JPH0656401B2 - Inspection equipment - Google Patents

Inspection equipment

Info

Publication number
JPH0656401B2
JPH0656401B2 JP61302944A JP30294486A JPH0656401B2 JP H0656401 B2 JPH0656401 B2 JP H0656401B2 JP 61302944 A JP61302944 A JP 61302944A JP 30294486 A JP30294486 A JP 30294486A JP H0656401 B2 JPH0656401 B2 JP H0656401B2
Authority
JP
Japan
Prior art keywords
pin
printed circuit
circuit board
inspection jig
plate member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61302944A
Other languages
Japanese (ja)
Other versions
JPS63154971A (en
Inventor
隆伸 田原
良治 東
正一 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP61302944A priority Critical patent/JPH0656401B2/en
Publication of JPS63154971A publication Critical patent/JPS63154971A/en
Publication of JPH0656401B2 publication Critical patent/JPH0656401B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、隣接する測定ピンのピッチよりも狭いピッチ
で隣接する基板の接点との電気的接続を行なう検査装置
を提供することにある。
DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention provides an inspection apparatus for making electrical connection with a contact of an adjacent substrate at a pitch narrower than the pitch of adjacent measurement pins. To do.

(従来の技術) 従来、例えばIC等の接点は、0.1インチ(2.54
mm)の所定のピッチで形成されるよう規格化されてお
り、プリント基板の試験測定を行なう検査装置には、こ
の所定ピッチで多数の測定ピンが配列されている。
(Prior Art) Conventionally, for example, a contact point of an IC or the like is 0.1 inch (2.54
mm) is standardized to be formed at a predetermined pitch, and a large number of measuring pins are arranged at the predetermined pitch in an inspection device that performs test measurement of a printed circuit board.

そして、このような所定ピッチ以外のピッチで接点を形
成されたプリント基板の試験測定を行なう場合は、例え
ば第5図に示すようなプリント基板検査治具を用いて試
験測定を行なっている。
When the test measurement is performed on the printed circuit board on which the contacts are formed at a pitch other than the predetermined pitch, the test measurement is performed using a printed circuit board inspection jig as shown in FIG. 5, for example.

このようなプリント基板検査治具は、基板検査装置に
0.1インチの所定ピッチで多数配列された測定用ピン
1のピッチで配列された多数の透孔2aを有し、例えば
アクリル、ポリカーボネート等から構成されるピン側板
部材2と、ピン側板部材2の上方に配置され、プリント
基板3に形成された接点3aの位置に対応して形成され
た透孔4aを備え、例えばアクリル、ポリカーボネート
等から構成される基板側板部材4と、透孔2aおよび透
孔4aに挿入されるプリント基板検査治具用ピン5とか
ら構成されている。
Such a printed board inspection jig has a large number of through holes 2a arranged at a pitch of the measuring pins 1 arranged at a predetermined pitch of 0.1 inch in the board inspection device, and is made of, for example, acrylic, polycarbonate, or the like. A pin side plate member 2 and a through hole 4a which is arranged above the pin side plate member 2 and which corresponds to the position of the contact 3a formed on the printed circuit board 3. The substrate side plate member 4 is configured, and the through hole 2a and the printed circuit board inspection jig pin 5 inserted into the through hole 4a are configured.

なお、プリント基板検査治具用ピン5は、例えば長さ8
1.5mm、直径1.55mm程度の一様な太さのピン
本体5aからなり、上端部に、先端に突起状のテーパ部
を有し例えば長さ2.5mm、直径1.9mm程度の大
径の基板側接続部5bを備え、反対側端部にテーパ状に
凹陥された測定ピン側接続部5cを備えた構成とされて
いる。
The printed circuit board inspection jig pin 5 has, for example, a length of 8
The pin body 5a has a uniform thickness of 1.5 mm and a diameter of about 1.55 mm, and has a projecting taper portion at the top end, for example, a length of 2.5 mm and a diameter of about 1.9 mm. The substrate-side connecting portion 5b having the diameter is provided, and the measuring pin-side connecting portion 5c which is recessed in a tapered shape is provided at the opposite end portion.

