JP4041831B2 - Substrate inspection jig and electrode structure of connection electrode portion in this jig - Google Patents

Description

The present invention relates to a substrate inspection jig used when inspecting a substrate to be inspected, and an electrode structure of a connection electrode portion in the substrate inspection jig, and more specifically, a contact of a substrate inspection jig and substrate inspection. The present invention relates to an electrode structure of a substrate inspection jig for reducing contact resistance of an electrode portion of the jig for inspection and an inspection jig having this electrode structure.
The present invention is not limited to a printed wiring board, but includes, for example, electrical wiring on various substrates such as flexible substrates, multilayer wiring substrates, electrode plates for liquid crystal displays and plasma displays, and package substrates and film carriers for semiconductor packages. In this specification, these various wiring boards are collectively referred to as “substrates”.

  Conventionally, a wiring pattern provided on a circuit board must accurately transmit an electric signal to an electric / electronic component such as a semiconductor or a resistor such as an IC mounted on the circuit board. Provided in the wiring pattern to be inspected against the printed wiring board before mounting, the circuit wiring board on which the wiring pattern is formed on the liquid crystal panel or plasma display panel, or the wiring pattern formed on the substrate such as a semiconductor wafer The resistance value between the inspection points was measured, and the quality was judged.

  In such determination inspection, an inspection method for inspecting disconnection and short circuit of the wiring pattern is performed. In such continuity and short-circuit inspection, measurement terminals are brought into contact with inspection points provided at two locations of a wiring pattern to be inspected, and a predetermined level of measurement current is passed between the measurement terminals. Thus, the voltage value between the measurement terminals is measured, and the pass / fail judgment is made by comparing this voltage value with a predetermined threshold value.

However, in the board inspection jig used in such a method, the measurement terminals brought into contact with each of the two inspection points of the wiring pattern are commonly used for supplying the measurement current and measuring the voltage. In this case, the contact resistance between the measurement terminal and the inspection point affects the measurement voltage, and the measurement accuracy of the resistance value is lowered and the reliability of the inspection result is lowered.
Particularly, in recent years, the miniaturization of the wiring pattern provided on the circuit board has progressed, and the resistance value of the wiring pattern has decreased, and the influence of the contact resistance on the measured value has been a big problem. .

  In order to solve such a problem of contact resistance, a contact as disclosed in Patent Document 2 has been proposed. This contact has a substantially linear contact portion that can be brought into contact with an electrode to be measured substantially perpendicularly, and a part extending along the length direction of the contact portion is another contact portion of the contact portion. It is comprised with the material which has a thermal expansion coefficient different from a part. By being configured in this way, the contact part is bimetallic, so that when the contact part is brought into contact with the measurement target electrode substantially perpendicularly at a predetermined environmental temperature and overdrive is performed in that state, the measurement is performed. The contact portion is bent toward a portion made of a material having a small coefficient of thermal expansion due to the environmental temperature heat transmitted from the target electrode.

  However, even if such a contactor is used, it is only possible to make contact with the electrode portion vertically, and from the viewpoint of contact stability, it has sufficient contact stability, It could not be said that the connection had a low resistance value.

JP-A-6-66832 JP 2005-345129 A

  The present invention has been made in view of such circumstances, and an electrode structure of a substrate inspection jig for reducing the contact resistance between a contact of a substrate inspection jig and an electrode portion of the substrate inspection jig and the electrode An inspection jig having a structure is provided.

