CN101443669B - Substrate inspecting jig, and electrode structure of connecting electrode unit in the jig - Google Patents
Substrate inspecting jig, and electrode structure of connecting electrode unit in the jig Download PDFInfo
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- CN101443669B CN101443669B CN2007800174904A CN200780017490A CN101443669B CN 101443669 B CN101443669 B CN 101443669B CN 2007800174904 A CN2007800174904 A CN 2007800174904A CN 200780017490 A CN200780017490 A CN 200780017490A CN 101443669 B CN101443669 B CN 101443669B
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- feeler lever
- connection electrode
- electrode portion
- jig
- opposing party
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/0675—Needle-like
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
Abstract
Provided is a substrate inspecting jig, which can reduce a contact resistance between a contact maker and a connecting electrode unit and which has a stable contact resistance without regard to the number of uses. In order to inspect the electric characteristics of an object substrate, the substrate inspecting jig acquires the electric conductions between a substrate inspecting device body and a plurality of substrate inspection points formed at the wiring pattern of the object substrate. The substrate inspecting jig comprises a group of electrically conductive contacts having two end portions for electric conductions, one of which is forced to contact with one of the substrate inspection points, a contact holder for holding the contact group, and a connecting electrode member including the connecting electrode unit arranged to confront the other end portions of the individual contacts of the contact group and adapted to be connected with the substrate inspecting device body. At least a portion of the side circumference near each of the other end portions is brought, when the other end portions of the contact group and the connecting electrode member are to be connected, into contact with a portion of the confronting connecting electrode unit thereby to establish the electrically conductive state.
Description
Technical field
The electrode structure of jig for inspecting substrate that uses when the present invention relates to check substrate and the connection electrode portion in the jig for inspecting substrate particularly relates to electrode structure and the gauging fixture with this electrode structure of jig for inspecting substrate of contact resistance of the electrode part of the feeler lever that can reduce jig for inspecting substrate and jig for inspecting substrate.
The invention is not restricted to the printed circuit board wiring substrate; For example go for the inspection of the electric wiring on the various substrates such as plug-in unit substrate, film carrier or semiconductor wafer that battery lead plate that flexible cable substrate, multi-layer wire substrate, LCD or plasma scope use and semiconductor subassembly use; In this instructions, be referred to as " substrate " to this all circuit board.
Background technology
In the past; Be arranged on wiring figure on the circuit substrate must be correctly electrical signal transfer to being loaded into electric, electronic components such as semiconductors such as IC on this circuit substrate or resistor; Measure the resistance value between the checkpoint that is arranged on the wiring figure that becomes the inspection object so formed the wiring figure that forms on the substrate of wiring substrate or semiconductor wafer etc. of wiring figure on printed circuit board wiring substrate, liquid crystal panel or the plasm display panel before, the electronic component electric, judge whether it is good installing.
In this judgement inspection, implement the broken string of inspection wiring figure and the inspection method of short circuit.In the inspection of such conducting or short circuit; Each is measured terminal abuts against respectively on the checkpoint that is arranged on two places that become the wiring figure of checking object; Measure the mensuration that flows through prescribed level between terminal at it and use electric current; Measure it thus and measure the magnitude of voltage between terminal, relatively this magnitude of voltage and predetermined threshold value, thus carry out whether good judgement.
But; The jig for inspecting substrate that uses in this way; Under the situation of each the mensuration terminal when the mensuration of measuring with the supply of electric current and voltage on each checkpoint at shared two places that abut against wiring figure; The contact resistance of measuring between terminal and the checkpoint will influence mensuration voltage, and the mensuration precision of resistance value will descend, and the reliability of testing result reduces.
Particularly, the miniaturization degree that is arranged on the wiring figure on the circuit substrate in recent years improves, and the resistance value of wiring figure reduces, and above-mentioned contact resistance has just become big problem to the influence of this measured value.
In order to solve the problem of this contact resistance, the scheme of the feeler lever of patent documentation 2 displayings has been proposed.This feeler lever has can omit the contact site of the summary linearity of the electrode of contact measurement object vertically, and the material that is had the different heat expansion rate by other parts of a part of extending along the length direction of this contact site and this contact site constitutes.According to such formation; Owing to constitute thermometal; So under the environment provided temperature, make the contact site electrode of contact measurement object slightly vertically; If under this state, carry out overexcitation, just make this contact site crooked to the part that constitutes by the little material of coefficient of thermal expansion from the heat of the environment temperature of the electrodes transfer of this determination object.
But, even if use such feeler lever, also only can make its vertical junction touched electrode portion, and consider from the viewpoint of so-called contact stabilization, can't say low being connected of sufficient contact stabilization and contact resistance value.
Patent documentation 1: the spy opens flat 6-66832 communique
Patent documentation 2: the spy opens the 2005-345129 communique
Summary of the invention
In view of above-mentioned reality; The gauging fixture that the object of the present invention is to provide a kind of electrode structure of jig for inspecting substrate and have the kind electrode structure, kind electrode structure can reduce the contact resistance of electrode part of feeler lever and the jig for inspecting substrate of jig for inspecting substrate.
The invention of claim 1 record provides a kind of jig for inspecting substrate; The electrical specification of being examined substrate for inspection realizes the base board checking device main body and is arranged on a plurality of substrates on this wiring figure of being examined substrate receiving the electrically conducting between cautious, it is characterized in that said jig for inspecting substrate has the feeler lever crowd, supports said feeler lever crowd's feeler lever support and is connected the connection electrode body on the said base board checking device main body; This feeler lever crowd is made up of the bar-shaped feeler lever of electric conductivity, and the two ends of this feeler lever have the end of realizing electrically conducting, and a square end portion said substrate of crimping is examined; This connection electrode body possesses connection electrode portion, and this connection electrode portion is in the face of the opposing party end of each feeler lever of said feeler lever crowd; In the said the opposing party end that connects said feeler lever crowd during with said connection electrode body, the part of at least a portion of the lateral circle surface nearby of each said the opposing party end contacts and it is faced mutually said connection electrode portion becomes the electrically conducting state therefrom.
