該第二導引孔中， 3為與该第^筒部呈同軸狀，並在該接觸件之長邊方向上進^ ΙΪ第將，—伸縮部與該第二伸縮部連通連結； 該匕筒構二伸縮部與 筒，徑大且比該外====成為設有比該内側 之檢斤记ί之發明提供檢查用夾具，係於請求項1記載 對稱^形狀r ”接觸件形成為具有相對於該接觸件之中心呈 •V澈二3所5己载之發明提供檢查用夾具，係於1或2 中任-項供檢查㈣* ’係於請求項1至3 以下。戟仏查用夹具中’該外側筒體之外獲形成為250/^ } 1 ^ 4 壁厚形成為大致5〜—5^fm具中，該外側筒體與該内側筒體各自的 之檢i 於請求項i記載 具上而未使用時，一用夾具之接觸件被女裝於該檢查用央 偏壓狀態。、。亥弟—伸縮部為自然長，該第二伸縮部處於 (發明之效果） 6 201102662 細微^及= f檢查用夾具脑應基板之 卫^烕構件個數減少的簡潔化構造。 【實施方式】 (實施發明之最佳形態） 用以實施本發明的最佳形態進行說明。 成圖圖1賴示依本發明之檢查Μ具之—實施職的概略構 依本發明之一實施形態的檢查用夹具 件2 ;保持體3，將該等接觸件2伴持 ^ 3 2數之接觸 職保持體3，並且有鱼針狀，電極體4 ’支 基板所蚊陳查^定不歸3根，可根查對象之 在赴接ΐ件f之一端壓接於基板之配線上所預先設定的既定檢 一圖接於與檢查裝置（未圖示）電連接的電極部。 鹿-二川二本發明之接觸件的一實施方式的概略構成圖，（a) 内，同體之剖面圖，（b)顯示内侧筒體之底面圖，⑷顯 不外側筒體之剖面圖，（d)顯示外侧筒體之底面圖。 ， •依本發明之接觸件2包含：外侧筒體2b_，在兩端設有開口 4，及内側筒體2a ’收納於外侧筒體2b之内側，並配置成從外 側筒體2b之兩端分別突出。 罝驗外 内侧筒體2a具有既定之長度，且由中空狀之圓柱形狀的筒 狀構件形成。形成内側筒體2a的筒狀構件之一端部接觸於檢查 點，另一端部接觸於後述電極部，藉此進行檢查點與電極部間 的電連接。 内J則筒體2a具有第一筒部2a卜第二筒部2a2、第三筒部 2a3、第二伸縮部2a4及第二伸縮部2a5。該内側筒體2a如圖2 (a)所示，依序連通連結而形成有第一筒部2ai、第一伸縮部 201102662 2a4 ΐίΐΓ/f、第二伸縮部2a5及第二筒部城。 -導並貫通插人到後述第 -導引孔311之長度長，^ m 9】成為至少比第 形成為沿第-導心j動“―心加被壓接於檢查點時， 通插電：，著外侧筒部2b貫 之圓柱形狀。該第^ t =ΐί筒部2a2形成中空狀 之具许具米:同。p 2a2之長度最好形成為比第二導引：?丨 貫‘二^ := 322ff壓f於電極部時’形成為沿著所 又，第:忒:/之外側筒體2b_ 形狀。 11 &舁第一筒部2a2較佳係具有大致相同的 第一伸縮部2a4形成盥第一筒^9a1。门以，， 在内側筒體2a之長邊方向、卜弟隹"=l2al王同軸狀，並形成為 在筒狀構件均°該第—伸縮部2a4具有 旋彈簧形狀部發缺口部的螺旋彈簣形狀部。該螺 第三筒部=為分別，第:筒部2al之另一端、及 第二伸縮部、:、丨並與第一筒部2al同軸且同徑。 為在内側筒體°2a之具1 成為與第二筒部2a2呈同軸狀，並形成 有在筒狀構件上來点長朴邊方向上進行伸縮。該第二伸縮部2a5具 螺旋彈簧形狀部‘揮伸缺口部的螺旋彈簧形狀部。該 第一伸縮部2?^ ：RX _L、1 第三筒部2a3之 /成為分別與第二筒部2a2之另一端、及 第三筒部2a3开連結，並與第二筒部2a2同軸且同徑。 部2a5之中空狀的為連通連結第一伸縮部2a4與第二伸縮 縮部2a4連处，s 狀。5亥第二简部2a3之一端部與第一伸 該第三ί部部與第二伸縮部2a5連結。 具有同軸且同徑，而形成為與第一伸縮部2a4及第二伸縮部2a5 " 且形成為也與第一筒部2al及第二筒部2a2 8 201102662 具有同軸且同徑。 该第二筒部2a3之長度並不特別限定，係 後述外側筒ϋ 2b連接之連接部的程度的長度圖。t 為同Γ/同第述地形成 t形=藉由内側筒體2a由—根筒狀構件形成；有 ㈣ΐ，本實施形態已揭示以第三筒部2a3為中心，而第-仲 f 2〇.25〇,m . ίίΓϋ對於已細微化及獅化之基板的配線 = 袖_，雜以簡細_檢絲置進行 該内側筒體2a之例子巾，IV # a σ 的方式形成各部位。其原因為：藉由如此开二對稱 ^^舰基板檢麵夾具的保持騎，無上下之分地利用 電性的材制不制^/ ^成。作麟獅，只要是具有導 該内側筒體2a 或麵合金。 應被檢查物之細微化及#t有導電性的材料形成，但因 化來形成。尤其Ϊ 須實施細線 繞線之螺旋彈箬的能；但是以往形成如使用有 -旧丨位的松查用夾具，將取決於繞線本身之直 201102662 徑的大小，難以形成具有比繞線直徑之4倍左右小的直徑的線 圈，而極難形成外徑在100 Mm以下.+的螺旋彈餐。即使能夠形成， 就製造成本而言，利用到2000〜4000根檢查用夾具也過於昂 貴，而有不切實際的問題。 然而，本案發明藉由利用如下所述的製造方法，能夠更廉 價且輕易地製造細微的接觸件。 關於内側筒體2a可揭示下述兩種製造方法。 〔製法例1〕 一 （1)首先，準備形成内側筒體2a之中空部的芯線（未圖 示）。又，該芯線使用限定内側筒體2a之内徑的所希望粗細（例 如直徑30μπ〇的SUS線.(不銹鋼線）。 (2)接著，於芯線（sus線）塗佈光阻被膜， 該光阻之所希望部分進行曝光、顯影、加熱處理以 射^ ^的遮罩。此時，例如可使芯線沿中心軸旋轉，以雷 丁/、先，而形成螺旋狀的遮罩。為形成本發明之内側«體 電性，Λ1?形二科，㈣树具有導 筒體，而形ί内二先在f依所希望之長度切斷 體。. ^也可在完全抽㈣線前切斷筒 2&也可以下述方法製造。 (未圖％首先，準備如上述形成内侧筒體2a之中空部的芯線 録層軸顧輯输w㈣面職 .進㈣、顯影、加熱處理简螺旋 10 201102662 例如可使芯線沿中心軸旋轉，以雷 — 的遮罩。為形成本發明之内側筒坪 '進行曝光，雨形成螺旋狀 部2a4及第二伸縮部2a5)形成^目二，2個伸縮部（第一伸縮 之長度量的距離）。 馮具有既定距離（第三筒體2a3 (3) 再來’將電鍍鎳蝕刻去 之電鍍鎳被去除。 〃此¥ ’未形成光罩的部位 (4) 然後’去除光罩，抽出戈 、 ^ 筒體，而形成内側筒體2a。冬麸::二並依所希望之長度切斷 體。 田，、、、也可在完全抽出芯線前切斷筒 以往之使用繞線的螺旋彈箬 難以形成具有比該絲之4倍^ j取決於繞線材料之直徑， 成100//in以下的螺旋彈菁。^ 圈’而極難形 .體2a，由於係於對芯線_ 明的内側筒 怒線而製造，因此比起以往之/= 希f之形狀後，藉由抽出 況，可使彈簣材料之壁厚減薄，同時方式的情 造細微的外徑及内徑。 τ」同精度且自如地一併製 狀。幵為;之中空精的圓柱形 2細、壁^〜2〇〜25◦仰、内徑. 複雜化的基板。 猎邮成此尺寸，可因應.已細微化且 内侧筒體2a以與外側筒體2b · 置於其中。此時，内側筒體2a之第= 2b2同轴的方式配 係配置成分別從外側筒體2b之開伸=部2a2 外側筒體2b之長度如上所诚圖3)。 第一筒部2al及第-饩邱9 9 αΓυ V成為具有内侧筒體2a之 弟—同部2a2能分別從i開口邻柚山认曰ώ .又’该外侧筒體2b較佳係具有内侧筒” ^伸出的長度。 及第二伸縮部2a5始終被收納在外側縮部2a4 度，原因為：藉由將内側筒體2a 2 2 j的長 功能，可提_部的卩在伸^動時之伸縮方向的導引 201102662 筒體2a ©㈣= 細以與·内侧 在外側筒體2b之中空部2b2=t。