CN101907642B - Inspection fixture and inspection probe - Google Patents
Inspection fixture and inspection probe Download PDFInfo
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- CN101907642B CN101907642B CN2010101933510A CN201010193351A CN101907642B CN 101907642 B CN101907642 B CN 101907642B CN 2010101933510 A CN2010101933510 A CN 2010101933510A CN 201010193351 A CN201010193351 A CN 201010193351A CN 101907642 B CN101907642 B CN 101907642B
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- 238000007689 inspection Methods 0.000 title claims abstract description 129
- 239000000523 sample Substances 0.000 title abstract description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 29
- 229910052759 nickel Inorganic materials 0.000 claims description 15
- 238000012360 testing method Methods 0.000 claims description 13
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 abstract description 14
- 238000003466 welding Methods 0.000 abstract description 7
- 230000010485 coping Effects 0.000 abstract 1
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- BGOFCVIGEYGEOF-UJPOAAIJSA-N helicin Chemical compound O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@H]1OC1=CC=CC=C1C=O BGOFCVIGEYGEOF-UJPOAAIJSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 11
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- 238000000354 decomposition reaction Methods 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 238000007747 plating Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004744 fabric Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
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- 229910052802 copper Inorganic materials 0.000 description 2
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- 238000003780 insertion Methods 0.000 description 2
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- 229920006362 Teflon® Polymers 0.000 description 1
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- 239000003822 epoxy resin Substances 0.000 description 1
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- 239000011810 insulating material Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention provides an inspection fixture and inspection probe. The inspection fixture has probe for four terminal measuring, capable of coping substrate small size and complication and having simplification structure with reduced component number. The inspection fixture for electric connection of the object to be inspected and the inspection device, has: an electrode part electrically connected to the inspection device; a conductive barrel shaped first barrel, one end of whose is in pressure welding to the inspection part and the other end is in pressure welding to the electrode part; and a conductive barrel shaped second barrel, roughly coaxially configured in the first barrel, wherein one end of the second barrel is in pressure welding to the inspection part and the other end is in pressure welding to the electrode part, two expansion parts formed on the spiral incision part of the barrel wall part in the long axis direction are provided on the first barrel and the second barrel partitioned with intermediate parts, and the first barrel and the second barrel are fixed on their own intermediate parts.
Description
Technical field
The present invention relates to be set in advance in checkpoint and the inspection anchor clamps that the testing fixture of implementing this inspection is electrically connected in the inspection object section of checked property, relate in particular to the inspection that easily to carry out 4 terminals measurement with the inspection anchor clamps of contact with this contact of use.
Background technology
Inspection anchor clamps of the present invention, inspection object section for checked property has checks position supply capability or electric signal from testing fixture to regulation, and from checking object section detection electric signal, can detect thus the electrical specification that checks object section, perhaps carry out action test.
Checked property of the present invention can list the semiconductor device of various substrates, semiconductor wafer or semi-conductor chip, the CSP (Chip size package) etc. such as the base plate for packaging of the battery lead plate used such as printed circuit board, flexible base, board, ceramic multilayer circuit board, liquid crystal display or plasma display and semiconductor-sealing-purpose or membrane type carrier.
In this manual, the checked property that these are above-mentioned is referred to as " checked property ", and the inspection object section that is formed on checked property is called " inspection section ".In addition, set to be used for the checkpoint of the electrical specification that actual inspection should inspection section in inspection section, to be crimped on this checkpoint by making contact, detect the electrical specification of inspection section.
In the past, be formed with a plurality of wirings at the circuit substrate as an embodiment of checked property.This wiring is formed for supply capability or flows through electric signal, so that electric, the electronic unit that carry on circuit substrate have the function of expectation.Therefore, the bad meeting of connecting up causes the action of circuit substrate bad.
In order to address this problem, the whether invention of good testing fixture of object section that a plurality of judgements are formed on the wiring of the checked properties such as circuit substrate, semiconductor device was proposed once.
Whether this testing fixture in order well to judge formed wiring on the substrate as checked property for example, use have be set in advance in wiring on the inspection of a plurality of contacts (probe) of being connected respectively of a plurality of checkpoints implement to check with anchor clamps.
This inspection is crimped on checkpoint in the wiring (inspection section) with an end of the contact of anchor clamps, and its other end is crimped on the electrode part with the base board checking device electrical connection.So, by these inspection anchor clamps, supply with electric current, the voltage that is used for measuring the electrical specification that connects up from base board checking device, and send the certainly electric signal of wiring to base board checking device.
In recent years, because the progress of technology, semiconductor device diminishes, substrate diminishes, and the wiring on the substrate also forms more tinyly thereupon and be complicated.Along with cloth tinyization of alignment and the complicated development of this substrate, check that the contact that has with anchor clamps also is required the graph thinning of contact own, narrow and smallization of contact pitch, spininess, simplification.
When especially measuring in the object section to tinyization and complicated checked property, because the impact of the contact resistance value that object section produces during with contact is larger, so implement four terminals measurement methods.In this four terminals measurement method, need relative checkpoint configuration electric power supply with and the electric signal detection with these two electric independently contacts.Therefore, compare normal conditions and require the more contact of graph thinning.
Here, for example use in the contact of anchor clamps in patent documentation 1 disclosed inspection, possess the first electrode part of cartridge unit and be configured in the second electrode part of its inside with this first electrode part built-in electrical insulation, the first electrode part and the second electrode part are contacted with the checkpoint simultaneously.
Yet, use in the anchor clamps in patent documentation 1 disclosed inspection, owing to being formed by the volute spring with coiling, therefore be difficult to form the coil with diameter less than 4 times of left and right sides of winding diameter, the extremely difficult coiling volute spring of external diameter below 100 μ m that form, as check with anchor clamps extremely difficulty assemble.Namely allow to form, use 2000～4000 inspections in manufacturing cost also too expensive with anchor clamps, have lunar politics.
[patent documentation 1] TOHKEMY 2005-249447 communique
Summary of the invention
The invention provides and a kind ofly have tinyization that to tackle substrate and complicated, and possess the inspection anchor clamps of the contact that four terminals measurement of the simplification structure that components number lowers use.
Technical scheme 1 described invention provides a kind of inspection anchor clamps, it will have the checked property that becomes the inspection of inspected object section, be electrically connected with the testing fixture of the electrical specification of this inspection section of inspection, it is characterized in that, possess: the connecting electrode body, it has the electrode part that a plurality of and above-mentioned testing fixture is electrically connected; The first cylindrical shell of the barrel shape of electric conductivity, a side pressure of this first cylindrical shell are connected to above-mentioned inspection section, and the other end is crimped on above-mentioned electrode part; The second cylindrical shell of the barrel shape of electric conductivity, this second cylindrical shell be not with above-mentioned the first cylindrical shell electrical contact and roughly be configured in coaxially in this first cylindrical shell, and the one side pressure is connected to above-mentioned inspection section, and the other end is crimped on above-mentioned electrode part; The first plate-shaped member, it has first bullport of above-mentioned the first cylindrical shell and above-mentioned the second cylindrical shell end guiding separately to above-mentioned checkpoint; With the second plate-shaped member, it has second bullport of above-mentioned the first cylindrical shell and above-mentioned the second cylindrical shell other end guiding separately to above-mentioned electrode part, and this second plate-shaped member is configured to and above-mentioned the first plate-shaped member between have predetermined distance, be provided with 2 pars contractiliss across pars intermedia on above-mentioned the first cylindrical shell and above-mentioned the second cylindrical shell, this pars contractilis is formed by the spiral fashion notch of barrel section, and stretch at long axis direction, above-mentioned the first cylindrical shell and above-mentioned the second cylindrical shell are fixed at pars intermedia separately.