According to the first aspect of the present invention, in order to inspect the electrical characteristics of the substrate to be inspected, electrical continuity between the substrate inspection apparatus main body and a plurality of substrate inspection points provided in the wiring pattern of the substrate to be inspected A substrate inspection jig for obtaining a contact group of conductive and flexible rod-shaped contactors having ends that are electrically conductive at both ends; A connection connected to the substrate inspection apparatus main body, comprising a contact holder for holding the contact group, and a connection electrode portion disposed opposite to the other end of each contact of the contact group. An electrode body, and one end portion of the contact is pressed against one of the substrate inspection points and the other end portion is pressed against the connection electrode portion; The contact bends in response to the pressure contact from the connection electrode portion, and the connection electrode body faces each other. Is formed in a cylindrical shape internally held loosely fit at least a portion of the other end of the contact, when the contact is bent in response to the pressure, of the end portion and said other of said other Provided is a substrate inspection jig which is brought into an electrically conductive state by contacting an inner peripheral surface of a tube of the connection electrode portion facing the end portion.
The invention according to claim 2 provides the substrate inspection jig according to claim 1, wherein the connection electrode portion is formed to be inclined or curved with respect to the long axis of the contact. .
According to a third aspect of the present invention, the connection electrode portion is formed in a laminated structure composed of a plurality of plate members, and at least one plate member of the connection electrode portion slides in a direction perpendicular to the entry / exit direction of the contact. The board inspection jig according to claim 1, further comprising a sliding portion.
According to a fourth aspect of the present invention, there is provided the substrate inspection jig according to the first aspect, wherein the other end of the contact is bent with respect to the long axis of the contact. provide.
According to a fifth aspect of the present invention, the contact holder includes a first holding portion having a first holding hole for holding the vicinity of one end of the contact and the vicinity of the other end of the contact. The substrate inspection jig according to claim 1, further comprising a second holding portion having a second holding hole for holding the second holding portion, wherein the second holding portion is disposed in contact with the electrode body. provide.
According to a sixth aspect of the present invention, the contact holder includes a first holding portion having a first holding hole for holding the vicinity of one end of the contact and the vicinity of the other end of the contact. 2. The substrate inspection device according to claim 1, further comprising: a second holding portion having a second holding hole for holding the second holding portion, wherein the second holding portion is disposed with a predetermined distance from the electrode body. Provide a jig.
According to a seventh aspect of the present invention, the contact holder is slid in the longitudinal direction of the contact so that the contact protrudes when the other of the contacts is in contact with the connection electrode portion. The board inspection jig according to claim 1, further comprising a protective part that moves.
The invention according to claim 8 is characterized in that a range in the vicinity of the other end portion is a range in which a side peripheral surface of the other end portion can contact at least the connection electrode portion during the connection. A substrate inspection jig according to claim 1 is provided.
According to the ninth aspect of the present invention, in order to inspect the electrical characteristics of the substrate to be inspected, electrical continuity between the substrate inspection apparatus main body and a plurality of substrate inspection points provided in the wiring pattern of the substrate to be inspected is provided. In order to obtain, the contact has a contact that is press-contacted to make a conductive contact with the point to be inspected, and a connection electrode body that is conductively contacted with the contact and connected to the substrate inspection apparatus main body, and the contact When one end of the element is pressed against one of the substrate inspection points and the other end is pressed against the connection electrode portion, the contact between the substrate inspection point and the connection electrode portion is reduced. Accordingly, the electrode structure of the connection electrode portion that is bent and is in conductive contact with the other end of the contact, the connection electrode portion being at least a part of the other end portion of the facing contact member Is formed in a cylindrical shape that is loosely fitted and held inside, and the contact bends according to the pressure contact The case, the inner peripheral surface of the connecting electrode portion of the cylindrical opposite to the end portion of the end and said other said other is provided an electrode structure of the connecting electrode part, characterized in that the contact.

  According to the first aspect of the present invention, when connecting the other end of the contact group and the connection electrode body, at least a part of the side peripheral surface in the vicinity of the other end of the contact is opposed to this. The contact resistance value between the contactor and the connection electrode part can be reduced and a stable contact resistance value can be obtained regardless of the number of times of use. A substrate inspection jig is provided.

According to the first aspect of the present invention, the contact state between the contact and the connection electrode portion is due to the contact between at least the other end of the contact and the inner surface of the connection electrode portion. Provided is a substrate inspection jig capable of increasing the area, reducing the contact resistance value, and having a stable contact resistance value regardless of the number of times of use.

According to the first aspect of the invention, since the connection electrode portion has a shape in which the contact can be loosely fitted, it is possible to prevent an excessive burden from being applied when the contact is inserted into and removed from the connection electrode portion. Provided is a substrate inspection jig capable of

According to the first aspect of the present invention, since the connection electrode portion is formed in a cylindrical shape, a contact surface with which the contactor comes into contact can be created uniformly, and the contact electrode portion is stable regardless of which cylinder portion is contacted. Provided is a substrate inspection jig for a contact resistance value.

According to the second aspect of the present invention, since the connection electrode portion is formed to be inclined or curved with respect to the long axis of the contactor, when the contactor enters / exits the connection electrode portion, A substrate inspection jig that can reduce the contact resistance value between the contact and the connection electrode part and has a stable contact resistance value regardless of the number of times of use. I will provide a.

According to the third aspect of the invention, since the connection electrode portion has the sliding portion that slides in a direction perpendicular to the contact direction of the contact, the contact is reliably obtained when the contact is accommodated in the connection electrode portion. And a connection electrode portion can be brought into contact, the contact resistance value between the contact and the connection electrode portion can be reduced, and a substrate inspection jig having a stable contact resistance value regardless of the number of times of use is provided. .

According to the invention described in claim 4 , since the other of the contacts is formed to be bent with respect to the long axis of the contact, the inside of the connection electrode portion can be used when the contact is inserted into and removed from the connection electrode portion. Provided with a substrate inspection jig that can reduce the contact resistance value between the contact and the connection electrode part and has a stable contact resistance value regardless of the number of times of use. To do.

According to the fifth aspect of the present invention, the contact holder is formed of two members, and one of the holding portions is disposed in contact with the connection electrode body, so that the contact is reliably guided to the connection electrode portion. Provided is a jig for substrate inspection.

According to the sixth aspect of the present invention, the contact holder is composed of two members, and one of the holding portions is arranged with a predetermined distance from the connection electrode body. The contact can be deflected by the contact electrode, and when the contact is inserted into and exited from the connection electrode part, the contact is brought into contact with the inner surface of the connection electrode part. Provided is a substrate inspection jig capable of reducing a resistance value and having a stable contact resistance value regardless of the number of times of use.

According to the seventh aspect of the present invention, the contact holder has a protective portion for protecting the contact, so that the contact can be effectively protected when the contact is not in use. A substrate inspection jig capable of extending the service life is provided.