，係於内側筒體％收納 2b之兩開π端伸出時，如圖 側，J 2a配置成從外侧筒體 縫）外側筒體2b之大致Ί從外側向内側推邀（斂 2b.固定，藉此在外側筒體筒體％與外側筒體 2b3係於收納内側筒體2a後才^成接指3。因此，該連接部 定，豆連接：^乂斤不’外側筒體2b為了與内側筒體2a固 ϋ ?分之内徑形成得比其他部分+。 體2a當然亦相綱b與内側筒 方法。 ^城·祕及_解的其他固定 如圖3所示，本發明之接觸件2中， Λ*/τ 同 側筒體2b之中空部2b2，内_體2a =在外 部2a2係配置成從外側筒體2b之兩開=^加及弟 該接觸件2較佳斜觀上形成為點對 以上係對接觸件2之構成的說明。 保持2查驗具1具有用以將複數_件2保持成多針狀的 構件體3具有第—板狀構件31及第二板狀 構件32。遠4板狀構件以絕緣性的材料形 汉狀 的第設有収將接觸件2之:端引導向撿查點 如圖4所示，第-導引孔311係外 311a與第一導引下孔_連通連結而形成不^㈣一導引上孔 a . 2a 的孔^導引下孔sm形成為具有比外側筒體％之外經務大 因此，接觸件2不會從第一板狀部31之第一導引孔扪中 12 201102662 脫出。 該第-導引孔311如上所述，自2個外徑不同的孔 ， 徑$異被接觸件2之内側筒體2a與外侧筒體％的段 侧筒體2a與外側筒體2b所產生的段差因任1 -地錄查點ίϊ層萬次、數十萬次重複 間隔==2將=之第另:=^^ 導引孔32卜 力向電極部的第二 該第二板狀構件32與第一板狀構件31間的 2 = 且内側筒體严與外靖體\ Ϊ 弟二導引孔321側插入接觸件2。秘保持肢3知，係從該 ㈣^所示之電極體4形成有複數個電極部4!。電極〜 材料形成二二“以 導通狀態，並分別=的端部接觸而成為 成，且導線之端;（電極部=用鋼導 成大致同—面（參照圖5)。 』电極肢4之表面配置 上。此日^5所示’被安裝於電極體4 保持體3固定於電極體4時 =了裝卸方式進行固定。 持體3的第一板狀構件31被件2之外側筒體2b從保 之第二伸縮部2a5被壓縮:因。因产’内侧筒 封％極部41進行推壓。亦即，壓細力，弟二筒部2a2 =4:1處於穩定的接觸狀態。又 ，内，筒體2a與電極 物理力之作用的狀態， 匕:為弟一伸縮部2a4未受到 .一長的長度。亦即，本檢查用央 201102662 5 31 2b ^ 、έ 邛41側。此日守，由於外側筒體2b盥内侧筒體2a蕻荽 連接，二固定’因此第二伸縮部2a5被壓内二7 壓部2a4因應該接觸而被壓縮，.並利用該 &細力相對於檢查點穩定接觸。 。发 不同也Ξίί 縮部2a4與第二伸縮部2沾的情形 愤賴件2的敎性，叹長壽命。 2部5將電極部41與檢查裝 寸^特舰定，而只要能與檢錢置f連接接即之尺 出，且形成圖魏置歧檢查用纽1之下方伸 為了^"查用夾具1之下方側與檢查裝置進行連接。 【圖式簡單說明】 圖。圖1麵潍本_之檢查職具之—實卿態的概略構成 圖2(a)〜2(d)係依本發明之接觸件杏 J，2⑷顯示内側筒體的剖面圖，Y二】!=，既略構成 = :2(C)顯示外側筒體的剖面圖，2⑷=外 安裝^外側筒體的概略構成圖，且顯示内側筒體 圖^刪峨態的構成 件的安裝位置。 冓件係以剖面顯示，以說明接觸 已安裝於電極部二ί之的ίΐ圖’且顯示接觸件 極體，並樣表湖叙與電 【主要元件符號說明】 201102662 1〜檢查用夹具 2〜接觸件 2a〜内侧筒體 2al〜第一筒部 2a2〜第二筒部 2a3〜第三筒部 2a4〜第一伸縮部 2a5〜第二伸縮部 ' 2b〜外側筒體 2b2〜中空部 2b3〜連接部 3〜保持體 31〜第一板狀構件 311〜第一導引孔 311a〜第一導引上孔 311b〜第一導引下孔 32〜第二板狀構件 321〜第二導引孔 4〜電極體 41〜電極部 5〜導線部 dl〜第二板狀構件與第一板狀構件之間的既定間隔 15201102662 VI. Description of the invention: [Technical field to which the invention belongs] The ride is on the check of the machine in the county. Check the „"Check the wire to check the electrical connection. 夹具 Fixture. For the inspection object inspection pair which is included in the inspection object; "Electrical multi-inspection which can detect the electric power or electric signal and can detect the inspection target portion from the characteristics or the hunting can be exemplified as: a printed wiring substrate, a flexible substrate , Tauman: day; display / device, or plasma display (four) electrode plate, and semi-conducting round, ^ conductor ^ heart ^ or film carrier, etc., or semiconductor crystal two iif i package (csp, chip _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In the embodiment, a plurality of circuits are formed on the circuit board for supplying electric power or flowing an electric signal, and the reading of the wiring is unfortunately caused by the circuit board. Therefore, it has been known that the semi-guided grip has been proposed many times on the circuit board or Ίίίί^ 查Check the wiring of the object The greening 3 for determining whether the part is good or not is placed in an inspection jig for preparing a plurality of needles (contacts) that are set in advance on the wiring, for example, on the substrate to be inspected. - 2; the end of the contact of the i-clamp is crimped onto the wiring, and the electrode