The invention of claim 2 provides a kind of jig for inspecting substrate of claim 1 record; It is characterized in that said connection electrode portion has the structure of accommodating with said the opposing party end of its said feeler lever of facing mutually, and the contacting of the inner lateral surfaces of said feeler lever and the conducting state of said connection electrode portion the opposing party end of depending on this feeler lever at least and this connection electrode portion.
The invention of claim 3 provides the jig for inspecting substrate of a kind of claim 1 or 2 records, it is characterized in that said connection electrode portion is at least a portion shape movingly that can make with said the opposing party end of its said feeler lever of facing mutually.
The invention of claim 4 provides the jig for inspecting substrate of a kind of claim 1 or 2 records, it is characterized in that said connection electrode portion is formed tubular.The invention of claim 5 provides the jig for inspecting substrate of a kind of claim 1 or 2 records, and the major axis that it is characterized in that the said relatively feeler lever of said connection electrode portion tilts or be crooked and form.The invention of claim 6 provides the jig for inspecting substrate of a kind of claim 1 or 2 records, it is characterized in that said connection electrode portion has the slipping part that goes out Inbound and right angle orientation slip along said feeler lever.
The invention of claim 7 provides the jig for inspecting substrate of a kind of claim 1 record, it is characterized in that said feeler lever the said relatively feeler lever in the opposing party end major axis and form.
The invention of claim 8 provides a kind of jig for inspecting substrate of claim 1 record; It is characterized in that said feeler lever support has first support sector and second support sector; This first support sector has first supporting hole nearby of a square end portion that supports said feeler lever, and this second support sector has second supporting hole nearby of the opposing party end of supporting said feeler lever; Said second support sector is configured to such an extent that be abutted against mutually with said electrode body.
The invention of claim 9 provides a kind of jig for inspecting substrate of claim 1 record; It is characterized in that said feeler lever support has first support sector and second support sector; This first support sector has first supporting hole nearby of a square end portion that supports said feeler lever, and this second support sector has second supporting hole nearby of the opposing party end of supporting said feeler lever; Said second support sector is configured to such an extent that have predetermined distance with said electrode body.
The invention of claim 10 provides a kind of jig for inspecting substrate of claim 1 record; It is characterized in that said feeler lever support possesses the protection portion of sliding along the long axis direction of this feeler lever; So that when the opposing party who makes said feeler lever contacted said connection electrode portion and uses, this feeler lever was outstanding.
The invention of claim 11 provides the jig for inspecting substrate of a kind of claim 1 record, and the scope nearby that it is characterized in that said the opposing party end is the scope that the lateral circle surface of said the opposing party end when said the connection contacts said connection electrode portion at least.
The invention of claim 12 record provides a kind of connection electrode portion; This connection electrode portion is connected with feeler lever; And as the component part of connection electrode body; Receive the electrically conducting between cautious in order to realize the base board checking device main body and to be arranged on a plurality of substrates on this wiring figure of being examined substrate, examined the electrical specification of substrate, an end of said feeler lever be crimped on said substrate receive cautious on and its conducting is contacted; Its opposing party end then contacts with said connection electrode portion conducting; And said connection electrode body is connected on this base board checking device main body, when it is characterized in that in the opposing party end that connects said feeler lever with this connection electrode body, and the part of at least a portion of the lateral circle surface nearby of the opposing party end of said feeler lever contacts and it is faced mutually said connection electrode portion.
Invention according to claim 1 record; A kind of jig for inspecting substrate is provided; Because when the opposing party end that connects the feeler lever crowd and connection electrode body, at least a portion contact of the lateral circle surface nearby of the opposing party end of feeler lever becomes the electrically conducting state with the part of its connection electrode portion that faces mutually, so can reduce the contact resistance value of feeler lever and connection electrode portion; Have the stable contact resistance value simultaneously, and irrelevant with access times.
Invention according to claim 2 record; A kind of jig for inspecting substrate is provided; Because the opposing party end that feeler lever and the conducting state of connection electrode portion depend on feeler lever at least contacts with the inner lateral surfaces of connection electrode portion, so the contact area of feeler lever and connection electrode portion can be done greatly, can reduce contact resistance value more; Have the stable contact resistance value simultaneously, and irrelevant with access times.
Invention according to claim 3 record provides a kind of jig for inspecting substrate, because connection electrode portion can make feeler lever shape movingly, so can prevent to bear when feeler lever from coming in and going out connection electrode portion excessive load.
Invention according to claim 4 record provides a kind of jig for inspecting substrate, because connection electrode portion forms tubular, so can make the surface of contact of feeler lever contact equably, no matter with which tin portion contact, contact resistance value all is stable.
Invention according to claim 5 record; A kind of jig for inspecting substrate is provided, owing to the major axis of the said relatively feeler lever of connection electrode portion tilts or crooked formation, so feeler lever is come in and gone out during connection electrode portion; The inner lateral surfaces that feeler lever is being wiped connection electrode portion contacts with it; Can reduce the contact resistance value of feeler lever and connection electrode portion, have the stable contact resistance value simultaneously, and irrelevant with access times.
Invention according to claim 6 record; A kind of jig for inspecting substrate is provided, because connection electrode portion has the slipping part that goes out Inbound and right angle orientation slip along feeler lever, so when feeler lever being accommodated in the connection electrode portion; Feeler lever is contacted with connection electrode portion; Can reduce the contact resistance value of feeler lever and connection electrode portion, have the stable contact resistance value simultaneously, and irrelevant with access times.