Technical scheme 2 described inventions provide a kind of inspection anchor clamps on the basis of technical scheme 1, it is characterized in that, above-mentioned the first cylindrical shell and the second cylindrical shell are formed by nickel or nickel alloy.
Technical scheme 5 described inventions provide a kind of inspection anchor clamps on the basis of technical scheme 1～3 any one, it is characterized in that, be formed with the 3rd cylindrical shell of barrel shape, the 3rd cylindrical shell has the internal diameter larger than the external diameter of above-mentioned the first cylindrical shell, above-mentioned the 3rd cylindrical shell roughly is housed in this first cylindrical shell in above-mentioned the 3rd cylindrical shell coaxially, above-mentioned the first bullport has the upper hole of the first guiding and the lower hole of the first guiding, the upper hole of above-mentioned the first guiding has the aperture larger than the external diameter of above-mentioned the 3rd cylindrical shell, the lower hole of above-mentioned the first guiding is communicated with link with the upper hole of above-mentioned the first guiding, has the aperture less and larger than the external diameter of above-mentioned the first cylindrical shell than the external diameter of above-mentioned the 3rd cylindrical shell.
Technical scheme 6 described inventions provide a kind of inspection anchor clamps on the basis of technical scheme 1～5 any one, it is characterized in that, 2 pars contractiliss of above-mentioned the first cylindrical shell and 2 pars contractiliss of above-mentioned the second cylindrical shell are not configured in and are adjacent position when seeing in the plane.
In addition, technical scheme 7 described inventions provide a kind of inspection contact, its inspection that is used to have the checked property that becomes the inspection of inspected object section, to be electrically connected with the electrode part of the testing fixture of the electrical specification of this inspection section of inspection is with in the anchor clamps, it is characterized in that, possess: the first cylindrical shell of the barrel shape of electric conductivity, one side pressure of this first cylindrical shell is connected to above-mentioned inspection section, and the other end is crimped on above-mentioned electrode part; The second cylindrical shell with the barrel shape of electric conductivity, this second cylindrical shell is not with above-mentioned the first cylindrical shell electrical contact and roughly be configured in coaxially in this first cylindrical shell, the one side pressure is connected to above-mentioned inspection section, and the other end is crimped on above-mentioned electrode part, on above-mentioned the first cylindrical shell and above-mentioned the second cylindrical shell, be provided with 2 pars contractiliss across pars intermedia respectively, this pars contractilis is formed by the spiral fashion notch of barrel section, and stretch at long axis direction, above-mentioned the first cylindrical shell and above-mentioned the second cylindrical shell are fixed at pars intermedia separately.
Technical scheme 8 described inventions provide a kind of inspection contact on the basis of technical scheme 7, it is characterized in that, above-mentioned the first cylindrical shell and the second cylindrical shell are formed by nickel or nickel alloy.
Technical scheme 9 described inventions provide a kind of inspection contact on the basis of technical scheme 7 or 8, it is characterized in that, the central authorities that the shape of above-mentioned the first cylindrical shell forms with respect to this first cylindrical shell are roughly symmetrical shape, and the central authorities that the shape of above-mentioned the second cylindrical shell forms with respect to this second cylindrical shell are roughly symmetrical shape.
Technical scheme 10 described inventions provide a kind of inspection contact on the basis of technical scheme 7, it is characterized in that, be formed with the 3rd cylindrical shell of barrel shape, the 3rd cylindrical shell has the internal diameter larger than the external diameter of above-mentioned the first cylindrical shell, above-mentioned the 3rd cylindrical shell roughly is housed in this first cylindrical shell in above-mentioned the 3rd cylindrical shell coaxially, and forms than the short length of above-mentioned the first cylindrical shell.
Technical scheme 11 described inventions provide a kind of inspection contact on the basis of technical scheme 7,2 pars contractiliss of above-mentioned the first cylindrical shell and 2 pars contractiliss of above-mentioned the second cylindrical shell are not configured in and are adjacent position when seeing in the plane.
According to technical scheme 1 or 7 described inventions, check contact or inspection contact with anchor clamps, owing to utilizing the second cylindrical shell of the first cylindrical shell of electric conductivity and the electric conductivity that is contained in this first inner barrel with the inside of 2 terminal accommodating at a side cylindrical shell, therefore compare with the probe that four terminals measurement are in the past used, can tackle thin space.Therefore in addition, 2 contacts are formed by one-piece type cartridge unit, can reduce number of components and make to consist of and oversimplify.And then owing to being formed with 2 pars contractiliss across pars intermedia separately on 2 contacts, therefore a pars contractilis slides according to the extruding force from the checkpoint, and another pars contractilis slides according to the extruding force from electrode part, thereby each pars contractilis can play a role independently.
According to technical scheme 2 or 8 described inventions, owing to being formed by nickel or nickel alloy, therefore have electric conductivity, easy plating, also can guarantee elasticity.
According to technical scheme 3 or 9 described inventions, because the central authorities that contact has with respect to this contact are symmetrical shape, therefore easily be installed on the holder, and by the 3rd plate-shaped member of the pars intermedia that keeps contact is set, can easily keep contact by holder.
According to technical scheme 5 or 10 described inventions because the 3rd cylindrical shell is formed on the outside of the first cylindrical shell, therefore the 3rd cylindrical shell can be used and plate-shaped member between in the fastening section of fastening.
According to technical scheme 6 or 11 described inventions, because the pars contractilis of the first cylindrical shell and the pars contractilis of the second cylindrical shell are not configured in adjacent position, therefore can play a role separately insusceptibly mutually.
Description of drawings
Fig. 1 is the simple pie graph that an embodiment of anchor clamps is used in expression inspection involved in the present invention.
Fig. 2 is the simple sectional view of the contact (the first contact) of the first embodiment of the present invention.
Fig. 3 illustrates and consists of the first cylindrical shell and the decomposition section of the second cylindrical shell, wherein (a) expression the first cylindrical shell, (b) expression the second cylindrical shell that the first contact consists of.
Fig. 4 is the sectional view that expression the first contact is installed in the state of holder.
Fig. 5 is the simple pie graph that anchor clamps are used in the inspection of use the first contact.
Fig. 6 is the simple sectional view of the contact (the second contact) of the second embodiment of the present invention.
Fig. 7 illustrates the decomposition section of the first cylindrical shell, the second cylindrical shell and the 3rd cylindrical shell that consist of the second contact, and wherein (a) expression the first cylindrical shell (b) represents the second cylindrical shell, (c) expression the 3rd cylindrical shell.
Fig. 8 is the sectional view that expression the second contact is installed in the state of holder.
Fig. 9 is the simple pie graph that has used the inspection usefulness anchor clamps of the second contact.
Figure 10 is the simple sectional view of the contact (the 3rd contact) of the 3rd embodiment of the present invention.
Figure 11 illustrates the first cylindrical shell and the decomposition section of the second cylindrical shell, wherein (a) expression the first cylindrical shell, (b) expression the second cylindrical shell that consists of the 3rd contact.
Figure 12 is the sectional view that expression the 3rd contact is installed in the state of holder.
Figure 13 is the simple pie graph that has used the inspection usefulness anchor clamps of the 4th contact.
Figure 14 is the simple sectional view of the contact (the 4th contact) of the 4th embodiment of the present invention.
Figure 15 illustrates the decomposition section of the first cylindrical shell, the second cylindrical shell and the 3rd cylindrical shell that consist of the 4th contact, and wherein (a) expression the first cylindrical shell (b) represents the second cylindrical shell, (c) expression the 3rd cylindrical shell.
Figure 16 is the sectional view that expression the 4th contact is installed in the state of holder.
Figure 17 is the simple pie graph that has used the inspection usefulness anchor clamps of the 4th contact.
Figure 18 is the sectional view that expression the 5th contact is installed in the state of holder.