そして、プリント基板検査治具用ピン5は、基板側板部
材4の上方から透孔4aに挿入され、透孔2aに挿入さ
れる。このとき、大径の基板側接続部5bは、透孔4a
より大径とされており、例えばプリント基板検査治具を
持上げた時にこの基板側接続部5bが、基板側板部材4
上面に係止されて、プリント基板検査治具用ピン5の脱
落を防止している。
The printed circuit board inspection jig pin 5 is inserted into the through hole 4a from above the board side plate member 4 and then into the through hole 2a. At this time, the large-diameter board-side connecting portion 5b is provided with the through hole 4a.
The diameter is made larger, and for example, when the printed board inspection jig is lifted, the board-side connecting portion 5b becomes
The pin 5 for the printed circuit board inspection jig is prevented from falling off by being locked to the upper surface.

上記構成のプリント基板検査治具では、測定用ピン1の
ピッチと、プリント基板3に形成された接点3aのピッ
チとが異なる場合でも、測定用ピン1と接点3aとの間
にプリント基板検査治具用ピン5が斜めに配置されるこ
とにより、測定用ピン1と接点3aとの電気的接続を行
い、測定可能とするものである。また、プリント基板検
査治具用ピン5は、容易に脱着が可能とされ、種類の異
なるプリント基板3の測定を行なう場合は、接点3aに
対応した透孔4aを備えた基板側板部材4のみを交換す
ることによって測定することができるよう構成されてい
る。
In the printed circuit board inspection jig having the above structure, even when the pitch of the measurement pins 1 and the pitch of the contacts 3a formed on the printed circuit board 3 are different, the printed circuit board inspection jig is provided between the measurement pins 1 and the contacts 3a. By arranging the tool pin 5 obliquely, the measurement pin 1 and the contact 3a are electrically connected to each other to enable measurement. Further, the printed circuit board inspection jig pin 5 can be easily attached and detached, and when measuring different types of printed circuit boards 3, only the board side plate member 4 having the through hole 4a corresponding to the contact 3a is used. It is configured so that it can be measured by exchanging it.

(発明が解決しようとする問題点) しかしながら近年は、高集積化のため、基板に形成され
る接点のピッチは、所定の検査装置の測定ピンの基準ピ
ッチより小さなピッチで形成される場合が多い。上記説
明の従来のプリント基板検査治具では、プリント基板検
査治具用ピンの基板側の端部に、基板側接触部および基
板側板部材に対する係止機構を兼ねた大径の基板側接続
部が形成されているため、隣接するこれらの基板側接続
部が接触し、所定の基準ピッチより小さなピッチで接点
を形成された基板の測定に限界が生じ、例えばピン本体
および基板側接続部を小径化しても、1.27mm程度
のピッチまでしか測定することができないという問題が
ある。
(Problems to be solved by the invention) However, in recent years, due to high integration, the pitch of the contacts formed on the substrate is often smaller than the reference pitch of the measurement pins of a predetermined inspection device. . In the conventional printed circuit board inspection jig described above, a large-diameter board-side connection portion that doubles as a board-side contact portion and a locking mechanism for the board-side plate member is provided at the board-side end of the printed-circuit board inspection jig pin. Since they are formed, the adjacent board-side connection parts come into contact with each other, and there is a limit to the measurement of the board where contacts are formed at a pitch smaller than the predetermined reference pitch. However, there is a problem that it is possible to measure up to a pitch of about 1.27 mm.

本発明は、隣接する検査装置の測定ピンのピッチよりも
狭いピッチで隣接する基板の接点との電気的接続を行な
う検査装置を提供することにある。
It is an object of the present invention to provide an inspection device that electrically connects with a contact of an adjacent substrate at a pitch narrower than the pitch of measurement pins of the adjacent inspection device.

(問題を解決するための手段) 所定ピッチで格子状に配列された測定ピンと基板接点と
の電気的接続を行なうプリント基板検査治具を具備した
検査装置において、 前記プリント基板検査治具は、 前記測定ピンのピッチで配列された多数の透孔を有する
測定ピン側板部材と、 基板の接点位置に対応して配列された透孔を有する基板
側板部材と、 前記基板側を小径部とされ前記測定ピン側を大径部とさ
れたピン本体と、前記測定ピン側板部材の透孔に押圧挿
入可能な如く僅かに前記ピン本体の中間部側壁から突出
し、該ピン本体の前記ピン側板部材からの脱落を防止す
る係止機構と、前記測定ピン側の端面をテーパ状に凹陥
して形成され前記測定ピンの頂部と係合される測定ピン
側接続部と、を具備したプリント基板検査治具用ピンと を備えたことを特徴とする検査装置。
(Means for Solving the Problem) In an inspection device including a printed circuit board inspection jig for electrically connecting the measuring pins arranged in a grid pattern at a predetermined pitch and the substrate contact, the printed circuit board inspection jig is The measuring pin side plate member having a large number of through holes arranged at the pitch of the measuring pin, the substrate side plate member having the through holes arranged corresponding to the contact position of the substrate, The pin body having a large diameter portion on the pin side, and the pin body slightly protruding from the side wall of the intermediate portion of the pin body so that the pin body can be pressed and inserted into the through hole of the measurement pin side plate member, and the pin body falls off from the pin side plate member. A pin for a printed circuit board inspection jig, comprising: Equipped with Inspection and wherein the.