portion connected to the substrate is electrically connected to the substrate. Then, the hunting is supplied from the substrate inspection device and supplied from the substrate inspection device. Measure the electrical wiring 4 201102662 = current or voltage 'sexuality' and send the electrical signal from the wiring to the substrate inspection device; repeat r, the inspection fixture has two = binding, touch, its own thin line, contact between the contacts The detection fixture disclosed in the patent document is a slit having a spring function. The contact member forms a slit having a spring function. In the holding member of the hole portion, the hole portion is formed. In particular, there is a problem that the cost of the contact is extremely high. In the case of the problem, the cost is extremely high. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. Class to be solved In the case of the inspection, the inspection fixture can provide a simple structure that reduces the complexity of the substrate, and the reduction of the financial components. (The means to solve the problem) 2 First & a predetermined inspection point on the inspection object of the inspection object: the first guide hole leading to the inspection point is connected to the inspection object; and the invention described in the second, the ΐ ΐ ΐ r r 提供 提供 提供 提供 提供 提供 提供The object to be inspected ^=^^ is to check the electric "= electrical connection of the test body formed on the object to be inspected; it is characterized in that it comprises: a contact piece, and the other end: useful for the other part of the contact piece, And a second guiding hole for guiding the willow to the electrode portion; and an electrode body configured to have a mosquito spacing between the first plate-shaped member... the plate member 201102662 has a plurality of An electrode portion; the contact member comprising: an outer y opening portion; and an inner cylindrical body, wherein the outer cylindrical body is respectively protruded from both ends of the outer cylindrical body; the inner cylindrical body is vertical = end, connected to the checkpoint, and the first-tube portion is inserted;; to the first Hole: the shape of the ϊ ϊ ϊ 该 ; ; ; ; ; ; ; ; ; ; ; 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒 筒Inserted into the second guiding hole, 3 is coaxial with the second tubular portion, and is advanced in the longitudinal direction of the contact member, and the telescopic portion is connected to the second telescopic portion The cylinder structure has two telescopic sections and a cylinder, and the diameter is larger than that of the outer ====, and the inspection fixture is provided with the invention of the inner side of the inspection, and the symmetry ^ shape r is described in the claim 1" The contact member is formed to have an inspection jig that is provided with respect to the center of the contact member, and is attached to the item 1 or 2 for inspection (4)* 'in claims 1 to 3 the following. In the jig for inspection, the outer cylinder is formed to be 250/^} 1 ^ 4 and the wall thickness is formed to be approximately 5 to 5 mm, and the outer cylinder and the inner cylinder are respectively inspected. i When the request item i is written and not used, the contact piece of the jig is placed in the state of the inspection bias. ,. Haidi - the expansion and contraction part is naturally long, and the second expansion and contraction part is (the effect of the invention) 6 201102662 The simplification structure of the number of the 烕 烕 烕 脑 脑 = = 。 