According to the eighth aspect of the present invention, the range in the vicinity of the other end portion is a range in which the side peripheral surface of the other end portion can contact at least the connection electrode portion during the connection. The contact area between the contact and the connection electrode can be increased, the contact resistance between the contact and the connection electrode can be reduced, and the substrate has a stable contact resistance regardless of the number of uses. Provide a jig.

According to the ninth aspect of the present invention, when connecting the other end of the contact and the connection electrode body, at least a part of the side peripheral surface in the vicinity of the other end of the contact faces this. Since the contact electrode part is in contact with each other, the contact resistance value between the contact and the connection electrode part can be reduced, and the connection electrode part of the jig for substrate inspection has a stable contact resistance value regardless of the number of times of use. I will provide a.

The best mode for carrying out the present invention will be described.
FIG. 1 shows an outline of a configuration in the case of using a substrate inspection jig according to the present invention. In FIG. 1, a connection having a plurality of contacts 101, a holding body 102 that holds the contacts 101 in a multi-needle shape, and a connection electrode portion that supports the holding body 102 and is conductive when in contact with the contact 101. An electrode body 103, an inspection signal processing unit 104, which is an inspection signal processing unit that processes an electrical signal to be detected, and a wire cable 105 that connects the inspection contact 101 and the inspection signal processing unit 104 are shown. The contact 101 is a terminal that contacts each inspection point of the wiring pattern formed on the substrate to be inspected, and the connection electrode body 103 is electrically connected by changing the pitch between the contact 101 and the inspection signal processing unit 104. .
The connection electrode body 103 has a connection electrode portion 106 that is electrically connected to the contact 101 on the arrangement side of the holding body 102. The present invention provides a connection resistance value having stability while being able to reduce the connection resistance value with the contact 101 by ingenuating the connection electrode portion 106.

A substrate inspection jig 1 according to an embodiment of the present invention includes a contact 2, a contact holder 3, and a connection electrode 4 (see FIG. 2). The connection electrode body 4 is connected to the inspection signal processing unit 104 as described above, but is omitted in FIG.
The contact 2 has flexibility and conductivity and is formed in a bar shape such as a needle shape or a long shape. One of the contacts 2 is in pressure contact with the inspection point of the substrate to be inspected, and the other is in contact with a connection electrode portion described later. For this reason, the contact 2 can transmit the electrical signal from the inspection signal processing unit 104 to the inspection point and also transmit the electrical signal from the inspection point to the inspection signal processing unit 104.
Since this contact 2 has flexibility, it bends in a direction perpendicular to the major axis direction of the contact 2 in a space formed inside a contact holder 3 described later (buckling). Will be). For this reason, when the contact 2 is used, the contact 2 bends in response to a load from the inspection point of the substrate to be inspected or the connection electrode portion, and this bending causes a pressing force to each contact portion.

The contact 2 is not particularly limited as long as it is formed in the shape as described above, but it can also be formed as in one embodiment as shown in FIG.
The contact 2 shown in FIG. 3 is formed on an elongated rod-like member 21 having both ends tapered, as shown in FIG. The tapered shape may be a sharp shape as shown in FIG. 3A or may be a spherical shape.
Examples of the rod-shaped member 21 include stainless steel, beryllium copper (BeCu), and tungsten (W). However, the rod-shaped member 21 is not particularly limited and may be any conductive material.
The rod-shaped member 21 is preferably formed in a cylindrical or columnar shape so that a uniform load is applied to a contact area that contacts a connection electrode portion to be described later, but is not particularly limited.
The length and thickness of the rod-shaped member 21 are not particularly limited, and are appropriately set according to the pitch of the wiring pattern formed on the substrate to be inspected and the size of the substrate to be inspected.

FIG. 3B shows a state in which the rod-shaped member 21 is accommodated in the cylindrical member 22. The cylindrical member 22 has flexibility and conductivity. A rod-shaped member 21 is inserted into the tubular member 22. In FIG. 3B, when one end 22a that is one end of the cylindrical member 22 is compared with the other end 22b that is the other end, the length of the rod-shaped member 21 that protrudes from the one end 22a protrudes from the other end 22b. It is set so as to be longer than the length of the rod-shaped member 21 to be performed.
In such a case, the one end 22a is in contact with the connection electrode portion, and the other end 22b is in contact with the inspection point of the substrate to be inspected. By changing the length of the arrangement in this way, the contact area where the bar-shaped member 21 contacts the connection electrode portion can be increased, and the length of the bar-shaped member 21 protruding from the other end 22b is set short. Therefore, when the contactor contacts an inspection point such as a bump, the cylindrical member 22 can serve as a stopper that prevents the rod-shaped member 21 from penetrating into the inspection point more than necessary, and is spherical. It is possible to make stable contact with inspection points such as bumps. Furthermore, contact with the inspection point by the rod-shaped member 21 and the cylindrical member 22 can be made possible without depending on the workability of the tip shape of the rod-shaped member 21.
The protruding amount of the rod-shaped member 21 on the other end 22b side can be set shorter than the one end 22a as described above, and at the same time, is set as an amount (length) that penetrates the inspection point as described above. You can also
The cylindrical member 22 is not particularly limited as long as it can accommodate the rod-shaped member 21 and can be electrically connected to the rod-shaped member 21.