Invention according to claim 7 record; A kind of jig for inspecting substrate is provided, owing to the major axis of the relative feeler lever of the opposing party of feeler lever forms, so feeler lever is come in and gone out during connection electrode portion; Feeler lever is being wiped the inner lateral surfaces of connection electrode portion and is being contacted with it; Can reduce the contact resistance value of feeler lever and connection electrode portion, have the stable contact resistance value simultaneously, and irrelevant with access times.
Invention according to claim 8 record provides a kind of jig for inspecting substrate, because the feeler lever support is made up of two parts, a side support sector and connection electrode body are abutted against, so can positively feeler lever be imported connection electrode portion.
Invention according to claim 9 record; A kind of jig for inspecting substrate is provided, because the feeler lever support is made up of two parts, a side support sector and connection electrode body have predetermined space; So feeler lever can be crooked in the space that is formed by this predetermined space; When making feeler lever come in and go out connection electrode portion, feeler lever is being wiped the inner lateral surfaces of connection electrode portion and is being contacted with it, can reduce the contact resistance value of feeler lever and connection electrode portion; Have the stable contact resistance value simultaneously, and irrelevant with access times.
Invention according to claim 10 record provides a kind of jig for inspecting substrate, because the feeler lever support has the protection portion of protection feeler lever, so use or can protect feeler lever effectively when not using feeler lever, can prolong the serviceable life of feeler lever.
Invention according to claim 11 record; A kind of jig for inspecting substrate is provided; At least contact the scope of said connection electrode portion because the scope nearby of the opposing party end is the lateral circle surface of said the opposing party end when said the connection,, can reduce the contact resistance value of feeler lever and connection electrode portion so can do the contact area of feeler lever and connection electrode portion greatly; Have the stable contact resistance value simultaneously, and irrelevant with access times.
Invention according to claim 12 record; A kind of connection electrode portion of jig for inspecting substrate is provided; Because when the opposing party end that connects feeler lever and connection electrode body, at least a portion contact of the lateral circle surface nearby of the opposing party end of feeler lever and the part of its connection electrode portion that faces mutually are so can reduce the contact resistance value of feeler lever and connection electrode portion; Have the stable contact resistance value simultaneously, and irrelevant with access times.
Description of drawings
Summary when Fig. 1 representes to use jig for inspecting substrate of the present invention constitutes.
Fig. 2 representes that the summary of jig for inspecting substrate of the present invention constitutes, expression be the positional structure of feeler lever, feeler lever support and connection electrode body.
Fig. 3 representes a kind of embodiment of feeler lever, and (a) expression is rod member, and (b) expression is rod member and cylindrical member, and (c) expression is rod member, cylindrical member and insulation division.
Fig. 4 representes the action of this protection portion, Fig. 4 (a) expression be the state of jig for inspecting substrate when not using, Fig. 4 (b) expression be the state of jig for inspecting substrate when using.
Fig. 5 (a)～(d) representes the embodiment of connection electrode portion respectively.
Fig. 6 representes other embodiments of feeler lever.
Fig. 7 representes to use the state of jig for inspecting substrate of the present invention.
Fig. 8 representes the embodiment of the slipping part that the connection electrode body has.
Fig. 9 representes other embodiments of feeler lever of the present invention and feeler lever support.
Figure 10 representes other other embodiments of feeler lever of the present invention and feeler lever support.
The embodiment of the jig for inspecting substrate that Figure 11 representes among the present invention to be implemented.
Figure 12 representes to measure the result of jig for inspecting substrate of the present invention and the resistance of the feeler lever that comprises contact resistance of the inspecting substrate anchor clamps with original electrode structure.
The explanation of symbol
1 ... Jig for inspecting substrate
1 ' ... Jig for inspecting substrate (other embodiments)
2 ... Feeler lever
2A ... The resettlement section
3 ... The feeler lever support
31 ... First support sector
32 ... Second support sector
4 ... The connection electrode body
41 ... Connection electrode portion
Embodiment
Below, the best mode of embodiment of the present invention is described.
Summary when Fig. 1 representes to use jig for inspecting substrate of the present invention constitutes.Among this Fig. 1, represent a plurality of feeler lever 101, with these feeler levers 101 be fixed as the spininess shape support 102, have this support 102 of supporting and contact feeler lever 101 simultaneously and realize the inspection signal processing part 104 of the connection electrode body 103 of the connection electrode portion of conducting, electric signal that processing and detecting arrives and connect inspection with feeler lever 101 with check the electric wire 105 of signal processing part 104.Feeler lever 101 is terminals that contact is formed on each checkpoint of being examined the wiring figure on the substrate, and connection electrode body 103 carries out feeler lever 101 and the pitch conversion of checking signal processing part 104, and they are electrically connected.
The jig for inspecting substrate 1 of embodiment of the present invention has feeler lever 2, feeler lever support 3 and connection electrode body 4 (with reference to Fig. 2).Connection electrode body 4 is connected on the above-mentioned inspection signal processing part 104, but on this Fig. 2, has omitted.
This feeler lever 2 is owing to have flexibility, thus after in the space that forms, the inside of the feeler lever support 3 stated, this feeler lever 2 just can be with respect to long axis direction bending (shrinkage) on right angle orientation of feeler lever 2.Therefore, using under the situation of this feeler lever 2, bearing from the loading of the checkpoint of being examined substrate or connection electrode portion and bending, this bending will be to each contact site generation roof pressure power.
As long as feeler lever 2 forms above-mentioned shape, just do not limit especially, but can image pattern 3 illustrated embodiment that kind form yet.
Shown in Fig. 3 (a), this feeler lever shown in Figure 32 is formed the elongated rod member 21 that two front ends are the taper shape.The taper shape both can be the sharp shape shown in Fig. 3 (a), also can be spherical.