ピン本体は、小径部から大径部へ向けて徐々に大径とさ
れた特許請求の範囲第1項記載の検査装置。
The inspection apparatus according to claim 1, wherein the pin body has a diameter gradually increasing from the small diameter portion toward the large diameter portion.

大径部先端は、外側部が先端部へ向けて小径とされ、内
側部がテーパ状に凹陥された形状である特許請求の範囲
第1項記載の検査装置。
The inspection device according to claim 1, wherein the tip of the large-diameter portion has a shape in which the outer portion has a smaller diameter toward the tip portion, and the inner portion has a concave recess.

(作用) 本発明の検査装置によれば、プリント基板検査治具用ピ
ンの被試験基板側が小径部とされ、大径な部位がないの
で、小ピッチで隣接する接点を形成された基板でも、試
験測定を行なうことができる。
(Operation) According to the inspection device of the present invention, the printed circuit board inspection jig pin has a small diameter portion on the substrate under test side, and there is no large diameter portion. Therefore, even with a substrate formed with adjacent contacts at a small pitch, Test measurements can be made.

また、測定ピン側板部材の透孔に押圧挿入可能な如く僅
かにピン本体の中間部側壁から突出するように設けられ
た係止機構によって、ピン側板部材に係止されるので、
プリント基板検査治具を持ち上げた際等に、プリント基
板検査治具用ピンが抜けてしまうようなことを防止する
ことができ、さらに、プリント基板検査治具用ピンの測
定ピン側の端面が、テーパ状に凹陥して形成された測定
ピン側接続部とされているので、例えば、所定ピッチ以
外の測定のために基板検査治具用ピンが斜めに測定ピン
と接触するような場合でも、ピン同士がずれてしまうこ
とを防止することができ、電気的接触を確保することが
できる。
Further, since it is locked to the pin side plate member by the locking mechanism provided so as to slightly protrude from the intermediate portion side wall of the pin body so that it can be press-inserted into the through hole of the measurement pin side plate member,
It is possible to prevent the pins for the printed circuit board inspection jig from coming off when the printed circuit board inspection jig is lifted, and moreover, the end surface of the printed circuit board inspection jig pin on the measurement pin side is Since the measurement pin side connection part is formed by denting in a taper shape, for example, even when the board inspection jig pin obliquely contacts the measurement pin for measurement other than the predetermined pitch, It is possible to prevent the slippage and the electrical contact can be secured.

(実施例) 以下本発明の検査装置を図面を参照して一実施例につい
て説明する。
(Embodiment) An embodiment of the inspection apparatus of the present invention will be described below with reference to the drawings.

第2図に示すプリント基板検査治具用ピン10は、例え
ばBeCu等からなり表面に例えばNi、Rh等のメッ
キ処理が施されたピン本体11と、このピン本体11か
らわずかに突出する係止機構12とから構成されてい
る。
The printed circuit board inspection jig pin 10 shown in FIG. 2 includes a pin body 11 made of, for example, BeCu and having a surface plated with Ni, Rh, and the like, and a lock slightly protruding from the pin body 11. And the mechanism 12.

ピン本体11は、全長例えば82.5mmとされ、上端
から例えば42.5mm程度が直径例えば0.77mm
の小径部11aとされ、下端から例えば21.5mmが
直径例えば1.55mmの大径部11bとされ、この間
で小径部11aから大径部11bへ向けて徐々に大径と
されている。また、小径部11aの先端には、例えば9
0度等のテーパ状に突出する基板側接続部11cが形成
されており、反対側の大径部11bの先端には、外周部
直径が例えば1.8mmとされ、内側に例えば直径1.
4mm、90度等のテーパ状に凹陥された測定ピン側接
続部11dが形成されている。
The pin body 11 has a total length of, for example, 82.5 mm, and a diameter of, for example, about 42.5 mm from the upper end is, for example, 0.77 mm.
21.5 mm from the lower end to a large diameter portion 11b having a diameter of, for example, 1.55 mm, and the diameter gradually increases from the small diameter portion 11a toward the large diameter portion 11b. Further, at the tip of the small diameter portion 11a, for example, 9
A substrate-side connecting portion 11c protruding in a taper shape of 0 degree or the like is formed, and a diameter of the outer peripheral portion is 1.8 mm at the tip of the large diameter portion 11b on the opposite side.
A measuring pin side connecting portion 11d is formed which is recessed in a taper shape of 4 mm, 90 degrees or the like.