Figure 19 is the sectional view that expression the 6th contact is installed in the state of holder.
Symbol description is as follows
1... check and use anchor clamps; 2... contact; 211... the first cylindrical shell; 212... the second cylindrical shell; 31... the first plate-like portion; 311... the first bullport; 32... the second plate-shaped member; 321... the second bullport; 41... electrode part.
Embodiment
Describe being used for implementing mode of the present invention.Fig. 1 is the simple pie graph that an embodiment of anchor clamps is used in expression inspection involved in the present invention.Inspection involved in the present invention with anchor clamps 1 have a plurality of contacts 2, with these contacts 2 be held in the spininess shape holder 3, support this holder 3 and have the connecting electrode body 4 of the electrode part 41 (with reference to Fig. 5) that contacts with contact 2 and become conducting state and be set to and extend out and the wire portion 5 of electrical connection with it from electrode part 41.
In addition, although as a plurality of contacts 23 contacts are shown among Fig. 1 and show 3 corresponding respectively wire portions 5, they can decide according to the checkpoint that the substrate that checks object sets, and are not limited to 3.
It is inner that the cartridge that the present invention is characterized in the cartridge of 2 electric conductivity can be set as a side is housed in the opposing party's cartridge, and then use as a contact, implements thus four terminals measurement.Therefore, the contact of formation with feature of the present invention is described in detail.
In addition, by above-mentioned formation, can lower the quantity of the bullport that forms the holder that keeps contact.
Contact to the first embodiment involved in the present invention describes.Fig. 2 is the simple sectional view of the contact (the first contact) of the first embodiment of the present invention, and Fig. 3 illustrates the first cylindrical shell of formation the first contact and the decomposition section of the second cylindrical shell, (a) expression the first cylindrical shell, (b) expression the second cylindrical shell.
This first contact 21 has the first cylindrical shell 211 and the second cylindrical shell 212, and the second cylindrical shell 212 (with reference to Fig. 2) is accommodated in the inside that is formed in the first cylindrical shell 211.
The first cylindrical shell 211 has the length of regulation and is formed by the material of electric conductivity.This first cylindrical shell 211 forms barrel shape, namely has a cylindrical shape of the hollow form of both ends open section.One end of the first cylindrical shell 211 contacts with the checkpoint, and the other end contacts with electrode part 41 (the first electrode part 411), carries out thus the electrical connection of checkpoint and electrode part.
This first cylindrical shell 211 has the position of outside top ends 211a, the outside the first pars contractilis 211b, outside pars intermedia 211c, the outside the second pars contractilis 211d and outside rearward end 211e.(therefore 211a～211e) formed by same cartridge unit has same external diameter and internal diameter at above-mentioned position.
Outside top ends 211a is connected to electrode part 41 described later.Outside top ends 211a is bearing in the second bullport 321 inside of the second plate-shaped member 32 described later by perforation, thereby is guided to the first electrode part 411 of regulation.
Outside rearward end 211e is connected to the checkpoint that is set in the inspection section.Outside rearward end 211e is supported on the first bullport 311 inside of the first plate-shaped member 31 described later by perforation, thereby is guided to the checkpoint of regulation.
The outside the first pars contractilis 211b forms spiral helicine notch along the wall section of cartridge unit, forms thus in the flexible volute spring shape of the long axis direction of cartridge unit.In addition, the elastic force that this outside the first pars contractilis 211b has can be by the fabric width of the spiral helicine notch of suitable adjustment, the intensity that length changes its elastic force.
The outside the second pars contractilis 211d forms spiral helicine notch along the wall section of cartridge unit, forms thus in the flexible volute spring shape of the long axis direction of cartridge unit.In addition, the elastic force that this outside the second pars contractilis 211d has, the first pars contractilis 211b is identical with the outside, can be by the fabric width of the spiral helicine notch of suitable adjustment, the intensity that length changes its elastic force.
Outside pars intermedia 211c is formed on the substantial middle place of the first cylindrical shell 211.This outside pars intermedia 211c by with the inboard pars intermedia 212c electric insulation of the second cylindrical shell 212 described later fix.The end of this outside pars intermedia 211c is communicated with link with the outside the first pars contractilis 211b, and the other end is communicated with link with the outside the second pars contractilis 211d.In addition, the outer recess 211f of oriented inside bend is shown on the outside pars intermedia 211c shown in Fig. 3 (a), and this outer recess 211f forms in order to fix the first cylindrical shell 211 and the second cylindrical shell 212 when the second cylindrical shell 212 being housed in the first cylindrical shell 211 inside, is not to be pre-formed at the first cylindrical shell 211.And this outer recess 211f is in order to fix the first cylindrical shell 211 and the second cylindrical shell 212, from the outside (the first cylindrical shell 211) to the inside (the second cylindrical shell 212) push (ca(u)lk) and be formed fixedly the time.The fixing means of this first and second cylindrical shell is not limited to described ca(u)lk, also can use other fixing meanss such as laser bonding, arc welding, cementing agent.
An end and the first electrode part 411 butts of outside top ends 211a, and its other end is communicated with link with the end of the outside the first pars contractilis 211b, the other end of the outside the first pars contractilis 211b is communicated with link with the end of outside pars intermedia 211c, the other end of outside pars intermedia 211c is communicated with link with the end of the outside the second pars contractilis 211d, the other end of the outside the second pars contractilis 211d is communicated with link with the end of outside rearward end 211e, and the other end of outside rearward end 211e is connected on the checkpoint.
The first cylindrical shell 211 can be formed by the cartridge of an electric conductivity, for example, forms external diameter 40～250 μ m, internal diameter 30～240 μ m, wall thickness 5～50 μ m.By forming such size, even if for checked properties such as the wiring that is endowed tinyization and complicated substrate, semiconductor devices, the testing fixture of the structure that can also oversimplify is dealt with.
Shown in Fig. 3 (a), the first cylindrical shell 211 forms its each position is configured to be point symmetry or line symmetry with the center of the first cylindrical shell 211.This is because by forming such symmetric shape, can be when installing with the holder 3 of anchor clamps 1 to inspection described later, utilize contact 2 supremely lower minute.
One end in contact checkpoint of the first cylindrical shell 211, its other end contact electrode section, by the electrically conducting that this first cylindrical shell 211 is realized between checkpoint and electrode part, therefore the first cylindrical shell 211 forms with the material of electric conductivity.As this material, then be not subjected to special restriction so long as have the material of electric conductivity, for example can list nickel, nickel alloy, palldium alloy.
This first cylindrical shell 211 as mentioned above, form with the material with electric conductivity, but contact 2 also must form according to tinyization and the complicated enforcement graph thinning of checked property itself.Especially stretch perpendicular to the direction of holding plate for the edge, must make contact 2 itself have Telescopic, and use the inspection at the helical spring position that coiling is arranged with in the anchor clamps in formation in the past, the size that will depend on the diameter of spiral self, very difficult formation has the coil of the diameter less than 4 times of left and right sides of spiral diameter, the extremely difficult volute spring of external diameter below 100 μ m that form.Namely allow to form, use 2000～4000 inspections in assembleability and manufacturing cost also too expensive with anchor clamps, have lunar politics.
Yet the present application can more cheap and easily produce tiny contact by utilizing following manufacture method.With regard to this manufacture method, 2 following manufacture methods can be disclosed.
[method for making example 1]
(1) at first, prepare the heart yearn (not shown) of the hollow bulb of formation the first cylindrical shell 211.Wherein this heart yearn uses the SUS line of the expectation thickness (for example, diameter 30 μ m) of the internal diameter that limits the first cylindrical shell 211.