。 。 。 。 。 。 。 。 脑 。 。 。 。 [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION A best mode for carrying out the invention will be described. Fig. 1 shows a test fixture according to an embodiment of the present invention, and a holding member 3, which is associated with the contact member 2 The contact body 3 is held, and there is a fish needle shape, and the electrode body 4' branch substrate is not determined to be 3, and the object can be crimped onto the wiring of the substrate at one end of the access device f. The predetermined test pattern set in advance is connected to an electrode portion electrically connected to an inspection device (not shown). A schematic configuration diagram of an embodiment of a contact of the present invention, a cross-sectional view of the same body in (a), (b) a bottom view of the inner cylinder, and (4) a cross-sectional view of the outer cylinder. (d) shows the bottom view of the outer cylinder. The contact member 2 according to the present invention comprises: an outer cylindrical body 2b_ having an opening 4 at both ends, and an inner cylindrical body 2a' housed inside the outer cylindrical body 2b and disposed from both ends of the outer cylindrical body 2b Stand out separately. The outer cylindrical body 2a has a predetermined length and is formed of a hollow cylindrical member. One end of the cylindrical member forming the inner cylindrical body 2a is in contact with the inspection point, and the other end portion is in contact with an electrode portion to be described later, whereby electrical connection between the inspection point and the electrode portion is performed. The inner J-shaped tubular body 2a has a first tubular portion 2a, a second tubular portion 2a2, a third tubular portion 2a3, a second elasticized portion 2a4, and a second elasticized portion 2a5. As shown in Fig. 2(a), the inner cylindrical body 2a is formed by sequentially connecting and connecting the first tubular portion 2ai, the first elasticized portion 201102662 2a4 ΐίΐΓ/f, the second elasticized portion 2a5, and the second tubular portion. - the length of the first guide hole 311 to be described later is inserted, and the length of the first guide hole 311 is longer than the first direction, and is formed at least along the first-conducting center j. : The outer tubular portion 2b is formed in a cylindrical shape. The first tubular portion 2a2 is formed into a hollow shape: the same length. The length of the p 2a2 is preferably formed to be smaller than the second guide: ^ := 322ff is formed in the shape of the electrode portion, and is formed along the shape of the outer tube 2b_. The first tube portion 2a2 preferably has substantially the same first expansion portion. 