The cylindrical member 22 and the rod-shaped member 21 are electrically connected to each other. For this reason, it forms by performing electrolytic plating or electroless plating on the whole in the state (state shown in Drawing 3 (b)) where rod-shaped member 21 was inserted in cylindrical member 22.
As another method, by providing a plurality of projecting portions (not shown) inside the cylindrical member 22, the cylindrical member 22 has a caulking structure that presses the rod-shaped member 21, thereby making contact and electrical conduction. be able to.

In FIG. 3C, the rod-shaped member 21 and the cylindrical member 22 are integrated, and an insulating portion 23 is provided on the surface of the cylindrical member 22. The place where the insulating portion 23 is formed is formed at a place other than the one end and the other end of the contact 2 as shown in FIG. Further, the step 24 formed by the insulating portion 23 and the cylindrical member 22 is used as a locking portion when the contact 2 is disposed on the contact holder 3 described later.
The insulating portion 23 prevents a short circuit even when the contact 2 comes into contact with the adjacent contact 2 when the contact 2 is bent.
The insulating portion 23 can be made of polyurethane, but is not particularly limited.
In the above description, the case where the contact 2 is configured by using the rod-shaped member 21, the cylindrical member 22, and the insulating portion 23 has been described. However, a contact composed of the rod-shaped member 21 and the insulating portion 23 may be used. However, the structure is not limited to these.
In this specification, a part of the contact 2 accommodated in the connection electrode portion 41 will be described as 2A. However, the accommodating portion 2A of the contact 2 is the contact 2 in which the insulating portion 23 is not formed. It becomes one end of. For example, it is the part (the part of length L) of the contact 2 from the tip of the contact 2 to the step 24. It is not necessary for all of the portion L to be accommodated in the connection electrode portion, but it is preferable that as many portions as possible be accommodated.
The length L of this portion is appropriately set depending on the length accommodated in the connection electrode portion, but it may be about 2 to 5 mm in order to achieve a sufficiently stable contact state (conduction state). preferable.
This part of the contact 2 corresponds to the other end, and at least a part of the side peripheral surface of this part comes into contact with the connection electrode part 41.

The contact holder 3 holds a contact group composed of a plurality of contacts 2. As shown in FIG. 2, the contact holder 3 includes a first holding portion 31 and a second holding portion 32 for holding a plurality of contacts 2.
In the contact holder 3 shown in FIG. 2, the first holding portion 31 is disposed on the back side of the paper, the second holding portion 32 is disposed on the front side of the paper, and the first holding portion 31 has the tip of the contact 2 positioned thereon. The second holding body 32 guides the other end of the contact 2 to the connection electrode portion.
The first holding part 31 has a first holding hole 33 for guiding a predetermined contact 2 to a predetermined inspection point. The first holding hole 33 is formed so as to be larger than the outer diameter of the rod-shaped member 21 and the cylindrical member 22 of the contact 2 and smaller than the diameter of the insulating portion 23. By forming in this way, the contact 2 is prevented from coming out of the first holding hole 33 of the first holding part 31.
The second holding hole 32 has a second holding hole 34 for guiding the predetermined contact 2 to the predetermined connection electrode portion. The second holding hole 32 is formed so as to be larger than the outer diameter of the rod-shaped member 21 and the cylindrical member 22 of the contact 2 and smaller than the diameter of the insulating portion 23. By forming in this way, the contact 2 is prevented from coming out of the second holding hole 34 of the second holding portion 32.
By forming the first and second holding holes 33 and 34 in this way, the contact 2 is prevented from coming off from the contact holder 3.

The first holding part 31 and the second holding part 32 are arranged with a predetermined interval via the support column 35. For this reason, space is formed between the 1st holding | maintenance part 31 and the 2nd holding | maintenance part 32 by the support | pillar 35, and the contactor 2 can bend in this space.
The length of the space by the support 35 is appropriately set by the user.

In FIG. 2, the first holding part 31 is formed by two plate members. These plate members are provided as a plate member for forming the first holding hole 33 and a plate member for forming a screw hole for fixing to the support column 35. The number of these plate members is not particularly limited, and may be one or two or more as long as it has at least the above function.
In FIG. 2, the second holding portion 32 is formed of three plate members. These plate members are provided as a plate member for forming a second holding hole 34 and a plate member for forming a screw hole for fixing the support column 35. The number of these plate members is not particularly limited, and may be one or two or more as long as it has at least the above function.
The second holding portion 32 is formed of a plurality of plate members, and these plate members are arranged so as to be shifted by a predetermined length in the direction perpendicular to the contact 2 (the left-right direction in FIG. 2). preferable.
As described above, the plurality of plate members are gradually shifted so that the second holding hole 34 is inclined. For this reason, when the contact 2 is held by the contact holder 3, the contact 2 is lightly bent, and contact resistance with the plate member is generated, so that the contact 2 has stability. Will be retained.