(2) afterwards, heart yearn (SUS line) is applied the photoresist tunicle, coat the side face of this heart yearn.The part of the expectation of this photoresist is imposed exposure, development, heat treated form spiral helicine mask.At this moment, heart yearn is rotated along central shaft, exposed by laser, can form spiral helicine mask.In order to form the first cylindrical shell 211 of the present invention, has predetermined distance (distance suitable with the Length Quantity of outside pars intermedia 211c) and form between 2 pars contractiliss (outside the first pars contractilis 211b and the outside the second pars contractilis 211d).
(3) afterwards, this heart yearn is implemented nickel plating.At this moment, because heart yearn has electric conductivity, so the position that does not form the photoresist mask is by nickel plating.
(4) afterwards, remove the photoresist mask, extract heart yearn out, cut off cylindrical shell according to the length of expectation, thereby form the first cylindrical shell 211.Can certainly before extracting heart yearn out fully, cut off cylindrical shell.
In addition, the first cylindrical shell 211 also can be made according to following method.
[method for making example 2]
At first, preparation forms the heart yearn (not shown) of the hollow bulb of the first cylindrical shell 211 as mentioned above.
This heart yearn nickel plating is reached the thickness of expectation, thereby form nickel coating at the side face of heart yearn.
(2) afterwards, the surface of this nickel coating applied photoresist.Thereby the part of the expectation of this photoresist is imposed exposure, development, heat treated form spiral helicine mask.At this moment, heart yearn is rotated along central shaft, by laser explosure, can form spiral helicine mask.In order to form the first cylindrical shell 211 of the present invention, has predetermined distance (distance suitable with the Length Quantity of outside pars intermedia 211c) and form 2 pars contractiliss (outside the first pars contractilis 211b and the outside the second pars contractilis 211d).
(3) afterwards, nickel plating is removed in etching.At this moment, the nickel plating that does not form the position of photoresist mask is removed.
(4) afterwards, remove the photoresist mask, extract heart yearn out, cut off cylindrical shell according to the length of expectation, thereby form the first cylindrical shell 211.Can certainly before extracting heart yearn out fully, cut off cylindrical shell.
The volute spring mode of use coiling in the past depends on the diameter of the material that winds the line, and very difficult formation has the coil of the diameter less than 4 times of left and right sides of this diameter, the extremely difficult volute spring of external diameter below 100 μ m that form.The first cylindrical shell 211 of the present invention that makes based on above-mentioned method for making, to heart yearn nickel plating and after forming the shape of expectation, make and draw by extracting heart yearn out, compare with the situation of the volute spring mode of in the past use coiling, wall thickness that can the attenuate spring material simultaneously can high precision and make in the lump freely tiny external diameter and internal diameter.
Afterwards, the second cylindrical shell 212 that forms the first contact 21 is described (with reference to Fig. 3 (b)).This second cylindrical shell 212 has the length of regulation and is formed by the material of electric conductivity.This second cylindrical shell 212 forms cylindrical shape that is the barrel shape of the hollow form with both ends open section.One end of the second cylindrical shell 212 is contacted with the checkpoint, the other end is contacted with electrode part 41 (the second electrode part 412), carries out thus the electrical connection of checkpoint and electrode part.The difference of this second cylindrical shell 212 and the first cylindrical shell 211 maximums is, for the second cylindrical shell 212 is housed in the first cylindrical shell 211, and makes the external diameter of the second cylindrical shell 212 form slightly littlely than the internal diameter of the first cylindrical shell 211.
This second cylindrical shell 212 has the position of medial roof end 212a, inboard the first pars contractilis 212b, inboard pars intermedia 212c, inboard the second pars contractilis 212d and inboard rearward end 212e.Above-mentioned position (211a～211e) owing to being formed by same cartridge unit, therefore have same external diameter and internal diameter.
Inboard rearward end 212e is connected to the checkpoint that sets in the inspection section.Inboard rearward end 212e moves in the inner space of the inboard rearward end 211e of the first cylindrical shell 211.In addition, because outside rearward end 211e is guided to the checkpoint by the first bullport 311, therefore inboard rearward end 212e also is guided to the checkpoint.
Inboard the first pars contractilis 212b is formed with spiral helicine notch along the wall section of cartridge unit, forms thus the volute spring shape that the long axis direction at cartridge unit stretches.Wherein, the elastic force that has of this inboard the first pars contractilis 212b can be by the fabric width of suitably adjusting spiral helicine notch, the intensity that length changes its elastic force.
Inboard the second pars contractilis 212d forms spiral helicine notch along the wall section of cartridge unit, forms thus the volute spring shape that the long axis direction at cartridge unit stretches.Wherein, the elastic force that this inboard the second pars contractilis 212d has is identical with inboard the first pars contractilis 212b, can be by the fabric width of suitably adjusting spiral helicine notch, the intensity that length changes its elastic force.
Inboard pars intermedia 212c is formed on the substantial middle place of the second cylindrical shell 212.This inboard pars intermedia 212c by with the outside pars intermedia 211c electric insulation of above-mentioned the first cylindrical shell 211 fix.The end of this inboard pars intermedia 212c is communicated with link with inboard the first pars contractilis 212b, and the other end is communicated with link with inboard the second pars contractilis 212d.In addition, the inner recess 212f of oriented inside bend is shown on the inboard pars intermedia 212c shown in Fig. 3 (b), and this inner recess 212f forms in order to fix the first cylindrical shell 211 and the second cylindrical shell 212 when the second cylindrical shell 212 being housed in the first cylindrical shell 211 inside, is not to be pre-formed at the second cylindrical shell 212.And this inner recess 212f is in order to fix the first cylindrical shell 211 and the second cylindrical shell 212, from the outside (the first cylindrical shell 211) to the inside (the second cylindrical shell 212) push (ca(u)lk) and be formed fixedly the time.The fixing means of this first and second cylindrical shell is not limited to described ca(u)lk, also can use other fixing meanss such as laser bonding, arc welding, cementing agent.
The end of medial roof end 212a and the second electrode part 412 butts, and its other end is communicated with link with the end of inboard the first pars contractilis 212b, the other end of inboard the first pars contractilis 212b is communicated with link with the end of inboard pars intermedia 212c, the other end of inboard pars intermedia 212c is communicated with link with the end of inboard the second pars contractilis 212d, the other end of inboard the second pars contractilis 212d is communicated with link with the end of inboard rearward end 212e, and the other end of inboard rearward end 212e is connected to the checkpoint.
The second cylindrical shell 212 can be formed by the cartridge of an electric conductivity, for example, forms external diameter 20～220 μ m, internal diameter 10～200 μ m, wall thickness 5～50 μ m.By forming such size, even if for checked properties such as the wiring that is endowed tinyization and complicated substrate, semiconductor devices, the testing fixture of the structure that can also oversimplify is dealt with.
Shown in Fig. 3 (b), the second cylindrical shell 212 forms and its each position is configured to relatively its center is point symmetry or line is symmetrical.This is because by forming such symmetric shape, can be when installing with the holder 3 of anchor clamps 1 to inspection described later, utilize contact 2 supremely lower minute.
One end in contact checkpoint of the second cylindrical shell 212, its other end contact electrode section, by the electrically conducting that this second cylindrical shell 212 is realized between checkpoint and electrode part, therefore the second cylindrical shell 212 forms with the material of electric conductivity.As this material, then be not subjected to special restriction so long as have the material of electric conductivity, for example can list nickel, nickel alloy, palldium alloy.The manufacture method of this second cylindrical shell 212 is identical with the situation of above-mentioned the first cylindrical shell 211, so locate that description thereof is omitted.
Owing in the first contact 21 the second cylindrical shell 212 is accommodated the inside that is configured in the first cylindrical shell 211, therefore shown in Fig. 3 (b), the tunicle 212g that preferably will insulate is formed on the outboard peripheries of the second cylindrical shell 212.This insulation tunicle 212g for example can utilize polyimide, teflon (PTFE), epoxy resin.The thickness of this insulation tunicle 212g for example forms 1～5 μ m.