2a4 is formed in the first cylinder ^9a1. The door is, in the longitudinal direction of the inner cylinder 2a, the Budi 隹"=l2al king is coaxial, and is formed in the cylindrical member. The first expansion-contraction portion 2a4 has The spiral spring-shaped portion has a spiral-shaped shape portion of the notch portion. The screw-shaped third tubular portion=is the other end of the first tubular portion 2al and the second elasticized portion, and is coaxial with the first tubular portion 2al In the case of the inner cylindrical body 2a, the first tubular portion 2a2 is coaxial with the second tubular portion 2a2, and is formed to extend and contract in the direction of the long side of the tubular member. The second expansion-contraction portion 2a5 has a coil spring-shaped portion of the spiral spring-shaped portion of the spiral-shaped portion. The first expansion-contraction portion 2?: RX_L, 1 and the third cylindrical portion 2a3 are separately formed from the second cylindrical portion 2a2. One end and the third tubular portion 2a3 are connected to each other and are coaxial with the second tubular portion 2a2. The hollow portion of the portion 2a5 is connected to the first elasticized portion 2a4 and the second telescopic constricted portion 2a4 in an s-like shape. One end portion of the second second portion 2a3 of the 5th sea is connected to the first extension portion and the second expansion portion 2a5. The coaxial portion and the same diameter are formed to be formed with the first expansion and contraction portion 2a4 and the second expansion and contraction portion 2a5 The length of the second tubular portion 2a3 is not limited to the first tubular portion 2a1 and the second tubular portion 2a2 8 201102662. The length of the second tubular portion 2a3 is not particularly limited, and is a degree of connection of the outer tubular bore 2b to be described later. The length diagram t is the same as the same as the above-described t-shape = formed by the inner cylindrical body 2a by the --cylindrical member; there is (four) ΐ, this embodiment has been disclosed with the third tubular portion 2a3 as the center, and -仲f 2〇.25〇,m . ίίΓϋWiring and lioning of the substrate = sleeve _, mixed with a simple _ silk In the example of the inner tube 2a, the parts are formed by IV # a σ. The reason is that by using the two-symmetric ^^ shipboard surface-finding jig to maintain the ride, no electricity is used up and down. The material is not made of ^/^. It is a lion, as long as it has the inner cylinder 2a or the surface alloy. It should be formed by the fineness of the object to be inspected and #t conductive material, but it is formed by the chemical. Ϊ The ability of the spiral bobbin to be wound by a thin wire shall be implemented; however, in the past, the use of a jig for the use of the old clamp will depend on the diameter of the straight line of the winding itself, and it is difficult to form a diameter larger than the diameter of the winding. A coil of small diameter of about 4 times, and it is extremely difficult to