The second holding portion 32 slides in the long axis direction of the contact 2 so that the contact 2 protrudes to the connection electrode portion side of the contact 2 when the contact 2 is brought into contact with the connection electrode portion. A protection unit 36 is provided.
As shown in FIG. 2, the protection portion 36 is disposed on the connection electrode portion side of the second holding portion 32, and a spring mechanism 37 is provided so as to slide in the long axis direction of the contact 2. .
The protection part 36 is formed of a plate member having a predetermined thickness, and protects the tip part of the contactor 2 (the part in contact with the connection electrode part) when the substrate inspection jig is not used.
For example, FIG. 4 shows the operation of this protection unit, FIG. 4 (a) shows a state when the substrate inspection jig is not used, and FIG. 4 (b) shows the substrate inspection jig. The state at the time of use is shown.
FIG. 4A shows a state where the contact 2 and the contact holder 3 of the board inspection jig are not connected to the connection electrode body 4. In this state, the connection electrode portion of the contact 2 is moved to. The contacting end is protected by a protection unit 36. Although the drawing shows a state in which the tip of the contact 2 slightly protrudes, the contact 2 may be accommodated inside the protection part 36.

FIG. 4B shows a state in which the contact 2 and the contact holder 3 of the board inspection jig are connected to the connection electrode body 4. In FIG. 4B, the connection electrode body 4 is omitted. In this state, the protection portion 36 slides and the contact 2 protrudes, and the protruded contact 2 comes into contact with the connection electrode portion.
In this case, the protection unit 36 comes into contact with the lower end of the second holding unit 32 and is biased by the spring of the spring mechanism 37. In addition, the protection part 36 tries to return to the position shown in FIG. 4A, but in the state of FIG. 4B, the connection electrode body 4 and the protection part 36, and the protection part 36 and the second holding part 32 respectively correspond. It will be in contact.
In FIG. 2, two protrusions 38 are provided for aligning the contact holder 3 and the connection electrode body 4 described later.

The connection electrode body 4 includes a connection electrode portion 41 that supports the contact holder 3 and accommodates part of the contact 2 therein.
The connection electrode portion 41 is formed in a hole shape extending from the surface of the connection electrode body 4 to the connection electrode body 4 in order to accommodate the contact 2 inside. By forming the connection electrode portion 41 in the shape of a hole extending inside the connection electrode body 4 in this way, a part of the contact 2 can be reliably accommodated inside the connection electrode portion 41. In this case, a part of the contact 2 can be brought into contact with the inner surface by forming an electrode portion on the inner surface of the connection electrode portion 41.
The connection electrode portion 41 is connected to the conductive wire 42. The conducting wire 42 is connected to the inspection signal processing unit as described above.

  It is preferable that the connection electrode part 41 has a shape in which the contact 2 can be loosely fitted. Since the connection electrode portion 41 can loosely fit the contact 2, when the contact 2 is accommodated in the connection electrode portion 41 or when the contact 2 is removed from the connection electrode portion 41, the contact 2 and the connection electrode portion This is because the frictional resistance with 41 can be reduced and can be easily extracted.

The connection electrode part 41 accommodates a part of the contact 2 inside, and uses the inner side surface of the connection electrode part 41 as an electrode part. For this reason, the connection electrode 41 can be formed in a conductive cylinder. In this case, the cylindrical connection electrode part 41 accommodates the contact 2 inside, and the cylindrical inner side surface functions as an electrode part.
In addition, this connection electrode part 41 arrange | positions a pipe | tube (pipe) so that it may become flush with the surface of the connection electrode body 4. FIG. By arranging in this way, the surface of the connection electrode body 4 is flush, and when the second holding part 32 and the protection part 36 are in contact with the connection electrode body 4, they are perpendicular to the surface of the connection electrode body 4. When the contactor 2 is pressed and bent in use, a uniform load can be applied to any contactor 2.

Since the contact electrode 2 enters and exits the connection electrode portion 41 depending on when the connection electrode portion 41 is used or not used, the length direction of the contact portion 2 is used to ensure contact with the connection electrode portion 41. It is preferable to arrange or form the connection electrode portions 41 so that the length directions of the connection electrode portions 41 intersect (relatively intersect).
As a specific example, for example, the connection electrode portion 41 is formed to be inclined or curved with respect to the long axis of the contact 2.
By forming the connection electrode portion 41 in this way, when the contact 2 is accommodated inside the connection electrode portion 41, the contact 2 is accommodated while rubbing the inner surface of the connection electrode portion 41. Can establish a contact state with the connection electrode part 41 reliably. In particular, by configuring in this way, it is possible to break the oxide film formed on the electrode part on the inner surface and the surface of the contact 2.