Although this insulation tunicle 212g is formed on the outboard peripheries of the second cylindrical shell 212 in the embodiment of Fig. 2, also can be formed on the inboard periphery of the first cylindrical shell 211.And when the inboard periphery at the first cylindrical shell 211 formed the insulation tunicle, then it can be formed at each pars contractilis the first cylindrical shell 211, extract heart yearn out and formation after forming barrel shape.
As shown in Figure 2, the second cylindrical shell 212 both can be configured to from two openends of the first cylindrical shell 211 outstanding, and the second cylindrical shell 212 also can be configured to not give prominence to fully.The first cylindrical shell 211 and the second cylindrical shell 212 are owing to all having 2 pars contractiliss, even if give prominence to therefore one party wants to occur the plane, by being subjected to an examination a little or electrode part when extruding pars contractilis occurs to shrink fully, the first cylindrical shell 211 and the second cylindrical shell 212 both sides can be connected to together.
Fig. 4 is the sectional view that expression the first contact 21 is installed in the state of holder.
Check the holder 3 that has to keep the first contact 21 with anchor clamps 1.This holder 3 has the first plate-shaped member 31 and the second plate-shaped member 32.
The first plate-shaped member 31 has an end of the first contact 21 the first bullport 311 to the checkpoint guiding.The first bullport 311 forms slightly greatlyr than the external diameter of the first cylindrical shell 211.Here the thickness of this first plate-shaped member 31 is not done being particularly limited, but be preferably formed shortlyer than the length of outside rearward end 211e.This is the cause for outside rearward end 211e can be slided reliably along the first bullport 311.
The second plate-shaped member 32 is configured to and 31 of the first plate-shaped members have predetermined distance, and has second bullport 321 of the other end of the first contact 21 guiding to electrode part 41.The second bullport 321 forms slightly greatlyr than the external diameter of the first cylindrical shell 211.Here the thickness of this second plate-shaped member 32 is not done special restriction, but be preferably formed shortlyer than the length of outside top ends 211a.This is the cause for outside top ends 211a can be slided reliably along the second bullport 321.
The first contact 21 is configured to be projected into the outside from the first bullport 311 and the second bullport 321 respectively.
When using the first contact 21, preferably use the 3rd plate-shaped member 33 shown in Figure 4.The 3rd plate-shaped member 33 possesses upper plate portion 331, middle board 332 and the lower board unit 333 that has predetermined distance and configure side by side.Above-mentioned plate-like portion has the 3rd bullport 334 that connects insertion for the first contact 21.The 3rd bullport 334 of the 3rd plate-shaped member 33 is configured on the straight line of the first bullport 311 and the second bullport 321.
The middle board 332 of the 3rd plate-shaped member 33 with respect to other boards (upper plate portion 331 and lower board unit 333) at face direction top offset.Therefore, the 3rd bullport 334 can be easily before middle board 332 is subjected to displacement connects for the first contact 21, and after central board 332 was subjected to displacement, the outside pars intermedia 211c of middle board 332 extruding the first contact 21 can keep the first contact 21 thus.In the manner described above the first contact 21 is fixed in holder 3.
Fig. 5 is the simple pie graph that anchor clamps are used in the inspection of use the first contact.Check that connecting electrode body 4 with anchor clamps 1 is formed with the electrode part 41 corresponding with each the first contact 21.This electrode part 41 constitutes has the second electrode part 412 that becomes the first electrode part 411 of conducting state with the first cylindrical shell 211 butts and become conducting state with the second cylindrical shell 212 butts.Wherein connecting electrode body 4 forms with insulating material.
In electrode part shown in Figure 5 41, the first electrode part 411 and the second electrode part 412 are formed by copper conductor, and the end face that is formed separately contacts with the end of each cylindrical shell.In addition, in Fig. 5, the first electrode part 411 contacts with each cylindrical shell with the second electrode part 412, and is configured to be in position farthest.
In the first embodiment shown in Figure 5, the first cylindrical shell 211 and the second cylindrical shell 212 are fixed at pars intermedia separately, and the middle board 332 of the 3rd plate-shaped member 33 can load and unload the first contact 21 freely maintenance thus in the in-plane displacement.In addition, in the first embodiment, when making the first contact 21 remain in holder 3 and then being installed on the connecting electrode body 4, the outside the first pars contractilis 211b and inboard the first pars contractilis 211b are compressed and be mounted with application of force state.By installing in the above described manner, the outside the first pars contractilis 211b and inboard the first pars contractilis 212b can constantly push each electrode part 41, can make the contact resistance value of the first contact 21 and electrode part 41 very stable, and the impact with the contact condition of the first contact 21 of can not being subjected to an examination a little.
It more than is the explanation of the inspection of the first embodiment being used anchor clamps.
Afterwards, the inspection of the second embodiment described with anchor clamps 1 '.Fig. 6 is the simple sectional view of the contact (the second contact) of the second embodiment of the present invention, Fig. 7 illustrates the decomposition section of the first cylindrical shell, the second cylindrical shell and the 3rd cylindrical shell that consist of the second contact, (a) expression the first cylindrical shell, (b) expression the second cylindrical shell, (c) expression the 3rd cylindrical shell.Wherein, be the situation of same formation for the inspection of the second embodiment with the inspection anchor clamps of anchor clamps and the first embodiment, mark prosign and description thereof is omitted.
The second contact 22 of the second embodiment constitute have the first cylindrical shell 211, the second cylindrical shell 212 and the 3rd cylindrical shell 223.The first cylindrical shell 211 of this second contact 22 and the second cylindrical shell 212 have the formation identical with the second cylindrical shell 212 with the first cylindrical shell 211 of the first contact 21, and description thereof is omitted here.
The 3rd cylindrical shell 223 is housed in inside coaxially with the first cylindrical shell 211 (and second cylindrical shell 212).Therefore, the 3rd cylindrical shell 223 is formed and has the internal diameter slightly larger than the external diameter of the first cylindrical shell 211.The 3rd cylindrical shell 223 forms the barrel shape of both ends open, and the first cylindrical shell 211 and the second cylindrical shell 212 are configured to from both ends open extend out (with reference to Fig. 6).
The 3rd cylindrical shell 223 have for the fixing attachment recess 223a of the first cylindrical shell 211 (comprising the second cylindrical shell 212).This attachment recess 223a is not pre-formed, but the first cylindrical shell 211 is accommodated be configured in its inner after formation.The back will be described in detail the formation method of this attachment recess 223a.
The 3rd cylindrical shell 223 both can be formed by conductive material, also can be formed by non-conductive material, but when being formed by conductive material, need correspondingly to carry out its periphery insulation-coated, take realize and 22 of adjacent other second contacts as non-electrical contact.In addition, as the method for making the 3rd cylindrical shell 223, can utilize the method for making first and second cylindrical shell.
In the second contact 22, the second cylindrical shell 212 is housed in the first cylindrical shell 211, and the 3rd cylindrical shell 223 is housed in its inside with this first cylindrical shell 211 afterwards.In addition, attachment recess 223a be by from the lateral of the 3rd cylindrical shell 223 inboard extruding (ca(u)lk) formed fixedly the time.The fixing means of this first and second cylindrical shell also can use other fixing meanss such as laser bonding, arc welding, cementing agent, and is not limited to above-mentioned ca(u)lk.In addition, can form fixing whole cylindrical shells after configuration the whole first and even the 3rd cylindrical shell, also can at first fix the first and second cylindrical shells, fix afterwards the 3rd cylindrical shell.