This rod member 21 for example can be stainless steel, beryllium-bronze (BeCu) or tungsten (W), but is not particularly limited, so long as conductive materials just can.
Bear load equably for the contact area that makes the connection electrode portion that states after these rod member 21 contacts, preferably this member is formed cylinder or cylindric, but this is not particularly limited.
Do not limit the length or the thickness of rod member 21 especially, suitably set, make it be fit to be formed on the pitch of being examined the wiring figure on the substrate or the size of being examined substrate.
On Fig. 3 (b), represented to be housed in the state in the cylindrical member 22 to rod member 21.This cylindrical member 22 has flexibility and electric conductivity; Rod member 21 is inserted in this cylindrical member 22; On Fig. 3 (b); When relatively an end 22a of cylindrical member 22 is with other end 22b, be set than long from the length of the outstanding rod member 21 of other end 22b from the length of the outstanding rod member 21 of an end 22a.
Under the above-mentioned situation, an end 22a contacts with connection electrode portion, and other end 22b contacts with the checkpoint of being examined substrate.Make the length variations of such configuration just can increase the contact area of rod member 21 contact connection electrode portions; And because rod member 21 is set shortlyer from the outstanding length of other end 22b; So when the checkpoint of feeler lever contact exoncoma and so on; Cylindrical member 22 can play and prevent that rod member 21 from too penetrating the block effect of checkpoint, can stably contact the checkpoint of spherical exoncoma and so on simultaneously.In addition, can realize contacting of 22 pairs of checkpoints of rod member 21 and cylindrical member, and not depend on the processability of the front end shape of rod member 21.
As stated, the overhang of the rod member 21 of this other end 22b side can be set shortlyer than an end 22a, also can as above state bright that kind simultaneously and be set at the amount (length) that penetrates the checkpoint.
This cylindrical member 22 can be housed in inside with rod member 21, and so long as can become the size with rod member 21 conducting states, does not just limit especially.
As additive method, can be at a plurality of protruding parts of the set inside of cylindrical member 22 (not shown), thus the fixed sturcture that makes cylindrical member 22 have extruding rod member 21, thus, cylindrical member 22 just can contact rod member 21 and realize electrically conducting.
The rod member 21 of Fig. 3 (c) and cylindrical member 22 are by integrated, and the table side face of cylindrical member 22 is provided with insulation division 23.Shown in Fig. 3 (c), the place that forms this insulation division 23 is formed on an end of feeler lever 2 and the place beyond the other end.The 3 last times of feeler lever support that the step 24 that is formed by this insulation division 23 and cylindrical member 22 is stated after just being used as feeler lever 2 being configured in by portion only.
When feeler lever 2 bendings,, also can prevent short circuit even this insulation division 23 contacts with the feeler lever 2 of adjacency.
This insulation division 23 can use polyurethane, but does not do special qualification.
In above-mentioned explanation, explained and used rod member 21, cylindrical member 22 and insulation division 23 to constitute the situation of feeler lever 2, but also can use the feeler lever that constitutes by rod member 21 and insulation division 23, do not constitute the structure qualification of feeler lever in these.
In this manual; Being designated as symbol 2A to a part that is housed in the feeler lever 2 in the connection electrode portion 41 is illustrated; This resettlement section 2A of feeler lever 2 is not for forming the end of feeler lever 2 of insulation division 23, for example, is the part (part of length L) from the front end of feeler lever 2 to the feeler lever 2 of step 24.This partial L needn't be housed in the connection electrode portion fully, but preferably accommodates part as much as possible.
According to the length L that is housed in this part of suitable length ground setting in the connection electrode portion, but in order to reach abundant stable contact state (conducting state), the length L of this part is preferably about 2～5mm.
This part of feeler lever 2 is equivalent to feeler lever the opposing party end, and at least a portion of the lateral circle surface of this part will contact with connection electrode portion 41.
The feeler lever crowd that 3 supports of feeler lever support are made up of a plurality of feeler levers 2, as shown in Figure 2, in order to hold on a plurality of feeler levers 2, this feeler lever support 3 has first support sector 31 and second support sector 32.
Owing to form first supporting hole 33 and second supporting hole 34 like this, break away from this feeler lever support 3 so can prevent feeler lever 2.
The length in the space that this pillar 35 forms is set by the user aptly.
Among Fig. 2, form first support sector 31, these plates are made be used for forming the plate of first supporting hole 33 and the plate that formation is used for fixing the screw on pillar 35 with two plates.The quantity of these plates is not done special qualification, as long as have above-mentioned function at least, a slice perhaps can more than two.
Among Fig. 2, form second support sector 32, these plates are made be used for forming the plate of second supporting hole 34 and the plate that formation is used for fixing the screw on pillar 35 with three plates.The quantity of these plates is not done special qualification, as long as have above-mentioned function at least, a slice perhaps can more than two.
The configuration multi-disc that like this, gently staggers plate just is formed obliquely second supporting hole 34.Therefore, be supported in feeler lever 23 last times of feeler lever support, feeler lever 2 is just crooked lightly, will produce the contact resistance with plate, just can stably hold on feeler lever 2.
As shown in Figure 2, this protection portion 36 is configured in the side of second support sector 32 near connection electrode portion, simultaneously in order to slide along the long axis direction of feeler lever 2 and to be provided with spring device 37.
This protection portion 36 is formed by the plate of specific thickness, when the inspecting substrate anchor clamps do not use, and the leading section (part that contacts with connection electrode portion) of protection feeler lever 2.
For example, among Fig. 4, just expression has the action of this protection portion, and Fig. 4 (a) is represented is the state of jig for inspecting substrate when not using, and Fig. 4 (b) is represented is the state of jig for inspecting substrate when using.