FIG. 5 shows an embodiment of the connection electrode part. The connection electrode part 41 shown in FIG. 5A is formed along the thickness direction of the connection electrode body 4. Even in such a case, when the contact 2 as described above is inclined, the contact 2 contacts the inner surface of the connection electrode portion 41 while rubbing.
FIG. 5B shows a case where the connection electrode portion 41 is formed to be inclined at a constant angle with respect to the surface of the connection electrode body 4. In this case, even if the contact 2 is accommodated on the surface of the connection electrode body 4 in a substantially right angle direction, it comes into contact with rubbing the inner surface of the connection electrode portion 41.
FIG.5 (c) shows the case where the connection electrode part 41 is formed in reverse letter shape. In this case, the contact 2 is rubbed in the same manner as in FIG. 5B and accommodated in the inside, and the connection electrode portion 41 forms a reverse inclination at the square apex portion. In this apex portion, the contact 2 reliably comes into contact with the inner surface.
FIG. 5D shows a case where the connection electrode portion 41 is formed to be curved. In this case, when the contact 2 is accommodated, the contact is made while rubbing the surface while curving along the inner surface of the connection electrode portion 41. Further, in this case, since the load applied to the contact 2 is lower than that in FIG. 5C, the contact 2 can be easily inserted and removed.
The shape of the connection electrode portion 41 shown in FIG. 5 is not limited to these, and is formed so that the accommodation direction of the connection electrode portion 41 intersects the entrance / exit direction of the contact 2. Can be set to By forming the connection electrode portion 41 in this way, the contact 2 is surely brought into contact with the inner surface of the connection electrode portion 41 and is accommodated while rubbing the inner surface when being accommodated. Therefore, the contact 2 having a low contact resistance value and a high stability of the contact resistance value can be connected to the connection electrode portion 41.

As another specific example, as shown in FIG. 6, the tip 2 </ b> A of the contact 2 accommodated in the connection electrode portion 41 is bent with respect to the long axis of the contact 2.
By bending the tip 2A of the contact 2 in this way, when the tip 2A of the contact 2 is accommodated in the connection electrode portion 41, the inner surface of the connection electrode portion 41 is rubbed and contacted. Become.
The contact 2 shown in FIG. 6 is bent from the central axis of the contact 2 so that the tip 2A of the contact 2 has a width W. The width W is preferably formed to be approximately the same as the inner diameter of the connection electrode portion 41. This is because the width W is formed to be substantially the same as the inner diameter of the connection electrode portion 41, so that the inner surface can be reliably contacted and the amount of bending (width) can be reduced.

FIG. 7 shows a state in which the substrate inspection jig according to the present invention is used.
In FIG. 7A, the accommodating portions 2 </ b> A of the plurality of contacts 2 are accommodated inside the connection electrode portion 41. Although not shown in FIG. 7A, when the accommodating portion 2 </ b> A of the contact 2 has a bent shape or the contact 2 is inclined, the contact is made in the connection electrode portion 41. When the child 2 is housed, it is brought into contact with the inner surface while being rubbed. In FIG. 7, the contact 2 is positioned approximately at the center of the connection electrode portion 41 for convenience.

When the contact 2 is accommodated in the connection electrode portion 41, the contact 2 holding body 3 and the connection electrode body 4 are relatively moved, so that the accommodation portion 2 </ b> A of the contact 2 is reliably connected to the inside of the connection electrode portion 41. It is preferable to press the surface.
In FIG. 7B, the contact holder 3 and the connection electrode body 4 are moved in a direction perpendicular to the long axis of the contact 2 to be surely brought into contact with the inner surface of the connection electrode portion 41. Is shown. For example, as shown in FIG. 7B, the connecting electrode body 4 is moved to the left of the drawing (in the direction of the black arrow in FIG. 7B), so that the housing portion 2 </ b> A of the contact 2 is connected to the connecting electrode portion 41. Press contact with the inner surface. Alternatively, the housing portion 2A of the contact 2 is pressed against the inner surface of the connection electrode portion 41 by moving the contact holder 3 to the right of the drawing (in the direction of the white arrow in FIG. 7B). Thus, by providing the sliding part which slides the contact holder 3 and / or the connection electrode body 4 in a direction perpendicular to the direction in which the contact 2 is put in and out, the housing part 2A of the contact 2 is placed inside the connection electrode part 41. It becomes possible to contact the side surface more stably.

FIG. 8 shows an embodiment of the sliding portion of the connection electrode body. The sliding portion shown in FIG. 8 includes the connection electrode body 4 having three first plate members 43, second plate members 44, and fourth plate members 45. A connection electrode portion 41 is formed so as to penetrate these three plate members. The first plate member 43 and the third plate member 45 are fixed members, and have a mechanism in which the second plate member 44 slides. For this reason, as shown in FIG. 8B, the second plate member 44 slides and presses the connection electrode portion 41 from the side surface side, and the connection electrode portion 41 becomes a curved shape and contacts 2 The housing portion 2A is pressed from the side surface to come into contact.
The connection electrode body 4 shown in FIG. 8 has been described using three plate members, but is not limited to three, and a sliding portion may be formed using a plurality of plate members. .

Next, another embodiment of the contact 2 and the contact holder 3 will be described.
FIG. 9 shows another embodiment of the contact 2 and the contact holder 3. In this embodiment, the accommodating portion 2A of the contact 2 used is bent with respect to the long axis of the contact 2 (see FIG. 6). The contact portion 2A of the contact 2 is bent, but when not in use, the protective portion 36 (through hole thereof) holds the storage portion 2A of the contact 2 and the contact 2 has a straight shape. To hold. When the substrate inspection jig of this embodiment is used, the protection part 36 is pushed up and the contact 2 protrudes from the protection part 36. At this time, the housing part 2A of the contact 2 is Since it is formed to bend, it is bent in a predetermined direction.
When the board inspection jig is attached to the connection electrode body 4, the protection section 36 is aligned with the connection electrode section 41 of the connection electrode body 4 and is in contact with the connection electrode body 4. 36 is pushed up, the contact 2 is accommodated in the connection electrode part 41, and the accommodation part 2A of the contact 2 comes into contact with rubbing the inner surface of the connection electrode part 41.