また、係止機構12は、ピン本体11下端から例えば1
0mmの位置に幅3mmに渡って例えばローレット加工
によって形成された突出部から構成され、その外周直径
は、例えば1.77mm程度とされている。上記機構の
プリント基板検査治具用ピン10は、第1図に示すプリ
ント基板検査治具15に配置される。
Further, the locking mechanism 12 is, for example, 1 from the lower end of the pin body 11.
The protrusion is formed at a position of 0 mm over a width of 3 mm by, for example, knurling, and the outer peripheral diameter thereof is, for example, about 1.77 mm. The printed circuit board inspection jig pin 10 of the above mechanism is arranged on the printed circuit board inspection jig 15 shown in FIG.

プリント基板検査治具15は、検査装置に0.1インチ
の所定ピッチで多数配列された測定用ピン16のピッチ
で配列された多数の透孔17aを有し、例えばアクリ
ル、ポリカーボネート等から構成されるピン側板部材1
7と、ピン側板部材17の上方に配置され、プリント基
板18に形成された接点18aの位置に対応して形成さ
れた透孔19aを備え、例えばアクリル、ポリカーボネ
ート等から構成される基板側板部材19を備えている。
なお、透孔17aは一様に直径1.75mmとされてお
り、透孔19aの直径は接点18aのピッチにより異な
り、少なくとも、プリント基板検査治具用ピン10が配
置され部分の透孔19aは、直径0.97mmとされて
いる。
The printed circuit board inspection jig 15 has a large number of through holes 17a arranged at the pitch of the measuring pins 16 arranged at a predetermined pitch of 0.1 inch in the inspection device, and is made of, for example, acrylic, polycarbonate or the like. Pin side plate member 1
7 and a through hole 19a which is arranged above the pin side plate member 17 and corresponds to the position of the contact 18a formed on the printed circuit board 18, and is made of, for example, acrylic or polycarbonate. Is equipped with.
The through holes 17a have a uniform diameter of 1.75 mm, and the diameter of the through holes 19a varies depending on the pitch of the contact points 18a, and at least the through holes 19a where the printed circuit board inspection jig pins 10 are arranged are The diameter is 0.97 mm.

そして、プリント基板検査治具用ピン10は、ピン側板
部材17の下方から透孔17a内に挿入され、透孔17
aに対応する透孔19aに挿入される。この時、係止機
構12は、透孔17aよりわずかに突出しているため、
プリント基板検査治具用ピン10の下部を押圧すること
により透孔17aを貫通するように挿入され、挿入後
は、ピン側板部材17の上面に係止されて、プリント基
板検査治具用ピン10のプリント基板検査治具15から
の脱落を防止する。また、同様にして上部から押圧する
ことによって、プリント基板検査治具15から取り外す
ことができる。
The printed circuit board inspection jig pin 10 is inserted into the through hole 17a from below the pin side plate member 17, and
It is inserted into the through hole 19a corresponding to a. At this time, since the locking mechanism 12 slightly protrudes from the through hole 17a,
The lower portion of the printed circuit board inspection jig pin 10 is inserted so as to penetrate the through hole 17a, and after the insertion, the printed wiring board inspection jig pin 10 is locked to the upper surface of the pin side plate member 17 and the printed circuit board inspection jig pin 10 is inserted. Of the printed circuit board inspection jig 15 is prevented. Further, similarly, by pressing from the upper side, it can be removed from the printed circuit board inspection jig 15.

こうして、プリント基板検査治具15に配置されたプリ
ント基板検査治具用ピン10は、透孔17aと透孔19
aとの間に斜めに配置されるとともに、主に小径部11
aの部分で撓み、測定用ピン16と接点18aとの電気
的接続を行い、基板18の試験測定が行われる。
In this way, the printed circuit board inspection jig pin 10 arranged on the printed circuit board inspection jig 15 has the through holes 17 a and the through holes 19 a.
It is arranged obliquely with respect to a, and mainly the small diameter portion 11
The portion a is bent and the measurement pin 16 and the contact 18a are electrically connected to each other, and the test measurement of the substrate 18 is performed.