Fig. 4 (b) is represented is that the feeler lever 2 of jig for inspecting substrate is connected the state on the connection electrode body 4 with feeler lever support 3, has omitted connection electrode body 4 on this Fig. 4 (b).Under this state, protection portion 36 slides, and feeler lever 2 is outstanding, and this outstanding feeler lever 2 just contacts with connection electrode portion.
In this case, protection portion 36 leans against on the lower end of second support sector 32, and the spring of spring device 37 produces elastic force simultaneously.There is the trend that turns back to the position shown in Fig. 4 (a) in protection portion 36, still, under the state of Fig. 4 (b), the state that connection electrode body 4 and protection portion 36, protection portion 36 and second support sector 32 are abutted against respectively.
Among Fig. 2, be provided with two carry out feeler lever support 3 with after the protruding part 38 of connection electrode body 4 contrapositions stated.
This connection electrode portion 41 form from the surface of connection electrode body 4 to the inside of connection electrode body 4 extend poroid so that feeler lever 2 is housed in inside.Because connection electrode portion 41 forms the poroid of the inside that extends to connection electrode body 4 like this, so can positively be housed in the part of feeler lever 2 inside of connection electrode portion 41.In this case, the part of feeler lever 2 forms electrode part on the inner lateral surfaces of connection electrode portion 41, so the part of feeler lever 2 can contact with inner lateral surfaces.
In addition, this connection electrode portion 41 disposes tube (pipe), and becomes a face together with the surface of connection electrode body 4.Be configured like this; Connection electrode portion 41 is surperficial concordant with connection electrode body 4 just; Under the situation that second support sector 32 or protection portion 36 and connection electrode body 4 are abutted against; Just can dispose at right angles, in use be crimped and when crooked, to which feeler lever 2 uniform loading of can both loading at feeler lever 2 to the surface of connection electrode body 4.
Since when using or when use feeler lever 2 go into out in the connection electrode portion 41, so for feeler lever 2 contact with connection electrode portion 41, the length direction of the length direction of feeler lever 2 and connection electrode portion 41 preferably intersect (intersection relatively) dispose or formation.
As this concrete example, for example tilt or be bent to form connection electrode portion 41 with respect to the major axis of feeler lever 2.
Owing to form like this connection electrode portion 41, feeler lever 2 is being housed in connection electrode portion 41 when inner, just can wipe in connection electrode portion 41 inner surfaces are housed in it, can positively establish the contact condition of feeler lever 2 and connection electrode portion 41.Particularly, owing to constitute like this, the oxide film that forms on just can the surface with the electrode part of inner surface or feeler lever 2 destroys.
Fig. 5 representes an embodiment of connection electrode portion.Connection electrode portion 41 shown in Fig. 5 (a) forms along the thickness direction that is parallel to connection electrode body 4.Even if in this case, when tilted configuration feeler lever 2 as above-mentioned, feeler lever 2 also can wiped connection electrode portion 41 inner lateral surfaces and be in contact with it.
Fig. 5 (b) expression forms the situation of connection electrode portion 41 with respect to the surface tilt certain angle of connection electrode body 4.In this case, even accommodate feeler lever 2, also can wipe connection electrode portion 41 inner lateral surfaces and be in contact with it along the surperficial approximate right angle direction of relative connection electrode body 4.
Fig. 5 (c) expression forms connection electrode portion 41 situation of anti-ㄑ font.In this case; The same connection electrode portion 41 inner lateral surfaces of wiping with Fig. 5 (b) of feeler lever 2 are in contact with it and are housed in connection electrode portion 41 inside; Simultaneously because connection electrode portion 41 forms inclination in the other direction in the apex of ㄑ font, so feeler lever 2 also can contact with inner lateral surfaces in this apex reliably.
Fig. 5 (d) expression is bent to form the situation of connection electrode portion 41.In this case, when accommodating feeler lever 2, feeler lever 2 is crooked along the inner lateral surfaces of connection electrode portion 41, can wipe connection electrode portion 41 inner lateral surfaces simultaneously and be in contact with it.In addition, in this case, since lower to the loading of feeler lever 2 than Fig. 5 (c), so can easily plug feeler lever 2.
The shape of connection electrode portion 41 is not limited to these shapes shown in Figure 5, can set to such an extent that the outgoing direction of going into of accommodating direction and feeler lever 2 of connection electrode portion 41 is intersected.Owing to form connection electrode portion 41 like this; Can positively make the inner surface of feeler lever 2 contact connection electrode portions 41; Simultaneously owing to when accommodating, wiping in inner lateral surfaces is housed in it; So contact resistance value is low, can realize simultaneously stable high being connected of contact resistance value between feeler lever 2 and the connection electrode portion 41.
As other concrete example, as shown in Figure 6, form the front end 2A that is housed in the inner feeler lever 2 of connection electrode portion 41 with respect to the major axis of feeler lever 2.
Owing to be bent to form the front end 2A of feeler lever 2 like this, when being housed in the front end 2A of feeler lever 2 in the connection electrode portion 41, just can wiping connection electrode portion 41 inner surfaces and be in contact with it.
Shown in Figure 6 this feeler lever 2 is crooked that its front end 2A departs from width W apart from the central shaft of feeler lever 2.This width W internal diameter best and connection electrode portion 41 omits together, and this is just can positively contact inner surface because this width W slightly is same as the internal diameter of connection electrode portion 41, can reduce amount of bow (wide) simultaneously.
Fig. 7 representes to use the state of jig for inspecting substrate of the present invention.
Among this Fig. 7 (a), the resettlement section 2A of a plurality of feeler levers 2 is housed in connection electrode portion 41 inside.Though not shown in Fig. 7 (a), be under the situation of crooked shape and tilted configuration feeler lever 2 at the resettlement section of feeler lever 2 2A, when feeler lever 2 is housed in the connection electrode portion 41, be to wipe the inner lateral surfaces contact and in it is housed in.For simplicity, among Fig. 7 feeler lever 2 placed the substantial middle place of connection electrode portion 41.