Still another embodiment will be described.
FIG. 10 shows still another embodiment of the contact 2 and the contact holder 3. In this embodiment, a space S is formed between the second holding part 32 or the protection part 36 and the connection electrode body 4.
In FIG. 10, a space S is formed between the contact holder 3 and the connection electrode body 4, and the space 2 is bent when the storage portion 2 </ b> A of the contact 2 is stored in the connection electrode portion 41. Since the accommodating portion 2A can be bent in the space S in this way, the amount of bending of the accommodating portion 2A is pressed to the accommodating portion 2A at the location where it is accommodated in the connection electrode portion 41 and contacts the inner surface of the connection electrode portion 41 Will start. For this reason, 2 A of accommodating parts will contact the inner surface of the connection electrode part 41 stably.
Further, in this embodiment, the connection electrode body 4 is slid (moved in the direction of the arrow) so that the contact 2 stably contacts the connection electrode portion 41.
It is description of the structure of the jig | tool for board | substrate inspection which concerns on this invention.

Next, an embodiment of the substrate inspection jig according to the present invention will be described.
FIG. 11 shows an embodiment of a substrate inspection jig implemented in the present invention.
In the contact 2 shown in this embodiment, a rod-shaped member 21 having a length of 30 mm and a diameter of 90 μm is formed using tungsten as a material, and the insulating portion 23 is formed so that the length of the accommodating portion 2A is 2 mm.
The connection electrode portion 41 is a conductive pipe having an inner diameter of 95 μm and an outer diameter of 125 μm, and the inner surface of this pipe is subjected to gold plating.
In one embodiment shown in FIG. 11, the connection electrode body 4 is formed of a first plate-like portion 43, a second plate-like portion 44, a third plate-like portion 45, and a fourth plate-like portion 46, and A sliding portion 47 for moving the two plate-like portion 44 in the lateral direction is provided. The first plate-like portion 43 and the third plate-like portion 45 are fixed members, and the fourth plate-like portion 46 is used as a base for the substrate inspection jig 1 ′.
The connection electrode part 41 is formed so as to penetrate the first to third plate-like parts.
The sliding part 47 can move the second plate-like part 44 to the left and right. The sliding portion 47 has a pair of left and right screw mechanisms, and the position of the second plate-like portion 44 can be adjusted by adjusting the left and right screws.
In FIG. 11A, a space is formed between the second holding part 32 and the protection part 36, and is in a state of not being used.

FIG. 11B shows a state where the substrate inspection jig 1 ′ is used. At this time, the second holding part 32 and the protection part 36 come into contact with each other, and the accommodation part 2A of the contact 2 is accommodated in the connection electrode part 41. And the accommodating part 2A of this contactor 2 will be in the state which contacted, rubbing the inner surface of the connection electrode part 41, and can establish a conduction | electrical_connection state.
Moreover, in this board | substrate test | inspection jig | tool 1 ', it has the sliding part 47 on either side, and after the accommodating part 2A of the contactor 2 is accommodated in the connection electrode part 41, a connection electrode is adjusted by adjusting a screw. The second plate-like portion 44 of the body 4 is moved in the lateral direction. At this time, the second plate-like portion 44 portion of the connection electrode portion 41 is in a curved state as the second plate-like portion 44 moves, and the inner surface of the connection electrode portion 41 and the contact 2 are pressed. .
In this embodiment, the contact 2 is also inclined and held by the contact holder 3, and the connection electrode body 4 has the sliding portion 47, so that the contact 2 is on the inner surface of the connection electrode portion 41. Can be housed while being rubbed and contacted stably to establish a conduction state.

FIG. 12 shows the result of measuring the resistance of the contactor including the contact resistance between the substrate inspection jig according to the present invention and the substrate inspection jig having the conventional electrode structure. In this experiment, a substrate inspection jig was set to be used, and a plate with gold plating on one side was placed on the substrate 2 to be inspected (the other side of the housing portion 2A) as a substrate to be inspected. And press the substrate to be inspected. At this time, the resistance value between the conducting wire 42 of the contact electrode portion 41 and the substrate to be inspected is measured. For this reason, this resistance value includes the contact resistance between the connection electrode portion 41 and the contact 2 and the resistance of the contact 2 itself, and the contact resistance between the contact 2 and the substrate to be inspected.
The “number of times” shown in FIG. 12 represents the number of shots indicating how many times the button has been pressed.

From FIG. 12, the substrate inspection jig according to the present invention has a resistance value in the range of 420 to 570 m ohm (0.15 ohm in width), whereas the substrate inspection having the conventional connection electrode. The jig is present in the 1.5 to 5.5 ohm range (4 ohms in width). It will be understood whether the present invention has a very low contact resistance value as compared with the conventional jig, and it is understood that the deviation of the contact resistance value accompanying an increase in the number of shots is also extremely small.
For this reason, by using the jig of the present invention, the contact resistance value can be reduced, and even when the contact resistance value is processed as a correction value, a deviation due to an increase in the number of shots may occur. Therefore, it is not necessary to correct the correction value, and it can be used extremely stably.