form a spiral bomb with an outer diameter of 100 Mm or less. Even if it can be formed, it is too expensive to use 2000 to 4000 inspection jigs in terms of manufacturing cost, and there is an unrealistic problem. However, the present invention makes it possible to manufacture a minute contact member more inexpensively and easily by using the manufacturing method as described below. The following two manufacturing methods can be disclosed regarding the inner cylindrical body 2a. [Manufacturing Example 1] (1) First, a core wire (not shown) for forming a hollow portion of the inner cylindrical body 2a is prepared. Further, the core wire is formed to have a desired thickness (for example, a SUS wire having a diameter of 30 μπ〇. (stainless steel wire) defining the inner diameter of the inner cylindrical body 2a. (2) Next, a photoresist film is applied to the core wire (sus wire), and the light is applied. The desired portion is subjected to exposure, development, and heat treatment to emit a mask. At this time, for example, the core wire may be rotated along the central axis to form a spiral mask by redding/first. The inside of the invention is «Electrical, Λ1? Form II, (4) The tree has a guide cylinder, and the shape ί 内二 first cuts the body at the desired length. ^ Can also be cut before the complete pumping (four) line The cylinder 2& can also be manufactured by the following method. (Not shown in Fig. 1 First, the core line forming the hollow portion of the inner cylinder 2a as described above is prepared.) (4) Face-to-face (4), development, heat treatment, simple spiral 10 201102662 For example, the core wire can be rotated along the central axis, and the mask can be exposed to the inner side of the present invention. The rain forming spiral portion 2a4 and the second elastic portion 2a5 are formed into two parts, two telescopic portions. (the distance of the length of the first telescopic length). Feng has a predetermined distance (third cylinder Body 2a3 (3) Then, the electroplated nickel which is etched by electroplating nickel is removed. 〃This ¥ 'the part where the reticle is not formed (4) Then 'removing the reticle, extracting the ge, ^ cylinder, and forming the inner cylinder 2a. Winter bran:: 2 and cut the body according to the length of the desired. Field,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, ^ j depends on the diameter of the winding material, and is less than 100//in. It is extremely difficult to form. The body 2a is manufactured by the inner tube anger line of the core wire, so it is compared with In the past, the shape of the /f is the same, and the wall thickness of the magazine material can be reduced by the extraction condition, and the outer diameter and the inner diameter of the elastic material can be made at the same time. τ" is the same as the precision and freely The hollow cylindrical shape is fine, the wall is 2~2〇~25◦, the inner diameter. The complicated substrate. The hunting is made into this size, which can be adapted. The inner cylinder 2a is The outer cylinder 2b is placed therein. At this time, the second bracket 2a of the inner