When accommodating feeler lever 2 in the connection electrode portion 41, feeler lever support 3 or connection electrode body 4 are relatively moved, the resettlement section 2A with feeler lever 2 positively is crimped on the inner lateral surfaces of connection electrode portion 41 thus.
What Fig. 7 (b) was upward represented is that feeler lever support 3 and connection electrode body 4 edges are moved relative to the rectangular direction of the major axis of feeler lever 2, and the resettlement section 2A contact that positively makes feeler lever 2 thus is on the inner lateral surfaces of connection electrode portion 41.For example, shown in Fig. 7 (b), connection electrode body 4 is moved to (the blacking direction of arrow of Fig. 7 (b)) to the paper left, thereby the resettlement section 2A of feeler lever 2 positively is crimped on the inner lateral surfaces of connection electrode portion 41.Perhaps, make feeler lever support 3 right-hand mobile, thereby the resettlement section 2A of feeler lever 2 positively is crimped on the inner lateral surfaces of connection electrode portion 41 to (the hollow out direction of arrow of Fig. 7 (b)) to paper.Like this, the slipping part that the rectangular direction of outgoing direction moves of going into make feeler lever support 3 and/or connection electrode body 4 edges and feeler lever 2 is set, just can makes the resettlement section 2A of feeler lever 2 more stably contact the inner lateral surfaces of connection electrode portion 41 thus.
Fig. 8 representes the embodiment of the slipping part that the connection electrode body has.This slipping part shown in Figure 8 has three first plates 43, second plate 44 and the 3rd plate 45 that constitutes connection electrode body 4.Connection electrode portion 41 connects these three plates, and first plate 43 and the 3rd plate 45 are fixing plates, second plate, 44 formation travel mechanisms.Therefore, shown in Fig. 8 (b), second plate 44 moves, roof pressure connection electrode portion 41 from the side just, the resettlement section 2A of connection electrode portion 41 feeler lever 2 of roof pressure contact from the side with regard to becoming curved shape.
In this connection electrode body 4 shown in Figure 8, use three plates, but be not limited to three, also can form slipping part with more plate.
Below, other embodiments of feeler lever 2 and feeler lever support 3 are described.
Fig. 9 representes other embodiments of feeler lever 2 and feeler lever support 3.In this embodiment, the resettlement section 2A of employed feeler lever 2 is with respect to the major axis (with reference to Fig. 6) of feeler lever 2.The resettlement section 2A of this feeler lever 2 is crooked, but protection portion 36 (through hole) just holds on the resettlement section 2A of feeler lever 2 when not using, and feeler lever 2 is remained rectilinear form.Under the situation of the jig for inspecting substrate that uses this embodiment, upwards push up protection portion 36, feeler lever 2 is just outstanding from protection portion 36, and this moment, the resettlement section 2A owing to feeler lever 2 was bent to form, so resettlement section 2A is just crooked to predetermined direction.
Be installed in this jig for inspecting substrate under the situation on the connection electrode body 4; Connection electrode portion 41 aligned positions of protection portion 36 with connection electrode body 4; With connection electrode body 4 state of contact under; Owing to upwards push up protection portion 36, feeler lever 2 is just accommodated in the connection electrode portion 41, and the inner surface that the resettlement section 2A of while feeler lever 2 is wiping connection electrode portion 41 contacts with it.
Other other embodiments below are described.
Figure 10 representes other other embodiments of feeler lever 2 and feeler lever support 3.In this embodiment, form space S between second support sector 32 or protection portion 36 and the connection electrode body 4.
Among Figure 10, between feeler lever support 3 and connection electrode body 4, form space S, when the resettlement section 2A of feeler lever 2 is accommodated in the connection electrode portion 41, just crooked in this space S.Like this because resettlement section 2A is can be in this space S crooked, just in being housed in connection electrode portion 41 and the resettlement section 2A in the place that contacts with the inner surface of connection electrode portion 41 impose extruding corresponding to its amount of bow.Therefore, resettlement section 2A just stably contacts on the inner surface of connection electrode portion 41.
In addition, in this embodiment, make connection electrode body 4 slippages (moving), thereby make feeler lever 2 stably contact connection electrode portion 41 along the direction of arrow.
The formation of jig for inspecting substrate of the present invention below is described.
The embodiment of jig for inspecting substrate of the present invention is described below.
The embodiment of the jig for inspecting substrate that Figure 11 representes to implement among the present invention.
The represented feeler lever of this embodiment 2 is starting material with tungsten, forms the rod member 21 of long 30mm, diameter 90 μ m; The length of resettlement section 2A is 2mm, forms insulation division 23.
In this embodiment shown in Figure 11, connection electrode body 4 is made up of first plate 43, second plate 44, the 3rd plate 45 and the 4th plate 46, has the slipping part 47 that second plate 44 is moved along transverse direction simultaneously.This first plate 43 and the 3rd plate 45 are fixing plates, the 4th plate 46 as jig for inspecting substrate 1 ' pedestal.
Slipping part 47 can make second plate, 44 move left and right, and this slipping part 47 has the pair of right and left screw mechanism, and adjustment left and right sides screw mechanism just can be adjusted the position of second plate 44.
Among this Figure 11 (a), between second support sector 32 and protection portion 36, be formed with the space, this figure is the state of jig for inspecting substrate 1 ' when not using.
Figure 11 (b) expression be using jig for inspecting substrate 1 ' state.At this moment, second support sector 32 is abutted against with protection portion 36, and the resettlement section 2A of feeler lever 2 is housed in the connection electrode portion 41 simultaneously.Then, the resettlement section 2A of this feeler lever 2 is wiping the inner surface of connection electrode portion 41 and is being in contact with it, thereby can establish conducting state.