The outline of the structure in the case of using the jig for substrate inspection concerning the present invention is shown. The schematic structure of the jig | tool for board | substrate inspection which concerns on this invention is shown, and the position structure of a contactor, a contactor holding body, and a connection electrode body is shown. 1 shows one embodiment of a contact. (A) is a rod-shaped member, (b) is a rod-shaped member and a cylindrical member, (c) is a rod-shaped member, a cylindrical member, and an insulating part. FIG. 4A shows the state of the protection unit when it is not used, and FIG. 4B shows the state when the substrate inspection jig is used. ing. (A)-(d) shows one Embodiment of a connection electrode part, respectively. 3 shows another embodiment of a contact. The state which uses the jig | tool for board | substrate inspection which concerns on this invention is shown. An embodiment of the sliding part which a connection electrode body has is shown. The other embodiment of the contact which concerns on this invention and a contact holder is shown. The further another embodiment of the contactor and contactor holding body which concern on this invention is shown. 1 shows an embodiment of a substrate inspection jig implemented in the present invention. The result of having measured the resistance of the contactor including the contact resistance of the board | substrate inspection jig | tool concerning this invention and the board | substrate inspection jig | tool which has the conventional electrode structure is shown.

Explanation of symbols

1 ... Jig for substrate inspection 1 '... Jig for substrate inspection (another embodiment)
2... Contact 2 A... Housing 3... Contact holder 31... First holder 32... Electrode body 41... Connection electrode portion

Claims (9)

A substrate inspection jig for obtaining electrical continuity between a substrate inspection apparatus main body and a plurality of substrate inspection points provided in a wiring pattern of the inspection substrate in order to inspect the electrical characteristics of the inspection substrate. Because
The substrate inspection jig is
A contact group composed of conductive and flexible rod-shaped contacts having ends for electrical conduction at both ends;
A contact holder for holding the contact group;
A connection electrode body connected to the substrate inspection apparatus main body, comprising a connection electrode portion disposed opposite to the other end of each contact of the contact group;
When one end of the contact is pressed against one of the substrate inspection points and the other end is pressed against the connection electrode, the contact from the substrate inspection point and the connection electrode In response to the pressure contact, the contact bends,
The connection electrode body is formed in a cylindrical shape that loosely fits at least a part of the other end of the opposing contact and holds it inside.
When the contact is bent in response to the pressure contact, the other end and the inner peripheral surface of the tube of the connection electrode portion facing the other end are brought into electrical conduction. A board inspection jig.   The substrate inspection jig according to claim 1, wherein the connection electrode portion is formed to be inclined or curved with respect to a long axis of the contact. The connection electrode portion is formed in a laminated structure composed of a plurality of plate members,
The substrate inspection jig according to claim 1 , wherein at least one plate member of the connection electrode portion has a sliding portion that slides in a direction perpendicular to an entering / exiting direction of the contact.   The substrate inspection jig according to claim 1, wherein the other end of the contact is bent with respect to the long axis of the contact. The contact holder includes a first holding portion having a first holding hole for holding the vicinity of one end of the contact, and a second holding hole for holding the vicinity of the other end of the contact. Having a second holding part,
The substrate inspection jig according to claim 1, wherein the second holding portion is disposed in contact with the electrode body. The contact holder includes a first holding portion having a first holding hole for holding the vicinity of one end of the contact, and a second holding hole for holding the vicinity of the other end of the contact. Having a second holding part,
The substrate inspection jig according to claim 1, wherein the second holding portion is disposed with a predetermined distance from the electrode body.   The contact holder includes a protective portion that slides in the long axis direction of the contact so that the contact protrudes when the other of the contacts is brought into contact with the connection electrode portion. The substrate inspection jig according to claim 1.   2. The substrate inspection according to claim 1, wherein the range in the vicinity of the other end portion is a range in which a side peripheral surface of the other end portion can contact at least the connection electrode portion during the connection. Jig. In order to inspect the electrical characteristics of the substrate to be inspected, in order to obtain electrical continuity between the substrate inspection apparatus main body and a plurality of substrate inspection points provided in the wiring pattern of the substrate to be inspected, one end of the substrate to be inspected a contact which is pressed in order to conductively contacted to the inspection point, have a connection electrode body to be connected with the substrate inspecting device body in conduction contact with the contactor, the contactor is the one end the When the other end is pressed against the connection electrode portion while being pressed against one of the board inspection points, the contact is bent according to the pressure contact from the substrate inspection point and the connection electrode portion. , An electrode structure of a connection electrode portion in conductive contact with the other end of the contact,
The connection electrode part is
It is formed in a cylindrical shape that loosely fits at least a part of the other end of the opposing contact and holds it inside.
The electrode of the connection electrode part , wherein when the contact is bent in response to the press contact, the other end and the inner peripheral surface of the tube of the connection electrode part facing the other end are in contact with each other Construction.

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