Fig. 8 is the sectional view that expression the second contact is installed in the state of holder.The inspection of the second embodiment has the first plate-shaped member 34 and the second plate-shaped member 32 with anchor clamps.Because the inspection anchor clamps of the second plate-shaped member 32 and the first embodiment are same formation, description will be omitted.
This first plate-shaped member 34 has first bullport 341 of the second contact 22 guiding to the checkpoint.This first bullport 341 has the upper hole 34a of the first guiding and the lower hole 34b of the first guiding.The upper hole 34a of this first guiding forms has the aperture slightly larger than the external diameter of the 3rd cylindrical shell 223.
It is slightly large and than the little aperture of external diameter of the 3rd cylindrical shell 223 that the lower hole 34b of the first guiding has a external diameter than the first cylindrical shell 211.By according to utilizing different hole, 2 apertures to form the first bullport 341 such as upper type, so that the second contact 22 utilizes the thickness of the 3rd cylindrical shell 223 and the first cylindrical shell 211 poor and obtain fastening.
Fig. 9 is the simple pie graph that anchor clamps 1 ' are used in the inspection of use the second contact 22.The second contact 22, when being installed in holder 3, from the second bullport 321 insertions of the second plate-shaped member 32, and guiding is to the first bullport 341 of the first plate-shaped member 34.At this moment, the 3rd cylindrical shell 223 of the second contact 22 is by the difference boundary of fastening in the first bullport 341 inner apertures.
After making the second contact 22 remain in holder 3, rely on the mode of electrode part 41 with a side pressure of the second contact 22, with the second plate-shaped member 32 and connecting electrode body 4 butts.At this moment, because the first cylindrical shell 211 and second cylindrical shell 212 of the second contact 22 are crimped on respectively the first electrode part 41a and the second electrode part 41b, therefore separately the outside the first pars contractilis 211b and inboard the first pars contractilis 212b shrinks and becomes application of force state, and whether the outside top ends 211a of the first cylindrical shell 211 is connected to the checkpoint with the medial roof end 212a of the second cylindrical shell 212 all contacts with each electrode part 41 all the time.In addition, be configured in the inboard of the opposing party's side and the outside the second pars contractilis 211d, 212d are in examine under naturally long state state, only these pars contractiliss just can slide when actual inspection.
It more than is the explanation of the inspection of the second embodiment being used anchor clamps.
Afterwards, to the inspection of the 3rd embodiment with anchor clamps 1 " describe.Figure 10 is the simple sectional view of the contact (the 3rd contact 23) of the 3rd embodiment of the present invention.Figure 11 illustrates the first cylindrical shell of formation the 3rd contact and the decomposition section of the second cylindrical shell, (a) expression the first cylindrical shell, (b) expression the second cylindrical shell.Wherein, be the situation of same formation for the inspection of the 3rd embodiment with the inspection anchor clamps of anchor clamps and the first embodiment or the second embodiment, mark prosign and description thereof is omitted.
The inspection of the 3rd embodiment is with anchor clamps 1 " principal character be that outboard peripheries at the first cylindrical shell 211 of the 3rd contact 23 is provided with insulation-coated 211g and is provided with insulation-coated 212g in the outboard peripheries of the second cylindrical shell 212.
The 3rd contact 23 has the first cylindrical shell 211 and the second cylindrical shell 212.The first cylindrical shell 211 of the 3rd contact 23 and the basic comprising of the second cylindrical shell 212 are because identical with the first contact 21, and description will be omitted, only different formations described.The outside first pars contractilis 211b of the first cylindrical shell 211 and the outside the second pars contractilis 211d are configured to see in the plane not adjacent with inboard the second pars contractilis 212d with the inboard first pars contractilis 212b of the second cylindrical shell 212 position (with reference to Figure 10)., can not contact each other even if each pars contractilis slides along the long axis direction alternate configurations of the 3rd contact 23 by each pars contractilis in a manner mentioned above yet.
The first cylindrical shell 211 is formed with insulation-coated 211g in the outboard peripheries of outside top ends 211a, outside pars intermedia 211c and outside rearward end 211e.This insulation-coated 211g forms the thickness with regulation, for example forms 5～20 μ m.The insulation-coated 211g of periphery that particularly is formed at outside rearward end 211e is identical with the 3rd cylindrical shell 223 of the inspection usefulness anchor clamps 1 ' of the second embodiment, by fastening in the first bullport 341 of the first plate-shaped member 34.
The insulation-coated 211g of the first cylindrical shell 211 of enumerating among Figure 11 (a) is not arranged on the position be used to the outer recess 211f that fixes the first cylindrical shell 211 and the second cylindrical shell 212.Why do not arrange insulation-coated, be for when pushing from the outside of the first cylindrical shell 211 so that the first cylindrical shell 211 and the second cylindrical shell 212 are more fixing.
The second cylindrical shell 212 is formed with insulation-coated 212g in the outboard peripheries of medial roof end 212a, inboard pars intermedia 212c and inboard rearward end 212e.This insulation-coated 212g forms the thickness with regulation, for example forms 1～10 μ m.By above-mentioned each position at the second cylindrical shell 212 insulation-coated 212g is set, the glide direction of each pars contractilis of the first cylindrical shell 211 stably can be limited on the long axis direction of the second contact 23.
Figure 12 is the sectional view that expression the 3rd contact is installed in the state of holder.As shown in Figure 12, identical with the second contact of the second embodiment, utilize discrepant 2 hole sections (the upper hole 34a of the first guiding and the lower hole 34b of the first guiding) of the first bullport 341 that the first plate-shaped member 34 has, the 3rd contact 23 by being arranged on outside rearward end 211e insulation-coated 211g and the thickness of the first cylindrical shell 211 is poor obtains fastening.
Figure 13 is the simple pie graph that anchor clamps are used in the inspection of use the 3rd contact.The inspection of the 3rd embodiment anchor clamps 1 " identical with anchor clamps 1 ' with the inspection of the second embodiment; when the 3rd contact 23 is installed to holder 3; insert from the second bullport 321 of the second plate-shaped member 32, and be guided to the first bullport 341 of the first plate-shaped member 34.At this moment, the insulation-coated 211g of the 3rd contact 23 is by the difference boundary of fastening at the first bullport 341 inside diameters.
After making the 3rd contact 23 remain on holder 3, rely on the mode of electrode part 41 with a side pressure of the 3rd contact 23, with the second plate-shaped member 32 and connecting electrode body 4 butts.At this moment, because the first cylindrical shell 211 and second cylindrical shell 212 of the 3rd contact 23 are crimped on respectively the first electrode part 41a and the second electrode part 41b, therefore separately the outside the first pars contractilis 211b and inboard the first pars contractilis 212b shrinks and becomes application of force state, and whether the outside top ends 211a of the first cylindrical shell 211 is connected to the checkpoint with the medial roof end 212a of the second cylindrical shell 212 all contacts with each electrode part 41 all the time.In addition, be configured in the inboard of the opposing party's side and the outside the second pars contractilis 211d, 212d are in examine under naturally long state state, only these pars contractiliss just can slide when actual inspection.
It more than is the explanation of the inspection of the 3rd embodiment being used anchor clamps.
Afterwards, carry out the inspection of the 4th embodiment is used the explanation of anchor clamps.Figure 14 is the simple sectional view of the contact (the 4th contact) of the 4th embodiment of the present invention.Figure 15 illustrates the decomposition section of the first cylindrical shell, the second cylindrical shell and the 3rd cylindrical shell that consist of the 4th contact, (a) expression the first cylindrical shell, (b) expression the second cylindrical shell, (c) expression the 3rd cylindrical shell.
The 4th contact 24 of the 4th embodiment has the first cylindrical shell 211, the second cylindrical shell 212 and the 3rd cylindrical shell 223, and is similar with the second contact 22 of the second embodiment.The difference of the 4th contact 24 and the second contact 22 is, each pars contractilis of the second contact 22 is configured in adjacent position (with reference to Fig. 6), and the 4th contact does not have the pars contractilis that is configured in the adjacent position.