cylinder 2a is coaxially arranged to be respectively extended from the outer cylinder 2b = 2a2 The length of the outer cylinder 2b is as shown in Fig. 3). The first cylinder 2al and the first 99 9 Γυ 成为 V become the brothers with the inner cylinder 2a - the same part 2a2 can be identified from the i-open neighboring Yuzuyama Further, the outer cylindrical body 2b preferably has an inner tube "longitudinal length" and the second elasticized portion 2a5 is always accommodated in the outer constricted portion 2a4 because the inner cylindrical body 2a 2 2 is The long function of j can be used to guide the telescopic direction of the _ 201 201 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 102 When the two ends of the cylindrical body 2b are extended, the π end is extended, as shown in the figure, J 2a is arranged to be sewed from the outer cylindrical body 2b, and the outer side of the outer cylindrical body 2b is pushed from the outside to the inside. The outer cylindrical body % and the outer cylindrical body 2b3 are connected to the inner cylindrical body 2a, and then the fingers 3 are formed. Therefore, in the connection portion, the bean joint is not formed. The outer cylinder 2b is formed to be larger than the other portions in order to form an inner diameter with the inner cylinder 2a. The body 2a is of course also the same as the b and the inner tube method. As shown in Fig. 3, in the contact 2 of the present invention, the hollow portion 2b2 of the same side cylinder 2b, the inner body 2a = the outer portion 2a2 is arranged to be The two outer cylinders 2b are opened and the contact member 2 is preferably formed obliquely to form a point pair to the above description of the configuration of the contact member 2. The holding member 1 has a member body 3 for holding the plurality of pieces 2 in a multi-needle shape, and has a first plate-like member 31 and a second plate-like member 32. The far 4 plate-shaped member is provided with an insulating material-shaped first shape to receive the contact member 2: the end guide is directed to the inspection point as shown in FIG. 4, and the first guide hole 311 is externally 311a and the first guide The lower hole_connected to form a hole which does not (4) a guide upper hole a. 2a, the lower hole sm is formed to have a larger transaction than the outer cylinder %, and therefore the contact 2 does not pass from the first plate The first guide hole of the portion 31 is detached from the 12 201102662. As described above, the first guide hole 311 is produced from two holes having different outer diameters, and the inner cylindrical body 2a of the contact member 2 and the outer cylindrical body 2a and the outer cylindrical body 2b. The step difference is 1 - the ground record point ϊ 万 万 、 、 、 、 数 数 = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = 2 = between the member 32 and the first plate member 31, and the inner tube is tightly inserted into the contact member 2 on the side of the outer body and the second guide hole 321 . The secret retaining limb 3 is formed by forming a plurality of electrode portions 4! from the electrode