This jig for inspecting substrate 1 ' in, about have slipping part 47, after the resettlement section 2A of feeler lever 2 is housed in the connection electrode portion 41, adjustment screw and second plate 44 of connection electrode body 4 is moved.At this moment, cooperate moving of second plate 44, second plate, 44 parts of connection electrode portion 41 become case of bending and feeler lever 2 are crimped on the inner surface of connection electrode portion 41.
In this embodiment; Feeler lever 2 also tilts and is held on by feeler lever support sector 3, in addition, because connection electrode body 4 has slipping part 47; So feeler lever 2 can wiped the inner surface of connection electrode portion 41 and be housed in it, can establish conducting state with its stable contact simultaneously.
Figure 12 representes the mensuration result of the feeler lever resistance that comprises contact resistance of jig for inspecting substrate of the present invention and the inspecting substrate anchor clamps with original electrode structure.In this experiment, state in the time of settling jig for inspecting substrate to become to use has been implemented gold-plated plate to one side as being examined substrate, year put feeler lever 2 examined substrate-side (the opposite side of resettlement section 2A), and push down this and examined substrate.At this moment, measure the lead 42 of connection electrode portion 41 and examined the resistance value between the substrate.Therefore, resistance, the feeler lever 2 of this resistance value contact resistance of comprising connection electrode portion 41 and feeler lever 2 and feeler lever 2 itself and examined the contact resistance of substrate.
What substrate was pushed down in " number of times " shown in Figure 12 representative hits the pressure number of times.
Can know by Figure 12; This resistance value of jig for inspecting substrate of the present invention is in the scope (amplitude of variation 0.15 Ω) of 420～570m Ω; With respect to this, this resistance value with jig for inspecting substrate of original connection motor is in the scope of 1.5～5.5 Ω (amplitude of variation 4 Ω).The present invention compares with original anchor clamps, and contact resistance value is extremely low, and along with hitting the increase of pressing number of times, the fluctuation of contact resistance value is also minimum simultaneously.
Therefore, use anchor clamps of the present invention can reduce contact resistance value, simultaneously; Even under the situation that contact resistance value is handled as modified value, can not produce fluctuation along with hitting the increase of pressing number of times yet, so; Needn't carry out the correction of modified value, just can extremely stably use.
Claims (12)
1. jig for inspecting substrate; The electrical specification of being examined substrate for inspection realizes the base board checking device main body and is arranged on a plurality of substrates on this wiring figure of being examined substrate receiving the electrically conducting between cautious; Wherein, said jig for inspecting substrate has the feeler lever crowd, supports said feeler lever crowd's feeler lever support and is connected the connection electrode body on the said base board checking device main body; This feeler lever crowd is made up of the bar-shaped feeler lever of electric conductivity, and the two ends of this feeler lever have the end of realizing electrically conducting, and a square end portion is crimped to a said substrate and is examined; This connection electrode body possesses connection electrode portion, and this connection electrode portion is in the face of the opposing party end of each feeler lever of said feeler lever crowd; In the said the opposing party end that connects said feeler lever crowd during with said connection electrode body, the part of at least a portion of the lateral circle surface nearby of each said the opposing party end contacts and it is faced mutually said connection electrode portion becomes the electrically conducting state therefrom.
2. jig for inspecting substrate according to claim 1; It is characterized in that said connection electrode portion has the structure of accommodating with said the opposing party end of its said feeler lever of facing mutually, and the conducting state of said feeler lever and said connection electrode portion realizes with the contacting of inner lateral surfaces of this connection electrode portion through the opposing party end of this feeler lever at least.
3. jig for inspecting substrate according to claim 1 and 2, it is characterized in that said connection electrode portion be can with at least a portion shape movingly of said the opposing party end of its said feeler lever of facing mutually.
4. jig for inspecting substrate according to claim 1 and 2 is characterized in that said connection electrode portion is formed tubular.
5. jig for inspecting substrate according to claim 1 and 2, the major axis that it is characterized in that the said relatively feeler lever of said connection electrode portion tilt or are crooked and form.
6. jig for inspecting substrate according to claim 1 and 2, what it is characterized in that said connection electrode portion has edge and a said feeler lever goes out the Inbound slipping part that direction slides that meets at right angles.
7. jig for inspecting substrate according to claim 1, it is characterized in that said feeler lever the said relatively feeler lever in the opposing party end major axis and form.
8. jig for inspecting substrate according to claim 1; It is characterized in that said feeler lever support has first support sector and second support sector; This first support sector has first supporting hole nearby of a square end portion that supports said feeler lever, and this second support sector has second supporting hole nearby of the opposing party end of supporting said feeler lever; Said second support sector is configured to such an extent that be abutted against mutually with said electrode body.
9. jig for inspecting substrate according to claim 1; It is characterized in that said feeler lever support has first support sector and second support sector; This first support sector has first supporting hole nearby of a square end portion that supports said feeler lever, and this second support sector has second supporting hole nearby of the opposing party end of supporting said feeler lever; Said second support sector is configured to such an extent that have predetermined distance with said electrode body.
10. jig for inspecting substrate according to claim 1; It is characterized in that said feeler lever support possesses the protection portion that moves along the long axis direction of this feeler lever; So that when the opposing party who makes said feeler lever contacted said connection electrode portion and uses, this feeler lever was outstanding.
11. jig for inspecting substrate according to claim 1 is characterized in that the scope nearby of said the opposing party end, is the scope that the lateral circle surface of said the opposing party end when said the connection can contact said connection electrode portion at least.