Figure 16 is the sectional view that expression the 4th contact is installed in the state of holder.Figure 17 is the simple pie graph that anchor clamps are used in the inspection of use the 4th contact.As shown in Figure 16, identical with the second contact of the second embodiment, utilize discrepant 2 hole sections (the upper hole 34a of the first guiding and the lower hole 34b of the first guiding) of the first bullport 341 that the first plate-shaped member 34 has, the 4th contact 24 by the 4th contact 24 the 3rd cylindrical shell 223 and the thickness of the first cylindrical shell 211 is poor obtains fastening.
Figure 17 is the simple pie graph that anchor clamps are used in the inspection of use the 4th contact.The inspection of the 4th embodiment anchor clamps 1 " ' identical with anchor clamps 1 ' with the inspection of the second embodiment; when the 4th contact 24 is installed in holder 3; insert from the second bullport 321 of the second plate-shaped member 32, and be guided to the first bullport 341 of the first plate-shaped member 34.At this moment, the 3rd cylindrical shell 223 fastenings of the 4th contact 24 are at the difference boundary of the first bullport 341 inside diameters.
After making the 4th contact 24 remain in holder 3, rely on the mode of electrode part 41 with a side pressure of the 4th contact 24, with the second plate-shaped member 32 and connecting electrode body 4 butts.At this moment, because the first cylindrical shell 211 and second cylindrical shell 212 of the 4th contact 23 are crimped on respectively the first electrode part 41a and the second electrode part 41b, therefore separately the outside the first pars contractilis 211b and inboard the first pars contractilis 212b shrinks and becomes application of force state, and whether the outside top ends 211a of the first cylindrical shell 211 is connected to the checkpoint with the medial roof end 212a of the second cylindrical shell 212 all contacts with each electrode part 41 all the time.In addition, be configured in the inboard of the opposing party's side and the outside the second pars contractilis 211d, 212d are in examine under naturally long state state, only these pars contractiliss just can slide when actual inspection.
It more than is the explanation of the inspection of the 4th embodiment being used anchor clamps.
Inspection to the 5th embodiment describes with anchor clamps.Figure 18 is the simple sectional view that the contact (the 5th contact 25) of expression the 5th embodiment of the present invention remains in the state of holder.Wherein the inspection of the 5th embodiment being used anchor clamps (or the 3rd contact 23) with anchor clamps (or the 5th contact 25) with the inspection of the 3rd embodiment is the situation of same formation, and also description thereof is omitted for the mark prosign.
The inspection of the 5th embodiment is with the principal character of anchor clamps (not shown): the outside the first pars contractilis 211b and the outside second pars contractilis 211d of the first cylindrical shell 211 of the 5th contact 25 are configured in outermost in the pars contractilis of the 5th contact 25, and inboard the first pars contractilis and inboard the second pars contractilis that are respectively arranged with two the second cylindrical shells 212.
The 5th contact 25 has the first cylindrical shell 211 and the second cylindrical shell 212.The first cylindrical shell 211 of the 5th contact 25 and the basic comprising of the second cylindrical shell 212 are because identical with the 3rd contact 23, and description will be omitted, only different formations described.The outside first pars contractilis 211b of the first cylindrical shell 211 and the outside the second pars contractilis 211d are configured to see in the plane and inboard the first pars contractilis 212b1, the 212b2 of the second cylindrical shell 212 and inboard the second pars contractilis 212d1, the non-conterminous position of 212d2 (with reference to Figure 18).Be configured in non-conterminous position by each pars contractilis in a manner mentioned above along the long axis direction of the 5th contact 25, also can not contact each other even if each pars contractilis slides.
The second cylindrical shell 212 has inboard the first pars contractilis and inboard the second pars contractilis, and in the embodiment of the 5th contact 25, form inboard the first pars contractilis with 2 pars contractilis 212b1,212b2, and form inboard the second pars contractilis with 2 pars contractilis 212d1,212d2.In addition, be formed with the cylinder section that has predetermined distance between 2 pars contractiliss be used to making, and form insulation-coated in the outboard peripheries of this one.By so forming a plurality of the first pars contractiliss, the second pars contractilis, can suppress to be disposed at the second inboard cylindrical shell 212 and deflection occur.
The 5th contact 25 is formed with insulation-coated 211g in the outboard peripheries of outside top ends 211a, outside pars intermedia 211c and outside rearward end 211e.The insulation-coated 211g that is formed at the periphery of outside rearward end 211e uses the 3rd cylindrical shell 223 of anchor clamps 1 ' identical with the inspection of the second embodiment, by the first bullport 341 fastenings of the first plate-shaped member 34.
More than be to the inspection of the 5th embodiment explanation with the formation of the 5th contact of anchor clamps.
Inspection to the 6th embodiment describes with anchor clamps.Figure 19 is the simple sectional view of the contact (the 6th contact) of the 6th embodiment of the present invention.
The 6th contact 26 of the 6th embodiment has the first cylindrical shell 211, the second cylindrical shell 212 and the 3rd cylindrical shell 223, and is similar with the 4th contact 24 of the 4th embodiment.The difference of the 6th contact 26 and the 4th contact 24 is to form formed inboard the first pars contractilis 212b and inboard the second pars contractilis 212d on the second cylindrical shell 212 of the 6th contact 26 by 2 pars contractiliss respectively.In addition, each pars contractilis of the 6th contact 26 is identical with the 5th contact 25, is not set to pars contractilis is configured in the adjacent position.
In the 6th contact 26, the 3rd section 223 avoided the 6th contact 26 to deviate from from holder 3 by the first bullport 341 fastenings of the first plate-shaped member 34.
It more than is the explanation of the inspection of the 6th embodiment being used employed the 6th contact of anchor clamps.
In this manual, the end face of copper conductor is configured to be connected to respectively the part of each first cylindrical shell and the second cylindrical shell as electrode part 41, has the end face identical with the first cylindrical shell or the second cylindrical shell but also these electrode part 41 configurations can be formed.
In addition, insulation tunicle 211g also can form the surface that coats the pars contractilis except two top ends.In addition, although be used for illustrating that two pars contractiliss of putting down in writing in the accompanying drawing of the present invention form dextrad and reel, coiling direction that can also be opposite is set formation at the first cylindrical shell and the second cylindrical shell.
Claims (11)
1. inspection anchor clamps, it will have the checked property that becomes the inspection of inspected object section, be electrically connected with the testing fixture of the electrical specification of this inspection section of inspection, it is characterized in that possessing:
The connecting electrode body, it has the electrode part that a plurality of and described testing fixture is electrically connected;
The first cylindrical shell of the barrel shape of electric conductivity, a side pressure of this first cylindrical shell are connected to described inspection section, and the other end is crimped on described electrode part;
The second cylindrical shell of the barrel shape of electric conductivity, this second cylindrical shell be not with described the first cylindrical shell electrical contact and be configured in coaxially in this first cylindrical shell, and the one side pressure is connected to described inspection section, and the other end is crimped on described electrode part;
The first plate-shaped member, it has first bullport of described the first cylindrical shell and described the second cylindrical shell end guiding separately to described inspection section; With
The second plate-shaped member, it has second bullport of described the first cylindrical shell and described the second cylindrical shell other end guiding separately to described electrode part, and this second plate-shaped member is configured to and described the first plate-shaped member between have predetermined distance,
On described the first cylindrical shell and described the second cylindrical shell, be provided with 2 pars contractiliss across pars intermedia respectively, this pars contractilis is formed by the spiral fashion notch of barrel section, and stretches at long axis direction,
Described the first cylindrical shell and described the second cylindrical shell are fixed at pars intermedia separately.