body 4 shown in (4). The electrode ~ material forms two or two "in the on state, and the end portions of the respective = contact are formed, and the ends of the wires are formed; (electrode portion = steel is substantially the same as the surface (see Fig. 5)." On the surface of the electrode assembly 4, when the holder 3 is fixed to the electrode body 4, it is fixed by the attaching and detaching method. The first plate member 31 of the holder 3 is the outer tube of the member 2 The body 2b is compressed from the second expansion-contraction portion 2a5: because the inner tube seal % pole portion 41 is pressed, that is, the pressing force, the second tube portion 2a2 = 4:1 is in a stable contact state. Further, in the state in which the tubular body 2a and the physical force of the electrode act, 匕: the length of the telescopic portion 2a4 is not received by a long length, that is, the side of the inspection is 201102662 5 31 2b ^, έ 邛 41 In this case, the outer cylinder 2b is connected to the inner cylinder 2a, and the second cylinder is fixed. Therefore, the second elastic portion 2a5 is compressed by the pressing portion 2a4 in contact with the pressing portion 2a4, and the fine portion is used. The force is in stable contact with the checkpoint. The hair is different. ίί The condition of the constricted portion 2a4 and the second telescopic portion 2 is disappointing, Sigh and long life. 2 parts of the 5 part of the electrode part 41 and the inspection of the size of the special ship, and as long as it can be connected with the money check f connection, and form the map Wei disambiguity check with the 1 below the extension ^ "The lower side of the inspection jig 1 is connected to the inspection device. [Simple description of the drawing] Fig. 1 The inspection tool of the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ According to the contact piece of the present invention, the apricot J, 2 (4) shows a cross-sectional view of the inner cylinder, Y 2]! =, the composition is slightly = 2 (C) shows the cross section of the outer cylinder, 2 (4) = the outer installation ^ the outer cylinder The outline of the body is shown in the figure, and the mounting position of the component of the inner cylinder is shown in the figure. The element is shown in cross section to illustrate the contact with the electrode part and the display of the contact pole. Body, and sample table, lake and electricity [main component symbol description] 201102662 1 to inspection jig 2 to contact 2a to inner cylinder 2al to first tubular portion 2a2 to second tubular portion 2a3 to third tubular portion 2a4 First expansion-contraction portion 2a5 to second expansion-contraction portion 2b to outer cylindrical body 2b2 to hollow portion 2b3 to connecting portion 3 to holding body 31 to first plate shape Member 311 to first guide hole 311a to first guide upper hole 311b to first guide lower hole 32 to second plate member 321 to second guide hole 4 to electrode body 41 to electrode portion 5 to lead portion Dl~ the predetermined interval between the second plate member and the first plate member 15