上記構成のこの実施例のプリント基板検査治具15で
は、基板側接続部に大径な部位がないため、例えば1.
27mm未満の少ピッチで接点18aを形成された基板
18でも、隣接するプリント基板検査治具用ピン10が
接触することがなく、試験測定を行なうことができる。
In the printed circuit board inspection jig 15 of this embodiment having the above-mentioned configuration, since there is no large-diameter portion in the board-side connecting portion, for example, 1.
Even with the board 18 on which the contact points 18a are formed at a small pitch of less than 27 mm, the test measurement can be performed without the adjacent printed board inspection jig pins 10 coming into contact with each other.

なお、第3図ないし第4図に示すように、測定ピン側接
続部11dを、外側部が先端部へ向けて小径とされ、内
側部がテーパ状に凹陥された形状とすることにより、測
定装置の測定ピン先端が、突出した形状とされたもので
も、凹陥された形状とされたものでも、どちらの形状の
ものにでも使用することができる。また係止部12は、
ローレット加工により形成したが、例えばピン本体に溝
を形成し、この溝にOリング等を配置して構成してもよ
い。
It should be noted that, as shown in FIGS. 3 to 4, the measurement pin side connection portion 11d has a shape in which the outer portion has a small diameter toward the tip portion, and the inner portion has a tapered concave shape, so that the measurement is performed. The measuring pin tip of the device can be used either in a protruding shape, in a concave shape, or in any shape. Also, the locking portion 12
Although it is formed by knurling, for example, a groove may be formed in the pin body and an O-ring or the like may be arranged in this groove.

[発明の効果] 本発明の検査装置によれば、検査治具用ピンの被測定基
板側の隣接するピンとのピッチが、測定ピン側の隣接す
るピンとのピッチよりも小さいので、測定ピンのピッチ
よりも小さい基板の接点の試験測定を行なうことができ
る。
EFFECTS OF THE INVENTION According to the inspection device of the present invention, the pitch of the inspection jig pins with the adjacent pins on the measured substrate side is smaller than the pitch with the adjacent pins on the measurement pin side. Test measurements of smaller substrate contacts can be made.