2. inspection anchor clamps according to claim 1 is characterized in that:
Described the first cylindrical shell and the second cylindrical shell are formed by nickel or nickel alloy.
3. inspection anchor clamps according to claim 1 and 2 is characterized in that:
The central authorities that the shape of described the first cylindrical shell forms with respect to this first cylindrical shell are symmetrical shape, and the central authorities that the shape of described the second cylindrical shell forms with respect to this second cylindrical shell are symmetrical shape.
4. inspection anchor clamps according to claim 1 and 2 is characterized in that:
Described inspection has the 3rd plate-shaped member with anchor clamps, the 3rd plate-shaped member have for described pars intermedia connect and to the 3rd bullport of guiding,
Described the 3rd plate-shaped member possesses three side by side boards of configuration, and a board in the middle of being disposed at relatively other boards and is configured in and makes described the 3rd bullport from the position that arrangement position departs to the in-plane displacement, thus the described pars intermedia of clamping.
5. inspection anchor clamps according to claim 1 and 2 is characterized in that:
Be formed with the 3rd cylindrical shell of barrel shape, the 3rd cylindrical shell has the internal diameter larger than the external diameter of described the first cylindrical shell,
Described the 3rd cylindrical shell is housed in this first cylindrical shell in described the 3rd cylindrical shell coaxially,
Described the first bullport has the upper hole of the first guiding and the lower hole of the first guiding,
The upper hole of described the first guiding has the aperture larger than the external diameter of described the 3rd cylindrical shell,
The lower hole of described the first guiding is communicated with link with the upper hole of described the first guiding, has the aperture less and larger than the external diameter of described the first cylindrical shell than the external diameter of described the 3rd cylindrical shell.
6. inspection anchor clamps according to claim 1 and 2 is characterized in that:
2 pars contractiliss of described the first cylindrical shell and 2 pars contractiliss of described the second cylindrical shell are not configured in and are adjacent position when seeing in the plane.
7. inspection contact, its inspection that is used to have the checked property that becomes the inspection of inspected object section, to be electrically connected with the electrode part of the testing fixture of the electrical specification of this inspection section of inspection is characterized in that possessing with in the anchor clamps:
The first cylindrical shell of the barrel shape of electric conductivity, a side pressure of this first cylindrical shell are connected to described inspection section, and the other end is crimped on described electrode part; With
The second cylindrical shell of the barrel shape of electric conductivity, this second cylindrical shell be not with described the first cylindrical shell electrical contact and be configured in coaxially in this first cylindrical shell, and the one side pressure is connected to described inspection section, and the other end is crimped on described electrode part,
On described the first cylindrical shell and described the second cylindrical shell, be provided with 2 pars contractiliss across pars intermedia respectively, this pars contractilis is formed by the spiral fashion notch of barrel section, and stretches at long axis direction,
Described the first cylindrical shell and described the second cylindrical shell are fixed at pars intermedia separately.
8. inspection contact according to claim 7 is characterized in that:
Described the first cylindrical shell and the second cylindrical shell are formed by nickel or nickel alloy.
9. it is characterized in that according to claim 7 or 8 described inspection contacts:
The central authorities that the shape of described the first cylindrical shell forms with respect to this first cylindrical shell are symmetrical shape, and the central authorities that the shape of described the second cylindrical shell forms with respect to this second cylindrical shell are symmetrical shape.
10. inspection contact according to claim 7 is characterized in that:
Be formed with the 3rd cylindrical shell of barrel shape, the 3rd cylindrical shell has the internal diameter larger than the external diameter of described the first cylindrical shell, and described the 3rd cylindrical shell is housed in this first cylindrical shell in described the 3rd cylindrical shell coaxially, and forms than the short length of described the first cylindrical shell.
11. inspection contact according to claim 7 is characterized in that:
2 pars contractiliss of described the first cylindrical shell and 2 pars contractiliss of described the second cylindrical shell are not configured in and are adjacent position when seeing in the plane.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-133206 | 2009-06-02 | ||
| JP2009133206A JP5504698B2 (en) | 2009-06-02 | 2009-06-02 | Inspection jig and contact for inspection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101907642A CN101907642A (en) | 2010-12-08 |
| CN101907642B true CN101907642B (en) | 2013-03-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010101933510A Active CN101907642B (en) | 2009-06-02 | 2010-06-01 | Inspection fixture and inspection probe |
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| Country | Link |
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| JP (1) | JP5504698B2 (en) |
| KR (1) | KR101127030B1 (en) |
| CN (1) | CN101907642B (en) |
| TW (1) | TWI434049B (en) |
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| TWI638163B (en) * | 2014-01-30 | 2018-10-11 | 風琴針股份有限公司 | High current probe |
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| WO2011132613A1 (en) * | 2010-04-19 | 2011-10-27 | 日本電産リード株式会社 | Inspection contact element and inspection jig |
| JP5440486B2 (en) | 2010-12-17 | 2014-03-12 | パナソニック株式会社 | Component mounting apparatus and model switching method in component mounting apparatus |
| JP4974311B1 (en) * | 2011-02-10 | 2012-07-11 | 日本電産リード株式会社 | Inspection jig |
| JP5845678B2 (en) * | 2011-07-21 | 2016-01-20 | 日本電産リード株式会社 | Inspection contact and inspection jig |
| JP5821432B2 (en) | 2011-09-05 | 2015-11-24 | 日本電産リード株式会社 | Connection terminal and connection jig |
| JP6040532B2 (en) * | 2012-01-26 | 2016-12-07 | 日本電産リード株式会社 | Probe and connecting jig |
| JP2013190270A (en) * | 2012-03-13 | 2013-09-26 | Nidec-Read Corp | Probe and connection jig |
| CN102621354A (en) * | 2012-04-11 | 2012-08-01 | 游森溢 | Detachable testing jig |
| TWI505659B (en) * | 2013-10-18 | 2015-10-21 | Coiler Corp | Repeater of mobile communication system and signal monitoring method thereof |
| JP6411169B2 (en) * | 2014-10-22 | 2018-10-24 | 株式会社日本マイクロニクス | Electrical contact and electrical connection device |
| JP6496142B2 (en) * | 2014-12-26 | 2019-04-03 | 株式会社ヨコオ | Replacement contact unit and inspection jig |
| JP2017142080A (en) * | 2016-02-08 | 2017-08-17 | 日本電産リード株式会社 | Contact terminal, inspection tool, and inspection device |
| WO2017212814A1 (en) * | 2016-06-09 | 2017-12-14 | 日本電産リード株式会社 | Inspection jig and inspection device |
| KR101996789B1 (en) * | 2016-11-30 | 2019-07-04 | 니혼덴산리드가부시키가이샤 | Contact terminal, inspection jig and inspection device |
| JP6892277B2 (en) * | 2017-02-10 | 2021-06-23 | 株式会社日本マイクロニクス | Probes and electrical connections |
| JP7023276B2 (en) * | 2017-03-29 | 2022-02-21 | 日本発條株式会社 | A semiconductor inspection device including a probe, a probe unit, and a probe unit. |
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| JP2019074483A (en) * | 2017-10-19 | 2019-05-16 | 株式会社日本マイクロニクス | Electrical connection device |
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| CN114487518A (en) * | 2021-12-13 | 2022-05-13 | 渭南高新区木王科技有限公司 | Double-end double-acting probe capable of independently adjusting spring resistance |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI434049B (en) | 2014-04-11 |
| KR20100130160A (en) | 2010-12-10 |
| CN101907642A (en) | 2010-12-08 |
| KR101127030B1 (en) | 2012-03-26 |
| TW201102669A (en) | 2011-01-16 |
| JP2010281601A (en) | 2010-12-16 |
| JP5504698B2 (en) | 2014-05-28 |
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