12. the connection electrode portion of a jig for inspecting substrate; This connection electrode portion is connected with feeler lever; And as the component part of connection electrode body; Receive the electrically conducting between cautious in order to realize the base board checking device main body and to be arranged on a plurality of substrates on the wiring figure of being examined substrate, examined the electrical specification of substrate, an end of said feeler lever be crimped on said substrate receive cautious on and its conducting is contacted; Its opposing party end then contacts with said connection electrode portion conducting; And said connection electrode body is connected on this base board checking device main body, when it is characterized in that in the opposing party end that connects said feeler lever with this connection electrode body, and the part of at least a portion of the lateral circle surface nearby of the opposing party end of said feeler lever contacts and it is faced mutually said connection electrode portion.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006135867A JP4041831B2 (en) | 2006-05-15 | 2006-05-15 | Substrate inspection jig and electrode structure of connection electrode portion in this jig |
| JP135867/2006 | 2006-05-15 | ||
| PCT/JP2007/059685 WO2007132739A1 (en) | 2006-05-15 | 2007-05-10 | Substrate inspecting jig, and electrode structure of connecting electrode unit in the jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101443669A CN101443669A (en) | 2009-05-27 |
| CN101443669B true CN101443669B (en) | 2012-01-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007800174904A Expired - Fee Related CN101443669B (en) | 2006-05-15 | 2007-05-10 | Substrate inspecting jig, and electrode structure of connecting electrode unit in the jig |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4041831B2 (en) |
| KR (1) | KR101021744B1 (en) |
| CN (1) | CN101443669B (en) |
| TW (1) | TWI442070B (en) |
| WO (1) | WO2007132739A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009250917A (en) * | 2008-04-10 | 2009-10-29 | Nidec-Read Corp | Tool for substrate inspection and contact for inspection |
| JP5504698B2 (en) * | 2009-06-02 | 2014-05-28 | 日本電産リード株式会社 | Inspection jig and contact for inspection |
| KR101795836B1 (en) * | 2011-02-10 | 2017-11-08 | 니혼덴산리드가부시키가이샤 | Test jig |
| JP2013100994A (en) * | 2011-11-07 | 2013-05-23 | Nidec-Read Corp | Substrate inspection jig, jig base unit and substrate inspection device |
| JP5986397B2 (en) * | 2012-02-28 | 2016-09-06 | 日本電産リード株式会社 | Inspection jig |
| JP2013257195A (en) * | 2012-06-12 | 2013-12-26 | Nidec-Read Corp | Substrate checkup jig and substrate checkup apparatus |
| JP6221358B2 (en) * | 2013-06-04 | 2017-11-01 | 日本電産リード株式会社 | Substrate inspection method and substrate inspection apparatus |
| JP6283929B2 (en) * | 2013-10-08 | 2018-02-28 | 日本電産リード株式会社 | Inspection jig and method for manufacturing inspection jig |
| CN105510758A (en) * | 2015-11-27 | 2016-04-20 | 湖北三江航天红峰控制有限公司 | Device for low resistance conduction |
| KR101656047B1 (en) * | 2016-03-23 | 2016-09-09 | 주식회사 나노시스 | Jig for Circuit Board Inspection |
| CN114325296A (en) | 2020-09-30 | 2022-04-12 | 揖斐电株式会社 | Conduction inspection jig and inspection method of printed wiring board |
| KR102245761B1 (en) * | 2021-01-13 | 2021-04-28 | 엘엠디지털 주식회사 | Printed circuit board inspection jig with multi-grid base |
| KR102649845B1 (en) * | 2023-11-29 | 2024-03-21 | 주식회사 나노시스 | Jig for semiconductor device testing |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1482468A (en) * | 2002-09-13 | 2004-03-17 | 中芯国际集成电路制造（上海）有限公 | Structure and method for testing contact resistance of detecting probe |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH065639Y2 (en) * | 1986-03-20 | 1994-02-09 | 松下電器産業株式会社 | Contact pin |
| JPH0656401B2 (en) * | 1986-12-19 | 1994-07-27 | 東京エレクトロン株式会社 | Inspection equipment |
| DE59810893D1 (en) * | 1997-11-05 | 2004-04-08 | Feinmetall Gmbh | Test head for microstructures with interface |
| JP2001133483A (en) * | 1999-11-04 | 2001-05-18 | Takashi Nansai | Jig for w-stroke printed board inspecting machine |
| JP3899075B2 (en) * | 2002-03-05 | 2007-03-28 | リカ デンシ アメリカ， インコーポレイテッド | Equipment for interfacing electronic packages with test equipment |
-
2006
- 2006-05-15 JP JP2006135867A patent/JP4041831B2/en not_active Expired - Fee Related
-
2007
- 2007-05-10 WO PCT/JP2007/059685 patent/WO2007132739A1/en active Application Filing
- 2007-05-10 CN CN2007800174904A patent/CN101443669B/en not_active Expired - Fee Related
- 2007-05-10 KR KR1020087027510A patent/KR101021744B1/en active IP Right Grant
- 2007-05-15 TW TW096117254A patent/TWI442070B/en not_active IP Right Cessation
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1482468A (en) * | 2002-09-13 | 2004-03-17 | 中芯国际集成电路制造（上海）有限公 | Structure and method for testing contact resistance of detecting probe |
Non-Patent Citations (4)
| Title |
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| JP昭62-153579U 1987.09.29 |
| JP昭63-154971A 1988.06.28 |
| JP特开2001-133483A 2001.05.18 |
| JP特开平11-248745A 1999.09.17 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101443669A (en) | 2009-05-27 |
| TWI442070B (en) | 2014-06-21 |
| KR101021744B1 (en) | 2011-03-15 |
| JP4041831B2 (en) | 2008-02-06 |
| WO2007132739A1 (en) | 2007-11-22 |
| KR20080112365A (en) | 2008-12-24 |
| JP2007309648A (en) | 2007-11-29 |
| TW200815776A (en) | 2008-04-01 |
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