また、測定ピン側板部材の透明に押圧挿入可能な如く僅
かにピン本体の中間部側壁から突出するように設けられ
た係止機構によって、ピン側板部材に係止されるので、
プリン基板検査治具を持ち上げた際等に、プリント基板
検査治具用ピンが抜けてしまうようなことを防止するこ
とができ、さらに、プリント基板検査治具用ピンの測定
ピン側の端面が、テーパ状に凹陥して形成された測定ピ
ン側接続部とされているので、例えば、所定ピッチ以外
の測定のために基板検査治具用ピンが斜めに測定ピンと
接触するような場合でも、ピン同士がずれてしまうこと
を防止することができ、電気的接触を確保することがで
きる。
Further, since the measuring pin side plate member is locked to the pin side plate member by the locking mechanism provided so as to slightly protrude from the intermediate portion side wall of the pin main body so that the measuring pin side plate member can be transparently pressed and inserted,
It is possible to prevent the pins for the printed board inspection jig from coming off when the pudding board inspection jig is lifted up, and moreover, the end surface on the measurement pin side of the printed board inspection jig pins is Since the measurement pin side connection part is formed by denting in a taper shape, for example, even when the board inspection jig pin obliquely contacts the measurement pin for measurement other than the predetermined pitch, It is possible to prevent the slippage and the electrical contact can be secured.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例のプリント基板検査治具を示
す縦断面図、第2図はプリント基板検査治具用ピンを示
す側面図、第3図ないし第4図は第2図に示すプリント
基板検査治具用ピンの変型例の要部を示す側面図、第5
図は従来のプリント基板検査治具を示す縦断面図であ
る。 10……プリント基板検査治具用ピン、11……ピン本
体、11a……小径部、11b……大径部、12……係
止機構、15……プリント基板検査治具、16……測定
ピン、17……ピン側板部材、17a……透孔、18…
…プリント基板、18a……接点、19……基板側板部
材、19a……透孔。
FIG. 1 is a longitudinal sectional view showing a printed circuit board inspection jig according to an embodiment of the present invention, FIG. 2 is a side view showing pins for the printed circuit board inspection jig, and FIGS. 3 to 4 are shown in FIG. The side view which shows the principal part of the modification of the pin for printed circuit board inspection jigs shown, 5th
FIG. 1 is a vertical sectional view showing a conventional printed circuit board inspection jig. 10 ... pin for printed circuit board inspection jig, 11 ... pin body, 11a ... small diameter part, 11b ... large diameter part, 12 ... locking mechanism, 15 ... printed circuit board inspection jig, 16 ... measurement Pin, 17 ... Pin side plate member, 17a ... Through hole, 18 ...
... Printed circuit board, 18a ... Contact, 19 ... Board side plate member, 19a ... Through hole.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】所定ピッチで格子状に配列された測定ピン
と基板接点との電気的接続を行なうプリント基板検査治
具を具備した検査装置において、 前記プリント基板検査治具は、 前記測定ピンのピッチで配列された多数の透孔を有する
測定ピン側板部材と、 基板の接点位置に対応して配列された透孔を有する基板
側板部材と、 前記基板側を小径部とされ前記測定ピン側を大径部とさ
れたピン本体と、前記測定ピン側板部材の透孔に押圧挿
入可能な如く僅かに前記ピン本体の中間部側壁から突出
し、該ピン本体の前記ピン側板部材からの脱落を防止す
る係止機構と、前記測定ピン側の端面をテーパ状に凹陥
して形成され前記測定ピンの頂部と係合される測定ピン
側接続部と、を具備したプリント基板検査治具用ピンと を備えたことを特徴とする検査装置。
1. An inspection apparatus comprising a printed circuit board inspection jig for electrically connecting measuring pins arranged in a grid at a predetermined pitch and substrate contacts, wherein the printed circuit board inspection jig has a pitch of the measuring pins. A measurement pin side plate member having a large number of through holes arranged in a line, a board side plate member having a through hole arranged corresponding to the contact position of the board, and a small diameter portion on the board side and a large measurement pin side on the measurement pin side. A pin body having a diameter portion and a member for slightly protruding from the side wall of the intermediate portion of the pin body so that the pin body can be pressed and inserted into the through hole of the measurement pin side plate member, and prevents the pin body from falling off from the pin side plate member. A pin for a printed circuit board inspection jig, which includes: a stop mechanism; Characterized by Inspection equipment.
【請求項2】ピン本体は、小径部から大径部へ向けて徐
々に大径とされた特許請求の範囲第1項記載の検査装
置。
2. The inspection device according to claim 1, wherein the pin body has a diameter gradually increasing from the small diameter portion toward the large diameter portion.
【請求項3】大径部先端は、外側部が先端部へ向けて小
径とされ、内側部がテーパ状に凹陥された形状である特
許請求の範囲第1項記載の検査装置。
3. The inspection apparatus according to claim 1, wherein the tip of the large-diameter portion has a shape in which the outer portion has a smaller diameter toward the tip portion and the inner portion is recessed in a tapered shape.
JP61302944A 1986-12-19 1986-12-19 Inspection equipment Expired - Lifetime JPH0656401B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61302944A JPH0656401B2 (en) 1986-12-19 1986-12-19 Inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61302944A JPH0656401B2 (en) 1986-12-19 1986-12-19 Inspection equipment

Publications (2)

Publication Number Publication Date
JPS63154971A JPS63154971A (en) 1988-06-28
JPH0656401B2 true JPH0656401B2 (en) 1994-07-27

Family

ID=17915019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61302944A Expired - Lifetime JPH0656401B2 (en) 1986-12-19 1986-12-19 Inspection equipment

Country Status (1)

Country Link
JP (1) JPH0656401B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3595102B2 (en) * 1997-03-17 2004-12-02 株式会社日本マイクロニクス Inspection head for flat test object
DE19939955A1 (en) * 1999-08-23 2001-03-01 Atg Test Systems Gmbh Test pin for a raster adapter of a device for testing printed circuit boards
JP3505495B2 (en) * 2000-09-13 2004-03-08 日本電産リード株式会社 Inspection jig for substrate inspection, substrate inspection device provided with the inspection jig, and method of assembling inspection jig for substrate inspection
JP4041831B2 (en) * 2006-05-15 2008-02-06 日本電産リード株式会社 Substrate inspection jig and electrode structure of connection electrode portion in this jig

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4774462A (en) * 1984-06-11 1988-09-27 Black Thomas J Automatic test system
JPS61190867U (en) * 1985-05-20 1986-11-27

Also Published As

Publication number Publication date
JPS63154971A (en) 1988-06-28

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